WO2017007986A1 - Alkylamino-substituted halocarbosilane precursors - Google Patents

Abstract

Disclosed are Si-containing film forming compositions comprising alkylamino-substituted halocarbosilane precursors, methods of synthesizing the same, and their use for vapor deposition processes.

Description

ALKYLAMINO-SUBSTITUTED H ALOCARBOSI LAN E PRECURSORS

Cross Reference to Related Applications

The present application claims the benefit of U.S. Provisional Application Serial No. 62/190,404 filed July 9, 2015, herein incorporated by reference in its entirety for all purposes.

Technical Field

Disclosed are Si-containing film forming compositions comprising alkylamino-substituted halocarbosilane precursors, methods of synthesizing the same, and their use for vapor deposition processes.

Background

Si-containing thin films are used widely in the semiconductor, photovoltaic, LCD-TFT, flat panel-type device, refactory material, or aeronautic industries. Si- containing thin films may be used, for example, as dielectric materials having electrical properties which may be insulating (S1O₂, SiN, SiC, SiCN, SiCOH, MSiOx, wherein M is Hf, Zr, Ti, Nb, Ta, or Ge and x is greater than zero). Si- containing thin films may be used as conducting films, such as metal silicides or metal silicon nitrides. Due to the strict requirements imposed by downscaling of electrical device architectures towards the nanoscale (especially below 28nm node), increasingly fine-tuned molecular precursors are required which meet the requirements of volatility (for vapor deposition processes), suitable temperature process window, reactivity with various oxidants and low film contamination, in addition to high deposition rates, conformality and consistency of films produced.

Fukazawa et al. (US2013/0224964) disclose a method of forming a dielectric film having Si-C bonds on a semiconductor substrate by atomic layer deposition (ALD). The precursor has a Si-C-Si bond in its molecule, and the reactant gas is oxygen-free and halogen-free and is constituted by at least a rare gas.

Vrtis et al. (EP2048700) disclose forming antireflective coatings using, amongst many others, R OR^NR^ -n-pSi-R^Si-R^NR^qtOR m-q, wherein R¹ and R³ are independently H or Ci to C₄ linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fullyfluorinated hydrocarbon; R², R⁶, and R⁷ are independently Ci to C_& linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorine hydrocarbon, alternatively, R⁷ is an amine or an organoamine group; R⁴ and R⁵ are independently H, Ci to C_& linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, z is 1 or 2; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p <3 and m+q<3.

Ohhashi et al. (US2013/0206039) disclose monosilane or bisilane compounds having dimethylamino groups used in the hydrophobization treatment of surface substrates. The bisilane compounds have the formula R²b[N(CH₃)₂]3- bSi-R⁴-SiR³c[N(CH3)2]3_-c- , wherein R² and R³ are each independently a hydrogen atom or a straight chain or branched chain alkyl group with 1 to 4 carbon atoms, R⁴ is a straight chain or branched chain alkylene group with 1 to 16 carbon atoms, and b and c are each independently an integer of 0 to 2.

Machida et al. (JP2002158223) disclose the formation of insulator films using Si-type materials with the formula: {R₃(R₄)N}3Si-{C(Ri)R2}n-Si{N(R₅)R6}3, where R-i , R₂ = H, hydrocarbon groups C1 -3, or X(halogen atom)-substituted hydrocarbon groups (Ri and R₂ can be same), n = 1 -5 integer, R₃, R₄, R₅ and R₆ = H, hydrocarbon groups C1 -3 or X(halogen atom)-substituted hydrocarbon groups (R₃, R₄, R₅ and R₆ can be same). The insulator films may be formed on

substrates by CVD.

Jansen et al. (Z.Naturforsch. B. 52, 1997, 707-710) disclose the synthesis of bis[tris(methylamino)silyl]methane and bis[tris(phenylamino)silyl]methane as potential precursors of porous oxygen-free solids.

Despite the wide range of choices available for the deposition of Si- containing films, additional precursors are continuously sought to provide device engineers the ability to tune manufacturing process requirements and achieve films with desirable electrical and physical properties. Notation and Nomenclature

Certain abbreviations, symbols, and terms are used throughout the following description and claims, and include:

As used herein, the indefinite article "a" or "an" means one or more. As used herein, the terms "approximately" or "about" or "ca." mean ±10% of the value stated.

As used herein, the term "independently" when used in the context of describing R groups should be understood to denote that the subject R group is not only independently selected relative to other R groups bearing the same or different subscripts or superscripts, but is also independently selected relative to any additional species of that same R group. For example in the formula MR¹ _X (NR²R³)_(4-X), where x is 2 or 3, the two or three R¹ groups may, but need not be identical to each other or to R² or to R³. Further, it should be understood that unless specifically stated otherwise, values of R groups are independent of each other when used in different formulas.

As used herein, the term "halocarbosilane" refers to a linear or branched molecule with a backbone having alternate Si and C atoms and at least one Si-C- Si unit and at least one halide bonded to the Si.

As used herein, the term "hydrocarbyl group" refers to a functional group containing carbon and hydrogen; the term "alkyl group" refers to saturated functional groups containing exclusively carbon and hydrogen atoms. The hydrocarbyl group may be saturated or unsaturated. Either term refers to linear, branched, or cyclic groups. Examples of linear alkyl groups include without limitation, methyl groups, ethyl groups, n-propyl groups, n-butyl groups, etc.

Examples of branched alkyls groups include without limitation, t-butyl. Examples of cyclic alkyl groups include without limitation, cyclopropyl groups, cyclopentyl groups, cyclohexyl groups, etc.

As used herein, the term "aryl" refers to aromatic ring compounds where one hydrogen atom has been removed from the ring. As used herein, the term "heterocycle" refers to a cyclic compound that has atoms of at least two different elements as members of its ring.

As used herein, the abbreviation "Me" refers to a methyl group; the abbreviation "Et" refers to an ethyl group; the abbreviation "Pr" refers to any propyl group (i.e., n-propyl or isopropyl); the abbreviation "iPr" refers to an isopropyl group; the abbreviation "Bu" refers to any butyl group (n-butyl, iso-butyl, t-butyl, sec-butyl); the abbreviation "tBu" refers to a tert-butyl group; the abbreviation "sBu" refers to a sec-butyl group; the abbreviation "iBu" refers to an iso-butyl group; the abbreviation "Ph" refers to a phenyl group; the abbreviation "Am" refers to any amyl group (iso-amyl, sec-amyl, tert-amyl); the abbreviation "Cy" refers to a cyclic alkyl group (cyclobutyl, cyclopentyl, cyclohexyl, etc.); and the abbreviation "^Ramd" refers to an R-N-C(Me)-N-R amidinate ligand, with R being an alkyl group (e.g., ^iPramd is iPr-N-C(Me)-N-iPr).

As used herein, the acronym "HCDS" stands for hexachlorodisilane and the acronym "PCDS" stands for pentachlorodisilane.

The standard abbreviations of the elements from the periodic table of elements are used herein. It should be understood that elements may be referred to by these abbreviations (e.g., Si refers to silicon, N refers to nitrogen, 0 refers to oxygen, C refers to carbon, etc.). Similarly, a halide refers to a negative element from column 17 of the Periodic Table, namely F^", CI^", Br^", I^", or At^".

Any and all ranges recited herein are inclusive of their endpoints (i.e., x=1 to 4 or x ranges from 1 to 4 includes x=1 , x=4, and x=any number in between), irrespective of whether the term "inclusively" is used.

Please note that the films or layers deposited, such as silicon oxide or silicon nitride, may be listed throughout the specification and claims without reference to their proper stoichiometry (i.e., S1O2, S 1O3, Si3N₄). The layers may include pure (Si) layers, carbide (Si₀C_p) layers, nitride (Si_kNi) layers, oxide (Si_nO_m) layers, or mixtures thereof, wherein k, I, m, n, o, and p inclusively range from 1 to 6. For instance, silicon oxide is Si_nO_m, wherein n ranges from 0.5 to 1 .5 and m ranges from 1 .5 to 3.5. More preferably, the silicon oxide layer is S1O2 or S 1O3. These films may also contain Hydrogen, typically from 0 at% to 15 at%. However, since not routinely measured, film compositions are given while ignoring their H content, unless explicitly stated otherwise.

Brief Description of the Drawings

For a further understanding of the nature and objects of the present invention, reference should be made to the following detailed description, taken in conjunction with the accompanying drawings, in which like elements are given the same or analogous reference numbers and wherein:

FIG. 1 is a side view of one embodiment of the Si-containing film forming composition delivery device 1 ;

FIG. 2 is a side view of a second embodiment of the Si-containing film forming composition delivery device 1 ; FIG 3 is a 400 MHz proton Nuclear Magnetic Resonance (NMR) spectrum of (Me₂N)₂CISi-CH₂-SiCI(NMe₂)₂ taken in deuterated benzene solvent;

FIG 4 is a ThermoGravimetric Analysis (TGA) graph demonstrating the percentage of weight loss with increasing temperature of (Me₂N)₂CISi-CH₂- SiCI(NMe₂)₂;

FIG 5 is a TGA graph demonstrating the percentage of weight loss with increasing temperature of (Me₂N)CI₂Si-CH₂-SiCI₂(NMe₂);

FIG 6 is a TGA graph demonstrating the percentage of weight loss with increasing temperature of (Me₂N)CI₂Si-CH₂-SiCI₂(NMe₂) after 1 week or 1 month at room temperature or 80°C;

FIG 7 is a a schematic diagram of the vapor deposition apparatus used for the testing in Example 4; and

FIG 8 is a X-ray Photoelectron Spectroscopy (XPS) graph showing the film composition of a SiOC film deposited by ALD using (Me₂N)CI₂Si-CH₂-SiCI₂(NMe₂) as a Si source, water (H₂O) as an oxygen source, and pyridine as a catalyst

Summary

Disclosed are Si-containing film forming compositions comprising

alkylamino substituted halocarbosilane precursors having the formula R₃Si-CH₂- SiR₃, wherein each R is independently H, a halide, a hydrocarbyl group, or an alkylamino group, provided that at least one R is a halide and at leastone R is an alkylamino group having the formula NR¹ R², wherein R¹ and R² is each

independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. The disclosed precursors may include one or more of the following aspects:

• At least one R being F;

• At least one R being CI;

• At least one R being I;

• At least one R being Br;

• At least one R being H;

• At least one R being a hydrocarbyl group;

• At least one R being an alkyl group;

• At least one R being Me; At least one R being Et;

At least one R being Pr;

At least one R being Bu;

Each R being selected from H, a halide, or the alkylamino group;

