WO2017105153A1 - Procédé de traitement thermique de surface utilisant un faisceau d'électrons - Google Patents

Procédé de traitement thermique de surface utilisant un faisceau d'électrons Download PDF

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Publication number
WO2017105153A1
WO2017105153A1 PCT/KR2016/014872 KR2016014872W WO2017105153A1 WO 2017105153 A1 WO2017105153 A1 WO 2017105153A1 KR 2016014872 W KR2016014872 W KR 2016014872W WO 2017105153 A1 WO2017105153 A1 WO 2017105153A1
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electron beam
base material
heat treatment
treatment method
processing region
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PCT/KR2016/014872
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English (en)
Korean (ko)
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강은구
최헌종
최영재
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한국생산기술연구원
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Publication of WO2017105153A1 publication Critical patent/WO2017105153A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Definitions

  • the present invention relates to a surface heat treatment method using an electron beam, by using a rapid fermentation and rapid solidification by the relative mass difference between the surface of the base material and the entire base material locally melted by the electron beam,
  • the present invention relates to a surface heat treatment method using an electron beam that transforms a surface into a stable gamma iron austenite at room temperature.
  • alloys such as carbon steel are metals which reinforce defects of pure iron and are excellent in corrosion resistance and abrasion resistance, and are widely used in various industrial fields such as metal molds, cutting tools, and precision parts.
  • the characteristics of the basic material itself are also important, but since they are used after making them suitable for use by fixing to improve the properties of the material such as heat treatment, the surface treatment method such as heat treatment is used. The mechanical properties that are dependent are considered more important.
  • austenite into ferrite, ie, martensite, which is composed of alpha phase solids and cementite.
  • cementite structure has the advantage of high surface strength and very good abrasion resistance, but it is very fragile to tensile stress because of its brittleness, and it is an unstable compound.
  • martensite also has the advantages of excellent surface strength and abrasion resistance, as in the cementite structure, but since the density is smaller than that of austenite, it expands during transformation from austenite to martensite to increase the volume, which leads to hardening deformation and quenching cracking. As a cause, there exists a problem that it is not suitable for the machining of precision components.
  • the problem to be solved by the present invention by using the rapid melting and rapid solidification by the relative mass difference between the surface of the base material locally melted by the electron beam and the entire base material, the surface of the base material consisting of ferrite based on ferrite at room temperature
  • the present invention provides a surface heat treatment method using an electron beam transformed into austenite of a stable gamma iron containing no carbide.
  • the surface heat treatment method using an electron beam according to the present invention for solving the above technical problem is a method of heat-treating the surface by irradiating an electron beam to the surface of the base material consisting of carbon steel that is ferrite at room temperature, local to the surface of the base material
  • a processing area setting step of setting a processing area and an output control step of controlling an output of the electron beam irradiated to the processing area, wherein the output control step comprises: the base material being melted by the electron beam in the processing area and deviating from the processing area according to the movement of the electron beam.
  • Part of the control of the output of the electron beam in accordance with the thermal conductivity of the base material so that it can be rapidly solidified by heat conduction due to the difference in relative mass with the entire base material and transformed into stable austenite at room temperature. can do.
  • the method may further include a movement speed control step of controlling the movement speed of the electron beam or the movement speed of the base material so that the electron beam may be moved along the surface of the base material according to a preset speed.
  • a plasma may be e-beam using the abnormal glow discharge (abnormal glow discharge).
  • the electron beam may be controlled within an output voltage of 30 kV to 40 kV.
  • the energy density of the electron beam applied to the base material in the processing region is determined in proportion to the energy value of the electron beam and inversely proportional to the mass of the base material as shown in Equation 1, and the energy value of the electron beam is It can be regarded as the product of the acceleration voltage of the electron beam, the current density of the electron beam, the residence time of the electron beam irradiated to the base material in the processing region, and the pulse value of the electron beam, the mass of the base material Can be considered as the product of the density of and the depth at which the electron beam penetrates into the substrate.
