WO2016190984A2 - Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields - Google Patents

Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields Download PDF

Info

Publication number
WO2016190984A2
WO2016190984A2 PCT/US2016/028045 US2016028045W WO2016190984A2 WO 2016190984 A2 WO2016190984 A2 WO 2016190984A2 US 2016028045 W US2016028045 W US 2016028045W WO 2016190984 A2 WO2016190984 A2 WO 2016190984A2
Authority
WO
WIPO (PCT)
Prior art keywords
magnetization
heavy
base element
metal strip
electrical charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2016/028045
Other languages
French (fr)
Other versions
WO2016190984A3 (en
Inventor
Mohammad Kazemi
Engin Ipek
Eby G. Friedman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Rochester
Original Assignee
University of Rochester
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2018510305A priority Critical patent/JP6777364B2/en
Priority to KR1020177032086A priority patent/KR102479452B1/en
Priority to CN201680026484.4A priority patent/CN107580729B/en
Priority to US15/572,017 priority patent/US10510474B2/en
Application filed by University of Rochester filed Critical University of Rochester
Publication of WO2016190984A2 publication Critical patent/WO2016190984A2/en
Publication of WO2016190984A3 publication Critical patent/WO2016190984A3/en
Anticipated expiration legal-status Critical
Priority to US16/710,531 priority patent/US11004588B2/en
Priority to US16/850,173 priority patent/US11594357B2/en
Priority to US17/231,277 priority patent/US11626229B2/en
Priority to US18/123,418 priority patent/US20240047115A1/en
Priority to US18/814,421 priority patent/US20240412909A1/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1675Writing or programming circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/18Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using Hall-effect devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/329Spin-exchange coupled multilayers wherein the magnetisation of the free layer is switched by a spin-polarised current, e.g. spin torque effect
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K19/00Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/02Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components
    • H03K19/18Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using galvano-magnetic devices, e.g. Hall-effect devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/20Spin-polarised current-controlled devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Materials of the active region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • H10N52/101Semiconductor Hall-effect devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • H10N52/80Constructional details
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/109Memory devices

