WO2015182971A1

WO2015182971A1 - Biomaterial detecting bio sensor and bio sensor system

Info

Publication number: WO2015182971A1
Application number: PCT/KR2015/005270
Authority: WO
Inventors: 송윤흡; 김규범
Original assignee: 한양대학교 산학협력단
Priority date: 2014-05-27
Filing date: 2015-05-27
Publication date: 2015-12-03
Also published as: KR101588953B1; KR20150136660A

Abstract

A biomaterial detecting bio sensor comprises: a substrate; an oxide film formed on the front surface of the substrate; a source electrode and a drain electrode disposed so as to be spaced from each other on the substrate on which the oxide film is formed; a reaction material, for sensing a biomaterial, fixed on a sensing region generated on the oxide film on the basis of the positions of the source electrode and the drain electrode; and a fluid pipe configured to pass through the sensing region, wherein the fluid pipe is configured to comprise at least one refraction part for adjusting the inflow rate of the biomaterial which flows into the fluid pipe.

Description

Biomaterial Detection Biosensor and Biosensor System

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a biomaterial sensing biosensor and a biosensor system, wherein a fluid tube passing between a source electrode and a drain electrode is formed to include at least one refracting portion, and thus a technology for a biosensor detecting a biomaterial.

Conventional biomaterial sensing biosensors count biomaterials according to the size of the biomaterial. For example, referring to Korean Patent Registration No. 10-0573621, the biosensor includes a microlattice pattern that passes only specific cells of a biological material, such that the biosensor can count specific cells having a smaller size than the microlattice pattern. have.

However, conventional biosensors have a problem that it is difficult to count only specific cells among cells of similar sizes when cells of similar sizes exist in the biological material. In addition, to count only certain cells among cells of similar size, there is a disadvantage that an additional chemical reaction must be performed.

Accordingly, the present specification proposes a technique for measuring a biomaterial, a biosensor system, and a method of manufacturing the same, by measuring a change in capacitance between a source electrode and a drain electrode and a substrate.

Embodiments of the present invention provide a biosensor, a biosensor system, and a method of manufacturing the same, which detect a biomaterial by measuring a capacitance change between a source electrode and a drain electrode and a substrate.

In particular, embodiments of the present invention provide a biomaterial sensing biosensor, a biosensor system, and a method of manufacturing the same, including a fluid tube having at least one refracting portion for controlling the inflow rate of the incoming biomaterial.

In addition, embodiments of the present invention provide a biomaterial sensing biosensor, a biosensor system, and a method of manufacturing the same, which selectively capture a specific material sensed by a reactant among biomaterials flowing into a fluid tube.

Biological material detection biosensor according to an embodiment of the present invention is a substrate; An oxide film formed on the entire surface of the substrate; A source electrode and a drain electrode spaced apart from each other on the substrate on which the oxide film is formed; A reaction material fixed on a sensing region generated in the oxide film based on positions of the source electrode and the drain electrode to sense a biological material; And a fluid tube generated to pass through the sensing region, wherein the fluid tube is formed to include at least one refracting portion for adjusting the inflow rate of the biological material flowing into the fluid tube.

The fluid tube may include at least a portion generated in a direction perpendicular to the source electrode and the drain electrode and at least a portion generated in a horizontal direction with respect to the source electrode and the drain electrode.

When the plurality of fluid tubes are included, they may be generated in parallel.

The biomaterial sensing biosensor may further include an insulating layer stacked to cover each of the source electrode and the drain electrode.

A reference solution for detecting an electrochemical reaction between the biological material and the reactant is introduced into the fluid tube, a reference capacitance is formed, and the biological material for detecting the electrochemical reaction is introduced. Sensing capacitance can be formed.

The biomaterial sensing biosensor includes a supply unit for introducing the biomaterial into the fluid tube; And a discharge port through which the reactive material and the biological material sensed are discharged.

The supply unit introduces a reference solution for sensing an electrochemical reaction between the biomaterial and the reactant, and the discharge port may discharge the reference solution sensed with the reactant.

