WO2015165049A1

WO2015165049A1 - Method and apparatus for interconnection of optical waveguide layers

Info

Publication number: WO2015165049A1
Application number: PCT/CN2014/076518
Authority: WO
Inventors: 张俪耀; 曹彤彤; 张灿
Original assignee: 华为技术有限公司
Priority date: 2014-04-29
Filing date: 2014-04-29
Publication date: 2015-11-05
Also published as: CN105408792B; CN105408792A

Abstract

A method and apparatus for interconnection of optical waveguide layers. The apparatus for interconnection of optical waveguide layers comprises a source optical waveguide layer (11), a target optical waveguide layer (13), and a photonic crystal waveguide (12). One surface of the photonic crystal waveguide (12) is attached to one surface of the source optical waveguide layer (11), and the other surface of the photonic crystal waveguide (12) is attached to one surface of the target optical waveguide layer (13). The source optical waveguide layer (11) comprises a first vertical grating coupler (1101). The target optical waveguide layer (13) comprises a second vertical grating coupler (1301). The position of the first vertical grating coupler (1101) in the source optical waveguide layer (11) is the same as the position of the second vertical grating coupler (1301) in the target optical waveguide layer (13).

Description

TECHNICAL FIELD The present invention relates to the field of optoelectronics, and in particular, to a method and apparatus for interconnecting optical waveguide layers.

Background technique

With the further development of technology, the traditional electrical interconnection based on metal wires and dielectrics faces the challenges of metal wire interconnection delay, power consumption and bandwidth, making the limitations of electrical interconnection technology more and more obvious. At the same time, optical interconnect technology can effectively overcome the electrical interconnect bottleneck with its advantages of small delay, low power consumption and large bandwidth, and is gradually being applied to various scenarios of replacing electrical interconnects, including intra-chip interconnects. In the intra-chip interconnect, the typical technical solutions for realizing the interconnection of the optical signal between the optical waveguide layer and the layer are as follows: (1) realizing optical signal coupling by using a tapered waveguide between the optical waveguide layer and the layer; (2) using a photolithography and etching process to fabricate a waveguide or optical device across the optical waveguide layer; (3) fabricating a 3D stacked waveguide by an oxygen injection process, the waveguide is convex in a vertical direction to achieve an optical waveguide between the layers Coupling; (4) coupling between the optical waveguide layer and the layer is realized by a plurality of microrings distributed in a vertical direction between the optical waveguide layer and the layer. In the process of realizing the above-mentioned interconnection of the optical waveguide layer and the layer, the inventors have found that at least the following problems exist in the prior art: None of the above four solutions considers the problem of polarization, when the optical signal is processed in the optical waveguide layer, The operation stability of the polarization sensitive device in the optical waveguide layer is greatly reduced, thereby reducing the efficiency of the system for processing optical signals.

