WO2016198619A1 - Filtre de transmission optique - Google Patents

Filtre de transmission optique Download PDF

Info

Publication number
WO2016198619A1
WO2016198619A1 PCT/EP2016/063325 EP2016063325W WO2016198619A1 WO 2016198619 A1 WO2016198619 A1 WO 2016198619A1 EP 2016063325 W EP2016063325 W EP 2016063325W WO 2016198619 A1 WO2016198619 A1 WO 2016198619A1
Authority
WO
WIPO (PCT)
Prior art keywords
nanopillars
optical transmission
transmission filter
filter
filter according
Prior art date
Application number
PCT/EP2016/063325
Other languages
English (en)
Inventor
Bikash DEV CHOUDHURY
Anand Srinivasan
Pankaj Kumar SAHOO
Original Assignee
Dev Choudhury Bikash
Anand Srinivasan
Sahoo Pankaj Kumar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dev Choudhury Bikash, Anand Srinivasan, Sahoo Pankaj Kumar filed Critical Dev Choudhury Bikash
Publication of WO2016198619A1 publication Critical patent/WO2016198619A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/207—Filters comprising semiconducting materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685—Process for coatings or optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14621—Colour filter arrangements

Definitions

  • the present invention relates to an optical transmission filter comprising a plurality of nanopillars according to the preamble of claim 1 . It also relates to a display and an image sensor device comprising such a filter.
  • US 2010/091225 discloses an optical transmission filter in which periodically arranged nano-sized holes are used to realise a photonic crystal effect.
  • US 201 1 /102716 discloses a colour filter relying on a surface plasmon effect achieved by means of an arrangement of nano- sized holes in a metal film.
  • US 201 1 /309237A1 discloses a colour filter comprising periodic arrays of Si nanowires, in which the optical properties of the colour filter are based on diameter dependent absorption properties of individual nanowires.
  • US 2014049812A1 discloses a spectral filter relying on a surface Plasmon effect achieved by means of a periodic arrangement of combined dielectric and metallic nanostructures.
  • WO 2014028380A2 discloses a multispectral imaging device comprising periodic arrays of Si nanowires, which makes use of the diameter dependent absorption properties of individual nanowires.
  • the above mentioned nanostructure based colour filters are basically reflection type filters, band rejection type filters or band pass transmission filters.
  • band rejection type filters requires stacking of several different filters in order to transmit only one colour and such filters are therefore generally not used in commercial image sensors and displays.
  • Band pass transmission filters transmits only one colour.
  • the colour filter characteristics are dependent i) on incidence angle and ii) on polarisation orientation of incident light.
  • the optical transmission is low, and light has a tendency to spread beyond individual pixels. It is therefore desirable to develop nanostructure based band pass transmission colour filters in which these drawbacks are reduced.
  • Another objective is to provide an optical transmission filter which is suitable for high resolution applications.
  • Yet another objective is to provide an optical transmission filter which is operable at relatively high temperatures and which is UV light resistant.
  • At least the primary objective is achieved by means of the initially defined optical transmission filter, which is characterised in that a relation between said minimum distance P between neighbouring nanopillars and said average equivalent diameter D of the nanopillars is such that a transmission spectrum of the optical transmission filter is dominated by effects arising from optical coupling between the nanopillars, and in that the nanopillars are arranged in a non-periodic pattern. Apart from effects arising from optical coupling between the nanopillars, resonance effects depending on the diameter of the nanopillars and other properties of the nanopillars influence the transmission spectrum.
  • an aperiodic pattern i.e. a pattern having neither short term order nor long term order, such as an aperiodic pattern or a correlated disordered pattern, or a quasi- periodic pattern, i.e. a pattern having order, but which is not periodic.
  • the properties of the optical transmission filter according to the invention thus do not rely solely on the optical properties of individual nanopillars, but also, and predominantly, on the optical coupling effects arising due to interaction between the nanopillars. This results in an optical transmission spectrum with two major dips and one major peak in the visible and near- infrared wavelength range. The location of this peak depends on both the average equivalent diameter and the minimum centre to centre distance between the nanopillars.
