WO2016093446A1 - Bloc de réseau de fibres à maintien de polarisation et son procédé de fabrication, et dispositif optique intégré utilisant un bloc de réseau de fibres à maintien de polarisation - Google Patents

Bloc de réseau de fibres à maintien de polarisation et son procédé de fabrication, et dispositif optique intégré utilisant un bloc de réseau de fibres à maintien de polarisation Download PDF

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Publication number
WO2016093446A1
WO2016093446A1 PCT/KR2015/005312 KR2015005312W WO2016093446A1 WO 2016093446 A1 WO2016093446 A1 WO 2016093446A1 KR 2015005312 W KR2015005312 W KR 2015005312W WO 2016093446 A1 WO2016093446 A1 WO 2016093446A1
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WIPO (PCT)
Prior art keywords
optical fiber
groove
fiber array
polarization
optical
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PCT/KR2015/005312
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English (en)
Korean (ko)
Inventor
차상준
김성덕
김영성
정은일
Original Assignee
(주)파이버프로
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Publication of WO2016093446A1 publication Critical patent/WO2016093446A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/024—Optical fibres with cladding with or without a coating with polarisation maintaining properties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a polarization maintaining optical fiber array block and an integrated optical device using the same, and more particularly, when an optical fiber inserted into the optical fiber array block rotates to align the polarization axis, the optical fiber array block is rotated without shaking or twisting without a lid.
  • the present invention relates to an optical fiber array block that enables the optical fiber array block and an integrated optical device to be applied to an optical fiber gyro chip.
  • Polarization Maintaining Fibers are optical fibers having different effective refractive indices, that is, birefringence, depending on the polarization component of the light traveling through the core of the optical fiber. Due to such birefringence, the incident light has different propagation characteristics according to the polarization component, thereby suppressing energy exchange between the two polarizations. Therefore, even if the incident light propagates through the optical fiber, the initial polarization state is maintained as it is.
  • the birefringence includes geometrical birefringence due to geometric deformation of the optical fiber core and stress-induced birefringence due to asymmetrical stress applied to the core. It is more suitable as a polarization maintenance optical fiber.
  • FIG. 1 is a view showing a cross-sectional view of various types of conventional polarization maintaining optical fiber.
  • Polarization-maintaining optical fiber for optical communication due to asymmetric stress can be divided into PANDA, Bow tie, and Elliptical Jacket polarization-maintaining optical fiber as shown in FIG. have.
  • Polarization maintaining optical fiber is used in an optical device or an optical component because one or a plurality of optical fibers are arranged in a block like a general optical fiber, and the polarization maintaining optical fiber array (PMFA; Polarization) Maintaining Fiber Array.
  • PMFA Polarization maintaining optical fiber array
  • the performance of the polarization maintaining optical fiber array is important to align the polarization axis (Fast axis, Slow axis) of the optical fiber well.
  • FIG. 2 is a cross-sectional view of a conventional polarization maintaining optical fiber array block.
  • the conventional polarization maintaining optical fiber array block has a V-groove or U-groove structure, and a polarization maintaining optical fiber (PMF) is inserted into the V-groove or U-groove.
  • PMF polarization maintaining optical fiber
  • the optical fiber is conventionally rotated and aligned while the optical fiber is pressed by using a lid of glass material on the optical fiber.
  • An embodiment of the present invention is to improve the structure of the polarization maintaining optical fiber array block to provide an optical fiber array block that does not shake or twist the optical fiber without the lid (Lid) when rotating the optical fiber for polarization axis alignment.
  • an embodiment of the present invention is to provide an integrated optical device applying the optical fiber array block to the optical fiber type gyro chip.
  • the polarization maintaining optical fiber array block includes at least one groove etched to allow the polarization maintaining optical fibers to be inserted, and the groove may have a rhombus shape in cross section.
  • a method of manufacturing a polarization maintaining optical fiber array block includes forming a mask pattern defining a first groove area on a semiconductor substrate, and using the mask pattern as an etch mask to make the semiconductor substrate a first depth. And etching to form a first recess, and etching the recess to form a first groove having a rhombus shape.
