WO2016068526A1 - Apparatus for monitoring processing state of wire saw and wire saw having same installed therein - Google Patents

Apparatus for monitoring processing state of wire saw and wire saw having same installed therein Download PDF

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Publication number
WO2016068526A1
WO2016068526A1 PCT/KR2015/010908 KR2015010908W WO2016068526A1 WO 2016068526 A1 WO2016068526 A1 WO 2016068526A1 KR 2015010908 W KR2015010908 W KR 2015010908W WO 2016068526 A1 WO2016068526 A1 WO 2016068526A1
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WO
WIPO (PCT)
Prior art keywords
axis
lower plate
ingot
upper plate
wire
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PCT/KR2015/010908
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French (fr)
Korean (ko)
Inventor
김성렬
김철민
황경환
김노원
허수미
정우창
Original Assignee
한국생산기술연구원
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Publication of WO2016068526A1 publication Critical patent/WO2016068526A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/08—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with saw-blades of endless cutter-type, e.g. chain saws, i.e. saw chains, strap saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work

Definitions

  • the present invention relates to a wire saw monitoring device that enables the rapid response of an operator in an abnormal state by monitoring a machining state by using an acoustic sensor and a load measuring sensor and determining the type of the abnormal state.
  • a wire saw is a processing apparatus which produces a large number of wafers at once by arranging a plurality of wire rows between main rollers and cutting ingots into a running wire.
  • Abnormal conditions such as wire break or ingot damage, may occur during processing by the wire saw, and if the machining is performed in such an abnormal state, expensive ingot materials may be wasted, and the equipment such as wire may be fatally damaged.
  • Korean Patent Application Laid-Open No. 10-2011-0118969 discloses an apparatus for monitoring a processing state in an apparatus for processing a brittle material such as wire saw.
  • the AE sensor 1 mounted on the brittle material chucking jig, the signal processing device 2 for converting the detection value by the AE sensor, and the processing state by the converted detection value are standard processing states. And monitoring means 3 for outputting together. As a result, the processing state of the brittle material can be monitored in real time.
  • the detection value by the AE sensor 1 is greatly affected by the detection value by the transmission of external vibration as well as the occurrence of an abnormal state of the processing during the processing of the brittle material, and only by the detection value detected by the AE sensor There is a problem that it is difficult to accurately determine the kind of abnormal state that occurs during processing.
  • Figure 2 is described in Korean Patent Registration Publication No. 195-0011754, which is attached to the tool (8) for processing the workpiece material 9, the AE sensor (5) for detecting the AE signal and the tool (8)
  • the present invention relates to a cutting state monitoring device capable of monitoring the state of the tool 8 by a tool dynamometer 6 measuring cutting force, and instructing an operation stop command when a tool breakdown occurs.
  • Such a conventional cutting state monitoring device relates to an NC cutting system, and is suitable for a cutting device in which turning is performed.
  • An object of the present invention is to provide a wire saw processing condition monitoring apparatus having a structure capable of more effectively monitoring an abnormal state occurring during processing of an ingot by installing a load measuring sensor together with an acoustic detection sensor in a wire saw, and a wire saw provided therewith. will be.
  • the present invention is coupled to the ingot jig attached to the ingot, the wire saw processing state monitoring device for monitoring the processing state of the ingot, coupled to the upper portion of the ingot jig or integrally formed with the ingot jig
  • the wire saw processing state monitoring device for monitoring the processing state of the ingot, coupled to the upper portion of the ingot jig or integrally formed with the ingot jig
  • a lower plate an upper plate positioned at an upper side of the lower plate at a predetermined interval from the lower plate, an acoustic sensor installed on the lower plate to detect sound, and installed on the lower plate or the upper plate
  • a load measuring sensor that senses the load transmitted by the lower plate during the processing of the ingot with the support of the upper plate, the lower plate maintains the upper plate and the set interval, and the lower plate is the upper plate by external force.
  • the underfloor in a state allowing access to the plate
  • a fastening means for fastening the upper plate and the upper plate to each other, and a controller for receiving a detection signal from the acoustic sensor and the load measuring sensor to determine whether there is an abnormality in the processing state, and the wire having the ingot located thereunder.
  • the preload in the vertical direction is applied to the sensing portion of the load measuring sensor receives a load to approach the lower plate to the upper plate.
  • the present invention is a wire in which a plurality of rows are formed to run in order to cut the ingot into a plurality of disk shape, an ingot jig attached to the lower surface of the ingot to be cut into the wire, coupled to the upper portion of the ingot jig
  • a wire saw comprising a machining condition monitoring device, wherein the processing condition monitoring device includes a lower plate coupled to an upper portion of the ingot jig or integrally formed with the ingot jig, and the lower plate at a predetermined interval from the lower plate.
  • An upper plate disposed at an upper side of the upper plate, an acoustic sensor installed on the lower plate to detect sound, and installed on the lower plate or the upper plate to receive a load received by the lower plate during processing of the ingot.
  • Load measuring sensor for sensing with the support of the lower plate is the upper play
  • fastening means for fastening the lower plate and the upper plate to each other while maintaining the set interval and allowing the lower plate to approach the upper plate by an external force, the sound sensor and the load measuring sensor.
  • a controller for determining whether there is an abnormality in the processing state by receiving a detection signal of the load sensor, when the ingot is cut into a wire located under the ingot, and receiving a load to approach the lower plate to the upper plate. It is characterized in that the preload in the vertical direction is applied to the detection unit.
  • a load sensor (Force sensor) is installed together with an acoustic sensor (AE sensor) to determine an abnormal condition during ingot cutting from the measured value, thereby more accurately and accurately identifying and monitoring an abnormal condition generated during processing. can do.
  • AE sensor acoustic sensor
  • a load measuring sensor that receives a supporting load by a wire in the process of ingot being pierced into a wire and measures a load between a lower plate and an upper plate is measured with a pre-loaded bar.
  • the load in the axial direction (up and down) can be measured both in the up direction (+) and in the down direction (-), so accurate monitoring can be achieved.
  • the elastic body provided between the upper plate and the lower plate, by absorbing the load transmitted to the lower plate by the cutting force for cutting the ingot into the wire and the support force of the wire by the elastic compression, the sensing unit of the load measuring sensor It is possible to prevent damage to the load measuring sensor by avoiding any load in the Z axis direction (up and down direction).
  • the fastening means is inserted into the fastening hole of the upper plate or the lower plate to fasten the upper plate and the lower plate, forming a gap with the fastening hole.
  • the lower plate is configured to be movable laterally with respect to the upper plate so that the fastening means does not interfere with the load measurement in the lateral direction (X-axis and Y-axis directions) of the three-axis load measuring sensor. Measurements of changes can be made accurately, and accurate judgments of abnormal conditions can be made.
  • the present invention specifically to the administrator, such as the warning about the torsion, wire wear, wire tension or z-axis feed state of the mechanical part based on the measured value of the acoustic sensor and load measurement sensor Informed managers will be able to respond quickly and take appropriate action during processing.
  • FIG. 1 is a block diagram of a device for monitoring a processing state in a device for processing a brittle material using a conventional AE sensor
  • Figure 2 is a configuration diagram of the cutting state monitoring device for monitoring the state of the tool by the conventional AE sensor and tool dynamometer
  • Figure 3 is an exploded perspective view showing the configuration of the processing state monitoring apparatus installed in the wire saw according to an embodiment of the present invention
  • FIG. 4 is a cross-sectional configuration diagram showing a configuration of a processing state monitoring apparatus installed in a wire saw according to an embodiment of the present invention.
  • FIG. 5 is a cross-sectional configuration view showing a modified configuration of the processing state monitoring apparatus installed in the wire saw according to an embodiment of the present invention.
  • FIG. 6 is an explanatory diagram illustrating an operation of generating a load in the process of ingot cutting in the processing state monitoring device installed in the wire saw according to an embodiment of the present invention
  • Figure 7 is a block flow diagram illustrating the determination and control process of the controller in the processing state monitoring apparatus installed in the wire saw according to an embodiment of the present invention
  • 8A and 8B are explanatory diagrams for explaining a signal processing method for calculating the number of hits and the hit setting time width of an AE signal;
  • FIG. 9 is an explanatory diagram showing a generation pattern of an AE signal when a wire break occurs
  • 10 (a) and 10 (b) are exemplary diagrams illustrating a sudden event occurrence state and a continuous level increase state of an AE signal
  • Fig. 11 is an illustration of a range of mask and limit setting values for comparing the level patterns of the loads of the X, Y, and Z axes measured by the load measuring sensor during the machining of the wire saw.
  • the wire saw having a machining state monitoring apparatus according to an embodiment of the present invention
  • the ingot 15 to be cut into the wire 10 includes an ingot jig 20 attached to a lower surface, and a processing state monitoring value coupled to an upper portion of the ingot jig 20.
  • the wire 10 is to continue running to cut the ingot 15, it is installed so as to rotate a plurality of times between a plurality of main rollers arranged side by side. Accordingly, a plurality of wire rows parallel to each other are formed between the mail rollers, and the ingot 15 is cut into the wire 10 from the upper side thereof, so that the ingot 15 can be cut into a plurality of disk shapes.
  • the ingot 15 cut into the wire 10 is mounted on the ingot jig 20 positioned above the wire 10.
  • the ingot jig 20 is formed of a plate-like block and the ingot 15 is attached to the lower surface thereof, and the ingot 15 is fixed to the lower surface of the ingot jig 20 by an adhesive 21 such as wax.
  • the ingot 15 may have a cylindrical shape, a square pillar shape or an octagonal pillar shape as shown in the drawings of this embodiment.
  • the processing state monitoring device is coupled to the upper portion of the ingot jig 20, the wire 10 receives the sound and load generated due to the process of cutting the ingot 15 through the ingot jig 20, and transmitted It is a device to determine the abnormal state of machining from the received sound and load.
  • the processing state monitoring device of the lower plate 30 is coupled to the upper portion of the ingot jig 20 or integrally formed with the ingot jig 20 and the lower plate 30 at a predetermined interval.
  • An upper plate 40 positioned on the upper side, an acoustic sensor 51 installed on the lower plate 30 to detect sound, and an ingot 15 installed on the lower plate 30 or the upper plate 40.
  • the three-axis load measuring sensor 55 for detecting the load received by the lower plate 30 during the processing of the upper plate 40 in the three-axis direction
  • the lower plate 30 is the upper plate
  • Fastening means (61) for fastening the lower plate (30) and the upper plate (40) to each other while maintaining the set interval and the lower plate 30 by the external force to approach the upper plate 40 by the external force
  • a controller 70 for determining whether there is an abnormality in the machining state by receiving the detection signal of the sensor, and displaying means 75 for displaying the machining state according to the determination result of the controller 70.
  • the lower plate 30 is formed of a plate-like block is coupled to the bottom surface of the ingot jig 20 receives the sound and load from the ingot jig 20. It is preferable that the upper part of the ingot jig 20 is fixed to the lower surface of the lower plate 30 so that the sound is more smoothly transmitted, and the ingot jig 20 and the lower plate 30 are integrally formed. It is also possible to use the ingot jig 20 as the lower plate 30.
  • the upper plate 40 is located above the lower plate 30 at a predetermined interval from the lower plate 30, the upper plate 40 is also formed in the form of a plate-like block, the position by the frame of the wire saw Is supported.
  • the lower plate 30 is installed in the upper plate 40 in a locked state by the fastening means 61 while maintaining the set interval at the lower side.
  • the fastening means 61 is a lower plate in a state in which the lower plate 30 maintains the set interval with the upper plate 40 and allows the lower plate 30 to approach toward the upper plate 40 by an external force. 30 and the upper plate 40 is to fasten each other.
  • each fastening means 61 is installed at a plurality of positions, and each fastening means 61 is formed in a rod shape and is fixed to the lower plate 30 and the fastening hole of the upper plate 40. 46).
  • the lower plate 30 has a fixed spiral hole 36 so that the fastening means 61 can be fixed
  • the upper plate 40 has a fastening hole 46 at a position corresponding to the fixed spiral hole 36. ) Is formed so that the fastening means 61 passes through the fastening hole 46 of the upper plate 40 and is helically coupled to the fixed spiral hole 36 of the lower plate 30.
  • the fastening means 61 is formed with a head portion 61a at the upper end thereof so that the head portion 61a is caught in the upper plate 40. That is, the fastening hole 46 of the upper plate 40 has a head receiving portion 46a having a larger diameter so that the upper portion of the fastening hole 46 is caught so that the head 61a is fastened to the fastening hole 46. It may jam without falling out.
  • the fastening hole 46 is formed in a diameter larger than the diameter of the rod-like fastening means 61 so that the fastening means 61 has a gap (b) to the left and right, the fastening means 61 is the upper plate (
  • the lower plate 30 When the lower plate 30 is coupled to the lower plate 30 in a locked state, the lower plate 30 can move in the lateral direction (X-axis and Y-axis direction) with respect to the upper plate 40 in the range of the clearance b. .
  • the above-described configuration is a configuration in which the lower plate 30 is movable by both the fastening means 61 and the lower plate 30 can move both in the upper and left and right directions by external force while the lower plate 30 is suspended from the upper plate 40.
