WO2015180755A1 - Capteur optique pour machine de mesure tridimensionnelle ainsi que module d'éclairage pour un tel capteur optique et procédé de mesurage de taraudages ou de perçages d'une pièce usinée au moyen du capteur optique ou du module d'éclairage - Google Patents

Capteur optique pour machine de mesure tridimensionnelle ainsi que module d'éclairage pour un tel capteur optique et procédé de mesurage de taraudages ou de perçages d'une pièce usinée au moyen du capteur optique ou du module d'éclairage Download PDF

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Publication number
WO2015180755A1
WO2015180755A1 PCT/EP2014/060880 EP2014060880W WO2015180755A1 WO 2015180755 A1 WO2015180755 A1 WO 2015180755A1 EP 2014060880 W EP2014060880 W EP 2014060880W WO 2015180755 A1 WO2015180755 A1 WO 2015180755A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
optical element
light
workpiece
optical
Prior art date
Application number
PCT/EP2014/060880
Other languages
German (de)
English (en)
Inventor
Ludwin Monz
Thomas Engel
Original Assignee
Carl Zeiss Industrielle Messtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Industrielle Messtechnik Gmbh filed Critical Carl Zeiss Industrielle Messtechnik Gmbh
Priority to DE112014006706.7T priority Critical patent/DE112014006706B4/de
Priority to PCT/EP2014/060880 priority patent/WO2015180755A1/fr
Publication of WO2015180755A1 publication Critical patent/WO2015180755A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2425—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of screw-threads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores

Definitions

  • Optical sensor for a coordinate measuring machine and illumination module for such an optical sensor and method for measuring internal threads or boreholes of a workpiece with the optical sensor or lighting module
  • the invention relates to an optical sensor for a coordinate inatenmess réelle and a lighting module for such an optical sensor and a method for measuring internal threads or boreholes of a workpiece by means of the optical sensor or lighting module.
  • Deflection mirror used to direct the focus or the focus zone of the white light interferometer on a point or a region with a small lateral extent of the inner wall to measure the distance of this point or area of the inner wall.
  • the disadvantage is However, that for complete measurement of only one contour line of the inner wall, the periscope or the deflection mirror must be successively rotated in different rotational positions by a total of 360 ° and one measurement point must be recorded per rotational position. This results in a large amount of time for the complete measurement of one or more contour lines of the inner wall of a borehole or internal thread.
  • Object of the present invention is therefore to provide a sensor or a lighting module for a coordinate measuring machine for measuring boreholes or internal threads, the or over the prior art, a high absolute
  • an optical sensor comprising at least one light source and at least one detector and optical elements for guiding the light on the one hand on the way from the at least one light source to the surface of the workpiece to be measured and on the other hand on the way back from the surface of the to be measured Workpiece to the at least one detector, wherein some of said optical elements both for the beam guidance on the way and for the
  • Beam guide to be used on the way back and wherein at least one of said optical elements is a deflecting element on the way out for a
  • Deflection of the light on the surface of the workpiece to be measured and on the way back for a deflection of the light to the at least one detector wherein on the way through the deflecting the focus area of the sensor is at least partially arcuate and wherein the at least one detector in terms of area Detection of intensity signals of light from this at least partially arcuate focus area is formed, wherein a diffractive optical element and / or an optical element with a freeform surface at least on the way of the light to Surface of the workpiece between the at least one light source and the surface of the workpiece is arranged, wherein between the at least one light source and the diffrativen optical element and / or the optical element with the free-form surface is arranged a movable and / or variable optical element and wherein by means of of the movable and / or variable optical element of the location of the light on the diffractive optical element and / or the optical element with the
  • Freiformober Structure can be changed at least on the way from the at least one light source to the surface of the workpiece to be measured. Furthermore, the object is achieved by an illumination module for an optical sensor for detecting surface coordinates of a workpiece by means of a coordinate measuring device comprising at least one light source and optical elements for guiding the light on the one hand on the way from the at least one light source to the surface of the workpiece to be measured and on the other hand, on the way back from the surface of the workpiece to be measured to at least one detector of the optical sensor, wherein some of said optical elements are used both for the beam on the way out and for the beam path in the return path and wherein at least one of said optical Elements is a deflection that provides on the way for a deflection of the light on the surface of the workpiece to be measured and on the way back for a deflection of the light to the at least one detector, wherein on the way through the deflection
  • the diffractive optical element and / or an optical element with a free-form surface is
  • a movable and / or variable optical element is arranged and wherein with the aid of the movable and / or variable optical element of the impact of the light on the diffractive optical element and / or optical element with the free-form surface can be changed at least on the way from the at least one light source to the surface of the workpiece to be measured.
