WO2017047761A1 - Dust core - Google Patents

Dust core Download PDF

Info

Publication number
WO2017047761A1
WO2017047761A1 PCT/JP2016/077473 JP2016077473W WO2017047761A1 WO 2017047761 A1 WO2017047761 A1 WO 2017047761A1 JP 2016077473 W JP2016077473 W JP 2016077473W WO 2017047761 A1 WO2017047761 A1 WO 2017047761A1
Authority
WO
WIPO (PCT)
Prior art keywords
oxide
alloy
dust core
powder
oxide layer
Prior art date
Application number
PCT/JP2016/077473
Other languages
French (fr)
Japanese (ja)
Inventor
加藤 哲朗
西村 和則
野口 伸
Original Assignee
日立金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立金属株式会社 filed Critical 日立金属株式会社
Priority to JP2017540010A priority Critical patent/JP6846016B2/en
Publication of WO2017047761A1 publication Critical patent/WO2017047761A1/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/20Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H01F1/22Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
    • H01F1/24Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/24Magnetic cores
    • H01F27/255Magnetic cores made from particles

Definitions

  • the present invention relates to a dust core made of Fe-based soft magnetic material powder.
  • the coil component includes a magnetic core and a coil wound around the magnetic core.
  • ferrite having excellent magnetic properties, flexibility in shape and price is widely used.
  • Fe-based soft magnetic material powder for example, particles of an alloy such as Fe-Si, Fe-Si-Al, and Fe-Si-Cr are used. An insulating film is formed exclusively on the surface of the alloy particles.
  • the powder magnetic core obtained by compacting Fe-based soft magnetic material powder is filled with soft magnetic material powder in a die consisting of a punch and a die together with a binder, press-molded at high pressure, vacuum atmosphere, etc. It is formed by annealing at a temperature at which the binder does not decompose in a non-oxidizing atmosphere.
  • the insulation coating on the surface of alloy particles may be destroyed by molding at high pressure.
  • the soft magnetic material powder filled in the mold is in close contact with the die surface with a large surface pressure, and when the molded body is taken out of the mold, the alloy particles on the molded body surface side are greatly plastically deformed.
  • a number of streak marks are formed in the mold release direction on the close contact surface (hereinafter referred to as a sliding contact surface) with the die surface.
  • the insulating film might be broken due to the particles extending in the release direction.
  • the frequency increases as the molding is performed at a higher pressure.
  • a thin metal layer (hereinafter referred to as a conductive portion) is formed on the sliding contact surface of the molded body, and the powder magnetic core obtained by annealing is The insulating film of the alloy particles is broken inside and on the surface, and the insulation tends to be insufficient.
  • the alloy particles on the surface side are plastically deformed along with the destruction of the insulating coating, and the alloy particles may be in direct contact with each other.
  • Patent Document 1 and Patent Document 2 disclose performing surface treatment excluding the conductive portion on the surface of the molded body.
  • Patent Literature 1 mechanical removal means such as laser processing is used, and in Patent Literature 2, conductive portions are removed by chemical removal means that are immersed in concentrated hydrochloric acid to remove the conductive portions.
  • Patent Literature 2 conductive portions are removed by chemical removal means that are immersed in concentrated hydrochloric acid to remove the conductive portions.
  • an extra equipment for removing the conductive portion is necessary, and it is necessary to consider waste liquid treatment and the like, resulting in an increase in manufacturing cost.
  • there is a concern that such removal of the conductive portion may damage parts other than the conductive portion.
  • the alloy phase appears on the surface as it is and is in a state of being easily rusted. Therefore, it is necessary to separately perform a rust prevention treatment or the like.
  • an object of the present invention is to provide a dust core having a large electric resistance and high insulation, and also excellent in rust prevention.
  • the present invention relates to a powder magnetic core including particles of an Fe-M (M is Al or Cr) based alloy, and the alloy particles pass through an oxide phase enriched in the M element.
  • a dust core which is bonded and has a layered oxide mainly composed of Fe and having a multilayer structure on a part of the surface of the dust core.
  • the layered oxide has a second oxide layer and a first oxide layer in order from the surface of the powder magnetic core, and the second oxide layer includes the first oxidation layer. It is preferable that the M element is contained more than the physical layer. Furthermore, it is preferable that the first oxide layer is mainly composed of Fe 2 O 3 , and the second oxide layer is mainly composed of Fe 3 O 4 , and the electric resistance of the first oxide layer is It is preferably greater than the electrical resistance of the second oxide layer.
  • the Fe-M alloy is an Fe-Al alloy, and it is preferable that Al is concentrated in the oxide phase. Further, the Fe-M alloy is an Fe-Al-Cr alloy, and contains more Al than Cr, and it is preferable that Al is concentrated in the oxide phase.
  • particles of an Fe-M (M is Al or Cr) alloy which is a soft magnetic material powder, are bonded via an oxide phase containing the M element, and Part of the surface has a layered oxide mainly composed of Fe and having a multilayer structure.
  • FIG. 1 is a cross-sectional SEM photograph of a dust core according to an embodiment of the present invention.
  • the dust core shown here is an Fe-M type alloy using particles containing both Al and Cr as M elements. It is observed that a layered structure covering the plurality of alloy particles 3 is formed on the surface side so as to cover them.
  • FIG. 2 is a cross-sectional SEM photograph in which the vicinity of the surface of the powder magnetic core cross section shown in FIG. 1 is enlarged.
  • a layered structure is formed so as to cover a plurality of alloy particles, and it is composed of two layers having different brightness.
  • they are all layered oxides 150 mainly composed of Fe. Further, there is a grain boundary phase thinner than the oxide layer between the grains 3 of the alloy, and Al is concentrated.
  • the specific composition of the Fe-based soft magnetic material powder is not particularly limited as long as it can constitute a powder magnetic core having desired magnetic properties, but the preferred form has the largest content.
  • An alloy powder in which the base element is Fe and the content of Al or Cr is the next highest.
  • Al or Cr means either Al or Cr.
  • examples of such Fe-based alloys include Fe-Si-Cr-based, Fe-Si-Al-based, Fe-Al-Cr-based, and Fe-Al-Cr-Si-based alloys. Since these alloy powders contain Al and Cr in addition to the base element Fe, the alloy powder itself is superior in corrosion resistance compared to pure Fe.
  • the oxide of Fe constituting the alloy and the oxide of non-ferrous metal such as Al and Cr have a larger electric resistance than a single metal or an alloy thereof. Even if the insulating coating of the alloy particles breaks in the manufacturing process of the dust core, the present inventors intervene and bond an oxide phase containing M element of Al or Cr as a grain boundary phase between the alloy particles. At the same time, an oxide mainly composed of Fe liberated from the alloy is formed on the surface of the powder magnetic core, and the oxide mainly composed of Fe is formed in a multilayered manner so as to cover a plurality of alloy particles. Thus, it has been found that the electrical resistance can be increased to improve the insulation.
  • Al is an element that improves the corrosion resistance of the alloy particles themselves and is effective in improving the strength of the dust core. Further, as the Al content increases, the magnetic anisotropy constant decreases and the magnetic permeability increases. Moreover, since the coercive force of the alloy is proportional to the magnetic anisotropy constant, the hysteresis loss can be reduced and the magnetic core loss can be improved. On the other hand, the saturation magnetic flux density decreases.
  • Al is preferably 4.0% by mass or more and 14.0% by mass or less. More preferably, it is 5.0 mass% or more and 13.0 mass% or less.
  • Cr has the effect of increasing the corrosion resistance of the alloy particles themselves. If the amount is too large, the saturation magnetic flux density is lowered. Therefore, in the case of an Fe—Cr alloy, for example, Cr is preferably 1.0% by mass or more. More preferably, it is 2.5 mass% or more. On the other hand, Cr is preferably 9.0% by mass or less. More preferably, it is 7.0 mass% or less, More preferably, it is 4.5 mass% or less.
  • Al is in the above-mentioned range, and Cr is 16.5% by mass or less in total with Al, and the Al content is larger than the Cr content. preferable.
  • Si has the effect of improving magnetic properties.
  • Si is preferably 5.0% by mass or less.
  • Si is preferably at an inevitable impurity level.
  • Si is preferably regulated to less than 0.5% by mass.
  • the soft magnetic material powder can contain other elements.
  • a nonmagnetic element causes a decrease in saturation magnetic flux density or the like, it is more preferably 1.0% by mass or less except for inevitable impurities.
  • the soft magnetic material powder is preferably composed of Fe, Al or Cr except for inevitable impurities, and further composed of Si.
  • FIG. 3 shows a flowchart of the manufacturing process of the dust core according to the embodiment of the present invention.
  • the dust core of the present embodiment will be described along the steps.
  • the Fe-based soft magnetic material powder is not particularly limited as long as it has a magnetic property capable of forming a dust core and can form an oxide layer containing the contained element. Magnetic alloys can be used.
  • the average particle size of the alloy particles of the soft magnetic material powder (here, the median diameter d50 in the cumulative particle size distribution is used) is not limited to this, but has an average particle size of, for example, 1 ⁇ m or more and 100 ⁇ m or less Can be used.
  • the median diameter d50 is more preferably 30 ⁇ m or less, and even more preferably 15 ⁇ m or less.
  • the average particle size is small, the magnetic permeability is low, so the median diameter d50 is more preferably 5 ⁇ m or more.
  • the form of alloy particles is not particularly limited.
  • Atomization methods such as gas atomization and water atomization are suitable for producing powders of alloys that have high malleability and ductility and are difficult to grind.
  • the atomization method is also suitable for obtaining a substantially spherical soft magnetic material powder.
  • an oxide film of Fe, M element, or Si may be formed in a film shape with a thickness of about 5 to 20 nm on the surface of the alloy particles obtained by the water atomization method.
  • the island shape means a state where oxides containing Al and Cr are scattered on the surface of the alloy particles constituting the soft magnetic material powder.
  • alloy particles are bonded to each other through an oxide derived from an alloy of soft magnetic material powder by heat treatment described later, and an oxide is also formed on the surface of the powder magnetic core.
  • the natural oxide film functions as an insulating film and provides an antirust effect to the alloy particles, so that the soft magnetic material powder can be stored in the atmosphere. It is preferable because unnecessary oxidation can be prevented until the molded body is heat-treated.
  • the alloy particles may be heat-treated in the atmosphere and oxidized at a high temperature.
  • an insulating film may be formed on the alloy particles of the soft magnetic material powder by a sol-gel method or the like.
  • the binder binds the powder alloy particles to each other during press molding, and imparts strength to the molded body to withstand handling after molding.
  • various organic organic binders such as polyethylene, polyvinyl alcohol (PVA), an acrylic resin, can be used.
  • the organic binder is thermally decomposed by heat treatment after molding, but if carbon derived from the organic binder remains, the formation of oxides of M elements is suppressed in the oxide phase between the alloy particles formed by high-temperature oxidation, and the M elements In some cases, the ratio of Fe oxide or the like is higher than that of the oxide, and the electric resistance of the dust core is lowered. For this reason, it is preferable to remove the binder under conditions such that residual carbon is not generated as much as possible, for example, by slowing the rate of temperature rise in a temperature range including the decomposition temperature of the organic binder.
  • a silicone resin may be used together with an organic binder as an inorganic binder.
  • the oxide phase contains Si.
  • the amount of the binder added may be an amount that can be sufficiently distributed between the soft magnetic material powders and can secure a sufficient compact strength. On the other hand, if the amount is too large, the density and strength are lowered.
  • the amount is preferably 0.25 to 3.0 parts by weight with respect to 100 parts by weight of the soft magnetic material powder.
  • the mixing method of the soft magnetic material powder and the binder in the first step is not particularly limited, but it is preferable to use a mixing / dispersing device such as an attritor.
  • the mixture obtained by mixing is preferably subjected to a granulation process from the viewpoint of moldability and the like.
  • a spray drying step as the granulation method.
  • a slurry-like mixture containing soft magnetic material powder and binder and a solvent such as water is spray dried using a spray dryer.
  • a granulated powder having a sharp particle size distribution and a small average particle size can be obtained.
  • a substantially spherical granulated powder can be obtained, so that the powder feeding property (powder fluidity) during molding is also improved.
  • the average particle diameter (median diameter d50) of the granulated powder is preferably 40 to 150 ⁇ m, more preferably 60 to 100 ⁇ m, although it depends on the average particle diameter of the alloy particles of the soft magnetic material powder.
  • a method such as rolling granulation may be applied as the granulation method.
  • the granulated powder obtained by rolling granulation is an agglomerated powder having a wide particle size distribution, but it is suitable for pressure molding by passing the granulated powder through a sieve using, for example, a vibrating sieve. Desired granulated powder can be obtained.
  • a lubricant such as stearic acid, stearate, zinc stearate to the granulated powder.
  • the addition amount of the lubricant is preferably 0.1 to 2.0 parts by weight with respect to 100 parts by weight of the soft magnetic material powder.
  • the lubricant can be applied to or sprayed on the mold.
  • Zn derived from the lubricant is included in the oxide phase.
  • the granulated powder obtained in the first step is preferably granulated as described above and provided for the second step.
  • the granulated powder is pressure-molded into a predetermined shape such as a cylindrical shape, a rectangular parallelepiped shape, a toroidal shape, an E shape, a U shape, a pin shape, or a drum shape using a molding die.
  • the molding in the second step may be room temperature molding or warm molding performed by heating to such an extent that the organic binder does not disappear.
  • FIG. 4 is a view for explaining pressure molding
  • FIG. 5 is a perspective view showing an appearance of a molded body obtained by pressure molding.
  • the molding die can take various forms depending on the shape of the molded body and the like. However, in the illustrated example, the configuration of the molding die for press-molding a rectangular flat plate-shaped molded body is shown.
  • the molding die 200 includes an upper punch 201, a lower punch 202, and a die 205.