  • the dip is limited by diameter dependent absorption of the nanopillars, and toward the long wavelength range, the dip is limited by absorption arising due to optical coupling between the nanopillars.
  • the filter according to the invention can filter white light to generate vivid colours in transmission, ranging from violet to red . It is thereby well suited for use as a colour filter for commercial image sensors and display applications as well as for scientific research.
  • the optical transmission filter according to the invention can be made independent of the orientation of polarisation of incoming light, depending on the shape of the nanopillars. It furthermore works for a broad range of incident angles of the incoming light. These properties render the filter very useful for wide viewing and acceptance angle applications such as in displays and cameras.
  • the filter according to the invention can be made with a very small number of nanopillars, such as at least 5 nanopillars. Thanks to the small number of nanopillars needed, the filter can be used for small pixel sizes down to 0.75 ⁇ and can thereby provide a very high resolution of e.g. a colour display or a sensor in which the filter is used. Technologically, the filter is possible to adapt for both large displays and small optical detectors. Standard CMOS (complementary metal oxide semiconductor) based fabrication processes can be used to manufacture the filter, and the filter can easily be integrated with CMOS or CCD (charge coupled devices) devices. The scalability of the filter is therefore excellent and it can be used both for small image sensors and for large displays.
  • CMOS complementary metal oxide semiconductor
  • the optical transmission filter according to the invention is based on the principle of guided light with high directionality. After transmission , the light does not diverge as in the case of diffraction based filters and other filters. This improves the colour purity of the filter and reduces crosstalk issues. Also, non-periodic arrangement of the nanopillar arrays can introduce transverse localisation of light, which can further collimate the transmitted/filtered light to enable higher pixel density with reduced inter pixel cross talk in CMOS or CCD image sensors or display devices.
  • Non-periodic patterns can be generated from known mathematical expressions, physical phenomena modelled with proper algorithms or simple biomimicry and can be manufactured using standard fabrication techniques in semiconductor technology.
  • the distance P between neighbouring nanopillars is easy to adjust for different optical properties of the filter.
  • inventive filter may be incorporated with flexible or bendable devices with ease as the nanopillars are detached from each other and the transmission properties are unchanged under bending or folding . This is useful since flexibility or bendability is becoming an essential aspect of many modern day display devices like e.g. smart phones and laptop screens.
  • said relation between the minimum distance P between the nearest neighbour nanopillars and the average equivalent diameter D of the nanopillars can be expressed as P-D ⁇ A pea k, where A pea k is the wavelength in the visible range that corresponds to the highest (peak) intensity of a transmission spectrum from said optical transmission filter. This relation ensures that optical coupling effects occur and that the optical transmission filter obtained is a band pass filter.
  • the support medium comprises a substrate on which the nanopillars are arranged.
  • the substrate may be either a transparent or near transparent substrate, or a substrate which absorbs light.
  • the filter can be used as a stand-alone optical transmission filter which can be transferred onto other devices after fabrication .
  • the filter can be used as an integrated optical transmission filter, wherein the substrate forms part of a device in which the filter is used.
  • the filter according to this embodiment is versatile and relatively easy to manufacture and handle.
  • the nanopillars that are supported on the substrate may be surrounded by a gas atmosphere, such as air, or by a liquid.
  • the substrate is made from a material selected from the group of polydimethylsiloxane (PDMS), Si , polycrystalline Si , amorphous Si , InP, Ge, GaP, GaN, GaAs, AIGaAs, Si0 2 , Ti0 2 , indium tin oxide (ITO), ZnO, benzocyclobutene (BCB), poly methyl methacrylate (PMMA), Si3N 4 , and mixtures thereof.
