WO2016013849A1

WO2016013849A1 - Rewod generation apparatus and reverse electrowetting generation module

Info

Publication number: WO2016013849A1
Application number: PCT/KR2015/007558
Authority: WO
Inventors: 김영범; 양휘철
Original assignee: 한양대학교 산학협력단
Priority date: 2014-07-22
Filing date: 2015-07-21
Publication date: 2016-01-28

Abstract

A REWOD generation apparatus and a reverse electrowetting generation module are provided. The REWOD generation apparatus comprises: a REWOD generation unit comprising a first electrode substrate, a second electrode substrate, and a conductive fluid array comprising conductive fluids positioned between the first electrode substrate and the second electrode substrate; and a vibration-rotation conversion unit connected to the first electrode substrate or the second electrode substrate of the REWOD generation unit so as to transfer an outside physical force to the first electrode substrate or the second electrode substrate, thereby converting a rotational energy into a vibrational energy and transferring the same. Therefore, provided is a REWOD generation apparatus capable of being more flexibly applied to an environment in which there is extreme vibration and rotation, and used as an auxiliary power device and the like so as to contribute to power demand-supply.

Description

REWOD generator and reverse electrowetting generation module

The present invention relates to a REWOD generator, and more particularly to a REWOD generator using a vibration-rotation converter.

In addition, the present invention relates to the field of power generation using reverse electrowetting, and more particularly, to a vibration collection type reverse electrowetting power generation module having improved power generation performance by maximizing change of contact area of a fluid droplet.

There is a growing interest in regenerative energy-based power generation systems to regenerate the energy that is thrown away from life or the environment. Among them, the power generation method using vibration is attracting attention.

Conventional power generation methods using vibration include piezoelectric element power generation using vibration-pressure conversion, but suffer from difficulties in its effectiveness and safety due to low power generation and harmful substances constituting the device. Strictly speaking, vibration energy itself is not used. It is also pointed out that it is difficult to apply to a minute vibration environment, which is difficult to convert to furnace pressure.

Therefore, a new generation method using reverse electrowetting on dielectric (REWOD), which is not a conventional piezoelectric power generation method, has emerged. This is a new power generation method using a microfluidic fluid. The effect of capacitance change by shape change is used.

As a power generation method using the REWOD technology, a method using a pipe flow and a method using up / down vibration are being studied. For example, Korean Patent No. 10-1358291 (2014.01.27.) Discloses an apparatus for converting energy using a volume change of a fluid.

On the other hand, sometimes in the case of very large vibration or high-speed rotation environment, the use of energy directly may cause problems such as efficiency reduction or destruction.

Therefore, there is a need to develop a power generation device capable of collecting energy without the problem of device destruction even in an extreme environment such as a very large vibration environment.

Meanwhile, a vibration collecting type reverse electrowetting power generation module has been studied as a power generation module using REWOD technology.

In such a vibration collecting type reverse electrowetting power generation module, the power density increases as the contact area between the conductive fluid droplet and the substrate increases. Therefore, in order to maximize the change in the contact area of the conductive fluid droplets due to vibration, it is necessary to increase the contact angle of the fluid by the hydrophobic membrane.

The problem to be solved by the present invention is to provide a REWOD generator capable of collecting energy even in the environment of extreme vibration and rotation.

In addition, the present invention is to provide a vibration collecting reverse electrowetting power generation module that can maximize the change of the contact area of the fluid droplets.

In addition, the present invention is to provide a vibration collecting reverse electrowetting power generation module capable of performing a stable and continuous power generation operation.

One aspect of the present invention to achieve the above object provides a REWOD generator. The REWOD generator includes a conductive fluid array including a first electrode substrate, a second electrode substrate, and conductive fluids positioned between the first electrode substrate and the second electrode substrate, and the first electrode substrate is formed by an external physical force. Or a REWOD power generation unit configured to collect energy using a change in contact area between the electrode portion of the first electrode substrate or the second electrode substrate and the conductive fluid while the second electrode substrate vibrates; And a vibration-rotation converter connected to the first electrode substrate or the second electrode substrate of the REWOD power generation unit to transfer an external physical force to the first electrode substrate or the second electrode substrate, and converting rotation energy into vibration energy. It may include.

The vibration-rotation converter may further include an energy attenuation unit configured to attenuate the converted energy after converting rotational energy into vibration energy.

The vibration-rotation converter may include a slide-crank structure.

The vibration-rotation conversion unit, the rotating member rotated by an external physical force; A connecting member having one end connected to the rotating part; An elastic member connected to the other end of the connection member and vibrated by the connection member; An energy damping member connected to the elastic member and configured to attenuate vibration energy transmitted from the elastic member; And a vibration transmitting member connected to the energy damping member and transferring the damped vibration energy to the first electrode substrate or the second electrode substrate of the REWOD generator.

The REWOD power generation unit may include a first electrode substrate including a plurality of grooves disposed on an upper surface thereof; A first dielectric thin film formed on the first electrode substrate; A first hydrophobic thin film formed on the first dielectric thin film; A conductive fluid array including conductive fluids disposed corresponding to the positions of the grooves on the first electrode substrate on which the first dielectric thin film and the first hydrophobic thin film are formed; And a second electrode substrate installed on the conductive fluid array so as to vibrate, and having a second dielectric thin film and a second hydrophobic thin film disposed below the second dielectric thin film.

The grooves are characterized in that the positional deviation of the conductive fluid is prevented.

The conductive fluid is a liquid metal gallinstane, NaCl, LiCl, NaNo ₃ , Na ₂ SiO ₃ , AlCl ₃ -NaCl, LiCl-KCl, KCL, Na, NaOH, H ₂ SO ₄ , CH ₃ COOH, HF, CuSO ₄ , It may include at least one of ethylene glycol, propylene glycol and AgCl.

The display device may further include a partition wall supporting the first electrode substrate and the second electrode substrate.

The first hydrophobic thin film or the second hydrophobic thin film may include a fluoropolymer-based material or a super water-repellent nanostructure.

Another aspect of the present invention to achieve the above object provides a REWOD generator. The REWOD generator includes a conductive fluid array including a first electrode substrate, a second electrode substrate, and conductive fluids positioned between the first electrode substrate and the second electrode substrate, and the first electrode is formed by an external physical force. A REWOD power generation unit configured to collect energy using a change in contact area between the electrode portion of the first electrode substrate or the second electrode substrate and the conductive fluid while the substrate or the second electrode substrate rotates; And a vibration-rotation converter connected to the first electrode substrate or the second electrode substrate of the REWOD power generation unit to transfer an external physical force to the first electrode substrate or the second electrode substrate, and converting vibration energy into rotational energy. It may include.

The vibration-rotation converter may include a slide-crank structure.

