WO2016078116A1

WO2016078116A1 - Vacuum reaction chamber of vacuum machine and vacuum machine

Info

Publication number: WO2016078116A1
Application number: PCT/CN2014/092546
Authority: WO
Inventors: 刘思洋
Original assignee: 深圳市华星光电技术有限公司
Priority date: 2014-11-19
Filing date: 2014-11-28
Publication date: 2016-05-26
Also published as: CN104375292A

Abstract

Disclosed are a vacuum reaction chamber (10) of a vacuum machine and the vacuum machine. The vacuum reaction chamber (10) comprises a reaction chamber body (11), a carrying substrate (12) and an observation window. The observation window comprises transparent observation glass for observational operations and a viewing angle enlargement component (135) for enlarging the viewing angle of observation of the transparent observation glass. Also provided is a vacuum machine. The vacuum reaction chamber (10) of the vacuum machine and the vacuum machine are easy for observational operations, and accordingly production efficiency is improved and the waste of productivity is avoided.

Description

Vacuum reaction chamber and vacuum machine table of vacuum machine

Technical field

The invention relates to the field of vacuum equipment, in particular to a vacuum reaction chamber and a vacuum machine table of a vacuum machine.

Background technique

In the current manufacturing process of the array substrate of the liquid crystal display panel, three kinds of vacuum machines are mainly used, such as PVD of the film forming portion (Physical). Vapor Deposition, physical vapor deposition), CVD (Chemical Vapor Deposition), dry etching equipment for etching (Dry Etch).

Under the influence of film forming conditions, the vacuum reaction chamber of the above vacuum machine is usually maintained at a high temperature and a high vacuum state; if an abnormality occurs in the vacuum machine during the production process, the worker needs to observe the cavity in the vacuum reaction chamber and the cavity. In the case of the substrate, the worker should stop and cool the vacuum machine, and then open the cavity of the vacuum reaction chamber to perform the observation operation. This process takes a long time, and after the observation, a series of double-action operations such as warming and vacuuming are needed, which affects the production efficiency and causes unnecessary waste of production capacity.

Therefore, it is necessary to provide a vacuum reaction chamber of a vacuum machine and a vacuum machine to solve the problems existing in the prior art.

technical problem

The object of the present invention is to provide a vacuum reaction chamber and a vacuum machine table of a vacuum machine which is easy to observe and operate; to solve the problem that the vacuum reaction chamber and the vacuum machine of the existing vacuum machine have low production efficiency and waste of production capacity. technical problem.

Technical solution

Embodiments of the present invention provide a vacuum reaction chamber of a vacuum machine, which includes:

a reaction chamber comprising a receiving space formed by four side walls, a top wall and a bottom wall;

a carrier substrate disposed in a middle portion of the bottom wall of the reaction chamber for carrying a substrate to be processed;

An observation window disposed on the sidewall of the reaction chamber for observing the receiving space in the reaction chamber;

Wherein the observation window includes a transparent observation glass for an observation operation, and a viewing angle expansion member for expanding an observation angle of the transparent observation glass;

Wherein the viewing angle enlarging member includes a first convex lens and a second convex lens, the main optical axes of the first convex lens and the second convex lens are coincident, and the right focus of the first convex lens and the left focus of the second convex lens are coincident;

The viewing angle expanding member is movable back and forth with respect to the transparent observation glass.

In the vacuum reaction chamber of the vacuum machine of the present invention, the vacuum reaction chamber includes a first observation window and a second observation window, and the first observation window and the second observation window are respectively disposed in the reaction On the opposite side walls of the cavity.

In the vacuum reaction chamber of the vacuum machine of the present invention, the vacuum reaction chamber includes a first observation window, a second observation window, and a third observation window, the first observation window, the second observation window, and The third observation windows are respectively disposed on three side walls of the reaction chamber.

In the vacuum reaction chamber of the vacuum machine of the present invention, the viewing angle expanding member is detachably disposed on the side wall of the reaction chamber.

The embodiment of the invention further provides a vacuum reaction chamber of a vacuum machine, which comprises:

Wherein the observation window includes a transparent observation glass for an observation operation, and a viewing angle expansion member for expanding an observation angle of the transparent observation glass.

In the vacuum reaction chamber of the vacuum machine of the present invention, the viewing angle expanding member includes a first convex lens and a second convex lens, and the main optical axes of the first convex lens and the second convex lens coincide.

