WO2016105025A1 - Method for fabricating light extraction substrate for organic light-emitting diode, light extraction substrate for organic light-emitting diode, and organic light-emitting diode comprising same - Google Patents

Abstract

The present invention relates to a method for fabricating a light extraction substrate for an organic light-emitting diode (OLED), a light extraction substrate for an OLED, and an OLED comprising same. More specifically, the present invention relates to a method for fabricating a light extraction substrate for an OLED, which can improve the light extraction efficiency of an OLED, a light extraction substrate for an OLED, and an OLED comprising same. To this end, the present invention provides a method for fabricating a light extraction substrate for an OLED, a light extraction substrate for an OLED, and an OLED comprising same, the method comprising: a dispersing step for dispersing a plurality of molybdenum (Mo) particles onto the surface of a base substrate; a coating step for coating, with a metal oxide nanosol, the surface of the base substrate on which the plurality of Mo particles have been dispersed; and a sintering step for sintering the metal oxide nanosol, wherein, in the sintering step, the plurality of Mo particles are sublimated and pores are formed in the respective places where the plurality of Mo particle have been sublimated, and if the sintering step has been completed, the metal oxide nanosol is formed into a matrix layer for the plurality of pores and a buckling structure is formed on the surface of the matrix layer by the form of the plurality of pores.

Description

Method for manufacturing light extracting substrate for organic light emitting device, light extracting substrate for organic light emitting device and organic light emitting device comprising same

The present invention relates to a method for manufacturing a light extraction substrate for an organic light emitting device, a light extraction substrate for an organic light emitting device and an organic light emitting device including the same, and more particularly, for an organic light emitting device that can improve the light extraction efficiency of the organic light emitting device. The present invention relates to a light extraction substrate manufacturing method, a light extraction substrate for an organic light emitting device, and an organic light emitting device including the same.

In general, the light emitting device may be classified into an organic light emitting device that forms a light emitting layer using organic materials and an inorganic light emitting device that forms a light emitting layer using inorganic materials. In the organic light emitting device of the organic light emitting device, electrons injected from an electron injection electrode and holes injected from a hole injection electrode are combined in an organic emission layer to form excitons, and the excitons are energy. It is a self-luminous device that emits light while emitting light, and has advantages such as low power driving, self-luminous, wide viewing angle, high resolution and natural colors, and fast response speed.

Recently, researches for applying such organic light emitting devices to portable information devices, cameras, watches, office equipment, information display windows of automobiles, televisions, displays, or lightings have been actively conducted.

In order to improve the light emitting efficiency of the organic light emitting device as described above, there is a method of increasing the light emitting efficiency of the material constituting the light emitting layer or improving the light extraction efficiency of the light emitted from the light emitting layer.

In this case, the light extraction efficiency depends on the refractive index of each layer constituting the organic light emitting device. In the general organic light emitting device, when light emitted from the light emitting layer is emitted above the critical angle, total reflection occurs at an interface between a layer having a high refractive index such as a transparent electrode layer as an anode and a layer having a low refractive index such as substrate glass. The efficiency is lowered, and thus, the overall luminous efficiency of the organic light emitting device is reduced.

Specifically, the organic light emitting device emits only 20% of the emitted light to the outside, and the light of about 80% includes the substrate glass, the anode and the hole injection layer, the hole transport layer, the light emitting layer, the electron transport layer, the electron injection layer, etc. The wave guiding effect due to the refractive index difference of the organic light emitting layer and the total reflection effect due to the refractive index difference between the substrate glass and the air are lost. That is, the refractive index of the internal organic light emitting layer is 1.7 to 1.8, and the refractive index of ITO generally used as the anode is about 1.9. At this time, since the thickness of the two layers is very thin, approximately 200 ~ 400nm, the refractive index of the substrate glass is 1.5, the planar waveguide is naturally formed in the organic light emitting device. According to the calculation, the ratio of light lost in the internal waveguide mode by the cause reaches about 45%. Since the refractive index of the substrate glass is about 1.5 and the refractive index of the outside air is 1.0, when light exits from the substrate glass to the outside, light incident above the critical angle causes total reflection and is isolated inside the substrate glass. Since the ratio of about 35%, only 20% of the light emission amount is emitted to the outside.

