WO2017061350A1 - Vibration device and tactile presentation device - Google Patents

Vibration device and tactile presentation device Download PDF

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Publication number
WO2017061350A1
WO2017061350A1 PCT/JP2016/079213 JP2016079213W WO2017061350A1 WO 2017061350 A1 WO2017061350 A1 WO 2017061350A1 JP 2016079213 W JP2016079213 W JP 2016079213W WO 2017061350 A1 WO2017061350 A1 WO 2017061350A1
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WO
WIPO (PCT)
Prior art keywords
diaphragm
vibration device
film
vibration
spacer
Prior art date
Application number
PCT/JP2016/079213
Other languages
French (fr)
Japanese (ja)
Inventor
臼井健太朗
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株式会社村田製作所
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Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2017544474A priority Critical patent/JP6288387B2/en
Publication of WO2017061350A1 publication Critical patent/WO2017061350A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

Definitions

  • the present invention relates to a vibration device that vibrates a diaphragm with a stretchable film and a tactile sense presentation device that provides tactile feedback to a user who performs a touch operation.
  • vibration devices that vibrate a diaphragm by driving a film such as a piezoelectric film have been widely used.
  • the vibration device is used for, for example, a planar speaker or a haptic device (tactile sense presentation device).
  • Patent Document 1 discloses a vibration device configured as a flat speaker.
  • FIG. 11 is a side view of the vibration device 101 according to Patent Document 1.
  • the vibration device 101 includes an exciter film 102, a vibration plate 103, frame members 104 and 105, and a piezoelectric film 106.
  • the piezoelectric film 106 is affixed to the surface of the exciter film 102 that faces the diaphragm 103.
  • the frame members 104 and 105 are provided between both ends of the exciter film 102 and both ends of the diaphragm 103.
  • the diaphragm 103 is bent so that the central portion thereof is separated from the piezoelectric film 106 and the exciter film 102, and tension is applied to the piezoelectric film 106 and the exciter film 102 via the frame members 104 and 105.
  • this vibration device 101 when a driving voltage is applied to the piezoelectric film 106, the piezoelectric film 106 expands and contracts in the surface direction. Then, as the piezoelectric film 106 expands and contracts, the tension of the exciter film 102 varies and the diaphragm 103 vibrates.
  • the vibration device 101 shown in FIG. 11 can also be configured as a haptic device (tactile presentation device).
  • a haptic device tactile presentation device
  • a touch sensor (not shown) for detecting a touch operation by a user is provided on the vibration plate 103, and when the touch operation is detected by the touch sensor, the piezoelectric film 106 is Apply drive voltage.
  • the vibration device 101 in this manner, the vibration of the diaphragm 103 can be given to the user as tactile feedback.
  • the diaphragm 103 when the user strongly presses the diaphragm 103, the diaphragm 103 may be pushed in and the gap between the diaphragm 103 and the film may be crushed. Then, the diaphragm 103 becomes difficult to bend, and it becomes difficult to give tactile feedback to the user who presses the diaphragm 103.
  • the diaphragm 103 may have a warp that bends in the thickness direction due to distortion or the like generated during manufacturing. For this reason, vibration devices may cause variations in vibration characteristics and deterioration of vibration characteristics due to the warpage of the diaphragm, and it is necessary to select diaphragms with less warpage when manufacturing the vibration device. It was.
  • an object of the present invention is to provide a vibration device and a tactile presentation device capable of stably obtaining good vibration characteristics even when the vibration plate is warped and reliably providing tactile feedback to a user pressing the vibration plate. Is to provide.
  • the present invention relates to a diaphragm, a film that is connected to the diaphragm at a plurality of positions separated in the first surface direction of the diaphragm, and vibrates the diaphragm by expanding and contracting, the diaphragm and the film And a spacer that supports the diaphragm and the film so as to face a mounting surface through a gap portion between and a mounting surface.
  • the spacer includes a base surface that can contact the mounting surface, a first location that can contact the diaphragm, and a second surface direction that intersects the first surface direction of the diaphragm. And a second location that can contact the center side of the diaphragm rather than the first location.
  • the height of the first location from the base surface in a state where the spacer is not deformed is greater than the height of the second location from the base surface.
  • the spacer can prevent the gap portion between the diaphragm and the film from being crushed. Thereby, even in a state where the diaphragm is strongly pressed, the diaphragm can be reliably vibrated by expansion and contraction of the film.
  • the spacer is not provided, if the diaphragm is warped in the convex direction toward the film along the second surface direction (hereinafter, such a state of the diaphragm is referred to as reverse warping). .), The end portion of the vibration device in the second surface direction is lifted from the mounting surface of the vibration device. Then, the vibration characteristics of the vibration device are greatly deteriorated, and for example, the peak displacement of the diaphragm near the outer periphery in the second surface direction of the vibration device is reduced.
  • the spacer is provided, even if the diaphragm is warped in the second surface direction, the end portion of the vibration device in the second surface direction is away from the mounting surface of the vibration device. It becomes difficult to lift up. As a result, in the vibration device, even if the vibration plate has a reverse warp in the second surface direction, the vibration characteristics are hardly deteriorated.
  • the first portion and the second portion protrude toward the diaphragm.
  • the protruding length of the first portion is larger than the protruding length of the second portion.
  • the spacer includes a plurality of legs arranged along the second surface direction and protruding from the base surface at a position not overlapping the film. Thereby, it can prevent that a film contacts the attachment surface of a vibration apparatus, and a more favorable vibration characteristic is acquired.
  • the plurality of leg portions include a first leg portion facing the first location, and a second leg portion facing the second location, It is preferable that the protruding length of the leg portion is larger than the protruding length of the second leg portion. Also with this configuration, the height at which the diaphragm is supported by the spacer can be increased on the outer peripheral side in the second surface direction.
  • the tactile sense presentation device of the present invention includes the vibration device, a detection unit that is attached to the vibration plate and detects a touch operation, and a control unit that drives the film when the detection unit detects the touch operation. And.
  • the tactile sense presentation device having such a configuration, even if the diaphragm has a reverse warp along the second surface direction, the peak displacement of the diaphragm is not reduced near both ends in the second surface direction. Even if the vicinity of both ends in the second surface direction is touched, tactile feedback can be reliably presented to the operator.
  • the gap portion between the diaphragm and the film can be prevented from being crushed by the spacer. And even if there is a reverse warp along the second surface direction on the diaphragm, both ends of the vibration device are unlikely to lift from the mounting surface, so that deterioration and variations in vibration characteristics can be suppressed.
  • FIG. 6A and FIG. 6B are cross-sectional views illustrating a state in which the diaphragm in the tactile presentation device according to the first embodiment has a reverse warp.
  • FIG. 7C are diagrams showing the displacement distribution in the haptic presentation device according to the first embodiment. It is a disassembled perspective view of the tactile sense presentation device concerning a 2nd embodiment. It is sectional drawing of the tactile sense presentation apparatus which concerns on 2nd Embodiment.
  • FIG. 10A and FIG. 10B are cross-sectional views illustrating a state in which the diaphragm in the tactile presentation device according to the second embodiment has a reverse warp. It is a figure explaining the conventional structure of a vibration apparatus.
  • FIG. 1 is a perspective view of the tactile sense presentation device 10 and the vibration device 20 according to the first embodiment.
  • the tactile sense presentation device 10 constitutes a touch-sensitive keyboard.
  • the tactile sense presentation device of the present invention can constitute various devices that come into contact with the user, such as a touch panel and operation buttons, in addition to a keyboard.
  • the tactile sense presentation device 10 includes a control unit 11, a drive unit 12, a vibration device 20, and a plurality of touch sensors 31.
  • the vibration device 20 includes a vibration plate 21, a piezoelectric film 22, and two spacers 70.
  • the piezoelectric film 22 corresponds to an example of the film of the present invention.
  • the diaphragm 21 constitutes the top surface of the vibration device 20.
  • the diaphragm 21 is rectangular when viewed from the thickness direction of the vibration device 20, and has a short side along a first surface direction (hereinafter, also referred to as a film stretching direction) orthogonal to the thickness direction of the vibration device 20. It has a long side along a second surface direction (hereinafter also referred to as a film width direction) orthogonal to the thickness direction of the vibration device 20 and the first surface direction. That is, the diaphragm 21 has a shape extending in the first surface direction and the second surface direction orthogonal to each other.
  • the diaphragm 21 is curved convexly on the top surface side and concavely on the bottom surface side when viewed from the second surface direction (film width direction).
  • the diaphragm 21 is made of a material that can be elastically deformed in the thickness direction, such as PP (polypropylene) or PS (polystyrene).
  • the diaphragm 21 may be made of other materials such as a metal plate, PET, PMMA, polycarbonate (PC), a glass epoxy substrate, and glass.
  • the plurality of touch sensors 31 are arranged on the top surface of the vibration device 20 (the vibration plate 21) so as to correspond to the keyboard layout. Each touch sensor 31 outputs a detection signal to the control unit 11 when detecting a touch operation by the user. When a detection signal is input from any of the touch sensors 31, the control unit 11 outputs a control signal to the drive unit 12. When the control signal is input from the control unit 11, the drive unit 12 applies a drive voltage to the piezoelectric film 22 of the vibration device 20.
  • the piezoelectric film 22 is disposed on the bottom side of the diaphragm 21. Both ends of the piezoelectric film 22 in the first surface direction (film stretching direction) are connected to the diaphragm 21 as fixed ends 24. In other words, the piezoelectric film 22 is connected to the diaphragm 21 at a plurality of locations aligned in the first surface direction (film stretching direction) on the bottom surface side of the diaphragm 21.
  • the piezoelectric film 22 has a property of expanding and contracting at least in the first surface direction (film stretching direction) when a driving voltage is applied.
  • the piezoelectric film 22 is configured by providing electrodes (not shown) on the entire surfaces of both main surfaces of a film made of a piezoelectric material.
  • the piezoelectric material of the piezoelectric film 22 is, for example, a chiral polymer such as L-type polylactic acid (PLLA) or polyvinylidene fluoride (PVDF).
  • PLLA L-type polylactic acid
  • PVDF polyvinylidene fluoride
  • the piezoelectric film 22 is stretched on the bottom surface side of the diaphragm 21 in a state where tension is applied in the first surface direction (film stretching direction), whereby the diaphragm 21 is elastically deformed so as to bend in the thickness direction. ing.
  • the vibration plate 21 and the piezoelectric film 22 constitute a vibration device 20 configured in an arc shape when viewed from the second surface direction (film width direction).
  • the diaphragm 21 vibrates so that the amount of bending changes as the piezoelectric film 22 expands and contracts in the first surface direction (film stretching direction).
  • the two spacers 70 are made of, for example, metal, PET, polycarbonate (PC), ABS resin, FRP, or the like.
  • the two spacers 70 are arranged in the first surface direction (film stretching direction) and in the second surface direction (film width direction), respectively, in the gap portions where the diaphragm 21 and the piezoelectric film 22 face each other. Each extends. Both ends of each of the two spacers 70 in the second surface direction (film width direction) are configured to be able to contact an attachment surface (not shown) of the vibration device 20 at a position that does not overlap the piezoelectric film 22. For this reason, the two spacers 70 define the minimum gap between the diaphragm 21 and the piezoelectric film 22 and support the diaphragm 21 and the piezoelectric film 22 so as to face the mounting surface of the vibration device 20.
  • FIG. 2A is a side view of the vibration device 20 viewed from the second surface direction (film width direction).
  • a dotted line in FIG. 2A shows the vibration device 20 when the piezoelectric film 22 is contracted.
  • the spacer 70 is sandwiched between the lower surface of the diaphragm 21 and the upper surface of the piezoelectric film 22.
  • the thickness of the spacer 70 is larger than the distance between the diaphragm 21 and the piezoelectric film 22 when the spacer 70 is not provided.
  • the piezoelectric film 22 When AC voltage is applied to the piezoelectric film 22 to drive it, the piezoelectric film 22 repeatedly expands and contracts in the first surface direction (film stretching direction). Then, the tension T1 transmitted from the piezoelectric film 22 to the diaphragm 21 is periodically changed. Thereby, the component force T2 in the direction perpendicular to the surface of the fixed end 24 at the tension T1 also periodically changes. Then, as shown by a dotted line in FIG. 2A, the amount of bending of the diaphragm 21 changes periodically.