  • E d energy density of the electron beam
  • E energy value of the electron beam
  • m mass of the base material
  • U acceleration voltage of the electron beam
  • j current density of the electron beam
  • t beam within the processing region
  • D is the residence time of the electron beam irradiated to the base material
  • N pulse value of the electron beam
  • ⁇ density of the base material
  • h depth of penetration of the electron beam into the base material
  • the time (t beam ) of the electron beam is irradiated to the base material in the processing region is equal to [Equation 2], 2, the square of the depth that the electron beam is penetrated into the base material, the density of the base material, It may be regarded as a value obtained by dividing the product of the heat capacity of the base material by the thermal conductivity of the base material.
  • T beam dwell time of the electron beam irradiated to the base material in the processing region
  • h depth of penetration of the electron beam into the base material
  • ⁇ density of the base material
  • c heat capacity of the base material
  • ⁇ Thermal conductivity of the base material
  • the output control step or the movement speed control step the depth of the surface of the base material to be heat-treated by the electron beam in the processing area is made to 100 ⁇ m ⁇ 500 ⁇ m, which is to be controlled by the acceleration voltage of the electron beam Can be.
  • the surface of the base material that is rapidly solidified after being melted by the electron beam in the processing region does not contain carbide and is based on gamma iron having a face centered cubic structure. It may be composed of austenite stable at room temperature.
  • the base material contains chromium
  • iron (Fe) grains present on the surface of the base material are formed on the surface of the base material which is rapidly solidified after being melted by the electron beam in the processing region.
  • Chromium may agglomerate at grain boundaries between them, forming an interface.
  • the method may further include a pinning step of peening a surface of the base material which is rapidly solidified after being melted by the electron beam in the processing region.
  • the pinning step may move the chromium aggregated at the grain boundaries to form a grain matrix, and the grain hairs may be uniformly distributed and compressed to form a monolayer in an overlapped state.
  • the present invention may include a surface heat treatment apparatus using an electron beam provided to heat-treat the surface of carbon steel using the surface heat treatment method using the electron beam.
  • the surface heat treatment method using the electron beam according to the present invention having the above-described configuration has the following effects.
  • FIG. 1 is a view showing a surface heat treatment method using an electron beam according to an embodiment of the present invention.
  • 2 to 3 is a view schematically showing the heat treatment process through the processing area setting step, the output control step and the moving speed control step according to an embodiment of the present invention.
  • 4 to 5 are diagrams showing the results of analysis of the surface of the base material heat-treated by the surface heat treatment method using the electron beam according to the present invention using a transmission electron microscope.
  • 6 to 7 are the results of analyzing the comparative analysis of the surface of the heat-treated base material heat-treated by the prior art and the surface of the base material heat-treated by the surface heat treatment method using an electron beam according to the present invention using X-ray diffraction analysis method The figure shown.
  • FIG. 8 to 9 illustrate the surface structure of the base materials heat-treated at various output voltages using X-ray diffraction analysis when the output voltage of the electron beam is used as an independent variable in the surface heat treatment method using the electron beam according to the present invention.
  • FIG. 10 is a view showing an analysis result of analyzing the cross-section of the surface of the base material heat-treated by the surface heat treatment method using an electron beam according to the present invention using a transmission electron microscope.
  • FIG 11 is a view showing a result of measuring the hardness of the surface 12 of the base material heat-treated by the surface heat treatment method using an electron beam according to the present invention VLPAK-2000, a micro-Vickers hardness tester.
  • FIG. 12 is a view showing the results of analyzing the pinned base material through the pinning step according to an embodiment of the present invention using energy dispersive spectroscopy.
  • base material 12 surface of the heat-treated base material
  • Surface heat treatment method using an electron beam is a method of heat-treating the surface by irradiating an electron beam (electron beam) to the surface of the base material consisting of carbon steel (ferrite) at room temperature, Figure 1 As shown in the drawing, the processing area setting step S1, an output control step S2, a moving speed control step S3, and a pinning step S4 may be included.
