WO2017121000A1 - 一种半导体激光器 - Google Patents

一种半导体激光器 Download PDF

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Publication number
WO2017121000A1
WO2017121000A1 PCT/CN2016/073711 CN2016073711W WO2017121000A1 WO 2017121000 A1 WO2017121000 A1 WO 2017121000A1 CN 2016073711 W CN2016073711 W CN 2016073711W WO 2017121000 A1 WO2017121000 A1 WO 2017121000A1
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Prior art keywords
steering
lasers
axis collimating
semiconductor laser
compression
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PCT/CN2016/073711
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English (en)
French (fr)
Inventor
姜笑尘
王铁
郭渭荣
王宝华
刘瑞
徐磊
Original Assignee
北京凯普林光电科技股份有限公司
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Priority to US15/127,211 priority Critical patent/US10310278B2/en
Publication of WO2017121000A1 publication Critical patent/WO2017121000A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H01S5/02476—Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0911—Anamorphotic systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
    • G02B27/0922—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers the semiconductor light source comprising an array of light emitters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H01S5/4043—Edge-emitting structures with vertically stacked active layers
    • H01S5/405—Two-dimensional arrays

Definitions

  • the invention belongs to the technical field of lasers, and in particular to a semiconductor laser.
  • an object of the present invention is to provide a semiconductor laser.
  • the semiconductor laser has the characteristics of compact structure and simple optical path.
  • a semiconductor laser comprising a substrate and a laser disposed on the substrate, a fast axis collimating assembly, a slow axis collimating assembly, a steering compression optical system, a polarization combining prism, a focusing mirror, and an optical fiber, wherein the laser is two rows or a single row .
  • the same row of lasers are located on one plane, and each laser is sequentially provided with a fast axis collimating assembly and a slow axis collimating assembly along the optical path direction, and the same row of lasers corresponds to a set of steering compression optical systems, and the steering compression optical system is used for Steering and compressing a beam collimated by a fast axis collimating assembly and a slow axis collimating assembly for diverting and compressing two sets of said steering compression optical systems for two rows of lasers
  • the two lasers are combined, and the focusing mirror and the optical fiber are sequentially disposed at the rear of the polarization combining prism, which couples the laser into the optical fiber.
  • the steering compression optical system employs a transmission method or a reflection method.
  • the steering compression optical system When the steering compression optical system adopts a transmission method, the steering compression optical system includes a transmission wedge prism and a plurality of steering mirrors, and the plurality of steering mirrors respectively correspond to the lasers in the same row, and the beams emitted by the lasers are sequentially Through the fast axis collimation assembly, the slow axis collimation assembly, and the steering mirror, the beams deflected by the plurality of steering mirrors are all compressed by the transmissive wedge prism.
  • the steering compression optical system When the steering compression optical system adopts a reflection method, the steering compression system includes a reflective mask An inclined optical element and a plurality of turning mirrors, the plurality of turning mirrors respectively corresponding to the lasers in the same row, the beams emitted by the lasers sequentially passing through the fast axis collimating assembly, the slow axis collimating assembly and the steering reflection
  • the mirror, the light beams deflected by the plurality of steering mirrors are all compressed by the optical element.
  • the steering mirrors corresponding to the lasers in the same row are all located on the same plane, and the inclination angles of the respective steering mirrors on the same plane with respect to the bottom plate are the same.
  • the angle of inclination of each of the turning mirrors on the same plane with respect to the bottom plate is 1-10°.
  • the plane of the laser in the same row is higher than the plane of its corresponding turning mirror.
  • the two sets of the steering compression optical systems complete the steering and compression of the two lasers at the same height when they reach the polarization combining prism.
  • the two rows of lasers can be in the same plane, or the two rows of lasers can be divided into two planes with height differences.
  • the invention can effectively reduce the thickness of the bottom plate and improve the heat dissipation capability of the laser, thereby improving the efficiency and reliability of the laser, because the multi-way laser is in the same horizontal plane.
  • the invention is installed in the same horizontal plane as the multi-channel laser, the structure of the bottom plate is greatly simplified, the processing difficulty is reduced, and the mechanical material cost can be greatly reduced.