  • the material is selected based on the desired properties of the optical transmission filter.
  • non-transparent materials such as Si (monocrystalline), polycrystalline Si and amorphous Si are useful in the case of an integrated filter, while as transparent materials such as S 1 O2 etc. are useful for non-integrated filters.
  • the support medium comprises a matrix material in which the nanopillars are embedded.
  • the matrix material may itself be a supporting material, in which case it is not necessary to also provide a substrate on which the nanopillars are arranged.
  • the matrix material and the nanopillars may also be further supported by a substrate as described above.
  • the matrix material is selected from the group of PDMS, S1 O2, T1 O2, indium tin oxide (ITO), ZnO, BCB, poly methyl methacrylate (PMMA), Si3N 4 , and mixtures thereof. These are all materials having suitable optical properties, such as a low absorption in the visible wavelength range.
  • the nanopillars comprise a material having a significantly higher optical absorption in the visible wavelength range than the support medium. In this way, it is ensured that the optical properties of the assembly of nanopillars dominate the optical properties of the optical transmission filter.
  • the support medium is, at least in part, transparent or near transparent to light in the visible wavelength range. This is particularly suitable for a non-integrated filter and for a filter comprising a support medium in the form of a matrix material.
  • the nanopillars comprise a material having, in the visible wavelength range, a real part of the refractive index n_NP which is larger than or equal to the real part of the refractive index n_support of the support medium.
  • n_NP > n_support + 1 .5.
  • the filter support medium comprises both a matrix material and a substrate
  • the nanopillars comprise a material having, in the visible wavelength range, a real part of the refractive index n_NP which is larger than or equal to the real part of the refractive index n_substrate of the substrate, which in turn is larger than or equal to the real part of the refractive index n_matrix of the matrix, n_NP > n_substrate > n_matrix.
  • the filter support medium comprises both a matrix material and a substrate
  • the nanopillars comprise a material having, in the visible wavelength range, a real part of the refractive index n_NP which is smaller than or equal to the real part of the refractive index n_substrate of the substrate, and which is larger than or equal to the real part of refractive index n_matrix of the matrix, n_substrate > n_NP > n_matrix.
  • the nanopillars comprise a material having, in the visible wavelength range, a real part of the refractive index n_NP > 1 .75, and an optical absorption coefficient a_NP within the range 10 2 — 0 6 cm 1 .
  • the nanopillars comprise a material selected from the group of Si, polycrystalline Si , amorphous Si , InP, GaAs, GaN, AIGaAs, GaP, Ge, GeSn, SiGeSn, and mixtures thereof.
  • at least a core of the nanopillars consist mainly or entirely of any of those materials.
  • Si based (monocrystalline, polycrystalline and/or amorphous) nanopillars give a filter with long life time, UV light resistance and which is suitable for temperatures up to 400°C.
  • the nanopillars comprise a coating, which coating is preferably selected from the group of Si0 2 , Ti0 2 , indium tin oxide (ITO), ZnO, AI2O3, Si3N 4 and mixtures thereof.
  • the average thickness of the coating may range from 1 to 100 nm.
  • the coating can be used for fine tuning of a refractive index contrast between the nanopillars and the surrounding environment and to tune the transmission spectrum of the optical transmission filter.
  • the coating can also act as a protective layer protecting from a chemical or mechanical agent, and/or it can act as an electrode for electrical connectivity.
  • the nanopillars are arranged in at least one aperiodic assembly, such as a correlated disordered assembly.
  • the distance P between neighbouring nanopillars is in this embodiment easy to adjust for different optical properties of the filter.
  • by arranging the nanopillars in an aperiodic assembly it is possible to achieve a filter which exhibits a strong directional propagation of light and thereby eliminates problems with crosstalk, also for very small pixel sizes. Inter colour and pixel crosstalk is reduced and requirements put on inner focusing lenses in high resolution image sensors may be relaxed .
  • the nanopillars are arranged in at least one quasi periodic assembly.
  • each of the nanopillars has a height within a range of 500-3000 nm. Within this range, sufficient contrast is achieved in the transmission spectrum.