SUMMARY OF THE INVENTION Embodiments of the present invention provide a method and apparatus for interconnecting optical waveguide layers to improve the operational stability of a polarization sensitive device in an optical waveguide layer, thereby improving the efficiency of processing optical signals by the system. To achieve the above objective, the embodiment of the present invention adopts the following technical solutions. In a first aspect, an embodiment of the present invention provides an apparatus for interconnecting optical waveguide layers, including: a source optical waveguide layer, a target optical waveguide layer, and a photonic crystal. Waveguide; a surface of a photonic crystal waveguide Bonding to one surface of the source optical waveguide layer, and bonding the other surface of the photonic crystal waveguide to one surface of the target optical waveguide layer; the source optical waveguide layer includes: a first vertical grating coupler; the target optical waveguide layer includes : a second vertical grating coupler; the position of the first vertical grating coupler in the source optical waveguide layer is the same as the position of the second vertical grating coupler in the target optical waveguide layer. In a first possible implementation of the first aspect, the equivalent core diameter of the photonic crystal waveguide matches the spot diameter of the first vertical grating coupler and matches the optical diameter of the second vertical grating coupler. In conjunction with the first aspect or the first possible implementation of the first aspect, in a second possible implementation manner of the first aspect, the photonic crystal waveguide comprises: a refractive index light guiding photonic crystal waveguide, a band gap guiding photon a crystal waveguide; the cross-sectional structure of the refractive index light-guide type photonic crystal waveguide parallel to the source optical waveguide layer and the target optical waveguide layer is the same as that of the refractive index light-guide type photonic crystal fiber; the band gap-guided photonic crystal waveguide is parallel to The cross-sectional structure of the source optical waveguide layer and the target optical waveguide layer is the same as that of the cross-section of the bandgap-guided photonic crystal fiber. With reference to the first aspect or the first or second possible implementation manner of the first aspect, in a third possible implementation manner of the first aspect, the first vertical grating coupler comprises: a one-dimensional vertical grating coupler, Dimensional vertical grating coupler; the second vertical grating coupler comprises: a one-dimensional vertical grating coupler and a two-dimensional vertical grating coupler. In conjunction with the third possible implementation of the first aspect, in a fourth possible implementation of the first aspect, the one-dimensional vertical grating coupler comprises: an etched light guiding groove type grating; or an oblique engraved grating; Alternatively, a blazed grating; or a one-dimensional chirped grating; the two-dimensional vertical grating coupler comprises: a two-dimensional chirped grating. In combination with the first aspect or the first to fourth possible implementation manners of the first aspect, in a fifth possible implementation manner of the first aspect, the source optical waveguide layer further includes: a first modulator, and/ Or a first detector, and/or a first variable attenuator, and/or a first splitter, and/or a first optical switch; the target optical waveguide layer further comprising: a second modulator, and/or a second a detector, and/or a second variable attenuator, and/or a second splitter, and/or a second optical switch. In a second aspect, an embodiment of the present invention provides a method for interconnecting optical waveguide layers, the method being applied to a device including a source optical waveguide layer, a target optical waveguide layer, and a photonic crystal waveguide; Wherein, one surface of the photonic crystal waveguide is bonded to one surface of the source optical waveguide layer, and the other surface of the photonic crystal waveguide is bonded to one surface of the target optical waveguide layer; the source optical waveguide layer includes: a first vertical grating coupling The target optical waveguide layer includes: a second vertical grating coupler; a position of the first vertical grating coupler in the source optical waveguide layer is the same as a position of the second vertical grating coupler in the target optical waveguide layer; the method includes : receiving the optical signal transmitted by the source optical waveguide layer through the first vertical grating coupler, and transmitting the optical signal to the photonic crystal waveguide after changing the propagation direction of the optical signal; receiving the photonic crystal waveguide from the first vertical grating coupler The optical signal is transmitted to the second vertical grating coupler; the optical signal is received from the photonic crystal waveguide by the second vertical grating coupler, and the propagation direction of the optical signal is changed by ninety degrees and transmitted to the target optical waveguide layer. In a first possible implementation of the second aspect, the method further comprises: adjusting, by the photonic crystal waveguide, the intensity of the optical signal, and/or the phase of the optical signal, and/or the polarization of the optical signal, and/or light. The birefringence of the signal, and/or the dispersion of the optical signal is flat. In combination with the second aspect or the first possible implementation of the second aspect, in a second possible implementation of the second aspect, the source optical waveguide layer further includes: a first modulator, and/or a first detector And/or a first variable attenuator, and/or a first splitter, and/or a first optical switch; the target optical waveguide layer further comprising: a second modulator, and/or a second detector, and/ Or a second variable attenuator, and/or a second splitter, and/or a second optical switch; correspondingly, the method further comprises: passing the first modulator in the source optical waveguide layer, and/or the first a first processing of the optical signal by the detector, and/or the first variable attenuator, and/or the first splitter, and/or the first optical switch; passing through a second modulator in the target optical waveguide layer, and And/or the second detector, and/or the second variable attenuator, and/or the second splitter, and/or the second optical switch performs a second processing on the optical signal received from the second vertical grating coupler . Embodiments of the present invention provide a method and an apparatus for interconnecting optical waveguide layers, the device comprising: a source optical waveguide layer, a target optical waveguide layer, a photonic crystal waveguide; a surface of the photonic crystal waveguide and a source optical waveguide layer One surface is conformed, and the other surface of the photonic crystal waveguide is bonded to one surface of the target optical waveguide layer; the source optical waveguide layer includes: a first vertical grating coupler; and the target optical waveguide layer includes: a second vertical grating coupling The position of the first vertical grating coupler in the source optical waveguide layer is the same as the position of the second vertical grating coupler in the target optical waveguide layer; the first vertical grating coupler is configured to receive the transmission from the source optical waveguide layer Light signal, and Transmitting the optical signal to the photonic crystal waveguide by changing the propagation direction of the optical signal by ninety degrees; and transmitting the optical signal received from the first vertical grating coupler to the second vertical grating coupler; the second vertical grating coupler And for receiving an optical signal from the photonic crystal waveguide, and changing the propagation direction of the optical signal by ninety degrees and transmitting to the target optical waveguide layer. Thus, since the polarization dependence of the vertical grating coupler is utilized to achieve a single polarization of the optical signal in one optical waveguide layer, or a single polarization of the regional optical signal in an optical waveguide layer, the polarization sensitivity in the optical waveguide layer is improved. The operational stability of the device, which in turn increases the efficiency of the system in processing optical signals. BRIEF DESCRIPTION OF THE DRAWINGS In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the embodiments or the prior art description will be briefly described below. Obviously, the drawings in the following description are only the present drawings. Some embodiments of the invention may be obtained by those of ordinary skill in the art from the drawings without departing from the scope of the invention. 1 is a schematic structural diagram of an apparatus for interconnecting optical waveguide layers according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a one-dimensional vertical grating coupler according to an embodiment of the present invention; FIG.