The vibration-rotation converter may include a vibration member vibrating by an external physical force; An energy damping member connected to the vibration member and configured to attenuate the vibration energy transmitted from the vibration member; An elastic member connected to the energy damping member and vibrating by receiving the damped vibration energy; A connecting member having one end connected to the elastic member; And a rotational transmission member connected to the other end of the connection member and rotated by the connection member to transmit rotational energy to the first electrode substrate or the second electrode substrate of the REWOD generator.

The REWOD power generation unit may include a first electrode substrate including a plurality of grooves disposed on an upper surface thereof; A first dielectric thin film formed on the first electrode substrate; A conductive fluid array including conductive fluids disposed corresponding to the positions of the grooves on the first electrode substrate on which the first dielectric thin film is formed; And a second electrode substrate rotatably installed on the first electrode substrate on which the conductive fluid array is disposed, the second electrode substrate having a second dielectric thin film formed on a lower surface thereof, and a rotation axis of the rotation transfer unit at the center of the second electrode substrate. Can be combined.

The grooves may be dot-shaped or channel-shaped.

The grooves are arranged radially spaced apart from each other.

The conductive fluid may be in the form of droplets or channels.

The second electrode substrate may be branched.

The second electrode substrate may include a branched electrode region and a nonconductive region other than the electrode region.

The present invention also provides a vibration collecting reverse electrowetting power generation module, comprising: an upper and a lower electrode substrate arranged to be able to change a distance therebetween; One or more conductive fluid droplets disposed between the upper electrode substrate and the lower electrode substrate; First and second dielectric layers formed on surfaces of the conductive fluid droplet side of the upper and lower electrode substrates, respectively; And hydrophobic protruding nano-micro structures arranged on the first or second dielectric layer.

Here, the first or second dielectric layer may be hydrophobic or may have a hydrophobic film on its surface.

The protruding nano-micro structure may be made of a superhydrophobic body.

The dielectric layer may be 5 nm to 5 mm.

The dielectric layer may be formed of a material including silicon oxide, silicon nitride, tantalum oxide, titanium oxide, aluminum oxide, barium titanate, glass, parylene, teflon, or PDMS.

The one or more conductive fluid droplets may be ionic liquids or liquid metals.

Each of the one or more conductive fluid droplets may have a diameter of 1 μm to 5 cm.

In the first and second dielectric layers or the hydrophobic layer, a portion in which each of the one or more conductive fluid droplets contacts may have a concave groove structure to prevent separation of the conductive fluid droplets.

A cover member may be further disposed on the upper electrode substrate.

An elastic separator may be disposed to maintain a gap between the upper electrode substrate and the lower electrode substrate.

According to the present invention, it is possible to provide a REWOD generator that can be applied more flexibly in extreme vibration and rotation environments, and can be used as an auxiliary power device to contribute to power supply.

In addition, it is possible to provide a REWOD generator capable of generating high efficiency by converting to a more efficient environment through a vibration-rotation converter.

In addition, according to the present invention, by using a super hydrophobic material nano-micro structure to maximize the contact angle between the conductive fluid droplet and the substrate, the contact area between the droplet and the substrate in the compression and recovery process by vibration Changes can be maximized. For example, when formed of nano-micro structures such as nano cones, nano pillars, nano meshes, nano fibers, or superhydrophobic nano-micro structures, contact angles of 150 ^° or more are possible. This maximizes the change in contact area during compression and restoration due to vibration, and can improve the performance of the REWOD power generation module. Furthermore, the vibration collecting reverse electrowetting power generation module of the present invention has a stable structure as a whole as well as the droplets do not leave the position.

The technical effects of the present invention are not limited to those mentioned above, and other technical effects that are not mentioned will be clearly understood by those skilled in the art from the following description.

1 is a schematic perspective view of a REWOD generating apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line A-A 'of FIG.

3 is a schematic perspective view of a vibration-rotation converter.

4 is a schematic perspective view of a REWOD power generation unit.

5 is a conceptual diagram illustrating the energy collection principle of the vibration type REWOD generator.

6 is an operation explanatory diagram of a REWOD generator according to an embodiment of the present invention.

7 is a schematic perspective view of a REWOD generating apparatus according to an embodiment of the present invention.

8 is a cross-sectional view taken along the line BB ′ of FIG. 7.

9 is a schematic perspective view of a REWOD power generation unit.

10 is an exploded perspective view of a power generation unit.

11 is a conceptual view for explaining the principle of energy collection of the rotary REWOD power generation unit.

12 is an operation explanatory diagram of a REWOD generator according to an embodiment of the present invention.

Figure 13 is a perspective view of a vibration collecting type reverse electrowetting power generation module according to a preferred embodiment of the present invention.

14 is a cross-sectional view of FIG. 13.

15 is an exploded perspective view of FIG. 13.

FIG. 16 is a view showing a lower structure included in the nano-micro structure employed in the vibration collecting type inverse electrowetting power generation module shown in FIG. 13.

17 is an FE-SEM photograph of a nano-cone as an example of a nano-micro structure employed in the vibration collecting reverse electrowetting power generation module of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

While the invention allows for various modifications and variations, specific embodiments thereof are illustrated by way of example in the drawings and will be described in detail below. However, it is not intended to be exhaustive or to limit the invention to the precise forms disclosed, but rather the invention includes all modifications, equivalents, and alternatives consistent with the spirit of the invention as defined by the claims.

When an element such as a layer, region or substrate is referred to as being on another component "on", it will be understood that it may be directly on another element or there may be an intermediate element in between. .

Although the terms first, second, etc. may be used to describe various elements, components, regions, layers, and / or regions, such elements, components, regions, layers, and / or regions It will be understood that it should not be limited by these terms.

A REWOD generating apparatus according to an embodiment of the present invention will be described.

REWOD generating apparatus according to an embodiment of the present invention includes a REWOD generator and a vibration-rotation converter for collecting energy.

The REWOD generator may be a vibration type REWOD generator that collects vibration energy or a rotary REWOD generator that collects rotational energy.

The vibration-rotation converter converts vibration energy into rotation energy or rotation energy into vibration energy according to the type of the REWOD power generation unit. In this case, the vibration-rotation converter includes a slide-crank structure, and the slide-crank structure may convert vibration energy into rotation energy or rotation energy into vibration energy.

First, the case where the REWOD power generation unit is a vibration type will be described.

FIG. 2 is a sectional view taken along the line A-A 'of FIG.

1 and 2, a REWOD generator according to an embodiment of the present invention includes a REWOD generator 20 and a vibration-rotation converter 10 for collecting energy.

REWOD power generation unit 20 is the first electrode substrate 210, the second electrode substrate 230 and the conductive fluids 221 positioned between the first electrode substrate 210 and the second electrode substrate 230. It may include a conductive fluid array 220 including. At this time, the first electrode substrate 210 or the second electrode substrate 230 vibrates by an external physical force, and the electrode portion of the first electrode substrate 210 or the second electrode substrate 230 and the conductive fluid 221. The energy is collected by using the change of the contact area where) touches.

