WO2017214627A1 - Fabrication of trench-gated wide-bandgap devices - Google Patents

Fabrication of trench-gated wide-bandgap devices Download PDF

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Publication number
WO2017214627A1
WO2017214627A1 PCT/US2017/037050 US2017037050W WO2017214627A1 WO 2017214627 A1 WO2017214627 A1 WO 2017214627A1 US 2017037050 W US2017037050 W US 2017037050W WO 2017214627 A1 WO2017214627 A1 WO 2017214627A1
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conductivity
type
trenches
fabrication
forming
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PCT/US2017/037050
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French (fr)
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Jun Zeng
Mohamed Darwish
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Maxpower Semiconductor, Inc.
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Priority to CN201780002204.0A priority Critical patent/CN107851662A/en
Publication of WO2017214627A1 publication Critical patent/WO2017214627A1/en

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Definitions

  • the present application relates to power semiconductor switching devices, and more particularly to trench-gate devices with predominantly vertical current flow in wide-bandgap semiconductor materials.
  • SiC Silicon carbide
  • SiC Silicon carbide
  • the trench gate structure suffers a high electric field at the trench bottom corner due to the curvature of its geometry and the oxide thinning at the trench bottom and corner.
  • SiC trench gated devices this problem is worse than in a comparable silicon device because (for a given breakdown voltage rating) a higher epitaxial doping concentration is used in the SiC device; the higher epitaxial doping concentration results in a high bulk electric field in SiC drift region.
  • the high bulk field also leads to a higher electric field inside the gate oxide at the trench corner area when compared to the situation in Si device.
  • the gate oxide layer becomes much easier to breakdown at the trench bottom in SiC trench-gated device during off-state blocking operation.
  • the hot carrier injection becomes much severer. This is one of the most critical issues needed to be addressed in order to produce a reliable trench-gated SiC device.
  • the present application teaches, among other innovations, a fabrication process for manufacturing trench-gated power insulated-gate field-effect transistors to achieve doping modifications below at least some non-gate trenches.
  • the non-gate trenches are preferably and advantageously, but not necessarily, field plate trenches.
  • the disclosed process is especially advantageous with silicon carbide semiconductor materials.
  • the doping modification below the non-gate trenches is introduced in a self-aligned manner and activated before the gate oxide is grown on the gate trenches.
  • the gate dielectric growth is performed after all high temperature processes are finished; however, metal sputtering is used to form metal connections, and a transient annealing step ("RTA", or rapid thermal anneal) is optionally used for silicidation of front and back metallization (preferably simultaneously).
  • RTA transient annealing step
  • the doping modification can be chosen to provide merely a reduction in the doping below the non-gate trench. This reduces the peak field value below both the non-gate trenches and the gate trench, without significantly degrading the conductivity of the device.
  • Figure 1 schematically shows a trench-gate transistor which permits controllable vertical current flow through a silicon carbide semiconductor die.
  • Figures 2-11 show a sequence of process steps which result in fabrication of a completed transistor structure like that of Figure 12(a) or Figure 13(a).
  • Figure 12(b) shows a transistor structure which is generally similar to that of Figure 12(a), except that a tilted implant was used to produce shield extension regions.
  • Figure 13(b) shows a transistor structure which is generally similar to that of Figure 13(a), except that a tilted implant was used to produce shield extension regions.
  • Figures 14(a) and 14(b) show a transistor structure which is generally somewhat similar to that of Figure 12(a), except that no bottom oxide is present in the gate trench. Note that Figures 14(a) and 14(b) use different modified doping regions 106 and 1061 formation methods.
  • Figures 15-20 show a sequence of process steps which result in fabrication of a completed transistor structure like that of Figure 21(a) or Figure 21(b) or Figure 22. Note that Figures 21(a) and 21(b) use different modified doping regions 106 and 1061 formation methods. [0016] Figure 23 and Figure 24 show alternative devices which do not have the poly field plate in the source contact trench.
  • Figure 25 shows an example of an IGBT device which uses the disclosed innovations.
  • the present application discloses new approaches to fabrication of vertical-current-flow insulated-gate active devices in wide-bandgap semiconductor materials.
  • SiC Silicon carbide
  • SiC Silicon carbide
  • the trench gate structure suffers a high electric field at the trench bottom corner due to the curvature of its geometry and the oxide thinning at the trench bottom and corner.
  • SiC trench gated devices this problem is worse than in a comparable silicon device because (for a given breakdown voltage rating) a higher epitaxial doping concentration is used in the SiC device; the higher epitaxial doping concentration results in a high bulk electric field in SiC drift region.
  • the high bulk field also leads to a higher electric field inside the gate oxide at the trench corner area when compared to the situation in Si device.
  • the gate oxide layer becomes much easier to breakdown at the trench bottom in SiC trench-gated device during off-state blocking operation.
  • the hot carrier injection becomes much severer. This is one of the most critical issues needed to be addressed in order to produce a reliable trench-gated SiC device.
  • the present application discloses a fabrication process for manufacturing SiC material based trench-gated power MOSFET with doping modifications below non-gate trenches, e.g. like those disclosed in US patent 8,076,719.
  • Figure 1 shows a trench-gate transistor which permits controllable vertical current flow, e.g. from front to back of a device die.
  • Front-side current-carrying metallization 192 connects to n+ source region 142, and also to a p+ body contact region 143 (which connects to p-type body 144).
  • An interlevel dielectric 118 provides electrical insulation of the metallization from the gate electrode 112.
  • Back-side current-carrying metallization 194 connects to n+ substrate 100, which acts as the drain contact.
  • This is an n-channel (NMOS) device.
  • NMOS n-channel
  • the drain terminal 194 is connected to a positive voltage (e.g. 1000V, with the source terminal 192 connected to ground): when the gate electrode 122 is raised to a sufficiently positive voltage, it will invert the nearest part of the body region 144 to form a channel.
  • the drift region includes a region 106 where the body doping has been modified; the function of this region will be discussed further below.
  • the gate voltage at which the channel forms is referred to as the "threshold" voltage. This may be e.g. 1V-6V, but the exact value of the threshold voltage will depend on body doping, channel doping, oxide fixed charge if any, work function differences, etc.
