WO2016110442A1 - 3d-lidar sensor - Google Patents

3d-lidar sensor Download PDF

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Publication number
WO2016110442A1
WO2016110442A1 PCT/EP2015/081450 EP2015081450W WO2016110442A1 WO 2016110442 A1 WO2016110442 A1 WO 2016110442A1 EP 2015081450 W EP2015081450 W EP 2015081450W WO 2016110442 A1 WO2016110442 A1 WO 2016110442A1
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WO
WIPO (PCT)
Prior art keywords
laser beam
mirror
receiver
beam source
axis
Prior art date
Application number
PCT/EP2015/081450
Other languages
German (de)
French (fr)
Inventor
Heiko Ridderbusch
Original Assignee
Robert Bosch Gmbh
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Publication date
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Publication of WO2016110442A1 publication Critical patent/WO2016110442A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4916Receivers using self-mixing in the laser cavity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/10Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/32Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/93Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning

Definitions

  • the invention relates to a 3D LIDAR sensor, in particular for motor vehicles, having a laser beam source, an optical receiver, and a scanning system for deflecting a laser beam generated by the laser beam source in two mutually perpendicular scanning directions.
  • the laser beam source used is usually a pulse laser with a pulse duration of the order of magnitude of a few nanoseconds and a wavelength between 850 and 1500 nm or more.
  • a two-dimensional image is obtained.
  • information about the distance of the object is obtained, so that a three-dimensional image of the environment can be constructed.
  • 3D LIDAR sensor makes it possible to provide data about the traffic environment, which can then be stored in one or more driver assistance systems, for example in distance control systems, dead-angle warning systems, parking aids and the like.
  • 3D LIDAR sensors have as a scanning system in a two-axis oscillating deflection mirror, which is formed for example by a MEMS (Micro-Electro-Mechanical System).
  • MEMS Micro-Electro-Mechanical System
  • Flash LIDARs work similarly to a digital camera with a two-dimensional optical detector array and a relatively wide-spread laser beam, so that no deflection of the laser beam is required.
  • the object of the invention is to provide a cost-effective and robust 3D LIDAR sensor which is particularly suitable for motor vehicles.
  • the scanning system has an oscillating mirror for deflecting the laser beam in one of the scanning directions and a rotary drive for rotating the deflecting mirror and the receiver about an axis parallel to this scanning direction.
  • the scanning in the second scanning direction is thus achieved in that the entire sensor rotates about the axis parallel to the first scanning direction, so that the laser beam in the plane perpendicular to this axis sweeps over the entire angular range of 360 °.
  • This has the advantage that in the second scanning direction, no reversal of the direction of movement of the mechanical components is required, but the entire system can rotate continuously in a single direction of rotation. This allows a high speed and a correspondingly high scanning speed in this direction and has the additional advantage that in principle an all-round view is made possible, for example, when the sensor is mounted on the roof of a motor vehicle.
  • Another advantage is that due to the high (and constant) scanning speed a higher eye safety is achieved with unchanged intensity of the laser beam or vice versa given minimum requirements for eye safety higher laser power and thus a higher range is possible.
  • a low cost single axis MEMS scanner can be used for the first scanning direction (parallel to the axis of rotation).
  • the deflection mirror, the receiver and the laser beam source form a rigid unit which is set in rotation by means of the rotary drive.
  • the laser beam source can also be arranged in a position offset from the axis of rotation.
  • the optical receiver preferably has a detector array which includes a plurality of optical detector elements and extends in the direction parallel to the axis of rotation. Each detector element is then sensitive to backscattered laser light, which falls from a certain direction (in elevation, when the axis of rotation is vertically oriented) to a receiving optics of the receiver and then focused by this optics on the relevant sensor element. This allows a simple and fast signal evaluation in a plurality of parallel receiving channels.
  • a frequency-modulated continuous wave laser can also be used as the laser beam source instead of a pulse laser.
  • a beat signal whose frequency position of The speed of the frequency modulation as well as the signal transit time and thus the distance of the object and in moving objects also on the relative speed of the object is dependent.
  • a laser beam source which can be switched over between pulse operation and continuous line operation.
  • a particularly high distance resolution in the near range can be achieved by an arrangement of the laser beam source and the receiver, which operates on the principle of the so-called "self-mixing interference".
  • a beam splitter a part of the light reflected or backscattered by the object is directed back into the laser beam source so that a mixture of the emitted and reflected beams occurs directly in the laser cavity.
  • FIG. 1 is a schematic front view of a LIDAR sensor according to a first embodiment
  • FIG. 2 shows the LIDAR sensor according to FIG. 1 in a view from above;
  • Fig. 3 is a side view of the LIDAR sensor from the direction of the arrows
  • Fig. 4 is a side view from the direction of the arrows IV-IV in Fig. 3;
  • Fig. 5 is a front view of a LIDAR sensor according to another
  • Embodiment shows a side view of the LIDAR sensor according to FIG. 5 from the direction of the arrows V 1 -V 1 in FIG. 5;
  • FIG. 7 shows a side view of a LIDAR sensor according to a further exemplary embodiment.
  • Fig. 8 shows a modification of the embodiment of FIG. 7 in the
  • the 3D LIDAR sensor shown in FIG. 1 comprises a laser beam source 10, an oscillating mirror 12, which is formed for example by a uniaxial MEMS scanner, and an optical receiver 14.
  • the laser beam source 10 is mounted in the example shown on the underside of a rotatably driven disc 16 and generates a sharply focused laser beam 18 which falls through a hole 20 in the disc 16 vertically upwards on the mirror 12.
  • the mirror 12 is tilted so that the laser beam 18 in Fig. 1 is reflected toward the viewer.
  • the mirror 12 is mounted on a mirror support 22.
  • the optical receiver 14 has a detector line 24 which extends vertically in the image plane of an optical lens 26.