The vibration-rotation converter 10 is connected to the first electrode substrate 210 or the second electrode substrate 230 of the REWOD power generation unit 20 so that external physical force is applied to the first electrode substrate 210 or the second electrode. Transfer to the electrode substrate 230, converts the rotational energy to vibration energy and delivers.

Therefore, when the external physical force is a rotational energy of rotational movement, by converting the rotational energy into vibration energy by using the vibration-rotation conversion unit, in addition to a method of collecting energy by directly using the rotary REWOD power generation unit in such an environment, Therefore, it is possible to collect energy by using the vibration type REWOD generator.

In addition, the vibration-rotation converter 10 may further include an energy attenuation unit 140 that attenuates the converted vibration energy. Accordingly, the vibration-rotation converter 10 attenuates the converted energy by the energy attenuation unit after converting rotational energy into vibration energy, and attenuates the attenuated vibration energy by the first electrode substrate 210 or the second. The electrode may be transferred to the substrate 230.

Therefore, in the case of the extreme rotation environment, by attenuating the extreme energy, it is possible to reduce the risk of destruction of the REWOD power generation unit 20. This enables energy collection even in extreme rotational environments.

Therefore, the present invention REWOD power generation device is applicable in the extreme rotation environment, it is possible to apply more flexible, it can be used as an auxiliary power device and contribute to power supply and demand.

Hereinafter, the configuration of the vibration-rotation converter 10 will be described in more detail.

3 is a schematic perspective view of the vibration-rotation converter 10.

Referring to FIG. 3 together with FIGS. 1 and 2, the vibration-rotation converter 10 includes a rotating member 110, a connecting member 120, an elastic member 130, an energy damping member 140, and a vibration transmitting member. 150 may be included.

The rotating member 110 is rotated by an external physical force, and receives the rotational energy. For example, the rotating member 110 may be connected to the wheel shaft of the vehicle to rotate by an external physical force. The shape of the rotating member 110 may be set to receive the rotational energy in accordance with the external environment, it is not particularly limited to the shape.

For example, the rotating member 110 may include a rotating plate 111 and a protrusion 112 positioned at a predetermined distance from the center of rotation of the rotating plate 111. On the other hand, it may include a groove instead of the protrusion 112.

One end of the connection member 120 is connected to the rotating member 110, and the other end is connected to the elastic member 130 described later. The connection member 120 is connected to the elastic member 130 in a linear motion when the rotary member 110 is rotated by the external physical force.

For example, the connection member 120 may include a connection rod 121. One end of the connecting rod 121 is provided with a groove portion 123 corresponding to the protrusion 112 of the rotating member 110, the protrusion 112 of the rotating member 110 may be fitted into the groove portion 123 to be connected. . On the other hand, when the rotating member 110 is provided with a groove instead of the protrusion 112, one end of the connecting rod 121 may be provided with a protrusion to be interconnected.

In addition, the other end of the connecting rod 121 may be provided with a protrusion 122 to be connected to the elastic member.

Therefore, one end of the connecting rod 120 connected to the rotating member 110 when the rotating member 110 is rotated in a circular motion, the elastic rod connected to the other end of the connecting rod 120 by the connecting rod 120 The member 130 is in linear motion.

The elastic member 130 is connected to the other end of the connecting member 120, and vibrates by the connecting member 120. That is, when the connecting member 120 is the connecting rod 121, the elastic member 130 is connected to the other end of the connecting rod 121, vibrating by the connecting rod 121. Therefore, the elastic member 130 is vibrated by converting the rotational energy of the rotating member 110 into vibration energy by the connecting rod 121.

The elastic member 130 may employ any form as long as it has a constant elastic modulus as well as the coil spring.

For example, the elastic member 130 may include a spring 131 and an upper connection plate 132 and a lower connection plate 133 coupled to upper and lower portions of the spring 131 at this time. Therefore, the upper connecting plate 132 may be provided with a protrusion 134 on the upper portion and the protrusion 134 may be provided with a fitting groove. Therefore, the protrusion 122 of the connecting rod 121 may be inserted into the fitting groove of the protrusion 134. In addition, the lower connecting plate 133 may be connected to the energy damping member described later.

The energy damping member 140 is connected to the elastic member 130 and attenuates vibration energy transmitted from the elastic member 130.

For example, the energy damping member 140 may be a damper for damping vibration energy. For example, the energy damping member may be a hydraulic damper. However, the present invention is not limited thereto, and various known dampers may be used.

Therefore, in the case of the extreme rotation environment, the damping member 140 attenuates the energy transmitted from the outside, and then transfers the attenuated energy to the REWOD generator 20, where the REWOD generator directly connects to the extreme environment. Compared with this, the risk of destruction can be reduced and safety can be improved.

The vibration transmitting member 150 is connected to the energy damping member 140, and transmits the damped vibration energy to the first electrode substrate 210 or the second electrode substrate 230 of the REWOD generator 20. . In FIG. 2, the vibration transmission member 150 is coupled to the protective cover 250 of the REWOD power generation unit 20. Therefore, the vibration transmitting member 150 may transmit the attenuated vibration energy to the second electrode substrate 230 coupled with the protective cover 250.

Hereinafter, the structure of a vibration type REWOD power generation part is demonstrated concretely.

4 is a schematic perspective view of a REWOD power generation unit.

Referring to FIG. 4 together with FIGS. 1 and 2, the REWOD power generation unit includes a first electrode substrate 210, a first dielectric thin film (not shown), a first hydrophobic thin film (not shown), a conductive fluid array 220, and a first And a second hydrophobic thin film (not shown), a second dielectric thin film (not shown), and a second electrode substrate 230.

The first electrode substrate 210 includes a plurality of grooves 211 positioned on the top surface. In this case, the grooves 2100 may have a dot shape. These grooves serve to prevent the conductive fluid 221 to be described later out of position.

In addition, the first dielectric thin film may be formed on the first electrode substrate 210, and the first hydrophobic thin film may be formed on the first dielectric thin film. Meanwhile, when the first dielectric thin film and the first hydrophobic thin film are formed on the first electrode substrate 210, the structure of the plurality of grooves 211 is maintained on the upper surface of the first electrode substrate 210.

The thickness of the first dielectric thin film may be 5 nm to 50 mm.

Preferably, the thickness of the first dielectric thin film may be set to 1 μm or less. Therefore, the thickness of the dielectric thin film can be made thinner than 1 μm, and at the same time, a thin film having a dense structure can be formed to greatly increase the capacitance, which leads to an increase in power density and a higher efficiency and higher power generation system can be constructed. .