  • An opening into which the upper punch 201 and the lower punch 202 can be inserted is provided at the center of the die 205.
  • the granulated powder 300 is filled in a cavity that appears when the lower punch 202 is combined with the opening of the die 205.
  • An upper punch 201 is inserted into the opening of the die 205 so as to close the cavity.
  • the granulated powder is pressed in the Z direction in the figure so that the pair of upper and lower punches 201 and 202 come closer to each other, and is formed into a predetermined shape.
  • the upper and lower punches 201 and 202 are pulled away from each other in the Z direction, and the lower punch 202 is moved in the Z direction so that the molded body 100 appears on the upper side of the die 205, and the molded body 100 is released and molded. Remove from mold.
  • the surface of the obtained rectangular flat plate-shaped molded body 100 is a surface that is pressed by upper and lower punches 201 and 202 and a surface that is in contact with a die 205, When the molded body 100 is released, a sliding contact surface 101 that slides on the surface of the die 205 appears.
  • FIG. 6 is an SEM photograph in which the sliding surface of the molded body is observed with a scanning electron microscope (SEM: Scanning Electron Microscope).
  • SEM Scanning Electron Microscope
  • a plurality of linear streak marks 50 are formed on the sliding contact surface 101 of the molded body 100 across the two surfaces of the pressing surface 102 of the molded body 100 in the Z direction of FIG. 5 (the vertical direction of the photograph in FIG. 6). It is formed.
  • FIG. 7A is an SEM photograph in which the sliding contact surface of the molded body is enlarged and observed
  • FIG. 7B is an enlarged view of a surface portion (a region surrounded by a solid line in FIG. 7A) where no clear streak is confirmed.
  • FIG. 7C is an SEM photograph obtained by magnifying and observing a surface portion (a region surrounded by a broken line in FIG. 7A) on which clear streak marks are formed.
  • particles of the soft magnetic material powder alloy are observed in a light color, and a binder or a void portion is observed in a relatively dark color between the alloy particles.
  • FIG. 7C When the surface portion of the molded body 100 where the streak-like marks 50 are formed is observed in an enlarged manner, as shown in FIG. 7C, a region (conductive portion) where a plurality of alloy particles are in direct contact in the Z direction is observed. Further, as shown in FIG.
  • the 3rd process of heat-processing the molded object which passed through the said 2nd process is demonstrated.
  • the molded body is heat-treated in an oxidizing atmosphere to perform annealing to relieve stress strain applied to the alloy particles during molding, and also perform oxide formation by oxidation (high-temperature oxidation). Oxides are formed inside and on the surface of the dust core. Inside the dust core, alloy particles are bonded via an oxide phase containing M element. The oxide phase and the surface oxide intervening between the alloy particles are formed by the surface oxidation of the alloy particles by the heat treatment, but the structure differs depending on the alloy composition and heat treatment conditions.
  • the oxide phase intervening between the alloy particles is, for example, an Al-concentrated alloy in the case of an Fe—Al alloy, and the oxide is a corundum type in which Fe and Al are dissolved in addition to Al 2 O 3 .
  • Oxides ((Fe, Al) 2 O 3 ), FeO, Fe 2 O 3 , Fe 3 O 4 and the like may be present.
  • the oxide phase intervening between the alloy particles is enriched with Cr, and the oxide is a corundum type in which Fe and Cr are dissolved in addition to Cr 2 O 3.
  • Oxide ((Fe, Cr) 2 O 3 ), FeO, Fe 2 O 3 , Fe 3 O 4, etc. may be present.
  • the alloy is an Fe-Al-Cr alloy and contains more Al than Cr
  • the oxide phase intervening between the alloy particles will be Al-concentrated, and the oxide will be Al 2 O 3 .
  • there are corundum type oxides ((Fe, Al, Cr) 2 O 3 ), Cr 2 O 3 , FeO, Fe 2 O 3 , Fe 3 O 4, etc. in which Fe, Al, and Cr are dissolved. Also good.
  • an oxide of Si may be contained in the oxide phase.
  • the concentration of the M element means that the ratio of the M element to the sum of the Fe and M elements is higher than the ratio in the alloy composition.
  • the M element which is Al or Cr constituting the soft magnetic material powder has a greater affinity with O than Fe, and Al contains Al and Cr as M elements having a greater affinity with O than Cr. If the composition contains a larger amount of Al than that, Al is concentrated in the oxide phase. Such an oxide covers the particle surface of the alloy of the soft magnetic material powder, and further fills the space between the particles of the alloy to firmly connect the particles and functions as an insulating layer between the particles.
  • the surface of the powder magnetic core is not covered with the region covered with the layered oxide 150 of Fe, which is a multilayer structure composed of two layers. A region is observed. As a result of examining such a difference in configuration, the region covered with the layered oxide of Fe and the region where the streak traces of the sliding surface of the dust core were in good agreement, It has been found that a layered oxide having a multilayer structure is selectively formed. Further, according to composition mapping in SEM / EDX (EDX: Scanning Electron Microscope / energy dispersive X-ray spectroscopy), the region 250 located on the surface of the dust core and not covered with the layered oxide of Fe (Fig. The particle surface of the alloy (see 1) was covered with an oxide enriched with M element such as the oxide phase.
  • EDX Scanning Electron Microscope / energy dispersive X-ray spectroscopy
  • the layered oxide 150 of Fe having a multilayer structure is an oxide mainly composed of Fe according to SEM / EDX mapping, and includes the first oxide layer 150a and the first oxidation layer.
  • the layered oxide 150 mainly composed of Fe and having a multilayer structure is formed on the surface of the dust core. This is because the alloy particles 3 are destroyed by plastic deformation of the oxide film on the surface. In addition to this, it is presumed that O is sufficiently supplied during high-temperature oxidation compared to the inside of the dust core.
  • the first oxide layer 150a is an oxide mainly containing Fe and containing a small amount of Al and Cr and having a corundum structure (Fe , Al, Cr) 2 O 3 or Fe 2 O 3
  • the second oxide layer 150b is an oxide that contains a relatively large amount of Al and Cr and has a reverse spinel structure (Fe, Al, Cr). 3 has been a O 4.
  • the second oxide layer 150b is filled with irregularities so as to straddle between the alloy particles 3 located on the surface of the powder magnetic core, and the upper layer thereof.
  • a first oxide layer 150a having a thickness of about 3 ⁇ m is formed.
  • the layered oxide 150 mainly composed of Fe is firmly adhered to the dust core, and the second oxide layer 150b contributes to the improvement of the adhesion.
  • the heat treatment can be performed in an atmosphere in which oxygen exists, such as in the air or in a mixed gas of oxygen and an inert gas. Of these, heat treatment in the air is simple and preferable. Further, the pressure of the heat treatment atmosphere is not particularly limited, but is preferably an atmospheric pressure that does not require pressure control.
  • the heat treatment in the third step may be performed at a temperature at which the oxide layer is formed, but is preferably performed at a temperature at which the soft magnetic material powder is not significantly sintered. As the sintering of the soft magnetic material powder proceeds, necking that connects the alloy particles occurs, and the electrical resistance decreases.
  • a range of 700 to 900 ° C. is preferable, and 700 to 800 is preferable.
  • a range of ° C is more preferred.
  • the holding time is appropriately set depending on the size of the dust core, the processing amount, the allowable range of characteristic variation, and the like, and preferably 0.5 to 3 hours, for example. Further, after isothermal oxidation is performed at the peak temperature and time, cooling is performed to room temperature. In order to obtain the layered oxide 150 mainly composed of Fe having the above-described configuration, a temperature decreasing rate from the peak temperature to 200 ° C. is set to 300 ° C.
  • the layered oxide 150 mainly composed of Fe does not have a two-layer structure, and the effect of improving the electric resistance cannot be obtained, or the layered oxide 150 mainly composed of Fe adheres to the dust core. Sexuality may be weakened.
  • the space factor which is the ratio of the soft magnetic material powder in the dust core subjected to heat treatment, is in the range of 80 to 95%.
  • the reason why such a range is preferable is that increasing the space factor improves the magnetic properties, but if the space factor is excessively increased, cracks tend to occur inside the molded body.
  • a more preferable range of the space factor is 84 to 92%.
  • the dust core obtained as described above exhibits an excellent effect of the dust core itself. That is, high insulation and excellent corrosion resistance are realized.
  • Fe-Al-Cr having an alloy composition of 91.0% Fe-5.0% Al-4.0% Cr in terms of mass percentage is as follows.
  • a soft magnetic material powder which is a base alloy, was prepared.
  • the soft magnetic material powder is a spherical water atomized powder, and a natural oxide film made of Al 2 O 3 having a thickness of about 10 nm is formed on the alloy surface.
  • the space factor and density evaluated by the molded body were 84.9% and 6.22 ⁇ 10 3 kg / m 3 .
  • the opposing flat surface of the molded body is a pressing surface that comes into contact with the punch of the molding die, and the peripheral surface connecting the flat surfaces is a sliding contact surface that comes into contact with the die.
  • the visual confirmation with the metal microscope no streak marks were observed on the pressing surface during mold release, but on the sliding contact surface, many streak marks were formed in the thickness direction of the molded body and connected to each other, and the alloy particles A region (conductive portion) in direct contact was observed in a planar shape.
  • Ten samples of the molded body were prepared. In any case, the area of the conductive portion was approximately 70% with respect to the total area of the sliding contact surface.
  • the compact was heat treated in the atmosphere at a heat treatment temperature of 800 ° C. for 1.0 hour, and the temperature was lowered to room temperature at 375 ° C./hr to obtain a disk-shaped dust core (third step).
  • the space factor and density evaluated by the dust core after the heat treatment were 88.9% and 6.40 ⁇ 10 3 kg / m 3 .
  • the specific resistance of a disk-shaped dust core was measured.
  • a conductive adhesive was applied to two flat surfaces (pressurized surfaces) at both ends of the powder magnetic core, dried and solidified, and a measurement object was prepared.
  • the specific resistance of each of the molded bodies not subjected to heat treatment was in a conductive state, the specific resistance was 1 ⁇ 10 2 ⁇ m to 1 ⁇ 10 3 ⁇ m in the dust core of the example, and the insulation was improved.
  • FIG. 8A to 8E show SEM photographs of the cross section of the dust core shown in FIG. 2 and mapping diagrams showing the element distribution in the corresponding visual field.
  • 8A is a SEM photograph of a cross section of the dust core according to the invention
  • FIG. 8B is a mapping diagram showing the distribution of Fe
  • FIG. 8C is a mapping diagram showing the distribution of Al
  • FIG. 8D shows the distribution of Cr
  • FIG. 8E is a mapping diagram showing the O distribution.
  • the portion with high brightness is an alloy particle of soft magnetic material powder
  • the portion with low brightness is a grain boundary portion or a void portion.
  • the brighter color tone indicates that there are more target elements.
  • the Al concentration is high on the surface of the alloy of the soft magnetic material powder, and there is a lot of O and oxides are formed, and the alloy grains are bonded to each other with the oxides as grain boundaries. You can see how they are doing.
  • Al has a remarkably high concentration between the alloy particles (grain boundaries) of the soft magnetic material powder.
  • the concentration of Fe is lower at the grain boundaries than the inside of the alloy particles, and Cr does not show a large concentration distribution.
  • an oxide phase containing the element contained in the soft magnetic material powder is formed at the grain boundary, and the oxide phase is an oxide having a higher ratio of Al to the sum of Fe, Al, and Cr than the alloy. It was confirmed. Prior to the heat treatment, such a concentration distribution of each constituent element was not observed, and it was also found that the oxide phase was formed by the heat treatment. In addition, the oxides at the grain boundaries having a high Al ratio were connected to each other, and the oxide phase was also formed on the alloy particles on the surface of the magnetic material.
  • the concentration of Fe is high, and there is much O, and a layered oxide mainly composed of Fe is formed,
  • the oxide layer mainly composed of Fe layered oxide is layered and has two layers with different brightness.
  • the lower second oxide layer contains a large amount of Al and Cr, and Al is concentrated and observed.
  • alloy particles of the oxide layer (first oxide layer, second layer oxide layer) of the multilayer structure mainly composed of Fe and soft magnetic material powder, O and Fe, Al which are constituent elements of the soft magnetic material powder , Cr and the composition were quantified by SEM / EDX point analysis.
  • Spectrum 4 in FIG. 8A is a measurement point in the first oxide layer
  • spectrum 5 is a measurement point in the second oxide layer
  • spectrum 7 is a measurement point of alloy particles.
  • the results are shown in Table 1.
  • the outer first oxide layer is substantially composed of a layered oxide mainly composed of Fe. It can also be seen that the inner second oxide layer contains a large amount of Al and Cr.
  • the spreading resistance of the cross-section of the dust core was measured by scanning spreading resistance microscopy (SSRM) (Scanning Spreading Resistance Microscopy).
  • SSRM scanning spreading resistance microscopy
  • the spreading resistance is measured by visualizing the spreading resistance directly under the probe by scanning the surface of the sample to which a bias is applied with a conductive probe and measuring the distribution of resistance values two-dimensionally. is there. Such local resistance is spread and called resistance, and the level of the resistance value is displayed by the brightness of the color.
  • the spreading resistance can be measured for each of the first oxide layer and the second oxide layer, and the relative magnitude relationship of the electrical resistance can be clarified. It was measured using an atomic force microscope (AFM: NanoScope IVa AFM Dimension 3100 stage AFM system + SSRM option, manufactured by Bruker AXS, Digital Instruments.
  • AFM atomic force microscope
  • FIG. 9 shows an SSRM photograph. From the difference in color tone, it was confirmed that the spreading resistance of the second oxide layer was smaller than that of the first oxide layer, and that the first oxide layer had higher resistance than the alloy particles. Even if the second oxide layer 150b that contributes to the adhesion of the layered oxide mainly composed of Fe has a relatively low resistance, the second oxide layer 150b is covered with the first oxide layer having a high resistance. When the electrode is directly formed on the surface of the powder magnetic core by plating, it is advantageous for suppressing the elongation of the plating.
  • corrosion resistance was evaluated separately by a salt spray test.
  • the salt spray test was performed based on JIS 22371 (2000) by using a 5% NaCl aqueous solution and exposing the powder magnetic core at 35 ° C. for 24 hours.
  • generation of red rust was not confirmed on the surface of the dust core after the test, and good corrosion resistance was exhibited by the formation of oxides by high-temperature oxidation.