  • the multi-channel laser since the multi-channel laser is installed at the same horizontal plane, the step of the light beam in the fast axis direction is manufactured by a mirror with a specific tilt angle, and the change of the mirror angle in the fast axis direction can be quickly realized by adjusting the mirror angle.
  • the characteristic semiconductor laser improves the versatility of mechanical materials and greatly reduces management and production costs.
  • the present invention is directed to a compression optical system which can be classified into two types, a transmission method and a reflection method.
  • the transmission method steering compression system is composed of a single laser steering mirror and a transmission wedge prism such as a right angle wedge prism;
  • the reflection method steering compression system is a single laser steering mirror and an optical component having a specific inclination angle on the reflecting surface, such as a right angle bevel reflecting prism. . This allows the adjacent two lasers to have a larger spacing when passing through the mirror, reducing the difficulty of adjustment in this step and improving product yield.
  • 1 is a schematic structural view of a conventional laser
  • Figure 2a is a perspective structural view of a first embodiment of the present invention
  • Figure 2b is a side view of the first embodiment of the present invention.
  • Figure 2c is a plan view of the first embodiment of the present invention.
  • Figure 3a is a perspective structural view of a second embodiment of the present invention.
  • Figure 3b is a side view of the second embodiment of the present invention.
  • Figure 3c is a plan view of the second embodiment of the present invention.
  • FIG. 4a is a perspective structural view of a third embodiment of the present invention.
  • Figure 4b is a side view of a third embodiment of the present invention.
  • Figure 4c is a plan view of a third embodiment of the present invention.
  • Figure 5a is a perspective structural view of a fourth embodiment of the present invention.
  • Figure 5b is a side view of the fourth embodiment of the present invention.
  • Figure 5c is a plan view of a fourth embodiment of the present invention.
  • Figure 6a is a perspective structural view of a fifth embodiment of the present invention.
  • Figure 6b is a side view of the fifth embodiment of the present invention.
  • Figure 6c is a plan view of Embodiment 5 of the present invention.
  • Figure 7 is a schematic diagram of the principle of the present invention.
  • 100 is the bottom plate
  • 120 is the laser
  • 135 is the oblique prism
  • 140 is the steering prism
  • 142 is the polarization combining prism
  • 154 is the fast axis collimating component
  • 158 is the slow axis collimating component
  • 162 is the turning mirror 166 is a steering right angle wedge prism
  • 167 is a common mirror
  • 168 is a bevel reflection prism
  • 170 is a focusing mirror
  • 174 is an optical fiber.
  • 120.1 is the first laser
  • 120.2 is the second laser
  • 120.3 is the third laser
  • 154.1 is the first fast axis collimating component
  • 154.2 is the second fast axis collimating component
  • 154.3 is the third fast axis collimating component
  • 130.1 is The first beam
  • 130.2 is the second beam
  • 130.3 is the third beam
  • 158.1 is the first slow axis collimation assembly
  • 158.2 is the second slow axis collimation assembly
  • 158.3 is the third slow axis collimation assembly
  • 162.1 is the first steering
  • the mirror, 162.2 is the second turning mirror
  • 163.3 is the third turning mirror
  • 130c is the beam stack.
  • the present invention provides a semiconductor laser including a substrate 100 and a laser 120 disposed on the substrate 100, a fast axis collimating assembly 154, a slow axis collimating assembly 158, a steering compression optical system, and polarization.
  • a semiconductor laser including a substrate 100 and a laser 120 disposed on the substrate 100, a fast axis collimating assembly 154, a slow axis collimating assembly 158, a steering compression optical system, and polarization.
  • a compression optics system for steering and compressing a beam collimated by the fast axis collimation assembly 154 and the slow axis collimation assembly 158 When the polarization combining beam 142 is used in two rows of lasers, the two sets of the steering compression optical systems complete the two lasers that are turned and compressed, and the focusing mirror 170 and the optical fibers 174 are sequentially disposed on the polarization combining prism 142. Rearward, the focusing mirror 170 couples the laser beam of the combined beam splitting prism 142 into the optical fiber 174.
  • the steering compression optical system employs a transmission method or a reflection method.
  • the steering compression optical system includes a transmission wedge prism and a plurality of steering mirrors 162, and the plurality of steering mirrors 162 respectively correspond to the respective lasers 120 in the same row, and each of the lasers 120
  • the emitted light beam passes through the fast axis collimating assembly 154, the slow axis collimating assembly 158, and the turning mirror 162 in turn, and the light beams that are turned by the plurality of turning mirrors 162 are compressed by the transmissive wedge prism.