In the vacuum reaction chamber of the vacuum machine of the present invention, the right focus of the first convex lens and the left focus of the second convex lens coincide.

In the vacuum reaction chamber of the vacuum machine of the present invention, the viewing angle expanding member is movable back and forth with respect to the transparent observation glass.

The embodiment of the invention further provides a vacuum machine comprising a vacuum reaction chamber and a reaction operating device; wherein the vacuum reaction chamber comprises:

In the vacuum machine of the present invention, the vacuum reaction chamber includes a first observation window and a second observation window, and the first observation window and the second observation window are respectively disposed at opposite sides of the reaction chamber On both side walls.

In the vacuum machine of the present invention, the vacuum reaction chamber includes a first observation window, a second observation window, and a third observation window, the first observation window, the second observation window, and the third observation Windows are respectively disposed on the three side walls of the reaction chamber.

In the vacuum machine of the present invention, the viewing angle expanding member includes a first convex lens and a second convex lens, and the main optical axes of the first convex lens and the second convex lens coincide.

In the vacuum machine of the present invention, the right focus of the first convex lens and the left focus of the second convex lens coincide.

In the vacuum machine of the present invention, the viewing angle expanding member is detachably disposed on the side wall of the reaction chamber.

In the vacuum machine of the present invention, the viewing angle expanding member is movable back and forth with respect to the transparent observation glass.

Beneficial effect

Compared with the vacuum reaction chamber and the vacuum machine of the existing vacuum machine, the vacuum reaction chamber and the vacuum machine of the vacuum machine of the present invention are provided with an observation window having a viewing angle expanding member on the side wall of the reaction chamber. It facilitates the observation operation of the vacuum reaction chamber, improves the production efficiency of the vacuum machine, avoids the waste of the capacity of the vacuum machine, and solves the low production efficiency and waste of the vacuum reaction chamber and the vacuum machine of the existing vacuum machine. More serious technical problems.

DRAWINGS

1 is a top plan view showing a preferred embodiment of a vacuum reaction chamber of a vacuum machine of the present invention;

Figure 2 is a cross-sectional view taken along line A-A' of Figure 1;

Figure 3 is a schematic view showing the structure of an observation window of a preferred embodiment of the vacuum reaction chamber of the vacuum machine of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

The following description of the various embodiments is provided to illustrate the specific embodiments of the invention. The directional terms mentioned in the present invention, such as "upper", "lower", "before", "after", "left", "right", "inside", "outside", "side", etc., are merely references. Attach the direction of the drawing. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention.

In the figures, structurally similar elements are denoted by the same reference numerals.

1 and FIG. 2, FIG. 1 is a schematic plan view showing a preferred embodiment of a vacuum reaction chamber of a vacuum machine of the present invention, and FIG. 2 is a cross-sectional view taken along line A-A' of FIG. The vacuum reaction chamber 10 of the vacuum machine of the preferred embodiment includes a reaction chamber 11, a carrier substrate 12, and an observation window. The reaction chamber 11 includes a receiving space 114 formed by four side walls 111, a top wall 112 and a bottom wall 113. The carrier substrate 12 is disposed in the middle of the bottom wall 113 of the reaction chamber 11 for carrying the substrate to be processed; The observation window is disposed on the side wall 111 of the reaction chamber 11 for observing the condition in the accommodation space 114 in the reaction chamber 11, such as the vacuum processing on the substrate to be processed.

In the preferred embodiment, the vacuum reaction chamber 10 includes a first observation window 131, a second observation window 132, and two third observation windows 133, wherein the first observation window 131 is disposed on the left side of the reaction chamber 11. On the wall, a second observation window 132 is disposed on the right side wall of the reaction chamber 11, and a third observation window 133 is disposed on the front side wall of the reaction chamber 11. The reaction operating device of the vacuum machine is generally disposed on the rear side wall of the reaction chamber 11. In this way, the operator can observe the substrate to be processed on the carrier substrate 12 and other positions of the receiving space 114 in multiple viewing angles and multiple positions, and also multiple operators can simultaneously observe through different observation windows, and find out at the same time. All operational problems within the containment space 114 of the reaction chamber 11; and full utilization of all available space outside the reaction chamber 11.

Of course, only the first observation window 131 and the second observation window 132 may be disposed on the vacuum reaction chamber 10, and the first observation window 131 and the second observation window 132 are respectively disposed on opposite side walls of the reaction chamber 11. Through the first observation window 131 and the second observation window 132, the accommodation space 114 can be observed without dead angle.

