WO2016103857A1

WO2016103857A1 - Organic electroluminescent device and lighting device

Info

Publication number: WO2016103857A1
Application number: PCT/JP2015/078899
Authority: WO
Inventors: 山田　泰美
Original assignee: 日東電工株式会社
Priority date: 2014-12-22
Filing date: 2015-10-13
Publication date: 2016-06-30
Also published as: JP2016119231A; TW201624790A

Abstract

An organic electroluminescent device 1 has, in the following order, a supporting substrate 2, a first moisture absorbing layer 41, an organic electroluminescent element 3 having an organic layer 33, a second moisture absorbing layer 42, and a moisture-proof layer 5. In a perspective plan view, the moisture-proof layer 5 is provided such that the moisture-proof layer extends beyond an end portion 41e of the first moisture absorbing layer 41, and an end portion 42e of the second moisture absorbing layer 42.

Description

Organic electroluminescence device and lighting device

The present invention relates to an organic electroluminescence device and the like.

Hereinafter, organic electroluminescence is referred to as “organic EL”.
Conventionally, an organic EL device having a support substrate and an organic EL element provided on the support substrate is known. The organic EL element includes a first electrode, a second electrode, and an organic layer provided between the two electrodes.

The organic EL element is easily deteriorated by moisture. In order to prevent moisture deterioration of the organic EL element, for example, Patent Document 1 discloses an organic EL element provided on a support substrate and including an organic layer, a moisture absorption film provided on the organic EL element, and a moisture absorption film. An organic EL device having a gas barrier film provided is disclosed.
Patent Document 1 states that in such an organic EL device, the moisture absorption film covers the surface and side surfaces of the organic EL element, and further, the gas barrier film covers the surface and side surfaces of the moisture absorption film, so that moisture can be easily blocked. ing.

However, the organic EL device having the above structure cannot sufficiently prevent moisture that has permeated through the support substrate or moisture that has passed through the interface between the support substrate and the gas barrier film from entering the organic layer. Such an organic EL device has a problem that the emission lifetime is relatively short because water vapor cannot be sufficiently prevented from entering the organic layer.

JP 2011-020335 A

An object of the present invention is to provide an organic EL device and an illuminating device having a long light emission lifetime by effectively preventing moisture from entering the organic layer.

The organic EL device of the present invention includes a support substrate, a first moisture absorption layer, an organic EL element having an organic layer, a second moisture absorption layer, and a moisture barrier layer in this order. A layer is provided beyond the end of the first hygroscopic layer and the end of the second hygroscopic layer.

In a preferred organic EL device of the present invention, the first hygroscopic layer is provided beyond the end of the organic layer in a plan view.
In a preferred organic EL device of the present invention, the second moisture absorption layer is provided beyond the end of the organic layer in a plan view.
In a preferred organic EL device of the present invention, the second moisture absorption layer covers the surface side and end surface side of the organic layer, and the moisture barrier layer covers the surface side and end surface side of the second moisture absorption layer.
In a preferred organic EL device according to the present invention, the first hygroscopic layer and the second hygroscopic layer are in direct contact with each other where the organic EL element partially has a terminal and does not have the terminal. .
In a preferred organic EL device of the present invention, the first moisture absorption layer and the second moisture absorption layer each independently contain a boron compound or a sulfide compound.

According to another aspect of the present invention, the present invention provides a lighting device.
The lighting device of the present invention includes any one of the organic EL devices.

In the organic EL device of the present invention, moisture can be prevented from entering the inside by the moisture-proof layer, and further, the slightly penetrated moisture is absorbed by the first and second moisture-absorbing layers, so that moisture penetrates into the organic layer. Can be effectively prevented. In such an organic EL device, the organic EL element is hardly deteriorated in moisture, and can emit light stably for a relatively long period of time.

1 is a plan view of an organic EL device according to a first embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view taken along line II-II in FIG. 1 and omitting the central portion. FIG. 3 is an enlarged sectional view taken along line III-III in FIG. 1. The top view of the organic electroluminescent apparatus which concerns on 2nd Embodiment. FIG. 5 is an enlarged cross-sectional view taken along line VV in FIG. 4 and omitting the central portion. FIG. 5 is an enlarged cross-sectional view taken along line VI-VI in FIG. 4. The expanded sectional view cut | disconnected by the VII-VII line of FIG. The schematic diagram showing each edge part of a 1st moisture absorption layer, a 1st electrode, an organic layer, a 2nd electrode, a 2nd moisture absorption layer, and a moisture-proof layer when the organic EL device is seen through in plane. The top view of the organic electroluminescent apparatus concerning 3rd Embodiment. FIG. 10 is an enlarged cross-sectional view taken along line XX in FIG. 9. FIG. 10 is an enlarged cross-sectional view taken along line XI-XI in FIG. 9. The schematic diagram showing each edge part of a 1st moisture absorption layer, a 1st electrode, an organic layer, a 2nd electrode, a 2nd moisture absorption layer, and a moisture-proof layer when the organic EL device is seen through in plane. The expanded sectional view which cut | disconnected the organic electroluminescent apparatus of 5th Embodiment in the location which does not have a terminal. The expanded sectional view which cut | disconnected the organic electroluminescent apparatus of 6th Embodiment in the location which does not have a terminal. The top view of the elongate thing to which the organic EL apparatus was connected continuously. The reference expanded sectional view which cut | disconnected each of the organic electroluminescent apparatus produced in Example 1 and Comparative Example 1 in the location which does not have a terminal. The reference expanded sectional view which cut | disconnected each of the organic EL apparatus produced by the comparative example 2 and the comparative example 3 in the location which does not have a terminal.

The present invention will be described below with reference to the drawings. However, it should be noted that dimensions such as thickness and length shown in each figure are different from actual ones.
In this specification, the surface indicates a plate-like organic EL device or one surface of each layer, and the back surface indicates a surface opposite to the surface. The end surface refers to a surface extending in the thickness direction of the organic EL device or each layer. Each layer is a generic name for members (such as a support substrate, a first moisture absorption layer, an organic EL element, a second moisture absorption layer, and a moisture proof layer) constituting the organic EL device. In this specification, the term “first” and “second” may be added to the beginning of the term. The first and the like are added only to distinguish the term, and the order and superiority or inferiority thereof are added. It has no special meaning. In this specification, the expression “PPP to QQQ” means “PPP or more and QQQ or less”.

[Configuration of Organic EL Device of First Embodiment]
FIG. 1 is a plan view of the organic EL device according to the first embodiment viewed from the surface side. When the organic EL device is a top emission type, the surface indicates a surface from which light is emitted. When the organic EL device is a bottom emission type, the surface is opposite to the surface from which light is emitted. Refers to the side surface. The organic EL device of the present invention may be any of a top emission type, a bottom emission type, or a dual emission type.
2 is an enlarged view of a cross section of the organic EL device of FIG. 1 cut along a line parallel to the first direction at a portion having no terminal, and FIG. 3 shows the organic EL device of FIG. It is the figure which expanded the cross section cut | disconnected by the line | wire parallel to a 2nd direction in the location which has a terminal. In FIG. 2, an intermediate portion where the cross-sectional structure does not change is omitted.

