WO2017140146A1 - 基于内置液囊和光谱谷点的高分辨率温度传感器 - Google Patents

基于内置液囊和光谱谷点的高分辨率温度传感器 Download PDF

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WO2017140146A1
WO2017140146A1 PCT/CN2016/106683 CN2016106683W WO2017140146A1 WO 2017140146 A1 WO2017140146 A1 WO 2017140146A1 CN 2016106683 W CN2016106683 W CN 2016106683W WO 2017140146 A1 WO2017140146 A1 WO 2017140146A1
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temperature sensor
waveguide
built
sac
sensor based
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欧阳征标
陈治良
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Shenzhen University
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Shenzhen University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/32—Measuring temperature based on the expansion or contraction of a material the material being a fluid contained in a hollow body having parts which are deformable or displaceable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/02—Measuring temperature based on the expansion or contraction of a material the material being a liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/02—Measuring temperature based on the expansion or contraction of a material the material being a liquid
    • G01K5/14—Measuring temperature based on the expansion or contraction of a material the material being a liquid the liquid displacing a further liquid column or a solid body

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  • the present invention relates to a high resolution, nanoscale temperature sensor, and more particularly to a high resolution temperature sensor based on a built-in sac and a spectral valley.
  • Temperature sensors are one of the most widely used sensors in the world. From the thermometers in our lives, thermometers to large instruments and temperature control devices on integrated circuits, temperature sensors are everywhere.
  • Traditional temperature sensors such as thermal resistors, platinum resistors, and bimetal switches, have their own advantages, but are no longer suitable for use in miniature and high precision products.
  • Semiconductor temperature sensors have the advantages of high sensitivity or resolution, small size, low power consumption, and strong anti-interference ability, making them widely used in semiconductor integrated circuits. With the development of optical information technology such as optical communication, optical computing, optical storage, etc.
  • Waveguides based on surface plasmons can break through the limits of diffraction limits and achieve nanoscale optical information processing and transmission.
  • the surface plasmon is a surface electromagnetic wave propagating on the metal surface formed by the free electron coupling of the electromagnetic wave and the metal surface when the electromagnetic wave is incident on the interface between the metal and the medium.
  • many devices based on surface plasmon structures have been proposed, such as filters, circulators, logic gates, optical switches, and the like. These devices are relatively simple in structure and are very convenient for optical path integration.
  • the sensitivity of the temperature sensor is only 70 pm / ° C or - 0.65 nm / ° C. Although the temperature sensor volume of these surface plasmons Very small, but the sensitivity or resolution is not high.
  • the present invention adopts the following design:
  • the high-resolution temperature sensor based on the built-in sac and spectral valley is composed of a built-in sac, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a horizontal signal light; the signal light is adopted Broadband light or swept light; the sac is coupled to the vertical waveguide, the metal block being disposed within a vertical waveguide and movable; the vertical waveguide being coupled to the horizontal waveguide.
  • the substance in the temperature sensitive cavity is a substance having a high coefficient of thermal expansion.
  • the substance having a high expansion coefficient is alcohol or mercury.
  • the shape of the cross-sectional area of the liquid capsule is rectangular, circular, polygonal, elliptical, or irregular.
  • the metal is gold or silver.
  • the metal is silver.
  • the horizontal waveguide and the vertical waveguide are waveguides of a MIM structure.
  • the medium within the horizontal waveguide is air.
  • the signal light has a wavelength spectrum ranging from 700 nm to 1000 nm.
  • the sensitivity of the temperature sensor can reach -274nm/°C, and the response time is in the microsecond range. do not.
  • FIG. 1 is a two-dimensional structural diagram of a first embodiment of a high resolution temperature sensor of the present invention.
  • FIG. 2 is a schematic view of the three-dimensional structure shown in FIG. 1.
  • FIG 3 is a schematic view showing the two-dimensional structure of a second embodiment of the high resolution temperature sensor of the present invention.