Definitions

  • the application relates to switching the magnetization of nanomagnets and particularly to a base element structure and method for switching the magnetization of nanomagnets.
  • CMOS Complementary metal-oxide-semiconductor
  • magnetization state of a nanomagnet includes a heavy-metal strip having a surface.
  • a ferromagnetic nanomagnet is disposed adjacent to the surface.
  • the ferromagnetic nanomagnet has a first magnetization equilibrium state and a second magnetization equilibrium state.
  • the first magnetization equilibrium state or the second magnetization equilibrium state is settable in an absence of an external magnetic field by a flow of electrical charge through the heavy-metal strip.
  • the flow of electrical charge in a first direction through the heavy-metal strip causes the first magnetization equilibrium state and the flow of electrical charge in a second direction through the heavy-metal strip causes the second magnetization equilibrium state.
  • the nanomagnet includes an elliptical shape having a long axis and a short axis.
  • the long axis is about parallel to the surface of the heavy-metal strip.
  • a direction of flow of the electrical charge through the heavy-metal strip includes an angle ⁇ with respect to the short axis of the nanomagnet.
  • the angle ⁇ determines an energy of switching.
  • the angle ⁇ determines a speed of switching.
  • the base element provides a bit of an integrated memory device.
  • the base element provides a bit of an integrated logic device.
  • the base element provides a bit of an integrated pipelined microprocessor device.
  • the heavy-metal strip includes tungsten or tantalum.
  • the heavy-metal strip includes Aluminum
  • the heavy-metal strip includes Bismuth
  • the heavy-metal strip includes Niobium
  • the heavy-metal strip includes Platinum
  • the heavy-metal strip includes an alloy of copper (Cu) and Bi, or an alloy of Cu and iridium (Ir).
  • a method for switching a magnetization state of a nanomagnet includes the steps of: providing a heavy-metal strip having a surface and a ferromagnetic nanomagnet disposed adj acent to the surface, the ferromagnetic nanomagnet having a first magnetization equilibrium state and a second magnetization equilibrium state; flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state of the nanomagnet in an absence of an external magnetic field to the first magnetization equilibrium state, or to set the magnetization state to the second magnetization equilibrium state.
  • the step of flowing an electrical charge includes flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state within a time period of less than about 50 picoseconds.
  • the step of flowing an electrical charge includes flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state where the magnetization state corresponds to setting a bit of a memory device.
  • the step of flowing an electrical charge includes flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state where the magnetization state corresponds to setting a bit of a logic device.
  • FIG. 1 is a drawing showing a ferromagnetic layer adjacent to a heavy-metal nonmagnetic nanostrip
  • FIG. 2 is a drawing showing how the dynamics of the magnetization motion can be captured by ⁇ and ⁇ ;
  • FIG. 3 A is a drawing showing that the charge current ( J e ) injected through the nonmagnetic heavy-metal induces spin current ( J s );
  • FIG. 3B is a drawing showing an exemplary elliptical ferromagnet having an in-plane anisotropy H fa ;
  • FIG. 3C is a drawing that shows the charge current direction and orientation of the spin polarization ⁇ with respect to H t ;
  • FIG. 4 is a drawing showing the motion of magnetization under the influence of spin-torques and anisotropies.
  • FIG. 5 is a drawing showing the trajectory of the magnetization switching of a ferromagnetic layer using spin-orbit torques in the absence of an external magnetic field.
  • Magnetization switching of ferromagnets using spin-orbit torques provides opportunities to introduce nanomagnets into high performance logic and memory applications requiring low power consumption.
  • Nanomagnets with perpendicular-to-the-plane anisotropy have recently attracted a considerable attention due to their high thermal stability. High stability against thermal fluctuations allows nanomagnets to be deeply scaled down, resulting in dense logic and memory systems with ultra-low power consumption.
  • spin-orbit torques induced by an in- plane current pulse cannot switch the magnetization.
  • An external magnetic field is, therefore, required to assist spin-orbit torques by breaking the symmetry.
  • CMOS complementary metal-oxide-semiconductor
  • Additional metals are also necessary to produce the required magnetic field, significantly decrease the number of devices which can be integrated over a given area. Therefore, the need for an external magnetic field is an obstacle for developing dense low power memory and logic systems.
  • fast switching requires higher energy to be injected through the ferromagnet and/or metals producing magnetic field. Since the required energy grows significantly as the desired switching speed increases, fast operation compromises the energy efficiency.
  • a solution to the problems described hereinabove switches the magnetization of a nanomagnet with perpendicular-to-the-plane anisotropy using spin-orbit torques induced by an in-plane current pulse without the presence of an external magnetic field.
  • the solution includes a scheme to switch the magnetization of a nanomagnet with perpendicular-to-the-plane anisotropy using spin-orbit torques induced by an in-plane current pulse without the presence of an external magnetic field. It was realized that magnetization switching can be achieved by breaking the symmetry by introducing an in-plane anisotropy into the nanomagnet. We describe how spin orbit torques induced by an in-plane current pulse of appropriate amplitude and duration are sufficient to switch the magnetization of the nanomagnet in absence of an external magnetic field.
  • FIG. 1 shows an exemplary ferromagnetic layer including a perpendicular- to-the-plane anisotropy ( H fc ) and an in-plane anisotropy ( H fa ) is situated on a heavy-metal nanostrip.
  • FIG. 1 shows a ferromagnetic layer represented by a Stoner-Wohlfarth monodomain magnetic body 101 with magnetization M , situated at a heavy-metal nonmagnetic nanostrip 102 with strong spin-orbit coupling.
  • the ferromagnetic layer as shown in FIG. 1, includes a perpendicular-to-the-plane uniaxial anisotropy H fc along the e z axis and an in-plane uniaxial anisotropy H fa along the e axis.
  • FIG. 2 shows how the dynamics of the magnetization motion can be captured by and ⁇ .
  • the motion of M is represented by a unit vector n m , which makes an angle with e z axis, while the plane of M and e z makes an angle ⁇ with e .
  • FIG. 3 A shows that the charge current ( J e ) injected through the nonmagnetic heavy-metal induces spin current ( J s ).