  • the gate trench 110 includes a buried oxide layer 114 below the gate electrode 112.
  • the non-gate trenches 120 include recessed field plates 122, which are typically tied to the source potential.
  • Table 1 shows an overview of a process flow for producing a device like that shown in Figure 1.
  • HDP High Quality Oxide Fill
  • the sequence of operations includes: Starting with SiC N+ substrate 100, the N-buffer layer 101 and N- epitaxial layer 102 are grown. (It is important to note that the SiC starting material can also be grown on a Silicon substrate in order to reduce cost.)
  • a masked implant is optionally performed to modify the doping concentration of N- epitaxial layer 102, and thereby form the modified doping region 106. Most preferably this implant is of a donor dopant (such as P 3 J 1 1 or N 2 ). As shown in Figure 2, this is followed by a masked implant (using an acceptor dopant, e.g. Al or B) which forms the p-type body region 144. This is performed by implants with multiple dosages and energy; the dosages are in the range from 5E12 (5x10 12 ) to 5E13/cm 2 ' and the energy is between lOOkeV and lMeV.
  • the ambient temperature can be room temperature or a moderate higher temperature, such as 400°C-700°C. (This doping value will affect the threshold voltage, as will the channel doping introduced later in the process.)
  • N+ implant (using a donor dopant, e.g. such as P or N 2 ) is now performed in the locations where the n+ source regions 142 will be located.
  • a donor dopant e.g. such as P or N 2
  • a p-type implant using an acceptor dopant, such as Al or B
  • an acceptor dopant such as Al or B
  • This high-temperature step activates the N+ and P+ implants, and will slightly shift the profile of the source region 142.
  • N+ and P+ implants are preferably done at an elevated temperature (such as 600°C). This results in the structure shown in Figure 3.
  • a SiC etch is now carried out to form the gate trenches 110 and non-gate trenches 120. (These trenches are preferably identical at this point, but will be differentiated by later steps.) This produces the structure shown in Figure 4.
  • Another alternative to form the optional modified doping region 106 is by using a blanket implant to locally modify the doping concentration of N- epitaxial layer 102. Most preferably this is of a donor dopant (such as P 31 or N 2 ), in which case the modified doping region 106 has heavier doping, and hence higher conductivity, than the rest of the N- epitaxial layer 102.
  • the blanket implant can use an acceptor dopant, such as Al or B, to locally decrease the doping concentration of N- epitaxial layer 102.
  • an acceptor dopant such as Al or B
  • This provides some reduction in the peak field value near the bottom corners of the trenches, and hence can provide some additional protection against hot carrier injection. This can be advantageous in high-voltage and/or rad-hard applications. This results in the structure of Figure 5.
  • patterned resist 602 is used to protect the active gate trench 110, and then acceptor dopant (such as Al or B) is implanted into N/N- epitaxial layer 102 through the field plate trench 120, as shown in Figure 6.
  • acceptor dopant such as Al or B
  • This implant will form the P- Shield region 146 underneath the trenches 120.
  • the implantation can be adjusted properly to optimize the P- Shield profile along the field plate trench sidewall and the depth of P- Shield.
  • the gate formation process begins. Initially a sacrificial oxide is preferably grown and stripped.
  • the gate oxide layer itself is preferably formed by dry thermal oxidation (or alternatively by a CVD process) along the trench sidewall as illustrated by Figure 10.
  • the gate oxide thickness is preferably between 400A (40nm) to 600A, and typically 500A.
  • Gate oxide formation is most preferably done in two steps: first, a layer of stoichiometric oxide is formed by CVD deposition or high temperature oxidation, in temperature range between 1100°C to 1300°C; secondly, a relatively high temperature anneal is performed in an oxidizing nitrogen-rich ambient (e.g. with 100% N 2 0 or NO). The anneal temperature, in this example, is between 1100°C to 1350°C. No high- temperature process steps should follow the gate oxide anneal.
  • the gate oxide can be partially converted to an oxynitride compound.
  • the net activity of nitrogen is increased by using an oxygen-nitrogen compound as the oxidizing component in the gas phase, and can be further increased by addition of N 2 or other nitrogen source.
  • This culminating gate oxide anneal maximizes the quality of the semiconductor-to-oxide interface. Surprisingly, this culminating anneal also provides improvement in the radiation-hardness of the final device.
  • Interlevel dielectric 118 is now formed, e.g. by CVD, and etched back to expose the non-gate trenches 120.
  • a recess etch is now performed to expose the n+ source and p+ body contact regions to the source metallization.
  • a thick metal layer such as Aluminum, is now deposited on the front side of the device to form the Source electrode.
  • Another thick metal layer similarly forms the Drain electrode.
  • Electrical connection to the gate electrode 112 is formed similarly, but outside the area illustrated.
  • Figures 12(a) through 13(b) show a variety of final device structures produced by the above steps.
  • the modified-doping region 106 is an "N-reduced" region, resulting from the implantation of acceptors as an N-reduction implant at the stage of Figure 5.
  • Figures 12(a) and Figure 12(b) show examples where donors were blanket-implanted to make region 106 an "N- enhanced” region.
  • the "N-reduced” region can be utilized to further lessen the electric field at the trench bottom and corners.
  • the "N- enhanced” region can be used to reduce the device on-resistance and enhance forward current conduction.
  • the location of the P-shield 146 is expanded to include additional p-shield-extension regions 147 around the sides of the non- gate trenches 122.
  • the P body can either be connected to the P-Shield zone or disconnected from the P-Shield zone. Examples of this are shown in Figure 12(b) and Figure 13(b).
  • Figure 12(a) and Figure 13(a), by contrast, show examples where the P-Shield implant was not tilted (0 degrees tilt angle).
  • the dopings and thicknesses will depend on what operating voltage a device is designed for. For example, when the above device is optimized for 1200V operation, the epitaxial layer thickness is expected to be about H um, and its doping is expected to be about 6E15/cm . For a 650V implementation, the epitaxial layer thickness is expected to be about 5 ⁇ and its doping is about lE16/cm .
  • the P-body junction depth is preferably about 0.8 ⁇ and the trench depth is about l um.