Abstract

Provided is a dust core having exceptional corrosion resistance while ensuring high electric resistance and strong insulating properties. The present invention is a dust core that includes Fe-M (where M is Al or Cr) alloy particles, wherein the alloy particles are bonded by an oxide phase in which the M element is concentrated, and part of the surface of the dust core has a layered oxide which is a multilayered structure and in which Fe is the primary component.

Description

圧粉磁心Dust core
 本発明は、Fe系の軟磁性材料粉を用いて構成された圧粉磁心に関する。 The present invention relates to a dust core made of Fe-based soft magnetic material powder.
 従来から、家電機器、産業機器、車両など多種多様な用途において、インダクタ、トランス、チョーク等のコイル部品が用いられている。コイル部品は、磁性コアと、磁性コアの周囲に巻回されたコイルで構成される。かかる磁性コアには、磁気特性、形状自由度、価格に優れるフェライトが広く用いられている。 Conventionally, coil parts such as inductors, transformers and chokes have been used in a wide variety of applications such as home appliances, industrial equipment and vehicles. The coil component includes a magnetic core and a coil wound around the magnetic core. For such a magnetic core, ferrite having excellent magnetic properties, flexibility in shape and price is widely used.
 近年、電子機器等の電源装置の小型化が進んだ結果、小型・低背で、かつ大電流に対しても使用可能なコイル部品の要求が強くなり、その磁性コアとしては、フェライトと比較して飽和磁束密度が高いFe系の軟磁性材料粉を使用した圧粉磁心の採用が進んでいる。Fe系の軟磁性材料粉としては、例えば、Fe-Si系、Fe-Si-Al系、Fe-Si-Cr系などの合金の粒子が用いられている。合金の粒子の表面には専ら絶縁被膜が形成されている。 In recent years, as power supply devices such as electronic devices have been miniaturized, the demand for coil parts that are small and low in profile and can be used even for large currents has become stronger. The adoption of powder magnetic cores using Fe-based soft magnetic material powder having a high saturation magnetic flux density is advancing. As the Fe-based soft magnetic material powder, for example, particles of an alloy such as Fe-Si, Fe-Si-Al, and Fe-Si-Cr are used. An insulating film is formed exclusively on the surface of the alloy particles.
 Fe系の軟磁性材料粉を圧密化して得られる圧粉磁心は、専ら軟磁性材料粉をバインダとともにパンチとダイとでなる金型内に充填し、高圧力で加圧成形し、真空雰囲気等の非酸化雰囲気中にてバインダが分解しない温度でアニール処理して形成される。 The powder magnetic core obtained by compacting Fe-based soft magnetic material powder is filled with soft magnetic material powder in a die consisting of a punch and a die together with a binder, press-molded at high pressure, vacuum atmosphere, etc. It is formed by annealing at a temperature at which the binder does not decompose in a non-oxidizing atmosphere.
 高圧力での成形で合金粒子表面の絶縁被膜が破壊される場合がある。また成形途中、金型に充填された軟磁性材料粉はダイ表面と大きな面圧で密接していて、成形体を金型から取り出す際に、成形体表面側の合金の粒子が大きく塑性変形し、ダイ表面との密接面(以下、摺接面と呼ぶ)には幾条もの筋状痕が離型方向に形成される場合がある。成形体表面で筋状痕が形成された部位では、粒子が離型方向に延びたりして絶縁被膜が破壊する場合があった。合金の粒子が軟らかく、その展性が高いものであるほど、合金の粒子同士の絶縁被膜等の介在物がない状態での直接接触が生じ易い。高圧力で成形する程にその頻度が高まって、ついには成形体の摺接面に薄い金属の層(以下、導電部と呼ぶ)が形成され、アニール処理されて得られる圧粉磁心は、その内部および表面において合金の粒子の絶縁被膜が破壊されて絶縁が不十分なものとなり易い。また成形体に機械加工を施す場合にも同様に、表面側の合金の粒子に絶縁被膜の破壊とともに塑性変形が生じ、合金の粒子同士の直接接触が生じる場合もあった。 ∙ The insulation coating on the surface of alloy particles may be destroyed by molding at high pressure. During molding, the soft magnetic material powder filled in the mold is in close contact with the die surface with a large surface pressure, and when the molded body is taken out of the mold, the alloy particles on the molded body surface side are greatly plastically deformed. In some cases, a number of streak marks are formed in the mold release direction on the close contact surface (hereinafter referred to as a sliding contact surface) with the die surface. In the part where the streak-like mark was formed on the surface of the molded body, the insulating film might be broken due to the particles extending in the release direction. The softer the alloy particles and the higher the malleability, the more likely direct contact of the alloy particles with no inclusions such as insulating coatings between the alloy particles occurs. The frequency increases as the molding is performed at a higher pressure. Finally, a thin metal layer (hereinafter referred to as a conductive portion) is formed on the sliding contact surface of the molded body, and the powder magnetic core obtained by annealing is The insulating film of the alloy particles is broken inside and on the surface, and the insulation tends to be insufficient. Similarly, when the formed body is machined, the alloy particles on the surface side are plastically deformed along with the destruction of the insulating coating, and the alloy particles may be in direct contact with each other.
 圧粉磁心においては絶縁不十分で電気抵抗が小さいと、例えば特許文献1にて説明されているようにコイル部品においては渦電流損失の増大によって磁心損失が大きくなり易いといった問題がある。そこで、特許文献1や特許文献2では成形体表面の導電部を除く表面処理を行なうことが開示されている。 If the insulation is insufficient and the electric resistance is small in the dust core, for example, as described in Patent Document 1, there is a problem that the core loss tends to increase due to an increase in eddy current loss. Therefore, Patent Document 1 and Patent Document 2 disclose performing surface treatment excluding the conductive portion on the surface of the molded body.
特開2013-131676号公報JP 2013-131676 A 特開2006-229203号公報JP 2006-229203 A
 成形体表面の導電部の除去は、圧粉磁心の表面における電気抵抗向上に一定の効果を有するが、圧粉磁心の内部を含め、全体としての電気抵抗の向上について効果は期待できない。特許文献1ではレーザー処理等の機械的除去手段で行い、特許文献2では濃塩酸に浸漬して導電部を除去する化学的除去手段で、それぞれ導電部の除去を行なっている。しかし、従来の製造工程で余分に導電部除去のための設備装置が必要であるし、廃液処理等も考慮する必要があるので製造コストの増加を招く。また、この様な導電部の除去は導電部以外の部分にダメージを与えることが懸念される。さらに、導電部の除去された部分では、合金相がそのまま表面に現われていて錆やすい状態であるため、別途、防錆処理等を行う必要がある。 The removal of the conductive part on the surface of the molded body has a certain effect on improving the electric resistance on the surface of the dust core, but it cannot be expected to improve the overall electric resistance including the inside of the dust core. In Patent Literature 1, mechanical removal means such as laser processing is used, and in Patent Literature 2, conductive portions are removed by chemical removal means that are immersed in concentrated hydrochloric acid to remove the conductive portions. However, in the conventional manufacturing process, an extra equipment for removing the conductive portion is necessary, and it is necessary to consider waste liquid treatment and the like, resulting in an increase in manufacturing cost. Further, there is a concern that such removal of the conductive portion may damage parts other than the conductive portion. Furthermore, in the portion where the conductive portion is removed, the alloy phase appears on the surface as it is and is in a state of being easily rusted. Therefore, it is necessary to separately perform a rust prevention treatment or the like.
 そこで本発明は、電気抵抗が大きくて高い絶縁性を確保しながら、防錆にも優れる圧粉磁心を提供することを目的とする。 Therefore, an object of the present invention is to provide a dust core having a large electric resistance and high insulation, and also excellent in rust prevention.
 本発明は、Fe-M(MはAl又はCrである。)系の合金の粒子を含む圧粉磁心であって、前記合金の粒子は、前記M元素が濃化した酸化物相を介して結合され、前記圧粉磁心の表面の一部に、前記Feを主体とし、かつ多層組織である層状酸化物を有する圧粉磁心である。 The present invention relates to a powder magnetic core including particles of an Fe-M (M is Al or Cr) based alloy, and the alloy particles pass through an oxide phase enriched in the M element. A dust core which is bonded and has a layered oxide mainly composed of Fe and having a multilayer structure on a part of the surface of the dust core.
 本発明において、前記層状酸化物が、前記圧粉磁心の表面から順に第2の酸化物層と第1の酸化物層とを有し、前記第2の酸化物層は、前記第1の酸化物層よりも前記M元素を多く含むことが好ましい。更に、前記第1の酸化物層はFeを主体とし、前記第2の酸化物層はFeを主体とすることが好ましく、前記第1の酸化物層の電気抵抗は前記第2の酸化物層の電気抵抗より大きいことが好ましい。 In the present invention, the layered oxide has a second oxide layer and a first oxide layer in order from the surface of the powder magnetic core, and the second oxide layer includes the first oxidation layer. It is preferable that the M element is contained more than the physical layer. Furthermore, it is preferable that the first oxide layer is mainly composed of Fe 2 O 3 , and the second oxide layer is mainly composed of Fe 3 O 4 , and the electric resistance of the first oxide layer is It is preferably greater than the electrical resistance of the second oxide layer.
 本発明においては、前記Fe-M系の合金はFe-Al系の合金であり、前記酸化物相にAlが濃化することが好ましい。更に、前記Fe-M系の合金はFe-Al-Cr系の合金であり、CrよりもAlを多く含み、前記酸化物相にAlが濃化することが好ましい。 In the present invention, the Fe-M alloy is an Fe-Al alloy, and it is preferable that Al is concentrated in the oxide phase. Further, the Fe-M alloy is an Fe-Al-Cr alloy, and contains more Al than Cr, and it is preferable that Al is concentrated in the oxide phase.
 本発明によれば、電気抵抗が大きくて高い絶縁性を確保しながら、防錆にも優れる圧粉磁心を提供することが出来る。 According to the present invention, it is possible to provide a dust core having a large electric resistance and high insulation, and also excellent in rust prevention.
本発明の一実施形態に係る圧粉磁心の断面のSEM写真である。It is a SEM photograph of the section of the dust core concerning one embodiment of the present invention. 図1に示した圧粉磁心の断面の表面部分を拡大したSEM写真である。It is the SEM photograph which expanded the surface part of the cross section of the powder magnetic core shown in FIG. 本発明の一実施形態に係る圧粉磁心の製造方法を説明するための工程フロー図である。It is a process flow figure for explaining the manufacturing method of the dust core concerning one embodiment of the present invention. 本発明の一実施形態に係る圧粉磁心の製造方法の第2の工程を説明するための図である。It is a figure for demonstrating the 2nd process of the manufacturing method of the powder magnetic core which concerns on one Embodiment of this invention. 第2の工程により得られた成形体の斜視図である。It is a perspective view of the molded object obtained by the 2nd process. 第2の工程により得られた成形体の摺接面のSEM写真である。It is a SEM photograph of the slidable contact surface of the molded object obtained by the 2nd process. 第2の工程により得られた成形体の摺接面を拡大して観察したSEM写真である。It is the SEM photograph which expanded and observed the sliding contact surface of the molded object obtained by the 2nd process. 成形体の摺接面の導電部が形成されていない表面部分を拡大して観察したSEM写真である。It is the SEM photograph which expanded and observed the surface part in which the electroconductive part of the sliding contact surface of a molded object is not formed. 成形体の摺接面の導電部が形成された表面部分を拡大して観察したSEM写真である。It is the SEM photograph which expanded and observed the surface part in which the electroconductive part of the sliding contact surface of a molded object was formed. 実施例の圧粉磁心の断面のSEM写真である。It is a SEM photograph of the section of the dust core of an example. 図8AのSEM写真の観察視野に対応したFeの分布を示すマッピング図である。It is a mapping figure which shows distribution of Fe corresponding to the observation visual field of the SEM photograph of FIG. 8A. 図8AのSEM写真の観察視野に対応したAlの分布を示すマッピング図である。It is a mapping figure which shows distribution of Al corresponding to the observation visual field of the SEM photograph of FIG. 8A. 図8AのSEM写真の観察視野に対応したCrの分布を示すマッピング図である。It is a mapping figure which shows distribution of Cr corresponding to the observation visual field of the SEM photograph of FIG. 8A. 図8AのSEM写真の観察視野に対応したOの分布を示すマッピング図である。It is a mapping figure which shows distribution of O corresponding to the observation visual field of the SEM photograph of FIG. 8A. 圧粉磁心の断面のSSRM写真である。It is a SSRM photograph of a cross section of a dust core.
 以下、本発明に係る圧粉磁心の実施形態を具体的に説明するが、本発明はこれに限定されるものではない。本発明の圧粉磁心は、軟磁性材料粉であるFe-M(MはAl又はCr)系の合金の粒子が、前記M元素を含む酸化物相を介して結合され、前記圧粉磁心の表面の一部に、前記Feを主体とし、かつ多層組織である層状酸化物を有する。 Hereinafter, embodiments of the powder magnetic core according to the present invention will be specifically described, but the present invention is not limited thereto. In the dust core of the present invention, particles of an Fe-M (M is Al or Cr) alloy, which is a soft magnetic material powder, are bonded via an oxide phase containing the M element, and Part of the surface has a layered oxide mainly composed of Fe and having a multilayer structure.