FIG. 3 is a schematic structural diagram of another one-dimensional vertical grating coupler according to an embodiment of the present invention; FIG.

4 is a schematic structural diagram of another one-dimensional vertical grating coupler according to an embodiment of the present invention;

FIG. 5 is a schematic structural diagram of another one-dimensional vertical grating coupler according to an embodiment of the present invention; FIG.

FIG. 6 is a schematic structural diagram of a two-dimensional vertical grating coupler according to an embodiment of the present invention; FIG.

FIG. 7 is a schematic cross-sectional view of a photonic crystal waveguide according to an embodiment of the present invention; FIG.

FIG. 8 is a schematic flow chart of a method for interconnecting optical waveguide layers according to an embodiment of the present invention; FIG.

FIG. 9 is a schematic diagram of a path for transmitting optical signals between optical waveguide layers according to an embodiment of the present invention; Intention.

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. example. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention. An embodiment of the present invention provides an apparatus for interconnecting optical waveguide layers. As shown in FIG. 1, the present invention includes: a source optical waveguide layer 11, a photonic crystal waveguide 12, and a target optical waveguide layer 13. Wherein, one surface of the photonic crystal waveguide 12 is bonded to one surface of the source optical waveguide layer 11, and the other surface of the photonic crystal waveguide 12 is bonded to one surface of the target optical waveguide layer 13; The method includes: a first vertical grating coupler 1101; the target optical waveguide layer 13 includes: a second vertical grating coupler 1 301; a position of the first vertical grating coupler 1 101 in the source optical waveguide layer 11 and a second vertical grating The position of the coupler 1 301 in the target optical waveguide layer 13 is the same. Here, an optical waveguide layer that emits an optical signal is defined as a source optical waveguide layer 11, and an optical waveguide layer that receives an optical signal is defined as a target optical waveguide layer 13. When the optical signal transmission between the layers of the optical waveguide is required, the source optical waveguide layer 11 transmits the optical signal to the first vertical grating coupler 1101 through the intra-layer optical path selection, and the first vertical grating coupler 1101 transmits the optical signal. The direction of propagation changes by ninety degrees, the optical signal is coupled into the photonic crystal waveguide 12, the photonic crystal waveguide 12 transmits the optical signal to the second vertical coupler, and the second vertical coupler changes the direction of propagation of the optical signal by another ninety. After the degree, the light-changing signal is transmitted to the target optical waveguide layer 13 such that the optical signal is transmitted from the source optical waveguide layer 11 to the target optical waveguide layer 13. The purpose of each part of the device is described below. The first vertical grating coupler 1101 is configured to receive the optical signal transmitted from the source optical waveguide layer 11 and transmit the optical signal to the photonic crystal waveguide 12 after changing the propagation direction of the optical signal by ninety degrees. It should be noted that the first vertical grating coupler 1 101 may be a one-dimensional vertical grating coupler or a two-dimensional vertical grating coupler. Further, when the first vertical grating coupler 1 101 is a one-dimensional vertical grating coupler, The specific configuration includes the following: First, the grating of the light guiding groove type is etched, as shown in FIG. 2, the coupling loss at this time is about 1.87 dB; the second, the oblique grating, as shown in FIG. , the coupling loss at this time is about 1. 2dB; the third, blazed grating, as shown in Figure 4, the coupling loss is about 1. 2dB; the fourth, one-dimensional 啁啾 grating, as shown in Figure 5 The coupling loss at this time is about 2. 21 dB. When the first vertical grating coupler 1101 is a two-dimensional vertical grating coupler, the specific configuration may be a two-dimensional chirped grating, as shown in FIG. The coupling loss is about 5. 2 dB. The above only provides several possible implementation methods of the first vertical grating coupler 1101, but the actual implementation is not limited to the above implementation method, and the specific implementation of the first vertical grating coupler 11 01 The method is not limited in the present invention. It should be noted that when the first vertical grating coupler 1101 is a one-dimensional vertical grating coupler, the optical signal passing through the grating coupler can be made single due to the characteristics of the grating coupler. Polarized light The photonic crystal waveguide 12 is transmitted to the second vertical grating coupler 1 301. At this time, since the optical signal received by the second vertical grating coupler 1 301 is also single-polarized light, it is deflected by the second vertical grating coupler 1 301. The optical signal after ten degrees is still single polarization, that is, the