WO2015198779A1 - Novel polymer and use thereof - Google Patents

Novel polymer and use thereof Download PDF

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Publication number
WO2015198779A1
WO2015198779A1 PCT/JP2015/065118 JP2015065118W WO2015198779A1 WO 2015198779 A1 WO2015198779 A1 WO 2015198779A1 JP 2015065118 W JP2015065118 W JP 2015065118W WO 2015198779 A1 WO2015198779 A1 WO 2015198779A1
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polymer
group
resin film
formula
carbon atoms
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PCT/JP2015/065118
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French (fr)
Japanese (ja)
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優 木村
寛仁 窪
武士 徳永
西村 功
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Jsr株式会社
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Priority to JP2016529202A priority Critical patent/JP6217857B2/en
Publication of WO2015198779A1 publication Critical patent/WO2015198779A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00Chemical modification by after-treatment
    • C08F8/34Introducing sulfur atoms or sulfur-containing groups
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12MAPPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M23/00Constructional details, e.g. recesses, hinges
    • C12M23/20Material Coatings
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable

Definitions

  • the present invention relates to a novel polymer and photosensitive resin composition suitably used for forming a resin film containing a water-soluble resin and having a large film thickness, as well as a resin film, a patterned resin film and a method for producing the same, and
  • the present invention relates to a cell culture apparatus.
  • a spheroid is a three-dimensional cellular tissue formed by aggregation of many cells.
  • Spheroid culture is a culture method that can maintain the function of cells for a long period of time compared to conventional monolayer culture, and is closer to a living body. It is known that the survival state can be maintained over a long period of time by culturing cells in three dimensions as compared to culturing cells in two dimensions (Patent Document 1).
  • Patent Document 1 a cell culture substrate having a surface to which cells adhere relatively weakly compared to 2D culture is used, so that the problem that the formed spheroids are released into the culture solution is known.
  • Patent Document 1 a method of culturing cells in a cell holding cavity for holding cells has been disclosed (Patent Document 1).
  • a photosensitive resin composition containing a water-soluble resin which is a partition wall having a weak adhesive force with the cell tissue body in consideration of the ease of taking out the cultured cell tissue body
  • Patent Documents 2 to 3 a partition wall formed from
  • JP 2006-121991 A Japanese Patent Laid-Open No. 03-007576 JP 2014-023508 A
  • An object of the present invention is to provide a polymer, a photosensitive resin composition containing the polymer, and a resin film and a patterned resin, which can form a resin film containing a water-soluble resin and having a large film thickness.
  • An object of the present invention is to provide a membrane, a manufacturing method thereof, and a cell culture apparatus.
  • the present inventors have intensively studied to solve the above problems. As a result, the inventors have found that the above problems can be solved by using a polymer and a photosensitive resin composition having the following configurations, and have completed the present invention.
  • the present invention includes, for example, the following [1] to [13].
  • [1] A polymer (A) having a structural unit represented by the formula (1a).
  • each R 1 is independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms
  • R 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms
  • R 3 is a group having a hydroxyl group
  • R 4 is a hydrogen atom or an alkyl group having 1 to 20 carbon atoms.
  • each R 1 is independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms
  • R 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms
  • R 3 is a group having a hydroxyl group
  • R 4 is a hydrogen atom or an alkyl group having 1 to 20 carbon atoms.
  • Step 1 of forming a resin film of the photosensitive resin composition according to any one of [5] to [7] on a substrate; Step 2 of selectively exposing the film; And a step 3 of developing the exposed film with an aqueous developer.
  • the polymer which can form the resin film containing a water-soluble resin and a large film thickness, the photosensitive resin composition containing this polymer, and a resin film and patterned resin A membrane, a production method thereof, and a cell culture device can be provided.
  • FIG. 1 is a 1 H NMR spectrum of the polymer obtained in Synthesis Example A1.
  • FIG. 2 is a 1 H NMR spectrum of the polymer obtained in Example A1.
  • FIG. 3 is a 1 H NMR spectrum of the polymer obtained in Example A2.
  • n is a formula number.
  • the polymer of the present invention has a structural unit represented by the formula (1ab).
  • X is —S— or —S ( ⁇ O) —
  • R 1 is each independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, preferably a hydrogen atom
  • 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms, preferably an alkanediyl group having 1 to 20 carbon atoms
  • R 3 is a group having a hydroxyl group
  • R 4 is A hydrogen atom or an alkyl group having 1 to 20 carbon atoms, preferably a hydrogen atom.
  • polymer (A) a polymer having the above structural unit in which X is —S ( ⁇ O) — is also referred to as “polymer (A)”, and a polymer having the above structural unit in which X is —S—.
  • the polymer is also referred to as “polymer (A) precursor” or “polymer (A ′)”.
  • the polymer having both the structural unit in which X is —S ( ⁇ O) — and the structural unit in which X is —S— corresponds to the polymer (A).
  • the polymer (A) is obtained by oxidizing the precursor as described later.
  • the term “polymer of the present invention” is used to collectively refer to the polymers (A) and (A ′).
  • the polymer (A) is a water-soluble resin, it is possible to form a resin film having a cell non-adhesive property with weak adhesion to a cell tissue.
  • the “water-soluble resin” in the present invention refers to a resin having a solubility in 100 g of water at 25 ° C. and 1 bar of 0.1 g or more.
  • Examples of the alkyl group having 1 to 20 carbon atoms in R 1 and R 4 include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, An octyl group, a nonyl group, a decyl group, etc. are mentioned.
  • the number of carbon atoms of the alkyl group is preferably 1-15, more preferably 1-10.
  • Examples of the alkanediyl group having 1 to 20 carbon atoms in R 2 include a methylene group, a 1,2-ethanediyl group, an n-propylene group, an isopropylene group, and an isobutylene group.
  • the carbon number of the alkanediyl group is preferably 1-15, more preferably 1-10.
  • Examples of the arylene group having 6 to 20 carbon atoms in R 2 include 1,2-phenylene group, 1,3-phenylene group, 1,4-phenylene group, 1,4-naphthylene group, 1,5-naphthylene group, , 8-naphthylene group, 2,6-naphthylene group, 2,7-naphthylene group and the like.
  • the arylene group preferably has 6 to 18 carbon atoms, more preferably 6 to 15 carbon atoms.
  • the group having a hydroxyl group in R 3 is, for example, formed by substituting at least one hydrogen atom contained in an alkyl group having usually 1 to 20, preferably 1 to 15, and more preferably 1 to 10 carbon atoms with a hydroxyl group.
  • Examples include OH-containing groups and OH / ether-containing groups in which a part of —CH 2 — contained in the OH-containing group is replaced with an oxygen atom.
  • the number of hydroxyl groups is usually 1 or more, preferably 1 to 5, more preferably 1 to 2.
  • R 3 is preferably a monovalent group represented by the formula (g1).
  • a is an integer of 0 to 4, preferably an integer of 0 to 1.
  • the structural unit (1ab) is preferably a part of the structural unit represented by the formula (1).
  • X and R 1 to R 4 have the same meanings as the same symbols in the formula (1ab).
  • two R 1 attached to the carbon atom C 1 is a hydrogen atom, it is more preferred that all of R 1 is a hydrogen atom.
  • the content of the structural unit (1) in which X is —S ( ⁇ O) — is usually 20 mol% or more, preferably 20 to 20 mol per 100 mol% of all the structural units constituting the polymer (A) of the present invention. 90 mol%, more preferably 30 to 80 mol%.
  • the content of the structural unit (1) in which X is —S— is usually 20 mol% or more, preferably 20 to 90 mol% in 100 mol% of all the structural units constituting the polymer (A ′) of the present invention. More preferably, it is 30 to 80 mol%.
  • the structural unit indicates a structure derived from a monomer (for example, a conjugated diene compound). The content of each structural unit can be measured by NMR analysis.
  • the polymer of the present invention may further have a structural unit represented by the formula (2), and from the structural unit represented by the formula (3) and the structural unit represented by the formula (4). You may have further at least 1 sort chosen.
  • X and R 1 to R 4 have the same meanings as the same symbols in the formula (1ab).
  • the cis-trans isomer of the double bond is not particularly limited. Incidentally, it is preferable that two R 1 attached to the carbon atom C 1 is a hydrogen atom, it is more preferred that all of R 1 is a hydrogen atom.
  • the total content of the structural unit (1) and the structural unit (2) in which X is —S ( ⁇ O) — is usually 20 mol in 100 mol% of all structural units constituting the polymer (A) of the present invention. % Or more, preferably 20 to 95 mol%, more preferably 30 to 90 mol%.
  • the content of the structural unit (1) and the structural unit (2) in which X is —S— is usually 20 mol% or more, preferably 100 mol% or more in all the structural units constituting the polymer (A ′) of the present invention. Is 20 to 95 mol%, more preferably 30 to 90 mol%.
  • the content of the structural unit (3) is usually 80 mol% or less, preferably 5 to 80 mol%, more preferably 100 mol% of all the structural units constituting the polymer (A) or (A ′) of the present invention. Is from 10 to 70 mol%.
  • the content of the structural unit (4) in which X is —S ( ⁇ O) — is usually 10 mol% or less in 100 mol% of all the structural units constituting the polymer (A) of the present invention.
  • the content of the structural unit (4) in which X is —S— is usually 10 mol% or less in 100 mol% of all the structural units constituting the polymer (A ′) of the present invention.
  • the weight average molecular weight (Mw) measured by the gel permeation chromatography method of the polymer of the present invention is usually 1,000 to 100,000, preferably 2,000 to 50,000, more preferably in terms of polystyrene. 3,000 to 30,000. Further, the molecular weight distribution of the polymer of the present invention represented by weight average molecular weight (Mw) / number average molecular weight (Mn) is usually 1 to 5, preferably 1.1 to 3, more preferably 1.2 to 2. It is.
  • Mw is in the above range
  • a resin film having a higher resolution and a larger film thickness can be formed. It is preferable in terms of resolution that Mw / Mn is in the above range.
  • the details of the measuring method of Mw and Mn are as described in the examples.
  • the polymer (A) of the present invention includes, for example, a step A1 of obtaining an epoxidized polymer by epoxidizing a carbon-carbon double bond contained in a conjugated diene polymer, and an epoxy ring contained in the epoxidized polymer.
  • ring-opening addition of a compound represented by R 3 —R 2 —SH (R 2 and R 3 have the same meanings as R 2 and R 3 in the formula (1ab), respectively) It can be synthesized by a production method having Step A2 for obtaining a containing polymer and Step A3 for converting a sulfide group contained in the sulfide group-containing polymer into a sulfinyl group using an oxidizing agent.
  • Step A1 is a step of obtaining an epoxidized polymer by epoxidizing the carbon-carbon double bond contained in the conjugated diene polymer.
  • the carbon-carbon double bond contained in the conjugated diene polymer having the structural unit represented by the formula (a1) is epoxidized, and the epoxidized polymer having the structural unit represented by the formula (a2) Is obtained.
  • R 1 has the same meaning as the same symbol in formula (1ab).
  • the cis-trans isomer of the double bond is not particularly limited.
  • conjugated diene compound constituting the conjugated diene polymer examples include 1,3-butadiene, 2-methyl-1,3-butadiene (isoprene), 2,3-dimethyl-1,3-butadiene, and 1,3- Examples include pentadiene, 2-methyl-1,3-pentadiene, 1,3-hexadiene, 1,3-octadiene, 3-butyl-1,3-octadiene, and 4,5-diethyl-1,3-octadiene. Of these, 1,3-butadiene and isoprene are preferred.
  • a conjugated diene compound may be used individually by 1 type, and may use 2 or more types together.
  • polybutadiene and polyisoprene are preferable.
  • the vinyl bond content in the conjugated diene polymer is usually 80 mol% or less, preferably 5 to 80 mol%, more preferably 10 to 70 mol%.
  • the vinyl bond content is a conjugated diene compound that is incorporated in a conjugated diene polymer in a 1,2-bond, 3,4-bond, or 1,4-bond bond mode. This is the total ratio (based on mol%) of compounds incorporated by 1,2-bonds and 3,4-bonds.
  • the vinyl bond content can be measured by the Hampton method by infrared spectroscopic analysis.
  • Step A1 can be performed, for example, by epoxidizing the carbon-carbon double bond derived from the conjugated diene compound contained in the conjugated diene polymer with an epoxidizing agent in an organic solvent.
  • an epoxidation catalyst can also be used.
  • Examples of the epoxidizing agent include hydrogen peroxide; organic peracids such as peracetic acid, perbenzoic acid, performic acid, and trifluoroperacetic acid. Among these, hydrogen peroxide is preferable.
  • Examples of the epoxidation catalyst include formic acid, butyric acid, valeric acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, lauric acid, myristylic acid, palmitic acid, palmitoyl acid, margaric acid, stearic acid, oleic acid Vaccenoic acid, linoleic acid, (9,12,15) -linolenic acid, (6,9,12) -linolenic acid, eleostearic acid, tuberculostearic acid, arachidic acid, 8,11-icosadienoic acid, 5 , 8,11-icosatrienoic acid, arachidonic acid, behenic acid,
  • organic solvents examples include aliphatic hydrocarbons such as pentane, hexane, heptane, and octane, alicyclic hydrocarbons such as cyclopentane, cyclohexane, and cycloheptane, benzene, naphthalene, toluene, and xylene.
  • An organic solvent may be used individually by 1 type, and may use 2 or more types together.
  • the reaction temperature in step A1 may be appropriately selected below the boiling point of the solvent, but is usually 0 to 200 ° C., preferably 40 to 150 ° C.
  • the reaction time in step A1 is usually 0.5 to 30 hours, preferably 1 to 10 hours.
  • the amount of epoxidizing agent and epoxidation catalyst used is not particularly limited. An appropriate amount can be used depending on conditions such as the reactivity of the epoxidizing agent, the performance of the epoxidation catalyst, the desired epoxidation rate, the number of carbon-carbon double bonds contained in the conjugated diene polymer.
  • the epoxidation rate of the epoxidized polymer is usually 10 to 100%, preferably 30 to 90%, more preferably 40 to 80%.
  • Epoxidation rate is [number of double bonds epoxidized among all carbon-carbon double bonds contained in conjugated diene polymer / number of all carbon-carbon double bonds contained in conjugated diene polymer before epoxidation] ⁇ 100 (%).
  • the epoxidation rate can be calculated by 1 H NMR.
  • Step A2 is a step of obtaining a sulfide group-containing polymer by ring-opening addition of a compound (sulfiding agent) represented by R 3 —R 2 —SH to the epoxy ring contained in the epoxidized polymer. . If necessary, the hydroxyl group after the epoxy ring is opened is alkoxylated. In this step, the structural unit represented by the formula (a2) is converted into the structural unit represented by the formula (a3) to obtain the precursor of the polymer (A) of the present invention.
  • a compound (sulfiding agent) represented by R 3 —R 2 —SH
  • R 1 to R 4 are respectively synonymous with the same symbols in formula (1ab).
  • R 2 and R 3 are as defined the same symbols in each formula (1ab). Specific examples include thioglycerol and mercaptoethanol.
  • the sulfiding agent may be used alone or in combination of two or more.
  • the amount of the sulfidizing agent to be used is generally 0.5 to 20 mol, preferably 1 to 10 mol, per 1 mol of structural unit (a2).
  • Step A2 is preferably performed in the presence of a catalyst.
  • the catalyst include basic catalysts such as lithium hydroxide, triethylamine and N, N-dimethyl-4-aminopyridine.
  • a catalyst may be used individually by 1 type and may use 2 or more types together.
  • the amount of the catalyst to be used is generally 0.01-30 mol, preferably 0.1-10 mol, per 1 mol of structural unit (a2).
  • Step A2 is preferably performed in the presence of an organic solvent.
  • the organic solvent include alcohol solvents such as methanol and ethanol, amide solvents such as dimethylformamide and dimethylacetamide, sulfoxide solvents such as dimethyl sulfoxide, ester solvents such as ethyl acetate, butyl acetate and ⁇ -butyrolactone, toluene, benzene and the like.
  • an aromatic solvent such as tetrahydrofuran, dioxane, diethyl ether and the like.
  • An organic solvent may be used individually by 1 type, and may use 2 or more types together.
  • the reaction temperature in step A2 may be appropriately selected below the boiling point of the solvent, but is usually 30 to 150 ° C., preferably 40 to 100 ° C.
  • the reaction time in step A2 is usually 1 to 20 hours, preferably 2 to 10 hours.
  • the alkoxylation of the hydroxyl group formed by opening the epoxy ring can be performed by a known method. For example, it can be carried out according to the method described in JP-A-56-104831 or JP-A-2005-305280.
  • the alkoxylation of the hydroxyl group may be performed after sulfinylation.
  • Step A3 is a step of converting a sulfide group contained in the sulfide group-containing polymer into a sulfinyl group using an oxidizing agent.
  • the structural unit represented by the formula (a3) is converted into the structural unit represented by the formula (a4), and the polymer (A) of the present invention is obtained.
  • R 1 to R 4 are respectively synonymous with the same symbols in formula (1ab).
  • the oxidizing agent examples include organic oxidizing agents such as peracetic acid, perbenzoic acid, and metachloroperbenzoic acid, and inorganic oxidizing agents such as hydrogen peroxide, chromic acid, and permanganate.
  • An oxidizing agent may be used individually by 1 type, and may use 2 or more types together.
  • the amount of the oxidizing agent to be used is generally 1 to 10 mol, preferably 2 to 5 mol, per 1 mol of structural unit (a3).
  • An oxidizing agent may be used individually by 1 type, and may use 2 or more types together.
  • Process A3 is preferably performed in the presence of a solvent.
  • the solvent include water; alcohol solvents such as methanol and ethanol; amide solvents such as dimethylformamide and dimethylacetamide. Among these, water and alcohol solvents are preferable.
  • a solvent may be used individually by 1 type and may use 2 or more types together.
  • the reaction temperature in step A3 may be appropriately selected below the boiling point of the solvent, but is usually 23 to 100 ° C., preferably 30 to 70 ° C.
  • the reaction time in step A3 is usually 0.5 to 30 hours, preferably 1 to 10 hours.
  • isolation of each reaction product is carried out as usual by filtration, washing, drying, recrystallization, reprecipitation, dialysis, centrifugation, extraction with various solvents, neutralization, chromatography, etc.
  • the means may be combined appropriately.
  • the photosensitive resin composition of this invention contains the polymer (A) mentioned above, a photoresponsive compound (B), and a crosslinking agent (C).
  • the photosensitive resin composition of the present invention is also referred to as “the composition of the present invention”. Since the composition of this invention contains a polymer (A), it can form the resin film which has a large film thickness and hydrophilic property.