  • the transmissive wedge prism may employ a right angle wedge prism 166.
  • the steering compression system includes an optical element having a tilt angle of the reflecting surface and a plurality of turning mirrors 162, and the plurality of turning mirrors 162 respectively correspond to the lasers 120 in the same row.
  • the light beams emitted by the lasers 120 sequentially pass through the fast axis collimating assembly 154, the slow axis collimating assembly 158, and the turning mirror 162, and the beams deflected by the plurality of turning mirrors 162 are all compressed by the optical elements.
  • the optical element may employ a right angle bevel reflecting prism 168.
  • the two sets of the steering compression optical system complete the steering and compression of the two lasers at the same height when they reach the polarization combining prism.
  • the bottom plate 100 is a stepped structure, and the steering mirrors 162 corresponding to the lasers 120 in the same row are all located on the same horizontal plane, and the angles of inclination of the steering mirrors 162 with respect to the bottom plate 100 are the same, and the steering mirrors 162 are opposite.
  • the angle of inclination of the bottom plate 100 is 1-10°.
  • the planes of the lasers 120 of the same row are higher than the plane of the corresponding turning mirror 162, and the polarization combining prism 142, the focusing mirror 170 and the optical fiber 174 are located in the same plane.
  • the working principle of the invention is:
  • the present invention provides a planar compact structure in which multiplexed semiconductor lasers 120 are mounted on the same horizontal plane.
  • the light beam 130 emitted by the multiplexed semiconductor laser 120 propagates in the x direction.
  • the beam 130 is collimated in the fast axis and slow axis directions, and is deflected by a specific angle 162.
  • the steering is directed to a beam stack that propagates at a designed angle (the direction of propagation is parallel to the yz plane).
  • the common mirror 167 which is tilted by a particular angle, is then turned, and the beam stack 130C propagates in the x direction and is coupled into the fiber 174 by the coupling lens 170.
  • the common mirror 167 and the turning mirror 162 which are inclined at a specific angle, form an optical system that compresses the beam stack 130 in the fast axis direction, which allows the light spots to be in the fast axis direction when the steering mirror 162 is turned.
  • the spacing can be appropriately enlarged to reduce the difficulty of adjustment and improve the yield of the product.
  • the common mirror 167 may also be a beveled reflective prism or a transmissive wedge prism. This structure combined with polarization beam combining technology enables the laser to achieve higher power output.
  • the laser beam fast axis direction spacing d L * sin ⁇ , L is the center distance of two adjacent semiconductor lasers, and ⁇ is the inclination angle of the single laser beam with respect to the bottom plane.
  • n0sin( ⁇ + ⁇ ) n1sin ⁇
  • ⁇ is the angle of the right-angle wedge prism
  • ⁇ is the inclination angle of the single laser beam with respect to the plane of the bottom plate
  • n0 is the refractive index of air
  • n1 is the refractive index of the right-angle wedge prism.
  • the present invention relates to a fiber-coupled laser comprising a bottom plate 100, two rows of lasers 120, a plurality of fast axis collimating assemblies 154, a plurality of slow axis collimating assemblies 158, a plurality of turning mirrors 162, as shown in Figures 2a-2c.
  • the steering compression optical system is a combination of the steering mirror 162 and the steering right angle wedge prism 166.
  • the laser light output by the multiplex laser 120 is coupled and integrated into the output of the optical fiber 174 after being collimated and combined.
  • the bottom plate 100 is a high thermal conductivity material such as oxygen-free copper. As shown in Figures 2a-2c, there are three planes of different heights on the base plate 100 for carrying the laser 120 and the optical components, respectively. The faces of the two rows of lasers 120 soldered on the bottom plate 100 have the same height plane, which ensures that the multiple lasers 120 have the same heat dissipation capability.
  • Two rows of lasers 120 are on the same side of the bottom plate 100, all the lasers 120 are on the same horizontal plane, two rows of lasers 120 are staggered, two sets of LD (laser) front cavity spacing d2 are fixed, and two adjacent LD centers in the same row
  • the interval d1 the slow axis divergence of the die is half angle ⁇ 1, and d1>2*d2tg ⁇ 1.