polarization angle of the optical signal in the target optical waveguide layer 13 is the same, that is, a single polarization is realized; when the first vertical grating coupler 1101 is a two-dimensional vertical grating In the coupler, due to the characteristics of the two-dimensional grating coupler, the optical signal passing through the two-dimensional vertical grating coupler can have only two polarization angles, and the optical signal is transmitted through the photonic crystal waveguide 12 to the second vertical grating coupler. At 1 301, at this time, since the optical signal received by the second vertical grating coupler 1 301 has two polarization angles, the optical signal after being deflected by the second vertical grating coupler 1 301 by ninety degrees still has two polarization angles. And the optical signal passing through the second vertical grating coupler 1 301 is divided into two optical signals each having a single polarization angle according to two polarization angles, two points The optical signals having a single polarization angle are processed in the target optical waveguide layer 13 respectively, and the regions respectively processed for the respective optical signals have a single polarization angle, that is, a regional single polarization is realized. The material of the vertical grating coupler 1 101 may be a single crystal silicon, a group II IV material, or a light guiding polymer, which is not limited in the present invention. The photonic crystal waveguide 12 is used for the first vertical grating. The optical signal received by the coupler 1 101 is transmitted to the second vertical grating coupler 1 301. Further, the equivalent core diameter of the photonic crystal waveguide 12 matches the spot diameter of the first vertical grating coupler 1101 and matches the spot diameter of the second vertical grating coupler 1301. It should be noted that the above matching means that the equivalent core diameter of the photonic crystal waveguide 12 is approximately equal and not smaller than the spot diameter of the first vertical grating coupler 1101, and the equivalent core diameter of the photonic crystal waveguide 12 is approximately equal and Not less than the spot diameter of the first vertical grating coupler 1101. In general, the spot diameter of the first vertical grating coupler 1101 is equal to the spot diameter of the second vertical grating coupler 1301. It should be noted that the photonic crystal waveguide 12 has many advantages over other waveguides. First, compared with the four schemes in the background art, the photonic crystal waveguide 12 can be realized by a mature semiconductor process such as standard growth and etching, and thus has the advantages of low fabrication complexity; secondly, due to the speciality of the photonic crystal waveguide 12 The structure makes the optical signal have a small transmission loss in the photonic crystal waveguide 12, so that it has good light guiding property, and when a plurality of adjacent vertical grating couplers in an optical waveguide layer need to be coupled, the photonic crystal waveguide 12 Each optical signal can be collected independently to avoid interference between the individual optical signals. Finally, since the photonic crystal waveguide 12 can be transmitted without a cut-off single mode, the mode field is adjustable, the dispersion is adjustable, which is very favorable for dispersion flatness, and can also be guaranteed. Polarization performance of optical signals. Further, the photonic crystal waveguide 12 includes: a refractive index light guiding type photonic crystal waveguide 12 and a band gap guiding type photonic crystal waveguide 12. The cross-sectional structure of the refractive index light guide type photonic crystal waveguide 12 parallel to the source optical waveguide layer 11 and the target optical waveguide layer 13 is the same as that of the refractive index light guide type photonic crystal fiber; the band gap guided photonic crystal waveguide 12 is parallel The cross-sectional structure of the source optical waveguide layer 11 and the target optical waveguide layer 13 is the same as that of the cross-section of the band gap-guided photonic crystal fiber. It should be noted that the black portion of the cross section of the photonic crystal waveguide 12 shown in FIG. 7 is an etched air hole, or the black portion is a dielectric rod. The structure of the air holes or the dielectric rods in the photonic crystal waveguide 12 shown in Fig. 7 may be an equilateral triangle as shown in Fig. 7, or may be square. The present invention is not limited to the specific structure of the air holes or the dielectric rods in the photonic crystal waveguide 12. The refractive index guiding type and the band gap guiding type structural diagram may be the same. When the black portion in Fig. 7 indicates a dielectric rod, the figure shows a cross section of the refractive index light guiding type photonic crystal waveguide; when the black portion in Fig. 7 indicates air In the case of a hole, the figure shows a cross section of a band gap guided photonic crystal waveguide. It should be noted that the material of the photonic crystal waveguide 12 may be a single crystal silicon, a III-V material, or a light guiding polymer, which is not limited in the present invention. The second vertical grating coupler 1 301 is