  • a charge current J e injected through the heavy-metal nanostrip, produces a traverse spin current ⁇ @m( c x '$ e ) d ue to the spin-orbit interaction, where J e is the charge current density, ⁇ is the spin polarization unit vector, and ⁇ 8 ⁇ is the material dependent spin Hall angle.
  • FIG. 3B shows an illustration of an exemplary elliptical ferromagnet having an in-plane anisotropy H fa .
  • FIG. 3C shows the charge current direction 301 and orientation of the spin polarization ⁇ with respect to the H fa .
  • the direction of the charge current J e makes an angle of ⁇ with e axis.
  • Spin polarized current transports spin angular momentum into the nanomagnet, exerting a torque on the magnetization.
  • LLG Landau-Lifshitz-Gilbert
  • H e /f is a function of H kx and H fcz .
  • FIG. 4 shows the motion of magnetization under the influence of spin-torques and anisotropies.
  • the in-plane torque T ⁇ lies in the plane defined by M and H eff
  • the out-of-plane torque T 00p points out of the plane defined by M and H eff .
  • FIG. 5 shows the trajectory of the magnetization switching of a ferromagnetic layer using spin-orbit torques in the absence of any external magnetic field.
  • charge current J e through the heavy-metal nonmagnetic nanostrip, produced spin torques derive M out of the equilibrium position (also called an equilibrium state) toward the in-plane of the nanomagnet.
  • spin torque reduces to zero and M is close to the x-y plane and away from the e z axis by an angle of ⁇ .
  • H e// is significantly dominated by H fa .
  • M passes the hard axis by precessing around the H e// .
  • H e// is dominated by H fe .
  • M is pulled towards the new equilibrium state by precessing and damping around H e// , completing the magnetization switching.
  • the duration t e of the applied current pulse is as short as the time which causes the magnetization M to move from the equilibrium state to the critical zone.
  • the magnetization switching can be performed using current pulses of a duration of sub-50 ps. Therefore, the proposed scheme significantly improves the switching speed and/or reduces the energy consumption, resulting in ultra-highspeed spin-torque memory and logic systems which have significantly low energy consumption. Furthermore, as no extra metal is required for producing an external magnetic field, integration density is considerably enhanced. [0045] It is contemplated that both switching energy and switching speed can be determined by the angle ⁇ . It is also contemplated that there is a tradeoff between switching energy and switching speed as can be set by the angle ⁇ .
  • Heavy-metals as used hereinabove include any suitable transition metals having a large atomic number, such as, for example, tungsten (W), tantalum (Ta), Aluminum (Al), Gold (Au), Bismuth (Bi), Molybdenum (Mo), Niobium (Nb), Palladium (Pd), or Platinum (Pt). Also included are any suitable metal alloys, such as, for example, an alloy of copper (Cu) and Bi, or an alloy of Cu and iridium (Ir). By injecting a charge current through a heavy-metal thin film of any suitable metal or metal alloy as listed hereinabove, a traverse spin current is produced due to strong spin-orbit coupling.
  • suitable transition metals having a large atomic number such as, for example, tungsten (W), tantalum (Ta), Aluminum (Al), Gold (Au), Bismuth (Bi), Molybdenum (Mo), Niobium (Nb), Palladium (Pd), or Platinum (Pt).
  • the produced spin current may be used to switch the direction of the magnetization of a nanomagnet.
  • a traverse spin current is produced due to strong spin-orbit coupling.
  • the produced spin current may be used to switch the direction of the magnetization of a nanomagnet.
  • the magnitude of the produced spin current is directly proportional to the spin Hall angle of a thin film heavy-metal. Large spin Hall angles have been observed in some high resistivity thin films of heavy-metals. It has been shown both experimentally and theoretically that the magnitude of the spin Hall angle in some thin film heavy-metals such as, for example, thin films of W is directly proportional to the resistivity (thickness) of the thin film. For example, it has been observed that by increasing the thickness of a thin film of tungsten from 5.2 nm to 15 nm, the spin Hall angle drops from 0.33 to less than 0.07.
  • the magnitude of the produced spin current is directly proportional to the spin Hall angle of a thin film heavy-metal.
  • Large spin Hall angles have been observed in some high resistivity thin films of heavy-metals. It has been shown both experimentally and theoretically that the magnitude of the measured (calculated) spin Hall angle in thin film heavy-metals is directly proportional to the resistivity (thickness) of the thin film. For example, it has been observed that by increasing the thickness of a thin film of tungsten from 5.2 nm to 15 nm, the spin Hall angle drops from 0.33 to less than 0.07.
  • a base element 100 for switching a magnetization state of a nanomagnet 101 includes a heavy-metal strip 102 having a surface 103.
  • the ferromagnetic nanomagnet 101 is disposed adjacent to the surface 103 of the heavy-metal strip 102.
  • the ferromagnetic nanomagnet 101 as a first magnetization equilibrium state 501 and a second magnetization equilibrium state 502 (also referred to in some embodiments as an upward equilibrium state and a downward equilibrium state).
  • the first magnetization equilibrium state 501 or the second magnetization equilibrium state 502 is settable by a flow of electrical charge having an electrical charge current direction 301 through the heavy-metal strip.
  • the ferromagnetic nanomagnet can also be a feature of a magnetic layer in an integrated device incorporating the base element.
  • the magnetization of the nanomagnet can be switched between a first equilibrium state and a second equilibrium state, such as by reversing the direction of the flow of charge.
  • the first equilibrium state can be assigned to either a Boolean "0" or a "1" and the second equilibrium state can be assigned to the other Boolean number different from the first equilibrium state.
  • the method to change the magnetization as described hereinabove is analogous to a "write" operation.
  • a "read" operation to determine the magnetization state of the base element can be performed by sensing a low resistance or a high resistance.
  • the base element described hereinabove can be used as a bit of an integrated device, such as, for example, a memory device or a logic device.
  • techniques of integration known in the art can be used to form and interconnect a plurality of such base elements.
  • billions of such base elements with nanomagnets of an integrated magnetic layer can be integrated into a single integrated device.
  • Internal integrated electrical connections between base elements can be made using integrated circuit interconnection techniques known in the art.