  • the configuration related to the fastening means 61 may be changed to the fastening means 61 is fixed to the upper plate 40.
  • the fastening means 61 are respectively installed in a plurality of positions, each fastening means 61 is formed in a rod shape is fixed to the upper plate (40 ') and the lower plate (30') Is inserted into the fastening hole 36, the lower end of the fastening means 61 is formed with a head portion 61a is installed so that the head portion 61a is caught in the lower plate (30).
  • the fastening hole 36 is formed to a diameter larger than the diameter of the rod-shaped fastening means 61 having a clearance, so that the lower plate 30 is configured to move laterally with respect to the upper plate 40 will be.
  • an elastic pad 80 which is an elastic body, is installed between the lower plate 30 and the upper plate 40.
  • the elastic pad 80 fills the set interval generated between the lower plate 30 and the upper plate 40 so that the lower plate 30 approaches the upper plate 40 when the lower pad 30 approaches the upper plate 40. Is preferably elastically compressed to bear the load.
  • the load applied to the upper plate 40 by the lower plate 30 by the bearing force of the wire 10 supporting the cut-in of the ingot 15 may act as a very large load, and the ingot 15 is cut off. Excessive load may be generated in the vertical direction (Z-axis direction) due to an abnormality of the transfer device. Accordingly, the load of the three-axis load measurement sensor 55, the sensing unit 55a may be responsible for damage to the three-axis load measurement sensor 55, the elastic pad 80 is elastically compressed the load This is to protect the three-axis load measurement sensor 55 by allowing only a part of the load to be transmitted to the three-axis load measurement sensor 55 to bear.
  • the acoustic sensor (AE sensor) 51 is a sensor for detecting the acoustic emission (Acoustic emission) signal generated by the process, is installed on the lower plate 30 ingot jig during the cutting process of the ingot 15 The sound transmitted through the 20 and the lower plate 30 is sensed.
  • the acoustic sensor 51 is embedded in the lower plate 30 at three positions forming an equilateral triangle with a plurality of positions, more preferably around the center of the lower plate 30. It is preferable to install.
  • the three-axis load measurement sensor (Force sensor) 55 is installed in the lower plate 30 and the sensing unit 55a formed in the upper portion of the sensor is installed in contact with the upper plate 40 ingot During the processing of 15, the lower plate 30 detects the load transmitted in three axes. Substantially, since the three-axis load measurement sensor 55 measures the load that pushes the three-axis load measurement sensor 55 to the upper plate 40, the lower plate 30 is supported by the upper plate 40 It can be said that the measurement of the axial load sensor 55 is made, the upper plate 40 in the fixed state for the X-axis and Y-axis also supports the three-axis load sensor 55 in the lateral direction It can be said that it is possible to measure.
  • the three axes are the X axis and the Y direction is perpendicular to the running direction of the wire 10 in which the ingot 15 is cut in the lateral direction.
  • the X axis and the Y axis The direction orthogonal to all is set to the Z axis. As shown in FIGS. 3 and 4, since the wire 10 travels in a direction perpendicular to the longitudinal direction of the ingot 15, cutting is performed, and thus, perpendicular to the longitudinal direction of the ingot 15 in the lateral direction of the lower plate.
  • the phosphorus direction is the X axis and the longitudinal direction of the ingot 15 is the Y axis, and the vertical direction is set to the Z axis because the vertical direction is perpendicular to both the X axis and the Y axis.
  • the controller 70 receives the detection signals of the acoustic sensor 51 and the three-axis load measuring sensor 55 to determine whether there is an abnormality in the processing state, and based on the determination result, the display means 75 and the wire saw This is the part that controls each device.
  • the display unit 75 receives the control signal of the controller 70 and displays the type of the abnormal state so as to warn the administrator to take an action according to the abnormal state.
  • the process of determining the abnormality of the processing state by receiving the detection signals of the acoustic sensor 51 and the 3-axis load measuring sensor 55 is shown in FIG. 7 and will be described later.
  • the ingot 15 and the ingot jig 20, the lower plate 30 and the upper plate 40 coupled thereto are lowered and cut into the wire 10 on which the ingot 15 travels.
  • the ingot 15 When the ingot 15 cuts into the wire 10 at a set speed toward the lower side and presses the wire 10, the ingot 15 receives the supporting force from the wire 10, and the wire 10 is the ingot 15.
  • the ingot jig 20 and the load supporting the lower plate 30 to which it is coupled is applied upwardly to the ingot 15.
  • the load is a load in the direction in which the lower plate 30 approaches the upper plate 40 in the normal processing state, compresses the elastic pad 80, and loads in the Z-axis direction to the triaxial load measuring sensor 55. Is measured.
  • This action allows the lower plate 30 to approach the upper plate 40 by an external force while the fastening means 61 is locked such that the lower plate 30 maintains the set interval with the upper plate 40. It is possible by the structure which is fastened with each other in the state to make.
  • the elastic pad 80 absorbs the load transmitted to the lower plate 30 by the compression force for cutting the ingot 15 into the wire 10 and the support force of the wire 10 by elastic compression, thereby causing the triaxial load.
  • the detection unit 55a of the measuring sensor 55 does not bear all the burden to prevent the breakage of the three-axis load measuring sensor 55.
  • the ingot 15 is biased in the direction in which the wire 10 travels due to the friction between the ingot 15 and the wire 10, so that the wire 10 travels in a lateral direction, that is,
  • the three-axis load measuring sensor 55 may detect the load transmitted from the wire 10 to the ingot 15 in the X axis direction.
  • the fastening hole 46 formed in the upper plate 40 is formed in a diameter larger than the diameter of the rod-like fastening means 61 is coupled to the ingot 15 because the fastening means 61 has a clearance (b) from side to side.
  • the three-axis load measuring sensor 55 can measure the load in the X-axis direction in the lateral direction without great interference from the upper plate 40.
  • the three-axis load measuring sensor 55 may measure the load in the Y-axis direction for the reasons described above.
  • the acoustic detection sensor 51 (AE sensor) is embedded in the lower plate 30, the sound generated in the process of the wire 10 cut the ingot 15 through the ingot 15 and the ingot jig 20. Since it is delivered to the lower plate 30 can be detected in real time.
  • the controller 70 receiving the AE signal and the load measurement signal by the three-axis load measurement sensor (Force sensor) 55 by the acoustic sensor 51 (AE sensor) according to an embodiment of the present invention
  • This section describes the process of identifying and controlling abnormal conditions that occur during the machining operation of wire saws.
  • the AE signal (sound value) and the force signal (load value) measured from the acoustic sensor 51 and the load measuring sensor 55 are transmitted to the controller 70 in real time. step)
  • the controller 70 converts the AE signal into a root mean square (RMS) (step S12), and compares the RMS value of the AE signal with a preset reference value (step S13). If the RMS value of the AE signal is smaller than the reference value, the process of acquiring the AE signal (sound value) and the force signal (load value) is repeated.
  • RMS root mean square
  • Step S15 If the RMS value of the AE signal is greater than or equal to the reference value, it is determined whether the event is a sudden event by acquiring the measured value of the AE signal during the set time before and after the measurement time.
  • Whether or not the event is a sudden event can be determined by checking whether the value of the AE signal measured value during the set time is generated temporarily (occurs after disappearing for less than the set time). Alternatively, it may be determined by determining whether a state in which the intensity change rate of the detection signal is greater than or equal to a set value occurs temporarily. Referring to FIG. 10, a case where an AE signal measured value greater than or equal to a set value k occurs temporarily, i.e., occurs during time intervals T1, T2 and T3 below a set time as a sudden event as shown in (a). If the value above the set value persists for a time T4 longer than the set time as shown in (b), it cannot be classified as a sudden event.
  • step S16-S17 if the number of hits, which is the number of peak signals, is smaller than the number of hits set (steps S16-S17), a warning about the abnormal state of processing is displayed on the display means 75 (S18). Step) If the number of hits is equal to or greater than the number of hits set, it is determined whether the hit width is smaller than the set time width (step S19).
  • FIG. 8A A processing method for analyzing the AE signal and calculating the number of hits is illustrated in FIG. 8A, and a processing method for calculating the hit width is illustrated in FIG. 8B.
  • the display unit 75 warns of an abnormality of the wire 10 or the ingot 15 (step S20).
  • the display means 75 is displayed by disconnection of the wire 10, and then the operation of the entire wire saw equipment is stopped. (Step S21)
  • FIG. As the AE signal is shown, it can be seen that the number of hits is relatively large and the hit duration T is relatively long.
  • Step S31 As a result of determining whether the event is a sudden event among the above-described steps, if it is determined that the event is not a sudden event, it is determined whether the measured value of the AE signal during the set time is a continuous level rise.
  • the initial steps of acquiring the AE signal and the force signal are repeated again.
  • the continuous level rise determines whether the continuous rise of the AE signal measured value occurs over time during the set time, and the level pattern of the AE signal is illustrated in FIG.
  • step S32 If the measured value of the AE signal during the set time is continuously rising, the level pattern of the X and Y axes of the force signal is compared with the mask & limit setting value (step S32).
  • the level pattern of the X-axis and Y-axis of the force signal is a form in which the level of the force signal measured for a predetermined time with respect to the X-axis and the Y-axis, respectively, is changed, and the mask & limit setting value is determined using a conventional mask & limit test method.
  • the boundary area where the force signal pattern should be maintained for each of the X and Y axes is set in advance.
  • FIG. 11 shows an example in which a mask and limit setting value is set for the X, Y, and Z axes of the wire saw (set so as to be within a dotted line with a dotted line).
  • the torsion may be caused by excessive force in the X or Y axis direction in the mechanism for cutting the wire saw. It is displayed on the display means 75 that it has occurred (step S34).
  • the Z and Y level patterns of the force signal are compared with the mask and limit setting values for the Z axis. step)
  • Step S42 If the X-axis and Y-axis level patterns measured by the three-axis load measuring sensor 55 are within the range of the mask and limit setting value, and the Z-axis pattern of the force signal is within the mask & limit setting value (Ste S42), the manager warns about the wire wear state through the display means 75 to pay attention (step S43).
  • the mechanical part for cutting the wire saw receives excessive force in the vertical direction, which is the Z axis, and thus the wire tension through the display means 75. Or warns that there is an error in the z-axis feed state.
  • the machining condition monitoring device can be quickly applied to the wire saw for cutting the ingot, thereby promptly informing the manager of an abnormal condition occurring during the processing of the wire saw. This allows the wire work and the maintenance of the wire saw to be carried out very efficiently, it can be very useful in connection with the wire saw.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

The present invention relates to a monitoring apparatus of a wire saw for monitoring processing state and discriminating abnormal state type by using an acoustic detection sensor and a load measuring sensor. The present invention comprises: an upper plate located above a lower plate at a preset interval from the lower plate; an acoustic detection sensor, installed on the lower plate, for detecting sounds; a load measuring sensor, installed in the lower plate or the upper plate, for detecting a load which is applied to the lower plate; a fastening means for fastening together the lower plate and the upper plate in a state allowing the lower plate to get closer to the upper plate by means of an external force while maintaining the preset interval from the upper plate; and a controller for determining abnormality in a processing state by receiving detection signals of the acoustic detection sensor and the load measuring sensor.

Description

와이어소 가공상태 감시장치 및 그것이 설치된 와이어소Wire saw processing condition monitoring device and wire saw installed
본 발명은 음향감지센서 및 하중측정센서를 이용하여 가공상태를 감시하고 이상상태의 종류를 판별함으로써, 이상상태시 작업자의 신속한 대처가 가능하도록 하는 와이어소의 감시장치에 관한 것이다.The present invention relates to a wire saw monitoring device that enables the rapid response of an operator in an abnormal state by monitoring a machining state by using an acoustic sensor and a load measuring sensor and determining the type of the abnormal state.
와이어소는 메인롤러 사이에 복수의 와이어열을 배치하고 주행하는 와이어에 잉곳을 절입함으로써 한번에 많은 수의 웨이퍼를 생산하는 가공장치이다.A wire saw is a processing apparatus which produces a large number of wafers at once by arranging a plurality of wire rows between main rollers and cutting ingots into a running wire.
와이어소에 의해 이루어지는 가공 중에 와이어단선, 잉곳손상 등과 같은 이상상태가 발생할 수 있고, 그러한 이상상태에서 가공이 이루어지면 고가의 잉곳소재를 낭비하게 되고, 와이어 등 장비에도 치명적 손상을 입히게 된다.Abnormal conditions, such as wire break or ingot damage, may occur during processing by the wire saw, and if the machining is performed in such an abnormal state, expensive ingot materials may be wasted, and the equipment such as wire may be fatally damaged.
따라서, 이상상태를 조기에 감지하고 작동을 정지시키거나 별도 조치를 취함으로써 잉곳 및 장비의 손상을 방지하고 작업을 효율적으로 진행시킬 수 있다.Therefore, by detecting abnormal conditions early and stopping the operation or taking separate measures, it is possible to prevent damage to the ingot and the equipment and to proceed with the work efficiently.