  • An integrated optical device has a waveguide through which light can travel, an optical waveguide element for transferring input light through the waveguide, and light bonded to one side of the optical waveguide element and input from the outside. And an input optical fiber array device for transmitting light to the optical waveguide device and an output optical fiber array device bonded to the other side of the optical waveguide device to output light received from the optical waveguide device to the outside, wherein the input optical fiber array device Alternatively, the output optical fiber array device may have at least one groove etched to have a rhombus shape and to insert a polarization maintaining optical fiber.
  • An embodiment of the present invention when rotating the optical fiber inserted into the optical fiber array block for polarization axis alignment, so that the optical fiber is not shaken or twisted without a lid (Lid) so that the polarization axis alignment can be performed more easily while maintaining the polarization characteristics Do it.
  • the embodiment of the present invention can eliminate the polarization change and low polarization extinction rate caused by pressing the optical fiber by not using the cover, it is possible to fix the optical fiber using a smaller amount of epoxy than when using the cover Therefore, a reliable fiber array can be manufactured.
  • the polarization axis of the optical fiber array block and the polarization axis of the optical waveguide can be easily coupled, thereby manufacturing an integrated optical device having a high polarization extinction ratio (PER).
  • PER polarization extinction ratio
  • FIG. 1 is a view showing a cross-sectional view of various kinds of conventional polarization maintaining optical fiber.
  • FIG. 2 is a view showing a cross-sectional view of a conventional polarization maintaining optical fiber array block.
  • Figure 3 is a perspective view showing the structure of a polarization maintaining optical fiber array block according to an embodiment of the present invention.
  • 4A and 4B are cross-sectional views illustrating a cross-sectional view taken along line A-A 'and B-B' in FIG. 3, respectively.
  • FIG. 5 is a view showing the alignment of the polarization axis by rotating the polarization maintaining optical fiber inserted into the optical fiber array block.
  • FIG. 6 is a view showing the adhesive epoxy is applied on the alignment is complete optical fiber.
  • 7A to 7G are cross-sectional views illustrating a process of manufacturing the optical fiber array block of FIG. 3.
  • 8A and 8B illustrate embodiments of an optical fiber array block into which an optical fiber is inserted.
  • FIG. 9 is a view showing an integrated optical device according to an embodiment of the present invention.
  • the polarization maintaining optical fiber array block includes at least one groove etched to allow the polarization maintaining optical fibers to be inserted, and the groove may have a rhombus shape in cross section.
  • a method of manufacturing a polarization maintaining optical fiber array block includes forming a mask pattern defining a first groove area on a semiconductor substrate, and using the mask pattern as an etch mask to make the semiconductor substrate a first depth. And etching to form a first recess, and etching the recess to form a first groove having a rhombus shape.
  • An integrated optical device has a waveguide through which light can travel, an optical waveguide element for transferring input light through the waveguide, and light bonded to one side of the optical waveguide element and input from the outside. And an input optical fiber array device for transmitting light to the optical waveguide device and an output optical fiber array device bonded to the other side of the optical waveguide device to output light received from the optical waveguide device to the outside, wherein the input optical fiber array device Alternatively, the output optical fiber array device may have at least one groove etched to have a rhombus shape and to insert a polarization maintaining optical fiber.
  • FIG. 3 is a perspective view illustrating a structure of a polarization-maintaining optical fiber array block according to an embodiment of the present invention
  • FIGS. 4A and 4B are cross-sectional views illustrating A-A 'and B-B', respectively, in FIG. 3. .
  • the optical fiber array block 110 includes a plurality of grooves 112 etched in parallel in a line type such that a plurality of polarization maintaining fibers (PMF) may be inserted side by side at a predetermined interval. can do.
  • PMF polarization maintaining fibers
  • Each groove 112 has a first groove 112a having a first etching width and a second groove 112b having a second etching width wider than the first etching width and extending in the same direction as the first groove 112a. It may include.
  • the first groove 112a is an area where an optical fiber clad in which a jacket is stripped is inserted in the optical fiber cable (PMF clad area)
  • the second groove 112b is an optical fiber cable in which no jacket is stripped. It is the area where the optical fiber jacket) is inserted (PMF jacket area).