The oxide film is SiO ₂ , TiO ₂ , Si ₃ N ₄ , Al ₂ O ₃ , CeO ₂ , HfO ₂ , La ₂ O ₃ , Ta ₂ O ₅ , Y ₂ O ₃ , ZrO ₂ , ZrAlO, HfAlO, ZrTiO ₄ , It may be formed of at least one of SnTiO ₄ , or SrTiO ₃ .

Forming an oxide film on the entire surface of the substrate according to an embodiment of the present invention; Disposing a source electrode and a drain electrode spaced apart from each other on the substrate on which the oxide film is formed; Fixing a reaction material for sensing a biomaterial on a sensing region generated in the oxide film based on the positions of the source electrode and the drain electrode; And generating a fluid passage through the sensing region and including at least one refracting portion for adjusting the inflow rate of the incoming biological material.

Generating the fluid conduit comprises: generating at least a portion of the fluid conduit in a direction perpendicular to the source electrode and the drain electrode; And generating at least a portion of the fluid tube in a horizontal direction with respect to the source electrode and the drain electrode.

The generating of the fluid pipe may include generating the fluid pipes in parallel when a plurality of fluid pipes are included.

The disposing the source electrode and the drain electrode apart from each other may further include stacking an insulating layer to cover each of the source electrode and the drain electrode.

The fixing of the reaction material may include etching the at least a portion of the insulating layer based on positions of the source electrode and the drain electrode to generate the sensing region in the oxide layer.

The generating of the fluid pipe may include attaching a polydimethylsiloxane (PDMS) layer in which the fluid pipe is etched to the substrate on which the oxide film is formed.

Embodiments of the present invention can provide a biosensor, a biosensor system, and a method of manufacturing the same, which detect a biomaterial by measuring a capacitance change between a source electrode and a drain electrode and a substrate.

In particular, embodiments of the present invention may provide a biomaterial sensing biosensor, a biosensor system, and a method of manufacturing the same, including a fluid tube having at least one refracting portion for controlling the inflow rate of the incoming biomaterial. .

In addition, embodiments of the present invention may provide a biomaterial sensing biosensor, a biosensor system, and a method of manufacturing the same, which selectively capture a specific material sensed by a reactant among biomaterials flowing into a fluid tube.

1 is a side view showing a biomaterial detection biosensor according to an embodiment of the present invention.

FIG. 2 is a top view illustrating the biomaterial sensing biosensor illustrated in FIG. 1.

3 is a conceptual diagram illustrating reference capacitance and sensing capacitance in a biomaterial sensing biosensor according to an exemplary embodiment of the present invention.

4 is a top view illustrating a biomaterial sensing biosensor according to another exemplary embodiment of the present invention.

5A to 5B are views illustrating a method for manufacturing a biomaterial sensing biosensor according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments. Also, like reference numerals in the drawings denote like elements.

Referring to FIG. 1, the biomaterial sensing biosensor according to an exemplary embodiment of the present invention is disposed on the substrate 110, the oxide film 120 formed on the front surface of the substrate 110, and spaced apart from each other on the substrate 110. The source electrode and the drain electrode 130, the reaction material 140, and the fluid pipe 150 into which the biological material sensed (to be detected) and the reactant material 140 are introduced.

Here, the substrate 110 may be a silicon substrate, and may be an n-type or p-type silicon substrate. However, the present invention is not limited thereto and may be formed of various materials such as titanium oxide, acrylic resin, epoxy resin or polyimide.

The oxide film 120 may be formed on the entire surface of the substrate 110 with a dielectric material having a low dielectric constant. For example, the oxide layer 120 may be formed of a dielectric material having a dielectric constant of 0-6. For more specific example, the oxide film 120 is SiO ₂ , TiO ₂ , Si ₃ N ₄ , Al ₂ O ₃ , CeO ₂ , HfO ₂ , La ₂ O ₃ , Ta ₂ O ₅ , Y ₂ O ₃ , ZrO ₂ , ZrAlO, HfAlO, ZrTiO ₄ , SnTiO ₄ , or SrTiO ₃ .