Each R being selected from a halide or the alkylamino group;

R¹ and R² each independently being selected from H, Me, Et, nPr, iPr, Bu, or Am;

R¹ and R² each independently being selected from H, Me, Et, nPr, or iPr;

R¹ being H;

R¹ being Me;

R¹ being Et;

R¹ being nPr;

R¹ being iPr;

R¹ being Bu;

R¹ being Am;

R² being H;

R² being Me;

R² being Et;

R² being nPr;

R² being iPr;

R² being Bu;

R² being Am;

R¹ and R² being joined to form a cyclic chain on one N atom or on adjacent N atoms;

R¹ and R² forming pyridine, pyrole, pyrrolidine, morphline, or imidazole ring structures on one N atom;

R¹ and R² forming amidinate or diketimine ligands on adjacent N atoms; The alkylamino-substituted halocarbosilane recursor having the formula:

The alkylamino-substituted halocarbosilane recursor having the formula:

• alkylamino-substituted halocarbosilane precursor having the formula:

• alkylamino-substituted halocarbosilane precursor having the formula:

• alkylamino-substituted halocarbosilane precursor having the formula:

• alkylamino-substituted halocarbosilane precursor having the formula:

• alkylamino-substituted halocarbosilane precursor having the formula:

alkylamidinate-substituted halocarbosilane recursor having the formula:

alkylamidinate-substituted halocarbosilane precursor having the formula:

alkylamidinate-substituted halocarbosilane recursor having the formula:

diketiminate-substituted halocarbosilane precursor having the formula:

diketiminate-substitute halocarbosilane precursor having the formula:

diketiminate-substituted halocarbosilane precursor having the formula:

R³ being H, a C1 to C6 alkyl group, or a C3-C10 aryl or heterocycle group;

R³ being H, Me, Et, nPr, iPr, Bu, or Am;

R³ being H, Me, Et, nPr, or iPr;

R³ being H;

R³ being Me;

R³ being Et;

R³ being nPr;

R³ being iPr;

R³ being Bu;

R³ being Am;

alkylamino-substituted halocarbosilane recursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane recursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane precursor having the formula:

alkylamino-substituted halocarbosilane recursor having the formula:

the Si-containing film forming composition comprising between approximately 0.1 molar % and approximately 50 molar % of the alkyl substituted halocarbosilane precursor;

the Si-containing film forming composition comprising between approximately 93% w/w to approximately 100% w/w of the alkylamino substituted halocarbosilane precursor;

the Si-containing film forming composition comprising between approximately 99% w/w to approximately 100% w/w of the alkylamino substituted halocarbosilane precursor;

the Si-containing film forming composition comprising between approximately 0 % w/w and 5 % w/w of hexane, substituted hexane, pentane, substituted pentane, dimethyl ether, or anisole;

further comprising a solvent;

the solvent being selected from the group consisting of C1 -C16 hydrocarbons, THF, DMO, ether, pyridine, and combinations thereof; the solvent being a C1 -C16 hydrocarbons;

the solvent being tetrahydrofuran (THF);

the solvent being dimethyl oxalate (DMO);

the solvent being ether;

the solvent being pyridine;

the solvent being ethanol; or • the solvent being isopropanol.

Also disclosed are Si-containing film forming composition delivery devices comprising a canister having an inlet conduit and an outlet conduit and containing any of the Si-containing film forming compositions disclosed above. The disclosed device may include one or more of the following aspects:

• the Si-containing film forming composition having a total concentration of metal contaminants of less than 10 ppmw;

• an end of the inlet conduit end located above a surface of the Si-containing film forming composition and an end of the outlet conduit located below the surface of the Si-containing film forming composition;

• an end of the inlet conduit end located below a surface of the Si-containing film forming composition and an end of the outlet conduit located above the surface of the Si-containing film forming composition;

• further comprising a diaphragm valve on the inlet and the outlet;

• the Si-containing film forming composition being (Me₂N)₂CISi-CH₂- SiCI(NMe₂)₂; and

• the Si-containing film forming composition being (Me₂N)CI₂Si-CH₂- SiCI₂(NMe₂).

Also disclosed are processes for the deposition of a Silicon-containing film on a substrate. The vapor of any of the alkylamino-substituted halocarbosilane precursors disclosed above is introduced into a reactor having a substrate disposed therein. At least part of the alkylamino-substituted halocarbosilane precursor is deposited onto the substrate to form the Silicon-containing film. The disclosed processes include one or more of the following aspects:

• introducing a reactant into the reactor;

• the reactant being plasma-treated;

• the reactant being remote plasma-treated;

• the reactant not being plasma-treated;

• the reactant being selected from the group consisting of H₂, NH₃, (SiH₃)₃N, hydridosilanes (such as SiH₄, Si₂H₆, Si3H₈, Si₄Hi₀, S 15H10, Si6Hi₂),

chlorosilanes and chloropolysilanes (such as S1HCI3, SiH₂CI₂, SiH₃CI, Si₂CI₆, S12HCI5, Si₃Cle), alkylsilanes (such as Me₂SiH₂, Et₂SiH₂, MeSiH₃, EtSiHs), hydrazines (such as N₂H₄, MeHNNH₂, MeHNNHMe), organic amines (such as NMeH₂, NEtH₂, NMe₂H, NEt₂H, NMe₃, NEt₃, (SiMe₃)₂NH), diamines (such as ethylene diamine, dimethylethylene diamine,

tetramethylethylene diamine), aminoalcohols (such as ethanolamine [HO- CH2-CH2-NH2], bis ethanolamine [HN(C₂H₅OH)₂] or tris

ethanolamine[N(C₂H₅OH)₃]), pyrazoline, pyridine, B-containing molecules (such as B₂H₆, 9-borabicylo[3,3, 1 ]none, trimethylboron, triethylboron, borazine, substituted borazine, dialkylaminoboranes), alkyl metals (such as trimethylaluminum, triethylaluminum, dimethylzinc, diethylzinc), radical species thereof, and mixtures thereof;

the reactant being selected from the group consisting of H₂, H₂CO N₂H₄, NH₃, SiH₄, Si₂H₆, Si₃H₈, SiH₂Me₂, SiH₂Et₂, N(SiH₃)₃, hydrogen radicals thereof, and mixtures thereof;

the reactant being selected from SiH₄, Si₂H₆, Si₃H₈, Si₄Hi₀, SisH-io, Si6Hi₂, radical species thereof, and mixtures thereof;

the reactant being selected from Me₂SiH₂, Et₂SiH₂, MeSiH₃, EtSiH₃, radical species thereof, and mixtures thereof;

the reactant being selected from NMeH₂, NEtH₂, NMe₂H, NEt₂H, NMe₃, NEt₃, (SiMe₃)₂NH, radical species thereof, and mixtures thereof;

the reactant being selected from ethylene diamine, dimethylethylene diamine, tetramethylethylene diamine, radical species thereof, and mixtures thereof;

the reactant being selected from ethanolamine [HO-CH₂-CH₂-NH₂], bis ethanolamine [HN(C₂H₅OH)₂], tris ethanolamine[N(C₂H₅OH)₃], radical species thereof, and mixtures thereof;

the reactant being selected from trimethylaluminum, triethylaluminum, dimethylzinc, diethylzinc, radical species thereof, and mixtures thereof;

the reactant being H₂;

the reactant being NH₃;

the reactant being selected from the group consisting of: O₂, O₃, H₂O, H₂O₂

NO, N₂O, NO₂, a diol (such as ethylene glycol or hydrated

hexafluoroacetone), oxygen radicals thereof, and mixtures thereof;

the reactant being H₂O;

the reactant being plasma treated O₂; • the reactant being 0₃;

• the Si-containing film forming composition and the reactant being introduced into the reactor simultaneously;

• the reactor being configured for chemical vapor deposition;

• the Si-containing film forming composition and the reactant being introduced into the chamber sequentially;

• the reactor being configured for atomic layer deposition;

• the deposition being plasma enhanced.

Detailed Description of Preferred Embodiments

Disclosed are Si-containing film forming compositions comprising

alkylamino-substituted halocarbosilane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films for manufacturing semiconductors.

The disclosed alkylamino-substituted halocarbosilane precursors have the formula R₃Si-CH₂-SiR₃, wherein each R is independently H, a halide X, a

hydrocarbyl group, or an alkylamino group, provided that at least one R is a halide X and at least one R is an alkylamino group having the formula NRiR₂, wherein each R' is independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3- C10 aryl or heterocycle group. Preferably, R¹ and R² is each independently H, Me, Et, nPr, iPr, Bu, or Am. R¹ and R² may be joined to form a cyclic chain on one N atom or on adjacent N atoms. For example, R¹ and R² may form pyridine, pyrole, pyrrolidine, morpholine, or imidazole ring structures on one N atom or amidinate or diketimine ligands on adjacent N atoms.

Preferably, at least one R is a halide, and more particularly a CI, particularly for ALD. Halides are known for their high reactivity. Applicants believe that at least one halide on the disclosed alkylamino-substituted halocarbosilane

precursor will improve the deposition rate as compared to alkylamino-substituted halocarbosilane precursors having no halide ligand. The halide may also improve volatility.

Preferably at least one R is H because the hydrogen bonded to the Si atom may help increase the volatility of the precursor. Additionally, in ALD processes, the Si-H bonds of the disclosed precursors may help to provide a larger growth rate per cycle when compared to the analogous halocarbosilane precursors because the H atoms occupy less surface area, resulting in more molecules on the substrate surface.

Preferably, at least R¹ or R² is H because the hydrogen bonded to the N atom may help increase the volatility of the precursor. Additionally, in ALD processes, the N-H bonds of the disclosed precursors may help to provide a larger growth rate per cycle when compared to the analogous halocarbosilane precursors because the H atoms occupy less surface area, resulting in more molecules on the substrate surface. NH also provides improved reactivity when compared to NR molecules.

Even more preferably, at least one R is H and R¹ or R² is H for the same reasons described above.

One of ordinary skill in the art will recognize that at least one R may include an alkyl group, such as Me, Et, Pr, or Bu, when deposited films having some carbon are desired. However, the alkyl group may be detrimental to volatility of the precursor.

Exemplary alkylamino-substituted halocarbosilane precursors having one alkylamino group include:

wherein R¹ and R² is each independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. Preferably, Ri and R₂ is each independently H, Me, Et, nPr, iPr, Bu, or Am. Ri and R₂ may be joined to form a cyclic chain on the N atom. For example, NRi R₂ may form pyridine, pyrole, pyrrolidine, morpholine, or imidazole ring structures.