In addition, the first dielectric thin film may be formed of silicon oxide (SiO _x ), silicon nitride (SiN _x ), tantalum oxide (Ta ₂ O ₅ ), titanium oxide (TiO ₂ ), aluminum oxide (Al ₂ O ₃ ), and barium titanate (BaTiO). ₃ ), glass or a polymer such as parylene, teflon or polydimethylsiloxane (PDMS), or a combination of these materials.

The first dielectric thin film may be formed using a vapor deposition method and a physical vapor deposition method. For example, the method of forming the first dielectric thin film may be formed by chemical vapor deposition (CVD), atomic layer deposition (ALD), sputtering, dip-coating, It may include a doctor blade method (Dr. blade), spin coating (Spin coating), screen printing (Spray printing) or spray coating (Spray coating).

The first hydrophobic thin film may include a fluoropolymer-based material or a super water-repellent nanostructure. Since the first hydrophobic thin film has a large contact angle with the droplet, the contact area with the droplet is reduced. Therefore, when there is no external force, since the contact area between the first electrode substrate 210 and the droplets is small, the amount of change in the contact area between the first electrode substrate 210 and the droplets due to vibration increases, thereby increasing energy. The collection efficiency is improved.

The conductive fluid array 220 may include conductive fluids 221 disposed corresponding to the positions of the grooves 211 on the first electrode substrate 210 having the first dielectric thin film and the first hydrophobic thin film formed thereon. Can be.

Such conductive fluids 221 may be in the form of droplets. The diameter of such conductive fluid droplets may be between 1 μm and 5 cm.

On the other hand, the conductive fluid 221 is an alloy of gallium, indium and tin, liquid metal gallinstane, NaCl, LiCl, NaNo ₃ , Na ₂ SiO ₃ , AlCl ₃ -NaCl, LiCl-KCl, KCL, Na, NaOH, H It may include at least one of ₂ SO ₄ , CH ₃ COOH, HF, CuSO ₄ , ethylene glycol, propylene glycol and AgCl.

The second electrode substrate 230 is installed on the conductive fluid array 220 so as to vibrate, and has a second dielectric thin film (not shown) on the bottom surface and a second hydrophobic thin film (lower degree) positioned under the second dielectric thin film. O) is formed.

The second dielectric thin film is silicon oxide (SiO _x ), silicon nitride (SiN _x ), tantalum oxide (Ta ₂ O ₅ ), titanium oxide (TiO ₂ ), aluminum oxide (Al ₂ O ₃ ), barium titanate (BaTiO ₃ ) , Polymers such as glass or parylene, teflon or polydimethylsiloxane (PDMS), or combinations of these materials.

The second hydrophobic thin film may include a fluoropolymer-based material or a super water-repellent nanostructure.

In addition, a barrier rib 240 may be further supported between the first electrode substrate 210 and the second electrode substrate 230. In addition, it is preferable that the partition wall 240 uses an elastic material so that the first electrode substrate 210 or the second electrode substrate 230 can vibrate.

In addition, the partition wall 240 serves to maintain the distance between the first electrode substrate 210 and the second electrode substrate 230 in a specific range even in the case of excessive amplitude when the vibration environment of the REWOD power generation unit is applied.

The vibration transmission member 150 of the vibration-rotation converter 10 may be coupled to the second electrode substrate 210. Therefore, the second electrode substrate 210 is vibrated by the vibration energy transmitted by the vibration transmitting member 150. Accordingly, the contact area where the electrode portion of the second electrode substrate 210 and the conductive fluid come into contact with each other due to the vibration of the second electrode substrate 210 is changed, and energy can be collected using the capacitance change according to the change. . In the case of the second electrode substrate 210, the substrate itself may be an electrode portion, and in some cases, may include an electrode region and a non-conductive region.

On the other hand, a protective cover 250 may be further included on the second electrode substrate 230. In this case, the vibration transmission member 150 may be connected to the upper portion of the protective cover 250 to transmit vibration energy to the second electrode substrate 230. In addition, the lower protective cover 251 may be further included to surround the lower portion of the first electrode substrate 210 to protect the first electrode substrate 210.

Referring to FIG. 5, when a predetermined voltage is applied to the first electrode substrate 210 and the second electrode substrate 230, polarization of the conductive fluid droplet 221 occurs by the applied voltage. At this point, charges collect near the droplet and substrate contact area (process 1-steady state).

When compressed between the first electrode substrate 210 and the second electrode substrate 230 by vibration, the droplets are pressed by the vibration to increase the contact area. Thus, additional charge is supplied from the circuit to balance charge with an increase in contact area (process 2-compressed).

When the compression between the first electrode substrate 210 and the second electrode substrate 230 is released, the droplet recovers from the compressed state, and the contact area between the substrate and the droplet becomes smaller again. Thus, the charge returns to the circuit to balance the charge with the reduction of the contact area (process 3- recovery state). Thus, it is possible to produce electric power by capturing the electric charge back to the circuit.

6 is an operation explanatory diagram of a REWOD generator according to an embodiment of the present invention. Such a REWOD generator includes a vibration-rotation converter and a vibration type REWOD generator.

Referring to FIG. 6, rotation is caused by an external environment. The rotary motion is then converted into vibration by the slide-crank structure.

Then, the damping vibration movement by the damper is performed.

Then, the vibration type REWOD generator is operated by the converted / reduced vibration movement.

Next, the case where the REWOD power generation unit is a rotary type will be described.

8 is a cross-sectional view taken along the line BB ′ of FIG. 7.

7 and 8, a REWOD generator according to an embodiment of the present invention includes a REWOD generator 40 and a vibration-rotation converter 30 for collecting energy.

Referring to FIG. 9, which will be described later with respect to the REWOD power generator 40, the REWOD power generator 40 may include a first electrode substrate 410, a second electrode substrate 430, and the first electrode substrate 410 and a first electrode. The conductive fluid array 420 may include a conductive fluid 421 positioned between the two electrode substrates 430. At this time, the first electrode substrate 410 or the second electrode substrate 430 is rotated by an external physical force, the electrode portion of the first electrode substrate 410 or the second electrode substrate 430 and the conductive fluid abuts. The change of contact area is used to collect energy.

The vibration-rotation converter 30 is connected to the first electrode substrate 410 or the second electrode substrate 430 of the REWOD power generation unit 40 so that external physical force is applied to the first electrode substrate 410 or the second electrode. The electrode is transferred to the substrate 430, and the vibration energy is converted into rotational energy and transmitted.

Therefore, when the external physical force is vibration energy that vibrates, the vibration energy is converted into rotation energy by using the vibration-rotation converter, and in addition to the method of directly collecting the energy by using the vibration-type REWOD generator in such an environment, Energy can be collected using the rotating REWOD generator.

In addition, the vibration-rotation converter 30 may further include an energy damping member 320 for damping external vibration energy. In this case, the vibration-rotation converter 30 may attenuate external vibration energy by the energy damping member 320, and then convert the damped vibration energy into rotation energy to transmit the damped rotation energy to the REWOD power generation unit. .

