WO2016114847A1 - Polariseur à grille de fils à absorption sélective et à large bande - Google Patents

Polariseur à grille de fils à absorption sélective et à large bande Download PDF

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Publication number
WO2016114847A1
WO2016114847A1 PCT/US2015/060125 US2015060125W WO2016114847A1 WO 2016114847 A1 WO2016114847 A1 WO 2016114847A1 US 2015060125 W US2015060125 W US 2015060125W WO 2016114847 A1 WO2016114847 A1 WO 2016114847A1
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WO
WIPO (PCT)
Prior art keywords
absorptive
thickness
light
wgp
ribs
Prior art date
Application number
PCT/US2015/060125
Other languages
English (en)
Inventor
R. Stewart NIELSON
Mathew Free
Original Assignee
Moxtek, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/937,488 external-priority patent/US9632224B2/en
Application filed by Moxtek, Inc. filed Critical Moxtek, Inc.
Publication of WO2016114847A1 publication Critical patent/WO2016114847A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/149—Beam splitting or combining systems operating by reflection only using crossed beamsplitting surfaces, e.g. cross-dichroic cubes or X-cubes

Definitions

  • the present application is related generally to selectively-absorptive wire grid polarizers, meaning that the polarizer is designed to substantially absorb one polarization and to substantially transmit an opposite polarization.
  • a selectively-absorptive wire grid polarizer can include a rib of material that is absorptive in the wavelength range of interest. Because of the structure of the rib, the WGP can selectively absorb one polarization while allowing an opposite polarization to substantially transmit through the WGP.
  • the absorptive material used in a selectively-absorptive WGP can have a narrow band of effective absorption. Consequently, one WGP is typically designed for one narrow spectrum of light and another WGP is designed for another narrow spectrum of light. For example, three WGPs might be used to cover the visible spectrum of light (one WGP for red, another for green, and another for blue). It would be beneficial to both the user and the manufacturer of selectively-absorptive WGPs to absorb a larger bandwidth of light.
  • WGP wire grid polarizer
  • the selectively-absorptive WGP can comprise an array of parallel, elongated rods located over a surface of a transparent substrate with gaps between adjacent rods.
  • Each of the rods can include a reflective wire and two absorptive ribs.
  • the reflective wire can be sandwiched between the two absorptive ribs and the substrate or the two absorptive ribs can be sandwiched between the reflective wire and the substrate.
  • Each of the two absorptive ribs can comprise a different material.
  • FIGs. 1-5 are schematic side views of selectively-absorptive wire grid polarizers (WGP) 10, 20, 30a, 30b, 40, and 50 with rods 14 located over a surface of a transparent substrate 11 and gaps 15 between adjacent rods 14, in accordance with embodiments of the present invention.
  • WGP wire grid polarizers
  • FIG. 1 is a schematic cross-sectional side view of a selectively-absorptive WGP 10, showing that each rod 14 can include a reflective wire 13 sandwiched between two absorptive ribs 12 and the substrate 11.
  • FIG. 2 is a schematic perspective view of a selectively-absorptive WGP 20, showing that each rod 14 can include two absorptive ribs 12 sandwiched between a reflective wire 13 and a substrate 11.
  • FIGs. 3a & 3b are schematic cross-sectional side views of selectively- absorptive WGPs 30a and 30b, showing that each rod 14 can include a reflective wire 13 sandwiched between two absorptive ribs 12 on one side and one or more absorptive rails 32 (FIG. 3a) or 32 a and 32 b (FIG. 3b) on an opposite side.
  • FIG. 4 is a schematic cross-sectional side view of a selectively-absorptive WGP 40 with a third absorptive rib 12 c in each rod 14, showing that each rod 14 can include a reflective wire 13 and three, adjoining absorptive ribs 12.
  • the reflective wire 13 can be sandwiched between the three absorptive ribs 12 and the substrate 11, as shown.