  • the detector row 24 and the mirror support 22 are mounted side by side on a common support plate 28 which projects perpendicularly from the disk 16.
  • a stationary base plate 30 is arranged, on which a rotary drive 32 for the disc 16 is mounted.
  • the disc 16 is non-rotatably mounted on the free end of an output shaft 34 and is rotated at high speed, for example at 600 to 1200 min "1 , about a vertical axis A.
  • the laser beam 18 (FIG. 2) deflected by the mirror 12 in a substantially horizontal direction thus scans the entire surroundings of the sensor over a full circle of 360 ° in each azimuth rotation of the disk 16.
  • the lens 26 and the detector line 24, as well as the mirror 12 and the laser beam source 10 are rigidly secured to the disc 16, in each angular position of the disc 16, the light of the laser beam 18, which is reflected at a lying in the current direction of the laser beam object or backscattered (beam 18 'in FIG. 2), is focused and detected by the lens 26 on the detector line 24.
  • a horizontal picture line of a 360 ° panoramic picture is scanned at a line scanning frequency of 10 to 20 Hz.
  • the mirror 12 is oscillated about a horizontal axis with the aid of the MEMS, so that the laser beam 18 also oscillates in a vertical scanning direction, as indicated by a double arrow B in FIG.
  • the vertical scanning angle range can be 60 ° ( ⁇ 30 °) and can be selectively increased by using an additional optics, not shown, for example, to 120 °.
  • the reflected or backscattered beam 18 'from the object is focused by the lens 26 onto the detector array 24.
  • the vertical position of the focus on the detector line 24 is, as indicated in Fig. 4, depending on the angle of incidence of the beam 18 ', which in turn is dependent on the current inclination of the mirror 12.
  • the oscillation frequency of the mirror 12 may be significantly higher than the determined by the rotation of the disc 16 Zeilenabtastfrequenz.
  • the vertical scanning direction constitutes the main scanning direction.
  • an operation is possible in which the vertical scanning direction forms the (slow) sub-scanning direction.
  • the detector row 24 has a multiplicity of optical detectors, for example PIN detectors or APD detectors made of silicon or indium / gallium arsenide. Each individual detector forms a receiving channel, to which a certain vertical position of the reflection source is assigned, from which the beam 18 'is received.
  • the detectors of detector array 24 together thus provide at all times a set of electronic signals representing the image content of a pixel column in a two-dimensional image. Due to the rotation of the disc 16, the signals received at different times by the same detector element form one pixel row of that image.
  • the laser beam 18 generated by the laser beam source 10 has, for example, a wavelength between 850 and 1500 mm and is pulsed, with pulse durations on the order of a few nanoseconds. Due to the finite speed of light, the transit time between the emission of a pulse and the receipt of this pulse by the detector line 24 forms a measure of the distance of the object. Since this information is available for each pixel of the two-dimensional image, one obtains a total of a three-dimensional image of the environment of the sensor, on a full circle (360 °) in azimuth and in an angular range of 60 to 120 ° in elevation.
  • the lens 26 has a diameter of the order of 20 to 30 mm, and the focal length of this lens is of the same order of magnitude.
  • the mirror 12 may be a rectangular mirror with an edge length in the range of 1 to 3 mm.
  • the brilliance of the laser beam source 10 is preferably in the range of 100 to 1000 kW / mm 2 sr. This allows a range of the LIDAR sensor of more than 100 m to over 180 m.
  • Figs. 5 and 6 show a modified embodiment.
  • the reference numerals in Figs. 5 and 6 have the same meaning as in Figs. 1 to 4, but are each supplemented by an apostrophe.
  • the mirror support 22 'and the optical receiver 14' are arranged one above the other here, so that the disk 16 'can have a smaller diameter.
  • This embodiment has the advantage that the unit-rotatable parts of the sensor have a smaller moment of inertia, thereby enabling higher speeds.
  • FIG. 7 shows an exemplary embodiment in which a carrier 38 is arranged on a rotatably drivable disk 36, on which a laser beam source 40, a mirror 42 oscillatingly driven by means of a MEMS and a receiver 44 are arranged.
  • the laser beam emitted from the laser beam source 40 is parallel to or coincides with the axis of rotation A and is then deflected by the mirror 42 in an approximately horizontal direction. By the oscillation of the mirror 42 takes place a deflection in the vertical.
  • a beam splitter 46 is arranged in the form of a semitransparent mirror.
  • the beam emitted by the laser beam source passes through the beam splitter and is then deflected by the mirror 42 onto the objects to be located.
  • the light reflected or scattered on these objects travels in the same way back to the mirror 42 and is deflected by it again in the direction of the laser beam source 40.
  • the beam splitter 46 leaves only a part of this
  • Light again pass to the laser beam source 40, while the other part is directed to the receiver 44.
  • the frequency of the laser beam emitted by the laser beam source 40 is modulated, for example in the form of rising and / or falling ramps.
  • In the cavity of the laser beam source there is an interference between the emitted light and the light emitted. back-scattered light (self-mixing interference) and thus to a beat in the signal received by the receiver 44, which is dependent on the frequency difference between transmitted and received light and thus the distance of the object.
  • the evaluation of this signal allows a very high-resolution distance measurement, especially in the near range.
  • the reflectivity of the beam splitter 46 may vary depending on the application. If predominantly objects in the near range (e.g., ⁇ 1 m) are to be located, it is expedient to design or adjust the steel divider so that the reflectivity is less than 50% in order to increase the interference in the laser beam source. On the other hand, if predominantly objects in the middle distance range are to be located, in the arrangement shown here, the intensity at the receiver 44 can be increased by increasing the reflectivity
  • Range can be increased.
  • the beam splitter reflects the light coming from the laser beam source and returning to it, and allows the beam traveling to the receiver to pass in transmission.
