WO2016063782A1 - Vibration device and haptic device - Google Patents

Vibration device and haptic device Download PDF

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Publication number
WO2016063782A1
WO2016063782A1 PCT/JP2015/079117 JP2015079117W WO2016063782A1 WO 2016063782 A1 WO2016063782 A1 WO 2016063782A1 JP 2015079117 W JP2015079117 W JP 2015079117W WO 2016063782 A1 WO2016063782 A1 WO 2016063782A1
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Prior art keywords
film
vibration
piezoelectric film
diaphragm
adhesion region
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PCT/JP2015/079117
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French (fr)
Japanese (ja)
Inventor
臼井健太朗
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株式会社村田製作所
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Priority to JP2016555192A priority Critical patent/JP6176409B2/en
Publication of WO2016063782A1 publication Critical patent/WO2016063782A1/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

Definitions

  • the present invention relates to a vibration device that transmits vibration.
  • Patent Document 1 describes a structure in which both ends of a piezoelectric bimorph element made of piezoelectric ceramics or the like are held by a low elastic body, and a vibrating material is connected to the center of the piezoelectric bimorph.
  • vibration is transmitted to a user through a connected vibration-receiving material by inputting an AC signal to the piezoelectric bimorph element and causing it to vibrate.
  • a structure in which the end of a thin plate-like diaphragm is connected to a piezoelectric film and stress is applied to the diaphragm can be considered.
  • the diaphragm vibrates in a direction orthogonal to the main surface due to expansion and contraction of the piezoelectric film. Since stress is applied to the diaphragm, it can be vibrated efficiently with respect to expansion and contraction of the piezoelectric film. Moreover, it can be made to vibrate more efficiently by adjusting the frequency which a piezoelectric film expands and contracts to the resonance frequency of the whole structure including a diaphragm and a film.
  • a structure in which a piezoelectric film is connected to a frame made of a prismatic member is also conceivable.
  • the prism members facing each other are connected by a piezoelectric film, and the piezoelectric film is disposed in the opening of the frame.
  • the piezoelectric film is arranged directly under the touch panel or the like, the user touches the piezoelectric film when the user presses the touch panel, and the vibration of the piezoelectric film itself is directly transmitted to the user. Can communicate efficiently.
  • an object of the present invention is to provide a vibration device that prevents variations in the bonding position between the diaphragm and the film.
  • the vibration device of the present invention includes a film that deforms in a plane direction when a voltage is applied thereto, a vibration member having an end bonded to the film, and a drive unit that applies a drive signal to the film.
  • the vibration device is characterized in that an adhesion area control means is provided in the vicinity of the adhesion area between the film and the vibration member.
  • the resonance frequency of the vibration member varies depending on the connection position with the film, according to the above configuration, since the adhesion position is uniquely determined by the adhesion region control means, the resonance frequency does not change and the vibration characteristics are always changed. Can be kept appropriate.
  • the adhesion region control means includes, for example, protrusions, grooves, or water-repellent portions (or oil-repellent portions) provided on the vibration member.
  • the protrusion can be attached to the diaphragm as a separate rib, or can be integrated with the diaphragm.
  • the adhesion region control means is a projection
  • the projection is used as a base point to expand and contract the film, so that the vibration characteristics can always be kept appropriate.
  • the adhesion region control means is provided over the entire width direction of the adhesion region. By being provided over the entire region in the width direction, the amount of protrusion of the adhesive is controlled when bonding with an adhesive, so that the vibration characteristics of each product are prevented from varying. Moreover, it is preferable that the adhesion region control means is provided on the end side of the vibration member.
  • examples of the film that deforms in the plane direction when a voltage is applied include a piezoelectric film, an electrostrictive film, an electret film, a composite film, and an electroactive polymer film. Moreover, it is good also as an aspect which affixes the material (for example, piezoelectric film) which has piezoelectricity on the main surface of the resin film which does not have piezoelectricity, and connects the said resin film to a diaphragm.
  • the piezoelectric film can be made of polyvinylidene fluoride or polylactic acid.
  • FIG. 1 is an external perspective view of a tactile presentation device 10.
  • FIG. It is the front view and side view of the tactile sense presentation device 10. It is side surface sectional drawing and front view which showed the connection location of a piezoelectric film and a diaphragm in detail.
  • 1 is a block diagram illustrating a configuration of a tactile sense presentation device 10.
  • FIG. 10 is an operation explanatory diagram of the tactile presentation device 10. It is the side view and front view of 10 A of tactile sense presentation apparatuses. It is the figure which showed the other implementation example of the adhesion
  • FIG. 1 is an external perspective view of a tactile sense presentation device 10 according to the first embodiment.
  • FIG. 2A is a front view of the tactile sense presentation device 10, and
  • FIG. 2B is a side view.
  • the tactile sense presentation device 10 includes a piezoelectric film 20, a diaphragm 40, and a touch panel 50.
  • the tactile sense presentation device 10 is a so-called keyboard, and a flat touch panel 50 is provided with a plurality of touch sensors 80 at positions corresponding to the key arrangement.
  • the touch sensor 80 corresponds to the touch detection unit of the present invention.
  • the touch sensor 80 may be of any type as long as it has a function of detecting a user's touch operation, and various types such as a membrane type, a capacitance type, and a piezoelectric film type may be used.
  • the touch panel 50 is attached to one main surface (front surface) of the flat diaphragm 40.
  • the diaphragm 40 has a rectangular shape in plan view.
  • the diaphragm 40 has both ends in the lateral direction fixed to the piezoelectric film 20 on the other main surface (back surface).
  • the diaphragm 40 is made of, for example, acrylic resin PMMA.
  • the diaphragm 40 may be made of other materials such as a metal plate, PET, polycarbonate (PC), a glass epoxy substrate, or glass.
  • the touch panel 50 is not essential.
  • a plurality of touch sensors 80 may be provided on the front surface of the diaphragm 40 at positions corresponding to the key arrangement.
  • the piezoelectric film 20 is described in a size that substantially overlaps the diaphragm 40 in plan view.
  • a plurality of strip-shaped piezoelectric films 20 are arranged at intervals in the length direction. It is also possible to use this mode.
  • the piezoelectric film 20 has a rectangular shape in plan view like the diaphragm 40. As shown in FIGS. 3A and 3B, the piezoelectric film 20 includes a rectangular base film 200 in a plan view, electrodes 201A formed on both opposing main surfaces of the base film 200, and An electrode 201B is provided.
  • the base film 200 is a piezoelectric resin, and is made of, for example, polyvinylidene fluoride (PVDF), a chiral polymer, or the like.
  • PVDF polyvinylidene fluoride
  • PLLA L-type polylactic acid
  • PVDF is used for the piezoelectric film
  • PVDF is water resistant, for example, an electronic device including a tactile presentation device can have the same click feeling in any humidity environment.
  • PLLA is a highly permeable material. Therefore, when a transparent material is used for an electrode and a diaphragm to be added to PLLA, when manufacturing a functional component that vibrates, Since the internal state of the functional parts can be visually confirmed, there is a merit in manufacturing. Moreover, the position of the key can be visually recognized even in a dark place by disposing a light source such as a light inside the functional component. Furthermore, since PLLA has no pyroelectricity, the same click feeling can be obtained under any temperature environment.
  • the base film 200 is composed of PLLA, as shown in FIG. 2 (A), by cutting each outer periphery to be approximately 45 ° with respect to the stretching direction, a rectangular shape is formed, Give piezoelectricity.
  • the 0 ° direction or 90 ° direction is substantially parallel to the width direction of the diaphragm 40, so that the diaphragm can be efficiently operated at a low voltage.
  • substantially 45 ° is 45 ⁇ 10 °.
  • 45 ° is ideal, in the range of 45 ° ⁇ 10 °, almost the same characteristics as 45 ° can be obtained.
  • the electrode 201A and the electrode 201B are formed on substantially the entire main surfaces of the base film 200.
  • the electrodes 201A and 201B are preferably vapor deposition electrodes such as aluminum (Al) and copper (Cu).
  • Al aluminum
  • Cu copper
  • ITO indium tin oxide
  • ZnO zinc oxide
  • polythiophene polythiophene
  • a silver nanowire electrode material e.g., you may use the electrode material which uses carbon, such as a carbon nanotube and a carbon fiber, for the electrode of the piezoelectric film 11.
  • FIG. A lead wiring conductor (not shown) is connected to the electrode 201A and the electrode 201B, and a drive signal is applied to the electrode 201A and the electrode 201B through the wiring conductor.
  • the diaphragm 40 is connected to the electrode 201A of the piezoelectric film 20 with an adhesive 60 and fixed. However, the diaphragm 40 may be connected to a portion of the piezoelectric film 20 where the electrode 201A is not formed. In this case, the diaphragm 40 is connected to the base film 200 via the adhesive 60.
  • Such a piezoelectric film 20 is deformed in the surface direction when a voltage is applied.
