WO2015180403A1 - Écran d'affichage souple et son procédé de fabrication, et dispositif d'affichage - Google Patents

Écran d'affichage souple et son procédé de fabrication, et dispositif d'affichage Download PDF

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Publication number
WO2015180403A1
WO2015180403A1 PCT/CN2014/089819 CN2014089819W WO2015180403A1 WO 2015180403 A1 WO2015180403 A1 WO 2015180403A1 CN 2014089819 W CN2014089819 W CN 2014089819W WO 2015180403 A1 WO2015180403 A1 WO 2015180403A1
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WO
WIPO (PCT)
Prior art keywords
protective layer
flexible
display panel
flexible substrate
layer
Prior art date
Application number
PCT/CN2014/089819
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English (en)
Chinese (zh)
Inventor
刘陆
谢明哲
Original Assignee
京东方科技集团股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 京东方科技集团股份有限公司 filed Critical 京东方科技集团股份有限公司
Publication of WO2015180403A1 publication Critical patent/WO2015180403A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body

Definitions

  • Embodiments of the present invention relate to a flexible display panel, a method of fabricating the same, and a display device.
  • the substrate of the display panel of the flexible display device is a flexible substrate.
  • the flexible display panel is mainly produced by carrying a flexible substrate on a carrier substrate (generally a glass substrate), then forming a display component on the flexible substrate, and finally the flexible The substrate and the glass substrate are separated to obtain a flexible display panel.
  • a flexible substrate 11 is formed on a glass substrate 10
  • a protective layer 12 is formed over the flexible substrate 11, and then a display component 13 is formed on the protective layer 12, and finally The flexible substrate 11 is separated from the glass substrate 10 to obtain a flexible display panel.
  • the protective layer is mainly used to prevent penetration of water and oxygen, thereby avoiding negatively affecting performance and service life of the display component.
  • the existing separation method of the flexible substrate and the glass substrate is usually performed by laser irradiation. As shown in FIG. 1, the separation interface between the flexible substrate and the glass substrate is broken by the laser to achieve the separation effect, but long-time laser high-temperature irradiation is possible. Damage to the display components, affecting the stability of the process, and high equipment costs.
  • a debonding process can also be used to separate the flexible substrate and the glass substrate.
  • the adhesive used in the degumming technique is an acrylic curing resin, but the adhesive is not suitable for a high temperature process of 200 ° C or higher.
  • Embodiments of the present invention provide a flexible display panel, a manufacturing method thereof, and a display device, wherein a separation process of the flexible display panel and the glass substrate is simple in the manufacturing process of the flexible display panel, and the yield is high, and the separation process is avoided.
  • the negative effects of display panel performance on the display panel are simple in the manufacturing process of the flexible display panel, and the yield is high, and the separation process is avoided.
  • an embodiment of the present invention provides a flexible display panel including a first protective layer, a second protective layer, a flexible substrate, and a display component, wherein the flexible substrate is located on the first protective layer and Between the second protective layers, the display component is formed on the second protective layer.
  • the flexible substrate is covered by the first protective layer and the second protective layer.
  • an embodiment of the present invention provides a method for fabricating a flexible display panel, comprising: sequentially forming a primer layer, a first protection layer, a flexible substrate, a second protection layer, and a display component on the carrier substrate; The underlying layer is separated from the carrier substrate to obtain the flexible display panel, wherein the flexible display panel comprises a first protective layer, a flexible substrate, a second protective layer, and a display component.
  • the material forming the underlayer may be the same as the material of the flexible substrate, for example, may be polyimide.
  • removing the underlayer comprises: dissolving the underlayer with an alkali solution.
  • the lye is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide.
  • Ammonium aqueous solution is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide.
  • the primer layer is dissolved with an alkali solution at a temperature of 15-80 °C.
  • the flexible substrate is covered by the first protective layer and the second protective layer.
  • dissolving the primer layer with an alkali solution comprises: spraying an alkali solution on the edge of the primer layer, or immersing the carrier substrate in the alkali solution.
  • an embodiment of the present invention provides a display device, including any of the flexible display panels provided by the embodiments of the present invention.
  • FIG. 1 is a schematic cross-sectional view of a conventional flexible display panel
  • FIG. 2 is a schematic cross-sectional view of a flexible display panel according to an embodiment of the present invention.
  • FIG. 3 is a schematic cross-sectional view of another flexible display panel according to an embodiment of the present invention.
  • FIG. 4 is a schematic cross-sectional view showing a method of manufacturing a flexible display panel according to an embodiment of the present invention, before the underlayer is separated from the carrier substrate.
  • the embodiment of the present invention provides a flexible display panel, as shown in FIG. 2, including a first protective layer 121, a second protective layer 122, a flexible substrate 11, and a display component 13, wherein the flexible substrate 11 is located
  • the display component 13 is formed on the second protective layer 122 between the first protective layer 121 and the second protective layer 122.
  • a flexible display panel includes a first protective layer and a second protective layer, and the second protective layer is located between the flexible substrate and the display component for preventing water and oxygen Infiltration, to avoid negatively affecting the performance and service life of the display component; a first protective layer is also disposed under the flexible substrate to protect the flexible substrate from damage.
  • the "upper” and “lower” in the embodiment of the present invention are based on the order in which the display panel is manufactured.
  • the upper pattern refers to a pattern formed later
  • the lower pattern refers to a pattern formed earlier. .
  • the flexible substrate 11 is covered by the first protective layer 121 and the second protective layer 122 . Avoid damage to the flexible substrate during the fabrication of the flexible display panel.
