WO2015178685A1 - Module laser à longueur d'onde réglable à cavité externe pour emballage to-can - Google Patents

Module laser à longueur d'onde réglable à cavité externe pour emballage to-can Download PDF

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Publication number
WO2015178685A1
WO2015178685A1 PCT/KR2015/005062 KR2015005062W WO2015178685A1 WO 2015178685 A1 WO2015178685 A1 WO 2015178685A1 KR 2015005062 W KR2015005062 W KR 2015005062W WO 2015178685 A1 WO2015178685 A1 WO 2015178685A1
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WIPO (PCT)
Prior art keywords
optical waveguide
bragg grating
light
laser module
optical signal
Prior art date
Application number
PCT/KR2015/005062
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English (en)
Korean (ko)
Inventor
이학규
박준오
서준규
신장욱
Original Assignee
(주)켐옵틱스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020150069933A external-priority patent/KR101679660B1/ko
Application filed by (주)켐옵틱스 filed Critical (주)켐옵틱스
Priority to US15/311,798 priority Critical patent/US20170093118A1/en
Publication of WO2015178685A1 publication Critical patent/WO2015178685A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length

Definitions

  • the present invention relates to an external resonator type wavelength tunable laser module for low cost and reliable TO-CAN packaging while enabling wavelength tunability in a wide wavelength range.
  • WDM Widelength Division Multiplexing
  • optical communication technology is currently applied to most backbone networks and metro networks, and transmits a plurality of high-speed signals by performing wavelength division multiplexing on a single optical fiber.
  • the wavelength variable range of the DFB laser is narrow to 10 nm or less, so that all wavelengths within the C-band (1535 nm to 1565 nm) are supported.
  • the disadvantage is the use of ⁇ 4 sets of tunable DFB laser modules.
  • the wavelength-variable transponder using the DFB laser does not provide an efficient solution in view of reducing inventory burden because the light source is expensive and a multichannel transponder must be provided for backup. Accordingly, there is a need to develop an external resonator type wavelength variable laser module capable of varying all wavelengths of a WDM band (for example, C-band) required by one laser module.
  • FIG. 1 is a plan view of a butterfly package which is a conventional external resonator type wavelength variable laser module
  • FIG. 2 is a side view of a butterfly package which is a conventional external resonator type wavelength variable laser module, and more specifically, a laser diode chip.
  • This is a schematic diagram of a butterfly package with butt-coupling optical waveguides.
  • XMD packages which are smaller than butterfly packages, basically have a similar configuration.
  • an optical waveguide having a laser diode chip 10 for a light source positioned on the chip stem 11 and a Bragg grating 30 for wavelength tunability therein is formed.
  • a heater 40 provided above the optical waveguide 20
  • a beam splitter 50 for partially reflecting and partially transmitting an optical signal output from the optical waveguide 20, and transmitting the beam splitter 50.
  • a lens 60 for focusing the optical signal, a photodiode 70 for measuring the power of the optical signal reflected by the beam splitter 50, and a temperature for setting the operating temperature of the wavelength tunable laser module regardless of the external temperature environment. It may be configured to include a sensor 81 and a thermoelectric cooler (82).
  • the volume of the optical waveguide 20 including the Bragg grating 30 is large, which inevitably increases the volume of the entire wavelength tunable laser module.
  • the cost of packaging a variable laser module is also high.
  • TO-CAN packages are widely used in communication optical modules because of their low manufacturing cost and small volume compared to butterfly or XMD packages.
  • the output direction of the optical signal should be vertically upward with respect to the TO stem surface on which the optical elements are placed, the direction of the optical signal emitted parallel to the TO stem surface should be changed vertically upward. There is this.
  • An object of the present invention is to provide a structure in which the propagation direction of an optical signal that is not linear can be switched in an optical waveguide in which Bragg grating is formed to package optical elements constituting an external resonator type wavelength variable laser module. There is this.