  • each laser passes through the corresponding fast axis collimating component 154 and the slow axis collimating component 158 to complete the direction of the fast and slow axis.
  • All of the mirrors 162 are inclined at the same angle, and an equal spacing is formed between the lasers in the fast axis direction.
  • Right angle wedge prism apex angle ⁇ ⁇
  • ⁇ is the inclination angle of the single laser beam with respect to the bottom plane
  • n0 is the air refractive index
  • n1 is the refractive index of the right angle wedge prism.
  • the polarization combining beam 142 is used for combining two laser beams, two beams of the same height, one of which passes through the steering right angle prism, passes through the wave plate on the polarization combining prism 142, changes the polarization state, and the other beam does not pass the wave.
  • the sheet enters the prism directly, and the two laser beams are combined by the polarization combining prism 142 to form a laser beam, which is coupled into the optical fiber 174 through the focusing mirror 170.
  • the structure of this embodiment is basically the same as that of the first embodiment. The only difference is that the two rows of LDs are cross-welded to both sides of the bottom plate 100, and all the LDs are in the same horizontal plane, as shown in Figs. 3a-3c.
  • the two rows of lasers 120 are located in different planes, with each row of dies being in a horizontal plane with a specific spacing d2 between the two rows.
  • the steering compression optical system is a combination of a steering mirror 162 and a bevel prism 135.
  • the oblique prism 135 raises the light emitted by the lower row of lasers 120 to ensure that the two laser beams after the steering compression reach the polarization beam.
  • the prisms 142 are highly uniform in height. As shown in Figures 4a-4c.
  • the two rows of lasers 120 are in the same plane, and the steering compression optical system is a combination of a turning mirror 162 and a beveled reflecting prism 168. As shown in Figures 5a-5c.
  • the lasers 120 can also be arranged in a single row in the same plane, the steering compression optics being a combination of a turning mirror 162 and a right angle wedge prism 166, as shown in Figures 6a-6c.