  • different focal positions can be assigned to different surfaces of the surface of a diffractive optical element and / or an optical element having a free-form optical system, such that the light of the light source can be detected by a movable and / or changeable optical element of the sensor or illumination module according to the invention
  • Different locations can be supplied to change the focus position of the sensor or lighting module.
  • the movable and / or variable optical element is used on the way of the light from the light source to the surface of the workpiece and between the diffractive optical element and / or the optical element with free-form optics and the light source, the influence of a reduced Deformation of the movable and / or variable optical element on the measurement error of the sensor compared to the prior art considerably.
  • the sensor according to the invention or the illumination module according to the invention has the advantage that much lighter moving optical elements can be used as a cone to change the focal position, thereby shortening the time required to change the focus position.
  • so-called multi-mirror arrangements Mo lti -M i rror- array s, MMA
  • MMA multi-mirror arrangements
  • the sensor according to the invention or the illumination module according to the invention is capable of, for example
  • the diffractive optical element has a rotationally symmetrical diffraction characteristic and / or has the optical element with a
  • Drill holes or internal threads it is useful to use a closed as possible annular focus area around the sensor for the detection of surface coordinates of the holes or internal threads.
  • a focus range can be in the sensor according to the invention by a diffractive optical element with a
  • the optical element having a free-form surface has an aspherical free-form surface, wherein different zones of incidence of the light with mutually different lateral distances to the symmetry axis of the diffractive optical element and / or the optical element with freeform surface different focus positions for bundling of the zones associated with passing light.
  • Curve section of a spiral where the spiral is given from the group: Corny, Euler or Clothoid spiral. Spirals usually point along their arc length continuously changing diameters in your diameter.
  • Free-form element which follows along a main direction of curvature of a spiral shape, it is thus possible to continuously generate changing focal positions depending on the lateral zone distance.
  • the optical element with free-form surface in the form of a cylinder is designed as a deflecting element, the underside of which with a
  • Mirror coating is provided and is formed by the free-form surface.
  • Such an optical element has the advantage that the mirrored free-form surface is protected by the cylinder when entering bores or internal threads, so that this sensitive surface is not scratched in collisions with the workpiece.
  • the movable optical element is given by an axicon movably mounted along its axis of symmetry.
  • Such an optical element can be produced inexpensively.
  • variable optical element is a
  • MMA Micro Mirror Array
  • the light source is given by a white light source, in particular a superluminescent diode
  • the sensor or the illumination module comprises a beam splitter, a collimating lens and at least two for the
  • the senor can be called a two-dimensional confocal
  • the Distance sensor in particular operated as a chromatic confocal sensor.
  • the sensor can be configured as a so-called white light interferometer due to the white light source.
  • the movable and / or variable optical element interacts with the latter diffractive optical element and / or the optical element with the free-form surface made a change in the focus position.
  • the senor or the illumination module has a beam splitter, which proportionally splits the light arriving from the light source into a detection beam path, at the end of which the surface of the workpiece to be measured is located, and a reference beam path, at whose end there is a reference mirror.
  • This splitting of the light of the light source into a detection beam path and a reference beam path through a beam splitter allows the use of interferometri see
  • the beam splitter brings together the light reflected from the reference mirror and the light reflected from the surface of the workpiece in the direction of the detector so that the composite signal is emitted from the detector at the detector
  • the reference mirror may be changed in its distance from the beam splitter with time, whereby the composite signal at the detector as
  • Interference signal in the time domain (English time domain, TD) can be analyzed. Due to the variable reference mirror, the measuring method of white light interferometry known under the heading TD-OCT is made possible in connection with the sensor or illumination module according to the invention.