Therefore, in the case of the extreme vibration environment, by attenuating the extreme energy, it is possible to reduce the risk that the REWOD power generation unit 20 is destroyed. This enables energy collection even in extreme vibration environments.

Therefore, the present invention REWOD power generation device can be applied in the extreme vibration environment, it is possible to apply more flexible, can be used as an auxiliary power device and contribute to power supply and demand.

Hereinafter, the configuration of the vibration-rotation converter 30 will be described in more detail.

7 and 8, the vibration-rotation converter 30 includes a vibration member 310, an energy damping member 320, an elastic member 330, a connection member 340, and a rotation transmission member 350. can do.

The vibration member 310 is vibrated by an external physical force, and receives the vibration energy. The shape of the vibration member 310 may be set to receive the vibration energy according to the external environment, it is not particularly limited to the shape.

For example, the vibration member 310 may be in the form of a plate.

The energy damping member 320 is connected to the vibration member 310 and attenuates the vibration energy transmitted from the vibration member 310.

For example, the energy damping member 320 may be a damper for damping vibration energy. For example, the energy damping member 320 may be a hydraulic damper. However, the present invention is not limited thereto, and various known dampers may be used. Therefore, the detailed description of the damper is omitted.

As an example, a brief description of the operation of the damper will be described when the energy damping member 320 is a hydraulic damper as shown in FIG. 8. Due to the external vibration energy, the vibration member 310 vibrates, and the central axis 321 of the hydraulic damper connected to the vibration member 310 performs a repetitive movement (dashed arrow). At this time, the fluid moves through the opening 322 (solid arrow), and attenuation may occur due to the resistance of the fluid generated at this time.

Therefore, in the case of an extreme vibration environment, the energy received from the outside by the energy damping member 320 attenuates, and the attenuated energy is converted into vibration energy and transmitted to the REWOD power generation unit, whereby the REWOD power generation unit is used in an extreme environment. Compared with the direct connection, the risk of destruction can be reduced, which further improves safety.

The elastic member 330 is connected to the energy damping member 320 and vibrates by receiving the damped vibration energy.

The elastic member 330 may employ any form as long as it has a constant elastic modulus as well as the coil spring.

For example, the elastic member 330 may include a spring 331 and an upper connection plate 332 and a lower connection plate 333 coupled to upper and lower portions of the spring 331 at this time. Therefore, the lower connecting plate 333 may also be connected to the energy damping member 320. In addition, the upper connecting plate 332 may be provided with a protrusion 334 at the top, and the protrusion 334 may be provided with a fitting groove. Accordingly, the protrusion 342 of the connecting rod 341 to be described later may be inserted into the fitting groove of the protrusion 334.

One end of the connection member 350 is connected to the elastic member 330, and the other end is connected to the rotational transmission member 350, which will be described later. The connection member 350 is connected so that the rotational member 350 rotates when the elastic member 330 vibrates.

For example, the connection member 340 may include a connection rod 341. One end of the connection rod 310 may be provided with a protrusion 342 to be connected to the connection groove of the protrusion 334 provided on the upper connection plate 332 of the elastic member 330. Therefore, the connecting rod 341 may receive vibration energy from the elastic member 330.

In addition, the other end of the connection rod 341 may be provided with a groove corresponding to the protrusion 352 of the rotation transmission member 350 to be described later, and may be connected to the rotation transmission unit 350.

The rotation transmission member 350 may receive the rotation energy attenuated by the connection member 340 and transmit the damped rotation energy to the REWOD power generation unit 40.

The rotation transmission member 350 is a rotary shaft 353 located at the center of rotation of the rotating plate 351, the protrusion 352 which is spaced a predetermined distance from the center of rotation of one surface of the rotary plate 351 and the opposite surface of one surface of the rotary plate 351. ) May be included. On the other hand, it may include a groove instead of the protrusion 352. In addition, the rotation shaft 353 may be connected to the first electrode substrate 410 or the second electrode substrate 430 of the REWOD generator 40.

Accordingly, when the elastic member 330 vibrates, the rotation transfer member 350 is rotated by the connection member 340, and the rotational energy is transferred to the first electrode substrate 410 or the REWOD generator 40. It transfers to the second electrode substrate 430.

Hereinafter, the structure of a rotary REWOD power generation part is demonstrated concretely.

9 is a schematic perspective view of a REWOD power generation unit. 10 is an exploded perspective view of the REWOD power generation unit.

9 and 10 together with FIGS. 7 and 8, the REWOD generator 40 includes a first electrode substrate 410, a first dielectric thin film (not shown), a conductive fluid array 420, and a second dielectric. A thin film (not shown) and a second electrode substrate 430 are included.

The first electrode substrate 410 may include a plurality of grooves 411 positioned on the top surface.

The grooves 411 may be arranged radially spaced apart from each other. In this case, the grooves 411 may have a dot shape or a channel shape. Hereinafter, a dot-shaped groove will be described as an example.

Therefore, the conductive fluids 421 described later are disposed corresponding to the positions of the grooves 411. Accordingly, these grooves 411 serve to prevent the displacement of the conductive fluids 421 to be disposed.

In addition, the first electrode substrate 410 may further include a through hole 412 in the center thereof. The through hole 412 may serve as a passage connecting the rotation shaft 353 of the rotation transmission member 350 and the second electrode substrate 430.

In addition, a first dielectric thin film is formed on the first electrode substrate 410. The thickness of the first dielectric thin film may be 5 nm to 50 mm.

The conductive fluid array 420 may include conductive fluids 421 disposed corresponding to the positions of the grooves 411 on the first electrode substrate 410 having the first dielectric thin film formed thereon.

Such conductive fluids 421 may be in the form of droplets or channels. Preferably, when the grooves 411 have a dot shape, the conductive fluid may also be formed in the form of droplets, and when the grooves 411 have the form of a channel, the conductive fluid may be formed in the form of a channel to correspond to the droplets.

Therefore, as shown in FIG. 10, when the grooves 411 have a dot shape, the conductive fluids 411 may be selected as droplets of conductive fluid. The diameter of such conductive fluid droplets may be between 1 μm and 5 cm.

On the other hand, the conductive fluid is a liquid metal gallinstane, an alloy of gallium, indium and tin, NaCl, LiCl, NaNo ₃ , Na ₂ SiO ₃ , AlCl ₃ -NaCl, LiCl-KCl, KCL, Na, NaOH, H ₂ SO ₄ And CH ₃ COOH, HF, CuSO ₄ , ethylene glycol, propylene glycol and AgCl.

The second electrode substrate 430 is rotatably installed on the first electrode substrate 410 on which the conductive fluid array 420 is disposed. For example, the rotation shaft 353 of the rotation transmission unit 350 may be coupled to the center of the second electrode substrate 430 to rotate.