  • the drive unit 81 applies drive signals to the electrodes 201 ⁇ / b> A and 201 ⁇ / b> B of the piezoelectric film 20. Thereby, the piezoelectric film 20 expands and contracts in the surface direction.
  • the diaphragm 40 is curved to the opposite side (front side of the diaphragm 40) with respect to the side where the piezoelectric film 20 exists (the back side of the diaphragm 40). It is fixed to the piezoelectric film 20 so as to have a protruding shape. With this configuration, a hollow region 100 is formed between the diaphragm 40 and the piezoelectric film 20.
  • the side where the diaphragm 40 is located is the front side of the tactile sense presentation device 10
  • the side where the piezoelectric film 20 is located is the back side of the tactile sense presentation device 10.
  • the curved state of the diaphragm 40 is exaggerated for the sake of explanation.
  • the main surface of the diaphragm 40 and the main surface of the piezoelectric film 20 are closer to being parallel.
  • the hollow region 100 is desirably as small as possible.
  • the vibration plate 40 is fixed to the piezoelectric film 20 with the flat plate surface curved, the vibration film 40 is applied to the piezoelectric film 20 in a state where bending stress is applied as indicated by the white arrow F901 in FIG. Fixed.
  • the piezoelectric film 20 is in a state in which a tensile force is applied in a short direction on the main surface of the piezoelectric film 20 as indicated by a white arrow S901 in FIG.
  • FIG. 5 is an explanatory diagram of the operation of the tactile sense presentation device 10, and FIG. 5 (A) shows a state at a timing when the piezoelectric film 20 is contracted by a drive signal.
  • FIG. 5B shows a state where no drive signal is applied or the amplitude of the drive signal is zero.
  • FIG. 5C shows a state at the timing when the piezoelectric film 20 is extended by the drive signal.
  • the drive unit 81 applies a drive signal to the piezoelectric film 20 and applies an electric field in the first direction of the piezoelectric film 20
  • the piezoelectric film 20 moves to the vibration plate 40 as indicated by an arrow S 911 in FIG. Shrink along the direction perpendicular to the fixed end.
  • the diaphragm 40 is pulled in the central direction from a place (an end in the short direction) fixed to the piezoelectric film 20.
  • the diaphragm 40 is curved so as to protrude further forward as indicated by an arrow F911 in FIG.
  • the drive unit 81 applies a drive signal to the piezoelectric film 20 and applies an electric field in a second direction opposite to the first direction
  • the piezoelectric film 20 as shown by an arrow S912 in FIG. Extends along a direction orthogonal to the fixed end of the diaphragm 40. And the diaphragm 40 is pulled to the location (end part of a transversal direction) fixed to the piezoelectric film 20 from the center direction.
  • diaphragm 40 is in a curved state in which the amount of forward protrusion is reduced.
  • the vibration plate 40 changes to the state shown in FIG. 5A or the state shown in FIG. 5C based on the state shown in FIG. It vibrates along the direction (direction orthogonal to the main surface of the diaphragm 40). Thereby, the vibration according to the drive signal is transmitted to the touch panel 50 via the diaphragm 40 and transmitted to the user who touched the touch panel 50. Therefore, when the user touches the touch sensor 80 of the touch panel 50, the vibration is fed back, so that the user can feel that the key is “pressed”.
  • the tactile sense presentation device 10 can vibrate the diaphragm 40 efficiently and can transmit a strong vibration to some extent even when a piezoelectric film is used.
  • the tactile sense presentation device 10 can be made thinner than vibration caused by a motor or the like.
  • the hollow region 100 is filled with a soft resin such as silicone gel to suppress a sound generated by the vibration of the piezoelectric film 20 and the diaphragm 40.
  • the tactile sense presentation device 10 is provided with a rib 401 in the vicinity of the adhesion region between the piezoelectric film 20 and the diaphragm 40.
  • the rib 401 is a protrusion attached to the diaphragm, and is made of, for example, a single-sided adhesive tape, a resist, a resin member, or a metal member.
  • the rib 401 may be made of an adhesive hardened before the adhesive 60.
  • the rib 401 is provided on the end side of the diaphragm 40 in this way, when the piezoelectric film 20 and the diaphragm 40 are bonded with the adhesive 60, the rib 401 prevents the adhesive 60 from leaking, The amount of protrusion of the adhesive 60 is controlled. Thereby, the dispersion
  • the rib (adhesion region control means) 401 is arranged so as to prevent the adhesive 60 from spreading to the center side (bowed portion) of the diaphragm 40.
  • a rib 401B may be further arranged on the end side of the diaphragm 40.
  • the rib may be provided on the film side instead of the diaphragm side.
  • the piezoelectric film 20 may be firmly fixed not only by the adhesive 60 but also by the aluminum foil 501 and the grommet 502.
  • the end in the width direction of the diaphragm 40 is thinly cut and provided with a notch 503 so that the thickness does not increase.
  • the aluminum foil 501 is for preventing a mechanical load from being applied to the piezoelectric film 20 when the piezoelectric film 20 is fixed by the grommet 502.
  • the rib 401 when the rib 401 is in contact with the piezoelectric film 20, the rib 401 serves as a base point for the portion of the piezoelectric film 20 that expands and contracts. That is, the piezoelectric film 20 between the ribs 401 facing each other in plan view expands and contracts.
  • the resonance frequency of the diaphragm 40 changes depending on the connection position with the piezoelectric film 20, in this example, the connection position of the piezoelectric film 20 is uniquely determined by the position of the rib 401, so the resonance frequency may change. The vibration characteristics can always be kept appropriate.
  • the rib 401 is provided over the whole width direction of the adhesion
  • FIG. 6A is a side cross-sectional view of the haptic presentation device 10A
  • FIG. 6B is a plan view of the haptic presentation device 10A.
  • the vibration member 40A is made of a prismatic member, and forms a rectangular frame in plan view. That is, the vibration member 40A is open at the center when viewed in plan.
  • the vibration member 40A is made of a material such as acrylic resin PMMA, metal plate, PET, polycarbonate (PC), glass epoxy substrate, or glass.
  • the piezoelectric film 20A having a rectangular shape in plan view is connected to the vibrating member 40A so as to cover the opening.
  • the piezoelectric film 20A is bonded with an adhesive 60A on the upper surface of the vibration member 40A so as to connect the prism members facing each other. At this time, the piezoelectric film 20A is in a state in which a tensile force is applied in the longitudinal direction (length direction).
  • a frame body 40B is connected to the upper surface of the piezoelectric film 20A in the same shape as the vibration member 40A.
  • the piezoelectric film 20A and the frame 40B are also bonded with an adhesive 60A.
  • a contact film 65 is connected to the upper surface of the frame body 40B so as to cover the entire surface of the frame body 40B in plan view.
  • a touch panel 50 ⁇ / b> A is connected to the upper surface of the contact film 65.
  • the contact film 65 is made of a highly stretchable film material such as a polyester film or a polyurethane film. Thereby, the contact film 65 is supported in a state of facing the space between the piezoelectric film 20A.
  • the piezoelectric film 20A vibrates.
  • the contact film 65 and the piezoelectric film 20A come into contact with each other.
  • the vibration of the piezoelectric film 20A is transmitted to the user's finger via the contact film 65 and the touch panel 50A.
  • the resistance force when the user's finger pushes the piezoelectric film 20A through the contact film 65 varies depending on the change in the tension of the piezoelectric film 20A. This makes the user feel tactile feedback.
  • a rib 402 is provided in the vicinity of the adhesion region between the piezoelectric film 20A and the vibration member 40A. Since the rib 402 is provided on the vibration member 40A, when the piezoelectric film 20A and the vibration member 40A are bonded with the adhesive 60A, the rib 402 prevents the adhesive 60A from leaking, and the amount of protrusion of the adhesive 60A is small. Be controlled. Thereby, the dispersion
  • the rib 402 when the rib 402 is in contact with the piezoelectric film 20A, the rib 402 serves as a base point for the portion of the piezoelectric film 20A that expands and contracts. That is, the piezoelectric film 20A between the ribs 402 facing each other in plan view expands and contracts. Therefore, also in this example, since the connection position of the piezoelectric film 20A is uniquely determined by the position of the rib 402, the resonance frequency does not change and the vibration characteristics can always be kept appropriate.
  • ribs 402 are also provided in the vicinity of the adhesive region between the piezoelectric film 20A and the frame 40B. Therefore, when the piezoelectric film 20A and the frame 40B are bonded with the adhesive 60A, the rib 402 prevents the adhesive 60A from leaking, and the amount of protrusion of the adhesive 60A is controlled.
  • FIG. 7 is a diagram showing another example of realization of the adhesion region control means of the present invention.
  • FIG. 1 to FIG. 6 show the rib 401 (or rib 402) provided on the diaphragm
  • the adhesion region control means is integrated with the diaphragm 40 as shown in FIG. 7A, for example. It can also be realized by the protrusion 403.