Exemplary mono-alkylamino substituted precursors include (NMe₂)CI₂Si-

CH₂-SiCI₃, (NMe₂)Br₂Si-CH₂-SiBr₃, (NMe₂)l₂Si-CH₂-Sil₃, (NMe₂)F₂Si-CH₂-SiF₃, (NEt₂)CI₂Si-CH₂-SiCI₃, (NEt₂)Br₂Si-CH₂-SiBr₃, (NEt₂)l₂Si-CH₂-Sil₃, (NEt₂)F₂Si-CH₂- SiF₃, (NMeEt)CI₂Si-CH₂-SiCI₃, (NMeEt)Br₂Si-CH₂-SiBr₃, (NMeEt)l₂Si-CH₂-Sil₃, (NMeEt)F₂Si-CH₂-SiF₃, (NEtH)CI₂Si-CH₂-SiCI₃, (NEtH)Br₂Si-CH₂-SiBr₃, (NEtH)l₂Si-CH₂-Sil₃, (NEtH)F₂Si-CH₂-SiF3, (NiPrH)CI₂Si-CH₂-SiCI₃, (NiPrH)Br₂Si- CH₂-SiBr₃, (NiPrH)l₂Si-CH₂-Sil₃, or (NiPrH)F₂Si-CH₂-SiF₃.

The monoalkylamino-1 , 1 ,3,3,3-pentachloro-1 ,3-disilapropane may be synthesized at approximately -78 °C to approximately room temperature (approx. 25°C) by mixing or dissolving excess amine and a nonpolar solvent. 1 , 1 , 1 ,3,3,3- hexachloro-1 ,3-disilapropane is slowly added to the mixture to form the desired compound. The reactants are commercially available or may be synthesized according to J. Organomet. Chem. 92, 1975 163-168

The 2-ethylamino-2,4-disilapentane (H₃C-(NHEt)HSi-CH₂-SiH₂-CH₃) and the 2-4-bis(ethylamino)-2,4-disilapentane (H₃C-(NHEt)HSi-CH₂-SiH-(NHEt)-CH₃) may be synthesized in similar conditions using respectively H₃C-CIHSi-CH₂-SiH₂-CH₃ and H₃C-CIHSi-CH₂-SiHCI-CH₃ as starting materials.

Alternatively, alkyl lithium is combined with a primary or secondary amine (NH₂R or NHR₂) in a solvent, such as ether or any other polar solvents, at approximately -78°C to approximately room temperature (approx. 25°C) to form lithium amide. The lithium amide may be isolated and reacted with 1 , 1 , 1 ,3,3,3- hexachloro-1 ,3-disilapropane to form the desired compound. Alternatively, the lithium amide solution may be added to 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound.

Exemplary alkylamino-substituted halocarbosilane precursors having two alkylamino groups include s mmetric molecules having the formula:

or asymmetric molecules havin the fomula:

wherein R¹ and R² is each independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. Preferably, Ri and R₂ is each independently H, Me, Et, nPr, iPr, Bu, or Am. R-i and R₂ may be joined to form a cyclic chain on one N atom or, on the unsymmetric compound, on adjacent N atoms. For example, NRi R₂ may form pyridine, pyrole, pyrrolidine, morpholine, or imidazole ring structures or, on the unsymmetric compound, R1-N-S1-N-R2 may form an amidinate or diketiminate structure.

Exemplary asymmetric di-alkylamino substituted precursors include

(NMe₂)₂CISi-CH₂-SiCI₃, (NMe₂)₂BrSi-CH₂-SiBr₃, (NMe₂)₂ISi-CH₂-Sil₃, (NMe₂)₂FSi- CH₂-SiF₃, (NEt₂)₂CISi-CH₂-SiCI₃, (NEt₂)₂BrSi-CH₂-SiBr₃, (NEt₂)₂ISi-CH₂-Sil₃, (NEt₂)₂FSi-CH₂-SiF₃, (NMeEt)₂CISi-CH₂-SiCI₃, (NMeEt)₂BrSi-CH₂-SiBr₃,

(NMeEt)₂ISi-CH₂-Sil₃, (NMeEt)₂FSi-CH₂-SiF₃, (NEtH)₂CISi-CH₂-SiCI₃,

(NEtH)₂BrSi-CH₂-SiBr₃, (NEtH)₂ISi-CH₂-Sil₃, (NEtH)₂FSi-CH₂-SiF₃, (NiPrH)₂CISi- CH₂-SiCI₃, (NiPrH)₂BrSi-CH₂-SiBr₃, (NiPrH)₂ISi-CH₂-Sil₃, or (NiPrH)₂FSi-CH₂-SiF₃.

Exemplary symmetric di-alkylamino substituted precursors include (NMe₂) CI₂Si-CH₂-SiCI₂(NMe₂), (NMe₂)Br₂Si-CH₂-SiBr₂(NMe₂), (NMe₂)l₂Si-CH₂-Sil₂(NMe₂), (NMe₂)F₂Si-CH₂-SiF₂(NMe₂), (NEt₂)CI₂Si-CH₂-SiCI₂(NEt₂), (NEt₂)Br₂Si-CH₂- SiBr₂(NEt₂), (NEt₂)l₂Si-CH₂-Sil₂(NEt₂), (NEt₂)F₂Si-CH₂-SiF₂(NEt₂), (NMeEt)CI₂Si- CH₂-SiCI₂(NMeEt), (NMeEt)Br₂Si-CH₂-SiBr₂(NMeEt), (NMeEt)l₂Si-CH₂- Sil₂(NMeEt), (NMeEt)F₂Si-CH₂-SiF₂(NMeEt), (NEtH)CI₂Si-CH₂-SiCI₂(NEtH), (NEtH)Br₂Si-CH₂-SiBr₂(NEtH), (NEtH)l₂Si-CH₂-Sil₂(NEtH), (NEtH)F₂Si-CH₂- SiF₂(NEtH), (NiPrH)CI₂Si-CH₂-SiCI₂(NiPrH), (NiPrH)Br₂Si-CH₂-SiBr₂(NiPrH), (NiPrH)l₂Si-CH₂-Sil₂(NiPrH), or (NiPrH)F₂Si-CH₂-SiF₂(NiPrH).

At approximately -78 °C to approximately room temperature (approx. 25°C), 2 equivalents of amine are mixed with or dissolved in a nonpolar solvent. 1 , 1 ,1 ,3,3,3-hexachloro-1 ,3-disilapropane is slowly added to form the desired compound. The reactants are commercially available or may be synthesized according to J. Organomet. Chem. 92, 1975 163-168.

Alternatively, at approximately -78°C to approximately room temperature (approx. 25°C), alkyl lithium is combined with a primary or secondary amine

(NH₂R or NHR₂) in a solvent, such as ether or any other polar solvents, to form lithium amide. The lithium amide may be isolated and one equivalent reacted with 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound. Alternatively, one equivalent of the lithium amide solution may be added to

1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound.

Exemplary amidinate-substituted halocarbosilane precursors having 2 alkylamino groups with the adjacent NR atoms joined by an unsaturated alkyl chain to form an amidinate ligand include:

wherein R¹ , R², R³ may each independently be H, a C1 to C6 alkyl group, or a C3- C10 aryl or heterocycle group. R¹ and R² and/or R¹ and R³ may also be joined to form cyclic chains.

Exemplary amidinate substituted halocarbosilane precursors include (^Meamd)SiCl2-CH₂-SiCI₃, (^Etamd)SiCl2-CH₂-SiCI₃, (^iPramd)SiCl2-CH₂-SiCI₃,

(^tBuamd)SiCl₂-CH₂-SiCI₃, (^Meamd)SiBr₂-CH₂-SiBr₃, (^Etamd)SiBr₂-CH₂-SiBr₃, (^iPramd)SiBr₂-CH₂-SiBr₃, (^tBuamd)SiBr₂-CH₂-SiBr₃, (^Meamd)SiF₂-CH₂-SiF₃,

(^Etamd)SiF₂-CH₂-SiF₃, (^iPramd)SiF₂-CH₂-SiF₃, (^tBuamd)SiF₂-CH₂-SiF₃, (^Meamd)Sil₂- CH₂-Sil₃, (^Etamd)Sil₂-CH₂-Sil₃, (^iPramd)Sil₂-CH₂-Sil₃, or (^tBuamd)Sil₂-CH₂-Sil₃.

At approximately 0°C to approximately room temperature (approx. 25°), alkyl lithium is combined with carbodiimide in a solvent, such as ether or any other organic solvents, to form lithium amidinate. The reaction is exothermic. The lithium amidinate may be isolated and one equivalent reacted with one equivalent 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound.

Alternatively, one equivalent of the lithium amidinate solution may be added to one equivalent of the 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound.

Exemplary alkylamino-substituted halocarbosilane precursors having 3 alkylamino groups are all asymmetric and include:

wherein R¹ and R² is each independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. Preferably, Ri and R₂ is each independently H, Me, Et, nPr, iPr, Bu, or Am. Ri and R₂ may be joined to form a cyclic chain on one N atom or on adjacent N atoms. For example, NR-| R₂ may form pyridine, pyrole, pyrrolidine, morpholine, or imidazole ring structures or R-i-N- Si-N-R₂ may form an amidinate or diketiminate structure.

Exemplary tri-alkylamino substituted precursors include (NMe₂)₃Si-CH₂- S1C I3, (NMe₂)₃Si-CH₂-SiBr₃, (NMe₂)₃Si-CH₂-Sil₃, (NMe₂)₃Si-CH₂-SiF₃, (NEt₂)₃Si- CH₂-SiCI₃, (NEt₂)₃Si-CH₂-SiBr₃, (NEt₂)₃Si-CH₂-Sil₃, (NEt₂)₃Si-CH₂-SiF₃,

(NMeEt)₃Si-CH₂-SiCI₃, (NMeEt)₃Si-CH₂-SiBr₃, (NMet)₃Si-CH₂-Sil₃, (NMeEt)₃Si- CH₂-SiF₃, (NEtH)₃Si-CH₂-SiCI₃, (NEtH)₃rSi-CH₂-SiBr₃, (NEtH)₃Si-CH₂-Sil₃,

(NEtH)₃Si-CH₂-SiF₃, (NiPrH)₃Si-CH₂-SiCI₃, (NiPrH)₃Si-CH₂-SiBr₃, (NiPrH)₃Si-CH₂- Sil₃, or (NiPrH)₃Si-CH₂-SiF₃.