In order to solve this problem, research on the light extraction layer that draws 80% of the light lost by the optical waveguide mode to the outside is being actively conducted. Here, the light extraction layer is largely divided into an inner light extraction layer and an outer light extraction layer. In this case, in the case of the external light extraction layer, by providing a film including various types of micro lenses on the outside of the substrate, it is possible to obtain a light extraction effect, there is a characteristic not largely affected by the shape of the micro lens. In addition, since the internal light extraction layer directly extracts the light lost in the optical waveguide mode, there is an advantage that the possibility of efficiency increase is much higher than the external light extraction layer.

Herein, in order to manufacture such an internal light extraction layer, a method of forming a structure having a different refractive index in the layer through patterning or coating a material having a different refractive index such as metal oxide particles is mainly used.

However, even if the light extraction efficiency is increased through the internal light extraction layer, based on the amount of light emitted to the outside, the effect is still insignificant and complex in process, so that the light extraction efficiency can be improved by a simpler method. Research on methods or techniques is urgently needed.

[Preceding technical literature]

Republic of Korea Patent Publication No. 1093259 (2011.12.06.)

The present invention has been made to solve the problems of the prior art as described above, an object of the present invention is a method for manufacturing a light extraction substrate for an organic light emitting device that can improve the light extraction efficiency of the organic light emitting device, for an organic light emitting device It is to provide a light extraction substrate and an organic light emitting device comprising the same.

To this end, the present invention, a dispersion step of dispersing a plurality of molybdenum (Mo) particles on the surface of the base substrate; Coating a metal oxide nanosol on a surface of the base substrate on which the plurality of molybdenum particles are dispersed; And a firing step of firing the metal oxide nanosol, wherein the plurality of molybdenum particles are sublimed during the firing step, and pores are formed in each of the plurality of molybdenum particles sublimated, and the firing step is completed. , The metal oxide nanosol is made of a matrix layer for a plurality of the pores, the surface of the matrix layer for the organic light emitting device, characterized in that the buckle (buckling) structure is formed by the shape of the plurality of pores It provides a light extraction substrate manufacturing method.

Here, in the coating step, any one or two or more of a metal oxide candidate group including SiO ₂ , TiO ₂ , ZrO _x , ZnO, and SnO ₂ may be used as the metal oxide.

At this time, in the coating step, as the metal oxide, rutile (rutile) crystal phase TiO ₂ may be used.

In addition, a plurality of amorphous nanopores may be formed in the matrix layer after the firing step.

In addition, in the firing step, the pores formed in each of the sites occupied by the plurality of molybdenum particles due to the sublimation of the plurality of molybdenum particles increases in size due to the difference in the coefficient of thermal expansion (CTE) between the base substrate and the metal oxide. Can be.

In the firing step, the metal oxide nanosol may be fired at a temperature of 500 ° C. or higher.

In addition, in the coating step, a plurality of scattering particles may be mixed with the metal oxide nanosol.

In this case, as the scattering particles, scattering particles formed of a shell surrounding the core and having a refractive index difference from the core and the core may be used.

In addition, as the scattering particles, the core may be used as scattering particles made of hollow.

A flexible substrate may be used as the base substrate.

At this time, thin glass with a thickness of 1.5 mm or less can be used as the base substrate.

On the other hand, the present invention, the base substrate; A matrix layer formed on the base substrate and made of a metal oxide; And a plurality of pores formed on the side of the matrix layer at an interface between the base substrate and the matrix layer, and formed by subliming a plurality of molybdenum (Mo) particles, wherein the shape of the plurality of pores is formed on a surface of the matrix layer. It provides a light extraction substrate for an organic light emitting device, characterized in that the transfer of the buckle (buckling) structure of the form.

Here, the pores may be larger than the molybdenum particles.

In addition, a plurality of scattering particles may be dispersed in the matrix layer.

In this case, the scattering particles may have a core and a shell having a difference in refractive index from the core and surrounding the core.

In addition, the core may be made hollow.

The matrix layer may be made of TiO ₂ of a rutile crystalline phase.

In this case, a plurality of amorphous nanopores may be formed in the matrix layer.

On the other hand, the present invention provides an organic light emitting device characterized in that the light extraction substrate for the organic light emitting device is provided on the path through which light is emitted.

According to the present invention, in the firing process of forming the metal oxide nanosol into a matrix layer, by subliming molybdenum formed at the boundary between the base substrate and the metal oxide nanosol, pores capable of light scattering can be formed in place. It is possible to form a buckling structure capable of disturbing the optical waveguide mode on the surface of the matrix layer to be made, thereby improving the light extraction efficiency of the organic light emitting device.

1 is a process flow diagram illustrating a method of manufacturing a light extraction substrate for an organic light emitting device according to an embodiment of the present invention.

