WO2017217499A1 - Foreign matter inspection device - Google Patents

Foreign matter inspection device Download PDF

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Publication number
WO2017217499A1
WO2017217499A1 PCT/JP2017/022168 JP2017022168W WO2017217499A1 WO 2017217499 A1 WO2017217499 A1 WO 2017217499A1 JP 2017022168 W JP2017022168 W JP 2017022168W WO 2017217499 A1 WO2017217499 A1 WO 2017217499A1
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WO
WIPO (PCT)
Prior art keywords
unit
ray
metal
inspection
feed roller
Prior art date
Application number
PCT/JP2017/022168
Other languages
French (fr)
Japanese (ja)
Inventor
裕二 川口
Original Assignee
株式会社イシダ
日新電子工業株式会社
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Filing date
Publication date
Application filed by 株式会社イシダ, 日新電子工業株式会社 filed Critical 株式会社イシダ
Publication of WO2017217499A1 publication Critical patent/WO2017217499A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables

Definitions

  • This disclosure relates to a foreign matter inspection apparatus.
  • Patent Document 1 X-ray inspection for detecting foreign matter contained in an object to be inspected using X-ray permeability and foreign matter contained in the object to be inspected using an interaction between a magnetic field and a metal are disclosed.
  • a foreign substance inspection apparatus capable of performing both of metal detection and the detection is described.
  • the foreign substance inspection apparatus in order to suppress external leakage of X-rays generated in the X-ray inspection unit, at least a part of the transport unit, the X-ray inspection unit, and the metal detection unit are accommodated inside the housing. May be.
  • the constituent members other than the casing in order to more reliably suppress external leakage of X-rays, it is conceivable to form constituent members other than the casing from metal.
  • the constituent members other than the casing are formed of metal involuntarily, the constituent members may affect the magnetic field generated in the metal detection unit, leading to a decrease in detection accuracy of the metal detection unit.
  • an object of the present disclosure is to provide a foreign substance inspection apparatus capable of achieving both suppression of a decrease in detection accuracy of a metal detection unit and suppression of external leakage of X-rays.
  • a foreign matter inspection apparatus uses a transport unit that transports an object to be inspected, and X that detects foreign matter contained in the object being transported by the transport unit using X-ray transparency.
  • a line detection unit, a metal detection unit that detects the metal contained in the object being transported by the transport unit by using the interaction between the magnetic field and the metal, and at least a part of the transport unit, X-rays An inspection unit and a metal detection unit, and a housing having an inspection object carry-in port by the conveyance unit and an inspection object carry-out port by the conveyance unit.
  • a first feed roller arranged at the upstream end of the conveyance area of the inspection object, a second feed roller arranged at the downstream end of the conveyance area, an endless belt spanned between the first feed roller and the second feed roller, It is made of non-magnetic material and supports the endless belt in the transport area. Having a plate, and a X-ray shielding plate for shielding the X-ray in the entrance and loading opening or outlet port near the X-ray inspection unit of the carry-out port.
  • the support plate that supports the endless belt in the conveyance region is formed of a nonmagnetic material. This prevents the support plate from affecting the magnetic field generated by the metal detection unit. Moreover, X-rays are shielded by the X-ray shielding plate at the carry-in port or the carry-out port close to the X-ray inspection unit. As a result, the influence of the X-ray shielding plate on the magnetic field generated in the metal detection unit is suppressed, and the leakage of X-rays to the outside via the carry-in port or the carry-out port close to the X-ray inspection unit is suppressed. The Therefore, according to this foreign matter inspection device, it is possible to achieve both suppression of a decrease in detection accuracy of the metal detection unit and suppression of external leakage of X-rays.
  • the X-ray shielding plate may be attached to the support plate. Thereby, it is possible to arrange the X-ray shielding plate at a position where the external leakage of X-rays can be effectively suppressed with a simple configuration.
  • the X-ray shielding plate may be formed of metal, and the X-ray shielding plate may be electrically insulated from a casing formed of metal. Since the X-ray shielding plate is made of metal, external leakage of X-rays via the carry-in port or the carry-out port close to the X-ray inspection unit can be more reliably suppressed. In addition, since the X-ray shielding plate is electrically insulated from the housing, it is possible to prevent current from flowing between the X-ray shielding plate and the housing due to the influence of the magnetic field generated in the metal detection unit. And the fall of the detection accuracy of a metal detection part can be suppressed more reliably.
  • the first feed roller and the second feed roller are formed of metal, and the first feed roller and the second feed roller are electrically connected to the casing formed of metal. May be electrically insulated. Since each feed roller is made of metal, external leakage of X-rays via the carry-in port and the carry-out port can be more reliably suppressed. In addition, since each feed roller is electrically insulated from the housing, current is prevented from flowing between each feed roller and the housing due to the influence of the magnetic field generated by the metal detection unit. A decrease in detection accuracy of the detection unit can be more reliably suppressed.
  • the material forming the support plate may be a non-conductive material.
  • FIG. 1 is a front view of a foreign matter inspection apparatus according to an embodiment.
  • FIG. 2 is a conceptual diagram showing an internal configuration and a control system of the foreign matter inspection apparatus of FIG.
  • FIG. 3 is a front view of the main components of the X-ray inspection unit and the metal detection unit of FIG.
  • FIG. 4 is a perspective view of main components of the X-ray inspection unit and the metal detection unit of FIG.
  • FIG. 5 is a front view of the main components of the X-ray inspection unit, the metal detection unit, and the conveyance unit of FIG.
  • FIG. 6 is a plan view of a part of the transport unit of FIG.
  • FIG. 7 is a front view of a part of the transport unit of FIG.
  • the foreign object inspection apparatus 1 is a device that detects foreign matter contained in an object to be inspected.
  • the inspected object is, for example, food.
  • the foreign object inspection apparatus 1 performs X-ray inspection and metal detection while conveying the inspection object in the interior thereof, and inspects whether or not the inspection object contains foreign objects.
  • X-ray inspection is a technique for detecting foreign matter contained in an object to be inspected using X-ray transparency, and is realized by the X-ray inspection unit 2 (see FIG. 2). In the X-ray inspection, it is possible to detect a foreign substance having X-ray permeability different from that of the inspection object.
  • Metal detection is a technique for detecting a metal contained in an inspection object as a foreign object using the interaction between a magnetic field and metal, and is realized by the metal detection unit 3 (see FIG. 2). In metal detection, metal can be detected as a foreign substance.
  • the foreign matter inspection apparatus 1 has a housing 4 in which a space is formed.
  • the housing 4 accommodates the X-ray inspection unit 2 and the metal detection unit 3 (see FIG. 2) inside.
  • the housing 4 shields X-rays generated by the X-ray inspection unit 2 and suppresses external leakage of X-rays.
  • the housing 4 is made of a metal such as stainless steel.
  • the housing 4 has, for example, a rectangular parallelepiped box shape.
  • An opening 4 a that communicates with the inside of the housing 4 is formed on one side surface of the housing 4.
  • An opening 4 b that communicates with the inside of the housing 4 is formed on the other side surface of the housing 4.
  • the opening 4a is an inspection object carry-in port
  • the opening 4b is an inspection object carry-out port.
  • an upper door 40 and a lower door 41 that open and close the housing 4 are provided on the front surface of the housing 4.
  • the upper door 40 and the lower door 41 have a hinged door structure, for example. By opening the upper door 40 or the lower door 41, at least a part of an X-ray inspection unit 2 and a metal detection unit 3 described later are exposed to the outside.
  • the upper door 40 and the lower door 41 are made of metal such as stainless steel, for example.
  • a display 5 and an operation switch 6 are provided on the front surface of the upper door 40.
  • the display 5 is a display device having both a display function and an input function, for example, a touch panel.
  • the display 5 displays results of X-ray inspection and metal detection, and also displays an operation screen for setting various parameters related to metal detection and X-ray inspection.
  • the operation switch 6 is a power switch for the X-ray inspection unit 2 and the metal detection unit 3.
  • the housing 4 is supported by support legs 7.
  • a notification unit 8 and a cooler 9 are provided on the upper surface of the housing 4.
  • the notification unit 8 notifies the contamination of foreign matters and the operating state of the device.
  • the notification unit 8 includes a first notification unit 81 corresponding to the X-ray inspection unit 2 and a second notification unit 82 corresponding to the metal detection unit 3.
  • the cooler 9 sends cool air to the inside of the housing 4 and adjusts the temperature of the devices arranged inside the housing 4.
  • the inside of the housing 4 is inspected by carrying a part of an X-ray generator 21 to be described later, a substrate chamber T1 in which various control boards and the like are placed, and an object S to be inspected. Is divided into an examination room T2 in which is performed.
  • the substrate chamber T1 is located on the upper side of the inspection chamber T, and the temperature is adjusted by the cooler 9.
  • a transport unit 10 for transporting the inspection object S is arranged.
  • the transport unit 10 is a roller-type belt conveyor, and extends in the horizontal direction inside the housing 4 with one end located in the opening 4a and the other end located in the opening 4b. . That is, the housing 4 accommodates a portion of the transport unit 10 excluding one end and the other end.
  • the transport unit 10 carries the inspection object S into the housing 4 through the opening 4a and carries the inspection object S out of the housing 4 through the opening 4b.
  • a carry-in conveyor 101 is arranged on one side of the carrying unit 10 and a carry-out conveyor 102 is arranged on the other side of the carrying unit 10. ing.
  • the carry-out conveyor 102 may be provided with a distribution mechanism for the inspection object S.
  • An X-ray shielding curtain 42 is disposed in the opening 4a.
  • An X-ray shielding curtain 43 is disposed in the opening 4b.
  • the upper end of each X-ray shielding curtain 42, 43 is a fixed end with respect to the housing 4, and the lower end of each X-ray shielding curtain 42, 43 is a free end.
  • the X-ray shielding curtains 42 and 43 shield X-rays generated by the X-ray inspection unit 2 and suppress external leakage of X-rays.
  • Each X-ray shielding curtain 42, 43 is formed of a flexible material containing a metal material (tungsten or the like), for example.
  • a cylindrical case 31 having a through hole 31a for allowing the inspection object S to pass therethrough is disposed in the inspection room T2.
  • the conveyance part 10 has penetrated the case 31 through the through-hole 31a.
  • the inspection object S passes through the through hole 31 a of the case 31 by the transport unit 10, and X-ray inspection and metal detection are sequentially performed in the case 31.
  • the case 31 is made of a metal such as stainless steel.
  • the X-ray inspection unit 2 includes an X-ray inspection control unit 20, an X-ray generator 21, and an X-ray detector 22.
  • the X-ray generator 21 is disposed above the transport unit 10 and the case 31.
  • the X-ray generator 21 irradiates the inspection object S transported by the transport unit 10 with X-rays.
  • an X-ray source for generating X-rays is disposed in the substrate chamber T1.
  • the mechanism for irradiating X-rays in the X-ray generator 21 is arranged in the examination room T2.
  • the X-ray detector 22 is disposed below the transport unit 10 and the case 31 and faces the X-ray generator 21.
  • the X-ray detector 22 detects X-rays generated by the X-ray generator 21 and transmitted through the inspection object S.
  • the X-ray detector 22 for example, a line sensor configured by arranging a plurality of X-ray detection sensors in parallel in the front-rear direction (horizontal direction orthogonal to the transport direction of the inspection object S by the transport unit 10). Is used.
  • the X-ray detector 22 is accommodated in the substrate case 23 in order to reduce X-ray leakage.
  • the substrate case 23 is formed with a slit 23a (see FIG. 4) through which X-rays incident on the X-ray detector 22 pass.
  • the X-ray inspection control unit 20 temporarily stores an input / output interface I / O for inputting / outputting signals to / from the outside, a ROM (Read Only Memory) in which a program and information for performing processing are stored, and data. It has storage media such as RAM (Random Access Memory) and HDD (Hard Disk Drive), CPU (Central Processing Unit), and communication circuits.
  • the X-ray inspection control unit 20 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded in the RAM. The functions described later are realized.
  • the X-ray inspection control unit 20 is disposed in the substrate chamber T1 and is electrically connected to the X-ray generator 21 and the X-ray detector 22.