  • the three absorptive ribs 12 can be sandwiched between the reflective wire 13 the substrate 11, similar WGP 20, but with three absorptive ribs 12.
  • FIG. 5 is a schematic cross-sectional side view of a selectively-absorptive WGP 50, showing that each rod 14 can include a layer L sandwiched between two absorptive ribs 12 and the reflective wire 13.
  • the reflective wire 13 can be located closer to the substrate 11 than the absorptive ribs 12, as shown, or the absorptive ribs 12 can be located closer to the substrate than the reflective wire, similar to WGP 20.
  • FIGs. 6-7 are schematic views of image projectors 60 and 70, each with broadband, selectively-absorptive WGP(s) 64 like the design(s) of WGPs 10, 20, 30a, 30b, 40, and 50 described, in accordance with embodiments of the present invention.
  • absorptive means substantially absorptive of light in the wavelength of interest.
  • absorptive is relative to other materials used in the polarizer. Thus, an absorptive structure will absorb substantially more than a reflective or a transparent structure.
  • Whether a material is "absorptive" is dependent on the wavelength of interest. A material can be absorptive in one wavelength range but not in another.
  • an absorptive structure can absorb greater than 40% and reflect less than 60% of light in the wavelength of interest (assuming the absorptive structure is an optically thick film - i.e.
  • an absorptive material can have a high extinction coefficient (k), relative to a transparent material, such as for example greater than 0.01 in one aspect or greater than 1.0 in another aspect.
  • Absorptive ribs can be used for selectively absorbing one polarization of light.
  • the term "reflective" means substantially reflective of light in the wavelength of interest.
  • a reflective structure will reflect substantially more than an absorptive or a transparent structure
  • Whether a material is "reflective" is dependent on the wavelength of interest.
  • a material can be reflective in one wavelength range but not in another. Some wavelength ranges can effectively utilize highly reflective materials. At other wavelength ranges, especially lower wavelengths where material degradation is more likely to occur, the choice of materials may be more limited and an optical designer may need to accept materials with a lower reflectance than desired.
  • a reflective structure can reflect greater than 80% and absorb less than 20% of light in the wavelength of interest (assuming the reflective structure is an optically thick film - i.e. greater than the skin depth thickness).
  • Metals are often used as reflective materials.
  • Reflective wires can be used for separating one polarization of light from an opposite polarization of light.
  • transparent means substantially transparent to light in the wavelength of interest.
  • a material is substantially more than an absorptive or a reflective structure. b. Whether a material is "transparent" is dependent on the wavelength of interest. A material can be transparent in one wavelength range but not in another.
  • a transparent structure can transmit greater than 90% and absorb less than 10% of light at the wavelength of interest or wavelength range of use, ignoring Fresnel reflection losses.
  • a transparent structure can have an extinction
  • the term "material” refers to the overall material of a particular structure.
  • a structure that is “absorptive” is made of a material that as a whole is substantially absorptive, even though the material may include some reflective or transparent components.
  • a rib made of a sufficient amount of absorptive material so that it substantially absorbs light is an absorptive rib even though the rib may include some reflective or transparent material embedded therein.
  • the term “light” means ultraviolet, visible, and infrared regions of the electromagnetic spectrum.
  • visible light spectrum means electromagnetic radiation having wavelengths from 400 through 700 nanometers.
  • broadband, selectively-absorptive wire grid polarizers (WGP) 10, 20, 30a, 30b, 40, & 50 are shown comprising an array of parallel, elongated rods 14 located over a surface l l s of a transparent substrate 11, with gaps 15 between adjacent rods 14.
  • the gaps 15 can be filled with a gas, such as air, can be vacuum-filled, or can be filled with another material, such as for example a transparent dielectric.
  • each of the rods 14 can include a reflective wire 13 and two absorptive ribs 12 a and 12 b .
  • each of the rods 14 can include a reflective wire 13, two absorptive ribs 12 a and 12 b , and one or more absorptive rails 32 (FIG. 3a) or 32 a and 32 b (FIG. 3b).