  • the shield region 146 is about 0.5 ⁇ to ⁇ thick, so the thickness of the epitaxial layer below the shield is expected to be about 9 ⁇ for 1200V device, and about 3 ⁇ for 650V device. 54] Table 2 summarizes the process flow for producing the device shown in Figures 14(a) or 14(b), in which the thick bottom oxide BOX is eliminated. Its process flow is similar to, but simpler than, the process sequence described in the previous paragraphs.
  • N+ implant (using a donor dopant, e.g. such as P or N 2 ) is now performed in the locations where the n+ source regions 142 will be.
  • a donor dopant e.g. such as P or N 2
  • These steps are preferably followed by p-type implants (using an acceptor dopant, such as Al or B), to form the P-body contact region 143.
  • p-type implants using an acceptor dopant, such as Al or B
  • This is followed by a high temperature furnace anneal process (>1600°C) in Ar ambient with a carbon cap layer 302 for protection.
  • This high-temperature step activates the N+ and P+ implants, and will slightly shift the profile of the source region 142.
  • N+ and P+ implants are preferably done at an elevated temperature (such as 600°C). This results in the structure shown in Figure 16.
  • a SiC etch is now carried out to form the gate trenches 110 and non-gate trenches 120. (This trenches are preferably identical at this point, but will be differentiated by later steps.) This produces the structure shown in Figure 17.
  • a blanket implant is now performed to locally modify the doping concentration of N- epitaxial layer 102, and thereby form the modified doping region 106. Most preferably this is of a donor dopant
  • the blanket implant can use an acceptor dopant, such as Al or B, to locally decrease the doping concentration of N- epitaxial layer 102. This provides some reduction in the peak field value near the bottom corners of the trenches, and hence can provide some additional protection against hot carrier injection. This can be advantageous in high-voltage and/or rad-hard applications. This results in the structure of Figure 18.
  • patterned resist 602 is used to protect the active gate trench 110, and then acceptor dopant (such as Al or B) is implanted into N/N- epitaxial layer 102 through the field plate trench 120, as shown in Figure 19.
  • acceptor dopant such as Al or B
  • This implant will form the P-Shield region 146 underneath the trenches 120.
  • the implantation can be adjusted to optimize the P-Shield profile along the field plate trench sidewall and the depth of P-Shield.
  • the gate formation process is done as described above, ending with a culminating anneal in an oxidizing nitrogen-rich ambient (e.g. with N 2 0 or NO).
  • the anneal temperature in this example, is between 1100°C to 1350°C. No high-temperature process steps should follow the gate oxide anneal.
  • This culminating gate oxide anneal maximizes the quality of the semiconductor-to-oxide interface. Surprisingly, this culminating anneal also provides improvement in the radiation-hardness of the final device.
  • the gate electrode 112 and field plate 122 are now formed, e.g. by deposition and CMP of n+ polysilicon. Following this interlevel dielectric is now formed and etched back. A recess etch is performed, front and backside contact metal layer are formed, and source, drain, and gate metal is deposited. This produces the final structure of Figure 21(a) or Figure 21(b) (if modified region 106 in Figure 21(a) or region 1061 in Figure 21(b) had enhanced doping), or the final structure of Figure 22 (if modified region 106 was partly counter doped).
  • Figure 23 and Figure 24 show devices without the poly field plate in the source contact trench, but with only the P-Shield regions. Note also that a tilted implant was used to produce extended shield regions in these examples.
  • the new process discussed in this invention can also be utilized to produce the depletion mode trench-gated MOSFET or radiation hardened trench-gated MOSFET in both Si and SiC or other semiconductor materials.
  • the disclosed innovations in various embodiments, provide one or more of at least the following advantages. However, not all of these advantages result from every one of the innovations disclosed, and this list of advantages does not limit the various claimed inventions. • Ability to build power semiconductor devices in high-bandgap semiconductor materials;
  • a power semiconductor device fabrication process comprising: in a semiconductor mass consisting essentially of silicon carbide, forming, in any order, a first-conductivity-type source region, a second-conductivity-type body region which forms a junction with first- conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, a second- conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first-conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the source region, the body region, the shield region, and the additional doping modification component; performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere,
  • a power semiconductor device fabrication process comprising: in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, a first and second trenches, each extending deeper than the body region, second-conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first- conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component; performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and
  • a power semiconductor device fabrication process comprising: in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, second-conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first- conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component; performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and forming metallization to complete fabrication of
  • a power semiconductor device fabrication process comprising: a) in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, and a second-conductivity-type shield regions lying below said first trenches but not below said second trench; b) applying heat to activate dopants in the carrier emission region, the body region, and the shield region; c) performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and d) forming metallization to complete fabrication of an operative device; wherein no non
  • a power semiconductor device fabrication process comprising: a) in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, a first and second trenches, each extending deeper than the body region, and second-conductivity-type shield regions lying below said first trenches but not below said second trenches; b) applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component; c) performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and d) forming metallization to complete fabrication of an operative device; wherein no non
  • the devices fabricated are simple vertical-current-flow field-effect transistors.
  • the disclosed inventions can also be used to form other device types which include an insulated gate.
  • One example would be IGBTs (as in Figure 25), but other possibilities contemplated include MCTs and TMBs TMBS (Trench MOS Barrier Schottky Rectifiers).

Abstract

A silicon carbide (or comparable) trench transistor in which gate dielectric anneal, in an oxynitriding atmosphere, is performed after all other high-temperature steps have already been done.

Description

Fabrication of Trench-Gated Wide-Bandgap Devices
CROSS-REFERENCE
[0001] Priority is claimed from US 62/348,783, which is hereby incorporated by reference.
BACKGROUND
[0002] The present application relates to power semiconductor switching devices, and more particularly to trench-gate devices with predominantly vertical current flow in wide-bandgap semiconductor materials.
[0003] Note that the points discussed below may reflect the hindsight gained from the disclosed inventions, and are not necessarily admitted to be prior art.