  • the X-ray inspection control unit 20 is electrically connected to the display 5 and receives operation information from the operator via the operation screen of the display 5.
  • the X-ray inspection control unit 20 sets the operation profiles of the X-ray generator 21 and the X-ray detector 22 based on the operation information, and controls the operations of the X-ray generator 21 and the X-ray detector 22.
  • the X-ray inspection control unit 20 detects the inspection object S using the laser sensor 24 disposed upstream of the X-ray generator 21 and the X-ray detector 22, the X-ray inspection control unit 20 inspects the inspection object S. Start.
  • the X-ray inspection control unit 20 controls the X-ray generator 21 to irradiate the inspection object S transported by the transport unit 10 with X-rays.
  • the X-ray detector 22 measures the X-ray transmission amount of X-rays that have passed through the inspection object S, and outputs the measured X-ray transmission amount to the X-ray inspection control unit 20.
  • the X-ray inspection control unit 20 generates an X-ray transmission image in which the X-ray transmission amount acquired in time series is reflected in the pixel value. Then, the X-ray inspection control unit 20 detects the foreign matter by analyzing the X-ray transmission image using an image processing technique. For example, the X-ray inspection control unit 20 determines whether there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more based on the pixel value of the X-ray transmission image. The X-ray inspection control unit 20 determines that a foreign object has been detected when there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more.
  • the X-ray inspection control unit 20 displays the result data of the X-ray inspection on the display 5 or stores the result data of the X-ray inspection in the storage unit according to a request from the worker. Further, the X-ray inspection control unit 20 indicates that when the X-ray generator 21 and the X-ray detector 22 are operating normally, the device relating to the X-ray inspection is operating using the first alarm 81. To the workers. Further, when it is determined that a foreign object has been detected, the X-ray inspection control unit 20 notifies the worker that the foreign object has been detected using the first notification device 81.
  • the case 31 includes a main body portion 32, a first hood portion 33, and a second hood portion 34.
  • the first hood portion 33 is provided on the opening 4 a side (loading side) with respect to the main body portion 32.
  • the second hood part 34 is provided on the opening part 4 b side (the outlet side) with respect to the main body part 32.
  • the through hole 31 a of the case 31 is defined by the inner walls of the main body portion 32, the first hood portion 33, and the second hood portion 34.
  • the case 31 is supported by a vibration isolation table 39 (anti-vibration tables 39a and 39b) in order to improve the vibration resistance.
  • an X-ray passage slit 33a that allows X-rays to pass is formed below the X-ray generator 21.
  • An X-ray passage slit 33b that allows X-rays to pass through is formed on the lower surface of the first hood portion 33 so as to face the X-ray passage slit 33a.
  • the X-ray detector 22 is disposed below the X-ray passage slit 33b.
  • a slit 33c is formed on the downstream side (main body portion 32 side) of the X-ray passage slits 33a and 33b.
  • a laser sensor 38 is disposed in the slit 33c. The laser sensor 38 irradiates the inspection object S on the transport unit 10 with a laser through the slit 33c.
  • the metal detection unit 3 includes a metal detection control unit 30, a transmission coil 35, and reception coils 36 and 37.
  • the transmission coil 35 and the reception coils 36 and 37 are search coils formed of a conductive material such as metal.
  • the transmission coil 35 and the reception coils 36 and 37 are arranged inside the case 31 (more specifically, as shown in FIGS. 3 and 4 so as to surround a portion of the transport unit 10 passing through the through hole 31a.
  • the metal detection unit 3 includes a case 31 in which the transmission coil 35 and the reception coils 36 and 37 are disposed inside and the transport unit 10 passes through the inside. Thereby, the inspection object S is allowed to pass through the inside of the transmission coil 35 and the reception coils 36 and 37 by the transport unit 10.
  • the transmission coil 35 is disposed between the reception coils 36 and 37.
  • the reception coils 36 and 37 are differentially connected to each other and are disposed symmetrically with respect to the transmission coil 35.
  • the two receiving coils 36 and 37 have the same flux linkage.
  • the transmission coil 35 is configured to be energized and generates magnetic flux.
  • a voltage is excited by electromagnetic induction of a magnetic field generated by the transmitting coil 35.
  • the first hood part 33 and the second hood part 34 suppress external leakage of the magnetic field generated by the transmission coil 35 and entry of an external magnetic field.
  • the metal detection control unit 30 temporarily stores an input / output interface I / O for inputting / outputting signals from / to the outside, a ROM storing programs and information for performing processing, and data temporarily.
  • a storage medium such as a RAM and an HDD, a CPU, a communication circuit, and the like.
  • the metal detection control unit 30 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded into the RAM, which will be described later. Realize the function to do.
  • the metal detection control unit 30 is disposed in the substrate chamber T1 and is electrically connected to the X-ray inspection control unit 20.
  • the metal detection control unit 30 receives operation information from an operator via an operation screen of the display 5 electrically connected via the X-ray inspection control unit 20.
  • the metal detection control unit 30 sets operation profiles of the transmission coil 35 and the reception coils 36 and 37 based on the operation information.
  • the metal detection control unit 30 detects the inspection object S using the laser sensor 38 disposed on the upstream side of the transmission coil 35 and the reception coils 36 and 37, the metal detection control unit 30 starts metal detection of the inspection object S. .
  • the metal detection control unit 30 supplies an alternating excitation current to the transmission coil 35 to generate a magnetic flux.
  • the magnetic flux generated by the transmission coil 35 passes through the two reception coils 36 and 37, and a voltage is excited in each reception coil 36 and 37 by electromagnetic induction.
  • the metal detection control unit 30 acquires the output voltage of the differential connection of the receiving coils 36 and 37 and determines metal detection. For example, the metal detection control unit 30 determines that a metal foreign object is not detected when the differential connection output voltage is 0, and detects that a metal foreign object is detected when the differential connection output voltage is not 0. judge.
  • the metal detection control unit 30 displays the metal detection result data on the display 5 or stores the metal detection result data in the storage unit in response to a request from the worker. In addition, when the transmission coil 35 and the reception coils 36 and 37 are operating normally, the metal detection control unit 30 informs the worker that the metal detection device is operating using the second alarm 82. Inform. Furthermore, when the metal detection control unit 30 determines that a foreign object has been detected, the metal detection control unit 30 notifies the worker that the foreign object has been detected using the second notification device 82.
  • the X-ray inspection unit 2 and the metal detection unit 3 described above are configured to be independently operable. That is, the foreign substance inspection apparatus 1 can perform not only both X-ray inspection and metal detection, but also can execute either X-ray inspection or metal detection.
  • the X-ray inspection unit 2 since the X-ray inspection unit 2 performs display control of the display 5, the operation screen of the metal detection unit 3 is displayed on the display 5 when the X-ray inspection unit 2 is stopped. Not. For this reason, a sub-display (not shown) connected to the metal detection unit 3 is disposed inside the housing 4.
  • the metal detection unit 3 receives operation information from an operator via the sub display and displays result data or the like on the sub display.
  • the transport unit 10 includes a first support frame 11, a second support frame 12, a first feed roller 13, a second feed roller 14, an endless belt 15, a support plate 16, and an X-ray shielding plate 100.
  • the support plate 16 includes a first support portion 16a and a second support portion 16b. The first support portion 16a and the second support portion 16b are arranged in parallel along the transport direction D of the inspection object S by the transport unit 10 and are separated from each other.
  • the first support frame 11 is provided with a first feed roller 13 and a first support portion 16a. More specifically, the first feed roller 13 is rotatably supported by the first support frame 11.
  • the first support portion 16a is fixed to the first support frame 11 by screws or the like.
  • the first support frame 11 is attached to a support body 45 provided in the housing 4 in a state where the first feed roller 13 and the first support portion 16a are attached. More specifically, the first support frame 11 is fixed by a fastener 45 b provided on the support body 45 while being placed on an insulating member 45 a provided on the support body 45.
  • the fastener 45b is a so-called “patch latch”, and is engaged with a claw portion 17a provided in the first support portion 16a. Note that the set of the fastener 45b and the claw portion 17a is provided on both sides of the first support portion 16a in the front-rear direction (horizontal direction orthogonal to the conveyance direction of the inspection object S by the conveyance unit 10).
  • the first support frame 11 and the first feed roller 13 are made of metal such as stainless steel.
  • the first support frame 11 and the first feed roller 13 made of metal are electrically insulated from the casing 4 made of metal by placing the first support frame 11 on the insulating member 45a. ing.
  • a second feed roller 14 and a second support portion 16b are attached to the second support frame 12. More specifically, the second feed roller 14 is rotatably supported by the second support frame 12.
  • the second support portion 16b is fixed to the second support frame 12 by screws or the like.
  • the second support frame 12 is attached to a support body 46 provided in the housing 4 in a state where the second feed roller 14 and the second support portion 16b are attached. More specifically, the second support frame 12 is fixed by a fastener 46 b provided on the support 46 while being placed on an insulating member 46 a provided on the support 46.
  • the fastener 46b is a so-called patchon lock, and is engaged with a claw portion 17b provided in the second support portion 16b.
  • the set of the fastener 46b and the claw portion 17b is provided on both sides of the second support portion 16b in the front-rear direction.
  • the second support frame 12 and the second feed roller 14 are made of metal such as stainless steel, for example.
  • the second support frame 12 and the second feed roller 14 made of metal are electrically insulated from the case 4 made of metal by placing the second support frame 12 on the insulating member 46a. ing.
  • the endless belt 15 is hung on the first feed roller 13 and the second feed roller 14.
  • the upper surface of the upper portion 15 a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 is a transport region R of the inspection object S by the transport unit 10. That is, the first feed roller 13 is disposed at the upstream end of the transport region R, and the second feed roller 14 is disposed at the downstream end of the transport region R.
  • the support body 45 is provided with a pressing roller 45 c that presses a lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13.
  • the support 46 is provided with a pressing roller 46 c that presses the lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13.
  • the first support frame 11 is provided with a tension adjustment bolt mechanism 18 for finely adjusting the tension of the endless belt 15 by pressing both ends of the rotation shaft of the first feed roller 13 outward.
  • the support body 46 is provided with a timing pulley 47 connected to a drive motor (not shown).
  • the timing pulley 47 is connected to a timing pulley 19 provided on the second feed roller 14 via a timing belt 48. Thereby, the transport unit 10 is driven.
  • the timing pulleys 19 and 47 and the timing belt 48 are arranged on the lower door 41 side. Thereby, the timing pulleys 19 and 47 and the timing belt 48 are exposed to the outside by opening the lower door 41.
  • the support plate 16 supports the endless belt 15 in the transport region R. More specifically, the support plate 16 supports the upper portion 15a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 from below.
  • the first support portion 16 a and the second support portion 16 b are separated from each other outside the case 31 included in the metal detection unit 3.
  • the first support portion 16 a and the second support portion 16 b are separated from each other at a position upstream of the case 31 in the transport direction D.
  • the first support portion 16a and the second support portion 16b are formed of a nonmagnetic and nonconductive material (for example, bakelite, wood, resin, etc.). That is, the support plate 16 is made of a nonmagnetic and nonconductive material.
  • the second support portion 16 b passes through the through hole 31 a of the case 31.
  • a slit 16c through which the X-ray of the X-ray inspection unit 2 passes is formed in a portion of the second support portion 16b passing through the through hole 31a.
  • the slit 16 c is located between the X-ray passage slits 33 a and 33 b formed in the first hood portion 33 of the case 31.
  • the X-ray shielding plate 100 shields the X-rays of the X-ray inspection unit 2 at the opening 4a close to the X-ray inspection unit 2 (close to the inspection region of the X-ray inspection unit 2) among the openings 4a and 4b.
  • the X-ray shielding plate 100 is made of a metal such as stainless steel, for example.
  • the X-ray shielding plate 100 is attached to the support plate 16 between the inspection region of the X-ray inspection unit 2 and the opening 4a. More specifically, as shown in FIG. 6, the X-ray shielding plate 100 is fixed to the lower surface of the first support portion 16 a of the support plate 16 by screwing or the like.
  • the outer edge of the X-ray shielding plate 100 is located inside the outer edge of the first support portion 16a.