The source electrode and the drain electrode 130 may be spaced apart from each other at a predetermined interval on the substrate 110 on which the oxide film 120 is formed. In this case, the source electrode and the drain electrode 130 may be formed of a conductive material of a metal or an alloy so that a voltage may be applied. For example, the source electrode and the drain electrode 130 may be formed of at least one of Al, Ag, Au, Cu, or W. As such, since the source electrode and the drain electrode 130 are formed of a conductive material, when a voltage is applied, a fringing field may be formed on the substrate 110 in the vicinity by a fringing effect. Therefore, since the source electrode and the drain electrode 130 to which the voltage is applied are free from contact with the biological material, the source electrode and the drain electrode 130 may be formed of various materials having conductivity. In addition, although not shown in the drawing, a gate electrode may be formed on the substrate 110 between the source electrode and the drain electrode 130.

The reaction material 140 is fixed on the sensing region 121 generated in the oxide film 120 to sense the biomaterial. At this time, the reaction material 140 may sense only a specific material of the biological material. For example, the reactant 140 may be an antibody that binds to specific cells included in the biological material. More specifically, for example, the reactant 140 may be an antibody that binds to cancer cells included in the biological material.

In addition, since the reactant 140 has a pattern, the sensing region 121 positioned below the reactant 140 may be exposed. In this case, since the area of the sensing region 121 except for the portion where the reactant 140 is fixed affects the rate of change of the sensing capacitance, the reactant 140 may consider the change rate of the sensing capacitance in consideration of the pattern of change. It may be fixed to the sensing area 121 having a.

Here, the sensing region 121 is a region in which the reactant 140 is fixed on the oxide film 120 and may be determined based on the positions of the source electrode and the drain electrode 130. For example, the sensing region 121 may be determined as an area between the source electrode and the drain electrode 130 of the oxide film 120.

The fluid pipe 150 is created to pass through the sensing area 121. For example, the fluid tube 150 may be formed by attaching a polydimethylsiloxane (PDMS) layer 160 in which a predetermined pattern is engraved to the substrate 110 on which the oxide film 120 is formed. In this case, the preset pattern may be changed according to the shape of the fluid pipe 150.

In particular, the fluid pipe 150 according to an embodiment of the present invention may be formed to include at least one refractive portion in order to control the inflow rate of the incoming biological material, the source electrode and the drain electrode 130 It may be formed to include at least a portion generated in a direction perpendicular to the direction and at least a portion generated in a horizontal direction with respect to the source electrode and the drain electrode 130. Detailed description thereof will be described with reference to FIG. 2.

At this time, since the insulating film 170 is interposed between the fluid pipe 150 and the source electrode and the drain electrode 130, the source electrode and the drain electrode 130 are in direct contact with the biological material flowing into the fluid pipe 150. There is no risk of corrosion.

The biomaterial sensing biosensor having the structure as described above may detect the biomaterial by measuring a capacitance change generated by the reference solution or the biomaterial being introduced into the fluid tube 150. Detailed description thereof will be described with reference to FIG. 3.

In addition, although not shown in the figure, the biomaterial sensing biosensor further includes a supply unit for introducing the biomaterial into the fluid pipe 150 and a discharge port through which the reactant material 140 and the sensed biomaterial are discharged. Sensor systems can be formed. In this case, the supply unit may introduce a reference solution for sensing an electrochemical reaction between the biomaterial and the reactant 140, and the outlet may discharge the reactant 140 and the sensed reference solution.

In addition, the biomaterial detection biosensor system controls the inflow and discharge of the biomaterial and the pump for supplying the biomaterial and the reference solution from the supply portion to the outlet so that the biomaterial and the reference solution flow in the fluid pipe 150, and detects the biomaterial. The control unit may further include a. In this case, the biomaterial sensing biosensor system includes a substrate 110, an oxide film 120, a source electrode and a drain electrode 130, a reactant material 140, a fluid pipe 150, a supply part, an outlet port, a pump, and a controller. Can be.

