WO2016019755A1 - Capteur de vibrations du type résonateur à ondes acoustiques de surface et système de détection de vibrations - Google Patents

Capteur de vibrations du type résonateur à ondes acoustiques de surface et système de détection de vibrations Download PDF

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Publication number
WO2016019755A1
WO2016019755A1 PCT/CN2015/081118 CN2015081118W WO2016019755A1 WO 2016019755 A1 WO2016019755 A1 WO 2016019755A1 CN 2015081118 W CN2015081118 W CN 2015081118W WO 2016019755 A1 WO2016019755 A1 WO 2016019755A1
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WIPO (PCT)
Prior art keywords
acoustic wave
matching network
wave resonator
surface acoustic
vibration sensor
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PCT/CN2015/081118
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English (en)
Chinese (zh)
Inventor
董兰飞
滕学志
陈海军
韦江波
孙培峰
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软控股份有限公司
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Application filed by 软控股份有限公司 filed Critical 软控股份有限公司
Priority to EP15829643.4A priority Critical patent/EP3176550B1/fr
Publication of WO2016019755A1 publication Critical patent/WO2016019755A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Definitions

  • the present invention relates to a surface acoustic wave sensor, and more particularly to a surface acoustic wave resonator type vibration sensor.
  • SAW sensors are classified into a resonator type and a delay line type according to the function of the chip device.
  • a single-port surface acoustic wave resonator is one of the types of surface acoustic wave sensors, including a central interdigital transducer (IDT) and a reflective grating on both sides of a symmetrically distributed interdigital transducer, a central interdigital transducer The reflection grids on both sides of the distribution are used to form an acoustic cavity, and the interdigital transducer is used for mutual conversion of sound and electricity.
  • IDT central interdigital transducer
  • the reflection grids on both sides of the distribution are used to form an acoustic cavity, and the interdigital transducer is used for mutual conversion of sound and electricity.
  • Radio Frequency Identification is a technology that uses contactless tags to automatically identify target objects and acquire relevant data through RF signals.
  • Surface acoustic wave radio frequency identification technology is a delay line type surface acoustic wave sensor.
  • vibrations which can cause damage or failure of the goods when the vibration is too severe.
  • the vibration conditions during the transportation of these goods require real-time monitoring. In particular, it is necessary to record whether vibrations exceeding the threshold have occurred during the transportation process. Once the vibration acceleration exceeds the set threshold, record the occurrence of the super-vibration of the corresponding cargo, or send an alarm signal to the monitoring system to take remedial measures.
  • the vibration sensor comprises a surface acoustic wave device and a reader, and the surface acoustic wave device comprises a first antenna 301, a piezoelectric substrate 1, an interdigital transducer 2, a reflective grating and an elastic component.
  • the first antenna 301, the interdigital transducer 2 and the reflective grid are all disposed on the piezoelectric substrate 1, and the first antenna 301 is connected to the interdigital transducer 2.
  • the elastic element is connected to the measuring reflector and forms a normally open circuit.
  • the measuring reflection grid and the elastic element and the matching network together form a closed loop.
  • RFID radio frequency tag
  • the piezoelectric substrate of the area is used for mounting the reflective grid, which increases the manufacturing cost of the sensor on the one hand, and increases the volume of the sensor on the other hand, and is not suitable for the miniaturization of the product in the market.
  • the surface acoustic wave delay line structure has bidirectional energy loss. When the surface acoustic wave propagates energy to both sides of the interdigital transducer, the surface acoustic wave energy on one side is lost due to the surface of the surface acoustic wave RFID delay line structure, and the surface acoustic wave energy on the other side is reflected.
  • the grid is farther and farther away from the interdigital transducer, and the energy cannot be efficiently reflected back to the interdigital transducer. This brings about a problem of high insertion loss, and the corresponding sensitivity and reliability are reduced. The distance will also be shortened accordingly.
  • the present invention provides a surface acoustic wave resonator type vibration sensor.
  • a surface acoustic wave resonator type vibration sensor including a first antenna, a matching network, a reflective grid, and an interdigital transducer, the at least reflective grid and the interdigital transducer being disposed on a piezoelectric substrate,
  • the matching network includes a best matching network consisting of at least one capacitor and at least one inductor, the best matching network also having an acceleration detecting circuit in parallel, the acceleration detecting circuit comprising a plurality of parallel branches, at different accelerations The number of branches incorporated into the best matching network is different.
  • the best matching network is composed of a first capacitor (C1) and a first inductor (L1) connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the series branch composed of the best matching network.
  • the best matching network is composed of a first capacitor (C1) and a first inductor (L1) connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the first capacitor (C1).
  • the best matching network is composed of a first capacitor (C1) and a first inductor (L1) connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the first inductor (L1).
  • the piezoelectric substrate and a surface acoustic wave resonator composed of a reflective grating and an interdigital transducer disposed on the piezoelectric substrate are connected in parallel at both ends of the first capacitor (C1).
  • the piezoelectric substrate and a surface acoustic wave resonator composed of a reflective grating and an interdigital transducer provided on the piezoelectric substrate are connected in parallel at both ends of the first inductor (L1).
  • an elastic switching element is disposed on each branch of the acceleration detecting circuit.
  • the elastic switching element is a spring or a reed, and when the acceleration in the deformation direction of the spring or the reed reaches a threshold, the spring or the reed deforms to conduct the branch in which it is located.
  • each of the branches of the acceleration detecting circuit has a plurality of capacitors and/or inductors connected in series.
  • the present invention also provides a surface acoustic wave resonator type vibration detecting system including a reader, a signal processing module, and a vibration sensor, and the reader is provided with
  • the second antenna further includes a surface acoustic wave resonator type vibration sensor as described above.
  • a monitoring platform for monitoring the vibration sensor feedback signal is received, and the monitoring platform receives information sent by the signal processing module.
  • an alarm device coupled to the monitoring platform shown is also included.
  • the advantages and positive effects of the present invention are: the surface acoustic wave resonator type vibration sensor of the present invention, by setting an acceleration detecting circuit in the matching network, the circuit structure is simple, the space is small, and the piezoelectric is not required to be added. The area of the substrate is conducive to cost savings.
