WO2017182040A1 - Système de mesure pour la mesure sans contact d'un déplacement relatif ou d'une position relative et procédé - Google Patents

Système de mesure pour la mesure sans contact d'un déplacement relatif ou d'une position relative et procédé Download PDF

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Publication number
WO2017182040A1
WO2017182040A1 PCT/DE2017/200019 DE2017200019W WO2017182040A1 WO 2017182040 A1 WO2017182040 A1 WO 2017182040A1 DE 2017200019 W DE2017200019 W DE 2017200019W WO 2017182040 A1 WO2017182040 A1 WO 2017182040A1
Authority
WO
WIPO (PCT)
Prior art keywords
coil
coils
receiving
measuring arrangement
arrangement according
Prior art date
Application number
PCT/DE2017/200019
Other languages
German (de)
English (en)
Inventor
Reinhold Hoenicka
Guenter Schallmoser
Josef Hackl
Martin WASMEIER
Original Assignee
Micro-Epsilon Messtechnik Gmbh & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro-Epsilon Messtechnik Gmbh & Co. Kg filed Critical Micro-Epsilon Messtechnik Gmbh & Co. Kg
Publication of WO2017182040A1 publication Critical patent/WO2017182040A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2086—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of two or more coils with respect to two or more other coils

Definitions

  • the present invention relates to a measuring arrangement for the contactless measurement of a relative movement or a relative position of a first object with respect to a second object. Furthermore, the invention relates to a method which uses the device according to the invention.
  • positions of mirrors, masks, holders or other machine parts relative to one another are detected very precisely, for example in production plants for semiconductors, so that a correct exposure takes place due to the ever smaller feature sizes. In many other industrial applications, it is increasingly important to precisely determine the relative position of machine or plant components in order to be able to intervene regulatively.
  • GOC General Radius of Curvature
  • displacement sensors are required to detect the relative position of two segments to each other. If the segments are hexagonal, there will be an edge for every two adjacent segments whose position is to be detected relative to one another. Per measuring point up to six measured quantities are required, whereby the three different types of tilting (Dihedral, Twist and Clock) usually play only a minor role.
  • the mutual distance (Gap), the lateral displacement in the mirror plane (Shear) and the lateral displacement (Piston) from the mirror plane are to be determined.
  • the biggest influence on the deviation from the ideal mirror shape provides the Piston, whose measurement therefore the highest demands for accuracy are made.
  • US 4,825,062 A describes inductive sensors. Two transmission coils in half-bridge arrangement are supplied with high-frequency AC voltage. In receiving coils, which are tuned by means of a capacitor near the resonance frequency, currents are induced, which lead to a damping of the transmitting coil. The damping changes with the relative position, which can thus be measured.
  • the receiver coils are not connected to any evaluation electronics and act like an active target.
  • two separate coils are placed on the receiving side. Two alternating voltages v a and Vb are then induced in the coils, which are independent of each other and are combined for the evaluation of the measured quantities distance and displacement.
  • the difference (AB) of both coils represents the displacement distance-dependent. If one forms the quotient of difference by sum ((AB) / (A + B)), the displacement can be determined independently of the distance.
  • measurement signals are digitized in modern measurement technology, in order to then be further processed by microcontrollers or computers.
  • the AD converters used for digitizing have a limited, defined input range, for example 0.5 ... 4, 5 V.
  • Analog signals must therefore be adapted to the input range by suitable amplifier circuits so that the full digitizing range is used in the best possible way.
  • each amplifier generates noise, so that the lowest possible gain is desirable, or that even the primary signal covers the input area as possible.
  • the A-B signal should be in an ideal voltage range for AD conversion.
  • the coil arrangement will therefore have to be designed so that even the primary signal largely exhaust the input range of the AD converter.
  • the signal A + B for the distance (Gap) is detected.
  • a simultaneous optimal adjustment is not possible, which is why a compromise must be found. This conflict of objectives means that an optimal measurement of both parameters is not possible.
  • the invention has for its object to provide a measuring arrangement and a method for using the measuring arrangement, in which / the disadvantages identified above are at least largely eliminated.
  • a precise measurement of at least two measured variables should be possible independently of one another, preferably with the simplest construction of the arrangement.
  • the above object is achieved with respect to the measuring arrangement by the features of claim 1, wherein the measuring arrangement with at least one of the the transmitting coil is excited by an excitation change signal, wherein the receiving coil detect a measured variable which is proportional to a first relative movement or relative position, and wherein at the second object at least one further receiving coil is arranged, which detects a second measured variable, which is proportional to a second relative movement or relative position.
  • the underlying object is achieved by the features of the independent claim 15, wherein the method uses the measuring arrangement according to the invention.
  • the receiving coil pair can be extended by at least one additional coil 6.