In addition, the second electrode substrate 430 may be installed to contact the conductive fluid array.

Accordingly, the second electrode substrate 430 is rotated by an external physical force, and the change in the contact area between the electrode portion of the second electrode substrate 430 and the conductive fluids 421, for example, the conductive fluid droplets is used. Energy can be collected.

For example, the second electrode substrate 430 may include a branched electrode region 431 and a nonconductive region 432 other than the electrode region. In this case, the electrode region 431 may include a conductive material. For example, such conductive materials may be inorganic materials including at least one of ITO, IGO, chromium, aluminum, Indium Zinc Oxide (IZO), Indium Gallium Zinc Oxide (IGZO), ZnO, ZnO ₂ or TiO ₂ or may be aluminum, iron or Metallic material containing at least one of copper or PEDOT (polyethylenedioxythiophene), carbon nanotube (CNT, Carbon nanotube), graphene (graphene), polyacetylene (polyacetylene), polythiophene (PT), polypyrrole It may be an organic material including at least one of polypyrrole, polyparaphenylene (PPV), polyaniline, polysulfur nitride, or polyparaphenylenevinylene. In addition, the nonconductive region 432 at this time may include a nonconductive material.

Therefore, when the second electrode substrate 430 is rotated, the contact area between the electrode region 431 of the second electrode substrate 430 and the conductive fluid 421 changes, and the capacitance changes according to the change. Energy can be collected by

As another example of the second electrode substrate 430, the second electrode substrate 430 itself may be branched. In this case, the entire second electrode substrate 430 may be made of an electrode material. Accordingly, in the case of this branch type substrate, the substrate itself serves as an electrode, and the contact area between the substrate and the conductive fluid 421 abuts according to the rotation of the substrate, and changes the capacitance according to the change. Energy can be collected.

In addition, a second dielectric thin film (not shown) is formed on the lower surface of the second electrode substrate 430. Thus, the second dielectric thin film will be in contact with the conductive fluid array 200.

The thickness of the second dielectric thin film may be 5 nm to 50 mm. Preferably, the thickness of the second dielectric thin film may be set to 1 μm or less. Therefore, the thickness of the second dielectric thin film can be made thinner than 1 μm, and at the same time, a thin film having a dense structure can be formed to greatly increase the capacitance. can do.

In addition, the second dielectric thin film may be formed of silicon oxide (SiO _x ), silicon nitride (SiN _x ), tantalum oxide (Ta ₂ O ₅ ), titanium oxide (TiO ₂ ), aluminum oxide (Al ₂ O ₃ ), and barium titanate (BaTiO). ₃ ), glass or a polymer such as parylene, teflon or polydimethylsiloxane (PDMS), or a combination of these materials.

The second dielectric thin film may be formed using a vapor deposition method and a physical vapor deposition method. For example, the method of forming the second dielectric thin film may include chemical vapor deposition, atomic layer deposition, sputtering, dip-coating, doctor blade, spin coating, screen printing, or spray coating.

The protective cover 440 may be located on the second electrode substrate 430. For example, the protective cover 440 is coupled to and supported by the first electrode substrate 410 to cover the conductive fluid array 420 and the second electrode substrate 430 positioned on the first electrode substrate 410. can do.

Accordingly, the protective cover 440 may prevent the separation of the second electrode substrate 430 and the damage to the mechanical seat, which may occur when the second electrode substrate 430 is rotated.

In addition, the protective cover 440 may be formed to surround the lower portion of the first electrode substrate 440 in some cases, thereby protecting the second electrode substrate 440 together.

Meanwhile, an inert gas such as argon gas may be filled in the space between the first electrode substrate 410 and the second electrode substrate 430 to fix the position of the conductive fluid array 420.

Referring to FIG. 11, the first electrode substrate 410 having the conductive fluid droplet 421 positioned thereon is fixed to rotate the second electrode substrate 430 positioned on the conductive fluid droplet 421. do.

First, as the second electrode substrate 430 rotates, the second electrode substrate 430 starts to contact the electrode region 431 of the second electrode substrate 430 and the conductive fluid droplet 410 positioned on the first electrode substrate 410. Electric charges collect in the vicinity of the contact area (process 1-start contact).

Next, as the second electrode substrate 430 continues to rotate, the contact area between the electrode region 431 of the second electrode substrate 430 and the conductive fluid droplet 421 becomes maximum. With this increase in contact area, additional charge is supplied from the circuit to balance charge (process 2-maximum contact area).

Subsequently, as the second electrode substrate 430 is rotated further, a portion of the electrode region 431 of the second electrode substrate 430 passes through the conductive fluid droplet 421 and the second electrode substrate 430 The contact area between the portion of the electrode region 431 and the conductive fluid droplet 421 is reduced again (process 3-contact finishing state). Thus, the charge returns to the circuit to balance charge with a reduction in contact area.

Thus, it is possible to produce electric power by capturing the electric charge back to the circuit.

12 is an operation explanatory diagram of a REWOD generator according to an embodiment of the present invention. Such a REWOD generator includes a vibration-rotation converter and a rotary REWOD generator.

Referring to FIG. 12, vibration is generated by an external environment. Then, the damping vibration movement by the damper is performed.

Then, the vibrational motion is converted into the rotational motion by the slide-crank structure.

Then, the rotary REWOD generator is operated by the converted / reduced rotational motion.

Figure 13 is a perspective view of a vibration collecting type reverse electrowetting power generation module according to a preferred embodiment of the present invention. 14 is a cross-sectional view of FIG. 13. 15 is an exploded perspective view of FIG. 13. FIG. 16 is a view illustrating a lower structure included in the nano-micro structure employed in the vibration collecting reverse electrowetting power generation module shown in FIG. 13. 17 is an FE-SEM photograph of a nano-cone as an example of a nano-micro structure employed in the vibration collecting reverse electrowetting power generation module of the present invention.

13 to 17, the vibration collecting type reverse electrowetting power generation module according to the preferred embodiment of the present invention includes an upper electrode substrate 51 and a lower electrode substrate 52 disposed so that the distance therebetween can be changed. . One or more conductive fluid droplets 53 are disposed between the upper electrode substrate 51 and the lower electrode substrate 52. In the upper electrode substrate 51 and the lower electrode substrate 52, the first dielectric layer (1) is formed on the surface of the conductive fluid droplet 53 side, that is, the lower surface of the upper electrode substrate 51 and the upper surface of the lower electrode substrate 52, respectively. 54 and the second dielectric layer 55 are disposed. In the reverse electrowetting power generation module of the present invention, hydrophobic protruding nano-micro structures 561 are arranged on the first dielectric layer 54 or the second dielectric layer 55. Such nano-micro structures 561 may be disposed in the hydrophobic film 56 formed on the first dielectric layer 54 or the second dielectric layer as described below, or the first dielectric layer 54 or the second dielectric layer 55 may be formed. It may be formed hydrophobic and disposed thereon.