  • FIG. 4 is a schematic view of the three-dimensional structure shown in FIG.
  • Figure 5 is a transmission spectrum diagram of signal light of different wavelengths.
  • Figure 6 is a graph showing the relationship between the transmission spectrum and temperature.
  • Fig. 7 is a graph showing the relationship between the amount of wavelength shift and temperature.
  • the present invention is based on a high-resolution temperature sensor with a built-in sac and a spectral valley, which consists of a metal film 1, a built-in sac 2, and a metal.
  • Block 3 a vertical waveguide 4, a horizontal waveguide 5, a metal film 6 (metal film 1, 6 not etched), and a horizontally propagating signal light 200 (the surface of the waveguide forms a surface plasmon); signal light Broadband light or swept light is used;
  • the liquid capsule 2 is connected with the vertical waveguide 4, and the liquid capsule 2 has a circular cavity with a radius of R, a cross-sectional area of 502655 nm 2 and a thickness of 1 ⁇ m, and the substance in the liquid capsule 2 is a material having a lower specific heat capacity and a high expansion coefficient;
  • the high expansion coefficient material is alcohol or mercury, preferably alcohol;
  • the metal is gold or silver, preferably silver, and the thickness of the metal film (hereinafter referred to as h 1 )
  • the range of values above 100 nm is used, and the thickness of 100 nm is optimal; the thickness of the liquid capsule 2 is larger than the thickness h 1 of the silver film; the metal block 3 is disposed in the vertical waveguide
  • the width d of the horizontal waveguide 5 is in the range of 30 nm to 100 nm, and the width is preferably 50 nm, and the medium in the horizontal waveguide 5 is air; the distance from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is greater than 150 nm. range.
  • the invention changes the volume of the alcohol by the change of the temperature, causes the expansion to push the movable metal block to move to the horizontal waveguide to change the length of the air segment in the vertical waveguide, and the movable metal block 3 moves downward, thereby changing the signal light. Overshoot, because the movable metal block moves down
  • the temperature is controlled by the temperature, so the change of the temperature affects the position of the transmission spectrum valley point of the signal light, and the information of the temperature change can be obtained according to the information of the movement of the transmission spectrum valley point.
  • the information of the temperature change can be obtained from the information of the movement of the transmission spectrum valley point.
  • the expansion of silver is negligible at the same temperature change.
  • the effect of temperature changes on the volume of silver is no longer considered in the present invention.
  • the relationship between the position change of the metal block and the temperature can be calculated, thereby defining a proportional coefficient ⁇ indicating the moving distance of the metal block corresponding to the change of the unit temperature.
  • the present invention is based on a high-resolution temperature sensor with a built-in sac and a spectral valley, which consists of a metal film 1, an internal sac 2, and a metal.
  • Block 3 a vertical waveguide 4, a horizontal waveguide 5, a metal film 6 (metal film 1, 6 not etched), and a horizontally propagating signal light 200 (the surface of the waveguide forms a surface plasmon); a broadband light or signal light swept light; sacs waveguide 2 and 4 are connected to the vertical, sac 2 (temperature sensitive chamber) cross-sectional area of the hexagonal cavity side length of r, temperature-sensitive sectional area of the chamber 502655nm 2
  • the thickness is 1 ⁇ m
  • the substance in the sac 2 is a substance having a lower specific heat capacity and a high expansion coefficient
  • the high expansion coefficient substance is alcohol or mercury, preferably alcohol
  • the metal is gold or silver, preferably silver
  • the thickness of the metal film h 1 is in the range of 100 nm or more, and the thickness is preferably 100 nm; the thickness of the liquid capsule 2 is greater than the thickness of the silver film h 1 ; the movable metal block 3 is disposed in the vertical waveguide 4; and can be moved
  • the distance s of the movable metal block 3 from the horizontal waveguide 5 is in the range of 0 nm to 200 nm, and is determined by the position of the metal block 3, which is gold or silver, preferably silver; the vertical waveguide 4 and The horizontal waveguide 5 is connected; the horizontal waveguide 5 and the vertical waveguide 4 are waveguides of the MIM structure, that is, the MIM waveguide is a metal-insulator-metal structure, and the insulator is made of a non-conductive transparent material; the non-conductive transparent material is air, silicon dioxide, or Silicon; the vertical waveguide 4 is located at the upper end of the horizontal waveguide 5; the medium in the horizontal waveguide 5 is air; the width b of the vertical waveguide 4 is in the range of 30 nm to 60 nm, and the width is preferably 35 nm, and the length of the vertical waveguide 4 is M.