  • the protrusion 403 is formed by molding the diaphragm 40 by press working or the like. In this case, since it is not necessary to provide a new member as the adhesion region control means, the cost is reduced and the member is not peeled off, so that the reliability is improved.
  • the adhesion region control means can be realized by a groove 404 provided in the diaphragm 40 as shown in FIG.
  • the groove 404 is formed by, for example, etching or machining.
  • the groove 404 can be formed by preparing a plurality of thin diaphragms and bonding them at locations other than the position of the groove 404. In this case, since the protruding adhesive 60 enters the groove 404, the bonding position between the diaphragm 40 and the piezoelectric film 20 does not change.
  • the adhesion region control means can also be realized by separately providing a base 405 in the diaphragm 40.
  • the base 405 is made of, for example, a single-sided adhesive tape, a resist, a resin member, or a metal member, like the rib 401.
  • the protruding adhesive 60 wraps around the side surface of the base 405, so that the bonding position between the diaphragm 40 and the piezoelectric film 20 does not change.
  • the adhesion region control means can also be realized by providing a water-repellent portion (or oil-repellent portion) 406 at a portion of the diaphragm 40 where the adhesive is not applied.
  • the water repellent portion 406 is formed by applying a coating material such as a fluorine coating or a silicone coating.
  • the water repellent portion 406 can also be realized by baking fluorine. Note that the structures illustrated in FIGS. 7A to 7D may be combined as appropriate. For example, both the base 405 in FIG. 7C and the water-repellent portion (or oil-repellent portion) 406 in FIG. 7D may be provided.
  • a piezoelectric film is shown as an example of “a film that deforms in a plane direction when a voltage is applied”, but the present invention is not limited to a piezoelectric film.
  • Other examples of the film that deforms in the plane direction when a voltage is applied include an electrostrictive film, an electret film, a composite film, and an electroactive polymer film.
  • the electroactive film is a film that generates stress by electrical driving or a film that generates displacement by deformation.
  • the piezoelectric film 20 is directly connected to the vibration plate 40 .
  • the piezoelectric film 20 is indirectly connected to the vibration plate 40 via another resin film that does not have piezoelectricity. It is good also as an aspect made.
  • the piezoelectric film 20 may be attached to the main surface of the resin film, and the end of the resin film may be connected to the vibration plate 40.
  • a film such as an electrostrictive film, an electret film, a composite film, or an electroactive polymer film is attached to the main surface of the resin film, and the end of the resin film is connected to the diaphragm 40. It is also possible to adopt an aspect.
  • the “film that deforms in the plane direction when a voltage is applied” can be realized by using, for example, piezoelectric ceramics and a resin film.
  • it can be realized by connecting a plurality of resin films via piezoelectric ceramics and connecting each of the plurality of resin films to the diaphragm 40.
  • the “film that deforms in the plane direction when a voltage is applied” may be a single layer or may be laminated. In particular, stronger vibration can be obtained by increasing the number of stacked layers.
  • the tactile presentation device is shown as an example of the vibration device.
  • the vibration device of the present invention is not necessarily limited to the “tactile sense”.
  • a device that outputs sound such as a speaker is also used as the vibration device. An example.

Abstract

In this haptic device (10), ribs (401) are disposed in the vicinity of areas where a piezoelectric film (20) and vibration members (40) are bonded together. Because there are ribs (401) disposed on the vibration members (40), when the piezoelectric film (20) and the vibration members (40) are bonded with adhesive (60), the ribs (401) prevent leakage of the adhesive (60), limiting squeeze out of the adhesive (60). Consequently, variation in the bonding strength can be suppressed. Also, variation in the vibration characteristics across products can be prevented.

Description

振動装置および触覚提示装置Vibration device and tactile presentation device
 本発明は、振動を伝える振動装置に関する。 The present invention relates to a vibration device that transmits vibration.
 近年、振動装置の一例として、タッチパネル式のキーボード等において、利用者がキーをタッチした時に振動を伝えることで触覚フィードバックを与え、キーを「押した」と感じさせる触覚提示装置が提案されている。 2. Description of the Related Art In recent years, as an example of a vibration device, a touch-sensitive keyboard or the like has been proposed that provides a tactile feedback by transmitting vibration when a user touches a key and makes the key feel “pressed”. .
 例えば、特許文献1には、圧電セラミックス等からなる圧電バイモルフ素子の両端を低弾性体で保持し、当該圧電バイモルフの中央に被振動材を接続した構造が記載されている。特許文献1の構造では、圧電バイモルフ素子に交流信号を入力して振動させることにより、接続された被振動材を介して利用者に振動を伝える。 For example, Patent Document 1 describes a structure in which both ends of a piezoelectric bimorph element made of piezoelectric ceramics or the like are held by a low elastic body, and a vibrating material is connected to the center of the piezoelectric bimorph. In the structure of Patent Document 1, vibration is transmitted to a user through a connected vibration-receiving material by inputting an AC signal to the piezoelectric bimorph element and causing it to vibrate.
 しかし、圧電セラミックスは割れやすいという課題がある。一方で、圧電フィルムのような割れにくいものは、振動を伝える力が弱く、触覚提示装置に用いることが難しい。 However, there is a problem that piezoelectric ceramics are easily broken. On the other hand, a material that is difficult to break, such as a piezoelectric film, has a weak force to transmit vibration and is difficult to use for a tactile sense presentation device.
 そこで、例えば薄い板状の振動板の端部を圧電フィルムに接続し、当該振動板に応力をかけた状態とする構造が考えられる。この場合、振動板は、圧電フィルムの伸縮により、主面に直交する方向に振動する。振動板には、応力がかかっているため、圧電フィルムの伸縮に対して効率的に振動させることができる。また、圧電フィルムの伸縮する周波数を、振動板およびフィルムを含めた構造物全体の共振周波数に合わせることで、より効率的に振動させることができる。 Therefore, for example, a structure in which the end of a thin plate-like diaphragm is connected to a piezoelectric film and stress is applied to the diaphragm can be considered. In this case, the diaphragm vibrates in a direction orthogonal to the main surface due to expansion and contraction of the piezoelectric film. Since stress is applied to the diaphragm, it can be vibrated efficiently with respect to expansion and contraction of the piezoelectric film. Moreover, it can be made to vibrate more efficiently by adjusting the frequency which a piezoelectric film expands and contracts to the resonance frequency of the whole structure including a diaphragm and a film.
 また、例えば角柱形状の部材からなる枠体に圧電フィルムを接続する構造も考えられる。この場合、互いに向かい合う角柱部材同士を圧電フィルムで接続し、枠体の開口部分には圧電フィルムが配置されるようする。この場合、タッチパネル等の直下に圧電フィルムが配置されるため、利用者がタッチパネルを押下したときには圧電フィルムに触れることになり、圧電フィルムの振動自体が直接的に利用者に伝わるため、当該振動を効率的に伝えることができる。 Also, for example, a structure in which a piezoelectric film is connected to a frame made of a prismatic member is also conceivable. In this case, the prism members facing each other are connected by a piezoelectric film, and the piezoelectric film is disposed in the opening of the frame. In this case, since the piezoelectric film is arranged directly under the touch panel or the like, the user touches the piezoelectric film when the user presses the touch panel, and the vibration of the piezoelectric film itself is directly transmitted to the user. Can communicate efficiently.
特開2005-303937号公報JP 2005-303937 A
 振動板とフィルムと接着する場合、接着位置のばらつきが課題となる。振動板とフィルムとの接着位置にばらつきがあると、製品毎に振動の特性が異なることになる。 When bonding the diaphragm and the film, the variation in the bonding position becomes an issue. If there is variation in the bonding position between the diaphragm and the film, the vibration characteristics will be different for each product.
 そこで、本発明の目的は、振動板とフィルムとの接着位置のばらつきを防止する振動装置を提供することにある。 Therefore, an object of the present invention is to provide a vibration device that prevents variations in the bonding position between the diaphragm and the film.
 この発明の振動装置は、電圧を加えることで面方向に変形するフィルムと、前記フィルムに端部が接着される振動部材と、前記フィルムに駆動信号を印加する駆動部と、を備えている。 The vibration device of the present invention includes a film that deforms in a plane direction when a voltage is applied thereto, a vibration member having an end bonded to the film, and a drive unit that applies a drive signal to the film.
 そして、振動装置は、フィルムと振動部材との接着領域の近傍に、接着領域制御手段が設けられていることを特徴とする。 The vibration device is characterized in that an adhesion area control means is provided in the vicinity of the adhesion area between the film and the vibration member.
 振動部材の共振周波数は、フィルムとの接続位置によって変化するが、上記構成によれば、接着領域制御手段によって接着位置が一意に決まるため、共振周波数が変化することがなく、常に振動の特性を適切に保つことができる。 Although the resonance frequency of the vibration member varies depending on the connection position with the film, according to the above configuration, since the adhesion position is uniquely determined by the adhesion region control means, the resonance frequency does not change and the vibration characteristics are always changed. Can be kept appropriate.
