WO2016162930A1

WO2016162930A1 - Nondestructive inspection system and singularity detection system

Info

Publication number: WO2016162930A1
Application number: PCT/JP2015/060775
Authority: WO
Inventors: 孝一折戸
Original assignee: 三菱電機株式会社
Priority date: 2015-04-06
Filing date: 2015-04-06
Publication date: 2016-10-13
Also published as: JPWO2016162930A1; JP6161852B2; CN107533024B; CN107533024A

Abstract

A nondestructive inspection system is provided with a drive device (105) for driving a conveyance device (106) for conveying an inspection subject (107), an excitation device (104) for applying heat to the surface of the inspection subject (107) conveyed by the conveyance device (106), a control device (102) for controlling the drive device (105) and excitation device (104), a photography device (103) for photographing a surface image of the inspection subject (107) that has had heat applied to the surface thereof by the excitation device (104), and a programmable display (100) having an image data processing unit (16) for dividing each of a plurality of surface images photographed at different times by the photography device (103) into a plurality of partial images and carrying out correction for aligning the positions of the inspection subject (107) in each of the plurality of surface images divided into a plurality of partial images and a display generation unit (20) for generating a moving image in which the plurality of surface images corrected by the image data processing unit (16) are switched chronologically or a three-dimensional image in which the images are layered chronologically.

Description

Nondestructive inspection system and singularity detection system

The present invention relates to a nondestructive inspection system and a singularity detection system that inspect whether or not a defect exists in an inspection object without destroying the inspection object.

Conventionally, active thermography is mainly used for non-destructive inspection of joints of different materials typified by composite materials. In active thermography, the surface of an inspection object is heated with an excitation source such as a flash lamp, and a state in which the heat applied to the inspection object propagates is acquired as a moving image, so that the defect shape, depth, area and Get volume information.

Active thermography is operated in a state where the inspection object is stationary, so that it is difficult to apply it to a manufacturing method in which a product is continuously moved in order to achieve a high tact time.

Patent Document 1 discloses a test apparatus that acquires line information indicating a temperature distribution in one direction using thermography, manages the line information in time series according to the moving speed of a measurement target, and observes the transition of the temperature distribution at a specific point. Is disclosed.

Special table 2013-524229 gazette

Since the test apparatus disclosed in Patent Document 1 detects a defect based on two-dimensional line information, it can detect a defect inside a homogeneous object of the same material. However, 3D information is indispensable to determine defects in composite materials that are bonded materials of different materials and contain bubbles in the bonded part, and that may be intentionally provided with voids. Was difficult.

The present invention has been made in view of the above, and an object of the present invention is to obtain a nondestructive inspection system capable of detecting internal defects while conveying an inspection object which is a composite material.

In order to solve the above-described problems and achieve the object, the present invention includes a drive device that drives a transport device that transports an inspection target, an excitation device that applies heat to the surface of the test target transported by the transport device, A control device that controls the driving device and the excitation device, an imaging device that captures a surface image of an inspection target whose surface is heated by the excitation device, and each of a plurality of surface images captured at different timings by the imaging device, A video data processing unit that divides the image into a plurality of partial images and corrects the position of each inspection target of the plurality of surface images divided into the plurality of partial images, and the plurality of surface images corrected by the video data processing unit are sometimes And a programmable display having a display generation unit for generating a moving image to be switched along a series or a three-dimensional image superimposed along a time series.

The nondestructive inspection system according to the present invention has an effect that an internal defect can be detected while conveying an inspection object that is a composite material.