  • means for spectrally separating the composite signal are provided between the beam splitter and the detector so that the composite signal can be analyzed at the detector as an interference signal (English frequency domain, FD) decomposed into a plurality of spectral channels. Due to the means for spectral separation, the known under the keyword FD-OCT measurement method of
  • Lighting module allows.
  • the sensor or the illumination module has a
  • Lighting module can be replaced on the sensor.
  • the different lighting modules can be designed for different diameters or for different measuring methods.
  • the object of the present invention is further solved by a method
  • focal positions can be assigned to different surfaces of a diffractive optical element and / or an optical element having a freeform optical system, such that the light of the light source can be detected by a movable and / or changeable optical element of the sensor or illumination module according to the invention
  • Different locations can be supplied to change the focus position of the sensor or the lighting module.
  • Distance to the sensor or lighting module is changed continuously or in individual steps to a large distance, so that during this scan always different sub-areas of the surface to be measured, the distances just set Corresponding distance of the focal position, can be detected by the sensor or the lighting module.
  • intensity signals from the focus area of the sensor or the illumination module are detected by a detector of the sensor configured to detect intensity signals as a function of the position of the movable and / or variable optical element of the sensor or of the illumination module and / or in dependence on the position of a reference mirror, which is movable in its normal direction, of the sensor and / or in
  • the second step is for a focus area changed in its lateral distance from the sensor or illumination module while maintaining the position approached in the first step or the first step for another desired position within the borehole or internal thread in the case of FIG Maintaining the position set in the second step of the movable and / or variable optical element of the sensor or the lighting module repeatedly carried out until in the subsequent third step, the complete information about the surface data of the section to be measured of the borehole or internal thread is present ,
  • Thread flanks and the thread depths z obtained. Due to the large difference between core and outer diameter (nominal diameter) with internal threads, it is usually not possible to work with only one focus position for a survey. It is understood that the scan along the axis by the change in position of the sensor or the
  • Illumination module can be performed by means of the coordinate measuring machine and the focus scan of the sensor or lighting module independently and in any combination with each other to obtain complete information about the surface coordinates of the internal thread.
  • Figure 1 is a schematic representation of an optical sensor of the prior
  • FIG. 11 is a schematic representation of a first embodiment of
  • Figure 3 is a schematic representation of a second embodiment of the
  • inventive sensor or lighting module with a multi-mirror arrangement and a diffractive optical element
  • Figure 4 is a schematic representation of a third embodiment of
  • inventive sensor or lighting module with a multi-mirror arrangement and a mirrored free-form surface
  • Figure 5 is a schematic representation of a fourth embodiment of the
  • inventive sensor or lighting module as White light interferometer with a multi-mirror arrangement and a mirrored freeform surface
  • FIG. 6 is a schematic representation of another invention
  • Illumination module for an optical sensor.
  • FIG. 1 shows a prior art optical sensor 30 for a coordinate measuring device for detecting surface coordinates of a workpiece 7 comprising at least one light source 1 and at least one detector 10 and optical elements 2, 3, 4, 5, 6 and 9 for guiding the Light on the one hand on the way from the at least one light source 1 on the surface 7a of the workpiece to be measured 7 and on the other hand on the way back from the surface 7a of the workpiece to be measured 7 to the at least one detector 10, wherein some of said optical elements 4, 5th , 6 and 6a are used both for the beam guidance on the way out and for the beam guidance on the way back and wherein at least one of said optical elements is a deflection element 6a on the way out for a deflection of the light on the surface 7a of the to be measured workpiece 7 and on the way back for a deflection of the light to the at least one Detek tor 10, wherein on the way through the deflecting element 6a, the focus area of the sensor 30 is at least partially arcuate and wherein the at least
  • optical sensor 30 shown in FIG. 1, together with the reference symbols, corresponds to the sensor disclosed in FIG. 11 of EP 2 093 536 A, only the reference symbol 7a for the surface of the workpiece 7 has been added. Further, the optical element 6 in the
  • Figure 1 not in a stepped form as shown in Figure 1 1 of EP 2 093 536 AI but as a solid cylinder.
  • FIG. 1 in contrast to FIG. 11, more space has been allocated for the light path between the collimation lens 2 and the axicon 3.