  • the value above 200 nm is preferably 300 nm in length; the distance a from the left edge of the vertical waveguide 4 to the left edge of the metal film 6 is in the range of 350 nm to 450 nm, preferably 400 nm.
  • the width d of the horizontal waveguide 5 is in the range of 30 nm to 100 nm, and the width is preferably 50 nm, and the medium in the horizontal waveguide 5 is air; the distance from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is greater than 150 nm. range.
  • the invention changes the volume of the alcohol by the change of the temperature, causes the expansion to push the movable metal block 3 to move to the horizontal waveguide 5 to change the length of the air segment in the vertical waveguide 4, and the movable metal block 3 moves downward, thereby changing the signal.
  • the transmittance of light is controlled by the temperature of the movable metal block 3, so the change of temperature affects the position of the transmission spectrum valley of the signal light, and the temperature change can be obtained according to the information of the movement of the transmission spectrum valley point. information.
  • the movable metal block 3 is moved downward to change the distance to the horizontal waveguide 5, and the transmittance of the signal light changes accordingly.
  • the transmittance of light having a wavelength of from 700 nm to 1000 nm is used.
  • the sensitivity of the temperature sensor can be expressed by d ⁇ /dT.
  • the sensitivity of the temperature sensor is large and small, and it is in a state of fluctuation. This is not good for characterizing the performance of the temperature sensor. Therefore, the original data is interpolated to obtain a straight line.