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Hall/Mr Elements (AREA)
  • Mram Or Spin Memory Techniques (AREA)

Abstract

A base element for switching a magnetization state of a nanomagnet includes a heavy-metal strip having a surface. A ferromagnetic nanomagnet is disposed adjacent to the surface. The ferromagnetic nanomagnet has a first magnetization equilibrium state and a second magnetization equilibrium state. The first magnetization equilibrium state or the second magnetization equilibrium state is settable in an absence of an external magnetic field by a flow of electrical charge through the heavy-metal strip. A method for switching a magnetization state of a nanomagnet is also described.

Description

SWITCHING OF PERPENDICULARLY MAGNETIZED NANOMAGNETS WITH SPIN-ORBIT TORQUES
IN THE ABSENCE OF EXTERNAL MAGNETIC FIELDS
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims priority to and the benefit of co-pending U.S. provisional patent application Serial No. 62/158,805, SWITCHING OF
PERPENDICULARLY MAGNETIZED NANOMAGNETS WITH SPIN-ORBIT TORQUES IN THE ABSENCE OF EXTERNAL MAGNETIC FIELDS, filed May 8, 2015, which application is incorporated herein by reference in its entirety.
STATEMENT REGARDING FEDERALLY FUNDED RESEARCH OR DEVELOPMENT
[0002] This invention was made with Government Support under Contract
GR526115 and GR526116 awarded by the Intelligence Advanced Research Projects Activity (IARPA). The Government has certain rights in the invention.
FIELD OF THE APPLICATION
[0003] The application relates to switching the magnetization of nanomagnets and particularly to a base element structure and method for switching the magnetization of nanomagnets.
BACKGROUND
[0004] Complementary metal-oxide-semiconductor (CMOS) technologies are prevalent today in memory and logic systems. However, CMOS technologies no longer provide a desired balance of fast operation, high density integration, and energy efficiency.
SUMMARY
[0005] According to one aspect, a base element for switching a
magnetization state of a nanomagnet includes a heavy-metal strip having a surface. A ferromagnetic nanomagnet is disposed adjacent to the surface. The ferromagnetic nanomagnet has a first magnetization equilibrium state and a second magnetization equilibrium state. The first magnetization equilibrium state or the second magnetization equilibrium state is settable in an absence of an external magnetic field by a flow of electrical charge through the heavy-metal strip.
[0006] In another embodiment, the flow of electrical charge in a first direction through the heavy-metal strip causes the first magnetization equilibrium state and the flow of electrical charge in a second direction through the heavy-metal strip causes the second magnetization equilibrium state.
[0007] In yet another embodiment, the nanomagnet includes an elliptical shape having a long axis and a short axis.
[0008] In yet another embodiment, the long axis is about parallel to the surface of the heavy-metal strip.
[0009] In yet another embodiment, a direction of flow of the electrical charge through the heavy-metal strip includes an angle ξ with respect to the short axis of the nanomagnet.
[0010] In yet another embodiment, the angle ξ determines an energy of switching.
[0011] In yet another embodiment, the angle ξ determines a speed of switching.
[0012] In yet another embodiment, the base element provides a bit of an integrated memory device.
[0013] In yet another embodiment, the base element provides a bit of an integrated logic device.
[0014] In yet another embodiment, the base element provides a bit of an integrated pipelined microprocessor device.
[0015] In yet another embodiment, the heavy-metal strip includes tungsten or tantalum.
[0016] In yet another embodiment, the heavy-metal strip includes Aluminum
(Al) or Gold (Au).
[0017] In yet another embodiment, the heavy-metal strip includes Bismuth
(Bi) or Molybdenum (Mo). [0018] In yet another embodiment, the heavy-metal strip includes Niobium
(Nb) or Palladium (Pd).
[0019] In yet another embodiment, the heavy-metal strip includes Platinum
(Pt).
[0020] In yet another embodiment, the heavy-metal strip includes an alloy of copper (Cu) and Bi, or an alloy of Cu and iridium (Ir).
[0021] According to another aspect, a method for switching a magnetization state of a nanomagnet includes the steps of: providing a heavy-metal strip having a surface and a ferromagnetic nanomagnet disposed adj acent to the surface, the ferromagnetic nanomagnet having a first magnetization equilibrium state and a second magnetization equilibrium state; flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state of the nanomagnet in an absence of an external magnetic field to the first magnetization equilibrium state, or to set the magnetization state to the second magnetization equilibrium state.
[0022] In another embodiment, the step of flowing an electrical charge includes flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state within a time period of less than about 50 picoseconds.
[0023] In yet another embodiment, the step of flowing an electrical charge includes flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state where the magnetization state corresponds to setting a bit of a memory device.
[0024] In yet another embodiment, the step of flowing an electrical charge includes flowing an electrical charge through the heavy-metal strip in an electrical charge direction to set the magnetization state where the magnetization state corresponds to setting a bit of a logic device.
[0025] The foregoing and other aspects, features, and advantages of the application will become more apparent from the following description and from the claims. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] The features of the application can be better understood with reference to the drawings described below, and the claims. The drawings are not necessarily to scale, emphasis instead generally being placed upon illustrating the principles described herein. In the drawings, like numerals are used to indicate like parts throughout the various views.
[0027] FIG. 1 is a drawing showing a ferromagnetic layer adjacent to a heavy-metal nonmagnetic nanostrip;
[0028] FIG. 2 is a drawing showing how the dynamics of the magnetization motion can be captured by ϋ and φ ;
[0029] FIG. 3 A is a drawing showing that the charge current ( Je ) injected through the nonmagnetic heavy-metal induces spin current ( J s );
[0030] FIG. 3B is a drawing showing an exemplary elliptical ferromagnet having an in-plane anisotropy Hfa ;
[0031] FIG. 3C is a drawing that shows the charge current direction and orientation of the spin polarization σ with respect to Ht ;