  • This allows two receiver coils (A and B) to be designed and positioned so that they are optimally suited for measuring the displacement (piston).
  • the additional third coil C is used for distance measurement.
  • the function f can also be a function of higher order, for example a polynomial.
  • three receiving coils are thus fed by one transmitting coil.
  • the receiver coils are arranged so that the optimum signal level is achieved for each measured variable.
  • the further coil pair (C and D) is then optimized with respect to the distance measurement.
  • P (AB) * f (C, D).
  • the receiver coils may be arranged in parallel relative to the transmitter coil. Parallel means that the coil axes are aligned in parallel. Thus, the highest inductive coupling between the coils and thus the largest signal swing is achieved.
  • the coils can be designed as planar coils or wound coils. The area of the coils or the number of turns can be adapted to the respective measuring arrangement.
  • the second transmitter coil can also be fed with a different frequency and / or voltage.
  • the two signal paths for the distance and the displacement are separated from each other, so that no mutual influence takes place.
  • the receiving coils can also be aligned in a rectangular arrangement to the transmitting coil. Rectangular means that the coil axes are at right angles to each other, or the projection of the coil axes is perpendicular to each other.
  • two receiving coils A and B can be arranged perpendicular to the transmitting coil, while at least one further receiving coil C is aligned in parallel, or the two receiving coils A and B are parallel to the transmitting coil, at least one further receiver coil C perpendicular thereto, arranged.
  • the third or fourth receiving coil C and D could be arranged concentrically around the two first receiving coils.
  • the coils can be wound in conventional form as wound coils, for example with copper wire or silver wire, be it as air coils, wound on a wound body, or provided with a coil core of ferritic material.
  • Particular degrees of freedom in the coil geometry can be achieved if the coils are arranged in the form of planar coils on or in a multilayer substrate.
  • a separate substrate can be used for each coil.
  • the production can be simplified because identical parts can be used for a large number of coils.
  • any coil arrangements can be achieved, for example, intertwined coils.
  • one layer for one coil, then one layer for another coil can be used alternately for each layer.
  • intertwine the coils within one layer by arranging the interconnects for both coils next to one another, that is, they extend substantially parallel. These arrangements ensure that two different coils are flowed through by the same magnetic flux.
  • the arrangement of the coils in a ceramic substrate for example in LTCC technology (Low Temperature Co-fired Ceramic).
  • the coils together with the ceramic form a solid, stable unit. Due to the low coefficient of thermal expansion of the ceramics, the coils are very temperature-stable and therefore predestined for high-resolution, long-term stable measurements.
  • Another advantage of the ceramic is its mechanical robustness and insensitivity to moisture. It is particularly advantageous if two or more coils are arranged in a common substrate. Thus, the relative position of the coils is fixed to each other. Due to the low expansion coefficient of the ceramic, the relative position remains stable even with temperature changes.
  • the previous embodiments describe coil arrangements for the measurement of two variables, for example Gap and Piston.
  • the arrangement can be easily extended by additional coils. If, for example, the shear should also be measured, another pair of coils A "and B" are added, analogous to the piston, but rotated by 90 degrees. The excitation can be achieved simply by an extended transmitting coil, or by a second transmitting coil.
  • the gap Gap can additionally be measured by adding at least one additional receiver coil. By additionally measuring the gap at another position, a tilt can also be determined, or an averaging over both values is performed, or a plausibility check.
  • the signals A-B and C + D can be digitized by means of an AD converter.
  • the coil parameters diameter or dimension, number of layers, thickness of the conductor track, etc.
  • the control parameters frequency, amplitude of the AC voltage
  • the dimensions and number of layers determine the range of the alternating voltage induced in the receiving coils such that only a simple rectification is required before the signal in the AD converter is converted.
  • a phase-synchronous sampling can take place.
  • each signal path can be adapted to the input range of the AD converter by means of suitable amplifier circuits. Further processing of the digitized signals takes place in a computer, for example in a microcontroller, which calculates the function f and determines the result, e.g. for P supplies.
  • FIG. 1 in a schematic representation of a measuring arrangement according to
  • FIG. 2 shows a schematic representation of an exemplary embodiment of a measuring arrangement according to the invention with wound coils
  • FIG. 3 is a schematic representation of another embodiment of a measuring arrangement according to the invention with wound coils
  • FIG. 4 is a schematic representation of a further embodiment of a measuring arrangement according to the invention with wound coils
  • FIG. 5 is a schematic representation of another embodiment of a measuring arrangement according to the invention with wound coils
  • FIG. 6 is a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils
  • FIG. 7 is a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils
  • FIG. 8 is a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils
  • FIG. 9 is a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils, in a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils, in a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils, in a schematic representation of another embodiment of a measuring arrangement according to the invention with planar coils, wherein the measuring arrangement for determining at least three Measured variables serves, and in a schematic representation, cut, the arrangement of two receiving coils in a planar configuration, integrated in a common substrate.
  • FIG. 1 shows the state of the art.
  • the measuring arrangement 1 is used to determine the position of a first object 2 relative to a second object 3 by means of a transmitting coil S (4) and two receiving coils A and B (5 ', 5 ")
  • the transmitting coil 4 is fed with alternating voltage and induced in the receiving coils 5 ', 5 "in each case an AC voltage v a and Vb.
  • the coils are shown only schematically as an equivalent circuit diagram. The representation should not be understood as a concrete representation of coil windings. It is crucial that the mutual arrangement is guaranteed by the actual arrangement.
  • FIG. 2 shows a first exemplary arrangement of the invention.
  • a further receiving coil C (6) is arranged on the second object 3.
  • the alternating voltage v c is induced in the receiving coil 6.
  • the third receiving coil C can be used to measure the distance x of the two objects 2, 3.
  • the displacement y will be with the first two Receiving coils 5 ', 5 "measured.
  • the design and arrangement of the coils is to be understood only schematically.
  • FIG. 3 shows an arrangement with receiving coils 5 ', 5 ", 6 which are aligned differently relative to one another. While the third receiving coil 6 is aligned parallel to the transmitting coil 4, the two first receiving coils 5', 5" are aligned perpendicular thereto.
  • the fourth transmitting coil 4 shows an arrangement with a further transmitting coil 4 ".
  • the first transmitting coil 4 ' induces the signals for the displacement y in the receiving coils 5', 5".
  • the second transmitting coil 4 " induces the signal for the distance x in the receiving coil 6.
  • the fifth shows an arrangement with two transmitting coils 4 ', 4 "and a total of four receiving coils 5', 5", 6 ', 6 ".
  • the first transmitting coil 4' induces the signals for the displacement y in the receiving coils 5 ', 5".
  • the second transmitting coil 4 "induces the signal for the distance x in the receiving coil 6 ', 6".
  • FIG. 6 shows a perspective arrangement of coils in planar form, each of which is integrated in a substrate 7, 8 ', 8 ", 9.
  • the three receiving coils 5', 5", 6 are arranged parallel to the transmitting coil 4.
  • the displacement in the y direction is measured with the two receiving coils 5 ', 5 ", the distance x with the receiving coil 6.
  • FIG. 7 shows an arrangement with successive receiving coils.
  • the third receiver coil 6 is arranged parallel to the transmitter coil 4 and is adjacent to the first two receiver coils.
  • FIG. 9 shows an arrangement where the first two receiver coils 5 ', 5 "are arranged perpendicular to the transmitter coil 4.
  • the third receiver coil 6 is arranged parallel and concentrically around the first two receiving coils. This results in a particularly compact design.
  • the 10 shows an arrangement with two transmitting coils 4 ', 4 ".
  • the first transmitting coil 4' feeds the first two receiving coils 5 ', 5"
  • the second transmitting coil 4 " feeds the third receiving coil 6.
  • the two signal paths for the Decouple shift y and the distance x.
  • FIG. 12 shows a measuring arrangement for at least three measured variables (Gap, Piston, Shear). First, two transmitter coils 4 ', 4 "are integrated in a common substrate 7.
  • the first transmitter coil excites the four receiver coils ⁇ ', B ', C and D' Two of which are for the measured variable Piston (displacement in the y direction), two for the measured variable Gap (distance x)
  • the second transmitting coil 4 "excites the four receiving coils A", B “, C” and D ". Two of them are for the measurand shear (displacement in z-direction), two for Gap (distance x). From the two measured values for Gap, an average value can be formed, or in addition a further tilt (rotation about the y-axis) can be determined.
  • FIG. 13 shows in a sectional view an arrangement of two receiving coils A 'and C in planar form, which are integrated in a common substrate 7.
  • the two receiving coils 1 A ', C are aligned in parallel and intertwined in such a way that alternately one layer contains three turns of the coil A' (solid lines) and the respective overlying layer three turns of the coil C (dashed lines).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention concerne un système de mesure servant à la mesure sans contact d'un déplacement relatif ou d'une position relative d'un premier objet par rapport à un deuxième objet. Le système de mesure comporte au moins une bobine émettrice disposée sur le premier objet et au moins deux bobines réceptrices (A, B) disposées sur le deuxième objet, la bobine réceptrice étant excitée par un signal alternatif d'excitation, les bobines réceptrices détectant une grandeur de mesure qui est proportionnelle à un premier déplacement relatif ou à une première position relative, et au moins une autre bobine réceptrice (C) étant disposée sur le deuxième objet, laquelle détecte une deuxième grandeur de mesure qui est proportionnelle à un deuxième déplacement relatif ou à une deuxième position relative. L'invention concerne en outre un procédé qui utilise le dispositif selon l'invention.
PCT/DE2017/200019 2016-04-21 2017-03-06 Système de mesure pour la mesure sans contact d'un déplacement relatif ou d'une position relative et procédé WO2017182040A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016206782.6 2016-04-21
DE102016206782.6A DE102016206782A1 (de) 2016-04-21 2016-04-21 Messanordnung zur kontaktlosen Messung einer Relativbewegung oder einer Relativposition und Verfahren