configured to receive an optical signal from the photonic crystal waveguide 12, and transmit the optical signal to the target optical waveguide layer 13 after changing the propagation direction of the optical signal by ninety degrees. The second vertical grating coupler 1 301 may be a one-dimensional vertical grating coupler or a two-dimensional vertical grating coupler. For details, refer to the foregoing description of the first vertical grating coupler 1 101, and details are not described herein again. Further, the source optical waveguide layer 1 1 further comprises: a first modulator, and/or a first detector, and/or a first variable attenuator, and/or a first splitter, and/or a first light The target optical waveguide layer 13 further comprises: a second modulator, and/or a second detector, and/or a second variable attenuator, and/or a second splitter, and/or a second optical switch . It should be noted that the foregoing only exemplifies a device that may exist in the source optical waveguide layer 11 and the target optical waveguide layer 13. For the specific device actually existing in the source optical waveguide layer 11 and the target optical waveguide layer 13, the present invention There is no limit to this. At this time, the source optical waveguide layer 11 is used to pass the first modulator, and/or the first detector, and/or the first variable attenuator, and/or the first splitter, and/or the first light The switch performs a first process on the optical signal. The photonic crystal waveguide 12 is also used to adjust the intensity of the optical signal, and/or the phase of the optical signal, and/or the polarization of the optical signal, and/or the birefringence of the optical signal, and/or the dispersion of the optical signal. It should be noted that the adjustment of the optical signal can be realized by adjusting the structure of the photonic crystal waveguide 12, such as the arrangement of the air holes or the dielectric rods, the diameter of the dielectric rod after the air holes, and the like. It should be noted that the photonic crystal waveguide 12 can only adjust the basic information of the optical signal, and does not change the information carried in the optical signal, that is, does not process the information carried in the optical signal. a target optical waveguide layer 13 for passing through a second modulator, and/or a second detector, and/or a second variable attenuator, and/or a second splitter, and/or a second optical switch The optical signal received from the second vertical grating coupler 1 301 is subjected to a second process. An embodiment of the present invention provides an apparatus for interconnecting optical waveguide layers, including: a source optical waveguide layer, a target optical waveguide layer, and a photonic crystal waveguide; a surface of the photonic crystal waveguide is adhered to a surface of the source optical waveguide layer, And the other surface of the photonic crystal waveguide is adhered to a surface of the target optical waveguide layer; the source optical waveguide layer comprises: a first vertical grating coupler; the target optical waveguide layer comprises: a second vertical grating coupler; The position of the grating coupler in the source optical waveguide layer is the same as the position of the second vertical grating coupler in the target optical waveguide layer; the first vertical grating coupler is configured to receive the optical signal transmitted from the source optical waveguide layer, and The propagation direction of the optical signal is changed to ninety degrees and then transmitted to the photonic crystal waveguide; the photonic crystal waveguide is configured to transmit the optical signal received from the first vertical grating coupler to the second vertical grating coupler; the second vertical grating coupler, For receiving an optical signal from the photonic crystal waveguide, and changing the propagation direction of the optical signal by ninety degrees and transmitting to the target optical waveguide layer. Thus, since the polarization dependence of the vertical grating coupler is utilized to achieve a single polarization of the optical signal in one optical waveguide layer, or a single polarization of the regional optical signal in an optical waveguide layer, the polarization sensitivity in the optical waveguide layer is improved. The operational stability of the device, which in turn increases the efficiency of the system in processing optical signals. Embodiments of the present invention provide a method of interconnecting optical waveguide layers, which is applied to a device including a source optical waveguide layer, a target optical waveguide layer, and a photonic crystal waveguide. Wherein, one surface of the photonic crystal waveguide is bonded to one surface of the source optical waveguide layer, and the other surface of the photonic crystal waveguide is bonded to one surface of the target optical waveguide layer; the source optical waveguide layer includes: a first vertical grating coupling The target optical waveguide layer includes: a second vertical grating coupler; the position of the first vertical grating coupler in the source optical waveguide layer is the same as the position of the second vertical grating coupler in the target optical waveguide layer. As shown in FIG. 8, the method includes:

8 01. The optical signal transmitted by the source optical waveguide layer is received by the first vertical grating coupler, and the propagation direction of the optical signal is changed to ninety degrees and then transmitted to the photonic crystal waveguide.

8 02. The optical signal received from the first vertical grating coupler is transmitted to the second vertical grating coupler through the photonic crystal waveguide.

8 03. The optical signal is received from the photonic crystal waveguide by the second vertical grating coupler, and the propagation direction of the optical signal is changed to ninety degrees and then transmitted to the target optical waveguide layer. It should be noted that Fig. 9 shows the transmission path of the optical signal when executed in accordance with steps 801-803. Further, when performing step 802, the method further includes: adjusting, by the photonic crystal waveguide, the intensity of the optical signal, and/or the phase of the optical signal, and/or the polarization of the optical signal, and/or the birefringence of the optical signal, And/or the dispersion of the optical signal is flat. Further, the source optical waveguide layer further comprises: a first modulator, and/or a first detector, and/or a first variable attenuator, and/or a first splitter, and/or a first optical switch; The target optical waveguide layer further comprises: a second modulator, and/or a second detector, and/or a second variable attenuator, and/or a second splitter, and/or a second optical switch. Correspondingly, before step 801, the method further comprises: passing the first modulator in the source optical waveguide layer, and/or the first detector, and/or the first variable attenuator, and/or the first shunt And/or the first optical switch performs a first process on the optical signal. After step 803, the method further comprises: passing a second modulator in the target optical waveguide layer, and/or a second detector, and/or a second variable attenuator, and/or a second splitter, and / or the second optical switch performs the second processing on the optical signal received from the second vertical grating coupler. Embodiments of the present invention provide a method for interconnecting optical waveguide layers, including: a first vertical grating coupler receives an optical signal transmitted from a source optical waveguide layer, and transmits a direction of propagation of the optical signal by ninety degrees to be transmitted to a photonic crystal waveguide; the photonic crystal waveguide transmits an optical signal received from the first vertical grating coupler to a second vertical grating coupler; the second vertical grating coupler receives the optical signal from the photonic crystal waveguide, and changes a propagation direction of the optical signal After 90 degrees, it is transmitted to the target optical waveguide layer. Thus, since the polarization dependence of the vertical grating coupler is utilized to achieve a single polarization of the optical signal in one optical waveguide layer, or a single polarization of the regional optical signal in an optical waveguide layer, the polarization sensitivity in the optical waveguide layer is improved. The operational stability of the device, which in turn increases the efficiency of the system in processing optical signals.

In the several embodiments provided by the present application, it should be understood that the disclosed system, apparatus, and method may be implemented in other manners. For example, the device embodiments described above are merely illustrative. For example, the division of the unit is only a logical function division. In actual implementation, there may be another division manner, for example, multiple units or components may be combined or Can be integrated into another system, or some features can be ignored, or not executed. Another point, the mutual coupling or direct coupling or communication shown or discussed The letter connection may be an indirect coupling or communication connection through some interface, device or unit, and may be in electrical, mechanical or other form.

The units described as separate components may or may not be physically separated, and the components displayed as the units may or may not be physical units, and may be located in one place or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the objectives of the embodiment of the present embodiment.

In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit.