  • the cross-sectional shape of the grooves 112a and 112b formed in the optical fiber array block 110 is not formed in the V shape or the U shape, and the etching width of the upper portions of the grooves 112a and 112b is medium. It is formed in a shape smaller than the etching width of the part.
  • the grooves 112a and 112b may have a cross-sectional shape having a rhombus shape.
  • the optical fibers may be stably held only by the optical fiber array block 110 without a separate lid.
  • FIG. 5 is a view showing a state in which the polarization axis is aligned by rotating the polarization maintaining optical fiber inserted into the optical fiber array block
  • Figure 6 is a view showing a state that the adhesive epoxy is applied on the optical fiber 122, 124 is completed alignment.
  • the polarization axes of the optical fibers 122 and 124 are grooves 112a and 112b.
  • the optical fibers 122 and 124 are rotated to coincide with the central axis (vertical axis).
  • the optical fibers 122 and 124 are pushed and inserted from the portion where the optical fiber jacket 124 is inserted.
  • UV curing epoxy epoxy
  • the optical fiber may be slightly applied to the inside of the grooves (112a, 112b) and then the optical fiber can be inserted.
  • the UV curing epoxy is cured after the insertion of the optical fibers 122 and 124 and the alignment of the polarization axes are completed, thereby allowing the optical fibers 122 and 124 to be tightly fixed to the optical fiber array block 110.
  • the polarization axis alignment is completed, the optical fiber (122, 124) as shown in Figure 6 is inserted into the optical fiber array block 110, the adhesive epoxy is applied on the top of the optical fiber (122, 124), the adhesive is cured by the optical fiber array block It may be fixed to (110).
  • the rhombus structure of the grooves 112a and 112b formed in the optical fiber array block 110 is a structure in which the center of the rhombus structure and the central axis of the optical fiber inserted into the optical fiber array block 110 coincide. That is, the centers of the optical fibers 122 and 124 coincide with the points where the horizontal straight lines and the vertical straight lines intersect the vertices facing from the rhombus formed in the optical fiber array block 110.
  • the four surfaces of the rhombus are in contact with the optical fibers 122 and 124 to hold the optical fibers 122 and 124 to rotate the optical fibers 122 and 124 to align the polarization axes of the optical fibers 122 and 124. 124) does not shake in the vertical or horizontal direction.
  • 7A to 7G are cross-sectional views illustrating a process of manufacturing the optical fiber array block of FIG. 3.
  • a hard mask layer 202 is formed on a semiconductor (silicon) substrate 200.
  • the hard mask layer 202 may include a silicon nitride film (SiN), the silicon nitride film may be deposited to a thickness of about 2000 GPa.
  • a photo resist layer 204 is formed on the hard mask layer 202.
  • the photoresist is applied onto the hard mask layer 202 and then baked at a temperature of approximately 100 ° C. to form the photoresist 204.
  • a photoresist pattern 206 defining a region in which the first grooves 112a are to be formed is formed.
  • the line width of the mask may be determined according to the etching depth for forming the grooves 112a having a rhombus shape, and the etching depth may be determined according to the diameter of the optical fiber to be inserted.
  • the line width of the mask may be calculated and determined to a size into which an optical fiber clad of 80 ⁇ m or 125 ⁇ m may be inserted.
  • the hard mask layer 202 is etched using the photoresist pattern 206 as an etch mask to form a hard mask pattern 208 exposing the silicon substrate 200.
  • the hard mask layer 202 may be removed through a dry etching process using ICP equipment.
  • the silicon substrate 200 is etched in the depth direction by using the photoresist pattern 206 and the hard mask pattern 208 as an etch mask to recess a predetermined depth in the silicon substrate 200 ( 210).
  • the recess 210 may have a depth corresponding to the depth into which the optical fiber clad is inserted, and may be formed through a dry etching process using deep-RIE equipment. For example, when the diameter of the optical fiber is 125 ⁇ m, the silicon substrate 200 is etched about 125 ⁇ m using deep-RIE equipment.
  • anisotropic wet etching is performed on the recess 210 using the hard mask pattern 208 as an etch mask to form a first groove having a rhombus-shaped cross section. 212).
  • wet etching using anisotropic characteristics is performed at an etching angle according to the silicon crystal direction.