In the vibration collecting reverse electrowetting power generation module according to the preferred embodiment of the present invention as described above, as shown in FIG. 5, the contact angle between the droplet and the substrate is maximized by the nano-micro structures in a steady state (process 1). By doing so, the change of the contact area in the compression recovery process due to vibration can be maximized.

Specifically, the upper electrode substrate 51 and the lower electrode substrate 52 may be a material that can be used as an electrode such as metal, polymer, or glass such as Pt, Pd, Ru, Ag, Au, Al, Ni, or the like. .

The first dielectric layer 54 and the second dielectric layer 55 are disposed on the bottom and top surfaces of the upper electrode substrate 51 and the lower electrode substrate 52, respectively. These may be for example 5 nm to 5 mm. For reference, for convenience of understanding, FIGS. 13 and 15 illustrate some elements to be transparent. In FIG. 15, the first dielectric layer 54 and the second dielectric layer 55 formed on the upper electrode substrate 51 and the lower electrode substrate 52 are not separately shown.

In a preferred embodiment, the first dielectric layer 54 and the second dielectric layer 55 are formed of a material comprising silicon oxide, silicon nitride, tantalum oxide, titanium oxide, aluminum oxide, barium titanate, glass, parylene, teflon or PDMS. It may be.

The hydrophobic film 56 may be disposed on the first dielectric layer 54 or the second dielectric layer 55. In the illustrated example, the hydrophobic film 56 is disposed on the second dielectric layer 55 disposed on the lower electrode substrate 52.

In the illustrated example, the hydrophobic film 56 has a plurality of protruding nano-micro structures 561 formed of, for example, a superhydrophobic body. Such protruding nano-micro structures 561 can be formed using nanolithography and patterning. Representative hydrophobic materials that can be applied are, but are not limited to, fluoropolymer series.

These multiple hydrophobic protruding nano-micro structures 561 can increase the contact angle of the conductive fluid droplet 53 to 150 ° or more.

The protruding nano-micro structures 561 may be nanocones, nanofillers, nanomeshes or nanofibers, and the like, and the shape thereof is not particularly limited.

As another example, the first dielectric layer 54 or the second dielectric layer 55 may be formed of a hydrophobic material, in which case the protruding nano-micro structure 561 may be replaced by the first dielectric layer 54 or the second dielectric layer 55. ) Or nano-micro structures 561 thereon.

One or more conductive fluid droplets 53 are disposed between the upper electrode substrate 51 and the lower electrode substrate 52 as described above. Thus, one or more conductive fluid droplets 53 abut dielectric layer, hydrophobic film 56, or protruding nano-micro structure 561. In particular, the droplets 53 have a large contact angle in a steady state before vibration compression is performed by the protruding nano-micro structures 561 of the superhydrophobic body disposed on the lower electrode substrate 52. As a result, when the steady state and the compressed state are repeated, the change of the contact area of each droplet 53 becomes larger than that of the existing module.

One or more conductive fluid droplets may be an ionic liquid or a liquid metal. In addition, each of the one or more conductive fluid droplets may have a diameter of 1 μm to 5 cm.

Preferably, the portions of the first and second dielectric layers 54 and 55 or the hydrophobic film 56 which contact each of the one or more conductive fluid droplets may have a concave groove structure. This concave groove structure can prevent the separation of each conductive fluid droplet 53. Such a groove structure may be naturally formed by forming a concave groove on the lower electrode substrate 52 and forming the first dielectric layer 54, the hydrophobic layer 56, and the nano-micro structures 561 thereon.

The vibration collecting reverse electrowetting power generation module according to the preferred embodiment of the present invention includes an elastic separator 57 disposed to maintain a gap between the upper electrode substrate 51 and the lower electrode substrate 52. The elastic separator 57 maintains a gap between the upper electrode substrate 51 and the lower electrode substrate 52 during compression by vibration, and also allows the upper electrode substrate 51 to recover to a predetermined height upon recovery. As shown, the elastic separator 57 may be provided in an edge shape surrounding one or more conductive fluid droplets 53 in one module, but is not limited thereto.

In addition, a cover member 58 may be further disposed on the upper electrode substrate. The cover member 58 serves to protect the components of the module disposed below.

The operation of the vibration collecting reverse electrowetting power generation module according to the preferred embodiment of the present invention as described above will be described with reference to FIG. 5.

First, as in step 1, polarization of droplets occurs due to voltage in a normal state where the substrates are not compressed. In this case, the droplets 53 may have a contact angle of 150 ° or more due to the superhydrophobic protruding nano-micro structures 561. Subsequently, as shown in the process 2 shown in the center, when vibration occurs and compression occurs, the droplets are pressed by the substrates to increase the contact area, thereby additionally supplying charges in the circuit to balance the charges. When it returns to the normal state as shown in the lower part of the process 3, the contact area between the droplet and the substrate is reduced, and the charge moves to the circuit to balance the charge, and then, these charges are collected to produce electric power.

On the other hand, the embodiments of the present invention disclosed in the specification and drawings are merely presented specific examples for clarity and are not intended to limit the scope of the present invention. It is apparent to those skilled in the art that other modifications based on the technical idea of the present invention can be carried out in addition to the embodiments disclosed herein.

[Description of the code]

10, 30: vibration-rotation converter 20, 40: REWOD power generation unit

110: rotating member 111: rotating plate

112: protrusion 120: connecting member

121: connection rod 122: protrusion

123: connecting groove 130: elastic member

131: spring 132: upper connecting plate

133: lower connecting plate 134: protrusion

140: energy damping member 150: vibration transmission member

210: first electrode substrate 211: groove

220: conductive fluid array 221: conductive fluid

230: second electrode substrate 240: partition wall

250: protective cover 310: vibration member

320: energy damping member 321: central axis

322: opening 330: elastic member

331: spring 332: upper connecting plate

333: lower connecting plate 334: protrusion

340: connecting member 341: connecting rod

342: protrusion 350: rotational transmission member

351: rotating plate 352: protrusion

353: rotation axis 410: first electrode substrate

411: groove 412: through hole

420: conductive fluid array 421: conductive fluid

430: second electrode substrate 431: electrode region

432: non-conductive zone 440: protective cover

51: upper electrode substrate 52: lower electrode substrate

53: conductive fluid droplets 54: first dielectric layer

55: second dielectric layer 56: hydrophobic film

561: protruding nano-micro structure 57: elastic separator

58: cover

Claims

A conductive fluid array including a first electrode substrate, a second electrode substrate, and conductive fluids positioned between the first electrode substrate and the second electrode substrate, wherein the first electrode substrate or the second electrode is formed by an external physical force. A REWOD power generation unit configured to collect energy using a change in contact area between the electrode portion of the first electrode substrate or the second electrode substrate and the conductive fluid while the substrate is vibrated; And