Alternatively, the exemplary tri-alkylamino substituted precursors include (NMe₂)₂CISi-CH₂-SiCI₂(NMe₂), (NMe₂)₂BrSi-CH₂-SiBr₂(NMe₂), (NMe₂)₂ISi-CH₂- Sil₂(NMe₂), (NMe₂)₂FSi-CH₂-SiF₂(NMe₂), (NEt₂)₂CISi-CH₂-SiCI₂(NEt₂),

(NEt₂)₂BrSi-CH₂-SiBr₂(NEt₂), (NEt₂)₂ISi-CH₂-Sil₂(NEt₂), (NEt₂)₂FSi-CH₂-SiF₂(NEt₂), (NMeEt)₂CISi-CH₂-SiCI₂(NMeEt), (NMeEt)₂BrSi-CH₂-SiBr₂(NMeEt), (NMeEt)₂ISi- CH₂-Sil₂(NMeEt), (NMeEt)₂FSi-CH₂-SiF₂(NMeEt), (NEtH)₂CISi-CH₂-SiCI₂(NEtH), (NEtH)₂BrSi-CH₂-SiBr₂(NEtH), (NEtH)₂ISi-CH₂-Sil₂(NEtH), (NEtH)₂FSi-CH₂- SiF₂(NEtH), (NiPrH)₂CISi-CH2-SiCI₂(NiPrH), (NiPrH)₂BrSi-CH2-SiBr₂(NiPrH), (NiPrH)₂ISi-CH₂-Sil₂(NiPrH), or (NiPrH)₂FSi-CH₂-SiF₂(NiPrH).

At approximately -78 °C to approximately room temperature (approx. 25°C), 6 equivalents of amine are mixed with or dissolved in a nonpolar solvent.

1 , 1 ,1 ,3,3, 3-hexachloro-1 ,3-disilapropane is slowly added to form the desired compound. The reactants are commercially available or may be synthesized according to J. Organomet. Chem. 92, 1975 163-168.

Alternatively, at approximately -78°C to approximately room temperature (approx. 25°C), alkyl lithium is combined with a primary or secondary amine (NH₂R or NHR₂) in a solvent, such as ether or any other polar solvents, to form lithium amide. The lithium amide may be isolated and 3 equivalents reacted with one equivalent 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound. Alternatively, 3 equivalents of the lithium amide solution may be added to one equivalent of 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound.

Exemplary alkylamino-substituted halocarbosilane precursors having 4 alkylamino groups include s mmetric molecules having the formula:

or asymmetric molecules having the formu la:

wherein R¹ and R² is each independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. Preferably, Ri and R₂ is each independently H, Me, Et, nPr, iPr, Bu, or Am. R-i and R₂ may be joined to form a cyclic chain on one N atom or on adjacent N atoms. For example, NRi R₂ may form pyridine, pyrole, pyrrolidine, morpholine, or imidazole ring structures or R-i-N- Si-N-R₂ may form an amidinate or diketiminate structure.

Exemplary assymetrical tetra-alkylamino substituted precursors include (NMe2)3Si-CH2-SiCl2(NMe₂), (NMe₂)₃Si-CH₂-SiBr₂(NMe₂), (NMe₂)₃Si-CH₂- Sil₂(NMe₂), (NMe₂)₃Si-CH₂-SiF₂(NMe₂), (NEt₂)₃Si-CH₂-SiCI₂(NEt₂), (NEt₂)₃Si-CH₂- SiBr₂(NEt₂), (NEt₂)₃Si-CH₂-Sil₂(NEt₂), (NEt₂)₃Si-CH₂-SiF₂(NEt₂), (NMeEt)₃Si-CH₂- SiCI₂(NMeEt), (NMeEt)₃Si-CH₂-SiBr₂(NMeEt), (NMet)₃Si-CH₂-Sil₂(NMeEt),

(NMeEt)₃Si-CH₂-SiF₂(NMeEt), (NEtH)₃Si-CH₂-SiCI₂(NEtH), (NEtH)₃rSi-CH₂- SiBr₂(NEtH), (NEtH)₃Si-CH₂-Sil₂(NEtH), (NEtH)₃Si-CH₂-SiF₂(NEtH), (NiPrH)₃Si- CH₂-SiCI₂(NiPrH), (NiPrH)₃Si-CH₂-SiBr₂(NiPrH), (NiPrH)₃Si-CH₂-Sil₂(NiPrH), or (NiPrH)₃Si-CH₂-SiF₂(NiPrH).

Exemplary symetrical tetra-alkylamino substituted precursors include (NMe₂)₂CISi-CH₂-SiCI(NMe₂)₂, (NMe₂)₂BrSi-CH₂-SiBr(NMe₂)₂, (NMe₂)₂ISi-CH₂- Sil(NMe₂)₂, (NMe₂)₂FSi-CH₂-SiF(NMe₂)₂, (NEt₂)₂CISi-CH₂-SiCI(NEt₂)₂,

(NEt₂)₂BrSi-CH₂-SiBr(NEt₂)₂, (NEt₂)₂ISi-CH₂-Sil(NEt₂)₂, (NEt₂)₂FSi-CH₂-SiF(NEt₂)₂, (NMeEt)₂CISi-CH₂-SiCI(NMeEt)₂, (NMeEt)₂BrSi-CH₂-SiBr(NMeEt)₂, (NMeEt)₂ISi- CH₂-Sil(NMeEt)₂, (NMeEt)₂FSi-CH₂-SiF(NMeEt)₂, (NEtH)₂CISi-CH₂-SiCI(NEtH)₂, (NEtH)₂BrSi-CH₂-SiBr(NEtH)₂, (NEtH)₂ISi-CH₂-Sil(NEtH)₂, (NEtH)₂FSi-CH₂- SiF(NEtH)₂, (NiPrH)₂CISi-CH₂-SiCI(NiPrH)₂, (NiPrH)₂BrSi-CH₂-SiBr(NiPrH)₂, (NiPrH)₂ISi-CH₂-Sil(NiPrH)₂, or (NiPrH)₂FSi-CH₂-SiF(NiPrH) ₂.

At approximately -78 °C to approximately room temperature (approx. 25°C), 8 equivalents of amine are mixed with or dissolved in a nonpolar solvent. 1 , 1 ,1 ,3,3,3-hexachloro-1 ,3-disilapropane is slowly added to form the desired compound. The reactants are commercially available or may be synthesized according to J. Organomet. Chem. 92, 1975 163-168.

Alternatively, at approximately -78°C to approximately room temperature (approx. 25°C), alkyl lithium is combined with a primary or secondary amine (NH₂R or NHR₂) in a solvent, such as ether or any other polar solvents, to form lithium amide. The lithium amide may be isolated and 4 equivalents reacted with one equivalent 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound. Alternatively, 4 equivalents of the lithium amide solution may be added to one equivalents of 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound. Exemplary alkylamino-substituted halocarbosilane precursors having 5 alkylamino groups are all asymmetric and include:

wherein R¹ and R² is each independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. Preferably, R-i and R₂ is each independently H, Me, Et, nPr, iPr, Bu, or Am. Ri and R₂ may be joined to form a cyclic chain on one N atom or on adjacent N atoms. For example, NRi R₂ may form pyridine, pyrole, pyrrolidine, morpholine, or imidazole ring structures or R-i-N- Si-N-R₂ may form an amidinate or diketiminate structure.

Exemplary penta-alkylamino substituted precursors include (NMe₂)₃Si-CH₂- SiCI (NMe₂)₂, (NMe₂)₃Si-CH₂-SiBr(NMe₂)₂, (NMe₂)₃Si-CH₂-Sil(NMe₂)₂, (NMe₂)₃Si- CH₂-SiF(NMe₂)₂, (NEt₂)₃Si-CH₂-SiCI(NEt₂)₂, (NEt₂)₃Si-CH₂-SiBr(NEt₂)₂, (NEt₂)₃Si- CH₂-Sil(NEt₂)₂, (NEt₂)₃Si-CH₂-SiF(NEt₂)₂, (NMeEt)₃Si-CH₂-SiCI(NMeEt)₂,

(NMeEt)₃Si-CH₂-SiBr(NMeEt)₂, (NMet)₃Si-CH₂-Sil(NMeEt)₂, (NMeEt)₃Si-CH₂- SiF(NMeEt)₂, (NEtH)₃Si-CH₂-SiCI(NEtH)₂, (NEtH)₃rSi-CH₂-SiBr(NEtH)₂, (NEtH)₃Si- CH₂-Sil(NEtH)₂, (NEtH)₃Si-CH₂-SiF(NEtH)₂, (NiPrH)₃Si-CH₂-SiCI(NiPrH)₂,

(NiPrH)₃Si-CH₂-SiBr(NiPrH)₂, (NiPrH)₃Si-CH₂-Sil(NiPrH)₂, or (NiPrH)₃Si-CH₂- SiF(NiPrH)₂.

At approximately -78 °C to approximately room temperature (approx. 25°C), 10 equivalents of amine are mixed with or dissolved in a nonpolar solvent. One equivalent of 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane is slowly added to form the desired compound. The reactants are commercially available or may be synthesized according to J. Organomet. Chem. 92, 1975 163-168.

Alternatively, at approximately -78°C to approximately room temperature (approx. 25°C), alkyl lithium is combined with a primary or secondary amine (NH₂R or NHR₂) in a solvent, such as ether or any other polar solvents, to form lithium amide. The lithium amide may be isolated and 5 equivalents reacted with one equivalent of 1 , 1 ,1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound. Alternatively, 5 equivalents of the lithium amide solution may be added to one equivalent of the 1 , 1 , 1 ,3,3,3-hexachloro-1 ,3-disilapropane to form the desired compound.

For all of the synthesis processes, one of ordinary skill in the art will recognize that Si-C bonds are not affected by the reactants used for amination of the silicon, and that the addition of alkyl groups on the Si atoms in a molecule having a disilapropane backbone may be achieved by selecting the starting disilapropane halide having the selected alkyl ligands on the silicon. For instance, the synthesis of Me(NMe2)CISi-CH2-SiCI(NMe₂)Me would proceed under similar conditions as the synthesis of (NMe₂)2CISi-CH2-SiCI(NMe₂)2, using 1 , 1 ,3,3- tetrachloro-1 ,3-dimethyldisilapropane in place of 1 , 1 , 1 ,3,3,3- hexachlorodisilapropane and half the amount of amine.

To ensure process reliability, the silicon-containing film forming

compositions may be purified by continuous or fractional batch distillation or sublimation prior to use to a purity ranging from approximately 93% w/w to approximately 100% w/w, preferably ranging from approximately 99% w/w to approximately 100% w/w. The silicon-containing film forming compositions may contain any of the following impurities: undesired congeneric species; solvents; chlorinated metal compounds; or other reaction products. In one alternative, the total quantity of these impurities is below 0.1 % w/w.