1 to 3, the organic EL device 1 includes a support substrate 2, a first moisture absorption layer 41, an organic EL element 3 having an organic layer 33, a second moisture absorption layer 42, and a moisture barrier layer 5. Have in order. The moisture-proof layer 5 is provided beyond the

end portions

41e and 42e of the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42 in a plan view. The organic EL device 1 may be rigid so that it cannot be bent, but preferably has flexibility that allows bending. The organic EL element 3 has

terminals

31a and 32a partially exposed to the outside. In FIG. 1, in order to illustrate the

terminals

31a and 32a exposed to the outside in an easy-to-understand manner, innumerable dots are added to the portions for convenience.
The support substrate 2, the first moisture absorption layer 41, the organic EL element 3 having the organic layer 33, the second moisture absorption layer 42 and the moisture barrier layer 5 are laminated in this order. Each

layer

2, 41, 33, 42, 5 such as the support substrate may be laminated in direct contact with each other on the condition that they are arranged in this order in the thickness direction. Or you may laminate | stack in the state in which the arbitrary functional layers intervened between two layers arbitrarily chosen from the said each layer.
Further, in the present specification, the plan perspective means conceptually seeing a target member in the direction of the line of sight with the line of sight perpendicular to the surface of the organic EL device.

As shown in FIG. 1 to FIG. 3, the

end portions

41 e and 42 e of the first moisture absorption layer 41 and the second moisture absorption layer 42 coincide with each other in the thickness direction when seen in a plan view. Specifically, the first hygroscopic layer 41 and the second hygroscopic layer 42 are formed in a desired shape (in the illustrated example, a substantially rectangular shape in plan view) having the same area in plan perspective. That is, the first moisture absorption layer 41 and the second moisture absorption layer 42 have the same shape and the same size and overlap in the thickness direction. Therefore, when viewed through, the end portion 41e of the first moisture absorption layer 41 and the end portion 42e of the second moisture absorption layer 42 coincide with each other.

The first hygroscopic layer 41 and the second hygroscopic layer 42 are provided beyond the end 33e of the organic layer 33 in a plan view. Specifically, the first moisture absorption layer 41 and the second moisture absorption layer 42 each have a larger area than the organic layer 33. The shape of the organic layer 33 is not particularly limited and can be formed in a desired shape. In the illustrated example, the organic layer 33 is formed in a substantially rectangular shape in plan view. The end portion 41e of the first moisture absorption layer 41 is located outside the end portion 33e of the organic layer 33 in a plan view, and the end portion 42e of the second moisture absorption layer 42 is an organic layer in the plan view. It is located outside the end 33 e of 33. In other words, the organic layer 33 is formed inside the first moisture absorption layer 41 and the second moisture absorption layer 42. Accordingly, the first hygroscopic layer 41 is laminated so as to cover the entire back surface side of the organic layer 33 and the second hygroscopic layer 42 is laminated so as to cover the entire surface side of the organic layer 33 in plan perspective. Has been.

The moisture-proof layer 5 is provided beyond the end portion 41e of the first moisture-absorbing layer 41 and the end portion 42e of the second moisture-absorbing layer 42 in plan perspective. Specifically, the moisture-proof layer 5 has a larger area than the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42. The shape of the moisture-proof layer 5 is not particularly limited and can be formed in a desired shape. In the illustrated example, the moisture-proof layer 5 is formed in a rectangular shape in plan view. The end portion 5e of the moisture-proof layer 5 is located outside the end portion 41e of the first moisture-absorbing layer 41 and outside the end portion 42e of the second moisture-absorbing layer 42 in a plan view. In other words, the first moisture absorption layer 41 and the second moisture absorption layer 42 are formed inside the moisture barrier layer 5. Therefore, the moisture-proof layer 5 is laminated so as to cover the entire surface side of the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42 in plan perspective.
In the present specification, the end portion 41e of the first moisture absorption layer 41 means a contour line of the first moisture absorption layer 41 in plan perspective, and is an end of the second moisture absorption layer 42, the organic layer 33, the moisture proof layer 5, and the like. Similarly, the parts mean their contour lines in the plan perspective.

2 and 3, the organic EL device 1 includes a support substrate 2, a first moisture absorption layer 41 provided on the support substrate 2, an organic EL element 3 provided on the first moisture absorption layer 41, and The second moisture absorption layer 42 provided on the organic EL element 3 and the moisture barrier layer 5 provided on the second moisture absorption layer 42 are laminated.
The first moisture absorption layer 41 is provided in the plane of the support substrate 2. The support substrate 2 is sufficiently larger than the first moisture absorption layer 41, and therefore the end 2 e of the support substrate 2 extends outward from the end 41 e of the first moisture absorption layer 41.

The organic EL element 3 includes a first electrode 31 having a terminal 31a, a second electrode 32 having a terminal 32a, and an organic layer 33 provided between the

electrodes

31 and 32. The terminal 31a is an anode or cathode terminal, and the terminal 32a is a terminal of the opposite polarity. For example, the terminal 31a is an anode (+), and the terminal 32a is a cathode (−).
The 1st electrode 31 is laminated | stacked in the state which contact | adhered directly to the surface of the 1st moisture absorption layer 41 except the terminal 31a. The terminal 31 a of the first electrode 31 is laminated in a state of being in direct contact with the surface of the support substrate 2. The organic layer 33 is laminated in a state of being in direct contact with the surface of the first electrode 31. The 2nd electrode 32 is laminated | stacked in the state which contact | adhered directly to the surface of the organic layer 33 except the terminal 32a. The terminal 32 a of the second electrode 32 is laminated in a state of being in direct contact with the surface of the support substrate 2. The 2nd moisture absorption layer 42 is laminated in the state where it touched directly on the surface of the 2nd electrode 32 except terminal 32a. As described above, the first hygroscopic layer 41 and the second hygroscopic layer 42 are provided beyond the end portion 33e of the organic layer 33, respectively. Therefore, the end portion 41e of the first moisture absorption layer 41 and the end portion 42e of the second moisture absorption layer 42 extend beyond the end portion 33e of the organic layer 33, respectively. The second moisture absorbing layer 42 covers the surface side of the organic layer 33 and also covers the end surface side of the organic layer 33. For this reason, the back surface side of the organic layer 33 is covered with the first moisture absorption layer 41, and the surface side and the end surface side of the organic layer 33 are covered with the second moisture absorption layer 42.

As shown in FIG. 2, the 1st moisture absorption layer 41 and the 2nd moisture absorption layer 42 are contact | adhered directly in the location which does not have the

terminals

31a and 32a. A portion where the first hygroscopic layer 41 and the second hygroscopic layer 42 are in close contact with each other and the

layers

41 and 42 are joined is denoted by reference numeral 49. The joint portion 49 is an interface between the first moisture absorption layer 41 and the second moisture absorption layer 42. However, when the first hygroscopic layer 41 and the second hygroscopic layer 42 are formed of the same material, the interface can hardly be confirmed. In this case, the first hygroscopic layer 41 and the second hygroscopic layer 42 are bonded to each other. The part 49 is integrated.
Moreover, as shown in FIG. 3, in the location which has the

terminals

31a and 32a, the 1st moisture absorption layer 41 and the 2nd moisture absorption layer 42 are closely_contact | adhered via the

terminals

31a and 32a. Therefore, the periphery of the organic layer 33 is surrounded by the first moisture absorption layer 41 and the second moisture absorption layer 42. It can also be said that the organic layer 33 is enclosed in the hygroscopic layer (the first hygroscopic layer 41 and the second hygroscopic layer 42).

The moisture-proof layer 5 is laminated in a state of being in direct contact with the surface of the second moisture-absorbing layer 42 except for the

terminals

31a and 32a. As described above, the moisture-proof layer 5 is provided beyond the end portion 41 e of the first moisture-absorbing layer 41 and the end portion 42 e of the second moisture-absorbing layer 42. The end portion 5 e of the moisture-proof layer 5 extends beyond the end portion 41 e of the first moisture-absorbing layer 41 and the end portion 42 e of the second moisture-absorbing layer 42. Further, the moisture-proof layer 5 covers the surface side of the second moisture-absorbing layer 42 and also covers the end surface side of the second moisture-absorbing layer 42. As shown in FIG. 2, the moisture-proof layer 5 also covers the end surface of the first moisture-absorbing layer 41 and is in direct contact with the surface of the support substrate 2 at locations where the

terminals

31 a and 32 a are not provided. As shown in FIG. 3, the moisture-proof layer 5 that is in close contact with the end face of the second moisture-absorbing layer 42 is in close contact with the bases of the

terminals

31a and 32a at the locations having the

terminals

31a and 32a.