  • the piezoelectric film 22 when the piezoelectric film 22 is contracted, the central portion in the first surface direction (film stretching direction) of the diaphragm 21 is displaced upward, and when the piezoelectric film 22 is extended, the first surface direction (film) of the diaphragm 21 is displaced.
  • the central part in the tension direction is displaced downward. Accordingly, the spacer 70 is periodically displaced up and down, and the angle at which the piezoelectric film 22 is bent at the contact position with the spacer 70 also periodically changes.
  • FIG. 2B is a side view illustrating a vibration mode of the vibration device 20 in a state where a pressing force by a touch operation or the like is applied.
  • the spacer 70 prevents the gap between the diaphragm 21 and the piezoelectric film 22 from being crushed, and the piezoelectric film The state where 22 is stretched by both fixed ends 24 is maintained. Therefore, even when the diaphragm 21 is flat, the component force T2 of the tension T1 acts in a direction perpendicular to the surface of the fixed end 24.
  • the two spacers 70 are arranged in the arcuate gap portion formed by the vibration plate 21 and the piezoelectric film 22, this gap portion is There is no such thing as being completely crushed. Thereby, even if the diaphragm 21 is flattened by being pressed by the user, the diaphragm 21 can be reliably vibrated by the expansion and contraction of the piezoelectric film 22. Therefore, tactile feedback can be reliably given to the user who performs the touch operation.
  • the vibration plate 21 is thinly configured to suppress the rigidity of the vibration plate 21. Therefore, it is possible to increase the amount of bending generated in the diaphragm 21 as compared with the conventional case.
  • FIG. 3 is an exploded perspective view of the vibration device 20.
  • Each of the two spacers 70 includes a plurality of leg portions 71, a base portion 73, a plurality of first protrusions 74, and a plurality of second protrusions 75.
  • the base 73 is a prismatic part and extends between both ends of the spacer 70 in the second surface direction. That is, the base portion 73 extends in the second surface direction (film width direction) through a gap portion sandwiched between the piezoelectric film 22 and the diaphragm 21.
  • FIG. 4 is a plan view of the vibration device 20 viewed from the top surface side through the diaphragm 21.
  • 5 is a cross-sectional view of the vibration device 20 along the line VV shown in FIG.
  • the diaphragm 21 shown in FIG. 5 has no warp along the second surface direction (film width direction).
  • the plurality of leg portions 71 are provided so as to protrude from both ends of the second surface direction (film width direction) of the base portion 73 toward the bottom surface side in the thickness direction.
  • the interval between the plurality of leg portions 71 in the second surface direction (film width direction) is set to be larger than the dimension of the piezoelectric film 22 in the second surface direction (film width direction).
  • the piezoelectric film 22 is provided so that it may pass between the some leg parts 71 in a 2nd surface direction (film width direction). More specifically, the piezoelectric film 22 here is in contact with the bottom surface of the base portion 73 between the plurality of leg portions 71 in the second surface direction (film width direction).
  • the plurality of leg portions 71 are arranged along the second surface direction (film width direction) and protrude from the base portion 73 at a position that does not overlap the piezoelectric film 22.
  • the bottom surfaces of the plurality of leg portions 71 constitute a base surface B that can come into contact with the mounting surface of the vibration device 20.
  • the first protrusion 74 corresponds to the first portion described in the claims. Moreover, the 2nd protrusion 75 is corresponded to the 2nd location as described in a claim.
  • the first protrusions 74 are provided in the vicinity of both ends of the base 73 in the second surface direction (film width direction).
  • the second protrusion 75 is provided so as to face the center side of the diaphragm 21 with respect to the first protrusion 74 in the second surface direction (film width direction) of the base 73.
  • the first and second protrusions 74 and 75 protrude from the base 73 toward the top surface in the thickness direction, and are provided so as to be able to contact the diaphragm 21 at the respective top surfaces.
  • the first protrusion 74 here is configured such that the top surface always contacts the diaphragm 21.
  • the second protrusion 75 here is separated from the vibration plate 21 and the vibration plate 21 is strongly pressed, or when the vibration plate 21 is reversely warped.
  • the top surface is configured to contact the diaphragm 21.
  • the top surface of the first protrusion 74 is provided with a small-diameter portion 77 that further protrudes toward the top surface side.
  • the diaphragm 21 is provided with an opening 78 penetrating the diaphragm 21 at a position facing the small diameter portion 77 of the first protrusion 74.
  • the small-diameter portion 77 of the spacer 70 is fitted into the opening 78 of the diaphragm 21, whereby the spacer 70 is fixed to the diaphragm 21.
  • the spacer 70 may be fixed to the diaphragm 21 or the piezoelectric film 22 with an adhesive or the like.
  • the protrusion length from the base 73 of the 1st protrusion 74 is set so that it may become larger than the protrusion length from the base 73 of the 2nd protrusion 75.
  • the height of the first protrusion 74 from the base surface B is set to be larger than the height of the second protrusion 75 from the base surface B.
  • the spacer 70 configured as described above prevents the entire top surface of the spacer 70 from coming into contact with the diaphragm 21 even when the diaphragm 21 is strongly pressed and flattened by the second protrusion 75. be able to. That is, the area of the contact portion between the spacer 70 and the diaphragm 21 can be reduced. As a result, it is possible to suppress the vibration of the diaphragm 21 from being restrained by the contact portion with the spacer 70 and deteriorating.
  • the spacer 70 is fixed by fitting a small diameter portion 77 provided on the top surface of the first protrusion 74 and an opening 78 provided on the diaphragm 21 when viewed from the top surface side. 21 is fixed with a strong binding force.
  • the position where the small diameter portion 77 is provided is not limited to the top surface of the first protrusion 74, and may be provided on the top surface of the second protrusion 75.
  • the method for fixing the spacer 70 is not limited to the fitting between the small-diameter portion 77 and the opening 78, and is realized by bonding with an adhesive or the like, or clamping between the diaphragm 21 and the piezoelectric film 22. May be.
  • the thinly configured vibration plate 21 does not become completely flat, and is slightly in the first surface direction or the second surface direction. Warping occurs.
  • FIG. 6 is a diagram illustrating a case where the diaphragm 21 has a reverse warp along the second surface direction
  • FIG. 6A is a cross-sectional view of a vibration device 20A according to a comparative example
  • FIG. ) Is a cross-sectional view of the vibration device 20 according to the present embodiment.
  • the vibration device 20A according to the comparative example includes a spacer 70A as a configuration different from the vibration device 20 according to the present embodiment.
  • the spacer 70A has the same protrusion length from the base portion 75A of the first protrusion 74A and the second protrusion 75A. Therefore, in the vibration device 20 ⁇ / b> A, not only the first protrusion 74 ⁇ / b> A but also the second protrusion 75 ⁇ / b> A always has the top surface in contact with the diaphragm 21.
  • Both the vibration device 20 according to the present embodiment and the vibration device 20A according to the comparative example have a reverse warp in the vibration plate 21 along the second surface direction (film width direction). For this reason, like the vibration device 20A according to the comparative example, the spacer 70A having a uniform protrusion length between the first protrusion 74A and the second protrusion 75A has the same curvature as the curvature of the reverse warp of the diaphragm 21. A reverse warp occurs along the second surface direction.
  • the piezoelectric film 22 on the bottom surface side of the spacer 70 ⁇ / b> A contacts the mounting surface A of the vibration device 20 ⁇ / b> A, and the piezoelectric film 22 expands and contracts. 22 may slide with the mounting surface A, and the end of the spacer 70A may float from the mounting surface A.
  • the vibration device 20 since the protrusion length of the first protrusion 74 and the protrusion length of the second protrusion 75 are larger, the margin until the second protrusion 75 contacts the diaphragm 21. If the curvature of the reverse warp of the diaphragm 21 does not increase beyond a certain level, the second protrusion 75 does not contact the diaphragm 21 and the spacer 70 does not warp. Further, the curvature of the reverse warp of the diaphragm 21 is so large that the second protrusion 75 comes into contact with the diaphragm 21, and even if the spacer 70 also has a reverse warp, the curvature thereof is the reverse warp of the diaphragm 21.
  • the vibration device 20 even if the vibration plate 21 has a reverse warp along the second surface direction (film width direction), the piezoelectric film 22 contacts the mounting surface A of the vibration device 20. The end portion of the spacer 70 is unlikely to be lifted from the mounting surface A of the vibration device 20.
  • the vibration device 20 according to the present embodiment can easily obtain better vibration characteristics of the diaphragm 21 than the vibration device 20A according to the comparative example.
  • FIG. 7A shows the vibration device 20A according to the comparative example in a state where the vibration plate 21 has no (small) reverse warp along the second surface direction, and the end portion of the vibration plate 21 does not float from the mounting surface.
  • 5 is a diagram illustrating vibration characteristics of a diaphragm 21.
  • FIG. 7B shows the vibration characteristics of the diaphragm 21 in a state where the diaphragm 21 has a reverse warp along the second surface direction and the end portion of the diaphragm 21 is lifted in the vibration device 20A according to the comparative example. It is a figure illustrated.
  • FIG. 7C is a diagram illustrating the vibration characteristics of the diaphragm 21 in the vibration device 20 according to this embodiment when the diaphragm 21 has a reverse warp along the second surface direction.
  • a sinusoidal voltage having an amplitude of 100 V and a voltage frequency that matches the resonance frequency of the diaphragm 21 is applied to the piezoelectric film 22, and the displacement in the thickness direction (peak) of the diaphragm 21 in that state is applied. Value) was measured while sequentially moving the measurement points with a laser displacement meter (Keyence ⁇ -LK157).
  • the vibration device 20A according to the comparative example when the diaphragm 21 has no reverse warp along the second surface direction, the second surface direction of the diaphragm 21 (film) The amount of displacement in the thickness direction of the diaphragm 21 was uniformly distributed from the center portion in the width direction) to both ends, and the amount of displacement in the thickness direction did not decrease at both ends in the second surface direction (film width direction).
  • the vibration device 20 according to the present embodiment, as shown in FIG. 7C, even if the vibration plate 21 has a reverse warp along the second surface direction, The amount of displacement in the thickness direction of the diaphragm 21 is uniformly distributed from the center in the surface direction (film width direction) to both ends, and the amount of displacement in the thickness direction decreases at both ends in the second surface direction (film width direction). There was no.
  • the vibration device 20 of the present embodiment even if the vibration plate 21 has a reverse warp in the second surface direction (film width direction), the vibration characteristics of the vibration plate 21 are hardly deteriorated. Therefore, in the vibration device 20 of the present embodiment, the allowable range of warpage of the members of the diaphragm 21 is widened, and it is possible to save time and effort for selecting the vibration plate 21 with less warpage. Product characteristics of the vibration device 20 and the tactile sense presentation device 10 can be stabilized. In addition, when the diaphragm 21 is attached to the vibration device 20 so as to warp in the opposite direction to the reverse warp along the second surface direction (film width direction), or warps along the first surface direction.
  • FIG. 8 is an exploded perspective view of the tactile sense presentation device according to the second embodiment.
  • FIG. 9 is a cross-sectional view of the vibration device 20B.
  • the same reference numerals are given to the same components as those according to the first embodiment, and the description thereof is omitted.
  • the diaphragm 21 shown in this figure also has no warpage in the second surface direction.
  • the vibration device 20B includes a plurality of piezoelectric films 22B and a spacer 70B as a configuration different from that of the first embodiment.
  • the plurality of piezoelectric films 22B are arranged side by side in the second surface direction of the vibration device 20B.
  • the spacer 70B includes, in addition to the leg portions 71B projecting from both ends in the second surface direction of the base portion 73B to the bottom surface side in the thickness direction, between the plurality of piezoelectric films 22B in the second surface direction, A leg portion 72B protruding toward the bottom surface in the thickness direction is further provided. That is, the plurality of leg portions 71B and 72B are arranged along the second surface direction (film width direction) and protrude from the base portion 73B to the bottom surface side at a position not overlapping the plurality of piezoelectric films 22B. And the bottom face of each of the plurality of leg portions 71B, 72B constitutes a base face B that can contact the mounting face of the vibration device 20B. Therefore, the leg portion 71B corresponds to the first leg portion described in the claims, and the leg portion 72B corresponds to the second leg portion described in the claims.
