WO2018004121A1 - Capteur capacitif - Google Patents

Capteur capacitif Download PDF

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Publication number
WO2018004121A1
WO2018004121A1 PCT/KR2017/004412 KR2017004412W WO2018004121A1 WO 2018004121 A1 WO2018004121 A1 WO 2018004121A1 KR 2017004412 W KR2017004412 W KR 2017004412W WO 2018004121 A1 WO2018004121 A1 WO 2018004121A1
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WO
WIPO (PCT)
Prior art keywords
electrode
block
vertical electrode
electrodes
vertical
Prior art date
Application number
PCT/KR2017/004412
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English (en)
Korean (ko)
Inventor
김민철
Original Assignee
주식회사 로보터스
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Publication of WO2018004121A1 publication Critical patent/WO2018004121A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance

Definitions

  • the present invention relates to a capacitive sensor, and more particularly, to a capacitive sensor that detects a six-axis force / torque using a change in capacitance.
  • Conventional force / torque sensors use a method of sensing or measuring force / torque using a strain gauge.
  • a sensor using a strain gauge is composed of a pair of external connectors to which an external force is applied, an elastic body connecting the pair of external connectors and a strain gauge attached to the elastic body to measure the amount of deformation of the elastic body.
  • the strain gauge detects or measures an external force by sensing a resistance that changes according to the amount of deformation of the elastic body deformed by an external force applied to an external connector.
  • Sensors using strain gauges are manufactured by attaching a large number of strain gauges to an elastic body. In this process, the manufacturing cost increases, and after a long time, the adhesive used to bond the strain gauges is cured to damage the adhesive. Problems such as this easily caused often occurred.
  • the problem to be solved by the present invention is to provide a capacitive sensor with a simpler structure lowering the manufacturing difficulty and improved durability.
  • the capacitive sensor according to the embodiment of the present invention for solving the above problems, the upper block, the lower block, a plurality of elastic support for elastically supporting the upper block and the lower block, perpendicular to the lower surface of the upper block
  • An upper vertical electrode formed to have a surface
  • a lower vertical electrode formed to have a surface perpendicular to an upper surface of the lower block, and disposed to face the upper vertical electrode so that at least a portion thereof overlaps the upper vertical electrode and the upper vertical electrode
  • the lower vertical electrode as part of a circuit, wherein a change in capacitance between the upper vertical electrode and the lower vertical electrode is changed by a force or torque applied to at least one of the upper block and the lower block.
  • An electronic circuit that outputs a corresponding signal.
  • Simple construction reduces manufacturing difficulty, improves durability and more accurately senses 6-axis force / torque.
  • FIG. 1 is an exploded perspective view showing a capacitive sensor according to a first embodiment of the present invention.
  • FIG. 2 is a perspective view illustrating a bottom surface of an upper block of a capacitive sensor according to a first embodiment of the present invention.
  • FIG 3 is a view showing a lower surface of the upper block and the upper surface of the lower block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 4 is a view schematically showing the initial positions of the upper vertical electrode and the lower vertical electrode of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 5 is a view schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode changed by an X-direction force Fx acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 6 is a view schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode changed by the Y-direction force Fy acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 7 is a view schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode changed by a Z-direction torque Tz acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 8 is a view schematically showing initial positions of an upper horizontal electrode and a lower horizontal electrode of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 9 is a view schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode changed by a Z direction force Fz acting on an upper block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 10 is a view schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode which are changed by the X-direction torque Tx acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 11 is a view schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode changed by the Y-direction torque Ty acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • FIG. 12 is an exploded perspective view schematically illustrating an upper block and a lower block of a capacitive sensor according to a second embodiment of the present invention.
  • FIG. 13 is a perspective view illustrating an assembled state of an upper block and a lower block of a capacitive sensor according to a second embodiment of the present invention.
  • FIG. 14 is an exploded perspective view schematically illustrating a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a third embodiment of the present invention.
  • FIG. 15 is a perspective view illustrating an assembled state of an upper block and a lower block of a capacitive sensor according to a third embodiment of the present invention.