[0032] FIG. 4 is a drawing showing the motion of magnetization under the influence of spin-torques and anisotropies; and
[0033] FIG. 5 is a drawing showing the trajectory of the magnetization switching of a ferromagnetic layer using spin-orbit torques in the absence of an external magnetic field.
DETAILED DESCRIPTION
[0034] Magnetization switching of ferromagnets using spin-orbit torques provides opportunities to introduce nanomagnets into high performance logic and memory applications requiring low power consumption. Nanomagnets with perpendicular-to-the-plane anisotropy have recently attracted a considerable attention due to their high thermal stability. High stability against thermal fluctuations allows nanomagnets to be deeply scaled down, resulting in dense logic and memory systems with ultra-low power consumption. However, due to the symmetric energy landscape experienced by the magnetization of a nanomagnet with perpendicular-to-the-plane anisotropy, spin-orbit torques induced by an in- plane current pulse cannot switch the magnetization. An external magnetic field is, therefore, required to assist spin-orbit torques by breaking the symmetry. Although the energy dissipated by switching a nanomagnet could be small, the energy necessary to generate the required magnetic field makes the overall memory or logic scheme uncompetitive as compared to complementary metal-oxide-semiconductor (CMOS) counterparts. Additional metals are also necessary to produce the required magnetic field, significantly decrease the number of devices which can be integrated over a given area. Therefore, the need for an external magnetic field is an obstacle for developing dense low power memory and logic systems. Furthermore, fast switching requires higher energy to be injected through the ferromagnet and/or metals producing magnetic field. Since the required energy grows significantly as the desired switching speed increases, fast operation compromises the energy efficiency.
[0035] A solution to the problems described hereinabove switches the magnetization of a nanomagnet with perpendicular-to-the-plane anisotropy using spin-orbit torques induced by an in-plane current pulse without the presence of an external magnetic field.
[0036] The solution includes a scheme to switch the magnetization of a nanomagnet with perpendicular-to-the-plane anisotropy using spin-orbit torques induced by an in-plane current pulse without the presence of an external magnetic field. It was realized that magnetization switching can be achieved by breaking the symmetry by introducing an in-plane anisotropy into the nanomagnet. We describe how spin orbit torques induced by an in-plane current pulse of appropriate amplitude and duration are sufficient to switch the magnetization of the nanomagnet in absence of an external magnetic field. For a given ratio between the in-plane and perpendicular-to-the-plane anisotropies, high switching probability (deterministic switching) is achievable for current pulses of significantly short duration by balancing the spin-orbit and damping torques, resulting in ultra-fast switching. Furthermore, since external magnetic field is not required for magnetization switching within the described scheme, energy efficiency and integration density is significantly improved, resulting in ultra-fast dense memory and low power consumption logic systems. [0037] FIG. 1 shows an exemplary ferromagnetic layer including a perpendicular- to-the-plane anisotropy ( Hfc ) and an in-plane anisotropy ( Hfa ) is situated on a heavy-metal nanostrip. In one exemplary embodiment, the proposed structure of base element 100, FIG. 1 shows a ferromagnetic layer represented by a Stoner-Wohlfarth monodomain magnetic body 101 with magnetization M , situated at a heavy-metal nonmagnetic nanostrip 102 with strong spin-orbit coupling. The ferromagnetic layer, as shown in FIG. 1, includes a perpendicular-to-the-plane uniaxial anisotropy Hfc along the ez axis and an in-plane uniaxial anisotropy Hfa along the e axis.
[0038] FIG. 2 shows how the dynamics of the magnetization motion can be captured by and φ . As shown in FIG. 2, the motion of M is represented by a unit vector nm , which makes an angle with ez axis, while the plane of M and ez makes an angle φ with e .
[0039] FIG. 3 A shows that the charge current ( J e ) injected through the nonmagnetic heavy-metal induces spin current ( Js ). As shown in FIG. 3 A, a charge current Je , injected through the heavy-metal nanostrip, produces a traverse spin current ~ @m(c x '$e) due to the spin-orbit interaction, where Je is the charge current density, σ is the spin polarization unit vector, and Θ is the material dependent spin Hall angle.
[0040] FIG. 3B shows an illustration of an exemplary elliptical ferromagnet having an in-plane anisotropy Hfa .
[0041] FIG. 3C shows the charge current direction 301 and orientation of the spin polarization σ with respect to the Hfa . As shown in FIG. 3C, the direction of the charge current Je makes an angle of ξ with e axis. Spin polarized current transports spin angular momentum into the nanomagnet, exerting a torque on the magnetization. The dynamics of M under the influence of torques and anisotropy fields is described usin the Landau-Lifshitz-Gilbert (LLG) equation as
Figure imgf000008_0001
where γ is the gyromagnetic ratio, a is the damping factor, TST is the spin torque, and He is the effective field experienced by the magnetization of the
ferromagnetic layer. He/f is a function of Hkx and Hfcz. The spin torque has two components, referred to as the in-plane and out-of-plane torques: TST = Tjp + T00P .
[0042] FIG. 4 shows the motion of magnetization under the influence of spin-torques and anisotropies. As demonstrated in Fig. 4, the in-plane torque T^, lies in the plane defined by M and Heff , and the out-of-plane torque T00p points out of the plane defined by M and Heff .
[0043] FIG. 5 shows the trajectory of the magnetization switching of a ferromagnetic layer using spin-orbit torques in the absence of any external magnetic field. As shown in FIG. 5, by injecting charge current J e through the heavy-metal nonmagnetic nanostrip, produced spin torques derive M out of the equilibrium position (also called an equilibrium state) toward the in-plane of the nanomagnet. By turning the charge current J e off after te seconds, spin torque reduces to zero and M is close to the x-y plane and away from the ez axis by an angle of ϋ . At this zone, referred here to as the critical zone, He// is significantly dominated by Hfa .
Therefore, M passes the hard axis by precessing around the He// . By passing the hard axis, He// is dominated by Hfe . Hence, M is pulled towards the new equilibrium state by precessing and damping around He// , completing the magnetization switching.