  • the base box made of carbon steel may be a carbon steel having a carbon content of 0.5% by weight or more.
  • ferrite is a metallographic name of solid solution based on ferrite, and its appearance is similar to that of pure iron, but the strength is improved compared to pure iron when other elements are dissolved.
  • alpha iron refers to iron having a body centered cubic structure that is stable at 900 ° C. or lower.
  • the present invention is a ferritic carbon steel. Since it is a surface heat treatment method of, the detailed description thereof will be omitted to clarify the gist of the present invention.
  • the machining area setting step S1 may set the machining area 30 locally on the surface of the base material 10 as shown in FIG. 2.
  • the processing region 30 is a portion of the surface of the base material 10 to which the electron beam 20 is irradiated, and a portion of the surface of the base material 10 designated as the processing area 30 is generated by the energy transmitted from the electron beam 20. Heated to a set depth can be heat-treated through the process of melting and solidification.
  • the process area setting step S1 may be a control process for setting in advance according to the type and characteristics of the base material 10 to determine how much the surface and the depth of the base material 10 are to be heat treated.
  • the output control step S2 the output of the electron beam 20 irradiated to the processing area 30 set through the processing area setting step S1 described above may be controlled.
  • the output control step S2 is performed by melting the electron beam 20 in the machining region 30 and then moving away from the machining region 30 according to the movement of the electron beam 20.
  • the portion 12 may be rapidly solidified by heat conduction due to a relative mass difference with the entire mass of the base material 10, and may be transformed into stable austenite at room temperature, according to the thermal conductivity of the base material.
  • the output of the electron beam can be controlled.
  • the movement of the electron beam 20 as described above can be controlled through the movement speed control step (S3), in the movement speed control step (S3) the electron beam 20 of the base material 10 in accordance with a predetermined speed
  • the movement speed of the electron beam 20 or the movement speed of the base material 10 may be controlled to be moved along the surface.
  • the predetermined speed may be set in consideration of the thermal conductivity of the base material, a relative mass difference between a part of the base material 10 belonging to the processing region 30 and the entire base material 10.
  • austenite extends to iron and alloy steel having a face centered cubic structure, which has a higher atomic packing factor than the body centered cubic structure.
  • Austenitic with a face-centered cubic structure has a higher density of atoms compared to a co-spaced ferrite than a body-centered cubic structure, and therefore has higher hardness and harder to penetrate deeply into the inside.
  • the movement of atoms on the surface is also relatively smooth, which has the advantage of excellent ductility.
  • cementite structure has the advantage of high surface strength and very good abrasion resistance, but it is very brittle to tensile stress because of its brittleness, and it is an unstable compound.
  • martensite also has the advantages of excellent surface strength and abrasion resistance, as in the cementite structure, but since the density is smaller than that of austenite, it expands during transformation from austenite to martensite to increase the volume, which leads to hardening deformation and quenching cracking. As a cause, there exists a problem that it is not suitable for the machining of precision components.
  • the base material 10 when the portion 12 of the base metal melted by the electron beam 20 is removed from the processing region 30 according to the movement of the electron beam 20, the base material 10 ) It can be rapidly solidified and transformed into stable austenite at room temperature due to heat conduction due to relative mass difference with the whole.
  • the portion 12 of the base material transformed into austenite that is, the surface of the base material 10 through the heat treatment as described above, does not contain carbide and is based on gamma iron having a face-centered cubic structure.
  • a stable state can be maintained at room temperature, which can be confirmed through FIGS. 4 to 7.
  • FIGS. 4 to 5 are diagrams showing analysis results of analyzing the surface 12 of the base material heat-treated by the surface heat treatment method using the electron beam according to the present invention using a transmission electron microscope (TEM). .
  • TEM transmission electron microscope
  • the diffraction pattern as shown in FIG. 5 (corresponding to region A of FIG. 4) of the grain matrix of the heat-treated base material 12 has an austenite structure. You can check
  • Transmission electron microscope is a microscope that focuses an electron beam, irradiates a sample, and magnifies an electron beam that has passed through the sample using an electron lens to obtain an image.