  • 16 is an exploded perspective view schematically illustrating a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a fourth embodiment of the present invention.
  • An capacitive sensor includes an upper block, a lower block, a plurality of elastic supports elastically supporting the upper block and the lower block, and an upper portion formed to have a surface perpendicular to a lower surface of the upper block.
  • a lower vertical electrode and a lower vertical electrode formed to have a surface perpendicular to an upper surface of the lower block and disposed to face the upper vertical electrode such that the upper vertical electrode overlaps the upper vertical electrode, and the upper vertical electrode and the lower vertical electrode; Included as part of the circuit, and outputs a signal corresponding to a change in capacitance (capacitance) between the upper vertical electrode and the lower vertical electrode that is changed by a force or torque applied to at least one of the upper block and the lower block It includes an electronic circuit.
  • FIG. 1 is an exploded perspective view showing a capacitive sensor according to a first embodiment of the present invention
  • Figure 2 is a perspective view showing a lower surface of the upper block of the capacitive sensor according to a first embodiment of the present invention
  • 3 is a view showing a lower surface of the upper block and the upper surface of the lower block of the capacitive sensor according to the first embodiment of the present invention.
  • the capacitive sensor 1 includes a housing 10, an upper block 20, a lower block 30, and elastic supports 41, 42, 43. ).
  • the housing 10 includes a body 11 defining an accommodation space 14 therein. At least a portion of the upper block 20, the elastic supports 41, 42, and 43, and the lower block 30 may be accommodated in the accommodation space 14.
  • the body 11 may be combined with the lower block 30, in which case the lower end of the body 11 is in contact with the top of the base plate 31 of the lower block 30 or surrounds the side of the base plate 31. Can be combined.
  • a plurality of first upper block fixing holes 12a, 12b and 12c and a plurality of first elastic support fixing holes 13a, 13b and 13c may be formed at an upper end of the body 11.
  • the first upper block fixing holes 12a, 12b, and 12c are spaces into which a fixing member (not shown, for example, a screw) for fixing the upper block 20 to the housing 10 is inserted, and the first elastic support is fixed.
  • the holes 13a, 13b, 13c are spaces into which fixing members (not shown, for example, screws) are inserted to fix the elastic supports 41, 42, 43 to the housing 10.
  • the upper block 20 includes a printed circuit board (PCB) 21 on which electronic circuits are printed.
  • PCB printed circuit board
  • the plurality of second upper block fixing holes 21a, 21b, and 21c corresponding to the plurality of first upper block fixing holes 12a, 12b, and 12c are formed in the PCB 21.
  • the second upper block fixing holes 21a, 21b and 21c are spaces in which the fixing member inserted through the first upper block fixing holes 12a, 12b and 12c is inserted.
  • the upper block 20 is fixed to the housing 10 by the fixing member, and moves together with the housing 10.
  • a plurality of upper vertical electrodes 23a, 23b and 23c and a plurality of upper horizontal electrodes 24a, 24b and 24c are formed on the lower surface of the PCB 21.
  • the upper vertical electrodes 23a, 23b, and 23c protrude from the lower surface to have a surface perpendicular to the lower surface, and the upper horizontal electrodes 24a, 24b and 24c are parallel to the lower surface or formed on the same plane. It is formed to have.
  • the plurality of upper vertical electrodes 23a, 23b, and 23c may be arranged at equal intervals.
  • three upper vertical electrodes 23a, 23b, and 23c are disposed radially at intervals of 120 degrees, but four or more upper vertical electrodes may be disposed according to the exemplary embodiment.
  • the plurality of upper horizontal electrodes 24a, 24b, 24c may also be arranged at equal intervals.
  • three upper horizontal electrodes 24a, 24b, and 24c are arranged radially at intervals of 120 degrees.
  • four or more upper horizontal electrodes may be arranged according to the exemplary embodiment.
  • the upper vertical electrodes 23a, 23b and 23c and the upper horizontal electrodes 24a, 24b and 24c may be provided in different numbers.
