WO2017140147A1 - 基于外置液囊和固定波长的超高分辨温度传感器 - Google Patents

基于外置液囊和固定波长的超高分辨温度传感器 Download PDF

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WO2017140147A1
WO2017140147A1 PCT/CN2016/106684 CN2016106684W WO2017140147A1 WO 2017140147 A1 WO2017140147 A1 WO 2017140147A1 CN 2016106684 W CN2016106684 W CN 2016106684W WO 2017140147 A1 WO2017140147 A1 WO 2017140147A1
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waveguide
temperature sensor
fixed wavelength
sac
temperature
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French (fr)
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欧阳征标
陈治良
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Shenzhen University
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Shenzhen University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/006—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/02—Measuring temperature based on the expansion or contraction of a material the material being a liquid
    • G01K5/14—Measuring temperature based on the expansion or contraction of a material the material being a liquid the liquid displacing a further liquid column or a solid body

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  • the present invention relates to an ultra-high resolution, nano-scale temperature sensor, and more particularly to an ultra-high sensitivity temperature sensor based on an external liquid capsule and single wavelength laser detection.
  • Temperature sensors are one of the most widely used sensors in the world. From the thermometers in our lives, thermometers to large instruments and temperature control devices on integrated circuits, temperature sensors are everywhere. Traditional temperature sensors such as thermal resistors, platinum resistors, and bimetal switches have their own advantages, but they are no longer suitable for use in miniature and high precision products. Semiconductor temperature sensors have high sensitivity, high resolution, low power consumption, and high anti-interference ability, making them widely used in semiconductor integrated circuits.
  • Waveguides based on surface plasmons can break through the limits of diffraction limits and achieve nanoscale optical information processing and transmission.
  • the surface plasmon is a surface electromagnetic wave propagating on the metal surface formed by the free electron coupling of the electromagnetic wave and the metal surface when the electromagnetic wave is incident on the interface between the metal and the medium.
  • many devices based on surface plasmon structures such as filters, circulators, logic gates, optical switches, etc., have been proposed. These devices are relatively simple in structure and are very convenient for optical path integration.
  • the sensitivity of the temperature sensor proposed by the surface plasmon is only 70 pm / ° C or - 0.65 nm / ° C. Although the temperature sensors of these surface plasmons are small in volume, the sensitivity or resolution is not high.
  • the temperature sensor of the present invention is realized by the following technical solution.
  • the ultra-high resolution temperature sensor based on external sac and fixed wavelength of the invention consists of an external sac, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a horizontally propagated signal light;
  • the signal light employs a fixed wavelength;
  • the liquid capsule is coupled to the vertical waveguide,
  • the metal block is disposed within a vertical waveguide, and is movable;
  • the vertical waveguide is coupled to the horizontal waveguide.
  • the substance in the sac is a substance having a high coefficient of thermal expansion
  • the substance having a high expansion coefficient is alcohol or mercury.
  • the shape of the sac is cubic, spherical, ellipsoidal or irregular.
  • the metal is gold or silver.
  • the metal is silver.
  • the horizontal waveguide and the vertical waveguide are waveguides of a MIM structure.
  • the medium within the horizontal waveguide is air.
  • the signal light is a single wavelength laser having a wavelength of 792 nm.
  • the movable metal block is fixed at a position of 116 nm.
  • the present invention has the following positive effects:
  • the resolution is high, the average temperature resolution is 0.99 ⁇ 10 -9 °C, and the highest resolution is 0.595 ⁇ 10 -9 °C.
  • Figure 1 is a schematic view showing the two-dimensional structure of a first embodiment of the ultra-high resolution temperature sensor of the present invention.
  • external sac 1 metal block 2 vertical waveguide 3 metal film 4 horizontal waveguide 5 metal film 6 horizontally propagated signal light 200
  • FIG. 2 is a two-dimensional structural diagram of a second embodiment of the ultra-high resolution temperature sensor of the present invention.
  • external sac 1 metal block 2 vertical waveguide 3 metal film 4 horizontal waveguide 5 metal film 6 horizontally propagated signal light 200
  • Figure 3 is a transmission spectrum diagram of signal light of different wavelengths.
  • Figure 4 is the average of the intervals of transmittance for different wavelengths.
  • Fig. 5 is a graph showing the derivative of the transmittance corresponding to temperature.