For example, the terminal 31a of the first electrode 31 is disposed on one side in the second direction of the organic EL device, and the terminal 32a of the second electrode 32 is disposed on the opposite side in the second direction. In the illustrated example, the terminal 31a of the first electrode 31 and the terminal 32a of the second electrode 32 are each extended in the first direction of the organic EL device. The first direction is any one direction of the organic EL device, and the second direction is a direction orthogonal to the first direction in the plane of the organic EL device.
The terminal 31a is a part of the first electrode 31 that is exposed to the outside. The terminal 32a is a part of the second electrode 32 and is an electrode part exposed to the outside. The terminal 31 a of the first electrode 31 and the terminal 32 a of the second electrode 32 are exposed to the outside without being covered with the moisture-proof layer 5.
In addition, when the support substrate 2 has conductivity, an insulating layer (not shown) is provided on the surface of the support substrate 2 in order to prevent an electrical short circuit.

The organic layer 33 of the organic EL element 3 includes a light emitting layer, and has various functional layers such as a hole transport layer and an electron transport layer as necessary. The layer configuration of the organic layer 33 will be described later.
The organic layer 33 emits light when a power source is connected to the

terminals

31a and 32a of the first electrode 31 and the second electrode 32 and energized.
The first and second

moisture absorbing layers

41 and 42 are layers that absorb moisture.
The moisture-proof layer 5 is a layer for preventing moisture (water vapor) and the like from entering the organic EL element 3.

Note that the organic EL device of the present invention is not limited to the first embodiment, and can be appropriately changed in design within the range intended by the present invention. Hereinafter, other embodiments of the present invention will be described. In the description, configurations and effects different from those of the first embodiment will be mainly described, and configurations similar to those of the first embodiment will be described. In some cases, the term or reference is used as it is, and the description of the configuration is omitted.

[Configuration of Organic EL Device of Second Embodiment]
4 to 7, the organic EL device 1 according to the second embodiment is similar to the first embodiment in that the support substrate 2, the first hygroscopic layer 41, the organic EL element 3 having the organic layer 33, and the first 2 moisture-absorbing layer 42 and moisture-proof layer 5 are provided in this order. The moisture-proof layer 5 is provided beyond the

end portions

41e and 42e of the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42 in a plan view, and the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42 are organic The layer 33 is provided beyond the end 33e.
In the present embodiment, the second electrode 32 includes a second main electrode 321 that is stacked on the surface of the organic layer 33 and supplies electric charges to the organic layer 33, and a second sub electrode 322 having a terminal 32a. Yes.

Specifically, the first electrode 31 is stacked on the surface of the first moisture absorption layer 41. The first electrode 31 has two

terminals

31a and 31a. One terminal 31a is arranged on one side in the first direction of the organic EL device 1, and the other terminal 31a is on the opposite side in the first direction. It is arranged. The organic layer 33 is laminated in a state of being in direct contact with the surface of the first electrode 31 except for the terminal 31a.
On the other hand, the second sub-electrode 322 is separated from the first electrode 31 and is laminated across the surface of the support substrate 2 and the surface of the first moisture absorption layer 41 on one side in the second direction. The second sub-electrode 322 has two

terminals

32a and 32a, one terminal 32a being disposed on one side in the first direction of the organic EL device 1, and the other terminal 32a being opposite to the first direction. It is arranged. The second main electrode 321 is stacked across the surface of the organic layer 33 and the surface of the second sub electrode 322. The charge supplied from the terminal 32 a is supplied from the second sub electrode 322 to the organic layer 33 through the second main electrode 321.

As shown in FIG.6 and FIG.7, the 1st moisture absorption layer 41 and the 2nd moisture absorption layer 42 are contact | adhered directly in the location which does not have the

terminals

31a and 32a. The first hygroscopic layer 41 and the second hygroscopic layer 42 are integrated at the joint portion 49.
In addition, as shown in FIG. 5, the first hygroscopic layer 41 and the second hygroscopic layer 42 are in close contact with each other through the

terminals

31 a and 32 a where the

terminals

31 a and 32 a are provided. Therefore, also in this embodiment, the periphery of the organic layer 33 is surrounded by the first moisture absorption layer 41 and the second moisture absorption layer 42.
The moisture-proof layer 5 is laminated in a state of being in direct contact with the surface of the second moisture-absorbing layer 42 except for the

terminals

31a and 32a. The moisture-proof layer 5 covers the surface side of the second moisture-absorbing layer 42 and also covers the end surface side of the second moisture-absorbing layer 42. As shown in FIGS. 6 and 7, the moisture-proof layer 5 is also covered with the end surface of the first moisture-absorbing layer 41 in a portion where the

terminals

31 a and 32 a are not provided, and is directly adhered to the surface of the support substrate 2. Yes.
FIG. 8 is a diagram schematically showing the arrangement of each layer when the organic EL device according to the second embodiment is seen through on a plane. In order to easily distinguish each layer, the outline of the first electrode 31 is indicated by a one-dot chain line, the outline of the second electrode 32 is indicated by a two-dot chain line, and the outlines of the first and second moisture absorption layers 41 and 42 are indicated by a broken line, The outline of the organic layer 33 is indicated by a small broken line, and the outline of the moisture-proof layer 5 is indicated by a solid line.

[Configuration of Organic EL Device of Third Embodiment]
9 to 11, the organic EL device 1 according to the third embodiment is similar to the first embodiment in that the support substrate 2, the first hygroscopic layer 41, the organic EL element 3 having the organic layer 33, and the first 2 moisture-absorbing layer 42 and moisture-proof layer 5 are provided in this order. The moisture-proof layer 5 is provided beyond the

end portions

41e and 42e of the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42 in a plan view, and the first moisture-absorbing layer 41 and the second moisture-absorbing layer 42 are organic The layer 33 is provided beyond the end 33e.
In this embodiment, the 1st electrode 31 which has the terminal 31a is provided in multiple places. Further, the second electrode 32 includes a plurality of second main electrodes 321 stacked on the surface of the organic layer 33 and supplying electric charges to the organic layer 33, and a plurality of second sub-electrodes 322 having terminals 32a. ing. In the organic EL device 1 of the present embodiment, a plurality of light emitting regions are independently formed.

Specifically, the first electrode 31 is independently provided at a plurality of locations (for example, 4 locations). Each first electrode 31 is laminated on the surface of the first hygroscopic layer 41. Each first electrode 31 has one terminal 31a. The terminals 31a of the two first electrodes 31 are disposed on one side in the first direction of the organic EL device 1, and the terminals 31a of the other two first electrodes 31 are disposed on the opposite side in the first direction. The organic layer 33 is laminated in a state of being in direct contact with the surface of each first electrode 31 except for the terminal 31a.
On the other hand, the second electrode 32 includes, for example, two first main electrodes 321 and two second sub electrodes 322. One second sub-electrode 322 is stacked on the surface of the support substrate 2 on one side in the second direction, apart from the first electrode 31. Another second sub-electrode 322 is stacked on the surface of the support substrate 2 on the opposite side in the second direction away from the first electrode 31. Each second sub-electrode 322 has two

terminals

32a and 32a, one terminal 32a being disposed on one side in the first direction of the organic EL device 1, and the other terminal 32a being in the first direction. It is arranged on the opposite side. The two second main electrodes 321 extend in the second direction in a state of being separated from each other. The two second main electrodes 321 are stacked across the surface of the organic layer 33 and the surfaces of the two second sub-electrodes 322 with a space between the two electrodes 321. The electric charges supplied from the terminals 32 a are supplied from the second sub-electrodes 322 to the organic layer 33 through the second main electrodes 321.
In the organic EL device 1 of the present embodiment, four regions of the organic layer 33 where the four first electrodes 31 and the two second main electrodes overlap each other emit light.