The concentration of each of hexane, substituted hexane, pentane, substituted pentane, dimethyl ether, or anisole in the purified silicon-containing film forming composition may range from approximately 0% w/w to approximately 5% w/w, preferably from approximately 0% w/w to approximately 0.1 % w/w.

Solvents may be used in the composition's synthesis. Separation of the solvents from the precursor may be difficult if both have similar boiling points. Cooling the mixture may produce solid precursor in liquid solvent, which may be separated by filtration. Vacuum distillation may also be used, provided the precursor product is not heated above approximately its decomposition point.

In one alternative, the disclosed Si-containing film forming compositions contain less than 5% v/v, preferably less than 1 % v/v, more preferably less than 0.1 % v/v, and even more preferably less than 0.01 % v/v of any of its undesired congeneric species, reactants, or other reaction products. This alternative may provide better process repeatability. This alternative may be produced by distillation of the halocarbosilane precursor. In another alternative, the disclosed Si-containing film forming compositions may contain between 5% v/v and 50% v/v of one or more of its congeneric species, reactants, or other reaction products, particularly when the mixture provides improved process parameters or isolation of the target compound is too difficult or expensive. For example, a mixture of reaction products may produce a stable, liquid mixture suitable for spin-on or vapor deposition.

The concentration of trace metals and metalloids in the purified silicon- containing molecules may each range from approximately 0 ppb to approximately 100 ppb, and more preferably from approximately 0 ppb to approximately 10 ppb.

The disclosed Si-containing film forming compositions may be delivered to a semiconductor processing tool by the disclosed Si-containing film forming composition delivery devices. FIGS. 1 and 2 show two embodiments of the disclosed delivery devices 1.

FIG. 1 is a side view of one embodiment of the Si-containing film forming composition delivery device 1. In FIG. 1 , the disclosed Si-containing film forming composition 10 are contained within a container 20 having two conduits, an inlet conduit 30 and an outlet conduit 40. One of ordinary skill in the precursor art will recognize that the container 20, inlet conduit 30, and outlet conduit 40 are manufactured to prevent the escape of the gaseous form of the Si-containing film forming composition 10, even at elevated temperature and pressure.

Suitable valves include spring-loaded or tied diaphragm valves. The valve may further comprise a restrictive flow orifice (RFO). The delivery device 1 should be connected to a gas manifold and in an enclosure. The gas manifold should permit the safe evacuation and purging of the piping that may be exposed to air when the delivery device 1 is replaced so that any residual amount of the pyrophoric material does not react. The enclosure should be equipped with sensors and fire control capability to control the fire in the case of a pyrophoric material release, such as SiH₄. The gas manifold should also be equipped with isolation valves, vacuum generators, and permit the introduction of a purge gas at a minimum.

The delivery device 1 must be leak tight and be equipped with valves that do not permit escape of even minute amounts of the material. The delivery device 1 fluidly connects to other components of the semiconductor processing tool, such as the gas cabinet disclosed above, via valves 35 and 45. Preferably, the container 20, inlet conduit 30, valve 35, outlet conduit 40, and valve 45 are made of 316L EP or 304 stainless steel. However, one of ordinary skill in the art will recognize that other non-reactive materials may also be used in the teachings herein and that any corrosive Si-containing film forming composition 10 may require the use of more corrosion-resistant materials, such as Hastelloy or Inconel.

In FIG. 1 , the end 31 of inlet conduit 30 is located above the surface of the Si-containing film forming composition 10, whereas the end 41 of the outlet conduit 40 is located below the surface of the Si-containing film forming

composition 10. In this embodiment, the Si-containing film forming composition 10 is preferably in liquid form. An inert gas, including but not limited to nitrogen, argon, helium, and mixtures thereof, may be introduced into the inlet conduit 30. The inert gas pressurizes the container 20 so that the liquid Si-containing film forming composition 10 is forced through the outlet conduit 40 and to components in the semiconductor processing tool (not shown). The semiconductor processing tool may include a vaporizer which transforms the liquid Si-containing film forming composition 10 into a vapor, with or without the use of a carrier gas such as helium, argon, nitrogen or mixtures thereof, in order to deliver the vapor to a chamber where a wafer to be repaired is located and treatment occurs in the vapor phase. Alternatively, the liquid Si-containing film forming composition 10 may be delivered directly to the wafer surface as a jet or aerosol.

FIG. 2 is a side view of a second embodiment of the Si-containing film forming composition delivery device 1. In FIG. 2, the end 31 of inlet conduit 30 is located below the surface of the Si-containing film forming composition 10,

whereas the end 41 of the outlet conduit 40 is located above the surface of the Si- containing film forming composition 10. FIG. 2 also includes an optional heating element 25, which may increase the temperature of the Si-containing film forming composition 10. The Si-containing film forming composition 10 may be in solid or liquid form. An inert gas, including but not limited to nitrogen, argon, helium, and mixtures thereof, is introduced into the inlet conduit 30. The inert gas flows through the Si-containing film forming composition 10 and carries a mixture of the inert gas and vaporized Si-containing film forming composition 10 to the outlet conduit 40 and to the components in the semiconductor processing tool.

Both FIGS. 1 and 2 include valves 35 and 45. One of ordinary skill in the art will recognize that valves 35 and 45 may be placed in an open or closed position to allow flow through conduits 30 and 40, respectively. Either delivery device 1 in FIGS. 1 or 2, or a simpler delivery device having a single conduit terminating above the surface of any solid or liquid present, may be used if the Si- containing film forming composition 10 is in vapor form or if sufficient vapor pressure is present above the solid/liquid phase. In this case, the Si-containing film forming composition 10 is delivered in vapor form through the conduit 30 or 40 simply by opening the valve 35 in FIG. 1 or 45 in FIG. 2, respectively. The delivery device 1 may be maintained at a suitable temperature to provide sufficient vapor pressure for the Si-containing film forming composition 10 to be delivered in vapor form, for example by the use of an optional heating element 25.

While FIGS. 1 and 2 disclose two embodiments of the Si-containing film forming composition delivery device 1 , one of ordinary skill in the art will recognize that the inlet conduit 30 and outlet conduit 40 may both be located above or below the surface of the Si-containing film forming composition 10 without departing from the disclosure herein. Furthermore, inlet conduit 30 may be a filling port. Finally, one of ordinary skill in the art will recognize that the disclosed Si-containing film forming compositions 10 may be delivered to semiconductor processing tools using other delivery devices, such as the ampoules disclosed in WO 2006/059187 to Jurcik et al., without departing from the teachings herein.

The disclosed alkylamino-substituted halocarbosilane precursors in the Si- containing film forming compositions may prove useful as monomers for the synthesis of carbosilane based oligomers or polymers. The carbosilane based oligomers or polymers may be formed by partial hydrolysis or ammonolysis of the disclosed Si-containing film forming compositions. The carbosilane based oligomers or polymers may further comprise a solvent, pH regulators, surfactants, or combinations thereof. The carbosilane based oligomers or polymers may be used to form spin-on dielectric film formulations. The spin-on dielectric film formulations may be used to make various silicon containing films, such as insulating films, patternable films, hard masks, lithography transfer layers, or for anti-reflective films. For example, the carbosilane based oligomers or polymers may be applied to a substrate to form a film. Typically, the substrate is rotated to evenly distribute the carbosilane based oligomers or polymers across the substrate. One of ordinary skill in the art will recognize that the viscosity of the carbosilane based oligomers or polymers will contribute as to whether rotation of the substrate is necessary. The resulting film may be heated under an inert gas, such as Argon, Helium, or nitrogen or under a reactive gas like H₂, O2, O3, steam, NH3, or a mixture thereof, in order to achieve a modification of the average film composition. The heating of the film may happen in one or preferably two successive steps at different temperatures. Other means of increasing the connectivity may be used in addition to or in replacement of a heating step, such as application of electron beams or ultraviolet radiation to the resulting film. The reactive groups of the disclosed alkylamino-substituted halocarbosilane

precursors (i.e., no direct Si-C bonds except the bonds to the central carbon atoms) may increase the connectivity of the oligomer or polymer obtained by hydrolysis and intermolecular condensation to form siloxane bridges, or by ammonolysis and intermolecular condensation to form silazane bridges.

The Si-containing film forming compositions may also be used for vapor deposition methods. The disclosed methods provide for the use of the Si- containing film forming compositions for deposition of silicon-containing films. The disclosed methods may be useful in the manufacture of semiconductor, photovoltaic, LCD-TFT, or flat panel type devices. The method includes:

introducing the vapor of the disclosed Si-containing film forming compositions into a reactor having at least one substrate disposed therein: and using a vapor deposition process to deposit at least part of the disclosed alkylamino-substituted halocarbosilane precursor onto the substrate to form a Si-containing layer.

The disclosed methods also provide for forming a bimetal-containing layer on a substrate using a vapor deposition process and, more particularly, for deposition of SiMO_x films, wherein x may be 0-4 and M is Ta, Hf, Zr, Ti, Nb, B, P, Mg, Al, Sr, Y, Ba, As, Sb, Bi, lanthanides (such as Er), or combinations thereof.

The disclosed methods of forming silicon-containing layers on substrates may be useful in the manufacture of semiconductor, photovoltaic, LCD-TFT, or flat panel type devices. The disclosed Si-containing film forming compositions may deposit Si-containing films using any vapor deposition methods known in the art. Examples of suitable vapor deposition methods include chemical vapor deposition (CVD) or atomic layer deposition (ALD). Exemplary CVD methods include thermal CVD, plasma enhanced CVD (PECVD), pulsed CVD (PCVD), low pressure CVD (LPCVD), sub-atmospheric CVD (SACVD) or atmospheric pressure CVD (APCVD), hot-wire CVD (HWCVD, also known as cat-CVD, in which a hot wire serves as an energy source for the deposition process), radicals incorporated CVD, and combinations thereof. Exemplary ALD methods include thermal ALD, plasma enhanced ALD (PEALD), spatial isolation ALD, hot-wire ALD (HWALD), radicals incorporated ALD, and combinations thereof. Super critical fluid deposition may also be used. The disclosed methods may also be used in the flowable PECVD deposition processes described in U.S. Pat. App. Pub. No. 2014/0051264 to

Applied Materials, Inc., the contents of which is incorporated herein in its entirety. The deposition method is preferably ALD, spatial ALD, or PE-ALD.