  • the high-resolution temperature sensor of the present invention comprises an external liquid capsule 1, a metal block 2, a vertical waveguide 3, a horizontal waveguide 5, and two metal films 4, 6 (no etched metal film). And a horizontally propagated signal light 200 (the surface of the waveguide forms a surface plasmon); the signal light is of a fixed wavelength; the liquid capsule 1 is connected to the vertical waveguide 3, the liquid capsule 1 is spherical, and the radius R is 0.1 mm.
  • the substance in the sac 1 is a substance having a lower specific heat capacity and a high thermal expansion coefficient; the substance having a high thermal expansion coefficient is alcohol or mercury, preferably alcohol; the metal is gold or silver, preferably silver, and the thickness of the metal film (hereinafter referred to as h 1 ), the range of values above 100 nm is used, and the thickness is preferably 100 nm; the metal block 2 is disposed in the vertical waveguide 3 and can be moved, and the length m of the moving metal block 2 is in the range of 80 nm to 150 nm.
  • the length of 125 nm is optimal, and the distance s of the movable metal block 2 from the horizontal waveguide 5 is in the range of 0 nm to 200 nm, and is determined by the position of the metal block 2, which is gold or silver, preferably silver;
  • the waveguide 3 is connected to the horizontal waveguide 5; the vertical waveguide 3 and
  • the horizontal waveguide 5 is a waveguide of a MIM structure, that is, the MIM waveguide is a metal-insulator-metal structure, the insulator is made of a non-conductive transparent material; the non-conductive transparent material is air, silicon dioxide or silicon; and the vertical waveguide 3 is located at the upper end of the horizontal waveguide 5.
  • the width b of the vertical waveguide 3 is in the range of 30 nm to 60 nm, and the width is preferably 35 nm.
  • the length M of the vertical waveguide 3 is 200 nm or more, and the length is 300 nm.
  • the left edge of the vertical waveguide 3 is metal.
  • the distance a of the left edge of the film 6 is in the range of 350 nm to 450 nm, preferably 400 nm.
  • the width d of the horizontal waveguide 5 is in the range of 30 nm to 100 nm, and the width is preferably 50 nm, and the medium in the horizontal waveguide 5 is air; the distance from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is greater than 150 nm. Range; laser with a signal light wavelength of 792 nm.
  • the present invention changes the volume of the alcohol by a change in temperature, causing it to expand to push the movable metal block 3 to move toward the horizontal waveguide 5 to change the length of the air segment in the vertical waveguide 4, and the movable metal block 3 moves downward to make it horizontal.
  • the distance of the waveguide 5 changes, and the transmittance of the signal light changes accordingly.
  • the change of the temperature affects the change of the transmittance of the signal light, according to the transmittance.
  • the change can detect the change of the temperature information; the characteristic of the transmittance can correspond to the temperature one by one, that is, the change of the temperature can be known from the characteristics of the transmittance.
  • the expansion of silver is negligible at the same temperature change.
  • the effect of temperature changes on the volume of the metal block is no longer considered in the present invention.
  • the relationship between the position change of the metal block and the temperature can be calculated, thereby defining a proportional coefficient ⁇ indicating the moving distance of the metal block corresponding to the change of the unit temperature.
  • the high resolution temperature sensor of the present invention comprises an external liquid capsule 1, a metal block 2, a vertical waveguide 3, a horizontal waveguide 5, and two metal films 4, 6 (metal film without etching) And a horizontally propagating signal light 200 (the surface of the waveguide forms a surface plasmon); the signal light is at a fixed wavelength; the sac 1 is connected to the vertical waveguide 3, and the sac 1 is a cone of the interface regular hexagon, the side length r is 0.1mm, the substance in the sac 1 (temperature sensitive cavity) is a substance having a lower specific heat capacity and a high thermal expansion coefficient; the substance having a high thermal expansion coefficient is alcohol or mercury, preferably alcohol; silver film thickness h 1 adopts a range of values above 100 nm, and the thickness is preferably 100 nm; the metal block 2 is disposed in the vertical waveguide 3 and can be moved, and the length m of the moving metal block 2 is in the range of 80 nm to 150 nm, and the length is preferably 125
  • the distance s of the movable metal block 2 from the horizontal waveguide 5 is in the range of 0 nm to 200 nm, and is determined by the position of the metal block 2, which is gold or silver, preferably silver; the vertical waveguide 3 and the horizontal waveguide 5 connections; vertical waveguide 3 and horizontal waveguide 5 are MIM
  • the waveguide, that is, the MIM waveguide is a metal-insulator-metal structure, the insulator is made of a non-conductive transparent material; the non-conductive transparent material is air, silicon dioxide or silicon; the vertical waveguide 3 is located at the upper end of the horizontal waveguide 5; the vertical waveguide 3
  • the width b is in the range of 30 nm to 60 nm, and the width is preferably 35 nm.