  • the first support portion 16 a is formed of a non-conductive material, the X-ray shielding plate 100 is electrically insulated from the housing 4.
  • the support plate 16 that supports the endless belt 15 in the transport region R is formed of a nonmagnetic material. This prevents the support plate 16 from affecting the magnetic field generated by the metal detection unit 3.
  • the X-ray of the X-ray inspection unit 2 is shielded by the X-ray shielding plate 100.
  • the influence of the X-ray shielding plate 100 on the magnetic field generated in the metal detection unit 3 is suppressed, and the leakage of X-rays to the outside through the opening 4a close to the X-ray inspection unit 2 is suppressed. Is done. Therefore, according to the foreign material inspection apparatus 1, it is possible to achieve both suppression of a decrease in detection accuracy of the metal detection unit 3 and suppression of external leakage of X-rays.
  • the X-ray shielding plate 100 is attached to the support plate 16. Thereby, it is possible to arrange the X-ray shielding plate 100 at a position where the external leakage of X-rays can be effectively suppressed with a simple configuration.
  • the X-ray shielding plate 100 made of metal is electrically insulated from the casing 4 made of metal. Since the X-ray shielding plate 100 is made of metal, external leakage of X-rays through the opening 4a can be more reliably suppressed. In addition, since the X-ray shielding plate 100 is electrically insulated from the housing 4, a current flows between the X-ray shielding plate 100 and the housing 4 due to the influence of the magnetic field generated in the metal detection unit 3. Therefore, it is possible to more reliably suppress a decrease in detection accuracy of the metal detection unit 3.
  • the first feed roller 13 and the second feed roller 14 made of metal are electrically insulated from the casing 4 made of metal. Since the feed rollers 13 and 14 are made of metal, external leakage of X-rays through the openings 4a and 4b can be more reliably suppressed. Further, since each feed roller 13, 14 is electrically insulated from the housing 4, a current is generated between each feed roller 13, 14 and the housing 4 due to the magnetic field generated in the metal detection unit 3. Since it is prevented from flowing, the fall of the detection accuracy of the metal detection part 3 can be suppressed more reliably.
  • the material forming the support plate 16 is a non-conductive material. Therefore, since it is prevented that an electric current flows in the support plate 16 by the influence of the magnetic field which generate
  • the first feed roller 13 is rotatably supported by the first support frame 11 via an insulating collar 13a formed of a non-conductive material (for example, resin). It may be. In that case, even if the insulating member 45a provided on the support body 45 is made of metal, the first feed roller 13 made of metal is electrically insulated from the casing 4 made of metal. .
  • the second feed roller 14 may be rotatably supported by the second support frame 12 via an insulating collar (not shown) formed of a non-conductive material (for example, resin or the like). . In that case, even if the insulating member 46a provided on the support 46 is made of metal, the second feed roller 14 made of metal is electrically insulated from the casing 4 made of metal. .
  • an X-ray shielding plate that shields X-rays in the opening 4b far from the X-ray inspection unit 2 among the openings 4a and 4b may be provided.
  • such an X-ray shielding plate may be attached to the support plate 16 between the inspection region of the metal detection unit 3 and the opening 4b. In that case, external leakage of X-rays is more reliably suppressed, and the balance of the magnetic field generated in the metal detection unit 3 is improved, so that a decrease in detection accuracy of the metal detection unit 3 is more reliably suppressed.
  • the support plate 16 only needs to be made of at least a nonmagnetic material. If the support plate 16 is made of at least a non-magnetic material, the influence of the support plate 16 on the magnetic field generated by the metal detection unit 3 is prevented. Further, the support plate 16 may be integrally formed without being separated into a plurality of support portions, or may be separated into three or more support portions. However, if the support plate 16 is separated into a plurality of support portions, there is no need to pull out the transport unit 10 from the case 31 along the transport direction D, so that the support plate 16 is not separated. The maintenance of the transport unit 10 can be easily performed.
  • the X-ray shielding plate 100 is not made of metal as long as it is made of a material that can shield X-rays (a material that can attenuate X-rays compared to the material of the support plate 16). May be. If the material of the X-ray shielding plate 100 is a non-conductive material, it is not necessary to electrically insulate the X-ray shielding plate 100 from the housing 4. Further, the X-ray shielding plate 100 may not be attached to the support plate 16. As an example, the X-ray shielding plate 100 may be attached to the first support frame 11.
  • the inspection object S may be carried into the housing 4 through the opening 4b, inspected inside the housing 4, and carried out of the housing 4 through the opening 4a. That is, the opening 4b may be a carry-in port for the inspection object S, and the opening 4a may be a carry-out port for the inspection object S.
  • SYMBOLS 1 Foreign substance inspection apparatus, 2 ... X-ray inspection part, 3 ... Metal detection part, 4 ... Housing

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Abstract

This foreign matter inspection device is provided with: a conveying unit (10) which conveys an article to be inspected; an X-ray inspection unit (2) which detects, by utilizing the transmissivity of X-rays, foreign matter contained in the article to be inspected that is being conveyed by the conveying unit; a metal detection unit (3) which detects, as foreign matter, a metal contained in the article to be inspected that is being conveyed by the conveying unit, by utilizing the interaction between the magnetic field and the metal; and a housing (4) which internally houses the metal detection unit, the X-ray inspection unit, and at least a part of the conveying unit, and which has an inlet (4a) for conveying the article to be inspected by the conveying unit and an outlet (4b) for conveying the article to be inspected by the conveying unit. The conveying unit includes: a first feed roller (13) provided at the upstream end of a conveyance region in which the article to be inspected is conveyed by the conveying unit; a second feed roller (14) provided at the downstream end of the conveyance region; an endless belt (15) suspended over the first feed roller and the second feed roller; a support plate (16) which is formed of a non-magnetic material and which supports the endless belt in the conveyance region; and an X-ray shield plate (100) which shields X-rays at either the inlet or the outlet, whichever among them close to the X-ray inspection unit.

Description

異物検査装置Foreign matter inspection device
　本開示は、異物検査装置に関する。 This disclosure relates to a foreign matter inspection apparatus.
　特許文献１には、Ｘ線の透過性を利用して被検査物に含まれる異物を検出するＸ線検査と、磁界と金属との相互作用を利用して被検査物に含まれる異物を検出する金属検出との両方を行うことができる異物検査装置が記載されている。 In Patent Document 1, X-ray inspection for detecting foreign matter contained in an object to be inspected using X-ray permeability and foreign matter contained in the object to be inspected using an interaction between a magnetic field and a metal are disclosed. A foreign substance inspection apparatus capable of performing both of metal detection and the detection is described.
特開２０１５－２８４６５号公報Japanese Patent Laid-Open No. 2015-28465
　上述したような異物検査装置では、Ｘ線検査部で発生するＸ線の外部漏洩を抑制するために、搬送部の少なくとも一部、Ｘ線検査部、及び金属検出部が筐体の内部に収容される場合がある。そのような場合に、Ｘ線の外部漏洩をより確実に抑制するためには、筐体以外の構成部材を金属で形成することが考えられる。しかし、筐体以外の構成部材を無為に金属で形成すると、金属検出部で発生する磁界に当該構成部材の影響が及んで、金属検出部の検出精度の低下に繋がるおそれがある。 In the foreign substance inspection apparatus as described above, in order to suppress external leakage of X-rays generated in the X-ray inspection unit, at least a part of the transport unit, the X-ray inspection unit, and the metal detection unit are accommodated inside the housing. May be. In such a case, in order to more reliably suppress external leakage of X-rays, it is conceivable to form constituent members other than the casing from metal. However, if the constituent members other than the casing are formed of metal involuntarily, the constituent members may affect the magnetic field generated in the metal detection unit, leading to a decrease in detection accuracy of the metal detection unit.
　そこで、本開示は、金属検出部の検出精度の低下の抑制、及びＸ線の外部漏洩の抑制の両立を図ることができる異物検査装置を提供することを目的とする。 Therefore, an object of the present disclosure is to provide a foreign substance inspection apparatus capable of achieving both suppression of a decrease in detection accuracy of a metal detection unit and suppression of external leakage of X-rays.
　本開示の一形態に係る異物検査装置は、被検査物を搬送する搬送部と、Ｘ線の透過性を利用して、搬送部で搬送されている被検査物に含まれる異物を検出するＸ線検査部と、磁界と金属との相互作用を利用して、搬送部で搬送されている被検査物に含まれる金属を異物として検出する金属検出部と、搬送部の少なくとも一部、Ｘ線検査部、及び金属検出部を内部に収容し、搬送部による被検査物の搬入口、及び搬送部による被検査物の搬出口を有する筐体と、を備え、搬送部は、搬送部による被検査物の搬送領域の上流端に配置された第１送りローラと、搬送領域の下流端に配置された第２送りローラと、第１送りローラ及び第２送りローラに架けられた無端ベルトと、非磁性の材料で形成され、搬送領域において無端ベルトを支持する支持プレートと、搬入口及び搬出口のうちＸ線検査部に近い搬入口又は搬出口においてＸ線を遮蔽するＸ線遮蔽プレートと、を有する。 A foreign matter inspection apparatus according to an embodiment of the present disclosure uses a transport unit that transports an object to be inspected, and X that detects foreign matter contained in the object being transported by the transport unit using X-ray transparency. A line detection unit, a metal detection unit that detects the metal contained in the object being transported by the transport unit by using the interaction between the magnetic field and the metal, and at least a part of the transport unit, X-rays An inspection unit and a metal detection unit, and a housing having an inspection object carry-in port by the conveyance unit and an inspection object carry-out port by the conveyance unit. A first feed roller arranged at the upstream end of the conveyance area of the inspection object, a second feed roller arranged at the downstream end of the conveyance area, an endless belt spanned between the first feed roller and the second feed roller, It is made of non-magnetic material and supports the endless belt in the transport area. Having a plate, and a X-ray shielding plate for shielding the X-ray in the entrance and loading opening or outlet port near the X-ray inspection unit of the carry-out port.
　この異物検査装置では、搬送領域において無端ベルトを支持する支持プレートが非磁性の材料で形成されている。これにより、金属検出部で発生する磁界に支持プレートの影響が及ぶことが防止される。また、搬入口及び搬出口のうちＸ線検査部に近い搬入口又は搬出口において、Ｘ線遮蔽プレートによってＸ線が遮蔽される。これにより、金属検出部で発生する磁界にＸ線遮蔽プレートの影響が及ぶことが抑制されつつ、Ｘ線検査部に近い搬入口又は搬出口を介してＸ線が外部に漏洩することが抑制される。よって、この異物検査装置によれば、金属検出部の検出精度の低下の抑制、及びＸ線の外部漏洩の抑制の両立を図ることができる。 In this foreign matter inspection apparatus, the support plate that supports the endless belt in the conveyance region is formed of a nonmagnetic material. This prevents the support plate from affecting the magnetic field generated by the metal detection unit. Moreover, X-rays are shielded by the X-ray shielding plate at the carry-in port or the carry-out port close to the X-ray inspection unit. As a result, the influence of the X-ray shielding plate on the magnetic field generated in the metal detection unit is suppressed, and the leakage of X-rays to the outside via the carry-in port or the carry-out port close to the X-ray inspection unit is suppressed. The Therefore, according to this foreign matter inspection device, it is possible to achieve both suppression of a decrease in detection accuracy of the metal detection unit and suppression of external leakage of X-rays.
　本開示の一形態に係る異物検査装置では、Ｘ線遮蔽プレートは、支持プレートに取り付けられていてもよい。これにより、簡易な構成で、Ｘ線の外部漏洩を効果的に抑制し得る位置にＸ線遮蔽プレートを配置することができる。 In the foreign substance inspection apparatus according to an embodiment of the present disclosure, the X-ray shielding plate may be attached to the support plate. Thereby, it is possible to arrange the X-ray shielding plate at a position where the external leakage of X-rays can be effectively suppressed with a simple configuration.