It should be noted that the above embodiments are only for explaining the technical solutions of the present invention, and are not intended to be limiting; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that: The technical solutions described in the foregoing embodiments are modified, or some of the technical features are equivalently replaced. The modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

claims

1. A device for interconnecting optical waveguide layers, characterized in that it includes: a source optical waveguide layer, a target optical waveguide layer, and a photonic crystal waveguide; one surface of the photonic crystal waveguide and one surface of the source optical waveguide layer Surface bonding, and the other surface of the photonic crystal waveguide is bonded to one surface of the target optical waveguide layer; the source optical waveguide layer includes: a first vertical grating coupler; the target optical waveguide layer It includes: a second vertical grating coupler; the position of the first vertical grating coupler in the source optical waveguide layer is the same as the position of the second vertical grating coupler in the target optical waveguide layer.

2. The device according to claim 1, wherein the equivalent core diameter of the photonic crystal waveguide matches the spot diameter of the first vertical grating coupler, and matches the light spot diameter of the second vertical grating coupler. The spot diameter matches.

3. The device according to claim 1 or 2, characterized in that, the photonic crystal waveguide includes: a refractive index light-guided photonic crystal waveguide, a band gap guided photonic crystal waveguide; the cross-sectional structure and the refractive index guide The cross-section structure of the light-type photonic crystal fiber is the same; the band surface structure is the same as the cross-section structure of the band gap-guided photonic crystal fiber.

4. The device according to any one of claims 1 to 3, characterized in that, the first vertical grating coupler includes: a one-dimensional vertical grating coupler, a two-dimensional vertical grating coupler; the second vertical grating Couplers include: one-dimensional vertical grating coupler, two-dimensional vertical grating coupler.

5. The device according to claim 4, wherein the one-dimensional vertical grating coupler includes: an etched light guide groove-shaped grating; or an obliquely etched grating; or a blazed grating; or a one-dimensional chirped grating. Chirped grating; The two-dimensional vertical grating coupler includes: a two-dimensional chirped grating.

6. The device according to any one of claims 1 to 5, characterized in that the source optical waveguide layer further includes: a first modulator, and/or a first detector, and/or a first variable attenuation. and/or a first splitter, and/or a first optical switch; the target optical waveguide layer also includes: a second modulator, and/or a second detector, and/or a second variable attenuator , and/or a second splitter, and/or a second optical switch.

7. A method for interconnecting optical waveguide layers, characterized in that the method is applied to a device including a source optical waveguide layer, a target optical waveguide layer, and a photonic crystal waveguide; wherein, one surface of the photonic crystal waveguide is bonded to one surface of the source optical waveguide layer, and the other surface of the photonic crystal waveguide is bonded to one surface of the target optical waveguide layer; the source optical waveguide layer includes: a first vertical grating coupling device; the target optical waveguide layer includes: a second vertical grating coupler; the position of the first vertical grating coupler in the source optical waveguide layer is consistent with the position of the second vertical grating coupler in the target optical waveguide layer. The positions in the waveguide layer are the same; the method includes: receiving the optical signal transmitted from the source optical waveguide layer through the first vertical grating coupler, and changing the propagation direction of the optical signal ninety degrees before transmitting it to the photonic crystal waveguide; transmitting the optical signal received from the first vertical grating coupler to the second vertical grating coupler through the photonic crystal waveguide; transmitting from the second vertical grating coupler from the The photonic crystal waveguide receives the optical signal

8. The method according to claim 7, wherein the method further comprises: adjusting the light intensity of the optical signal, and/or the phase of the optical signal, and/or the optical signal through the photonic crystal waveguide. The polarization of the optical signal, and/or the birefringence of the optical signal, and/or the dispersion of the optical signal is flat.

9. The method according to claim 7 or 8, characterized in that the source optical waveguide layer further includes: a first modulator, and/or a first detector, and/or a first variable attenuator, and /or a first splitter, and/or a first optical switch; the target optical waveguide layer also includes: a second modulator, and/or a second detector, and/or a second variable attenuator, and/or or a second splitter, and/or a second optical switch; Correspondingly, the method further includes: passing the first modulator in the source optical waveguide layer, and/or the first detector, and/or the first variable attenuator, and/or The first splitter and/or the first optical switch performs first processing on the optical signal; and the second modulator in the target optical waveguide layer and/or the second The detector, and/or the second variable attenuator, and/or the second splitter, and/or the second optical switch will receive the The optical signal undergoes secondary processing.