2 to 5 is a process schematic diagram showing a method of manufacturing a light extraction substrate for an organic light emitting device according to an embodiment of the present invention.

Figure 6 is a schematic cross-sectional view of the light extraction substrate prepared by the light extraction substrate manufacturing method according to an embodiment of the present invention applied to the organic light emitting device.

Hereinafter, a method of manufacturing a light extraction substrate for an organic light emitting device, a light extraction substrate for an organic light emitting device, and an organic light emitting device including the same according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In addition, in describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

In the method of manufacturing a light extracting substrate for an organic light emitting diode according to an embodiment of the present invention, the light emitted from the organic light emitting diode (10 of FIG. 6) is disposed on a path through which the light is emitted to the outside, and the light emitted from the organic light emitting diode 10 is emitted. A light extracting substrate which serves to emit light to the outside, improves the light extraction efficiency of the organic light emitting device 10, and protects the organic light emitting device 10 from the external environment (see FIG. 6). 100).

As shown in FIG. 1, the method of manufacturing a light extracting substrate for an organic light emitting device according to an exemplary embodiment of the present invention includes a dispersion step S1, a coating step S2, and a firing step S3.

First, as shown in FIG. 2, the dispersing step S1 is a step of dispersing a plurality of molybdenum (Mo) particles 120 on the surface of the base substrate 110. In the dispersing step S1, the molybdenum particles 120 may be dispersed on the surface of the base substrate 110 using a sputter. In addition, in the dispersing step S1, a plurality of molybdenum particles 120 may be dispersed on the surface of the base substrate 110 through printing or spraying. The plurality of molybdenum particles 120 is sublimed in the sintering step (S3) to be carried out in a subsequent process, each of the molybdenum particles 120 is a pore (140 of FIG. 5) serving as a light scattering body in each of the sublimed sites It is formed, which will be described in more detail below.

On the other hand, the base substrate 110 in which a plurality of molybdenum particles 120 is dispersed on the surface is applied to the organic light emitting device (10 in FIG. 6) is a light extraction substrate (100 in FIG. 5) manufactured according to an embodiment of the present invention In this case, the front of the organic light emitting element 10, that is, the light emitted from the organic light emitting element 10 is disposed in contact with the outside air, and transmits the emitted light to the outside, the organic light emitting element 10 Serves as an encapsulation substrate to protect it from the external environment. The base substrate 110 is a transparent substrate and is not limited as long as it has excellent light transmittance and excellent mechanical properties. For example, a polymer-based material which is an organic film capable of thermosetting or UV curing may be used as the base substrate 110. In addition, the base substrate 110 is a chemically tempered glass of soda lime glass _{(SiO 2 -CaO-Na 2 O} ) or alumino-silicate glass _{(SiO 2 -Al 2 O 3 -Na} 2 O) may be used. Here, when the organic light emitting device 10 employing the light extraction substrate 100 manufactured according to the embodiment of the present invention is for illumination, soda lime glass may be used as the base substrate 110. In addition, a substrate made of metal oxide or metal nitride may be used as the base substrate 110. In addition, in the embodiment of the present invention, a flexible substrate may be used as the base substrate 110. In particular, a thin glass having a thickness of 1.5 mm or less may be used. In this case, the thin glass may be manufactured through a fusion method or a floating method.

Next, as shown in Figure 3, the coating step (S3) is to coat the metal oxide nano sol (nano sol) (131) on the surface of the base substrate 110, a plurality of molybdenum particles 120 are dispersed Step. In the coating step (S2) as a metal oxide forming a nano-sol (131) to form a matrix layer (130 of FIG. 5) for a plurality of pores (140 of FIG. 5) formed by a plurality of molybdenum particles 120 sublimation A high refractive index (HRI) metal oxide, for example, a metal oxide having a refractive index n of 1.5 to 2.7 may be used. For example, in the coating step (S2) as the metal oxide forming the nano-sol 131, any one or two or more of the metal oxide candidate group including SiO ₂ , TiO ₂ , ZrO _x , ZnO and SnO ₂ may be used in combination. Can be. In particular, in the coating step (S1) it may be used as a metal oxide constituting the nano-sol 131 TiO ₂ of the rutile crystalline phase. When TiO ₂ using a rutile crystalline phase is used as the metal oxide forming the nanosol 131, pores formed by the sublimation of the molybdenum particles 120 inside the TiO ₂ during the sintering process in a subsequent process (FIG. A large number of nanopores (not shown) of irregular shape separate from 5) are formed, which will be described in more detail below.