  • the wet etching may be performed by immersing the silicon substrate in 25% to 50% potassium hydroxide (KOH) aqueous solution at a temperature of 90 ° C. or less.
  • KOH potassium hydroxide
  • the hard mask pattern 208 is removed.
  • the hard mask pattern 208 when the hard mask pattern 208 is made of a silicon nitride film, the hard mask pattern 208 may be removed using an aqueous hydrofluoric acid (HF) solution.
  • HF aqueous hydrofluoric acid
  • the second grooves 112b are formed in the semiconductor substrate 200 by repeating the processes of FIGS. 7B to 7G described above with respect to the second groove 112b region.
  • the recess is formed by etching the silicon substrate 200 as shown in FIG. 7E, the recess is formed deeper than that when the first groove 112a is formed, that is, the depth where the optical fiber jacket 124 can be inserted. do.
  • the line width of the mask may be determined according to the etching depth for forming the grooves 112b having a rhombus shape, and the etching depth may be determined according to the diameter of the optical fiber to be inserted.
  • the line width of the mask may be calculated and determined to a size into which an optical fiber cable of 165 ⁇ m or 250 ⁇ m can be inserted.
  • the region in which the optical fiber clad is inserted is first formed and then the region in which the optical fiber jacket is inserted has been described in the order of changing.
  • the silicon substrate on which the grooves 112a and 112b of the rhombus shape are formed is cut and separated in units of blocks by a dicing machine.
  • 8A and 8B illustrate embodiments of an optical fiber array block into which an optical fiber is inserted.
  • the polarization axes are aligned, and the optical fiber array block 100 is fixed after fixing the aligned optical fibers with epoxy.
  • Polish the cross section For example, polishing first removes chipping of the optical fiber, silicon and epoxy by lapping and then flattens the optical fiber 122, the optical fiber array block 100 and the epoxy in the primary polishing step. Polish Then, in the second polishing step, the cross section of the optical fiber is polished to shine.
  • ⁇ 8 to 10 degrees
  • the optical fiber array block 100 when bonding the optical fiber array block 100 with the optical waveguide element, the optical fiber array block 100 using Snell's law to reduce the reflection loss caused by the refractive index difference of the optical fiber core and align the optical axes of the optical fiber and the waveguide.
  • the cross section (cross section bonded with the optical waveguide element) can be formed at an angle obliquely in the vertical direction or the horizontal direction.
  • FIG 9 is a view illustrating an integrated optical device according to an embodiment of the present invention.
  • the integrated optical device of FIG. 9 may include an optical waveguide element 310, an input optical fiber array element 320, and an output optical fiber array element 330.
  • the optical waveguide element 310 includes a waveguide 312 through which light can travel, and both ends thereof are bonded to the input optical fiber array element 320 and the output optical fiber array element 330 and input from the input optical fiber array element 320.
  • the light is transmitted to the output optical fiber array element 330 through the waveguide 312. That is, the waveguide 312 of the optical waveguide element 310 is aligned with the core of the optical fiber embedded in the optical fiber array element 320 and the core of the optical fiber embedded in the output optical fiber array element 330, respectively.
  • the optical waveguide device 310 forms a waveguide 312 by depositing an oxide film on a substrate such as silicon (Si), silicon oxide film (SiO 2 ), lithium niobate (LiNbO 3 ), or an ion exchange method or proton. It may be formed by forming a waveguide 312 through which light propagates through the substrate through a proton exchange method, and then cutting and polishing the substrate.
  • the optical waveguide device 310 may be any one of a silica based waveguide device, a silicon waveguide device, an ion exchange waveguide device, and a photonic waveguide device. Can be used. 9 illustrates a case in which a waveguide 312 in which one input light is split into two output light is formed in the optical waveguide device 310, but is not limited thereto.
  • the input optical fiber array element 320 is bonded to one side of the optical waveguide element 310, and transmits light input through the optical fibers 124 and 122 from the outside to the waveguide 312 of the optical waveguide element 310.
  • the input optical fiber array element 320 has an optical fiber clad 122 and an optical fiber jacket 124 in an optical fiber array block 100 having grooves of different etch widths having a rhombus cross section.
  • This polarizing axis includes an optical element inserted in alignment.