In the present embodiment as well, the first hygroscopic layer 41 and the second hygroscopic layer 42 are in direct contact with each other at locations where the

terminals

31a and 32a are not provided. Further, as shown in FIG. 10, in the portion having the terminal 31a, the first moisture absorbing layer 41 and the second moisture absorbing layer 42 are in close contact with each other via the terminal 31a.
The moisture-proof layer 5 is laminated in a state of being in direct contact with the surface of the second moisture-absorbing layer 42 except for the

terminals

31a and 32a. The moisture-proof layer 5 covers the surface side of the second moisture-absorbing layer 42 and also covers the end surface side of the second moisture-absorbing layer 42.
FIG. 12 is a diagram schematically showing the arrangement of each layer when the organic EL device of the third embodiment is seen through. In order to easily distinguish each layer, the outline of the first electrode 31 is indicated by a one-dot chain line, the outline of the second electrode 32 is indicated by a two-dot chain line, and the outlines of the first and second moisture absorption layers 41 and 42 are indicated by a broken line, The outline of the organic layer 33 is indicated by a small broken line, and the outline of the moisture-proof layer 5 is indicated by a solid line.

[Configuration of Organic EL Device of Fourth Embodiment]
In the first to third embodiments, the end portion 41e of the first moisture absorption layer 41 and the end portion 42e of the second moisture absorption layer 42 are coincident (that is, the first moisture absorption layer 41 and the second moisture absorption layer 42 are One of the first hygroscopic layer 41 and the second hygroscopic layer 42 may be larger than the other.
For example, the first hygroscopic layer 41 may be formed such that the end portion 41 e of the first hygroscopic layer 41 extends outward from the end portion 42 e of the second hygroscopic layer 42, or the second hygroscopic layer 42 The 2nd moisture absorption layer 42 may be formed so that end 42e may extend outside from edge 41e of the 1st moisture absorption layer 41 (not shown).

[Configuration of Organic EL Device of Fifth Embodiment]
In the first to third embodiments, the first hygroscopic layer 41 and the second hygroscopic layer 42 are both provided beyond the end 33e of the organic layer 33 in a plan view. At least one of the end 41e and the end 42e of the second moisture absorption layer 42 is disposed so as to coincide with the end 33e of the organic layer 33 or on the inner side of the end 33e of the organic layer 33 in a plan view. May be.
For example, in the example illustrated in FIG. 13, the end portion 41 e of the first hygroscopic layer 41 is disposed on the inner side than the end portion 33 e of the organic layer 33. The first hygroscopic layer 41 enters inside the end portion 33e of the organic layer 33 in a plan view. Even in this case, since the moisture-proof layer 5 is formed beyond the

end portions

41e and 42e of the first and second moisture-absorbing

layers

41 and 42 in a plan view, the end surfaces of the first and second moisture-absorbing

layers

41 and 42 are formed. Can prevent moisture from entering.
However, as in the above-described embodiment, in the organic EL device 1 in which both the first hygroscopic layer 41 and the second hygroscopic layer 42 are provided beyond the end portion 33e of the organic layer 33, the organic layer 33 is the first and second layers. Since it is enclosed with the 2nd moisture absorption layers 41 and 42, it is preferable.

[Configuration of Organic EL Device of Sixth Embodiment]
Further, as shown in FIG. 14, a moisture-proof layer 51 separate from the moisture-proof layer 5 provided on the second moisture-absorbing layer 42 may be laminated on the surface of the support substrate 2. The moisture-proof layer 51 (referred to as the second moisture-proof layer 51) is provided on the back surface side of the first moisture-absorbing layer 41, and is preferably provided with a size that can be joined to the moisture-proof layer 5 as shown in the drawing. Is provided on the entire surface of the support substrate 2. By joining the moisture-proof layer 5 and the second moisture-proof layer 51 in this way, moisture can be effectively prevented from entering.
Note that the organic EL devices of FIGS. 13 and 14 exemplify the configuration of the first embodiment, but may be replaced with the configuration of the second or third embodiment.

[Support substrate]
The support substrate is a sheet-like material, preferably a flexible sheet-like material.
The support substrate may be transparent or opaque. However, when configuring a bottom emission type organic EL device, a transparent support substrate is used. When configuring a top emission type organic EL device, either a transparent support substrate or an opaque support substrate may be used. The transparent means colorless and transparent or colored and transparent. Examples of the transparent index include a total light transmittance of 70% or more, preferably 80% or more. However, the total light transmittance is measured by a measuring method based on JIS K7105 (plastic optical property test method).

In the present invention, it is preferable to use a substrate having excellent gas barrier properties that can prevent entry of water vapor, oxygen, or the like as the support substrate. For example, the support substrate can be appropriately selected from, for example, a metal sheet, a resin sheet, a glass sheet, a ceramic sheet, and the like. In addition, in this specification, a sheet includes what is generally called a film. Although the said metal sheet is not specifically limited, For example, the flexible thin plate which consists of stainless steel, copper, titanium, aluminum, an alloy, etc. is mentioned. The thickness of the metal sheet is, for example, 10 μm to 100 μm. The resin sheet is not particularly limited, and examples thereof include polyester resins such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polybutylene terephthalate (PBT); polyethylene (PE), polypropylene (PP), and polymethylpentene. (PMP), ethylene-propylene copolymer, ethylene-vinyl acetate copolymer (EVA) and other olefin resins containing α-olefin as a monomer component; polyvinyl chloride (PVC); vinyl acetate resin; polycarbonate (PC ); Polyphenylene sulfide (PPS); amide resins such as polyamide (nylon), wholly aromatic polyamide (aramid); polyimide resins; flexible synthetic resin sheets made of polyether ether ketone (PEEK), etc. The thickness of the resin sheet is not particularly limited, but is, for example, 10 μm to 200 μm. Since a good gas barrier property can be imparted, a known gas barrier layer may be laminated on at least one surface of the resin sheet.
Moreover, in order to prevent the temperature rise of the organic EL device during driving, the support substrate is preferably excellent in heat dissipation. Note that when a conductive substrate (such as a metal sheet) is used as the support substrate, an insulating layer is provided on the surface of the support substrate in order to insulate the facing electrode. In addition, when an insulating layer is provided in a support substrate, it is preferable that a 1st moisture absorption layer is provided on the surface of the insulating layer.