  • the volume of the alcohol chamber is increased, and the sensitivity of the corresponding movable metal block 3 to temperature is increased, and the sensitivity of the temperature sensor is correspondingly increased.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Optical Integrated Circuits (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

一种基于内置液囊（2）和光谱谷点的高分辨率温度传感器，其由一个内置液囊（2）、金属块（3）、一个竖直波导（4）、一个水平波导（5）、两个金属膜（1、6）和一个水平信号光（200）组成；所述信号光（200）采用宽带光或扫频光；所述液囊（2）和所述竖直波导（4）连接，所述金属块（3）设置在竖直波导（4）内，且可以移动；所述竖直波导（4）和水平波导（5）连接。该温度传感器结构紧凑，体积小，非常便于集成，温度传感器的灵敏度可以达到-274nm/℃。

Description

基于内置液囊和光谱谷点的高分辨率温度传感器 技术领域
本发明涉及一种高分辨率，纳米尺度的温度传感器，尤其涉及基于内置液囊和光谱谷点的高分辨率温度传感器。
背景技术
温度传感器是实际应用中最为广泛的传感器之一，从我们生活中的寒暑表，体温计到大型仪器以及集成电路上的温控设备，温度传感器无处不在。传统温度传感器，例如热电阻、铂电阻，双金属开关等虽然有着各自的优点，但在微型和高精度产品中却不再适用。半导体温度传感器灵敏度或分辨率高、体积小、功耗低、抗干扰能力强等优点，使其在半导体集成电路中应用非常广泛。随着光通信，光计算，光存储等光信息技术的发展，
基于表面等离子激元的波导却能突破衍射极限的限制，实现纳米尺度的光信息处理和传输。表面等离子激元是当电磁波入射到金属与介质分界面时，电磁波和金属表面的自由电子耦合形成的一种在金属表面传播的表面电磁波。根据表面等离子激元的性质，人们已经提出了很多基于表面等离子体结构的器件，例如：滤波器、环形器、逻辑门、光开关等。这些器件在结构上都比较简单，非常便于光路集成。
根据表面等离子激元的性质提出了温度传感器的灵敏度只有70pm/℃或-0.65nm/℃。虽然这些表面等离子激元的温度传感器体积 很小，但是灵敏度或分辨率并不高。
发明内容
本发明的目的是克服现有技术中的不足，提供一种便于集成的MIM结构的高分辨率温度传感器。
为了实现上述目的，本发明采取以下设计方案：
本发明基于内置液囊和光谱谷点的高分辨率温度传感器由一个内置液囊、金属块、一个竖直波导、一个水平波导、两个金属膜和一个水平信号光组成；所述信号光采用宽带光或扫频光；所述液囊和所述竖直波导连接，所述金属块设置竖直波导内，且可以移动；所述竖直波导和水平波导连接。
所述温度敏感腔内物质为高热膨胀系数的物质。
所述高膨胀系数的物质为酒精或水银。
所述液囊截面积的形状为矩形、圆形、多边形、椭圆形、或不规则形状。
所述金属为金或银。
所述金属为银。
所述水平波导和竖直波导为MIM结构的波导。
所述水平波导内的介质为空气。
所述信号光波长范围为700nm-1000nm的频谱信号。
本发明与现有技术相比的有益效果是：
1.具有结构紧凑，体积小，非常便于集成；
2.温度传感器的灵敏度可以达到-274nm/℃，响应时间在微秒级 别。
附图说明
图1是本发明高分辨率温度传感器第一种实施例二维结构示意图。
图中：金属膜1 液囊2 金属块3 竖直波导4 水平波导5 金属膜6 水平传播的信号光200
图2是图1所示的三维结构示意图。
图3是本发明高分辨率温度传感器第二种实施例二维结构示意图。
图中：金属膜1 液囊2 金属块3 竖直波导4 水平波导5 金属膜6 水平传播的信号光200
图4是图3所示的三维结构示意图。
图5是不同波长信号光的透射频谱图。
图6是透射频谱与温度之间的关系图。
图7是波长移动量与温度之间的关系图。
具体实施方式
下面结合附图及实施例对本发明作进一步详细的描述。