  • the plurality of upper vertical electrodes 23a, 23b, 23c and the plurality of upper horizontal electrodes 24a, 24b, 24c may be arranged in a manner other than radial.
  • three electrodes may be arranged to form a substantially triangular shape, or four electrodes may be arranged to form a square shape.
  • the elastic support (41, 42, 43) is provided in plurality. Although three elastic supports 41, 42, and 43 are illustrated in the present embodiment, the number of elastic supports 41, 42, and 43 may vary depending on the embodiment.
  • the three elastic supports 41, 42, 43 may have the same structure, and for the convenience of description, one elastic support 41 will be described in detail, and the description of the other elastic supports 42, 43 will be described. Omit.
  • the elastic support 41 includes an upper support end 41a, an upper rod 41b, an elastic portion 41c, a lower rod 41d, and a lower support end 41e.
  • the upper support end 41a is coupled to the housing 10.
  • a second elastic support fixing hole 41f is formed in the upper support end 41a.
  • the second elastic support fixing hole 41f is formed to correspond to the first elastic support fixing hole 13c, and a separate fixing member is formed as the first elastic support fixing hole 13c and the second elastic support fixing hole 41f. It is inserted to fix the elastic support 41 to the housing (10).
  • the upper rod 41b extends downward from the center portion of the upper support end 41a to connect the upper support end 41a and the elastic portion 41c.
  • the elastic portion 41c may have a ring shape to facilitate elastic deformation by external force. According to the exemplary embodiment, the shape of the elastic part 41c may be variously modified.
  • the lower rod 41d and the lower support end 41e are formed symmetrically with the upper support end 41a and the upper rod 41b about the elastic part 41c.
  • a third elastic support fixing hole 41g is formed in the lower support end 41e.
  • the third elastic support fixing hole 41g is a space in which a fixing member (not shown) for fixing the lower supporting end 41e to the lower block 30 is inserted.
  • the lower block 30 includes a base plate 31 and a lower horizontal electrode 31a protruding from an upper surface of the base plate 31.
  • the lower horizontal electrode 31a forms an upper surface of the lower block 30.
  • the lower horizontal electrode 31a is configured as one plate facing the plurality of upper horizontal electrodes 24a, 24b, and 24c. It may be composed of a plurality of lower horizontal electrodes separated from each other to correspond one-to-one.
  • the lower horizontal electrode 31a is parallel with the upper horizontal electrodes 24a, 24b, and 24c and at least partially overlaps. Accordingly, each of the upper horizontal electrodes 24a, 24b, and 24c functions as a capacitor having the lower horizontal electrode 31a and air as a dielectric layer, and the lower horizontal electrode 31a and the upper horizontal electrodes 24a, 24b, The capacitor composed of 24c) becomes part of the electronic circuit formed on the PCB 21. In some embodiments, a separate dielectric may be interposed between the upper horizontal electrodes 24a, 24b, and 24c and the lower horizontal electrode 31a.
  • the lower block 30 includes a plurality of electrode grooves 32a, 32b, and 32c recessed from the lower horizontal electrode 31a to the base plate 31.
  • the plurality of electrode grooves 32a, 32b and 32c respectively correspond to the positions of the plurality of upper vertical electrodes 23a, 23b and 23c and are formed to accommodate at least a portion of the plurality of upper vertical electrodes 23a, 23b and 23c. .
  • the upper vertical electrodes 23a, 23b, and 23c do not contact the bottom and side surfaces of the electrode grooves 32a, 32b, and 32c.
  • the surface facing the upper vertical electrodes 23a, 23b and 23c becomes the lower vertical electrodes 33a, 33b and 33c.
  • the lower vertical electrodes 33a, 33b, 33c are formed to have a surface perpendicular to the lower horizontal electrode 31a, which is the upper surface of the lower block 30, and at least partially overlap the upper vertical electrodes 23a, 23b, 23c. do.
  • Each of the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c functions as a capacitor having air as a dielectric layer, and the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes.