Referring to FIG. 2, in the biomaterial sensing biosensor according to an exemplary embodiment, a sensing region 210 in which a reactant is fixed is disposed between a source electrode and a drain electrode 230 of an oxide film 220 formed on a front surface of a substrate. Can be created in the area. Therefore, the sensing region 210 may be formed to correspond to the number of the source electrode and the drain electrode 230. Detailed description thereof will be described with reference to FIG. 4.

The fluid tube 240 is created to pass through the sensing region 210. Accordingly, the biomaterial flowing into the fluid tube 240 may react with the reactant fixed in the sensing region 210 to generate an electrochemical reaction. The biomaterial sensing biosensor according to an embodiment of the present invention may detect the biomaterial based on the capacitance change caused by the electrochemical reaction generated as described above.

Here, the fluid pipe 240 according to an embodiment of the present invention is formed to include at least one refracting portion 241 to control the inflow rate of the incoming biological material. In other words, the fluid tube 240 includes at least a portion 242 generated in a direction perpendicular to the source electrode and drain electrode 230 and at least a portion 243 generated in a horizontal direction with respect to the source electrode and drain electrode 230. By being formed to include, it may be formed to include at least one refractive portion 241. For example, the fluid tube 240 includes at least a portion 242 generated in a direction perpendicular to the source and drain electrodes 230 and at least a portion 243 generated in a horizontal direction with respect to the source and drain electrodes 230. ) May be formed in a structure in which the letter 'b' is repeated. More specifically, for example, the fluid tube 240 may be formed in a zigzag form to surround the source electrode and the drain electrode 230. However, the fluid tube 240 is not limited to or limited to such a structure, and may be formed in various shapes including at least one refractive portion 241.

Therefore, the entry speed of the biomaterial flowing into the fluid tube 240 may be controlled, and ambient noise may be suppressed to improve the detection accuracy of the biomaterial. For example, the rate of introduction of the biomaterial into the fluid tube 240 passes through at least a portion 243 in which the biomaterial is generated in a horizontal direction with respect to the source electrode and the drain electrode 230. In the course of passing at least a portion 242 generated in a direction perpendicular to 230, the biomaterial may be lowered by passing at least one refractive portion 241.

In addition, the biomaterial sensing biosensor further includes a supply unit 244 for introducing the biomaterial into the fluid tube 240 and an outlet 245 for discharging the reactant and the sensed biomaterial, thereby providing a biomaterial sensing biosensor system. Can be formed. In this case, the supply unit 244 may introduce a reference solution for detecting an electrochemical reaction between the biological material and the reactive material. In addition, the outlet 245 may discharge the reactant and the sensed reference solution. In the drawings, the supply unit 244 and the discharge port 245 are shown as an embodiment formed one by one for the fluid pipe 240, but is not limited thereto, but a plurality of the fluid pipe 240 may be formed. For example, the supply part 244 is a first supply part into which the reference solution is introduced and a second supply part into which the biological material is supplied to one fluid pipe 240, and two of the supply parts 244 may be formed. Two may be formed for one fluid tube 240.

In addition, although not shown, the biomaterial sensing biosensor system further includes a pump for supplying the biomaterial and the reference solution from the supply part 244 to the outlet 245 so that the biomaterial and the reference solution flow in the fluid tube 240. It may include, and may further include a control unit for controlling the inflow and discharge of the biological material or reference solution and detect the biological material.

Referring to FIG. 3, when a reference solution is introduced into the fluid tube 310 and a voltage is applied to the source electrode and the drain electrode 320, the biomaterial sensing biosensor is located in the sensing region 330 as shown in (a). The current flowing can be measured to form the reference capacitance. In this case, the reference solution may be a buffer solution having a low ion concentration capable of providing a sufficient length for the charge of the reactant depending on the binding of the specific substance to be sensed among the reactant and the biomaterial.