 図1は本発明の一実施態様に係る圧粉磁心の断面SEM写真である。詳細は後述するが、ここに示した圧粉磁心はFe-M系の合金でM元素としてAlとCrの両方を含む粒子を用いたものである。その表面側に複数の合金の粒子3の間に跨るようにしてこれらを覆う層状の組織が形成されているのが観察される。図2は図1に示した圧粉磁心断面の表面近傍を拡大した断面SEM写真である。複数の合金の粒子を覆うように層状の組織が形成され、それは明度の異なる2層で構成されている。詳細は後述するがそれらは何れもFeを主体とする層状酸化物150である。また合金の粒子3の粒間には前記酸化物層よりも薄い粒界相があってAlが濃化している。 FIG. 1 is a cross-sectional SEM photograph of a dust core according to an embodiment of the present invention. Although the details will be described later, the dust core shown here is an Fe-M type alloy using particles containing both Al and Cr as M elements. It is observed that a layered structure covering the plurality of alloy particles 3 is formed on the surface side so as to cover them. FIG. 2 is a cross-sectional SEM photograph in which the vicinity of the surface of the powder magnetic core cross section shown in FIG. 1 is enlarged. A layered structure is formed so as to cover a plurality of alloy particles, and it is composed of two layers having different brightness. Although details will be described later, they are all layered oxides 150 mainly composed of Fe. Further, there is a grain boundary phase thinner than the oxide layer between the grains 3 of the alloy, and Al is concentrated.
 Fe系の軟磁性材料粉の具体的な組成は、所望の磁気特性を有する圧粉磁心を構成できるものであれば、これを特に限定するものではないが、好ましい形態は、最も含有量が多いベース元素をFeとし、それに次いでAl又はCrの含有量が多い合金粉末である。ここで、Al又はCrとは、AlかCrのどちらかを意味する。ただし、Alの含有量が多い場合でもCrを含んでいてもよく、Crの含有量が多い場合でもAlを含んでいてもよい。このようなFe系の合金としては、例えばFe-Si-Cr系、Fe-Si-Al系、Fe-Al-Cr系、Fe-Al-Cr-Si系の合金が挙げられる。これら合金粉末は、ベース元素であるFeの他にAlやCrを含むため、純Feと比べて合金粉末自体が耐食性に優れる。 The specific composition of the Fe-based soft magnetic material powder is not particularly limited as long as it can constitute a powder magnetic core having desired magnetic properties, but the preferred form has the largest content. An alloy powder in which the base element is Fe and the content of Al or Cr is the next highest. Here, Al or Cr means either Al or Cr. However, even when the content of Al is large, Cr may be included, and even when the content of Cr is large, Al may be included. Examples of such Fe-based alloys include Fe-Si-Cr-based, Fe-Si-Al-based, Fe-Al-Cr-based, and Fe-Al-Cr-Si-based alloys. Since these alloy powders contain Al and Cr in addition to the base element Fe, the alloy powder itself is superior in corrosion resistance compared to pure Fe.
 合金を構成するFeの酸化物や、Al,Cr等の非鉄金属の酸化物は、金属単体、あるいはその合金である場合と比べて電気抵抗が大きい。本発明者等は、圧粉磁心の製造工程において合金の粒子の絶縁被膜が破壊しても、合金の粒子間にAlやCrのM元素を含む酸化物相を粒界相として介在させ結合させると共に、圧粉磁心の表面に、前記合金から遊離したFeを主体とする酸化物を形成し、前記Feを主体とする酸化物を複数の合金の粒子を覆うように多層に重なった形態とすることで、電気抵抗を大きくして絶縁性を向上させることが出来ることを知見した。つまり、軟磁性材料粉の合金の粒子が繋がった導電部があっても、そこを取り除くことなく積極的に酸化させてFeやM元素の酸化物とすることで、それを絶縁層として機能させるという考えである。酸化の手法としては、酸素を含む雰囲気での熱処理を採用する。特に製造コストを低減するには、特別な設備装置を必要としない大気中で行なうのが好ましい。 The oxide of Fe constituting the alloy and the oxide of non-ferrous metal such as Al and Cr have a larger electric resistance than a single metal or an alloy thereof. Even if the insulating coating of the alloy particles breaks in the manufacturing process of the dust core, the present inventors intervene and bond an oxide phase containing M element of Al or Cr as a grain boundary phase between the alloy particles. At the same time, an oxide mainly composed of Fe liberated from the alloy is formed on the surface of the powder magnetic core, and the oxide mainly composed of Fe is formed in a multilayered manner so as to cover a plurality of alloy particles. Thus, it has been found that the electrical resistance can be increased to improve the insulation. In other words, even if there is a conductive part connected with particles of an alloy of soft magnetic material powder, it is actively oxidized without removing it to form an oxide of Fe or M element, so that it functions as an insulating layer This is the idea. As an oxidation method, heat treatment in an atmosphere containing oxygen is employed. In particular, in order to reduce the manufacturing cost, it is preferable to carry out in the atmosphere that does not require special equipment.
 Alは合金の粒子自体の耐食性等を高め、圧粉磁心の強度向上に有効な元素である。また、Alが増加するほどに磁気異方性定数が低下し、透磁率が増加する。また合金の保磁力は磁気異方性定数に比例するので、ヒステリシス損失を低減し磁心損失を改善することが出来る。一方で飽和磁束密度が低下する。Fe-Al系の合金であれば、これらの観点から、例えばAlは4.0質量%以上14.0質量%以下であるのが好ましい。より好ましくは5.0質量%以上13.0質量%以下である。 Al is an element that improves the corrosion resistance of the alloy particles themselves and is effective in improving the strength of the dust core. Further, as the Al content increases, the magnetic anisotropy constant decreases and the magnetic permeability increases. Moreover, since the coercive force of the alloy is proportional to the magnetic anisotropy constant, the hysteresis loss can be reduced and the magnetic core loss can be improved. On the other hand, the saturation magnetic flux density decreases. In the case of an Fe—Al-based alloy, from these viewpoints, for example, Al is preferably 4.0% by mass or more and 14.0% by mass or less. More preferably, it is 5.0 mass% or more and 13.0 mass% or less.
  Crは合金の粒子自体の耐食性等を高める効果がある。多くなりすぎると飽和磁束密度が低下するため、Fe-Cr系の合金であれば、かかる観点から、例えばCrは1.0質量%以上が好ましい。より好ましくは、2.5質量%以上である。一方、Crは、9.0質量%以下が好ましい。より好ましくは、7.0質量%以下、さらに好ましくは4.5質量%以下である。 Cr has the effect of increasing the corrosion resistance of the alloy particles themselves. If the amount is too large, the saturation magnetic flux density is lowered. Therefore, in the case of an Fe—Cr alloy, for example, Cr is preferably 1.0% by mass or more. More preferably, it is 2.5 mass% or more. On the other hand, Cr is preferably 9.0% by mass or less. More preferably, it is 7.0 mass% or less, More preferably, it is 4.5 mass% or less.
 Fe-Al-Cr系の合金あれば、Alが前述の範囲であって、CrはAlとの合計で16.5質量%以下であり、Alの含有量はCrの含有量よりも多いことが好ましい。 In the case of an Fe-Al-Cr alloy, Al is in the above-mentioned range, and Cr is 16.5% by mass or less in total with Al, and the Al content is larger than the Cr content. preferable.
 更にSiを加えることで磁気特性向上の効果がある。一方、Siが多くなり過ぎると圧粉磁心の強度が低下するため、Siは5.0質量%以下が好ましい。強度の観点からはSiは不可避的不純物レベルであることが好ましく、例えば、Siは0.5質量%未満に規制することが好ましい。 Furthermore, adding Si has the effect of improving magnetic properties. On the other hand, if the amount of Si becomes excessive, the strength of the powder magnetic core decreases, so Si is preferably 5.0% by mass or less. From the viewpoint of strength, Si is preferably at an inevitable impurity level. For example, Si is preferably regulated to less than 0.5% by mass.
 なお、軟磁性材料粉が持つ成形性や磁気特性等の利点を発揮する限りにおいて、他の元素を含むこともできる。但し、非磁性元素は飽和磁束密度等を低下させる要因となるため、不可避的不純物を除き、1.0質量%以下であることがより好ましい。軟磁性材料粉は、不可避的不純物を除きFe、Al又はCrで構成し、更にはSiを加えて構成するのが好ましい。 In addition, as long as the soft magnetic material powder exhibits advantages such as formability and magnetic properties, it can contain other elements. However, since a nonmagnetic element causes a decrease in saturation magnetic flux density or the like, it is more preferably 1.0% by mass or less except for inevitable impurities. The soft magnetic material powder is preferably composed of Fe, Al or Cr except for inevitable impurities, and further composed of Si.
 図3に本発明の実施形態に係る圧粉磁心の製造工程のフロー図を示す。軟磁性材料粉とバインダを混合する第1の工程と、前記第1の工程を経て得られた混合物を加圧成形する第2の工程と、前記第2の工程を経た成形体を熱処理する第3の工程とを有する。以下、工程に沿って本実施形態の圧粉磁心を説明する。 FIG. 3 shows a flowchart of the manufacturing process of the dust core according to the embodiment of the present invention. A first step of mixing the soft magnetic material powder and the binder, a second step of pressure-molding the mixture obtained through the first step, and a heat treatment of the molded body through the second step. 3 steps. Hereinafter, the dust core of the present embodiment will be described along the steps.
〔第1の工程〕
 まず、第1の工程に供する軟磁性材料粉について説明する。Fe系の軟磁性材料粉は、圧粉磁心を構成できる磁気特性を有し、かつ含有元素を含む酸化物層を形成し得るものであれば、これを特に限定するものではなく、前記各種の磁性合金を用いることができる。
[First step]
First, the soft magnetic material powder used in the first step will be described. The Fe-based soft magnetic material powder is not particularly limited as long as it has a magnetic property capable of forming a dust core and can form an oxide layer containing the contained element. Magnetic alloys can be used.
 軟磁性材料粉の合金粒子の平均粒径(ここでは、累積粒度分布におけるメジアン径d50を用いる)は、これを限定するものではないが、例えば、1μm以上、100μm以下の平均粒径を有するものを用いることができる。平均粒径を小さくすることで、圧粉磁心の強度、磁心損失、高周波特性が改善されるので、メジアン径d50はより好ましくは30μm以下、さらに好ましくは15μm以下である。一方、平均粒径が小さい場合は透磁率が低くなるため、メジアン径d50はより好ましくは5μm以上である。 The average particle size of the alloy particles of the soft magnetic material powder (here, the median diameter d50 in the cumulative particle size distribution is used) is not limited to this, but has an average particle size of, for example, 1 μm or more and 100 μm or less Can be used. By reducing the average particle size, the strength, magnetic core loss, and high frequency characteristics of the powder magnetic core are improved, so the median diameter d50 is more preferably 30 μm or less, and even more preferably 15 μm or less. On the other hand, when the average particle size is small, the magnetic permeability is low, so the median diameter d50 is more preferably 5 μm or more.
 また、合金の粒子の形態もこれを特に限定するものではない。例えば、流動性等の観点からはアトマイズ粉に代表される粒状粉を用いることが好ましい。ガスアトマイズ、水アトマイズ等のアトマイズ法は、展性や延性が高く、粉砕しにくい合金の粉末作製に好適である。また、アトマイズ法は略球状の軟磁性材料粉を得る上でも好適である。 Also, the form of alloy particles is not particularly limited. For example, it is preferable to use granular powder represented by atomized powder from the viewpoint of fluidity and the like. Atomization methods such as gas atomization and water atomization are suitable for producing powders of alloys that have high malleability and ductility and are difficult to grind. The atomization method is also suitable for obtaining a substantially spherical soft magnetic material powder.
 なお水アトマイズ法で得られた合金粒子表面には、FeやM元素、あるいはSiの酸化被膜が5~20nm程度の厚みで膜状に形成される場合がある。ここで島状とは、AlやCrを含む酸化物が軟磁性材料粉を構成する合金の粒子の表面に点在する状態を言う。本実施形態では後述する熱処理によって、軟磁性材料粉の合金に由来する酸化物を介して合金粒子同士を結合させ、圧粉磁心の表面にも酸化物を形成するので成形前の軟磁性材料粉に絶縁被膜を積極的に形成することは必ずしも要しないが、自然酸化被膜は絶縁被膜として機能するとともに合金粒子に防錆効果が得られ、軟磁性材料粉を大気中で保管することが出来るし、成形体を熱処理するまでの間において無用な酸化を防止できるので好ましい。 Note that an oxide film of Fe, M element, or Si may be formed in a film shape with a thickness of about 5 to 20 nm on the surface of the alloy particles obtained by the water atomization method. Here, the island shape means a state where oxides containing Al and Cr are scattered on the surface of the alloy particles constituting the soft magnetic material powder. In this embodiment, alloy particles are bonded to each other through an oxide derived from an alloy of soft magnetic material powder by heat treatment described later, and an oxide is also formed on the surface of the powder magnetic core. However, it is not always necessary to form an insulating film actively. However, the natural oxide film functions as an insulating film and provides an antirust effect to the alloy particles, so that the soft magnetic material powder can be stored in the atmosphere. It is preferable because unnecessary oxidation can be prevented until the molded body is heat-treated.
 なお合金粒子を大気中で熱処理して高温酸化させても良い。また他の方法としてゾルゲル法等によって軟磁性材料粉の合金粒子に絶縁被膜を形成してもかまわない。 Note that the alloy particles may be heat-treated in the atmosphere and oxidized at a high temperature. As another method, an insulating film may be formed on the alloy particles of the soft magnetic material powder by a sol-gel method or the like.