도 1은 한국공개특허 제10-2011-0118969호에 기재된 것으로서, 와이어소와 같이 취성재료를 가공하는 장치에서 가공상태를 감시하기 위한 장치가 개시되어 있다.1 is disclosed in Korean Patent Application Laid-Open No. 10-2011-0118969, which discloses an apparatus for monitoring a processing state in an apparatus for processing a brittle material such as wire saw.
도 1을 참조하면, 취성재료 척킹지그에 장착되는 AE센서(1), 그 AE센서에 의한 감지값을 변환하는 신호처리장치(2)와, 그 변환된 감지값에 의한 가공상태를 표준가공상태와 함께 출력하는 감시수단(3)을 포함한다. 이에 따라, 취성재료의 가공상태를 실시간으로 감시할 수 있다.Referring to FIG. 1, the AE sensor 1 mounted on the brittle material chucking jig, the signal processing device 2 for converting the detection value by the AE sensor, and the processing state by the converted detection value are standard processing states. And monitoring means 3 for outputting together. As a result, the processing state of the brittle material can be monitored in real time.
그러나, AE센서(1)에 의한 감지값은 취성재료의 가공 중 그 가공의 이상상태 발생 뿐 아니라, 외부 진동의 전달에 의해서도 그 감지값에 큰 영향을 받게 되고, AE센서가 감지한 감지값만으로는 가공 중 발생한 이상상태의 종류에 대하여 정확히 판별하기 어려운 문제가 있다.However, the detection value by the AE sensor 1 is greatly affected by the detection value by the transmission of external vibration as well as the occurrence of an abnormal state of the processing during the processing of the brittle material, and only by the detection value detected by the AE sensor There is a problem that it is difficult to accurately determine the kind of abnormal state that occurs during processing.
한편, 도 2는 한국특허등록공고 특1995-0011754호에 기재된 것으로서, 피삭재료(9)를 가공하는 공구(8)에 부착되어 AE신호를 감지하는 AE센서(5)와, 공구(8)의 절삭력을 측정하는 공구동력계(6)에 의해 공구(8)의 상태를 감시하고, 공구파괴가 발생하면 작동정지명령을 내릴 수 있는 절삭상태 모니터링장치에 관한 것이다.On the other hand, Figure 2 is described in Korean Patent Registration Publication No. 195-0011754, which is attached to the tool (8) for processing the workpiece material 9, the AE sensor (5) for detecting the AE signal and the tool (8) The present invention relates to a cutting state monitoring device capable of monitoring the state of the tool 8 by a tool dynamometer 6 measuring cutting force, and instructing an operation stop command when a tool breakdown occurs.
그러한 종래의 절삭상태 모니터링장치는 NC절삭시스템에 관한 것으로서, 선삭이 이루어지는 절삭장치에 적합한 구성이다.Such a conventional cutting state monitoring device relates to an NC cutting system, and is suitable for a cutting device in which turning is performed.
그러나, 취성재료인 잉곳을 다수의 웨이퍼로 절단하는 와이어소의 경우에는 절단가공에 따른 하중의 발생방향이 선삭의 경우와 차이가 있고, 가공불량의 형태도 선삭을 위한 절삭장치와는 큰 차이가 있는 바, AE센서와 하중측정센서를 함께 사용하여 와이어소의 가공불량상태를 감시하기 위해서는 이상상태를 정확히 감시할 수 있도록 개선된 구조가 필요하다.However, in the case of a wire saw cutting ingots, which are brittle materials, into a plurality of wafers, the direction of load generation due to the cutting process is different from that of turning, and the shape of the machining defect is also significantly different from that of the cutting device for turning. In order to monitor the abnormal condition of wire saw by using AE sensor and load measuring sensor together, improved structure is needed to monitor abnormal condition accurately.
본 발명의 목적은 음향감지센서와 더불어 하중측정센서를 와이어소에 설치함으로써 잉곳의 가공중 발생하는 이상상태를 보다 효과적으로 감시할 수 있는 구조의 와이어소 가공상태 감시장치 및 그것이 설치된 와이어소를 제공하는 것이다.SUMMARY OF THE INVENTION An object of the present invention is to provide a wire saw processing condition monitoring apparatus having a structure capable of more effectively monitoring an abnormal state occurring during processing of an ingot by installing a load measuring sensor together with an acoustic detection sensor in a wire saw, and a wire saw provided therewith. will be.
이에 따라 본 발명은, 잉곳이 하부에 부착되는 잉곳지그에 결합되어, 잉곳의 가공상태를 감시하기 위한 와이어소 가공상태 감시장치에 있어서, 상기 잉곳지그의 상부에 결합되거나 상기 잉곳지그와 일체로 형성되는 하부플레이트와, 상기 하부플레이트와 설정간격을 두고 상기 하부플레이트의 상측에 위치하는 상부플레이트와, 상기 하부플레이트에 설치되어 음향을 감지하는 음향감지센서와, 상기 하부플레이트 또는 상기 상부플레이트에 설치되어 상기 잉곳의 가공중 상기 하부플레이트가 전달받는 하중을 상기 상부플레이트의 지지를 받아 감지하는 하중측정센서와, 상기 하부플레이트가 상기 상부플레이트와 상기 설정간격을 유지하고 외력에 의해 상기 하부플레이트가 상기 상부플레이트를 향해 접근하는 것을 허용하는 상태로 상기 하부플레이트와 상기 상부플레이트를 서로 체결하는 체결수단과, 상기 음향감지센서와 상기 하중측정센서의 감지신호를 전송받아 가공상태의 이상유무를 판단하는 컨트롤러를 포함하며, 상기 잉곳이 그 하측에 위치하는 와이어에 절입시, 상기 하부플레이트를 상기 상부플레이트로 접근시키려는 하중을 받아 상기 하중측정센서의 감지부에 상하방향의 예압을 가하게 되는 것을 특징으로 한다.Accordingly, the present invention is coupled to the ingot jig attached to the ingot, the wire saw processing state monitoring device for monitoring the processing state of the ingot, coupled to the upper portion of the ingot jig or integrally formed with the ingot jig A lower plate, an upper plate positioned at an upper side of the lower plate at a predetermined interval from the lower plate, an acoustic sensor installed on the lower plate to detect sound, and installed on the lower plate or the upper plate A load measuring sensor that senses the load transmitted by the lower plate during the processing of the ingot with the support of the upper plate, the lower plate maintains the upper plate and the set interval, and the lower plate is the upper plate by external force. The underfloor in a state allowing access to the plate A fastening means for fastening the upper plate and the upper plate to each other, and a controller for receiving a detection signal from the acoustic sensor and the load measuring sensor to determine whether there is an abnormality in the processing state, and the wire having the ingot located thereunder. When cutting in, it is characterized in that the preload in the vertical direction is applied to the sensing portion of the load measuring sensor receives a load to approach the lower plate to the upper plate.
다른 관점에서 본 발명은 잉곳을 다수의 디스크형태로 절단하기 위해 다수의 열이 형성되어 주행하는 와이어와, 상기 와이어에 절입될 잉곳이 하면에 부착된 잉곳지그와, 상기 잉곳지그의 상부에 결합되는 가공상태감시장치를 포함하는 와이어소에 있어서, 상기 가공상태감시장치는, 상기 잉곳지그의 상부에 결합되거나 상기 잉곳지그와 일체로 형성되는 하부플레이트와, 상기 하부플레이트와 설정간격을 두고 상기 하부플레이트의 상측에 위치하는 상부플레이트와, 상기 하부플레이트에 설치되어 음향을 감지하는 음향감지센서와, 상기 하부플레이트 또는 상기 상부플레이트에 설치되어 상기 잉곳의 가공 중 상기 하부플레이트가 전달받는 하중을 상기 상부플레이트의 지지를 받아 감지하는 하중측정센서와, 상기 하부플레이트가 상기 상부플레이트와 상기 설정간격을 유지하고 외력에 의해 상기 하부플레이트가 상기 상부플레이트를 향해 접근하는 것을 허용하는 상태로 상기 하부플레이트와 상기 상부플레이트를 서로 체결하는 체결수단과, 상기 음향감지센서와 상기 하중측정센서의 감지신호를 전송받아 가공상태의 이상유무를 판단하는 컨트롤러를 포함하되, 상기 잉곳이 그 하측에 위치하는 와이어에 절입시, 상기 하부플레이트를 상기 상부플레이트로 접근시키려는 하중을 받아 상기 하중측정센서의 감지부에 상하방향의 예압을 가하게 되는 것을 특징으로 한다.In another aspect, the present invention is a wire in which a plurality of rows are formed to run in order to cut the ingot into a plurality of disk shape, an ingot jig attached to the lower surface of the ingot to be cut into the wire, coupled to the upper portion of the ingot jig A wire saw comprising a machining condition monitoring device, wherein the processing condition monitoring device includes a lower plate coupled to an upper portion of the ingot jig or integrally formed with the ingot jig, and the lower plate at a predetermined interval from the lower plate. An upper plate disposed at an upper side of the upper plate, an acoustic sensor installed on the lower plate to detect sound, and installed on the lower plate or the upper plate to receive a load received by the lower plate during processing of the ingot. Load measuring sensor for sensing with the support of the lower plate is the upper play And fastening means for fastening the lower plate and the upper plate to each other while maintaining the set interval and allowing the lower plate to approach the upper plate by an external force, the sound sensor and the load measuring sensor. And a controller for determining whether there is an abnormality in the processing state by receiving a detection signal of the load sensor, when the ingot is cut into a wire located under the ingot, and receiving a load to approach the lower plate to the upper plate. It is characterized in that the preload in the vertical direction is applied to the detection unit.
본 발명은 음향감지센서(AE센서)와 더불어 하중측정센서(Force센서)를 함께 설치하여 그 측정값으로부터 잉곳절단가공 중의 이상상태를 판단하고 있으므로 가공중 발생하는 이상상태를 보다 효과적으로 정확히 판별하고 감시할 수 있다.According to the present invention, a load sensor (Force sensor) is installed together with an acoustic sensor (AE sensor) to determine an abnormal condition during ingot cutting from the measured value, thereby more accurately and accurately identifying and monitoring an abnormal condition generated during processing. can do.
특히, 본 발명은 잉곳이 와이어에 절입되는 과정에서 와이어에 의해 지지하중을 받아 하부플레이트와 상부플레이트 사이에서 하중을 측정하는 하중측정센서가 예압을 받은 상태로 측정이 이루어지는 바, 가공중 발생하는 Z축방향(상하방향)의 하중을 상측방향(+)과 하측방향(-)에 대하여 모두 측정이 가능하여 정확한 감시가 이루어질 수 있다.Particularly, in the present invention, a load measuring sensor that receives a supporting load by a wire in the process of ingot being pierced into a wire and measures a load between a lower plate and an upper plate is measured with a pre-loaded bar. The load in the axial direction (up and down) can be measured both in the up direction (+) and in the down direction (-), so accurate monitoring can be achieved.
또한, 본 발명은 상부플레이트와 하부플레이트 사이에 설치된 탄성체가, 와이어로 잉곳을 절입시키는 절입력 및 와이어의 지지력에 의해 하부플레이트에 전달되는 하중을 탄성압축에 의해 흡수함으로써, 하중측정센서의 감지부가 Z축방향(상하방향)의 하중을 모두 부담하지 않도록 하여 그 하중측정센서의 파손을 방지할 수 있다.In addition, according to the present invention, the elastic body provided between the upper plate and the lower plate, by absorbing the load transmitted to the lower plate by the cutting force for cutting the ingot into the wire and the support force of the wire by the elastic compression, the sensing unit of the load measuring sensor It is possible to prevent damage to the load measuring sensor by avoiding any load in the Z axis direction (up and down direction).
또한, 본 발명은 체결수단이 상부플레이트 또는 하부플레이트의 체결공에 삽입되어 상부플레이트와 하부플레이트를 체결함에 있어서, 체결공과 유격을 형성하고 있다. 이는, 하부플레이트가 상부플레이트에 대하여 측방향으로 이동가능하게 구성하여 체결수단이 3축 하중측정센서의 측방향(X축 및 Y축방향)의 하중측정을 방해하지 않는 구조이므로, 그 측방향 하중변화에 대한 측정이 정확히 이루어질 수 있고, 이상상태에 대한 정확한 판단이 이루어질 수 있다.In addition, in the present invention, the fastening means is inserted into the fastening hole of the upper plate or the lower plate to fasten the upper plate and the lower plate, forming a gap with the fastening hole. This is because the lower plate is configured to be movable laterally with respect to the upper plate so that the fastening means does not interfere with the load measurement in the lateral direction (X-axis and Y-axis directions) of the three-axis load measuring sensor. Measurements of changes can be made accurately, and accurate judgments of abnormal conditions can be made.
또한, 본 발명은 음향감지센서와 하중측정센서의 측정값을 바탕으로 와이어소의 가공중 발생하는 이상상태를 기구부의 비틀림, 와이어 마모, 와이어텐션 또는 z축 이송상태에 관한 경고 등으로 구체적으로 관리자에게 통지하고 있는 바, 관리자가 가공중 이상상황에 신속히 대처하고 적절한 조치를 취할 수 있게 한다.In addition, the present invention specifically to the administrator, such as the warning about the torsion, wire wear, wire tension or z-axis feed state of the mechanical part based on the measured value of the acoustic sensor and load measurement sensor Informed managers will be able to respond quickly and take appropriate action during processing.