  • the beam splitter 46, the receiver 44 and the laser beam source 40 rotate together with the mirror 42 and the disk 36
  • an arrangement is conceivable in which the laser beam source 40, the beam splitter 46 and the receiver 44 are stationary and only the mirror 42 rotates.
  • 8 shows a further exemplary embodiment in which a laser beam source 40 ', a beam splitter 46', a receiver 44 'and a mirror 42' are arranged lying on the rotating disk 36. The oscillating movement of the mirror 42 'and thus the deflection of the laser beam takes place in this case in the direction perpendicular to the plane of the drawing.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention relates to a 3D-LIDAR sensor, having a laser beam source (10), an optical receiver (14), and a scanning system for deflecting a laser beam (18) generated by the laser beam source in two scanning directions which are perpendicular to each other, characterized in that the scanning system has an oscillating mirror (12) for deflecting the laser beam (18) in one of the scanning directions and a rotation drive (32) for rotating the mirror (12) and the receiver (14) about an axis parallel to said scanning direction.

Description

Beschreibung  description
Titel title
3D-LIDAR-Sensor 3D LIDAR sensor
Die Erfindung betrifft einen 3D-LIDAR-Sensor, insbesondere für Kraftfahrzeuge, mit einer Laserstrahlquelle, einem optischen Empfänger, und einem Abtastsystem zum Ablenken eines von der Laserstrahlquelle erzeugten Laserstrahls in zwei zueinander senkrechten Abtastrichtungen. The invention relates to a 3D LIDAR sensor, in particular for motor vehicles, having a laser beam source, an optical receiver, and a scanning system for deflecting a laser beam generated by the laser beam source in two mutually perpendicular scanning directions.
Stand der Technik In LIDAR-Sensoren wird als Laserstrahlquelle zumeist ein Impulslaser mit einer Impulsdauer in der Größenordnung von einigen Nanosekunden und mit einer Wellenlänge zwischen 850 und 1500 nm oder mehr verwendet. Durch Ablenkung des Laserstrahls in zwei zueinander senkrechten Richtungen wird ein zweidimensionales Bild gewonnen. Durch zusätzliche Auswertung der Laufzeit zwischen der Aussendung eines Laserimpulses und dem Empfang des von einem Objekt zurückgestreuten Lichtes erhält man Information über die Entfernung des Objektes, so dass sich ein dreidimensionales Bild der Umgebung konstruieren lässt. In Kraftfahrzeugen ermöglicht es ein solcher 3D-LIDAR-Sensor, Daten über das Verkehrsumfeld zu liefern, die dann in einem oder mehreren Fahrerassistenz- systemen weiter ausgewertet werden, beispielsweise in Abstandsregelsyste- men, Tote-Winkel-Warnsystemen, Einparkhilfen und dergleichen. PRIOR ART In LIDAR sensors, the laser beam source used is usually a pulse laser with a pulse duration of the order of magnitude of a few nanoseconds and a wavelength between 850 and 1500 nm or more. By deflecting the laser beam in two mutually perpendicular directions, a two-dimensional image is obtained. By additionally evaluating the transit time between the emission of a laser pulse and the reception of the light backscattered by an object, information about the distance of the object is obtained, so that a three-dimensional image of the environment can be constructed. In motor vehicles, such a 3D LIDAR sensor makes it possible to provide data about the traffic environment, which can then be stored in one or more driver assistance systems, for example in distance control systems, dead-angle warning systems, parking aids and the like.
Einige herkömmliche 3D-LIDAR-Sensoren weisen als Abtastsystem einen in zwei Achsen oszillierenden Ablenkspiegel auf, der beispielsweise durch ein MEMS (Micro-Electro-Mechanical System) gebildet wird. Eine andere bekannte Bauform von 3D-LIDAR-Sensoren sind sogenannte Flash-LIDARs, die ähnlich wie eine digitale Kamera mit einem zweidimensionalen optischen Detektorfeld und einem relativ weit aufgefächerten Laserstrahl arbeiten, so dass keine Ablenkung des Laserstrahls erforderlich ist. Some conventional 3D LIDAR sensors have as a scanning system in a two-axis oscillating deflection mirror, which is formed for example by a MEMS (Micro-Electro-Mechanical System). Another known type of 3D LIDAR sensors are so-called Flash LIDARs, which work similarly to a digital camera with a two-dimensional optical detector array and a relatively wide-spread laser beam, so that no deflection of the laser beam is required.
Offenbarung der Erfindung Disclosure of the invention
Aufgabe der Erfindung ist es, einen kostengünstigen und robusten 3D-LIDAR- Sensor zu schaffen, der insbesondere für Kraftfahrzeuge geeignet ist. The object of the invention is to provide a cost-effective and robust 3D LIDAR sensor which is particularly suitable for motor vehicles.
Diese Aufgabe wird erfindungsgemäß dadurch gelöst, dass das Abtastsystem einen oszillierenden Spiegel zum Ablenken des Laserstrahls in einer der Abtastrichtungen und einen Drehantrieb zum Drehen des Ablenkspiegels und des Empfängers um eine zu dieser Abtastrichtung parallele Achse aufweist. This object is achieved according to the invention in that the scanning system has an oscillating mirror for deflecting the laser beam in one of the scanning directions and a rotary drive for rotating the deflecting mirror and the receiver about an axis parallel to this scanning direction.