  • the external resonator-type wavelength tunable laser module for generating broadband light;
  • a 45 degree reflector which is redirected by the turning waveguide region and transmits a part of the optical signal exiting the optical waveguide and reflects the rest vertically upward;
  • the turning waveguide region is configured to turn an optical signal obtained by adjusting the reflection band of the Bragg grating 180 degrees.
  • the external resonator type wavelength tunable laser module according to the present invention may further include a photodiode for measuring the power of the optical signal passing through the 45 degree reflector.
  • the external resonator type wavelength tunable laser module according to the present invention may further include a temperature sensor and a thermoelectric cooler, and are electrically connected to the heater, the temperature sensor and the thermoelectric cooler, and input a signal detected by the temperature sensor. It may further include a temperature control device for adjusting the heat generation of the heater and the heat absorption of the thermoelectric cooler.
  • the temperature sensor is provided on an upper portion of the optical waveguide, the thermoelectric cooler is provided on the lower portion of the optical waveguide.
  • the optical waveguide is a polymer optical waveguide made of a polymer.
  • the Bragg grating is a polymer Bragg grating made of a polymer, and the optical waveguide and the polymer forming the Bragg grating include a halogen element and include a functional group that is cured by ultraviolet rays or heat.
  • the optical waveguide and the polymer forming the Bragg grating are characterized in that the thermo-optic coefficient is -9.9 ⁇ 10 -4 to -0.5 ⁇ 10 -4 °C -1 .
  • the optical waveguide geometry is a rib structure, a ridge structure, an inverted rib structure, an inverted ridge structure, or a channel structure.
  • the optical waveguide in which the Bragg grating is formed in a structure that can change the traveling direction of the optical signal it is possible to reduce the volume of the external resonator-type wavelength variable laser module, thereby packaging TO-CAN .
  • FIG. 1 is a plan view of a butterfly package which is a conventional external resonator type wavelength variable laser module.
  • FIG. 2 is a side view of a butterfly package which is a conventional external resonator type wavelength variable laser module.
  • FIG. 3 is a plan view of an external resonator type wavelength tunable laser module for TO-CAN packaging according to an embodiment of the present invention.
  • FIG. 4 is a side view of an external resonator-type wavelength tunable laser module for TO-CAN packaging according to an embodiment of the present invention.
  • FIG. 5 is a view showing the structure of the optical waveguide and the formation position of the Bragg grating in the external resonator type wavelength variable laser module according to the present invention.
  • FIG 3 is a plan view of an external resonator-type wavelength tunable laser module for TO-CAN packaging according to an embodiment of the present invention
  • Figure 4 is an external resonator-type wavelength variable for TO-CAN packaging according to an embodiment of the present invention One side view of the laser module.
  • the present invention utilizes the thermo-optic effect of an optical waveguide (more preferably, an optical waveguide made of a polymer material) to externally control an optical signal required by adjusting a wavelength band reflected from a Bragg grating (that is, a reflection band of a Bragg grating).
  • an optical waveguide more preferably, an optical waveguide made of a polymer material
  • an optical signal required by adjusting a wavelength band reflected from a Bragg grating (that is, a reflection band of a Bragg grating).
  • the wavelength tunable laser module includes an external resonator-type light source 100 for generating broadband light, an optical waveguide 200 into which the broadband light output from the light source 100 is input, and an optical waveguide 200.
  • the Bragg grating 300 and the Bragg grating 300 are formed on the optical waveguide 200 formed thereon, and the heater 400 and Bragg grating 300 for adjusting the reflection band of the Bragg grating 300 by the thermo-optic effect.
  • the 45 degree reflector 500 for transmitting the light and reflecting the rest vertically upward, and the lens 600 for making the optical signal reflected upward and upward by the 45 degree reflector 500 into parallel light or convergent light. It can be made, including.