In the vacuum reaction chamber 10 of the vacuum machine of the preferred embodiment, each of the observation windows (such as the first observation window 131 and the second observation window 132, etc.) includes a transparent observation glass 134 and a viewing angle expanding member 135. The transparent observation glass 134 is used for an operator to perform an observation operation, and the angle-of-view expanding member 135 is for expanding the observation angle of the transparent observation glass 134. As shown in FIG. 3, FIG. 3 is a schematic structural view of an observation window of a preferred embodiment of the vacuum reaction chamber of the vacuum machine of the present invention. The viewing angle enlarging member 135 of the preferred embodiment includes a first convex lens 1351 and a second convex lens 1352. The main optical axes of the first convex lens 1351 and the second convex lens 1352 coincide with the line C, the right focus of the first convex lens 1351 and the second convex lens 1352 The left focus coincides with point B.

The combination of the first convex lens 1351 and the second convex lens 1352 in the above-described viewing angle expanding member 135 can effectively enlarge the observation angle of each observation window, making the observation operation clearer.

Preferably, the viewing angle expansion member 135 of the observation window of the vacuum reaction chamber 10 of the vacuum machine of the preferred embodiment can move back and forth with respect to the transparent observation glass 134 of the observation window, so that the observation range of the observation window can be further adjusted to avoid observation. The generation of dead ends.

Preferably, the viewing angle expansion member 135 of the observation window of the vacuum reaction chamber 10 of the vacuum machine of the preferred embodiment is detachably disposed on the side wall 111 of the reaction chamber 11 to save the vacuum machine and the reaction chamber 11. production cost.

Therefore, the vacuum reaction chamber of the vacuum machine of the present invention is provided with an observation window having a viewing angle expansion member on the side wall of the reaction chamber, thereby facilitating the observation operation of the vacuum reaction chamber, improving the production efficiency of the vacuum machine, and avoiding the vacuum. The capacity of the machine is wasted.

The invention also provides a vacuum machine table, which comprises a vacuum reaction chamber and a reaction operation device, which is used for opening or closing the vacuum reaction chamber, and performing a ventilation operation, a vacuum operation, etc. on the vacuum reaction chamber. operating.

The vacuum reaction chamber comprises a receiving space formed by four side walls, a top wall and a bottom wall; the carrier substrate is disposed in the middle of the bottom wall of the reaction chamber for carrying the substrate to be processed; the observation window is respectively disposed in the reaction chamber The side wall of the body is used to observe the accommodation space in the reaction chamber; wherein the observation window includes a transparent observation glass for observation operation, and a viewing angle expansion member for expanding the observation angle of the transparent observation glass.

Preferably, the vacuum reaction chamber comprises a first observation window, a second observation window and a third observation window, and the first observation window, the second observation window and the third observation window are respectively disposed on the three side walls of the reaction cavity.

Preferably, the viewing angle enlarging member includes a first convex lens and a second convex lens, the main optical axes of the first convex lens and the second convex lens are coincident, and the right focus of the first convex lens and the left focus of the second convex lens coincide.

Preferably, the viewing angle expanding member is detachably disposed on the side wall of the reaction chamber, and the viewing angle expanding member is movable back and forth with respect to the transparent observation glass.

The specific principle of use of the vacuum machine of the present invention is the same or similar to that described in the preferred embodiment of the vacuum reaction chamber of the vacuum machine described above. For details, please refer to the preferred embodiment of the vacuum reaction chamber of the vacuum machine. Related description.

The vacuum reaction chamber and the vacuum machine table of the vacuum machine of the present invention are provided with an observation window having a viewing angle enlargement member on the side wall of the reaction chamber, thereby facilitating the observation operation of the vacuum reaction chamber and reducing the number of times of the shutdown observation operation, thereby The production efficiency of the vacuum machine is improved, the waste capacity of the vacuum machine is avoided, and the technical problems of the vacuum reaction chamber of the vacuum machine and the vacuum machine are inefficient and the production capacity is wasted.

In the above, the present invention has been disclosed in the above preferred embodiments, but the preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various modifications without departing from the spirit and scope of the invention. The invention is modified and retouched, and the scope of the invention is defined by the scope defined by the claims.