Die Abtastung in der zweiten Abtastrichtung wird somit dadurch erreicht, dass der gesamte Sensor um die zu der ersten Abtastrichtung parallele Achse rotiert, so dass der Laserstrahl in der zu dieser Achse senkrechten Ebene den kom- pletten Winkelbereich von 360° überstreicht. Das hat den Vorteil, dass in der zweiten Abtastrichtung keine Umkehr der Bewegungsrichtung der mechanischen Komponenten erforderlich ist, sondern das gesamte System kontinuierlich in einer einzigen Drehrichtung rotieren kann. Das erlaubt eine hohe Drehzahl und eine entsprechend hohe Abtastgeschwindigkeit in dieser Richtung und hat den zusätzlichen Vorteil, dass im Prinzip eine Rundumsicht ermöglicht wird, beispielsweise wenn der Sensor auf dem Dach eines Kraftfahrzeugs montiert ist. Ein weiterer Vorteil besteht darin, dass aufgrund der hohen (und konstanten) Abtastgeschwindigkeit eine höhere Augensicherheit bei unveränderter Intensität des Laserstrahls erreicht wird oder umgekehrt bei gegebenen Mindest- anforderungen an die Augensicherheit eine höhere Laserleistung und damit eine höhere Reichweite möglich wird. Für die erste Abtastrichtung (parallel zur Rotationsachse) kann ein kostengünstiger einachsiger MEMS-Scanner verwendet werden. The scanning in the second scanning direction is thus achieved in that the entire sensor rotates about the axis parallel to the first scanning direction, so that the laser beam in the plane perpendicular to this axis sweeps over the entire angular range of 360 °. This has the advantage that in the second scanning direction, no reversal of the direction of movement of the mechanical components is required, but the entire system can rotate continuously in a single direction of rotation. This allows a high speed and a correspondingly high scanning speed in this direction and has the additional advantage that in principle an all-round view is made possible, for example, when the sensor is mounted on the roof of a motor vehicle. Another advantage is that due to the high (and constant) scanning speed a higher eye safety is achieved with unchanged intensity of the laser beam or vice versa given minimum requirements for eye safety higher laser power and thus a higher range is possible. For the first scanning direction (parallel to the axis of rotation), a low cost single axis MEMS scanner can be used.
Vorteilhafte Weiterbildungen und Ausgestaltungen der Erfindung sind in den Unteransprüchen angegeben. Advantageous developments and refinements of the invention are specified in the subclaims.
In einer vorteilhaften Ausführungsform bilden der Ablenkspiegel, der Empfänger und die Laserstrahlquelle eine starre Einheit, die mit Hilfe des Drehantriebs in Rotation versetzt wird. In dem Fall kann die Laserstrahlquelle auch in einer gegenüber der Rotationsachse versetzten Position angeordnet sein. In an advantageous embodiment, the deflection mirror, the receiver and the laser beam source form a rigid unit which is set in rotation by means of the rotary drive. In that case, the laser beam source can also be arranged in a position offset from the axis of rotation.
Der optische Empfänger weist vorzugsweise eine Detektorzeile auf, die eine Vielzahl von optischen Detektorelementen enthält und sich in der Richtung pa- rallel zur Drehachse erstreckt. Jedes Detektorelement ist dann für rückgestreutes Laserlicht empfindlich, das aus einer bestimmten Richtung (in Elevation, wenn die Drehachse vertikal orientiert ist) auf eine Empfangsoptik des Empfängers fällt und dann durch diese Optik auf das betreffende Sensorelement fokus- siert wird. Dadurch wird eine einfache und schnelle Signalauswertung in einer Vielzahl von parallelen Empfangskanälen ermöglicht. The optical receiver preferably has a detector array which includes a plurality of optical detector elements and extends in the direction parallel to the axis of rotation. Each detector element is then sensitive to backscattered laser light, which falls from a certain direction (in elevation, when the axis of rotation is vertically oriented) to a receiving optics of the receiver and then focused by this optics on the relevant sensor element. This allows a simple and fast signal evaluation in a plurality of parallel receiving channels.
In einer anderen Ausführungsform kann als Laserstrahlquelle anstelle eines Impulslasers auch ein frequenzmodulierter Dauerstrichlaser verwendet werden. Wie an sich bekannt ist, erhält man dann durch Mischen des emittierten Lichts mit dem reflektierten Licht ein Schwebungssignal, dessen Frequenzlage von der Geschwindigkeit der Frequenzmodulation sowie von der Signallaufzeit und damit vom Abstand des Objekts und bei bewegten Objekten auch von der Relativgeschwindigkeit des Objekts abhängig ist. Gegebenenfalls kann auch eine Laserstrahlquelle verwendet werden, die zwischen Impulsbetrieb und Dauer- strichbetrieb umschaltbar ist. In another embodiment, a frequency-modulated continuous wave laser can also be used as the laser beam source instead of a pulse laser. As is known per se, then obtained by mixing the emitted light with the reflected light, a beat signal whose frequency position of The speed of the frequency modulation as well as the signal transit time and thus the distance of the object and in moving objects also on the relative speed of the object is dependent. Optionally, it is also possible to use a laser beam source which can be switched over between pulse operation and continuous line operation.
Eine besonders hohe Abstandsauflösung im Nahbereich lässt sich durch eine Anordnung der Laserstrahlquelle und des Empfängers erreichen, die nach dem Prinzip der sogenannten "self-mixing interference" arbeitet. Dabei wird mit Hilfe eines Strahlteilers ein Teil des vom Objekt reflektierten oder zurückgestreuten Lichts in die Laserstrahlquelle zurückgelenkt, so dass es unmittelbar in der La- serkavität zu einer Mischung der emittierten und reflektierten Strahlen kommt. A particularly high distance resolution in the near range can be achieved by an arrangement of the laser beam source and the receiver, which operates on the principle of the so-called "self-mixing interference". In this case, with the aid of a beam splitter, a part of the light reflected or backscattered by the object is directed back into the laser beam source so that a mixture of the emitted and reflected beams occurs directly in the laser cavity.
Im folgenden werden Ausführungsbeispiele anhand der Zeichnung näher erläutert. In the following embodiments are explained in detail with reference to the drawing.