  • Figure 1 to Figure 1 1 of EP 2 093 536 AI results from the fact that the position of the aperture 8 in Figure 1 1 below the lens 9 corresponds to the position of a pupil plane and the position of the aperture 8 in of the present Figure 1 was selected above the lens 9 according to the location of the smallest constriction of the light beams.
  • FIG. 11 of EP 1 093 536 A1 light beams are shown above the beam splitter 4, which do not exist in reality.
  • the sensor 30 shown in Figure 1 is particularly suitable for measuring the
  • the sensor 30 is capable of fully projecting the focused on the inner wall or surface 7 a in the form of a ring focus area of the sensor 30 by means of only one measurement on the detector 10.
  • the light of the light source 1 is first collimated by a collimating lens 2, that is aligned almost parallel to the optical axis.
  • a subsequent axicon 3 ensures a decomposition of the parallel aligned light in a circumferentially closed ring bundle, wherein the ring bundle subsequently has a constant inclination to the optical axis.
  • a beam splitter 4 following the axicon 3 in the direction of the light deflects the ring bundle in the direction of a lens 5.
  • axicon 3 Due to the fact that the axicon 3 is approximately at the plane of the front focal length of the subsequent lens 5, those light beams of the ring bundle which have previously passed approximately through the tip of the axicon and thus from a point of the optical axis take their exit, aligned by the lens 5 parallel to the optical axis.
  • these rays pass through the plano-optics following the lens 5, in particular the one into one Transparent cylinder 6 embedded or incorporated deflection cone 6a almost perpendicular to the inner wall to be measured 7a of the borehole or workpiece 7 and are therefore reflected in itself, whereby these rays occupy the same path for the outward and return path between beam splitter 4 and surface 7a , On the way back, however, these beams pass through the beam splitter 4 and reach the detector 10.
  • Embodiment be successively staggered aperture as another option specific selection of inclined or skewed rays disclosed. However, this solution results in greater light losses due to the apertures.
  • the correct focus position in the focus variation can also be determined confocally by means of one or more apertures 8.
  • the focus is not optimized on the sharpness of the image but on its intensity.
  • Diameter of the aperture 8 depending on the selected focus position is known from digital photography.
  • Focus position of the sensor 30 would not change this, since this depends only on the focal length of the lens 5 and possibly also in addition to the distance of the deflection cone 6a to the rest of the sensor.
  • all rays emanating from a pupil plane accumulate in one and the same field level, those with a large angle in the pupil gather at a large field height and the small angle in the pupil accumulate at a small field height.
  • FIG. 2 shows a first embodiment of the sensor 31a or lighting module 41a according to the invention, which additionally has an axially movable axicon 3 and a diffractive optical element 5f or optical fiber 5f shown in broken lines in relation to the sensor 30 of the prior art Element having a free-form surface 5f.
  • the illumination module 41 a is the part of the sensor 31 a shown in the lower part of FIG. 2.
  • the dashed line between the upper part of the sensor 3 la from the lens 9 upwards and the illumination module 41 a from the aperture 8 downwards represents a possible and useful separation plane between these two parts of the sensor 31 a.
  • an exchange interface for replacement or coupling different lighting modules to be provided to the sensor 31 a is provided to the sensor 31 a.
  • FIGS. 3 to 5 have corresponding parting planes for exchanging or coupling different inventive illumination modules to sensors according to the invention.
  • FIG. 6 shows an alternative
  • Lighting module 41 e which is for replacement or coupling to the
  • inventive sensor 31 e is provided with an alternative parting plane.
  • FIG. 2 This is shown in FIG represented graphically that the rays of the Axikonspitze, which have formed in Figure 1 nor the outer edge of the ring bundle on the subsequent lens 5, in Figure 2 now represent the inner edge of the ring bundle on the subsequent lens 5.
  • the ring bundle passes through a region of the lens 5 which is located further outside than in FIG. 1.
  • rays of the same inclination in the pupil meet with ideal lenses according to the Fourier relation at the same field point.
  • a real lens differs slightly from this ideal because of its aberrations, and in particular the aberration of spherical aberration is responsible for collimating rays of light which meet a lens farther out at a focal point closer to the lens.