　本開示の一形態に係る異物検査装置では、Ｘ線遮蔽プレートは、金属で形成されており、Ｘ線遮蔽プレートは、金属で形成された筐体と電気的に絶縁されていてもよい。Ｘ線遮蔽プレートが金属で形成されていることにより、Ｘ線検査部に近い搬入口又は搬出口を介したＸ線の外部漏洩をより確実に抑制することができる。また、Ｘ線遮蔽プレートが筐体と電気的に絶縁されていることにより、金属検出部で発生する磁界の影響でＸ線遮蔽プレートと筐体との間で電流が流れることが防止されるため、金属検出部の検出精度の低下をより確実に抑制することができる。 In the foreign substance inspection apparatus according to an embodiment of the present disclosure, the X-ray shielding plate may be formed of metal, and the X-ray shielding plate may be electrically insulated from a casing formed of metal. Since the X-ray shielding plate is made of metal, external leakage of X-rays via the carry-in port or the carry-out port close to the X-ray inspection unit can be more reliably suppressed. In addition, since the X-ray shielding plate is electrically insulated from the housing, it is possible to prevent current from flowing between the X-ray shielding plate and the housing due to the influence of the magnetic field generated in the metal detection unit. And the fall of the detection accuracy of a metal detection part can be suppressed more reliably.
　本開示の一形態に係る異物検査装置では、第１送りローラ及び第２送りローラは、金属で形成されており、第１送りローラ及び第２送りローラは、金属で形成された筐体と電気的に絶縁されていてもよい。各送りローラが金属で形成されていることにより、搬入口及び搬出口を介したＸ線の外部漏洩をより確実に抑制することができる。また、各送りローラが筐体と電気的に絶縁されていることにより、金属検出部で発生する磁界の影響で各送りローラと筐体との間で電流が流れることが防止されるため、金属検出部の検出精度の低下をより確実に抑制することができる。 In the foreign matter inspection apparatus according to an aspect of the present disclosure, the first feed roller and the second feed roller are formed of metal, and the first feed roller and the second feed roller are electrically connected to the casing formed of metal. May be electrically insulated. Since each feed roller is made of metal, external leakage of X-rays via the carry-in port and the carry-out port can be more reliably suppressed. In addition, since each feed roller is electrically insulated from the housing, current is prevented from flowing between each feed roller and the housing due to the influence of the magnetic field generated by the metal detection unit. A decrease in detection accuracy of the detection unit can be more reliably suppressed.
　本開示の一形態に係る異物検査装置では、支持プレートを形成する材料は、非導電性の材料であってもよい。これにより、金属検出部で発生する磁界の影響で支持プレートにおいて電流が流れることが防止されるため、金属検出部の検出精度の低下をより確実に抑制することができる。 In the foreign substance inspection apparatus according to an embodiment of the present disclosure, the material forming the support plate may be a non-conductive material. Thereby, since it is prevented that an electric current flows in a support plate under the influence of the magnetic field which generate | occur | produces in a metal detection part, the fall of the detection accuracy of a metal detection part can be suppressed more reliably.
　本開示によれば、金属検出部の検出精度の低下の抑制、及びＸ線の外部漏洩の抑制の両立を図ることができる異物検査装置を提供することが可能となる。 According to the present disclosure, it is possible to provide a foreign substance inspection apparatus capable of achieving both suppression of a decrease in detection accuracy of the metal detection unit and suppression of external leakage of X-rays.
図１は、実施形態に係る異物検査装置の正面図である。FIG. 1 is a front view of a foreign matter inspection apparatus according to an embodiment. 図２は、図１の異物検査装置の内部構成及び制御系を示す概念図である。FIG. 2 is a conceptual diagram showing an internal configuration and a control system of the foreign matter inspection apparatus of FIG. 図３は、図２のＸ線検査部及び金属検出部の主要構成の正面図である。FIG. 3 is a front view of the main components of the X-ray inspection unit and the metal detection unit of FIG. 図４は、図２のＸ線検査部及び金属検出部の主要構成の斜視図である。FIG. 4 is a perspective view of main components of the X-ray inspection unit and the metal detection unit of FIG. 図５は、図２のＸ線検査部、金属検出部及び搬送部の主要構成の正面図である。FIG. 5 is a front view of the main components of the X-ray inspection unit, the metal detection unit, and the conveyance unit of FIG. 図６は、図５の搬送部の一部の平面図である。FIG. 6 is a plan view of a part of the transport unit of FIG. 図７は、図５の搬送部の一部の正面図である。FIG. 7 is a front view of a part of the transport unit of FIG.
　以下、図面を参照して、本開示の実施形態について説明する。なお、以下の説明において、同一又は相当要素には同一符号を付し、重複する説明を省略する。 Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following description, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted.
　図１に示される異物検査装置１は、被検査物に含まれる異物を検出する装置である。被検査物は例えば食品である。異物検査装置１は、その内部において被検査物を搬送しつつＸ線検査及び金属検出を行い、被検査物に異物が含まれるか否かを検査する。Ｘ線検査は、Ｘ線の透過性を利用して被検査物に含まれる異物を検出する手法であり、Ｘ線検査部２（図２参照）によって実現される。Ｘ線検査では、被検査物とは異なるＸ線透過性を有する異物を検出することができる。金属検出は、磁界と金属との相互作用を利用して被検査物に含まれる金属を異物として検出する手法であり、金属検出部３（図２参照）によって実現される。金属検出では金属を異物として検出することができる。 1 is a device that detects foreign matter contained in an object to be inspected. The inspected object is, for example, food. The foreign object inspection apparatus 1 performs X-ray inspection and metal detection while conveying the inspection object in the interior thereof, and inspects whether or not the inspection object contains foreign objects. X-ray inspection is a technique for detecting foreign matter contained in an object to be inspected using X-ray transparency, and is realized by the X-ray inspection unit 2 (see FIG. 2). In the X-ray inspection, it is possible to detect a foreign substance having X-ray permeability different from that of the inspection object. Metal detection is a technique for detecting a metal contained in an inspection object as a foreign object using the interaction between a magnetic field and metal, and is realized by the metal detection unit 3 (see FIG. 2). In metal detection, metal can be detected as a foreign substance.
　異物検査装置１は、その内部に空間が形成された筐体４を有している。筐体４は、Ｘ線検査部２及び金属検出部３（図２参照）を内部に収容している。筐体４は、Ｘ線検査部２により発生されるＸ線を遮蔽し、Ｘ線の外部漏洩を抑制する。筐体４は、例えばステンレス等の金属で形成されている。 The foreign matter inspection apparatus 1 has a housing 4 in which a space is formed. The housing 4 accommodates the X-ray inspection unit 2 and the metal detection unit 3 (see FIG. 2) inside. The housing 4 shields X-rays generated by the X-ray inspection unit 2 and suppresses external leakage of X-rays. The housing 4 is made of a metal such as stainless steel.
　筐体４は、例えば直方体箱状を呈している。筐体４の一方の側面には、筐体４の内部に連通する開口部４ａが形成されている。筐体４の他方の側面には、筐体４の内部に連通する開口部４ｂが形成されている。異物検査装置１では、被検査物は、開口部４ａから筐体４の内部に搬入され、筐体４の内部において検査が行われ、開口部４ｂから筐体４の外部に搬出される。つまり、開口部４ａが被検査物の搬入口であり、開口部４ｂが被検査物の搬出口である。 The housing 4 has, for example, a rectangular parallelepiped box shape. An opening 4 a that communicates with the inside of the housing 4 is formed on one side surface of the housing 4. An opening 4 b that communicates with the inside of the housing 4 is formed on the other side surface of the housing 4. In the foreign matter inspection apparatus 1, an object to be inspected is carried into the housing 4 from the opening 4 a, inspected inside the housing 4, and unloaded from the opening 4 b to the outside of the housing 4. That is, the opening 4a is an inspection object carry-in port, and the opening 4b is an inspection object carry-out port.
　筐体４の前面には、筐体４を開閉する上部扉４０及び下部扉４１が設けられている。上部扉４０及び下部扉４１は、例えば開き戸構造である。上部扉４０又は下部扉４１が開放されることで、後述するＸ線検査部２及び金属検出部３の少なくとも一部が外部に露出される。上部扉４０及び下部扉４１は、例えばステンレス等の金属で形成されている。 On the front surface of the housing 4, an upper door 40 and a lower door 41 that open and close the housing 4 are provided. The upper door 40 and the lower door 41 have a hinged door structure, for example. By opening the upper door 40 or the lower door 41, at least a part of an X-ray inspection unit 2 and a metal detection unit 3 described later are exposed to the outside. The upper door 40 and the lower door 41 are made of metal such as stainless steel, for example.
　上部扉４０の前面には、ディスプレイ５及び操作スイッチ６が設けられている。ディスプレイ５は、表示機能と入力機能とを兼ね備えた表示装置であり、例えばタッチパネルである。ディスプレイ５は、Ｘ線検査及び金属検出の結果等を表示すると共に、金属検出及びＸ線検査に関する各種パラメータを設定するための操作画面を表示する。操作スイッチ６は、Ｘ線検査部２及び金属検出部３の電源スイッチ等である。 A display 5 and an operation switch 6 are provided on the front surface of the upper door 40. The display 5 is a display device having both a display function and an input function, for example, a touch panel. The display 5 displays results of X-ray inspection and metal detection, and also displays an operation screen for setting various parameters related to metal detection and X-ray inspection. The operation switch 6 is a power switch for the X-ray inspection unit 2 and the metal detection unit 3.
　筐体４は、支持脚７によって支持されている。筐体４の上面には、報知部８及びクーラー９が設けられている。報知部８は、異物の混入及び機器の作動状態を報知する。報知部８は、Ｘ線検査部２に対応する第１報知器８１、及び金属検出部３に対応する第２報知器８２を有している。クーラー９は、筐体４の内部に冷気を送り、筐体４の内部に配置された機器の温度を調整する。 The housing 4 is supported by support legs 7. A notification unit 8 and a cooler 9 are provided on the upper surface of the housing 4. The notification unit 8 notifies the contamination of foreign matters and the operating state of the device. The notification unit 8 includes a first notification unit 81 corresponding to the X-ray inspection unit 2 and a second notification unit 82 corresponding to the metal detection unit 3. The cooler 9 sends cool air to the inside of the housing 4 and adjusts the temperature of the devices arranged inside the housing 4.
　図２に示されるように、筐体４の内部は、後述するＸ線発生器２１の一部、及び各種の制御基板等が配置される基板室Ｔ１と、被検査物Ｓが搬入されて検査が行われる検査室Ｔ２とに区画されている。基板室Ｔ１は、検査室Ｔの上側に位置しており、クーラー９によって温度調整されている。 As shown in FIG. 2, the inside of the housing 4 is inspected by carrying a part of an X-ray generator 21 to be described later, a substrate chamber T1 in which various control boards and the like are placed, and an object S to be inspected. Is divided into an examination room T2 in which is performed. The substrate chamber T1 is located on the upper side of the inspection chamber T, and the temperature is adjusted by the cooler 9.
　検査室Ｔ２には、被検査物Ｓを搬送する搬送部１０が配置されている。搬送部１０は、ローラ式のベルトコンベヤであり、一端部が開口部４ａに位置し且つ他端部が開口部４ｂに位置した状態で、筐体４の内部を水平方向に延在している。つまり、筐体４は、搬送部１０のうち一端部及び他端部を除く部分を内部に収容している。搬送部１０は、開口部４ａを介して被検査物Ｓを筐体４の内部に搬入し、開口部４ｂを介して被検査物Ｓを筐体４の外部に搬出する。 In the inspection room T2, a transport unit 10 for transporting the inspection object S is arranged. The transport unit 10 is a roller-type belt conveyor, and extends in the horizontal direction inside the housing 4 with one end located in the opening 4a and the other end located in the opening 4b. . That is, the housing 4 accommodates a portion of the transport unit 10 excluding one end and the other end. The transport unit 10 carries the inspection object S into the housing 4 through the opening 4a and carries the inspection object S out of the housing 4 through the opening 4b.
　なお、被検査物Ｓの搬入及び搬出を自動化すべく、搬送部１０の一方の側には搬入用コンベヤ１０１が配置されており、搬送部１０の他方の側には搬出用コンベヤ１０２が配置されている。搬出用コンベヤ１０２には、被検査物Ｓの振分機構が設けられる場合がある。 In order to automate the loading and unloading of the inspection object S, a carry-in conveyor 101 is arranged on one side of the carrying unit 10 and a carry-out conveyor 102 is arranged on the other side of the carrying unit 10. ing. The carry-out conveyor 102 may be provided with a distribution mechanism for the inspection object S.