[0044] The duration te of the applied current pulse is as short as the time which causes the magnetization M to move from the equilibrium state to the critical zone. The magnetization switching can be performed using current pulses of a duration of sub-50 ps. Therefore, the proposed scheme significantly improves the switching speed and/or reduces the energy consumption, resulting in ultra-highspeed spin-torque memory and logic systems which have significantly low energy consumption. Furthermore, as no extra metal is required for producing an external magnetic field, integration density is considerably enhanced. [0045] It is contemplated that both switching energy and switching speed can be determined by the angle ξ. It is also contemplated that there is a tradeoff between switching energy and switching speed as can be set by the angle ξ.
[0046] Heavy-metals as used hereinabove include any suitable transition metals having a large atomic number, such as, for example, tungsten (W), tantalum (Ta), Aluminum (Al), Gold (Au), Bismuth (Bi), Molybdenum (Mo), Niobium (Nb), Palladium (Pd), or Platinum (Pt). Also included are any suitable metal alloys, such as, for example, an alloy of copper (Cu) and Bi, or an alloy of Cu and iridium (Ir). By injecting a charge current through a heavy-metal thin film of any suitable metal or metal alloy as listed hereinabove, a traverse spin current is produced due to strong spin-orbit coupling. As described hereinabove, the produced spin current may be used to switch the direction of the magnetization of a nanomagnet. By injecting a charge current through a heavy-metal thin film, a traverse spin current is produced due to strong spin-orbit coupling. The produced spin current may be used to switch the direction of the magnetization of a nanomagnet. The magnitude of the produced spin current is directly proportional to the spin Hall angle of a thin film heavy-metal. Large spin Hall angles have been observed in some high resistivity thin films of heavy-metals. It has been shown both experimentally and theoretically that the magnitude of the spin Hall angle in some thin film heavy-metals such as, for example, thin films of W is directly proportional to the resistivity (thickness) of the thin film. For example, it has been observed that by increasing the thickness of a thin film of tungsten from 5.2 nm to 15 nm, the spin Hall angle drops from 0.33 to less than 0.07.
[0047] The magnitude of the produced spin current is directly proportional to the spin Hall angle of a thin film heavy-metal. Large spin Hall angles have been observed in some high resistivity thin films of heavy-metals. It has been shown both experimentally and theoretically that the magnitude of the measured (calculated) spin Hall angle in thin film heavy-metals is directly proportional to the resistivity (thickness) of the thin film. For example, it has been observed that by increasing the thickness of a thin film of tungsten from 5.2 nm to 15 nm, the spin Hall angle drops from 0.33 to less than 0.07. [0048] In summary with reference to the exemplary embodiment of FIG. 1 , a base element 100 for switching a magnetization state of a nanomagnet 101 includes a heavy-metal strip 102 having a surface 103. The ferromagnetic nanomagnet 101 is disposed adjacent to the surface 103 of the heavy-metal strip 102. The
ferromagnetic nanomagnet 101 as a first magnetization equilibrium state 501 and a second magnetization equilibrium state 502 (also referred to in some embodiments as an upward equilibrium state and a downward equilibrium state). The first magnetization equilibrium state 501 or the second magnetization equilibrium state 502 is settable by a flow of electrical charge having an electrical charge current direction 301 through the heavy-metal strip. The ferromagnetic nanomagnet can also be a feature of a magnetic layer in an integrated device incorporating the base element.
[0049] In some embodiments, by causing a flow of charge (current) in the heavy-metal strip as described hereinabove the magnetization of the nanomagnet can be switched between a first equilibrium state and a second equilibrium state, such as by reversing the direction of the flow of charge. In some contemplated applications, such as, for example where the structure is a base element of a memory or a logic system, the first equilibrium state can be assigned to either a Boolean "0" or a "1" and the second equilibrium state can be assigned to the other Boolean number different from the first equilibrium state. In such contemplated applications, the method to change the magnetization as described hereinabove is analogous to a "write" operation.
[0050] Also, in such contemplated applications, methods for reading the magnetization state of a base element are known, such as, for example, by adding an insulating layer over the nanomagnet and another magnetic layer having a fixed magnetization over the insulating layer. When the nanomagnet is switched to a magnetization equilibrium state about parallel to the magnetization of the fixed magnetization magnetic layer, there will be a low electrical resistance between the magnetic layer having a fixed magnetization and the magnetic layer having a switchable magnetization. Conversely, when the nanomagnet is switched to a magnetization equilibrium state about anti-parallel to the magnetization of the fixed magnetization magnetic layer, there will be a high electrical resistance between the magnetic layer having a fixed magnetization and the magnetic layer having a switchable magnetization. Thus, in some embodiments, a "read" operation to determine the magnetization state of the base element (e.g. a single "bit") can be performed by sensing a low resistance or a high resistance.
[0051] It is contemplated that the base element described hereinabove can be used as a bit of an integrated device, such as, for example, a memory device or a logic device. In such applications, techniques of integration known in the art can be used to form and interconnect a plurality of such base elements. It is contemplated that billions of such base elements with nanomagnets of an integrated magnetic layer can be integrated into a single integrated device. Internal integrated electrical connections between base elements can be made using integrated circuit interconnection techniques known in the art.
[0052] It will be appreciated that variants of the above-disclosed and other features and functions, or alternatives thereof, may be combined into many other different systems or applications. Various presently unforeseen or unanticipated alternatives, modifications, variations, or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompassed by the following claims.