  • the external resonator type light source 100 may be a semiconductor optical amplifier or a semiconductor laser diode chip that generates broadband light, wherein the emission surface of the light has an anti-reflection (AR) coating of 1% or less and is opposite to the emission surface.
  • AR anti-reflection
  • Silver may have a high-reflection (HR) coating with a reflectivity of 80% or greater.
  • the semiconductor laser diode chip may include an active layer, a current blocking layer, a p-metal, and an n-metal layer where light is generated.
  • the InP substrate may be formed of a combination of Group 3-5 elements, such as InGaAsP, InGaAlAs, InAlAs, or a combination of Group 2-4 elements
  • the active layer is a multi-quantum well or bulk It may be a bulk active structure.
  • An optical coupling lens may be provided between the light source 100 and the optical waveguide 200, wherein the optical coupling lens collects the light output from the light source 100 to form the Bragg grating 300. Butt-coupling with the optical waveguide 200. More specifically, the optical waveguide 200 is composed of an upper cladding 210 and a lower cladding 220 and a core 230 through which light is transmitted, which induces total reflection. It may be input to the core 230 of the optical waveguide 200. On the other hand, the light source 100 may be provided on the chip stem 110 for physical support.
  • the optical waveguide 200 is a path through which broadband light output from the light source 100 is input at one end thereof and an optical signal obtained through the Bragg grating 300 is output at the other end.
  • the optical waveguide 200 may be provided and supported on an upper portion of the substrate 1000, wherein the substrate 1000 may be a silicon substrate, a polymer substrate, a glass substrate, or the like.
  • the optical waveguide 200 includes a cladding 210 and 220 and a core 230 surrounded by the claddings 210 and 220, and the refractive index of the core 230 is higher than that of the cladding 210 and 220.
  • the light incident on the 230 is totally reflected at the interface between the core 230 and the cladding 210, 220 according to the angle of incidence.
  • the Bragg grating 300 is formed by forming a groove having a predetermined period in the advancing direction of the light in the cladding (210, 220) or the core 230 of the optical waveguide 200, the empty space (air) of the groove to the Bragg grating Alternatively, the groove may be filled with a material such as silicon oxide or polysilicon to form the Bragg grating 300.
  • the periodic grooves forming the Bragg grating 300 reflect periodic wavelengths to the refractive index of the optical waveguide 200 through which light travels, thereby reflecting a wavelength determined by the spacing between the gratings.
  • the optical wave having the center wavelength of the reflection band of the Bragg grating 300 is generated by the resonance of the wavelength reflected by the Bragg grating 300 to be re-input to the emission surface of the light source 100.
  • the wavelength ⁇ reflected by the Bragg grating 300 is determined by the lattice equation shown in Equation 1 below.
  • Equation 1 m is an odd number such as 1,3,5,7 indicating the order of the Bragg grating, n is the effective refractive index of the optical waveguide, ⁇ is the period of the Bragg grating.
  • the Bragg grating 300 may satisfy the Bragg condition.
  • An optical signal (for example, an optical signal having a center wavelength of ⁇ i) is partially reflected and returned to one end of the optical waveguide 200, and the optical signals of the remaining wavelengths are output to the other end of the optical waveguide 200.
  • the optical signal reflected to one end of the optical waveguide 200 is fed back to the optical waveguide 200 in which the intensity of light is amplified in the light source (for example, a semiconductor laser diode chip) 100 and the Bragg grating 300 is formed.
  • the light source for example, a semiconductor laser diode chip
  • Equation 1 the change in Bragg reflection wavelength with temperature is derived from Equation 1 as shown in Equation 2 above.
  • Equation 2 M, n and ⁇ of Equation 2 are the same as Equation 1, and ⁇ 0 is the initial reflection wavelength. That is, the amount of change in the reflection wavelength with respect to temperature is proportional to the sum of the amount of change in the effective refractive index with the change in the lattice period.
  • the change in the reflected wavelength with respect to temperature is 0.085 nm / K for a 12 nm variable corresponding to 16 channels at 100 GHz intervals. It can be seen that the temperature is about 142K.