  • the viscosity of the composition of the present invention is usually 0.1 to 100 cP, preferably 0.5 to 50 cP, more preferably 1 to 10 cP.
  • the viscosity is a value measured by a method based on JIS Z8803.
  • the content of the polymer (A) is usually 10 to 60% by mass, preferably 15 to 55% by mass, and more preferably 20 to 50% by mass in 100% by mass of the composition of the present invention.
  • the content of the polymer (A) is within the above range, a composition capable of forming a resin film having a large film thickness and high resolution can be obtained.
  • coated can be obtained.
  • the photosensitive resin composition of the present invention contains a photoresponsive compound (B).
  • Examples of the photoresponsive compound (B) include a photoacid generator and a photoradical polymerization initiator.
  • the photoacid generator is a compound that generates an acid by a treatment including light irradiation.
  • an acid is generated in the exposed part based on the acid generator, and the solubility of the exposed part in the aqueous developer is changed based on the action of this acid. To do.
  • the composition of the present invention may be either a negative type or a positive type.
  • the kind of photoresponsive compound (B) can be suitably selected according to a negative composition or a positive composition. Among these, from the viewpoint of the mechanical strength of the resin film, a negative composition is preferable.
  • the photoacid generator examples include onium salt compounds, halogen-containing compounds, sulfone compounds, sulfonic acid compounds, sulfonimide compounds, diazomethane compounds, and compounds having a quinonediazide group.
  • the compound having a quinonediazide group is also referred to as “quinonediazide compound (B2)”, and the other exemplified photoacid generators are also referred to as “acid generator (B1)”.
  • the acid generator (B1) is a compound that generates an acid when irradiated with light.
  • the generated acid acts on the crosslinking agent (C) and the like to form a crosslinked structure.
  • it becomes a hardly soluble film.
  • a negative pattern is formed by utilizing the fact that the film changes from an easily soluble state to an insoluble state in an aqueous developer by light irradiation.
  • the quinonediazide compound (B2) is a compound in which a quinonediazide group is decomposed to generate a carboxyl group by light irradiation and contact treatment with water.
  • the resin film obtained from the composition containing the quinonediazide compound (B2) is a film that is hardly soluble in an aqueous developer.
  • a positive pattern is formed by utilizing the fact that the film changes from a hardly soluble state to an easily soluble state in an aqueous developer by light irradiation.
  • the acid generator (B1) is at least one selected from, for example, an onium salt compound, a halogen-containing compound, a sulfone compound, a sulfonic acid compound, a sulfonimide compound, and a diazomethane compound.
  • onium salt compounds include iodonium salts, sulfonium salts, phosphonium salts, diazonium salts, and pyridinium salts.
  • preferred onium salts include iodonium salts such as diphenyliodonium trifluoromethanesulfonate, diphenyliodonium p-toluenesulfonate, diphenyliodonium hexafluoroantimonate, diphenyliodonium hexafluorophosphate, and diphenyliodonium tetrafluoroborate; L-methanesulfonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium hexafluoroantimonate, 4-t-butylphenyl diphenylsulfonium trifluoromethanesulfonate, 4-t-butylphenylpheny
  • halogen-containing compound examples include a haloalkyl group-containing heterocyclic compound and a haloalkyl group-containing hydrocarbon compound.
  • preferred halogen-containing compounds include phenyl-bis (trichloromethyl) -s-triazine, 4-methoxyphenyl-bis (trichloromethyl) -s-triazine, styryl-bis (trichloromethyl) -s-triazine, naphthyl S-triazine derivatives such as bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine; 1 , 10-dibromo-n-decane, 1,1-bis (4-chlorophenyl) -2,2,2-trichloroethane.
  • sulfone compounds include ⁇ -ketosulfone compounds, ⁇ -sulfonylsulfone compounds, and ⁇ -diazo compounds of these compounds.
  • Specific examples of preferred sulfone compounds include 4-trisphenacylsulfone, mesitylphenacylsulfone, and bis (phenacylsulfonyl) methane.
  • sulfonic acid compounds examples include alkyl sulfonic acid esters, haloalkyl sulfonic acid esters, aryl sulfonic acid esters, and imino sulfonates.
  • Specific examples of preferred sulfonic acid compounds include benzoin tosylate, pyrogallol tris trifluoromethane sulfonate, o-nitrobenzyl trifluoromethane sulfonate, and o-nitrobenzyl p-toluene sulfonate.
  • sulfonimide compound examples include N- (trifluoromethylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) phthalimide, N- (trifluoromethylsulfonyloxy) diphenylmaleimide, N- (trifluoromethylsulfonyloxy).
  • sulfonimide compound examples include N- (trifluoromethylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) phthalimide, N- (trifluoromethylsulfonyloxy) diphenylmaleimide, N- (trifluoromethylsulfonyloxy).
  • Bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide N- (trifluoromethylsulfonyloxy) naphthylimide.
  • diazomethane compound examples include bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, and bis (phenylsulfonyl) diazomethane.
  • the acid generator (B1) may be used alone or in combination of two or more.
  • the content of the acid generator (B1) is preferably 100 parts by mass of the polymer (A).
  • the amount is 0.1 to 10 parts by mass, more preferably 0.3 to 5 parts by mass, and still more preferably 0.5 to 5 parts by mass.
  • the content of the acid generator (B1) is equal to or higher than the lower limit, the exposed area is sufficiently cured and the heat resistance is easily improved.
  • the content of the acid generator (B1) is not more than the above upper limit value, a patterned resin film having a high resolution is easily obtained without lowering the transparency to exposure light.
  • quinonediazide compound (B2) examples include a naphthoquinonediazide compound, specifically, a compound having one or more phenolic hydroxyl groups and 1,2-naphthoquinonediazide-4-sulfonic acid or 1,2-naphtho Examples include ester compounds with quinonediazide-5-sulfonic acid.
  • Examples of the quinonediazide compound (B2) include 4,4′-dihydroxydiphenylmethane, 4,4′-dihydroxydiphenyl ether, 2,3,4-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2 , 3,4,2 ′, 4′-pentahydroxybenzophenone, tris (4-hydroxyphenyl) methane, tris (4-hydroxyphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1-phenylethane, 1,3-bis [1- (4-hydroxyphenyl) -1-methylethyl] benzene, 1,4-bis [1- (4-hydroxyphenyl) -1-methylethyl] benzene, 4,6-bis [ 1- (4-hydroxyphenyl) -1-methylethyl] -1,3-dihydroxybenzene and 1,1 A compound selected from bis (4-hydroxyphenyl) -1- [4- [1- (4-hydroxyphen
  • a quinonediazide compound (B2) may be used by 1 type, and may use 2 or more types together.
  • the content of the quinonediazide compound (B2) is preferably 5 to 100 parts by mass with respect to 100 parts by mass of the polymer (A). 50 parts by mass, more preferably 10 to 30 parts by mass, and still more preferably 15 to 30 parts by mass.
  • the content of the quinonediazide compound (B2) is equal to or higher than the lower limit, the remaining film ratio in the unexposed area is improved and an image faithful to the mask pattern is easily obtained.
  • the content of the quinonediazide compound (B2) is less than or equal to the above upper limit value, a resin film excellent in pattern shape is easily obtained and foaming during film formation tends to be prevented.
  • the composition of the present invention contains a crosslinking agent (C).
  • the crosslinking agent (C) is, for example, a compound that undergoes a crosslinking reaction by the action of an acid; a compound that is polymerized by heat or radical, such as a (meth) acrylate compound.
  • a compound that proceeds with a crosslinking reaction by the action of an acid is preferable.
  • crosslinking agent (C) examples include a crosslinking agent (C1) having at least two groups represented by —CH 2 OR and other crosslinking agents (C2).
  • R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an acetyl group.
  • the (C1) is also referred to as “active methylene group-containing crosslinking agent (C1)”.
  • a crosslinking agent (C1) is preferable from the viewpoint that a high-thickness resin film can be formed.
  • the content of the crosslinking agent (C) is usually 1 to 50 parts by weight, preferably 3 to 30 parts by weight, more preferably 5 to 20 parts per 100 parts by weight of the polymer (A). Part by mass.
  • the content of the crosslinking agent (C) is in the above range, a composition excellent in sensitivity and resolution tends to be obtained.
  • the active methylene group-containing crosslinking agent (C1) is a crosslinking agent having at least two groups represented by —CH 2 OR.
  • R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an acetyl group, preferably a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
  • crosslinking agent (C1) examples include a compound having two or more groups represented by the formula (C1-1) and a compound having two or more groups represented by the formula (C1-2).
  • m is 1 or 2
  • n is 0 or 1
  • m + n is 2
  • R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or An acetyl group, preferably a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and * is a bond.
  • Examples of the crosslinking agent (C1) include nitrogen compounds such as polymethylolated melamine, polymethylolated glycoluril, polymethylolated guanamine, and polymethylolated urea; active methylol groups in the nitrogen compounds (CH bonded to N atom) 2 OH group) or all of a part thereof are alkyl etherified or acetoxylated.
  • examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, a propyl group, and a butyl group, which may be the same as or different from each other.
  • the active methylol group which is not alkyletherified or acetoxylated may be self-condensed within one molecule, or may be condensed between two molecules, and as a result, an oligomer component may be formed.
  • crosslinking agent (C1) examples include crosslinking agents described in JP-A-6-180501, JP-A-2006-178059, and JP-A-2012-226297.
  • melamine-based crosslinking agents such as polymethylolated melamine, hexamethoxymethylmelamine, hexaethoxymethylmelamine, hexapropoxymethylmelamine, hexabutoxymethylmelamine; polymethylolated glycoluril, tetramethoxymethylglycoluril, tetrabutoxy Glycoluril-based crosslinking agents such as methylglycoluril; 3,9-bis [2- (3,5-diamino-2,4,6-triazaphenyl) ethyl] 2,4,8,10-tetraoxospiro [ 5.5] Undecane, 3,9-bis [2- (3,5-diamino-2,4,6-triazaphenyl) propyl] 2,4,8,10-tetrao
  • crosslinking agent (C1) examples include a methylol group-containing phenol compound, an alkylmethylol group-containing phenol compound, and an acetoxymethyl group-containing phenol compound.
  • Specific examples include 2,6-dimethoxymethyl-4-t-butylphenol, 2,6-dimethoxymethyl-p-cresol, 2,6-diacetoxymethyl-p-cresol, and compounds represented by the following formulae. It is done.
  • a crosslinking agent (C1) may be used by 1 type, and may use 2 or more types together.
  • cross-linking agent (C2) examples include an oxirane ring-containing compound, an oxetane ring-containing compound, an isocyanate group-containing compound (including a blocked one), an oxazoline ring-containing compound, and an aldehyde group-containing phenol compound. .
  • the other crosslinking agent (C2) may be used alone or in combination of two or more.
  • the composition of the present invention preferably contains a solvent (D).
  • a solvent D
  • the handleability of the composition can be improved, and the viscosity and storage stability can be adjusted.
  • the solvent (D) for example, water or a mixed solvent containing water is preferable.
  • the solvent other than water constituting the mixed solvent include organic solvents that can be uniformly mixed with water, for example, alcohols such as methanol, ethanol, n-butanol, and ethyl lactate, and alkylene glycols such as propylene glycol monomethyl ether. .
  • the mixed solvent usually 10% by mass or more, preferably 30% by mass or more, more preferably 50% by mass or more is water.
  • a solvent (D) may be used individually by 1 type, and may use 2 or more types together.
  • the content of the solvent (D) is such that the solid content concentration in the composition usually exceeds 10% by mass and is 70% by mass or less, preferably 15% by mass. Is more than 60% by mass, more preferably more than 20% by mass and 55% by mass or less.
  • the solid content usually means all components other than the solvent (D) contained in the composition.
  • additives In the composition of the present invention, other additives such as adhesion assistant, acid diffusion controller, crosslinked fine particles, leveling agent, surfactant, sensitizer, inorganic filler, quencher, etc. It can be contained as long as the characteristics are not impaired.
  • the composition of this invention can be prepared by mixing each component uniformly. Moreover, in order to remove dust, after mixing each component uniformly, you may filter the obtained mixture with a filter.
  • the resin film of the present invention contains the polymer (A) described above.
  • the resin film containing the polymer (A) can be formed, for example, according to Step 1 described below, using the above-described photosensitive resin composition of the present invention.
  • the thickness of the resin film is usually 1 to 200 ⁇ m, preferably 3 to 100 ⁇ m, more preferably 5 to 50 ⁇ m.
  • the patterned resin film of the present invention contains the polymer (A) described above, and is formed, for example, from the photosensitive resin composition of the present invention.
  • a hydrophilic resin film having a large film thickness can be formed.
  • a patterned resin film with high resolution can be formed.
  • Step 1 for forming a resin film of the photosensitive resin composition of the present invention on a substrate
  • Step 2 for selectively exposing the film, and development of the exposed film with an aqueous developer.
  • a step 3 of forming a patterned resin film This manufacturing example may further include a step 4 of heat-treating the patterned resin film.
  • step 1 the photosensitive resin composition of the present invention is applied onto a substrate and dried to form a resin film.
  • drying conditions for example, heating is performed at 50 to 90 ° C. for 1 to 30 minutes using an oven or a hot plate.
  • the thickness of the resin film is usually 1 to 200 ⁇ m, preferably 3 to 100 ⁇ m, more preferably 5 to 50 ⁇ m. If the film thickness is insufficient, the resin film may be formed by coating twice.
  • the substrate for example, polystyrene, polycarbonate, polyacetal, triacetyl cellulose, polyamide, polyimide, polyethylene, polypropylene, vinyl chloride, vinylidene chloride, polyphenylene sulfide, polyethersulfone, polyurethane, polyethylene terephthalate, polyethylene naphthalate, polyacrylate,
  • a resin substrate made of at least one resin selected from polymethacrylate and cellulose; a substrate made of a material such as glass, ceramic, and stainless steel. It may be a resin substrate made of a biodegradable polymer such as polylactic acid, polyglycolic acid, and polycaprolactan.
  • a known cell culture substrate described in JP-A-2002-335949 can also be used.
  • Examples of the coating method of the composition include a dipping method, a spray method, a bar coating method, a roll coating method, a spin coating method, a curtain coating method, a gravure printing method, a silk screen method, and an inkjet method.
  • step 2 the film is exposed through a desired mask pattern using, for example, a contact aligner, a stepper, or a scanner.
  • exposure light include ultraviolet light and visible light, and light with a wavelength of 200 to 500 nm (eg, i-line (365 nm)) is usually used.
  • the exposure dose of exposure light varies depending on the type and content of each component in the photosensitive resin composition, the thickness of the resin film, and the like. 000 mJ / cm 2 .
  • PEB processing In the case of using a negative photosensitive resin composition, it is preferable to perform a heat treatment after exposure in order to further promote the crosslinking reaction.
  • this processing is also referred to as “PEB processing”.
  • the PEB condition varies depending on the type and content of each component in the photosensitive resin composition and the thickness of the resin film, but is usually 50 to 90 ° C. and about 1 to 60 minutes.
  • step 3 the exposed film is developed with an aqueous developer, and a non-exposed portion is removed in the case of a negative type, and an exposed portion is removed in the case of a positive type, thereby forming a desired pattern on the substrate.
  • a resin film is formed.
  • aqueous developer for example, water or a mixed solvent containing water is preferable.
  • a mixed solvent the mixed solvent described in the column of the solvent (D) is mentioned.
  • the development method include a shower development method, a spray development method, an immersion development method, and a paddle development method.
  • the development conditions are usually about 20 to 40 ° C. for about 1 to 10 minutes.
  • the patterned resin film is further cured by heating.
  • the heating conditions are not particularly limited, but for example, the heating is performed at a temperature of 100 to 300 ° C. for about 30 minutes to 10 hours depending on the use of the patterned resin film. In order to sufficiently advance the curing or to prevent the deformation of the pattern shape, heating can be performed in multiple stages.
  • the cell culture device of the present invention has the patterned resin film described above.
  • the apparatus preferably includes a cell culture substrate and the patterned resin film described above formed on the substrate.
  • the patterned resin film possessed by the cell culture device of the present invention is a resin film formed from the photosensitive resin composition of the present invention for retaining cells and cell tissues formed from these cells, particularly spheroids. It has a structure in which one or a plurality of holes are formed.
  • the patterned resin film is a partition wall that forms a hole.
  • the hole is formed through the resin film.
  • the bottom surface of the hole is constituted by the surface of the cell culture substrate, and the side surface of the hole is constituted by a resin film.
  • the surface of the cell culture substrate preferably has cell adhesion from the viewpoint of cell retention.
  • the patterned resin film preferably has cell non-adhesiveness in consideration of the ease of removing the cell tissue from the pores after culturing. Since the photosensitive resin composition of the present invention contains the polymer (A) which is a water-soluble resin, a patterned resin film having the above properties can be formed.
  • the shape of the bottom surface of the hole is not particularly limited, and examples thereof include a circular shape, an elliptical shape, and a polygonal shape.
  • the area of the bottom of the pore is appropriately determined depending on the size and type of cells, but is usually 1,000 to 40,000 ⁇ m 2 , preferably 5,000 to 20,000 ⁇ m 2 .
  • the patterned resin film in which holes are formed in the resin film can be formed, for example, according to the above-described method for producing a patterned resin film.
  • a cell culture substrate is used as the substrate to which the photosensitive resin composition is applied.
  • the bottom surface of the hole is preferably a surface having cell adhesiveness from the viewpoint of holding cells and forming a cell tissue body.
  • Cell adhesive surfaces include, for example, surfaces into which charged functional groups such as carboxyl groups and amino groups have been introduced, surfaces into which cell adhesive peptides such as arginine, glycine, and aspartic acid sequences have been introduced. It is the surface where the polymer which it has was fixed.
  • the functional group having an electric charge can be introduced by treating the substrate surface with radiation such as plasma.
  • the polymer having cell adhesion include, for example, synthetic polymers having a charge such as polyacrylic acid, polyvinyl sulfate, polystyrene sulfonic acid, polyallylamine, chondroitin sulfate, dermatan sulfate, dextran sulfate, keratan sulfate, heparan sulfate, Examples thereof include polysaccharides having a charge such as hyaluronic acid and chitin, cell adhesive proteins such as collagen, gelatin, fibronectin, hydronectin and laminin, and synthetic polymers on which cell adhesive proteins and cell adhesive peptides are immobilized.
  • a cell culture substrate having a cell adhesive surface can be used. Further, after the patterned resin film is formed on the cell culture substrate, the exposed surface of the substrate (bottom surface of the hole) may be subjected to radiation treatment or a cell-adhesive polymer may be immobilized.
  • the substrate surface that is the bottom surface of the hole may have an uneven structure.
