WO2015199260A1

WO2015199260A1 - Diffraction optical system and laser processing method using same

Info

Publication number: WO2015199260A1
Application number: PCT/KR2014/005676
Authority: WO
Inventors: 이천재; 임하나; 박훈
Original assignee: 주식회사 코윈디에스티
Priority date: 2014-06-23
Filing date: 2014-06-26
Publication date: 2015-12-30

Abstract

The present invention relates to a diffraction optical system and a laser processing method using the same, and the diffraction optical system, according to the present invention, comprises: a laser light source for emitting a laser beam; a first optical system for delivering the laser beam from the laser light source; a diffraction optical element for controlling at least one of a processing size, shape and distribution of the laser beam from the optical system; and a second optical system for emitting the laser beam controlled by the diffraction optical element so as to process a processing member.

Description

Diffraction Optical System and Laser Processing Method Using the Same

Embodiments of the present invention relate to a diffractive optical system and a laser processing method using the same.

Recently, a technique of processing a workpiece using a laser optical system has been widely used.

1 to 3 are views for explaining a laser optical system according to the prior art, the laser optical system according to the prior art will be described with reference to FIGS.

The processing optical system 470 is a structure for processing the processing member 440, and adjusting means for adjusting the beam from the processing laser light source 471 and the processing laser light source 471 for processing the processing member 440. 472, wherein the adjusting means 472 includes an

array lens

474, 475, 476, 477 and a slit 473.

In addition, the observation optical system 480 may monitor the measurement status of the machining member 440 in real time, and more specifically, the machining member 440 to determine the measurement position or the machining position of the machining member 440. ), And the

imaging lenses

481 and 482 and the CCD 483 are included.

In addition, the light from the reflected light 410 is transmitted to the processing member 440 by the beam splitter 460 and the first objective lens 450, and transmitted through the second objective lens 455 and the mirror 465. The light is transmitted to the light source 430, and the computer terminal 443 may analyze the processing result of the processing member 440.

However, the laser processing method using the laser optical system according to the prior art uses the slit 473 to numerically control the processing size, so that energy loss as much as the shielding area occurs and diffraction occurs. As shown in FIG. 2, energy loss occurs due to structural limitations of the

array lenses

474, 475, 476, and 477 included in the adjusting means 472, and the manufacturing cost is expensive.

In more detail, as shown in FIG. 2, in the case of the array lens, a loss of 4 (πr ² ) occurs in the total area xy of the array lens, and as shown in FIG. 3, the total area of the slit xy as shown in FIG. 3. The loss by the area of the mask pattern 301 occurred.

In addition, according to the prior art, it was not possible to form multiple beams, construct a beam profile, or control the beam shape.

The present invention has been made to solve the above-described problem, by using a diffractive optical element to freely split the beam according to the user command, and to control the phase and intensity of the laser beam freely to the desired size and shape I want to be able to.

In addition, the present invention is to combine the diffractive optical element with a scanner to process a plurality of beams to enable high-speed processing, and to minimize the energy loss by diffracting the laser beam to generate the number and focal number of the laser beam required .

In addition, according to an embodiment of the present invention to simplify the configuration of the optical system to reduce the manufacturing cost of the optical system.

Diffraction optical system according to the present embodiment for solving the above problems, the laser light source for irradiating a laser beam; A first optical system for transmitting a laser beam from the laser light source; A diffractive optical element for controlling at least one of the processing size, shape, and distribution of the laser beam from the optical system; And a second optical system configured to process the processing member by irradiating the laser beam controlled by the diffractive optical element.

According to another embodiment of the present invention, the diffractive optical element may form a pattern of the laser beam.

According to another embodiment of the present invention, the diffractive optical device may be any one of a liquid crystal on silicon (LCoS), a deformable mirror (DM), a digital mirror divice (DMD), diffractive optical elements (DOE), and an acoustic optic difflactor (AOD). It can be composed of one.

According to another embodiment of the present invention, the diffractive optical element may convert the laser beam into a plurality.

According to another embodiment of the present invention, the second optical system may process the processing member using the laser beam converted into the plurality.

According to another embodiment of the present invention, the diffractive optical element may control at least one of the number, shape, shape and position of the laser beam.

