WO2017012988A3 - Pumpensystem - Google Patents
Pumpensystem Download PDFInfo
- Publication number
- WO2017012988A3 WO2017012988A3 PCT/EP2016/066786 EP2016066786W WO2017012988A3 WO 2017012988 A3 WO2017012988 A3 WO 2017012988A3 EP 2016066786 W EP2016066786 W EP 2016066786W WO 2017012988 A3 WO2017012988 A3 WO 2017012988A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- coolant
- pump system
- vacuum pump
- feed
- heat
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/08—Cooling; Heating; Preventing freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/19—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16739121.8A EP3325806A2 (de) | 2015-07-17 | 2016-07-14 | Pumpensystem |
US15/743,912 US20180202445A1 (en) | 2015-07-17 | 2016-07-14 | Pump system |
JP2018502208A JP2018520304A (ja) | 2015-07-17 | 2016-07-14 | ポンプシステム |
CN201680037682.0A CN107850064B (zh) | 2015-07-17 | 2016-07-14 | 泵系统 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015213527.6 | 2015-07-17 | ||
DE102015213527.6A DE102015213527A1 (de) | 2015-07-17 | 2015-07-17 | Pumpensystem |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2017012988A2 WO2017012988A2 (de) | 2017-01-26 |
WO2017012988A3 true WO2017012988A3 (de) | 2017-04-06 |
Family
ID=56413664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2016/066786 WO2017012988A2 (de) | 2015-07-17 | 2016-07-14 | Pumpensystem |
Country Status (7)
Country | Link |
---|---|
US (1) | US20180202445A1 (de) |
EP (1) | EP3325806A2 (de) |
JP (1) | JP2018520304A (de) |
CN (1) | CN107850064B (de) |
DE (1) | DE102015213527A1 (de) |
TW (1) | TWI706084B (de) |
WO (1) | WO2017012988A2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6929601B2 (ja) * | 2018-02-21 | 2021-09-01 | 住友重機械工業株式会社 | クライオポンプ |
CN114375382B (zh) * | 2019-09-18 | 2023-10-24 | 株式会社日立产机系统 | 热回收装置 |
GB2597051A (en) * | 2020-06-09 | 2022-01-19 | Edwards Ltd | Vacuum system apparatus and method |
CN116131511B (zh) * | 2023-04-13 | 2023-06-30 | 四川富生汽车零部件有限公司 | 一种鼓风机电机冷却散热结构 |
CN116428157A (zh) * | 2023-04-13 | 2023-07-14 | 北京通嘉宏瑞科技有限公司 | 气体加热控制系统及气体加热控制方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05149287A (ja) * | 1991-11-26 | 1993-06-15 | Hitachi Ltd | パツケージ形スクリユー圧縮機 |
DE10156179A1 (de) * | 2001-11-15 | 2003-05-28 | Leybold Vakuum Gmbh | Kühlung einer Schraubenvakuumpumpe |
JP2004200364A (ja) * | 2002-12-18 | 2004-07-15 | Seiko Epson Corp | 排ガス処理装置および排ガス処理方法 |
US20060269424A1 (en) * | 2005-05-27 | 2006-11-30 | Michael Henry North | Vacuum pump |
EP2532895A1 (de) * | 2011-06-06 | 2012-12-12 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren |
EP2808421A1 (de) * | 2013-03-28 | 2014-12-03 | Ebara Corporation | Vakuumpumpe mit Beseitungsfunktion |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19963172A1 (de) * | 1999-12-27 | 2001-06-28 | Leybold Vakuum Gmbh | Schraubenpumpe mit einem Kühlmittelkreislauf |
DE10046902B4 (de) * | 2000-09-21 | 2006-04-27 | Nash_Elmo Industries Gmbh | Pumpenanlage und Verfahren zum Pumpen eines Gases |
JP5068477B2 (ja) * | 2006-05-16 | 2012-11-07 | 三菱電機株式会社 | 圧縮機及びヒートポンプ式給湯機 |
CN201144817Y (zh) * | 2007-12-28 | 2008-11-05 | 蒲志晖 | 一种循环冷却旋片真空泵 |
GB0808024D0 (en) * | 2008-05-02 | 2008-06-11 | Edwards Ltd | Vacuum pump |
CN201330708Y (zh) * | 2009-01-15 | 2009-10-21 | 上海沪冈真空泵制造有限公司 | 罗茨真空泵前后盖及端盖的冷却结构 |
DE102013203577A1 (de) * | 2013-03-01 | 2014-09-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2015
- 2015-07-17 DE DE102015213527.6A patent/DE102015213527A1/de not_active Withdrawn
-
2016
- 2016-07-14 EP EP16739121.8A patent/EP3325806A2/de not_active Withdrawn
- 2016-07-14 WO PCT/EP2016/066786 patent/WO2017012988A2/de active Application Filing
- 2016-07-14 CN CN201680037682.0A patent/CN107850064B/zh active Active
- 2016-07-14 US US15/743,912 patent/US20180202445A1/en not_active Abandoned
- 2016-07-14 JP JP2018502208A patent/JP2018520304A/ja not_active Ceased
- 2016-07-15 TW TW105122375A patent/TWI706084B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05149287A (ja) * | 1991-11-26 | 1993-06-15 | Hitachi Ltd | パツケージ形スクリユー圧縮機 |
DE10156179A1 (de) * | 2001-11-15 | 2003-05-28 | Leybold Vakuum Gmbh | Kühlung einer Schraubenvakuumpumpe |
JP2004200364A (ja) * | 2002-12-18 | 2004-07-15 | Seiko Epson Corp | 排ガス処理装置および排ガス処理方法 |
US20060269424A1 (en) * | 2005-05-27 | 2006-11-30 | Michael Henry North | Vacuum pump |
EP2532895A1 (de) * | 2011-06-06 | 2012-12-12 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren |
EP2808421A1 (de) * | 2013-03-28 | 2014-12-03 | Ebara Corporation | Vakuumpumpe mit Beseitungsfunktion |
Also Published As
Publication number | Publication date |
---|---|
TWI706084B (zh) | 2020-10-01 |
TW201708705A (zh) | 2017-03-01 |
JP2018520304A (ja) | 2018-07-26 |
CN107850064B (zh) | 2019-07-23 |
DE102015213527A1 (de) | 2017-01-19 |
CN107850064A (zh) | 2018-03-27 |
EP3325806A2 (de) | 2018-05-30 |
WO2017012988A2 (de) | 2017-01-26 |
US20180202445A1 (en) | 2018-07-19 |
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