The vapor of the Si-containing film forming compositions is introduced into a reaction chamber containing at least one substrate. The temperature and the pressure within the reaction chamber and the temperature of the substrate are held at conditions suitable for vapor deposition of at least part of the alkylamino- substituted halocarbosilane precursor onto the substrate. In other words, after introduction of the vaporized Si-containing film forming compositions into the chamber, conditions within the chamber are such that at least part of the alkylamino-substituted halocarbosilane precursor is deposited onto the substrate to form the silicon-containing film. A co-reactant may also be used to help in formation of the Si-containing layer.

The reaction chamber may be any enclosure or chamber of a device in which deposition methods take place, such as, without limitation, a parallel-plate type reactor, a cold-wall type reactor, a hot-wall type reactor, a single-wafer reactor, a multi-wafer reactor, or other such types of deposition systems. All of these exemplary reaction chambers are capable of serving as an ALD reaction chamber. The reaction chamber may be maintained at a pressure ranging from about 0.5 mTorr to about 20 Torr. In addition, the temperature within the reaction chamber may range from about 20°C to about 600°C. One of ordinary skill in the art will recognize that the optimal deposition temperature range for each

alkylamino-substituted halocarbosilane precursor may be determined

experimentally to achieve the desired result.

The temperature of the reactor may be controlled by controlling the temperature of the substrate holder and/or controlling the temperature of the reactor wall. Devices used to heat the substrate are known in the art. The reactor wall is heated to a sufficient temperature to obtain the desired film at a sufficient growth rate and with desired physical state and composition. A non-limiting exemplary temperature range to which the reactor wall may be heated includes from approximately 20°C to approximately 600°C. When a plasma deposition process is utilized, the deposition temperature may range from approximately 20°C to approximately 550°C. Alternatively, when a thermal process is performed, the deposition temperature may range from approximately 300°C to approximately 600°C.

Alternatively, the substrate may be heated to a sufficient temperature to obtain the desired silicon-containing film at a sufficient growth rate and with desired physical state and composition. A non-limiting exemplary temperature range to which the substrate may be heated includes from 150°C to 600°C.

Preferably, the temperature of the substrate remains less than or equal to 500°C.

The type of substrate upon which the silicon-containing film will be deposited will vary depending on the final use intended. A substrate is generally defined as the material on which a process is conducted. The substrates may be any suitable substrate used in semiconductor, photovoltaic, flat panel, or LCD-TFT device manufacturing. Examples of suitable substrates include wafers, such as silicon, silica, glass, plastic, Ge, or GaAs wafers. The wafer may have one or more layers of differing materials deposited on it from a previous manufacturing step. For example, the wafers may include silicon layers (crystalline, amorphous, porous, etc.), silicon oxide layers, silicon nitride layers, silicon oxy nitride layers, carbon doped silicon oxide (SiCOH) layers, or combinations thereof. Additionally, the wafers may include copper layers, tungsten layers or metal layers (e.g.

platinum, palladium, nickel, rhodium, or gold). The wafers may include barrier layers, such as manganese, manganese oxide, tantalum, tantalum nitride, etc.

Plastic layers, such as poly(3,4-ethylenedioxythiophene)poly (styrenesulfonate) [PEDOT: PSS] may also be used. The layers may be planar or patterned. In some embodiments, the substrate may be a patterened photoresist film made of hydrogenated carbon, for example CH_X, wherein x is greater than zero (e.g. , x <4). In some embodiments, the substrate may include layers of oxides which are used as dielectric materials in MIM, DRAM, or FeRam technologies (for example, Zr02 based materials, Hf0₂ based materials, Ti0₂ based materials, rare earth oxide based materials, ternary oxide based materials, etc.) or from nitride-based films (for example, TaN) that are used as an oxygen barrier between copper and the low-k layer. The disclosed processes may deposit the silicon-containing layer directly on the wafer or directly on one or more than one (when patterned layers form the substrate) of the layers on top of the wafer. Furthermore, one of ordinary skill in the art will recognize that the terms "film" or "layer" used herein refer to a thickness of some material laid on or spread over a surface and that the surface may be a trench or a line. Throughout the specification and claims, the wafer and any associated layers thereon are referred to as substrates. The actual substrate utilized may also depend upon the specific precursor embodiment utilized. In many instances though, the preferred substrate utilized will be selected from hydrogenated carbon, TiN, Ru, and Si type substrates, such as polysilicon or crystalline silicon substrates.

The disclosed Si-containing film forming compositions may be supplied either in neat form or in a blend with a suitable solvent, such as toluene, ethyl benzene, xylene, mesitylene, decane, dodecane, octane, hexane, pentane, tertiary amines, acetone, tetrahydrofuran, ethanol, ethylmethylketone, 1 ,4-dioxane, or others. The disclosed alkylamino-substituted halocarbosilane precursors may be present in varying concentrations in the solvent. For example, the resulting concentration may range from approximately 0.05 M to approximately 2 M.

The neat or blended Si-containing film forming compositions are introduced into a reactor in vapor form by conventional means, such as tubing and/or flow meters. The composition in vapor form may be produced by vaporizing the neat or blended composition through a conventional vaporization step such as direct vaporization, distillation, by bubbling, or by using a sublimator such as the one disclosed in PCT Publication WO2009/087609 to Xu et al. The neat or blended composition may be fed in liquid state to a vaporizer where it is vaporized before it is introduced into the reactor. Alternatively, the neat or blended composition may be vaporized by passing a carrier gas into a container containing the composition or by bubbling the carrier gas into the composition. The carrier gas may include, but is not limited to, Ar, He, or N₂, and mixtures thereof. Bubbling with a carrier gas may also remove any dissolved oxygen present in the neat or blended composition. The carrier gas and composition are then introduced into the reactor as a vapor.

If necessary, the container may be heated to a temperature that permits the Si-containing film forming composition to be in its liquid phase and to have a sufficient vapor pressure. The container may be maintained at temperatures in the range of, for example, 0-150°C. Those skilled in the art recognize that the temperature of the container may be adjusted in a known manner to control the amount of Si-containing film forming compositions vaporized.

In addition to the disclosed Si-containing film forming compositions, a reaction gas may also be introduced into the reactor. The reaction gas may be an oxidizing agent such as one of 0₂; 0₃; H₂0; H₂0₂; oxygen containing radicals such as O- or OH-; NO; NO₂; carboxylic acids such as formic acid, acetic acid, propionic acid; radical species of NO, NO₂, or the carboxylic acids; para- formaldehyde; and mixtures thereof. Preferably, the oxidizing agent is selected from the group consisting of O₂, O₃, H₂O, H₂O₂, NO, N₂O, NO₂, a diol (such as ethylene glycol or hydrated hexafluoroacetone), oxygen containing radicals thereof such as O- or OH-, and mixtures thereof. Preferably, when an ALD process is performed, the co-reactant is plasma treated oxygen, ozone, or combinations thereof. When an oxidizing gas is used, the resulting silicon containing film will also contain oxygen.

Alternatively, a reaction gas may be selected, such as one of H₂, H₂CO, NH₃, (SiH₃)₃N, hydridosilanes (such as SiH₄, Si₂H₆, Si₃H₈, Si₄H₁₀, Si₅H₁₀, Si₆H₁₂), chlorosilanes and chloropolysilanes (such as SiHCI₃, SiH₂CI₂, SIH₃CI, Si₂Cl6, Si₂HCI₅, Si₃CI₈), alkylsilanes (such as (CH₃)₂SiH₂, (C₂H₅)₂SiH₂, (CH₃)SiH₃,

(C₂H₅)SiH₃), hydrazines (such as N₂H₄, MeHNNH₂, MeHNNHMe), organic amines (such as N(CH₃)H₂, N(C₂H₅)H₂, N(CH₃)₂H, N(C₂H₅)₂H, N(CH₃)₃, N(C₂H₅)₃, (SiMe₃)₂NH), diamines (such as ethylene diamine, dimethylethylene diamine, tetramethylethylene diamine), aminoalcohols (such as ethanolamine [HO-CH₂- CH₂-NH₂], bis ethanolamine [HN(C₂H₅OH)₂] or tris ethanolamine[N(C₂H₅OH)₃]), pyrazoline, pyridine, B-containing molecules (such as B₂H₆, 9- borabicyclo[3,3, 1 ]none, trimethylboron, triethylboron, borazine, substituted borazine, dialkylaminoboranes), alkyl metals (such as trimethylaluminum, triethylaluminum, dimethylzinc, diethylzinc), radical species thereof, and mixtures thereof.

The reaction gas may be treated by a plasma, in order to decompose the reaction gas into its radical form. N₂ may also be utilized as a reducing agent when treated with plasma. For instance, the plasma may be generated with a power ranging from about 50 W to about 500 W, preferably from about 100 W to about 200 W. The plasma may be generated or present within the reactor itself. Alternatively, the plasma may generally be at a location removed from the reactor, for instance, in a remotely located plasma system. One of skill in the art will recognize methods and apparatus suitable for such plasma treatment.

When the desired silicon-containing film also contains another element, such as, for example and without limitation, Ta, Hf, Zr, Ti, Nb, P, B, Mg, Al, Sr, Y, Ba, As, Sb, Bi, lanthanides (such as Er), or combinations thereof, the co-reactants may include an element-containing precursor which is selected from, but not limited to, element-containing alkyls, such as Ln(RCp)3, element-containing amines, such as Nb(Cp)(NtBu)(NMe₂)3, and any combination thereof.

The disclosed Si-containing film forming compositions may also be used with a halosilane or polyhalodisilane, such as hexachlorodisilane,

pentachlorodisilane, tetrachlorodisilane, or octachlorotrisilane and one or more co- reactant gases to form SiN or SiCN films, as disclosed in PCT Publication Number WO201 1/123792, the entire contents of which are incorporated herein in their entireties.

The Si-containing film forming compositions and one or more co-reactants may be introduced into the reaction chamber simultaneously (chemical vapor deposition), sequentially (atomic layer deposition), or in other combinations. For example, the Si-containing film forming composition may be introduced in one pulse and two additional element sources may be introduced together in a separate pulse [modified atomic layer deposition]. Alternatively, the reaction chamber may already contain the co-reactant prior to introduction of the Si- containing film forming composition. The co-reactant may be passed through a plasma system localized or remotely from the reaction chamber, and decomposed to radicals. Alternatively, the Si-containing film forming composition may be introduced to the reaction chamber continuously while other element sources are introduced by pulse (pulsed-chemical vapor deposition). In each example, a pulse may be followed by a purge or evacuation step to remove excess amounts of the component introduced. In each example, the pulse may last for a time period ranging from about 0.01 s to about 10 s, alternatively from about 0.3 s to about 3 s, alternatively from about 0.5 s to about 2 s. In another alternative, the Si- containing film forming composition and one or more co-reactants may be simultaneously sprayed from a shower head under which a susceptor holding several wafers is spun (spatial ALD).