  • the length M of the vertical waveguide 3 is 200 nm or more, and the length is 300 nm.
  • the left edge of the vertical waveguide 3 is to the left of the metal film 6.
  • the distance a of the edge is in the range of 350 nm to 450 nm, and 400 nm is optimal.
  • the width d of the horizontal waveguide 5 is in the range of 30 nm to 100 nm, and the width is preferably 50 nm, and the medium in the horizontal waveguide 5 is air; the distance from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is greater than 150 nm. range.
  • the invention changes the volume of the alcohol by the change of the temperature, causes the expansion to push the movable metal block 3 to move to the horizontal waveguide 5 to change the length of the air section in the vertical waveguide 4, and the movable metal block 3 moves downward to the level.
  • the distance of the waveguide 5 changes, and the transmittance of the signal light changes accordingly.
  • the change of the temperature affects the change of the transmittance of the signal light, according to the transmittance.
  • the change can detect the change of the temperature information, and the characteristics of the transmittance can be in one-to-one correspondence with the temperature, that is, the change of the temperature can be known from the characteristics of the transmittance.
  • the movable metal block 3 moves downward to change the horizontal waveguide distance, and the transmittance of the signal light changes accordingly.
  • the transmittance of light of each wavelength at a wavelength of 700 nm to 1000 nm when the value of s is different is shown in FIG.
  • Scanning with simulation software can obtain the transmittance of each wavelength of the horizontal waveguide when the temperature changes are constant, and then let the corresponding wavelength pass through. The overshoot values are in turn, and then they are averaged in absolute value.
  • the change in transmittance per unit temperature interval per wavelength can be obtained, and the result is shown in FIG.
  • the curve in the figure represents the average value of the intervals of the transmittances of the respective wavelengths at the scanning interval of 2.97 ⁇ 10 -9 °C.
  • the simulation software can be used to obtain the transmittance of each wavelength of the horizontal waveguide when the temperature changes are certain, and then the transmittance values of the corresponding wavelengths are sequentially different and then the absolute values are summed and averaged, so that the respective wavelengths when the temperature interval is fixed are obtained.
  • the average of the differences in transmittance From the figure, when the wavelength is 792 nm, the maximum transmittance interval is 0.067207. Therefore, the signal light of the horizontal waveguide is a single light source of 792 nm, and the change of the temperature affects the change of the transmittance of the signal light, and the change of the temperature information can be detected according to the change of the transmittance.
  • the detector has a resolution of 2% for a single wavelength transmittance, and the average resolution of the temperature sensor designed by this detection method is 0.99 ⁇ 10 -9 °C.
  • the temperature sensor is more sensitive to temperature after increasing the volume of the sac.
  • the incident signal light is 792 nm
  • the transmittance at different temperatures is scanned, and the scanning temperature interval is 1.189 ⁇ 10 -9 ° C, and the scanning result is shown by a black dot curve in FIG. 5 .
  • the transmittance of the 792 nm signal light at different temperatures and the signal transmission curve of the 792 nm signal are differentiated to obtain dt/dT, that is, a derivative curve of transmittance versus temperature.
  • the temperature resolution of the temperature sensor at this position can be calculated as 0.595 ⁇ 10 -9 °C, which is the resolution of the temperature sensor at a fixed temperature point.
  • the curve is then differentiated to find dt/dT, which is the derivative of the transmittance versus temperature.
  • the curve obtained is shown in the black undoped curve in Fig. 5.
  • the temperature resolution of the temperature sensor at this position can be calculated to be 0.595 ⁇ 10 -9 °C.