　開口部４ａには、Ｘ線遮蔽カーテン４２が配置されている。開口部４ｂには、Ｘ線遮蔽カーテン４３が配置されている。各Ｘ線遮蔽カーテン４２，４３の上端は筐体４に対する固定端であり、各Ｘ線遮蔽カーテン４２，４３の下端は自由端である。各Ｘ線遮蔽カーテン４２，４３は、Ｘ線検査部２が発生したＸ線を遮蔽し、Ｘ線の外部漏洩を抑制する。各Ｘ線遮蔽カーテン４２，４３は、例えば金属材料（タングステン等）を含有する可撓性材料等で形成されている。 An X-ray shielding curtain 42 is disposed in the opening 4a. An X-ray shielding curtain 43 is disposed in the opening 4b. The upper end of each X-ray shielding curtain 42, 43 is a fixed end with respect to the housing 4, and the lower end of each X-ray shielding curtain 42, 43 is a free end. The X-ray shielding curtains 42 and 43 shield X-rays generated by the X-ray inspection unit 2 and suppress external leakage of X-rays. Each X-ray shielding curtain 42, 43 is formed of a flexible material containing a metal material (tungsten or the like), for example.
　検査室Ｔ２には、被検査物Ｓを通過させるための貫通穴３１ａが形成された筒状のケース３１が配置されている。搬送部１０は、貫通穴３１ａを介してケース３１を貫通している。被検査物Ｓは、搬送部１０によってケース３１の貫通穴３１ａを通過し、ケース３１においてＸ線検査及び金属検出が順次実行される。ケース３１は、例えばステンレス等の金属で形成されている。 In the inspection room T2, a cylindrical case 31 having a through hole 31a for allowing the inspection object S to pass therethrough is disposed. The conveyance part 10 has penetrated the case 31 through the through-hole 31a. The inspection object S passes through the through hole 31 a of the case 31 by the transport unit 10, and X-ray inspection and metal detection are sequentially performed in the case 31. The case 31 is made of a metal such as stainless steel.
　Ｘ線検査部２は、Ｘ線検査制御部２０、Ｘ線発生器２１及びＸ線検出器２２を有している。Ｘ線発生器２１は、搬送部１０及びケース３１の上側に配置されている。Ｘ線発生器２１は、搬送部１０で搬送されている被検査物ＳにＸ線を照射する。Ｘ線発生器２１のうちＸ線を発生するＸ線源等は、基板室Ｔ１に配置されている。Ｘ線発生器２１のうちＸ線を照射する機構は、検査室Ｔ２に配置されている。 The X-ray inspection unit 2 includes an X-ray inspection control unit 20, an X-ray generator 21, and an X-ray detector 22. The X-ray generator 21 is disposed above the transport unit 10 and the case 31. The X-ray generator 21 irradiates the inspection object S transported by the transport unit 10 with X-rays. Of the X-ray generator 21, an X-ray source for generating X-rays is disposed in the substrate chamber T1. The mechanism for irradiating X-rays in the X-ray generator 21 is arranged in the examination room T2.
　Ｘ線検出器２２は、搬送部１０及びケース３１の下側に配置されており、Ｘ線発生器２１と対向している。Ｘ線検出器２２は、Ｘ線発生器２１で発生されて被検査物Ｓを透過したＸ線を検出する。Ｘ線検出器２２としては、例えば複数のＸ線検出センサが前後方向（搬送部１０による被検査物Ｓの搬送方向と直交する水平方向）に沿って並設されることで構成されたラインセンサが用いられる。Ｘ線検出器２２は、Ｘ線漏洩を低減させるために、基板ケース２３に収容されている。基板ケース２３には、Ｘ線検出器２２に入射するＸ線を通過させるスリット２３ａ（図４参照）が形成されている。 The X-ray detector 22 is disposed below the transport unit 10 and the case 31 and faces the X-ray generator 21. The X-ray detector 22 detects X-rays generated by the X-ray generator 21 and transmitted through the inspection object S. As the X-ray detector 22, for example, a line sensor configured by arranging a plurality of X-ray detection sensors in parallel in the front-rear direction (horizontal direction orthogonal to the transport direction of the inspection object S by the transport unit 10). Is used. The X-ray detector 22 is accommodated in the substrate case 23 in order to reduce X-ray leakage. The substrate case 23 is formed with a slit 23a (see FIG. 4) through which X-rays incident on the X-ray detector 22 pass.
　Ｘ線検査制御部２０は、外部との信号の入出力等を行う入出力インターフェースＩ／Ｏ、処理を行うためのプログラム及び情報等が記憶されたＲＯＭ（Read　Only　Memory）、データを一時的に記憶するＲＡＭ（Random　Access　Memory）、ＨＤＤ（Hard　Disk　Drive）等の記憶媒体、ＣＰＵ（Central　Processing　Unit）、並びに通信回路等を有している。Ｘ線検査制御部２０は、ＣＰＵが出力する信号に基づいて、入力データをＲＡＭに記憶し、ＲＯＭに記憶されているプログラムをＲＡＭにロードし、ＲＡＭにロードされたプログラムを実行することで、後述する機能を実現する。 The X-ray inspection control unit 20 temporarily stores an input / output interface I / O for inputting / outputting signals to / from the outside, a ROM (Read Only Memory) in which a program and information for performing processing are stored, and data. It has storage media such as RAM (Random Access Memory) and HDD (Hard Disk Drive), CPU (Central Processing Unit), and communication circuits. The X-ray inspection control unit 20 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded in the RAM. The functions described later are realized.
　Ｘ線検査制御部２０は、基板室Ｔ１に配置されており、Ｘ線発生器２１及びＸ線検出器２２と電気的に接続されている。Ｘ線検査制御部２０は、ディスプレイ５と電気的に接続されており、ディスプレイ５の操作画面を介して、作業員から操作情報を受け付ける。Ｘ線検査制御部２０は、当該操作情報に基づいてＸ線発生器２１及びＸ線検出器２２の動作プロファイルを設定すると共に、Ｘ線発生器２１及びＸ線検出器２２の動作を制御する。Ｘ線検査制御部２０は、Ｘ線発生器２１及びＸ線検出器２２よりも上流側に配置されたレーザセンサ２４を用いて被検査物Ｓを検出した場合、当該被検査物Ｓの検査を開始する。Ｘ線検査制御部２０は、Ｘ線発生器２１を制御して、搬送部１０で搬送されている被検査物ＳにＸ線を照射させる。Ｘ線検出器２２は、被検査物Ｓを透過したＸ線のＸ線透過量を計測し、計測したＸ線透過量をＸ線検査制御部２０に出力する。 The X-ray inspection control unit 20 is disposed in the substrate chamber T1 and is electrically connected to the X-ray generator 21 and the X-ray detector 22. The X-ray inspection control unit 20 is electrically connected to the display 5 and receives operation information from the operator via the operation screen of the display 5. The X-ray inspection control unit 20 sets the operation profiles of the X-ray generator 21 and the X-ray detector 22 based on the operation information, and controls the operations of the X-ray generator 21 and the X-ray detector 22. When the X-ray inspection control unit 20 detects the inspection object S using the laser sensor 24 disposed upstream of the X-ray generator 21 and the X-ray detector 22, the X-ray inspection control unit 20 inspects the inspection object S. Start. The X-ray inspection control unit 20 controls the X-ray generator 21 to irradiate the inspection object S transported by the transport unit 10 with X-rays. The X-ray detector 22 measures the X-ray transmission amount of X-rays that have passed through the inspection object S, and outputs the measured X-ray transmission amount to the X-ray inspection control unit 20.
　Ｘ線検査制御部２０は、時系列で取得したＸ線透過量を画素値に反映させたＸ線透過画像を生成する。そして、Ｘ線検査制御部２０は、画像処理技術によりＸ線透過画像を解析して、異物を検出する。例えば、Ｘ線検査制御部２０は、Ｘ線透過画像の画素値に基づいて、被検査物Ｓの基準透過率との差が所定値以上となる画像領域が存在するか否かを判定する。そして、Ｘ線検査制御部２０は、被検査物Ｓの基準透過率との差が所定値以上となる画像領域が存在する場合には、異物を検出したと判定する。 The X-ray inspection control unit 20 generates an X-ray transmission image in which the X-ray transmission amount acquired in time series is reflected in the pixel value. Then, the X-ray inspection control unit 20 detects the foreign matter by analyzing the X-ray transmission image using an image processing technique. For example, the X-ray inspection control unit 20 determines whether there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more based on the pixel value of the X-ray transmission image. The X-ray inspection control unit 20 determines that a foreign object has been detected when there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more.
　Ｘ線検査制御部２０は、作業員からの要求に応じて、Ｘ線検査の結果データをディスプレイ５に表示させたり、Ｘ線検査の結果データを記憶部に記憶させたりする。また、Ｘ線検査制御部２０は、Ｘ線発生器２１及びＸ線検出器２２が正常に作動している場合、第１報知器８１を用いてＸ線検査に係る機器が作動中である旨を作業員に報知する。更に、Ｘ線検査制御部２０は、異物を検出したと判定した場合、第１報知器８１を用いて異物を検知した旨を作業員に報知する。 The X-ray inspection control unit 20 displays the result data of the X-ray inspection on the display 5 or stores the result data of the X-ray inspection in the storage unit according to a request from the worker. Further, the X-ray inspection control unit 20 indicates that when the X-ray generator 21 and the X-ray detector 22 are operating normally, the device relating to the X-ray inspection is operating using the first alarm 81. To the workers. Further, when it is determined that a foreign object has been detected, the X-ray inspection control unit 20 notifies the worker that the foreign object has been detected using the first notification device 81.
　図３及び図４に示されるように、ケース３１は、本体部３２、第１フード部３３及び第２フード部３４を有している。第１フード部３３は、本体部３２に対して開口部４ａ側（搬入口側）に設けられている。第２フード部３４は、本体部３２に対して開口部４ｂ側（搬出口側）に設けられている。ケース３１の貫通穴３１ａは、本体部３２、第１フード部３３及び第２フード部３４のそれぞれの内壁によって画定されている。なお、ケース３１は、耐振特性を向上させるために、防振台３９（防振台３９ａ，３９ｂ）によって支持されている。 As shown in FIGS. 3 and 4, the case 31 includes a main body portion 32, a first hood portion 33, and a second hood portion 34. The first hood portion 33 is provided on the opening 4 a side (loading side) with respect to the main body portion 32. The second hood part 34 is provided on the opening part 4 b side (the outlet side) with respect to the main body part 32. The through hole 31 a of the case 31 is defined by the inner walls of the main body portion 32, the first hood portion 33, and the second hood portion 34. The case 31 is supported by a vibration isolation table 39 (anti-vibration tables 39a and 39b) in order to improve the vibration resistance.
　第１フード部３３の上面には、Ｘ線を通過させるＸ線通過スリット３３ａがＸ線発生器２１の下側に位置するように形成されている。第１フード部３３の下面には、Ｘ線を通過させるＸ線通過スリット３３ｂがＸ線通過スリット３３ａと対向するように形成されている。Ｘ線通過スリット３３ｂの下側には、Ｘ線検出器２２が配置されている。このように構成することで、Ｘ線発生器２１が発生したＸ線は、各Ｘ線通過スリット３３ａ，３３ｂを通過し、ケース３１の内部を搬送されている被検査物Ｓに照射される。 On the upper surface of the first hood portion 33, an X-ray passage slit 33a that allows X-rays to pass is formed below the X-ray generator 21. An X-ray passage slit 33b that allows X-rays to pass through is formed on the lower surface of the first hood portion 33 so as to face the X-ray passage slit 33a. The X-ray detector 22 is disposed below the X-ray passage slit 33b. With this configuration, the X-rays generated by the X-ray generator 21 pass through the X-ray passage slits 33a and 33b, and are irradiated to the inspection object S being transported inside the case 31.