In one non-limiting exemplary chemical vapor deposition type process, the vapor phase of a Si-containing film forming composition and a reaction gas, such as H₂, are simultaneously introduced into the reaction chamber, where they react to deposit the desired SiC film on the substrate.

In one non-limiting exemplary atomic layer deposition type process, the vapor phase of a Si-containing film forming composition is introduced into the reaction chamber, where at least part of the alkylamino-substituted halocarbosilane chemi- or physisorbs on the substrate. Excess Si-containing film forming

composition may then be removed from the reaction chamber by purging and/or evacuating the reaction chamber. An oxygen source is introduced into the reaction chamber where it reacts with the chemi- or physisorbed alkylamino-substituted halocarbosilane precursor in a self-limiting manner. Any excess oxygen source is removed from the reaction chamber by purging and/or evacuating the reaction chamber. If the desired film is a silicon oxide film, this two-step process may provide the desired film thickness or may be repeated until a film having the necessary thickness has been obtained.

Alternatively, if the desired film is a silicon metal/metalloid oxide film (i.e., SiM Οχ_, wherein x may be 0-4 and M is Ta, Hf, Zr, Ti, Nb, P, B, Mg, Al, Sr, Y, Ba, As, Sb, Bi, lanthanides (such as Er), or combinations thereof), the two-step process above may be followed by introduction of a second vapor of an element-containing precursor into the reaction chamber. The element-containing precursor will be selected based on the nature of the silicon element oxide film being deposited (i.e., the element may be Ta, Hf, Zr, Ti, Nb, P, B, Mg, Al, Sr, Y, Ba, As, Sb, Bi, or a lanthanide). After introduction into the reaction chamber, the element-containing precursor chemi- or physisorbs on the silicon oxide substrate. Any excess element- containing precursor is removed from the reaction chamber by purging and/or evacuating the reaction chamber. Once again, an oxygen source may be introduced into the reaction chamber to react with the chemi- or physisorbed element-containing precursor. Excess oxygen source is removed from the reaction chamber by purging and/or evacuating the reaction chamber. If a desired film thickness has been achieved, the process may be terminated. However, if a thicker film is desired, the entire four-step process may be repeated. By alternating the provision of the Si-containing film forming composition, element-containing precursor, and oxygen source, a film of desired composition and thickness can be deposited.

Additionally, by varying the number of pulses, films having a desired stoichiometric M:Si ratio may be obtained. For example, a SiMO₂ film may be obtained by having one pulse of the Si-containing film forming composition and one pulses of the element-containing precursor, with each pulse being followed by pulses of the oxygen source. However, one of ordinary skill in the art will recognize that the number of pulses required to obtain the desired film may not be identical to the stoichiometric ratio of the resulting film.

In another alternative, Si or dense SiCN films may be deposited via an ALD or modified ALD process using the disclosed Si-containing film forming

compositions and a halosilane compound having the formula Si_aH_2a+2-_bX_b, wherein X is F, CI, Br, or I; a=1 through 6; and b=1 through (2a+2); or a cyclic halosilane compound having the formula -SicFbc-_dXcr, wherein X is F, CI, Br, or I; c=3-8; and d=1 through 2c. Preferably the halosilane compound is trichlorosilane,

hexachlorodisilane (HCDS), pentachlorodisilane (PCDS), tetrachlorodisilane, or hexachlorocyclohexasilane. One of ordinary skill in the art will recognize that the CI in these compounds may be substituted by Br or I when lower deposition

temperatures are necessary, due to the lower bond energy in the Si-X bond (i.e., Si- Cl = 456 kJ/mol; Si-Br = 343 kJ/mol; Si-I = 339 kJ/mol). If necessary, the deposition may further utilize an N-containing co-reactant, such as NH₃. Vapors of the disclosed Si-containing film forming compositions and the halosilane compounds may be introduced sequentially or simultaneously into the reactor, depending on the desired concentration of the final film. The selected sequence of precursor injection will be determined based upon the desired film composition targeted. The precursor introduction steps may be repeated until the deposited layer achieves a suitable thickness. One of ordinary skill in the art will recognize that the introductory pulses may be simultaneous when using a spatial ALD device. As described in PCT Pub No WO201 1/123792, the order of the introduction of the precursors may be varied and the deposition may be performed with or without the NH₃ co-reactant in order to tune the amounts of carbon and nitrogen in the SiCN film.

In yet another alternative, a silicon-containing film may be deposited by the flowable PECVD method disclosed in U.S. Pat. App. Pub. No. 2014/0051264 using the disclosed Si-containing film forming compositions and a radical nitrogen- or oxygen-containing co-reactant. The radical nitrogen- or oxygen-containing co- reactant, such as NH₃ or H₂0 respectively, is generated in a remote plasma system. The radical co-reactant and the vapor phase of the disclosed compositions are introduced into the reaction chamber where they react and deposit the initially flowable film on the substrate. Applicants believe that the carbon atom between the two Si atoms and the nitrogen atoms of the alkylamino groups in the disclosed alkylamino-substituted halocarbosilane precursors help to further improve the flowability of the deposited film, resulting in films having less voids.

In yet another alternative, a thin film containing silicon, oxygen and carbon may be deposited on a substrate via ALD by performing a cycle a predetermined number of times, the cycle including supplying the disclosed Si-containing film forming composition and a first catalytic gas to the substrate and supplying an oxidizing gas and a second catalytic gas to the substrate as disclosed in US Pat App Pub No 2014/287596 to Hitachi Kokusai Electric, Inc. and L'Air Liquide,

Societe Anonyme pour I'Etude et I'Exploitation des Precedes Georges Claudes, the content of which is incorporated herein in its entirety. For example, the disclosed Si-containing film forming composition may replace BTCSM in paragraphs 0095- 0151 : supply disclosed Si-containing film forming composition and pyridine gas; remove residual gas; supply H₂0 and pyridine gas; remove residual gas; repeat a predetermined number of times to obtain the desired thickness of the SiOC layer. Applicants believe that the disclosed Si-containing film forming compositions may help to keep the Si-C-Si backbone in the resulting Si-containing film, which may be shown by a Fourier Transfer Infrared spectrum of the resulting film. Additionally, the H₂0 oxidizing gas helps to remove any potential halide impurities from the disclosed Si-containing film forming composition from the film.

In yet another alternative, a thin film containing silicon, oxygen and carbon may be deposited on a substrate by performing two cycles a predetermined number of times, the first cycle including supplying the disclosed Si-containing film forming composition and a first catalytic gas to the substrate and supplying an oxidizing gas and a second catalytic gas to the substrate as discussed above, followed by a second cycle including supplying a non-halogenated silane and a first catalytic gas to the substrate and supplying an oxidizing gas and a second catalytic gas to the substrate. The non-halogenated silane may include SiH₄, Si2H₆, HxSi(NR₂)_4-x, with x being 1 -3 and R being an alkyl group, such as H₂Si(NEt₂)2, or R₃Si-CH₂-SiR3, wherein R is independently H or an alkylamino group, but is not a halide. For example, the process may comprise: supply of disclosed Si-containing film forming composition and pyridine gas; remove residual gas; supply H₂O and pyridine gas; remove residual gas; supply non-halogenated silane, such as (Me₂N)₃Si-CH₂- Si(NMe₂)₃, and pyridine gas; remove residual gas; supply H₂O and pyridine gas; remove residual gas; repeat a predetermined number of times to obtain the desired thickness of the SiOC layer. The second cycle is halide free and may result in production of less HCI byproduct, which may better maintain the Si-C-Si backbone in the resulting Si-containing film.

The silicon-containing films resulting from the processes discussed above may include Si, SiO₂, SiN, SiON, SiC, SiOC, SiCN, SiCOH, or MSiO_x , whererin M is an element such as Hf, Zr, Ti, Nb, Ta, or Ge, and x may be 4, depending of course on the oxidation state of M. One of ordinary skill in the art will recognize that by judicial selection of the appropriate halocarbosilane precursor and co-reactants, the desired film composition may be obtained.

Upon obtaining a desired film thickness, the film may be subject to further processing, such as thermal annealing, furnace-annealing, rapid thermal annealing, UV or e-beam curing, and/or plasma gas exposure. Those skilled in the art recognize the systems and methods utilized to perform these additional processing steps. For example, the silicon-containing film may be exposed to a temperature ranging from approximately 200°C and approximately 1000°C for a time ranging from approximately 0.1 second to approximately 7200 seconds under an inert atmosphere, a H-containing atmosphere, a N-containing atmosphere, an O- containing atmosphere, or combinations thereof. Most preferably, the temperature is 600°C for less than 3600 seconds under a H-containing atmosphere. The resulting film may contain fewer impurities and therefore may have improved performance characteristics. The annealing step may be performed in the same reaction chamber in which the deposition process is performed. Alternatively, the substrate may be removed from the reaction chamber, with the annealing/flash annealing process being performed in a separate apparatus. Any of the above post- treatment methods, but especially thermal annealing, has been found effective to reduce carbon and nitrogen contamination of the silicon-containing film. Examples

The following non-limiting examples are provided to further illustrate embodiments of the invention. However, the examples are not intended to be all inclusive and are not intended to limit the scope of the inventions described herein.

Example V. Synthesis of (Me₂N)2CISi-CH2-SiCI(NMe₂)2

CI₃Si-CH₂-SiCI₃ + (Me₂N)₃Si-CH2-Si(NMe₂)₃→ (Me₂N)2CISi-CH2-SiCI(NMe2)2

A 200m L Schlenk flask equipped with a reflux condenser is charged with 1 , 1 ,1 , 3,3, 3-hexakis(dimethylamino)-1 ,3-disilapropane (39.1 g, 0.123 mol) followed by slow addition of bis(trichlorosilyl)methane (17.4g, 0.062 mol) with stirring to yield a colorless liquid. Initially some fuming was observed. After completing the addition, the reaction temperature is increased to 60°C for 7 hours. At the end of the workday, heating is removed and the reaction stirred at room temperature overnight (14 hrs). The following day, the reaction is heated again at 60°C for 7 hours to yield a colorless liquid. GCMS analysis indicates the reaction is complete with ca. 84% of the desired product.

The resulting mixture is distilled under reduced pressure using a 300mm Vigreaux column (50-58°C @ 20mTorr) to afford a colorless liquid. No clear end point is observed. Analysis by GCMS shows improved purity to be 93% (44.7g, 81 .3% isolated yield).