  • the measurement of the vicinity of a fixed temperature point allows the movable metal block to be fixed at 116 nm, which enables high sensitivity or high resolution measurement at a fixed temperature point.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

一种基于外置液囊和固定波长的超高分辨率温度传感器，由一个外置液囊（1）、金属块（2）、一个竖直波导（3）、一个水平波导（5）、两个金属膜（4、6）和一个水平传播的信号光（200）组成；所述液囊（1）和所述竖直波导（3）连接，所述金属块（2）设置竖直波导（3）内，且可以移动；所述竖直波导（3）和水平波导（5）连接；所述信号光（200）采用固定波长。结构紧凑，体积小，非常便于集成，分辨率高，温度平均分辨率平均达到0.99×10 -9℃，最高分辨率为0.595×10 -9℃。

Description

基于外置液囊和固定波长的超高分辨温度传感器 技术领域
本发明涉及一种超高分辨率，纳米尺度的温度传感器，尤其涉及基于外置液囊和单一波长激光探测的超高灵敏度温度传感器。
背景技术
温度传感器是实际应用中最广泛的传感器之一，从我们生活中的寒暑表，体温计到大型仪器以及集成电路上的温控设备，温度传感器无处不在。传统温度传感器如热电阻、铂电阻，双金属开关等虽然有着各自的优点，但在微型和高精度产品中却不再适用。半导体温度传感器灵敏度或分辨率高、体积小、功耗低、抗干扰能力强等优点使得其在半导体集成电路中应用非常广泛。
基于表面等离子激元的波导却能突破衍射极限的限制，实现纳米尺度的光信息处理和传输。表面等离子激元是当电磁波入射到金属与介质分界面时，电磁波和金属表面的自由电子耦合形成的一种在金属表面传播的表面电磁波。根据表面等离子激元的性质，人们已经提出了很多基于表面等离子体结构的器件，例如滤波器、环形器、逻辑门、光开关等。这些器件在结构上都比较简单，非常便于光路集成。
目前，根据表面等离子激元的性质人们提出的温度传感器的灵敏度只有70pm/℃或-0.65nm/℃。虽然这些表面等离子激元的温度传感器体积很小，但是灵敏度或分辨率并不高。
发明内容
本发明的目的是克服现有技术中的不足，提供一种便于集成的MIM结构的超高分辨率温度传感器。
本发明的温度传感器通过下述技术方案予以实现。
本发明的基于外置液囊和固定波长的超高分辨率温度传感器由一个外置液囊、金属块、一个竖直波导、一个水平波导、两个金属膜和一个水平传播的信号光组成；所述信号光采用固定波长；所述液囊和所述竖直波导连接，所述金属块设置竖直波导内，且可以移动；所述竖直波导和水平波导连接。
所述液囊内物质为高热膨胀系数的物质；
所述高膨胀系数的物质为酒精或水银。
所述液囊的形状为立方体、球形、椭球形或不规则形状。
所述金属为金或银。
所述金属为银。
所述水平波导和竖直波导为MIM结构的波导。
所述水平波导内的介质为空气。
所述信号光为单一波长激光，其波长为792nm的激光。
所述可移动金属块固定位置为116nm。
本发明与现有技术相比，有如下积极效果：
1.结构紧凑，体积小，非常便于集成。
2.分辨率高，温度平均分辨率平均达到0.99×10-9℃，最高分辨率为0.595×10-9℃。
附图说明
图1是本发明超高分辨率温度传感器第一种实施例二维结构示意图。
图中：外置液囊1 金属块2 竖直波导3 金属膜4 水平波导5 金属膜6 水平传播的信号光200
图2是本发明超高分辨率温度传感器第二种实施例二维结构示意图。
图中：外置液囊1 金属块2 竖直波导3 金属膜4 水平波导5 金属膜6 水平传播的信号光200
图3是不同波长信号光的透射频谱图。
图4是不同波长透射率的间隔的平均值。
图5是透射率对应温度的导数曲线图。
具体实施方式
下面结合附图及实施例对本发明作进一步详细的阐述。