  • the invention can effectively reduce the thickness of the bottom plate and improve the heat dissipation capability of the laser, thereby improving the efficiency and reliability of the laser, because the multi-way laser is in the same horizontal plane.
  • the invention is installed in the same horizontal plane as the multi-channel laser, the structure of the bottom plate is greatly simplified, the processing difficulty is reduced, and the mechanical material cost can be greatly reduced.
  • the present invention is installed in the horizontal direction of the beam due to the installation of a multi-channel laser at the same horizontal plane. It is made for mirrors with specific tilt angles. It can quickly change the distance of the beam in the fast axis direction by adjusting the mirror angle. It is suitable for semiconductor lasers with different characteristics, which improves the versatility of mechanical materials and greatly reduces management and production costs.
  • the present invention is directed to a compression optical system which can be classified into two types, a transmission method and a reflection method.
  • the transmission method steering compression system is composed of a single laser steering mirror and a transmission wedge prism such as a right angle wedge prism;
  • the reflection method steering compression system is a single laser steering mirror and an optical component having a specific inclination angle on the reflecting surface, such as a right angle bevel reflecting prism. . This allows the adjacent two lasers to have a larger spacing when passing through the mirror, reducing the difficulty of adjustment in this step and improving product yield.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

一种半导体激光器，包括底板（100）及设置于底板上的激光器（120、120.1、120.2、120.3）、快轴准直组件（154、154.1、154.2、154.3）、慢轴准直组件（158、158.1、158.2、158.3）、转向压缩光学系统（135、140、162、162.1、162.2、162.3、166、167、168）、偏振合束棱镜（142）、聚焦镜（170）和光纤（174），其中激光器（120、120.1、120.2、120.3）可为两排或单排，同排激光器（120、120.1、120.2、120.3）均位于一个平面上，每个激光器（120、120.1、120.2、120.3）沿光路方向均依次设有快轴准直组件（154、154.1、154.2、154.3）和慢轴准直组件（158、158.1、158.2、158.3），同排激光器（120、120.1、120.2、120.3）对应一组用于转向和压缩由快、慢轴准直组件（154、154.1、154.2、154.3、158、158.1、158.2、158.3）准直的光束，偏振合束棱镜（142）用于将两组转向压缩光学系统（135、140、162、162.1、162.2、162.3、166、167、168）完成转向和压缩的两束激光合束，所述聚焦镜（170）将偏振合束棱镜（142）合束的激光耦合进光纤（174）。所述半导体激光器结构紧凑，光路简单，有效减薄底板（100）厚度，提升散热能力，从而提升效率和可靠性。

