WO2016128950A1 - Differential pressure transducer - Google Patents

Differential pressure transducer Download PDF

Info

Publication number
WO2016128950A1
WO2016128950A1 PCT/IB2016/050777 IB2016050777W WO2016128950A1 WO 2016128950 A1 WO2016128950 A1 WO 2016128950A1 IB 2016050777 W IB2016050777 W IB 2016050777W WO 2016128950 A1 WO2016128950 A1 WO 2016128950A1
Authority
WO
WIPO (PCT)
Prior art keywords
measurement
inlet
cylinders
pressure sensor
chamber
Prior art date
Application number
PCT/IB2016/050777
Other languages
English (en)
French (fr)
Inventor
Rafał KOŁPAK
Waldemar MROZEK
Original Assignee
Aplisens S.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aplisens S.A. filed Critical Aplisens S.A.
Priority to EP16710811.7A priority Critical patent/EP3256832A1/en
Publication of WO2016128950A1 publication Critical patent/WO2016128950A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G01L13/026Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms involving double diaphragm
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618Overload protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/142Multiple part housings

Definitions

  • the invention relates to a differential pressure transducer containing a measurement structure filled with a manometer liquid.
  • Differential pressure transmitters in which a silicon sensing element is subjected to two measured pressures are generally known.
  • the drawback of such silicon structure is that it is subject to an individual error manifesting itself as absence of long-term stability, resulting in gradual change in the signal (bridge imbalance voltage) not resulting from change in pressure acting upon such a structure.
  • Such effect is particularly troubling in transducers used for measurement of very small pressure differences, for which changes in the measurement signal resulting from sensor instability are distinctly visible on background of signals resulting from changes in the measured pressures.
  • the transducer includes a pressure sensor and two seal-tight measurement zones filled with a manometer liquid acting upon the sensing element on both its sides.
  • the measurement zones are isolated by an overload diaphragm and separated from the sources of pressures measured using the measurement diaphragms. Isolation of the sensor with the manometer liquid and measurement diaphragms from media, the pressures of which are to be measured, allows such transducer to find application in measuring pressure differences of a wide spectrum of media, including aggressive media.
  • Use of an overload diaphragm protects the transducer from failure resulting from e.g. uncontrolled increase in the impact pressure. Disclosure of Invention
  • the object of this invention was to develop a pressure transducer ensuring stable over time readout of the measured pressure differences.
  • a differential pressure transducer including a pressure sensor as well as a first and a second seal-tight measurement zone filled with manometer liquid acting upon sensing elements of the pressure sensor.
  • the measurement zones are separated with an overload diaphragm and separated from the sources of measured pressures with a first and a second measurement diaphragm, respectively.
  • the invention consists in that the pressure sensor of the transducer has a first and a second measurement chamber, each of the measurement chambers has a first and a second inlet for the manometer liquid separated from each other with the sensing element.
  • the first measurement zone is connected with the first inlet of the first measurement chamber and with the second inlet of the second measurement chamber, while the second measurement zone is connected with the first inlet of the second measurement chamber and with the second inlet of the first measurement chamber.
  • the measurement zone is formed by cavities and channels in two cylinders coaxially adjacent to each other with first bases, and between the cylinders an overload diaphragm is circumferentially clamped.
  • the measurement diaphragms are located on second bases of the cylinders opposite in relation to the overload diaphragm.
  • the measurement chambers have the form of a set of three coaxial cylinders with channels and cavities, wherein the sensing elements are located in cavities of extreme cylinders adjacent to the central cylinder.
  • connections of the measurement zones with the measurement chambers constitute capillaries.
  • the transducer according to the invention effectively minimizes the impact on the measurement errors resulting from instability of sensory structures, making it possible to make a measurement device for very small pressure ranges, with accuracy and zero shift error for static pressure far less than before as well as with better long-term stability.
  • Fig.1 of the drawing presents a side view of the differential transducer, whereas Fig.2 presents a horizontal cross-section through the same transducer.
  • Fig.3, Fig. 4 and Fig.5 present vertical cross- sections of the same transducer.
  • Fig.6 presents a simplified view of the transducer sensor and Fig.7 presents its electric scheme.
  • the base of the transducer according to the invention is formed by a cylindrical left bed 1 and a cylindrical right bed 2 each having diameter of 38 mm, made of stainless steel.
  • the bed 1 and the bed 2 have a cavity 3 for the overload membrane 4, which is mounted in the transducer by pressing it between the bed 1 and the bed 2 and connecting the beds with a circumferential weld 5.
  • the beds 1 and 2 possess cavities 6 for known measurement diaphragms T and 7" having diameter of 32 mm.
  • Each diaphragm 7 is pressed to its bed (1 and 2, respectively) with a ring circumferentially welded to the bed.
  • Pressures to be measured by the transducer are led in by an known way to the external surfaces of the measurement diaphragms. Cavities 3 and 6 are connected with each other through channels 8 and filled with silicon oil constituting the manometer liquid of the transducer.
  • a pipe housing 9 for the pressure sensor is connected with base of the transducer.
  • the pressure sensor constitute two silicon differential sensing elements 1 0 and 1 1 , a central cylindrical connector 1 2 of diameter 1 6 mm and made of stainless steel, and two pass-through cylinders 1 3 and 14 having the same diameters and made of the same material, permanently fixed to the connector 1 2.
  • each other cavities in the connector 1 2 and in the pass-through cylinders 1 3 and 14 form two measurement chambers 1 5 and 16 in which said sensing elements 1 0 and 1 1 are mounted.
  • Each of the measurement chambers 1 5 and 1 6 possess two inlets 1 7, 1 9, and 1 8, 20 respectively, leading the manometer liquid to both sides of the sensing elements 1 0 and 1 1 .
  • Inlets 1 7, 1 8, 1 9 and 20 of the measurement chambers 1 5 and 1 6 are interconnected with metal capillaries 21 having diameter of 1 mm.
  • the capillaries 21 also connect the pressure sensor with external zones in the transducer base.
  • the measurement chambers 15 and 16, capillaries 21 and the internal spaces of the bed 1 and 2 constitute two measurement zones seal- tightly filled with manometer liquid and separated from each other with the overload membrane 4.
  • First inlet 17 of the first measurement chamber 15 is connected with the second inlet 20 of the second measurement chamber 16 and with part of the measurement zone situated in vicinity of the measurement diaphragm 7" to which the pressure P 2 is led.
  • the second inlet 19 of the first measurement chamber 15 is connected with the first inlet 18 of the second measurement chamber 16 and with part of the measurement zone situated in vicinity of the measurement diaphragm T to which the pressure Pi is led.
  • Each sensing element 10 and 1 1 comprises an integrated Wheatstone bridge, the outlets of which are connected with wires 22 passing seal-tightly through pass- through cylinders 13 and 14 and lead to electronic circuit board 23 which, in turn is connected with an exit cable 24 of the transducer.
  • Figure 7 shows that the Wheatstone bridges have been connected in parallel. The connection is effected on circuit board 23 by way of printed tracks to which the wires 22 are connected.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
PCT/IB2016/050777 2015-02-13 2016-02-13 Differential pressure transducer WO2016128950A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP16710811.7A EP3256832A1 (en) 2015-02-13 2016-02-13 Differential pressure transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PL411269A PL227812B1 (pl) 2015-02-13 2015-02-13 Różnicowa głowica pomiaru ciśnienia
PLP.411269 2015-02-13