도 1은 종래 AE센서를 이용하여 취성재료를 가공하는 장치에서 가공상태를 감시하기 위한 장치의 블록구성도1 is a block diagram of a device for monitoring a processing state in a device for processing a brittle material using a conventional AE sensor
도 2는 종래 AE센서와 공구동력계에 의해 공구의 상태를 감시하는 절삭상태 모니터링장치의 구성설명도Figure 2 is a configuration diagram of the cutting state monitoring device for monitoring the state of the tool by the conventional AE sensor and tool dynamometer
도 3은 본 발명의 실시예에 따른 와이어소에 설치되는 가공상태 감시장치의 구성을 도시하는 분해사시도Figure 3 is an exploded perspective view showing the configuration of the processing state monitoring apparatus installed in the wire saw according to an embodiment of the present invention
도 4는 본 발명의 실시예에 따른 와이어소에 설치되는 가공상태 감시장치의 구성을 도시하는 단면구성도4 is a cross-sectional configuration diagram showing a configuration of a processing state monitoring apparatus installed in a wire saw according to an embodiment of the present invention.
도 5는 본 발명의 실시예에 따른 와이어소에 설치되는 가공상태 감시장치의 변형된 구성을 도시하는 단면구성도5 is a cross-sectional configuration view showing a modified configuration of the processing state monitoring apparatus installed in the wire saw according to an embodiment of the present invention.
도 6은 본 발명의 실시예에 따른 와이어소에 설치되는 가공상태 감시장치에서 잉곳절단이 이루어지는 과정에서 하중이 발생하는 작용을 설명하는 설명도6 is an explanatory diagram illustrating an operation of generating a load in the process of ingot cutting in the processing state monitoring device installed in the wire saw according to an embodiment of the present invention;
도 7은 본 발명의 실시예에 따른 와이어소에 설치되는 가공상태 감시장치에서 컨트롤러의 판단 및 제어과정을 설명하는 블록순서도Figure 7 is a block flow diagram illustrating the determination and control process of the controller in the processing state monitoring apparatus installed in the wire saw according to an embodiment of the present invention
도 8의 (a) 및 (b)는 AE신호의 Hit 개수 및 Hit 설정시간폭을 산출하는 신호처리방식을 설명하는 설명도8A and 8B are explanatory diagrams for explaining a signal processing method for calculating the number of hits and the hit setting time width of an AE signal;
도 9는 와이어 단선이 발생한 경우의 AE신호의 발생패턴을 도시하는 설명도9 is an explanatory diagram showing a generation pattern of an AE signal when a wire break occurs;
도 10의 (a) 및 (b)는 AE신호의 급격한 이벤트발생 상태와 연속적 레벨상승 상태를 나타내는 예시도10 (a) and 10 (b) are exemplary diagrams illustrating a sudden event occurrence state and a continuous level increase state of an AE signal;
도 11은 와이어소의 가공과정 중 하중측정센서가 측정한 X축, Y축, Z축의 하중의 레벨패턴을 비교하기 위한 마스크앤리미트설정값의 범위에 대한 예시도Fig. 11 is an illustration of a range of mask and limit setting values for comparing the level patterns of the loads of the X, Y, and Z axes measured by the load measuring sensor during the machining of the wire saw.
본 발명의 실시예를 도면을 참고하여 보다 상세하게 설명한다.An embodiment of the present invention will be described in more detail with reference to the drawings.
도 3 및 도 4를 참고하면, 본 발명의 실시예에 따른 가공상태 감시장치를 구비한 와이어소는, 잉곳(15)을 다수의 디스크형태로 절단하기 위해 다수의 열이 형성되어 주행하는 와이어(10)와, 상기 와이어(10)에 절입될 잉곳(15)이 하면에 부착되는 잉곳지그(20)와, 상기 잉곳지그(20)의 상부에 결합되는 가공상태감시장치를 포함한다.3 and 4, the wire saw having a machining state monitoring apparatus according to an embodiment of the present invention, the wire in which a plurality of rows are formed to run in order to cut the ingot 15 into a plurality of disk form ( 10), the ingot 15 to be cut into the wire 10 includes an ingot jig 20 attached to a lower surface, and a processing state monitoring value coupled to an upper portion of the ingot jig 20.
상기 와이어(10)는 잉곳(15)을 절단하기 위해 지속적으로 주행하는 것으로서, 서로 나란히 배열되는 복수의 메인롤러 사이를 복수회 감아 돌도록 설치한다. 이에 따라 메일롤러 사이에서 서로 나란한 다수의 와이어 열이 형성되고, 그 와이어(10)에 잉곳(15)이 상측에서부터 절입됨으로써 잉곳(15)이 다수의 디스크형태로 절단될 수 있다.The wire 10 is to continue running to cut the ingot 15, it is installed so as to rotate a plurality of times between a plurality of main rollers arranged side by side. Accordingly, a plurality of wire rows parallel to each other are formed between the mail rollers, and the ingot 15 is cut into the wire 10 from the upper side thereof, so that the ingot 15 can be cut into a plurality of disk shapes.
상기 와이어(10)에 절입되는 잉곳(15)은 와이어(10)의 상측에 위치하는 잉곳지그(20)에 장착된다. The ingot 15 cut into the wire 10 is mounted on the ingot jig 20 positioned above the wire 10.
상기 잉곳지그(20)는 판상블록으로 형성되고 그 하면에 잉곳(15)이 부착되는 것으로서, 잉곳(15)은 왁스와 같은 접착제(21)에 의해 잉곳지그(20) 하면에 고정된 상태이다.The ingot jig 20 is formed of a plate-like block and the ingot 15 is attached to the lower surface thereof, and the ingot 15 is fixed to the lower surface of the ingot jig 20 by an adhesive 21 such as wax.
상기 잉곳(15)은 원주형상, 사각기둥형상 또는 본 실시예의 도면에 도시된 바와 같은 팔각기둥형상이 될 수 있다.The ingot 15 may have a cylindrical shape, a square pillar shape or an octagonal pillar shape as shown in the drawings of this embodiment.
상기 가공상태감시장치는 잉곳지그(20)의 상부에 결합되는 것으로서, 와이어(10)가 잉곳(15)을 절단하는 가공으로 인해 발생하는 음향 및 하중을 잉곳지그(20)를 통해 전달받고, 전달받은 음향 및 하중으로부터 가공의 이상상태를 판별하는 장치이다.The processing state monitoring device is coupled to the upper portion of the ingot jig 20, the wire 10 receives the sound and load generated due to the process of cutting the ingot 15 through the ingot jig 20, and transmitted It is a device to determine the abnormal state of machining from the received sound and load.
상기 가공상태감시장치는 잉곳지그(20)의 상부에 결합되거나 잉곳지그(20)와 일체로 형성되는 하부플레이트(30)와, 상기 하부플레이트(30)와 설정간격을 두고 하부플레이트(30)의 상측에 위치하는 상부플레이트(40)와, 상기 하부플레이트(30)에 설치되어 음향을 감지하는 음향감지센서(51)와, 상기 하부플레이트(30) 또는 상부플레이트(40)에 설치되어 잉곳(15)의 가공 중 하부플레이트(30)가 전달받는 하중을 상기 상부플레이트(40)의 지지를 받아 3축방향에서 감지하는 3축 하중측정센서(55)와, 상기 하부플레이트(30)가 상부플레이트(40)와 설정간격을 유지하고 외력에 의해 하부플레이트(30)가 상부플레이트(40)를 향해 접근하는 것을 허용하는 상태로 하부플레이트(30)와 상부플레이트(40)를 서로 체결하는 체결수단(61)과, 상기 음향감지센서(51)와 3축 하중측정센서(55)의 감지신호를 전송받아 가공상태의 이상유무를 판단하는 컨트롤러(70), 및 그 컨트롤러(70)의 판단결과에 따라 가공상태를 표시하는 표시수단(75)을 포함한다.The processing state monitoring device of the lower plate 30 is coupled to the upper portion of the ingot jig 20 or integrally formed with the ingot jig 20 and the lower plate 30 at a predetermined interval. An upper plate 40 positioned on the upper side, an acoustic sensor 51 installed on the lower plate 30 to detect sound, and an ingot 15 installed on the lower plate 30 or the upper plate 40. 3) the three-axis load measuring sensor 55 for detecting the load received by the lower plate 30 during the processing of the upper plate 40 in the three-axis direction, and the lower plate 30 is the upper plate ( Fastening means (61) for fastening the lower plate (30) and the upper plate (40) to each other while maintaining the set interval and the lower plate 30 by the external force to approach the upper plate 40 by the external force ), The sound sensor 51 and the three-axis load measurement sensor (55) And a controller 70 for determining whether there is an abnormality in the machining state by receiving the detection signal of the sensor, and displaying means 75 for displaying the machining state according to the determination result of the controller 70.
상기 하부플레이트(30)는 판상블록으로 형성되어 그 하면에 잉곳지그(20)가 결합됨으로써 잉곳지그(20)로부터 음향 및 하중을 전달받는다. 음향의 전달이 보다 원활할 수 있도록 하부플레이트(30)의 하면에 잉곳지그(20)의 상부가 밀착된 상태로 고정되는 것이 바람직하고, 잉곳지그(20)와 하부플레이트(30)를 일체로 하여 잉곳지그(20)를 하부플레이트(30)로 사용하는 것도 가능하다.The lower plate 30 is formed of a plate-like block is coupled to the bottom surface of the ingot jig 20 receives the sound and load from the ingot jig 20. It is preferable that the upper part of the ingot jig 20 is fixed to the lower surface of the lower plate 30 so that the sound is more smoothly transmitted, and the ingot jig 20 and the lower plate 30 are integrally formed. It is also possible to use the ingot jig 20 as the lower plate 30.
상기 상부플레이트(40)는 하부플레이트(30)와 설정간격을 두고 하부플레이트(30)의 상측에 위치하는 것으로서, 상부플레이트(40)도 판상블록의 형태로 형성되고, 와이어소의 프레임에 의해 그 위치가 지지된다.The upper plate 40 is located above the lower plate 30 at a predetermined interval from the lower plate 30, the upper plate 40 is also formed in the form of a plate-like block, the position by the frame of the wire saw Is supported.
상부플레이트(40)에는 체결수단(61)에 의해 하부플레이트(30)가 하측에서 설정간격을 유지하면서 걸린 상태로 설치된다.The lower plate 30 is installed in the upper plate 40 in a locked state by the fastening means 61 while maintaining the set interval at the lower side.
상기 체결수단(61)은 하부플레이트(30)가 상부플레이트(40)와 상기 설정간격을 유지하고 외력에 의해 하부플레이트(30)가 상부플레이트(40)를 향해 접근하는 것을 허용하는 상태로 하부플레이트(30)와 상부플레이트(40)를 서로 체결하는 것이다.The fastening means 61 is a lower plate in a state in which the lower plate 30 maintains the set interval with the upper plate 40 and allows the lower plate 30 to approach toward the upper plate 40 by an external force. 30 and the upper plate 40 is to fasten each other.
보다 상세하게는 상기 체결수단(61)은 복수개가 다수의 위치에 설치되는 것으로서, 각 체결수단(61)은 봉형상으로 형성되어 하부플레이트(30)에 고정되고 상부플레이트(40)의 체결공(46)에 삽입된다.In more detail, the plurality of fastening means 61 is installed at a plurality of positions, and each fastening means 61 is formed in a rod shape and is fixed to the lower plate 30 and the fastening hole of the upper plate 40. 46).
이를 위해 하부플레이트(30)는 체결수단(61)이 고정될 수 있도록 고정나선공(36)이 형성되고, 상부플레이트(40)는 그 고정나선공(36)에 대응하는 위치에 체결공(46)이 형성됨으로써 체결수단(61)이 상부플레이트(40)의 체결공(46)을 통과하여 하부플레이트(30)의 고정나선공(36)에 나선결합된다.To this end, the lower plate 30 has a fixed spiral hole 36 so that the fastening means 61 can be fixed, and the upper plate 40 has a fastening hole 46 at a position corresponding to the fixed spiral hole 36. ) Is formed so that the fastening means 61 passes through the fastening hole 46 of the upper plate 40 and is helically coupled to the fixed spiral hole 36 of the lower plate 30.
또한, 체결수단(61)에는 상단에 머리부(61a)가 형성되어 그 머리부(61a)가 상기 상부플레이트(40)에 걸린 상태가 된다. 즉, 상부플레이트(40)의 체결공(46)은 상기 머리부(61a)가 걸림되도록 상부가 더 큰 직경으로 머리부수용부(46a)가 형성되어 머리부(61a)가 체결공(46)에 빠지지 않고 걸림될 수 있다.In addition, the fastening means 61 is formed with a head portion 61a at the upper end thereof so that the head portion 61a is caught in the upper plate 40. That is, the fastening hole 46 of the upper plate 40 has a head receiving portion 46a having a larger diameter so that the upper portion of the fastening hole 46 is caught so that the head 61a is fastened to the fastening hole 46. It may jam without falling out.