 接着領域制御手段は、例えば振動部材に設けられた突起、溝、または撥水部分(もしくは撥油部分)からなる。突起は、振動板に別途リブとして取り付けることも可能であるし、振動板と一体化されている態様とすることも可能である。特に、接着領域制御手段が突起である場合、この突起が基点となってフィルムが伸縮されるため、常に振動の特性を適切に保つことができる。 The adhesion region control means includes, for example, protrusions, grooves, or water-repellent portions (or oil-repellent portions) provided on the vibration member. The protrusion can be attached to the diaphragm as a separate rib, or can be integrated with the diaphragm. In particular, when the adhesion region control means is a projection, the projection is used as a base point to expand and contract the film, so that the vibration characteristics can always be kept appropriate.
 なお、接着領域制御手段は、接着領域の幅方向の全域わたって設けられていることが好ましい。幅方向の全域にわたって設けられることで、接着剤で接着する場合に、当該接着剤のはみ出し量が制御されるため、製品毎に振動の特性がばらつくことを防止する。また、接着領域制御手段は、振動部材の端部側に設けられていることが好ましい。 In addition, it is preferable that the adhesion region control means is provided over the entire width direction of the adhesion region. By being provided over the entire region in the width direction, the amount of protrusion of the adhesive is controlled when bonding with an adhesive, so that the vibration characteristics of each product are prevented from varying. Moreover, it is preferable that the adhesion region control means is provided on the end side of the vibration member.
 なお、電圧を加えることで面方向に変形するフィルムは、例えば圧電フィルム、電歪フィルム、エレクトレットフィルム、コンポジットフィルム、または電気活性高分子フィルム等がある。また、圧電性を有しない樹脂フィルムの主面に圧電性を有する材料(例えば圧電フィルム)を貼り付けて、当該樹脂フィルムを振動板に接続する態様としてもよい。 Note that examples of the film that deforms in the plane direction when a voltage is applied include a piezoelectric film, an electrostrictive film, an electret film, a composite film, and an electroactive polymer film. Moreover, it is good also as an aspect which affixes the material (for example, piezoelectric film) which has piezoelectricity on the main surface of the resin film which does not have piezoelectricity, and connects the said resin film to a diaphragm.
 また、圧電フィルムは、ポリフッ化ビニリデンを材料とすることもできるし、ポリ乳酸を材料とすることもできる。 The piezoelectric film can be made of polyvinylidene fluoride or polylactic acid.
 この発明によれば、振動板とフィルムとの接着位置のばらつきを防止することができる。 According to this invention, it is possible to prevent variations in the bonding position between the diaphragm and the film.
触覚提示装置10の外観斜視図である。1 is an external perspective view of a tactile presentation device 10. FIG. 触覚提示装置10の正面図および側面図である。It is the front view and side view of the tactile sense presentation device 10. 圧電フィルムと振動板の接続箇所を詳細に示した側面断面図および正面図である。It is side surface sectional drawing and front view which showed the connection location of a piezoelectric film and a diaphragm in detail. 触覚提示装置10の構成を示すブロック図である。1 is a block diagram illustrating a configuration of a tactile sense presentation device 10. 触覚提示装置10の動作説明図である。FIG. 10 is an operation explanatory diagram of the tactile presentation device 10. 触覚提示装置10Aの側面図および正面図である。It is the side view and front view of 10 A of tactile sense presentation apparatuses. 接着領域制御手段の他の実現例を示した図である。It is the figure which showed the other implementation example of the adhesion | attachment area | region control means. 圧電フィルムと振動板の接続箇所を示した側面断面図である。It is side surface sectional drawing which showed the connection location of a piezoelectric film and a diaphragm.
 図1は、第1の実施形態に係る触覚提示装置10の外観斜視図である。図2(A)は、触覚提示装置10の正面図であり、図2(B)は、側面図である。 FIG. 1 is an external perspective view of a tactile sense presentation device 10 according to the first embodiment. FIG. 2A is a front view of the tactile sense presentation device 10, and FIG. 2B is a side view.
 触覚提示装置10は、圧電フィルム20、振動板40、およびタッチパネル50を備えている。触覚提示装置10は、いわゆるキーボードであり、平板状のタッチパネル50には、キー配列に対応した位置に複数のタッチセンサ80が設けられている。タッチセンサ80が本発明のタッチ検出部に相当する。タッチセンサ80は、ユーザのタッチ操作を検出する機能であればどの様な方式であってもよく、メンブレン式、静電容量式、圧電フィルム式、等の様々な方式を用いることができる。 The tactile sense presentation device 10 includes a piezoelectric film 20, a diaphragm 40, and a touch panel 50. The tactile sense presentation device 10 is a so-called keyboard, and a flat touch panel 50 is provided with a plurality of touch sensors 80 at positions corresponding to the key arrangement. The touch sensor 80 corresponds to the touch detection unit of the present invention. The touch sensor 80 may be of any type as long as it has a function of detecting a user's touch operation, and various types such as a membrane type, a capacitance type, and a piezoelectric film type may be used.
 タッチパネル50は、平板状の振動板40の一方の主面(正面)に装着されている。振動板40は、平面視して矩形状である。振動板40は、他方の主面の(背面)において短手方向の両端が圧電フィルム20に固定されている。振動板40は、例えばアクリル樹脂PMMAで構成されている。なお、振動板40は、金属板、PET、ポリカーボネイト(PC)、ガラスエポキシ基板、またはガラス等の他の材料を用いてもよい。 The touch panel 50 is attached to one main surface (front surface) of the flat diaphragm 40. The diaphragm 40 has a rectangular shape in plan view. The diaphragm 40 has both ends in the lateral direction fixed to the piezoelectric film 20 on the other main surface (back surface). The diaphragm 40 is made of, for example, acrylic resin PMMA. The diaphragm 40 may be made of other materials such as a metal plate, PET, polycarbonate (PC), a glass epoxy substrate, or glass.
 なお、タッチパネル50は、必須ではない。例えば、振動板40の正面において、キー配列に対応した位置に複数のタッチセンサ80を設ける態様とすることも可能である。また、この例では、圧電フィルム20は、平面視で振動板40にほぼ重なるような大きさで記載されているが、例えば短冊状の圧電フィルム20を、長さ方向に間隔をあけて複数配置する態様であってもよい。 Note that the touch panel 50 is not essential. For example, a plurality of touch sensors 80 may be provided on the front surface of the diaphragm 40 at positions corresponding to the key arrangement. In this example, the piezoelectric film 20 is described in a size that substantially overlaps the diaphragm 40 in plan view. For example, a plurality of strip-shaped piezoelectric films 20 are arranged at intervals in the length direction. It is also possible to use this mode.
 圧電フィルム20は、振動板40と同様に平面視して矩形状である。図3(A)および図3(B)に示すように、圧電フィルム20は、平面視して矩形状のベースフィルム200と、該ベースフィルム200の対向する両主面に形成された電極201Aおよび電極201Bを備える。 The piezoelectric film 20 has a rectangular shape in plan view like the diaphragm 40. As shown in FIGS. 3A and 3B, the piezoelectric film 20 includes a rectangular base film 200 in a plan view, electrodes 201A formed on both opposing main surfaces of the base film 200, and An electrode 201B is provided.
 ベースフィルム200は、圧電性樹脂であり、例えば、ポリフッ化ビニリデン(PVDF)、キラル高分子等を材料とする。キラル高分子は、例えば、L型ポリ乳酸(PLLA)等を用いる。 The base film 200 is a piezoelectric resin, and is made of, for example, polyvinylidene fluoride (PVDF), a chiral polymer, or the like. For example, L-type polylactic acid (PLLA) is used as the chiral polymer.
 圧電フィルムにPVDFを用いた場合、PVDFは耐水性があるため、例えば触覚提示装置を含む電子機器をどのような湿度環境下においても同じようなクリック感を得ることができる。 When PVDF is used for the piezoelectric film, since PVDF is water resistant, for example, an electronic device including a tactile presentation device can have the same click feeling in any humidity environment.
 また、圧電フィルムにPLLAを用いた場合、PLLAは透過性の高い材料であるため、PLLAに付加する電極や振動板を透明な材料を用いると、振動する機能部品等を製造する際に、当該機能部品の内部状況を視認出来るため、製造上のメリットがある。また、機能部品の内部にライト等の発光源を配置することによって暗いところでもキーの位置を視認することができる。さらに、PLLAは、焦電性が無いため、どのような温度環境下においても同じようなクリック感を得ることができる。 In addition, when PLLA is used for the piezoelectric film, PLLA is a highly permeable material. Therefore, when a transparent material is used for an electrode and a diaphragm to be added to PLLA, when manufacturing a functional component that vibrates, Since the internal state of the functional parts can be visually confirmed, there is a merit in manufacturing. Moreover, the position of the key can be visually recognized even in a dark place by disposing a light source such as a light inside the functional component. Furthermore, since PLLA has no pyroelectricity, the same click feeling can be obtained under any temperature environment.