On the other hand, when the biomaterial 340 flows into the fluid tube 310 and a voltage is applied to the source electrode and the drain electrode 320, the biomaterial sensing biosensor is applied to the sensing region 330 as shown in (b). The sensing current can be measured to form the sensing capacitance.

Therefore, the biomaterial sensing biosensor may detect the biomaterial 340 by using the reference capacitance and the sensing capacitance. Specifically, the biomaterial sensing biosensor may count the biomaterial 340 by measuring the degree of change in the sensing capacitance from the reference capacitance. For example, since the sensing capacitance is excellent in the region in which the sensing region 330 is exposed, a change may occur when a specific material of the biological material 340 is captured in the reaction material and the sensing region 330 is shielded. As the degree of the sensing capacitance thus changed is compared with the reference capacitance, the count of a specific material of the biological material 340 may be performed.

In addition, the biomaterial sensing biosensor may capture only a specific material in response to the reactant in the biomaterial 340 using the reactant fixed in the sensing region 330.

Referring to FIG. 4, the biomaterial sensing biosensor according to another exemplary embodiment of the present invention may include a plurality of

fluid tubes

410 and 420. In this case, since a plurality of

sensing regions

430 and 440 are formed, a plurality of source and drain

electrodes

450 and 460 are also required.

For example, the first fluid tube 410 may be created to pass through the first sensing region 430 between the first source electrode and the drain electrode 450, and the second fluid tube 420 may be a second source. It may be generated to pass through the second sensing region 440 between the electrode and the drain electrode 460. In this case, the plurality of

fluid pipes

410 and 420 may be generated in parallel.

The plurality of

fluid tubes

410 and 420 generated in parallel may also be formed to include at least one refracting

portion

411 and 421 in order to adjust the inflow rate of the incoming biological material as described above. have. For example, each of the plurality of

fluid pipes

410 and 420 generated in parallel form at least a

portion

412 and 422 and a source electrode and a drain electrode formed in a direction perpendicular to the source and drain

electrodes

450 and 460. It is formed to include at least one

portion

413, 423 formed in a horizontal direction with respect to 450 and 460, and thus may be formed to include at least one

refractive portion

411 and 421.

Therefore, the entry speed of the biomaterial flowing into the plurality of

fluid pipes

410 and 420 generated in parallel can be controlled, and ambient noise can be suppressed to improve the detection accuracy of the biomaterial.

In addition, the biomaterial sensing biosensor further includes a supply unit for introducing the biomaterial into the plurality of

fluid pipes

410 and 420 and an outlet through which the reactant and the sensed biomaterial are discharged, thereby forming the biomaterial sensing biosensor system. Can be. In this case, the supply and outlet ports are shown in the embodiment formed for each of the plurality of fluid pipes (410, 420), but is not limited to this, but a plurality of fluid pipes (410, 420) is one supply and It may be formed to include one outlet.

In addition, although not shown in the figure, the biomaterial sensing biosensor system further includes a pump for supplying the biomaterial and the reference solution from each supply to the outlet so that the biomaterial and the reference solution flow in the plurality of

fluid tubes

410 and 420. It may include, and may further include a control unit for controlling the inflow and discharge of the biological material or reference solution, and detects the biological material.

5A to 5B are views illustrating a method of manufacturing a biomaterial sensing biosensor according to an embodiment of the present invention.

Referring to FIG. 5A, in the biomaterial sensing biosensor manufacturing system according to an exemplary embodiment, an oxide film 520 is formed on an entire surface of a substrate 510. Here, the substrate 510 may be a silicon substrate, and may be an n-type or p-type silicon substrate. However, the present invention is not limited thereto and may be formed of various materials such as titanium oxide, acrylic resin, epoxy resin or polyimide.

The oxide film 520 is a low dielectric constant dielectric material having a dielectric constant of 0-6. SiO ₂ , TiO ₂ , Si ₃ N ₄ , Al ₂ O ₃ , CeO ₂ , HfO ₂ , La ₂ O ₃ , Ta ₂ O ₅ , Y ₂ O ₃ , ZrO ₂ , ZrAlO, HfAlO, ZrTiO ₄ , SnTiO ₄ , or SrTiO ₃ . Here, the oxide film 520 may be formed by sputtering, e-beam evaporation, thermal evaporation, pulsed laser deposition, or plasma enhanced chemical vapor deposition. Conventional deposition methods such as may be used to deposit.