  • FIG. 1 is a schematic structural view of a vibration sensor in the prior art
  • FIG. 2 is a schematic structural view of an embodiment of a surface acoustic wave resonator type vibration sensor according to the present invention
  • FIG. 3 is a circuit block diagram of the vibration sensor of Figure 2;
  • FIG. 4 is a schematic structural view showing an embodiment of a flexible switching element in a surface acoustic wave resonator type vibration sensor according to the present invention
  • Figure 5 is a circuit schematic diagram of an embodiment of the matching network of Figure 3;
  • FIG. 6 is a diagram showing an equivalent circuit model of the matching network circuit of FIG. 5;
  • Fig. 8 is a system block diagram showing an embodiment of a surface acoustic wave resonator type vibration detecting system proposed by the present invention.
  • Embodiment 1 as shown in FIG. 2, the present embodiment provides a surface acoustic wave resonator type vibration sensor, including a first antenna 101, a matching network 102, a reflection grating 103, and an interdigital transducer 104, which at least reflect The gate 103, and the interdigital transducer 104 are disposed on the piezoelectric substrate 105.
  • the matching network 102 includes a best matching network composed of at least one capacitor and at least one inductor, the best matching network also An acceleration detecting circuit is connected in parallel, and the acceleration detecting circuit includes a plurality of parallel branches, and the number of branches incorporated into the best matching network is different under different accelerations.
  • the working principle of the surface acoustic wave resonator type vibration sensor of the present embodiment is that the first antenna 101 receives the excitation signal, and by adding an acceleration detecting circuit on the matching network, when the acceleration of the measured object in a certain direction reaches a threshold, the acceleration The detection circuit incorporates a specific branch corresponding to the acceleration, so the number of branches incorporated into the network by the acceleration detection circuit at different accelerations is different, thereby changing the center frequency of the matching network to the interdigital transducer signal.
  • the center frequency of the signal emitted by the interdigital transducer after the signal is reflected by the reflective grid changes accordingly, and the branch that is incorporated by the acceleration detecting circuit at a certain acceleration is determined, and the amount of change in the center frequency of the signal can be determined. It is also determined accordingly, and the acceleration value can be analyzed by detecting the center frequency of the signal sent by the vibration sensor.
  • the surface acoustic wave resonator type vibration sensor of the present embodiment is provided with an acceleration detecting circuit in the matching network, and has a simple circuit structure and a small occupied space, and does not need to increase the area of the piezoelectric substrate, thereby contributing to cost saving.
  • the role of the matching network 102 in the circuit is that, in the sensor passive wireless measurement of the embodiment, for example, the reflective gate 103 and the interdigital transducer 104 constitute a resonator, and the resonator needs to be coupled to the first antenna 101. Perform impedance matching to transmit the excitation signal received by the first antenna 101 to the resonator, otherwise it will cause great energy loss, seriously affecting transmission efficiency and signal quality, and thus the first antenna A matching network is required between the resonator and the resonator.
  • the matching network is generally composed of an inductor and a capacitor in parallel.
  • the resonator receives the matched excitation signal sent by the matching network, and the interdigital transducer performs electro-acoustic conversion, and the surface acoustic wave is generated to propagate to both sides.
  • the surface acoustic wave encounters the reflection grating, the reflection is generated and superimposed, and the resonance is performed.
  • a standing wave is formed in the cavity.
  • the resonator stores energy when the external signal is excited.
  • the interdigital transducer performs acoustic-electrical conversion to release the resonator response signal.
  • the composition of the resonator is simple, and only one fork finger transducer and one side of the interdigital transducer are respectively provided with a reflection grid, and the space occupied by the piezoelectric substrate is small.
  • Embodiment 2 provides a circuit schematic diagram of a surface acoustic wave resonator type vibration sensor.
  • the best matching network is composed of a first capacitor C0 and a first inductor L0 connected in parallel.
  • the acceleration detecting circuit is connected in parallel at both ends of the parallel circuit composed of the best matching network.
  • each branch of the acceleration detecting circuit is provided with a resilient switching element.
  • the elastic switching element is a spring or a reed
  • the acceleration in the deformation direction of the spring or the reed reaches a threshold value
  • the spring or the reed deforms to turn on the branch in which it is located.
  • the acceleration threshold of the spring or the reed to enable the branch to be turned on is fixed, and the threshold values of the elastic switching elements on the respective branches are different.
  • a plurality of capacitors and/or inductors capable of changing the center frequency of the signal are connected in series on each branch of the acceleration detecting circuit.
  • the combination of capacitors or inductors and the number of capacitors can be set according to the reader's ability to accurately read the resonator center frequency change requirements.
  • Embodiment 3 provides a circuit schematic diagram of a surface acoustic wave resonator type vibration sensor.
  • the best matching network is composed of a first capacitor C1 and a first inductor L1 connected in parallel.
  • the acceleration detecting circuit is connected in parallel at both ends of the first inductor L1.
  • the acceleration detecting circuit includes a plurality of parallel branches, wherein a left-to-right first branch routes an elastic switching element K1 and a capacitor C2 in series, and a second branch routes an elastic switching element K2.
  • the third branch is connected in series with an elastic switching element K3 and a capacitor C3 and an inductor L3.
  • the elastic switching elements K1-K3 each select a spring in the passive acceleration sensor.
  • the elastic switching elements K1-K3 are connected to the reactive element and constitute a normally open circuit.
  • the elastic switching element When the induced vibration acceleration reaches a set threshold of a certain elastic switching element, the elastic switching element is The reactive component and the matching network together form a closable loop.
  • the vibration acceleration when the measured object is in the horizontal direction
  • K1, K2, and K3 are all in the off state, and the measured resonance center frequency does not change.
  • the vibration acceleration of the measured object in the horizontal direction is greater than 3g and less than 4g, the corresponding K1 is in a closed state, forming a closed loop, and K2 and K3 are in an off state, which is caused by a change in the value of the reactance component in the matching network.
  • the resonant center frequency changes by ⁇ f1; when the vibration acceleration of the measured object in the horizontal direction is greater than 4g and less than 5g, the corresponding K1 and K2 are in a closed state, forming a closed loop, and the spring K3 is in an open state.