  • the flexible display panel generally has an encapsulation layer on the display component, and the encapsulation layer is used to isolate the display component from the air to prevent water oxygen and other fine dust from adversely affecting the display component. Work performance.
  • the flexible display panel may also include other thin film or layer structures, such as a flexible display panel having a touch function, and a touch electrode layer or the like is further disposed on the carrier substrate, which is not enumerated herein.
  • the invention of the embodiment of the present invention is taken as an example.
  • the display component according to the embodiment of the present invention may be a thin film transistor, a gate line, a data line, a pixel electrode, etc., which is not limited by the embodiment of the present invention, and any component that realizes the display function of the display panel is It can be disposed on the flexible substrate 11 as a display component.
  • An embodiment of the present invention provides a display device, including any of the flexible display panels provided by the embodiments of the present invention.
  • the display device may be a display device such as an electronic paper, an OLED (Organic Light-Emitting Diode) display, or any display product or component such as a television, a digital camera, a mobile phone, a tablet, or the like including the display device.
  • OLED Organic Light-Emitting Diode
  • An embodiment of the present invention provides a flexible display panel, which can be used to fabricate a flexible display panel according to an embodiment of the present invention.
  • the method includes:
  • Step 101 sequentially forming a primer layer, a first protection layer, a flexible substrate, a second protection layer, and a display component on the carrier substrate.
  • a primer layer 14, a first protective layer 121, a flexible substrate 11, a second protective layer 122, and a display element 13 are sequentially formed on a glass substrate (carrier substrate) 10.
  • the flexible substrate 11 is located between the first protective layer 121 and the second protective layer 122, and the display component 13 is formed on the second protective layer 122.
  • the step 101 further includes forming an encapsulation layer on the carrier substrate, the encapsulation layer covering the display component 13 for isolating the display component from the air.
  • the encapsulation layer covering the display component 13 for isolating the display component from the air.
  • other thin film or layer structures such as a flexible display panel with a touch function, may also be formed on the carrier substrate, and a touch electrode layer or the like may be formed on the carrier substrate.
  • the embodiments of the present invention are merely illustrative of the inventions of the embodiments of the present invention.
  • the material forming the underlayer may be the same as the material of the flexible substrate, for example, may be polyimide.
  • a polyimide film can be formed on a glass substrate, and after the polyimide film is cured to form a primer layer, a silicon nitride layer or a silicon oxide layer is formed by plasma enhanced chemical vapor deposition to form a first A protective layer is further formed on the first protective layer to form a polyimide film. After the polyimide film is cured to form a flexible substrate, a second protective layer and a display component are sequentially formed on the flexible substrate.
  • the underlayer is the same as the material of the flexible substrate, which is advantageous for the fabrication of the flexible substrate.
  • the material of the underlayer and the flexible substrate may also be different.
  • the embodiment of the present invention is only described in detail by taking the above as an example.
  • the flexible substrate is covered by the first protective layer and the second protective layer.
  • the flexible substrate is covered by the first protective layer and the second protective layer.
  • Step 102 Removing the underlayer to separate the first protective layer from the carrier substrate.
  • removing the primer layer includes dissolving the primer layer with an alkali solution.
  • the lye is 0.01%-10% by mass of KOH, 0.01%-10% by mass of KOH and NaOH mixed aqueous solution or 0.01%-10% by mass of tetramethyl hydroxide.
  • Ammonium aqueous solution here, in an aqueous solution of KOH and NaOH mixed, KOH and NaOH can be used Proportional mixing.
  • the primer layer is dissolved using an alkali solution at a temperature of 15-80 °C.
  • the lye may also be other solutions, such as NaOH solution or the like. The embodiment of the present invention will be described in detail only by taking the above-mentioned alkali solution and the above solution concentration as an example.
  • the dissolving the primer layer with an alkali solution comprises: spraying an alkali solution on the edge of the primer layer. That is, the lye is used to start from the edge of the primer layer, and the primer layer is gradually dissolved.
  • dissolving the underlying layer by using an alkali solution includes: forming a hit thereon
  • the underlayer, the first protective layer, the flexible substrate, the second protective layer, and the carrier substrate of the display component are immersed in the lye. Since the flexible substrate and the underlying material are the same, when the flexible substrate is covered by the first protective layer and the second protective layer, a primer layer, a first protective layer, and a flexible substrate may be formed thereon.
  • the second protective layer and the carrier substrate of the display component are immersed in the alkali solution, and the alkali solution can only dissolve the underlayer, and does not damage the flexible substrate, thereby improving production efficiency.
  • the underlayer may be formed by other substances, and the solution corresponding to the solution of the underlayer may be other solutions according to the chemical properties.
  • the embodiments of the present invention are not enumerated here, and only the above description is taken as an example. Description.
  • a flexible display panel can be obtained by using a mechanical action such as vacuum or electrostatic adsorption of the flexible display panel.
  • a method for fabricating a flexible display panel according to an embodiment of the present invention by forming a primer layer on a carrier substrate, and then forming respective functional layers of the flexible display panel on the underlayer (including a flexible substrate, a protective layer, and a display component) After each functional layer of the flexible display panel is formed, the underlying layer is dissolved to separate the flexible display panel from the carrier substrate, the manufacturing process is simple, the yield is high, the manufacturing cost is low, and high temperature is not required. It is non-polluting and can guarantee the performance quality of the display components of the flexible display panel.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