[0004] Silicon carbide ("SiC") power MOSFETs suffer from low channel mobility, which results in a higher on-state resistance due to high channel resistance. In order to improve this problem, one of the most efficient techniques is to increase the channel density by employing a trench gate structure. However, the trench gate structure suffers a high electric field at the trench bottom corner due to the curvature of its geometry and the oxide thinning at the trench bottom and corner. In SiC trench gated devices this problem is worse than in a comparable silicon device because (for a given breakdown voltage rating) a higher epitaxial doping concentration is used in the SiC device; the higher epitaxial doping concentration results in a high bulk electric field in SiC drift region. Moreover, the high bulk field also leads to a higher electric field inside the gate oxide at the trench corner area when compared to the situation in Si device. As consequence, the gate oxide layer becomes much easier to breakdown at the trench bottom in SiC trench-gated device during off-state blocking operation. Additionally, the hot carrier injection becomes much severer. This is one of the most critical issues needed to be addressed in order to produce a reliable trench-gated SiC device.
Fabrication of Trench-Gated Wide-Bandgap Devices
[0005] The present application teaches, among other innovations, a fabrication process for manufacturing trench-gated power insulated-gate field-effect transistors to achieve doping modifications below at least some non-gate trenches. The non-gate trenches are preferably and advantageously, but not necessarily, field plate trenches. The disclosed process is especially advantageous with silicon carbide semiconductor materials.
[0006] The present application teaches that doping modifications below non-gate trenches can be used to improve the tradeoff between conductivity and breakdown voltage as well as the electric field in wide- bandgap field-effect transistors.
[0007] One inventive point is that the doping modification below the non-gate trenches is introduced in a self-aligned manner and activated before the gate oxide is grown on the gate trenches. Most preferably the gate dielectric growth is performed after all high temperature processes are finished; however, metal sputtering is used to form metal connections, and a transient annealing step ("RTA", or rapid thermal anneal) is optionally used for silicidation of front and back metallization (preferably simultaneously).
[0008] Another inventive point is that the doping modification can be chosen to provide merely a reduction in the doping below the non-gate trench. This reduces the peak field value below both the non-gate trenches and the gate trench, without significantly degrading the conductivity of the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] The disclosed inventions will be described with reference to the accompanying drawings, which show important sample embodiments and which are incorporated in the specification hereof by reference, wherein:
[0010] Figure 1 schematically shows a trench-gate transistor which permits controllable vertical current flow through a silicon carbide semiconductor die.
[0011] Figures 2-11 show a sequence of process steps which result in fabrication of a completed transistor structure like that of Figure 12(a) or Figure 13(a).
[0012] Figure 12(b) shows a transistor structure which is generally similar to that of Figure 12(a), except that a tilted implant was used to produce shield extension regions.
[0013] Figure 13(b) shows a transistor structure which is generally similar to that of Figure 13(a), except that a tilted implant was used to produce shield extension regions.
[0014] Figures 14(a) and 14(b) show a transistor structure which is generally somewhat similar to that of Figure 12(a), except that no bottom oxide is present in the gate trench. Note that Figures 14(a) and 14(b) use different modified doping regions 106 and 1061 formation methods.
[0015] Figures 15-20 show a sequence of process steps which result in fabrication of a completed transistor structure like that of Figure 21(a) or Figure 21(b) or Figure 22. Note that Figures 21(a) and 21(b) use different modified doping regions 106 and 1061 formation methods. [0016] Figure 23 and Figure 24 show alternative devices which do not have the poly field plate in the source contact trench.
[0017] Figure 25 shows an example of an IGBT device which uses the disclosed innovations.
DETAILED DESCRIPTION OF SAMPLE EMBODIMENTS
[0018] The numerous innovative teachings of the present application will be described with particular reference to presently preferred embodiments (by way of example, and not of limitation). The present application describes several inventions, and none of the statements below should be taken as limiting the claims generally.
[0019] The present application discloses new approaches to fabrication of vertical-current-flow insulated-gate active devices in wide-bandgap semiconductor materials.
[0020] Silicon carbide ("SiC") power MOSFETs suffer from low channel mobility, which results in a higher on-state resistance due to high channel resistance. In order to improve this problem, one of the most efficient techniques is to increase the channel density by employing a trench gate structure. However, the trench gate structure suffers a high electric field at the trench bottom corner due to the curvature of its geometry and the oxide thinning at the trench bottom and corner. In SiC trench gated devices this problem is worse than in a comparable silicon device because (for a given breakdown voltage rating) a higher epitaxial doping concentration is used in the SiC device; the higher epitaxial doping concentration results in a high bulk electric field in SiC drift region. Moreover, the high bulk field also leads to a higher electric field inside the gate oxide at the trench corner area when compared to the situation in Si device. As consequence, the gate oxide layer becomes much easier to breakdown at the trench bottom in SiC trench-gated device during off-state blocking operation. Additionally, the hot carrier injection becomes much severer. This is one of the most critical issues needed to be addressed in order to produce a reliable trench-gated SiC device.
[0021] Fortunately, this weakness can be significantly improved by the new device structure described in US patent 8,076,719. The new device has P-type shield region underneath the field plate trench to reduce the electric field at the trench bottom and corners. It also has a thick oxide layer at the trench bottom which greatly reduces the electric field of oxide inside the trench. Therefore, this new device structure can be directly used to resolve the problem mentioned above. However, the fabrication process disclosed in 8,076,719 has several drawbacks for fabrication of the new device using the SiC material. This is because, in order to avoid the Si sublimation and the surface step bunching formation as well as the carbon cluster development in the SiC/Oxide interface, it is desired to grow the gate oxide after all high temperature anneal/activation process steps completed.
[0022] The present application discloses a fabrication process for manufacturing SiC material based trench-gated power MOSFET with doping modifications below non-gate trenches, e.g. like those disclosed in US patent 8,076,719.
[0023] Figure 1 shows a trench-gate transistor which permits controllable vertical current flow, e.g. from front to back of a device die. Front-side current-carrying metallization 192 connects to n+ source region 142, and also to a p+ body contact region 143 (which connects to p-type body 144). An interlevel dielectric 118 provides electrical insulation of the metallization from the gate electrode 112.
[0024] Back-side current-carrying metallization 194 connects to n+ substrate 100, which acts as the drain contact. [0025] This is an n-channel (NMOS) device. In the operation, assuming that the drain terminal 194 is connected to a positive voltage (e.g. 1000V, with the source terminal 192 connected to ground): when the gate electrode 122 is raised to a sufficiently positive voltage, it will invert the nearest part of the body region 144 to form a channel. Once the channel has formed, the flow of electrons is no longer blocked by a reverse-biased source junction, so electrons (which are the majority carriers) will flow out of the source, through the channel (bypassing the uninverted portions of the body), and into the drift region (provided, in this example, by the uppermost parts of the n- epitaxial layer 102). The drift region, as illustrated, includes a region 106 where the body doping has been modified; the function of this region will be discussed further below.