[First and second moisture absorbing layers]
The first and second moisture absorbing layers include a material having a property of absorbing moisture. Examples of the material having the property of absorbing moisture include boron compounds; sulfide compounds; alkali metal or alkaline earth metal oxides, fluorides, sulfates, halides, phosphates or perchlorates; alkali metals or A resin in which particles of an oxide of an alkaline earth metal are dispersed; and the like. The first hygroscopic layer and the second hygroscopic layer each independently include one or more selected from the above materials, and preferably include at least one of a boron compound and a sulfide compound. Note that a moisture absorption layer made of a resin in which particles of an oxide of an alkali metal or an alkaline earth metal are dispersed is disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 2011-020335). I want.
The boron compound is a compound in which boron atoms are contained in the molecule, and a moisture-absorbing layer can be formed by a vacuum deposition method, and therefore a boron-containing inorganic compound is preferable. Examples of the boron-containing inorganic compound include boron oxide, boron oxyacid, boron bromide, and the like. An example of the boron oxide is boron oxide (B ₂ O ₃ ). The boron oxygen acid is an oxygen acid having a boron atom as a central atom or a salt thereof. Examples of the oxygen acid of boron include orthoboric acid, metaboric acid, hypoboric acid, tetraboric acid, pentaboric acid, and sodium salts, potassium salts and ammonium salts thereof. Examples of the bromide of boron include boron tribromide (BBr ₃ ). Among these, boron oxide is preferable because of its excellent hygroscopicity. Further, since boron oxide is excellent in transparency, it is suitable as a material for forming a moisture absorption layer in a top emission type organic EL device.
The sulfur compound is a compound containing a sulfur atom in the molecule, and a sulfur-containing inorganic compound is preferable because a moisture absorption layer can be formed by a vacuum deposition method. Examples of the sulfur-containing inorganic compound include sulfides of alkali metals or alkaline earth metals; sulfides of metals other than alkali metals and alkaline earth metals; nonmetal sulfides. Examples of the sulfide include carbon sulfide and zinc sulfide.

Examples of the alkali metal include lithium, sodium, and potassium, and examples of the alkaline earth metal include magnesium, calcium, and barium. Examples of the alkali metal oxide include lithium oxide, sodium oxide, and potassium oxide. Examples of the alkaline earth metal oxide include magnesium oxide, calcium oxide, and barium oxide. Examples of the alkali metal or alkaline earth metal fluoride include lithium fluoride, calcium fluoride, magnesium fluoride, and sodium fluoride. Examples of the alkali metal or alkaline earth metal sulfate include lithium sulfate, sodium sulfate, and calcium sulfate. Examples of the alkali metal or alkaline earth metal halide include calcium chloride, magnesium chloride, and calcium bromide. Examples of the alkali metal or alkaline earth metal phosphate include calcium phosphate. Examples of the alkali metal or alkaline earth metal perchlorate include barium perchlorate and magnesium perchlorate.

When an oxide of an alkali metal or alkaline earth metal is used as a forming material, for example, a vacuum deposition method using the oxide as a deposition source, or an alkali metal or alkaline earth metal is deposited under introduction of oxygen gas It is conceivable to form a hygroscopic layer by a method such as vacuum deposition as a source. However, the former method is difficult, and the latter method may cause deterioration of the organic EL element due to the presence of oxygen gas. In addition, when a resin in which particles of an alkali metal or alkaline earth metal oxide are dispersed is used as a forming material, a moisture absorption layer cannot be formed by a vacuum deposition method. In this regard, when a boron compound and a sulfide compound are used, a moisture absorption layer can be easily formed by vacuum deposition using the boron compound and the sulfide compound as an evaporation source, and deterioration of the organic EL element hardly occurs when the moisture absorption layer is formed. For these reasons, it is preferable to use a boron compound or a sulfide compound as a material for forming the first and second moisture absorption layers. Therefore, it is preferable that the first moisture absorption layer and the second moisture absorption layer each independently contain a boron compound or a sulfide compound. In particular, since the hygroscopic property is excellent, it is more preferable that the first hygroscopic layer and the second hygroscopic layer contain a boron compound.

The 1st moisture absorption layer and the 2nd moisture absorption layer may be formed from the same material, or may be formed from a different material. Preferably, the first moisture absorption layer and the second moisture absorption layer are formed of the same material.
When the first hygroscopic layer and the second hygroscopic layer contain a boron compound, the hygroscopic layer substantially contains only (a) a boron compound having a hygroscopic property, and (b) a boron compound having a hygroscopic property and a hygroscopic property. (C) a boron compound having a hygroscopic property and another compound not having a hygroscopic property, (d) a boron compound having a hygroscopic property and another compound having no hygroscopic property, Examples include other compounds having hygroscopicity. Hygroscopicity refers to the property that a substance chemically absorbs moisture from its surroundings. Further, in the present specification, “substantially containing only A” means that a minute amount of components (components other than A) that are unavoidably included is allowed and a significant amount of contamination is excluded. Meaning.
When the first and second moisture absorption layers include a boron compound and another compound, the amount of the boron compound is not particularly limited. For example, the amount of the boron compound is 50% of the entire moisture absorption layer. It is at least mass% and less than 100 mass%, preferably 60 mass% to 99 mass%, more preferably 80 mass% to 99 mass%.
The thicknesses of the first and second hygroscopic layers are not particularly limited, and are each independently, for example, 5 nm to 500 nm, and preferably 30 nm to 200 nm.

[Dampproof layer]
The moisture-proof layer is not particularly limited as long as it includes a material having a property of blocking moisture (moisture-proof property). Since the moisture-proof property is excellent, the material for forming the moisture-proof layer is preferably a nitrogen compound.
The nitrogen compound is a compound containing nitrogen atoms in the molecule, and a moisture-proof layer can be formed by a vacuum deposition method, and therefore a nitrogen-containing inorganic compound is preferable.
Examples of the nitrogen-containing inorganic compound include metal or metalloid nitride, metal or metalloid oxynitride, metal or metalloid carbonitride, metal or metalloid oxycarbonitride, and the like. Examples of the metal include alkali metals and alkaline earth metals as exemplified above, and other metals. Examples of metals other than alkali metals and alkaline earth metals include titanium, aluminum, zinc, gallium, and indium. The metalloid refers to a substance that exhibits an intermediate property between metal and nonmetal. Examples of the metalloid include silicon, germanium, arsenic, antimony, tellurium, polonium, and astatine. The moisture-proof layer preferably includes at least one selected from metal or metalloid nitrides, oxynitrides, carbonitrides, and oxycarbonitrides, and more preferably silicon nitride, oxynitride, carbonization It contains at least one selected from nitrides and oxycarbonitrides. Examples of silicon nitride, oxynitride, carbonitride, and oxycarbonitride include silicon nitride, silicon oxynitride, silicon carbonitride, and silicon oxycarbonitride.
The moisture-proof layer may substantially contain only the nitrogen compound having the moisture-proof property, and may contain other compounds in addition to the nitrogen compound. Preferably, the moisture-proof layer is formed only from the nitrogen compound having the moisture-proof property and substantially contains only the nitrogen compound.
When the moisture-proof layer contains a nitrogen compound and other compounds, the amount of the nitrogen compound is not particularly limited, for example, the amount of the nitrogen compound is 50% by mass or more and less than 100% by mass with respect to the entire moisture-proof layer, The amount is preferably 60% by mass to 99% by mass, and more preferably 80% by mass to 99% by mass.
The thickness of the moisture-proof layer is not particularly limited, and is, for example, 50 nm to 2000 nm, preferably 100 nm to 1000 nm.

[Organic EL device having first electrode, organic layer and second electrode]
The first electrode may be either an anode or a cathode. For example, the first electrode is an anode.
The material for forming the first electrode (anode) is not particularly limited. For example, indium tin oxide (ITO); indium tin oxide containing silicon oxide (ITSO); aluminum; gold; platinum; nickel; tungsten; Alloy; and the like. In the case of constituting a bottom emission type organic EL device, a transparent first electrode is used.
The thickness of the first electrode is not particularly limited, but is usually 0.01 μm to 1.0 μm.