It is connected to the first electrode substrate or the second electrode substrate of the REWOD power generation unit to transmit an external physical force to the first electrode substrate or the second electrode substrate, and includes a vibration-rotation conversion unit for converting the rotational energy to transmit the vibration energy REWOD generator.
The method of claim 1,

The vibration-rotation converter further includes an energy damping unit for attenuating the converted energy after converting rotational energy into vibration energy.
The method of claim 1,

The vibration-rotation converter is a REWOD generator comprising a slide-crank structure.
The method of claim 1,

The vibration-rotation converter,

A rotating member rotated by an external physical force;

A connecting member having one end connected to the rotating part;

An elastic member connected to the other end of the connection member and vibrated by the connection member;

An energy damping member connected to the elastic member and configured to attenuate vibration energy transmitted from the elastic member; And

And a vibration transfer member connected to the energy damping member and transferring the damped vibration energy to the first electrode substrate or the second electrode substrate of the REWOD generator.
The method of claim 4, wherein

The REWOD power generation unit,

A first electrode substrate including a plurality of grooves positioned on an upper surface thereof;

A first dielectric thin film formed on the first electrode substrate;

A first hydrophobic thin film formed on the first dielectric thin film;

A conductive fluid array including conductive fluids disposed corresponding to the positions of the grooves on the first electrode substrate on which the first dielectric thin film and the first hydrophobic thin film are formed; And

And a second electrode substrate disposed on the conductive fluid array so as to vibrate, the second electrode substrate having a second dielectric thin film disposed on a lower surface thereof and a second hydrophobic thin film positioned below the second dielectric thin film.
The method of claim 5,

And the grooves prevent displacement of the conductive fluid.
The method of claim 5,

The conductive fluid is a liquid metal gallinstane, NaCl, LiCl, NaNo 3 , Na 2 SiO 3 , AlCl 3 -NaCl, LiCl-KCl, KCL, Na, NaOH, H 2 SO 4 , CH 3 COOH, HF, CuSO 4 , REWOD generator comprising at least one of ethylene glycol, propylene glycol and AgCl.
The method of claim 5,

And a partition wall supporting the first electrode substrate and the second electrode substrate.
The method of claim 5,

The first hydrophobic thin film or the second hydrophobic thin film is a REWOD generator comprising a fluoropolymer-based material or super water-repellent nanostructures.
A conductive fluid array including a first electrode substrate, a second electrode substrate, and conductive fluids positioned between the first electrode substrate and the second electrode substrate, wherein the first electrode substrate or the second electrode substrate is formed by an external physical force. A REWOD power generation unit configured to collect energy using a change in contact area between the electrode portion of the first electrode substrate or the second electrode substrate and the conductive fluid while the electrode substrate rotates; And

It is connected to the first electrode substrate or the second electrode substrate of the REWOD power generation unit to transmit an external physical force to the first electrode substrate or the second electrode substrate, and includes a vibration-rotation conversion unit for converting the vibration energy to transmit the rotation energy REWOD generator.
The method of claim 10,

The vibration-rotation converter is a REWOD generator comprising a slide-crank structure.
The method of claim 10,

The vibration-rotation converter,

Vibration member vibrating by the external physical force;

An energy damping member connected to the vibration member and configured to attenuate the vibration energy transmitted from the vibration member;

An elastic member connected to the energy damping member and vibrating by receiving the damped vibration energy;

A connecting member having one end connected to the elastic member; And

And a rotation transfer member connected to the other end of the connection member and rotated by the connection member to transfer rotational energy to the first electrode substrate or the second electrode substrate of the REWOD generator.
The method of claim 12,

The REWOD power generation unit,

A first electrode substrate including a plurality of grooves positioned on an upper surface thereof;

A first dielectric thin film formed on the first electrode substrate;

A conductive fluid array including conductive fluids disposed corresponding to the positions of the grooves on the first electrode substrate on which the first dielectric thin film is formed; And

A second electrode substrate which is rotatably installed on the first electrode substrate on which the conductive fluid array is disposed, and on which a second dielectric thin film is formed;

REWOD power generation unit coupled to the rotation axis of the rotation transfer member in the center of the second electrode substrate.
The method of claim 13,

The grooves are REWOD generator characterized in that the dot form or channel form.
The method of claim 13,

And the grooves are radially spaced apart from each other.
The method of claim 13,

And the grooves prevent displacement of the conductive fluid.
The method of claim 13,

And the conductive fluid is in the form of droplets or channels.
The method of claim 13,

The conductive fluid is a liquid metal gallinstane, NaCl, LiCl, NaNo 3 , Na 2 SiO 3 , AlCl 3 -NaCl, LiCl-KCl, KCL, Na, NaOH, H 2 SO 4 , CH 3 COOH, HF, CuSO 4 , REWOD generator comprising at least one of ethylene glycol, propylene glycol and AgCl.
The method of claim 13,

REWOD generator, characterized in that the second electrode substrate is in the form of a branch.
The method of claim 13,

The second electrode substrate includes a branched electrode region and a non-conductive region other than the electrode region.
Vibration-collecting reverse electrowetting power module:

Upper and lower electrode substrates arranged to be changeable in their spacing therebetween;

One or more conductive fluid droplets disposed between the upper electrode substrate and the lower electrode substrate;

First and second dielectric layers formed on surfaces of the conductive fluid droplet side of the upper and lower electrode substrates, respectively; And

And hydrophobic protruding nano-micro structures arranged on the first or second dielectric layer.
The method of claim 21,

Wherein the first or second dielectric layer is hydrophobic or has a hydrophobic film on its surface.
The method of claim 21,

The protruding nano-micro structure is made of a superhydrophobic, reverse electrowetting power module.
The method of claim 21,

And the dielectric layer is between 5 nm and 5 mm.
The method of claim 21,

Wherein said dielectric layer is formed of a material comprising silicon oxide, silicon nitride, tantalum oxide, titanium oxide, aluminum oxide, barium titanate, glass, parylene, teflon, or PDMS.
The method of claim 21,

And the at least one conductive fluid droplet is an ionic liquid or a liquid metal.
The method of claim 21,

Wherein each of the one or more conductive fluid droplets has a diameter of 1 μm to 5 cm.
The method of claim 22,

In the first and second dielectric layers or the hydrophobic film, the contact portion of each of the one or more conductive fluid droplets is a concave groove structure is formed so as to prevent the departure of the conductive fluid droplets, reverse electrowetting power generation module.
The method of claim 21,

The cover member is further disposed on the upper electrode substrate, reverse electrowetting power generation module.
The method of claim 29,

And an elastic separator for maintaining a gap between the upper electrode substrate and the lower electrode substrate.