L'invention concerne un écran d'affichage souple et son procédé de fabrication, ainsi qu'un dispositif d'affichage. L'écran d'affichage souple comprend une première couche de protection (121), une seconde couche de protection (122), un substrat souple (11) et un composant d'affichage (13). Le substrat souple (11) est situé entre la première couche de protection (121) et la seconde couche de protection (122). Le composant d'affichage (13) est formé sur la seconde couche de protection (122). Par conséquent, pendant la procédure de fabrication de l'écran d'affichage souple, le processus de séparation de l'écran d'affichage souple et d'un substrat en verre est simple, le taux de produit fini est élevé, et les effets négatifs du processus de séparation sur les performances du composant d'affichage de l'écran d'affichage souple sont évités.
PCT/CN2014/089819 2014-05-27 2014-10-29 Écran d'affichage souple et son procédé de fabrication, et dispositif d'affichage WO2015180403A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410228437.0A CN104022125B (zh) 2014-05-27 2014-05-27 一种柔性显示面板及其制作方法、显示装置
CN201410228437.0 2014-05-27

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WO2015180403A1 true WO2015180403A1 (fr) 2015-12-03

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104022125B (zh) * 2014-05-27 2017-02-22 京东方科技集团股份有限公司 一种柔性显示面板及其制作方法、显示装置
KR102494730B1 (ko) 2018-02-01 2023-02-01 삼성디스플레이 주식회사 표시 장치 및 베이스 필름의 제조 방법
CN113934311B (zh) 2020-06-29 2024-07-19 瀚宇彩晶股份有限公司 柔性面板及其制作方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100203296A1 (en) * 2009-02-10 2010-08-12 Industrial Technology Research Institute Transferring structure for flexible electronic device and method for fabricating flexible electronic device
CN102738078A (zh) * 2012-06-21 2012-10-17 京东方科技集团股份有限公司 柔性显示基板的制作方法
CN103325731A (zh) * 2013-05-20 2013-09-25 Tcl集团股份有限公司 柔性显示装置的制造方法
CN104022125A (zh) * 2014-05-27 2014-09-03 京东方科技集团股份有限公司 一种柔性显示面板及其制作方法、显示装置
CN203850300U (zh) * 2014-05-27 2014-09-24 京东方科技集团股份有限公司 一种柔性显示面板及显示装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140064481A (ko) * 2012-11-20 2014-05-28 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100203296A1 (en) * 2009-02-10 2010-08-12 Industrial Technology Research Institute Transferring structure for flexible electronic device and method for fabricating flexible electronic device
CN102738078A (zh) * 2012-06-21 2012-10-17 京东方科技集团股份有限公司 柔性显示基板的制作方法
CN103325731A (zh) * 2013-05-20 2013-09-25 Tcl集团股份有限公司 柔性显示装置的制造方法
CN104022125A (zh) * 2014-05-27 2014-09-03 京东方科技集团股份有限公司 一种柔性显示面板及其制作方法、显示装置
CN203850300U (zh) * 2014-05-27 2014-09-24 京东方科技集团股份有限公司 一种柔性显示面板及显示装置

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CN104022125A (zh) 2014-09-03

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