  • the adhesion of the cell tissue body to the bottom surface can be improved.
  • Examples of the shape in the planar direction of the convex portion or concave portion in the concavo-convex structure include a circular shape, an elliptical shape, and a polygonal shape.
  • the depth of the hole is determined by the thickness of the patterned resin film, and is usually 1 to 200 ⁇ m, preferably 3 to 100 ⁇ m, and more preferably 5 to 50 ⁇ m. If it is this range, a cell and a cell tissue body can be favorably hold
  • the cells are cultured in the pores of the patterned resin film to form cell tissues, particularly spheroids.
  • a culture solution containing cells is put into the hole, and cells seeded on the bottom surface of the hole form a cell tissue body that is three-dimensionally bonded on the surface of the cell culture substrate that is the bottom surface.
  • the cell tissue is cultured for a long period of time while being stably held in the hole formed by the partition wall while adhering to the bottom surface of the hole without floating in the culture solution.
  • the type of animal species and organs / tissues is not particularly limited as long as the cells form a bond between cells.
  • primary cells collected from livers, pancreas, kidneys, nerves, skin, ES cells (Embryonic Stem cell), established cell lines, or these derived from animals such as humans, pigs, dogs, rats, mice, etc. And cells subjected to genetic manipulation.
  • a cell may be used individually by 1 type and may use 2 or more types together.
  • As the culture solution an aqueous solution containing necessary salts and / or nutrient components at an appropriate concentration can be used so that the survival state and function of the cells can be maintained.
  • Method for measuring physical properties [1] Method for measuring Mw, Mn and Mw / Mn of polymer
  • the weight average molecular weight (Mw), number average molecular weight (Mn) and molecular weight distribution (Mw / Mn) of the polymer are: The measurement was performed by gel permeation chromatography under the following conditions. Column: Tosoh column “TSKgel ⁇ M” and “TSKgel ⁇ 2500” connected in series. Solvent: N-methyl-2-pyrrolidone with lithium bromide and phosphoric acid added. Temperature: 40 ° C. ⁇ Detection method: Refractive index method ⁇ Standard material: Polystyrene ⁇ GPC apparatus: manufactured by Tosoh Corporation, apparatus name “HLC-8020-GPC”
  • the polymer (A1) is a polymer in which a part of unsaturated groups of polybutadiene is epoxidized, and the epoxidation rate [(number of epoxidized unsaturated groups / polybutadiene before epoxidation is included) Number of unsaturated groups) ⁇ 100 (%)] was 60%.
  • the 1 H NMR spectrum of the polymer (A1) is shown in FIG. Moreover, Mn was 5400, Mw was 9500, and Mw / Mn was 1.76.
  • Example A1 Synthesis of polymer (A2)
  • polymer (A2) In a 100 ml flask, 5.2 g of the above polymer (A1), 4.4 g of ⁇ -thioglycerol, 0.85 g of lithium hydroxide monohydrate, methanol (MeOH). 6.6 ml and tetrahydrofuran (THF) 5.8 ml were added and heated and stirred at 60 ° C. for 2 hours. Then, it cooled to 23 degreeC and reprecipitated with water. The precipitate was vacuum dried at 60 ° C. to obtain a polymer (A2). From 1 H NMR, it was found that the polymer (A2) had a thioether structure. The 1 H NMR spectrum of the polymer (A2) is shown in FIG.
  • Example A2 Synthesis of polymer (A3) To a 100 ml flask, 5.0 g of the above polymer (A2), 4.6 g of 31% by mass hydrogen peroxide, and 25.3 ml of methanol (MeOH) were added. The mixture was stirred with heating at ° C for 2 hours. Then, it cooled to 23 degreeC and reprecipitated with isopropanol. The precipitate was vacuum dried at 60 ° C. to obtain a white solid polymer (A3). From 1 H NMR, it was found that the polymer (A3) had a sulfinyl group. The 1 H NMR spectrum of the polymer (A3) is shown in FIG.
  • Example 1C On the glass substrate, the photosensitive resin composition prepared in Example 1B was applied by spin coating, heated at 70 ° C. for 20 minutes using a hot plate, and the film thickness was 1 ⁇ m, 2 ⁇ m, 5 ⁇ m, 10 ⁇ m, and 20 ⁇ m. A resin film was formed. Next, using an aligner (manufactured by Suss Microtec, device name “MA-100”), UV light from a high-pressure mercury lamp is passed through a pattern mask so that the exposure amount at a wavelength of 365 nm is 1,000 mJ / cm 2. The film was irradiated. The exposed resin film was heated at 70 ° C.
  • an aligner manufactured by Suss Microtec, device name “MA-100”
  • Example 1B A patterned resin film having a hole pattern with a rectangular cross section was formed. It was revealed that the photosensitive resin composition prepared in Example 1B can form a good patterned resin film up to a thickness of 20 ⁇ m.
  • Comparative Example 1C was performed in the same manner as Example 1C, except that a commercially available photosensitive resin composition (trade name “Biosurfine-AWP”, manufactured by Toyo Gosei Co., Ltd.) was used as the photosensitive resin composition.
  • a commercially available photosensitive resin composition (trade name “Biosurfine-AWP”, manufactured by Toyo Gosei Co., Ltd.) was used as the photosensitive resin composition.
  • a commercially available photosensitive resin composition can form a good patterned resin film only up to a thickness of 2 ⁇ m.

Abstract

[Problem] To provide a polymer which makes it possible to form a resinous film that contains a water-soluble resin and is thick and a photosensitive resin composition containing the polymer. [Solution] A polymer (A) having a structural unit represented by formula (1a). [In formula (1a), the R1 moieties are each independently a hydrogen atom or a C1-20 alkyl group; R2 is a C1-20 alkanediyl group or a C6-20 arylene group; R3 is a group having a hydroxy group; and R4 is a hydrogen atom or a C1-20 alkyl group.]

Description

新規な重合体およびその用途Novel polymers and their uses
 本発明は、水溶性樹脂を含有する、膜厚の大きい樹脂膜の形成に好適に用いられる、新規な重合体および感光性樹脂組成物、ならびに樹脂膜、パターン化樹脂膜・その製造方法、および細胞培養装置に関する。 The present invention relates to a novel polymer and photosensitive resin composition suitably used for forming a resin film containing a water-soluble resin and having a large film thickness, as well as a resin film, a patterned resin film and a method for producing the same, and The present invention relates to a cell culture apparatus.
 細胞培養技術では、生体内と同等の機能を有する組織(スフェロイド)の培養が注目されている。スフェロイドとは、細胞が多数凝集して形成された3次元状の細胞組織体である。スフェロイド培養は、従来の単層培養に比べ、細胞の機能を長期間維持することが可能で、より生体に近い培養法である。細胞を3次元で培養することにより、細胞を2次元で培養する場合に比べて、その生存状態を長期間に亘って維持できるということが知られている(特許文献1)。 In the cell culture technology, the culture of a tissue (spheroid) having a function equivalent to that in a living body has attracted attention. A spheroid is a three-dimensional cellular tissue formed by aggregation of many cells. Spheroid culture is a culture method that can maintain the function of cells for a long period of time compared to conventional monolayer culture, and is closer to a living body. It is known that the survival state can be maintained over a long period of time by culturing cells in three dimensions as compared to culturing cells in two dimensions (Patent Document 1).
 しかしながら、3次元培養では、2次元培養に比べて、細胞が比較的弱く接着する表面を有する細胞培養用基板が用いられるため、形成されるスフェロイドが培養液中に遊離する問題が知られている(特許文献1)。 However, in 3D culture, a cell culture substrate having a surface to which cells adhere relatively weakly compared to 2D culture is used, so that the problem that the formed spheroids are released into the culture solution is known. (Patent Document 1).
 この問題を解決するため、細胞を保持するための細胞保持キャビティ内において、細胞を培養する方法が開示されている(特許文献1)。このキャビティを形成する隔壁としては、培養後の細胞組織体を取り出すときの容易性を考慮して、細胞組織体との接着力が弱い隔壁である、水溶性樹脂を含有する感光性樹脂組成物から形成される隔壁が用いられることがある(特許文献2~3)。 In order to solve this problem, a method of culturing cells in a cell holding cavity for holding cells has been disclosed (Patent Document 1). As the partition wall forming the cavity, a photosensitive resin composition containing a water-soluble resin, which is a partition wall having a weak adhesive force with the cell tissue body in consideration of the ease of taking out the cultured cell tissue body In some cases, a partition wall formed from (Patent Documents 2 to 3) is used.
特開2006-121991号公報JP 2006-121991 A 特開平03-007576号公報Japanese Patent Laid-Open No. 03-007576 特開2014-023508号公報JP 2014-023508 A
 細胞培養を3次元で行う場合、細胞保持キャビティのような細胞を保持する孔は、深い方が培養細胞を良好に保持できる。このため、感光性樹脂組成物には、膜厚の大きい樹脂膜を形成できることが望まれる。 When cell culture is performed in three dimensions, the deeper the holes for holding cells such as cell holding cavities, the better the cultured cells can be held. For this reason, it is desired that a resin film having a large film thickness can be formed in the photosensitive resin composition.
 樹脂と溶媒とを含む感光性樹脂組成物を用いて膜厚の大きい樹脂膜を形成するには、例えば、樹脂の含有割合を増やすことが考えられる。しかしながら、組成物中の樹脂の含有割合を増やすと組成物の粘度が上がり、塗布が困難となる。特に、水溶性樹脂を使用すると、水溶性樹脂は樹脂同士の相互作用が大きいため組成物の粘度が上昇しやすい。このため、水溶性樹脂を含有する、膜厚の大きい樹脂膜を形成することは困難となる。 In order to form a resin film having a large film thickness using a photosensitive resin composition containing a resin and a solvent, for example, it is conceivable to increase the resin content. However, increasing the resin content in the composition increases the viscosity of the composition and makes it difficult to apply. In particular, when a water-soluble resin is used, the viscosity of the composition tends to increase because the water-soluble resin has a large interaction between the resins. For this reason, it becomes difficult to form a resin film containing a water-soluble resin and having a large film thickness.
 本発明の課題は、水溶性樹脂を含有する、膜厚の大きい樹脂膜を形成することを可能とする、重合体およびこの重合体を含有する感光性樹脂組成物、ならびに樹脂膜、パターン化樹脂膜・その製造方法、および細胞培養装置を提供することにある。 An object of the present invention is to provide a polymer, a photosensitive resin composition containing the polymer, and a resin film and a patterned resin, which can form a resin film containing a water-soluble resin and having a large film thickness. An object of the present invention is to provide a membrane, a manufacturing method thereof, and a cell culture apparatus.
 本発明者らは上記課題を解決するため鋭意検討を行った。その結果、以下の構成を有する重合体および感光性樹脂組成物を用いることで、上記課題を解決できることを見出し、本発明を完成するに至った。 The present inventors have intensively studied to solve the above problems. As a result, the inventors have found that the above problems can be solved by using a polymer and a photosensitive resin composition having the following configurations, and have completed the present invention.
 本発明は、例えば以下の[1]~[13]である。
 [1]式(1a)で表される構造単位を有する重合体(A)。
The present invention includes, for example, the following [1] to [13].
[1] A polymer (A) having a structural unit represented by the formula (1a).
Figure JPOXMLDOC01-appb-C000005
[式(1a)中、R1はそれぞれ独立に水素原子または炭素数1~20のアルキル基であり、R2は炭素数1~20のアルカンジイル基または炭素数6~20のアリーレン基であり、R3は水酸基を有する基であり、R4は水素原子または炭素数1~20のアルキル基である。]
 [2]前記R3が、式(g1)で表される1価の基である前記[1]に記載の重合体(A)。
Figure JPOXMLDOC01-appb-C000005
[In the formula (1a), each R 1 is independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, and R 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms. R 3 is a group having a hydroxyl group, and R 4 is a hydrogen atom or an alkyl group having 1 to 20 carbon atoms. ]
[2] The polymer (A) according to [1], wherein R 3 is a monovalent group represented by the formula (g1).
Figure JPOXMLDOC01-appb-C000006
[式(g1)中、aは0~4の整数である。]
 [3]式(1b)で表される構造単位を有する重合体(A')。
Figure JPOXMLDOC01-appb-C000006
[In the formula (g1), a is an integer of 0 to 4. ]
[3] A polymer (A ′) having a structural unit represented by the formula (1b).
Figure JPOXMLDOC01-appb-C000007
[式(1b)中、R1はそれぞれ独立に水素原子または炭素数1~20のアルキル基であり、R2は炭素数1~20のアルカンジイル基または炭素数6~20のアリーレン基であり、R3は水酸基を有する基であり、R4は水素原子または炭素数1~20のアルキル基である。]
 [4]前記R3が、式(g1)で表される1価の基である前記[3]に記載の重合体(A')。
Figure JPOXMLDOC01-appb-C000007
[In the formula (1b), each R 1 is independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, and R 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms. R 3 is a group having a hydroxyl group, and R 4 is a hydrogen atom or an alkyl group having 1 to 20 carbon atoms. ]
[4] The polymer (A ′) according to [3], wherein R 3 is a monovalent group represented by the formula (g1).
Figure JPOXMLDOC01-appb-C000008
[式(g1)中、aは0~4の整数である。]
 [5]前記[1]または[2]に記載の重合体(A)と、光応答性化合物(B)と、架橋剤(C)とを含有する感光性樹脂組成物。
Figure JPOXMLDOC01-appb-C000008
[In the formula (g1), a is an integer of 0 to 4. ]
[5] A photosensitive resin composition containing the polymer (A) according to [1] or [2], a photoresponsive compound (B), and a crosslinking agent (C).
 [6]光応答性化合物(B)が、光酸発生剤であり、架橋剤(C)が、酸の作用によって架橋反応を進行する化合物である前記[5]に記載の感光性樹脂組成物。
 [7]架橋剤(C)が、-CH2ORで表される基を少なくとも2つ有する化合物(Rは、水素原子、炭素数1~10のアルキル基またはアセチル基)である前記[5]または[6]に記載の感光性樹脂組成物。
[6] The photosensitive resin composition according to [5], wherein the photoresponsive compound (B) is a photoacid generator, and the crosslinking agent (C) is a compound that undergoes a crosslinking reaction by the action of an acid. .
[7] The above [5], wherein the crosslinking agent (C) is a compound having at least two groups represented by —CH 2 OR (R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an acetyl group). Or the photosensitive resin composition as described in [6].
 [8]前記[1]または[2]に記載の重合体(A)を含有する樹脂膜。
 [9]基板上に、前記[5]~[7]のいずれか1項に記載の感光性樹脂組成物の樹脂膜を形成する工程1と、前記膜を選択的に露光する工程2と、露光後の前記膜を水系現像液で現像する工程3とを有するパターン化樹脂膜の製造方法。
[8] A resin film containing the polymer (A) according to [1] or [2].
[9] Step 1 of forming a resin film of the photosensitive resin composition according to any one of [5] to [7] on a substrate; Step 2 of selectively exposing the film; And a step 3 of developing the exposed film with an aqueous developer.
 [10]前記基板が、細胞培養用基板である前記[9]に記載のパターン化樹脂膜の製造方法。
 [11]前記[9]または[10]に記載の製造方法によって得られたパターン化樹脂膜。
[10] The method for producing a patterned resin film according to [9], wherein the substrate is a cell culture substrate.
[11] A patterned resin film obtained by the production method according to [9] or [10].
 [12]前記[1]または[2]に記載の重合体(A)を含有するパターン化樹脂膜。
 [13]前記[11]または[12]に記載のパターン化樹脂膜を有する細胞培養装置。
[12] A patterned resin film containing the polymer (A) according to [1] or [2].
[13] A cell culture device having the patterned resin film according to [11] or [12].
 本発明によれば、水溶性樹脂を含有する、膜厚の大きい樹脂膜を形成することを可能とする、重合体およびこの重合体を含有する感光性樹脂組成物、ならびに樹脂膜、パターン化樹脂膜・その製造方法、および細胞培養装置を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the polymer which can form the resin film containing a water-soluble resin and a large film thickness, the photosensitive resin composition containing this polymer, and a resin film and patterned resin A membrane, a production method thereof, and a cell culture device can be provided.
図1は、合成例A1で得られた重合体の1H NMRスペクトルである。FIG. 1 is a 1 H NMR spectrum of the polymer obtained in Synthesis Example A1. 図2は、実施例A1で得られた重合体の1H NMRスペクトルである。FIG. 2 is a 1 H NMR spectrum of the polymer obtained in Example A1. 図3は、実施例A2で得られた重合体の1H NMRスペクトルである。FIG. 3 is a 1 H NMR spectrum of the polymer obtained in Example A2.
 以下、本発明を実施するための形態について好適態様も含めて説明する。本明細書において、式(n)で表される構造単位を、単に「構造単位(n)」とも記載する。nは式番号である。 Hereinafter, modes for carrying out the present invention will be described including preferred embodiments. In the present specification, the structural unit represented by the formula (n) is also simply referred to as “structural unit (n)”. n is a formula number.
 〔重合体〕
 本発明の重合体は、式(1ab)で表される構造単位を有する。
(Polymer)
The polymer of the present invention has a structural unit represented by the formula (1ab).
Figure JPOXMLDOC01-appb-C000009
 式(1ab)中、Xは-S-または-S(=O)-であり、R1はそれぞれ独立に水素原子または炭素数1~20のアルキル基であり、好ましくは水素原子であり、R2は炭素数1~20のアルカンジイル基または炭素数6~20のアリーレン基であり、好ましくは炭素数1~20のアルカンジイル基であり、R3は水酸基を有する基であり、R4は水素原子または炭素数1~20のアルキル基であり、好ましくは水素原子である。
Figure JPOXMLDOC01-appb-C000009
In the formula (1ab), X is —S— or —S (═O) —, R 1 is each independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, preferably a hydrogen atom, 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms, preferably an alkanediyl group having 1 to 20 carbon atoms, R 3 is a group having a hydroxyl group, R 4 is A hydrogen atom or an alkyl group having 1 to 20 carbon atoms, preferably a hydrogen atom.
 以下の説明では、便宜上、Xが-S(=O)-である上記構造単位を有する重合体を「重合体(A)」とも記載し、Xが-S-である上記構造単位を有する重合体を「重合体(A)の前駆体」または「重合体(A')」とも記載する。ただし、Xが-S(=O)-である上記構造単位およびXが-S-である上記構造単位をともに有する重合体は、重合体(A)に該当する。この前駆体を、後述するように酸化することで、重合体(A)が得られる。以下、「本発明の重合体」というときは、重合体(A)および(A')を総称する意味で用いる。 In the following description, for convenience, a polymer having the above structural unit in which X is —S (═O) — is also referred to as “polymer (A)”, and a polymer having the above structural unit in which X is —S—. The polymer is also referred to as “polymer (A) precursor” or “polymer (A ′)”. However, the polymer having both the structural unit in which X is —S (═O) — and the structural unit in which X is —S— corresponds to the polymer (A). The polymer (A) is obtained by oxidizing the precursor as described later. Hereinafter, the term “polymer of the present invention” is used to collectively refer to the polymers (A) and (A ′).