  • the capacitor composed of the vertical electrodes 33a, 33b, 33c becomes part of the electronic circuit formed on the PCB 21.
  • a separate dielectric may be interposed between the upper vertical electrodes 23a, 23b and 23c and the lower vertical electrodes 33a, 33b and 33c.
  • a plurality of elastic support receiving grooves (34a, 34b, 34c) is formed on the upper surface of the base plate (31).
  • the elastic support receiving grooves 34a, 34b, and 34c are spaces in which the lower support ends 41e of the elastic supports 41, 42, and 43 are inserted, and are formed to correspond to the positions of the elastic supports 41, 42, and 43. .
  • Fourth elastic support fixing holes 35a, 35b, and 35c are formed in each of the elastic support receiving grooves 34a, 34b, and 34c.
  • the fourth elastic support fixing holes 35a, 35b, and 35c are formed to correspond to the third elastic support fixing holes 41g, so that a separate fixing member is provided with the third elastic support fixing holes 41g and the fourth elastic support fixing holes. Inserted into (35a, 35b, 35c) to fix the elastic support (41, 42, 43) to the lower block (30).
  • the elastic supports 41, 42, and 43 may elastically support the housing 10 and the lower block 30. Since the upper block 20 is installed to be fixed to the housing 10, as a result, the elastic supports 41, 42, and 43 elastically support the upper block 20 and the lower block 30.
  • the upper block 20 moves integrally with the housing 10, so that the upper block 20 moves relative to the lower block 30.
  • the lower block 30 moves relative to the upper block 20.
  • the gap between the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c changes, and the upper horizontal electrode
  • the interval between the 24a, 24b, 24c and the lower horizontal electrode 31a changes.
  • the upper block 20 and the lower block 30 are moved relative to each other by an external force, so that the gap between the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c and the upper horizontal portion.
  • the gap between the electrodes 24a, 24b, 24c and the lower horizontal electrode 31a changes, the electrostatic capacitance of the capacitor formed by the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c.
  • the capacitance changes, and the capacitance of the capacitor formed by the upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrode 31a changes.
  • the capacitive sensor 1 senses information about the force components Fx, Fy, and Fz and the torque components Tx, Ty, and Tz acting in three axes using the changing capacitance. .
  • the electronic circuit may be provided with a capacitance between the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c and between the upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrodes 31a. It may be an electronic circuit that outputs each capacitance.
  • the signal output from the electronic circuit may include information about the force components (Fx, Fy, Fz) and the torque components (Tx, Ty, Tz) acting in the three-axis direction.
  • An arithmetic unit for calculating the force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in the three-axis direction on the basis can be included.
  • FIGS. 4 to 11 illustrate the relative movement between the electrodes of the capacitive sensor according to the first embodiment, and unnecessary configuration is omitted, and the upper block 20 and the lower block 30 are circular. Simplified.
  • FIG. 4 is a view schematically showing the initial positions of the upper vertical electrode and the lower vertical electrode of the capacitive sensor according to the first embodiment of the present invention.
  • the capacitive sensor 1 includes three upper vertical electrodes 23a, 23b, and 23c disposed at 120 degree intervals, and three lower vertical electrodes.
  • 33a, 33b, and 33c are provided to correspond in one-to-one correspondence with the three upper vertical electrodes 23a, 23b, and 23c.
  • the three upper vertical electrodes 23a, 23b, 23c are supported by the upper block 20, and the three lower vertical electrodes 33a, 33b, 33c are the base plate 31 of the lower block 30. Is formed.
  • the three upper vertical electrodes 23a, 23b, and 23c and the three lower vertical electrodes 33a and 33b. , 33c) are present at approximately constant intervals in parallel.
  • the upper vertical electrode 33a parallel to the X axis in FIG. 4 is referred to as a first upper vertical electrode, and the upper vertical electrode located in a +120 degree direction from the first upper vertical electrode 23a.
  • the electrode 23b is referred to as the second upper vertical electrode, and the upper vertical electrode 23c positioned in the ⁇ 120 degree direction from the first upper vertical electrode 23a is referred to as a third upper vertical electrode.