[0026] The gate voltage at which the channel forms is referred to as the "threshold" voltage. This may be e.g. 1V-6V, but the exact value of the threshold voltage will depend on body doping, channel doping, oxide fixed charge if any, work function differences, etc.
[0027] In this example, the gate trench 110 includes a buried oxide layer 114 below the gate electrode 112. The non-gate trenches 120 include recessed field plates 122, which are typically tied to the source potential.
[0028] Table 1 shows an overview of a process flow for producing a device like that shown in Figure 1.
Process Flow with BOX Layer
• Wafer Start
· PECVD Oxide • Optional N-Enhancement Photo and Hardmask formation
• Optional N-Enhancement Implant
• N+ Source Photo
• N+ Source Implant
• P-Well Photo and Hardmask formation
P-Well Implant
• P+ Body Photo and Hardmask formation
• P+ Body Implant
• PECVD Oxide Removal
• Anneal w/ the carbon caps layer
• Hard Mask (USG)
• Trench Photo
• Trench Hard Mask Etch
• Trench Etch
• Trench-reflow
• Alternative (optional) N-Enhancement Implant.
• P- Shield Photo
P- Shield-Implant
• Anneal w/ the carbon caps layer
• Sacrificial Oxidation (SAC)
• SAC Oxide Removal
• High Quality Oxide Fill (HDP)
• USG ReFill (PECVD)
• CMP
• Active Etch • Trench Bottom Oxide (BOX)
• BOX Photo
• BOX Remove
• Gate Oxidation
• PolySi Deposition
• PolySi Activation/ Anneal
• PolySi
• ILD CVD
• Contact Photo
• Plug Etch
• Ni/TiN/Ti Sputtering on both front and backside
• Silicidation by RTA
• Frontside Metal (Ml) Sputtering
• Ml Photo
• Ml Etch
• Passivation
• PAD Photo
• PAD Open
Table 1 29] In more detail, the sequence of operations includes: Starting with SiC N+ substrate 100, the N-buffer layer 101 and N- epitaxial layer 102 are grown. (It is important to note that the SiC starting material can also be grown on a Silicon substrate in order to reduce cost.) A masked implant is optionally performed to modify the doping concentration of N- epitaxial layer 102, and thereby form the modified doping region 106. Most preferably this implant is of a donor dopant (such as P 3J 11 or N2). As shown in Figure 2, this is followed by a masked implant (using an acceptor dopant, e.g. Al or B) which forms the p-type body region 144. This is performed by implants with multiple dosages and energy; the dosages are in the range from 5E12 (5x10 12 ) to 5E13/cm 2 ' and the energy is between lOOkeV and lMeV.
[0030] The ambient temperature can be room temperature or a moderate higher temperature, such as 400°C-700°C. (This doping value will affect the threshold voltage, as will the channel doping introduced later in the process.)
[0031] An N+ implant (using a donor dopant, e.g. such as P or N2) is now performed in the locations where the n+ source regions 142 will be located.
[0032] These steps are preferably followed by a p-type implant (using an acceptor dopant, such as Al or B), to form the P-body contact region 143. This is followed by a high temperature furnace anneal process (>1600°C) in Ar ambient with a carbon cap layer 302 for protection. This high-temperature step activates the N+ and P+ implants, and will slightly shift the profile of the source region 142.
[0033] The N+ and P+ implants are preferably done at an elevated temperature (such as 600°C). This results in the structure shown in Figure 3.
[0034] With a hard mask 402 (such as oxide), a SiC etch is now carried out to form the gate trenches 110 and non-gate trenches 120. (These trenches are preferably identical at this point, but will be differentiated by later steps.) This produces the structure shown in Figure 4. [0035] Another alternative to form the optional modified doping region 106 is by using a blanket implant to locally modify the doping concentration of N- epitaxial layer 102. Most preferably this is of a donor dopant (such as P 31 or N2), in which case the modified doping region 106 has heavier doping, and hence higher conductivity, than the rest of the N- epitaxial layer 102. Alternatively, as discussed below, the blanket implant can use an acceptor dopant, such as Al or B, to locally decrease the doping concentration of N- epitaxial layer 102. This provides some reduction in the peak field value near the bottom corners of the trenches, and hence can provide some additional protection against hot carrier injection. This can be advantageous in high-voltage and/or rad-hard applications. This results in the structure of Figure 5.
[0036] Next, patterned resist 602 is used to protect the active gate trench 110, and then acceptor dopant (such as Al or B) is implanted into N/N- epitaxial layer 102 through the field plate trench 120, as shown in Figure 6. This implant will form the P- Shield region 146 underneath the trenches 120. The implantation can be adjusted properly to optimize the P- Shield profile along the field plate trench sidewall and the depth of P- Shield.
[0037] After complete removal of the BOX photo resist 602 and surface oxide layers, a high temperature process (>1600°C) in Ar ambient is carried out to anneal and activate all of implanted dopants with a carbon cap layer 702 in place for protection. This is depicted in Figure 7.
[0038] Next all the trenches (110 and 120) are filled up with high density oxide. The oxide etch back process is then applied to create the trench thick bottom oxide layer (BOX) 114 as shown in Figure 8. [0039] Next, the BOX photo resist 602 is formed again to protect the active gate trench 110, and the oxide inside the field plate trench is completely etched. This leaves a BOX oxide 114 in place in the gate trenches 110, but not in the non-gate trenches 120, as shown in Figure 9.
[0040] At this point, all of high temperature processes are finished.
("High Temperature" process steps, in SiC device fabrication, would generally be considered to be those using a temperature of more than 1200C - especially those where heating is not transient.) No more high temperature process steps follow the process of gate formation.
[0041] Now, the gate formation process begins. Initially a sacrificial oxide is preferably grown and stripped. The gate oxide layer itself is preferably formed by dry thermal oxidation (or alternatively by a CVD process) along the trench sidewall as illustrated by Figure 10. The gate oxide thickness is preferably between 400A (40nm) to 600A, and typically 500A.