  • the resonant center frequency will change by ⁇ f2; when the vibration acceleration of the measured object in the horizontal direction is greater than 5g, the corresponding K1, K2, and K3 are all in a closed state, forming a closed loop, and the measured resonant center frequency will change. ⁇ f3.
  • the matching network is composed of C' and L' in series, and the surface acoustic wave resonator is connected in parallel with L1.
  • the equivalent circuit model of the universal near resonator of the resonator is shown in Fig. 7.
  • C and L are the dynamic capacitance and inductance respectively due to the elasticity and inertia of the piezoelectric substrate, and R is the dynamic resistance caused by the damping, C0 is The static capacitance of the interdigital transducer, R0 is the lead resistance.
  • the equivalent circuit parameters of the resonator include five parameters R0, R, L, C, and C0.
  • Zeq2 is the impedance value of the resonator Zeq1 in parallel with L1, so
  • the total impedance value of the entire structure, Zeq is the value of Zeq2 in series with capacitor C1.
  • the characteristic impedance of a common transmission line is 50 ⁇
  • the matching point corresponds to the center frequency of S11, that is, the frequency with the smallest amplitude
  • the reflection coefficient is:
  • the relationship between S11 and frequency f can be obtained from the formula (1 ⁇ 5), and the frequency corresponding to the minimum reflection coefficient That is, f takes f0 corresponding to the center frequency of the resonator.
  • the incorporation of the capacitance or inductance of the reactance component will cause the equivalent value of C1 or L1 to change, and finally affect the graph of S11.
  • the frequency f0 with the smallest amplitude is the corresponding center frequency of the entire resonator structure. change.
  • the acceleration detecting circuit is connected in parallel at both ends of the first capacitor C1.
  • the equivalent value of C1 is changed, thereby changing the center frequency of the entire resonator structure.
  • Embodiment 4 provides a surface acoustic wave resonator type vibration detecting system based on a surface acoustic wave resonator type vibration sensor in Embodiment 3.
  • a reader and a signal processing are provided.
  • a module, and a vibration sensor the reader is provided with a second antenna 201, and the vibration sensor is provided with a first antenna 101, and the two communicate through the antenna.
  • the vibration sensor further includes a matching network 102 and a reflection.
  • a gate 103, and an interdigital transducer 104, at least a reflective gate 103, and an interdigital transducer 104 are disposed on the piezoelectric substrate 105. As shown in FIG.
  • the matching network 102 includes at least one capacitor and at least one inductor. a best matching network, the best matching network is also connected with an acceleration detecting circuit, and the acceleration detecting circuit comprises a plurality of parallel branches, and the number of branches incorporated into the best matching network is different under different accelerations .
  • the working principle of the surface acoustic wave resonator type vibration detecting system of this embodiment is that the reader transmits an excitation signal to the vibration sensor through the second antenna 201, and the vibration sensor receives the excitation signal through the first antenna 101, and the vibration sensor is added on the matching network.
  • the acceleration detecting circuit when the acceleration of the measured object in a certain direction reaches a threshold, the acceleration detecting circuit incorporates a specific branch corresponding to the acceleration, so the number of branches incorporated into the matching network is different under different accelerations, and further Changing the center frequency of the matching network access to the interdigital transducer signal, therefore, the center frequency of the signal transmitted by the interdigital transducer after the signal is reflected by the reflective grid changes correspondingly, and the interdigital transducer 104 will resonate the signal. Sended to the reader, the signal is sent to the signal processing center for processing by the reader.
  • the signal processing center performs temperature compensation according to the ambient temperature (the temperature change of the external environment will bring the frequency drift of the SAW resonator sensor), and finally The resulting resonant frequency changes due to the acceleration detection circuit being incorporated at a specific acceleration Path is determined, it is possible to change the amount of the signal corresponding to the center frequency are determined, the center frequency of the signal emitted by the vibration detecting sensor, to analyze the vibration acceleration sensor.
  • a monitoring platform for monitoring the vibration sensor feedback signal is also included, and the monitoring platform receives information sent by the signal processing module.
  • the monitoring platform also packs Includes an alarm device connected to the monitoring platform shown. When the acceleration of the vibration sensor exceeds the set threshold, an alarm is given.
  • the vibration sensor in the third embodiment will be described below as an example.
  • the optimal matching network of the vibration sensor in this embodiment is composed of a first capacitor C1 and a first inductor L1 connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the first inductor L1, and the acceleration
  • the detecting circuit comprises a plurality of parallel branches, wherein a left-to-right first branch routes an elastic switching element K1 and a capacitor C2 are connected in series, and the second branch routes an elastic switching element K2 and an inductor L2 in series.
  • the third branch routes a flexible switching element K3 and a capacitor C3 and an inductor L3 in series.
  • the elastic switching elements K1-K3 each select a spring in the passive acceleration sensor.
  • the elastic switching element is The reactive component and the matching network together form a closable loop. For example, when the vibration acceleration of the measured object in the horizontal direction is less than 3g, K1, K2, and K3 are all in an off state, and the measured resonance center frequency does not change.
  • the monitoring platform considers that the vibration condition of the measured object is within an acceptable normal range; when the vibration acceleration of the measured object in the horizontal direction is greater than 4g and less than 5g, the corresponding K1 K2 is in a closed state, forming a closed loop, and the spring K3 is in an open state.
  • the measured resonance center frequency changes ⁇ f2
  • the monitoring platform still considers that the vibration state of the measured object is still within an acceptable normal range.
  • the vibration acceleration of the measured object in the horizontal direction is greater than 5g
  • the corresponding K1, K2, K3 are in a closed state, forming a closed loop
  • the measured resonant center frequency will change ⁇ f3
  • the signal processing center according to the external environment
  • Temperature after temperature compensation (temperature changes in the external environment will bring frequency drift to the SAW resonator sensor), and finally
  • the obtained resonance frequency changes compares with the frequency value information corresponding to the stored acceleration, and feeds the processing result back to the monitoring platform.
  • the monitoring platform monitors the vibration acceleration of the feedback result.
  • the horizontal acceleration exceeds 5g, and the acceleration has abnormal changes.
  • the alarm device will send an alarm response, and the alarm mode can be a regular alarm. For example, an audible and visual alarm can be used.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

