WO2015162709A1 - Optical component driving device and optical recording device - Google Patents

Optical component driving device and optical recording device Download PDF

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Publication number
WO2015162709A1
WO2015162709A1 PCT/JP2014/061352 JP2014061352W WO2015162709A1 WO 2015162709 A1 WO2015162709 A1 WO 2015162709A1 JP 2014061352 W JP2014061352 W JP 2014061352W WO 2015162709 A1 WO2015162709 A1 WO 2015162709A1
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WO
WIPO (PCT)
Prior art keywords
optical component
displacement
light receiving
light beam
light
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PCT/JP2014/061352
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French (fr)
Japanese (ja)
Inventor
滋郎 橋爪
達朗 井手
幸修 田中
和良 山崎
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株式会社日立製作所
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Priority to PCT/JP2014/061352 priority Critical patent/WO2015162709A1/en
Publication of WO2015162709A1 publication Critical patent/WO2015162709A1/en

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0065—Recording, reproducing or erasing by using optical interference patterns, e.g. holograms
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection

Definitions

  • the present invention relates to an optical component driving apparatus and an optical recording apparatus.
  • the following document discloses a method for acquiring displacement information with a sensor.
  • a rod-shaped light-shielding tool is fixed to a holder that fixes an objective lens that is an optical component, a part of light irradiated from the light-emitting element to the light-receiving element is shielded, and the light-receiving element is divided into four parts.
  • a method is disclosed in which when the light-shielded position changes, a difference occurs in the amount of light received by the four light receiving elements, and the displacement of the objective lens is calculated from the difference in the amount of received light.
  • An object of the present invention is to provide an optical component driving device or the like that detects a displacement of an optical component with high sensitivity in order to control the position of the optical component with high accuracy.
  • a representative optical component driving device is connected to an optical component, a holder to which the optical component is attached, and a fixed member, and the holder is displaced with respect to the fixed member.
  • a supporting member that can be supported; a reflecting member that is provided on a part of the supporting member and has a surface that is substantially orthogonal to the displacement direction of the holder; a light emitting element that irradiates the reflecting member with light; and the reflecting member.
  • a light receiving element that receives the reflected reflected light.
  • the optical component drive etc. which detect the displacement of an optical component with high sensitivity can be provided.
  • FIG. 1 shows an example of the configuration of an optical recording apparatus. It is a figure explaining the reference light beam which injects into a recording medium, and the reproduction light beam diffracted by the recording area. It is a figure explaining operation
  • FIG. 5 is a schematic view of an optical component driving mechanism viewed in the ⁇ Z direction in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the ⁇ Z ′ direction.
  • FIG. 6 is a schematic view of an optical component driving mechanism viewed in the ⁇ X direction in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the ⁇ Z ′ direction.
  • FIG. 1 shows the configuration of the optical recording apparatus 401.
  • the time for which the light beam 300 emitted from the light source 201 passes through the shutter 202 is limited.
  • the ratio of P-polarized light and S-polarized light is controlled by the half-wave plate 203, and then is separated into the signal light beam 301 and the reference light beam 302 by the polarization beam splitter 204.
  • the signal light beam 301 passes through several optical elements, is reflected by the polarization beam splitter 205, and enters the spatial light modulator 206.
  • the signal beam 301 to which information is added by the spatial light modulator 206 is transmitted through the polarization beam splitter 205, and then an unnecessary frequency component included in the signal beam is removed by the optical component 208 disposed in the relay lens 207. Then, the light passes through the objective lens 209 and is condensed on the recording medium 215.
  • the angle at which the reference beam 302 enters the recording medium 215 is controlled by the galvanometer mirror 211 after passing through some optical elements.
  • FIG. 2 is a diagram for explaining the reference light beam 302 incident on the recording medium 215 and the reproduction light beam 303 diffracted by the recording area 219.
  • the reference beam 302 When reproducing the information recorded on the recording medium 215, only the reference beam 302 is irradiated to the recording medium 215 as shown in FIG.
  • the reference light beam 302 passes through the recording medium 215 and is reflected on the same optical axis by the galvanometer mirror 212.