  • the protruding length of the first leg 71B from the base 73B is larger than the protruding length of the second leg 72B from the base 73B.
  • the first protrusion 74B and the second protrusion 75B are set so that the protruding lengths from the respective base portions 73B are equal to each other.
  • the first protrusion 74B and the second protrusion 75B are always in contact with the diaphragm 21, but the height of the first protrusion 74B from the base surface B is It becomes larger than the height from the base surface B of 2 protrusion 75B.
  • FIG. 10 is a diagram illustrating a case where the diaphragm 21 has a reverse warp along the second surface direction.
  • FIG. 10A is a cross-sectional view of the vibration device 20C according to the comparative example, and FIG. ) Is a cross-sectional view of the vibration device 20B according to the present embodiment.
  • the vibration device 20C according to the comparative example includes a spacer 70C as a configuration different from the vibration device 20B according to the present embodiment.
  • the spacer 70C has the same protruding length from the base portion 75C of the first leg portion 71C and the second leg portion 72C.
  • Both the vibration device 20B shown in FIG. 10B and the vibration device 20C shown in FIG. 10A have a reverse warp in the diaphragm 21 along the second surface direction.
  • both the vibration device 20B and the vibration device 20C the top surfaces of the first protrusion and the second protrusion are in contact with the vibration plate 21.
  • both the vibration device 20 ⁇ / b> B according to the present embodiment and the vibration device 20 ⁇ / b> C according to the comparative example cause reverse warpage along the second surface direction with the same curvature as the curvature of the reverse warp of the diaphragm 21.
  • the base surface B of the second leg portion 72B does not contact the mounting surface A of the vibration device 20B unless the curvature of the reverse warp of the vibration plate 21 is large to a certain extent.
  • the first leg portion 71B does not float from the mounting surface A of the vibration device 20B.
  • the vibration device 20B according to the present embodiment can easily obtain better vibration characteristics of the diaphragm 21 than the vibration device 20C according to the comparative example. That is, also in the vibration device 20B of the present embodiment, in the spacer 70B, the height from the base surface B of the first protrusion 74B is larger than the height from the base surface B of the second protrusion 75B. Even if the diaphragm 21 has a reverse warp along the second surface direction, the vibration characteristics of the diaphragm 21 are unlikely to deteriorate. Therefore, the allowable range of the warp of the members of the diaphragm 21 as the diaphragm 21 is widened, and the product characteristics of the vibration device 20B can be easily stabilized.
  • the vibration device of the present invention is not limited to this, and may be, for example, another device such as a flat speaker. It may be used.
  • the film of the present invention is not limited to this, and for example, an electrostrictive film, an electret film, a piezoelectric ceramic, and piezoelectric particles are used. It can also be composed of a composite film dispersed in a polymer, an electroactive polymer film, or the like.
  • An electroactive polymer film is a film that generates stress by electrical drive, or a film that deforms and generates displacement by electrical drive.
  • the spacer of this invention is not restricted to this,
  • the spacer may have a flat top surface, or the top surface may be a gentle curved surface that is recessed near the center in the second surface direction.
  • only the first protrusion may be provided and the second protrusion may not be provided.
  • the spacer may be a spacer having a flat bottom surface without a leg portion, and the bottom surface may be a gently curved surface that is recessed near the center in the second surface direction.
  • the vibration device and the tactile sense presentation device can be configured to include first and second protrusions having different protrusion lengths and first and second legs having different protrusion lengths, respectively.

Abstract

A vibration device (20) is provided with a vibration plate (21), a piezoelectric film (22) which is connected to the vibration plate (21) at a plurality of locations aligned in a first surface direction and which expands and contracts thereby vibrating the vibration plate (21), and a spacer (70) that supports the vibration plate (21) so as to face an attachment surface (A). The spacer (70) includes a base surface (B) that can come into contact with the attachment surface (A), a first protrusion (74) that can come into contact with the vibration plate (21), and a second protrusion (75) that can come into contact closer with the center of the vibration plate (21) than the first protrusion (74) in a second surface direction. When there is no deformation in the spacer (70), the height of the first protrusion (74) from the base surface (B) is greater than the height of the second protrusion (75) from the base surface (B).

Description

振動装置および触覚提示装置Vibration device and tactile presentation device
　本発明は、伸縮するフィルムによって振動板を振動させる振動装置と、タッチ操作するユーザに触覚フィードバックを与える触覚提示装置と、に関する。 The present invention relates to a vibration device that vibrates a diaphragm with a stretchable film and a tactile sense presentation device that provides tactile feedback to a user who performs a touch operation.
　従来、圧電フィルム等のフィルムの駆動により振動板を振動させる振動装置が広く用いられている。振動装置は、例えば平面型スピーカやハプティクスデバイス（触覚提示装置）に利用される。例えば特許文献１には、平面型スピーカとして構成された振動装置が開示されている。 Conventionally, vibration devices that vibrate a diaphragm by driving a film such as a piezoelectric film have been widely used. The vibration device is used for, for example, a planar speaker or a haptic device (tactile sense presentation device). For example, Patent Document 1 discloses a vibration device configured as a flat speaker.
　図１１は、特許文献１に係る振動装置１０１の側面図である。振動装置１０１は、エキサイタフィルム１０２と、振動板１０３と、フレーム部材１０４，１０５と、圧電フィルム１０６とを備える。圧電フィルム１０６は、振動板１０３に対向するエキサイタフィルム１０２の表面に貼付されている。フレーム部材１０４，１０５は、エキサイタフィルム１０２の両端それぞれと振動板１０３の両端それぞれとの間に設けられている。振動板１０３は、中央部が圧電フィルム１０６およびエキサイタフィルム１０２から離れるように撓み、フレーム部材１０４，１０５を介して圧電フィルム１０６およびエキサイタフィルム１０２に張力をかけている。 FIG. 11 is a side view of the vibration device 101 according to Patent Document 1. FIG. The vibration device 101 includes an exciter film 102, a vibration plate 103, frame members 104 and 105, and a piezoelectric film 106. The piezoelectric film 106 is affixed to the surface of the exciter film 102 that faces the diaphragm 103. The frame members 104 and 105 are provided between both ends of the exciter film 102 and both ends of the diaphragm 103. The diaphragm 103 is bent so that the central portion thereof is separated from the piezoelectric film 106 and the exciter film 102, and tension is applied to the piezoelectric film 106 and the exciter film 102 via the frame members 104 and 105.
　この振動装置１０１では、圧電フィルム１０６に駆動電圧を印加すると、圧電フィルム１０６が面方向に伸縮する。すると、圧電フィルム１０６の伸縮に伴い、エキサイタフィルム１０２の張力が変動して振動板１０３が振動する。 In this vibration device 101, when a driving voltage is applied to the piezoelectric film 106, the piezoelectric film 106 expands and contracts in the surface direction. Then, as the piezoelectric film 106 expands and contracts, the tension of the exciter film 102 varies and the diaphragm 103 vibrates.
国際公開２０１２／１５７６９１号パンフレットInternational Publication No. 2012/157691 Pamphlet
　図１１に示した振動装置１０１は、ハプティクスデバイス（触覚提示装置）として構成することも可能である。例えば、振動装置１０１を触覚提示装置とする場合には、ユーザによるタッチ操作を検出するタッチセンサ（不図示）を振動板１０３に設け、タッチセンサでタッチ操作を検出したときに、圧電フィルム１０６に駆動電圧を印加する。このように振動装置１０１を構成することで、ユーザに振動板１０３の振動を触覚フィードバックとして与えることができる。 The vibration device 101 shown in FIG. 11 can also be configured as a haptic device (tactile presentation device). For example, when the vibration device 101 is a tactile presentation device, a touch sensor (not shown) for detecting a touch operation by a user is provided on the vibration plate 103, and when the touch operation is detected by the touch sensor, the piezoelectric film 106 is Apply drive voltage. By configuring the vibration device 101 in this manner, the vibration of the diaphragm 103 can be given to the user as tactile feedback.
　ただし、ユーザが振動板１０３を強く押圧する場合には、振動板１０３が押し込まれて振動板１０３とフィルムとの間の隙間が潰れることがある。すると、振動板１０３が撓み難くなり、振動板１０３を押圧するユーザに触覚フィードバックを与えることが難しくなってしまう。 However, when the user strongly presses the diaphragm 103, the diaphragm 103 may be pushed in and the gap between the diaphragm 103 and the film may be crushed. Then, the diaphragm 103 becomes difficult to bend, and it becomes difficult to give tactile feedback to the user who presses the diaphragm 103.
　また、振動板１０３に薄手の部材を用いる場合、製造時に生じる歪みなどにより、振動板１０３が厚み方向に曲がるような反りを有することがある。このため、振動装置では振動板の反りに起因する振動特性のばらつきや振動特性の悪化が引き起こされることがあり、振動装置を製造する際には、反りの少ない振動板を選別する必要が有った。 In addition, when a thin member is used for the diaphragm 103, the diaphragm 103 may have a warp that bends in the thickness direction due to distortion or the like generated during manufacturing. For this reason, vibration devices may cause variations in vibration characteristics and deterioration of vibration characteristics due to the warpage of the diaphragm, and it is necessary to select diaphragms with less warpage when manufacturing the vibration device. It was.
　そこで本発明の目的は、振動板に反りが有っても良好な振動特性が安定して得られ、振動板を押圧するユーザに確実に触覚フィードバックを与えることができる、振動装置および触覚提示装置を提供することにある。 SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a vibration device and a tactile presentation device capable of stably obtaining good vibration characteristics even when the vibration plate is warped and reliably providing tactile feedback to a user pressing the vibration plate. Is to provide.
　この発明は、振動板と、前記振動板の第１の面方向に離れた複数の位置で前記振動板に連結され、伸縮することにより前記振動板を振動させるフィルムと、前記振動板と前記フィルムとの間の隙間部分を通り、取付面と対向するように前記振動板および前記フィルムを支持するスペーサと、を備える振動装置である。そして、スペーサは、前記取付面に接触可能な基底面と、前記振動板に接触可能な第１の箇所と、前記振動板の第１の面方向に交差する第２の面方向にて前記第１の箇所よりも前記振動板の中心側に接触可能な第２の箇所と、を有する。また、前記スペーサに変形が無い状態での、前記第１の箇所の前記基底面からの高さは、前記第２の箇所の前記基底面からの高さよりも大きい。 The present invention relates to a diaphragm, a film that is connected to the diaphragm at a plurality of positions separated in the first surface direction of the diaphragm, and vibrates the diaphragm by expanding and contracting, the diaphragm and the film And a spacer that supports the diaphragm and the film so as to face a mounting surface through a gap portion between and a mounting surface. The spacer includes a base surface that can contact the mounting surface, a first location that can contact the diaphragm, and a second surface direction that intersects the first surface direction of the diaphragm. And a second location that can contact the center side of the diaphragm rather than the first location. In addition, the height of the first location from the base surface in a state where the spacer is not deformed is greater than the height of the second location from the base surface.
　この発明の振動装置の構成では、振動板とフィルムとの間の隙間部分が潰れることをスペーサにより防ぐことができる。これにより、振動板が強く押圧されるような状態でも、フィルムの伸縮により振動板を確実に振動させることができる。 In the configuration of the vibration device of the present invention, the spacer can prevent the gap portion between the diaphragm and the film from being crushed. Thereby, even in a state where the diaphragm is strongly pressed, the diaphragm can be reliably vibrated by expansion and contraction of the film.
　また、仮に上記のスペーサが設けられていなければ、振動板に第２の面方向に沿ってフィルム側に凸となる反りが生じていると（以下、このような振動板の状態を逆反りという。）、振動装置の第２の面方向の端部が、振動装置の取付面から浮き上がってしまう。すると、振動装置の振動特性が大きく悪化し、例えば振動装置の第２の面方向における外周付近での振動板のピーク変位が低減してしまう。 Further, if the spacer is not provided, if the diaphragm is warped in the convex direction toward the film along the second surface direction (hereinafter, such a state of the diaphragm is referred to as reverse warping). .), The end portion of the vibration device in the second surface direction is lifted from the mounting surface of the vibration device. Then, the vibration characteristics of the vibration device are greatly deteriorated, and for example, the peak displacement of the diaphragm near the outer periphery in the second surface direction of the vibration device is reduced.