Claims

What is claimed is:
1. A base element for switching a magnetization state of a nanomagnet comprising: a heavy-metal strip having a surface; and
a ferromagnetic nanomagnet disposed adjacent to said surface, said ferromagnetic nanomagnet having a first magnetization equilibrium state and a second magnetization equilibrium state, said first magnetization equilibrium state or said second magnetization equilibrium state settable in an absence of an external magnetic field by a flow of electrical charge through said heavy-metal strip.
2. The base element of claim 1, wherein said flow of electrical charge in a first direction through said heavy-metal strip causes said first magnetization equilibrium state and said flow of electrical charge in a second direction through said heavy- metal strip causes said second magnetization equilibrium state.
3. The base element of claim 1, wherein said nanomagnet comprises an elliptical shape having a long axis and a short axis.
4. The base element of claim 3, wherein said long axis is about parallel to said surface of said heavy-metal strip.
5. The base element of claim 4, wherein a direction of flow of said electrical charge through said heavy-metal strip comprises an angle ξ with respect to said short axis of said nanomagnet.
6. The base element of claim 5, wherein said angle ξ determines an energy of switching.
7. The base element of claim 5, wherein said angle ξ determines a speed of switching.
8. The base element of claim 1, wherein said base element provides a bit of an integrated memory device.
9. The base element of claim 1, wherein said base element provides a bit of an integrated logic device.
10. The base element of claim 1, wherein said base element provides a bit of an integrated pipelined microprocessor device.
11. The base element of claim 1 , wherein said heavy-metal strip comprises tungsten or tantalum.
12. The base element of claim 1, wherein said heavy-metal strip comprises
Aluminum (Al) or Gold (Au).
13. The base element of claim 1, wherein said heavy-metal strip comprises Bismuth (Bi) or Molybdenum (Mo).
14. The base element of claim 1, wherein said heavy-metal strip comprises Niobium (Nb) or Palladium (Pd).
15. The base element of claim 1, wherein said heavy-metal strip comprises Platinum (Pt).
16. The base element of claim 1, wherein said heavy-metal strip comprises an alloy of copper (Cu) and Bi, or an alloy of Cu and iridium (Ir).
17. A method for switching a magnetization state of a nanomagnet comprising the steps of:
providing a heavy-metal strip having a surface and a ferromagnetic nanomagnet disposed adjacent to said surface, said ferromagnetic nanomagnet having a first magnetization equilibrium state and a second magnetization equilibrium state; and
flowing an electrical charge through said heavy-metal strip in an electrical charge direction to set said magnetization state of said nanomagnet in an absence of an external magnetic field to said first magnetization equilibrium state, or to set said magnetization state to said second magnetization equilibrium state.
18. The method of claim 17, wherein said step of flowing an electrical charge comprises flowing an electrical charge through said heavy-metal strip in an electrical charge direction to set said magnetization state within a time period of less than about 50 picoseconds.
19. The method of claim 17, wherein said step of flowing an electrical charge comprises flowing an electrical charge through said heavy-metal strip in an electrical charge direction to set said magnetization state where said magnetization state corresponds to setting a bit of a memory device.
20. The method of claim 17, wherein said step of flowing an electrical charge comprises flowing an electrical charge through said heavy-metal strip in an electrical charge direction to set said magnetization state where said magnetization state corresponds to setting a bit of a logic device.
PCT/US2016/028045 2015-05-08 2016-04-18 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields Ceased WO2016190984A2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2018510305A JP6777364B2 (en) 2015-05-08 2016-04-18 Switching of perpendicularly magnetized nanomagnets by spin-orbit torque in the absence of external magnetic field
KR1020177032086A KR102479452B1 (en) 2015-05-08 2016-04-18 Normal magnetization nanomoment switching using spin-orbit torque in the absence of an external magnetic field
CN201680026484.4A CN107580729B (en) 2015-05-08 2016-04-18 Switching of perpendicular magnetized nanomagnets with spin-orbit torque in the absence of an external magnetic field
US15/572,017 US10510474B2 (en) 2015-05-08 2016-04-18 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US16/710,531 US11004588B2 (en) 2015-05-08 2019-12-11 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US16/850,173 US11594357B2 (en) 2015-05-08 2020-04-16 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US17/231,277 US11626229B2 (en) 2015-05-08 2021-04-15 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US18/123,418 US20240047115A1 (en) 2015-05-08 2023-03-20 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US18/814,421 US20240412909A1 (en) 2015-05-08 2024-08-23 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562158805P 2015-05-08 2015-05-08
US62/158,805 2015-05-08

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US15/572,017 A-371-Of-International US10510474B2 (en) 2015-05-08 2016-04-18 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US16/710,531 Continuation US11004588B2 (en) 2015-05-08 2019-12-11 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields

Publications (2)

Publication Number Publication Date
WO2016190984A2 true WO2016190984A2 (en) 2016-12-01
WO2016190984A3 WO2016190984A3 (en) 2017-03-09

Family

ID=57200071

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2016/028045 Ceased WO2016190984A2 (en) 2015-05-08 2016-04-18 Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields

Country Status (5)

Country Link
US (5) US10510474B2 (en)
JP (1) JP6777364B2 (en)
KR (1) KR102479452B1 (en)
CN (1) CN107580729B (en)
WO (1) WO2016190984A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10763425B1 (en) * 2019-05-30 2020-09-01 Honeywell International Inc. Magnetic tunnel junction based programmable memory cell
US11968842B2 (en) 2020-08-11 2024-04-23 National University Of Singapore Spin-orbit torque device, method for fabricating a spin-orbit torque device and method for switching a switchable magnetization of a spin-orbit torque device
IL276842B (en) * 2020-08-20 2021-12-01 Yeda Res & Dev Spin current and magnetoresistance from the orbital hall effect

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7510883B2 (en) 2005-09-30 2009-03-31 Everspin Technologies, Inc. Magnetic tunnel junction temperature sensors and methods
JP2011175987A (en) * 2008-05-09 2011-09-08 Fuji Electric Co Ltd Spin valve element and storage device
US9171601B2 (en) 2009-07-08 2015-10-27 Alexander Mikhailovich Shukh Scalable magnetic memory cell with reduced write current
JP4929369B2 (en) * 2010-03-23 2012-05-09 株式会社東芝 Spin wave device
US9300301B2 (en) * 2010-10-05 2016-03-29 Carnegie Mellon University Nonvolatile magnetic logic device
EP2466586B1 (en) * 2010-12-16 2016-03-02 Crocus Technology Multibit magnetic random access memory cell with improved read margin
KR101457511B1 (en) * 2011-08-18 2014-11-04 코넬 유니버시티 Spin hall effect magnetic apparatus, method and applications
KR101649978B1 (en) * 2012-08-06 2016-08-22 코넬 유니버시티 Electrically gated three-terminal circuits and devices based on spin hall torque effects in magnetic nanostructures
US9076537B2 (en) * 2012-08-26 2015-07-07 Samsung Electronics Co., Ltd. Method and system for providing a magnetic tunneling junction using spin-orbit interaction based switching and memories utilizing the magnetic tunneling junction
US9460397B2 (en) 2013-10-04 2016-10-04 Samsung Electronics Co., Ltd. Quantum computing device spin transfer torque magnetic memory
US9384812B2 (en) * 2014-01-28 2016-07-05 Qualcomm Incorporated Three-phase GSHE-MTJ non-volatile flip-flop

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Also Published As

Publication number Publication date
US20200118725A1 (en) 2020-04-16
KR102479452B1 (en) 2022-12-20
US20240047115A1 (en) 2024-02-08
US11626229B2 (en) 2023-04-11
US20180350498A1 (en) 2018-12-06
KR20180004138A (en) 2018-01-10
US10510474B2 (en) 2019-12-17
WO2016190984A3 (en) 2017-03-09
CN107580729A (en) 2018-01-12
US20240412909A1 (en) 2024-12-12
JP2018519675A (en) 2018-07-19
CN107580729B (en) 2020-08-28
US11004588B2 (en) 2021-05-11
US20210319939A1 (en) 2021-10-14
JP6777364B2 (en) 2020-10-28

Similar Documents

Publication Publication Date Title
US20240047115A1 (en) Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
US10460786B2 (en) Systems and methods for reducing write error rate in magnetoelectric random access memory through pulse sharpening and reverse pulse schemes
CN104737318B (en) High speed precession switches magnetic logic
US9978931B2 (en) Systems and methods for implementing robust magnetoelectric junctions
EP2278589B1 (en) Magnetic element with a fast spin transfer torque writing procedure
US20220069009A1 (en) Cross-point magnetic random access memory with piezoelectric selector
US9559698B2 (en) Spintronic logic element
WO2008010957A2 (en) Method and system for using a pulsed field to assist spin transfer induced switching of magnetic memory elements
CN108123027B (en) Magnetic storage device and method of writing magnetic storage device
US20170033281A1 (en) Systems and Methods for Implementing Magnetoelectric Junctions Including Integrated Magnetization Components
WO2017034563A1 (en) Dual pulse spin hall memory with perpendicular magnetic elements
US11594357B2 (en) Switching of perpendicularly magnetized nanomagnets with spin-orbit torques in the absence of external magnetic fields
CN111542489A (en) Spin transfer torque MRAM with auxiliary layer and method of operating the same
Roy Separating read and write units in multiferroic devices
JP2011175987A (en) Spin valve element and storage device
Chen et al. A β-Ta system for current induced magnetic switching in the absence of external magnetic field
WO2020090719A1 (en) Spin torque generating element, manufacturing method thereof, and magnetization control device
TW201729440A (en) Single pulse magneto-strictive switching via hybrid magnetization stack
KR102910814B1 (en) Magnetic memory device using spin pumping

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16785581

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 20177032086

Country of ref document: KR

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2018510305

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16785581

Country of ref document: EP

Kind code of ref document: A2