如图1和2(图2中省略了结构上面的封装介质)所示，本发明基于内置液囊和光谱谷点的高分辨率温度传感器，它由金属膜1、一个内置液囊2、金属块3、一个竖直波导4、一个水平波导5、金属膜6(没有被刻蚀的金属膜1、6)和一个水平传播的信号光200(波导表面形成表面等离子激元)组成；信号光采用宽带光或扫频光；液囊 2和竖直波导4连接，液囊2截面为圆形腔，半径为R，其截面积采用502655nm2，厚度为1μm，该液囊2内的物质为比热容较低的，且为高膨胀系数的物质；所述高膨胀系数物质为酒精或水银，最好为酒精；金属采用金或银，最佳为银，金属膜厚度(以下用h1表示)采用100nm以上取值范围，以100nm厚度为最佳；液囊2的厚度大于银膜的厚度h1；金属块3设置竖直波导4内，且可以移动，移动金属块3长度m采用80nm-150nm取值范围，以125nm长度为最佳，可移动金属块3距离水平波导5的距离s采用0nm-200nm距离范围，且由金属块3的位置确定，该金属块3为金或银，最佳为银；竖直波导4和水平波导5连接；竖直波导4和水平波导5为MIM结构的波导，即MIM波导为金属-绝缘体-金属结构；绝缘体采用不导电透明物质；不导电透明物质为空气、二氧化硅、或硅；竖直波导4位于水平波导5的上端；竖直波导4宽度b采用30nm-60nm取值范围，以35nm宽度为最佳，竖直波导4长度M采用200nm以上的值，以300nm长度为最佳；竖直波导4的左边缘到金属膜6左边缘的距离a采用350nm-450nm取值范围，以400nm为最佳。水平波导5宽度d采用30nm-100nm取值范围，以50nm宽度为最佳，水平波导5内的介质为空气；水平波导5的下边缘距离金属膜6的边缘的距离c采用大于150nm的取值范围。
本发明通过温度的变化来改变酒精的体积，使其膨胀推动可移动金属块向水平波导移动来改变竖直波导内空气段的长度，可移动金属块3向下移动,从而改变信号光的透过率，由于可移动金属块往下移 动受温度的控制，所以温度的变化影响信号光的透射频谱谷点的位置，根据透射频谱谷点的移动的信息即可得到温度变化的信息。根据透射频谱谷点的移动的信息即可得到温度变化的信息。当温度又降回初始温度时，在外界大气压的作用下，金属块3又会回到初始压力平衡的位置，方便下一次探测。
本发明酒精体积膨胀系数为αethanol＝1.1×10-3/℃，在室温(20℃)时密度为ρ＝0.789g/cm3。银的线膨胀系数为αAg＝19.5×10-6/℃。相比于酒精的膨胀系数，在相同温度变化下，银的膨胀可以忽略不计。在本发明中即不再考虑温度变化对银的体积的影响。根据液囊的体积和可移动金属块的截面积可以计算出金属块的位置变化与温度的关系，由此定义一个比例系数σ表示单位温度的变化对应的金属块移动距离
Figure PCTCN2016106683-appb-000001
此式也可以作为衡量该结构的温度敏感性。根据此式可以得出圆形吸收腔的截面积以及可移动金属块的宽度对金属块的位置变化影响比较大，综合考虑选择S＝502655nm2，b＝35nm。则σ＝157nm/℃，此结果为金属块的移动量与温度的关系。
如图3和4(图4中省略了结构上面的封装介质)所示，本发明基于内置液囊和光谱谷点的高分辨率温度传感器，它由金属膜1、一 个内置液囊2、金属块3、一个竖直波导4、一个水平波导5、金属膜6(没有被刻蚀的金属膜1、6)和一个水平传播的信号光200(波导表面形成表面等离子激元)组成；所述信号光采用宽带光或扫频光；液囊2和竖直波导4连接，液囊2(温度敏感腔)截面积为六边形腔，边长为r，温度敏感腔的截面积为502655nm2，厚度为1μm，该液囊2内的物质为比热容较低的，且为高膨胀系数的物质；高膨胀系数物质为酒精或水银，最好为酒精；金属采用金或银，最佳为银，金属膜厚度h1采用100nm以上取值范围，以100nm厚度为最佳；液囊2的厚度大于银膜h1的厚度；可移动金属块3设置竖直波导4内；且可以移动，移动金属块3长度m采用80nm-150nm取值范围，以125nm长度为最佳，可移动金属块3距离水平波导5的距离s采用0nm-200nm距离范围，且由金属块3的位置确定，该金属块3为金或银，最佳为银；竖直波导4和水平波导5连接；水平波导5和竖直波导4为MIM结构的波导，即MIM波导为金属-绝缘体-金属结构，该绝缘体采用不导电透明物质；不导电透明物质为空气、二氧化硅、或硅；竖直波导4位于水平波导5的上端；水平波导5内的介质为空气；竖直波导4宽度b采用30nm-60nm取值范围，以35nm宽度为最佳，竖直波导4长度M采用200nm以上的值，以300nm长度为最佳；竖直波导4的左边缘到金属膜6左边缘的距离a采用350nm-450nm取值范围，以400nm为最佳。水平波导5宽度d采用30nm-100nm取值范围，以50nm宽度为最佳，水平波导5内的介质为空气；水平波导5的下边缘距离金属膜6的边缘的距离c采用大于 150nm的取值范围。