[0042] Gate oxide formation is most preferably done in two steps: first, a layer of stoichiometric oxide is formed by CVD deposition or high temperature oxidation, in temperature range between 1100°C to 1300°C; secondly, a relatively high temperature anneal is performed in an oxidizing nitrogen-rich ambient (e.g. with 100% N20 or NO). The anneal temperature, in this example, is between 1100°C to 1350°C. No high- temperature process steps should follow the gate oxide anneal.
[0043] Depending on the nitrogen concentration during the culminating anneal, the gate oxide can be partially converted to an oxynitride compound. The net activity of nitrogen is increased by using an oxygen-nitrogen compound as the oxidizing component in the gas phase, and can be further increased by addition of N2 or other nitrogen source.
[0044] This culminating gate oxide anneal maximizes the quality of the semiconductor-to-oxide interface. Surprisingly, this culminating anneal also provides improvement in the radiation-hardness of the final device.
[0045] The gate electrode 112 and field plate 122 are now formed, e.g. by deposition and CMP of n+ poly silicon. This results in the structure of Figure 11.
[0046] Interlevel dielectric 118 is now formed, e.g. by CVD, and etched back to expose the non-gate trenches 120. A recess etch is now performed to expose the n+ source and p+ body contact regions to the source metallization.
[0047] From this point on the rest of process steps are generally similar to those described in prior art 8,076,719, with exception that the front and backside contact metal layer are formed at the same time (e.g. by sputter deposition of a nickel/Titanium Nitride/titanium stack, followed by TA silicidation).
[0048] This is done in order to achieve good ohmic contact to both N+ Source (front side) and N+ Drain (backside) regions. The typical RTA is carried out at 950°C in Ar ambient.
[0049] A thick metal layer, such as Aluminum, is now deposited on the front side of the device to form the Source electrode. Another thick metal layer similarly forms the Drain electrode. Electrical connection to the gate electrode 112 is formed similarly, but outside the area illustrated.
[0050] Figures 12(a) through 13(b) show a variety of final device structures produced by the above steps. In Figure 13(a) and Figure 13(b) the modified-doping region 106 is an "N-reduced" region, resulting from the implantation of acceptors as an N-reduction implant at the stage of Figure 5. By contrast, Figures 12(a) and Figure 12(b) show examples where donors were blanket-implanted to make region 106 an "N- enhanced" region. The "N-reduced" region can be utilized to further lessen the electric field at the trench bottom and corners. The "N- enhanced" region can be used to reduce the device on-resistance and enhance forward current conduction.
[0051] Another option is use of a tilted implant at the stage of Figure 6.
In this case the location of the P-shield 146 is expanded to include additional p-shield-extension regions 147 around the sides of the non- gate trenches 122. Thus, depending on the implant angle of P-Shield dopant, the P body can either be connected to the P-Shield zone or disconnected from the P-Shield zone. Examples of this are shown in Figure 12(b) and Figure 13(b).
[0052] Figure 12(a) and Figure 13(a), by contrast, show examples where the P-Shield implant was not tilted (0 degrees tilt angle).
[0053] The dopings and thicknesses will depend on what operating voltage a device is designed for. For example, when the above device is optimized for 1200V operation, the epitaxial layer thickness is expected to be about H um, and its doping is expected to be about 6E15/cm . For a 650V implementation, the epitaxial layer thickness is expected to be about 5μπι and its doping is about lE16/cm . The P-body junction depth is preferably about 0.8μπι and the trench depth is about l um. The shield region 146 is about 0.5μπι to Ιμπι thick, so the thickness of the epitaxial layer below the shield is expected to be about 9μπι for 1200V device, and about 3μπι for 650V device. 54] Table 2 summarizes the process flow for producing the device shown in Figures 14(a) or 14(b), in which the thick bottom oxide BOX is eliminated. Its process flow is similar to, but simpler than, the process sequence described in the previous paragraphs.
Process Flow without BOX Layer
• Wafer Start
• PECVD Oxide
• Optional N-Enhancement Photo an Hardmask f
• Optional N-Enhancement Implant
• N+ Source Photo and Hardmask formation
• N+ Source Implant
• P- Well Photo
• P-Well Implant
• P+ Body Photo and Hardmask formation
• P+ Body Implant
• PECVD Oxide Removal
• Anneal w/ the carbon caps layer
• Hard Mask (USG)
• Trench Photo
• Trench Hard Mask Etch
• Trench Etch
• Trench-reflow
• Alternative (optional) N-Enhancement
Implant. • P- Shield Photo
P- Shield-Implant
• Anneal w/ the carbon caps layer
• Sacrificial Oxidation (SAC)
• SAC Oxide Removal
• Gate Oxidation
• PolySi Deposition
• PolySi Activation/ Anneal
• PolySi/TiW Etch-back
• ILD CVD
• Contact Photo
• Plug Etch
• Ni/TiN/Ti Sputtering on both front and backside
• Silicidation by RTA
• Frontside Metal (Ml) Sputtering
• Ml Photo
• Ml Etch
• Passivation
• PAD Photo
• PAD Open
Table 2 [0055] This process is illustrated in Figures 15-22. Starting with SiC N+ substrate 100, the N-buffer layer 101 and N- epitaxial layer 102 are grown. As shown in Figure 15, this is followed by a masked implant (using an acceptor dopant, e.g. Al or B) which forms the p-type body region 144.
[0056] An N+ implant (using a donor dopant, e.g. such as P or N2) is now performed in the locations where the n+ source regions 142 will be.
[0057] These steps are preferably followed by p-type implants (using an acceptor dopant, such as Al or B), to form the P-body contact region 143. This is followed by a high temperature furnace anneal process (>1600°C) in Ar ambient with a carbon cap layer 302 for protection. This high-temperature step activates the N+ and P+ implants, and will slightly shift the profile of the source region 142.
[0058] The N+ and P+ implants are preferably done at an elevated temperature (such as 600°C). This results in the structure shown in Figure 16.
[0059] With a hard mask 402 (such as oxide), a SiC etch is now carried out to form the gate trenches 110 and non-gate trenches 120. (This trenches are preferably identical at this point, but will be differentiated by later steps.) This produces the structure shown in Figure 17.