　しかしながら、上記のスペーサが設けられていれば、振動板が第２の面方向に沿って逆反りしたものであっても、振動装置の第２の面方向の端部が振動装置の取付面から浮き上がりにくくなる。このことによって、振動装置において、振動板に第２の面方向に逆反りがあっても振動特性が大きく悪化しにくくなる。 However, if the spacer is provided, even if the diaphragm is warped in the second surface direction, the end portion of the vibration device in the second surface direction is away from the mounting surface of the vibration device. It becomes difficult to lift up. As a result, in the vibration device, even if the vibration plate has a reverse warp in the second surface direction, the vibration characteristics are hardly deteriorated.
　この発明の振動装置では、前記第１の箇所および前記第２の箇所は、前記振動板側に突出していることが好ましい。この構成により、振動板にスペーサが接触する面積を低減することができ、振動板の振動がスペーサに阻害されにくくなる。 In the vibration device according to the present invention, it is preferable that the first portion and the second portion protrude toward the diaphragm. With this configuration, the area where the spacer contacts the diaphragm can be reduced, and the vibration of the diaphragm is not easily inhibited by the spacer.
　この発明の振動装置では、前記第１の箇所の突出長は、前記第２の箇所の突出長よりも大きいことが好ましい。この構成によって、スペーサにより振動板が支持される高さを、第２の面方向における外周側でより大きくすることができる。 In the vibration device of the present invention, it is preferable that the protruding length of the first portion is larger than the protruding length of the second portion. With this configuration, the height at which the diaphragm is supported by the spacer can be increased on the outer peripheral side in the second surface direction.
　この発明の振動装置では、前記スペーサは、前記第２の面方向に沿って並び、前記フィルムに重ならない位置で前記基底面に突出している複数の脚部を備えることが好ましい。これにより、振動装置の取付面にフィルムが接触してしまうようなことを防ぐことができ、より良好な振動特性が得られる。 In the vibration device according to the aspect of the invention, it is preferable that the spacer includes a plurality of legs arranged along the second surface direction and protruding from the base surface at a position not overlapping the film. Thereby, it can prevent that a film contacts the attachment surface of a vibration apparatus, and a more favorable vibration characteristic is acquired.
　この発明の振動装置では、前記複数の脚部は、前記第１の箇所に対向する第１の脚部と、前記第２の箇所に対向する第２の脚部と、を含み、前記第１の脚部の突出長は、前記第２の脚部の突出長よりも大きいことが好ましい。この構成によっても、スペーサにより振動板が支持される高さを、第２の面方向における外周側で高くすることができる。 In the vibration device according to the aspect of the invention, the plurality of leg portions include a first leg portion facing the first location, and a second leg portion facing the second location, It is preferable that the protruding length of the leg portion is larger than the protruding length of the second leg portion. Also with this configuration, the height at which the diaphragm is supported by the spacer can be increased on the outer peripheral side in the second surface direction.
　また、この発明の触覚提示装置は、前記振動装置と、前記振動板に装着した、タッチ操作を検出する検出部と、前記検出部がタッチ操作を検出したときに、前記フィルムを駆動する制御部と、を備えている。 In addition, the tactile sense presentation device of the present invention includes the vibration device, a detection unit that is attached to the vibration plate and detects a touch operation, and a control unit that drives the film when the detection unit detects the touch operation. And.
　このような構成の触覚提示装置では、振動板に第２の面方向に沿って逆反りがあっても、第２の面方向の両端付近で振動板のピーク変位が低減することがないので、第２の面方向の両端付近がタッチ操作されても、操作者に確実に触覚フィードバックを提示することができる。 In the tactile sense presentation device having such a configuration, even if the diaphragm has a reverse warp along the second surface direction, the peak displacement of the diaphragm is not reduced near both ends in the second surface direction. Even if the vicinity of both ends in the second surface direction is touched, tactile feedback can be reliably presented to the operator.
　本発明によれば、振動装置や触覚提示装置において、振動板とフィルムとの間の隙間部分が潰れることをスペーサにより防ぐことができる。そして、振動板に第２の面方向に沿う逆反りがあっても、取付面から振動装置の両端が浮き上がりにくくなるので、振動特性の悪化やばらつきを抑制することができる。 According to the present invention, in the vibration device or the tactile sense presentation device, the gap portion between the diaphragm and the film can be prevented from being crushed by the spacer. And even if there is a reverse warp along the second surface direction on the diaphragm, both ends of the vibration device are unlikely to lift from the mounting surface, so that deterioration and variations in vibration characteristics can be suppressed.
第１の実施形態に係る触覚提示装置の斜視図である。It is a perspective view of the tactile sense presentation device concerning a 1st embodiment. 図２（Ａ）および図２（Ｂ）は、第１の実施形態に係る触覚提示装置の動作状態を示す側面図である。2A and 2B are side views showing the operating state of the tactile sense presentation device according to the first embodiment. 第１の実施形態に係る触覚提示装置の分解斜視図である。It is a disassembled perspective view of the tactile sense presentation device concerning a 1st embodiment. 第１の実施形態に係る触覚提示装置の振動板を除いた平面図である。It is a top view except the diaphragm of the tactile sense presentation device concerning a 1st embodiment. 第１の実施形態に係る触覚提示装置の断面図である。It is sectional drawing of the tactile sense presentation apparatus which concerns on 1st Embodiment. 図６（Ａ）および図６（Ｂ）は、第１の実施形態に係る触覚提示装置における振動板に逆反りがある状態を示す断面図である。FIG. 6A and FIG. 6B are cross-sectional views illustrating a state in which the diaphragm in the tactile presentation device according to the first embodiment has a reverse warp. 図７（Ａ）、図７（Ｂ）、および図７（Ｃ）は、第１の実施形態に係る触覚提示装置における変位分布を示す図である。FIG. 7A, FIG. 7B, and FIG. 7C are diagrams showing the displacement distribution in the haptic presentation device according to the first embodiment. 第２の実施形態に係る触覚提示装置の分解斜視図である。It is a disassembled perspective view of the tactile sense presentation device concerning a 2nd embodiment. 第２の実施形態に係る触覚提示装置の断面図である。It is sectional drawing of the tactile sense presentation apparatus which concerns on 2nd Embodiment. 図１０（Ａ）および図１０（Ｂ）は、第２の実施形態に係る触覚提示装置における振動板に逆反りがある状態を示す断面図である。FIG. 10A and FIG. 10B are cross-sectional views illustrating a state in which the diaphragm in the tactile presentation device according to the second embodiment has a reverse warp. 振動装置の従来構造を説明する図である。It is a figure explaining the conventional structure of a vibration apparatus.
　以下、本発明の触覚提示装置及び振動装置について、第１の実施形態に基づいて説明する。図１は、第１の実施形態に係る触覚提示装置１０及び振動装置２０の斜視図である。 Hereinafter, the tactile sense presentation device and the vibration device of the present invention will be described based on the first embodiment. FIG. 1 is a perspective view of the tactile sense presentation device 10 and the vibration device 20 according to the first embodiment.
　本実施形態において、触覚提示装置１０はタッチセンサ式のキーボードを構成している。なお、本発明の触覚提示装置は、キーボードの他、タッチパネルや操作ボタン等、ユーザとの接触を伴う各種の装置を構成することもできる。 In the present embodiment, the tactile sense presentation device 10 constitutes a touch-sensitive keyboard. In addition, the tactile sense presentation device of the present invention can constitute various devices that come into contact with the user, such as a touch panel and operation buttons, in addition to a keyboard.
　触覚提示装置１０は、制御部１１、駆動部１２、振動装置２０、および、複数のタッチセンサ３１を備えている。振動装置２０は、振動板２１と圧電フィルム２２と２つのスペーサ７０とを備えている。なお、圧電フィルム２２は本発明のフィルムの一例に相当するものである。 The tactile sense presentation device 10 includes a control unit 11, a drive unit 12, a vibration device 20, and a plurality of touch sensors 31. The vibration device 20 includes a vibration plate 21, a piezoelectric film 22, and two spacers 70. The piezoelectric film 22 corresponds to an example of the film of the present invention.
　振動板２１は、振動装置２０の天面を構成している。振動板２１は、振動装置２０の厚み方向から視て矩形状であり、振動装置２０の厚み方向に直交する第１の面方向（以下、フィルム張架方向とも言う。）に沿う短辺と、振動装置２０の厚み方向および第１の面方向に直交する第２の面方向（以下、フィルム幅方向とも言う。）に沿う長辺を有している。すなわち、振動板２１は、互いに直交する第１の面方向および第２の面方向に延在する形状である。また、振動板２１は、第２の面方向（フィルム幅方向）から視て、天面側に凸、底面側に凹に湾曲している。また、振動板２１は、厚み方向に弾性変形可能な材料、例えばＰＰ（ポリプロピレン）またはＰＳ（ポリスチレン）で構成されている。なお、振動板２１は、金属板、ＰＥＴ、ＰＭＭＡ、ポリカーボネイト（ＰＣ）、ガラスエポキシ基板、ガラス等の他の材料で構成されていてもよい。 The diaphragm 21 constitutes the top surface of the vibration device 20. The diaphragm 21 is rectangular when viewed from the thickness direction of the vibration device 20, and has a short side along a first surface direction (hereinafter, also referred to as a film stretching direction) orthogonal to the thickness direction of the vibration device 20. It has a long side along a second surface direction (hereinafter also referred to as a film width direction) orthogonal to the thickness direction of the vibration device 20 and the first surface direction. That is, the diaphragm 21 has a shape extending in the first surface direction and the second surface direction orthogonal to each other. Further, the diaphragm 21 is curved convexly on the top surface side and concavely on the bottom surface side when viewed from the second surface direction (film width direction). The diaphragm 21 is made of a material that can be elastically deformed in the thickness direction, such as PP (polypropylene) or PS (polystyrene). The diaphragm 21 may be made of other materials such as a metal plate, PET, PMMA, polycarbonate (PC), a glass epoxy substrate, and glass.
　複数のタッチセンサ３１は、振動装置２０（振動板２１）の天面に、キーボードのキー配列に対応するように配置されている。各タッチセンサ３１は、ユーザによるタッチ操作を検出すると、検出信号を制御部１１に出力する。制御部１１は、いずれかのタッチセンサ３１から検出信号が入力されると、駆動部１２に制御信号を出力する。駆動部１２は、制御部１１から制御信号が入力されると、振動装置２０の圧電フィルム２２に駆動電圧を印加する。 The plurality of touch sensors 31 are arranged on the top surface of the vibration device 20 (the vibration plate 21) so as to correspond to the keyboard layout. Each touch sensor 31 outputs a detection signal to the control unit 11 when detecting a touch operation by the user. When a detection signal is input from any of the touch sensors 31, the control unit 11 outputs a control signal to the drive unit 12. When the control signal is input from the control unit 11, the drive unit 12 applies a drive voltage to the piezoelectric film 22 of the vibration device 20.
　圧電フィルム２２は、振動板２１の底面側に配置されている。圧電フィルム２２の第１の面方向（フィルム張架方向）の両端は、固定端２４として振動板２１に連結されている。すなわち、圧電フィルム２２は、振動板２１の底面側で、第１の面方向（フィルム張架方向）に並ぶ複数の箇所で振動板２１に連結されている。圧電フィルム２２は、駆動電圧が印加されると、少なくとも第１の面方向（フィルム張架方向）に伸縮する性質を有している。 The piezoelectric film 22 is disposed on the bottom side of the diaphragm 21. Both ends of the piezoelectric film 22 in the first surface direction (film stretching direction) are connected to the diaphragm 21 as fixed ends 24. In other words, the piezoelectric film 22 is connected to the diaphragm 21 at a plurality of locations aligned in the first surface direction (film stretching direction) on the bottom surface side of the diaphragm 21. The piezoelectric film 22 has a property of expanding and contracting at least in the first surface direction (film stretching direction) when a driving voltage is applied.