如图1所示，本发明高分辨率温度传感器由一个外置液囊1、金属块2、一个竖直波导3、一个水平波导5、两个金属膜4、6(没有刻蚀的金属膜)和一水平传播的信号光200(波导表面形成表面等离子激元)组成；信号光采用固定波长；液囊1和竖直波导3连接，液囊1为球形，其半径R采用0.1mm，该液囊1内的物质为比热容较低，且为高热膨胀系数的物质；所述高热膨胀系数的物质采用酒精或水银，最好采用酒精；金属采用金或银，最佳为银，金属膜厚度(以下用h1表示)采用100nm以上取值范围，以100nm厚度为最佳；金属块2设置竖直波导3内，且可以移动，移动金属块2长度m采用 80nm-150nm取值范围，以125nm长度为最佳，可移动金属块2距离水平波导5的距离s采用0nm-200nm距离范围，且由金属块2的位置确定，该金属块2为金或银，最佳为银；竖直波导3和水平波导5连接；竖直波导3和水平波导5为MIM结构的波导，即MIM波导为金属-绝缘体-金属结构，绝缘体采用不导电透明物质；不导电透明物质为空气、二氧化硅或硅；竖直波导3位于水平波导5的上端；竖直波导3的宽度b采用30nm-60nm取值范围，以35nm宽度为最佳，竖直波导3的长度M采用200nm以上，以300nm长度为最佳；竖直波导3的左边缘到金属膜6左边缘的距离a采用350nm-450nm取值范围，以400nm为最佳。水平波导5宽度d采用30nm-100nm取值范围，以50nm宽度为最佳，水平波导5内的介质为空气；水平波导5的下边缘距离金属膜6的边缘的距离c采用大于150nm的取值范围；信号光波长为792nm的激光。
本发明通过温度的变化来改变酒精的体积，使其膨胀推动可移动金属块3向水平波导5移动来改变竖直波导4内空气段的长度，可移动金属块3向下移动使得其到水平波导5距离发生变化，信号光的透过率也就随之发生变化；由于可移动金属块3往下移动受温度的控制，所以温度的变化影响信号光的透射率的变化，根据透射率的变化即可探测温度信息的变化；透射率的特征可以与温度一一对应，即从透射率的特征即可知道温度的变化。当温度又降回初始温度时，在外界大气压的作用下，金属块3又会回到初始压力平衡的位置，方便下一次探测。
本发明酒精体积膨胀系数为αethanol＝1.1×10-3/℃，在室温(20℃)时密度为ρ＝0.789g/cm3。金属块的线膨胀系数为αAg＝19.5×10-6/℃。相比于酒精的膨胀系数，在相同温度变化下，银的膨胀可以忽略不计。本发明中即不再考虑温度变化对金属块体积的影响。根据液囊的体积和可移动金属块的截面积可以计算出金属块的位置变化与温度的关系，由此定义一个比例系数σ表示单位温度的变化对应的金属块移动距离
Figure PCTCN2016106684-appb-000001
此式也可以作为衡量该结构的温度敏感性。根据此式可以得出圆形吸收腔的截面积以及可移动金属块的宽度对金属块的位置变化影响比较大，综合考虑选择b＝35nm。则σ＝1.32×10-9nm/℃，此结果为金属块的移动量与温度的关系。
如图2所示，本发明高分辨率温度传感器由一个外置液囊1、金属块2、一个竖直波导3、一个水平波导5、两个金属膜4、6(没有刻蚀的金属膜)和一个水平传播的信号光200(波导表面形成表面等离子激元)组成；信号光采用固定波长；液囊1和竖直波导3连接，液囊1为界面正六边形的锥体，边长r采用0.1mm，该液囊1(温度敏感腔)内的物质为比热容较低，且为高热膨胀系数的物质；所述高热膨胀系数的物质采用酒精或水银，最好采用酒精；银膜厚度h1采 用100nm以上取值范围，以100nm厚度为最佳；金属块2设置竖直波导3内，且可以移动，移动金属块2长度m采用80nm-150nm取值范围，以125nm长度为最佳，可移动金属块2距离水平波导5的距离s采用0nm-200nm距离范围，且由金属块2的位置确定，该金属块2为金或银，最佳为银；竖直波导3和水平波导5连接；竖直波导3和水平波导5为MIM结构的波导，即MIM波导为金属-绝缘体-金属结构，绝缘体采用不导电透明物质；不导电透明物质为空气、二氧化硅或硅；竖直波导3位于水平波导5的上端；竖直波导3的宽度b采用30nm-60nm取值范围，以35nm宽度为最佳，竖直波导3的长度M采用200nm以上的值，以300nm长度为最佳；竖直波导3的左边缘到金属膜6左边缘的距离a采用350nm-450nm取值范围，以400nm为最佳。水平波导5宽度d采用30nm-100nm取值范围，以50nm宽度为最佳，水平波导5内的介质为空气；水平波导5的下边缘距离金属膜6的边缘的距离c采用大于150nm的取值范围。
