WO2016081915A1 - Capteur de pression utilisant des résonateurs de flexion piézoélectriques - Google Patents

Capteur de pression utilisant des résonateurs de flexion piézoélectriques Download PDF

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Publication number
WO2016081915A1
WO2016081915A1 PCT/US2015/062012 US2015062012W WO2016081915A1 WO 2016081915 A1 WO2016081915 A1 WO 2016081915A1 US 2015062012 W US2015062012 W US 2015062012W WO 2016081915 A1 WO2016081915 A1 WO 2016081915A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure sensor
enclosure
piezoelectric layer
resonator
diaphragm
Prior art date
Application number
PCT/US2015/062012
Other languages
English (en)
Inventor
Xiaoqi Bao
Stewart Sherrit
Original Assignee
California Institute Of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute Of Technology filed Critical California Institute Of Technology
Publication of WO2016081915A1 publication Critical patent/WO2016081915A1/fr

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E21—EARTH DRILLING; MINING
    • E21B—EARTH DRILLING, e.g. DEEP DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B47/00—Survey of boreholes or wells
    • E21B47/06—Measuring temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices

Abstract

L'invention concerne un capteur de pression comprenant une enveloppe et un résonateur de flexion logé dans l'enveloppe. Le résonateur de flexion comprend un diaphragme relié à l'enveloppe, une couche piézoélectrique sur le diaphragme et une électrode sur la couche piézoélectrique. Le capteur de pression comprend également une borne électrique couplée à la couche piézoélectrique et s'étendant vers l'extérieur à travers l'enveloppe. La borne électrique applique un signal d'entrée à la couche piézoélectrique pour faire résonner le résonateur de flexion. Une fréquence de résonance du résonateur de flexion change selon un changement d'une pression externe appliquée au capteur de pression, la fréquence de résonance du résonateur de flexion correspondant à la pression externe appliquée au capteur de pression.
PCT/US2015/062012 2014-11-21 2015-11-20 Capteur de pression utilisant des résonateurs de flexion piézoélectriques WO2016081915A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462082983P 2014-11-21 2014-11-21
US62/082,983 2014-11-21

Publications (1)

Publication Number Publication Date
WO2016081915A1 true WO2016081915A1 (fr) 2016-05-26

Family

ID=56009917

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2015/062012 WO2016081915A1 (fr) 2014-11-21 2015-11-20 Capteur de pression utilisant des résonateurs de flexion piézoélectriques

Country Status (2)

Country Link
US (1) US20160146680A1 (fr)
WO (1) WO2016081915A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199720A1 (fr) * 2014-06-27 2015-12-30 Schlumberger Canada Limited Technique de transport de fond dynamiquement automatisée destinée à une application d'intervention
US10352800B2 (en) * 2016-06-03 2019-07-16 Mks Instruments, Inc. Micromachined bulk acoustic wave resonator pressure sensor
US10550680B2 (en) * 2017-04-13 2020-02-04 John Dean Process and system for enhanced depth penetration of an energy source
JP2019007749A (ja) * 2017-06-20 2019-01-17 ヤマハ株式会社 圧力センサー
CN109738107A (zh) * 2019-01-04 2019-05-10 胡靖阳 一种液压油式高稳定的压力传感器
US11768178B2 (en) 2020-02-28 2023-09-26 Baker Hughes Oilfield Operations Llc Embedded electrode tuning fork

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JPS5818133A (ja) * 1981-07-24 1983-02-02 Matsushita Electric Ind Co Ltd 圧力センサ
US5663505A (en) * 1993-08-23 1997-09-02 Murata Manufacturing Co., Ltd. Pressure sensor having a piezoelectric vibrator with concencentric circular electrodes
US20090009036A1 (en) * 2007-07-02 2009-01-08 Schlumberger Technology Corporation Pressure transducer
WO2010135048A1 (fr) * 2009-05-21 2010-11-25 Ge Infrastructure Sensing, Inc. Capteur
JP2011199102A (ja) * 2010-03-23 2011-10-06 Koji Toda 振動発電素子

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FR2531533A1 (fr) * 1982-08-05 1984-02-10 Flopetrol Capteur piezo-electrique de pression et/ou de temperature
FR2531532A1 (fr) * 1982-08-05 1984-02-10 Flopetrol Capteur piezo-electrique, notamment pour la mesure de pressions
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818133A (ja) * 1981-07-24 1983-02-02 Matsushita Electric Ind Co Ltd 圧力センサ
US5663505A (en) * 1993-08-23 1997-09-02 Murata Manufacturing Co., Ltd. Pressure sensor having a piezoelectric vibrator with concencentric circular electrodes
US20090009036A1 (en) * 2007-07-02 2009-01-08 Schlumberger Technology Corporation Pressure transducer
WO2010135048A1 (fr) * 2009-05-21 2010-11-25 Ge Infrastructure Sensing, Inc. Capteur
JP2011199102A (ja) * 2010-03-23 2011-10-06 Koji Toda 振動発電素子

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Publication number Publication date
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