The figure which shows the structure of the nondestructive inspection system concerning Embodiment 1 of this invention. The figure which shows the structure of the programmable display applied to the nondestructive inspection system concerning Embodiment 1. FIG. The figure which shows the hardware constitutions of the programmable display applied to the nondestructive inspection system concerning Embodiment 1. FIG. The flowchart which shows the flow of operation | movement of the nondestructive inspection system concerning Embodiment 1. FIG. The perspective view which shows an example of the test object of the nondestructive inspection system concerning Embodiment 1. The figure which shows typically the process of the video data process part of the nondestructive inspection system concerning Embodiment 1. FIG. The figure which shows an example of the moving image of the test result which the display production | generation part of the nondestructive inspection system concerning Embodiment 1 produces | generates. The figure which shows an example of the three-dimensional image of the test result which the display production | generation part of the nondestructive test system concerning Embodiment 1 produces | generates. The figure which shows an example of the thinning-out process by the video data processing part of the nondestructive inspection system concerning Embodiment 1. The figure which shows the structure of the programmable display applied to the nondestructive inspection system concerning Embodiment 2 of this invention. The figure which shows the feedback process of the programmable display applied to the nondestructive inspection system concerning Embodiment 2. The figure which shows the structure of the programmable display applied to the nondestructive inspection system concerning Embodiment 3 of this invention. The figure which shows the structure of the programmable display applied to the nondestructive inspection system concerning Embodiment 4 of this invention.

Hereinafter, a nondestructive inspection system and a singularity detection system according to an embodiment of the present invention will be described in detail based on the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram showing a configuration of a nondestructive inspection system according to Embodiment 1 of the present invention. The nondestructive inspection system according to the first embodiment is an aspect of a singular point detection system that detects a singular point in a measurement object. The nondestructive inspection system according to the first embodiment includes a transport device 106 that transports an inspection target 107 that is a measurement target, a drive device 105 that drives the transport device 106, and an inspection target 107 transported by the transport device 106. An excitation device 104 that applies heat to the surface; a control device 102 that controls the excitation device 104 and the driving device 105; an imaging device 103 that captures a surface image of the inspection object 107 whose surface is heated by the excitation device 104; It has a programmable display 100 that captures an image captured by the imaging device 103 to generate an analysis image and displays the generated analysis image. The transport device 106 is a moving unit that moves the inspection object 107 that is a measurement object in the singularity detection system. The excitation device 104 is an external factor imparting unit that imparts an external factor to the moving inspection object 107. The imaging device 103 is an imaging unit that images the inspection object 107. The programmable display 100 is a detection means that receives a captured image of the inspection target 107 of the imaging device 103 and detects a singular point where an external factor varies in the inspection target 107 according to the amount of movement by the transport device 106, and It is also a display means for displaying a detection result by the detection means.

The driving device 105 drives the transport device 106 to transport the inspection object 107 at the transport speed M [mm / s].

The imaging device 103 is installed so that the range of H [mm] is in the transport direction of the transport device 106 and V [mm] is in the direction perpendicular to the transport direction. The frame rate of the imaging device 103 is A [sheets / s], and the resolution of the imaging device 103 is C × R [dot]. In other words, the imaging device 103 captures A sheets in a range of H × V [mm × mm] at a resolution of C × R [dot] per second.

FIG. 2 is a diagram illustrating a configuration of a programmable display applied to the nondestructive inspection system according to the first embodiment. The programmable display device 100 includes a control device connection interface 13 that is an interface for connecting the control device 102, an image pickup device connection interface 14 that is an interface for connecting the image pickup device 103, and inspection objects 107 for the number of sheets necessary for analysis. The determination unit 15 that determines whether the image is captured and compares the inspection result with the design information. Each of the plurality of surface images captured by the image capturing apparatus 103 at different timings is divided into a plurality of partial images, and the plurality of partial images are divided. The video data processing unit 16 that performs correction to align the positions of the inspection targets 107 of the plurality of divided plane images, and the plane image data and the video data processing unit 16 that are acquired by the video data processing unit 16 from the imaging device 103 are processed. A plurality of plane images corrected by the video data storage unit 19 storing the plane image data and the video data processing unit 16 Display generation unit 20 that generates a moving image that switches in time series or a three-dimensional image that is overlapped in time series, an input reception unit 21 that receives user input operations, and a display in which data is generated by display generation unit 20 The display control part 22 which performs the process which displays a screen is provided.