  • Focus deviation of the real lens 5 from an ideal lens due to the spherical aberration is represented in FIG. 2 as a shift of the focal position by the vector b. With the help of this changed focus position, it would then be possible to measure another hole 7 with a smaller diameter. Such a borehole is shown by dashed lines in FIG. According shortened to the sensor 30 out
  • Focus position also reduces the diameter of the borehole on the detector 10 by the vector c.
  • the vector c is exaggerated in the figures and therefore not
  • the lens 5 is also provided in the optical sensor 30 and the optical sensor according to the invention 31 a for imaging on the detector 10 and optically selected so that it does not have a large spherical aberration, which the imaging and the data acquisition on the detector 10 would complicate.
  • the strong focus effect of the lens 5 shown in FIG. 2 in the prior art sensor 30 is, for example, insufficient to achieve the variation of several millimeters in the focus position necessary for the measurement of an internal thread
  • an optical element 5f which, instead of or in addition to the lens 5, varies the focal position by a plurality
  • Such an element 5 f can now be a diffractive optical element (DOE) and / or an optical element with a free-form optical system.
  • DOE diffractive optical element
  • Both mentioned optical elements or an element which combines both properties mentioned are or will be able to provide a corresponding focus depending on the respective impact of the rays on the element.
  • the optical element with free-form optics it would be conceivable, for example, to choose a rotationally symmetrical aspherical surface form analogous to the Schmidt plate known for mirror telescopes. Such a Schmidt plate can be produced inexpensively.
  • holograms in particular so-called computer-generated holograms (CGH) are subsumed in the context of this application under the term diffractive optical elements.
  • the inventive sensor 31a or the illumination module 41a according to the invention of FIG. 2 is thus characterized in that a diffractive optical element 5f and / or an optical element with a free-form surface 5f at least on the way of the light to the surface 7a of the workpiece 7 between the at least a light source 1 and the surface 7a of the workpiece 7 is arranged, wherein between the at least one light source 1 and the diffrativen optical element 5f and / or the optical element with the free-form surface 5f, a movable and / or variable optical element 3 is arranged and wherein Help of the movable and / or variable optical element 3 of the location of the light on the diffractive optical element 5f and / or the optical element with the free-form surface 5f changed at least on the way from the at least one light source 1 to the surface 7a of the workpiece
  • the focus variation amounts to between 0.5 and 200 mm in order to both
  • Wavelength range manufacturable For example, injection molds for producing aspherical plastic lenses for digital cameras have been known for many years.
  • an optical element with a free-form optics 5f and toroidal optical element such as a ring lens or an arrangement of several nested one another understood separate ring lenses. Accordingly, an optical element with a free-form optics 5f and toroidal optical element such as a ring lens or an arrangement of several nested one another understood separate ring lenses. Accordingly, an optical element with a free-form optics 5f and toroidal optical element such as a ring lens or an arrangement of several nested one another understood separate ring lenses. Accordingly, an optical element with a free-form optics 5f and toroidal optical element such as a ring lens or an arrangement of several nested one another understood separate ring lenses. Accordingly, an optical element with a free-form optics 5f and toroidal optical element such as a ring lens or an arrangement of several nested one another understood separate ring lenses. Accordingly, an optical element with a free-form optics 5f and toroidal optical element such as a ring lens or an arrangement
  • Freeform optics 5f also consist of juxtaposed individual optical elements whose optically effective surfaces represent subsections of a freeform surface.
  • the evaluation of the intensity signals recorded at the detector 10 of the sensor 3 1 a according to the invention can be carried out according to the methods already discussed above in connection with the sensor 30 of FIG. 1.
  • a ring aperture 8 instead of the diaphragm 8 shown in Figure 2 are used.
  • FIG. 3 shows a second exemplary embodiment of a sensor 31b according to the invention or an illumination module 41b in which the axially movable axicon 3 has been exchanged for a variable multiple mirror arrangement (MMA).