Es zeigen: Show it:
Fig. 1 eine schematische Frontansicht eines LIDAR-Sensors gemäß einem ersten Ausführungsbeispiel; 1 is a schematic front view of a LIDAR sensor according to a first embodiment;
Fig. 2 den LIDAR-Sensor nach Fig. 1 in einer Ansicht von oben; FIG. 2 shows the LIDAR sensor according to FIG. 1 in a view from above; FIG.
Fig. 3 eine Seitenansicht des LIDAR-Sensors aus Richtung der Pfeile Fig. 3 is a side view of the LIDAR sensor from the direction of the arrows
III-III in Fig. 1 ;  III-III in Fig. 1;
Fig. 4 eine Seitenansicht aus Richtung der Pfeile IV-IV in Fig. 3; Fig. 4 is a side view from the direction of the arrows IV-IV in Fig. 3;
Fig. 5 eine Frontansicht eines LIDAR-Sensors gemäß einem anderen Fig. 5 is a front view of a LIDAR sensor according to another
Ausführungsbeispiel; Fig. 6 eine Seitenansicht des LIDAR-Sensors nach Fig. 5 aus Richtung der Pfeile Vl-Vl in Fig. 5; Embodiment; 6 shows a side view of the LIDAR sensor according to FIG. 5 from the direction of the arrows V 1 -V 1 in FIG. 5;
Fig. 7 eine Seitenansicht eines LIDAR-Sensors gemäß einem weiteren Ausführungsbeispiel; und 7 shows a side view of a LIDAR sensor according to a further exemplary embodiment; and
Fig. 8 eine Abwandlung des Ausführungsbeispiels nach Fig. 7 in der Fig. 8 shows a modification of the embodiment of FIG. 7 in the
Draufsicht.  Top view.
Der in Fig. 1 gezeigte 3D-LIDAR-Sensor weist eine Laserstrahlquelle 10, einen oszillierenden Spiegel 12, der beispielsweise durch einen einachsigen MEMS- Scanner gebildet wird, und einen optischen Empfänger 14 auf. Die Laserstrahlquelle 10 ist im gezeigten Beispiel an der Unterseite einer drehantreibbaren Scheibe 16 montiert und erzeugt einen scharf gebündelten Laserstrahl 18, der durch ein Loch 20 in der Scheibe 16 senkrecht nach oben auf den Spiegel 12 fällt. Der Spiegel 12 ist schräg angestellt, so dass der Laserstrahl 18 in Fig. 1 in der Richtung auf den Betrachter zu reflektiert wird. Der Spiegel 12 ist auf einem Spiegelträger 22 montiert. Der optische Empfänger 14 weist eine Detektorzeile 24 auf, die sich vertikal in der Bildebene einer optischen Linse 26 erstreckt. Die Detektorzeile 24 und der Spiegelträger 22 sind nebeneinander auf einer gemeinsamen Tragplatte 28 montiert, die senkrecht von der Scheibe 16 aufragt. The 3D LIDAR sensor shown in FIG. 1 comprises a laser beam source 10, an oscillating mirror 12, which is formed for example by a uniaxial MEMS scanner, and an optical receiver 14. The laser beam source 10 is mounted in the example shown on the underside of a rotatably driven disc 16 and generates a sharply focused laser beam 18 which falls through a hole 20 in the disc 16 vertically upwards on the mirror 12. The mirror 12 is tilted so that the laser beam 18 in Fig. 1 is reflected toward the viewer. The mirror 12 is mounted on a mirror support 22. The optical receiver 14 has a detector line 24 which extends vertically in the image plane of an optical lens 26. The detector row 24 and the mirror support 22 are mounted side by side on a common support plate 28 which projects perpendicularly from the disk 16.
Unterhalb der Scheibe 16 ist eine stationäre Grundplatte 30 angeordnet, auf der ein Drehantrieb 32 für die Scheibe 16 montiert ist. Die Scheibe 16 sitzt drehfest auf dem freien Ende einer Ausgangswelle 34 und wird mit hoher Drehzahl, beispielsweise mit 600 bis 1200 min"1 , um eine vertikale Achse A gedreht. Der durch den Spiegel 12 in eine im wesentlichen waagerechte Richtung abgelenkte Laserstrahl 18 (Fig. 2) tastet somit bei jeder Umdrehung der Scheibe 16 im Azimut die gesamte Umgebung des Sensors auf einem Vollkreis von 360° ab. Da die Linse 26 und die Detektorzeile 24 ebenso wie der Spiegel 12 und die Laserstrahlquelle 10 starr an der Scheibe 16 befestigt sind, wird in jeder Winkelstellung der Scheibe 16 das Licht des Laserstrahls 18, das an einem in der aktuellen Richtung des Laserstrahls liegenden Objekt reflektiert oder zurückgestreut wird (Strahl 18' in Fig. 2), von der Linse 26 auf die Detektorzeile 24 fo- kussiert und detektiert. Bei jeder Umdrehung der Scheibe 16 wird somit eine horizontale Bildzeile eines 360°-Panoramabildes mit einer Zeilenabtastfrequenz von 10 bis 20 Hz abgetastet. Below the disc 16, a stationary base plate 30 is arranged, on which a rotary drive 32 for the disc 16 is mounted. The disc 16 is non-rotatably mounted on the free end of an output shaft 34 and is rotated at high speed, for example at 600 to 1200 min "1 , about a vertical axis A. The laser beam 18 (FIG. 2) deflected by the mirror 12 in a substantially horizontal direction thus scans the entire surroundings of the sensor over a full circle of 360 ° in each azimuth rotation of the disk 16. Since the lens 26 and the detector line 24, as well as the mirror 12 and the laser beam source 10 are rigidly secured to the disc 16, in each angular position of the disc 16, the light of the laser beam 18, which is reflected at a lying in the current direction of the laser beam object or backscattered (beam 18 'in FIG. 2), is focused and detected by the lens 26 on the detector line 24. Each time the disc 16 rotates, a horizontal picture line of a 360 ° panoramic picture is scanned at a line scanning frequency of 10 to 20 Hz.