 ベースフィルム200は、PLLAで構成される場合、図2(A)に示すように、延伸方向に対して各外周辺が略45°となるように裁断することで、矩形状を形成して、圧電性を持たせる。また、このように裁断したPLLAを用いることによって、0°方向もしくは90°方向が振動板40の幅方向とほぼ平行になるため、低電圧で効率的に振動板を動作させることができる。なお、略45°とは、45±10°である。45°が理想的ではあるが、45°±10°の範囲であれば、45°とほぼ同じ特性が得られる。 When the base film 200 is composed of PLLA, as shown in FIG. 2 (A), by cutting each outer periphery to be approximately 45 ° with respect to the stretching direction, a rectangular shape is formed, Give piezoelectricity. In addition, by using PLLA cut in this way, the 0 ° direction or 90 ° direction is substantially parallel to the width direction of the diaphragm 40, so that the diaphragm can be efficiently operated at a low voltage. Note that substantially 45 ° is 45 ± 10 °. Although 45 ° is ideal, in the range of 45 ° ± 10 °, almost the same characteristics as 45 ° can be obtained.
 電極201Aおよび電極201Bは、ベースフィルム200の両主面の略全面に形成されている。電極201Aおよび電極201Bは、アルミ(Al)、銅(Cu)等の蒸着電極が好ましい。なお、圧電フィルム11の電極に透明性が必要な場合は、酸化インジウムスズ(ITO)、酸化亜鉛(ZnO)、ポリチオフェンを主成分とする電極や、銀ナノワイヤ電極材料を用いることが好ましい。また、圧電フィルム11の電極には、カーボンナノチューブやカーボンファイバー等のカーボンを成分とする電極材料を用いてもよい。電極201Aおよび電極201Bには、図示しない引き出し用の配線導体が接続されており、駆動信号が当該配線導体を介して電極201Aおよび電極201Bへ印加されるようになっている。 The electrode 201A and the electrode 201B are formed on substantially the entire main surfaces of the base film 200. The electrodes 201A and 201B are preferably vapor deposition electrodes such as aluminum (Al) and copper (Cu). In addition, when transparency is required for the electrode of the piezoelectric film 11, it is preferable to use an electrode mainly composed of indium tin oxide (ITO), zinc oxide (ZnO), polythiophene, or a silver nanowire electrode material. Moreover, you may use the electrode material which uses carbon, such as a carbon nanotube and a carbon fiber, for the electrode of the piezoelectric film 11. FIG. A lead wiring conductor (not shown) is connected to the electrode 201A and the electrode 201B, and a drive signal is applied to the electrode 201A and the electrode 201B through the wiring conductor.
 振動板40は、圧電フィルム20の電極201Aに接着剤60で接続され、固定される。ただし、振動板40は、圧電フィルム20のうち電極201Aが形成されていない箇所に接続されるようにしてもよい。この場合、振動板40は、ベースフィルム200に接着剤60を介して接続される。 The diaphragm 40 is connected to the electrode 201A of the piezoelectric film 20 with an adhesive 60 and fixed. However, the diaphragm 40 may be connected to a portion of the piezoelectric film 20 where the electrode 201A is not formed. In this case, the diaphragm 40 is connected to the base film 200 via the adhesive 60.
 このような圧電フィルム20は、電圧を加えると面方向に変形する。図4に示すように、タッチパネル50に設けられたタッチセンサ80をユーザがタッチすると、駆動部81が圧電フィルム20の電極201Aおよび電極201Bに駆動信号を印加する。これにより圧電フィルム20が面方向に伸縮する。 Such a piezoelectric film 20 is deformed in the surface direction when a voltage is applied. As shown in FIG. 4, when the user touches the touch sensor 80 provided on the touch panel 50, the drive unit 81 applies drive signals to the electrodes 201 </ b> A and 201 </ b> B of the piezoelectric film 20. Thereby, the piezoelectric film 20 expands and contracts in the surface direction.
 図1および図2(B)に示すように、振動板40は、圧電フィルム20の存在する側(振動板40の背面側)に対して反対側(振動板40の正面側)に湾曲して突出する形状となるように、圧電フィルム20へ固定されている。この構成により、振動板40と圧電フィルム20との間には、中空領域100が形成される。そして、この振動板40のある側が触覚提示装置10の正面側となり、圧電フィルム20がある側が触覚提示装置10の背面側となる。 As shown in FIGS. 1 and 2B, the diaphragm 40 is curved to the opposite side (front side of the diaphragm 40) with respect to the side where the piezoelectric film 20 exists (the back side of the diaphragm 40). It is fixed to the piezoelectric film 20 so as to have a protruding shape. With this configuration, a hollow region 100 is formed between the diaphragm 40 and the piezoelectric film 20. The side where the diaphragm 40 is located is the front side of the tactile sense presentation device 10, and the side where the piezoelectric film 20 is located is the back side of the tactile sense presentation device 10.
 ただし、本実施形態において、振動板40の湾曲状態は、説明のために誇張して記載しており、実際には、振動板40の主面と圧電フィルム20の主面は、より平行に近く、中空領域100は、できるだけ少ないほうが望ましい。 However, in the present embodiment, the curved state of the diaphragm 40 is exaggerated for the sake of explanation. In practice, the main surface of the diaphragm 40 and the main surface of the piezoelectric film 20 are closer to being parallel. The hollow region 100 is desirably as small as possible.
 このように、振動板40は、平板面が湾曲した状態で圧電フィルム20に固定されるため、図2(B)の白抜き矢印F901のように、曲げ応力が加わった状態で圧電フィルム20に固定される。また、圧電フィルム20には、図2(B)の白抜き矢印S901に示すように、圧電フィルム20の主面における短手方向に引張力が係った状態となる。 Thus, since the vibration plate 40 is fixed to the piezoelectric film 20 with the flat plate surface curved, the vibration film 40 is applied to the piezoelectric film 20 in a state where bending stress is applied as indicated by the white arrow F901 in FIG. Fixed. In addition, the piezoelectric film 20 is in a state in which a tensile force is applied in a short direction on the main surface of the piezoelectric film 20 as indicated by a white arrow S901 in FIG.
 図5は、触覚提示装置10の動作説明図であり、図5(A)は、駆動信号により圧電フィルム20が縮んだタイミングでの状態を示す。図5(B)は、駆動信号が印加されていない、または駆動信号の振幅が0の状態を示す。図5(C)は、駆動信号により圧電フィルム20が伸びたタイミングでの状態を示す。 FIG. 5 is an explanatory diagram of the operation of the tactile sense presentation device 10, and FIG. 5 (A) shows a state at a timing when the piezoelectric film 20 is contracted by a drive signal. FIG. 5B shows a state where no drive signal is applied or the amplitude of the drive signal is zero. FIG. 5C shows a state at the timing when the piezoelectric film 20 is extended by the drive signal.
 駆動部81が、圧電フィルム20に駆動信号を印加し、圧電フィルム20の第一方向の電界を印加すると、図5(A)の矢印S911に示すように、圧電フィルム20は、振動板40の固定端に直交する方向に沿って収縮する。そして、振動板40は、圧電フィルム20に固定されている箇所(短手方向の端部)から中央方向に引っ張られる。これにより、振動板40は、図4(A)の矢印F911に示すように、前方へより突出するように湾曲する。 When the drive unit 81 applies a drive signal to the piezoelectric film 20 and applies an electric field in the first direction of the piezoelectric film 20, the piezoelectric film 20 moves to the vibration plate 40 as indicated by an arrow S 911 in FIG. Shrink along the direction perpendicular to the fixed end. Then, the diaphragm 40 is pulled in the central direction from a place (an end in the short direction) fixed to the piezoelectric film 20. Thereby, the diaphragm 40 is curved so as to protrude further forward as indicated by an arrow F911 in FIG.
 一方、駆動部81が、圧電フィルム20に駆動信号を印加し、上記第一方向とは逆の第二方向の電界を印加すると、図5(C)の矢印S912に示すように、圧電フィルム20は、振動板40の固定端に直交する方向に沿って伸張する。そして、振動板40は、中央方向から圧電フィルム20に固定されている箇所(短手方向の端部)に引っ張られる。これにより、振動板40は、図5(C)の矢印F912に示すように、前方への突出量が低下した湾曲状態となる。 On the other hand, when the drive unit 81 applies a drive signal to the piezoelectric film 20 and applies an electric field in a second direction opposite to the first direction, the piezoelectric film 20 as shown by an arrow S912 in FIG. Extends along a direction orthogonal to the fixed end of the diaphragm 40. And the diaphragm 40 is pulled to the location (end part of a transversal direction) fixed to the piezoelectric film 20 from the center direction. Thereby, as shown by arrow F912 in FIG. 5C, diaphragm 40 is in a curved state in which the amount of forward protrusion is reduced.