 理由は定かではないが、本発明の重合体(A)を用いると、従来の水溶性樹脂を用いた場合と同等の濃度で比較して、粘度が低い組成物を得ることができる。このため、重合体(A)の含有量が多くても、塗布可能な粘度を有する組成物が調製することができる。したがって、1回塗りで、膜厚の大きい樹脂膜を形成することができる。 Although the reason is not clear, when the polymer (A) of the present invention is used, a composition having a low viscosity can be obtained as compared with the case where a conventional water-soluble resin is used. For this reason, even if there is much content of a polymer (A), the composition which has the viscosity which can be apply | coated can be prepared. Therefore, a resin film having a large film thickness can be formed by a single coating.
 また、重合体(A)は水溶性樹脂であることから、細胞組織体との接着力が弱い、細胞非接着性を有する樹脂膜を形成することができる。本発明における「水溶性樹脂」とは、25℃、1barでの水100gに対する溶解度が0.1g以上である樹脂をいう。 In addition, since the polymer (A) is a water-soluble resin, it is possible to form a resin film having a cell non-adhesive property with weak adhesion to a cell tissue. The “water-soluble resin” in the present invention refers to a resin having a solubility in 100 g of water at 25 ° C. and 1 bar of 0.1 g or more.
 R1およびR4における炭素数1~20のアルキル基としては、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、tert-ブチル基、ペンチル基、ヘキシル基、ヘプチル基、オクチル基、ノニル基、およびデシル基等が挙げられる。アルキル基の炭素数は、好ましくは1~15、より好ましくは1~10である。 Examples of the alkyl group having 1 to 20 carbon atoms in R 1 and R 4 include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, An octyl group, a nonyl group, a decyl group, etc. are mentioned. The number of carbon atoms of the alkyl group is preferably 1-15, more preferably 1-10.
 R2における炭素数1~20のアルカンジイル基としては、メチレン基、1,2-エタンジイル基、n-プロピレン基、イソプロピレン基、イソブチレン基等が挙げられる。アルカンジイル基の炭素数は、好ましくは1~15、より好ましくは1~10である。 Examples of the alkanediyl group having 1 to 20 carbon atoms in R 2 include a methylene group, a 1,2-ethanediyl group, an n-propylene group, an isopropylene group, and an isobutylene group. The carbon number of the alkanediyl group is preferably 1-15, more preferably 1-10.
 R2における炭素数6~20のアリーレン基としては、1,2-フェニレン基、1,3-フェニレン基、1,4-フェニレン基、1,4-ナフチレン基、1,5-ナフチレン基、1,8-ナフチレン基、2,6-ナフチレン基、2,7-ナフチレン基等が挙げられる。アリーレン基の炭素数は、好ましくは6~18、より好ましくは6~15である。 Examples of the arylene group having 6 to 20 carbon atoms in R 2 include 1,2-phenylene group, 1,3-phenylene group, 1,4-phenylene group, 1,4-naphthylene group, 1,5-naphthylene group, , 8-naphthylene group, 2,6-naphthylene group, 2,7-naphthylene group and the like. The arylene group preferably has 6 to 18 carbon atoms, more preferably 6 to 15 carbon atoms.
 R3における水酸基を有する基としては、例えば、炭素数が通常1~20、好ましくは1~15、より好ましくは1~10のアルキル基に含まれる少なくとも1つの水素原子を水酸基に置換してなるOH含有基、さらにこのOH含有基に含まれる一部の-CH2-を酸素原子に置き換えてなるOH・エーテル含有基が挙げられる。水酸基数は、通常1以上、好ましくは1~5、より好ましくは1~2である。特に、R3は式(g1)で表される1価の基であることが好ましい。 The group having a hydroxyl group in R 3 is, for example, formed by substituting at least one hydrogen atom contained in an alkyl group having usually 1 to 20, preferably 1 to 15, and more preferably 1 to 10 carbon atoms with a hydroxyl group. Examples include OH-containing groups and OH / ether-containing groups in which a part of —CH 2 — contained in the OH-containing group is replaced with an oxygen atom. The number of hydroxyl groups is usually 1 or more, preferably 1 to 5, more preferably 1 to 2. In particular, R 3 is preferably a monovalent group represented by the formula (g1).
Figure JPOXMLDOC01-appb-C000010
 式(g1)中、aは0~4の整数であり、好ましくは0~1の整数である。
 構造単位(1ab)は、式(1)で表される構造単位の一部であることが好ましい。
Figure JPOXMLDOC01-appb-C000010
In the formula (g1), a is an integer of 0 to 4, preferably an integer of 0 to 1.
The structural unit (1ab) is preferably a part of the structural unit represented by the formula (1).
Figure JPOXMLDOC01-appb-C000011
 式(1)中、XおよびR1~R4はそれぞれ式(1ab)中の同一記号と同義である。なお、炭素原子C1に結合した2つのR1は水素原子であることが好ましく、全てのR1が水素原子であることがさらに好ましい。
Figure JPOXMLDOC01-appb-C000011
In the formula (1), X and R 1 to R 4 have the same meanings as the same symbols in the formula (1ab). Incidentally, it is preferable that two R 1 attached to the carbon atom C 1 is a hydrogen atom, it is more preferred that all of R 1 is a hydrogen atom.
 Xが-S(=O)-である構造単位(1)の含有量は、本発明の重合体(A)を構成する全構造単位100モル%中、通常20モル%以上、好ましくは20~90モル%、より好ましくは30~80モル%である。Xが-S-である構造単位(1)の含有量は、本発明の重合体(A')を構成する全構造単位100モル%中、通常20モル%以上、好ましくは20~90モル%、より好ましくは30~80モル%である。構造単位(1)の含有量が前記範囲にあると、水溶性と、組成物中に含有されたときの粘度とのバランスに優れた樹脂が得られる傾向にある。
 なお、構造単位とは、モノマー(例えば共役ジエン化合物)由来の構造のことを示す。各構造単位の含有量は、NMR分析により測定することができる。
The content of the structural unit (1) in which X is —S (═O) — is usually 20 mol% or more, preferably 20 to 20 mol per 100 mol% of all the structural units constituting the polymer (A) of the present invention. 90 mol%, more preferably 30 to 80 mol%. The content of the structural unit (1) in which X is —S— is usually 20 mol% or more, preferably 20 to 90 mol% in 100 mol% of all the structural units constituting the polymer (A ′) of the present invention. More preferably, it is 30 to 80 mol%. When the content of the structural unit (1) is in the above range, a resin excellent in balance between water solubility and viscosity when contained in the composition tends to be obtained.
The structural unit indicates a structure derived from a monomer (for example, a conjugated diene compound). The content of each structural unit can be measured by NMR analysis.
 本発明の重合体は、式(2)で表される構造単位をさらに有していてもよく、また、式(3)で表される構造単位および式(4)で表される構造単位から選ばれる少なくとも1種をさらに有していてもよい。 The polymer of the present invention may further have a structural unit represented by the formula (2), and from the structural unit represented by the formula (3) and the structural unit represented by the formula (4). You may have further at least 1 sort chosen.
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000013
 式(2)~(4)中、XおよびR1~R4はそれぞれ式(1ab)中の同一記号と同義である。式(2)において、二重結合のシス-トランス異性体については特に限定されない。なお、炭素原子C1に結合した2つのR1は水素原子であることが好ましく、全てのR1が水素原子であることがさらに好ましい。
Figure JPOXMLDOC01-appb-C000013
In the formulas (2) to (4), X and R 1 to R 4 have the same meanings as the same symbols in the formula (1ab). In the formula (2), the cis-trans isomer of the double bond is not particularly limited. Incidentally, it is preferable that two R 1 attached to the carbon atom C 1 is a hydrogen atom, it is more preferred that all of R 1 is a hydrogen atom.
 Xが-S(=O)-である構造単位(1)および構造単位(2)の合計含有量は、本発明の重合体(A)を構成する全構造単位100モル%中、通常20モル%以上、好ましくは20~95モル%、より好ましくは30~90モル%である。Xが-S-である構造単位(1)および構造単位(2)の含有量は、本発明の重合体(A')を構成する全構造単位100モル%中、通常20モル%以上、好ましくは20~95モル%、より好ましくは30~90モル%である。 The total content of the structural unit (1) and the structural unit (2) in which X is —S (═O) — is usually 20 mol in 100 mol% of all structural units constituting the polymer (A) of the present invention. % Or more, preferably 20 to 95 mol%, more preferably 30 to 90 mol%. The content of the structural unit (1) and the structural unit (2) in which X is —S— is usually 20 mol% or more, preferably 100 mol% or more in all the structural units constituting the polymer (A ′) of the present invention. Is 20 to 95 mol%, more preferably 30 to 90 mol%.
 構造単位(3)の含有量は、本発明の重合体(A)または(A')を構成する全構造単位100モル%中、通常80モル%以下、好ましくは5~80モル%、より好ましくは10~70モル%である。Xが-S(=O)-である構造単位(4)の含有量は、本発明の重合体(A)を構成する全構造単位100モル%中、通常10モル%以下である。Xが-S-である構造単位(4)の含有量は、本発明の重合体(A')を構成する全構造単位100モル%中、通常10モル%以下である。 The content of the structural unit (3) is usually 80 mol% or less, preferably 5 to 80 mol%, more preferably 100 mol% of all the structural units constituting the polymer (A) or (A ′) of the present invention. Is from 10 to 70 mol%. The content of the structural unit (4) in which X is —S (═O) — is usually 10 mol% or less in 100 mol% of all the structural units constituting the polymer (A) of the present invention. The content of the structural unit (4) in which X is —S— is usually 10 mol% or less in 100 mol% of all the structural units constituting the polymer (A ′) of the present invention.
 本発明の重合体のゲルパーミエーションクロマトグラフィー法により測定される重量平均分子量(Mw)は、ポリスチレン換算で、通常1,000~100,000、好ましくは2,000~50,000、より好ましくは3,000~30,000である。また、本発明の重合体の重量平均分子量(Mw)/数平均分子量(Mn)で表される分子量分布は、通常1~5、好ましくは1.1~3、より好ましくは1.2~2である。 The weight average molecular weight (Mw) measured by the gel permeation chromatography method of the polymer of the present invention is usually 1,000 to 100,000, preferably 2,000 to 50,000, more preferably in terms of polystyrene. 3,000 to 30,000. Further, the molecular weight distribution of the polymer of the present invention represented by weight average molecular weight (Mw) / number average molecular weight (Mn) is usually 1 to 5, preferably 1.1 to 3, more preferably 1.2 to 2. It is.
 Mwが上記範囲にあると、より解像度が高く、膜厚の大きい樹脂膜を形成することができる。Mw/Mnが上記範囲にあると、解像性の点で好ましい。MwおよびMnの測定方法の詳細は、実施例に記載したとおりである。 When Mw is in the above range, a resin film having a higher resolution and a larger film thickness can be formed. It is preferable in terms of resolution that Mw / Mn is in the above range. The details of the measuring method of Mw and Mn are as described in the examples.
 〔重合体の製造方法〕
 本発明の重合体(A)は、例えば、共役ジエン重合体に含まれる炭素-炭素二重結合をエポキシ化して、エポキシ化重合体を得る工程A1と、前記エポキシ化重合体に含まれるエポキシ環に対して、R3-R2-SHで表される化合物(R2およびR3は、それぞれ前記式(1ab)中のR2およびR3と同義である)を開環付加させ、スルフィド基含有重合体を得る工程A2と、酸化剤を用いて、前記スルフィド基含有重合体に含まれるスルフィド基をスルフィニル基に変換する工程A3とを有する製造方法により、合成することができる。
[Production method of polymer]
The polymer (A) of the present invention includes, for example, a step A1 of obtaining an epoxidized polymer by epoxidizing a carbon-carbon double bond contained in a conjugated diene polymer, and an epoxy ring contained in the epoxidized polymer. On the other hand, ring-opening addition of a compound represented by R 3 —R 2 —SH (R 2 and R 3 have the same meanings as R 2 and R 3 in the formula (1ab), respectively) It can be synthesized by a production method having Step A2 for obtaining a containing polymer and Step A3 for converting a sulfide group contained in the sulfide group-containing polymer into a sulfinyl group using an oxidizing agent.
 〈工程A1:エポキシ化〉
 工程A1は、共役ジエン重合体に含まれる炭素-炭素二重結合をエポキシ化して、エポキシ化重合体を得る工程である。この工程では、式(a1)で表される構造単位を有する共役ジエン重合体に含まれる炭素-炭素二重結合がエポキシ化され、式(a2)で表される構造単位を有するエポキシ化重合体が得られる。
<Step A1: Epoxidation>
Step A1 is a step of obtaining an epoxidized polymer by epoxidizing the carbon-carbon double bond contained in the conjugated diene polymer. In this step, the carbon-carbon double bond contained in the conjugated diene polymer having the structural unit represented by the formula (a1) is epoxidized, and the epoxidized polymer having the structural unit represented by the formula (a2) Is obtained.
Figure JPOXMLDOC01-appb-C000014
 上記反応式中、R1は式(1ab)中の同一記号と同義である。なお、上記式(a1)において、二重結合のシス-トランス異性体については特に限定されない。
Figure JPOXMLDOC01-appb-C000014
In the above reaction formula, R 1 has the same meaning as the same symbol in formula (1ab). In the formula (a1), the cis-trans isomer of the double bond is not particularly limited.
 共役ジエン重合体を構成する共役ジエン化合物としては、例えば、1,3-ブタジエン、2-メチル-1,3-ブタジエン(イソプレン)、2,3-ジメチル-1,3-ブタジエン、1,3-ペンタジエン、2-メチル-1,3-ペンタジエン、1,3-ヘキサジエン、1,3-オクタジエン、3-ブチル-1,3-オクタジエン、4,5-ジエチル-1,3-オクタジエンが挙げられる。これらの中で、1,3-ブタジエン、イソプレンが好ましい。共役ジエン化合物は1種単独で用いてもよく、2種以上を併用してもよい。共役ジエン重合体としては、ポリブタジエン、ポリイソプレンが好ましい。 Examples of the conjugated diene compound constituting the conjugated diene polymer include 1,3-butadiene, 2-methyl-1,3-butadiene (isoprene), 2,3-dimethyl-1,3-butadiene, and 1,3- Examples include pentadiene, 2-methyl-1,3-pentadiene, 1,3-hexadiene, 1,3-octadiene, 3-butyl-1,3-octadiene, and 4,5-diethyl-1,3-octadiene. Of these, 1,3-butadiene and isoprene are preferred. A conjugated diene compound may be used individually by 1 type, and may use 2 or more types together. As the conjugated diene polymer, polybutadiene and polyisoprene are preferable.
 共役ジエン重合体中のビニル結合含量は、通常80モル%以下、好ましくは5~80モル%、より好ましくは10~70モル%である。なお、本明細書において、ビニル結合含量とは、共役ジエン重合体中に1,2-結合、3,4-結合及び1,4-結合の結合様式で組み込まれている共役ジエン化合物のうち、1,2-結合及び3,4-結合で組み込まれている化合物の合計割合(モル%基準)である。ビニル結合含量は、赤外分光分析によるハンプトン法により測定することができる。 The vinyl bond content in the conjugated diene polymer is usually 80 mol% or less, preferably 5 to 80 mol%, more preferably 10 to 70 mol%. In the present specification, the vinyl bond content is a conjugated diene compound that is incorporated in a conjugated diene polymer in a 1,2-bond, 3,4-bond, or 1,4-bond bond mode. This is the total ratio (based on mol%) of compounds incorporated by 1,2-bonds and 3,4-bonds. The vinyl bond content can be measured by the Hampton method by infrared spectroscopic analysis.
 工程A1は、例えば、有機溶媒中でエポキシ化剤により、共役ジエン重合体に含まれる、共役ジエン化合物由来の炭素-炭素二重結合をエポキシ化することで行うことができる。このエポキシ化の際には、エポキシ化触媒を用いることもできる。 Step A1 can be performed, for example, by epoxidizing the carbon-carbon double bond derived from the conjugated diene compound contained in the conjugated diene polymer with an epoxidizing agent in an organic solvent. In this epoxidation, an epoxidation catalyst can also be used.
 エポキシ化剤としては、例えば、過酸化水素;過酢酸、過安息香酸、過ギ酸、トリフルオロ過酢酸等の有機過酸が挙げられる。これらの中でも、過酸化水素が好ましい。エポキシ化触媒としては、例えば、ギ酸、酪酸、吉草酸、カプロン酸、エナント酸、カプリル酸、ペラルゴン酸、カプリン酸、ラウリン酸、ミスチリン酸、パルチミン酸、パルミトイル酸、マルガリン酸、ステアリン酸、オレイン酸、バクセン酸、リノール酸、(9,12,15)-リノレン酸、(6,9,12)-リノレン酸、エレオステアリン酸、ツベルクロステアリン酸、アラキジン酸、8,11-イコサジエン酸、5,8,11-イコサトリエン酸、アラキドン酸、ベヘン酸、リグノセリン酸、ネルボン酸、セロチン酸、モンタン酸、メリシン酸等のカルボン酸、およびこれらの酸無水物が挙げられる。 Examples of the epoxidizing agent include hydrogen peroxide; organic peracids such as peracetic acid, perbenzoic acid, performic acid, and trifluoroperacetic acid. Among these, hydrogen peroxide is preferable. Examples of the epoxidation catalyst include formic acid, butyric acid, valeric acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, lauric acid, myristylic acid, palmitic acid, palmitoyl acid, margaric acid, stearic acid, oleic acid Vaccenoic acid, linoleic acid, (9,12,15) -linolenic acid, (6,9,12) -linolenic acid, eleostearic acid, tuberculostearic acid, arachidic acid, 8,11-icosadienoic acid, 5 , 8,11-icosatrienoic acid, arachidonic acid, behenic acid, lignoceric acid, nervonic acid, serotic acid, montanic acid, melicic acid and other carboxylic acids, and acid anhydrides thereof.