  • each of the rods 14 can include a reflective wire 13 and three absorptive ribs 12 a , 12 b , and 12 c .
  • each of the rods 14 can include the reflective wire 13 and more than three absorptive ribs 12.
  • the reflective wire 13 can be sandwiched between the two absorptive ribs 12 a and 12 and the substrate 11.
  • the two absorptive ribs 12 a and 12 b can be sandwiched between the reflective wire 13 and the substrate 11.
  • the reflective wire 13 can be sandwiched between two absorptive ribs 12 a and 12 b on one side and an absorptive rail 32 on an opposite side.
  • the two absorptive ribs 12 a and 12 b can be located closer to the substrate 11 and the single absorptive rail 32 can be located farther from the substrate 11, with the reflective wire 13 sandwiched between.
  • the reflective wire 13 can be sandwiched between two absorptive ribs 12 a and 12 b on one side and two absorptive rails 32 a and 32 on an opposite side.
  • the order of the reflective wire 13, the absorptive ribs 12, and the absorptive rails 32 can be the same for all rods 14 of a given WGP. There can be more than two absorptive ribs 12 and/or more than two absorptive rails 32.
  • WGP 10 may be preferred if light that should be absorbed impinges on the WGP 10 from the rod 14 side.
  • WGP 20 may be preferred if light that should be absorbed impinges on the WGP 20 from the substrate 11 side.
  • WGPs 30a and 30b may be preferred if light that should be absorbed impinges on the WGP 30 from both the top side and the bottom side, as described in US Patent
  • the reflective wire 13 can be sandwiched between three absorptive ribs 12 a/ 12 b , & 12 c and the substrate 11.
  • the three absorptive ribs 12 a/ 12 b , & 12 c can be sandwiched between the reflective wire 13 and the substrate 11.
  • the WGP can include three or more absorptive ribs 12 on one side of the reflective wire 13 and one or more rails 32 on an opposite side.
  • each of the absorptive ribs 12 can comprise a different material.
  • each of the two absorptive rails 32 if used, can comprise a different material. Material and thickness of one of the absorptive ribs 12 (or absorptive rail 32) can be selected for one wavelength range of light and the other absorptive rib(s) 12 (or absorptive rails 32) can be selected for another/other wavelength range(s) of light.
  • the two absorptive ribs 12 a & 12 b can include a first absorptive rib 12 a having a first material with a first thickness T a and a second absorptive rib 12 b having a second material with a second thickness T b .
  • the first material with the first thickness T a can have a reflectivity of light that is a minimum at a certain wavelength ( ⁇ ⁇ ).
  • the second material with the second thickness T b can have a reflectivity of light that is a minimum at a certain a wavelength ( ⁇ 2 ). There can be a difference between these wavelengths ⁇ and ⁇ 2 in order broaden the useful wavelength range of light.
  • the first absorptive rib 12 a can be made substantially of germanium and the second absorptive rib 12 b can be made substantially of silicon.
  • the first absorptive rib 12 a with a first thickness T a of 20 nanometers (nm), has a reflectivity Rs a of light that is a minimum (3.0) at a wavelength ( ⁇ : ) of 630 nm ; and the second absorptive rib 12 b , with a second thickness T b of 12 nm, has a reflectivity Rs b of light that is a minimum (0.3) at a wavelength ( ⁇ 2 ) of 480 nm.
  • a difference between these two wavelengths ⁇ and ⁇ 2 is 150 nm (
  • 1630 nm - 480 nm
  • 150 nm) .
  • a difference between the wavelength ⁇ at which the first absorptive rib 12 a has a minimum reflectivity and the wavelength ⁇ 2 at which the second absorptive rib 12 b has a minimum reflectivity can be greater than 50 nm in one aspect (50 nm ⁇
  • each of the rods 14 can further comprise more than two absorptive ribs 12.