　より具体的には、圧電フィルム２２は、ここでは圧電材料からなるフィルムの両主面それぞれの全面に図示しない電極を設けて構成している。圧電フィルム２２の圧電材料は、例えばキラル高分子であるＬ型ポリ乳酸（ＰＬＬＡ）や、ポリフッ化ビニリデン（ＰＶＤＦ）である。圧電フィルム２２がＰＬＬＡで構成される場合、図４中に白抜きの矢印で示す方向に延伸処理が施されたフィルムから、主延伸方向に対して略４５°の方向を第１の面方向（フィルム張架方向）として圧電フィルム２２を切り出すことで、圧電フィルム２２に第１の面方向（フィルム張架方向）に伸び縮みするような圧電性を持たせることができる。 More specifically, the piezoelectric film 22 is configured by providing electrodes (not shown) on the entire surfaces of both main surfaces of a film made of a piezoelectric material. The piezoelectric material of the piezoelectric film 22 is, for example, a chiral polymer such as L-type polylactic acid (PLLA) or polyvinylidene fluoride (PVDF). When the piezoelectric film 22 is made of PLLA, a direction approximately 45 ° with respect to the main stretching direction from the film that has been stretched in the direction indicated by the white arrow in FIG. By cutting out the piezoelectric film 22 as the film stretching direction), the piezoelectric film 22 can be provided with piezoelectricity that expands and contracts in the first surface direction (film stretching direction).
　圧電フィルム２２は、第１の面方向（フィルム張架方向）に張力を架けた状態で振動板２１の底面側に張られており、これにより、振動板２１は厚み方向に撓むように弾性変形している。このようにして、振動板２１と圧電フィルム２２は、第２の面方向（フィルム幅方向）から視て弓状に構成された振動装置２０を構成している。この振動装置２０では、圧電フィルム２２が第１の面方向（フィルム張架方向）に伸縮することにより、撓み量が変化するように振動板２１は振動する。 The piezoelectric film 22 is stretched on the bottom surface side of the diaphragm 21 in a state where tension is applied in the first surface direction (film stretching direction), whereby the diaphragm 21 is elastically deformed so as to bend in the thickness direction. ing. In this way, the vibration plate 21 and the piezoelectric film 22 constitute a vibration device 20 configured in an arc shape when viewed from the second surface direction (film width direction). In the vibration device 20, the diaphragm 21 vibrates so that the amount of bending changes as the piezoelectric film 22 expands and contracts in the first surface direction (film stretching direction).
　２つのスペーサ７０は、例えば、金属、ＰＥＴ、ポリカーボネイト（ＰＣ）、ＡＢＳ樹脂、ＦＲＰなどからなる。２つのスペーサ７０は、それぞれ、振動板２１と圧電フィルム２２とが対向する隙間部分で、第１の面方向（フィルム張架方向）に互いに並べられ、第２の面方向（フィルム幅方向）にそれぞれ延びている。２つのスペーサ７０それぞれの第２の面方向（フィルム幅方向）の両端は、圧電フィルム２２と重ならない位置で振動装置２０の取付面（不図示）に接触可能に構成されている。このため、２つのスペーサ７０は、振動板２１と圧電フィルム２２との隙間部分の最小間隔を規定するとともに、振動装置２０の取付面に対向するように振動板２１および圧電フィルム２２を支持する。 The two spacers 70 are made of, for example, metal, PET, polycarbonate (PC), ABS resin, FRP, or the like. The two spacers 70 are arranged in the first surface direction (film stretching direction) and in the second surface direction (film width direction), respectively, in the gap portions where the diaphragm 21 and the piezoelectric film 22 face each other. Each extends. Both ends of each of the two spacers 70 in the second surface direction (film width direction) are configured to be able to contact an attachment surface (not shown) of the vibration device 20 at a position that does not overlap the piezoelectric film 22. For this reason, the two spacers 70 define the minimum gap between the diaphragm 21 and the piezoelectric film 22 and support the diaphragm 21 and the piezoelectric film 22 so as to face the mounting surface of the vibration device 20.
　図２（Ａ）は、振動装置２０の第２の面方向（フィルム幅方向）から視た側面図である。図２（Ａ）の点線は、圧電フィルム２２が収縮している時の振動装置２０を示している。 FIG. 2A is a side view of the vibration device 20 viewed from the second surface direction (film width direction). A dotted line in FIG. 2A shows the vibration device 20 when the piezoelectric film 22 is contracted.
　スペーサ７０は、振動板２１の下面と圧電フィルム２２の上面との間に挟まれている。ここでは、スペーサ７０の厚みは、スペーサ７０を設けない場合の振動板２１と圧電フィルム２２との間隔よりも大きくしている。これにより、圧電フィルム２２が駆動していないとき、スペーサ７０が圧電フィルム２２を厚み方向の下側に押し込み、圧電フィルム２２はスペーサ７０との接触位置で下側に凸に折れ曲がっている。 The spacer 70 is sandwiched between the lower surface of the diaphragm 21 and the upper surface of the piezoelectric film 22. Here, the thickness of the spacer 70 is larger than the distance between the diaphragm 21 and the piezoelectric film 22 when the spacer 70 is not provided. As a result, when the piezoelectric film 22 is not driven, the spacer 70 pushes the piezoelectric film 22 downward in the thickness direction, and the piezoelectric film 22 is bent downward at the contact position with the spacer 70.
　圧電フィルム２２に交流電圧が印加されて駆動すると、圧電フィルム２２には第１の面方向（フィルム張架方向）の伸縮が繰り返し生じる。すると、圧電フィルム２２から振動板２１に伝わる張力Ｔ１が周期的に変化する。これにより、張力Ｔ１における、固定端２４の表面に垂直な方向の分力Ｔ２も周期的に変化する。すると、図２（Ａ）中に点線で示すように、振動板２１の撓み量が周期的に変化する。 When AC voltage is applied to the piezoelectric film 22 to drive it, the piezoelectric film 22 repeatedly expands and contracts in the first surface direction (film stretching direction). Then, the tension T1 transmitted from the piezoelectric film 22 to the diaphragm 21 is periodically changed. Thereby, the component force T2 in the direction perpendicular to the surface of the fixed end 24 at the tension T1 also periodically changes. Then, as shown by a dotted line in FIG. 2A, the amount of bending of the diaphragm 21 changes periodically.
　これにより、圧電フィルム２２の収縮時には振動板２１の第１の面方向（フィルム張架方向）における中央部分が上方に変位し、圧電フィルム２２の伸長時には振動板２１の第１の面方向（フィルム張架方向）における中央部分が下方に変位する。これに伴い、スペーサ７０は周期的に上下に変位し、圧電フィルム２２がスペーサ７０との接触位置で屈曲する角度も周期的に変化する。 Thereby, when the piezoelectric film 22 is contracted, the central portion in the first surface direction (film stretching direction) of the diaphragm 21 is displaced upward, and when the piezoelectric film 22 is extended, the first surface direction (film) of the diaphragm 21 is displaced. The central part in the tension direction is displaced downward. Accordingly, the spacer 70 is periodically displaced up and down, and the angle at which the piezoelectric film 22 is bent at the contact position with the spacer 70 also periodically changes.
　図２（Ｂ）は、タッチ操作等による押圧力が印加されている状態での振動装置２０の振動態様を説明する側面図である。 FIG. 2B is a side view illustrating a vibration mode of the vibration device 20 in a state where a pressing force by a touch operation or the like is applied.
　タッチ操作する指等からの押圧力Ｔ３が振動板２１に印加されて振動板２１が略平坦な形状まで押込まれる状態では、振動装置２０の弾性力によって、押圧力Ｔ３に対する反力Ｔ４が指等に作用する。この状態では、振動板２１とともにスペーサ７０が下方に押込まれ、押圧力Ｔ３が印加されていない時よりも圧電フィルム２２が大きく屈曲するようになる。 In a state where a pressing force T3 from a finger or the like that is touched is applied to the diaphragm 21 and the diaphragm 21 is pushed to a substantially flat shape, the reaction force T4 against the pressing force T3 is caused by the elastic force of the vibration device 20. Acts on etc. In this state, the spacer 70 is pushed downward together with the diaphragm 21, and the piezoelectric film 22 is bent more greatly than when the pressing force T3 is not applied.
　すなわち、押圧力Ｔ３が振動板２１に印加されて振動板２１が略平坦な形状まで押込まれても、スペーサ７０が振動板２１と圧電フィルム２２との間の隙間が潰れることを防ぎ、圧電フィルム２２が両固定端２４によって張られる状態が維持される。したがって、振動板２１が平坦な状態であっても、張力Ｔ１の分力Ｔ２が、固定端２４の表面に垂直な方向に作用する。 That is, even if the pressing force T3 is applied to the diaphragm 21 and the diaphragm 21 is pushed to a substantially flat shape, the spacer 70 prevents the gap between the diaphragm 21 and the piezoelectric film 22 from being crushed, and the piezoelectric film The state where 22 is stretched by both fixed ends 24 is maintained. Therefore, even when the diaphragm 21 is flat, the component force T2 of the tension T1 acts in a direction perpendicular to the surface of the fixed end 24.
　このため、この状態で圧電フィルム２２に交流電圧が印加されて駆動しても、圧電フィルム２２から振動板２１に伝わる張力Ｔ１およびその分力Ｔ２が周期的に大きくなり、振動板２１が周期的に大きく撓もうとする。このことによって、振動板２１を押込む指等に振動板２１から伝わる反力Ｔ４に周期的な変動が生じる。 For this reason, even if an AC voltage is applied to the piezoelectric film 22 in this state and driven, the tension T1 transmitted from the piezoelectric film 22 to the diaphragm 21 and its component force T2 increase periodically, and the diaphragm 21 is periodically Try to bend greatly. This causes periodic fluctuations in the reaction force T4 transmitted from the diaphragm 21 to a finger or the like pushing the diaphragm 21.
　このように、本実施形態に係る触覚提示装置１０および振動装置２０では、２つのスペーサ７０が振動板２１と圧電フィルム２２とがなす弓状の隙間部分に配置されているため、この隙間部分は完全に潰れるようなことがない。このことにより、ユーザから押圧されることで振動板２１が平坦化しても、圧電フィルム２２の伸縮によって確実に振動板２１を振動させることができる。したがって、タッチ操作を行うユーザに対して、確実に触覚フィードバックを与えることができる。その上、この触覚提示装置１０および振動装置２０では、スペーサ７０によって振動板２１と圧電フィルム２２との隙間が潰れることが無いために、振動板２１を薄く構成して振動板２１の剛性を抑制することができ、振動板２１に生じる撓み量を従来よりも大きくすることが可能である。 Thus, in the tactile sense presentation device 10 and the vibration device 20 according to the present embodiment, since the two spacers 70 are arranged in the arcuate gap portion formed by the vibration plate 21 and the piezoelectric film 22, this gap portion is There is no such thing as being completely crushed. Thereby, even if the diaphragm 21 is flattened by being pressed by the user, the diaphragm 21 can be reliably vibrated by the expansion and contraction of the piezoelectric film 22. Therefore, tactile feedback can be reliably given to the user who performs the touch operation. In addition, in the tactile sense presentation device 10 and the vibration device 20, since the gap between the vibration plate 21 and the piezoelectric film 22 is not crushed by the spacer 70, the vibration plate 21 is thinly configured to suppress the rigidity of the vibration plate 21. Therefore, it is possible to increase the amount of bending generated in the diaphragm 21 as compared with the conventional case.
　次に、スペーサ７０について、より具体的な構造を説明する。図３は、振動装置２０の分解斜視図である。 Next, a more specific structure of the spacer 70 will be described. FIG. 3 is an exploded perspective view of the vibration device 20.
　上記した２つのスペーサ７０は、それぞれ、複数の脚部７１と、基部７３と、複数の第１の突起７４と、複数の第２の突起７５と、を備えている。基部７３は、角柱状の部位であり、スペーサ７０の第２の面方向における両端間に延びている。すなわち、基部７３は、圧電フィルム２２と振動板２１とに挟まれる隙間部分を通って第２の面方向（フィルム幅方向）に延在している。 Each of the two spacers 70 includes a plurality of leg portions 71, a base portion 73, a plurality of first protrusions 74, and a plurality of second protrusions 75. The base 73 is a prismatic part and extends between both ends of the spacer 70 in the second surface direction. That is, the base portion 73 extends in the second surface direction (film width direction) through a gap portion sandwiched between the piezoelectric film 22 and the diaphragm 21.