La présente invention comprend un capteur de vibrations du type résonateur à ondes acoustiques de surface, comprenant une première antenne (101), un réseau d'adaptation (102), un réseau de diffraction réfléchissant (103) et un transducteur interdigital (104), dans lequel au moins le réseau de diffraction réfléchissant (103) et le transducteur interdigital (104) sont agencés sur un substrat piézoélectrique (105), le réseau d'adaptation (102) comprend un réseau d'adaptation optimale composé d'au moins un condensateur (C1) et d'au moins une bobine d'induction (L1), le réseau d'adaptation optimale est en outre connecté en parallèle à un circuit de détection d'accélération, lequel circuit de détection d'accélération comprend une pluralité de circuits ramifiés qui sont connectées en parallèle, et le nombre de circuits ramifiés qui sont fusionnés dans le réseau d'adaptation optimale est différent à des accélérations différentes. Le circuit de détection d'accélération est agencé dans le réseau d'adaptation, de sorte qu'il n'est pas nécessaire d'augmenter la surface du substrat piézoélectrique, le circuit a une structure simple, occupe un petit espace et réduit les coûts. La présente invention se rapporte également à un système de détection de vibrations, comprenant un lecteur, un module de traitement de signaux et un capteur de vibration.
PCT/CN2015/081118 2014-08-02 2015-06-10 Capteur de vibrations du type résonateur à ondes acoustiques de surface et système de détection de vibrations WO2016019755A1 (fr)