 次に、第1の工程において用いるバインダについて説明する。バインダは、加圧成形する際、粉体の合金粒子同士を結着させ、成形後のハンドリングに耐える強度を成形体に付与する。バインダの種類は、これを限定するものではないが、例えば、ポリエチレン、ポリビニルアルコール(PVA)、アクリル樹脂等の熱可塑性の各種有機バインダを用いることができる。有機バインダは成形後の熱処理により熱分解するが、有機バインダ由来のカーボンが残ると、高温酸化で形成される合金の粒子間の酸化物相において、M元素の酸化物の形成を抑え、M元素の酸化物よりもFeの酸化物等の割合が増して圧粉磁心の電気抵抗が低下する場合がある。そのため、有機バインダの分解温度を含む温度範囲で昇温速度を遅くするなどして、残留カーボンが出来る限り生じないような条件で脱バインダを行なうのが好ましい。 Next, the binder used in the first step will be described. The binder binds the powder alloy particles to each other during press molding, and imparts strength to the molded body to withstand handling after molding. Although the kind of binder does not limit this, For example, various organic organic binders, such as polyethylene, polyvinyl alcohol (PVA), an acrylic resin, can be used. The organic binder is thermally decomposed by heat treatment after molding, but if carbon derived from the organic binder remains, the formation of oxides of M elements is suppressed in the oxide phase between the alloy particles formed by high-temperature oxidation, and the M elements In some cases, the ratio of Fe oxide or the like is higher than that of the oxide, and the electric resistance of the dust core is lowered. For this reason, it is preferable to remove the binder under conditions such that residual carbon is not generated as much as possible, for example, by slowing the rate of temperature rise in a temperature range including the decomposition temperature of the organic binder.
 更に無機バインダとしてシリコーン樹脂を有機バインダとともに用いても良い。シリコーン樹脂を併用する場合の酸化物相はSiを含むものとなる。 Furthermore, a silicone resin may be used together with an organic binder as an inorganic binder. When the silicone resin is used in combination, the oxide phase contains Si.
 バインダの添加量は、軟磁性材料粉間に十分に行きわたり、十分な成形体強度を確保できる量にすればよい。一方、これが多すぎると密度や強度が低下するようになる。例えば、軟磁性材料粉100重量部に対して、0.25~3.0重量部にすることが好ましい。 The amount of the binder added may be an amount that can be sufficiently distributed between the soft magnetic material powders and can secure a sufficient compact strength. On the other hand, if the amount is too large, the density and strength are lowered. For example, the amount is preferably 0.25 to 3.0 parts by weight with respect to 100 parts by weight of the soft magnetic material powder.
 第1の工程における軟磁性材料粉とバインダとの混合方法はこれを特に限定するものではないが、アトライタ等の混合・分散装置を用いるのが好ましい。 The mixing method of the soft magnetic material powder and the binder in the first step is not particularly limited, but it is preferable to use a mixing / dispersing device such as an attritor.
 混合して得られた混合物は、成形性等の観点から、造粒プロセスに供することが好ましい。かかる造粒プロセスにも種々の方法が適用可能であるが、造粒方法として噴霧乾燥工程を有することが、特に好ましい。かかる噴霧乾燥工程では、軟磁性材料粉およびバインダと、さらに水等の溶媒を含むスラリー状の混合物を、スプレードライヤを用いて噴霧乾燥する。噴霧乾燥によれば、粒径分布がシャープで、平均粒径が小さい造粒粉が得られる。噴霧乾燥によれば、略球形の造粒粉を得ることができるので、成形の際の給粉性(粉の流動性)も高くなる。造粒粉の平均粒径(メジアン径d50)は軟磁性材料粉の合金粒子の平均粒径にもよるが、40~150μmが好ましく、60~100μmがより好ましい。 The mixture obtained by mixing is preferably subjected to a granulation process from the viewpoint of moldability and the like. Various methods can be applied to the granulation process, but it is particularly preferable to have a spray drying step as the granulation method. In the spray drying step, a slurry-like mixture containing soft magnetic material powder and binder and a solvent such as water is spray dried using a spray dryer. By spray drying, a granulated powder having a sharp particle size distribution and a small average particle size can be obtained. According to spray drying, a substantially spherical granulated powder can be obtained, so that the powder feeding property (powder fluidity) during molding is also improved. The average particle diameter (median diameter d50) of the granulated powder is preferably 40 to 150 μm, more preferably 60 to 100 μm, although it depends on the average particle diameter of the alloy particles of the soft magnetic material powder.
 造粒方法として転動造粒等の方法を適用しても良い。転動造粒で得られる造粒粉は広い粒度分布をもった凝集粉となっているが、かかる造粒粉を、例えば振動篩等を用いて篩に通すことによって、加圧成形に適した所望の造粒粉を得ることができる。 A method such as rolling granulation may be applied as the granulation method. The granulated powder obtained by rolling granulation is an agglomerated powder having a wide particle size distribution, but it is suitable for pressure molding by passing the granulated powder through a sieve using, for example, a vibrating sieve. Desired granulated powder can be obtained.
 加圧成形時の粉末と金型との摩擦を低減させるために、ステアリン酸、ステアリン酸塩、ステアリン酸亜鉛等の潤滑剤を造粒粉に添加することが好ましい。潤滑剤の添加量は、軟磁性材料粉100重量部に対して0.1~2.0重量部とすることが好ましい。一方、潤滑剤は、金型に塗布する、または吹き付けることも可能である。潤滑剤を用いる場合には、潤滑剤由来のZn等が前記酸化物相に含まれる。 In order to reduce friction between the powder and the mold during pressure molding, it is preferable to add a lubricant such as stearic acid, stearate, zinc stearate to the granulated powder. The addition amount of the lubricant is preferably 0.1 to 2.0 parts by weight with respect to 100 parts by weight of the soft magnetic material powder. On the other hand, the lubricant can be applied to or sprayed on the mold. When the lubricant is used, Zn derived from the lubricant is included in the oxide phase.
〔第2の工程〕
 次に、第1の工程を経て得られた造粒粉を加圧成形する第2の工程について説明する。第1の工程で得られた造粒粉は、好適には上述のように造粒されていて、第2の工程に供される。造粒粉は、成形金型を用いて円柱形状、直方体形状、トロイダル形状、E形状、U形状、ピン形状、或いはドラム形状等の所定形状に加圧成形される。第2の工程における成形は、室温成形でもよいし、有機バインダが消失しない程度に加熱して行う温間成形でもよい。
[Second step]
Next, the 2nd process of press-molding the granulated powder obtained through the 1st process is explained. The granulated powder obtained in the first step is preferably granulated as described above and provided for the second step. The granulated powder is pressure-molded into a predetermined shape such as a cylindrical shape, a rectangular parallelepiped shape, a toroidal shape, an E shape, a U shape, a pin shape, or a drum shape using a molding die. The molding in the second step may be room temperature molding or warm molding performed by heating to such an extent that the organic binder does not disappear.
 図4は、加圧成形を説明するための図であり、図5は加圧成形により得られる成形体の外観を示す斜視図である。成形金型は成形体の形状等によって様々な態様を採り得るが、図示した例では、矩形平板状の成形体を加圧成形するための成形金型の構成を示している。図4に示すように成形金型200は上パンチ201と、下パンチ202と、及びダイ205とを備えている。ダイ205の中央部には上パンチ201と下パンチ202とを挿入可能な開口が設けられている、ダイ205の開口に下パンチ202を組み合わせて現われるキャビティに造粒粉300が充填される。前記キャビティを塞ぐように上パンチ201をダイ205の開口に挿入する。一対の上下パンチ201、202が互いに近づくように図中Z方向に造粒粉を加圧して所定の形状に成形する。Z方向に上下パンチ201、202が互いに遠ざかるように加圧力を抜き、更にダイ205の上側に成形体100が現われるように、下パンチ202をZ方向に移動させ成形体100を離型して成形金型から取り出す。 FIG. 4 is a view for explaining pressure molding, and FIG. 5 is a perspective view showing an appearance of a molded body obtained by pressure molding. The molding die can take various forms depending on the shape of the molded body and the like. However, in the illustrated example, the configuration of the molding die for press-molding a rectangular flat plate-shaped molded body is shown. As shown in FIG. 4, the molding die 200 includes an upper punch 201, a lower punch 202, and a die 205. An opening into which the upper punch 201 and the lower punch 202 can be inserted is provided at the center of the die 205. The granulated powder 300 is filled in a cavity that appears when the lower punch 202 is combined with the opening of the die 205. An upper punch 201 is inserted into the opening of the die 205 so as to close the cavity. The granulated powder is pressed in the Z direction in the figure so that the pair of upper and lower punches 201 and 202 come closer to each other, and is formed into a predetermined shape. The upper and lower punches 201 and 202 are pulled away from each other in the Z direction, and the lower punch 202 is moved in the Z direction so that the molded body 100 appears on the upper side of the die 205, and the molded body 100 is released and molded. Remove from mold.
 図5に示すように、得られた矩形平板状の成形体100の表面には、上下パンチ201、202で押されて形成された加圧面102と、ダイ205と当接した面であって、成形体100を離型する際にダイ205の表面を摺動する摺接面101が現われる。 As shown in FIG. 5, the surface of the obtained rectangular flat plate-shaped molded body 100 is a surface that is pressed by upper and lower punches 201 and 202 and a surface that is in contact with a die 205, When the molded body 100 is released, a sliding contact surface 101 that slides on the surface of the die 205 appears.
 図6は成形体の摺接面を走査電子顕微鏡(SEM:Scanning Electron Microscope)で観察したSEM写真である。成形体100の摺接面101には、図5のZ方向(図6では写真の上下方向)に、成形体100の加圧面102の2面間に亘って直線状の筋状痕50が複数形成される。成形圧力が増すとともに筋状痕50の数も増加し、複数の筋状痕50が連なって繋がり導電部として面状に現われる。図7Aは成形体の摺接面を拡大して観察したSEM写真であり、図7Bは明確な筋状痕が確認されない表面部分(図7A中の実線で囲まれた領域)を拡大して観察したSEM写真であり、図7Cは明確な筋状痕が形成された表面部分(図7A中の破線で囲まれた領域)を拡大して観察したSEM写真である。図中、軟磁性材料粉の合金の粒子が明色に観察され、合金の粒子間にバインダや空孔の部分が相対的に暗色に観察される。成形体100の筋状痕50が形成された表面部分を拡大して観察すると、図7Cに示すように、Z方向に複数の合金の粒子が直接接触する領域(導電部)が観察される。また、図7Bに示すように、摺接面101には明確には筋状痕50として観察されないが相対的に小さな領域では、合金の粒子同士が直接接触する部分も存在するのが確認された。なお成形体100の加圧面102には上下パンチ201、202の面状態が転写されるが、摺接面101のような筋状痕50は観察されない。 FIG. 6 is an SEM photograph in which the sliding surface of the molded body is observed with a scanning electron microscope (SEM: Scanning Electron Microscope). A plurality of linear streak marks 50 are formed on the sliding contact surface 101 of the molded body 100 across the two surfaces of the pressing surface 102 of the molded body 100 in the Z direction of FIG. 5 (the vertical direction of the photograph in FIG. 6). It is formed. As the molding pressure increases, the number of streak marks 50 increases, and a plurality of streak marks 50 are connected and appear in a planar shape as a conductive portion. FIG. 7A is an SEM photograph in which the sliding contact surface of the molded body is enlarged and observed, and FIG. 7B is an enlarged view of a surface portion (a region surrounded by a solid line in FIG. 7A) where no clear streak is confirmed. FIG. 7C is an SEM photograph obtained by magnifying and observing a surface portion (a region surrounded by a broken line in FIG. 7A) on which clear streak marks are formed. In the figure, particles of the soft magnetic material powder alloy are observed in a light color, and a binder or a void portion is observed in a relatively dark color between the alloy particles. When the surface portion of the molded body 100 where the streak-like marks 50 are formed is observed in an enlarged manner, as shown in FIG. 7C, a region (conductive portion) where a plurality of alloy particles are in direct contact in the Z direction is observed. Further, as shown in FIG. 7B, it was confirmed that there is a portion where the alloy particles are in direct contact with each other in a relatively small region, although it is not clearly observed as the streak 50 on the sliding contact surface 101. . In addition, although the surface state of the upper and lower punches 201 and 202 is transferred to the pressing surface 102 of the molded body 100, the streak marks 50 like the sliding contact surface 101 are not observed.
〔第3の工程〕
 次に、前記第2の工程を経た成形体を熱処理する第3の工程について説明する。第3の工程において前記成形体を酸化雰囲気中で熱処理することによって、成形時に合金の粒子に加えられた応力歪を緩和するアニールを行なうとともに、酸化による酸化物形成(高温酸化)も行なって、圧粉磁心の内部と表面に酸化物を形成する。圧粉磁心の内部では合金の粒子がM元素を含む酸化物相を介して結合される。合金の粒子間に介在する酸化物相や表面の酸化物は前記熱処理によって合金の粒子の表面酸化によって形成されるが、合金組成や熱処理条件によって構成が異なるものとなる。
[Third step]
Next, the 3rd process of heat-processing the molded object which passed through the said 2nd process is demonstrated. In the third step, the molded body is heat-treated in an oxidizing atmosphere to perform annealing to relieve stress strain applied to the alloy particles during molding, and also perform oxide formation by oxidation (high-temperature oxidation). Oxides are formed inside and on the surface of the dust core. Inside the dust core, alloy particles are bonded via an oxide phase containing M element. The oxide phase and the surface oxide intervening between the alloy particles are formed by the surface oxidation of the alloy particles by the heat treatment, but the structure differs depending on the alloy composition and heat treatment conditions.