According to another embodiment of the present invention, the first optical system may include at least one of a beam expander, a homogenizer, and a beam attenuator.

According to another embodiment of the present invention, the second optical system includes a mirror reflecting a laser beam controlled by the diffractive optical element; And a high magnification objective lens for transferring the laser beam to the processing member.

According to another embodiment of the present invention, a splitter for connecting the first optical system and the second optical system; And an imaging device for photographing the processing member through the splitter.

According to another embodiment of the present invention, a cooling device for cooling the heat generated in the diffractive optical element may further include.

According to another embodiment of the present invention, the optical system may further include a slit including a mask pattern.

Laser processing method using a diffraction optical system according to an embodiment of the present invention comprises a first step of irradiating a laser beam from a laser light source; A second step of transmitting, by the first optical system, the laser beam from the laser light source; A third step of diffractive optical element controlling at least one of the processing size, shape and distribution of the beam of the laser beam from the optical system; And a fourth step of the second optical system processing the processing member by irradiating the laser beam controlled by the diffractive optical element.

According to another embodiment of the present invention, in the third step, the diffractive optical element may form a pattern of the laser beam.

According to another embodiment of the present invention, in the third step, the diffractive optical element may convert the laser beam into a plurality.

According to another embodiment of the present invention, in the fourth step, the second optical system may process the processing member using the laser beam converted into the plurality.

According to another embodiment of the present invention, in the third step, the diffractive optical element may control at least one of the number, shape, shape, and position of the laser beam.

According to the embodiment of the present invention, the beam can be freely divided according to a user command using the diffractive optical element, and the phase and intensity of the laser beam can be controlled to freely control the desired size and shape.

In addition, according to an embodiment of the present invention, the diffraction optical element is combined with a scanner to process a plurality of beams to enable high-speed processing, and diffract the laser beam to generate the number and focal number of the laser beam required to generate energy loss. It can be minimized.

In addition, according to the embodiment of the present invention can simplify the configuration of the optical system to reduce the manufacturing cost of the optical system.

1 to 3 are diagrams for explaining a laser optical system according to the prior art.

4 is a diagram illustrating a configuration of a diffractive optical system according to an embodiment of the present invention.

5 is a view showing a pattern of a laser beam according to an embodiment of the present invention.

6 is a view showing a processing result of a processing member according to an embodiment of the present invention.

7 is a diagram illustrating a configuration of a diffractive optical system according to another embodiment of the present invention.

8 is a flowchart illustrating a laser processing method using a diffractive optical system according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail an embodiment of the present invention. However, in describing the embodiments, when it is determined that detailed descriptions of related known functions or configurations may unnecessarily obscure the subject matter of the present invention, detailed descriptions thereof will be omitted. In addition, the size of each component in the drawings may be exaggerated for description, it does not mean the size that is actually applied.

5 is a view showing a pattern of a laser beam according to an embodiment of the present invention, Figure 6 is a view showing a processing result of the processing member according to an embodiment of the present invention.

Hereinafter, the configuration of the diffractive optical system according to the exemplary embodiment of the present invention will be described with reference to FIGS. 4 to 6.

As shown in FIG. 4, the diffraction optical system according to the exemplary embodiment of the present invention includes a laser light source 110, a first optical system 120, a diffractive optical element 130, and a second optical system 150. The apparatus may further include a cooling device 135, a diffractive optical element controller 136, and

computer terminals

180 and 181.

The laser light source 110 irradiates a laser beam, and the first optical system 120 transmits the laser beam irradiated from the laser light source 110 to the diffractive optical element 130.

In more detail, the first optical system 120 includes an optical plate 121 and a beam expander 122, and further includes a slit including a homogenizer or a beam attenuator or a mask pattern. Can be configured.

In this case, the beam expander and the homogenizer serve to appropriately size the laser beam irradiated to the diffractive optical element and to improve the beam quality according to the characteristics of the diffractive optical element, and the beam attenuator serves to adjust the output of the laser beam. .

In addition, the slit including the mask pattern forms a square pattern by depositing or sputtering chromium or silver on a lens material such as quartz, and serves to replace the slit. The mechanical slit must be diffracted according to the optical principle, and in order to minimize this, it minimizes the height of the edge of the light shielding part and increases the precision of the processed shape.