  • the thermo-optic coefficient of silicon, ⁇ n / ⁇ T was 1.9 ⁇ 10 ⁇ 4 / K, and the change in period due to temperature was ignored.
  • the heater 400 is preferably provided on the optical waveguide 200 on which the Bragg grating 300 is formed.
  • the heater 400 generates joule heat as a predetermined electrical signal is applied to vary the temperature of the optical waveguide 200 in which the Bragg grating 300 is formed, and by the thermo-optic effect of the optical waveguide 200.
  • the wavelength band reflected by the Bragg grating 300 is adjusted, and thus the center wavelength of the optical signal output to the other end of the optical waveguide 200 is varied.
  • the heater 400 may use any conventional metal heater which generates heat when electric power is applied, but preferably, such as Cr, Ni, Cu, Ag, Au, Pt, Ti, Al elements and nichrome It is preferable that it is a heater provided with the thin-film heating element selected from the group which consists of a laminated thin film which consists of alloys.
  • the redirecting waveguide region 250 refers to a waveguide region in which the optical signal obtained by the action of the Bragg grating 300 and the heater 400 is redirected at a predetermined angle among the entire regions of the optical waveguide 200.
  • the turning waveguide region 250 may be configured to switch the optical signal obtained by adjusting the reflection band of the Bragg grating 300 at one time to change the advancing direction of the optical signal three times by 60 degrees.
  • have. 3 may be considered to use three multi-mode total reflection mirrors therein.
  • the turning waveguide region 250 is not limited to the embodiment illustrated in FIG. 3, and may be configured to redirect the optical signal obtained by the action of the Bragg grating 300 and the heater 400 at various angles. have. However, when the optical signal obtained as the reflection band of the Bragg grating 300 is adjusted by 180 degrees by the turning waveguide region 250 has an advantage of minimizing the volume of the external resonator type wavelength variable laser module. .
  • the optical signal redirected by the turning waveguide region 250 exits the optical waveguide 200 and is partially transmitted by the 45 degree reflector 500 provided at the other end of the optical waveguide 200. It is reflected vertically upward.
  • the 45 degree reflector 500 may be provided by bonding a separate 45 degree mirror to the other end of the optical waveguide 200 or may be provided by etching the optical waveguide 200 itself to have an inclined surface of 45 degrees. have. At this time, the 45-degree reflector 500 is coated on the reflecting surface of the reflector 500 to have a constant reflectance, so that the light incident on the reflector 500 is reflected and transmitted at a constant rate can do.
  • An optical signal transmitted through the 45 degree reflector 500 may be incident on the photodiode 700, and at this time, the photodiode 700 converts the incident optical signal into electrical energy to output the entire wavelength-variable laser module. Monitor the change.
  • the optical signal reflected by the 45 degree reflector 500 and traveling vertically upward becomes parallel light or convergent light by the lens 600 positioned above the 45 degree reflector 500.
  • the focal length of the lens 600 is at the 45 degree reflector 500, the light becomes parallel light, and when the focal length of the lens 600 is farther than the distance from the 45 degree inclined plane to the lens 600. Become a converged light.
  • the optical signal collected by the lens 600 may be incident on an optical fiber (not shown) positioned outside the wavelength tunable laser module.
  • the shape or focal length of the lens 600 may be variously selected in consideration of the coupling loss to the optical fiber.
  • the reflection band of the Bragg grating 300 is controlled by the thermo-optic effect of the optical waveguide 200 according to the heat supply of the heater 400. Accordingly, the wavelength of the output optical signal can be varied.
  • the temperature sensor 810 is preferably provided on the upper portion of the optical waveguide 200 to measure the temperature of the optical waveguide 200 in real time to adjust the current applied to the heater 400.
  • the temperature sensor 810 may be any conventional temperature sensor whose electrical property (voltage, resistance or current amount) is changed by heat.
  • the temperature sensor 810 may include a thermistor.