  • the nanopillars are arranged in a two-dimensional pattern at a minimum centre to centre distance P between neighbouring nanopillars within a range of 100-600 nm.
  • the filter is in this embodiment optimised for filtering light within the visible range.
  • the invention also relates to a display device including the proposed optical transmission filter and to an image sensor device including the proposed optical transmission filter. Advantages and advantageous features of such devices appear from the above description of the proposed filter. Further advantages and advantageous features will appear from the following detailed description.
  • FIG. 1 is a sectional view of three different optical transmission filters according to an embodiment of the present invention in a line arrangement
  • optical transmission filter is a sectional view of an optical transmission filter according to an embodiment of the invention, is a sectional view of an optical transmission filter according to the first embodiment of the invention, is a sectional view of an optical transmission filter according to the second embodiment of the invention , are transmission spectra of red , green and blue optical transmission filters according to the invention , are transmission spectra of a green optical transmission filter for different angles of incidence according to the invention,
  • Fig.8 schematically shows strong directional propagation of light for an optical transmission filter according to an embodiment of the invention
  • Fig.9 shows a fabrication process for a filter according to the invention.
  • a filter an optical transmission filter 1 , 4 (hereinafter referred to as "a filter") according to a first and a second embodiment of the present invention are shown in fig. 1 a and fig . 1 b, respectively.
  • the filter 1 , 4 comprises an aperiodic array of nanopillars (NPs) 2 arranged on a substrate 3.
  • NPs nanopillars
  • Fig. 1 a shows a filter 1 according to a first embodiment of the present invention , in which NPs 2 are arranged on a substrate 3 and are embedded by a transparent layer of a matrix material 5.
  • the NP assemblies of the filter 1 are arranged aperiodically in a correlated disorder manner, which is here a deviation from a hexagonal arrangement by some percentage, further discussed below.
  • the assemblies have a minimum centre to centre NP spacing P, pillar diameter D and height h. For a filter of a particular colour, these parameters are the same for all the NPs and NP assemblies.
  • the refractive index of the filter 10 changes in a correlated perturbed manner in transverse directions along the substrate, depending on the degree of correlation. Referring to fig .
  • the filter 4 according to this second embodiment is similar to the filter 1 shown in fig . 1 a, with the only difference being the absence of a matrix material 5.
  • This configuration may be useful for some application in displays or image sensors, although it will not change the transmission spectrum of the filter.
  • the NPs can be of e.g. circular, elliptical , square, rectangular or polygonal cross section.
  • the NPs are preferably cylindrical with the long axes of the NPs extending in parallel or essentially in parallel.
  • the minimum centre to centre distance P between neighbouring NPs 2 can be in the range of 100 to 1000 nm, preferably 100 to 600 nm depending on the average equivalent diameter D of the NPs.
  • the average equivalent diameter D hereinafter also referred to as the diameter, is here to be understood as the diameter of a circle having the cross sectional area of the NP.
  • the diameter D can be from 50 nm to 350 nm for the shortest to the longest wavelength of visible light in ascending order.
  • the height h of the NPs can vary from 500 nm to 3000 nm. The height h can be chosen for trade-off in contrast between a transmission peak 10 and rejection dips 12, 13 (see fig . 5) in a transmission spectrum of the filter.
  • Different colours can be extracted from white light by changing the diameter of the NPs 2 in all shown filters according to the invention, while keeping the minimum centre to centre distance between NPs fixed.
  • the following examples illustrate typical values for the geometric parameters for the case of Si NPs embedded in a PDMS matrix.
  • a diameter D of 55 ⁇ 15 nm gives a violet colour on the short end of the visible light spectrum, while toward the long end , 205 ⁇ 15 nm gives a red colour for a minimum distance P between adjacent NPs of 400 ⁇ 30 nm in the correlated disorder case.
  • diameters D of 55 ⁇ 15 nm give violet colour
  • 85 ⁇ 15 nm give blue
  • 1 15 ⁇ 15 nm give cyan
  • 145 ⁇ 15 nm give green
  • 1 75 ⁇ 15 nm give yellow