Description

一种半导体激光器 技术领域
本发明属于激光器技术领域，特别涉及一种半导体激光器。
背景技术
目前，大多数的多单管半导体激光器合束所采用的都是阶梯结构，底板被加工成等间距的台阶，每个台阶上安装一个激光二极管芯片，如图1所示。这种方法对台阶间隔加工精度要求很高，且每个台阶的平行度都有严格要求，因此加工成本较高。同时每个台阶由于高度差的存在，散热能力各有不同。为提高输出功率而增加单管激光器数量时，必然会压缩台阶间距，由于机械加工公差的存在，会给光学元件调装带来很大不利影响，降低成品率。
发明内容
针对上述问题，本发明的目的在于提供一种半导体激光器。该半导体激光器具备结构紧凑、光路简单的特点。
为了实现上述目的，本发明采用以下技术方案：
一种半导体激光器，包括底板及设置于底板上的激光器、快轴准直组件、慢轴准直组件、转向压缩光学系统、偏振合束棱镜、聚焦镜和光纤，其中激光器为两排或单排。同排激光器均位于一个平面上，每个激光器沿光路方向均依次设有快轴准直组件和慢轴准直组件，同排激光器对应一组转向压缩光学系统，所述转向压缩光学系统用于对由快轴准直组件和慢轴准直组件准直的光束进行转向和压缩，对于两排激光器时，所述偏振合束棱镜用于将两组所述转向压缩光学系统完成转向和压缩的两束激光合束，所述聚焦镜和光纤依次设置于偏振合束棱镜的后边，所述聚焦镜将激光耦合进光纤。
所述转向压缩光学系统采用透射法或反射法。
所述转向压缩光学系统采用透射法时，所述转向压缩光学系统包括透射楔形棱镜和多个转向反射镜，多个转向反射镜分别与同排中的各激光器相对应，各激光器发出的光束依次经过快轴准直组件、慢轴准直组件及转向反射镜，多个转向反射镜转向的光束均通过所述透射楔形棱镜进行压缩。
所述转向压缩光学系统采用反射法时，所述转向压缩系统包括反射面具 有倾斜角度的光学元件和多个转向反射镜，多个转向反射镜分别与同排中的各激光器相对应，各激光器发出的光束依次经过快轴准直组件、慢轴准直组件及转向反射镜，多个转向反射镜转向的光束均通过所述光学元件进行压缩。
同排的各激光器所对应的转向反射镜均位于同一平面上，且位于同一平面上的各转向反射镜相对于底板的倾斜角度相同。
位于同一平面上的各转向反射镜相对于底板的倾斜角度是1-10°。同排的激光器所在平面高于其相对应的转向反射镜所在平面。
所述底板上布设两排激光器时，两组所述转向压缩光学系统完成转向和压缩后的两束激光在到达偏振合束棱镜时位于同一高度。
两排激光器可位于同一的平面内，或两排激光器可分处具有高度差的两个平面。
本发明的上述方案的优点及有益效果是：
1.本发明由于多路激光器同处一个水平面，可以有效减薄底板厚度，提升激光器散热能力，从而提升激光器的效率和可靠性。
2.本发明由于多路激光器同处一个水平面安装，底板结构大为简化，加工难度降低，可以大大降低机械物料成本。
3.本发明由于多路激光器同处一个水平面安装，光束在快轴方向的台阶为特定倾斜角度的反射镜制造出，可以通过调节反射镜角度快速实现光束在快轴方向间距的变化，适用不同特性的半导体激光器，提升了机械物料的通用性，大大降低管理和生产成本。
4.本发明转向压缩光学系统，此系统可分为透射法和反射法两种。透射法转向压缩系统为单路激光器转向反射镜和透射楔形棱镜如直角楔形棱镜组成；反射法转向压缩系统为单路激光器转向反射镜和反射面具有特定倾斜角度的光学元件如直角斜面反射棱镜组成。这就允许相邻两路激光在经过反射镜时可以有更大的间距，降低此步调节难度，提升产品成品率。
附图说明
图1为现有激光器的的结构示意图；
图2a为本发明实施例一的立体结构图；
图2b为本发明实施例一的侧视图；
图2c为本发明实施例一的俯视图；
图3a为本发明实施例二的立体结构图；
图3b为本发明实施例二的侧视图；
图3c为本发明实施例二的俯视图；
图4a为本发明实施例三的立体结构图；
图4b为本发明实施例三的侧视图；
图4c为本发明实施例三的俯视图；
图5a为本发明实施例四的立体结构图；
图5b为本发明实施例四的侧视图；
图5c为本发明实施例四的俯视图；
图6a为本发明实施例五的立体结构图；
图6b为本发明实施例五的侧视图；
图6c为本发明实施例五的俯视图；
图7为本发明的原理示意图。
图中：100为底板，120为激光器，135为斜方棱镜，140为转向棱镜，142为偏振合束棱镜，154为快轴准直组件，158为慢轴准直组件，162为转向反射镜，166为转向直角楔形棱镜，167为公共反射镜，168为斜面反射棱镜，170为聚焦镜，174为光纤。120.1为第一激光器，120.2为第二激光器，120.3为第三激光器，154.1为第一快轴准直组件，154.2为第二快轴准直组件，154.3为第三快轴准直组件，130.1为第一光束，130.2为第二光束，130.3为第三光束，158.1为第一慢轴准直组件，158.2为第二慢轴准直组件，158.3第三慢轴准直组件，162.1为第一转向反射镜，162.2为第二转向反射镜，163.3为第三转向反射镜，130c为光束堆叠。
