WO2016133115A1 - Self-organized-film forming method, pattern forming method, and self-organized-film forming composition - Google Patents

Self-organized-film forming method, pattern forming method, and self-organized-film forming composition Download PDF

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Publication number
WO2016133115A1
WO2016133115A1 PCT/JP2016/054567 JP2016054567W WO2016133115A1 WO 2016133115 A1 WO2016133115 A1 WO 2016133115A1 JP 2016054567 W JP2016054567 W JP 2016054567W WO 2016133115 A1 WO2016133115 A1 WO 2016133115A1
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WO
WIPO (PCT)
Prior art keywords
self
polymer
preferably
forming
solvent
Prior art date
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PCT/JP2016/054567
Other languages
French (fr)
Japanese (ja)
Inventor
裕之 小松
智博 小田
岳彦 成岡
永井 智樹
Original Assignee
Jsr株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to JP2015032199 priority Critical
Priority to JP2015-032199 priority
Application filed by Jsr株式会社 filed Critical Jsr株式会社
Publication of WO2016133115A1 publication Critical patent/WO2016133115A1/en

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