　図４は、振動装置２０の、振動板２１を透視して示す天面側から視た平面図である。図５は、振動装置２０の、図４に示すV－V線に沿う断面図である。なお、図５で示す振動板２１は、第２の面方向（フィルム幅方向）に沿った反りがないものである。 FIG. 4 is a plan view of the vibration device 20 viewed from the top surface side through the diaphragm 21. 5 is a cross-sectional view of the vibration device 20 along the line VV shown in FIG. In addition, the diaphragm 21 shown in FIG. 5 has no warp along the second surface direction (film width direction).
　複数の脚部７１は、基部７３の第２の面方向（フィルム幅方向）の両端それぞれから厚み方向の底面側に突出するように設けられている。第２の面方向（フィルム幅方向）での複数の脚部７１の間隔は、圧電フィルム２２の第２の面方向（フィルム幅方向）の寸法よりも大きく設定されている。そして、圧電フィルム２２は、第２の面方向（フィルム幅方向）での複数の脚部７１の間を通過するように設けられている。より具体的には、ここでの圧電フィルム２２は、第２の面方向（フィルム幅方向）での複数の脚部７１の間で、基部７３の底面に当接している。すなわち、複数の脚部７１は、第２の面方向（フィルム幅方向）に沿って並び、圧電フィルム２２に重ならない位置で基部７３から突出している。そして、複数の脚部７１それぞれの底面は、振動装置２０の取付面に接触可能な基底面Ｂを構成している。 The plurality of leg portions 71 are provided so as to protrude from both ends of the second surface direction (film width direction) of the base portion 73 toward the bottom surface side in the thickness direction. The interval between the plurality of leg portions 71 in the second surface direction (film width direction) is set to be larger than the dimension of the piezoelectric film 22 in the second surface direction (film width direction). And the piezoelectric film 22 is provided so that it may pass between the some leg parts 71 in a 2nd surface direction (film width direction). More specifically, the piezoelectric film 22 here is in contact with the bottom surface of the base portion 73 between the plurality of leg portions 71 in the second surface direction (film width direction). That is, the plurality of leg portions 71 are arranged along the second surface direction (film width direction) and protrude from the base portion 73 at a position that does not overlap the piezoelectric film 22. The bottom surfaces of the plurality of leg portions 71 constitute a base surface B that can come into contact with the mounting surface of the vibration device 20.
　第１の突起７４は、特許請求の範囲に記載の第１の箇所に相当するものである。また、第２の突起７５は、特許請求の範囲に記載の第２の箇所に相当するものである。第１の突起７４は、基部７３の第２の面方向（フィルム幅方向）の両端付近それぞれに設けられている。第２の突起７５は、基部７３の第２の面方向（フィルム幅方向）にて第１の突起７４よりも振動板２１の中心側に対向するように設けられている。第１及び第２の突起７４，７５は、基部７３から厚み方向の天面側に突出し、それぞれの頂面で振動板２１に接触可能に設けられている。より具体的には、ここでの第１の突起７４は、頂面が常に振動板２１に接触するように構成されている。一方、ここでの第２の突起７５は、振動板２１に変形が無い場合には、頂面が振動板２１から離れ、振動板２１が強く押圧される場合や、振動板２１に逆反りがある場合に、頂面が振動板２１に当接するように構成されている。 The first protrusion 74 corresponds to the first portion described in the claims. Moreover, the 2nd protrusion 75 is corresponded to the 2nd location as described in a claim. The first protrusions 74 are provided in the vicinity of both ends of the base 73 in the second surface direction (film width direction). The second protrusion 75 is provided so as to face the center side of the diaphragm 21 with respect to the first protrusion 74 in the second surface direction (film width direction) of the base 73. The first and second protrusions 74 and 75 protrude from the base 73 toward the top surface in the thickness direction, and are provided so as to be able to contact the diaphragm 21 at the respective top surfaces. More specifically, the first protrusion 74 here is configured such that the top surface always contacts the diaphragm 21. On the other hand, when the vibration plate 21 is not deformed, the second protrusion 75 here is separated from the vibration plate 21 and the vibration plate 21 is strongly pressed, or when the vibration plate 21 is reversely warped. In some cases, the top surface is configured to contact the diaphragm 21.
　また、ここでは、第１の突起７４の天面には、天面側に更に突出する小径部７７を設けている。また、振動板２１には、第１の突起７４の小径部７７に対向する位置に、振動板２１を貫通する開口７８を設けている。スペーサ７０の小径部７７は振動板２１の開口７８に嵌め合わせていて、これにより、スペーサ７０は振動板２１に対して固定されている。なお、このような構成でスペーサ７０を固定する他、接着剤等によりスペーサ７０を振動板２１や圧電フィルム２２に固定するようにしてもよい。 Further, here, the top surface of the first protrusion 74 is provided with a small-diameter portion 77 that further protrudes toward the top surface side. The diaphragm 21 is provided with an opening 78 penetrating the diaphragm 21 at a position facing the small diameter portion 77 of the first protrusion 74. The small-diameter portion 77 of the spacer 70 is fitted into the opening 78 of the diaphragm 21, whereby the spacer 70 is fixed to the diaphragm 21. In addition to fixing the spacer 70 with such a configuration, the spacer 70 may be fixed to the diaphragm 21 or the piezoelectric film 22 with an adhesive or the like.
　そして、図５に示すように、第１の突起７４の基部７３からの突出長は、第２の突起７５の基部７３からの突出長よりも大きくなるように、設定されている。このことを言い換えると、第１の突起７４の基底面Ｂからの高さは、第２の突起７５の基底面Ｂからの高さよりも大きくなるように、設定されている。 And as shown in FIG. 5, the protrusion length from the base 73 of the 1st protrusion 74 is set so that it may become larger than the protrusion length from the base 73 of the 2nd protrusion 75. As shown in FIG. In other words, the height of the first protrusion 74 from the base surface B is set to be larger than the height of the second protrusion 75 from the base surface B.
　以上のように構成されたスペーサ７０は、第２の突起７５により、振動板２１が強く押圧されて平坦化するような状態でも、スペーサ７０の天面全面が振動板２１に当接することを防ぐことができる。すなわち、スペーサ７０と振動板２１との当接部分の面積を低減することができる。このことにより、振動板２１の振動が、スペーサ７０との当接部分に拘束されて劣化することを抑制できる。 The spacer 70 configured as described above prevents the entire top surface of the spacer 70 from coming into contact with the diaphragm 21 even when the diaphragm 21 is strongly pressed and flattened by the second protrusion 75. be able to. That is, the area of the contact portion between the spacer 70 and the diaphragm 21 can be reduced. As a result, it is possible to suppress the vibration of the diaphragm 21 from being restrained by the contact portion with the spacer 70 and deteriorating.
　また、スペーサ７０は、天面側から視て、第１の突起７４の頂面に設けた小径部７７と、振動板２１に設けた開口７８との嵌合によって固定されているので、振動板２１に対して強固な結着力で固定されている。このことにより、スペーサ７０は、サイズが極めて小さい小径部７７によって振動板２１に固定されていても、位置ずれが極めて起こりにくい構成となっている。したがって、触覚提示装置１０および振動装置２０は、スペーサ７０の位置ずれによる振動特性の悪化が生じにくくなっている。ただし、小径部７７を設ける位置は、第１の突起７４の頂面に限られるものではなく、第２の突起７５の頂面に設けられていてもよい。また、スペーサ７０の固定方法は、小径部７７と開口７８との嵌合に限られるものではなく、接着剤等による接着や、振動板２１と圧電フィルム２２との間での挟持などによって実現してもよい。 The spacer 70 is fixed by fitting a small diameter portion 77 provided on the top surface of the first protrusion 74 and an opening 78 provided on the diaphragm 21 when viewed from the top surface side. 21 is fixed with a strong binding force. Thus, even if the spacer 70 is fixed to the diaphragm 21 by the small-diameter portion 77 having a very small size, the positional deviation is hardly caused. Therefore, the tactile sense presentation device 10 and the vibration device 20 are less likely to deteriorate the vibration characteristics due to the displacement of the spacer 70. However, the position where the small diameter portion 77 is provided is not limited to the top surface of the first protrusion 74, and may be provided on the top surface of the second protrusion 75. The method for fixing the spacer 70 is not limited to the fitting between the small-diameter portion 77 and the opening 78, and is realized by bonding with an adhesive or the like, or clamping between the diaphragm 21 and the piezoelectric film 22. May be.
　このような触覚提示装置１０および振動装置２０において、現実的には、薄手に構成された振動板２１は完全に平坦となることはなく、第１の面方向や第２の面方向に若干の反りが生じる。 In such a tactile sense presentation device 10 and the vibration device 20, in reality, the thinly configured vibration plate 21 does not become completely flat, and is slightly in the first surface direction or the second surface direction. Warping occurs.
　図６は、振動板２１に第２の面方向に沿って逆反りがある場合を示す図であり、図６（Ａ）は比較例に係る振動装置２０Ａの断面図であり、図６（Ｂ）は本実施形態に係る振動装置２０の断面図である。 6 is a diagram illustrating a case where the diaphragm 21 has a reverse warp along the second surface direction, and FIG. 6A is a cross-sectional view of a vibration device 20A according to a comparative example, and FIG. ) Is a cross-sectional view of the vibration device 20 according to the present embodiment.
　比較例に係る振動装置２０Ａは、本実施形態に係る振動装置２０と異なる構成としてスペーサ７０Ａを備えている。スペーサ７０Ａは、第１の突起７４Ａと第２の突起７５Ａとの基部７５Ａからの突出長が等しいものである。このため、振動装置２０Ａでは、第１の突起７４Ａだけでなく、第２の突起７５Ａも、常に頂面が振動板２１に当接する。 The vibration device 20A according to the comparative example includes a spacer 70A as a configuration different from the vibration device 20 according to the present embodiment. The spacer 70A has the same protrusion length from the base portion 75A of the first protrusion 74A and the second protrusion 75A. Therefore, in the vibration device 20 </ b> A, not only the first protrusion 74 </ b> A but also the second protrusion 75 </ b> A always has the top surface in contact with the diaphragm 21.
　本実施形態に係る振動装置２０と、比較例に係る振動装置２０Ａとは、ともに、振動板２１に第２の面方向（フィルム幅方向）に沿って逆反りが生じている。このため、比較例に係る振動装置２０Ａのように、第１の突起７４Ａと第２の突起７５Ａとの突出長が一様なスペーサ７０Ａは、振動板２１の逆反りの曲率と同様の曲率で第２の面方向に沿って逆反りが生じてしまう。すると、振動板２１の逆反りの曲率が一定程度を超えて大きければ、スペーサ７０Ａの底面側の圧電フィルム２２が振動装置２０Ａの取付面Ａに当接し、圧電フィルム２２の伸縮に伴って圧電フィルム２２に取付面Ａとの摺れが生じることや、スペーサ７０Ａの端部が取付面Ａから浮き上がるおそれがある。 Both the vibration device 20 according to the present embodiment and the vibration device 20A according to the comparative example have a reverse warp in the vibration plate 21 along the second surface direction (film width direction). For this reason, like the vibration device 20A according to the comparative example, the spacer 70A having a uniform protrusion length between the first protrusion 74A and the second protrusion 75A has the same curvature as the curvature of the reverse warp of the diaphragm 21. A reverse warp occurs along the second surface direction. Then, if the curvature of the reverse warp of the diaphragm 21 is larger than a certain level, the piezoelectric film 22 on the bottom surface side of the spacer 70 </ b> A contacts the mounting surface A of the vibration device 20 </ b> A, and the piezoelectric film 22 expands and contracts. 22 may slide with the mounting surface A, and the end of the spacer 70A may float from the mounting surface A.