 エポキシ化の際に使用し得る有機溶媒としては、ペンタン、ヘキサン、ヘプタン、オクタン等の脂肪族炭化水素、シクロペンタン、シクロヘキサン、シクロヘプタン等の脂環式炭化水素、ベンゼン、ナフタレン、トルエン、キシレン等の芳香族炭化水素、酢酸メチル、酢酸エチル、酢酸プロピル等の脂肪族カルボン酸エステル、クロロホルム等のハロゲン化炭化水素が挙げられる。有機溶媒は1種単独で用いてもよく、2種以上を併用してもよい。 Examples of organic solvents that can be used for epoxidation include aliphatic hydrocarbons such as pentane, hexane, heptane, and octane, alicyclic hydrocarbons such as cyclopentane, cyclohexane, and cycloheptane, benzene, naphthalene, toluene, and xylene. Aromatic hydrocarbons, aliphatic carboxylic acid esters such as methyl acetate, ethyl acetate, and propyl acetate, and halogenated hydrocarbons such as chloroform. An organic solvent may be used individually by 1 type, and may use 2 or more types together.
 工程A1における反応温度は、溶媒の沸点以下で適宜選択すればよいが、通常0~200℃、好ましくは40~150℃である。工程A1における反応時間は、通常0.5~30時間、好ましくは1~10時間である。 The reaction temperature in step A1 may be appropriately selected below the boiling point of the solvent, but is usually 0 to 200 ° C., preferably 40 to 150 ° C. The reaction time in step A1 is usually 0.5 to 30 hours, preferably 1 to 10 hours.
 エポキシ化剤およびエポキシ化触媒の使用量は、特に限定されない。エポキシ化剤の反応性、エポキシ化触媒の性能、目的とするエポキシ化率、共役ジエン重合体に含まれる炭素-炭素二重結合数等の条件により、適当な量を使用することができる。 The amount of epoxidizing agent and epoxidation catalyst used is not particularly limited. An appropriate amount can be used depending on conditions such as the reactivity of the epoxidizing agent, the performance of the epoxidation catalyst, the desired epoxidation rate, the number of carbon-carbon double bonds contained in the conjugated diene polymer.
 エポキシ化重合体のエポキシ化率は、通常10~100%、好ましくは30~90%、より好ましくは40~80%である。エポキシ化率は、[共役ジエン重合体に含まれる全炭素-炭素二重結合のうちエポキシ化した二重結合数/エポキシ化前の共役ジエン重合体に含まれる全炭素-炭素二重結合数]×100(%)である。エポキシ化率は、1H NMRにより算出することができる。 The epoxidation rate of the epoxidized polymer is usually 10 to 100%, preferably 30 to 90%, more preferably 40 to 80%. Epoxidation rate is [number of double bonds epoxidized among all carbon-carbon double bonds contained in conjugated diene polymer / number of all carbon-carbon double bonds contained in conjugated diene polymer before epoxidation] × 100 (%). The epoxidation rate can be calculated by 1 H NMR.
 〈工程A2:スルフィド化〉
 工程A2は、エポキシ化重合体に含まれるエポキシ環に対して、R3-R2-SHで表される化合物(スルフィド化剤)を開環付加させ、スルフィド基含有重合体を得る工程である。必要に応じて、エポキシ環が開環した後の水酸基を、アルコキシ化する。この工程では、式(a2)で表される構造単位が式(a3)で表される構造単位に変換され、本発明の重合体(A)の前駆体が得られる。
<Step A2: Sulfidation>
Step A2 is a step of obtaining a sulfide group-containing polymer by ring-opening addition of a compound (sulfiding agent) represented by R 3 —R 2 —SH to the epoxy ring contained in the epoxidized polymer. . If necessary, the hydroxyl group after the epoxy ring is opened is alkoxylated. In this step, the structural unit represented by the formula (a2) is converted into the structural unit represented by the formula (a3) to obtain the precursor of the polymer (A) of the present invention.
Figure JPOXMLDOC01-appb-C000015
 上記反応式中、R1~R4はそれぞれ式(1ab)中の同一記号と同義である。
Figure JPOXMLDOC01-appb-C000015
In the above reaction formula, R 1 to R 4 are respectively synonymous with the same symbols in formula (1ab).
 スルフィド化剤において、R2およびR3はそれぞれ式(1ab)中の同一記号と同義である。具体的には、チオグリセロール、メルカプトエタノールが挙げられる。スルフィド化剤は1種単独で用いてもよく、2種以上を併用してもよい。スルフィド化剤の使用量は、構造単位(a2)1モルに対して、通常0.5~20モル、好ましくは1~10モルである。 In sulfidizing agent, R 2 and R 3 are as defined the same symbols in each formula (1ab). Specific examples include thioglycerol and mercaptoethanol. The sulfiding agent may be used alone or in combination of two or more. The amount of the sulfidizing agent to be used is generally 0.5 to 20 mol, preferably 1 to 10 mol, per 1 mol of structural unit (a2).
 工程A2は、触媒存在下で行うことが好ましい。触媒としては、水酸化リチウム、トリエチルアミン、N,N-ジメチル-4-アミノピリジン等の塩基性触媒が挙げられる。触媒は1種単独で用いてもよく、2種以上を併用してもよい。触媒の使用量は、構造単位(a2)1モルに対して、通常0.01~30モル、好ましくは0.1~10モルである。 Step A2 is preferably performed in the presence of a catalyst. Examples of the catalyst include basic catalysts such as lithium hydroxide, triethylamine and N, N-dimethyl-4-aminopyridine. A catalyst may be used individually by 1 type and may use 2 or more types together. The amount of the catalyst to be used is generally 0.01-30 mol, preferably 0.1-10 mol, per 1 mol of structural unit (a2).
 工程A2は、有機溶媒存在下で行うことが好ましい。有機溶媒としては、例えば、メタノール、エタノール等のアルコール溶媒、ジメチルホルムアミド、ジメチルアセトアミド等のアミド溶媒、ジメチルスルホキシド等のスルホキシド溶媒、酢酸エチル、酢酸ブチル、γ-ブチロラクトン等のエステル溶媒、トルエン、ベンゼン等の芳香族炭化水素溶媒、テトラヒドロフラン、ジオキサン、ジエチルエーテル等のエーテル溶媒が挙げられる。有機溶媒は1種単独で用いてもよく、2種以上を併用してもよい。 Step A2 is preferably performed in the presence of an organic solvent. Examples of the organic solvent include alcohol solvents such as methanol and ethanol, amide solvents such as dimethylformamide and dimethylacetamide, sulfoxide solvents such as dimethyl sulfoxide, ester solvents such as ethyl acetate, butyl acetate and γ-butyrolactone, toluene, benzene and the like. And an aromatic solvent such as tetrahydrofuran, dioxane, diethyl ether and the like. An organic solvent may be used individually by 1 type, and may use 2 or more types together.
 工程A2における反応温度は、溶媒の沸点以下で適宜選択すればよいが、通常30~150℃、好ましくは40~100℃である。工程A2における反応時間は、通常1~20時間、好ましくは2~10時間である。 The reaction temperature in step A2 may be appropriately selected below the boiling point of the solvent, but is usually 30 to 150 ° C., preferably 40 to 100 ° C. The reaction time in step A2 is usually 1 to 20 hours, preferably 2 to 10 hours.
 エポキシ環が開環して形成される水酸基のアルコキシ化は、公知の方法により行うことができる。例えば、特開昭56-104831号公報、または特開2005-305280号公報に記載の方法に準じて行うことができる。水酸基のアルコキシ化は、スルフィニル化の後に行ってもよい。 The alkoxylation of the hydroxyl group formed by opening the epoxy ring can be performed by a known method. For example, it can be carried out according to the method described in JP-A-56-104831 or JP-A-2005-305280. The alkoxylation of the hydroxyl group may be performed after sulfinylation.
 〈工程A3:スルフィニル化〉
 工程A3は、酸化剤を用いて、スルフィド基含有重合体に含まれるスルフィド基をスルフィニル基に変換する工程である。この工程では、式(a3)で表される構造単位が式(a4)で表される構造単位に変換され、本発明の重合体(A)が得られる。
<Step A3: Sulfinylation>
Step A3 is a step of converting a sulfide group contained in the sulfide group-containing polymer into a sulfinyl group using an oxidizing agent. In this step, the structural unit represented by the formula (a3) is converted into the structural unit represented by the formula (a4), and the polymer (A) of the present invention is obtained.
Figure JPOXMLDOC01-appb-C000016
 上記反応式中、R1~R4はそれぞれ式(1ab)中の同一記号と同義である。
Figure JPOXMLDOC01-appb-C000016
In the above reaction formula, R 1 to R 4 are respectively synonymous with the same symbols in formula (1ab).
 酸化剤としては、例えば、過酢酸、過安息香酸、メタクロロ過安息香酸等の有機酸化剤、過酸化水素、クロム酸、過マンガン酸塩等の無機酸化剤が挙げられる。酸化剤は1種単独で用いてもよく、2種以上を併用してもよい。酸化剤の使用量は、構造単位(a3)1モルに対して、通常1~10モル、好ましくは2~5モルである。酸化剤は1種単独で用いてもよく、2種以上を併用してもよい。 Examples of the oxidizing agent include organic oxidizing agents such as peracetic acid, perbenzoic acid, and metachloroperbenzoic acid, and inorganic oxidizing agents such as hydrogen peroxide, chromic acid, and permanganate. An oxidizing agent may be used individually by 1 type, and may use 2 or more types together. The amount of the oxidizing agent to be used is generally 1 to 10 mol, preferably 2 to 5 mol, per 1 mol of structural unit (a3). An oxidizing agent may be used individually by 1 type, and may use 2 or more types together.
 工程A3は、溶媒存在下で行うことが好ましい。溶媒としては、例えば、水;メタノール、エタノール等のアルコール溶媒;ジメチルホルムアミド、ジメチルアセトアミド等のアミド溶媒が挙げられる。これらの中でも、水、アルコール溶媒が好ましい。溶媒は1種単独で用いてもよく、2種以上を併用してもよい。 Process A3 is preferably performed in the presence of a solvent. Examples of the solvent include water; alcohol solvents such as methanol and ethanol; amide solvents such as dimethylformamide and dimethylacetamide. Among these, water and alcohol solvents are preferable. A solvent may be used individually by 1 type and may use 2 or more types together.
 工程A3における反応温度は、溶媒の沸点以下で適宜選択すればよいが、通常23~100℃、好ましくは30~70℃である。工程A3における反応時間は、通常0.5~30時間、好ましくは1~10時間である。 The reaction temperature in step A3 may be appropriately selected below the boiling point of the solvent, but is usually 23 to 100 ° C., preferably 30 to 70 ° C. The reaction time in step A3 is usually 0.5 to 30 hours, preferably 1 to 10 hours.
 上記各工程において、各反応生成物の単離は、必要に応じて、ろ過、洗浄、乾燥、再結晶、再沈殿、透析、遠心分離、各種溶媒による抽出、中和、クロマトグラフィー等の通常の手段を適宜組み合わせて行えばよい。 In each of the above steps, isolation of each reaction product is carried out as usual by filtration, washing, drying, recrystallization, reprecipitation, dialysis, centrifugation, extraction with various solvents, neutralization, chromatography, etc. The means may be combined appropriately.
 〔感光性樹脂組成物〕
 本発明の感光性樹脂組成物は、上述した重合体(A)と、光応答性化合物(B)と、架橋剤(C)とを含有する。本発明の感光性樹脂組成物を「本発明の組成物」ともいう。本発明の組成物は、重合体(A)を含有することから、膜厚の大きい、親水性を有する樹脂膜を形成することができる。
[Photosensitive resin composition]
The photosensitive resin composition of this invention contains the polymer (A) mentioned above, a photoresponsive compound (B), and a crosslinking agent (C). The photosensitive resin composition of the present invention is also referred to as “the composition of the present invention”. Since the composition of this invention contains a polymer (A), it can form the resin film which has a large film thickness and hydrophilic property.
 本発明の組成物の粘度は、通常0.1~100cP、好ましくは0.5~50cP、より好ましくは1~10cPである。粘度は、JIS Z8803に準拠した方法により測定される値である。 The viscosity of the composition of the present invention is usually 0.1 to 100 cP, preferably 0.5 to 50 cP, more preferably 1 to 10 cP. The viscosity is a value measured by a method based on JIS Z8803.
 〈重合体(A)〉
 重合体(A)の含有量は、本発明の組成物100質量%中、通常10~60質量%、好ましくは15~55質量%、さらに好ましくは20~50質量%である。重合体(A)の含有量が前記範囲にあると、膜厚が大きく、解像度が高い樹脂膜を形成可能な組成物が得られる。また、重合体(A)の含有量が前記範囲にあっても、塗布可能な粘度を有する組成物を得ることができる。
<Polymer (A)>
The content of the polymer (A) is usually 10 to 60% by mass, preferably 15 to 55% by mass, and more preferably 20 to 50% by mass in 100% by mass of the composition of the present invention. When the content of the polymer (A) is within the above range, a composition capable of forming a resin film having a large film thickness and high resolution can be obtained. Moreover, even if content of a polymer (A) exists in the said range, the composition which has the viscosity which can be apply | coated can be obtained.
 〈光応答性化合物(B)〉
 本発明の感光性樹脂組成物は、光応答性化合物(B)を含有する。光応答性化合物(B)としては、例えば、光酸発生剤、光ラジカル重合開始剤が挙げられる。
<Photoresponsive compound (B)>
The photosensitive resin composition of the present invention contains a photoresponsive compound (B). Examples of the photoresponsive compound (B) include a photoacid generator and a photoradical polymerization initiator.
 光応答性化合物(B)としては、光酸発生剤が好ましい。光酸発生剤は、光照射を含む処理により酸を発生する化合物である。本発明の組成物から形成される樹脂膜に対する露光処理を含む処理によって、酸発生剤に基づき露光部に酸が発生し、この酸の作用に基づき露光部の水系現像液への溶解性が変化する。 As the photoresponsive compound (B), a photoacid generator is preferable. The photoacid generator is a compound that generates an acid by a treatment including light irradiation. By the process including the exposure process for the resin film formed from the composition of the present invention, an acid is generated in the exposed part based on the acid generator, and the solubility of the exposed part in the aqueous developer is changed based on the action of this acid. To do.
 本発明の組成物は、ネガ型またはポジ型のいずれであってもよい。光応答性化合物(B)の種類は、ネガ型の組成物またはポジ型の組成物に応じて、適宜選択することができる。これらの中でも、樹脂膜の機械的強度の観点から、ネガ型の組成物が好ましい。 The composition of the present invention may be either a negative type or a positive type. The kind of photoresponsive compound (B) can be suitably selected according to a negative composition or a positive composition. Among these, from the viewpoint of the mechanical strength of the resin film, a negative composition is preferable.
 光酸発生剤としては、例えば、オニウム塩化合物、ハロゲン含有化合物、スルホン化合物、スルホン酸化合物、スルホンイミド化合物、ジアゾメタン化合物、キノンジアジド基を有する化合物が挙げられる。以下、キノンジアジド基を有する化合物を「キノンジアジド化合物(B2)」ともいい、これ以外の前記例示の光酸発生剤を「酸発生剤(B1)」ともいう。 Examples of the photoacid generator include onium salt compounds, halogen-containing compounds, sulfone compounds, sulfonic acid compounds, sulfonimide compounds, diazomethane compounds, and compounds having a quinonediazide group. Hereinafter, the compound having a quinonediazide group is also referred to as “quinonediazide compound (B2)”, and the other exemplified photoacid generators are also referred to as “acid generator (B1)”.
 酸発生剤(B1)は、光照射により、酸を発生する化合物である。酸発生剤(B1)を含有する組成物から得られる樹脂膜に対して光照射することで、発生する前記酸が架橋剤(C)等に作用して架橋構造が形成され、水系現像液に対して難溶な膜となる。光照射により前記膜が水系現像液に対して易溶の状態から難溶の状態に変化することを利用することにより、ネガ型のパターンが形成される。 The acid generator (B1) is a compound that generates an acid when irradiated with light. By irradiating the resin film obtained from the composition containing the acid generator (B1) with light, the generated acid acts on the crosslinking agent (C) and the like to form a crosslinked structure. On the other hand, it becomes a hardly soluble film. A negative pattern is formed by utilizing the fact that the film changes from an easily soluble state to an insoluble state in an aqueous developer by light irradiation.
 キノンジアジド化合物(B2)は、光照射および水との接触処理により、キノンジアジド基が分解してカルボキシル基を生じる化合物である。キノンジアジド化合物(B2)を含有する組成物から得られる樹脂膜は、水系現像液に対して難溶な膜である。光照射により前記膜が水系現像液に対して難溶の状態から易溶の状態になることを利用することにより、ポジ型のパターンが形成される。 The quinonediazide compound (B2) is a compound in which a quinonediazide group is decomposed to generate a carboxyl group by light irradiation and contact treatment with water. The resin film obtained from the composition containing the quinonediazide compound (B2) is a film that is hardly soluble in an aqueous developer. A positive pattern is formed by utilizing the fact that the film changes from a hardly soluble state to an easily soluble state in an aqueous developer by light irradiation.
 《酸発生剤(B1)》
 酸発生剤(B1)は、例えば、オニウム塩化合物、ハロゲン含有化合物、スルホン化合物、スルホン酸化合物、スルホンイミド化合物およびジアゾメタン化合物から選ばれる少なくとも1種である。
<< Acid generator (B1) >>
The acid generator (B1) is at least one selected from, for example, an onium salt compound, a halogen-containing compound, a sulfone compound, a sulfonic acid compound, a sulfonimide compound, and a diazomethane compound.
 オニウム塩化合物としては、例えば、ヨードニウム塩、スルホニウム塩、ホスホニウム塩、ジアゾニウム塩、ピリジニウム塩が挙げられる。好ましいオニウム塩の具体例としては、ジフェニルヨードニウムトリフルオロメタンスルホネート、ジフェニルヨードニウムp-トルエンスルホネート、ジフェニルヨードニウムヘキサフルオロアンチモネート、ジフェニルヨードニウムヘキサフルオロホスフェート、ジフェニルヨードニウムテトラフルオロボレート等のヨードニウム塩;トリフェニルスルホニウムトリフリオロメタンスルホネート、トリフェニルスルホニウムp-トルエンスルホネート、トリフェニルスルホニウムヘキサフルオロアンチモネート、4-t-ブチルフェニル・ジフェニルスルホニウムトリフルオロメタンスルホネート、4-t-ブチルフェニル・ジフェニルスルホニウムp-トルエンスルホネート、4,7-ジ-n-ブトキシナフチルテトラヒドロチオフェニウムトリフルオロメタンスルホネート、4-(フェニルチオ)フェニルジフェニルスルホニウムトリス(ペンタフルオロエチル)トリフルオロホスフェート、4-(フェニルチオ)フェニルジフェニルスルホニウムヘキサフルオロホスファート、4-(フェニルチオ)フェニルジフェニルスルホニウムヘキサフルオロアンチモネート等のスルホニウム塩が挙げられる。 Examples of the onium salt compounds include iodonium salts, sulfonium salts, phosphonium salts, diazonium salts, and pyridinium salts. Specific examples of preferred onium salts include iodonium salts such as diphenyliodonium trifluoromethanesulfonate, diphenyliodonium p-toluenesulfonate, diphenyliodonium hexafluoroantimonate, diphenyliodonium hexafluorophosphate, and diphenyliodonium tetrafluoroborate; L-methanesulfonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium hexafluoroantimonate, 4-t-butylphenyl diphenylsulfonium trifluoromethanesulfonate, 4-t-butylphenyl diphenylsulfonium p-toluenesulfonate, 4,7- Di-n-butoxynaphthyltetrahydrothiofe Um trifluoromethanesulfonate, 4- (phenylthio) phenyldiphenylsulfonium tris (pentafluoroethyl) trifluorophosphate, 4- (phenylthio) phenyldiphenylsulfonium hexafluorophosphate, 4- (phenylthio) phenyldiphenylsulfonium hexafluoroantimonate, etc. A sulfonium salt is mentioned.