FIG. 3 is a diagram illustrating a hardware configuration of a programmable display applied to the nondestructive inspection system according to the first embodiment. The programmable display 100 includes an arithmetic device 31 that executes a nondestructive inspection program, a memory 32 that the arithmetic device 31 uses as a work area, a storage device 33 that stores a nondestructive inspection program, an input device 34 that is a user interface for input, A display device 35 for displaying information and a communication device 36 for communication with the control device 102 are provided.

The determination unit 15 shown in FIG. 2 is realized by the arithmetic device 31 executing a nondestructive inspection program using the memory 32 as a work area and reading / writing information from / to the storage device 33. The video data processing unit 16 and the display generation unit 20 are realized by the arithmetic device 31 executing a nondestructive inspection program using the memory 32 as a work area. The video data storage unit 19 is realized by the storage device 33. The input receiving unit 21 is realized by the input device 34. The display control unit 22 is realized by the display device 35.

In the singularity detection system, the singularity of the measurement object is the point where external factors applied to the measurement object fluctuate. Specifically, the measurement is such that the heat propagation state, which is an external factor, changes. A void inside the object can be mentioned. Another specific example is a boundary between different materials in the composite material. An example of the boundary between different materials in the composite material is an interface between a resin and a metal in an insert molded product. The nondestructive inspection system according to the first embodiment, which is an aspect of the singularity detection system, applies heat, which is an external factor, to the inspection object 107, which is a measurement object, by the excitation device 104, which is an external factor applying unit. Detect defects with varying external factors.

The operation of the nondestructive inspection system according to the first embodiment will be described. FIG. 4 is a flowchart of an operation flow of the nondestructive inspection system according to the first embodiment. Prior to starting the processing of the flowchart shown in FIG. 4, the input receiving unit 21 receives an operation for setting the number of surface images necessary for determination, which is performed on the input device 34. Since the number of surface images necessary for the determination varies depending on the thickness dimension and the thermal conductivity of the inspection object 107, the user sets an appropriate number. Note that the range of the set number is two or more, and at least two plane images are taken. The set number is held by the determination unit 15.

Also, prior to starting the processing of the flowchart shown in FIG. 4, the determination unit 15 holds design information to be compared with the inspection result. The design information is CAD (Computer Aided Design) data of the inspection object 107. The method for holding the design information in the determination unit 15 is not limited to a specific method. For example, the design information can be held in the determination unit 15 by connecting the programmable display 100 to a CAD device and importing data.

In step S 101, the excitation device 104 and the driving device 105 are driven by the control device 102, and the inspection target 107 is excited by the excitation device 104 while the inspection target 107 is conveyed by the transport device 106.

In step S102, the imaging device 103 images the inspection object 107.

In step S <b> 103, the video data processing unit 16 acquires the surface image data captured by the imaging device 103 via the imaging device connection interface 14 and stores it in the video data storage unit 19.

In step S104, the determination unit 15 determines whether information necessary for determination has been acquired. Whether or not the information necessary for the determination has been acquired is determined by the input receiving unit 21 in accordance with the number of surface images acquired by the video data processing unit 16 from the imaging device 103 before starting the processing of the flowchart. This is based on whether or not the number set by the setting operation has been reached. If the information necessary for the determination has not been acquired, the result in Step S104 is No. In Step S105, the determination unit 15 captures the surface image in Step S102 and then the processing time from Step 105 to Step 105, the conveyance speed, and the frame rate. The process proceeds to step S102 after waiting for a delay time including the above.

If the information necessary for the determination has been acquired, Yes in step S104, and the video data processing unit 16 divides each of the plurality of surface images in the transport direction in a direction orthogonal to the transport direction in step S106. A process of generating an extended line image to form a partial image is performed.