　一方、本実施形態に係る振動装置２０では、第１の突起７４の突出長と第２の突起７５の突出長よりも大きいために、第２の突起７５が振動板２１に接触するまでのマージンがあり、振動板２１の逆反りの曲率が一定程度を超えて大きくならなければ、第２の突起７５が振動板２１に接触せず、スペーサ７０に逆反りは生じない。また、振動板２１の逆反りの曲率が、第２の突起７５が振動板２１に接触するほど大きく、スペーサ７０にも逆反りが生じたとしても、その曲率は、振動板２１における逆反りの曲率よりも小さくなる。したがって、本実施形態に係る振動装置２０では、振動板２１に第２の面方向（フィルム幅方向）に沿う逆反りがあっても、圧電フィルム２２が振動装置２０の取付面Ａに当接したり、スペーサ７０の端部が振動装置２０の取付面Ａから浮き上がるようなことになりにくい。 On the other hand, in the vibration device 20 according to this embodiment, since the protrusion length of the first protrusion 74 and the protrusion length of the second protrusion 75 are larger, the margin until the second protrusion 75 contacts the diaphragm 21. If the curvature of the reverse warp of the diaphragm 21 does not increase beyond a certain level, the second protrusion 75 does not contact the diaphragm 21 and the spacer 70 does not warp. Further, the curvature of the reverse warp of the diaphragm 21 is so large that the second protrusion 75 comes into contact with the diaphragm 21, and even if the spacer 70 also has a reverse warp, the curvature thereof is the reverse warp of the diaphragm 21. It becomes smaller than the curvature. Therefore, in the vibration device 20 according to the present embodiment, even if the vibration plate 21 has a reverse warp along the second surface direction (film width direction), the piezoelectric film 22 contacts the mounting surface A of the vibration device 20. The end portion of the spacer 70 is unlikely to be lifted from the mounting surface A of the vibration device 20.
　このような理由で、本実施形態に係る振動装置２０では、比較例に係る振動装置２０Ａよりも、振動板２１の良好な振動特性を容易に得ることができる。 For this reason, the vibration device 20 according to the present embodiment can easily obtain better vibration characteristics of the diaphragm 21 than the vibration device 20A according to the comparative example.
　図７（Ａ）は、比較例に係る振動装置２０Ａにおいて、振動板２１に第２の面方向に沿う逆反りが無く（小さく）、振動板２１の端部が取付面から浮き上がらない状態での振動板２１の振動特性を例示する図である。図７（Ｂ）は、比較例に係る振動装置２０Ａにおいて、振動板２１に第２の面方向に沿う逆反りがあり、振動板２１の端部が浮き上がる状態での振動板２１の振動特性を例示する図である。図７（Ｃ）は、本実施形態に係る振動装置２０において、振動板２１に第２の面方向に沿う逆反りがある状態での振動板２１の振動特性を例示する図である。 FIG. 7A shows the vibration device 20A according to the comparative example in a state where the vibration plate 21 has no (small) reverse warp along the second surface direction, and the end portion of the vibration plate 21 does not float from the mounting surface. 5 is a diagram illustrating vibration characteristics of a diaphragm 21. FIG. FIG. 7B shows the vibration characteristics of the diaphragm 21 in a state where the diaphragm 21 has a reverse warp along the second surface direction and the end portion of the diaphragm 21 is lifted in the vibration device 20A according to the comparative example. It is a figure illustrated. FIG. 7C is a diagram illustrating the vibration characteristics of the diaphragm 21 in the vibration device 20 according to this embodiment when the diaphragm 21 has a reverse warp along the second surface direction.
　なお、いずれの図においても、圧電フィルム２２に、振幅１００Ｖで、電圧周波数が振動板２１の共振周波数と一致する正弦波電圧を印加し、その状態で、振動板２１の厚み方向変位量（ピーク値）を、レーザ変位計（キーエンス製 LK-G157）によって測定点を順次動かしながら測定した。 In any of the figures, a sinusoidal voltage having an amplitude of 100 V and a voltage frequency that matches the resonance frequency of the diaphragm 21 is applied to the piezoelectric film 22, and the displacement in the thickness direction (peak) of the diaphragm 21 in that state is applied. Value) was measured while sequentially moving the measurement points with a laser displacement meter (Keyence 順次 -LK157).
　比較例に係る振動装置２０Ａにおいて、図７（Ａ）に示すように、振動板２１に第２の面方向に沿って逆反りが無い場合には、振動板２１の第２の面方向（フィルム幅方向）の中央部から両端部にわたって振動板２１の厚み方向変位量が均質に分布し、第２の面方向（フィルム幅方向）の両端部で厚み方向変位量が低下することはなかった。 In the vibration device 20A according to the comparative example, as shown in FIG. 7A, when the diaphragm 21 has no reverse warp along the second surface direction, the second surface direction of the diaphragm 21 (film) The amount of displacement in the thickness direction of the diaphragm 21 was uniformly distributed from the center portion in the width direction) to both ends, and the amount of displacement in the thickness direction did not decrease at both ends in the second surface direction (film width direction).
　しかしながら、比較例に係る振動装置２０Ａにおいて、図７（Ｂ）に示すように、振動板２１に第２の面方向に沿って逆反りが有る場合には、振動板２１の第２の面方向（フィルム幅方向）の中央部での厚み方向変位量はあまり低下しなかったが、第２の面方向（フィルム幅方向）の両端部で厚み方向変位量が大きく低下した。 However, in the vibration device 20 </ b> A according to the comparative example, as illustrated in FIG. 7B, when the vibration plate 21 has a reverse warp along the second surface direction, the second surface direction of the vibration plate 21. Although the displacement in the thickness direction at the center of (film width direction) did not decrease much, the displacement in the thickness direction greatly decreased at both ends in the second surface direction (film width direction).
　一方、本実施形態に係る振動装置２０においては、図７（Ｃ）に示すように、振動板２１に第２の面方向に沿って逆反りが有っても、振動板２１の第２の面方向（フィルム幅方向）の中央部から両端部にわたって振動板２１の厚み方向変位量が均質に分布し、第２の面方向（フィルム幅方向）の両端部で厚み方向変位量が低下することはなかった。 On the other hand, in the vibration device 20 according to the present embodiment, as shown in FIG. 7C, even if the vibration plate 21 has a reverse warp along the second surface direction, The amount of displacement in the thickness direction of the diaphragm 21 is uniformly distributed from the center in the surface direction (film width direction) to both ends, and the amount of displacement in the thickness direction decreases at both ends in the second surface direction (film width direction). There was no.
　このように、本実施形態の振動装置２０によれば、振動板２１に第２の面方向（フィルム幅方向）の逆反りがあっても、振動板２１の振動特性が悪化しにくくなる。したがって、本実施形態の振動装置２０では、振動板２１の部材の反りの許容範囲が広がり、反りの少ない振動板２１を選定するような手間を省くことができ、より少ない手間で低コストに、振動装置２０および触覚提示装置１０の製品特性を安定化させられる。なお、振動板２１が、第２の面方向（フィルム幅方向）に沿って逆反りとは反対側に反るように振動装置２０に取り付けられる場合や、第１の面方向に沿って反るように振動装置２０に取り付けられる場合も考えられるが、それらの場合には、振動装置２０（スペーサ７１）の両端が浮き上がるような問題は生じない。したがって、本実施形態の振動装置２０では、振動板２１の反りの方向を判別してから振動装置に取り付けるような手間も省くことができ、このことによっても、より少ない手間で低コストに、振動装置２０および触覚提示装置１０の製品特性を安定化させられる。 Thus, according to the vibration device 20 of the present embodiment, even if the vibration plate 21 has a reverse warp in the second surface direction (film width direction), the vibration characteristics of the vibration plate 21 are hardly deteriorated. Therefore, in the vibration device 20 of the present embodiment, the allowable range of warpage of the members of the diaphragm 21 is widened, and it is possible to save time and effort for selecting the vibration plate 21 with less warpage. Product characteristics of the vibration device 20 and the tactile sense presentation device 10 can be stabilized. In addition, when the diaphragm 21 is attached to the vibration device 20 so as to warp in the opposite direction to the reverse warp along the second surface direction (film width direction), or warps along the first surface direction. In this case, there is no problem that both ends of the vibration device 20 (spacer 71) are lifted. Therefore, in the vibration device 20 according to the present embodiment, it is possible to save the trouble of attaching the vibration device 21 after determining the warping direction of the vibration plate 21, and this also reduces the vibration at a low cost with less work. Product characteristics of the device 20 and the haptic presentation device 10 can be stabilized.
　次に、第２の実施形態に係る振動装置２０Ｂについて説明する。図８は、第２の実施形態における触覚提示装置の分解斜視図である。図９は、振動装置２０Ｂの断面図である。以下、第１の実施形態に係る構成と同じ構成には同じ符号を付し、その説明を省く。なお、この図で示す振動板２１も、第２の面方向の反りがないものである。 Next, the vibration device 20B according to the second embodiment will be described. FIG. 8 is an exploded perspective view of the tactile sense presentation device according to the second embodiment. FIG. 9 is a cross-sectional view of the vibration device 20B. Hereinafter, the same reference numerals are given to the same components as those according to the first embodiment, and the description thereof is omitted. Note that the diaphragm 21 shown in this figure also has no warpage in the second surface direction.
　振動装置２０Ｂは、第１の実施形態と異なる構成として、複数の圧電フィルム２２Ｂと、スペーサ７０Ｂと、を備えている。複数の圧電フィルム２２Ｂは、振動装置２０Ｂの第２の面方向に並べて配置されている。 The vibration device 20B includes a plurality of piezoelectric films 22B and a spacer 70B as a configuration different from that of the first embodiment. The plurality of piezoelectric films 22B are arranged side by side in the second surface direction of the vibration device 20B.
　スペーサ７０Ｂは、基部７３Ｂの第２の面方向の両端それぞれから厚み方向の底面側に突出する脚部７１Ｂに加えて、第２の面方向における複数の圧電フィルム２２Ｂの間から、振動装置２０Ｂの厚み方向における底面側に突出する脚部７２Ｂを更に備えている。すなわち、複数の脚部７１Ｂ，７２Ｂは、第２の面方向（フィルム幅方向）に沿って並び、複数の圧電フィルム２２Ｂに重ならない位置で基部７３Ｂから底面側に突出している。そして、複数の脚部７１Ｂ，７２Ｂそれぞれの底面は、振動装置２０Ｂの取付面に接触可能な基底面Ｂを構成している。したがって、脚部７１Ｂは、特許請求の範囲に記載の第１の脚部に相当するものであり、脚部７２Ｂは、特許請求の範囲に記載の第２の脚部に相当するものである。 The spacer 70B includes, in addition to the leg portions 71B projecting from both ends in the second surface direction of the base portion 73B to the bottom surface side in the thickness direction, between the plurality of piezoelectric films 22B in the second surface direction, A leg portion 72B protruding toward the bottom surface in the thickness direction is further provided. That is, the plurality of leg portions 71B and 72B are arranged along the second surface direction (film width direction) and protrude from the base portion 73B to the bottom surface side at a position not overlapping the plurality of piezoelectric films 22B. And the bottom face of each of the plurality of leg portions 71B, 72B constitutes a base face B that can contact the mounting face of the vibration device 20B. Therefore, the leg portion 71B corresponds to the first leg portion described in the claims, and the leg portion 72B corresponds to the second leg portion described in the claims.
　そして、この実施形態においては、スペーサ７０Ｂに変形が無い状態では、第１の脚部７１Ｂの基部７３Ｂからの突出長は、第２の脚部７２Ｂの基部７３Ｂからの突出長よりも大きくなるように、設定されている。一方、第１の突起７４Ｂと第２の突起７５Ｂとは、ここでは、それぞれの基部７３Ｂから突出長が等しくなるように設定されている。このような構成のスペーサ７０Ｂでは、第１の突起７４Ｂと第２の突起７５Ｂとが常に振動板２１に接触した状態になるが、第１の突起７４Ｂの基底面Ｂからの高さは、第２の突起７５Ｂの基底面Ｂからの高さよりも大きくなる。 In this embodiment, when the spacer 70B is not deformed, the protruding length of the first leg 71B from the base 73B is larger than the protruding length of the second leg 72B from the base 73B. Is set. On the other hand, the first protrusion 74B and the second protrusion 75B are set so that the protruding lengths from the respective base portions 73B are equal to each other. In the spacer 70B having such a configuration, the first protrusion 74B and the second protrusion 75B are always in contact with the diaphragm 21, but the height of the first protrusion 74B from the base surface B is It becomes larger than the height from the base surface B of 2 protrusion 75B.
　図１０は、振動板２１に第２の面方向に沿って逆反りがある場合を示す図であり、図１０（Ａ）は比較例に係る振動装置２０Ｃの断面図であり、図１０（Ｂ）は本実施形態に係る振動装置２０Ｂの断面図である。 FIG. 10 is a diagram illustrating a case where the diaphragm 21 has a reverse warp along the second surface direction. FIG. 10A is a cross-sectional view of the vibration device 20C according to the comparative example, and FIG. ) Is a cross-sectional view of the vibration device 20B according to the present embodiment.