 したがって、振動板40は、駆動信号の振幅に応じて、図5(B)の状態を基準に、図5(A)の状態や図5(C)の状態に遷移して、正面方向および背面方向(振動板40主面に直交する方向)に沿って振動する。これにより、駆動信号に応じた振動が振動板40を介してタッチパネル50に伝達され、タッチパネル50をタッチしたユーザに伝達される。したがって、ユーザは、タッチパネル50のタッチセンサ80をタッチすると、振動がフィードバックされるため、キーを「押した」と感じることができる。 Therefore, the vibration plate 40 changes to the state shown in FIG. 5A or the state shown in FIG. 5C based on the state shown in FIG. It vibrates along the direction (direction orthogonal to the main surface of the diaphragm 40). Thereby, the vibration according to the drive signal is transmitted to the touch panel 50 via the diaphragm 40 and transmitted to the user who touched the touch panel 50. Therefore, when the user touches the touch sensor 80 of the touch panel 50, the vibration is fed back, so that the user can feel that the key is “pressed”.
 そして、振動板40には、非動作状態で定常的な曲げ応力が与えられているため、圧電フィルム20の伸張時に振動板40に与えられる力は、当該曲げ応力と同じ方向となる。したがって、触覚提示装置10は、振動板40を効率的に振動させることができ、圧電フィルムを用いた場合であってもある程度強い振動を伝えることができる。また、モータ等による振動に比べると、触覚提示装置10を薄くすることができる。 Since the diaphragm 40 is given a steady bending stress in a non-operating state, the force applied to the diaphragm 40 when the piezoelectric film 20 is stretched is in the same direction as the bending stress. Therefore, the tactile sense presentation device 10 can vibrate the diaphragm 40 efficiently and can transmit a strong vibration to some extent even when a piezoelectric film is used. In addition, the tactile sense presentation device 10 can be made thinner than vibration caused by a motor or the like.
 なお、中空領域100には、シリコーンゲル等の柔らかい樹脂を充填し、圧電フィルム20および振動板40が振動することにより生じる音を抑制することが望ましい。 In addition, it is desirable that the hollow region 100 is filled with a soft resin such as silicone gel to suppress a sound generated by the vibration of the piezoelectric film 20 and the diaphragm 40.
 そして、図3(A)に示したように、触覚提示装置10は、圧電フィルム20と振動板40との接着領域の近傍に、リブ401が設けられている。リブ401は、振動板に取り付けられた突起であり、例えば片面粘着テープ、レジスト、樹脂部材、または金属部材等からなる。あるいは、リブ401は、接着剤60よりも先に固めた接着剤からなる態様であってもよい。 Then, as shown in FIG. 3A, the tactile sense presentation device 10 is provided with a rib 401 in the vicinity of the adhesion region between the piezoelectric film 20 and the diaphragm 40. The rib 401 is a protrusion attached to the diaphragm, and is made of, for example, a single-sided adhesive tape, a resist, a resin member, or a metal member. Alternatively, the rib 401 may be made of an adhesive hardened before the adhesive 60.
 このようにリブ401が振動板40の端部側に設けられているため、圧電フィルム20と振動板40とを接着剤60で接着する時に、リブ401が接着剤60の漏洩を防止し、当該接着剤60のはみ出し量が制御される。これにより、接着強度のばらつきを抑制することができる。また、製品毎に振動の特性がばらつくことを防止することができる。 Since the rib 401 is provided on the end side of the diaphragm 40 in this way, when the piezoelectric film 20 and the diaphragm 40 are bonded with the adhesive 60, the rib 401 prevents the adhesive 60 from leaking, The amount of protrusion of the adhesive 60 is controlled. Thereby, the dispersion | variation in adhesive strength can be suppressed. Moreover, it is possible to prevent the vibration characteristics from being varied for each product.
 なお、図3(A)に示した例では、リブ(接着領域制御手段)401は、接着剤60が振動板40の中心側(弓なり部分)に広がることを防止するように配置しているが、例えば図8(A)に示すように、更に振動板40の端部側にリブ401Bを配置してもよい。これにより、振動板40の端部側からも接着剤60がはみ出ないようになる。また、リブは、振動板側ではなく、フィルム側に設けてもよい。さらに、図8(B)に示すように、圧電フィルム20は、接着剤60だけでなく、アルミ箔501およびグロメット502により、強固に固定されるようになっていてもよい。この場合、振動板40の幅方向の端部は、薄く削られ、切り欠き503が設けられ、厚みが増大しないようになっている。また、アルミ箔501は、グロメット502で圧電フィルム20を固定する際に圧電フィルム20に機械的負荷がかからないようにするためのものである。 In the example shown in FIG. 3A, the rib (adhesion region control means) 401 is arranged so as to prevent the adhesive 60 from spreading to the center side (bowed portion) of the diaphragm 40. For example, as shown in FIG. 8A, a rib 401B may be further arranged on the end side of the diaphragm 40. As a result, the adhesive 60 does not protrude from the end side of the diaphragm 40. The rib may be provided on the film side instead of the diaphragm side. Further, as shown in FIG. 8B, the piezoelectric film 20 may be firmly fixed not only by the adhesive 60 but also by the aluminum foil 501 and the grommet 502. In this case, the end in the width direction of the diaphragm 40 is thinly cut and provided with a notch 503 so that the thickness does not increase. Further, the aluminum foil 501 is for preventing a mechanical load from being applied to the piezoelectric film 20 when the piezoelectric film 20 is fixed by the grommet 502.
 さらに、リブ401が圧電フィルム20に接触している場合、圧電フィルム20の伸縮する部分は、リブ401が基点となる。すなわち、平面視して対向するリブ401の間の圧電フィルム20が伸縮する。振動板40の共振周波数は、圧電フィルム20との接続位置によって変化するが、この例では、リブ401の位置によって圧電フィルム20の接続位置が一意に決まっているため、共振周波数が変化することがなく、常に振動の特性を適切に保つことができる。 Furthermore, when the rib 401 is in contact with the piezoelectric film 20, the rib 401 serves as a base point for the portion of the piezoelectric film 20 that expands and contracts. That is, the piezoelectric film 20 between the ribs 401 facing each other in plan view expands and contracts. Although the resonance frequency of the diaphragm 40 changes depending on the connection position with the piezoelectric film 20, in this example, the connection position of the piezoelectric film 20 is uniquely determined by the position of the rib 401, so the resonance frequency may change. The vibration characteristics can always be kept appropriate.
 なお、リブ401は、図3(B)に示すように、圧電フィルム20の接着領域の幅方向の全域にわたって設けられていることが好ましい。幅方向の全域にわたって設けられていることで、幅方向の全域にわたって接着剤60の漏洩が防止される。 In addition, it is preferable that the rib 401 is provided over the whole width direction of the adhesion | attachment area | region of the piezoelectric film 20, as shown in FIG.3 (B). By being provided over the entire region in the width direction, leakage of the adhesive 60 is prevented over the entire region in the width direction.
 次に、触覚提示装置10の変形例である触覚提示装置10Aについて説明する。図6(A)は、触覚提示装置10Aの側面断面図であり、図6(B)は触覚提示装置10Aの平面図である。 Next, a tactile presentation device 10A that is a modification of the tactile presentation device 10 will be described. 6A is a side cross-sectional view of the haptic presentation device 10A, and FIG. 6B is a plan view of the haptic presentation device 10A.
 この例では、振動部材40Aは、角柱形状の部材からなり、平面視して長方形上の枠体を形成している。すなわち、振動部材40Aは、平面視して中央部分が開口している。振動部材40Aは、アクリル樹脂PMMA、金属板、PET、ポリカーボネイト(PC)、ガラスエポキシ基板、またはガラス等の材料で構成されている。 In this example, the vibration member 40A is made of a prismatic member, and forms a rectangular frame in plan view. That is, the vibration member 40A is open at the center when viewed in plan. The vibration member 40A is made of a material such as acrylic resin PMMA, metal plate, PET, polycarbonate (PC), glass epoxy substrate, or glass.
 平面視した形状が長方形状である圧電フィルム20Aは、この開口部分を覆うように、振動部材40Aに接続されている。圧電フィルム20Aは、互いに向かい合う角柱部材同士を接続するように、振動部材40Aの上面において接着剤60Aで接着されている。この時、圧電フィルム20Aは、長手方向(長さ方向)に引張力がかかった状態となる。 The piezoelectric film 20A having a rectangular shape in plan view is connected to the vibrating member 40A so as to cover the opening. The piezoelectric film 20A is bonded with an adhesive 60A on the upper surface of the vibration member 40A so as to connect the prism members facing each other. At this time, the piezoelectric film 20A is in a state in which a tensile force is applied in the longitudinal direction (length direction).