  • 205 ⁇ 15 nm give red colour for a minimum distance D between adjacent NPs of 400 ⁇ 30 nm.
  • a period of 430 ⁇ 30 nm in combination with the mentioned diameters D produces the same colours as mentioned above.
  • the filter can be model in a Finite-Difference Time-Domain (FDTD) simulation tool and the design can thereby be optimised for colour purity and sharpness.
  • FDTD Finite-Difference Time-Domain
  • the average equivalent diameter D of the nanopillars 2 is such that a transmission spectrum of the filter is dominated by effects arising from optical coupling between the nanopillars.
  • this relation can be expressed as P-D ⁇ A pea k, where A pea k is the wavelength that corresponds to the highest (peak) intensity of a transmission spectrum from the filter.
  • the NPs can be made of, or comprise mainly, (monocrystalline) Si , polycrystalline Si , amorphous Si, InP, GaAs, GaN, AIGaAs, GaP, Ge, GeSn, SiGeSn, and mixtures thereof.
  • the substrate 3 can be made from a material selected from the group of PDMS, Si, polycrystalline Si , amorphous Si , InP, Ge, GaP, GaN, GaAs, AIGaAs, Si0 2 , Ti0 2 , indium tin oxide (ITO), ZnO, BCB, poly methyl methacrylate (PMMA), Si3N 4 , and mixtures thereof.
  • the real part of the refractive index n_NP of the material of the NPs can be equal to or higher than , such as two times higher than, that of the substrate material , n_substrate.
  • the absorption coefficient a_NP of the NP material can be within the range 10 2 - 10 6 cm -1 in the visible wavelength range, 400-700 nm.
  • the absorption coefficient a_substrate is the same for the NP material or close to zero, depending on the application.
  • the NPs of the filter can also comprise of a coating with another material selected from the group of materials consisting of S1O2, AI2O3, T1O2, ZnO, ITO, Si3N 4 , and mixtures thereof.
  • the coating may be 1 -100 nm thick.
  • the aperiodic pattern of the NP assemblies can be generated following e.g. a molecular dynamics collision between hard spheres algorithm.
  • the Lubachevsky-Stillinger algorithm can be used to generate correlated disordered patterns.
  • the percentage of deviation from a hexagonal arrangement of the NPs is in this algorithm defined by the initial packing fraction (IPF) of the NPs in a unit area.
  • the IPF is defined as the percentage of an area covered by a said entity, i.e. NPs, in a 2D space. While 75% IPF gives hexagonal arrays, decreasing the IPF from 75% down to 30% gives an increase in deviation from the hexagonal arrangement, but in a correlated manner.
  • 2D correlated disorder patterns can e.g. be having a disorder of the order of 15% to 70% for a filter according to the present invention.
  • Particle swarm optimisation algorithms can alternatively be used to generate an aperiodic pattern, and also other algorithms.
  • aperiodic and quasi- periodic patterns can also be used, such as a quasi-periodic Fibonacci pattern, a Rudin-Shapiro pattern, or a Thue-Morse pattern or biomimicry of aperiodic or correlated disordered pattern existing in nature, such as in bird feathers, in insects or in plants, although a person skilled in the art realises that also many other options exist.
  • Fig . 2 shows a cross sectional view of RGB filters using three filters 6, 7, 8 according to the invention with aperiodically arranged NP assemblies arranged together.
  • the red filter 6, the green filter 7, and the blue filter 8 are arranged side by side and separated by a blank spacing 9.
  • the blank spacing 9 restricts the downsizing of pixel size and pitch and is essential to separate different colours, or to avoid cross talk.
  • the RGB filter is capable of accepting white light (WL) with a wide incident angle, from normal incidence up to 60° off normal, and filtering it to different colours.
  • red (R), green (G) and blue (B) light is transmitted through designated filters depending on filter properties, diameter of the NPs and centre to centre spacing of the NPs of a particular filter.
  • the red filter 6 has the largest diameter of the NPs 2
  • the blue filter 8 has the smallest diameters of the NPs 2
  • the green filter 7 has an intermediate diameter of the NPs 2 for a particular centre to centre spacing of the NPs 2.
  • a photodetector PD for each of the filters 6, 7, 8 can be arranged directly below the filter or separated by another component.
  • Fig . 3 shows top views of a red filter 6, a green filter 7 and a blue filter 8, all having aperiodically arranged NPs 2 on a substrate 3, arranged together side by side.
  • Fig . 4a, 4b and 4c show cross sections of filters according to different embodiments of the present invention, wherein NPs 2 are arranged in aperiodic assemblies.