  • WGP 40 in FIG. 4 shows rods 14 with a reflective wire 13 and three absorptive ribs 12, including a first absorptive rib 12 a , a second absorptive rib 12 b , and a third absorptive rib 12 c .
  • Each of the three absorptive ribs 12 on WGP 50 can comprise a different material.
  • Material and thicknesses of the absorptive ribs 12 can be selected such that each absorptive rib 12 is optimized for a different wavelength range of light. Similar to the first absorptive rib 12 a and the second absorptive rib 12 b , the third absorptive rib 12 c can have a third material with a third thickness T c .
  • An example thickness T a , T b , & T c of the absorptive ribs 12 is between 5 and 40 nanometers.
  • the third material with the third thickness T c can have a reflectivity of light that is a minimum at a certain wavelength ( ⁇ 3 ). There can be a difference between the wavelengths ⁇ , ⁇ 2 , and ⁇ 3 , where reflectivity Rs is minimum for each of the absorptive ribs 12, in order broaden the useful wavelength range of light.
  • a difference between the wavelength ⁇ 3 at which the third absorptive rib 12 a has a minimum reflectivity and the wavelength ⁇ at which the first absorptive rib 12 a , and/or the wavelength ⁇ 2 at which the second absorptive rib 12 b , has a minimum reflectivity can be greater than 50 nm in one aspect (50 nm ⁇
  • the absorptive rails 32 can include a first absorptive rail 32 a having a first rail material with a first rail thickness T 32a and a second absorptive rail having a second rail material with a second rail thickness T 32b .
  • the first rail material with the first rail thickness T 32a can have a reflectivity of light that is a minimum at a certain wavelength (A rai u) .
  • the second rail material with the second rail thickness T 32b can have a reflectivity of light that is a minimum at a certain a wavelength ( ⁇ ⁇ 3 ⁇ 2) ⁇ There can be a difference between these wavelengths A rai u and ⁇ ⁇ 3 ⁇ 2 in order broaden the useful wavelength range of light.
  • a difference between the wavelength A rai u at which the first absorptive rail 32 a has a minimum reflectivity and the wavelength ⁇ ⁇ 3 ⁇ 2 at which the second absorptive rail 32 b has a minimum reflectivity can be greater than 50 nm in one aspect (50 nm ⁇
  • the minimum reflectivities described above can be the absolute minimum reflectivity for the respective material and thickness anywhere in the ultraviolet, visible, and infrared spectrums, or can be defined as the minimum reflectivity within a certain wavelength range of interest, such as for example in a wavelength range of 400 through 700 nanometers. A desired difference between minimum reflectivities can vary depending on the application of use.
  • the absorptive rib 12 structure and the absorptive rail 32 structure can be mirror images of each other.
  • the first absorptive rib 12 a can be located closer to the reflective wire 13 than the second absorptive rib 12 b and the first absorptive rail 32 a can be located closer to the reflective wire 13 than the second absorptive rail 32 b ;
  • the first absorptive rail 32 a can be made of substantially the same material as the first absorptive rib 12 a ;
  • the second absorptive rail 32 b can be made of substantially the same material as the second absorptive rib 12 .
  • FIG. 5 A specific example of a broadband, selectively-absorptive WGP 50 is shown in FIG. 5.
  • One of the two absorptive ribs, called a silicon absorptive rib 12 s can comprise a mass percent of at least 80% silicon.
  • the silicon absorptive rib 12 s can be sandwiched between another absorptive rib 12 b (second
  • the silicon absorptive rib 12 s can be located closer to the reflective wire 13 than any other absorptive rib 12.
  • the silicon absorptive rib 12 s can abut the reflective wire 13, surface to surface, or a layer of material L can be sandwiched between the silicon absorptive rib 12 s and the reflective wire 13.
  • the layer of material L can act as a barrier layer to prevent migration of atoms between the silicon absorptive rib 12 s and the reflective wire 13.
  • the layer of material L can have a thickness of between 0.5 and 10 nanometers.