 ハロゲン含有化合物としては、例えば、ハロアルキル基含有複素環式化合物、ハロアルキル基含有炭化水素化合物が挙げられる。好ましいハロゲン含有化合物の具体例としては、フェニル-ビス(トリクロロメチル)-s-トリアジン、4-メトキシフェニル-ビス(トリクロロメチル)-s-トリアジン、スチリル-ビス(トリクロロメチル)-s-トリアジン、ナフチル-ビス(トリクロロメチル)-s-トリアジン、2-[2-(5-メチルフラン-2-イル)エテニル]-4,6-ビス(トリクロロメチル)-s-トリアジン等のs-トリアジン誘導体;1,10-ジブロモ-n-デカン、1,1-ビス(4-クロロフェニル)-2,2,2-トリクロロエタンが挙げられる。 Examples of the halogen-containing compound include a haloalkyl group-containing heterocyclic compound and a haloalkyl group-containing hydrocarbon compound. Specific examples of preferred halogen-containing compounds include phenyl-bis (trichloromethyl) -s-triazine, 4-methoxyphenyl-bis (trichloromethyl) -s-triazine, styryl-bis (trichloromethyl) -s-triazine, naphthyl S-triazine derivatives such as bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine; 1 , 10-dibromo-n-decane, 1,1-bis (4-chlorophenyl) -2,2,2-trichloroethane.
 スルホン化合物としては、例えば、β-ケトスルホン化合物、β-スルホニルスルホン化合物およびこれらの化合物のα-ジアゾ化合物が挙げられる。好ましいスルホン化合物の具体例としては、4-トリスフェナシルスルホン、メシチルフェナシルスルホン、ビス(フェナシルスルホニル)メタンが挙げられる。 Examples of sulfone compounds include β-ketosulfone compounds, β-sulfonylsulfone compounds, and α-diazo compounds of these compounds. Specific examples of preferred sulfone compounds include 4-trisphenacylsulfone, mesitylphenacylsulfone, and bis (phenacylsulfonyl) methane.
 スルホン酸化合物としては、例えば、アルキルスルホン酸エステル類、ハロアルキルスルホン酸エステル類、アリールスルホン酸エステル類、イミノスルホネート類が挙げられる。好ましいスルホン酸化合物の具体例としては、ベンゾイントシレート、ピロガロールトリストリフルオロメタンスルホネート、o-ニトロベンジルトリフルオロメタンスルホネート、o-ニトロベンジルp-トルエンスルホネートが挙げられる。 Examples of the sulfonic acid compounds include alkyl sulfonic acid esters, haloalkyl sulfonic acid esters, aryl sulfonic acid esters, and imino sulfonates. Specific examples of preferred sulfonic acid compounds include benzoin tosylate, pyrogallol tris trifluoromethane sulfonate, o-nitrobenzyl trifluoromethane sulfonate, and o-nitrobenzyl p-toluene sulfonate.
 スルホンイミド化合物としては、例えば、N-(トリフルオロメチルスルホニルオキシ)スクシンイミド、N-(トリフルオロメチルスルホニルオキシ)フタルイミド、N-(トリフルオロメチルスルホニルオキシ)ジフェニルマレイミド、N-(トリフルオロメチルスルホニルオキシ)ビシクロ[2.2.1]ヘプト-5-エン-2,3-ジカルボキシイミド、N-(トリフルオロメチルスルホニルオキシ)ナフチルイミドが挙げられる。 Examples of the sulfonimide compound include N- (trifluoromethylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) phthalimide, N- (trifluoromethylsulfonyloxy) diphenylmaleimide, N- (trifluoromethylsulfonyloxy). ) Bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (trifluoromethylsulfonyloxy) naphthylimide.
 ジアゾメタン化合物としては、例えば、ビス(トリフルオロメチルスルホニル)ジアゾメタン、ビス(シクロヘキシルスルホニル)ジアゾメタン、ビス(フェニルスルホニル)ジアゾメタンが挙げられる。 Examples of the diazomethane compound include bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, and bis (phenylsulfonyl) diazomethane.
 酸発生剤(B1)は1種で用いてもよく、2種以上を併用してもよい。
 本発明の組成物において、光応答性化合物(B)として酸発生剤(B1)を用いる場合、酸発生剤(B1)の含有量は、重合体(A)100質量部に対して、好ましくは0.1~10質量部、より好ましくは0.3~5質量部、さらに好ましくは0.5~5質量部である。
The acid generator (B1) may be used alone or in combination of two or more.
In the composition of the present invention, when the acid generator (B1) is used as the photoresponsive compound (B), the content of the acid generator (B1) is preferably 100 parts by mass of the polymer (A). The amount is 0.1 to 10 parts by mass, more preferably 0.3 to 5 parts by mass, and still more preferably 0.5 to 5 parts by mass.
 酸発生剤(B1)の含有量が前記下限値以上であると、露光部の硬化が充分となり、耐熱性が向上しやすい。酸発生剤(B1)の含有量が前記上限値以下であると、露光光に対する透明性が低下することなく、解像度が高いパターン化樹脂膜が得られやすい。 When the content of the acid generator (B1) is equal to or higher than the lower limit, the exposed area is sufficiently cured and the heat resistance is easily improved. When the content of the acid generator (B1) is not more than the above upper limit value, a patterned resin film having a high resolution is easily obtained without lowering the transparency to exposure light.
 《キノンジアジド化合物(B2)》
 キノンジアジド化合物(B2)としては、例えば、ナフトキノンジアジド化合物が挙げられ、具体的には、フェノール性水酸基を1つ以上有する化合物と、1,2-ナフトキノンジアジド-4-スルホン酸または1,2-ナフトキノンジアジド-5-スルホン酸とのエステル化合物が挙げられる。
<< Quinonediazide compound (B2) >>
Examples of the quinonediazide compound (B2) include a naphthoquinonediazide compound, specifically, a compound having one or more phenolic hydroxyl groups and 1,2-naphthoquinonediazide-4-sulfonic acid or 1,2-naphtho Examples include ester compounds with quinonediazide-5-sulfonic acid.
 キノンジアジド化合物(B2)としては、例えば、4,4'-ジヒドロキシジフェニルメタン、4,4'-ジヒドロキシジフェニルエーテル、2,3,4-トリヒドロキシベンゾフェノン、2,3,4,4'-テトラヒドロキシベンゾフェノン、2,3,4,2',4'-ペンタヒドロキシベンゾフェノン、トリス(4-ヒドロキシフェニル)メタン、トリス(4-ヒドロキシフェニル)エタン、1,1-ビス(4-ヒドロキシフェニル)-1-フェニルエタン、1,3-ビス[1-(4-ヒドロキシフェニル)-1-メチルエチル]ベンゼン、1,4-ビス[1-(4-ヒドロキシフェニル)-1-メチルエチル]ベンゼン、4,6-ビス[1-(4-ヒドロキシフェニル)-1-メチルエチル]-1,3-ジヒドロキシベンゼンおよび1,1-ビス(4-ヒドロキシフェニル)-1-[4-[1-(4-ヒドロキシフェニル)-1-メチルエチル]フェニル]エタンから選ばれる化合物と、1,2-ナフトキノンジアジド-4-スルホン酸または1,2-ナフトキノンジアジド-5-スルホン酸とのエステル化合物が挙げられる。 Examples of the quinonediazide compound (B2) include 4,4′-dihydroxydiphenylmethane, 4,4′-dihydroxydiphenyl ether, 2,3,4-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2 , 3,4,2 ′, 4′-pentahydroxybenzophenone, tris (4-hydroxyphenyl) methane, tris (4-hydroxyphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1-phenylethane, 1,3-bis [1- (4-hydroxyphenyl) -1-methylethyl] benzene, 1,4-bis [1- (4-hydroxyphenyl) -1-methylethyl] benzene, 4,6-bis [ 1- (4-hydroxyphenyl) -1-methylethyl] -1,3-dihydroxybenzene and 1,1 A compound selected from bis (4-hydroxyphenyl) -1- [4- [1- (4-hydroxyphenyl) -1-methylethyl] phenyl] ethane and 1,2-naphthoquinonediazide-4-sulfonic acid or 1 , 2-naphthoquinonediazide-5-sulfonic acid ester compounds.
 キノンジアジド化合物(B2)は1種で用いてもよく、2種以上を併用してもよい。
 本発明の組成物において、光応答性化合物(B)としてキノンジアジド化合物(B2)を用いる場合、キノンジアジド化合物(B2)の含有量は、重合体(A)100質量部に対して、好ましくは5~50質量部、より好ましくは10~30質量部、さらに好ましくは15~30質量部である。
A quinonediazide compound (B2) may be used by 1 type, and may use 2 or more types together.
In the composition of the present invention, when the quinonediazide compound (B2) is used as the photoresponsive compound (B), the content of the quinonediazide compound (B2) is preferably 5 to 100 parts by mass with respect to 100 parts by mass of the polymer (A). 50 parts by mass, more preferably 10 to 30 parts by mass, and still more preferably 15 to 30 parts by mass.
 キノンジアジド化合物(B2)の含有量が前記下限値以上であると、未露光部の残膜率が向上し、マスクパターンに忠実な像が得られやすい。キノンジアジド化合物(B2)の含有量が前記上限値以下であると、パターン形状に優れた樹脂膜が得られやすく、製膜時の発泡も防止できる傾向にある。 When the content of the quinonediazide compound (B2) is equal to or higher than the lower limit, the remaining film ratio in the unexposed area is improved and an image faithful to the mask pattern is easily obtained. When the content of the quinonediazide compound (B2) is less than or equal to the above upper limit value, a resin film excellent in pattern shape is easily obtained and foaming during film formation tends to be prevented.
 〈架橋剤(C)〉
 本発明の組成物は、架橋剤(C)を含有する。架橋剤(C)は、例えば、酸の作用によって架橋反応を進行する化合物;(メタ)アクリレート化合物等の熱やラジカルにより重合する化合物である。架橋剤(C)としては、酸の作用によって架橋反応を進行する化合物が好ましい。架橋剤(C)を用いることで、パターン化樹脂膜の機械的強度、耐熱性、および耐薬品性を向上させることができる。
<Crosslinking agent (C)>
The composition of the present invention contains a crosslinking agent (C). The crosslinking agent (C) is, for example, a compound that undergoes a crosslinking reaction by the action of an acid; a compound that is polymerized by heat or radical, such as a (meth) acrylate compound. As the crosslinking agent (C), a compound that proceeds with a crosslinking reaction by the action of an acid is preferable. By using the crosslinking agent (C), the mechanical strength, heat resistance, and chemical resistance of the patterned resin film can be improved.
 架橋剤(C)としては、例えば、-CH2ORで表される基を少なくとも2つ有する架橋剤(C1)、他の架橋剤(C2)が挙げられる。前記式中、Rは、水素原子、炭素数1~10のアルキル基またはアセチル基である。前記(C1)を「活性メチレン基含有架橋剤(C1)」ともいう。これらの中でも、高膜厚の樹脂膜を形成することが可能な点から、架橋剤(C1)が好ましい。 Examples of the crosslinking agent (C) include a crosslinking agent (C1) having at least two groups represented by —CH 2 OR and other crosslinking agents (C2). In the above formula, R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or an acetyl group. The (C1) is also referred to as “active methylene group-containing crosslinking agent (C1)”. Among these, a crosslinking agent (C1) is preferable from the viewpoint that a high-thickness resin film can be formed.
 本発明の組成物において、架橋剤(C)の含有量は、重合体(A)100質量部に対して、通常1~50質量部、好ましくは3~30質量部、より好ましくは5~20質量部である。架橋剤(C)の含有量が前記範囲にあると、感度および解像性に優れた組成物が得られる傾向にある。 In the composition of the present invention, the content of the crosslinking agent (C) is usually 1 to 50 parts by weight, preferably 3 to 30 parts by weight, more preferably 5 to 20 parts per 100 parts by weight of the polymer (A). Part by mass. When the content of the crosslinking agent (C) is in the above range, a composition excellent in sensitivity and resolution tends to be obtained.
 《活性メチレン基含有架橋剤(C1)》
 活性メチレン基含有架橋剤(C1)は、-CH2ORで表される基を少なくとも2つ有する架橋剤である。式中、Rは、水素原子、炭素数1~10のアルキル基またはアセチル基であり、好ましくは水素原子または炭素数1~6のアルキル基である。
<< Active methylene group-containing crosslinking agent (C1) >>
The active methylene group-containing crosslinking agent (C1) is a crosslinking agent having at least two groups represented by —CH 2 OR. In the formula, R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an acetyl group, preferably a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
 架橋剤(C1)としては、例えば、式(C1-1)で表される基を2つ以上有する化合物、式(C1-2)で表される基を2つ以上有する化合物が挙げられる。 Examples of the crosslinking agent (C1) include a compound having two or more groups represented by the formula (C1-1) and a compound having two or more groups represented by the formula (C1-2).
Figure JPOXMLDOC01-appb-C000017
 式(C1-1)および(C1-2)中、mは1または2であり、nは0または1であり、m+nは2であり、Rは水素原子、炭素数1~10のアルキル基またはアセチル基であり、好ましくは水素原子または炭素数1~6のアルキル基であり、*は結合手である。
Figure JPOXMLDOC01-appb-C000017
In the formulas (C1-1) and (C1-2), m is 1 or 2, n is 0 or 1, m + n is 2, R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or An acetyl group, preferably a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and * is a bond.
 架橋剤(C1)としては、例えば、ポリメチロール化メラミン、ポリメチロール化グリコールウリル、ポリメチロール化グアナミン、ポリメチロール化ウレア等の窒素化合物;前記窒素化合物中の活性メチロール基(N原子に結合したCH2OH基)の全部または一部がアルキルエーテル化またはアセトキシ化された化合物が挙げられる。ここで、アルキルエーテルを構成するアルキル基としては、例えば、メチル基、エチル基、プロピル基、ブチル基が挙げられ、これらは互いに同一であってもよいし、異なっていてもよい。また、アルキルエーテル化またはアセトキシ化されていない活性メチロール基は、1分子内で自己縮合していてもよく、2分子間で縮合して、その結果、オリゴマー成分が形成されていてもよい。 Examples of the crosslinking agent (C1) include nitrogen compounds such as polymethylolated melamine, polymethylolated glycoluril, polymethylolated guanamine, and polymethylolated urea; active methylol groups in the nitrogen compounds (CH bonded to N atom) 2 OH group) or all of a part thereof are alkyl etherified or acetoxylated. Here, examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, a propyl group, and a butyl group, which may be the same as or different from each other. Moreover, the active methylol group which is not alkyletherified or acetoxylated may be self-condensed within one molecule, or may be condensed between two molecules, and as a result, an oligomer component may be formed.
 架橋剤(C1)としては、例えば、特開平6-180501号公報、特開2006-178059号公報、および特開2012-226297号公報に記載の架橋剤が挙げられる。具体的には、ポリメチロール化メラミン、ヘキサメトキシメチルメラミン、ヘキサエトキシメチルメラミン、ヘキサプロポキシメチルメラミン、ヘキサブトキシメチルメラミン等のメラミン系架橋剤;ポリメチロール化グリコールウリル、テトラメトキシメチルグリコールウリル、テトラブトキシメチルグリコールウリル等のグリコールウリル系架橋剤;3,9-ビス[2-(3,5-ジアミノ-2,4,6-トリアザフェニル)エチル]2,4,8,10-テトラオキソスピロ[5.5]ウンデカン、3,9-ビス[2-(3,5-ジアミノ-2,4,6-トリアザフェニル)プロピル]2,4,8,10-テトラオキソスピロ[5.5]ウンデカン等のグアナミンをメチロール化した化合物、および当該化合物中の活性メチロール基の全部または一部をアルキルエーテル化またはアセトキシ化した化合物等のグアナミン系架橋剤が挙げられる。これらの中でも、メラミン系架橋剤およびグアナミン系架橋剤が好ましい。 Examples of the crosslinking agent (C1) include crosslinking agents described in JP-A-6-180501, JP-A-2006-178059, and JP-A-2012-226297. Specifically, melamine-based crosslinking agents such as polymethylolated melamine, hexamethoxymethylmelamine, hexaethoxymethylmelamine, hexapropoxymethylmelamine, hexabutoxymethylmelamine; polymethylolated glycoluril, tetramethoxymethylglycoluril, tetrabutoxy Glycoluril-based crosslinking agents such as methylglycoluril; 3,9-bis [2- (3,5-diamino-2,4,6-triazaphenyl) ethyl] 2,4,8,10-tetraoxospiro [ 5.5] Undecane, 3,9-bis [2- (3,5-diamino-2,4,6-triazaphenyl) propyl] 2,4,8,10-tetraoxospiro [5.5] undecane A compound obtained by methylolating guanamine, etc., and all of the active methylol groups in the compound Or guanamine-based crosslinking agent such as an alkyl etherified or acetoxylation the compounds of the part. Among these, a melamine type crosslinking agent and a guanamine type crosslinking agent are preferable.
 架橋剤(C1)としては、そのほか、メチロール基含有フェノール化合物、アルキルメチロール基含有フェノール化合物、アセトキシメチル基含有フェノール化合物を挙げることもできる。具体的には、2,6-ジメトキシメチル-4-t-ブチルフェノール、2,6-ジメトキシメチル-p-クレゾール、2,6-ジアセトキシメチル-p-クレゾール、下記式で表される化合物が挙げられる。 Other examples of the crosslinking agent (C1) include a methylol group-containing phenol compound, an alkylmethylol group-containing phenol compound, and an acetoxymethyl group-containing phenol compound. Specific examples include 2,6-dimethoxymethyl-4-t-butylphenol, 2,6-dimethoxymethyl-p-cresol, 2,6-diacetoxymethyl-p-cresol, and compounds represented by the following formulae. It is done.