 合金の粒子間に介在する酸化物相は、例えばFe-Al系の合金であればAlが濃化したものとなり、酸化物はAlの他にFeとAlが固溶したコランダム型の酸化物((Fe,Al))、FeO、Fe、Fe等が存在しても良い。また、Fe-Cr系の合金であれば、合金の粒子間に介在する酸化物相はCrが濃化したものとなり、酸化物はCrの他にFeとCrが固溶したコランダム型の酸化物((Fe,Cr))、FeO、Fe、Fe等が存在しても良い。またFe-Al-Cr系の合金であってCrよりもAlを多く含むのであれば、合金の粒子間に介在する酸化物相はAlが濃化したものとなり、酸化物はAlの他にFeとAlとCrが固溶したコランダム型の酸化物((Fe,Al,Cr))、Cr、FeO、Fe、Fe等が存在しても良い。更に合金にSiを含む場合においても酸化物相にSiの酸化物を含む場合がある。ここでM元素が濃化するとは、合金組成における比率よりもFe、M元素の和に対するM元素の比率が高いことを意味する。 The oxide phase intervening between the alloy particles is, for example, an Al-concentrated alloy in the case of an Fe—Al alloy, and the oxide is a corundum type in which Fe and Al are dissolved in addition to Al 2 O 3 . Oxides ((Fe, Al) 2 O 3 ), FeO, Fe 2 O 3 , Fe 3 O 4 and the like may be present. Further, in the case of an Fe-Cr alloy, the oxide phase intervening between the alloy particles is enriched with Cr, and the oxide is a corundum type in which Fe and Cr are dissolved in addition to Cr 2 O 3. Oxide ((Fe, Cr) 2 O 3 ), FeO, Fe 2 O 3 , Fe 3 O 4, etc. may be present. If the alloy is an Fe-Al-Cr alloy and contains more Al than Cr, the oxide phase intervening between the alloy particles will be Al-concentrated, and the oxide will be Al 2 O 3 . In addition, there are corundum type oxides ((Fe, Al, Cr) 2 O 3 ), Cr 2 O 3 , FeO, Fe 2 O 3 , Fe 3 O 4, etc. in which Fe, Al, and Cr are dissolved. Also good. Furthermore, even when Si is contained in the alloy, an oxide of Si may be contained in the oxide phase. Here, the concentration of the M element means that the ratio of the M element to the sum of the Fe and M elements is higher than the ratio in the alloy composition.
 酸素を含む雰囲気にて成形体を所定の温度で高温酸化させると、圧粉磁心の表面では、Oに対して親和力の大きいM元素及びFeの酸化物が形成され、圧粉磁心の内部側では、酸化物相にはOとの親和力が大きいM元素が濃化する。高温酸化による合金由来の酸化物の生成過程については複雑で、メカニズムについて未解明で理由は明らかではないが、各元素の酸素(O)との親和力やイオン半径、酸化過程における酸素分圧等が影響すると推察される。軟磁性材料粉を構成するAlやCrであるM元素は、FeよりもOとの親和力が大きく、AlはCrよりもOとの親和力が大きいM元素としてAlとCrを含む場合には、CrよりもAlを多く含む組成であれば酸化物相にはAlが濃化する。このような酸化物が軟磁性材料粉の合金の粒子表面を覆い、更に合金の粒子間を充填して粒子間を強固に繋ぐとともに粒子間の絶縁層として機能する。 When the molded body is oxidized at a predetermined temperature in an atmosphere containing oxygen at a predetermined temperature, an oxide of M element and Fe having a high affinity for O is formed on the surface of the powder magnetic core, and on the inner side of the powder magnetic core. In the oxide phase, M element having a large affinity with O is concentrated. The formation process of oxides derived from alloys by high-temperature oxidation is complicated and the mechanism is unclear and the reason is not clear. However, the affinity of each element with oxygen (O), the ion radius, the oxygen partial pressure in the oxidation process, etc. Inferred to have an effect. The M element which is Al or Cr constituting the soft magnetic material powder has a greater affinity with O than Fe, and Al contains Al and Cr as M elements having a greater affinity with O than Cr. If the composition contains a larger amount of Al than that, Al is concentrated in the oxide phase. Such an oxide covers the particle surface of the alloy of the soft magnetic material powder, and further fills the space between the particles of the alloy to firmly connect the particles and functions as an insulating layer between the particles.
 前述の図1に示した圧粉磁心の断面SEM写真から、圧粉磁心の表面は、2層で構成された多層の組織であるFeの層状酸化物150で覆われた領域と覆われていない領域が観察される。この様な構成の相違について検討したところ、Feの層状酸化物で覆われた領域と圧粉磁心の摺接面の筋状痕が形成された領域とが良く一致し、筋状痕の領域において多層組織である層状酸化物が選択的に形成されることが判明した。また、SEM/EDX(EDX:Scanning Electron Microscope/energy dispersive X-ray spectroscopy)での組成マッピングによれば、圧粉磁心の表面に位置し、Feの層状酸化物で覆われていない領域250(図1参照)の合金の粒子表面は前記酸化物相のようなM元素が濃化した酸化物で覆われていた。 From the cross-sectional SEM photograph of the powder magnetic core shown in FIG. 1 described above, the surface of the powder magnetic core is not covered with the region covered with the layered oxide 150 of Fe, which is a multilayer structure composed of two layers. A region is observed. As a result of examining such a difference in configuration, the region covered with the layered oxide of Fe and the region where the streak traces of the sliding surface of the dust core were in good agreement, It has been found that a layered oxide having a multilayer structure is selectively formed. Further, according to composition mapping in SEM / EDX (EDX: Scanning Electron Microscope / energy dispersive X-ray spectroscopy), the region 250 located on the surface of the dust core and not covered with the layered oxide of Fe (Fig. The particle surface of the alloy (see 1) was covered with an oxide enriched with M element such as the oxide phase.
 詳細は後述するが、多層組織であるFeの層状酸化物150はSEM/EDXのマッピングによれば、Feを主体とする酸化物であって、第1の酸化物層150aと、前記第1酸化物150aよりも前記M元素(Al、Cr)を多く含む第2の酸化物層150bとを有し、前記圧粉磁心の表面から第2の酸化物層150b、第1の酸化物層150aの順で密着して重なるように形成されている。圧粉磁心の表面に、Feを主体とし、かつ多層の組織である層状酸化物150が形成されるが、この理由は、合金の粒子3が、その表面の酸化被膜の塑性変形によって破壊されていることに加えて、圧粉磁心の内部に比べて高温酸化におけるOの供給が十分に行なわれることによるものと推察される。 Although details will be described later, the layered oxide 150 of Fe having a multilayer structure is an oxide mainly composed of Fe according to SEM / EDX mapping, and includes the first oxide layer 150a and the first oxidation layer. A second oxide layer 150b containing more M element (Al, Cr) than the product 150a, and the second oxide layer 150b and the first oxide layer 150a from the surface of the dust core. It is formed so as to be in close contact with each other in order. The layered oxide 150 mainly composed of Fe and having a multilayer structure is formed on the surface of the dust core. This is because the alloy particles 3 are destroyed by plastic deformation of the oxide film on the surface. In addition to this, it is presumed that O is sufficiently supplied during high-temperature oxidation compared to the inside of the dust core.
 更にそれぞれの層に対して点分析を行い、組成分の定量を行った結果、第1の酸化物層150aはFeを主体とし微量のAl、Crを含む酸化物であってコランダム構造の(Fe,Al,Cr)又はFeであり、第2の酸化物層150bは相対的にAl、Crを多く含む酸化物であって、逆スピネル構造の(Fe,Al,Cr)となっていた。図2の圧粉磁心の断面SEM写真の観察によれば、第2の酸化物層150bは圧粉磁心の表面に位置する合金の粒子3間に跨るようにして凹凸を埋めており、その上層に厚さが3μm程度の第1の酸化物層150aが形成されている。Feを主体とする層状酸化物150は強固に圧粉磁心に密着していて、第2の酸化物層150bはその密着性の向上に寄与している。 Furthermore, as a result of performing point analysis on each layer and quantifying the composition, the first oxide layer 150a is an oxide mainly containing Fe and containing a small amount of Al and Cr and having a corundum structure (Fe , Al, Cr) 2 O 3 or Fe 2 O 3 , and the second oxide layer 150b is an oxide that contains a relatively large amount of Al and Cr and has a reverse spinel structure (Fe, Al, Cr). 3 has been a O 4. According to the observation of the cross-sectional SEM photograph of the powder magnetic core in FIG. 2, the second oxide layer 150b is filled with irregularities so as to straddle between the alloy particles 3 located on the surface of the powder magnetic core, and the upper layer thereof. A first oxide layer 150a having a thickness of about 3 μm is formed. The layered oxide 150 mainly composed of Fe is firmly adhered to the dust core, and the second oxide layer 150b contributes to the improvement of the adhesion.
 熱処理は、大気中、酸素と不活性ガスの混合気体中など、酸素が存在する雰囲気中で行うことができる。これらのうち大気中の熱処理が簡便であり好ましい。また、熱処理雰囲気の圧力もこれを特に限定するものではないが、圧力制御を必要としない大気圧下が好ましい。第3の工程の熱処理は、上記酸化物層が形成される温度で行えばよいが、軟磁性材料粉が著しく焼結しない温度で行うことが好ましい。軟磁性材料粉の焼結が進むと、合金の粒子間が繋がるネッキングが生じて電気抵抗が低下する。磁心損失が大きくなるのを防ぐと共に、合金の粒子間の酸化物相やFeを主体とする層状酸化物150を形成するのに具体的には、700~900℃の範囲が好ましく、700~800℃の範囲がより好ましい。保持時間は、圧粉磁心の大きさ、処理量、特性ばらつきの許容範囲などによって適宜設定され、例えば0.5~3時間が好ましい。また前記ピーク温度と時間で等温酸化を経た後に室温まで冷却するが、前述の構成のFeを主体とする層状酸化物150とするには、更にピーク温度から200℃までの間の降温速度を300℃/hr以上とするのが好ましい。降温速度が遅いとFeを主体とする層状酸化物150が二層構造とならず、電気抵抗の向上の効果が得られなかったり、Feを主体とする層状酸化物150の圧粉磁心への密着性が弱まったりする場合がある。 The heat treatment can be performed in an atmosphere in which oxygen exists, such as in the air or in a mixed gas of oxygen and an inert gas. Of these, heat treatment in the air is simple and preferable. Further, the pressure of the heat treatment atmosphere is not particularly limited, but is preferably an atmospheric pressure that does not require pressure control. The heat treatment in the third step may be performed at a temperature at which the oxide layer is formed, but is preferably performed at a temperature at which the soft magnetic material powder is not significantly sintered. As the sintering of the soft magnetic material powder proceeds, necking that connects the alloy particles occurs, and the electrical resistance decreases. Specifically, in order to prevent an increase in magnetic core loss and to form an oxide phase between alloy particles and a layered oxide 150 mainly composed of Fe, a range of 700 to 900 ° C. is preferable, and 700 to 800 is preferable. A range of ° C is more preferred. The holding time is appropriately set depending on the size of the dust core, the processing amount, the allowable range of characteristic variation, and the like, and preferably 0.5 to 3 hours, for example. Further, after isothermal oxidation is performed at the peak temperature and time, cooling is performed to room temperature. In order to obtain the layered oxide 150 mainly composed of Fe having the above-described configuration, a temperature decreasing rate from the peak temperature to 200 ° C. is set to 300 ° C. It is preferable to set it to at least ° C / hr. When the temperature decreasing rate is slow, the layered oxide 150 mainly composed of Fe does not have a two-layer structure, and the effect of improving the electric resistance cannot be obtained, or the layered oxide 150 mainly composed of Fe adheres to the dust core. Sexuality may be weakened.
 熱処理を経た圧粉磁心における軟磁性材料粉が占める割合である占積率を80~95%の範囲内にすることがより好ましい。かかる範囲が好ましい理由は、占積率を高めることで磁気特性が向上する一方、過度に占積率を高めようとすると、成形体内部にクラックが生じやすくなるためである。さらに好ましい占積率の範囲は、84~92%である。上記のようにして得られる圧粉磁心は、圧粉磁心自体優れた効果を発揮する。すなわち、高い絶縁性と優れた耐食性が実現される。 More preferably, the space factor, which is the ratio of the soft magnetic material powder in the dust core subjected to heat treatment, is in the range of 80 to 95%. The reason why such a range is preferable is that increasing the space factor improves the magnetic properties, but if the space factor is excessively increased, cracks tend to occur inside the molded body. A more preferable range of the space factor is 84 to 92%. The dust core obtained as described above exhibits an excellent effect of the dust core itself. That is, high insulation and excellent corrosion resistance are realized.
 以下のようにして、まず圧粉磁心の製造に用いる軟磁性材料粉として、質量百分率で91.0%Fe-5.0%Al-4.0%Crの合金組成を有するFe-Al-Cr系合金である軟磁性材料粉を準備した。その軟磁性材料粉は球状の水アトマイズ粉であって、合金表面には10nm程度の厚さでAlからなる自然酸化被膜が形成されている。軟磁性材料粉をレーザー回折散乱式粒度分布測定装置(堀場製作所製LA-920)で測定した平均粒径(メジアン径d50)は18.5μmであった。 First, as a soft magnetic material powder used for the production of a dust core, Fe-Al-Cr having an alloy composition of 91.0% Fe-5.0% Al-4.0% Cr in terms of mass percentage is as follows. A soft magnetic material powder, which is a base alloy, was prepared. The soft magnetic material powder is a spherical water atomized powder, and a natural oxide film made of Al 2 O 3 having a thickness of about 10 nm is formed on the alloy surface. The average particle diameter (median diameter d50) of the soft magnetic material powder measured with a laser diffraction / scattering particle size distribution analyzer (LA-920, manufactured by Horiba, Ltd.) was 18.5 μm.