On the other hand, although not shown, in the coating step (S2) it is possible to mix a plurality of scattering particles in the metal oxide nanosol (131). For example, in the coating step S2, scattering particles having a difference in refractive index of 0.3 or more from the metal oxide nanosol 131 may be mixed with the metal oxide nanosol 131. In this case, as the scattering particles may be used scattering particles consisting of a shell surrounding the core and having a refractive index difference between the core and the core, in particular, the core may be a scattering particle consisting of a hollow. That is, in the coating step (S2), the conventional scattering particles made of a single material having a single refractive index, the core-shell structured scattering particles having a difference in refractive index between the core and the shell, and the scattering of the core-shell structure made of the hollow core Scattering particles of any one of the particles can be used as a plurality of scattering particles to be mixed in the metal oxide nanosol (131). In addition, in the coating step (S2), two or more of these may be mixed in a predetermined ratio, and used as a plurality of scattering particles mixed in the metal oxide nanosol 131. As such, the plurality of scattering particles, which may be formed in various combinations, together with the plurality of pores (140 in FIG. 5) formed through subsequent processes, scatter the light emitted from the organic light emitting device 10 in various or complicated paths. In addition, the organic light emitting diode 10 may serve to improve light extraction efficiency. In particular, when the scattering particles are made of a core-shell structure having a difference in refractive index from each other, the efficiency of extracting light emitted from the organic light emitting device 10 to the outside may be further improved through the difference in refractive index between the core and the shell. .

Next, as shown in FIGS. 4 and 5, the firing step S3 includes a plurality of molybdenum particles dispersed on the surface of the base substrate 110 and the base substrate 110 through the coating step S2. The step of firing the metal oxide nanosol 131 coated on the 120. In the sintering step (S3) according to an embodiment of the present invention, the metal oxide nanosol 131 is fired to make the matrix layer 130. In this case, in the process of firing the metal oxide nanosol 131, the plurality of molybdenum particles 120 dispersed on the surface of the base substrate 110 is sublimed, and each of the molybdenum particles 120 is sublimed in each of the sites. Pores 140 are formed. To this end, that is, in order to sublimate the molybdenum particles 120 together with the firing on the metal oxide nanosol 131, in the firing step S3, a temperature higher than the sublimation point of the molybdenum particles 120, for example, 500 ° C. or higher. The metal oxide nanosol 131 is fired at the temperature.

Here, the pores 140 formed at the sites where the molybdenum particles 120 are sublimed, that is, the sites where the molybdenum particles 120 occupy, are formed between the base oxide 110 and the metal oxide forming the nanosol 131. The size can be increased by the difference in the coefficient of thermal expansion (CTE). That is, when the coefficient of thermal expansion (CTE) of the base substrate 110 is greater than the coefficient of thermal expansion (CTE) of the metal oxide forming the nanosol 131, the nanosol 131 shrinks during the firing process. The size of the pores 140 formed due to the sublimation of the molybdenum particles 120 is increased. As a result, a buckling structure is formed on the surface of the matrix layer 130 formed by firing due to the shape of the plurality of pores 140 having increased size. The buckling structure prevents the light emitted from the organic light emitting diode 10 from being lost due to the optical waveguide mode according to the difference in refractive index with the base substrate 110. That is, the buckling structure formed on the surface of the matrix layer 130 serves to disturb the light coating mode, thereby increasing the light extraction efficiency of the organic light emitting device 10.

On the other hand, in the coating step (S2), as the metal oxide nanosol 131 to form the matrix layer 130 after firing, in the case of using a rutile (rutile) crystalline TiO ₂ of a plurality of nanostructures of amorphous inside TiO ₂ Pores (not shown) are formed. At this time, the nanopores (not shown), unlike the pores 140 formed by the sublimation of the molybdenum particles 120, is naturally generated in the process of firing TiO2. These nano pores (not shown) forms a complex scattering structure together with the pores 140 formed by the sublimation of the molybdenum particles 120, thereby improving the light extraction efficiency of the organic light emitting device (10). In this case, the amorphous nano pores (not shown) may implement an equivalent or more light scattering effect when compared to the pores 140 formed in a standardized form due to the sublimation of the ribbed particles 120. That is, the more amorphous nanopores (not shown) are formed in the matrix layer 130 made of TiO ₂ of the rutile crystal phase, that is, the area occupied by a plurality of nanopores (not shown) in the matrix layer 130. The wider this is, the better the light extraction efficiency can be achieved.