  • Fig 4a shows NPs embedded in a matrix material 5 without supporting substrate.
  • Fig 4b shows an embodiment in which NPs 2 are arranged on a substrate 3 and embedded by a matrix material 5.
  • Fig 4c shows an embodiment in which NPs 2 are arranged on a substrate 3 without being embedded in a matrix material 5.
  • Fig . 5 shows a transmission spectrum from an RGB filter comprising three filters according to the present invention . Light of a particular colour is transmitted by the filter with a corresponding transmission spectrum which is defined by inter nanopillar spacing P, pillar diameter D and height h.
  • P nanopillar spacing
  • a first major dip 12 and a second major dip 13 (here shown for blue light) define the transmission spectrum and the transmitted colour.
  • a transmission peak 10 (corresponding to Apeak ) is the highest (peak) intensity position of a transmission spectrum from said optical transmission filter.
  • the position (wavelength) of the first major dip 12 is defined by NP diameter D
  • the position of the second major dip 13 is defined by both NP diameter D and minimum centre to centre distance P between NPs.
  • the height h of the NPs 2 controls the contrast ratio between the major dips 12, 13 and the transmission peak 10.
  • the transmission in percent of incident light at the major dips 12, 13 and at the transmission peak 10 position is inversely proportional to the height h of the NPs.
  • the full-width at half maximum (FWHM) 1 1 of the transmission spectrum for a particular colour can be increased or decreased by increasing or decreasing the minimum distance P between NPs.
  • the filter according to the invention having a correlated disorder NP pattern has an additional advantage of strong directional propagation of light as shown in fig . 8. While transmitting through a filter 14, due to transverse localisation, the output width 16 of a wave front 18 of transmitted light is less or equal to the input width 15 of a wave front 17 of incoming light.
  • NPs shown per filter in the above discussed examples is chosen merely for illustrative purpose. The actual number can vary from case to case up to a very large number depending on the size of the filter. However, a number of 5-15 nanopillars are sufficient to produce a distinct colour in transmission and obtain a transmission spectrum such as shown in fig. 5.
  • the filters according to the invention can be fabricated using standard CMOS fabrication techniques.
  • Nanoimprint lithography can preferably be used for patterning a polymer mask for fabrication of NP assemblies.
  • Nanopillar dimensions like diameter D or side of the NP, spacing between NPs or period of NP arrays and height h of the NP are determined by mask pattern and inductively coupled plasma etching parameters.
  • the filter according to the invention are also well suited to be fabricated using interference lithography, direct laser writing, e-beam lithography, nano stencil lithography, colloidal lithography, etc.
  • the generic fabrication process flow for filters according to the invention are shown in fig .9 and listed below:
  • the non-periodic patterns of NPs are transferred to a photoresist (PR) mask on a parent substrate such as a Si wafer coated with a S 1 O2 hard mask by nanoimprint lithography. 2) The patterns are further transferred to the S 1 O2 hard mask by plasma reactive ion etching (RIE) process.
  • PR photoresist
  • RIE plasma reactive ion etching
  • the patterned substrate is etched through the S 1 O2 hard mask by dry plasma etching in a 'Pseudo Bosch' process to create Si nanopillars.
  • the as-etched Si nanopillars are further modified by another dry etching step. This step is particularly for ease of subsequent nanopillar peel-off process.
  • a flexible PDMS film is moulded over the Si NPs by pouring PDMS (liquid) on the NPs and a subsequent thermal curing .
  • the filter according to the present invention is possible to directly integrate with displays of LCD, LED or OLED type during the display fabrication process, or it is possible to separately fabricate the filter and fit it to a display device afterwards.
  • the filter can also be used as a colour filter for image sensors for digital cameras and other devices. It can in that case be integrated during a CMOS or CCD image sensor fabrication process in the same material platform, or it can be separately fabricated and integrated afterwards.
  • the filter can be used as a standalone flexible or nonflexible colour filter for scientific or aesthetic applications.
  • the filters can furthermore be used e.g. in smart windows and flexible nano-photonics.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Filters (AREA)