　なお、第１フード部３３の側面において、各Ｘ線通過スリット３３ａ，３３ｂよりも下流側（本体部３２側）にはスリット３３ｃが形成されている。スリット３３ｃには、レーザセンサ３８が配置されている。レーザセンサ３８は、スリット３３ｃを介して搬送部１０上の被検査物Ｓにレーザを照射する。 In addition, on the side surface of the first hood portion 33, a slit 33c is formed on the downstream side (main body portion 32 side) of the X-ray passage slits 33a and 33b. A laser sensor 38 is disposed in the slit 33c. The laser sensor 38 irradiates the inspection object S on the transport unit 10 with a laser through the slit 33c.
　図２に示されるように、金属検出部３は、金属検出制御部３０、送信コイル３５及び受信コイル３６，３７を有している。送信コイル３５及び受信コイル３６，３７は、金属等の導電性材料で形成されたサーチコイルである。送信コイル３５及び受信コイル３６，３７は、搬送部１０のうち貫通穴３１ａを通過している部分を囲むように、ケース３１の内部（より具体的には、図３及び図４に示されるように、ケース３１の本体部３２の内部）に配置されている。つまり、金属検出部３は、送信コイル３５及び受信コイル３６，３７が内部に配置され且つ搬送部１０が内部を通過しているケース３１を有している。これにより、被検査物Ｓは、搬送部１０によって送信コイル３５及び受信コイル３６，３７の内側を通過させられる。 2, the metal detection unit 3 includes a metal detection control unit 30, a transmission coil 35, and reception coils 36 and 37. The transmission coil 35 and the reception coils 36 and 37 are search coils formed of a conductive material such as metal. The transmission coil 35 and the reception coils 36 and 37 are arranged inside the case 31 (more specifically, as shown in FIGS. 3 and 4 so as to surround a portion of the transport unit 10 passing through the through hole 31a. In the main body 32 of the case 31. That is, the metal detection unit 3 includes a case 31 in which the transmission coil 35 and the reception coils 36 and 37 are disposed inside and the transport unit 10 passes through the inside. Thereby, the inspection object S is allowed to pass through the inside of the transmission coil 35 and the reception coils 36 and 37 by the transport unit 10.
　図３及び図４に示されるように、送信コイル３５は、受信コイル３６，３７間に配置されている。受信コイル３６，３７は、互いに差動接続されると共に、送信コイル３５に対して対称に配置されている。２つの受信コイル３６，３７は、同一の鎖交磁束を有している。送信コイル３５は、通電可能に構成されており、磁束を発生する。各受信コイル３６，３７では、送信コイル３５が発生した磁界の電磁誘導によって電圧が励起する。なお、第１フード部３３及び第２フード部３４は、送信コイル３５が発生した磁界の外部漏洩、及び外来磁界の進入を抑制する。 3 and 4, the transmission coil 35 is disposed between the reception coils 36 and 37. The reception coils 36 and 37 are differentially connected to each other and are disposed symmetrically with respect to the transmission coil 35. The two receiving coils 36 and 37 have the same flux linkage. The transmission coil 35 is configured to be energized and generates magnetic flux. In each of the receiving coils 36 and 37, a voltage is excited by electromagnetic induction of a magnetic field generated by the transmitting coil 35. The first hood part 33 and the second hood part 34 suppress external leakage of the magnetic field generated by the transmission coil 35 and entry of an external magnetic field.
　図２に示されるように、金属検出制御部３０は、外部との信号の入出力等を行う入出力インターフェースＩ／Ｏ、処理を行うためのプログラム及び情報等が記憶されたＲＯＭ、データを一時的に記憶するＲＡＭ、ＨＤＤ等の記憶媒体、ＣＰＵ、並びに通信回路等を有している。金属検出制御部３０は、ＣＰＵが出力する信号に基づいて、入力データをＲＡＭに記憶し、ＲＯＭに記憶されているプログラムをＲＡＭにロードし、ＲＡＭにロードされたプログラムを実行することで、後述する機能を実現する。 As shown in FIG. 2, the metal detection control unit 30 temporarily stores an input / output interface I / O for inputting / outputting signals from / to the outside, a ROM storing programs and information for performing processing, and data temporarily. A storage medium such as a RAM and an HDD, a CPU, a communication circuit, and the like. The metal detection control unit 30 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded into the RAM, which will be described later. Realize the function to do.
　金属検出制御部３０は、基板室Ｔ１に配置されており、Ｘ線検査制御部２０と電気的に接続されている。金属検出制御部３０は、Ｘ線検査制御部２０を介して電気的に接続されたディスプレイ５の操作画面を介して、作業員から操作情報を受け付ける。金属検出制御部３０は、当該操作情報に基づいて送信コイル３５及び受信コイル３６，３７の動作プロファイルを設定する。金属検出制御部３０は、送信コイル３５及び受信コイル３６，３７よりも上流側に配置されたレーザセンサ３８を用いて被検査物Ｓを検出した場合、当該被検査物Ｓの金属検出を開始する。 The metal detection control unit 30 is disposed in the substrate chamber T1 and is electrically connected to the X-ray inspection control unit 20. The metal detection control unit 30 receives operation information from an operator via an operation screen of the display 5 electrically connected via the X-ray inspection control unit 20. The metal detection control unit 30 sets operation profiles of the transmission coil 35 and the reception coils 36 and 37 based on the operation information. When the metal detection control unit 30 detects the inspection object S using the laser sensor 38 disposed on the upstream side of the transmission coil 35 and the reception coils 36 and 37, the metal detection control unit 30 starts metal detection of the inspection object S. .
　金属検出制御部３０は、送信コイル３５に交番励磁電流を供給し、磁束を発生させる。送信コイル３５によって発生された磁束は、２つの受信コイル３６，３７を貫通し、電磁誘導によって各受信コイル３６，３７にて電圧が励起される。金属検出制御部３０は、受信コイル３６，３７の差動接続の出力電圧を取得して、金属検出の判定を行う。例えば、金属検出制御部３０は、差動接続の出力電圧が０のときは、金属異物を検出していないと判定し、差動接続の出力電圧が０でないときは、金属異物を検出したと判定する。 The metal detection control unit 30 supplies an alternating excitation current to the transmission coil 35 to generate a magnetic flux. The magnetic flux generated by the transmission coil 35 passes through the two reception coils 36 and 37, and a voltage is excited in each reception coil 36 and 37 by electromagnetic induction. The metal detection control unit 30 acquires the output voltage of the differential connection of the receiving coils 36 and 37 and determines metal detection. For example, the metal detection control unit 30 determines that a metal foreign object is not detected when the differential connection output voltage is 0, and detects that a metal foreign object is detected when the differential connection output voltage is not 0. judge.
　金属検出制御部３０は、作業員からの要求に応じて、金属検出の結果データをディスプレイ５に表示させたり、金属検出の結果データを記憶部に記憶させたりする。また、金属検出制御部３０は、送信コイル３５及び受信コイル３６，３７が正常に作動している場合、第２報知器８２を用いて金属検出に係る機器が作動中である旨を作業員に報知する。更に、金属検出制御部３０は、異物を検出したと判定した場合、第２報知器８２を用いて異物を検知した旨を作業員に報知する。 The metal detection control unit 30 displays the metal detection result data on the display 5 or stores the metal detection result data in the storage unit in response to a request from the worker. In addition, when the transmission coil 35 and the reception coils 36 and 37 are operating normally, the metal detection control unit 30 informs the worker that the metal detection device is operating using the second alarm 82. Inform. Furthermore, when the metal detection control unit 30 determines that a foreign object has been detected, the metal detection control unit 30 notifies the worker that the foreign object has been detected using the second notification device 82.
　上述したＸ線検査部２及び金属検出部３は、それぞれ独立に作動可能に構成されている。つまり、異物検査装置１は、Ｘ線検査及び金属検出の両方を行うだけでなく、Ｘ線検査及び金属検出のいずれか一方を実行することもできる。上述のとおり、本実施形態では、Ｘ線検査部２がディスプレイ５の表示制御を行うため、Ｘ線検査部２が停止している場合には、ディスプレイ５に金属検出部３の操作画面が表示されない。このため、筐体４の内部には、金属検出部３に接続されたサブディスプレイ（不図示）が配置されている。金属検出部３は、Ｘ線検査部２が停止している場合には、サブディスプレイを介して、作業員から操作情報を受け付け、サブディスプレイに結果データ等を表示する。 The X-ray inspection unit 2 and the metal detection unit 3 described above are configured to be independently operable. That is, the foreign substance inspection apparatus 1 can perform not only both X-ray inspection and metal detection, but also can execute either X-ray inspection or metal detection. As described above, in the present embodiment, since the X-ray inspection unit 2 performs display control of the display 5, the operation screen of the metal detection unit 3 is displayed on the display 5 when the X-ray inspection unit 2 is stopped. Not. For this reason, a sub-display (not shown) connected to the metal detection unit 3 is disposed inside the housing 4. When the X-ray inspection unit 2 is stopped, the metal detection unit 3 receives operation information from an operator via the sub display and displays result data or the like on the sub display.
　搬送部１０の構成について、より詳細に説明する。図５に示されるように、搬送部１０は、第１支持フレーム１１、第２支持フレーム１２、第１送りローラ１３、第２送りローラ１４、無端ベルト１５、支持プレート１６及びＸ線遮蔽プレート１００を有している。支持プレート１６は、第１支持部分１６ａ及び第２支持部分１６ｂを含んでいる。第１支持部分１６ａ及び第２支持部分１６ｂは、搬送部１０による被検査物Ｓの搬送方向Ｄに沿って並設され且つ互いに分離されている。 The configuration of the transport unit 10 will be described in more detail. As shown in FIG. 5, the transport unit 10 includes a first support frame 11, a second support frame 12, a first feed roller 13, a second feed roller 14, an endless belt 15, a support plate 16, and an X-ray shielding plate 100. have. The support plate 16 includes a first support portion 16a and a second support portion 16b. The first support portion 16a and the second support portion 16b are arranged in parallel along the transport direction D of the inspection object S by the transport unit 10 and are separated from each other.
　第１支持フレーム１１には、第１送りローラ１３及び第１支持部分１６ａが取り付けられている。より具体的には、第１送りローラ１３は、第１支持フレーム１１に回転可能に支持されている。第１支持部分１６ａは、第１支持フレーム１１にネジ止め等によって固定されている。第１支持フレーム１１は、第１送りローラ１３及び第１支持部分１６ａが取り付けられた状態で、筐体４に設けられた支持体４５に取り付けられている。より具体的には、第１支持フレーム１１は、支持体４５に設けられた絶縁部材４５ａ上に載置された状態で、支持体４５に設けられた留め具４５ｂによって固定されている。留め具４５ｂは、いわゆるパッチン錠（draw　latch）と称されるものであり、第１支持部分１６ａに設けられた爪部１７ａに係合している。なお、留め具４５ｂ及び爪部１７ａの組は、前後方向（搬送部１０による被検査物Ｓの搬送方向と直交する水平方向）における第１支持部分１６ａの両側に設けられている。 The first support frame 11 is provided with a first feed roller 13 and a first support portion 16a. More specifically, the first feed roller 13 is rotatably supported by the first support frame 11. The first support portion 16a is fixed to the first support frame 11 by screws or the like. The first support frame 11 is attached to a support body 45 provided in the housing 4 in a state where the first feed roller 13 and the first support portion 16a are attached. More specifically, the first support frame 11 is fixed by a fastener 45 b provided on the support body 45 while being placed on an insulating member 45 a provided on the support body 45. The fastener 45b is a so-called “patch latch”, and is engaged with a claw portion 17a provided in the first support portion 16a. Note that the set of the fastener 45b and the claw portion 17a is provided on both sides of the first support portion 16a in the front-rear direction (horizontal direction orthogonal to the conveyance direction of the inspection object S by the conveyance unit 10).
　第１支持フレーム１１及び第１送りローラ１３は、例えばステンレス等の金属で形成されている。金属で形成された第１支持フレーム１１及び第１送りローラ１３は、第１支持フレーム１１が絶縁部材４５ａ上に載置されることで、金属で形成された筐体４と電気的に絶縁されている。 The first support frame 11 and the first feed roller 13 are made of metal such as stainless steel. The first support frame 11 and the first feed roller 13 made of metal are electrically insulated from the casing 4 made of metal by placing the first support frame 11 on the insulating member 45a. ing.