  • the diffraction pattern of the electron beam that has passed through the sample can be observed.
  • the base material used in the diffraction pattern analysis using the transmission electron microscope was made of alloy tool steel, SKD11 (carbon content 1.40 ⁇ 1.60%, chromium content 11.0 ⁇ 13.0%).
  • 6 to 7 show an X-ray diffraction analysis and a surface of a base material heat-treated by the surface heat treatment method using an electron beam according to the present invention, and a heat-treated heat-treated base material according to the prior art.
  • X-ray diffraction analysis is an analysis method in which crystal structure or orientation is determined by using X-rays irradiated onto a sample scattered according to the type or structure of crystals and the intensity and diffraction angle of X-rays change.
  • the base material used in the comparative analysis was similarly used as SKD11, an alloy tool steel, and in the prior art, a heat treatment method using an electron beam in a vacuum state was used.
  • the surface of the heat-treated base material is composed of the gamma iron through the spectrum distribution state it can be seen that there is no carbide.
  • gamma iron is an allotrope of iron and solid solution employing carbon, and is iron between A3 transformation point (910 ° C) and A4 transformation point (1400 ° C), and the crystal structure has a face-centered cubic structure. Unlike one ferrite, it is nonmagnetic.
  • the electron beam is formed on the surface of the base material 10 containing ferrite and other elements other than carbon (for example, silicon and manganese in the case of carbon steel and chromium and nickel). After melting through (20), it can be rapidly solidified using the thermal conductivity due to the difference in relative mass with the entire base material (10).
  • ferrite and other elements other than carbon for example, silicon and manganese in the case of carbon steel and chromium and nickel.
  • the base metal 10 roughly stopped by the rapid solidification process completely stops changing from a center-centered cubic structure to a body-centered cubic structure at room temperature, and the base material 10, which is ferrite, is room temperature. It can be transformed into austenite of face-centered cubic structure maintaining stable state at.
  • the surface of the base material 10 subjected to the heat treatment according to the present embodiment not only has higher hardness and excellent internal resistance, but also does not have a ductile-brittle transition temperature (DBTT). Mechanical properties can be improved such as low temperature brittleness can be prevented.
  • DBTT ductile-brittle transition temperature
  • the strain hardening factor is significantly higher than the body centered cubic structure
  • the hardness and strength of the base material 10 may be increased during plastic working, and may also be used in post-treatment processes such as grinding, lapping and polishing. It can have very advantageous mechanical properties.
  • the electron beam 20 is irradiated in a vacuum state having a pressure value of 10-3 Torr to 10-5 Torr, and is a plasma electron beam using an abnormal glow discharge. Can be.
  • the heat treatment when the heat treatment is performed in a low vacuum state, since the evaporation phenomenon generated in the base material 10 melted by the electron beam 20 in the processing region 30 may be minimized, the evaporation of the base material 10 may occur. It is possible to prevent poor quality and increase of roughness of the heat-treated surface, and to obtain a high quality heat treatment result with a smooth surface state.
  • the output voltage of the electron beam 20 may be controlled within a range of 30 kV to 40 kV.
  • the surface of the base material 10 is auster based on stable gamma iron. It has a nit structure, and it can be seen that carbide does not exist in the spectrum.
  • the graph 8 to 9 illustrate the surface structure of the base materials 10 heat-treated at various output voltages when the output voltage of the electron beam 20 is an independent variable in the surface heat treatment method using the electron beam according to the present invention.
  • the graph shows the results of comparative analysis using X-ray diffraction analysis.
  • the output voltage of the electron beam 20 in the output control step (S2) according to the present embodiment can obtain the most preferable heat treatment result is controlled within the range of 30 kV to 40 kV.
  • the output voltage of the above-described electron beam is controlled in the range of 30 kV to 40 kV describes an example of general control items in the output control step (S2), the electron beam in the output control step (S2) according to the present embodiment
  • the output voltage of 20 is not necessarily limited to the above range, and may be variously applied according to the type and properties of the base material 10, the total mass, and the density.