具体实施例
下面结合附图和实施例对本发明作进一步的详细描述。
如图2a-6c所示，本发明提供的一种半导体激光器，包括底板100及设置于底板100上的激光器120、快轴准直组件154、慢轴准直组件158、转向压缩光学系统、偏振合束棱镜142、聚焦镜170和光纤174，其中激光器120 为两排或一排，同排激光器120均位于一个平面上，每个激光器120沿光路方向均依次设有快轴准直组件154和慢轴准直组件158，同排激光器120对应一组转向压缩光学系统，所述转向压缩光学系统用于对由快轴准直组件154和慢轴准直组件158准直的光束进行转向和压缩。所述偏振合束棱镜142用于两排激光器时，将两组所述转向压缩光学系统完成转向和压缩的两束激光合束，所述聚焦镜170和光纤174依次设置于偏振合束棱镜142的后边，所述聚焦镜170将偏振合束棱镜142合束的激光耦合进光纤174。
所述转向压缩光学系统采用透射法或反射法。所述转向压缩光学系统采用透射法时，所述转向压缩光学系统包括透射楔形棱镜和多个转向反射镜162，多个转向反射镜162分别与同排中的各激光器120相对应，各激光器120发出的光束依次经过快轴准直组件154、慢轴准直组件158及转向反射镜162，多个转向反射镜162转向的光束均通过所述透射楔形棱镜进行压缩。所述透射楔形棱镜可采用直角楔形棱镜166。
所述转向压缩光学系统采用反射法时，所述转向压缩系统包括反射面具有倾斜角度的光学元件和多个转向反射镜162，多个转向反射镜162分别与同排中的各激光器120相对应，各激光器120发出的光束依次经过快轴准直组件154、慢轴准直组件158及转向反射镜162，多个转向反射镜162转向的光束均通过所述光学元件进行压缩。所述光学元件可采用直角斜面反射棱镜168。
两组所述转向压缩光学系统完成转向和压缩后的两束激光在到达偏振合束棱镜时位于同一高度。
所述底板100为阶梯结构，位于同排的各激光器120所对应的转向反射镜162均位于同一水平面上，且各转向反射镜162相对于底板100的倾斜角度相同，所述转向反射镜162相对于底板100的倾斜角度是1-10°。同排的激光器120所在平面高于其相对应的转向反射镜162所在平面，所述偏振合束棱镜142、聚焦镜170和光纤174位于同一平面内。
本发明的工作原理是：
如图7所示，本发明提供一种平面状紧凑结构，多路半导体激光器120被安装在同一水平面上。多路半导体激光器120发出的光束130沿x方向传播。光束130在快轴和慢轴方向被准直，被以特定角度倾斜的转向反射镜162 转向形成以设计的角度传播的光束堆叠(传播方向平行于yz平面)。再被一个特定角度倾斜的公共反射镜167转向，光束堆叠130C沿x方向传播，并被耦合透镜170聚焦耦合进光纤174。
以特定角度倾斜的公共反射镜167和转向反射镜162形成了对光束堆叠130在快轴方向有压缩效果的光学系统，这就允许在经过转向反射镜162转向时，各路光斑在快轴方向的间距可以适当放大，降低调节难度，提升产品的成品率。公共反射镜167也可以是斜面反射棱镜、透射楔形棱镜。此种结构结合偏振合束技术即可使激光器实现更高功率的输出。
激光束快轴方向间距d＝L*sinθ，L为相邻两路半导体激光器中心间距，θ为单路激光束相对底板平面倾斜角度。
直角楔形棱镜：n0sin(θ+α)＝n1sinα，α为直角楔形棱镜顶角，θ为单路激光束相对底板平面倾斜角度，n0为空气折射率，n1为直角楔形棱镜折射率。
实施例一
本发明涉及一种光纤耦合激光器，如图2a-2c所示包括底板100、两排激光器120、多个快轴准直组件154、多个慢轴准直组件158、多个转向反射镜162、转向直角楔形棱镜166、转向棱镜140、偏振合束棱镜142、聚焦镜170及耦合光纤174，转向压缩光学系统为转向反射镜162和转向直角楔形棱镜166的组合。多路激光器120输出的激光经过准直、合束之后耦合入光纤174输出。
在本实施例中，底板100为高导热率材料，如无氧铜。如图2a-2c所示，底板100上存在三个不同高度的平面，分别用于承载激光器120和光学元件。底板100上焊接两排激光器120的面为同一高度平面，保证了多路激光器120具备相同散热能力。两排激光器120处于底板100的同一边，所有激光器120处在同一水平面上，两排激光器120错开排布，两组LD(激光器)前腔面间距d2固定，同排中相邻两个LD中心间隔d1，管芯慢轴发散半角θ1，d1＞2*d2tgθ1，两排激光器120中，每路激光器经过与之对应的快轴准直组件154、慢轴准直组件158完成快慢轴方向的准直，再经过反射镜162和直角楔形棱镜166完成转向、压缩形成两束处于同一高度的平行激光。所有反射镜162向上倾斜角度相同，则在快轴方向各路激光之间形成等间距分布。相邻两束 激光的间距d应大于激光器在快轴方向经过快轴准直组件154之后的最大尺寸。d＝L*sinθ，L为相邻两路半导体激光器中心间距，θ为单路激光束相对底板平面倾斜角度。直角楔形棱镜：n0sin(θ+α)＝n1sinα直角楔形棱镜顶角α，θ为单路激光束相对底板平面倾斜角度，n0为空气折射率，n1为直角楔形棱镜折射率。