　第２支持フレーム１２には、第２送りローラ１４及び第２支持部分１６ｂが取り付けられている。より具体的には、第２送りローラ１４は、第２支持フレーム１２に回転可能に支持されている。第２支持部分１６ｂは、第２支持フレーム１２にネジ止め等によって固定されている。第２支持フレーム１２は、第２送りローラ１４及び第２支持部分１６ｂが取り付けられた状態で、筐体４に設けられた支持体４６に取り付けられている。より具体的には、第２支持フレーム１２は、支持体４６に設けられた絶縁部材４６ａ上に載置された状態で、支持体４６に設けられた留め具４６ｂによって固定されている。留め具４６ｂは、いわゆるパッチン錠と称されるものであり、第２支持部分１６ｂに設けられた爪部１７ｂに係合している。なお、留め具４６ｂ及び爪部１７ｂの組は、前後方向における第２支持部分１６ｂの両側に設けられている。 A second feed roller 14 and a second support portion 16b are attached to the second support frame 12. More specifically, the second feed roller 14 is rotatably supported by the second support frame 12. The second support portion 16b is fixed to the second support frame 12 by screws or the like. The second support frame 12 is attached to a support body 46 provided in the housing 4 in a state where the second feed roller 14 and the second support portion 16b are attached. More specifically, the second support frame 12 is fixed by a fastener 46 b provided on the support 46 while being placed on an insulating member 46 a provided on the support 46. The fastener 46b is a so-called patchon lock, and is engaged with a claw portion 17b provided in the second support portion 16b. The set of the fastener 46b and the claw portion 17b is provided on both sides of the second support portion 16b in the front-rear direction.
　第２支持フレーム１２及び第２送りローラ１４は、例えばステンレス等の金属で形成されている。金属で形成された第２支持フレーム１２及び第２送りローラ１４は、第２支持フレーム１２が絶縁部材４６ａ上に載置されることで、金属で形成された筐体４と電気的に絶縁されている。 The second support frame 12 and the second feed roller 14 are made of metal such as stainless steel, for example. The second support frame 12 and the second feed roller 14 made of metal are electrically insulated from the case 4 made of metal by placing the second support frame 12 on the insulating member 46a. ing.
　無端ベルト１５は、第１送りローラ１３及び第２送りローラ１４に架けられている。搬送部１０では、無端ベルト１５のうち第１送りローラ１３から第２送りローラ１４に至る上側の部分１５ａの上面が、搬送部１０による被検査物Ｓの搬送領域Ｒである。つまり、第１送りローラ１３は、搬送領域Ｒの上流端に配置されており、第２送りローラ１４は、搬送領域Ｒの下流端に配置されている。 The endless belt 15 is hung on the first feed roller 13 and the second feed roller 14. In the transport unit 10, the upper surface of the upper portion 15 a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 is a transport region R of the inspection object S by the transport unit 10. That is, the first feed roller 13 is disposed at the upstream end of the transport region R, and the second feed roller 14 is disposed at the downstream end of the transport region R.
　支持体４５には、無端ベルト１５のうち第２送りローラ１４から第１送りローラ１３に至る下側の部分１５ｂを押圧する押圧ローラ４５ｃが設けられている。同様に、支持体４６には、無端ベルト１５のうち第２送りローラ１４から第１送りローラ１３に至る下側の部分１５ｂを押圧する押圧ローラ４６ｃが設けられている。これらの押圧ローラ４５ｃ，４６ｃによって、無端ベルト１５のテンションが適切に調整される。なお、第１支持フレーム１１には、第１送りローラ１３の回転軸の両端部を外側に押圧することで無端ベルト１５のテンションを微調整するためのテンション調整ボルト機構１８が設けられている。 The support body 45 is provided with a pressing roller 45 c that presses a lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13. Similarly, the support 46 is provided with a pressing roller 46 c that presses the lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13. By these pressing rollers 45c and 46c, the tension of the endless belt 15 is appropriately adjusted. The first support frame 11 is provided with a tension adjustment bolt mechanism 18 for finely adjusting the tension of the endless belt 15 by pressing both ends of the rotation shaft of the first feed roller 13 outward.
　支持体４６には、駆動モータ（不図示）に接続されたタイミングプーリ４７が設けられている。タイミングプーリ４７は、タイミングベルト４８を介して、第２送りローラ１４に設けられたタイミングプーリ１９に接続されている。これにより、搬送部１０は、駆動される。なお、タイミングプーリ１９，４７及びタイミングベルト４８は、下部扉４１側に配置されている。これにより、下部扉４１が開放されることで、タイミングプーリ１９，４７及びタイミングベルト４８が外部に露出される。 The support body 46 is provided with a timing pulley 47 connected to a drive motor (not shown). The timing pulley 47 is connected to a timing pulley 19 provided on the second feed roller 14 via a timing belt 48. Thereby, the transport unit 10 is driven. The timing pulleys 19 and 47 and the timing belt 48 are arranged on the lower door 41 side. Thereby, the timing pulleys 19 and 47 and the timing belt 48 are exposed to the outside by opening the lower door 41.
　支持プレート１６は、搬送領域Ｒにおいて無端ベルト１５を支持している。より具体的には、支持プレート１６は、無端ベルト１５のうち第１送りローラ１３から第２送りローラ１４に至る上側の部分１５ａを下側から支持している。支持プレート１６では、第１支持部分１６ａ及び第２支持部分１６ｂは、金属検出部３が有するケース３１の外側で互いに分離されている。本実施形態では、第１支持部分１６ａ及び第２支持部分１６ｂは、搬送方向Ｄにおけるケース３１の上流側の位置で互いに分離されている。第１支持部分１６ａ及び第２支持部分１６ｂは、非磁性且つ非導電性の材料（例えば、ベークライト、木材、樹脂等）で形成されている。つまり、支持プレート１６は、非磁性且つ非導電性の材料で形成されている。 The support plate 16 supports the endless belt 15 in the transport region R. More specifically, the support plate 16 supports the upper portion 15a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 from below. In the support plate 16, the first support portion 16 a and the second support portion 16 b are separated from each other outside the case 31 included in the metal detection unit 3. In the present embodiment, the first support portion 16 a and the second support portion 16 b are separated from each other at a position upstream of the case 31 in the transport direction D. The first support portion 16a and the second support portion 16b are formed of a nonmagnetic and nonconductive material (for example, bakelite, wood, resin, etc.). That is, the support plate 16 is made of a nonmagnetic and nonconductive material.
　第２支持部分１６ｂは、ケース３１の貫通穴３１ａを通過している。第２支持部分１６ｂのうち貫通穴３１ａを通過している部分には、Ｘ線検査部２のＸ線が通過するスリット１６ｃが形成されている。スリット１６ｃは、ケース３１の第１フード部３３に形成されたＸ線通過スリット３３ａ，３３ｂ間に位置している。 The second support portion 16 b passes through the through hole 31 a of the case 31. A slit 16c through which the X-ray of the X-ray inspection unit 2 passes is formed in a portion of the second support portion 16b passing through the through hole 31a. The slit 16 c is located between the X-ray passage slits 33 a and 33 b formed in the first hood portion 33 of the case 31.
　Ｘ線遮蔽プレート１００は、開口部４ａ，４ｂのうちＸ線検査部２に近い（Ｘ線検査部２の検査領域に近い）開口部４ａにおいてＸ線検査部２のＸ線を遮蔽する。Ｘ線遮蔽プレート１００は、例えばステンレス等の金属で形成されている。Ｘ線遮蔽プレート１００は、Ｘ線検査部２の検査領域と開口部４ａとの間において支持プレート１６に取り付けられている。より具体的には、図６に示されるように、Ｘ線遮蔽プレート１００は、支持プレート１６における第１支持部分１６ａの下面にネジ止め等によって固定されている。Ｘ線遮蔽プレート１００の主面に垂直な方向から見た場合に、Ｘ線遮蔽プレート１００の外縁は、第１支持部分１６ａの外縁の内側に位置している。上述したように、第１支持部分１６ａは、非導電性の材料で形成されているため、Ｘ線遮蔽プレート１００は、筐体４と電気的に絶縁されている。 The X-ray shielding plate 100 shields the X-rays of the X-ray inspection unit 2 at the opening 4a close to the X-ray inspection unit 2 (close to the inspection region of the X-ray inspection unit 2) among the openings 4a and 4b. The X-ray shielding plate 100 is made of a metal such as stainless steel, for example. The X-ray shielding plate 100 is attached to the support plate 16 between the inspection region of the X-ray inspection unit 2 and the opening 4a. More specifically, as shown in FIG. 6, the X-ray shielding plate 100 is fixed to the lower surface of the first support portion 16 a of the support plate 16 by screwing or the like. When viewed from a direction perpendicular to the main surface of the X-ray shielding plate 100, the outer edge of the X-ray shielding plate 100 is located inside the outer edge of the first support portion 16a. As described above, since the first support portion 16 a is formed of a non-conductive material, the X-ray shielding plate 100 is electrically insulated from the housing 4.
　以上説明したように、異物検査装置１では、搬送領域Ｒにおいて無端ベルト１５を支持する支持プレート１６が非磁性の材料で形成されている。これにより、金属検出部３で発生する磁界に支持プレート１６の影響が及ぶことが防止される。また、開口部４ａ，４ｂのうちＸ線検査部２に近い開口部４ａにおいて、Ｘ線遮蔽プレート１００によってＸ線検査部２のＸ線が遮蔽される。これにより、金属検出部３で発生する磁界にＸ線遮蔽プレート１００の影響が及ぶことが抑制されつつ、Ｘ線検査部２に近い開口部４ａを介してＸ線が外部に漏洩することが抑制される。よって、異物検査装置１によれば、金属検出部３の検出精度の低下の抑制、及びＸ線の外部漏洩の抑制の両立を図ることができる。 As described above, in the foreign matter inspection apparatus 1, the support plate 16 that supports the endless belt 15 in the transport region R is formed of a nonmagnetic material. This prevents the support plate 16 from affecting the magnetic field generated by the metal detection unit 3. In addition, in the opening 4a close to the X-ray inspection unit 2 among the openings 4a and 4b, the X-ray of the X-ray inspection unit 2 is shielded by the X-ray shielding plate 100. As a result, the influence of the X-ray shielding plate 100 on the magnetic field generated in the metal detection unit 3 is suppressed, and the leakage of X-rays to the outside through the opening 4a close to the X-ray inspection unit 2 is suppressed. Is done. Therefore, according to the foreign material inspection apparatus 1, it is possible to achieve both suppression of a decrease in detection accuracy of the metal detection unit 3 and suppression of external leakage of X-rays.
　また、異物検査装置１では、Ｘ線遮蔽プレート１００が支持プレート１６に取り付けられている。これにより、簡易な構成で、Ｘ線の外部漏洩を効果的に抑制し得る位置にＸ線遮蔽プレート１００を配置することができる。 In the foreign matter inspection apparatus 1, the X-ray shielding plate 100 is attached to the support plate 16. Thereby, it is possible to arrange the X-ray shielding plate 100 at a position where the external leakage of X-rays can be effectively suppressed with a simple configuration.
　また、異物検査装置１では、金属で形成されたＸ線遮蔽プレート１００が、金属で形成された筐体４と電気的に絶縁されている。Ｘ線遮蔽プレート１００が金属で形成されていることにより、開口部４ａを介したＸ線の外部漏洩をより確実に抑制することができる。また、Ｘ線遮蔽プレート１００が筐体４と電気的に絶縁されていることにより、金属検出部３で発生する磁界の影響でＸ線遮蔽プレート１００と筐体４との間で電流が流れることが防止されるため、金属検出部３の検出精度の低下をより確実に抑制することができる。 Further, in the foreign matter inspection apparatus 1, the X-ray shielding plate 100 made of metal is electrically insulated from the casing 4 made of metal. Since the X-ray shielding plate 100 is made of metal, external leakage of X-rays through the opening 4a can be more reliably suppressed. In addition, since the X-ray shielding plate 100 is electrically insulated from the housing 4, a current flows between the X-ray shielding plate 100 and the housing 4 due to the influence of the magnetic field generated in the metal detection unit 3. Therefore, it is possible to more reliably suppress a decrease in detection accuracy of the metal detection unit 3.