  • the lower vertical electrode 33a facing the first upper vertical electrode 23a is the first lower vertical electrode
  • the lower vertical electrode 33b facing the second upper vertical electrode 23b is the second lower vertical electrode
  • the lower vertical electrode 33c facing the third upper vertical electrode 23c is referred to as a third lower vertical electrode.
  • FIG. 5 is a view schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode changed by an X-direction force Fx acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • the upper block 20 moves slightly in the X direction together with the housing 10.
  • the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a does not change, and the second upper vertical electrode 23b and the second lower vertical electrode 33b do not change.
  • the distance is shortened, and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c becomes long.
  • the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a hardly changes (the first upper vertical electrode 23a and the first lower vertical electrode 33a are not changed).
  • the capacitance may be slightly reduced
  • the capacitance C2 between the second upper vertical electrode 23b and the second lower vertical electrode 33b is increased
  • the third upper vertical electrode is increased.
  • the capacitance C3 between 23c and the third lower vertical electrode 33c decreases.
  • the distance between the second upper vertical electrode 23b and the second lower vertical electrode 33b becomes shorter, and the third upper vertical electrode 23c And the distance between the third lower vertical electrode 33c become longer.
  • the capacitance C2 between Fx and the second upper vertical electrode 23b and the second lower vertical electrode 33b is proportional, and Fx and the third upper vertical electrode 23c and the third lower vertical electrode 33c are proportional to each other.
  • the capacitance C3 between) becomes inversely proportional.
  • This relationship can be used to detect the force Fx acting in the X direction.
  • FIG. 6 is a view schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode changed by the Y-direction force Fy acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • the upper block 20 moves slightly in the Y direction together with the housing 10.
  • the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a becomes long, and the second upper vertical electrode 23b and the second lower vertical electrode 33b are extended. The distance between them becomes short, and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c becomes short.
  • the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a decreases, and the electrostatic capacitance between the second upper vertical electrode 23b and the second lower vertical electrode 33b is reduced.
  • the capacitance C2 increases, and the capacitance C3 between the third upper vertical electrode 23c and the third lower vertical electrode 33c increases.
  • the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a becomes longer, and the second upper vertical electrode 23b And the distance between the second lower vertical electrode 33b becomes shorter, and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c becomes shorter.
  • the capacitance C1 between Fy and the first upper vertical electrode 23a and the first lower vertical electrode 33a is inversely proportional
  • Fy and the second upper vertical electrode 23b and the second lower vertical electrode 33b are inversely proportional to each other.
  • the capacitance C2 between ⁇ is proportional
  • the capacitance C3 between Fy and the third upper vertical electrode 23c and the third lower vertical electrode 33c is proportional to each other.
  • This relationship can be used to detect the force Fy acting in the Y direction.
  • FIG. 7 is a view schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode changed by a Z-direction torque Tz acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • the upper block 20 rotates in the Z direction together with the housing 10.
  • the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a, between the second upper vertical electrode 23b and the second lower vertical electrode 33b The distance and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c become longer.
  • the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a, the second upper vertical electrode 23b and the second the distance between the lower vertical electrodes 33b and the distance between the third upper vertical electrodes 23c and the third lower vertical electrodes 33c become longer.
  • Tz is the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a, and the capacitance between the second upper vertical electrode 23b and the second lower vertical electrode 33b. It is inversely proportional to the capacitance C3 between (C2) and the third upper vertical electrode 23c and the third lower vertical electrode 33c.
  • FIG. 8 is a view schematically showing initial positions of an upper horizontal electrode and a lower horizontal electrode of the capacitive sensor according to the first embodiment of the present invention.
  • three upper horizontal electrodes 24a, 24b, and 24c are provided on the lower surface of the upper block 20. As shown in FIG. 3, three upper horizontal electrodes 24a, 24b, 24c are provided at 120 degree intervals.
  • the lower horizontal electrode 31 a protrudes from the base plate 31 of the lower block 30.
  • the three upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrode 31a are approximately parallel. It exists at a certain interval.