FIG. 5 is a perspective view illustrating an example of an inspection target of the nondestructive inspection system according to the first embodiment. The inspection object 107 has a spherical defect 51 inside. The processing of the video data processing unit 16 with the inspection object 107 shown in FIG. 5 as the inspection object will be described. FIG. 6 is a diagram schematically illustrating processing of the video data processing unit of the nondestructive inspection system according to the first embodiment. Here, it is assumed that the conveyance speed M = 1000 [mm / s]. Further, it is assumed that the frame rate A = 100 [sheets / s], the resolution C × R = 400 × 300 [dot], and the field of view H × V = 800 × 600 [mm × mm].

The time from when the imaging device 103 takes an image to when the next imaging is performed is 1 / A [s]. FIG. 6 illustrates processing of the video data processing unit 16 for four plane images captured from time t to 3 / A seconds later.

The distance that the inspection object 107 moves from the time when the imaging device 103 takes an image until the next imaging is performed is M / A = 1000/100 [mm]. Further, since the resolution and the viewing angle of the imaging device 103 have the same aspect ratio, the width of one dot of the surface image captured by the imaging device 103 is H / C = 800/400 = 2 [mm]. Note that the width of the surface image is the length of the transport device 106 in the transport direction. Therefore, the inspection object 107 moves by 5 dots while the imaging device 103 captures the surface image and then captures the next surface image.

Therefore, in the process of step S106, the video data processing unit 16 generates a plurality of line images by dividing the surface image captured by the imaging device 103 into a width of 5 pixels.

The defect 51 inside the inspection object 107 hinders heat conduction when heat applied to the surface of the inspection object 107 propagates to the inside of the inspection object 107. Therefore, as time passes after heat is applied to the surface of the inspection object 107, a difference occurs in the surface temperature of the inspection object 107 between the portion where the defect 51 exists and the portion where the defect 51 does not exist. Is higher in the portion where the defect 51 exists than in the portion where the defect 51 does not exist. In the inspection object 107 shown in FIG. 5, since the defect 51 is spherical, the defect 51 becomes a circular region having a higher temperature than the part where the defect 51 does not exist as shown in FIG. To emerge. That is, the outline shape of the defect 51 becomes a high-temperature region and emerges on the surface of the inspection object 107.

In step S107, the video data processing unit 16 rearranges the line images that are partial images for each of the plurality of surface images, and the position of the inspection object 107 in the surface image is constant regardless of the imaging time. Make corrections as follows. That is, as shown in FIG. 6, the video data processing unit 16 performs correction by rearranging the line image at each imaging time by shifting the line image corresponding to the elapsed time from the reference time. A corrected image in which the position of the inspection object 107 is aligned with respect to the imaging time is generated.

In step S108, the display generation unit 20 generates a moving image or a three-dimensional image based on the corrected image at each imaging time. In other words, the display generation unit 20 creates a moving image of the inspection result by switching the corrected image at each imaging time in time series. The moving image or three-dimensional image generated by the display generation unit 20 is an analysis image displayed on the display device 35 by the programmable display device 100. FIG. 7 is a diagram illustrating an example of a moving image of the inspection result generated by the display generation unit of the nondestructive inspection system according to the first embodiment. In order to show the inspection result of the cross section farther from the surface of the inspection object 107 as the corrected image on the rear side of the time series, the correction image from the time t to 3 / A seconds later is continuously displayed, whereby the inspection object 107 is displayed. It can be recognized that there is a circular cross-section defect 51 whose diameter increases with distance from the surface. In this way, the programmable display device 100 corrects the captured image received from the imaging device 103 in accordance with the amount of movement of the inspection object 107, and displays an event in which an external factor varies with time.

Alternatively, the display generation unit 20 creates a three-dimensional image of the inspection object 107 by superimposing the corrected images at the respective imaging times in time series. FIG. 8 is a diagram illustrating an example of a three-dimensional image of the inspection result generated by the display generation unit of the nondestructive inspection system according to the first embodiment. By superimposing the corrected images from time t to 3 / A seconds later, the defect 51 inside the inspection object 107 can be visualized stereoscopically. In this manner, the programmable display device 100 divides each captured image received from the imaging device 103 into captured images in a specific area according to the movement amount of the inspection target 107, and includes a plurality of captured images in the captured images. The captured image of the specific area to be displayed is superimposed on the display device 35. The specific area here is a line image extending in a direction orthogonal to the transport direction, but the specific area is not limited to a line image, as will be described later.