Publications (1)

Publication Number Publication Date
WO2017182040A1 true WO2017182040A1 (fr) 2017-10-26

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PCT/DE2017/200019 WO2017182040A1 (fr) 2016-04-21 2017-03-06 Système de mesure pour la mesure sans contact d'un déplacement relatif ou d'une position relative et procédé

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WO (1) WO2017182040A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020157390A1 (fr) * 2019-01-31 2020-08-06 Osmos Group Procédé et dispositif pour mesurer la position et/ou le déplacement de deux sites l'un par rapport à l'autre

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816759A (en) * 1987-10-28 1989-03-28 Kaman Corporation Inductive sensor for detecting displacement of adjacent surfaces
US4825062A (en) 1987-10-29 1989-04-25 Kaman Aerospace Corporation Extendable large aperture phased array mirror system
US4879556A (en) * 1986-10-27 1989-11-07 Huka Developments B.V. Joystick control unit using multiple substrates
US20110133726A1 (en) * 2009-12-09 2011-06-09 Alexander Ballantyne Precision alignment system
US20120119986A1 (en) * 2010-11-17 2012-05-17 Kye Systems Corp. Three-dimensional control apparatus of computer input device and method thereof
EP1904806B1 (fr) 2005-07-07 2013-03-06 Nanotec Solution Procede de mesure sans contact d'un deplacement relatif ou d'un positionnement relatif d'un premier objet par rapport a un second objet, par voie inductive

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009022992A1 (de) * 2009-03-02 2010-10-07 Micro-Epsilon Messtechnik Gmbh & Co. Kg Positionssensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879556A (en) * 1986-10-27 1989-11-07 Huka Developments B.V. Joystick control unit using multiple substrates
US4816759A (en) * 1987-10-28 1989-03-28 Kaman Corporation Inductive sensor for detecting displacement of adjacent surfaces
US4825062A (en) 1987-10-29 1989-04-25 Kaman Aerospace Corporation Extendable large aperture phased array mirror system
EP1904806B1 (fr) 2005-07-07 2013-03-06 Nanotec Solution Procede de mesure sans contact d'un deplacement relatif ou d'un positionnement relatif d'un premier objet par rapport a un second objet, par voie inductive
US20110133726A1 (en) * 2009-12-09 2011-06-09 Alexander Ballantyne Precision alignment system
US20120119986A1 (en) * 2010-11-17 2012-05-17 Kye Systems Corp. Three-dimensional control apparatus of computer input device and method thereof

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