本发明通过温度的变化来改变酒精的体积，使其膨胀推动可移动金属块3向水平波导5移动来改变竖直波导4内空气段的长度，可移动金属块3向下移动,从而改变信号光的透过率，由于可移动金属块3往下移动受温度的控制，所以温度的变化影响信号光的透射频谱谷点的位置，根据透射频谱谷点的移动的信息即可得到温度变化的信息。当温度又降回初始温度时，在外界大气压的作用下，金属块3又会回到初始压力平衡的位置，方便下一次探测。
可移动金属块3往下移动使其到水平波导5距离发生变化，信号光的透过率也就随之发生变化。如图5所示，本发明结构在s的值不同时，波长为700nm-1000nm的各个波长的光的透过率。金属块3的初始位置为在初始温度(如20℃)时的位置，其值s＝160nm；从图中可以看出水平波导5透过率的波谷点的的波长位置随着s的的减小而逐渐红移。由于可移动金属块3位置的改变与温度有关。当酒精区域温度每升高1℃，可移动金属块3的位置就会由于酒精受热膨胀而向下移动157nm。可移动金属块3向下移动就会改变水平波导5的距离s的长度，最后水平波导5的透过率也会随之改变。温度的单位变化量所引起的可移动金属块3的移动量与本扫描的间隔是一致的，所以s的变化所引起的水平波导5透过率的变化可以由温度变化来间接表达。则图5的结果中s的量可以用温度来代替，结果如图6所示。从图6中可以得到由温度T的变化导致s的变化而引起的水平波导5透过率的变化规律与图5一致。另外在图5中也可以看出温度每变化 0.1℃，水平波导5透过率图的波谷点波长的移动量非常大。所以根据水平波导5输出光的频谱特性即可知道温度的信息。经过细扫描得出每个温度点对应透过率波谷点的波长图，其关系图如图7所示。图中黑色带方形点的线为仿真模拟得出的数据点，黑色的线为根据仿真数据拟合后，得到的曲线。温度传感器的灵敏度可以用dλ/dT来表示。根据图7仿真得到的数据温度传感器的灵敏度有大有小，处于一种波动的状态，这样不好表征该温度传感器的性能，所以对原始数据进行了插值拟合得到了一条直线。根据温度传感器的灵敏度的表达式可以得出本发明温度传感器的灵敏度即为黑色曲线斜率,即：dλ/dT＝-274nm/℃。另外增加盛酒精腔的体积，相应的可移动金属块3对温度的敏感性就会升高，温度传感器的灵敏度也会相应的升高。
尽管本专利已介绍了一些具体的实例，只要不脱离本专利权利要求所规定的精神，各种更改对本领域技术人员来说是显而易见的。

Claims (9)

  1. 一种基于内置液囊和光谱谷点的高分辨率温度传感器，其特征在于：它由一个内置液囊、金属块、一个竖直波导、一个水平波导、两个金属膜和一个水平信号光组成；所述信号光采用宽带光或扫频光；所述液囊和所述竖直波导连接，所述金属块设置竖直波导内，且可以移动；所述竖直波导和水平波导连接。
  2. 按照权利要求1所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述液囊内物质为高热膨胀系数的物质。
  3. 按照权利要求2所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述高膨胀系数的物质为酒精或水银。
  4. 按照权利要求1所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述液囊截面积的形状为矩形、圆形、多边形、椭圆形、或不规则形状。
  5. 按照权利要求1所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述金属为金或银。
  6. 按照权利要求5所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述金属为银。
  7. 按照权利要求1所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述水平波导和竖直波导为MIM结构的波导。
  8. 按照权利要求1所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述水平波导内的介质为空气。
  9. 按照权利要求1所述的基于内置液囊和光谱谷点分析的高分辨率温度传感器，所述信号光波长范围为700nm-1000nm的频谱信号。
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