The NMR of the final product collected on a 400 MHz instrument is provided in FIG 3. (Me₂N)2CISiCH₂SiCI(NMe2)2 in C₆D₆: ¹H NMR: δ 0.61 (s, 2H, -CH₂-), 2.43 (s, 24H, -(CH₃)₂).

Thermogravimetric analysis (TGA) in open cup conditions produces less than 1 % w/w residue. See FIG 4.

Example 2: One Step Synthesis of (Me₂N)CI₂Si-CH2-SiCl2(NMe2)

CI₃Si-CH₂-SiCI₃ + 2LiNMe₂→ (Me₂N)CI₂Si-CH2-SiCl2(NMe2) + 2LiCI

In a 1 L four-necked, round-bottomed flask with two reflux condensers and mechanical stirrer, hexane (500 ml_) was cooled to -78 °C in a dry ice / IPA bath. A small Me₂NH cylinder was placed on a balance and set to zero. The cylinder was connected to the Schlenk line (for purging) and one reflux condenser of the reaction flask via bubbler and back-flow safety. The Schlenk line exhaust was connected to a washing bottle containing 30% aq. H₂SO₄ solution and a washing bottle containing water before releasing into the fume hood. The reflux

condensers were cooled to -20 °C. The cylinder valve was slowly opened and ca. 22 g (0.48 mol, 1 .2 eq) of Me₂NH was condensed into hexane. After closing the valve, the line was purged with nitrogen, the cylinder removed, and the connection on the reflux condenser closed. An addition funnel was charged with 250 mL (0.40 mol, 1 .0 eq) of nBuLi solution (1.6 M in hexane) in a glovebox. The addition funnel was connected to the reaction flask under a stream of nitrogen. nBuLi was slowly added over 1 h. The addition funnel was rinsed with ca. 40 mL hexane. The mixture was let warm to room temperature during 1 .5 h and then stirred at 40 °C for 1 h before using the suspension in the next step.

The freshly prepared Me₂NLi suspension (0.40 mol, 2.0 eq) was cooled to -78 °C in a dry ice / IPA bath. An addition funnel was charged with a solution of CI₃Si-CH₂-SiCI₃ (56.58 g, 0.20 mol, 1.0 eq) in hexane (50 mL) in a glovebox. The addition funnel was attached to the reaction flask under a stream of nitrogen. The CI₃Si-CH₂-SiCI₃ solution was slowly added to the suspension over 30 min. The reaction mixture was let warm to room temperature and stirred over night. The product solution was separated from LiCI by transferring into a 1 L round- bottomed flask with magnetic stirring bar via cannula filtration or by filtration over a glass wool filter under nitrogen. The volatiles were removed under reduced pressure. The crude product was distilled using a packed column (T_bat_h = 130 °C, T_vap = 42 °C, p = 50 - 200 mTorr). The residue contained mainly (Me₂N)₂CISi- CH₂-SiCI₂(NMe₂), (Me₂N)₂CISi-CH₂-SiCI(NMe₂)₂, and (Me₂N)₃Si-CH₂-SiCI(NMe₂)₂. The distilled fractions contained 42.14 g (0.14 mol, 70%) product. Example 3: Two Step Synthesis of (Me₂N)CI₂Si-CH₂-SiCI₂(NMe₂)

CI₃Si-CH₂-SiCI₃ + 6LiNMe₂→ (Me₂N)₃Si-CH₂-Si(NMe₂)₃ + 6LiCI

(Me₂N)₃Si-CH₂-Si(NMe₂)₃ + 2 CI₃Si-CH₂-SiCI₃→ 3 (Me₂N)CI₂Si-CH₂-SiCI₂(NMe₂)

Preparation of (Me₂N)₃Si-CH₂-Si(NMe₂)3: The freshly prepared Me₂NLi suspension (0.40 mol, 6.6 eq) was cooled to -78 °C in a dry ice / IPA bath. An addition funnel was charged with a solution of CI₃Si-CH₂-SiCI₃ (16.98 g, 0.06 mol, 1 .0 eq) in hexane (50 mL) in a glovebox. The addition funnel was attached to the reaction flask under a stream of nitrogen. The CI₃Si-CH₂-SiCI₃ solution was slowly added to the suspension over 30 min. The reaction mixture was let warm to room temperature and stirred over night. The product solution was separated from LiCI by transferring into a 1 L round-bottomed flask with magnetic stirring bar via cannula filtration or by filtration over a glass wool filter under nitrogen. The volatiles were removed under reduced pressure. The crude product was distilled without column (T_bath = 30 °C, T_vap = 98 - 107 °C, p = 260 mTorr). The distilled fraction contained 19.14 g (0.057 mol, 95%) product.

Preparation of (MeztyChSi-CHz-SiChfNMez): (Me₂N)₃Si-CH2-Si(NMe2)3 (54.95 g, 0.164 mol, 1.0 eq) and CI₃Si-CH₂-SiCI₃ (92.91 g, 0.328 mol, 2.0 eq) were mixed in a Schott bottle at room temperature in a glovebox. No exothermicity was observed. The mixture was carefully agitated for a few minutes and then stored in the glove box at room temperature to yield 147.68 g (0.492 mol, 100%) of product. ¹ H-NMR analysis showed 90% (MesNJC Si-CHs-SiC iNMes), 5% (Me₂N)CI₂Si- CH₂-SiCI₃, and 5% (Me2N)2CISi-CH2-SiCl2(NMe₂). This ratio did not change, even after heating at 80 °C for 96 h.

Thermogravimetric analysis (TGA) in open cup conditions produces less than 0.5% w/w residue. See FIG 5.

Stability testing was performed at room temperature and 80°C for 1 week and 1 month. The stability of the prescursor at usage temperature is important. When a precursor is used, its canister may be heated to provide sufficient vapor pressure and film growth rate. Therefore, the precursor needs to be stable at elevated temperatures. None of the samples exhibited any color change. Similarly, FIG 6 demonstrates that the TGA for the samples did not change.

Example 4: Atomic Layer Deposition

FIG 7 is a schematic diagram of deposition apparatus used for the following testing. The apparatus includes a hotwall tube reactor 100 containing substrate coupons 105. A pump 110 removes the contents from the hotwall tube reactor 100.

The vapor of the disclosed Si-containing film forming composition is introduced to the hotwall tube reactor 100 from delivery device 200 via line 201. An inert gas 205, such as N₂, is delivered to the delivery device 200 via line 206. The inert gas 205 may also be delivered to the reactor 100 via line 207. An oxidizing gas may be introduced to the hotwall tube reactor 100 from delivery device 300 via line 301. When the oxidizing gas is ozone, line 301 may include an ozone generator 303 and ozone monitor 304. Oxidizing gas may also be delivered to the exhaust 311.

A nitrogen containing gas may be introduced to the hotwall tube reactor

100 from delivery device 400 via line 401.

One of ordinary skill in the art will recognize that lines 201 , 206, 207, 301 , and 401 may include numerous pressure gauges, check valves, valves, and pressure regulators and that additional lines for pressure regulation or by-pass flow have not been included in order to simplify the drawing.

SiOC films were deposited on a Si(100) substrate with native oxide 105 via ALD using (Me2N)CI₂Si-CH2-SiCl2(NMe2) as a Si source 200, water (H₂O) as an oxygen source 300, and pyridine as a catalyst 400. The pressure in the reaction furnace 100 of FIG 7 is controlled at 1 Torr, the temperature at 50^°C, and 100 seem of N₂ 205 was continuously flowing. The deposition process includes the following steps: 1 ) introducing a pulse of the 3 seem Si source 200 and pyridine 400 to the reaction furnace 100 for 10 seconds, 2) purging the reaction furnace 100 using 1 slm of N₂ 205 for 30 seconds, 3) introducing a pulse of 56 seem H₂O 300 and 33 seem pyridine 400 to the reaction furnace 100 for 20 seconds, and 4) purging the reaction furnace 100 by 1 slm of N₂ 205 for 40 seconds. The sequence from 1 ) to 4) were repeated for 150 cycles. The deposited layer achieved a thickness of 19.7 nm based on a 1 .4 A/cycle growth rate.

FIG 8 is a graph demonstrating the XPS depth profile of the resulting SiOC film, including the 37.4 atomic % of Si, 45.8 atomic % of O, 12.7 atomic % of C, 1 .6 atomic % CI, and 1 .4 atomic % N.

It will be understood that many additional changes in the details, materials, steps, and arrangement of parts, which have been herein described and illustrated in order to explain the nature of the invention, may be made by those skilled in the art within the principle and scope of the invention as expressed in the appended claims. Thus, the present invention is not intended to be limited to the specific embodiments in the examples given above and/or the attached drawings.

Claims

We claim:

1 . A Si-containing film forming composition comprising a halocarbosilane precursor having the formula R₃Si-CH₂-SiR₃, wherein each R is independently H, a halide X, an alkyl group, or an alkylamino group, provided that at least one R is a halide X and at least one R is an alkylamino group having the formula NR¹ R², wherein R¹ and R² is each independently H, a C1 -C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group.

2. The Si-containing film forming composition of claim 1 , wherein R¹ and R² is each independently H, Me, Et, nPr, iPr, Bu, Am, or are joined to form a cyclic chain on one N atom or on adjacent N atoms.

3. The Si-containing film forming composition of claim 1 , having the formula:

4. The Si-containing film forming composition of claim 1 , having the formula:

5. The Si-containing film forming composition of claim 1 , having the formula:

6. The Si-containing film forming composition of claim 1 , having the formula:

7. The Si-containing film forming composition of claim 1 , having the formula:

The Si-containing film formin composition of claim 1 , having the formula:

9. The Si-containing film forming composition of claim 1 , having the formula:

The Si-containing film forming composition of claim 1 , having the formula:

1 1 . A process for the deposition of a Silicon-containing film on a substrate, comprising the steps of: introducing a vapor of the Si-containing film forming composition of any one of claims 1 to 10 into a reactor having a substrate disposed therein and depositing at least part of the alkylamino-substituted halocarbosilane precursor onto the substrate to form the Silicon-containing film.

12. The process of claim 1 1 , further comprising introducing at least one reactant into the reactor.

13. The process of claim 12, wherein the deposition is plasma enhanced.

14. A process of manufacturing a semiconductor device, the process

comprising:

Introducing a first catalytic gas and a vapor of the Si-containing film forming composition of any one of claims 1 to 10 into a reactor having a substrate disposed therein;

Introducing an oxidizing gas and a second catalytic gas into the reactor.

15. The process of claim 14, wherein the catalytic gas is an amine, such as pyridine or triethylamine.