Abstract

La présente invention concerne un filtre de transmission optique de type passe-bande qui comprend une pluralité de nanopiliers portés par un moyen de support, ces nanopiliers étant disposés selon une configuration non périodique bidimensionnelle à une distance centre à centre minimale (P) entre des nanopiliers voisins comprise entre 100 et 1 000 nm, et lesdits nanopiliers ayant un diamètre équivalent moyen (D) qui va de 50 à 350 nm. Le rapport entre ladite distance minimale (P) entre des nanopiliers voisins et ledit diamètre équivalent moyen (D) des nanopiliers est tel qu'un spectre de transmission du filtre de transmission optique est dominé par les effets découlant du couplage optique entre les nanopiliers.
PCT/EP2016/063325 2015-06-12 2016-06-10 Filtre de transmission optique WO2016198619A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE1550804-7 2015-06-12
SE1550804 2015-06-12

Publications (1)

Publication Number Publication Date
WO2016198619A1 true WO2016198619A1 (fr) 2016-12-15

Family

ID=56121078

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/063325 WO2016198619A1 (fr) 2015-06-12 2016-06-10 Filtre de transmission optique

Country Status (1)

Country Link
WO (1) WO2016198619A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109179311A (zh) * 2018-08-28 2019-01-11 湘潭大学 一种检测柱状自组装薄膜结构的方法及其制备方法
WO2019124562A1 (fr) * 2017-12-22 2019-06-27 ソニーセミコンダクタソリューションズ株式会社 Dispositif d'imagerie à semi-conducteurs et dispositif électronique
CN110649110A (zh) * 2019-10-18 2020-01-03 南京工业大学 一种光伏纳米柱结构及基于该结构的太阳能电池
CN111504947A (zh) * 2020-04-14 2020-08-07 桂林电子科技大学 基于mim环形格点阵列的表面等离激元折射率传感器
CN113391388A (zh) * 2021-05-27 2021-09-14 扬州大学 基于pdms的峰值连续可变导模共振滤光片及制备方法
CN113625392A (zh) * 2021-08-09 2021-11-09 吉林大学 一种基于有机无机混合集成的4×4光开关阵列
CN113820769A (zh) * 2021-09-26 2021-12-21 维沃移动通信有限公司 镜片、摄像头模组及电子设备
CN113820768A (zh) * 2021-09-26 2021-12-21 维沃移动通信有限公司 镜片组、摄像头模组及电子设备

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005017570A2 (fr) * 2003-08-06 2005-02-24 University Of Pittsburgh Dispositifs nano-optiques a amelioration plasmonique de surface et procedes d'elaboration
US20100091225A1 (en) 2008-10-10 2010-04-15 Samsung Electronics Co., Ltd. Photonic crystal optical filter, transmissive color filter, transflective color filter, and display apparatus using the color filters
US20100259826A1 (en) * 2009-04-10 2010-10-14 Lightwave Power, Inc. Planar plasmonic device for light reflection, diffusion and guiding
US20100288352A1 (en) * 2009-05-12 2010-11-18 Lightwave Power, Inc. Integrated solar cell nanoarray layers and light concentrating device
US20110102716A1 (en) 2009-10-30 2011-05-05 Se-Young Park Color filter using surface plasmon and liquid crystal display device
US20110128605A1 (en) * 2009-11-30 2011-06-02 Bae Systems Information & Electronic Systems Integration, Inc. Radiation-Protection Device
US20110309237A1 (en) 2010-06-22 2011-12-22 President And Fellows Of Harvard College Light absorption and filtering properties of vertically oriented semiconductor nano wires
WO2014028380A2 (fr) 2012-08-13 2014-02-20 President And Fellows Of Harvard College Imagerie multispectrale utilisant des nanofils de silicium
US20140049812A1 (en) 2012-08-16 2014-02-20 Commissariat A L'energie Atomique Et Aux Ene Alt Spectral filtering device in the visible and infrared ranges

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005017570A2 (fr) * 2003-08-06 2005-02-24 University Of Pittsburgh Dispositifs nano-optiques a amelioration plasmonique de surface et procedes d'elaboration
US20100091225A1 (en) 2008-10-10 2010-04-15 Samsung Electronics Co., Ltd. Photonic crystal optical filter, transmissive color filter, transflective color filter, and display apparatus using the color filters
US20100259826A1 (en) * 2009-04-10 2010-10-14 Lightwave Power, Inc. Planar plasmonic device for light reflection, diffusion and guiding
US20100288352A1 (en) * 2009-05-12 2010-11-18 Lightwave Power, Inc. Integrated solar cell nanoarray layers and light concentrating device
US20110102716A1 (en) 2009-10-30 2011-05-05 Se-Young Park Color filter using surface plasmon and liquid crystal display device
US20110128605A1 (en) * 2009-11-30 2011-06-02 Bae Systems Information & Electronic Systems Integration, Inc. Radiation-Protection Device
US20110309237A1 (en) 2010-06-22 2011-12-22 President And Fellows Of Harvard College Light absorption and filtering properties of vertically oriented semiconductor nano wires
WO2014028380A2 (fr) 2012-08-13 2014-02-20 President And Fellows Of Harvard College Imagerie multispectrale utilisant des nanofils de silicium
US20140049812A1 (en) 2012-08-16 2014-02-20 Commissariat A L'energie Atomique Et Aux Ene Alt Spectral filtering device in the visible and infrared ranges