[0060] A blanket implant is now performed to locally modify the doping concentration of N- epitaxial layer 102, and thereby form the modified doping region 106. Most preferably this is of a donor dopant
(such as P 31 or N2), in which case the modified doping region 106 has heavier doping, and hence higher conductivity, than the rest of the N- epitaxial layer 102. Alternatively, as discussed below, the blanket implant can use an acceptor dopant, such as Al or B, to locally decrease the doping concentration of N- epitaxial layer 102. This provides some reduction in the peak field value near the bottom corners of the trenches, and hence can provide some additional protection against hot carrier injection. This can be advantageous in high-voltage and/or rad-hard applications. This results in the structure of Figure 18.
[0061] Next, patterned resist 602 is used to protect the active gate trench 110, and then acceptor dopant (such as Al or B) is implanted into N/N- epitaxial layer 102 through the field plate trench 120, as shown in Figure 19. This implant will form the P-Shield region 146 underneath the trenches 120. The implantation can be adjusted to optimize the P-Shield profile along the field plate trench sidewall and the depth of P-Shield.
[0062] After complete removal of the BOX photo resist 602 and surface oxide layers, a high temperature process (>1600°C) in Ar ambient is carried out to anneal and activate all of implanted dopants with a carbon cap layer 702 in place for protection. This is depicted in Figure 20.
[0063] At this point, all of high temperature processes are finished (except for the final gate oxide anneal).
[0064] Now, the gate formation process is done as described above, ending with a culminating anneal in an oxidizing nitrogen-rich ambient (e.g. with N20 or NO). The anneal temperature, in this example, is between 1100°C to 1350°C. No high-temperature process steps should follow the gate oxide anneal.
[0065] This culminating gate oxide anneal maximizes the quality of the semiconductor-to-oxide interface. Surprisingly, this culminating anneal also provides improvement in the radiation-hardness of the final device. [0066] The gate electrode 112 and field plate 122 are now formed, e.g. by deposition and CMP of n+ polysilicon. Following this interlevel dielectric is now formed and etched back. A recess etch is performed, front and backside contact metal layer are formed, and source, drain, and gate metal is deposited. This produces the final structure of Figure 21(a) or Figure 21(b) (if modified region 106 in Figure 21(a) or region 1061 in Figure 21(b) had enhanced doping), or the final structure of Figure 22 (if modified region 106 was partly counter doped).
[0067] Finally, the process flow described above can also be employed to produce different device variants. For example, Figure 23 and Figure 24 show devices without the poly field plate in the source contact trench, but with only the P-Shield regions. Note also that a tilted implant was used to produce extended shield regions in these examples.
[0068] Additionally, by replacing the n+ substrate with p+ substrate, the process is ready to be used for fabrication of SiC trench-gated IGBT device as shown in Figure 25.
[0069] Furthermore, the new process discussed in this invention can also be utilized to produce the depletion mode trench-gated MOSFET or radiation hardened trench-gated MOSFET in both Si and SiC or other semiconductor materials.
Advantages
[0070] The disclosed innovations, in various embodiments, provide one or more of at least the following advantages. However, not all of these advantages result from every one of the innovations disclosed, and this list of advantages does not limit the various claimed inventions. • Ability to build power semiconductor devices in high-bandgap semiconductor materials;
• Improved silicon carbide semiconductor devices;
• Improved quality of semiconductor-to-oxide interface at the gate dielectric;
• Improved quality of gate dielectric;
• Power semiconductor devices with higher breakdown voltage;
• Power semiconductor devices with lower on-resistance;
• Power semiconductor devices with lower cost; and
• Power semiconductor devices which can operate at higher temperatures. 71] According to some but not necessarily all embodiments, there is provided: A power semiconductor device fabrication process, comprising: in a semiconductor mass consisting essentially of silicon carbide, forming, in any order, a first-conductivity-type source region, a second-conductivity-type body region which forms a junction with first- conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, a second- conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first-conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the source region, the body region, the shield region, and the additional doping modification component; performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and forming metallization to complete fabrication of an operative device; wherein no non-transient heating step above 1200 degrees C is applied after the step of performing insulated gate fabrication is finished.
72] According to some but not necessarily all embodiments, there is provided: A power semiconductor device fabrication process, comprising: in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, a first and second trenches, each extending deeper than the body region, second-conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first- conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component; performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and forming metallization to complete fabrication of an operative device; wherein no non-transient heating step above 1200 degrees C is applied after the step of performing insulated gate fabrication is finished. [0073] According to some but not necessarily all embodiments, there is provided: a silicon carbide (or comparable) trench transistor in which gate dielectric anneal, in an oxynitriding atmosphere, is performed after all other high-temperature steps have already been done.
[0074] According to some but not necessarily all embodiments, there is provided: A power semiconductor device fabrication process, comprising: in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, second-conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first- conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component; performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and forming metallization to complete fabrication of an operative device; wherein no non-transient heating step, after the step of performing insulated gate fabrication, uses a temperature within 100 degrees C of the maximum temperature of the insulated gate fabrication step.
[0075] According to some but not necessarily all embodiments, there is provided: A power semiconductor device fabrication process, comprising: a) in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, and a second-conductivity-type shield regions lying below said first trenches but not below said second trench; b) applying heat to activate dopants in the carrier emission region, the body region, and the shield region; c) performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and d) forming metallization to complete fabrication of an operative device; wherein no non-transient heating step above 1200 degrees C is applied after the step of performing insulated gate fabrication is finished.
76] According to some but not necessarily all embodiments, there is provided: A power semiconductor device fabrication process, comprising: a) in a semiconductor mass, forming, in any order, a first- conductivity-type carrier emission region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, a first and second trenches, each extending deeper than the body region, and second-conductivity-type shield regions lying below said first trenches but not below said second trenches; b) applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component; c) performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and d) forming metallization to complete fabrication of an operative device; wherein no non-transient heating step, after the step of performing insulated gate fabrication, uses a temperature within 100 degrees C of the maximum temperature of the insulated gate fabrication step.