  • the layer of material L can be made of a transparent material, and thus can be called a transparent layer. Examples of materials of the layer of material L include aluminum dioxide and silicon dioxide.
  • Examples of materials of the absorptive ribs 12 and the absorptive rails 32 include silicon, germanium, and tantalum. Each pair of absorptive rib 12 or absorptive rail 32 can include a combination of these and other materials.
  • the absorptive ribs 12 or the absorptive rails 32 can each include a high percent of a single element, such as for example a mass percent of at least 80% silicon, at least 80% germanium, or at least 80% tantalum.
  • one of the absorptive ribs 12 / absorptive rails 32 can include a mass percent of at least 80% silicon and another absorptive rib 12 / absorptive rail 32 can include a mass percent of at least 80% tantalum. This combination can provide a broadband, selectively-absorptive WGP.
  • broadband performance is that the WGPs 10, 20, 30a, 30b, 40, and 50 can, across a bandwidth of at least 200 nanometers (or at least 150 nanometers or at least 300 nanometers) within the visible light spectrum, transmit at least 85% of one polarization (e.g p-polarized light), transmit less than 1.5% (or less than 1% or less than 0.5%) of an opposite polarization (e.g s-polarized light), and reflect less than 15% of the opposite polarization (e.g s- polarized light).
  • Another example of broadband performance is that the WGPs 10, 20, 30a, 30b, 40, and 50 can, across a bandwidth of at least 200
  • nanometers (or at least 150 nanometers or at least 300 nanometers) within the visible light spectrum, transmit at least 80% of one polarization (e.g p-polarized light), transmit less than 0.15% of an opposite polarization (e.g s-polarized light), and reflect less than 15% of the opposite polarization (e.g s-polarized light).
  • the percent transmitted, reflected, or absorbed is the percent of that polarization, not the percent of all light impinging on the WGP.
  • Image projector 60 shown in FIG. 6, can comprise a light source 61, color-splitting optics 62, color-combining optics 68, a projection lens system 65, one or more spatial light modulators 67, and one or more WGPs 64.
  • the light source 61 can emit a beam of light 63, which can initially be unpolarized.
  • the color-splitting optics 62 can be located to receive at least part of the beam of light 63 and can split the beam of light 63 into multiple, differently-colored light beams (colored beams) 63 c .
  • the colored beams 63 c can be primary colors.
  • Color-combining optics 68 can be located to receive and can recombine at least some of the colored beams 63 c into a combined beam or final beam 63 f .
  • Color-combining optics 68 are sometimes called X-Cubes, X-Cube prisms, X- prisms, light recombination prisms, or cross dichroic prisms.
  • Color-combining optics 68 are commonly used in computer projectors for combining different colors of light into a single image to be projected.
  • X-Cubes are typically made of four right angle prisms, with dichroic coatings, that are cemented together to form a cube.
  • the projection lens system 65 can be located to receive the combined beam 63 f and can project a colored image 63j onto a screen 66.
  • Projection lens systems 65 are described in U .S. Patent Numbers 6,585,378 and 6,447, 120, which are hereby incorporated herein by reference in their entirety.
  • One spatial light modulator 67 can be located to receive, in each light path between the color-splitting optics 62 and the color-combining optics 68, one of the colored beams 63 c .
  • Each spatial light modulator 67 can have a plurality of pixels. Each pixel can receive a signal. The signal can be an electronic signal. Depending on whether or not each pixel receives the signal, the pixel can rotate a polarization of, or transmit or reflect without causing a change in polarization of, incident light.
  • the spatial light modulator(s) 67 can be a liquid crystal device / display (LCD) and can be transmissive, reflective, or transflective.
  • Each WGP 64 can be located in one of the colored beams 63 c prior to entering the spatial light modulator 67, after exiting the spatial light modulator 67, or both.