The organic layer has a laminated structure composed of at least two layers. As the structure of the organic layer, for example, (A) a structure including three layers of a hole transport layer, a light emitting layer and an electron transport layer, (B) three layers of a hole transport layer, a light emitting layer and an electron injection layer are included. A structure including two layers of (C) a hole transport layer and a light-emitting layer, (D) a structure including two layers of a light-emitting layer and an electron transport layer, and the like.
In the organic layers (B) and (C), the light emitting layer also serves as the electron transport layer. In the organic layer (D), the light emitting layer also serves as the hole transport layer.
The organic layer used in the present invention may have any of the structures (A) to (D).
Hereinafter, the organic layer having the structure (A) when the first electrode is an anode will be described.

The hole transport layer is provided on the surface of the first electrode. However, any functional layer other than these may be interposed between the first electrode and the hole transport layer on condition that the luminous efficiency of the organic EL element is not lowered.
For example, the hole injection layer may be provided on the surface of the first electrode, and the hole transport layer may be provided on the surface of the hole injection layer. The hole injection layer is a layer having a function of assisting injection of holes from the anode layer to the hole transport layer.

The material for forming the hole transport layer is not particularly limited as long as the material has a hole transport function. As a material for forming the hole transport layer, aromatic amine compounds such as 4,4 ′, 4 ″ -tris (carbazol-9-yl) -triphenylamine (abbreviation: TcTa); 1,3-bis (N— Carbazole derivatives such as carbazolyl) benzene; N, N′-bis (naphthalen-1-yl) -N, N′-bis (phenyl) benzidine (abbreviation: NPB), N, N′-bis (naphthalen-1-yl) ) -N, N′-bis (phenyl) -2,2′-dimethylbenzidine (abbreviation: α-NPD), N, N′-bis (naphthalen-1-yl) -N, N′-bis (phenyl) -9,9'-spirobifluorene (abbreviation: Spiro-NPB) and other spiro compounds, polymer compounds, etc. The material for forming the hole transport layer may be one kind or a combination of two or more kinds. In addition, the hole transport layer may be two layers. It may be a multilayer structure of the above.
The thickness of the hole transport layer is not particularly limited, but is preferably 1 nm to 500 nm from the viewpoint of lowering the driving voltage.

The light emitting layer is provided on the surface of the hole transport layer.
The material for forming the light emitting layer is not particularly limited as long as it is a light emitting material. As a material for forming the light emitting layer, for example, a low molecular light emitting material such as a low molecular fluorescent light emitting material or a low molecular phosphorescent light emitting material can be used.

Examples of the low-molecular light-emitting material include aromatic dimethylidene compounds such as 4,4′-bis (2,2′-diphenylvinyl) -biphenyl (abbreviation: DPVBi); 5-methyl-2- [2- [4- Oxadiazole compounds such as (5-methyl-2-benzoxazolyl) phenyl] vinyl] benzoxazole; 3- (4-biphenylyl) -4-phenyl-5-tert-butylphenyl-1,2,4 A triazole derivative such as triazole; a styrylbenzene compound such as 1,4-bis (2-methylstyryl) benzene; a benzoquinone derivative; a naphthoquinone derivative; an anthraquinone derivative; a fluorenone derivative; an azomethine zinc complex, tris (8-quinolinolato) aluminum (Alq) ₃ ) organometallic complexes such as;

Further, as a material for forming the light emitting layer, a host material doped with a light emitting dopant material may be used.
As the host material, for example, the above-described low-molecular light-emitting material can be used. In addition, 1,3,5-tri (9H-carbazol-9-yl) benzene (abbreviation: TCP), 1,3 -Bis (carbazol-9-yl) benzene (abbreviation: mCP), 2,6-bis (N-carbazolyl) pyridine, 9,9-di (4-dicarbazol-benzyl) fluorene (abbreviation: CPF), 4, A carbazole derivative such as 4′-bis (carbazol-9-yl) -9,9-dimethyl-fluorene (abbreviation: DMFL-CBP) can be used.

Examples of the dopant material include styryl derivatives; perylene derivatives; tris (2-phenylpyridinato) iridium (III) (Ir (ppy) ₃ ), tris (1-phenylisoquinoline) iridium (III) (Ir (piq ₃ ), phosphorescent metal complexes such as organic iridium complexes such as bis (1-phenylisoquinoline) (acetylacetonato) iridium (III) (abbreviation: Ir (piq) ₂ (acac)); it can.
Furthermore, the material for forming the light emitting layer may include the above-described material for forming the hole transport layer, the material for forming the electron transport layer described later, and various additives.
The thickness of the light emitting layer is not particularly limited, but is preferably 2 nm to 500 nm, for example.

The electron transport layer is provided on the surface of the light emitting layer. However, any functional layer other than these may be interposed between the second electrode and the electron transport layer on condition that the luminous efficiency of the organic EL element is not lowered.
For example, the electron injection layer may be provided on the surface of the electron transport layer, and the second electrode may be provided on the surface of the electron injection layer. The electron injection layer is a layer having a function of assisting injection of electrons from the second electrode to the electron transport layer.

The material for forming the electron transport layer is not particularly limited as long as the material has an electron transport function. Examples of the material for forming the electron transport layer include tris (8-quinolinolato) aluminum (abbreviation: Alq ₃ ), bis (2-methyl-8-quinolinolato) (4-phenylphenolato) aluminum (abbreviation: BAlq), and the like. Metal complex; 2,7-bis [2- (2,2′-bipyridin-6-yl) -1,3,4-oxadiazo-5-yl] -9,9-dimethylfluorene (abbreviation: Bpy-FOXD) 2- (4-biphenylyl) -5- (4-tert-butylphenyl) -1,3,4-oxadiazole (abbreviation: PBD), 1,3-bis [5- (p-tert-butylphenyl) ) -1,3,4-oxadiazol-2-yl] benzene (abbreviation: OXD-7), 2,2 ′, 2 ″-(1,3,5-benzenetriyl) tris (1-phenyl- 1H-Benz Imida A heteroaromatic compound such as poly (pyridine-2,5-diyl) (abbreviation: PPy), etc. The material for forming the electron transport layer is 1 A single species or a combination of two or more species may be used, and the electron transport layer may have a multilayer structure of two or more layers.
The thickness of the electron transport layer is not particularly limited, but is preferably 1 nm to 500 nm from the viewpoint of lowering the driving voltage.

The second electrode may be either a cathode or an anode. For example, the second electrode is a cathode.
The material for forming the second electrode is not particularly limited, but a transparent second electrode is used in the case of forming a top emission type organic EL element. As a material for forming the transparent and conductive second electrode, indium tin oxide (ITO); indium tin oxide containing silicon oxide (ITSO); zinc oxide to which a conductive metal such as aluminum is added (ZnO: Al) ); Magnesium-silver alloy. The thickness of the second electrode is not particularly limited, but is usually 0.01 μm to 1.0 μm.

[Uses and effects of organic EL devices]
The organic EL device of the present invention can be used as a light emitting panel such as a lighting device or a display device by combining one or a plurality thereof.
In the organic EL device of the present invention, since the second moisture absorption layer is provided on the back side of the organic layer, the second moisture absorption layer absorbs the moisture that has passed through the support substrate. Furthermore, since the moisture-proof layer is provided beyond the end of the first moisture-absorbing layer and the end of the second moisture-absorbing layer, it is difficult for moisture to enter from the end surfaces of the first and second moisture-absorbing layers. In the organic EL device of the present invention, it is effective that the second moisture-absorbing layer is included and that the moisture-proof layer is larger than the first and second moisture-absorbing layers so that moisture penetrates into the organic layer. Can be prevented. In particular, since the first moisture absorption layer and the second moisture absorption layer are directly in close contact with each other, it is possible to more effectively prevent moisture from entering the organic layer. Such an organic EL device continues to emit light stably for a long period of time.