Modifications and Variations
[0077] As will be recognized by those skilled in the art, the innovative concepts described in the present application can be modified and varied over a tremendous range of applications, and accordingly the scope of patented subject matter is not limited by any of the specific exemplary teachings given. It is intended to embrace all such alternatives, modifications and variations that fall within the spirit and broad scope of the appended claims.
[0078] In the disclosed examples of Figures 1-22, the devices fabricated are simple vertical-current-flow field-effect transistors. However, the disclosed inventions can also be used to form other device types which include an insulated gate. One example would be IGBTs (as in Figure 25), but other possibilities contemplated include MCTs and TMBs TMBS (Trench MOS Barrier Schottky Rectifiers).
[0079] The above description emphasizes the implementation in silicon carbide, since this is a material of great interest for many applications. However, it is also contemplated that the disclosed inventions can be adapted to other wide-bandgap semiconductor materials, such as diamond, GaN, AlGaN, or Ga203. [0080] It is also contemplated, as a possible but somewhat less advantageous alternative, that the disclosed inventions can also be adapted to formation of a gate oxide which is deposited rather than grown.
[0081] None of the description in the present application should be read as implying that any particular element, step, or function is an essential element which must be included in the claim scope: THE SCOPE OF PATENTED SUBJECT MATTER IS DEFINED ONLY BY THE ALLOWED CLAIMS. Moreover, none of these claims are intended to invoke paragraph six of 35 USC section 112 unless the exact words "means for" are followed by a participle.
[0082] The claims as filed are intended to be as comprehensive as possible, and NO subject matter is intentionally relinquished, dedicated, or abandoned.

Claims

CLAIMS What is claimed is, among others (and, without exclusion, in addition to any other points which are indicated herein as inventive and/or surprising and/or advantageous):
1. A power semiconductor device fabrication process, comprising:
in a semiconductor mass consisting essentially, at upper portions thereof, of silicon carbide, forming, in any order, a first-conductivity-type source region, a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, a second-conductivity-type shield regions lying below said first trenches but not below said second trenches, and an additional doping modification component lying within the first-conductivity-type bulk material of the semiconductor mass; applying heat to activate dopants in the source region, the body region, the shield region, and the additional doping modification component;
performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and forming metallization to complete fabrication of an operative device; wherein no non-transient heating step above 1200 degrees C is applied after the step of performing insulated gate fabrication is finished.
2. The process of Claim 1, wherein the first conductivity type is n-type.
3. The process of Claim 1 , wherein forming a thin gate dielectric is
performed by growing silicon dioxide.
4. The process of Claim 1, wherein the thin gate dielectric is silicon dioxide.
5. The process of Claim 1, wherein the body region is shallower than both said first and said second trenches.
6. A power semiconductor device fabrication process, comprising:
a) in a semiconductor mass, forming, in any order,
a first-conductivity -type carrier emission region,
a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, first and second trenches, each extending deeper than the body region, and
a second-conductivity-type shield regions lying below said first trenches but not below said second trench;
b) applying heat to activate dopants in the carrier emission region, the body region, and the shield region;
c) performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric at a temperature above 1000 degrees C in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and d) forming metallization to complete fabrication of an operative device; wherein no non-transient heating step above 1200 degrees C is applied after the step of performing insulated gate fabrication is finished.
7. The process of Claim 6, wherein the first conductivity type is n-type.
8. The process of Claim 6, wherein forming a thin gate dielectric is
performed by growing silicon dioxide.
9. The process of Claim 6, wherein the thin gate dielectric initially consists of silicon dioxide.
10. The process of Claim 6, wherein step a) also forms an additional doping modification component lying within the first-conductivity -type bulk material of the semiconductor mass, and said step b) also activates the dopants in the additional doping modification component.
11. The process of Claim 6, wherein the first conductivity type is n-type, and step a) also forms an additional doping modification component comprising donors lying within the first-conductivity -type bulk material of the semiconductor mass, and said step b) also activates the dopants in the additional doping modification component.
12. The process of Claim 6, wherein the first conductivity type is n-type, and wherein step a) also forms an additional doping modification component comprising acceptors lying within the first-conductivity- type bulk material of the semiconductor mass, and said step b) also activates the dopants in the additional doping modification
component.
13. A power semiconductor device fabrication process, comprising:
a) in a semiconductor mass, forming, in any order,
a first-conductivity -type carrier emission region,
a second-conductivity-type body region which forms a junction with first-conductivity-type bulk material lying therebelow, a first and second trenches, each extending deeper than the body region, and
second-conductivity-type shield regions lying below said first trenches but not below said second trenches;
b) applying heat to activate dopants in the carrier emission region, the body region, the shield region, and the additional doping modification component;
c) performing insulated gate fabrication, by forming a thin gate dielectric comprising a silicon oxide on sidewalls of the second trenches, annealing the thin gate dielectric in a nitrogen-rich oxidizing atmosphere, and forming a conductive gate electrode over the thin gate dielectric; and
d) forming metallization to complete fabrication of an operative device; wherein no non-transient heating step, after the step of performing insulated gate fabrication, uses a temperature within 100 degrees C of the maximum temperature of the insulated gate fabrication step.
14. The process of Claim 13, wherein the thin gate dielectric initially
consists of silicon dioxide.
15. The process of Claim 13, wherein the body region is shallower than both said first and said second trenches.
16. The process of Claim 13, wherein the first conductivity type is n-type.
17. The process of Claim 13, wherein forming a thin gate dielectric is
performed by growing silicon dioxide.
18. The process of Claim 13, wherein step a) also forms an additional doping modification component lying within the first-conductivity -type bulk material of the semiconductor mass, and said step b) also activates the dopants in the additional doping modification component.
19. The process of Claim 13, wherein the first conductivity type is n-type, and step a) also forms an additional doping modification component comprising donors lying within the first-conductivity -type bulk material of the semiconductor mass, and said step b) also activates the dopants in the additional doping modification component.
20. The process of Claim 13, wherein the first conductivity type is n-type, and wherein step a) also forms an additional doping modification component comprising acceptors lying within the first-conductivity- type bulk material of the semiconductor mass, and said step b) also activates the dopants in the additional doping modification
component.
21. A semiconductor device formed by the process of Claim 1.
22. A semiconductor device formed by the process of Claim 6.
23. A semiconductor device formed by the process of Claim 13.
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