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EP15829643.4A EP3176550B1 (fr) 2014-08-02 2015-06-10 Capteur de vibrations du type résonateur à ondes acoustiques de surface et système de détection de vibrations

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CN201410376053.3 2014-08-02
CN201410376053.3A CN105318960B (zh) 2014-08-02 2014-08-02 声表面波谐振器型振动传感器以及振动检测系统

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ306853B6 (cs) * 2016-07-07 2017-08-09 ViDiTech spol. s r.o. Zařízení pro snímání vibrací
JP2017181248A (ja) * 2016-03-30 2017-10-05 日本無線株式会社 センサおよび測定装置
WO2018169922A2 (fr) 2017-03-13 2018-09-20 Kite Pharma, Inc. Récepteurs antigéniques chimériques pour le mélanome et leurs utilisations
CN110869757A (zh) * 2017-05-30 2020-03-06 奥尔多·杰索尔卡 表面声波谐振传感器

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CN107289883B (zh) * 2017-07-25 2019-09-03 中国科学院声学研究所 一种差分式谐振器型的无线无源声表面波应变传感器
CN108344800B (zh) * 2018-01-17 2020-04-14 浙江大学 基于无线无源声表面波传感器的温度检测系统及收发系统
CN113759147A (zh) * 2020-06-03 2021-12-07 嘉兴宏蓝电子技术有限公司 谐振式加速度传感器监测系统
CN112316248B (zh) * 2020-10-27 2023-08-15 上海理工大学 一种声表面波技术的无线无源注射液输液管状态监测装置

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JP2009243982A (ja) * 2008-03-29 2009-10-22 Epson Toyocom Corp 弾性表面波センサ素子及び弾性表面波センサ
CN102889923A (zh) * 2012-09-05 2013-01-23 上海交通大学 一种基于声表面波射频识别技术的振动传感器及其应用
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017181248A (ja) * 2016-03-30 2017-10-05 日本無線株式会社 センサおよび測定装置
CZ306853B6 (cs) * 2016-07-07 2017-08-09 ViDiTech spol. s r.o. Zařízení pro snímání vibrací
WO2018169922A2 (fr) 2017-03-13 2018-09-20 Kite Pharma, Inc. Récepteurs antigéniques chimériques pour le mélanome et leurs utilisations
CN110869757A (zh) * 2017-05-30 2020-03-06 奥尔多·杰索尔卡 表面声波谐振传感器

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CN105318960B (zh) 2018-09-28
EP3176550A4 (fr) 2018-04-18
EP3176550A1 (fr) 2017-06-07
CN105318960A (zh) 2016-02-10
EP3176550B1 (fr) 2021-08-04

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