Gleichzeitig wird der Spiegel 12 mit Hilfe des MEMS oszillierend um eine horizontale Achse bewegt, so dass der Laserstrahl 18 auch in einer vertikalen Abtastrichtung oszilliert, wie in Fig. 3 durch einen Doppelpfeil B angedeutet wird. Der vertikale Abtastwinkelbereich kann dabei 60° (± 30°) betragen und lässt sich wahlweise durch Verwendung einer nicht gezeigten Zusatzoptik noch vergrößern, beispielsweise auf 120°. Der vom Objekt reflektierte oder zurückgestreute Strahl 18' wird durch die Linse 26 auf die Detektorzeile 24 fokussiert. Die vertikale Position des Fokus auf der Detektorzeile 24 ist dabei, wie in Fig. 4 angedeutet ist, vom Einfallswinkel des Strahls 18' abhängig, der seinerseits von der aktuellen Neigung des Spiegels 12 abhängig ist. At the same time, the mirror 12 is oscillated about a horizontal axis with the aid of the MEMS, so that the laser beam 18 also oscillates in a vertical scanning direction, as indicated by a double arrow B in FIG. The vertical scanning angle range can be 60 ° (± 30 °) and can be selectively increased by using an additional optics, not shown, for example, to 120 °. The reflected or backscattered beam 18 'from the object is focused by the lens 26 onto the detector array 24. The vertical position of the focus on the detector line 24 is, as indicated in Fig. 4, depending on the angle of incidence of the beam 18 ', which in turn is dependent on the current inclination of the mirror 12.
Die Oszillationsfrequenz des Spiegels 12 kann deutlich höher sein als die durch die Rotation der Scheibe 16 bestimmte Zeilenabtastfrequenz. In dem Fall bildet die vertikale Abtastrichtung die Hauptabtastrichtung. Je nach Anwendungsfall ist jedoch auch eine Betriebsweise möglich, bei der die vertikale Abtastrichtung die (langsame) Unterabtastrichtung bildet. Die Detektorzeile 24 weist eine Vielzahl optischer Detektoren, beispielsweise PIN-Detektoren oder APD-Detektoren aus Silizium oder Indium/Galliumarsenid auf. Jeder einzelne Detektor bildet dabei einen Empfangskanal, dem eine be- stimmte vertikale Position der Reflexionsquelle zugeordnet ist, von der der Strahl 18' empfangen wird. Die Detektoren der Detektorzeile 24 zusammen liefern somit zu jedem Zeitpunkt einen Satz von elektronischen Signalen, die den Bildinhalt einer Pixelspalte in einem zweidimensionalen Bild repräsentieren. Aufgrund der Rotation der Scheibe 16 bilden die zu verschiedenen Zeiten von demselben Detektorelement empfangenen Signale eine Pixelzeile dieses Bildes. The oscillation frequency of the mirror 12 may be significantly higher than the determined by the rotation of the disc 16 Zeilenabtastfrequenz. In that case, the vertical scanning direction constitutes the main scanning direction. Depending on the application, however, an operation is possible in which the vertical scanning direction forms the (slow) sub-scanning direction. The detector row 24 has a multiplicity of optical detectors, for example PIN detectors or APD detectors made of silicon or indium / gallium arsenide. Each individual detector forms a receiving channel, to which a certain vertical position of the reflection source is assigned, from which the beam 18 'is received. The detectors of detector array 24 together thus provide at all times a set of electronic signals representing the image content of a pixel column in a two-dimensional image. Due to the rotation of the disc 16, the signals received at different times by the same detector element form one pixel row of that image.
Der von der Laserstrahlquelle 10 erzeugte Laserstrahl 18 hat beispielsweise eine Wellenlänge zwischen 850 und 1500 mm und ist gepulst, mit Impulsdauern in der Größenordnung von einigen Nanosekunden. Aufgrund der endlichen Lichtgeschwindigkeit bildet die Laufzeit zwischen dem Aussenden eines Impulses und dem Empfang dieses Impulses durch die Detektorzeile 24 ein Maß für die Entfernung des Objekts. Da diese Information für jedes Pixel des zweidimensionalen Bildes verfügbar ist, erhält man insgesamt ein dreidimensionales Bild der Umgebung des Sensors, und zwar auf einem Vollkreis (360°) im Azimut und in einem Winkelbereich von 60 bis 120° in Elevation. The laser beam 18 generated by the laser beam source 10 has, for example, a wavelength between 850 and 1500 mm and is pulsed, with pulse durations on the order of a few nanoseconds. Due to the finite speed of light, the transit time between the emission of a pulse and the receipt of this pulse by the detector line 24 forms a measure of the distance of the object. Since this information is available for each pixel of the two-dimensional image, one obtains a total of a three-dimensional image of the environment of the sensor, on a full circle (360 °) in azimuth and in an angular range of 60 to 120 ° in elevation.
In der Praxis hat die Linse 26 beispielsweise einen Durchmesser in der Größenordnung von 20 bis 30 mm, und die Brennweite dieser Linse liegt in der gleichen Größenordnung. Der Spiegel 12 kann ein Rechteckspiegel mit einer Kantenlänge im Bereich von 1 bis 3 mm sein. Die Brillanz der Laserstrahlquelle 10 liegt vorzugsweise im Bereich von 100 bis 1000 kW/mm"2sr. Das erlaubt eine Reichweite des LIDAR-Sensors von mehr als 100 m bis über 180 m. Fig. 5 und 6 zeigen ein abgewandeltes Ausführungsbeispiel. Die Bezugszeichen in Fig. 5 und 6 haben die gleiche Bedeutung wie in Fig. 1 bis 4, sind jedoch jeweils durch einen Apostroph ergänzt. Der Spiegelträger 22' und der optische Empfänger 14' sind hier übereinander angeordnet , so dass die Scheibe 16' einen kleineren Durchmesser haben kann. In practice, for example, the lens 26 has a diameter of the order of 20 to 30 mm, and the focal length of this lens is of the same order of magnitude. The mirror 12 may be a rectangular mirror with an edge length in the range of 1 to 3 mm. The brilliance of the laser beam source 10 is preferably in the range of 100 to 1000 kW / mm 2 sr. This allows a range of the LIDAR sensor of more than 100 m to over 180 m. Figs. 5 and 6 show a modified embodiment. The reference numerals in Figs. 5 and 6 have the same meaning as in Figs. 1 to 4, but are each supplemented by an apostrophe. The mirror support 22 'and the optical receiver 14' are arranged one above the other here, so that the disk 16 'can have a smaller diameter.