  • the energy density of the electron beam 20 delivered to the base material 10 according to the output voltage may be variously applied according to the type and characteristics of the base material 10, the total mass, and the density.
  • the energy density of the electron beam 20 applied to the base material 10 in the machining region 30 is as shown in Equation 1. It may be determined in proportion to the energy value of the electron beam 20 and inversely proportional to the mass of the base material 10.
  • Ed energy density of the electron beam
  • E energy value of the electron beam
  • m mass of the base material
  • U acceleration voltage of the electron beam
  • j current density of the electron beam
  • tbeam within the processing region Retention time of the electron beam irradiated to the base material
  • N pulse value of the electron beam
  • ⁇ density of the base material
  • h depth of penetration of the electron beam into the base material
  • the energy value E of the electron beam 20 is irradiated to the base material 10 in the acceleration voltage U of the electron beam 20, the current density j of the electron beam 20, and the processing region 30. It can be regarded as the product of the residence time (tbeam) of the electron beam 20 and the pulse value (N) of the electron beam 20, the mass of the base material 10 is the density ( ⁇ ) of the base material 10 and the electron beam (20) can be regarded as the product of the depth (h) confronted with the base material (10).
  • the time (tbeam) before the electron beam 20 is irradiated to the base material 10 in the processing region 30 is 2 as shown in Equation 2 below, and the electron beam 20 is applied to the base material 10.
  • the product of the square of the depth h penetrated, the density ⁇ of the base material 10 and the heat capacity C of the base material 10 can be regarded as a value obtained by dividing the thermal conductivity of the base material by ⁇ .
  • the change in the internal energy E of the base material 10 that is, the change in speed at which the molten base material 10 is cooled and solidified, the pressure P, and the volume V of the base material 10 are Can act as a key variable.
  • the surface heat treatment process using the electron beam 20 according to the present embodiment is performed so that the non-diffusionless transformation process proceeds smoothly while the base material 10 is melted and solidified by the electron beam 20.
  • the process conditions can be set based on Equation 3.
  • the heat treatment process according to the present embodiment is performed in a vacuum state having a pressure value of 10-3 Torr to 10-5 Torr to reduce the enthalpy (H), when the energy of the electron beam is excessive, It can cause evaporation and cause problems such as dimensional change.
  • the present embodiment includes an additional cooling device so that the non-diffusion transformation proceeds smoothly while the base material 10 is melted by the electron beam 20 and solidified and solidified, or as described above, from 10-3 Torr to Pressure changes below atmospheric pressure can be added, like vacuum with a pressure value of 10-5 Torr.
  • the carbon content in the base material 10 may be increased to promote the non-diffusion transformation process.
  • the carbon content of 1.0 wt% or more may be increased since the surface 12 of the heat-treated base material maintains a stable austenite structure at room temperature. Carbide may not be precipitated even in the carbon steel having.
  • the hardness can be improved without the presence of carbide and the ductility of the austenite structure can be obtained.
  • the heat treatment of the base material 10 made of various materials is possible, but also the area and depth of the processing region 30 in which the base material 10 is melted by the electron beam 20 can be controlled.
  • the depth of the processing region 30 described above that is, the surface depth of the base material 10 heat-treated by the electron beam 20 in the processing region 30 is made to be 100 ⁇ m ⁇ 500 ⁇ m, which is described above
  • the acceleration voltage j of the electron beam 20 may be controlled.
  • the base material 10 contains chromium
  • it is rapidly melted by the electron beam 20 in the processing region 30.
  • chromium may be aggregated at grain boundaries between grains of iron (Fe) present on the surface 12 of the base material, thereby forming an interface.
  • FIG. 10 is a cross-sectional analysis of the surface 12 of the base material heat-treated by the surface heat treatment method using the electron beam according to the present invention using the Transmission Electron Microscope (TEM) described above.
  • Figure 1 shows the results of the analysis, and the base material 10 used at this time also used SKD11 as before.