  • the WGP(s) 64 help form the colored image 63 ( by transmitting, reflecting, or absorbing light of each pixel depending on the type of WGP 64 and whether each pixel received the signal.
  • FIG. 7 Another type of image projector 70 is shown in FIG. 7, and can comprise a light source 71, a projection lens system 65, a spatial light modulator 67, and a WGP 64.
  • the light source 71 can sequentially emit multiple, differently-colored light beams (colored beams) 73.
  • the multiple, differently-colored light beams can be primary colors.
  • the projection lens system 65 can be located to receive the colored beams 73 and can project a colored image 63j onto a screen 66.
  • the projection lens system 65, spatial light modulator 67, WGP 64, colored image 63,, and screen 66 were described above.
  • the spatial light modulator 67 can be located to receive, in a light path between the light source 71 and the projection lens system 65, the colored beams 73.
  • the WGP 64 can be located in the colored beams 73 prior to entering the spatial light modulator 67 and after exiting the spatial light modulator 67.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)

Abstract

L'invention concerne un polariseur à grille de fils (WGP pour Wire Grid Polarizer) à absorption sélective (10, 20, 30a, 30b, 40, 50) comprenant un réseau de tiges parallèles, allongées (14) disposées sur une surface d'un substrat transparent (11), des espaces (15) étant formés entre des tiges adjacentes. Les tiges peuvent chacune comprendre un fil réfléchissant (13) et deux nervures absorbantes (12). Le fil réfléchissant peut être pris en sandwich entre les deux nervures absorbantes et le substrat ou les deux nervures absorbantes peuvent être prises en sandwich entre le fil réfléchissant et le substrat. Les deux nervures absorbantes peuvent chacune comprendre un matériau différent. L'utilisation de multiples nervures absorbantes à l'intérieur de chaque tige peut augmenter la largeur de bande utile efficace de la lumière pour absorber sélectivement une polarisation.
PCT/US2015/060125 2015-01-16 2015-11-11 Polariseur à grille de fils à absorption sélective et à large bande WO2016114847A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201562104371P 2015-01-16 2015-01-16
US62/104,371 2015-01-16
US14/937,488 2015-11-10
US14/937,488 US9632224B2 (en) 2014-06-25 2015-11-10 Broadband, selectively-absorptive wire grid polarizer

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WO2016114847A1 true WO2016114847A1 (fr) 2016-07-21

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7813039B2 (en) * 2004-12-06 2010-10-12 Moxtek, Inc. Multilayer wire-grid polarizer with off-set wire-grid and dielectric grid
KR20110137256A (ko) * 2010-06-16 2011-12-22 세이코 엡슨 가부시키가이샤 편광 소자 및 그 제조 방법, 액정 장치, 전자기기
KR20120018750A (ko) * 2009-04-30 2012-03-05 아사히 가라스 가부시키가이샤 와이어그리드형 편광자 및 그 제조 방법
KR20120040868A (ko) * 2010-10-20 2012-04-30 엘지이노텍 주식회사 액정표시장치
KR20120047638A (ko) * 2010-11-04 2012-05-14 엘지이노텍 주식회사 와이어그리드편광자 및 이를 포함하는 액정표시장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7813039B2 (en) * 2004-12-06 2010-10-12 Moxtek, Inc. Multilayer wire-grid polarizer with off-set wire-grid and dielectric grid
KR20120018750A (ko) * 2009-04-30 2012-03-05 아사히 가라스 가부시키가이샤 와이어그리드형 편광자 및 그 제조 방법
KR20110137256A (ko) * 2010-06-16 2011-12-22 세이코 엡슨 가부시키가이샤 편광 소자 및 그 제조 방법, 액정 장치, 전자기기
KR20120040868A (ko) * 2010-10-20 2012-04-30 엘지이노텍 주식회사 액정표시장치
KR20120047638A (ko) * 2010-11-04 2012-05-14 엘지이노텍 주식회사 와이어그리드편광자 및 이를 포함하는 액정표시장치

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