The diffractive optical element 130 controls at least one of the processing size, shape, and distribution of the laser beam from the first optical system 120.

In this case, the diffractive optical element 130 may form a pattern of the laser beam as shown in FIG. 5, and the diffractive optical element 130 may freely make the laser beam in a user's request form. For example, when a user designates a star shape through the diffractive optical element controller 136 from the computer terminal 181, the phase shift elements (liquid crystal and phase shift element) inside the diffractive optical element are varied to form a three-dimensional hologram. It is possible to convert the laser beam and cause it to be starred at the machining position.

That is, the diffraction optical element 130 may control the number, shape, shape, and position of the processed laser beam by the control by the diffraction optical element control unit 136 from the computer terminal 181, and the computer terminal The energy and irradiation time to be used by the 181 and the diffractive optical element controller 136 may be defined.

At this time, in the embodiment of Figure 4, the diffractive optical element 130 is an embodiment consisting of any one of a liquid crystal on silicon (LCoS), a deformable mirror (DM) and a digital mirror divice (DMD), in another embodiment Diffractive optical element 130 may be composed of diffractive optical elements (DOE) or acoustic optic difflactor (AOD).

When the liquid crystal on silicon (LCoS) is used as the diffractive optical element 130, the intensity of the output light can be controlled by modulating the phase of incident light, and using a deformable mirror (DM) as the diffractive optical element 130. In this case, the shape of incident light may be changed by coupling a variable driving element such as a piezo to the lower portion of the reflective material.

In addition, the diffractive optical element 130 may further include a cooling device 135 to cool the heat generated by the diffractive optical element 130 or to cool the heat generated in the first optical system 120.

The second optical system 150 processes the processing member 210 by irradiating the laser beam controlled by the diffractive optical element 130.

In this case, the second optical system 150 may include a mirror 140 and a scanner or a high magnification objective lens 151.

The laser beam is transmitted to the scanner or the high magnification objective lens 151 by the mirror 140 to allow the processing member 210 to be processed as shown in FIG. 6, and through the computer terminal 180, the processing member. The processing result of 210 can be confirmed.

The scanner may be configured as a polygon scanner or a galvano scanner, and a plurality of laser beams may be formed in the processing member 210 through the scanner configured as described above.

The diffractive optical system according to the embodiment of FIG. 7 includes a laser light source 110, a first optical system 120, a diffractive optical element 130, and a second optical system 150, a splitter 160, and an imaging device 170. And a computer terminal 180.

The first optical system 120 may include an optical plate 121 and a beam expander 122, and may further include a slit including a homogenizer or a beam attenuator or a mask pattern.

The diffractive optical element 130 according to the embodiment of FIG. 7 may be composed of diffractive optical elements (DOE), and predefines processing conditions such as the processing speed of the laser beam, the number and shape of the processing beams, and the quality of the diffraction optical element. The pattern of the device can be defined and manufactured in the form of a lens.

The laser beam controlled by the diffractive optical element 130 is transmitted to the second optical system 150 through the relay lens 130, the mirror 140, and the splitter 160.

In this case, the second optical system 150 may include an imaging lens 152 and a scanner or a high magnification objective lens 151, and the laser beam may pass through the imaging lens 152 to the scanner or the high magnification objective lens 151. The processing member 210 may be processed to be transferred.

In addition, in the embodiment of FIG. 7, the imaging device 170 photographs the processing member 210 through the splitter 160 connecting the first optical system and the second optical system, and processes the processing through the computer terminal 180. The processing result of the member 210 can be confirmed, and the computer terminal 180 checks the processing state in real time through the imaging device 170, or configures the processing axis and the observation axis separately to perform before and after processing. It may be.

First, when the laser light source irradiates a laser beam (S810), the first optical system transmits the laser beam from the laser light source (S820).

Thereafter, the diffractive optical element controls at least one of the processing size, shape, and distribution of the beam of the laser beam from the optical system (S830).

In this case, the diffractive optical element may form a pattern of the laser beam, and the diffractive optical element may convert the laser beam into a plurality of pieces.