 前記軟磁性材料粉100重量部に対して、バインダとしてPVA(株式会社クラレ製ポバールPVA-205;固形分10%)を2.5重量部の割合で混合した(第1の工程)。得られた混合物を120℃で1時間乾燥した後、篩に通して造粒粉を得て、造粒粉100重量部に対して、ステアリン酸亜鉛を0.4重量部添加し、混合して、加圧成形に供する混合物を得た。得られた混合物を、プレス機を使用して0.8GPaの成形圧で室温にて加圧成形し、円板状の成形体を得た(第2の工程)。得られた成形体の寸法はφ6.5×5mmである。成形体で評価した占積率と密度は84.9%、6.22×10kg/mであった。成形体の対向する平坦面が成形金型のパンチと当接する加圧面となり、平坦面を繋ぐ周面がダイと当接する摺接面となる。金属顕微鏡による目視の確認では、加圧面は離型時に生じる筋状痕は確認されなかったが、摺接面では成形体の厚み方向に多数の筋状痕が生じていて互いに繋がり、合金粒子が直接接触する領域(導電部)が面状に観察された。成形体を10試料作成したが、いずれも導電部の領域は摺接面の全面積に対しておよそ70%であった。 To 100 parts by weight of the soft magnetic material powder, PVA (Poval PVA-205 manufactured by Kuraray Co., Ltd .; solid content 10%) as a binder was mixed at a ratio of 2.5 parts by weight (first step). The obtained mixture was dried at 120 ° C. for 1 hour and then passed through a sieve to obtain granulated powder. To 100 parts by weight of the granulated powder, 0.4 part by weight of zinc stearate was added and mixed. A mixture for pressure molding was obtained. The obtained mixture was subjected to pressure molding at room temperature with a molding pressure of 0.8 GPa using a press machine to obtain a disk-shaped molded body (second step). The dimension of the obtained molded body is φ6.5 × 5 mm. The space factor and density evaluated by the molded body were 84.9% and 6.22 × 10 3 kg / m 3 . The opposing flat surface of the molded body is a pressing surface that comes into contact with the punch of the molding die, and the peripheral surface connecting the flat surfaces is a sliding contact surface that comes into contact with the die. In the visual confirmation with the metal microscope, no streak marks were observed on the pressing surface during mold release, but on the sliding contact surface, many streak marks were formed in the thickness direction of the molded body and connected to each other, and the alloy particles A region (conductive portion) in direct contact was observed in a planar shape. Ten samples of the molded body were prepared. In any case, the area of the conductive portion was approximately 70% with respect to the total area of the sliding contact surface.
 成形体を大気中、800℃の熱処理温度で1.0時間熱処理を施し、室温まで375℃/hrで降温して円板状の圧粉磁心を得た(第3の工程)。熱処理後の圧粉磁心で評価した占積率と密度は88.9%、6.40×10kg/mであった。 The compact was heat treated in the atmosphere at a heat treatment temperature of 800 ° C. for 1.0 hour, and the temperature was lowered to room temperature at 375 ° C./hr to obtain a disk-shaped dust core (third step). The space factor and density evaluated by the dust core after the heat treatment were 88.9% and 6.40 × 10 3 kg / m 3 .
 電気抵抗の評価として、円板状の圧粉磁心の比抵抗を測定した。まず圧粉磁心の両端の二平面(加圧面)に導電性接着剤を塗り、乾燥・固化して測定物を作製した。被測定物を電極の間にセッ卜し、電気抵抗測定装置(株式会社エーディーシー製8340A)を用いて、50Vの直流電圧を印加して、抵抗値R(Ω)を測定した。被測定物の平面の面積A(m)と厚みt(m)と抵抗値R(Ω)とから、次式により比抵抗ρ(Ωm)を算出した。
   比抵抗ρ(Ωm)=R×(A/t)
As an evaluation of electrical resistance, the specific resistance of a disk-shaped dust core was measured. First, a conductive adhesive was applied to two flat surfaces (pressurized surfaces) at both ends of the powder magnetic core, dried and solidified, and a measurement object was prepared. An object to be measured was set between the electrodes, and a resistance value R (Ω) was measured by applying a DC voltage of 50 V using an electric resistance measuring device (8340A manufactured by ADC Corporation). From the planar area A (m 2 ), thickness t (m), and resistance value R (Ω) of the object to be measured, the specific resistance ρ (Ωm) was calculated by the following equation.
Specific resistance ρ (Ωm) = R × (A / t)
 熱処理を行なっていない成形体ではいずれも比抵抗が導通状態となったが、実施例の圧粉磁心では比抵抗が1×10Ωm~1×10Ωmとなり、絶縁性が向上した。 Although the specific resistance of each of the molded bodies not subjected to heat treatment was in a conductive state, the specific resistance was 1 × 10 2 Ωm to 1 × 10 3 Ωm in the dust core of the example, and the insulation was improved.
 実施例の圧粉磁心の厚み方向の断面を観察するとともに、各構成元素の分布を、SEMを用いて調べた。図8A~図8Eに図2に示した圧粉磁心断面のSEM写真と対応視野での元素分布を表すマッピング図を示す。図8Aは発明に係る圧粉磁心の断面のSEM写真であり、図8BはFeの分布を示すマッピング図であり、図8CはAlの分布を示すマッピング図であり、図8DはCrの分布を示すマッピング図であり、図8EはOの分布を示すマッピング図である。SEM写真において、明度が高い部分が軟磁性材料粉の合金粒子であり、低い部分は粒界部あるいは空隙部である。また、マッピング図においては明るい色調ほど対象元素が多いことを示す。図8Cより軟磁性材料粉の合金の粒子表面でAlの濃度が高くなっていて、またOが多く、酸化物が形成されていること、および各合金粒同士がこの酸化物を粒界として結合している様子がわかる。Alは軟磁性材料粉の合金粒子間(粒界)での濃度が顕著に高くなっている。また、図8B、図8Dより粒界では合金粒子の内部に比べてFeの濃度が低く、Crは大きな濃度分布を示していない。これらのことから、粒界に該軟磁性材料粉の含有元素を含む酸化物相が形成され、該酸化物相は合金よりもFe、AlおよびCrの和に対するAlの比率が高い酸化物であることが確認された。熱処理前は、このような各構成元素の濃度分布は観察されず、上記酸化物相が、熱処理によって形成されたこともわかった。また、Alの比率が高い各粒界の酸化物は互いに連結し、前記酸化物相は磁性体表面の合金粒子にも形成されていた。 While observing a cross section in the thickness direction of the dust core of the example, the distribution of each constituent element was examined using an SEM. 8A to 8E show SEM photographs of the cross section of the dust core shown in FIG. 2 and mapping diagrams showing the element distribution in the corresponding visual field. 8A is a SEM photograph of a cross section of the dust core according to the invention, FIG. 8B is a mapping diagram showing the distribution of Fe, FIG. 8C is a mapping diagram showing the distribution of Al, and FIG. 8D shows the distribution of Cr. FIG. 8E is a mapping diagram showing the O distribution. In the SEM photograph, the portion with high brightness is an alloy particle of soft magnetic material powder, and the portion with low brightness is a grain boundary portion or a void portion. In the mapping diagram, the brighter color tone indicates that there are more target elements. As shown in FIG. 8C, the Al concentration is high on the surface of the alloy of the soft magnetic material powder, and there is a lot of O and oxides are formed, and the alloy grains are bonded to each other with the oxides as grain boundaries. You can see how they are doing. Al has a remarkably high concentration between the alloy particles (grain boundaries) of the soft magnetic material powder. 8B and 8D, the concentration of Fe is lower at the grain boundaries than the inside of the alloy particles, and Cr does not show a large concentration distribution. As a result, an oxide phase containing the element contained in the soft magnetic material powder is formed at the grain boundary, and the oxide phase is an oxide having a higher ratio of Al to the sum of Fe, Al, and Cr than the alloy. It was confirmed. Prior to the heat treatment, such a concentration distribution of each constituent element was not observed, and it was also found that the oxide phase was formed by the heat treatment. In addition, the oxides at the grain boundaries having a high Al ratio were connected to each other, and the oxide phase was also formed on the alloy particles on the surface of the magnetic material.
 また、摺接面の筋状痕に対応する部位である圧粉磁心の表面側では、Feの濃度が高く、またOが多くて、Feを主体とする層状酸化物が形成されていること、Feの層状酸化物を主体とする酸化物層は層状となっていて、明度の異なる2層となっていることがわかる。また、表1に示すように2層の酸化物層のうち、下層の第2酸化物層ではAlやCrを多く含むとともに、Alが濃化して観察される。そして第2酸化物層と合金の粒子との間にはAlが濃化した酸化物相がある。 Further, on the surface side of the powder magnetic core, which is a part corresponding to the streak marks on the sliding contact surface, the concentration of Fe is high, and there is much O, and a layered oxide mainly composed of Fe is formed, It can be seen that the oxide layer mainly composed of Fe layered oxide is layered and has two layers with different brightness. Moreover, as shown in Table 1, among the two oxide layers, the lower second oxide layer contains a large amount of Al and Cr, and Al is concentrated and observed. There is an oxide phase in which Al is concentrated between the second oxide layer and the alloy particles.
 Feを主体とする多層組織の酸化物層(第1酸化物層、第2層酸化物層)と軟磁性材料粉の合金粒子について、Oと、軟磁性材料粉の構成元素であるFe、Al、CrとについてSEM/EDXの点分析により組成を定量した。図8A中のスペクトル4は第1酸化物層での測定点であり、スペクトル5は第2酸化物層での測定点であり、スペクトル7は合金の粒子の測定点である。結果を表1に示す。外層の第1酸化物層は実質的にFeを主体とする層状酸化物で構成されている。また内層の第2酸化物層にはAl、Crを多く含むことが分かる。 Regarding the alloy particles of the oxide layer (first oxide layer, second layer oxide layer) of the multilayer structure mainly composed of Fe and soft magnetic material powder, O and Fe, Al which are constituent elements of the soft magnetic material powder , Cr and the composition were quantified by SEM / EDX point analysis. Spectrum 4 in FIG. 8A is a measurement point in the first oxide layer, spectrum 5 is a measurement point in the second oxide layer, and spectrum 7 is a measurement point of alloy particles. The results are shown in Table 1. The outer first oxide layer is substantially composed of a layered oxide mainly composed of Fe. It can also be seen that the inner second oxide layer contains a large amount of Al and Cr.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 熱処理前の成形体では、このような各構成元素の濃度分布は観察されず、第1酸化物層と第2酸化物層がともに熱処理によって形成されたこともわかった。 In the compact before the heat treatment, such a concentration distribution of each constituent element was not observed, and it was also found that both the first oxide layer and the second oxide layer were formed by the heat treatment.
 走査型広がり抵抗顕微鏡法(SSRM;Scanning Spreading Resistance Microscopy)により、圧粉磁心の断面の広がり抵抗を測定した。広がり抵抗は、バイアスが印加された試料の表面を導電性探針で走査し、抵抗値の分布を二次元的に計測することで探針直下の広がり抵抗を可視化することで測定されるものである。このような局所的な抵抗を広がり抵抗と呼び、抵抗値の高低が色の明暗で表示される。この広がり抵抗は、第1の酸化物層と第2の酸化物層のそれぞれについて測定され得るものであって、電気抵抗の相対的な大小関係を明らかにすることが出来る。Bruker AXS社 Digital Instruments製 の原子間力顕微鏡(AFM:Atomic Force Microscope)NanoScope IVa AFM Dimension 3100 ステージAFM システム+ SSRM オプションを用いて測定した。図9にSSRM写真を示す。色調の差から第1酸化物層よりも第2酸化物層の広がり抵抗が小さく、第1酸化物層は合金の粒子よりも高抵抗であることが確認できた。Feを主体とする層状酸化物の密着性に寄与する第2の酸化物層150bが相対的に低抵抗であっても、高抵抗の第1酸化物層でカバーされる構成であるので、圧粉磁心の表面にめっきにより直接電極を形成する場合に、めっきの伸びを抑制するのに有利である。 The spreading resistance of the cross-section of the dust core was measured by scanning spreading resistance microscopy (SSRM) (Scanning Spreading Resistance Microscopy). The spreading resistance is measured by visualizing the spreading resistance directly under the probe by scanning the surface of the sample to which a bias is applied with a conductive probe and measuring the distribution of resistance values two-dimensionally. is there. Such local resistance is spread and called resistance, and the level of the resistance value is displayed by the brightness of the color. The spreading resistance can be measured for each of the first oxide layer and the second oxide layer, and the relative magnitude relationship of the electrical resistance can be clarified. It was measured using an atomic force microscope (AFM: NanoScope IVa AFM Dimension 3100 stage AFM system + SSRM option, manufactured by Bruker AXS, Digital Instruments. FIG. 9 shows an SSRM photograph. From the difference in color tone, it was confirmed that the spreading resistance of the second oxide layer was smaller than that of the first oxide layer, and that the first oxide layer had higher resistance than the alloy particles. Even if the second oxide layer 150b that contributes to the adhesion of the layered oxide mainly composed of Fe has a relatively low resistance, the second oxide layer 150b is covered with the first oxide layer having a high resistance. When the electrode is directly formed on the surface of the powder magnetic core by plating, it is advantageous for suppressing the elongation of the plating.
 また、別途塩水噴霧試験によって耐食性を評価した。塩水噴霧試験はJIS 22371(2000)に基づいて、5%NaCl水溶液を使用し、35℃、24時間の条件で、前記の圧粉磁心を晒して行った。目視確認の結果、試験後の圧粉磁心の表面に赤錆の発生は確認されず、高温酸化による酸化物の形成によって良好な耐食性を示した。 In addition, corrosion resistance was evaluated separately by a salt spray test. The salt spray test was performed based on JIS 22371 (2000) by using a 5% NaCl aqueous solution and exposing the powder magnetic core at 35 ° C. for 24 hours. As a result of visual confirmation, generation of red rust was not confirmed on the surface of the dust core after the test, and good corrosion resistance was exhibited by the formation of oxides by high-temperature oxidation.
1 圧粉磁心
3 合金の粒子
50 筋状痕
60 端子電極
100 成形体
101 摺接面
102 加圧面
150 Feを主体とする層状酸化物
150a 第1の酸化物層
150b 第2の酸化物層
200 成形金型
201 上パンチ
202 下パンチ
205 ダイ
 