또한, 상기 체결공(46)은 봉형상인 체결수단(61)의 직경보다 큰 직경으로 형성되어 체결수단(61)이 좌우로 유격(b)을 가지도록 함으로써, 체결수단(61)이 상부플레이트(40)에 걸린 상태에서 하부플레이트(30)에 결합되면 하부플레이트(30)가 상부플레이트(40)에 대하여 측방향(X축 및 Y축방향)으로 상기 유격(b)의 범위에서 움직일 수 있도록 한다.In addition, the fastening hole 46 is formed in a diameter larger than the diameter of the rod-like fastening means 61 so that the fastening means 61 has a gap (b) to the left and right, the fastening means 61 is the upper plate ( When the lower plate 30 is coupled to the lower plate 30 in a locked state, the lower plate 30 can move in the lateral direction (X-axis and Y-axis direction) with respect to the upper plate 40 in the range of the clearance b. .
이는 하부플레이트(30)에 작용하는 측방향의 하중을 상기 체결수단(61)이 모두 담당하지 않도록 함으로써, 3축 하중측정센서(55)의 감지부(55a)에 측방향의 하중이 전달되어 3축 하중측정센서(55)가 X축 또는 Y축인 측방향으로 작용하는 하중을 측정할 수 있도록 하기 위함이다.This means that the fastening means 61 does not bear all of the lateral loads acting on the lower plate 30, so that the lateral loads are transmitted to the sensing unit 55a of the triaxial load sensor 55. This is to enable the axial load measurement sensor 55 to measure the load acting in the lateral direction, which is the X axis or the Y axis.
전술한 구성은 체결수단(61)에 의해 하부플레이트(30)가 상부플레이트(40)에 매달려 있으면서도, 하부플레이트(30)가 외력에 의해 상측 및 좌우측 방향으로 모두 움직일 수 있는 유격을 가지는 구성이다.The above-described configuration is a configuration in which the lower plate 30 is movable by both the fastening means 61 and the lower plate 30 can move both in the upper and left and right directions by external force while the lower plate 30 is suspended from the upper plate 40.
상기 체결수단(61)과 관련한 구성은 그 체결수단(61)이 상부플레이트(40)에 고정되는 것으로 변경하는 것도 가능하다.The configuration related to the fastening means 61 may be changed to the fastening means 61 is fixed to the upper plate 40.
즉, 도 5를 참고하면, 상기 체결수단(61)이 다수의 위치에 각각 설치되되, 각 체결수단(61)은 봉형상으로 형성되어 상부플레이트(40′)에 고정되고 하부플레이트(30′)의 체결공(36)에 삽입되며, 체결수단(61)의 하단에는 머리부(61a)가 형성되어 그 머리부(61a)가 상기 하부플레이트(30)에 걸린 상태가 되도록 설치한다. 또한, 상기 체결공(36)은 봉형상인 체결수단(61)의 직경보다 큰 직경으로 형성되어 유격을 가짐으로써, 하부플레이트(30)가 상부플레이트(40)에 대하여 측방향으로 움직일 수 있도록 구성하는 것이다.That is, referring to Figure 5, the fastening means 61 are respectively installed in a plurality of positions, each fastening means 61 is formed in a rod shape is fixed to the upper plate (40 ') and the lower plate (30') Is inserted into the fastening hole 36, the lower end of the fastening means 61 is formed with a head portion 61a is installed so that the head portion 61a is caught in the lower plate (30). In addition, the fastening hole 36 is formed to a diameter larger than the diameter of the rod-shaped fastening means 61 having a clearance, so that the lower plate 30 is configured to move laterally with respect to the upper plate 40 will be.
한편, 도 3 및 도 4를 참고하면, 상기 하부플레이트(30)와 상부플레이트(40) 사이에는 탄성체인 탄성패드(80)가 설치된다.Meanwhile, referring to FIGS. 3 and 4, an elastic pad 80, which is an elastic body, is installed between the lower plate 30 and the upper plate 40.
47즉, 상기 하부플레이트(30)와 상부플레이트(40) 사이에 발생한 설정간격을 상기 탄성패드(80)가 채우도록 하여 하부플레이트(30)가 상부플레이트(40)로 접근시 탄성패드(80)가 탄성압축되어 하중을 부담하도록 하는 것이 바람직하다.That is, the elastic pad 80 fills the set interval generated between the lower plate 30 and the upper plate 40 so that the lower plate 30 approaches the upper plate 40 when the lower pad 30 approaches the upper plate 40. Is preferably elastically compressed to bear the load.
즉, 잉곳(15)의 절입력을 지지하는 와이어(10)의 지지력에 의해 하부플레이트(30)가 상부플레이트(40)에 가하는 하중은 상당히 큰 하중이 작용할 수 있고, 잉곳(15)을 절입하는 이송장치 등의 이상으로 상하방향(Z축방향)으로 과도한 하중이 발생될 수 있다. 이에 따라, 그 하중을 3축 하중측정센서(55)의 감지부(55a)가 담당하게 되어 3축 하중측정센서(55)가 손상될 수 있는 바, 탄성압축되는 탄성패드(80)가 그 하중을 부담하여 3축 하중측정센서(55)에는 일부 하중만이 전달되게 함으로써 3축 하중측정센서(55)를 보호하기 위함이다.That is, the load applied to the upper plate 40 by the lower plate 30 by the bearing force of the wire 10 supporting the cut-in of the ingot 15 may act as a very large load, and the ingot 15 is cut off. Excessive load may be generated in the vertical direction (Z-axis direction) due to an abnormality of the transfer device. Accordingly, the load of the three-axis load measurement sensor 55, the sensing unit 55a may be responsible for damage to the three-axis load measurement sensor 55, the elastic pad 80 is elastically compressed the load This is to protect the three-axis load measurement sensor 55 by allowing only a part of the load to be transmitted to the three-axis load measurement sensor 55 to bear.
한편, 상기 음향감지센서(AE센서)(51)는 가공에 의해 발생하는 음향방출(Acoustic emission)신호를 감지하는 센서로서, 하부플레이트(30)에 설치되어 잉곳(15)의 절단과정 중 잉곳지그(20) 및 하부플레이트(30)를 통해 전달되는 음향을 감지하고 있다.On the other hand, the acoustic sensor (AE sensor) 51 is a sensor for detecting the acoustic emission (Acoustic emission) signal generated by the process, is installed on the lower plate 30 ingot jig during the cutting process of the ingot 15 The sound transmitted through the 20 and the lower plate 30 is sensed.
상기 음향감지센서(51)는 도 3에서 도시된 바와 같이, 복수의 위치, 보다 바람직하게는 하부플레이트(30)의 중심을 중심으로 하여, 정삼각형을 이루는 3개의 위치에서 하부플레이트(30)에 매입설치되는 것이 바람직하다.As shown in FIG. 3, the acoustic sensor 51 is embedded in the lower plate 30 at three positions forming an equilateral triangle with a plurality of positions, more preferably around the center of the lower plate 30. It is preferable to install.
한편, 상기 3축 하중측정센서(Force센서)(55)는 하부플레이트(30)에 매입설치되고 그 센서의 상부에 형성된 감지부(55a)가 상부플레이트(40)에 접촉한 상태로 설치됨으로써 잉곳(15)의 가공 중 하부플레이트(30)가 전달받는 하중을 3축방향에서 감지하고 있다. 실질적으로, 하부플레이트(30)가 3축 하중측정센서(55)를 상부플레이트(40)로 미는 하중을 3축 하중측정센서(55)가 측정하는 것이므로, 상부플레이트(40)의 지지를 받아 3축 하중측정센서(55)의 측정이 이루어지는 것이라 할 수 있고, X축 및 Y축에 대한 측정도 고정된 상태의 상부플레이트(40)가 3축 하중측정센서(55)를 측방향에서 지지해 줄 수 있기 때문에 측정이 가능한 것이라 할 수 있다.On the other hand, the three-axis load measurement sensor (Force sensor) 55 is installed in the lower plate 30 and the sensing unit 55a formed in the upper portion of the sensor is installed in contact with the upper plate 40 ingot During the processing of 15, the lower plate 30 detects the load transmitted in three axes. Substantially, since the three-axis load measurement sensor 55 measures the load that pushes the three-axis load measurement sensor 55 to the upper plate 40, the lower plate 30 is supported by the upper plate 40 It can be said that the measurement of the axial load sensor 55 is made, the upper plate 40 in the fixed state for the X-axis and Y-axis also supports the three-axis load sensor 55 in the lateral direction It can be said that it is possible to measure.
본 실시예에서 상기 3축은 측방향 중 잉곳(15)이 절입되는 와이어(10)의 주행방향이 X축이고 그 와이어(10)의 주행방향에 직각인 방향이 Y축이며, 그 X축 및 Y축에 모두 직각인 방향이 Z축으로 설정된다. 도 3 및 도 4에 도시된 바와 같이 잉곳(15)의 길이방향에 직각인 방향으로 와이어(10)가 주행하여 절단이 이루어지므로, 하측플레이트의 측방향 중 상기 잉곳(15)의 길이방향에 직각인 방향이 X축이고 상기 잉곳(15)의 길이방향이 Y축이 되며, 상하방향이 X축 및 Y축에 모두 직각이므로 Z축으로 설정된다.In the present embodiment, the three axes are the X axis and the Y direction is perpendicular to the running direction of the wire 10 in which the ingot 15 is cut in the lateral direction. The X axis and the Y axis The direction orthogonal to all is set to the Z axis. As shown in FIGS. 3 and 4, since the wire 10 travels in a direction perpendicular to the longitudinal direction of the ingot 15, cutting is performed, and thus, perpendicular to the longitudinal direction of the ingot 15 in the lateral direction of the lower plate. The phosphorus direction is the X axis and the longitudinal direction of the ingot 15 is the Y axis, and the vertical direction is set to the Z axis because the vertical direction is perpendicular to both the X axis and the Y axis.
상기 컨트롤러(70)는 음향감지센서(51)와 3축 하중측정센서(55)의 감지신호를 전송받아 가공상태의 이상유무를 판단하고, 그 판단결과를 바탕으로 표시수단(75) 및 와이어소의 각 기기를 제어하는 부분이다.The controller 70 receives the detection signals of the acoustic sensor 51 and the three-axis load measuring sensor 55 to determine whether there is an abnormality in the processing state, and based on the determination result, the display means 75 and the wire saw This is the part that controls each device.
표시수단(75)은 컨트롤러(70)의 제어신호를 받아 이상상태의 종류를 표시함으로써 관리자가 그 이상상태에 따른 조치를 취할 수 있도록 경고하고 있다.The display unit 75 receives the control signal of the controller 70 and displays the type of the abnormal state so as to warn the administrator to take an action according to the abnormal state.
상기 컨트롤러(70)가 음향감지센서(51)와 3축 하중측정센서(55)의 감지신호를 전송받아 가공상태의 이상을 판단하는 과정은 도 7에 도시되어 있고, 후술하기로 한다.The process of determining the abnormality of the processing state by receiving the detection signals of the acoustic sensor 51 and the 3-axis load measuring sensor 55 is shown in FIG. 7 and will be described later.
이하, 본 발명의 실시예에 따른 가공상태 감시장치를 구비한 와이어소의 작용을 설명한다.Hereinafter, the operation of the wire saw having a machining state monitoring apparatus according to an embodiment of the present invention.
와이어소의 가공이 시작되면, 잉곳(15) 및 잉곳지그(20)와 그것에 결합된 하부플레이트(30) 및 상부플레이트(40)가 하강하여 잉곳(15)이 주행하는 와이어(10)에 절입된다.When processing of the wire saw is started, the ingot 15 and the ingot jig 20, the lower plate 30 and the upper plate 40 coupled thereto are lowered and cut into the wire 10 on which the ingot 15 travels.
잉곳(15)이 하측을 향해 설정속도로 와이어(10)에 절입되어 와이어(10)를 누르면, 잉곳(15)이 와이어(10)로부터 지지력을 받게 되는 바, 와이어(10)는 잉곳(15)과 잉곳지그(20) 및 그것이 결합된 하부플레이트(30)를 받치는 하중을 잉곳(15)에 상측방향으로 가하는 것이다. When the ingot 15 cuts into the wire 10 at a set speed toward the lower side and presses the wire 10, the ingot 15 receives the supporting force from the wire 10, and the wire 10 is the ingot 15. The ingot jig 20 and the load supporting the lower plate 30 to which it is coupled is applied upwardly to the ingot 15.
그 하중은 정상가공상태에서 하부플레이트(30)를 상부플레이트(40)에 접근시키는 방향의 하중으로서, 탄성패드(80)를 압축시키고, 3축 하중측정센서(55)에 Z축 방향의 하중으로 측정된다. The load is a load in the direction in which the lower plate 30 approaches the upper plate 40 in the normal processing state, compresses the elastic pad 80, and loads in the Z-axis direction to the triaxial load measuring sensor 55. Is measured.