That is, the diffractive optical element may control the number, shape, shape, and position of the processed laser beam by the control through the diffraction optical element controller from the computer terminal, and the energy to be used by the computer terminal and the diffraction optical element controller. And survey time can be defined.

In this case, the diffractive optical element may be composed of any one of a liquid crystal on silicon (LCoS), a deformable mirror (DM), a digital mirror divice (DMD), a diffractive optical elements (DOE), and an acoustic optic difflactor (AOD).

Thereafter, the second optical system irradiates the laser beam controlled by the diffractive optical element to process the processing member (S840).

In this case, when the diffractive optical element converts the laser beam into a plurality of pieces, the second optical system may process the processing member using the converted laser beams.

Thereafter, the imaging apparatus photographs the processing member, and the processing result of the processing member may be confirmed through the computer terminal (S850).

That is, the computer terminal may check the machining state in real time through the imaging device, or may configure the machining axis and the observation axis separately to perform the observation before and after the machining.

In the detailed description of the invention as described above, specific embodiments have been described. However, many modifications are possible without departing from the scope of the invention. The technical spirit of the present invention should not be limited to the above-described embodiments of the present invention, but should be determined not only by the claims, but also by those equivalent to the claims.

Claims

A laser light source for irradiating a laser beam;

A first optical system for transmitting a laser beam from the laser light source;

A diffractive optical element for controlling at least one of the processing size, shape, and distribution of the laser beam from the optical system; And

A second optical system for processing a laser beam by controlling the laser beam controlled by the diffractive optical element;

Diffraction optical system system comprising a.
The method according to claim 1,

The diffractive optical element,

A diffraction optical system for forming a pattern of the laser beam.
The method according to claim 1,

The diffractive optical element,

A diffractive optical system, which is any one of a liquid crystal on silicon (LCoS), a deformable mirror (DM), a digital mirror division, a diffractive optical elements (DOE), and an acoustic optic difflactor (AOD).
The method according to claim 1,

The diffractive optical element,

Diffraction optical system for converting the laser beam into a plurality of
The method according to claim 4,

The second optical system,

A diffraction optical system for processing a processing member using the laser beam converted into a plurality of.
The method according to claim 1,

The diffractive optical element,

Diffractive optics system for controlling at least one of the number, shape, shape and position of the laser beam.
The method according to claim 1,

The first optical system,

A diffractive optics system comprising at least one of a beam expander, homogenizer and beam attenuator.
The method according to claim 1,

The second optical system,

A mirror reflecting a controlled laser beam at the diffractive optical element; And

A high magnification objective lens for transmitting the laser beam to the processing member;

Diffraction optical system system comprising a.
The method according to claim 1,

A splitter connecting the first optical system and the second optical system; And

An imaging device for photographing the processing member through the splitter;

Diffraction optical system further comprising.
The method according to claim 1,

A cooling device for cooling the heat generated by the diffractive optical element;

Diffraction optical system further comprising.
The method according to claim 1,

The optical system,

A slit comprising a mask pattern;

A diffraction optical system further comprising.
A first step of irradiating a laser beam with a laser light source;

A second step of transmitting, by the first optical system, the laser beam from the laser light source;

A third step of diffractive optical element controlling at least one of the processing size, shape and distribution of the beam of the laser beam from the optical system; And

A fourth step of processing a processing member by irradiating the laser beam controlled by the diffractive optical element by a second optical system;

Laser processing method using a diffraction optical system including a.
The method according to claim 12,

The third step,

And a diffraction optical system for forming the pattern of the laser beam.
The method according to claim 12,

The diffractive optical element,

Laser processing method using a diffraction optical system which is any one of liquid crystal on silicon (LCoS), deformable mirror (DM), digital mirror division (DMD), diffractive optical elements (DOE), and acoustic optic difflactor (AOD).
The method according to claim 13,

The third step,

And a diffraction optical system for converting the laser beam into a plurality of diffractive optical elements.
The method according to claim 15,

The fourth step,

The laser processing method using the diffraction optical system which the said 2nd optical system processes a processing member using the laser beam converted into the said several number.
The method according to claim 15,

The third step,

And a diffraction optical system for controlling the at least one of the number, shape, shape, and position of the laser beam.