Figure JPOXMLDOC01-appb-C000018
 架橋剤(C1)は1種で用いてもよく、2種以上を併用してもよい。
Figure JPOXMLDOC01-appb-C000018
A crosslinking agent (C1) may be used by 1 type, and may use 2 or more types together.
 《他の架橋剤(C2)》
 他の架橋剤(C2)としては、例えば、オキシラン環含有化合物、オキセタン環含有化合物、イソシアネート基含有化合物(ブロック化されたものを含む。)、オキサゾリン環含有化合物、アルデヒド基含有フェノール化合物が挙げられる。他の架橋剤(C2)は1種で用いてもよく、2種以上を併用してもよい。
<< Other cross-linking agent (C2) >>
Examples of the other crosslinking agent (C2) include an oxirane ring-containing compound, an oxetane ring-containing compound, an isocyanate group-containing compound (including a blocked one), an oxazoline ring-containing compound, and an aldehyde group-containing phenol compound. . The other crosslinking agent (C2) may be used alone or in combination of two or more.
 〈溶媒(D)〉
 本発明の組成物は、溶媒(D)を含有することが好ましい。溶媒(D)を用いることで、前記組成物の取扱い性を向上させたり、粘度および保存安定性を調節したりすることができる。
<Solvent (D)>
The composition of the present invention preferably contains a solvent (D). By using the solvent (D), the handleability of the composition can be improved, and the viscosity and storage stability can be adjusted.
 溶媒(D)としては、例えば、水、または水を含む混合溶媒が好ましい。混合溶媒を構成する水以外の溶媒としては、水と均一に混合し得る有機溶媒、例えばメタノール、エタノール、n-ブタノール、乳酸エチル等のアルコール類、プロピレングリコールモノメチルエーテル等のアルキレングリコール類が挙げられる。混合溶媒では、通常10質量%以上、好ましくは30質量%以上、より好ましくは50質量%以上が水である。 As the solvent (D), for example, water or a mixed solvent containing water is preferable. Examples of the solvent other than water constituting the mixed solvent include organic solvents that can be uniformly mixed with water, for example, alcohols such as methanol, ethanol, n-butanol, and ethyl lactate, and alkylene glycols such as propylene glycol monomethyl ether. . In the mixed solvent, usually 10% by mass or more, preferably 30% by mass or more, more preferably 50% by mass or more is water.
 溶媒(D)は1種単独で用いてもよく、2種以上を併用してもよい。
 本発明の組成物において、溶媒(D)を用いる場合、溶媒(D)の含有量は、当該組成物中の固形分濃度が通常10質量%を超えて70質量%以下、好ましくは15質量%を超えて60質量%以下、より好ましくは20質量%を超えて55質量%以下となる範囲である。固形分とは、通常、組成物中に含まれる溶媒(D)以外の全成分をいう。
A solvent (D) may be used individually by 1 type, and may use 2 or more types together.
In the composition of the present invention, when the solvent (D) is used, the content of the solvent (D) is such that the solid content concentration in the composition usually exceeds 10% by mass and is 70% by mass or less, preferably 15% by mass. Is more than 60% by mass, more preferably more than 20% by mass and 55% by mass or less. The solid content usually means all components other than the solvent (D) contained in the composition.
 〈その他添加剤〉
 本発明の組成物には、その他、密着助剤、酸拡散制御剤、架橋微粒子、レベリング剤、界面活性剤、増感剤、無機フィラー、クエンチャー等の各種添加剤を、本発明の目的および特性を損なわない範囲で含有させることができる。
<Other additives>
In the composition of the present invention, other additives such as adhesion assistant, acid diffusion controller, crosslinked fine particles, leveling agent, surfactant, sensitizer, inorganic filler, quencher, etc. It can be contained as long as the characteristics are not impaired.
 〈感光性樹脂組成物の調製方法〉
 本発明の組成物は、各成分を均一に混合することにより調製できる。また、ゴミを取り除くために、各成分を均一に混合した後、得られた混合物をフィルター等で濾過してもよい。
<Method for preparing photosensitive resin composition>
The composition of this invention can be prepared by mixing each component uniformly. Moreover, in order to remove dust, after mixing each component uniformly, you may filter the obtained mixture with a filter.
 〔樹脂膜およびその製造方法〕
 本発明の樹脂膜は、上述の重合体(A)を含有する。重合体(A)を含有する樹脂膜は、上述の本発明の感光性樹脂組成物を用いて、例えば後述する工程1に従い形成することができる。樹脂膜の膜厚は、通常1~200μm、好ましくは3~100μm、より好ましくは5~50μmである。
[Resin film and manufacturing method thereof]
The resin film of the present invention contains the polymer (A) described above. The resin film containing the polymer (A) can be formed, for example, according to Step 1 described below, using the above-described photosensitive resin composition of the present invention. The thickness of the resin film is usually 1 to 200 μm, preferably 3 to 100 μm, more preferably 5 to 50 μm.
 〔パターン化樹脂膜およびその製造方法〕
 本発明のパターン化樹脂膜は、上述の重合体(A)を含有し、例えば、本発明の感光性樹脂組成物から形成される。前記組成物を用いることにより、膜厚の大きい、親水性を有する樹脂膜を形成することができる。また、解像度の高いパターン化樹脂膜を形成することができる。
[Patterned resin film and manufacturing method thereof]
The patterned resin film of the present invention contains the polymer (A) described above, and is formed, for example, from the photosensitive resin composition of the present invention. By using the composition, a hydrophilic resin film having a large film thickness can be formed. In addition, a patterned resin film with high resolution can be formed.
 本発明のパターン化樹脂膜の製造例を以下に示す。この製造例は、基板上に、本発明の感光性樹脂組成物の樹脂膜を形成する工程1と、前記膜を選択的に露光する工程2と、露光後の前記膜を水系現像液で現像してパターン化樹脂膜を形成する工程3とを有する。この製造例は、さらに前記パターン化樹脂膜を加熱処理する工程4を有してもよい。 An example of production of the patterned resin film of the present invention is shown below. In this production example, Step 1 for forming a resin film of the photosensitive resin composition of the present invention on a substrate, Step 2 for selectively exposing the film, and development of the exposed film with an aqueous developer. And a step 3 of forming a patterned resin film. This manufacturing example may further include a step 4 of heat-treating the patterned resin film.
 [工程1]
 工程1では、例えば、本発明の感光性樹脂組成物を基板上に塗布・乾燥し、樹脂膜を形成する。乾燥条件は、オーブンやホットプレートを用いて、例えば、50~90℃で1~30分間加熱する。樹脂膜の膜厚は、通常1~200μm、好ましくは3~100μm、より好ましくは5~50μmである。膜厚が足りない場合は、2度塗りにより樹脂膜を形成してもよい。
[Step 1]
In step 1, for example, the photosensitive resin composition of the present invention is applied onto a substrate and dried to form a resin film. As drying conditions, for example, heating is performed at 50 to 90 ° C. for 1 to 30 minutes using an oven or a hot plate. The thickness of the resin film is usually 1 to 200 μm, preferably 3 to 100 μm, more preferably 5 to 50 μm. If the film thickness is insufficient, the resin film may be formed by coating twice.
 基板としては、例えば、ポリスチレン、ポリカーボネート、ポリアセタール、トリアセチルセルロース、ポリアミド、ポリイミド、ポリエチレン、ポリプロピレン、塩化ビニル、塩化ビニリデン、ポリフェニレンサルファイド、ポリエーテルサルフォン、ポリウレタン、ポリエチレンテレフタレート、ポリエチレンナフタレート、ポリアクリレート、ポリメタクリレートおよびセルロースから選ばれる少なくとも1種の樹脂からなる樹脂基板;ガラス、セラミック、ステンレス鋼等の材料からなる基板が挙げられる。ポリ乳酸、ポリグリコール酸、ポリカプロラクタン等の生分解性ポリマー等からなる樹脂基板であってもよい。基板としては、特開2002-335949号公報等に記載の公知の細胞培養用基板を用いることもできる。 As the substrate, for example, polystyrene, polycarbonate, polyacetal, triacetyl cellulose, polyamide, polyimide, polyethylene, polypropylene, vinyl chloride, vinylidene chloride, polyphenylene sulfide, polyethersulfone, polyurethane, polyethylene terephthalate, polyethylene naphthalate, polyacrylate, Examples include a resin substrate made of at least one resin selected from polymethacrylate and cellulose; a substrate made of a material such as glass, ceramic, and stainless steel. It may be a resin substrate made of a biodegradable polymer such as polylactic acid, polyglycolic acid, and polycaprolactan. As the substrate, a known cell culture substrate described in JP-A-2002-335949 can also be used.
 組成物の塗布方法としては、例えば、ディッピング法、スプレー法、バーコート法、ロールコート法、スピンコート法、カーテンコート法、グラビア印刷法、シルクスクリーン法、インクジェット法が挙げられる。 Examples of the coating method of the composition include a dipping method, a spray method, a bar coating method, a roll coating method, a spin coating method, a curtain coating method, a gravure printing method, a silk screen method, and an inkjet method.
 [工程2]
 工程2では、所望のマスクパターンを介して、例えばコンタクトアライナー、ステッパーまたはスキャナーを用いて、上記膜に対して露光を行う。露光光としては、紫外線、可視光線などが挙げられ、通常、波長200~500nmの光(例:i線(365nm))を用いる。露光光の照射量は、感光性樹脂組成物中の各成分の種類、含有量、樹脂膜の厚さなどによって異なるが、露光光にi線を使用する場合、露光量は通常100~10,000mJ/cm2である。
[Step 2]
In step 2, the film is exposed through a desired mask pattern using, for example, a contact aligner, a stepper, or a scanner. Examples of exposure light include ultraviolet light and visible light, and light with a wavelength of 200 to 500 nm (eg, i-line (365 nm)) is usually used. The exposure dose of exposure light varies depending on the type and content of each component in the photosensitive resin composition, the thickness of the resin film, and the like. 000 mJ / cm 2 .
 また、ネガ型の感光性樹脂組成物を用いる場合は、架橋反応をより進めるため、露光後に加熱処理を行うことが好ましい。以下、この処理を「PEB処理」ともいう。PEB条件は、感光性樹脂組成物中の各成分の種類、含有量および樹脂膜の厚さなどによって異なるが、通常50~90℃で、1~60分間程度である。 In the case of using a negative photosensitive resin composition, it is preferable to perform a heat treatment after exposure in order to further promote the crosslinking reaction. Hereinafter, this processing is also referred to as “PEB processing”. The PEB condition varies depending on the type and content of each component in the photosensitive resin composition and the thickness of the resin film, but is usually 50 to 90 ° C. and about 1 to 60 minutes.
 [工程3]
 工程3では、水系現像液により前記露光後の膜を現像して、ネガ型の場合は非露光部を、ポジ型の場合は露光部を溶解・除去することにより、基板上に所望のパターン化樹脂膜を形成する。
[Step 3]
In step 3, the exposed film is developed with an aqueous developer, and a non-exposed portion is removed in the case of a negative type, and an exposed portion is removed in the case of a positive type, thereby forming a desired pattern on the substrate. A resin film is formed.
 水系現像液としては、例えば、水、または水を含む混合溶媒が好ましい。混合溶媒としては、溶媒(D)の欄に記載した混合溶媒が挙げられる。現像方法としては、例えば、シャワー現像法、スプレー現像法、浸漬現像法、パドル現像法が挙げられる。現像条件は、通常、20~40℃で1~10分間程度である。 As the aqueous developer, for example, water or a mixed solvent containing water is preferable. As a mixed solvent, the mixed solvent described in the column of the solvent (D) is mentioned. Examples of the development method include a shower development method, a spray development method, an immersion development method, and a paddle development method. The development conditions are usually about 20 to 40 ° C. for about 1 to 10 minutes.
 [工程4]
 必要に応じて、加熱によりパターン化樹脂膜をさらに硬化させる。加熱条件は特に限定されないが、パターン化樹脂膜の用途に応じて、例えば100~300℃の温度で30分~10時間程度加熱する。硬化を充分に進行させたり、パターン形状の変形を防止したりするため、多段階で加熱することもできる。
[Step 4]
If necessary, the patterned resin film is further cured by heating. The heating conditions are not particularly limited, but for example, the heating is performed at a temperature of 100 to 300 ° C. for about 30 minutes to 10 hours depending on the use of the patterned resin film. In order to sufficiently advance the curing or to prevent the deformation of the pattern shape, heating can be performed in multiple stages.
 〔細胞培養装置〕
 本発明の細胞培養装置は、上述したパターン化樹脂膜を有する。前記装置は、細胞培養用基板と、この基板上に形成された、上述したパターン化樹脂膜とを有することが好ましい。
[Cell culture equipment]
The cell culture device of the present invention has the patterned resin film described above. The apparatus preferably includes a cell culture substrate and the patterned resin film described above formed on the substrate.
 以下、細胞培養装置の一態様について説明する。
 本発明の細胞培養装置が有するパターン化樹脂膜は、本発明の感光性樹脂組成物から形成された樹脂膜に、細胞、およびこの細胞から形成された細胞組織体、特にスフェロイドを保持するための、1つまたは複数の孔が形成された構造を有する。パターン化樹脂膜は、孔を形成する隔壁である。
Hereinafter, an aspect of the cell culture apparatus will be described.
The patterned resin film possessed by the cell culture device of the present invention is a resin film formed from the photosensitive resin composition of the present invention for retaining cells and cell tissues formed from these cells, particularly spheroids. It has a structure in which one or a plurality of holes are formed. The patterned resin film is a partition wall that forms a hole.
 孔は、樹脂膜を貫通して形成されている。孔の底面は、細胞培養用基板の表面により構成され、孔の側面は、樹脂膜により構成されている。細胞培養用基板の表面は、細胞保持の観点から、細胞接着性を有することが好ましい。 The hole is formed through the resin film. The bottom surface of the hole is constituted by the surface of the cell culture substrate, and the side surface of the hole is constituted by a resin film. The surface of the cell culture substrate preferably has cell adhesion from the viewpoint of cell retention.
 パターン化樹脂膜は、培養後に細胞組織体を孔内から取り出す際の容易性を考慮して、細胞非接着性を有することが好ましい。本発明の感光性樹脂組成物は、水溶性樹脂である重合体(A)を含有することから、前記性質を有するパターン化樹脂膜を形成することができる。 The patterned resin film preferably has cell non-adhesiveness in consideration of the ease of removing the cell tissue from the pores after culturing. Since the photosensitive resin composition of the present invention contains the polymer (A) which is a water-soluble resin, a patterned resin film having the above properties can be formed.
 孔の底面の形状は特に限定されず、例えば、円形状、楕円形状、多角形状が挙げられる。孔の底面の面積は、細胞の大きさ・種類等によって適宜決定されるが、通常1,000~40,000μm2、好ましくは5,000~20,000μm2である。 The shape of the bottom surface of the hole is not particularly limited, and examples thereof include a circular shape, an elliptical shape, and a polygonal shape. The area of the bottom of the pore is appropriately determined depending on the size and type of cells, but is usually 1,000 to 40,000 μm 2 , preferably 5,000 to 20,000 μm 2 .
 樹脂膜に孔が形成されたパターン化樹脂膜は、例えば、上述したパターン化樹脂膜の製造方法に従い形成することができる。その際、感光性樹脂組成物が塗布される基板としては、細胞培養用基板が用いられる。 The patterned resin film in which holes are formed in the resin film can be formed, for example, according to the above-described method for producing a patterned resin film. At that time, a cell culture substrate is used as the substrate to which the photosensitive resin composition is applied.
 孔の底面は、細胞を保持し細胞組織体を形成する点から、細胞接着性を有する表面であることが好ましい。細胞接着性の表面は、例えば、カルボキシル基、アミノ基等の電荷を有する官能基が導入された表面、アルギニン・グリシン・アスパラギン酸配列等の細胞接着性ペプチドが導入された表面、細胞接着性を有する高分子が固定された表面である。 The bottom surface of the hole is preferably a surface having cell adhesiveness from the viewpoint of holding cells and forming a cell tissue body. Cell adhesive surfaces include, for example, surfaces into which charged functional groups such as carboxyl groups and amino groups have been introduced, surfaces into which cell adhesive peptides such as arginine, glycine, and aspartic acid sequences have been introduced. It is the surface where the polymer which it has was fixed.
 前記電荷を有する官能基は、基板表面をプラズマ等の放射線で処理することによって導入することができる。前記細胞接着性を有する高分子としては、例えば、ポリアクリル酸、ポリビニル硫酸、ポリスチレンスルホン酸、ポリアリルアミン等の電荷を有する合成高分子、コンドロイチン硫酸、デルマタン硫酸、デキストラン硫酸、ケラタン硫酸、ヘパラン硫酸、ヒアルロン酸、キチン等の電荷を有する多糖類、コラーゲン、ゼラチン、フィブロネクチン、ハイドロネクチン、ラミニン等の細胞接着性タンパク質、細胞接着性タンパク質や細胞接着性ペプチドを固定した合成高分子が挙げられる。 The functional group having an electric charge can be introduced by treating the substrate surface with radiation such as plasma. Examples of the polymer having cell adhesion include, for example, synthetic polymers having a charge such as polyacrylic acid, polyvinyl sulfate, polystyrene sulfonic acid, polyallylamine, chondroitin sulfate, dermatan sulfate, dextran sulfate, keratan sulfate, heparan sulfate, Examples thereof include polysaccharides having a charge such as hyaluronic acid and chitin, cell adhesive proteins such as collagen, gelatin, fibronectin, hydronectin and laminin, and synthetic polymers on which cell adhesive proteins and cell adhesive peptides are immobilized.
 例えば、細胞接着性の表面を有する細胞培養用基板を用いることができる。また、細胞培養用基板上にパターン化樹脂膜を形成した後に、露出した基板の表面(孔の底面)に、放射線処理したり、細胞接着性を有する高分子を固定化したりしてもよい。 For example, a cell culture substrate having a cell adhesive surface can be used. Further, after the patterned resin film is formed on the cell culture substrate, the exposed surface of the substrate (bottom surface of the hole) may be subjected to radiation treatment or a cell-adhesive polymer may be immobilized.
 孔の底面である基板表面は、凹凸構造を有していてもよい。このような凹凸構造を設けることで、細胞組織体の前記底面への接着性を向上させることができる。凹凸構造における凸部または凹部の平面方向の形状は、例えば、円形状、楕円形状、多角形状が挙げられる。 The substrate surface that is the bottom surface of the hole may have an uneven structure. By providing such a concavo-convex structure, the adhesion of the cell tissue body to the bottom surface can be improved. Examples of the shape in the planar direction of the convex portion or concave portion in the concavo-convex structure include a circular shape, an elliptical shape, and a polygonal shape.