이와 같은 작용은 체결수단(61)이 하부플레이트(30)가 상부플레이트(40)와 설정간격을 유지하도록 걸린 상태에서 외력에 의해 하부플레이트(30)가 상부플레이트(40)를 향해 접근하는 것을 허용하는 상태로 서로 체결하고 있는 구조에 의해 가능하다.This action allows the lower plate 30 to approach the upper plate 40 by an external force while the fastening means 61 is locked such that the lower plate 30 maintains the set interval with the upper plate 40. It is possible by the structure which is fastened with each other in the state to make.
또한, 탄성패드(80)가 와이어(10)로 잉곳(15)을 절입시키는 절입력 및 와이어(10)의 지지력에 의해 하부플레이트(30)에 전달되는 하중을 탄성압축에 의해 흡수함으로써 3축 하중측정센서(55)의 감지부(55a)가 모두 부담하지 않도록 하여 그 3축 하중측정센서(55)의 파손을 방지한다.In addition, the elastic pad 80 absorbs the load transmitted to the lower plate 30 by the compression force for cutting the ingot 15 into the wire 10 and the support force of the wire 10 by elastic compression, thereby causing the triaxial load. The detection unit 55a of the measuring sensor 55 does not bear all the burden to prevent the breakage of the three-axis load measuring sensor 55.
정상적인 가공이 진행되는 과정에서 그와 같은 Z축 방향의 하중이 3축 하중측정센서(55)의 감지부(55a)에 상측방향의 예압을 가하게 되고, 그 예압이 기준값으로 설정되어 Z축 방향의 하중의 증가 및 감소량이 모두 측정되고, 그 ±변화량이 모두 감시될 수 있다.In the course of normal machining, such a load in the Z-axis exerts an upward preload on the sensing unit 55a of the 3-axis load measuring sensor 55, and the preload is set as a reference value, Both the increase and decrease of the load can be measured, and all of the ± change can be monitored.
한편, 절단작업시 잉곳(15)과 와이어(10)의 마찰에 의해 와이어(10)가 주행하는 방향으로 잉곳(15)이 편향된 힘을 받게 되는 바, 와이어(10)가 주행하는 측방향, 즉 X축 방향으로 와이어(10)가 잉곳(15)에 전달하는 하중을 3축 하중측정센서(55)가 감지할 수 있다.On the other hand, during cutting operation, the ingot 15 is biased in the direction in which the wire 10 travels due to the friction between the ingot 15 and the wire 10, so that the wire 10 travels in a lateral direction, that is, The three-axis load measuring sensor 55 may detect the load transmitted from the wire 10 to the ingot 15 in the X axis direction.
이는 상부플레이트(40)에 형성된 체결공(46)은 봉형상인 체결수단(61)의 직경보다 큰 직경으로 형성되어 체결수단(61)이 좌우로 유격(b)을 가지고 있으므로 잉곳(15)과 결합된 하부플레이트(30)가 측방향의 하중을 받으면 상부플레이트(40)의 큰 간섭없이 3축 하중측정센서(55)가 측방향인 X축 방향의 하중을 측정할 수 있기 때문에 가능하다.This is because the fastening hole 46 formed in the upper plate 40 is formed in a diameter larger than the diameter of the rod-like fastening means 61 is coupled to the ingot 15 because the fastening means 61 has a clearance (b) from side to side. When the lower plate 30 is subjected to the lateral load, it is possible because the three-axis load measuring sensor 55 can measure the load in the X-axis direction in the lateral direction without great interference from the upper plate 40.
만일, 하부플레이트(30)가 측방향 중 X축에 직각인 Y축 방향으로 하중을 받더라도 전술한 이유로 3축 하중측정센서(55)가 Y축 방향에 대하여 하중을 측정할 수 있음은 물론이다.If the lower plate 30 receives a load in the Y-axis direction perpendicular to the X-axis in the lateral direction, the three-axis load measuring sensor 55 may measure the load in the Y-axis direction for the reasons described above.
한편, 하부플레이트(30)에 매입설치된 음향감지센서(51)(AE센서)는 와이어(10)가 잉곳(15)을 절단하는 과정에서 발생한 음향이 잉곳(15)과 잉곳지그(20)를 거쳐 하부플레이트(30)로 전달되므로 실시간으로 감지할 수 있다.On the other hand, the acoustic detection sensor 51 (AE sensor) is embedded in the lower plate 30, the sound generated in the process of the wire 10 cut the ingot 15 through the ingot 15 and the ingot jig 20. Since it is delivered to the lower plate 30 can be detected in real time.
다음은 본 발명의 실시예에 따른 음향감지센서(51)(AE센서)에 의해 AE신호와, 3축 하중측정센서(Force센서)(55)에 의한 하중측정신호를 수신하는 컨트롤러(70)가, 와이어소의 가공작동시 발생하는 이상상태를 판별하고 제어하는 과정을 설명한다.Next, the controller 70 receiving the AE signal and the load measurement signal by the three-axis load measurement sensor (Force sensor) 55 by the acoustic sensor 51 (AE sensor) according to an embodiment of the present invention This section describes the process of identifying and controlling abnormal conditions that occur during the machining operation of wire saws.
도 7을 참조하면, 먼저, 음향감지센서(51) 및 하중측정센서(55)로부터 측정된 AE신호(음향값) 및 Force신호(하중값)가 실시간으로 컨트롤러(70)로 전송된다.(S11 단계)Referring to FIG. 7, first, the AE signal (sound value) and the force signal (load value) measured from the acoustic sensor 51 and the load measuring sensor 55 are transmitted to the controller 70 in real time. step)
컨트롤러(70)는 AE신호를 RMS(Root Mean Square)로 변환하고(S12 단계), AE신호의 RMS값을 사전 설정된 기준값과 비교한다(S13 단계). 기준값보다 AE신호의 RMS값이 작으면 AE신호(음향값) 및 Force신호(하중값)를 획득하는 과정이 반복된다. The controller 70 converts the AE signal into a root mean square (RMS) (step S12), and compares the RMS value of the AE signal with a preset reference value (step S13). If the RMS value of the AE signal is smaller than the reference value, the process of acquiring the AE signal (sound value) and the force signal (load value) is repeated.
만일, AE신호의 RMS값이 기준값 이상이면, 그 측정시점 전후에서 설정시간동안의 AE신호 측정값을 획득하여 급격한 이벤트인지를 판단한다. (S15 단계)If the RMS value of the AE signal is greater than or equal to the reference value, it is determined whether the event is a sudden event by acquiring the measured value of the AE signal during the set time before and after the measurement time. (Step S15)
급격한 이벤트인지의 여부는 설정시간동안의 AE신호 측정값에서 설정치 이상의 값이 일시적(설정시간 이하동안 발생후 소멸)으로 발생하는지 여부를 확인하여 알 수 있다. 또는, 감지신호의 강도변화율이 설정치 이상인 상태가 일시적으로 발생하는지 여부를 판단하여 확인할 수도 있다. 도 10을 참조하면, (a)와 같이 설정치(k) 이상의 AE신호 측정값이 일시적으로 발생하는 경우, 즉, 설정시간이하의 시간간격(T1,T2,T3)동안 발생하는 경우를 급격한 이벤트로 분류하고, (b)와 같이 설정치 이상의 값이 설정시간 이상의 시간(T4)동안 지속되는 경우는 급격한 이벤트로 분류할 수 없다.Whether or not the event is a sudden event can be determined by checking whether the value of the AE signal measured value during the set time is generated temporarily (occurs after disappearing for less than the set time). Alternatively, it may be determined by determining whether a state in which the intensity change rate of the detection signal is greater than or equal to a set value occurs temporarily. Referring to FIG. 10, a case where an AE signal measured value greater than or equal to a set value k occurs temporarily, i.e., occurs during time intervals T1, T2 and T3 below a set time as a sudden event as shown in (a). If the value above the set value persists for a time T4 longer than the set time as shown in (b), it cannot be classified as a sudden event.
만일, 급격한 이벤트인 경우, 피크(peak)신호가 나타나는 개수인 Hit개수가 Hit설정개수보다 작으면(S16-S17 단계), 가공상태이상에 대한 경고를 표시수단(75)에 표시하도록 하고(S18 단계), Hit개수가 Hit설정개수 이상이면, Hit폭이 설정시간폭보다 작은지를 판단한다.(S19 단계)In case of a sudden event, if the number of hits, which is the number of peak signals, is smaller than the number of hits set (steps S16-S17), a warning about the abnormal state of processing is displayed on the display means 75 (S18). Step) If the number of hits is equal to or greater than the number of hits set, it is determined whether the hit width is smaller than the set time width (step S19).
AE신호를 분석하여 Hit개수를 산출하는 처리방식은 도 8의 (a)에 예시되어 있고, Hit폭을 산출하는 처리방식은 도 8의 (b)에서 예시되어 있다.A processing method for analyzing the AE signal and calculating the number of hits is illustrated in FIG. 8A, and a processing method for calculating the hit width is illustrated in FIG. 8B.
그 판단결과 Hit폭(Hit Duration)이 Hit설정 시간폭보다 작으면, 표시수단(75)에 와이어(10) 또는 잉곳(15)의 이상에 대한 경고를 한다.(S20 단계)As a result of the determination, if the hit width is smaller than the hit set time width, the display unit 75 warns of an abnormality of the wire 10 or the ingot 15 (step S20).
만일, Hit폭이 Hit설정 시간폭 이상이면, 와이어(10)단선으로 표시수단(75)에 표시한 후, 와이어소 전체 장비의 작동을 정지시킨다.(S21 단계) 도 9는 와이어 단선인 경우의 AE신호를 도시하는 것으로서, Hit개수가 비교적 많이 나타나고, Hit폭(Hit Duration)(T)이 비교적 길게 나타나고 있음을 알 수 있다.If the Hit width is equal to or larger than the Hit setting time width, the display means 75 is displayed by disconnection of the wire 10, and then the operation of the entire wire saw equipment is stopped. (Step S21) FIG. As the AE signal is shown, it can be seen that the number of hits is relatively large and the hit duration T is relatively long.
전술한 단계 중 급격한 이벤트인지 여부를 판단한 결과, 급격한 이벤트가 아닌 것으로 판단한 경우에는, 설정시간동안의 AE신호 측정값이 연속적 레벨상승인지 판단한다. (S31 단계)As a result of determining whether the event is a sudden event among the above-described steps, if it is determined that the event is not a sudden event, it is determined whether the measured value of the AE signal during the set time is a continuous level rise. (Step S31)
만일, 설정시간동안의 AE신호 측정값이 급격한 이벤트가 아니고, 연속적 레벨상승도 아닌 경우에는 AE신호 및 Force신호를 획득하는 초기단계가 다시 반복시작된다.If the measured value of the AE signal during the set time is not a sudden event and is not a continuous level rise, the initial steps of acquiring the AE signal and the force signal are repeated again.
연속적 레벨 상승은 설정시간동안 시간의 경과에 따라 AE신호 측정값의 계속적 상승이 나타나는지를 판단하는 것이고, 그 AE신호의 레벨패턴이 도 10의 (b)에 예시되어 있다.The continuous level rise determines whether the continuous rise of the AE signal measured value occurs over time during the set time, and the level pattern of the AE signal is illustrated in FIG.
만일, 설정시간동안의 AE신호 측정값이 연속적 레벨상승이면, Force신호의 X축 및 Y축의 레벨패턴을 마스크앤리미트(Mask&Limit) 설정값과 비교한다.(S32 단계)If the measured value of the AE signal during the set time is continuously rising, the level pattern of the X and Y axes of the force signal is compared with the mask & limit setting value (step S32).
Force신호의 X축 및 Y축의 레벨패턴은 X축 및 Y축 각각에 대한 소정시간 측정되는 Force신호의 레벨이 변화하는 형태이고, 마스크앤리미트(Mask&Limit) 설정값은 통상의 Mask&Limit 테스트법을 이용하여 X축 및 Y축 각각에 대해 Force신호의 패턴이 유지되어야 하는 경계영역을 사전에 설정한 것이다. 도 11에 와이어소의 X,Y,Z축에 대하여 마스크앤리미트(Mask&Limit) 설정값을 설정(점선을 경계로 하여 점선 이내가 되도록 설정)한 예를 도시하고 있다.The level pattern of the X-axis and Y-axis of the force signal is a form in which the level of the force signal measured for a predetermined time with respect to the X-axis and the Y-axis, respectively, is changed, and the mask & limit setting value is determined using a conventional mask & limit test method. The boundary area where the force signal pattern should be maintained for each of the X and Y axes is set in advance. FIG. 11 shows an example in which a mask and limit setting value is set for the X, Y, and Z axes of the wire saw (set so as to be within a dotted line with a dotted line).
이에 따라, Force신호의 X축 및 Y축의 레벨패턴이 마스크앤리미트(Mask&Limit) 설정값 이내에 있지 않으면(S33 단계), 와이어소의 절삭을 위한 기구부에서 X축 또는 Y축방향으로 과도한 힘을 받아 비틀림이 발생하고 있음을 표시수단(75)에 표시한다.(S34 단계)Accordingly, if the level patterns of the X and Y axes of the force signal are not within the mask & limit setting value (step S33), the torsion may be caused by excessive force in the X or Y axis direction in the mechanism for cutting the wire saw. It is displayed on the display means 75 that it has occurred (step S34).