 
DESCRIPTION OF SYMBOLS 1 Powder magnetic core 3 Alloy particle 50 Streaks 60 Terminal electrode 100 Molded body 101 Sliding contact surface 102 Pressurization surface 150 Layered oxide 150a mainly composed of Fe First oxide layer 150b Second oxide layer 200 Molding Die 201 Upper punch 202 Lower punch 205 Die

Claims (5)

  1.  Fe-M(MはAl又はCrである。)系の合金の粒子を含む圧粉磁心であって、
     前記合金の粒子は、前記M元素が濃化した酸化物相を介して結合され、
     前記圧粉磁心の表面の一部に、前記Feを主体とし、かつ多層組織である層状酸化物を有する圧粉磁心。
    A dust core containing particles of an alloy of Fe-M (M is Al or Cr) series,
    The alloy particles are bonded via an oxide phase enriched in the M element,
    A dust core having a layered oxide mainly composed of Fe and having a multilayer structure on a part of a surface of the dust core.
  2.  請求項1に記載の圧粉磁心であって、
     前記層状酸化物が、前記圧粉磁心の表面から順に第2の酸化物層と第1の酸化物層とを有し、
     前記第2の酸化物層は、前記第1の酸化物層よりも前記M元素を多く含む圧粉磁心。
    The dust core according to claim 1,
    The layered oxide has a second oxide layer and a first oxide layer in order from the surface of the dust core.
    The second oxide layer is a dust core containing more M element than the first oxide layer.
  3.  請求項2に記載の圧粉磁心であって、
     前記第1の酸化物層の電気抵抗は前記第2の酸化物層の電気抵抗より大きい圧粉磁心。
    The dust core according to claim 2,
    A powder magnetic core in which the electric resistance of the first oxide layer is larger than the electric resistance of the second oxide layer.
  4.  請求項1から請求項3のいずれかに記載の圧粉磁心であって、
     前記Fe-M系の合金はFe-Al系の合金であり、
     前記酸化物相にAlが濃化した圧粉磁心。
    The dust core according to any one of claims 1 to 3,
    The Fe-M alloy is an Fe-Al alloy,
    A dust core in which Al is concentrated in the oxide phase.
  5.  請求項1から請求項3のいずれかに記載の圧粉磁心であって、
     前記Fe-M系の合金はFe-Al-Cr系の合金であり、CrよりもAlを多く含み、
     前記酸化物相にAlが濃化した圧粉磁心。
     
     
     
    The dust core according to any one of claims 1 to 3,
    The Fe-M alloy is an Fe-Al-Cr alloy and contains more Al than Cr.
    A dust core in which Al is concentrated in the oxide phase.


PCT/JP2016/077473 2015-09-16 2016-09-16 Dust core WO2017047761A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017540010A JP6846016B2 (en) 2015-09-16 2016-09-16 Powder magnetic core

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015182758 2015-09-16
JP2015-182758 2015-09-16

Publications (1)

Publication Number Publication Date
WO2017047761A1 true WO2017047761A1 (en) 2017-03-23

Family

ID=58288941

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/077473 WO2017047761A1 (en) 2015-09-16 2016-09-16 Dust core

Country Status (2)

Country Link
JP (1) JP6846016B2 (en)
WO (1) WO2017047761A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110415910A (en) * 2018-04-27 2019-11-05 精工爱普生株式会社 Insulant coats soft magnetic powder, compressed-core, magnetic element, electronic equipment
US11854726B2 (en) 2019-03-29 2023-12-26 Taiyo Yuden Co., Ltd. Magnetic base body containing metal magnetic particles composed mainly of Fe and electronic component including the same
JP7413484B1 (en) 2022-10-31 2024-01-15 太陽誘電株式会社 A magnetic substrate, a coil component including a magnetic substrate, a circuit board including a coil component, and an electronic device including a circuit board
JP7434494B1 (en) 2022-10-31 2024-02-20 太陽誘電株式会社 A magnetic substrate, a coil component including a magnetic substrate, a circuit board including a coil component, and an electronic device including a circuit board

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012147224A1 (en) * 2011-04-27 2012-11-01 太陽誘電株式会社 Magnetic material and coil component using same
JP2014060183A (en) * 2012-09-14 2014-04-03 Aisin Seiki Co Ltd Soft magnetic material and method for manufacturing the same
JP5626672B1 (en) * 2013-01-16 2014-11-19 日立金属株式会社 Dust core manufacturing method, dust core and coil component

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012147224A1 (en) * 2011-04-27 2012-11-01 太陽誘電株式会社 Magnetic material and coil component using same
JP2014060183A (en) * 2012-09-14 2014-04-03 Aisin Seiki Co Ltd Soft magnetic material and method for manufacturing the same
JP5626672B1 (en) * 2013-01-16 2014-11-19 日立金属株式会社 Dust core manufacturing method, dust core and coil component

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110415910A (en) * 2018-04-27 2019-11-05 精工爱普生株式会社 Insulant coats soft magnetic powder, compressed-core, magnetic element, electronic equipment
US11854726B2 (en) 2019-03-29 2023-12-26 Taiyo Yuden Co., Ltd. Magnetic base body containing metal magnetic particles composed mainly of Fe and electronic component including the same
JP7413484B1 (en) 2022-10-31 2024-01-15 太陽誘電株式会社 A magnetic substrate, a coil component including a magnetic substrate, a circuit board including a coil component, and an electronic device including a circuit board
JP7434494B1 (en) 2022-10-31 2024-02-20 太陽誘電株式会社 A magnetic substrate, a coil component including a magnetic substrate, a circuit board including a coil component, and an electronic device including a circuit board

Also Published As

Publication number Publication date
JPWO2017047761A1 (en) 2018-07-05
JP6846016B2 (en) 2021-03-24

Similar Documents

Publication Publication Date Title
JP6447938B2 (en) Magnetic core and coil component using the same
JP6260508B2 (en) Dust core
JP5915920B1 (en) Manufacturing method of dust core
JP6601389B2 (en) Magnetic core, coil component, and manufacturing method of magnetic core
JP6365670B2 (en) Magnetic core, magnetic core manufacturing method, and coil component
JP6846016B2 (en) Powder magnetic core
WO2017047764A1 (en) Method for manufacturing dust core
WO2018174268A1 (en) Terminal-attached dust core and method for manufacturing same
JP6478141B2 (en) Magnetic core manufacturing method, magnetic core and coil component using the same
JP2018137349A (en) Magnetic core and coil component

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16846632

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2017540010

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16846632

Country of ref document: EP

Kind code of ref document: A1