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11508767B2 (en) 2017-12-22 2022-11-22 Sony Semiconductor Solutions Corporation Solid-state imaging device and electronic device for enhanced color reproducibility of images
WO2019124562A1 (fr) * 2017-12-22 2019-06-27 ソニーセミコンダクタソリューションズ株式会社 Dispositif d'imagerie à semi-conducteurs et dispositif électronique
CN109179311B (zh) * 2018-08-28 2019-11-15 湘潭大学 一种检测柱状自组装薄膜结构的方法及其制备方法
CN109179311A (zh) * 2018-08-28 2019-01-11 湘潭大学 一种检测柱状自组装薄膜结构的方法及其制备方法
CN110649110A (zh) * 2019-10-18 2020-01-03 南京工业大学 一种光伏纳米柱结构及基于该结构的太阳能电池
CN111504947A (zh) * 2020-04-14 2020-08-07 桂林电子科技大学 基于mim环形格点阵列的表面等离激元折射率传感器
CN113391388A (zh) * 2021-05-27 2021-09-14 扬州大学 基于pdms的峰值连续可变导模共振滤光片及制备方法
CN113625392A (zh) * 2021-08-09 2021-11-09 吉林大学 一种基于有机无机混合集成的4×4光开关阵列
CN113625392B (zh) * 2021-08-09 2022-08-12 吉林大学 一种基于有机无机混合集成的4×4光开关阵列
CN113820768A (zh) * 2021-09-26 2021-12-21 维沃移动通信有限公司 镜片组、摄像头模组及电子设备
CN113820769A (zh) * 2021-09-26 2021-12-21 维沃移动通信有限公司 镜片、摄像头模组及电子设备
CN113820769B (zh) * 2021-09-26 2024-05-28 维沃移动通信有限公司 镜片、摄像头模组及电子设备
CN113820768B (zh) * 2021-09-26 2024-05-28 维沃移动通信有限公司 镜片组、摄像头模组及电子设备

Similar Documents

Publication Publication Date Title
WO2016198619A1 (fr) Filtre de transmission optique
US11567240B2 (en) Multilayered meta lens and optical apparatus including the same
US11506538B2 (en) Optical filter, optical filter system, spectrometer and method of fabrication thereof
US11487139B2 (en) Nanostructures for optical devices
CN107942540B (zh) 一种基于相变材料的具有动态色彩显示的光调制器件及其制备方法
JP7449453B2 (ja) 適応型照明用のメタレンズ付きｌｅｄアレイ
US9261753B2 (en) Spectrum filtering for visual displays and imaging having minimal angle dependence
Kim et al. Generation of reflection colors from metal–insulator–metal cavity structure enabled by thickness-dependent refractive indices of metal thin film
Yu et al. Transmissive/reflective structural color filters: theory and applications
US9627434B2 (en) System and method for color imaging with integrated plasmonic color filters
Shrestha et al. Non-iridescent transmissive structural color filter featuring highly efficient transmission and high excitation purity
JP5037044B2 (ja) カラー・イメージ・センサ
KR102294845B1 (ko) 광학필터, 광학 디바이스, 및 광학필터의 제조방법
Chen et al. Full-color nanorouter for high-resolution imaging
JP2013525863A (ja) プラズモン・カラー・フィルタ及び光起電力能力を有するディスプレイ・デバイス
US10151863B2 (en) Optical grating
KR102014399B1 (ko) 멀티캐비티 공명을 이용한 구조 색 필터
WO2014087927A1 (fr) Filtre optique
Lee et al. Wide-gamut plasmonic color filters using a complementary design method
KR102637109B1 (ko) 메타 표면용 광학 박막 및 이를 포함하는 메타 광학 소자
Shang et al. Mie resonances enabled subtractive structural colors with low-index-contrast silicon metasurfaces
US20220228918A1 (en) Metalenses for Use in Night-Vision Technology
JP2013033241A5 (fr)
He et al. Multispectral Image Sensors Using Metasurfaces
Liu et al. Polarization-adjusting ultra-narrow multi-band color filtering by dielectric metamaterials

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16728935

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 16/04/2018)

122 Ep: pct application non-entry in european phase

Ref document number: 16728935

Country of ref document: EP

Kind code of ref document: A1