Publications (1)

Publication Number Publication Date
WO2016128950A1 true WO2016128950A1 (en) 2016-08-18

Family

ID=55586346

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2016/050777 WO2016128950A1 (en) 2015-02-13 2016-02-13 Differential pressure transducer

Country Status (3)

Country Link
EP (1) EP3256832A1 (pl)
PL (1) PL227812B1 (pl)
WO (1) WO2016128950A1 (pl)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2065895A (en) * 1979-12-19 1981-07-01 Hitachi Ltd Differential pressure transmitter
EP0813047A2 (en) * 1996-06-11 1997-12-17 Moore Products Co. Transducer having redundant pressure sensors
GB2359889A (en) * 2000-03-01 2001-09-05 Alan Tailford Error compensation for remote diaphragm seal differential pressure measurement arrangement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2065895A (en) * 1979-12-19 1981-07-01 Hitachi Ltd Differential pressure transmitter
EP0813047A2 (en) * 1996-06-11 1997-12-17 Moore Products Co. Transducer having redundant pressure sensors
GB2359889A (en) * 2000-03-01 2001-09-05 Alan Tailford Error compensation for remote diaphragm seal differential pressure measurement arrangement

Also Published As

Publication number Publication date
PL411269A1 (pl) 2016-08-16
EP3256832A1 (en) 2017-12-20
PL227812B1 (pl) 2018-01-31

Similar Documents

Publication Publication Date Title
US10371591B2 (en) Method and apparatus for correction of pressure sensors
JP6088050B2 (ja) 圧力センサを有する差圧伝送器
US10126193B2 (en) Compact or miniature high temperature differential pressure sensor capsule
JP5416967B2 (ja) 圧力センサアセンブリ、圧力センサおよびライン圧力測定方法
US7401522B2 (en) Pressure sensor using compressible sensor body
JP5923500B2 (ja) 相補型デュアル絶対圧力センサを有する差圧トランスミッタ
US7775117B2 (en) Combined wet-wet differential and gage transducer employing a common housing
FI72809B (fi) Kapacitiv tryckgivare med isolerat kaenselorganmembran.
US10473546B2 (en) Hermetic pressure sensor having a bending part
US7430918B2 (en) Amplified flow through pressure sensor
US4301492A (en) Pressure-sensing transducer
JP5409965B2 (ja) ライン圧力測定を伴う差圧センサ
US9054222B2 (en) Pressure resistently encapsulated, pressure difference sensor
CN105841875B (zh) 具有高压能力的压差传感器
JPS638524A (ja) 差圧発信器
CN107782485B (zh) 集成有共模误差补偿的差压传感器
US10288510B2 (en) Footed pressure measuring device
JPS62500544A (ja) もろい材料製のキャパシタ方式センサ素子
JP2019507883A (ja) 流体が充填された細長い圧力センサ
CN110220636B (zh) 一种毛细连通管式差压传感器及测量方法
RU167905U1 (ru) Емкостный датчик перепада давления
WO2016128950A1 (en) Differential pressure transducer
RU2263291C2 (ru) Емкостный датчик давления
RU1770789C (ru) Весы дл гидродинамических труб

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16710811

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

REEP Request for entry into the european phase

Ref document number: 2016710811

Country of ref document: EP