  • This multiple mirror arrangement MMA can vary by other angular positions of the individual micro-tilting mirror the impact on the optical element 5f and thus its focus position. Since multi-mirror arrangements for projectors are well known in their mode of operation, a detailed discussion in the context of this application is dispensed with. Multiple mirror arrangements MMAs can be obtained as separate units cost-effectively from different manufacturers including corresponding control software.
  • FIG. 4 shows a third exemplary embodiment of a sensor 31c or illumination module 41c according to the invention in which, compared to FIG. 3, the function of the optical element 5f has been integrated into the surface shape of the deflection element 6f.
  • This deflection element 6f has a free-form surface whose focal positions are dependent on which points of incidence the deflecting element 6f deflects the rays.
  • a deflection element 6f in which the rotationally symmetrical and aspherical free-form surface having a plane containing the symmetry axis of the freeform surface has an intersection curve and this intersection curve at least partially a
  • Curve section corresponds to a spiral and the spiral is given from the group: Corny, Euler or clothoid spiral, offers the possibility of continuous with the
  • the freeform surface can also be formed on the upper side and / or the circumferential surface of the cylinder 6.
  • the focus variation can also be realized by a diffractive optical element formed on the upper side and / or the lateral surface of the cylinder 6.
  • correspondingly differently shaped cylinders 6 can be exchanged for one another between the elements 4 and 5 or the elements 5 and 6 by means of a swiveling element 1, not shown in the figures.
  • mechanical protective sleeves for the cylinder 6 can be provided. When using optically transparent material for these mechanical protective sleeves different wall thicknesses and / or different
  • Borehole diameter can be used. In this respect are accordingly interchangeable
  • the diffr active optical element 5f has a rotationally symmetric diffraction characteristic and / or has the optical element with a free-form surface 5f; 6f a rotationally symmetric
  • the optical element with freeform surface 6f in the form of a cylinder 6 in the optical sensors or lighting modules according to the invention of Figures 4 to 6 is designed as a deflection, the underside is provided with a mirror coating and is formed by the free-form surface 6f.
  • the mirrored freeform surface 6f is thus sufficiently protected by the surrounding cylinder 6 from scratches and other damage in collisions with the workpiece 7.
  • 5 shows a further embodiment of a sensor 3 dd or illumination module 41 d based on white-light interferometry, also known as optical coherence radar or OCT
  • the basic structure of the sensor 31 d shown in FIG. 5 corresponds to the sensor 31 c shown in FIG.
  • a multi-mirror arrangement MMA, in conjunction with a deflection element 6f with free-form surface, provides for a
  • Embodiment of the sensor 3 Id of Figure 5 for the fact that only a proportion of light coming from the light source 1 is deflected in the detection beam path in the direction of the element 6f. The remaining part of the light passes through the beam splitter 4a and thus enters the reference beam path in the direction of a reference mirror R. It should be noted that due to the representation of FIG. 5 in DIN A4 format, the reference beam path is shown shortened relative to the detection beam path. With the basic structure of a Michelson interferometer shown in FIG.
  • the intensity signals at the detector 10 can be evaluated as a function of the reference mirror position.
  • the intensity signals of the detector 10 result from a superposition of the reflected light coming from the reference beam path and the detection beam path through the beam splitter 4a by means of the lens 9. If the light paths in the reference beam path and in the detection beam path are over, a constructive interference of the light results and thus a Intensity signal at the detector. With increasing path length difference ⁇ between the detection beam path and the reference beam path, however, this intensity signal at the detector decreases. Consequently, with the optical sensor 31d shown in FIG.
  • the composite signal at the detector 10 can be analyzed as an interference signal in the time domain (TD) as a function of the time-varying distance of the reference mirror R to the beam splitter 4a.
  • the reference mirror R is for this purpose, for example, by piezo actuators
  • Vibrations excited about its zero position and the corresponding interference signal will determine depending on the position of the mirror.
  • the zero position of the reference mirror R can be tuned by the piezo actuators or other additional actuators to the respective set focus position. Furthermore, it is conceivable alternatively a
  • each stage corresponds to a different focus position.
  • Reference mirror R of the optical sensor 31 d between the beam splitter 4a and the detector 10 also have means for spectral separation of the composite signal, so that the composite signal as a decomposed into several spectral channels interference signal (English frequency domain, FD) are analyzed at the detector 10 can.