Subsequently, in the biomaterial sensing biosensor manufacturing system, the source electrode and the drain electrode 530 are spaced apart from each other on the substrate 510 on which the oxide film 520 is formed. The source electrode and the drain electrode 530 may be formed of a conductive material of a metal or an alloy such as Al, Ag, Au, Cu, or W. Here, the source electrode and the drain electrode 530 may be deposited on the substrate 510 on which the oxide film 520 is formed using a conventional deposition method such as sputtering or thermal deposition.

In this case, the biomaterial sensing biosensor manufacturing system may stack the insulating layer 540 to cover the source electrode and the drain electrode 530, respectively. Specifically, in the biomaterial sensing biosensor manufacturing system, an insulating film 540 is stacked on the entire surface of the oxide film 520 on which the source electrode and the drain electrode 530 are disposed, and based on the positions of the source electrode and the drain electrode 530. By etching at least a portion of the insulating film 540 stacked on the entire surface of the oxide film 520, the insulating film 540 may be stacked to cover the source electrode and the drain electrode 530, respectively. Accordingly, the biomaterial sensing biosensor manufacturing system etches the sensing region on the oxide film 520 by etching the region 541 between the source electrode and the drain electrode 530 of the insulating film 540 stacked on the front surface of the oxide film 520. 521 may be generated.

Referring to FIG. 5B, the biomaterial sensing biosensor manufacturing system includes a reaction material 550 that senses a biomaterial on a sensing region 521 formed in the oxide film 520 based on the positions of the source electrode and the drain electrode 530. Fix it. At this time, the biomaterial sensing biosensor manufacturing system determines the sensing region 521 to which the reactant is fixed as the region between the source electrode and the drain electrode 530, and based on the determined position of the sensing region 521, the reactant ( 550 can be fixed.

In addition, although not shown in the drawings, the reactant may be fixed on the sensing region 521 through a nano template. The nano template may be formed on the substrate 510 on which the oxide film 520 is formed using self-assembly of a block copolymer. Subsequently, the substrate 510 on which the nano-template is formed may be disposed in a solution containing the reactant to selectively attach the reactant to a desired region.

The biomaterial sensing biosensor manufacturing system then passes through the sensing region 521 and creates a fluid tube 560 to include at least one refracting portion for adjusting the inflow rate of the incoming biomaterial.

At this time, the biomaterial sensing biosensor manufacturing system generates the fluid tube 560 by attaching the polydimethylsiloxane layer 570 in which the fluid tube 560 is etched intaglio to the substrate 510 on which the oxide film 520 is formed. can do. Although not shown in the drawing, the biomaterial sensing biosensor manufacturing system forms a polymer mold in which the fluid tube 560 is embossed by embossing, and deposits and curls a polydimethylsiloxane material on the polymer mold. Fluid tube 560 may produce a polydimethylsiloxane layer 570 that is etched intaglio. Accordingly, the biomaterial sensing biosensor manufacturing system may generate the fluid tube 560 using the polydimethylsiloxane layer 570 generated as described above.

In particular, the biomaterial sensing biosensor manufacturing system generates at least a portion of the fluid conduit 560 in a direction perpendicular to the source electrode and the drain electrode 530, and the fluid conduit in a horizontal direction relative to the source electrode and the drain electrode 530. By creating at least a portion of the 560, the fluid tube 560 may be formed to include at least one refracting portion for controlling the rate of inflow of the biological material that is introduced therein.

In addition, the biomaterial sensing biosensor manufacturing system may form a plurality of fluid tubes 560 in parallel.

In addition, the biomaterial sensing biosensor manufacturing system may further generate a supply part, an outlet, a pump, and a controller, thereby manufacturing the biomaterial sensing biosensor system.