Diese Ausführungsform hat den Vorteil, dass die als eine Einheit drehbaren Teile des Sensors ein kleineres Trägheitsmoment haben, wodurch größere Drehzahlen ermöglicht werden. This embodiment has the advantage that the unit-rotatable parts of the sensor have a smaller moment of inertia, thereby enabling higher speeds.
Fig. 7 zeigt ein Ausführungsbeispiel, bei dem auf einer drehantreibbaren Scheibe 36 ein Träger 38 angeordnet ist, an dem eine Laserstrahlquelle 40, ein mit Hilfe eines MEMS oszillierend angetriebener Spiegel 42 und ein Empfänger 44 angeordnet sind. Der von der Laserstrahlquelle 40 emittierte Laserstrahl verläuft parallel zur Drehachse A oder fällt mit dieser zusammen und wird dann durch den Spiegel 42 in eine etwa horizontale Richtung abgelenkt. Durch die Oszillation des Spiegels 42 erfolgt eine Ablenkung in der Vertikalen. 7 shows an exemplary embodiment in which a carrier 38 is arranged on a rotatably drivable disk 36, on which a laser beam source 40, a mirror 42 oscillatingly driven by means of a MEMS and a receiver 44 are arranged. The laser beam emitted from the laser beam source 40 is parallel to or coincides with the axis of rotation A and is then deflected by the mirror 42 in an approximately horizontal direction. By the oscillation of the mirror 42 takes place a deflection in the vertical.
Im Strahlengang zwischen der Laserstrahlquelle 40 und dem Spiegel 42 ist ein Strahlteiler 46 in der Form eines halbdurchlässigen Spiegels angeordnet. Der von der Laserstrahlquelle emittierte Strahl durchquert den Strahlteiler und wird dann durch den Spiegel 42 auf die zu ortenden Objekte abgelenkt. Das an diesen Objekten reflektierte oder gestreute Licht läuft auf demselben Weg zurück zum Spiegel 42 und wird durch diesen wieder in Richtung auf die Laserstrahl- quelle 40 abgelenkt. Der Strahlteiler 46 lässt jedoch nur einen Teil diesesIn the beam path between the laser beam source 40 and the mirror 42, a beam splitter 46 is arranged in the form of a semitransparent mirror. The beam emitted by the laser beam source passes through the beam splitter and is then deflected by the mirror 42 onto the objects to be located. The light reflected or scattered on these objects travels in the same way back to the mirror 42 and is deflected by it again in the direction of the laser beam source 40. However, the beam splitter 46 leaves only a part of this
Lichts, beispielsweise 50%, wieder zur Laserstrahlquelle 40 passieren, während der andere Teil auf den Empfänger 44 gelenkt wird. Die Frequenz des von der Laserstrahlquelle 40 emittierten Laserstrahls ist moduliert, beispielsweise in der Form steigender und/oder fallender Rampen. In der Kavität der Laserstrahlquel- le kommt es zu einer Interferenz zwischen dem emittierten Licht und dem zu- rückgestreuten Licht (self-mixing interference) und damit zu einer Schwebung in dem vom Empfänger 44 empfangenen Signal, die von dem Frequenzunterschied zwischen gesendetem und empfangenem Licht und damit vom Abstand des Objekts abhängig ist. Die Auswertung dieses Signals erlaubt insbesondere im Nahbereich eine sehrhoch auflösende Abstandsmessung. Light, for example 50%, again pass to the laser beam source 40, while the other part is directed to the receiver 44. The frequency of the laser beam emitted by the laser beam source 40 is modulated, for example in the form of rising and / or falling ramps. In the cavity of the laser beam source, there is an interference between the emitted light and the light emitted. back-scattered light (self-mixing interference) and thus to a beat in the signal received by the receiver 44, which is dependent on the frequency difference between transmitted and received light and thus the distance of the object. The evaluation of this signal allows a very high-resolution distance measurement, especially in the near range.
Die Reflektivität des Strahlteilers 46 kann je nach Anwendungsfall variieren. Wenn vorherrschend Objekte im Nahbereich (z.B. < 1 m) geortet werden sollen, ist es zweckmäßig, den Stahlteiler so auszugestalten oder einzustellen, dass die Reflektivität kleiner als 50 % ist, damit die Interferenz in der Laserstrahlquelle verstärkt wird. Wenn dagegen vorherrschend Objekte im mittleren Abstandsbereich geortet werden sollen, kann bei der hier gezeigten Anordnung durch Erhöhung der Reflektivität die Intensität am Empfänger 44 und damit die The reflectivity of the beam splitter 46 may vary depending on the application. If predominantly objects in the near range (e.g., <1 m) are to be located, it is expedient to design or adjust the steel divider so that the reflectivity is less than 50% in order to increase the interference in the laser beam source. On the other hand, if predominantly objects in the middle distance range are to be located, in the arrangement shown here, the intensity at the receiver 44 can be increased by increasing the reflectivity
Reichweite gesteigert werden. Das Umgekehrte gilt bei einer (nicht gezeigten) Anordnung, bei der der Strahlteiler das von der Laserstrahlquelle kommende und zu dieser zurücklaufende Licht reflektiert und den zum Empfänger laufenden Strahl in Transmission passieren lässt. Range can be increased. The reverse applies to an arrangement (not shown) in which the beam splitter reflects the light coming from the laser beam source and returning to it, and allows the beam traveling to the receiver to pass in transmission.