  • the upper horizontal electrode 24a positioned at the rightmost side as the first upper horizontal electrode and the upper horizontal electrode 24b positioned at the leftmost side as the second upper horizontal electrode will be described with reference to FIG. 8.
  • the upper horizontal electrode 24c positioned at the center is referred to as a third upper horizontal electrode.
  • FIG. 9 is a view schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode changed by a Z direction force Fz acting on an upper block of the capacitive sensor according to the first embodiment of the present invention.
  • the upper block 20 moves slightly in the Z direction together with the housing 10. By the movement of the upper block 20, the distance between the three upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrode 31a becomes long.
  • the distance between the three upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrode 31a becomes longer.
  • Fz is the capacitance C4 between the first upper horizontal electrode 24a and the lower horizontal electrode 31a, the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a, and It is inversely proportional to the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a.
  • FIG. 10 is a view schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode which are changed by the X-direction torque Tx acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • the upper block 20 rotates in the X direction together with the housing 10.
  • the distance between the first upper horizontal electrode 24a and the third upper horizontal electrode 24c and the lower horizontal electrode 31a is shortened, and the second upper horizontal electrode 24b and the lower portion are lowered.
  • the distance between the horizontal electrodes 31a becomes long.
  • the capacitance C4 between the first upper horizontal electrode 24a and the lower horizontal electrode 31a and the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a are increased and The capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a decreases.
  • the distance between the first upper horizontal electrode 24a and the third upper horizontal electrode 24c and the lower horizontal electrode 31a becomes shorter, and The distance between the upper horizontal electrode 24b and the lower horizontal electrode 31a becomes longer.
  • the capacitance C4 between Tx and the first upper horizontal electrode 24a and the lower horizontal electrode 31a and the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a are In proportion, the capacitance C5 between Tx and the second upper horizontal electrode 24b and the lower horizontal electrode 31a is inversely proportional.
  • This relationship can be used to detect the torque Tx acting in the X direction.
  • FIG. 11 is a view schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode changed by the Y-direction torque Ty acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
  • the distance between the second upper horizontal electrode 24b and the lower horizontal electrode 31a does not change significantly.
  • the distance between the first upper horizontal electrode 24a and the lower horizontal electrode 31a becomes longer, and the distance between the third upper horizontal electrode 24c and the lower horizontal electrode 31a becomes shorter.
  • the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a hardly changes, and the capacitance between the first upper horizontal electrode 24a and the lower horizontal electrode 31a ( C4) decreases, and the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a increases.
  • the distance between the first upper horizontal electrode 24a and the lower horizontal electrode 31a becomes longer, and the third upper horizontal electrode 24c and the lower portion are lower.
  • the distance between the horizontal electrodes 31a becomes shorter.
  • the capacitance C4 between Ty and the first upper horizontal electrode 24a and the lower horizontal electrode 31a is inversely proportional
  • the electrostatic capacitance between Ty and the third upper horizontal electrode 24c and the lower horizontal electrode 31a is inversely proportional.
  • the capacity C6 becomes proportional.
  • This relationship can be used to detect the torque Ty acting in the Y direction.
  • FIG. 12 is an exploded perspective view schematically illustrating an upper block and a lower block of a capacitive sensor according to a second embodiment of the present invention
  • FIG. 13 is an upper block of the capacitive sensor according to a second embodiment of the present invention.
  • the upper block 220 of the capacitive sensor 2 according to the second embodiment of the present invention has a shape similar to that of the lower horizontal electrode 31a of the first embodiment.
  • the upper block 220 includes a plate 221 forming a body, and the side of the plate 221 functions as the upper vertical electrodes 223a, 223b, and 223c, and the lower surface of the plate 221 is the upper horizontal electrode. Function as. That is, in the present embodiment, the upper vertical electrodes 223a, 223b, and 223c are formed on the side surface of the upper block 220.
  • the lower block 230 includes a plurality of lower vertical electrodes 233a, 233b, and 233c protruding from the upper surface of the base plate 231, and a plurality of lower horizontal electrodes 232a, 232b, and 232c.