偏振合束棱镜142用于两束激光的合束，两束同一高度的激光，其中一束经过转向直角棱镜，通过偏振合束棱镜142上波片，改变偏振态，另一束激光不通过波片直接进入棱镜，两束激光经过偏振合束棱镜142完成合束，形成一束激光，经过聚焦镜170耦合入光纤174。
实施例二
本实施例的结构与实施例一基本相同，唯一不同的是两排LD相对交叉焊接到底板100的两侧，所有LD处在同一水平面，如图3a-3c所示。
实施例三
两排激光器120位于不同的平面内，每排管芯处于一个水平面，两排之间有特定的间隔d2。所述转向压缩光学系统为转向反射镜162和斜方棱镜135的组合，斜方棱镜135将较低一排激光器120发出的光升高，保证经过转向压缩之后的两束激光在到达偏振合束棱镜142时高度一致。如图4a-4c所示。
实施例四
两排激光器120位于同一平面内，所述转向压缩光学系统为转向反射镜162和斜面反射棱镜168的组合。如图5a-5c所示。
实施例五
激光器120也可单排排布，位于同一平面内，所述转向压缩光学系统为转向反射镜162和直角楔形棱镜166的组合，如图6a-6c所示。
本发明的上述方案的优点及有益效果是：
1.本发明由于多路激光器同处一个水平面，可以有效减薄底板厚度，提升激光器散热能力，从而提升激光器的效率和可靠性。
2.本发明由于多路激光器同处一个水平面安装，底板结构大为简化，加工难度降低，可以大大降低机械物料成本。
3.本发明由于多路激光器同处一个水平面安装，光束在快轴方向的台阶 为特定倾斜角度的反射镜制造出，可以通过调节反射镜角度快速实现光束在快轴方向间距的变化，适用不同特性的半导体激光器，提升了机械物料的通用性，大大降低管理和生产成本。
4.本发明转向压缩光学系统，此系统可分为透射法和反射法两种。透射法转向压缩系统为单路激光器转向反射镜和透射楔形棱镜如直角楔形棱镜组成；反射法转向压缩系统为单路激光器转向反射镜和反射面具有特定倾斜角度的光学元件如直角斜面反射棱镜组成。这就允许相邻两路激光在经过反射镜时可以有更大的间距，降低此步调节难度，提升产品成品率。

Claims (10)

  1. 一种半导体激光器，其特征在于，包括底板(100)及设置于底板(100)上的激光器(120)、快轴准直组件(154)、慢轴准直组件(158)、转向压缩光学系统、偏振合束棱镜(142)、聚焦镜(170)和光纤(174)，其中激光器(120)可为两排或单排，同排激光器(120)均位于一个平面上，每个激光器(120)沿光路方向均依次设有快轴准直组件(154)和慢轴准直组件(158)，同排激光器(120)对应一组转向压缩光学系统，所述转向压缩光学系统用于对由快轴准直组件(154)和慢轴准直组件(158)准直的光束进行转向和压缩，所述偏振合束棱镜(142)用于两排激光器时，将两组所述转向压缩光学系统完成转向和压缩的两束激光合束，所述聚焦镜(170)和光纤(174)依次设置于偏振合束棱镜(142)的后边，所述聚焦镜(170)将激光耦合进光纤(174)。
  2. 根据权利要求1所述的半导体激光器，其特征在于，所述转向压缩光学系统采用透射法或反射法。
  3. 根据权利要求2所述的半导体激光器，其特征在于，所述转向压缩光学系统采用透射法时，所述转向压缩光学系统包括透射楔形棱镜和多个转向反射镜(162)，多个转向反射镜(162)分别与同排中的各激光器(120)相对应，各激光器(120)发出的光束依次经过快轴准直组件(154)、慢轴准直组件(158)及转向反射镜(162)，多个转向反射镜(162)转向的光束均通过所述透射楔形棱镜进行压缩。
  4. 根据权利要求2所述的半导体激光器，其特征在于，所述转向压缩光学系统采用反射法时，所述转向压缩系统包括反射面具有倾斜角度的光学元件和多个转向反射镜(162)，多个转向反射镜(162)分别与同排中的各激光器(120)相对应，各激光器(120)发出的光束依次经过快轴准直组件(154)、慢轴准直组件(158)及转向反射镜(162)，多个转向反射镜(162)转向的光束均通过所述光学元件进行压缩。
  5. 根据权利要求3或4所述的半导体激光器，其特征在于，同排的各激光器(120)所对应的转向反射镜(162)均位于同一平面上。
  6. 根据权利要求5所述的半导体激光器，其特征在于，位于同一平面 上的各转向反射镜(162)相对于底板(100)的倾斜角度相同。
  7. 根据权利要求6所述的半导体激光器，其特征在于，位于同一平面上各转向反射镜(162)的倾斜角度为1-10°。
  8. 根据权利要求5所述的半导体激光器，其特征在于，同排的激光器(120)所在平面高于其相对应的转向反射镜(162)所在平面。
  9. 根据权利要求3或4所述的半导体激光器，其特征在于，所述底板(100)上布设两排激光器(120)时，两组所述转向压缩光学系统完成转向和压缩后的两束激光在到达偏振合束棱镜(142)时位于同一高度。
  10. 根据权利要求9所述的半导体激光器，其特征在于，两排激光器(120)可位于同一平面内，或两排激光器(120)可分处具有高度差的两个平面。
PCT/CN2016/073711 2016-01-11 2016-02-06 一种半导体激光器 WO2017121000A1 (zh)

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