　また、異物検査装置１では、金属で形成された第１送りローラ１３及び第２送りローラ１４が、金属で形成された筐体４と電気的に絶縁されている。各送りローラ１３，１４が金属で形成されていることにより、各開口部４ａ，４ｂを介したＸ線の外部漏洩をより確実に抑制することができる。また、各送りローラ１３，１４が筐体４と電気的に絶縁されていることにより、金属検出部３で発生する磁界の影響で各送りローラ１３，１４と筐体４との間で電流が流れることが防止されるため、金属検出部３の検出精度の低下をより確実に抑制することができる。 In the foreign matter inspection apparatus 1, the first feed roller 13 and the second feed roller 14 made of metal are electrically insulated from the casing 4 made of metal. Since the feed rollers 13 and 14 are made of metal, external leakage of X-rays through the openings 4a and 4b can be more reliably suppressed. Further, since each feed roller 13, 14 is electrically insulated from the housing 4, a current is generated between each feed roller 13, 14 and the housing 4 due to the magnetic field generated in the metal detection unit 3. Since it is prevented from flowing, the fall of the detection accuracy of the metal detection part 3 can be suppressed more reliably.
　また、異物検査装置１では、支持プレート１６を形成する材料が非導電性の材料である。これにより、金属検出部３で発生する磁界の影響で支持プレート１６において電流が流れることが防止されるため、金属検出部３の検出精度の低下をより確実に抑制することができる。 In the foreign matter inspection apparatus 1, the material forming the support plate 16 is a non-conductive material. Thereby, since it is prevented that an electric current flows in the support plate 16 by the influence of the magnetic field which generate | occur | produces in the metal detection part 3, the fall of the detection accuracy of the metal detection part 3 can be suppressed more reliably.
　以上、本開示の一実施形態について説明したが、本開示の一形態に係る異物検査装置は、上述した実施形態に限定されるものではない。 As mentioned above, although one embodiment of this indication was explained, a foreign substance inspection device concerning one form of this indication is not limited to an embodiment mentioned above.
　例えば、図７に示されるように、第１送りローラ１３は、非導電性の材料（例えば、樹脂等）で形成された絶縁カラー１３ａを介して、第１支持フレーム１１に回転可能に支持されていてもよい。その場合には、支持体４５に設けられた絶縁部材４５ａを金属で形成しても、金属で形成された第１送りローラ１３が、金属で形成された筐体４と電気的に絶縁される。同様に、第２送りローラ１４は、非導電性の材料（例えば、樹脂等）で形成された絶縁カラー（不図示）を介して、第２支持フレーム１２に回転可能に支持されていてもよい。その場合には、支持体４６に設けられた絶縁部材４６ａを金属で形成しても、金属で形成された第２送りローラ１４が、金属で形成された筐体４と電気的に絶縁される。 For example, as shown in FIG. 7, the first feed roller 13 is rotatably supported by the first support frame 11 via an insulating collar 13a formed of a non-conductive material (for example, resin). It may be. In that case, even if the insulating member 45a provided on the support body 45 is made of metal, the first feed roller 13 made of metal is electrically insulated from the casing 4 made of metal. . Similarly, the second feed roller 14 may be rotatably supported by the second support frame 12 via an insulating collar (not shown) formed of a non-conductive material (for example, resin or the like). . In that case, even if the insulating member 46a provided on the support 46 is made of metal, the second feed roller 14 made of metal is electrically insulated from the casing 4 made of metal. .
　また、開口部４ａ，４ｂのうちＸ線検査部２から遠い開口部４ｂにおいてＸ線を遮蔽するＸ線遮蔽プレートが、Ｘ線遮蔽プレート１００に加えて設けられていてもよい。一例として、そのようなＸ線遮蔽プレートは、金属検出部３の検査領域と開口部４ｂとの間において支持プレート１６に取り付けられていてもよい。その場合、Ｘ線の外部漏洩がより確実に抑制されると共に、金属検出部３で発生する磁界のバランスが向上して金属検出部３の検出精度の低下がより確実に抑制される。 Further, in addition to the X-ray shielding plate 100, an X-ray shielding plate that shields X-rays in the opening 4b far from the X-ray inspection unit 2 among the openings 4a and 4b may be provided. As an example, such an X-ray shielding plate may be attached to the support plate 16 between the inspection region of the metal detection unit 3 and the opening 4b. In that case, external leakage of X-rays is more reliably suppressed, and the balance of the magnetic field generated in the metal detection unit 3 is improved, so that a decrease in detection accuracy of the metal detection unit 3 is more reliably suppressed.
　また、支持プレート１６は、少なくとも非磁性の材料で形成されていればよい。支持プレート１６が少なくとも非磁性の材料で形成されていれば、金属検出部３で発生する磁界に支持プレート１６の影響が及ぶことが防止される。また、支持プレート１６は、複数の支持部分に分離されずに一体で形成されていてもよいし、或いは、３つ以上の支持部分に分離されていてもよい。ただし、支持プレート１６が複数の支持部分に分離されていると、搬送方向Ｄに沿ってケース３１から搬送部１０を一体として引き出す必要がないため、支持プレート１６が分離されていない場合に比べれば、搬送部１０のメンテナンスを容易に実施することができる。 The support plate 16 only needs to be made of at least a nonmagnetic material. If the support plate 16 is made of at least a non-magnetic material, the influence of the support plate 16 on the magnetic field generated by the metal detection unit 3 is prevented. Further, the support plate 16 may be integrally formed without being separated into a plurality of support portions, or may be separated into three or more support portions. However, if the support plate 16 is separated into a plurality of support portions, there is no need to pull out the transport unit 10 from the case 31 along the transport direction D, so that the support plate 16 is not separated. The maintenance of the transport unit 10 can be easily performed.
　また、Ｘ線遮蔽プレート１００は、Ｘ線を遮蔽することができる材料（支持プレート１６の材料に比べ、Ｘ線を減衰させることができる材料）で形成されていれば、金属で形成されていなくてもよい。Ｘ線遮蔽プレート１００の材料が非導電性の材料であれば、Ｘ線遮蔽プレート１００を筐体４と電気的に絶縁する必要はない。また、Ｘ線遮蔽プレート１００は、支持プレート１６に取り付けられていなくてもよい。一例として、Ｘ線遮蔽プレート１００は、第１支持フレーム１１に取り付けられていてもよい。 Further, the X-ray shielding plate 100 is not made of metal as long as it is made of a material that can shield X-rays (a material that can attenuate X-rays compared to the material of the support plate 16). May be. If the material of the X-ray shielding plate 100 is a non-conductive material, it is not necessary to electrically insulate the X-ray shielding plate 100 from the housing 4. Further, the X-ray shielding plate 100 may not be attached to the support plate 16. As an example, the X-ray shielding plate 100 may be attached to the first support frame 11.
　また、搬送部１０は、その全てが筐体４の内部に収容されていてもよい。また、被検査物Ｓは、開口部４ｂから筐体４の内部に搬入され、筐体４の内部において検査が行われ、開口部４ａから筐体４の外部に搬出されてもよい。つまり、開口部４ｂが被検査物Ｓの搬入口であり、開口部４ａが被検査物Ｓの搬出口であってもよい。 Further, all of the transport unit 10 may be accommodated in the housing 4. Further, the inspection object S may be carried into the housing 4 through the opening 4b, inspected inside the housing 4, and carried out of the housing 4 through the opening 4a. That is, the opening 4b may be a carry-in port for the inspection object S, and the opening 4a may be a carry-out port for the inspection object S.
　１…異物検査装置、２…Ｘ線検査部、３…金属検出部、４…筐体、４ａ…開口部（搬入口）、４ｂ…開口部（搬出口）、１０…搬送部、１３…第１送りローラ、１４…第２送りローラ、１５…無端ベルト、１６…支持プレート、１００…Ｘ線遮蔽プレート、Ｒ…搬送領域、Ｓ…被検査物。 DESCRIPTION OF SYMBOLS 1 ... Foreign substance inspection apparatus, 2 ... X-ray inspection part, 3 ... Metal detection part, 4 ... Housing | casing, 4a ... Opening part (carrying in port), 4b ... Opening part (carrying out port), 10 ... Conveying part, 13th 1 feed roller 14 second feed roller 15 endless belt 16 support plate 100 X-ray shielding plate R transport area S inspection object

Claims (5)

  1. 　被検査物を搬送する搬送部と、
    　Ｘ線の透過性を利用して、前記搬送部で搬送されている前記被検査物に含まれる異物を検出するＸ線検査部と、
    　磁界と金属との相互作用を利用して、前記搬送部で搬送されている前記被検査物に含まれる金属を異物として検出する金属検出部と、
    　前記搬送部の少なくとも一部、前記Ｘ線検査部、及び前記金属検出部を内部に収容し、前記搬送部による前記被検査物の搬入口、及び前記搬送部による前記被検査物の搬出口を有する筐体と、を備え、
    　前記搬送部は、
    　前記搬送部による前記被検査物の搬送領域の上流端に配置された第１送りローラと、
    　前記搬送領域の下流端に配置された第２送りローラと、
    　前記第１送りローラ及び前記第２送りローラに架けられた無端ベルトと、
    　非磁性の材料で形成され、前記搬送領域において前記無端ベルトを支持する支持プレートと、
    　前記搬入口及び前記搬出口のうち前記Ｘ線検査部に近い前記搬入口又は前記搬出口において前記Ｘ線を遮蔽するＸ線遮蔽プレートと、を有する、異物検査装置。     A transport unit for transporting an object to be inspected;
    An X-ray inspection unit that detects foreign matter contained in the inspection object being transported by the transport unit, utilizing X-ray transparency;
    Utilizing the interaction between the magnetic field and the metal, a metal detection unit that detects the metal contained in the inspection object being conveyed by the conveyance unit as a foreign object,
    At least a part of the transfer unit, the X-ray inspection unit, and the metal detection unit are accommodated therein, and an entrance of the inspection object by the transfer unit and an exit port of the inspection object by the transfer unit are provided. A housing having
    The transport unit is
    A first feed roller disposed at an upstream end of a conveyance region of the inspection object by the conveyance unit;
    A second feed roller disposed at the downstream end of the transport region;
    An endless belt hung on the first feed roller and the second feed roller;
    A support plate that is formed of a non-magnetic material and supports the endless belt in the transport region;
    An X-ray shielding plate that shields the X-ray at the carry-in port or the carry-out port that is close to the X-ray inspection unit among the carry-in port and the carry-out port.
  2. 　前記Ｘ線遮蔽プレートは、前記支持プレートに取り付けられている、請求項１に記載の異物検査装置。 The foreign matter inspection apparatus according to claim 1, wherein the X-ray shielding plate is attached to the support plate.
  3. 　前記Ｘ線遮蔽プレートは、金属で形成されており、
    　前記Ｘ線遮蔽プレートは、金属で形成された前記筐体と電気的に絶縁されている、請求項１又は２に記載の異物検査装置。     The X-ray shielding plate is made of metal,
    The foreign matter inspection apparatus according to claim 1, wherein the X-ray shielding plate is electrically insulated from the housing made of metal.
  4. 　前記第１送りローラ及び前記第２送りローラは、金属で形成されており、
    　前記第１送りローラ及び前記第２送りローラは、金属で形成された前記筐体と電気的に絶縁されている、請求項１～３のいずれか一項に記載の異物検査装置。     The first feed roller and the second feed roller are made of metal,
    The foreign matter inspection apparatus according to any one of claims 1 to 3, wherein the first feed roller and the second feed roller are electrically insulated from the housing made of metal.
  5. 　前記支持プレートを形成する前記材料は、非導電性の材料である、請求項１～４のいずれか一項に記載の異物検査装置。 The foreign material inspection apparatus according to any one of claims 1 to 4, wherein the material forming the support plate is a non-conductive material.
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