  • the plurality of lower horizontal electrodes 232a, 232b, and 232c overlap the lower surface of the plate 221.
  • the plurality of lower horizontal electrodes 232a, 232b, and 232c and the lower surfaces of the plate 221 are not in contact with each other.
  • the plurality of lower vertical electrodes 233a, 233b, and 233c are disposed to be spaced apart from the side surfaces of the plate 221, respectively.
  • a surface of the side surface of the plate 221 facing the lower vertical electrodes 233a, 233b, and 233c serves as the upper vertical electrodes 223a, 223b, and 223c.
  • the capacitive sensor 2 also has a housing 10 and an elastic support 41, 42, 43 similar to the capacitive sensor 1 according to the first embodiment described above. It may include.
  • the upper block 220 is fixed to the housing 10, and the elastic supports 41, 42, and 43 elastically support the housing 10 and the lower block 230, respectively, so that external forces Fx, Fy, Fz, Tx, Ty, and Tz) may be configured to allow the upper block 220 and the lower block 230 to move relatively.
  • the capacitive sensor 2 also has the external vertical electrodes 223a, 223b, and 223c and the lower vertical electrodes 233a, 233b, and 233c by the external force, and the upper and lower horizontal electrodes 232a and 232b.
  • the force component (Fx, Fy, Fz) and the torque component (Tx, Ty, Tz) acting in the three-axis direction can be detected by using the change of the interval / static capacitance between 232c).
  • the upper block 220 and the lower block 230 may be arranged such that their positions are reversed from each other. That is, the lower block 230 of FIGS. 12 and 13 is inverted 180 degrees to function as the upper block, and the upper block 220 is inverted 180 degrees to function as the lower block.
  • the plurality of lower vertical electrodes 233a, 233b, and 233c and the plurality of lower horizontal electrodes 232a, 232b, and 232c shown in FIG. 12 become upper vertical electrodes and upper horizontal electrodes, respectively.
  • the upper vertical electrodes 223a, 223b, and 223c formed on the side of the plate 221 become lower vertical electrodes, and one surface of the plate 221 functions as a lower horizontal electrode.
  • the upper vertical electrode protrudes from the lower surface of the upper block, and the lower vertical electrode is formed on the side of the lower block.
  • FIG. 14 is an exploded perspective view schematically illustrating a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a third embodiment of the present invention
  • FIG. 15 is an electrostatic force according to a third embodiment of the present invention. It is a perspective view which shows the assembled state of the upper block and lower block of a capacitive sensor.
  • the upper block 320 of the capacitive sensor 3 may include a plurality of upper vertical electrodes 323a, protruding from the lower surface of the upper plate 321. 323b and 323c and a plurality of upper horizontal electrodes 324a, 324b and 324c.
  • the lower block 330 includes a plurality of lower vertical electrodes 333a, 333b, and 333c protruding from the upper surface of the base plate 331, and a plurality of lower horizontal electrodes 332a, 332b, and 332c.
  • the plurality of upper vertical electrodes 323a, 323b, and 323c and the plurality of lower vertical electrodes 333a, 333b, and 333c are disposed to face each other without overlapping one another.
  • the plurality of upper vertical electrodes 323a, 323b, and 323c are formed not to contact the base plate 331, and the plurality of lower vertical electrodes 333a, 333b, and 333c are formed not to contact the upper plate 321. .
  • the plurality of upper horizontal electrodes 324a, 324b, and 324c are disposed on the upper portions of the plurality of lower horizontal electrodes 332a, 332b, and 332c, and disposed to overlap each other without being in contact with each other.
  • the capacitive sensor 3 also has a housing 10 and an elastic support 41, 42, 43 similar to the capacitive sensor 1 according to the first embodiment described above. It may include.
  • the upper block 320 is fixed to the housing 10, and the elastic supports 41, 42, and 43 elastically support the housing 10 and the lower block 330, respectively, so that external forces Fx, Fy, Fz, Tx, Ty, and Tz) may be configured to allow the upper block 320 and the lower block 330 to move relatively.