  • 9 illustrates a case in which only one strand of optical fibers 122 and 124 is inserted into the input optical fiber array element 320, but the embodiment is not limited thereto.
  • the output optical fiber array element 320 is bonded to the other side of the optical waveguide element 310 and outputs light transmitted through the waveguide 312 of the optical waveguide element 310 to the outside.
  • the output optical fiber array element 320 also includes an optical element in which the optical fiber clad 122 and the optical fiber jacket 124 are inserted in the optical fiber array block 100 in which the cross-section is formed in the groove and the grooves having different etching widths are aligned. .
  • FIG. 9 illustrates a case in which the cross section of the input optical fiber array element 320 and the output optical fiber array element 330 bonded to the optical waveguide element 310 is formed in a vertical shape, but the input optical fiber array element 320 and the output are shown.
  • the cross section of the optical fiber array element 330 may be formed to be inclined as shown in FIG. 8A or 8B. In this case, the cross-sectional view of the corresponding optical waveguide device 310 is formed to be inclined to correspond thereto.
  • the present invention makes it possible to more easily perform polarization axis alignment while maintaining polarization characteristics by preventing the optical fiber from shaking or twisting without a lid (Lid) when rotating the optical fiber inserted in the optical fiber array block for polarization axis alignment.
  • the present invention can remove the polarization change and low polarization extinction rate caused by pressing the optical fiber by not using the cover, it is possible to fix the optical fiber using a small amount of epoxy than when using the cover Highly reliable fiber arrays can be manufactured.
  • the present invention can be easily coupled (butt coupling) the polarization axis of the optical fiber array block and the polarization axis of the optical waveguide, thereby manufacturing an integrated optical device having a high Polarization Extinction Ratio (PER).
  • PER Polarization Extinction Ratio

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

L'invention concerne un bloc de réseau de fibres optiques dans lequel un réseau de fibres à maintien de polarisation est inséré. Un bloc de réseau de fibres à maintien de polarisation selon un mode de réalisation de la présente technologie comprend au moins une rainure qui est gravée de sorte que des fibres à maintien de polarisation puissent être insérées à l'intérieur de celle-ci, la rainure ayant une section transversale qui peut avoir la forme d'un losange.
PCT/KR2015/005312 2014-12-12 2015-05-27 Bloc de réseau de fibres à maintien de polarisation et son procédé de fabrication, et dispositif optique intégré utilisant un bloc de réseau de fibres à maintien de polarisation WO2016093446A1 (fr)

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KR1020140179419A KR20160071810A (ko) 2014-12-12 2014-12-12 편광유지 광섬유 어레이 블록 및 그 제조 방법
KR10-2014-0179419 2014-12-12

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4871226A (en) * 1987-10-01 1989-10-03 United Technologies Corporation Mounting of optical fibers to integrated optical chips
US5393371A (en) * 1989-12-18 1995-02-28 Litton Systems, Inc. Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates
KR20030038023A (ko) * 2001-11-08 2003-05-16 주식회사 한택 광소자가 집적된 광섬유 어레이 블럭
KR20030065961A (ko) * 2002-02-02 2003-08-09 삼성전자주식회사 트리 구조의 홈들을 구비한 블록과 이를 이용한 다심광섬유 블록 및 그 정렬 방법
KR20090101104A (ko) * 2008-03-21 2009-09-24 주식회사 휘라 포토닉스 광섬유 정렬을 위한 모듈 제작 방법 및 그를 위한 광 전송 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4871226A (en) * 1987-10-01 1989-10-03 United Technologies Corporation Mounting of optical fibers to integrated optical chips
US5393371A (en) * 1989-12-18 1995-02-28 Litton Systems, Inc. Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates
KR20030038023A (ko) * 2001-11-08 2003-05-16 주식회사 한택 광소자가 집적된 광섬유 어레이 블럭
KR20030065961A (ko) * 2002-02-02 2003-08-09 삼성전자주식회사 트리 구조의 홈들을 구비한 블록과 이를 이용한 다심광섬유 블록 및 그 정렬 방법
KR20090101104A (ko) * 2008-03-21 2009-09-24 주식회사 휘라 포토닉스 광섬유 정렬을 위한 모듈 제작 방법 및 그를 위한 광 전송 장치

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