[Method for Manufacturing Organic EL Device]
A plurality of the organic EL devices of the present invention can be continuously produced by a roll-to-roll method, or can be produced individually. The individual manufacturing method is also called a batch method.
Hereinafter, a method for continuously producing a plurality of organic EL devices by a roll-to-roll method will be described.
The roll-to-roll organic EL device manufacturing method includes a feeding step of feeding out a flexible strip-shaped support substrate, a first moisture-absorbing layer forming step of forming a first moisture-absorbing layer on the strip-shaped support substrate, An element formation step of forming a plurality of organic EL elements on the first moisture absorption layer, a second moisture absorption layer formation step of forming a second moisture absorption layer on the organic EL element, and a moisture barrier layer on the second moisture absorption layer A moisture-proof layer forming step to be formed; and a winding step of winding the belt-like laminate having the belt-like support substrate, the first moisture-absorbing layer, the organic EL element, the second moisture-absorbing layer, and the moisture-proof layer into a roll shape. The organic EL device of the present invention can also form a series of layers from the first moisture absorbing layer to the moisture-proof layer by vacuum deposition.

(Feeding process)
The feeding process is a process of feeding a belt-like support substrate wound around a roll to the production line.
The belt-like support substrate is an elongated rectangular flexible sheet. The length (length in the longitudinal direction) of the belt-like support substrate is not particularly limited, but is, for example, 10 m to 1000 m, and the width (length in the short direction) is not particularly limited, but is, for example, 10 mm to 300 mm.

(First moisture absorbing layer forming step)
The extended support substrate is washed in a washing tank as necessary, and then dried. After washing and drying, a first moisture absorbing layer is formed on the surface of the support substrate. As described above, the first hygroscopic layer can be formed by attaching a hygroscopic material such as a boron compound to a desired region on the surface of the support substrate.
As the method for forming the first moisture absorption layer, an optimum method can be adopted depending on the material to be formed. For example, vacuum evaporation methods such as resistance heating evaporation and electron beam evaporation, sputtering methods, thermal CVD, photo CVD, plasma CVD, MOCVD, atomic layer deposition (ALD), etc. are mentioned. Preferably, the first moisture absorption layer is formed using a vacuum deposition method.

(Element formation process)
The formation process of the organic EL element is performed in the same manner as before.
Briefly, a first electrode is formed on a support substrate on which the first moisture absorption layer is formed.
As a method for forming the first electrode, an optimum method can be adopted depending on the forming material, and examples thereof include a sputtering method, a vacuum deposition method, and an ink jet method. For example, when the anode is formed of metal, a vacuum deposition method is used.
An organic layer is formed on the surface of the first electrode except for the terminal. On the surface of the first electrode, for example, an organic layer can be formed by sequentially forming a hole transport layer, a light emitting layer, an electron transport layer, and the like. As a method for forming the hole transport layer, the light emitting layer, the electron transport layer, and the like, an optimum method can be adopted depending on the material to be formed, and examples thereof include a sputtering method, a vacuum deposition method, an ink jet method, and a coating method. Usually, these are formed by vacuum deposition.
Subsequently, a second electrode is formed on the surface of the organic layer. The second electrode is formed so as not to overlap the terminal of the first electrode. As a method for forming the second electrode, an optimum method can be adopted depending on the forming material, and examples thereof include a sputtering method, a vacuum deposition method, and an ink jet method.
The interval between the plurality of organic EL elements is not particularly limited and can be set as appropriate. For example, the interval is 0.5 mm to 5 mm.

(Second moisture absorbing layer forming step)
As described above, a second hygroscopic layer is formed by adhering a hygroscopic material such as a boron compound to the surface of the organic EL element excluding the two electrode terminals.
As the method for forming the second moisture absorption layer, an optimum method can be adopted depending on the material to be formed. For example, vacuum evaporation methods such as resistance heating evaporation and electron beam evaporation, sputtering methods, thermal CVD, photo CVD, plasma CVD, MOCVD, atomic layer deposition (ALD), etc. are mentioned. Preferably, a 2nd moisture absorption layer is formed using a vacuum evaporation method.

(Dampproof layer forming process)
As described above, the moisture-proof layer is formed by attaching the moisture-proof material to the surface of the second moisture-absorbing layer except for the terminals.
As a method for forming the moisture-proof layer, an optimum method can be adopted depending on the forming material, and examples thereof include physical vapor deposition and chemical vapor deposition. Among these, it is preferable to form the moisture-proof layer using a vacuum deposition method, particularly a plasma vacuum deposition method.

The plasma is not particularly limited, and for example, arc discharge plasma, glow discharge plasma, or the like can be used. Unlike glow discharge plasma, arc discharge plasma has a very high electron density. For this reason, it is preferable to use arc discharge plasma as the plasma. As the arc discharge plasma generation source, for example, a pressure gradient plasma gun, a direct current discharge plasma generator, a high frequency discharge plasma generator, or the like can be used. Among these, since it is possible to stably generate high-density plasma, it is preferable to use a pressure gradient plasma gun as a plasma source.

As the plasma deposition apparatus for forming the moisture-proof layer, a conventionally known apparatus can be used.
Briefly, a plasma deposition apparatus includes a chamber capable of maintaining the inside in a vacuum, a transfer device that continuously feeds a belt-like support substrate, a plasma source that generates plasma, a deposition source that contains a material, and the chamber A reaction gas supply device for supplying a reaction gas therein; a discharge gas supply device for supplying a discharge gas into the chamber; and a vacuum pump for evacuating the chamber. The vapor deposition source is usually installed at the bottom of the chamber so as to face the transported support substrate. As the means for evaporating the material put in the vapor deposition source, the plasma can be used, but resistance heating or an electron beam may be used.
In the case of forming a moisture-proof layer containing at least one selected from a metal or metalloid nitride, oxynitride, carbonitride, and oxycarbonitride, the deposition source may be, for example, a metal or metalloid, or these Nitride, oxynitride, carbonitride, or oxycarbonitride. In addition, when a metal or metalloid is put in the vapor deposition source, a metal or metalloid can be obtained by using a nitrogen-containing gas, a nitrogen-oxygen-containing gas, a nitrogen-hydrocarbon-containing gas, or a nitrogen-oxygen-hydrocarbon-containing gas as a reaction gas. A moisture-proof layer made of nitride or the like can be formed. Examples of the nitrogen-containing gas include nitrogen (N ₂ ), ammonia (NH ₃ ), and nitric oxide (NO). Examples of the nitrogen-oxygen-containing gas include nitrogen monoxide (NO), dinitrogen monoxide (N ₂ O), or a mixed gas of nitrogen (N ₂ ) and oxygen (O ₂ ). Examples of the nitrogen hydrocarbon-containing gas include a mixed gas of the nitrogen-containing gas and the hydrocarbon-containing gas. Examples of the hydrocarbon-containing gas include methane (CH ₄ ), ethane (C ₂ H ₆ ), propane (C ₃ H ₈ ), butane (C ₄ H ₁₀ ), ethylene (C ₂ H ₄ ), acetylene (C ₂ H ₂ ) and the like. Examples of the nitrogen-oxygen hydrocarbon-containing gas include the nitrogen-containing gas, a mixed gas of an oxygen-containing gas and a hydrocarbon-containing gas, or a mixed gas of a nitrogen-oxygen-containing gas and a hydrocarbon-containing gas.