As shown in FIG. 5, when the firing step S3 is completed, an organic light emitting device light extraction substrate 100 according to an exemplary embodiment of the present invention is manufactured. That is, the light extraction substrate 100 for an organic light emitting device according to the embodiment of the present invention is formed to include a base substrate 110, a matrix layer 130 and a plurality of pores 140. In this case, the plurality of pores 140 is formed at the place where the plurality of molybdenum particles 120 are sublimed, and is formed toward the matrix layer 130 at the interface between the base substrate 110 and the matrix layer 130. In addition, a buckling structure is formed on the surface of the matrix layer 130 according to the embodiment of the present invention by the shape of the plurality of pores 140.

Here, the pores 140, as described above, due to the sublimation of the molybdenum particles 120 during the firing step (S3) according to an embodiment of the present invention, after being formed in place, the nano-sol made of a matrix layer 130 ( Due to the difference in the coefficient of thermal expansion (CTE) between the metal oxide 131 and the base substrate 110, the size of the nanosol 131 shrinks, thereby increasing the size of the molybdenum particles 120. Form a form.

In addition, although not shown, scattering particles of a core-shell structure having a single refractive index or multiple refractive indices may be dispersed in the matrix layer 130. Such scattering particles may have a complex scattering structure with a plurality of pores 140. Is achieved.

On the other hand, as shown in Figure 6, the light extraction substrate 100 manufactured according to an embodiment of the present invention is disposed on the path of the light emitted from the organic light emitting device 10, the organic light emitting device 10 It serves as a light functional substrate that serves to improve the light extraction efficiency. In this case, the matrix layer 130 and the plurality of pores 140 formed therein form an inner light extraction layer of the organic light emitting device 10.

The plurality of pores 140 formed inside the matrix layer 130 achieve a difference in refractive index with the matrix layer 130, and also complicate or diversify the path of light emitted from the organic light emitting element 10. It serves to improve the extraction efficiency of the light to the front. In addition, due to the shape of the plurality of pores 140, the buckling structure formed on the surface of the matrix layer 130 disturbs the light coating mode for the light emitted from the organic light emitting device 10, the pores 140 and Similarly, it serves to improve the extraction efficiency of the light to the front. In addition, a plurality of scattering particles (not shown) dispersed in the matrix layer 130 also form a complex light scattering structure together with the plurality of pores 140, thereby improving the extraction efficiency of light to the front. .

On the other hand, although not shown in detail, the organic light emitting device 10 for the encapsulation of the light extraction substrate 100 and the organic light emitting device 10 according to an embodiment of the present invention, the substrate ( It is made of a laminated structure of the anode electrode, the organic light emitting layer and the cathode electrode disposed between. In this case, the anode electrode may be formed of a metal having a large work function, for example, a metal or a metal oxide such as Au, In, Sn, or ITO, so that hole injection occurs well. In addition, the cathode electrode may be formed of a metal thin film of Al, Al: Li, or Mg: Ag having a low work function to facilitate electron injection. At this time, when the organic light emitting device is a top emission type, the cathode electrode is a semi-transparent electrode (semitransparent electrode) and indium tin oxide (Al, Al: Li or Mg: Ag) of the metal thin film so that the light emitted from the organic light emitting layer can be transmitted through It may be formed of a multilayer structure of a thin film of an oxide transparent electrode such as indium tin oxide (ITO). The organic emission layer may include a hole injection layer, a hole transport layer, an emission layer, an electron transport layer, and an electron injection layer that are sequentially stacked on the anode. At this time, when the organic light emitting device is made of a white organic light emitting device for illumination, for example, the light emitting layer may be formed of a laminated structure of a polymer light emitting layer for emitting light in the blue region and a low molecular light emitting layer for emitting light in the orange-red region, In addition, it may be formed in various structures to implement white light emission. In addition, the organic light emitting device may have a tandem structure. Accordingly, a plurality of organic light emitting layers may be provided, and each organic light emitting layer may be alternately disposed through an interconnecting layer formed of a charge generation layer (CGL).

 According to this structure, when a forward voltage is applied between the anode electrode and the cathode electrode, electrons move from the cathode electrode to the light emitting layer through the electron injection layer and the electron transport layer, and holes from the anode electrode through the hole injection layer and the hole transport layer It moves to the light emitting layer. The electrons and holes injected into the light emitting layer recombine in the light emitting layer to generate excitons, and the excitons emit light while transitioning from the excited state to the ground state. The brightness of the light is proportional to the amount of current flowing between the anode electrode and the cathode electrode.