In step S109, the determination unit 15 compares the moving image or the three-dimensional image generated by the display generation unit 20 with design information held in the determination unit 15. As described above, the design information is CAD data of the inspection object 107, that is, a theoretical value in design. By comparing the moving image or three-dimensional image generated by the display generation unit 20 with the design information, it is possible to determine whether or not the inspection target 107 is out of design specifications. In this way, the programmable display 100 compares the design theoretical value with the shape data based on the shape data in which the shape of the inspection object 107 is specified, and detects a singular point. Here, it is not specified what kind of processing is performed when the inspection target 107 is out of the design specification, but as an example, the inspection target 107 out of the design specification is regarded as a defective product. In view of this, it is possible to perform processing such as transporting to a place different from the normal product.

In step S110, the display control unit 22 displays the moving image or the three-dimensional image generated by the display generation unit 20 on the display device 35, thereby displaying the singular point where the external factor varies.

Note that the distance M / A that the inspection object 107 moves from the time when the imaging device 103 takes an image until the next imaging is smaller than the width H / C of one dot of the surface image taken by the imaging device 103 Therefore, an overlapping portion is generated in the line image. In such a case, a line image may be generated from surface images at all imaging timings. However, line image generation and correction of the position of the inspection target 107 are performed by performing surface image thinning processing. The amount of computation can be reduced.

FIG. 9 is a diagram illustrating an example of thinning processing by the video data processing unit of the nondestructive inspection system according to the first embodiment. FIG. 9 shows the thinning-out process from seven surface images captured from time t to 6 / A seconds later. Here, it is assumed that the conveyance speed M = 100 [mm / s]. Further, it is assumed that the frame rate A = 100 [sheets / s], the resolution C × R = 400 × 300 [dot], and the field of view H × V = 800 × 600 [mm × mm]. Under the above conditions, the inspection object 107 moves by 0.5 dots while the imaging device 103 captures a surface image and then captures the next surface image. Therefore, by using every other plane image picked up by the imaging device 103 in time series, in other words, by using the plane images at time t, time t + 2 / A, time t + 4 / A, and time T + 6 / A, The load on the arithmetic device 31 can be reduced.

In the above description, the surface image of the inspection object 107 is divided in the conveyance direction, and the line image extending in the direction orthogonal to the conveyance direction is a partial image. However, the block image obtained by dividing the surface image of the inspection object 107 into a matrix shape. Can also be made into partial images.

Since the nondestructive inspection system according to the first embodiment can analyze the size and shape of internal defects using the surface image of the inspection object 107, it can detect defects even in a composite material in which different materials are combined.

Embodiment 2. FIG.
FIG. 10 is a diagram illustrating a configuration of a programmable display applied to the nondestructive inspection system according to the second embodiment of the present invention. The programmable display 110 of the nondestructive inspection system according to the second embodiment is implemented in that it includes a feedback processing unit 23 that calculates the amount of movement of the inspection object 107 from the feature points of the acquired surface image and feeds back to the drive device 105. This is different from the programmable display device 100 of the first embodiment. The feedback processing unit 23 is realized by the arithmetic device 31 executing a nondestructive inspection program using the memory 32 as a work space.

The feature point can be used by detecting the edge or corner of the inspection object 107 by image processing. Also, the transfer device 106 may be marked and used as a feature point.