本发明通过温度的变化来改变酒精的体积，使其膨胀推动可移动金属块3向水平波导5移动来改变竖直波导4内空气段的长度，可移动金属块3向下移动使其到水平波导5距离发生变化，信号光的透过率也就随之发生变化；由于可移动金属块3往下移动受温度的控制，所以温度的变化影响信号光的透射率的变化，根据透射率的变化即可探测温度信息的变化，透射率的特征可以与温度一一对应，即从透射率的特征即可知道温度的变化。当温度又降回初始温度时，在外界大气压的作用下，金属块3又会回到初始压力平衡的位置，方便下一次 探测。
可移动金属块3往下移动，使其水平波导距离发生变化，信号光的透过率也就随之发生变化。如图3所示是该结构在s的值不同时波长为700nm-1000nm的各个波长的光的透过率。金属块的初始位置为初始温度(如20℃)时的位置，其值s＝160nm；利用仿真软件扫描可以得到温度变化一定时，水平波导各个波长的透过率，然后再让相应波长的透过率值依次相差，然后对其做绝对值平均。这样就可以得到每个波长的在单位温度间隔内透射率的变化值，结果如图4所示。图中曲线代表扫描间隔为2.97×10-9℃时各个波长透射率的间隔的平均值。利用仿真软件扫描可以得到温度变化一定时，水平波导各个波长的透过率，然后再让相应波长的透过率值依次相差然后绝对值求和取平均，这样就得到了温度间隔固定时各个波长透射率的差的平均值。从图中可以得到波长为792nm时，透射率间隔最大值为0.067207。所以水平波导的信号光为792nm的单一光源，温度的变化影响信号光的透射率的变化，根据透射率的变化即可探测温度信息的变化。
设探测器对于单一波长透射率的分辨率能力为2％的透射率变化量，则用这种探测方式设计的温度传感器的平均分辨率达到0.99×10-9℃。温度传感器在增加液囊的体积后，可移动金属块对温度更加敏感。同样对入射信号光为792nm的情况下，扫描其在不同温度下的透射率，扫描温度间隔为1.189×10-9℃，扫描结果如图5中黑色点状曲线所示。792nm信号光在不同温度下的透射率，以及对792nm信号光透射曲线进行微分求出dt/dT,即透射率对温度的导数曲线图。 根据曲线可以得到在s＝116nm的位置有最大的透射率变化率。根据扫描间隔可以计算出温度传感器在该位置的温度分辨率为0.595×10-9℃，此为固定温度点该温度传感器的分辨率。然后对曲线进行微分求出dt/dT,即透射率对温度的导数。所求曲线如图5中黑色不加点曲线所示。在处理图像时，将相应温度点对应可移动金属块的位置也标注在横轴上，以便于查找透射率变化最大的位置。根据黑色不加点曲线可以得到在s＝116nm的位置有最大的透射率变化率。根据扫描间隔可以计算出温度传感器在该位置的温度分辨率为0.595×10-9℃。在实际应用中针对某一个固定温度点附近进行测量，可以把可移动金属块固定在116nm处，这样既可以实现固定温度点高灵敏度或高分辨率的测量。
尽管本专利已介绍了一些具体的实例，只要不脱离本专利权利要求所规定的精神，各种更改对本领域技术人员来说是显而易见的。

Claims (10)

  1. 一种基于外置液囊和固定波长的超高分辨率温度传感器，其特征在于：它由一个外置液囊、金属块、一个竖直波导、一个水平波导、两个金属膜和一个水平传播的信号光组成；所述液囊和所述竖直波导连接，所述金属块设置竖直波导内，且可以移动；所述竖直波导和水平波导连接；所述信号光采用固定波长。
  2. 按照权利要求1所述的基于外置液囊和固定波长的超高分辨率温度传感器，所述液囊内物质为高热膨胀系数的物质。
  3. 按照权利要求2所述的基于外置液囊和固定波长的高分辨率温度传感器，所述高膨胀系数的物质为酒精或水银。
  4. 按照权利要求1所述的基于外置液囊和固定波长的超高分辨率温度传感器，所述液囊的形状为立方体、球形、椭球形或不规则形状。
  5. 按照权利要求1所述的基于外置液囊和固定波长的高分辨率温度传感器，所述金属为金或银。
  6. 按照权利要求5所述的基于外置液囊和固定波长的超高分辨率温度传感器，所述金属为银。
  7. 按照权利要求1所述的基于外置液囊和固定波长的超高分辨率温度传感器，所述水平波导和竖直波导为MIM结构的波导。
  8. 按照权利要求1所述的基于外置液囊和固定波长的高分辨率温度传感器，所述水平波导内的介质为空气。
  9. 按照权利要求1所述的基于外置液囊和固定波长的超高分辨率温度传感器，所述信号光为单一波长激光，其波长为792nm的激 光。
  10. 按照权利要求1所述的基于外置液囊和固定波长的超高分辨率温度传感器，所述可移动金属块的固定位置为116nm。
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