 そして、圧電フィルム20Aの上面には、さらに振動部材40Aと同じ形状で、枠体40Bが接続されている。圧電フィルム20Aと枠体40Bも、接着剤60Aで接着されている。枠体40Bの上面には、平面視して枠体40Bの全面を覆うように接触フィルム65が接続される。接触フィルム65の上面にはタッチパネル50Aが接続される。接触フィルム65は、ポリエステルフィルムまたはポリウレタンフィルム等の伸縮性の高いフィルム材料で構成されている。これにより、接触フィルム65は、圧電フィルム20Aとの間に空間を隔てて対向する状態で支持される。 Further, a frame body 40B is connected to the upper surface of the piezoelectric film 20A in the same shape as the vibration member 40A. The piezoelectric film 20A and the frame 40B are also bonded with an adhesive 60A. A contact film 65 is connected to the upper surface of the frame body 40B so as to cover the entire surface of the frame body 40B in plan view. A touch panel 50 </ b> A is connected to the upper surface of the contact film 65. The contact film 65 is made of a highly stretchable film material such as a polyester film or a polyurethane film. Thereby, the contact film 65 is supported in a state of facing the space between the piezoelectric film 20A.
 触覚提示装置10Aでは、図6(C)に示すように、利用者の指がタッチパネル50Aに接触すると、圧電フィルム20Aが振動する。そして、利用者がタッチパネル50Aを介して接触フィルム65を押し込むと、接触フィルム65と圧電フィルム20Aとが接触する。これにより、利用者の指に接触フィルム65およびタッチパネル50Aを介して圧電フィルム20Aの振動が伝わる。また、利用者の指が接触フィルム65を介して圧電フィルム20Aを押し込む際の抵抗力が、当該圧電フィルム20Aの張力の変化によって変動する。これにより、利用者に触覚フィードバックを感じさせられる。 In the tactile sense presentation device 10A, as shown in FIG. 6C, when the user's finger contacts the touch panel 50A, the piezoelectric film 20A vibrates. When the user pushes in the contact film 65 via the touch panel 50A, the contact film 65 and the piezoelectric film 20A come into contact with each other. Thereby, the vibration of the piezoelectric film 20A is transmitted to the user's finger via the contact film 65 and the touch panel 50A. Further, the resistance force when the user's finger pushes the piezoelectric film 20A through the contact film 65 varies depending on the change in the tension of the piezoelectric film 20A. This makes the user feel tactile feedback.
 そして、触覚提示装置10Aは、圧電フィルム20Aと振動部材40Aとの接着領域の近傍に、リブ402が設けられている。リブ402が振動部材40Aに設けられているため、圧電フィルム20Aと振動部材40Aとを接着剤60Aで接着する時に、リブ402が接着剤60Aの漏洩を防止し、当該接着剤60Aのはみ出し量が制御される。これにより、接着強度のばらつきを抑制することができる。また、製品毎に振動の特性がばらつくことを防止することができる。 In the tactile sense presentation device 10A, a rib 402 is provided in the vicinity of the adhesion region between the piezoelectric film 20A and the vibration member 40A. Since the rib 402 is provided on the vibration member 40A, when the piezoelectric film 20A and the vibration member 40A are bonded with the adhesive 60A, the rib 402 prevents the adhesive 60A from leaking, and the amount of protrusion of the adhesive 60A is small. Be controlled. Thereby, the dispersion | variation in adhesive strength can be suppressed. Moreover, it is possible to prevent the vibration characteristics from being varied for each product.
 さらに、リブ402が圧電フィルム20Aに接触している場合、圧電フィルム20Aの伸縮する部分は、リブ402が基点となる。すなわち、平面視して対向するリブ402の間の圧電フィルム20Aが伸縮する。したがって、この例でも、リブ402の位置によって圧電フィルム20Aの接続位置が一意に決まっているため、共振周波数が変化することがなく、常に振動の特性を適切に保つことができる。 Furthermore, when the rib 402 is in contact with the piezoelectric film 20A, the rib 402 serves as a base point for the portion of the piezoelectric film 20A that expands and contracts. That is, the piezoelectric film 20A between the ribs 402 facing each other in plan view expands and contracts. Therefore, also in this example, since the connection position of the piezoelectric film 20A is uniquely determined by the position of the rib 402, the resonance frequency does not change and the vibration characteristics can always be kept appropriate.
 また、この例では、圧電フィルム20Aと枠体40Bとの接着領域の近傍にも、リブ402が設けられている。したがって、圧電フィルム20Aと枠体40Bとを接着剤60Aで接着する時に、リブ402が接着剤60Aの漏洩を防止し、当該接着剤60Aのはみ出し量が制御される。 In this example, ribs 402 are also provided in the vicinity of the adhesive region between the piezoelectric film 20A and the frame 40B. Therefore, when the piezoelectric film 20A and the frame 40B are bonded with the adhesive 60A, the rib 402 prevents the adhesive 60A from leaking, and the amount of protrusion of the adhesive 60A is controlled.
 次に、図7は、本発明の接着領域制御手段の他の実現例を示した図である。図1乃至図6においては、振動板に設けられたリブ401(またはリブ402)について示したが、接着領域制御手段は、例えば図7(A)に示すように、振動板40と一体化された突起403で実現することも可能である。この場合、突起403は、振動板40をプレス加工等で成型することにより形成される。この場合、接着領域制御手段として新たな部材を設ける必要がないため、コストが低減されるとともに、部材が剥がれることもないため、信頼性も向上する。 Next, FIG. 7 is a diagram showing another example of realization of the adhesion region control means of the present invention. Although FIG. 1 to FIG. 6 show the rib 401 (or rib 402) provided on the diaphragm, the adhesion region control means is integrated with the diaphragm 40 as shown in FIG. 7A, for example. It can also be realized by the protrusion 403. In this case, the protrusion 403 is formed by molding the diaphragm 40 by press working or the like. In this case, since it is not necessary to provide a new member as the adhesion region control means, the cost is reduced and the member is not peeled off, so that the reliability is improved.
 また、接着領域制御手段は、図7(B)に示すように、振動板40に設けた溝404により実現することも可能である。溝404は、例えばエッチングまたは機械加工により形成される。また、複数の薄い振動板を用意し、溝404の位置を除く箇所で貼り合わせることでも溝404を形成することができる。この場合、はみ出した接着剤60は、溝404に入り込むため、振動板40と圧電フィルム20の接着位置が変化することがない。 Further, the adhesion region control means can be realized by a groove 404 provided in the diaphragm 40 as shown in FIG. The groove 404 is formed by, for example, etching or machining. Alternatively, the groove 404 can be formed by preparing a plurality of thin diaphragms and bonding them at locations other than the position of the groove 404. In this case, since the protruding adhesive 60 enters the groove 404, the bonding position between the diaphragm 40 and the piezoelectric film 20 does not change.
 また、接着領域制御手段は、図7(C)に示すように、振動板40に別途、土台405を設けることにより実現することも可能である。土台405は、リブ401と同様に、例えば片面粘着テープ、レジスト、樹脂部材、または金属部材等からなる。この場合も溝404と同様に、はみ出した接着剤60は、土台405の側面側に回り込むため、振動板40と圧電フィルム20の接着位置が変化することがない。 Further, as shown in FIG. 7C, the adhesion region control means can also be realized by separately providing a base 405 in the diaphragm 40. The base 405 is made of, for example, a single-sided adhesive tape, a resist, a resin member, or a metal member, like the rib 401. Also in this case, like the groove 404, the protruding adhesive 60 wraps around the side surface of the base 405, so that the bonding position between the diaphragm 40 and the piezoelectric film 20 does not change.
 また、接着領域制御手段は、図7(D)に示すように、振動板40のうち接着剤を塗布しない箇所に撥水部分(または撥油部分)406を設けることでも実現可能である。撥水部分406は、フッ素コーティングまたはシリコーンコーティング等のコーティング材を塗布することで形成される。また、撥水部分406は、フッ素を焼き付けることでも実現可能である。なお、図7(A)乃至(D)に示した構造は、適宜組み合わせて用いてもよい。例えば、図7(C)の土台405と図7(D)の撥水部分(または撥油部分)406の両方を備えていてもよい。 Further, as shown in FIG. 7D, the adhesion region control means can also be realized by providing a water-repellent portion (or oil-repellent portion) 406 at a portion of the diaphragm 40 where the adhesive is not applied. The water repellent portion 406 is formed by applying a coating material such as a fluorine coating or a silicone coating. The water repellent portion 406 can also be realized by baking fluorine. Note that the structures illustrated in FIGS. 7A to 7D may be combined as appropriate. For example, both the base 405 in FIG. 7C and the water-repellent portion (or oil-repellent portion) 406 in FIG. 7D may be provided.