FIG. 11 is a diagram illustrating feedback processing of the programmable display applied to the nondestructive inspection system according to the second embodiment. The feedback processing unit 23 stores the plane image acquired from the imaging device 103 by the video data processing unit 16 at the time t and the video data storage unit 19 acquired from the previous imaging device 103 at a time 1 / A before the time t. The amount of movement of the feature point 61 is calculated by comparing the obtained surface image. The case where the conveyance speed M = 1000 [mm / s], the frame rate A = 100 [sheets / s], the resolution C × R = 400 × 300 [dot], and the field of view H × V = 800 × 600 [mm × mm]. For example, the feature point 61 is 5 in the surface image acquired from the imaging device 103 by the video data processing unit 16 and the surface image acquired from the previous imaging device 103 stored in the video data storage unit 19. Move dot. If the movement amount of the feature point 61 calculated by the feedback processing unit 23 is 4 dots, the actual conveyance speed of the inspection object 107 is 1000 × (4/5) = 800 [mm / s]. is there. Therefore, the feedback processing unit 23 controls the control device so that the speed command value to the driving device 105 is (1000/800) = 1.25 times so that the actual transport speed is 1000 [mm / s]. A command is sent to 102.

As described above, the nondestructive inspection system according to the second embodiment can calculate the amount of movement of the inspection object 107 from the feature points 61 of the acquired surface image and feed back to the drive device 105. For this reason, the fluctuation | variation of the conveyance speed of the test object 107 can be suppressed.

The process of creating the line image and correcting the position of the inspection object 107 and the process of displaying the inspection result as a moving image or a three-dimensional image are the same as in the first embodiment.

Embodiment 3 FIG.
FIG. 12 is a diagram illustrating a configuration of a programmable display applied to the nondestructive inspection system according to the third embodiment of the present invention. The programmable display device 120 has a defect between two surface images having consecutive imaging times from a moving image regenerated by the display generation unit 20 based on the surface image in which the position of the inspection object 107 is corrected by the video data processing unit 16. When the displacement amount comparison unit 24 calculates the displacement amount of the defect and compares it with the set threshold value and the displacement amount comparison unit 24 detects that the displacement amount of the defect exceeds the threshold value, the information identifying the inspection object 107 and the defect And a history information holding unit 25 in which information indicating that the threshold value has been exceeded is stored. The displacement comparison unit 24 is realized by the arithmetic device 31 executing a nondestructive inspection program using the memory 32 as a work space. The history information holding unit 25 is realized by the storage device 33.

The displacement amount comparison unit 24 notifies the control device 102 through the control device connection interface 13 when detecting that the displacement amount of the defect exceeds the threshold value. Therefore, if the alarm device 108 is connected to the control device 102, the user can be notified that the displacement amount of the defect has exceeded the threshold value. An alarm lamp or an alarm speaker can be applied to the alarm device 108.

In addition, when the displacement amount of the defect exceeds the threshold value, information for specifying the inspection object 107 and information indicating that the defect exceeds the threshold value are stored in the history information holding unit 25. Even if the notification by 108 is overlooked or missed, it can be confirmed later on which inspection object 107 the displacement amount of the defect has exceeded the threshold value.

When the inspection object 107 is artificially provided with a defect, if an allowable tolerance is provided at the position of the defect in the design information, it is not determined as abnormal unless the position of the defect exceeds the allowable tolerance range. As a specific example, if the tolerance of ± A is allowed at the position of the defect according to the design information, the position of the defect is the reference position + A at a certain imaging timing, and the position of the defect is changed to the reference position −A at the next imaging timing. Even if it changes, it conforms to the design information and is not determined to be abnormal. However, in this case, a step is formed in the defect, and the defect has a discontinuous shape in the thickness direction of the inspection object 107. In the third embodiment, it is possible to prevent the defect from having a discontinuous shape in the thickness direction of the inspection object 107 by providing a threshold for the displacement amount of the defect separately from the design information.

Embodiment 4 FIG.
FIG. 13: is a figure which shows the structure of the programmable display applied to the nondestructive inspection system concerning Embodiment 4 of this invention. The programmable display 130 of the non-destructive inspection system according to the fourth embodiment synchronizes the frame rate of the imaging device 103 with the amount of movement of the inspection object 107, and eliminates partial overlap of line images. This is different from the programmable display device 100 according to the first embodiment. The frame rate synchronization processing unit 26 is realized by the computing device 31 executing a nondestructive inspection program using the memory 32 as a work space.