  • the capacitive sensor 3 also includes the upper vertical electrodes 323a, 323b and 323c, the lower vertical electrodes 333a, 333b and 333c, and the upper horizontal electrodes 324a, 324b and 324c by an external force.
  • the force component (Fx, Fy, Fz) and torque component (Tx, Ty, Tz) acting in the three-axis direction can be detected using the change in the interval / change in capacitance between the lower horizontal electrodes 332a, 332b, and 332c. have.
  • 16 is an exploded perspective view schematically illustrating a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a fourth embodiment of the present invention.
  • the capacitive sensor 4 according to the fourth embodiment of the present invention has an upper block 420 compared to the capacitive sensor 3 according to the third embodiment.
  • the shape of is somewhat different.
  • a plurality of upper vertical electrodes 423a, 423b, and 423c are recessed from the lower surface of the upper plate 321.
  • some of the lower vertical electrodes 333a, 333b, and 333c formed in the lower block 330 are inserted into the upper block 420 to face the upper vertical electrodes 423a, 423b, and 423c.
  • the gap between the upper block 420 and the lower block 330 is narrowed, so that the plurality of upper horizontal electrodes 424a,
  • the protrusion lengths 424b and 424c may be shorter than those of the third embodiment, or may be formed on the same plane as the lower surface of the upper plate 321.
  • the capacitive sensor uses the relative movement of the upper block and the upper block generated by an external force, so that the upper and lower vertical electrodes, the upper horizontal electrode and the lower horizontal electrode
  • the force components Fx, Fy, and Fz and the torque components Tx, Ty, and Tz acting in the triaxial direction are detected based on the change in capacitance.

Abstract

Dans un mode de réalisation, l'invention porte sur un capteur capacitif qui comprend : un bloc supérieur; un bloc inférieur; une pluralité de supports élastiques permettant de soutenir élastiquement le bloc supérieur et le bloc inférieur; une électrode verticale supérieure formée pour avoir une surface perpendiculaire à une surface inférieure du bloc supérieur; une électrode verticale inférieure formée pour avoir une surface perpendiculaire à une surface supérieure du bloc inférieur et disposée de façon à faire face à l'électrode verticale supérieure de manière à chevaucher au moins partiellement l'électrode verticale supérieure; et un circuit électronique qui comprend l'électrode verticale supérieure et l'électrode verticale inférieure en tant que partie de ce dernier et émet un signal correspondant à un changement de capacité entre l'électrode verticale supérieure et l'électrode verticale inférieure qui est modifiée par une force ou un couple agissant sur le bloc supérieur et/ou le bloc inférieur.
PCT/KR2017/004412 2016-07-01 2017-04-26 Capteur capacitif WO2018004121A1 (fr)

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KR1020160083395A KR102560535B1 (ko) 2016-07-01 2016-07-01 정전 용량형 센서
KR10-2016-0083395 2016-07-01

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WO2018004121A1 true WO2018004121A1 (fr) 2018-01-04

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CN109813476A (zh) * 2019-01-23 2019-05-28 广西大学 一种基于结构解耦的新型电容式力矩传感器
WO2022021038A1 (fr) 2020-07-28 2022-02-03 Shanghai Flexiv Robotics Technology Co., Ltd. Capteur de couple et de force à degrés de liberté multiples et robot

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CN109813476B (zh) * 2019-01-23 2021-03-16 广西大学 一种基于结构解耦的电容式力矩传感器
WO2022021038A1 (fr) 2020-07-28 2022-02-03 Shanghai Flexiv Robotics Technology Co., Ltd. Capteur de couple et de force à degrés de liberté multiples et robot
EP4176239A4 (fr) * 2020-07-28 2023-08-16 Shanghai Flexiv Robotics Technology Co., Ltd. Capteur de couple et de force à degrés de liberté multiples et robot
US11913849B2 (en) 2020-07-28 2024-02-27 Flexiv Ltd. Multi-degree of freedom force and torque sensor and robot

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