As described above, although the present invention has been described with reference to the limited embodiments and the drawings, the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined not only by the claims below but also by the equivalents of the claims.

Claims (19)

1. A dispersion step of dispersing a plurality of molybdenum (Mo) particles on the surface of the base substrate;

   Coating a metal oxide nanosol on a surface of the base substrate on which the plurality of molybdenum particles are dispersed; And

   Firing the metal oxide nanosol;

   Including,

   In the firing step, the plurality of molybdenum particles are sublimed, and pores are formed in each of the sites where the plurality of molybdenum particles are sublimed.

   When the firing step is completed, the metal oxide nanosol is made of a matrix layer for a plurality of the pores,

   Method of manufacturing a light extraction substrate for an organic light emitting device, characterized in that the buckling structure is formed on the surface of the matrix layer by the shape of the plurality of pores.
2. The method of claim 1,

   In the coating step, a light extraction substrate for an organic light emitting device, characterized in that any one or two or more combinations of metal oxide candidate groups including SiO ₂ , TiO ₂ , ZrO _x , ZnO and SnO ₂ are used as the metal oxides. Way.
3. The method of claim 2,

   In the coating step, a light extraction substrate manufacturing method for an organic light emitting device, characterized in that as the metal oxide, using a rutile (rutile) crystal phase TiO ₂ .
4. The method of claim 3,

   The method of manufacturing a light extraction substrate for an organic light emitting device, characterized in that a plurality of amorphous nanopores are formed in the matrix layer after the firing step.
5. The method of claim 1,

   In the firing step, the plurality of pores formed in each of the sites occupied by the plurality of molybdenum particles due to the sublimation of the plurality of molybdenum particles increases in size due to a difference in coefficient of thermal expansion (CTE) between the base substrate and the metal oxide. Method for manufacturing a light extraction substrate for an organic light emitting device, characterized in that.
6. The method of claim 1,

   In the firing step, the light extraction substrate manufacturing method for an organic light emitting device, characterized in that for firing the metal oxide nanosol at a temperature of 500 ℃ or more.
7. The method of claim 1,

   In the coating step, a light extraction substrate manufacturing method for an organic light emitting device, characterized in that a plurality of scattering particles are mixed with the metal oxide nanosol.
8. The method of claim 7, wherein

   The scattering particles have a difference in refractive index with the core and the core and scattering particles consisting of a shell surrounding the core using a light extraction substrate manufacturing method for an organic light emitting device.
9. The method of claim 8,

   The scattering particles manufacturing method of light extraction substrate for an organic light emitting device, characterized in that using the scattering particles made of the core hollow.
10. The method of claim 1,

    A method of manufacturing a light extraction substrate for an organic light emitting device, characterized in that a flexible substrate is used as the base substrate.
11. The method of claim 10,

    The base substrate is a light extraction substrate manufacturing method for an organic light emitting device, characterized in that using a thin glass of 1.5mm or less thickness.
12. A base substrate;

    A matrix layer formed on the base substrate and made of a metal oxide; And

    A plurality of pores formed on the side of the matrix layer at an interface between the base substrate and the matrix layer and formed by sublimation of a plurality of molybdenum (Mo) particles;

    Including,

    Light extraction substrate for an organic light emitting device, characterized in that the buckle structure is formed on the surface of the matrix layer by the shape of the plurality of pores.
13. The method of claim 12,

    The pores are light extraction substrate for an organic light emitting device, characterized in that the size larger than the molybdenum particles.
14. The method of claim 12,

    The light extraction substrate for an organic light emitting device, characterized in that a plurality of scattering particles are dispersed in the matrix layer.
15. The method of claim 14,

    The scattering particles are a light extraction substrate for an organic light emitting device, characterized in that the core and the shell has a difference in refractive index and the shell surrounding the core.
16. The method of claim 15,

    The core is a light extraction substrate for an organic light emitting device, characterized in that made of hollow.
17. The method of claim 12,

    The matrix layer is a light extraction substrate for an organic light emitting device, characterized in that consisting of a rutile (Titile ₂ ) of the crystalline phase.
18. The method of claim 17,

    The light extraction substrate for an organic light emitting device, characterized in that a plurality of amorphous nanopores are formed inside the matrix layer.
19. An organic light emitting device according to any one of claims 12 to 18, wherein the light extraction substrate for an organic light emitting device is provided on a path through which light is emitted.

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