  • the detector 10 may be subdivided into a plurality of areas which receive the different interference signals for different wavelengths, or a plurality of detectors 10 may be used next to each other or spatially offset from one another.
  • FIG. 6 shows a further illumination module 41e according to the invention for a sensor 31e according to the invention.
  • the illumination module 41e of FIG. 6 can be retrofitted, so that it can be connected to already existing optical systems.
  • the illumination module 41e shown in FIG. 6 differs from the illumination modules shown in FIGS. 2 to 5 in that it does not contain the lens 5 and thus the remaining part of the sensor 3 le with the lens 5 even without the illumination module forms a complete optical system optical measurement of workpieces 7 forms.
  • the illumination module 41e has a not shown
  • FIGS. 2 to 6 consequently disclose illumination modules 41a to 41e for an optical sensor 3 1 a to 3 1 e for detecting surface coordinates of a workpiece 7 by means of a coordinate measuring machine comprising at least one light source 1 and optical Elements 2, MMA; 3, 4; 4a; 5; 6, 6a; 6f for guiding the light on the one hand on the way from the at least one light source 1 on the surface 7a of the to be measured
  • the focal region of the sensor 3a to 31e is at least partially arc-shaped, and wherein a diffractive optical element 5f and / or an optical element with a free-form surface 5f; 6f is arranged at least on the way of the light to the surface 7a of the workpiece 7 between the at least one light source 1 and the surface 7a of the workpiece 7, wherein between the at least one light source 1 and the diffrativen optical element 5f and / or the optical element with the
  • Free-form surface 5f; 6f a movable and / or variable optical element MMA; 3 is arranged and wherein by means of the movable and / or variable optical element MMA; 3 the location of the light on the diffractive optical element 5f and / or the optical element with the free-form surface 5f; 6f can be changed at least on the way from the at least one light source 1 to the surface 7a of the workpiece 7 to be measured.
  • Lighting modules 41 a to 41 e an axicon 3 instead of a multi-mirror assembly MMA for varying the Lichtstrah running hangers and vice versa a multi-mirror assembly MMA instead of an axicon 3 can be used.
  • Lighting modules 41 a to 41 e a diffractive optical element 5f and / or an optical element with free-form surface 5f instead of an optical deflection element with free-form surface 6f for focus variation and vice versa can be used.
  • inventive sensors 31a; 31b; 31 c and 31 e and lighting modules 41 a; 41b; 41c and 41e alternatively to that in the
  • Embodiment of Figure 4 described superluminescent diode laser, LED (UV, VIS, IR), incandescent, halogen or (short) arc lamps can be used as the light source 1.
  • LED UV, VIS, IR
  • incandescent, halogen or (short) arc lamps can be used as the light source 1.
  • a broadband light source By using a broadband light source, a targeted longitudinal chromatic aberration of the optics used in the inventive sensors 31 a; 31b; 31 c and 31 e and lighting modules 41 a; 41b; 41c and 41e to the effect that a confocal measurement technique that images of images with color separations or by pixel-by-pixel color measurement are carried out with corresponding sensors.
  • the different wavelengths due to their different scattering properties can also be used for spatially resolved roughness measurements, for example via the parallel measurement of different color separations.
  • Coordinate measuring device measured by the sensor or the illumination module is moved by the coordinate measuring machine to a desired position within the borehole or internal thread of the workpiece (7) and in a second step by means of a movable and / or variable optical element (MMA; 3) of the sensor or of the illumination module, the location of incidence of the light of the at least one light source (1) on a diffractive optical element (5f) and / or an optical element with the free-form surface (5f; 6f) of the sensor or the
  • Illuminating module is changed at least on the way from the at least one light source (1) to the surface (7a) of the workpiece to be measured (7) such that the provided for surveying portions of the surface (7a) of the workpiece in the
  • Focus range of the sensor or lighting module arrive.