The inside of the chamber is kept in a vacuum state by operating the vacuum pump. The pressure in the chamber is in the range of 0.01 Pa to 0.5 Pa, preferably 0.02 Pa to 0.15 Pa. In a vacuum chamber, a plasma is generated by introducing a discharge gas from a discharge gas supply device to a plasma generation source. Furthermore, the moisture-proof layer can be formed on the moisture-absorbing layer by introducing the reaction gas from the reaction gas supply device into the chamber and evaporating the material from the vapor deposition source.
The introduction of the reaction gas and the generation of the plasma may be performed at the same time, or the plasma may be generated after the introduction of the reaction gas, or the reaction gas may be introduced after the generation of the plasma. Also good. Since the surface of the moisture absorption layer can be activated before the material for forming the moisture barrier layer is attached, it is preferable to introduce a reactive gas after the generation of plasma.
The deposition rate can be set as appropriate, and is, for example, 10 to 300 nm / min.

(Winding process)
The winding process is a roll of a band-shaped laminate (a first moisture-absorbing layer, an organic EL element, a second moisture-absorbing layer, and a moisture-proof layer laminated on a band-shaped support substrate) obtained through the above-described steps. This is a winding process.
In this manner, a long object in which a plurality of organic EL devices are connected by a roll-to-roll method can be obtained. FIG. 15 is a plan view showing the long object 10. By cutting the long object 10 at a position indicated by a white arrow in FIG. 15, individual organic EL devices as shown in FIG. 1 can be obtained. FIG. 15 illustrates a long object when the organic EL device of the first embodiment is manufactured by the roll-to-roll method, but the organic EL device of the second or third embodiment is similarly rolled. It can be manufactured by a two-roll method.

Hereinafter, the present invention will be further described with reference to examples and comparative examples. However, the present invention is not limited to the following examples.

[Example 1]
A first hygroscopic layer was formed by vacuum-depositing B ₂ O ₃ (boron oxide) at a thickness of 20 nm (deposition rate: 1 nm / second) in a predetermined range on the surface of a commercially available glass substrate.
An anode was formed on the surface of the first moisture absorption layer by vacuum-depositing aluminum with a thickness of 150 nm. Next, α-NPD (N, N′-bis (naphthalen-1-yl) -N, N′-bis (phenyl) -2,2′-dimethylbenzidine) is applied to the surface of the anode (excluding terminals). Was vacuum-deposited at a thickness of 60 nm to form a hole transport layer. On the surface of this hole transport layer, Alq ₃ (Tris (8-quinolinolato) aluminum) was vacuum-deposited with a thickness of 40 nm to form a light emitting layer. An electron injection layer was formed on the surface of the light emitting layer by vacuum deposition of lithium fluoride with a thickness of 1 nm. A cathode was formed on the surface of the electron injection layer by vacuum-depositing ITO (indium tin oxide) at a thickness of 100 nm. The organic layer including the light emitting layer was formed inside the end of the first hygroscopic layer.
A second moisture absorbing layer was formed on the surface of the cathode (excluding the terminal) by vacuum-depositing B ₂ O ₃ (boron oxide) with a thickness of 20 nm (deposition rate: 1 nm / second). The 2nd moisture absorption layer was formed so that the edge part of an organic layer might be exceeded.
A moisture barrier layer was formed on the surface of the second moisture absorbing layer by plasma-depositing SiON (silicon oxynitride) with a thickness of 300 nm. The moisture-proof layer was formed so as to extend over the end portions of the first and second moisture-absorbing layers and cover the end surfaces of the first and second moisture-absorbing layers. However, the moisture-proof layer was not formed on the terminal.
The plasma deposition was performed at a deposition rate of 1 nm / second using a pressure gradient plasma gun as a plasma source, using silicon particles as a deposition source, and a mixed gas of oxygen and nitrogen as a reaction gas.
Thus, a top emission type organic EL device as shown in FIGS. 1 to 3 was produced.

The organic EL device produced in Example 1 will be described. Referring to FIG. 16, the first and second moisture absorption layers extend outside the organic layer, and the moisture barrier layer is more than the first and second moisture absorption layers. Also extends outward. The second moisture absorption layer covers and adheres to the surface and end surface of the organic layer, and the moisture barrier layer covers and adheres to the end surface of the first moisture absorption layer and the surface and end surface of the second moisture absorption layer. Moreover, the 1st moisture absorption layer and the 2nd moisture absorption layer are joined.

(Configuration of Organic EL Device of Example 1)
Moisture-proof layer: 300 nm thick SiON
Second hygroscopic layer: B ₂ O _{3 with a} thickness of 20 nm
Cathode: ITO with a thickness of 100 nm
Electron injection layer: LiF with a thickness of 1 nm
Light emitting layer: Alq _{3 with a} thickness of 40 nm
Hole transport layer: α-NPD with a thickness of 60 nm
Anode: Al with a thickness of 150 nm
First hygroscopic layer: B ₂ O _{3 with a} thickness of 20 nm
Substrate: Glass substrate

[Comparative Example 1]
An organic EL device was produced in the same manner as in Example 1 except that the first hygroscopic layer was not formed. The configuration of the organic EL device produced in Comparative Example 1 is shown in FIG.

[Comparative Example 2]
An organic EL device was produced in the same manner as in Example 1 except that the first moisture absorption layer was formed on the entire surface of the substrate and the first moisture absorption layer was formed beyond the end of the moisture barrier layer.
As shown in FIG. 17, the organic EL device manufactured in Comparative Example 2 does not cover the moisture-proof layer on a part of the surface and the end surface of the first moisture-absorbing layer.

[Comparative Example 3]
An organic EL device was produced in the same manner as in Example 1 except that the moisture-proof layer was formed only on the surface of the second moisture-absorbing layer.
As shown in FIG. 17, the organic EL device manufactured in Comparative Example 3 does not cover the moisture-proof layer on the end surfaces of the first and second moisture-absorbing layers.

[Measurement of emission lifetime of organic EL devices]
Each of the organic EL devices of Examples and Comparative Examples was incorporated in an experimental circuit, stored at 60 ° C. and 90% RH, and applied with voltage to continuously emit light for a long time. Then, when the luminance at the initial light emission was 100%, the time until the luminance became 70% was measured.
The results are shown in Table 1.

As is clear from Table 1, the organic EL device of Example 1 emitted light for a relatively long time. The organic EL devices of Comparative Examples 1 to 3 had an extremely short light emission lifetime as compared with Example 1.

The organic EL device of the present invention can be used as, for example, a lighting device or a display device.

DESCRIPTION OF SYMBOLS 1 Organic EL apparatus 2 Support substrate 3 Organic EL element 33 Organic layer 33e End part of organic layer 41 First moisture absorption layer 41e End part of first moisture absorption layer 42 Second moisture absorption layer 42e End part of second moisture absorption layer 5 Moisture prevention layer 5e Edge of moisture barrier

Claims

A supporting substrate, a first moisture absorption layer, an organic electroluminescence element having an organic layer, a second moisture absorption layer, and a moisture barrier layer are provided in this order. The organic electroluminescent device provided beyond the edge part of a layer and the edge part of a 2nd moisture absorption layer.
The organic electroluminescence device according to claim 1, wherein the first hygroscopic layer is provided beyond the end of the organic layer in a plan view.
The organic electroluminescence device according to claim 1 or 2, wherein the second moisture absorption layer is provided beyond the end of the organic layer in a plan view.
The said 2nd moisture absorption layer has covered the surface side and end surface side of the said organic layer, and the said moisture-proof layer has covered the surface side and end surface side of the said 2nd moisture absorption layer. The organic electroluminescent device according to 1.
The organic electroluminescence element partially has a terminal,
5. The organic electroluminescence device according to claim 1, wherein the first hygroscopic layer and the second hygroscopic layer are in direct contact with each other at a portion not having the terminal.
The organic electroluminescence device according to any one of claims 1 to 5, wherein each of the first moisture absorption layer and the second moisture absorption layer independently contains a boron compound or a sulfide compound.
A lighting device comprising the organic electroluminescence device according to any one of claims 1 to 6.