만일, Force신호의 X축 및 Y축의 레벨패턴이 마스크앤리미트(Mask&Limit) 설정값 이내에 있으며, Force신호의 Z축의 레벨패턴을 Z축에 관한 마스크앤리미트(Mask&Limit) 설정값과 비교한다.(S41 단계)If the X and Y axis level patterns of the force signal are within the mask and limit setting values, the Z and Y level patterns of the force signal are compared with the mask and limit setting values for the Z axis. step)
만일, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위 이내이며, Force신호의 Z축의 패턴이 마스크앤리미트(Mask&Limit) 설정값 이내에 있으면(S42 단계), 관리자가 주의를 기울일 수 있도록 표시수단(75)을 통해 와이어마모상태에 대하여 경고한다.(S43 단계)If the X-axis and Y-axis level patterns measured by the three-axis load measuring sensor 55 are within the range of the mask and limit setting value, and the Z-axis pattern of the force signal is within the mask & limit setting value ( Step S42), the manager warns about the wire wear state through the display means 75 to pay attention (step S43).
또한, Force신호의 Z축의 패턴이 마스크앤리미트(Mask&Limit) 설정값 이내에 있지 않으면, 와이어소의 절삭을 위한 기구부에서 Z축인 상하방향으로 과도한 힘을 받는 것을 의미하므로, 표시수단(75)을 통해 와이어텐션 또는 z축 이송상태에 이상이 있음을 경고한다.(S44 단계)In addition, if the Z-axis pattern of the force signal is not within the mask & limit setting value, it means that the mechanical part for cutting the wire saw receives excessive force in the vertical direction, which is the Z axis, and thus the wire tension through the display means 75. Or warns that there is an error in the z-axis feed state.
본 발명에 따른 가공상태감시장치는 잉곳을 절단하는 와이어소에 적용됨으로써, 와이어소의 가공진행 중 발생하는 이상상태를 관리자에게 신속히 알려줄 수 있다. 이는, 와이어소에 의한 가공작업과 와이어소의 유지관리가 매우 효율적으로 이루어지도록 하므로, 와이어소와 관련하여 매우 유용하게 활용될 수 있다.The machining condition monitoring device according to the present invention can be quickly applied to the wire saw for cutting the ingot, thereby promptly informing the manager of an abnormal condition occurring during the processing of the wire saw. This allows the wire work and the maintenance of the wire saw to be carried out very efficiently, it can be very useful in connection with the wire saw.

Claims (16)

  1. 잉곳(15)이 하부에 부착되는 잉곳지그(20)에 결합되어, 잉곳(15)의 가공상태를 감시하기 위한 와이어소 가공상태 감시장치에 있어서,In the ingot 15 is coupled to the ingot jig 20 attached to the lower portion, in the wire saw processing state monitoring device for monitoring the processing state of the ingot 15,
    상기 잉곳지그(20)의 상부에 결합되거나 상기 잉곳지그(20)와 일체로 형성되는 하부플레이트(30)와,A lower plate 30 coupled to an upper portion of the ingot jig 20 or integrally formed with the ingot jig 20;
    상기 하부플레이트(30)와 설정간격을 두고 상기 하부플레이트(30)의 상측에 위치하는 상부플레이트(40)와,An upper plate 40 positioned at an upper side of the lower plate 30 at a predetermined interval from the lower plate 30;
    상기 하부플레이트(30)에 설치되어 음향을 감지하는 음향감지센서(51)와,An acoustic sensor 51 installed on the lower plate 30 to detect sound;
    상기 하부플레이트(30) 또는 상기 상부플레이트(40)에 설치되어 상기 잉곳(15)의 가공 중 상기 하부플레이트(30)가 전달받는 하중을 상기 상부플레이트(40)의 지지를 받아 감지하는 하중측정센서와,A load measuring sensor installed on the lower plate 30 or the upper plate 40 to sense the load received by the lower plate 30 during the processing of the ingot 15 with the support of the upper plate 40. Wow,
    상기 하부플레이트(30)가 상기 상부플레이트(40)와 상기 설정간격을 유지하고 외력에 의해 상기 하부플레이트(30)가 상기 상부플레이트(40)를 향해 접근하는 것을 허용하는 상태로 상기 하부플레이트(30)와 상기 상부플레이트(40)를 서로 체결하는 체결수단(61)과,The lower plate 30 in a state in which the lower plate 30 maintains the set interval with the upper plate 40 and allows the lower plate 30 to approach toward the upper plate 40 by an external force. ) And fastening means 61 for fastening the upper plate 40 to each other,
    상기 음향감지센서(51)와 상기 하중측정센서의 감지신호를 전송받아 가공상태의 이상유무를 판단하는 컨트롤러(70)를 포함하며,It includes a controller 70 for receiving the detection signal of the sound sensor 51 and the load measuring sensor to determine the abnormality of the processing state,
    상기 잉곳(15)이 그 하측에 위치하는 와이어(10)에 절입시, 상기 하부플레이트(30)를 상기 상부플레이트(40)로 접근시키려는 하중을 받아 상기 하중측정센서(55)의 감지부(55a)에 상하방향의 예압을 가하게 되는 것을 특징으로 하는 와이어소의 가공상태 감시장치When the ingot 15 is cut into the wire 10 positioned below the ingot 15, the sensing unit 55a of the load measuring sensor 55 receives a load to approach the lower plate 30 to the upper plate 40. Wire state processing state monitoring device characterized in that the pre-load in the vertical direction
  2. 제1항에 있어서,The method of claim 1,
    상기 하중측정센서는 3축 방향에서 감지하는 3축 하중측정센서(55)이고,The load measuring sensor is a three-axis load measuring sensor 55 for sensing in the three-axis direction,
    상기 컨트롤러(70)의 판단결과에 따라 가공상태를 표시하는 표시수단(75)을 더 포함하는 것을 특징으로 하는 와이어소의 가공상태 감시장치The wire saw processing state monitoring apparatus further comprises a display means (75) for displaying the processing state in accordance with the determination result of the controller (70).
  3. 제1항에 있어서,The method of claim 1,
    상기 하부플레이트(30)와 상기 상부플레이트(40)의 사이에는 탄성체가 설치되어 상기 하부플레이트(30)가 상기 상부플레이트(40)로 접근시 상기 탄성체가 탄성압축되어 하중을 부담하는 것을 특징으로 하는 와이어소의 가공상태 감시장치An elastic body is installed between the lower plate 30 and the upper plate 40 so that the elastic body is elastically compressed to bear a load when the lower plate 30 approaches the upper plate 40. Wire saw processing status monitoring device
  4. 제2항에 있어서,The method of claim 2,
    상기 체결수단(61)은 복수개가 다수의 위치에 설치되는 것으로서,The fastening means 61 is a plurality of which is installed in a plurality of positions,
    각 상기 체결수단(61)은 봉형상으로 형성되어 상기 하부플레이트(30)에 고정되고 상기 상부플레이트(40)의 체결공(46)에 삽입되며, Each of the fastening means 61 is formed in a rod shape is fixed to the lower plate 30 and inserted into the fastening hole 46 of the upper plate 40,
    상단에 머리부(61a)가 형성되어 그 머리부(61a)가 상기 상부플레이트(40)에 걸린 상태가 되고,The head 61a is formed at the upper end thereof, and the head 61a is caught in the upper plate 40.
    상기 체결공(46)은 상기 봉형상의 직경보다 큰 직경으로 형성되어 유격을 가짐으로써, 상기 하부플레이트(30)가 상기 상부플레이트(40)에 대하여 측방향으로 움직일 수 있는 것을 특징으로 하는 와이어소의 가공상태 감시장치The fastening hole 46 is formed with a diameter larger than the rod-shaped diameter and has a clearance, so that the lower plate 30 can move laterally with respect to the upper plate 40, processing of the wire saw Condition monitor
  5. 제2항에 있어서,The method of claim 2,
    상기 체결수단(61)은 복수개가 다수의 위치에 설치되는 것으로서,The fastening means 61 is a plurality of which is installed in a plurality of positions,
    각 상기 체결수단(61)은 봉형상으로 형성되어 상기 상부플레이트(40)에 고정되고 상기 하부플레이트(30)의 체결공(36)에 삽입되며, Each of the fastening means 61 is formed in a rod shape and is fixed to the upper plate 40 and inserted into the fastening hole 36 of the lower plate 30.
    하단에 머리부(61a)가 형성되어 그 머리부(61a)가 상기 하부플레이트(30)에 걸린 상태가 되고,The head 61a is formed at the lower end thereof, and the head 61a is caught in the lower plate 30.
    상기 체결공(36)은 상기 봉형상의 직경보다 큰 직경으로 형성되어 유격을 가짐으로써, 상기 하부플레이트(30)가 상기 상부플레이트(40)에 대하여 측방향으로 움직일 수 있는 것을 특징으로 하는 와이어소의 가공상태 감시장치The fastening hole 36 is formed to a diameter larger than the rod-shaped diameter and has a clearance, so that the lower plate 30 can move laterally with respect to the upper plate 40, processing of the wire saw Condition monitor
  6. 제2항에 있어서,The method of claim 2,
    상기 3축은, The three axes,
    측방향 중 상기 잉곳(15)의 길이방향에 직각인 방향이 X축이고 상기 잉곳(15)의 길이방향이 Y축이며, In the lateral direction, the direction perpendicular to the longitudinal direction of the ingot 15 is the X axis and the longitudinal direction of the ingot 15 is the Y axis,
    그 X축 및 Y축에 모두 직각인 상하방향이 Z축으로 설정되고,The vertical direction perpendicular to both the X and Y axes is set to the Z axis,
    상기 컨트롤러(70)는The controller 70
    상기 음향감지센서(51)에 의한 감지신호가 연속적 레벨상승의 상태인 것으로 판단하고, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위를 벗어난 것으로 판단한 경우에는,It is determined that the detection signal by the acoustic sensor 51 is in a state of continuous level rise, and the X-axis and Y-axis level patterns measured by the 3-axis load measuring sensor 55 are within the range of the mask and limit setting value. If you determine that you are out of
    상기 표시수단(75)이 기구부의 비틀림에 관한 경고표시를 하도록 제어하는 것을 특징으로 하는 와이어소의 가공상태 감시장치The wire saw processing state monitoring device, characterized in that for controlling the display means 75 to give a warning display regarding the twist of the mechanism portion.