Während bei dem in Fig. 7 gezeigten Ausführungsbeispiel auch der Strahlteiler 46, der Empfänger 44 und die Laserstrahlquelle 40 zusammen mit dem Spiegel 42 und der Scheibe 36 rotieren, ist auch eine Anordnung denkbar, bei der die Laserstrahlquelle 40, der Strahlteiler 46 und der Empfänger 44 stationär sind und nur der Spiegel 42 rotiert. Fig. 8 zeigt ein weiteres Ausführungsbeispiel, bei dem eine Laserstrahlquelle 40', ein Strahlteiler 46', ein Empfänger 44' und ein Spiegel 42' liegend auf der rotierenden Scheibe 36 angeordnet sind. Die oszillierende Bewegung des Spiegels 42' und damit die Ablenkung des Laserstrahl erfolgt in diesem Fall in der Richtung senkrecht zur Zeichenebene. While in the embodiment shown in FIG. 7, the beam splitter 46, the receiver 44 and the laser beam source 40 rotate together with the mirror 42 and the disk 36, an arrangement is conceivable in which the laser beam source 40, the beam splitter 46 and the receiver 44 are stationary and only the mirror 42 rotates. 8 shows a further exemplary embodiment in which a laser beam source 40 ', a beam splitter 46', a receiver 44 'and a mirror 42' are arranged lying on the rotating disk 36. The oscillating movement of the mirror 42 'and thus the deflection of the laser beam takes place in this case in the direction perpendicular to the plane of the drawing.

Claims

Ansprüche claims
1 . 3D-LIDAR-Sensor, mit einer Laserstrahlquelle (10; 10'; 40; 40'), einem optischen Empfänger (14; 14'; 44; 44') und einem Abtastsystem zum Ablenken eines von der Laserstrahlquelle erzeugten Laserstrahls (18) in zwei zueinander senkrechten Abtastrichtungen, dadurch gekennzeichnet, dass das Abtastsystem einen oszillierenden Spiegel (12; 42; 42') zum Ablenken des Laserstrahls (18) in einer der Abtastrichtungen und einen Drehantrieb (32; 32') zum Drehen des Spiegels (12; 42; 42') und des Empfängers (14; 14'; 44; 44') um eine zu dieser Abtastrichtung parallele Achse (A) aufweist. 1 . A 3D LIDAR sensor comprising a laser beam source (10; 10 '; 40; 40'), an optical receiver (14; 14 '; 44; 44') and a scanning system for deflecting a laser beam (18) generated by the laser beam source two mutually perpendicular scanning directions, characterized in that the scanning system comprises an oscillating mirror (12; 42; 42 ') for deflecting the laser beam (18) in one of the scanning directions and a rotary drive (32; 32') for rotating the mirror (12; 42 ') and the receiver (14; 14'; 44; 44 ') around an axis (A) parallel to said scanning direction.
2. Sensor nach Anspruch 1 , bei dem die Laserstrahlquelle (10; 10'; 40') versetzt zu der Achse (A) angeordnet und gemeinsam mit dem Spiegel (12; 42; 42') und dem Empfänger (14; 14'; 44') eine drehbare Einheit bildet. A sensor according to claim 1, wherein the laser beam source (10, 10 ', 40') is offset from the axis (A) and is disposed together with the mirror (12; 42; 42 ') and the receiver (14; 14'; 44 ') forms a rotatable unit.
3. Sensor nach Anspruch 1 oder 2, mit einem zwischen dem Spiegel (42; 42') und der Laserstrahlquelle (40; 40') angeordneten Strahlteiler (46; 46'), der einen Teil der von einem Objekt auf den Spiegel zurückgestreuten Laserstrah- lung in den Empfänger (44; 44') und einen anderen Teil zurück in die Laserstrahlquelle (40; 40') lenkt. 3. Sensor according to claim 1 or 2, with a between the mirror (42; 42 ') and the laser beam source (40; 40') arranged beam splitter (46; 46 '), which covers a part of the backscattered from an object on the mirror laser beam and directs another part back into the laser beam source (40, 40 ').
4. Sensor nach Anspruch 1 oder 2, bei dem der Empfänger (14; 14') eine Detektorzeile (24) aufweist, die sich parallel zu der Achse (A) erstreckt. A sensor according to claim 1 or 2, wherein the receiver (14; 14 ') has a detector array (24) extending parallel to the axis (A).
5. Sensor nach einem der vorstehenden Ansprüche, bei dem der Spiegel (12; 42') und der Empfänger (14; 44') nebeneinander auf einer um die Achse (A) drehantreibbaren Scheibe (16; 36) angeordnet sind. 5. Sensor according to one of the preceding claims, wherein the mirror (12; 42 ') and the receiver (14; 44') side by side on a about the axis (A) rotatably driven disc (16; 36) are arranged.
6. Sensor nach einem der Ansprüche 1 bis 4, bei dem der Spiegel (12; 42) und der Empfänger (14'; 40) in Richtung der Achse (A) versetzt zueinander angeordnet sind. 6. Sensor according to one of claims 1 to 4, wherein the mirror (12; 42) and the receiver (14 '; 40) in the direction of the axis (A) are offset from one another.
7. Fahrerassistenzsystem für Kraftfahrzeuge, mit einem 3D-LIDAR-Sensor nach einem der vorstehenden Ansprüche. 7. driver assistance system for motor vehicles, with a 3D LIDAR sensor according to one of the preceding claims.
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