As shown in FIG. 9, the conveyance speed M = 100 [mm / s], the frame rate A = 100 [sheets / s], the resolution C × R = 400 × 300 [dot], and the field of view H × V = 800 × 600. When the driving device 105 and the imaging device 103 are operated under the condition of [mm × mm], an overlap of 0.5 dots occurs in the line image. The frame rate synchronization processing unit 26 acquires the speed command output from the control device 102 to the drive device 105 through the control device connection interface 13 and changes the frame rate A to 50 [sheets / s]. Thereby, similarly to the case where the thinning process is performed, the amount of calculation in the process of generating the line image and correcting the position of the inspection object 107 can be reduced, and the load on the calculation device 31 can be reduced.

The configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

13 control device connection interface, 14 imaging device connection interface, 15 determination unit, 16 video data processing unit, 19 video data storage unit, 20 display generation unit, 21 input reception unit, 22 display control unit, 23 feedback processing unit, 24 displacement Quantity comparison unit, 25 history information holding unit, 26 frame rate synchronization processing unit, 31 arithmetic device, 32 memory, 33 storage device, 34 input device, 35 display device, 36 communication device, 51 defect, 61 feature point, 100, 110 , 120, 130 Programmable display, 102 control device, 103 imaging device, 104 excitation device, 105 drive device, 106 transport device, 107 inspection object, 108 alarm.

Claims

A driving device for driving a conveying device for conveying an inspection object;
An excitation device for applying heat to the surface of the inspection object conveyed by the conveyance device;
A control device for controlling the drive device and the excitation device;
An imaging device that captures a surface image of the inspection object whose surface is heated by the excitation device;
Correction that divides each of the plurality of surface images captured at different timings by the imaging device into a plurality of partial images, and aligns the positions of the inspection targets of the plurality of surface images divided into the plurality of partial images. And a display generation unit that generates a moving image that switches the plurality of plane images corrected by the video data processing unit in time series or a three-dimensional image that is superimposed in time series. A nondestructive inspection system comprising a programmable display.
The non-processing device according to claim 1, further comprising: a feedback processing unit that calculates a movement amount of the inspection target based on a position of a feature point in the surface image of the inspection target and performs feedback control on the driving device. Destructive inspection system.
A displacement amount comparison unit that calculates a displacement amount of a defect between two surface images having continuous imaging times and compares the displacement amount with a set threshold value;
The nondestructive inspection system according to claim 1, further comprising: a history information holding unit that stores information for specifying the inspection target and information indicating that a displacement amount of a defect exceeds a threshold value.
4. The apparatus according to claim 1, further comprising: a frame rate synchronization processing unit that synchronizes a frame rate of the imaging apparatus with a movement amount of the inspection target and eliminates partial overlap of the partial images. Non-destructive inspection system described in
The nondestructive inspection system according to claim 1, wherein the video data processing unit compares the inspection result of the display generation unit with design information and extracts a singular point where an external factor fluctuates.
Moving means for moving the measurement object;
An external factor imparting means for imparting an external factor to the moving measurement object;
Imaging means for imaging the measurement object;
Detecting means for receiving a captured image of the measurement object of the imaging means, and detecting a singular point where an external factor in the measurement object varies according to a movement amount by the moving means;
Display means for displaying a detection result by the detection means;
Singularity detection system with
The detection means corrects the received captured image according to the amount of movement of the measurement object,
The singularity detection system according to claim 6, wherein the display means displays an event in which an external factor varies with time.
The detecting means divides the captured image into a captured image of a specific area according to the amount of movement of the measurement object for each received captured image,
The singularity detection system according to claim 6, wherein a plurality of photographed images are displayed by superimposing a photographed image of a specific area included in the photographed image on the display unit.
The detection means detects a singular point by comparing a theoretical value in design with the shape data based on shape data in which the shape of a measurement object is specified. The singular point detection system according to any one of the above.