　比較例に係る振動装置２０Ｃは、本実施形態に係る振動装置２０Ｂと異なる構成としてスペーサ７０Ｃを備えている。スペーサ７０Ｃは、第１の脚部７１Ｃと第２の脚部７２Ｃとの基部７５Ｃからの突出長が等しいものである。 The vibration device 20C according to the comparative example includes a spacer 70C as a configuration different from the vibration device 20B according to the present embodiment. The spacer 70C has the same protruding length from the base portion 75C of the first leg portion 71C and the second leg portion 72C.
　図１０（Ｂ）に示す振動装置２０Ｂと、図１０（Ａ）に示す振動装置２０Ｃとは、ともに、振動板２１に第２の面方向に沿って逆反りが生じている。そして、振動装置２０Ｂと振動装置２０Ｃとは、ともに、第１の突起および第２の突起の頂面が振動板２１に接触している。このため、本実施形態に係る振動装置２０Ｂと比較例に係る振動装置２０Ｃとは、ともに、振動板２１の逆反りの曲率と同様の曲率で第２の面方向に沿って逆反りが生じる。 Both the vibration device 20B shown in FIG. 10B and the vibration device 20C shown in FIG. 10A have a reverse warp in the diaphragm 21 along the second surface direction. In both the vibration device 20B and the vibration device 20C, the top surfaces of the first protrusion and the second protrusion are in contact with the vibration plate 21. For this reason, both the vibration device 20 </ b> B according to the present embodiment and the vibration device 20 </ b> C according to the comparative example cause reverse warpage along the second surface direction with the same curvature as the curvature of the reverse warp of the diaphragm 21.
　このため、比較例に係る振動装置２０Ｃでは、振動板２１の逆反りが微小であっても、両端の脚部７１Ｃのうちの少なくとも一方が、振動装置２０Ｃの取付面Ａから浮き上がってしまう。 For this reason, in the vibration device 20C according to the comparative example, at least one of the leg portions 71C at both ends is lifted from the mounting surface A of the vibration device 20C even if the reverse warping of the vibration plate 21 is minute.
　一方、本実施形態に係る振動装置２０Ｂでは、振動板２１の逆反りの曲率が一定程度大きくなければ、第２の脚部７２Ｂの基底面Ｂが振動装置２０Ｂの取付面Ａに接触せず、第１の脚部７１Ｂが振動装置２０Ｂの取付面Ａから浮き上がるようなことがない。 On the other hand, in the vibration device 20B according to the present embodiment, the base surface B of the second leg portion 72B does not contact the mounting surface A of the vibration device 20B unless the curvature of the reverse warp of the vibration plate 21 is large to a certain extent. The first leg portion 71B does not float from the mounting surface A of the vibration device 20B.
　このような理由で、本実施形態に係る振動装置２０Ｂでも、比較例に係る振動装置２０Ｃよりも、振動板２１の良好な振動特性を容易に得ることができる。すなわち、本実施形態の振動装置２０Ｂでも、スペーサ７０Ｂにおいて、第１の突起７４Ｂの基底面Ｂからの高さを、第２の突起７５Ｂの基底面Ｂからの高さよりも大きくしているので、振動板２１に第２の面方向に沿って逆反りがあっても、振動板２１の振動特性が悪化しにくい。したがって、振動板２１として、振動板２１の部材の反りの許容範囲が広がり、振動装置２０Ｂの製品特性を容易に安定化することができる。 For this reason, the vibration device 20B according to the present embodiment can easily obtain better vibration characteristics of the diaphragm 21 than the vibration device 20C according to the comparative example. That is, also in the vibration device 20B of the present embodiment, in the spacer 70B, the height from the base surface B of the first protrusion 74B is larger than the height from the base surface B of the second protrusion 75B. Even if the diaphragm 21 has a reverse warp along the second surface direction, the vibration characteristics of the diaphragm 21 are unlikely to deteriorate. Therefore, the allowable range of the warp of the members of the diaphragm 21 as the diaphragm 21 is widened, and the product characteristics of the vibration device 20B can be easily stabilized.
　なお、以上に説明した各実施形態においては、振動装置を触覚提示装置に利用する例を示したが、本発明の振動装置はこれに限られるものではなく、例えば平面型スピーカなどその他の装置で利用されてもよい。 In each of the embodiments described above, an example in which the vibration device is used as a tactile sense presentation device has been described. However, the vibration device of the present invention is not limited to this, and may be, for example, another device such as a flat speaker. It may be used.
　また、前述した各実施形態においては、フィルムとして圧電フィルムを用いる例を示したが、本発明のフィルムはこれに限られるものではなく、例えば、電歪フィルム、エレクトレットフィルム、圧電セラミック、圧電粒子を高分子に分散させたコンポジットフィルム、電気活性高分子フィルム等で構成することもできる。電気活性高分子フィルムとは、電気的駆動によって応力を発生するフィルム、または電気的駆動によって変形して変位を発生するフィルムである。具体的には、電歪フィルム、コンポジット材料（圧電セラミックスを樹脂モールドした材料）、電気駆動型エラストマー、または液晶エラストマー等がある。 In each of the above-described embodiments, an example in which a piezoelectric film is used as a film has been shown. However, the film of the present invention is not limited to this, and for example, an electrostrictive film, an electret film, a piezoelectric ceramic, and piezoelectric particles are used. It can also be composed of a composite film dispersed in a polymer, an electroactive polymer film, or the like. An electroactive polymer film is a film that generates stress by electrical drive, or a film that deforms and generates displacement by electrical drive. Specifically, there are an electrostrictive film, a composite material (a material obtained by resin-molding piezoelectric ceramics), an electrically driven elastomer, or a liquid crystal elastomer.
　また、前述した各実施形態においては、スペーサとして第１の突起と第２の突起と脚部を備える例を示したが、本発明のスペーサはこれに限られるものではなく、例えば、突起のない平坦な天面を有するスペーサとしてもよく、また、その天面を、第２の面方向の中央付近で凹むような、なだらかな湾曲面としてもよい。また、第１の突起のみを設け、第２の突起は設けないようにしてもよい。また、スペーサを、脚部のない平坦な底面を有するスペーサとしてもよく、また、その底面を、第２の面方向の中央付近で凹むような、なだらかな湾曲面としてもよい。 Moreover, in each embodiment mentioned above, although the example provided with a 1st protrusion, a 2nd protrusion, and a leg as a spacer was shown, the spacer of this invention is not restricted to this, For example, there is no protrusion. The spacer may have a flat top surface, or the top surface may be a gentle curved surface that is recessed near the center in the second surface direction. Alternatively, only the first protrusion may be provided and the second protrusion may not be provided. The spacer may be a spacer having a flat bottom surface without a leg portion, and the bottom surface may be a gently curved surface that is recessed near the center in the second surface direction.
　また、前述した各実施形態における特徴となる構成は、相互に組み合わせてもよい。すなわち、突出長の異なる第１および第２の突起と、突出長の異なる第１および第２の脚部と、をそれぞれ備えるように振動装置および触覚提示装置は構成することもできる。 Further, the features that are the characteristics of the above-described embodiments may be combined with each other. That is, the vibration device and the tactile sense presentation device can be configured to include first and second protrusions having different protrusion lengths and first and second legs having different protrusion lengths, respectively.
　最後に、上述の各実施形態の説明は、すべての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、本発明の範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 Finally, the description of each embodiment described above should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.
Ａ…取付面
Ｂ…基底面
１０…触覚提示装置
１１…制御部
１２…駆動部
２０…振動装置
２１…振動板
２２…圧電フィルム
２４…固定端
３１…タッチセンサ
７０…スペーサ
７１…脚部
７１Ｂ…第１の脚部
７２Ｂ…第２の脚部
７３…基部
７４…第１の突起
７５…第２の突起 A ... Mounting surface B ... Base surface 10 ... Tactile sense presentation device 11 ... Control unit 12 ... Drive unit 20 ... Vibrating device 21 ... Vibration plate 22 ... Piezoelectric film 24 ... Fixed end 31 ... Touch sensor 70 ... Spacer 71 ... Leg portion 71B ... First leg 72B ... second leg 73 ... base 74 ... first protrusion 75 ... second protrusion

Claims (6)

  1. 　振動板と、
    　前記振動板の第１の面方向に並ぶ複数の箇所で前記振動板に連結され、伸縮することにより前記振動板を振動させるフィルムと、
    　前記フィルムと前記振動板との間の隙間部分を通り、取付面と対向するように前記振動板を支持するスペーサと、を備え、
    　前記スペーサは、前記取付面に接触可能な基底面と、前記振動板に接触可能な第１の箇所と、前記振動板の第１の面方向に交差する第２の面方向にて前記第１の箇所よりも前記振動板の中心側に接触可能な第２の箇所と、を有し、
    　前記スペーサに変形がない状態での、前記第１の箇所の前記基底面からの高さは、前記第２の箇所の前記基底面からの高さよりも大きい、
    　振動装置。     A diaphragm,
    A film that is connected to the diaphragm at a plurality of locations aligned in the first surface direction of the diaphragm and vibrates the diaphragm by expanding and contracting;
    A spacer that supports the diaphragm so as to face the mounting surface through a gap portion between the film and the diaphragm;
    The spacer includes a base surface that can contact the mounting surface, a first location that can contact the diaphragm, and a first surface direction that intersects the first surface direction of the diaphragm. A second location that can contact the center side of the diaphragm rather than the location of
    The height from the basal surface of the first location when the spacer is not deformed is greater than the height from the basal surface of the second location,
    Vibration device.
  2. 　前記第１の箇所および前記第２の箇所は、前記振動板側に突出している、
    　請求項１に記載の振動装置。     The first part and the second part protrude toward the diaphragm,
    The vibration device according to claim 1.
  3. 　前記第１の箇所の突出長は、前記第２の箇所の突出長よりも大きい、
    　請求項２に記載の振動装置。     The protruding length of the first location is greater than the protruding length of the second location,
    The vibration device according to claim 2.
  4. 　前記スペーサは、前記第２の面方向に沿って並び、前記フィルムに重ならない位置で前記基底面に突出している複数の脚部を備える、
    　請求項１乃至請求項３のいずれかに記載の振動装置。     The spacer includes a plurality of legs that are aligned along the second surface direction and project to the base surface at a position that does not overlap the film.
    The vibration device according to any one of claims 1 to 3.
  5. 　前記複数の脚部は、前記第１の箇所に対向する第１の脚部と、前記第２の箇所に対向する第２の脚部と、を含み、
    　前記第１の脚部の突出長は、前記第２の脚部の突出長よりも大きい、請求項４に記載の振動装置。     The plurality of legs include a first leg that faces the first location, and a second leg that faces the second location,
    The vibration device according to claim 4, wherein a protruding length of the first leg portion is larger than a protruding length of the second leg portion.
  6. 　請求項１乃至請求項５のいずれかに記載の振動装置と、
    　前記振動板に装着した、タッチ操作を検出する検出部と、
    　前記検出部がタッチ操作を検出したときに、前記フィルムを駆動する駆動部と、を備える、触覚提示装置。     A vibration device according to any one of claims 1 to 5,
    A detection unit mounted on the diaphragm for detecting a touch operation;
    A tactile sense presentation device comprising: a drive unit that drives the film when the detection unit detects a touch operation.
PCT/JP2016/079213 2015-10-05 2016-10-03 Vibration device and tactile presentation device WO2017061350A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010157037A (en) * 2008-12-26 2010-07-15 Nissha Printing Co Ltd Panel member having oscillating element
JP2013233545A (en) * 2012-05-08 2013-11-21 Samsung Electro-Mechanics Co Ltd Piezoelectric vibration module
WO2015053247A1 (en) * 2013-10-08 2015-04-16 株式会社村田製作所 Tactile sense presenting device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010157037A (en) * 2008-12-26 2010-07-15 Nissha Printing Co Ltd Panel member having oscillating element
JP2013233545A (en) * 2012-05-08 2013-11-21 Samsung Electro-Mechanics Co Ltd Piezoelectric vibration module
WO2015053247A1 (en) * 2013-10-08 2015-04-16 株式会社村田製作所 Tactile sense presenting device

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