  • intensity signals from the focus area of the sensor or the illumination module are detected by a detector (10) designed to detect intensity signals as a function of the position of the movable and / or variable optical element (MMA; Lighting module and / or depending on the position of a movable in its normal direction
  • the second step for one in its lateral distance to the sensor or
  • Lighting module changed focus area in the maintenance of the approached in the first step position or the first step for another desired position within the internal thread while maintaining the second step set position of the movable and / or variable optical element (MMA; 3) of the sensor or Illuminating module are repeatedly carried out until in each subsequent third step, the complete information about the surface data of the section of the internal thread to be measured is present. These surface data can then be analyzed by known 3D point cloud mapping techniques
  • Determining the geometry of the measurement object into the corresponding geometric elements such as circle, ellipse, cylinder, ellipsoid, etc. are decomposed.
  • the method according to the invention or the sensors according to the invention can be calibrated or referenced using thread standards and / or can be returned to a normal.
  • workpieces are placed with several well-known internal threads on the measuring table of a coordinate measuring machine and it is carried out the inventive method by means of the sensors according to the invention and the detected dimensions of the internal thread are calibrated on the basis of the known dimensions of the internal thread.

Abstract

L'invention concerne un capteur optique (31a; 31b; 31c; 31d; 31e) ou un module d'éclairage (41a; 41b; 41c; 41d; 41e) destiné à une machine de mesure tridimensionnelle. Un élément déviateur (6a; 6f) est disposé dans le trajet aller de la lumière afin de la dévier sur la surface (7a) d'une pièce usinée (7) à mesurer, l'élément déviateur (6a; 6f) donnant une forme au moins en partie incurvée à la zone focale du capteur (31a; 31b; 31c; 31d; 31e). Un détecteur (10) du capteur (31a; 31b; 31c; 31d; 31e) possède une configuration plane pour détecter des signaux d'intensité lumineuse venant de cette zone focale et un élément optique diffringent (5f) et/ou un élément optique ayant une surface de forme libre (5f; 6f) est disposé dans le trajet aller. Un élément optique mobile et/ou variable (MMA; 3) est disposé entre la source de lumière (1) et l'élément optique diffringent (5f) et/ou l'élément optique ayant une surface de forme libre (5f; 6f). Cet élément optique mobile et/ou variable (MMA; 3) permet de faire varier le lieu d'incidence de la lumière sur l'élément optique diffringent (5f) et/ou sur l'élément optique ayant une surface de forme libre (5f; 6f) dans le trajet aller de la lumière.
PCT/EP2014/060880 2014-05-27 2014-05-27 Capteur optique pour machine de mesure tridimensionnelle ainsi que module d'éclairage pour un tel capteur optique et procédé de mesurage de taraudages ou de perçages d'une pièce usinée au moyen du capteur optique ou du module d'éclairage WO2015180755A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112014006706.7T DE112014006706B4 (de) 2014-05-27 2014-05-27 Optischer Sensor für ein Koordinatenmessgerät sowie Beleuchtungsmodul für einen solchen optischen Sensor und Verfahren zur Vermessung von Innengewinden oder Bohrlöchern eines Werkstücks mit dem optischen Sensor bzw. Beleuchtungsmodul
PCT/EP2014/060880 WO2015180755A1 (fr) 2014-05-27 2014-05-27 Capteur optique pour machine de mesure tridimensionnelle ainsi que module d'éclairage pour un tel capteur optique et procédé de mesurage de taraudages ou de perçages d'une pièce usinée au moyen du capteur optique ou du module d'éclairage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/060880 WO2015180755A1 (fr) 2014-05-27 2014-05-27 Capteur optique pour machine de mesure tridimensionnelle ainsi que module d'éclairage pour un tel capteur optique et procédé de mesurage de taraudages ou de perçages d'une pièce usinée au moyen du capteur optique ou du module d'éclairage

Publications (1)

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WO2015180755A1 true WO2015180755A1 (fr) 2015-12-03

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Country Status (2)

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WO (1) WO2015180755A1 (fr)

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DE102021208378A1 (de) 2021-08-03 2023-02-09 Sms Group Gmbh Anordnung zur optischen Vermessung eines Gewindes an einem Ende eines Metallrohres oder an einer Muffe sowie Verfahren zur Vermessung
EP4336140A1 (fr) * 2022-09-12 2024-03-13 3D.aero GmbH Procédé d'évaluation du résultat d'un forage effectué sur une pièce

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