  7. 제2항에 있어서,The method of claim 2,
    상기 3축은, The three axes,
    측방향 중 상기 잉곳(15)의 길이방향에 직각인 방향이 X축이고 상기 잉곳(15)의 길이방향이 Y축이며, In the lateral direction, the direction perpendicular to the longitudinal direction of the ingot 15 is the X axis and the longitudinal direction of the ingot 15 is the Y axis,
    그 X축 및 Y축에 모두 직각인 상하방향이 Z축으로 설정되고,The vertical direction perpendicular to both the X and Y axes is set to the Z axis,
    상기 컨트롤러(70)는The controller 70
    상기 음향감지센서(51)에 의한 감지신호가 연속적 레벨상승의 상태인 것으로 판단하고, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위 이내인 것으로 판단하며, 상기 3축 하중측정센서(55)에서 측정한 z축 레벨패턴이 마스크앤리미트설정값의 범위 이내인 것으로 판단한 경우에는,It is determined that the detection signal by the acoustic sensor 51 is in the state of continuous level rise, and the X-axis and Y-axis level patterns measured by the 3-axis load measuring sensor 55 are within a range of mask and limit setting values. If it is determined that the z-axis level pattern measured by the three-axis load measurement sensor 55 is within the range of the mask and limit setting value,
    상기 표시수단(75)이 와이어 마모에 관한 경고표시를 하도록 제어하는 것을 특징으로 하는 와이어소의 가공상태 감시장치The wire saw processing state monitoring device, characterized in that for controlling the display means 75 to display a warning about wire wear
  8. 제2항에 있어서,The method of claim 2,
    상기 3축은, The three axes,
    측방향 중 상기 잉곳(15)의 길이방향에 직각인 방향이 X축이고 상기 잉곳(15)의 길이방향이 Y축이며, In the lateral direction, the direction perpendicular to the longitudinal direction of the ingot 15 is the X axis and the longitudinal direction of the ingot 15 is the Y axis,
    그 X축 및 Y축에 모두 직각인 상하방향이 Z축으로 설정되고,The vertical direction perpendicular to both the X and Y axes is set to the Z axis,
    상기 컨트롤러(70)는The controller 70
    상기 음향감지센서(51)에 의한 감지신호가 연속적 레벨상승의 상태인 것으로 판단하고, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위 이내이며, 상기 3축 하중측정센서(55)에서 측정한 z축 레벨패턴이 마스크앤리미트설정값의 범위를 벗어난 것으로 판단한 경우에는,It is determined that the detection signal by the acoustic sensor 51 is in the state of continuous level rise, and the X-axis and Y-axis level patterns measured by the 3-axis load measuring sensor 55 are within a range of mask and limit setting values. If the z-axis level pattern measured by the three-axis load measuring sensor 55 is determined to be out of the range of the mask and limit setting value,
    상기 표시수단(75)이 와이어텐션 또는 z축 이송상태에 관한 경고표시를 하도록 제어하는 것을 특징으로 하는 와이어소의 가공상태 감시장치The wire saw processing state monitoring device, characterized in that for controlling the display means 75 to display a warning about the wire tension or z-axis feed state
  9. 잉곳(15)을 다수의 디스크형태로 절단하기 위해 다수의 열이 형성되어 주행하는 와이어(10)와,In order to cut the ingot 15 into a plurality of disks, a plurality of rows are formed to run the wire 10,
    상기 와이어(10)에 절입될 잉곳(15)이 하면에 부착된 잉곳지그(20)와,Ingot jig 20 is attached to the lower surface of the ingot 15 to be cut into the wire 10,
    상기 잉곳지그(20)의 상부에 결합되는 가공상태감시장치를 포함하는 와이어소에 있어서,In the wire saw comprising a processing state monitoring device coupled to the upper portion of the ingot jig 20,
    상기 가공상태감시장치는,The processing state monitoring value,
    상기 잉곳지그(20)의 상부에 결합되거나 상기 잉곳지그(20)와 일체로 형성되는 하부플레이트(30)와,A lower plate 30 coupled to an upper portion of the ingot jig 20 or integrally formed with the ingot jig 20;
    상기 하부플레이트(30)와 설정간격을 두고 상기 하부플레이트(30)의 상측에 위치하는 상부플레이트(40)와,An upper plate 40 positioned at an upper side of the lower plate 30 at a predetermined interval from the lower plate 30;
    상기 하부플레이트(30)에 설치되어 음향을 감지하는 음향감지센서(51)와,An acoustic sensor 51 installed on the lower plate 30 to detect sound;
    상기 하부플레이트(30) 또는 상기 상부플레이트(40)에 설치되어 상기 잉곳(15)의 가공 중 상기 하부플레이트(30)가 전달받는 하중을 상기 상부플레이트(40)의 지지를 받아 감지하는 하중측정센서와,A load measuring sensor installed on the lower plate 30 or the upper plate 40 to sense the load received by the lower plate 30 during the processing of the ingot 15 with the support of the upper plate 40. Wow,
    상기 하부플레이트(30)가 상기 상부플레이트(40)와 상기 설정간격을 유지하고 외력에 의해 상기 하부플레이트(30)가 상기 상부플레이트(40)를 향해 접근하는 것을 허용하는 상태로 상기 하부플레이트(30)와 상기 상부플레이트(40)를 서로 체결하는 체결수단(61)과,The lower plate 30 in a state in which the lower plate 30 maintains the set interval with the upper plate 40 and allows the lower plate 30 to approach toward the upper plate 40 by an external force. ) And fastening means 61 for fastening the upper plate 40 to each other,
    상기 음향감지센서(51)와 상기 하중측정센서의 감지신호를 전송받아 가공상태의 이상유무를 판단하는 컨트롤러(70)를 포함하되,It includes a controller 70 for receiving the detection signal of the sound sensor 51 and the load measuring sensor to determine the abnormality of the processing state,
    상기 잉곳(15)이 그 하측에 위치하는 와이어(10)에 절입시, 상기 하부플레이트(30)를 상기 상부플레이트(40)로 접근시키려는 하중을 받아 상기 하중측정센서의 감지부(55a)에 상하방향의 예압을 가하게 되는 것을 특징으로 하는 와이어소When the ingot 15 is cut into the wire 10 positioned below the upper part, the ingot 15 receives a load to approach the lower plate 30 to the upper plate 40, and moves up and down the sensing unit 55a of the load measuring sensor. Wire saw characterized by applying a preload in the direction
  10. 제9항에 있어서,The method of claim 9,
    상기 하중감지센서는 3축 방향에서 감지하는 3축 하중측정센서(55)이고,The load sensor is a three-axis load measurement sensor 55 to detect in the three-axis direction,
    상기 컨트롤러(70)의 판단결과에 따라 가공상태를 표시하는 표시수단(75)을 더 포함하는 것을 특징으로 하는 와이어소The wire saw, characterized in that it further comprises a display means 75 for displaying the processing state in accordance with the determination result of the controller 70
  11. 제9항에 있어서,The method of claim 9,
    상기 하부플레이트(30)와 상기 상부플레이트(40)의 사이에는 탄성체가 설치되어 상기 하부플레이트(30)가 상기 상부플레이트(40)로 접근시 상기 탄성체가 탄성압축되어 하중을 부담하는 것을 특징으로 하는 와이어소An elastic body is installed between the lower plate 30 and the upper plate 40 so that the elastic body is elastically compressed to bear a load when the lower plate 30 approaches the upper plate 40. Wire saw
  12. 제10항에 있어서,The method of claim 10,
    상기 체결수단(61)은 복수개가 다수의 위치에 설치되는 것으로서,The fastening means 61 is a plurality of which is installed in a plurality of positions,
    각 상기 체결수단(61)은 봉형상으로 형성되어 상기 하부플레이트(30)에 고정되고 상기 상부플레이트(40)의 체결공(46)에 삽입되며, Each of the fastening means 61 is formed in a rod shape is fixed to the lower plate 30 and inserted into the fastening hole 46 of the upper plate 40,
    상단에 머리부(61a)가 형성되어 그 머리부(61a)가 상기 상부플레이트(40)에 걸린 상태가 되고,The head 61a is formed at the upper end thereof, and the head 61a is caught in the upper plate 40.
    상기 체결공(46)은 상기 봉형상의 직경보다 큰 직경으로 형성되어 유격을 가짐으로써, 상기 하부플레이트(30)가 상기 상부플레이트(40)에 대하여 측방향으로 움직일 수 있는 것을 특징으로 하는 와이어소The fastening hole 46 is formed in a diameter larger than the rod-shaped diameter having a clearance, so that the lower plate 30 can move laterally with respect to the upper plate 40, characterized in that the wire saw
  13. 제10항에 있어서,The method of claim 10,
    상기 체결수단(61)은 복수개가 다수의 위치에 설치되는 것으로서,The fastening means 61 is a plurality of which is installed in a plurality of positions,
    각 상기 체결수단(61)은 봉형상으로 형성되어 상기 상부플레이트(40)에 고정되고 상기 하부플레이트(30)의 체결공(36)에 삽입되며, Each of the fastening means 61 is formed in a rod shape and is fixed to the upper plate 40 and inserted into the fastening hole 36 of the lower plate 30.
    하단에 머리부(61a)가 형성되어 그 머리부(61a)가 상기 하부플레이트(30)에 걸린 상태가 되고,The head 61a is formed at the lower end thereof, and the head 61a is caught in the lower plate 30.
    상기 체결공(36)은 상기 봉형상의 직경보다 큰 직경으로 형성되어 유격을 가짐으로써, 상기 하부플레이트(30)가 상기 상부플레이트(40)에 대하여 측방향으로 움직일 수 있는 것을 특징으로 하는 와이어소The fastening hole 36 is formed with a diameter larger than the rod-shaped diameter and has a clearance, so that the lower plate 30 can move laterally with respect to the upper plate 40, characterized in that the wire saw
  14. 제10항에 있어서,The method of claim 10,
    상기 3축은, The three axes,
    측방향 중 상기 잉곳(15)이 절입되는 와이어(10)의 주행방향이 X축이고 그 와이어(10)의 주행방향에 직각인 방향이 Y축이며, The running direction of the wire 10 in which the ingot 15 is cut in the lateral direction is the X axis, and the direction perpendicular to the running direction of the wire 10 is the Y axis,
    그 X축 및 Y축에 모두 직각인 상하방향이 Z축으로 설정되고,The vertical direction perpendicular to both the X and Y axes is set to the Z axis,
    상기 컨트롤러(70)는The controller 70
    상기 음향감지센서(51)에 의한 감지신호가 연속적 레벨상승의 상태인 것으로 판단하고, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위를 벗어난 것으로 판단한 경우에는,It is determined that the detection signal by the acoustic sensor 51 is in a state of continuous level rise, and the X-axis and Y-axis level patterns measured by the 3-axis load measuring sensor 55 are within the range of the mask and limit setting value. If you determine that you are out of
    상기 표시수단(75)이 기구부의 비틀림에 관한 경고표시를 하도록 제어하는 것을 특징으로 하는 와이어소The wire saw characterized in that the display means 75 controls to give a warning display regarding the twisting of the mechanism portion.
  15. 제10항에 있어서,The method of claim 10,
    상기 3축은,The three axes,
    측방향 중 상기 잉곳(15)이 절입되는 와이어(10)의 주행방향이 X축이고 그 와이어(10)의 주행방향에 직각인 방향이 Y축이며, The running direction of the wire 10 in which the ingot 15 is cut in the lateral direction is the X axis, and the direction perpendicular to the running direction of the wire 10 is the Y axis,
    그 X축 및 Y축에 모두 직각인 상하방향이 Z축으로 설정되고,The vertical direction perpendicular to both the X and Y axes is set to the Z axis,
    상기 컨트롤러(70)는The controller 70
    상기 음향감지센서(51)에 의한 감지신호가 연속적 레벨상승의 상태인 것으로 판단하고, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위 이내이며, 상기 3축 하중측정센서(55)에서 측정한 z축 레벨패턴이 마스크앤리미트설정값의 범위 이내인 것으로 판단한 경우에는,It is determined that the detection signal by the acoustic sensor 51 is in the state of continuous level rise, and the X-axis and Y-axis level patterns measured by the 3-axis load measuring sensor 55 are within a range of mask and limit setting values. When the z-axis level pattern measured by the three-axis load measuring sensor 55 is determined to be within the range of the mask and limit setting value,
    상기 표시수단(75)이 와이어 마모에 관한 경고표시를 하도록 제어하는 것을 특징으로 하는 와이어소The wire saw, characterized in that for controlling the display means 75 to display a warning about wire wear
  16. 제10항에 있어서,The method of claim 10,
    상기 3축은, The three axes,
    측방향 중 상기 잉곳(15)이 절입되는 와이어(10)의 주행방향이 X축이고 그 와이어(10)의 주행방향에 직각인 방향이 Y축이며, The running direction of the wire 10 in which the ingot 15 is cut in the lateral direction is the X axis, and the direction perpendicular to the running direction of the wire 10 is the Y axis,
    그 X축 및 Y축에 모두 직각인 상하방향이 Z축으로 설정되고,The vertical direction perpendicular to both the X and Y axes is set to the Z axis,
    상기 컨트롤러(70)는The controller 70
    상기 음향감지센서(51)에 의한 감지신호가 연속적 레벨상승의 상태인 것으로 판단하고, 상기 3축 하중측정센서(55)에서 측정한 X축 및 Y축 레벨패턴이 마스크앤리미트설정값의 범위 이내이며, 상기 3축 하중측정센서(55)에서 측정한 z축 레벨패턴이 마스크앤리미트설정값의 범위를 벗어난 것으로 판단한 경우에는,It is determined that the detection signal by the acoustic sensor 51 is in the state of continuous level rise, and the X-axis and Y-axis level patterns measured by the 3-axis load measuring sensor 55 are within a range of mask and limit setting values. If the z-axis level pattern measured by the three-axis load measuring sensor 55 is determined to be out of the range of the mask and limit setting value,
    상기 표시수단(75)이 와이어텐션 또는 z축 이송상태에 관한 경고표시를 하도록 제어하는 것을 특징으로 하는 와이어소The display means 75 is controlled to give a warning display regarding the wire tension or z-axis feed state
PCT/KR2015/010908 2014-10-30 2015-10-15 Apparatus for monitoring processing state of wire saw and wire saw having same installed therein WO2016068526A1 (en)

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TWI722887B (en) * 2019-10-18 2021-03-21 大陸商上海新昇半導體科技有限公司 Ingot workpiece board, ingot slicing device and ingot slicing method

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JP3817022B2 (en) * 1996-11-08 2006-08-30 三益半導体工業株式会社 Attaching single crystal ingot
KR20110118969A (en) * 2010-04-26 2011-11-02 한국생산기술연구원 Monitoring apparatus for machining fragile material

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JPH06278130A (en) * 1993-03-26 1994-10-04 Nippon Steel Corp Slicing machine
JPH07205015A (en) * 1994-01-10 1995-08-08 Tokyo Seimitsu Co Ltd Wire wear amount detecting method of wire saw and device thereof
JP3817022B2 (en) * 1996-11-08 2006-08-30 三益半導体工業株式会社 Attaching single crystal ingot
JP2002144194A (en) * 2000-11-08 2002-05-21 Daido Steel Co Ltd Abnormality detector for cutter
KR20110118969A (en) * 2010-04-26 2011-11-02 한국생산기술연구원 Monitoring apparatus for machining fragile material

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI722887B (en) * 2019-10-18 2021-03-21 大陸商上海新昇半導體科技有限公司 Ingot workpiece board, ingot slicing device and ingot slicing method

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