  • Thermoelectric cooler 820 is preferably provided in the lower portion of the optical waveguide 200 to control the temperature change of the optical waveguide 200 independently of the external temperature environment so that the optical waveguide 200 has a precise thermo-optic effect. Do.
  • the thermoelectric cooler 820 may include a conventional thermoelectric element in which endotherm is generated by a predetermined electrical signal.
  • Both the heater 400 and the thermoelectric cooler 820 may adjust the temperature with a precision of less than 0.1 °C
  • the temperature sensor 810 is preferably capable of sensing the temperature with a precision of less than 0.1 °C.
  • the temperature sensor 810 and the thermoelectric cooler 820 may be further provided with a temperature control device (not shown) so that the output characteristic of the stable optical signal is displayed independently of the external temperature environment.
  • the temperature controller is electrically connected to the heater 400, the temperature sensor 810, and the thermoelectric cooler 820, and receives a signal detected by the temperature sensor 810 to generate heat and a thermoelectric cooler of the heater 400. 820 controls the endotherm.
  • the temperature control device may comprise a conventional microprocessor and a computer readable storage medium on which the control program is executed.
  • All of the above-described optical elements constituting the external resonator type wavelength tunable laser module according to the present invention may be mounted on the TO stem 1100 for physical support and TO-CAN packaging.
  • the TO stem 1100 is preferably made of a metal having high thermal conductivity.
  • thermoelectric cooler 820 may be mounted on the TO stem 1100 using UV or thermosetting polymer resin, and the substrate 1000 and the upper portion of the substrate 1000 are positioned on the thermoelectric cooler 820.
  • the chip stem 110 and the optical waveguide 200 may also be mounted using ultraviolet rays or a thermosetting polymer resin.
  • the electrode 900 penetrates through the TO stem 1100 and may be provided at a predetermined number and height on the left and right sides of the thermoelectric cooler 820.
  • the material of the optical waveguide 200 is a polymer optical waveguide which is a polymer
  • the material of the Bragg grating 300 is also a polymer Bragg grating which is a polymer. This is because the polymer material has an excellent thermo-optic effect compared to other materials.
  • the polymer forming the optical waveguide 200 (cladding 210, 220 and core 230) or Bragg grating 300 includes a low loss optical polymer.
  • the low loss optical polymer contains a halogen element such as fluorine (F) or deuterium in a general polymer, and preferably includes a functional group capable of heat or ultraviolet curing.
  • the polymer forming the optical waveguide 200 or Bragg grating 300 preferably has a thermo-optic coefficient of -9.9 ⁇ 10 -4 to -0.5 ⁇ 10 -4 (° C. ⁇ 1 ).
  • Optical waveguide 200 is composed of cladding (210, 220) and the core 230, the geometry of the optical waveguide 200 is a rib (ridge) structure, ridge structure, inver as shown in FIG. It may be a inverted rib structure, an inverted ridge structure, or a channel structure.
  • the external resonator type wavelength tunable laser module according to the exemplary embodiment of the present invention illustrated in FIGS. 3 and 4 illustrates a channel structure among the geometrical structures of the optical waveguide 200, and Bragg may have a structure other than the channel structure.
  • the grating 300 may be formed in the cladding 210, 220 or the core 230.
  • the effective refractive index of the optical waveguide 200 is the position of the Bragg grating, the thickness of the Bragg grating, the ON / OFF ratio of the Bragg grating, the order of the Bragg grating, the refractive index of the polymer materials constituting the core and cladding and the physical shape of the core Because of the function, it is not easy to theoretically predict the wavelength of the output optical signal in the various structures shown in FIG.
  • the optical waveguide 200 and the Bragg grating 300 are formed using a polymer, and in controlling the effective refractive index of the optical waveguide 200, the heater 400, the temperature sensor 810, and the thermoelectric cooler 820.
  • the temperature control device it is possible to predictably adjust the temperature of the optical waveguide 200 in the portion where the Bragg grating 300 is formed, thereby easily fixing the center wavelength of the output optical signal to a specific wavelength and It is desirable to be able to vary.