 なお、本実施形態では、「電圧を加えることで面方向に変形するフィルム」の一例として圧電フィルムを示したが、圧電フィルムに限るものではない。電圧を加えることで面方向に変形するフィルムは、他にも、例えば電歪フィルム、エレクトレットフィルム、コンポジットフィルム、または電気活性高分子フィルム等がある。なお、電気活性フィルムとは、電気的駆動によって応力を発生するフィルムまたは変形して変位を発生するフィルムである。具体的には、電歪フィルム、コンポジット材料(圧電セラミックスを樹脂モールドした材料)、電気駆動型エラストマー、または液晶エラストマー等がある。 In this embodiment, a piezoelectric film is shown as an example of “a film that deforms in a plane direction when a voltage is applied”, but the present invention is not limited to a piezoelectric film. Other examples of the film that deforms in the plane direction when a voltage is applied include an electrostrictive film, an electret film, a composite film, and an electroactive polymer film. The electroactive film is a film that generates stress by electrical driving or a film that generates displacement by deformation. Specifically, there are an electrostrictive film, a composite material (a material obtained by resin-molding piezoelectric ceramics), an electrically driven elastomer, or a liquid crystal elastomer.
 また、本実施形態では、圧電フィルム20が振動板40に直接接続される例を示したが、圧電フィルム20は、圧電性を有しない他の樹脂フィルムを介して間接的に振動板40に接続される態様としてもよい。例えば、圧電フィルム20が樹脂フィルムの主面に貼り付けられ、当該樹脂フィルムの端部が振動板40に接続される態様とすることも可能である。無論、他にも、電歪フィルム、エレクトレットフィルム、コンポジットフィルム、または電気活性高分子フィルム等のフィルムが樹脂フィルムの主面に貼り付けられ、該樹脂フィルムの端部が振動板40に接続される態様とすることも可能である。 In this embodiment, the example in which the piezoelectric film 20 is directly connected to the vibration plate 40 has been shown. However, the piezoelectric film 20 is indirectly connected to the vibration plate 40 via another resin film that does not have piezoelectricity. It is good also as an aspect made. For example, the piezoelectric film 20 may be attached to the main surface of the resin film, and the end of the resin film may be connected to the vibration plate 40. Of course, in addition, a film such as an electrostrictive film, an electret film, a composite film, or an electroactive polymer film is attached to the main surface of the resin film, and the end of the resin film is connected to the diaphragm 40. It is also possible to adopt an aspect.
 また、「電圧を加えることで面方向に変形するフィルム」は、例えば圧電セラミックスおよび樹脂フィルムを用いることでも実現することができる。例えば、複数の樹脂フィルムを圧電セラミックスを介して接続し、これら複数の樹脂フィルムをそれぞれ振動板40に接続することで実現することができる。 Also, the “film that deforms in the plane direction when a voltage is applied” can be realized by using, for example, piezoelectric ceramics and a resin film. For example, it can be realized by connecting a plurality of resin films via piezoelectric ceramics and connecting each of the plurality of resin films to the diaphragm 40.
 さらに、「電圧を加えることで面方向に変形するフィルム」は、単層でも良いし、積層しても良い。特に積層する枚数を増やすことによってより強い振動を得ることが出来る。なお、上述の例では、振動装置の一例として触覚提示装置を示したが、本発明の振動装置は、必ずしも「触覚」に限るものではなく、例えばスピーカ等の音を出力する装置も、振動装置の一例となる。 Furthermore, the “film that deforms in the plane direction when a voltage is applied” may be a single layer or may be laminated. In particular, stronger vibration can be obtained by increasing the number of stacked layers. In the above-described example, the tactile presentation device is shown as an example of the vibration device. However, the vibration device of the present invention is not necessarily limited to the “tactile sense”. For example, a device that outputs sound such as a speaker is also used as the vibration device. An example.
10,10A…触覚提示装置
20,20A…圧電フィルム
40…振動板
40A…振動部材
40B…枠体
50…タッチパネル
50A…タッチパネル
60,60A…接着剤
65…接触フィルム
80…タッチセンサ
81…駆動部
100…中空領域
200…ベースフィルム
201A,201B…電極
401,402…リブ
403…突起
404…溝
405…撥水部分
DESCRIPTION OF SYMBOLS 10,10A ... Tactile presentation device 20, 20A ... Piezoelectric film 40 ... Diaphragm 40A ... Vibration member 40B ... Frame 50 ... Touch panel 50A ... Touch panel 60, 60A ... Adhesive 65 ... Contact film 80 ... Touch sensor 81 ... Drive part 100 ... hollow area 200 ... base films 201A, 201B ... electrodes 401, 402 ... ribs 403 ... projections 404 ... grooves 405 ... water repellent portions

Claims (12)

  1.  電圧を加えることで面方向に変形するフィルムと、
     前記フィルムに端部が接着され、前記フィルムと空間を隔てて振動部材と、
     前記フィルムに駆動信号を印加する駆動部と、を備えた振動装置であって、
     前記フィルムと前記振動部材との接着領域の近傍に、接着領域制御手段が設けられていることを特徴とする振動装置。
    A film that deforms in the surface direction by applying voltage;
    An end portion is bonded to the film, and the vibration member is separated from the film by a space.
    A drive unit that applies a drive signal to the film,
    A vibration device characterized in that an adhesion region control means is provided in the vicinity of an adhesion region between the film and the vibration member.
  2.  前記接着領域制御手段は、前記接着領域の幅方向の全域わたって設けられている請求項1に記載の振動装置。 The vibration device according to claim 1, wherein the adhesion region control means is provided over the entire width direction of the adhesion region.
  3.  前記接着領域制御手段は、前記振動部材の端部側に設けられている請求項1または請求項2に記載の振動装置。 The vibration device according to claim 1 or 2, wherein the adhesion region control means is provided on an end portion side of the vibration member.
  4.  前記接着領域制御手段は、前記振動部材に設けられた突起からなる請求項3に記載の振動装置。 4. The vibration device according to claim 3, wherein the adhesion region control means includes a protrusion provided on the vibration member.
  5.  前記突起は、前記振動部材に取り付けられたリブである請求項4に記載の振動装置。 The vibration device according to claim 4, wherein the protrusion is a rib attached to the vibration member.
  6.  前記突起は、前記振動部材と一体化されている請求項4に記載の振動装置。 The vibration device according to claim 4, wherein the protrusion is integrated with the vibration member.
  7.  前記接着領域制御手段は、前記振動部材に設けられた溝からなる請求項3に記載の振動装置。 4. The vibration device according to claim 3, wherein the adhesion region control means includes a groove provided in the vibration member.
  8.  前記接着領域制御手段は、前記振動部材に設けられた撥水部分または撥油部分からなる請求項1乃至請求項3のいずれかに記載の振動装置。 4. The vibration device according to claim 1, wherein the adhesion region control means includes a water repellent portion or an oil repellent portion provided on the vibration member.
  9.  前記フィルムは、ポリフッ化ビニリデンが含まれていることを特徴とする請求項1乃至請求項8のいずれかに記載の振動装置。 The vibration device according to any one of claims 1 to 8, wherein the film contains polyvinylidene fluoride.
  10.  前記フィルムは、ポリ乳酸が含まれていることを特徴とする請求項1乃至請求項8のいずれかに記載の振動装置。 The vibration device according to any one of claims 1 to 8, wherein the film contains polylactic acid.
  11.  電圧を加えることで面方向に変形するフィルムと、
     前記フィルムと第1の空間を隔てて設けられる振動部材と、
     前記振動部材の端部に設けられ、前記フィルムと前記振動板との間に第2の空間を形成する突起と、
     を備え、
     前記第2の空間に接着剤が設けられていることを特徴とする振動装置。
    A film that deforms in the surface direction by applying voltage;
    A vibrating member provided across the film and the first space;
    A protrusion provided at an end of the vibration member, and forming a second space between the film and the vibration plate;
    With
    A vibration device, wherein an adhesive is provided in the second space.
  12.  請求項1乃至請求項11のいずれかに記載の振動装置と、
     タッチ操作を検出するタッチ検出部と、
     を備えた触覚提示装置であって、
     前記駆動部は、前記タッチ検出部がタッチ操作を検出したときに、前記フィルムに駆動信号を印加する触覚提示装置。
    A vibration device according to any one of claims 1 to 11,
    A touch detection unit for detecting a touch operation;
    A tactile presentation device comprising:
    The drive unit is a tactile presentation device that applies a drive signal to the film when the touch detection unit detects a touch operation.
PCT/JP2015/079117 2014-10-24 2015-10-15 Vibration device and haptic device WO2016063782A1 (en)

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WO2018139217A1 (en) * 2017-01-27 2018-08-02 株式会社村田製作所 Tactile sensation presentation device
JP2019185610A (en) * 2018-04-16 2019-10-24 株式会社デンソーテン Touch panel device and fixing method for operation panel

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