 孔の深さは、パターン化樹脂膜の膜厚により決定され、通常1~200μm、好ましくは3~100μm、より好ましくは5~50μmである。この範囲であれば、孔内に細胞および細胞組織体を良好に保持することができる。 The depth of the hole is determined by the thickness of the patterned resin film, and is usually 1 to 200 μm, preferably 3 to 100 μm, and more preferably 5 to 50 μm. If it is this range, a cell and a cell tissue body can be favorably hold | maintained in a hole.
 本発明の細胞培養装置を用いて細胞を培養する際には、パターン化樹脂膜が有する孔内において、細胞を培養し、細胞組織体、特にスフェロイドを形成する。例えば、細胞を含む培養液を孔内に入れ、孔の底面に播種された細胞が、当該底面である細胞培養用基板の表面上で3次元的に結合した細胞組織体を形成する。細胞組織体は、培養液中に浮遊することなく孔の底面に接着した状態で、隔壁により形成された孔内に安定して保持されたまま長期間にわたって培養される。 When culturing cells using the cell culture apparatus of the present invention, the cells are cultured in the pores of the patterned resin film to form cell tissues, particularly spheroids. For example, a culture solution containing cells is put into the hole, and cells seeded on the bottom surface of the hole form a cell tissue body that is three-dimensionally bonded on the surface of the cell culture substrate that is the bottom surface. The cell tissue is cultured for a long period of time while being stably held in the hole formed by the partition wall while adhering to the bottom surface of the hole without floating in the culture solution.
 前記細胞としては、細胞同士の間で互いに結合を形成するものであれば、動物種や臓器・組織の種類は特に限定されない。例えば、ヒトやブタ、イヌ、ラット、マウス等の動物由来の肝臓、膵臓、腎臓、神経、皮膚から採取される初代細胞、ES細胞(Embryonic Stem cell)、樹立されている株化細胞、またはこれらに遺伝子操作を施した細胞が挙げられる。細胞は1種単独で用いてもよく、2種以上を併用してもよい。培養液としては、細胞の生存状態および機能を維持できるよう、必要な塩類および/または栄養成分を適切な濃度で含む水溶液を用いることができる。 The type of animal species and organs / tissues is not particularly limited as long as the cells form a bond between cells. For example, primary cells collected from livers, pancreas, kidneys, nerves, skin, ES cells (Embryonic Stem cell), established cell lines, or these derived from animals such as humans, pigs, dogs, rats, mice, etc. And cells subjected to genetic manipulation. A cell may be used individually by 1 type and may use 2 or more types together. As the culture solution, an aqueous solution containing necessary salts and / or nutrient components at an appropriate concentration can be used so that the survival state and function of the cells can be maintained.
 以下、本発明を実施例に基づいてさらに具体的に説明するが、本発明はこれら実施例に限定されない。以下の実施例等の記載において、特に言及しない限り、「部」は「質量部」の意味で用いる。 Hereinafter, the present invention will be described more specifically based on examples, but the present invention is not limited to these examples. In the following description of Examples and the like, “part” is used to mean “part by mass” unless otherwise specified.
 [1]物性の測定方法
 [1-1]重合体のMw、MnおよびMw/Mnの測定方法
 重合体の重量平均分子量(Mw)、数平均分子量(Mn)および分子量分布(Mw/Mn)は、下記条件下で、ゲルパーミエーションクロマトグラフィー法により測定した。
・カラム:東ソー社製カラムの「TSKgel αM」および
     「TSKgel α2500」を直列に接続
・溶媒:臭化リチウムおよびリン酸を添加したN-メチル-2-ピロリドン
・温度:40℃
・検出方法:屈折率法
・標準物質:ポリスチレン
・GPC装置:東ソー製、装置名「HLC-8020-GPC」
[1] Method for measuring physical properties [1-1] Method for measuring Mw, Mn and Mw / Mn of polymer The weight average molecular weight (Mw), number average molecular weight (Mn) and molecular weight distribution (Mw / Mn) of the polymer are: The measurement was performed by gel permeation chromatography under the following conditions.
Column: Tosoh column “TSKgel αM” and “TSKgel α2500” connected in series. Solvent: N-methyl-2-pyrrolidone with lithium bromide and phosphoric acid added. Temperature: 40 ° C.
・ Detection method: Refractive index method ・ Standard material: Polystyrene ・ GPC apparatus: manufactured by Tosoh Corporation, apparatus name “HLC-8020-GPC”
 [1-2]重合体に含まれる構造単位の含有量の測定方法
 重合体に含まれる構造単位の含有量は、1H-NMRおよび13C-NMR分析により測定した。装置名「ECP-400P」(JEOL社製)を用い、重クロロホルム、重メタノールおよび重水から、重合体の溶解性の最も高い重溶媒を選択した。
[1-2] Method for measuring content of structural unit contained in polymer The content of the structural unit contained in the polymer was measured by 1 H-NMR and 13 C-NMR analysis. Using a device name “ECP-400P” (manufactured by JEOL), a heavy solvent having the highest solubility of the polymer was selected from deuterated chloroform, deuterated methanol and deuterated water.
 [2]重合体(A)の合成
 下記スキームに基づき、重合体(A)を合成した。
[2] Synthesis of polymer (A) Polymer (A) was synthesized based on the following scheme.
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
 [合成例A1]重合体(A1)の合成
 攪拌機付きの500mlフラスコに、ポリブタジエン(Cis-1,4結合含量=20モル%、Trans-1,4結合含量=55モル%、1,2結合含量=25モル%)23.6g、ギ酸5.9g、トルエン240mlを添加した。この混合物を60℃まで昇温し、撹拌しながら、31質量%過酸化水素55.9gを15分間かけて添加した。そのまま150分間反応させた後、23℃まで冷却した。この反応溶液を炭酸水素ナトリウム水溶液および水で洗浄し、溶媒を留去することで、重合体(A1)を得た。1H NMRから、重合体(A1)はポリブタジエンの不飽和基の一部がエポキシ化した重合体であって、エポキシ化率[(エポキシ化した不飽和基の数/エポキシ化前のポリブタジエンに含まれる不飽和基の数)×100(%)]は60%であった。重合体(A1)の1H NMRスペクトルを図1に示す。また、Mnは5400、Mwは9500、Mw/Mnは1.76であった。
[Synthesis Example A1] Synthesis of Polymer (A1) In a 500 ml flask equipped with a stirrer, polybutadiene (Cis-1,4 bond content = 20 mol%, Trans-1,4 bond content = 55 mol%, 1,2 bond content). = 25 mol%) 23.6 g, formic acid 5.9 g and toluene 240 ml were added. The mixture was heated to 60 ° C., and 55.9 g of 31 mass% hydrogen peroxide was added over 15 minutes while stirring. The reaction was allowed to proceed for 150 minutes, followed by cooling to 23 ° C. This reaction solution was washed with an aqueous sodium hydrogen carbonate solution and water, and the solvent was distilled off to obtain a polymer (A1). From 1 H NMR, the polymer (A1) is a polymer in which a part of unsaturated groups of polybutadiene is epoxidized, and the epoxidation rate [(number of epoxidized unsaturated groups / polybutadiene before epoxidation is included) Number of unsaturated groups) × 100 (%)] was 60%. The 1 H NMR spectrum of the polymer (A1) is shown in FIG. Moreover, Mn was 5400, Mw was 9500, and Mw / Mn was 1.76.
 [実施例A1]重合体(A2)の合成
 100mlフラスコに、上述の重合体(A1)5.2g、α-チオグリセロール4.4g、水酸化リチウム一水和物0.85g、メタノール(MeOH)6.6ml、テトラヒドロフラン(THF)5.8mlを添加し、60℃で2時間加熱撹拌した。その後、23℃に冷却し、水で再沈殿した。沈殿物を60℃で真空乾燥させ、重合体(A2)を得た。1H NMRから、重合体(A2)は、チオエーテル構造を有していることが分かった。重合体(A2)の1H NMRスペクトルを図2に示す。
[Example A1] Synthesis of polymer (A2) In a 100 ml flask, 5.2 g of the above polymer (A1), 4.4 g of α-thioglycerol, 0.85 g of lithium hydroxide monohydrate, methanol (MeOH). 6.6 ml and tetrahydrofuran (THF) 5.8 ml were added and heated and stirred at 60 ° C. for 2 hours. Then, it cooled to 23 degreeC and reprecipitated with water. The precipitate was vacuum dried at 60 ° C. to obtain a polymer (A2). From 1 H NMR, it was found that the polymer (A2) had a thioether structure. The 1 H NMR spectrum of the polymer (A2) is shown in FIG.
 [実施例A2]重合体(A3)の合成
 100mlフラスコに、上述の重合体(A2)5.0g、31質量%過酸化水素水4.6g、メタノール(MeOH)25.3mlを添加し、40℃で2時間加熱撹拌した。その後、23℃に冷却し、イソプロパノールで再沈殿した。沈殿物を60℃で真空乾燥させ、白色固体の重合体(A3)を得た。1H NMRから、重合体(A3)は、スルフィニル基を有していることが分かった。重合体(A3)の1H NMRスペクトルを図3に示す。
[Example A2] Synthesis of polymer (A3) To a 100 ml flask, 5.0 g of the above polymer (A2), 4.6 g of 31% by mass hydrogen peroxide, and 25.3 ml of methanol (MeOH) were added. The mixture was stirred with heating at ° C for 2 hours. Then, it cooled to 23 degreeC and reprecipitated with isopropanol. The precipitate was vacuum dried at 60 ° C. to obtain a white solid polymer (A3). From 1 H NMR, it was found that the polymer (A3) had a sulfinyl group. The 1 H NMR spectrum of the polymer (A3) is shown in FIG.
 [3]感光性樹脂組成物およびパターン化樹脂膜の形成
 [実施例1B]
 重合体(A3)100部、4,7-ジ-n-ブトキシナフチルテトラヒドロチオフェニウムトリフルオロメタンスルホネート3部、メチル化メラミン樹脂(商品名「ニカラック MW-30HM」、三和ケミカル(株)製)10部を、水120部とメタノール20部とからなる混合溶媒に、固形分濃度が5~50質量%となるよう均一に溶解させて、感光性樹脂組成物を得た。
[3] Formation of photosensitive resin composition and patterned resin film [Example 1B]
Polymer (A3) 100 parts, 4,7-di-n-butoxynaphthyltetrahydrothiophenium trifluoromethanesulfonate 3 parts, methylated melamine resin (trade name “Nicalac MW-30HM”, manufactured by Sanwa Chemical Co., Ltd.) 10 parts were uniformly dissolved in a mixed solvent composed of 120 parts of water and 20 parts of methanol so that the solid content concentration was 5 to 50% by mass to obtain a photosensitive resin composition.
 [実施例1C]
 ガラス基板上に、実施例1Bで調製した感光性樹脂組成物をスピンコート法にて塗布し、ホットプレートを用いて70℃で20分間加熱し、膜厚1μm、2μm、5μm、10μmおよび20μmの樹脂膜を形成した。次いで、アライナー(Suss Microtec社製、装置名「MA-100」)を用い、高圧水銀灯からの紫外線を、パターンマスクを介して、波長365nmにおける露光量が1,000mJ/cm2となるように樹脂膜に照射した。露光後の樹脂膜をホットプレートを用いて70℃で730秒間加熱し、水を用いて浸漬現像(23℃、1分間)し、直径400μmで高さがそれぞれ1μm、2μm、5μm、10μmおよび20μmであり、断面が矩形のホールパターンを有するパターン化樹脂膜を形成した。実施例1Bで調製した感光性樹脂組成物では、20μmの膜厚まで良好なパターン化樹脂膜を形成できることが明らかになった。
[Example 1C]
On the glass substrate, the photosensitive resin composition prepared in Example 1B was applied by spin coating, heated at 70 ° C. for 20 minutes using a hot plate, and the film thickness was 1 μm, 2 μm, 5 μm, 10 μm, and 20 μm. A resin film was formed. Next, using an aligner (manufactured by Suss Microtec, device name “MA-100”), UV light from a high-pressure mercury lamp is passed through a pattern mask so that the exposure amount at a wavelength of 365 nm is 1,000 mJ / cm 2. The film was irradiated. The exposed resin film was heated at 70 ° C. for 730 seconds using a hot plate, immersed and developed (23 ° C., 1 minute) using water, and the diameter was 400 μm and the height was 1 μm, 2 μm, 5 μm, 10 μm, and 20 μm, respectively. A patterned resin film having a hole pattern with a rectangular cross section was formed. It was revealed that the photosensitive resin composition prepared in Example 1B can form a good patterned resin film up to a thickness of 20 μm.
 [比較例1C]
 比較例1Cでは、感光性樹脂組成物として市販の感光性樹脂組成物(商品名「Biosurfine-AWP」、東洋合成工業(株)製)を用いたこと以外は実施例1Cと同様に行った。比較例1Cでは、直径400μmで高さがそれぞれ1μm、2μmであり、断面が矩形のホールパターンを有するパターン化樹脂膜を形成できたが、膜厚5μm以上のパターン化樹脂膜は形成できなかった。市販の感光性樹脂組成物では、2μmの膜厚までしか良好なパターン化樹脂膜を形成できないことが明らかになった。
[Comparative Example 1C]
Comparative Example 1C was performed in the same manner as Example 1C, except that a commercially available photosensitive resin composition (trade name “Biosurfine-AWP”, manufactured by Toyo Gosei Co., Ltd.) was used as the photosensitive resin composition. In Comparative Example 1C, a patterned resin film having a diameter of 400 μm, a height of 1 μm, and 2 μm and a hole pattern having a rectangular cross section could be formed, but a patterned resin film having a thickness of 5 μm or more could not be formed. . It was revealed that a commercially available photosensitive resin composition can form a good patterned resin film only up to a thickness of 2 μm.

Claims (13)

  1.  式(1a)で表される構造単位を有する重合体(A)。
    Figure JPOXMLDOC01-appb-C000001
    [式(1a)中、R1はそれぞれ独立に水素原子または炭素数1~20のアルキル基であり、R2は炭素数1~20のアルカンジイル基または炭素数6~20のアリーレン基であり、R3は水酸基を有する基であり、R4は水素原子または炭素数1~20のアルキル基である。]
    The polymer (A) which has a structural unit represented by Formula (1a).
    Figure JPOXMLDOC01-appb-C000001
    [In the formula (1a), each R 1 is independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, and R 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms. R 3 is a group having a hydroxyl group, and R 4 is a hydrogen atom or an alkyl group having 1 to 20 carbon atoms. ]
  2.  前記R3が、式(g1)で表される1価の基である請求項1に記載の重合体(A)。
    Figure JPOXMLDOC01-appb-C000002
    [式(g1)中、aは0~4の整数である。]
    The polymer (A) according to claim 1, wherein R 3 is a monovalent group represented by the formula (g1).
    Figure JPOXMLDOC01-appb-C000002
    [In the formula (g1), a is an integer of 0 to 4. ]
  3.  式(1b)で表される構造単位を有する重合体(A')。
    Figure JPOXMLDOC01-appb-C000003
    [式(1b)中、R1はそれぞれ独立に水素原子または炭素数1~20のアルキル基であり、R2は炭素数1~20のアルカンジイル基または炭素数6~20のアリーレン基であり、R3は水酸基を有する基であり、R4は水素原子または炭素数1~20のアルキル基である。]
    The polymer (A ') which has a structural unit represented by Formula (1b).
    Figure JPOXMLDOC01-appb-C000003
    [In the formula (1b), each R 1 is independently a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, and R 2 is an alkanediyl group having 1 to 20 carbon atoms or an arylene group having 6 to 20 carbon atoms. , R 3 is a group having a hydroxyl group, R 4 is a hydrogen atom or an alkyl group having 1 to 20 carbon atoms. ]
  4.  前記R3が、式(g1)で表される1価の基である請求項3に記載の重合体(A')。
    Figure JPOXMLDOC01-appb-C000004
    [式(g1)中、aは0~4の整数である。]
    The polymer (A ') according to claim 3, wherein R 3 is a monovalent group represented by the formula (g1).
    Figure JPOXMLDOC01-appb-C000004
    [In the formula (g1), a is an integer of 0 to 4. ]
  5.  請求項1または2に記載の重合体(A)と、
     光応答性化合物(B)と、
     架橋剤(C)と
    を含有する感光性樹脂組成物。
    The polymer (A) according to claim 1 or 2,
    A photoresponsive compound (B);
    A photosensitive resin composition containing a crosslinking agent (C).
  6.  光応答性化合物(B)が、光酸発生剤であり、
     架橋剤(C)が、酸の作用によって架橋反応を進行する化合物である
    請求項5に記載の感光性樹脂組成物。
    The photoresponsive compound (B) is a photoacid generator,
    The photosensitive resin composition according to claim 5, wherein the crosslinking agent (C) is a compound that undergoes a crosslinking reaction by the action of an acid.
  7.  架橋剤(C)が、-CH2ORで表される基を少なくとも2つ有する化合物(Rは、水素原子、炭素数1~10のアルキル基またはアセチル基)である請求項5または6に記載の感光性樹脂組成物。 7. The crosslinking agent (C) is a compound having at least two groups represented by —CH 2 OR (R is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an acetyl group). Photosensitive resin composition.
  8.  請求項1または2に記載の重合体(A)を含有する樹脂膜。 A resin film containing the polymer (A) according to claim 1 or 2.
  9.  基板上に、請求項5~7のいずれか1項に記載の感光性樹脂組成物の樹脂膜を形成する工程1と、前記膜を選択的に露光する工程2と、露光後の前記膜を水系現像液で現像する工程3とを有するパターン化樹脂膜の製造方法。 A process 1 for forming a resin film of the photosensitive resin composition according to any one of claims 5 to 7, a process 2 for selectively exposing the film, and a film after the exposure. A method for producing a patterned resin film, comprising: a step 3 of developing with an aqueous developer.
  10.  前記基板が、細胞培養用基板である請求項9に記載のパターン化樹脂膜の製造方法。 The method for producing a patterned resin film according to claim 9, wherein the substrate is a substrate for cell culture.
  11.  請求項9または10に記載の製造方法によって得られたパターン化樹脂膜。 A patterned resin film obtained by the production method according to claim 9 or 10.
  12.  請求項1または2に記載の重合体(A)を含有するパターン化樹脂膜。 A patterned resin film containing the polymer (A) according to claim 1 or 2.
  13.  請求項11または12に記載のパターン化樹脂膜を有する細胞培養装置。 A cell culture device having the patterned resin film according to claim 11 or 12.
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