Claims

A vacuum reaction chamber of a vacuum machine, comprising:

a reaction chamber comprising a receiving space formed by four side walls, a top wall and a bottom wall;

a carrier substrate disposed in a middle portion of the bottom wall of the reaction chamber for carrying a substrate to be processed;

An observation window disposed on the sidewall of the reaction chamber for observing the receiving space in the reaction chamber;

Wherein the observation window includes a transparent observation glass for an observation operation, and a viewing angle expansion member for expanding an observation angle of the transparent observation glass;

Wherein the viewing angle enlarging member includes a first convex lens and a second convex lens, the main optical axes of the first convex lens and the second convex lens are coincident, and the right focus of the first convex lens and the left focus of the second convex lens are coincident;

The viewing angle expanding member is movable back and forth with respect to the transparent observation glass.
A vacuum reaction chamber of a vacuum machine according to claim 1, wherein said vacuum reaction chamber includes a first observation window and a second observation window, said first observation window and said second observation window being respectively disposed in said On the opposite side walls of the reaction chamber.
The vacuum reaction chamber of a vacuum machine according to claim 1, wherein the vacuum reaction chamber comprises a first observation window, a second observation window, and a third observation window, the first observation window and the second observation window And the third observation window is respectively disposed on three sidewalls of the reaction cavity.
A vacuum reaction chamber for a vacuum machine according to claim 1, wherein said viewing angle expanding member is detachably disposed on said side wall of said reaction chamber.
A vacuum reaction chamber of a vacuum machine, comprising:

a reaction chamber comprising a receiving space formed by four side walls, a top wall and a bottom wall;

a carrier substrate disposed in a middle portion of the bottom wall of the reaction chamber for carrying a substrate to be processed;

An observation window disposed on the sidewall of the reaction chamber for observing the receiving space in the reaction chamber;

Wherein the observation window includes a transparent observation glass for an observation operation, and a viewing angle expansion member for expanding an observation angle of the transparent observation glass.
A vacuum reaction chamber of a vacuum machine according to claim 5, wherein said vacuum reaction chamber includes a first observation window and a second observation window, said first observation window and said second observation window being respectively disposed in said On the opposite side walls of the reaction chamber.
The vacuum reaction chamber of the vacuum machine of claim 5, wherein the vacuum reaction chamber comprises a first observation window, a second observation window, and a third observation window, the first observation window and the second observation window And the third observation window is respectively disposed on three sidewalls of the reaction cavity.
A vacuum reaction chamber of a vacuum machine according to claim 5, wherein said viewing angle enlarging member comprises a first convex lens and a second convex lens, the main optical axes of said first convex lens and said second convex lens being coincident.
A vacuum reaction chamber of a vacuum machine according to claim 8, wherein a right focus of the first convex lens and a left focus of the second convex lens coincide.
A vacuum reaction chamber of a vacuum machine according to claim 5, wherein said viewing angle enlarging member is movable back and forth with respect to said transparent observation glass.
A vacuum reaction chamber for a vacuum machine according to claim 5, wherein said viewing angle expanding member is detachably disposed on said side wall of said reaction chamber.
A vacuum machine comprising a vacuum reaction chamber and a reaction operating device; wherein the vacuum reaction chamber comprises:

a reaction chamber comprising a receiving space formed by four side walls, a top wall and a bottom wall;

a carrier substrate disposed in a middle portion of the bottom wall of the reaction chamber for carrying a substrate to be processed;

An observation window disposed on the sidewall of the reaction chamber for observing the receiving space in the reaction chamber;

Wherein the observation window includes a transparent observation glass for an observation operation, and a viewing angle expansion member for expanding an observation angle of the transparent observation glass.
The vacuum machine of claim 12, wherein the vacuum reaction chamber comprises a first observation window and a second observation window, the first observation window and the second observation window being respectively disposed in the reaction chamber Opposite the two side walls.
The vacuum machine of claim 12, wherein the vacuum reaction chamber comprises a first observation window, a second observation window, and a third observation window, the first observation window, the second observation window, and the first Three observation windows are respectively disposed on the three side walls of the reaction chamber.
The vacuum machine of claim 12, wherein the viewing angle enlarging member comprises a first convex lens and a second convex lens, the main optical axes of the first convex lens and the second convex lens being coincident.
The vacuum machine of claim 15, wherein the right focus of the first convex lens and the left focus of the second convex lens coincide.
A vacuum machine according to claim 12, wherein said viewing angle expanding member is detachably disposed on said side wall of said reaction chamber.
A vacuum machine according to claim 12, wherein said viewing angle enlarging member is movable back and forth with respect to said transparent observation glass.