Abstract

La présente invention concerne un module laser à longueur d'onde réglable à cavité externe qui comprend : une source lumineuse de type à cavité externe qui produit de la lumière à large bande ; un guide d'ondes lumineuses dans lequel la lumière à large bande produite à partir de la source lumineuse est entrée ; un réseau de Bragg formé dans le guide d'ondes lumineuses ; un dispositif de chauffage qui est prévu au-dessus du guide d'ondes lumineuses dans lequel est formé le réseau de Bragg, et règle une bande de réflexion du réseau de Bragg par un effet thermo-optique ; une région de guidage de changement de direction pour changer, selon un angle prédéterminé, la direction d'un signal optique obtenu en réglant la bande de réflexion du réseau de Bragg ; une partie à réflexion à 45 degrés à travers laquelle une partie du signal optique est transmise, qui sort du guide d'ondes lumineuses après que sa direction est changée par la région de guidage de changement de direction, et réfléchit le reste du signal optique verticalement vers le haut ; et une lentille qui transforme le signal optique, qui est réfléchi verticalement vers le haut par la partie de réflexion à 45 degrés, en lumière collimatée ou lumière convergente. Selon la présente invention, un guide d'ondes lumineuses dans lequel un réseau de Bragg est formé est conçu en une structure dans laquelle la direction de progression d'un signal lumineux peut être modifiée, ce qui entraîne une réduction du volume d'un module laser du type à cavité externe, permettant ainsi un emballage TO-CAN compact standardisé, et par conséquent réduisant les coûts.
PCT/KR2015/005062 2014-05-20 2015-05-20 Module laser à longueur d'onde réglable à cavité externe pour emballage to-can WO2015178685A1 (fr)

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Application Number Priority Date Filing Date Title
US15/311,798 US20170093118A1 (en) 2014-05-20 2015-05-20 External cavity type tunable wavelength laser module for to-can packaging

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2014-0060578 2014-05-20
KR20140060578 2014-05-20
KR1020150069933A KR101679660B1 (ko) 2014-05-20 2015-05-19 To-can 패키징을 위한 외부 공진기형 파장가변 레이저 모듈
KR10-2015-0069933 2015-05-19

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050213618A1 (en) * 2004-03-29 2005-09-29 Sochava Sergei L Semi-integrated designs for external cavity tunable lasers
KR20080052319A (ko) * 2006-12-05 2008-06-11 한국전자통신연구원 평판형 광도파로(ｐｌｃ) 소자, 그 소자를 포함한 파장가변 광원 및 그 광원을 이용한 ｗｄｍ-ｐｏｎ
US20100208756A1 (en) * 2007-07-27 2010-08-19 Young-Ouk Noh Tunable laser module based on polymer waveguides
US20120099611A1 (en) * 2009-06-12 2012-04-26 Mel External cavity tunable laser module
US20130182728A1 (en) * 2012-01-12 2013-07-18 Mars Technology. Wavelength tunable external cavity laser

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050213618A1 (en) * 2004-03-29 2005-09-29 Sochava Sergei L Semi-integrated designs for external cavity tunable lasers
KR20080052319A (ko) * 2006-12-05 2008-06-11 한국전자통신연구원 평판형 광도파로(ｐｌｃ) 소자, 그 소자를 포함한 파장가변 광원 및 그 광원을 이용한 ｗｄｍ-ｐｏｎ
US20100208756A1 (en) * 2007-07-27 2010-08-19 Young-Ouk Noh Tunable laser module based on polymer waveguides
US20120099611A1 (en) * 2009-06-12 2012-04-26 Mel External cavity tunable laser module
US20130182728A1 (en) * 2012-01-12 2013-07-18 Mars Technology. Wavelength tunable external cavity laser

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