Although the embodiments have been described by the limited embodiments and the drawings as described above, various modifications and variations are possible to those skilled in the art from the above description. For example, the described techniques may be performed in a different order than the described method, and / or components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different form than the described method, or other components. Or even if replaced or substituted by equivalents, an appropriate result can be achieved.

Therefore, other implementations, other embodiments, and equivalents to the claims are within the scope of the claims that follow.

Claims

Board;

An oxide film formed on the entire surface of the substrate;

A source electrode and a drain electrode spaced apart from each other on the substrate on which the oxide film is formed;

A reaction material fixed on a sensing region generated in the oxide film based on positions of the source electrode and the drain electrode to sense a biological material; And

A fluid tube created to pass through the sensing region

Including,

The fluid tube is

And at least one refracting portion for adjusting the inflow rate of the biomaterial flowing into the fluid tube.
The method of claim 1,

The fluid tube is

And at least a portion generated in a direction perpendicular to the source electrode and the drain electrode and at least a portion generated in a horizontal direction with respect to the source electrode and the drain electrode.
The method of claim 1,

The fluid tube is

Bio-material detection biosensor is generated in a parallel form when a plurality is included.
The method of claim 1,

An insulating layer stacked to cover each of the source electrode and the drain electrode

Biomaterial detection biosensor further comprising.
The method of claim 1,

The fluid tube

A reference solution for sensing an electrochemical reaction between the biomaterial and the reactant is introduced to form a reference capacitance,

The biomaterial sensing biosensor in which the biomaterial for sensing the electrochemical reaction is introduced to form a sensing capacitance.
The method of claim 1,

A supply unit for introducing the biological material into the fluid tube; And

An outlet through which the reactant and the biological material sensed are discharged

Biomaterial detection biosensor further comprising.
The method of claim 6,

The supply unit

Introducing a reference solution for sensing an electrochemical reaction between the biomaterial and the reactant,

The outlet is

The biomaterial sensing biosensor for discharging the reaction solution and the reference solution sensed.
The method of claim 1,

The oxide film is

A biomaterial sensing biosensor formed of at least one of SiO_2, TiO_2, Si_3 N_4, Al_2 O_3, CeO_2, HfO_2, La_2 O_3, Ta_2 O_5, Y_2 O_3, ZrO_2, ZrAlO, HfAlO, ZrTiO_4, SnTiO_4, or SrTiO_3.
Forming an oxide film on the entire surface of the substrate;

Disposing a source electrode and a drain electrode spaced apart from each other on the substrate on which the oxide film is formed;

Fixing a reaction material for sensing a biomaterial on a sensing region generated in the oxide film based on positions of the source electrode and the drain electrode; And

Creating a fluid passage through the sensing region and including at least one refracting portion for adjusting the inflow rate of the incoming biological material

Biomaterial detection biosensor manufacturing method comprising a.
The method of claim 9,

Generating the fluid tube

Creating at least a portion of the fluid tube in a direction perpendicular to the source electrode and the drain electrode; And

Generating at least a portion of the fluid conduit in a horizontal direction with respect to the source electrode and the drain electrode

Biomaterial detection biosensor manufacturing method comprising a.
The method of claim 9,

Generating the fluid tube

Generating a plurality of fluid tubes in parallel when a plurality of them are included;

Biomaterial detection biosensor manufacturing method comprising a.
The method of claim 9,

Positioning the source electrode and the drain electrode spaced apart from each other

Stacking an insulating layer to cover each of the source electrode and the drain electrode

Bio-material detection biosensor manufacturing method further comprising.
The method of claim 12,

Fixing the reaction material

Etching the at least a portion of the insulating layer based on positions of the source electrode and the drain electrode to generate the sensing region in the oxide layer

Biomaterial detection biosensor manufacturing method comprising a.
The method of claim 9,

Generating the fluid tube

Attaching a polydimethylsiloxane (PDMS) layer in which the fluid tube is etched to the substrate on which the oxide layer is formed

Biomaterial detection biosensor manufacturing method comprising a.