  • chromium is introduced into the grain boundary, which is the boundary between the grains of iron, has a band shape, and aggregates and hardens with a small amount of oxygen (O) to form a partition.
  • the iron grains can be densely organized because there is no gap due to the empty space of the grain boundary, and oxidation is caused by the chromium agglomerated at the grain boundary even if oxidation is performed on the surface 12 of the base material. Because it does not progress to other grains of iron, it has excellent hardness and corrosion resistance.
  • the hardness and corrosion resistance as described above can be further improved through the pinning step (S4) according to the present embodiment, in the pinning step (S4) is melted by the electron beam (2) in the processing region 30 and then rapidly solidified
  • the surface 12 of the preformed base material may be peened with ultrasonic waves or with a mechanical device.
  • the strain hardening rate is significantly higher as described above, when the base material 10 is exposed to repetitive stress by post-treatment such as peening, its hardness and The strength can be increased dramatically.
  • the surface of the base material undergoing the peening step S4 according to the present embodiment has significantly increased the Vickers hardness and the Rockwell hardness.
  • Figure 11 is a view showing the results of measuring the hardness of the surface 12 of the base material heat-treated by the surface heat treatment method using an electron beam according to the present invention VLPAK-2000, a micro-Vickers hardness tester.
  • the grain hair is uniformly distributed and compressed to overlap each other To form a fault.
  • the surface of the base material undergoing the pinning step (S4) can be further strengthened mechanical properties, such as improved hardness and strength, as well as corrosion resistance.
  • Figure 12 is a view showing the results of analyzing the pinned base material through the peening step (S4) according to the present embodiment using an energy dispersive spectrometry (EDS), called energy dispersive spectroscopy
  • EDS energy dispersive spectrometry
  • a scanning electron microscope (SEM) refers to an analysis method in which an electron beam of a sample is injected to inject energy, and then the components of the sample are analyzed through a unique X-ray emitted by the material.
  • the present invention may further include a surface heat treatment apparatus using an electron beam provided to heat-treat the surface of carbon steel using the surface heat treatment method using the electron beam according to the above-described embodiment.

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Abstract

L'invention concerne un procédé de traitement thermique de surface utilisant un faisceau d'électrons, ledit procédé de traitement thermique d'une surface par émission d'un faisceau d'électrons vers la surface d'un matériau de base constitué d'acier au carbone, qui est de la ferrite, à température ambiante, comprenant : une étape d'établissement de zone de traitement consistant à établir une zone de traitement local sur la surface du matériau de base ; une étape de commande de sortie consistant à commander une sortie d'un faisceau d'électrons émis vers la zone de traitement, l'étape de commande de sortie commandant la sortie du faisceau d'électrons en fonction de la conductivité thermique du matériau de base de façon telle qu'une partie du matériau de base, que le faisceau d'électrons a fait fondre à l'intérieur de la zone de traitement et qui s'est écartée de la zone de traitement en fonction du déplacement du faisceau d'électrons, peut être transformée en austénite stable à température ambiante par coagulation rapide par conduction thermique en raison de la différence de masse relative avec tout le matériau de base. De plus, l'invention concerne un dispositif de traitement thermique de surface utilisant un faisceau d'électrons, qui est préparé de manière à traiter thermiquement la surface d'acier au carbone à l'aide du procédé de traitement thermique de surface utilisant le faisceau d'électrons selon la présente invention.
PCT/KR2016/014872 2015-12-18 2016-12-19 Procédé de traitement thermique de surface utilisant un faisceau d'électrons WO2017105153A1 (fr)

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CN114507841A (zh) * 2021-12-29 2022-05-17 马鞍山市鑫龙特钢有限公司 一种碳素钢制件多元合金共渗工艺

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CN107699662B (zh) * 2017-10-30 2019-03-29 宁波埃利特模具制造有限公司 一种提高压铸模具成型表面硬度的方法
CN114507841A (zh) * 2021-12-29 2022-05-17 马鞍山市鑫龙特钢有限公司 一种碳素钢制件多元合金共渗工艺

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