  • the reference light beam 302 reflected by the galvano mirror 212 is incident on the recording medium 215 again, it is diffracted by the recording area 219 recorded on the recording medium 215 and enters the objective lens 209 as a reproduction light beam 303.
  • the reproduction light beam 303 incident on the objective lens 209 passes through the opening of the optical component 208 shown in FIG. 1, is reflected by the polarization beam splitter 205, and then enters the light receiving element 218 to reproduce the recorded information. .
  • the incident angle theta of the reference beam 302 incident on the recording area 219 of the recording medium 215 varying the incident angle theta of the reference beam 302 incident on the recording area 219 of the recording medium 215, the incident angle theta 1 of the recording time of the reference beam 302, theta 2, ⁇ ⁇ ⁇ theta n
  • the intensity of the reconstructed light beam 303 is increased at the incident angle that coincides with the angle information, and the angle multiplexed information can be reproduced individually.
  • FIG. 3 is a diagram for explaining the operation of the optical component driving mechanism 402.
  • the reproduction light beam 303 diffracted from the recording medium 215 is condensed by the objective lens 209 and the relay lens 207, and the condensing point 501 is It passes through the opening of the optical component 208.
  • FIG. 3B when the recording medium 215 is displaced in the + X ′ direction, for example, the position where the reproduction light beam 303 diffracted from the recording medium 215 is displaced in the + X ′ direction.
  • the condensing point where the reproduction light beam 303 is condensed is displaced to the condensing point 502 in the ⁇ X ′ direction on the optical component 208. For this reason, the reproduction light beam 303 is shielded around the opening of the optical component 208, and the amount of light reaching the light receiving element 218 is reduced to deteriorate the reproduction signal.
  • the optical component driving mechanism 402 displaces the position of the optical component 208 in the ⁇ X ′ direction, and transmits the reproduction light beam 303 through the opening of the optical component 208, thereby receiving the light receiving element. A reduction in the amount of the reproduction light beam 303 that reaches 218 is prevented.
  • the condensing position of the reproduction beam 303 is monitored by a light receiving element (not shown) provided on the optical component 208 or the like or a light receiving element (not shown) provided on the back surface of the optical component driving mechanism 402.
  • the condensing position 303 is displaced, the optical component 208 is displaced so as to follow the displacement.
  • the optical component 208 When the recording medium 215 is displaced in the Y′-axis direction, the optical component 208 is moved in the ⁇ Y′-axis direction. When the recording medium 215 is displaced in the Z′-axis direction, the optical component 208 is moved in the Z′-axis direction. It is possible to prevent the reproduction signal from deteriorating by moving it.
  • the optical component 208 can be moved to an optimal position corresponding to the displacement of the recording medium 215 by the above control, but the position of the optical component 208 may be shifted by a reproducing operation of the recording medium 215 or the like. is there. At this time, if the reproduction light beam 303 is emitted, the optical component 208 can be displaced to the optimum position again, but the reproduction light beam 303 is not always emitted. Therefore, it is necessary to monitor the positional deviation of the optical component 208 regardless of the reproduction beam 303.
  • optical component driving mechanism 402 that detects the positional displacement of the optical component 208 and precisely displaces the optical component 208 will be described.
  • FIG. 4 is a diagram for explaining the structure of the optical component driving mechanism 402 that drives the optical component 208 in the two axial directions of the X′-axis direction and the Z′-axis direction by electromagnetic driving.
  • the holder 107 is mounted with an optical component 208, a Z′-axis direction driving coil 111, and an X′-axis direction driving coil 112, and the holder 107 is fixed via a support member 108.
  • the member 103 is connected.
  • the displacement detection element M1 that detects displacement in the X′-axis direction and the displacement detection element M2 that detects displacement in the Z′-axis direction include a light emitting element 113 that emits a sensor light beam 304 and a sensor light beam 304 that diffuses.
  • the lens 114 includes a converging lens 114 and a light receiving element 115 that receives the sensor light beam 304 reflected by the mirror 102 on the plane.
  • the holder 107 on which the optical component 208 is mounted is sandwiched between the yoke 109 and the magnet 110.
  • current flows through the coils 111 and 112 they are displaced in the Z'-axis direction and the X'-axis direction, respectively.
  • one highly sensitive displacement detecting element is provided for each axial displacement.
  • a current is passed through the Z′-axis direction driving coil 111 and the X′-axis direction driving coil 112 to cancel the displacement of the optical component 208. Control is performed so that the position of the optical component 208 is not displaced by displacing the lens 107.
  • FIG. 5 is a diagram of the optical component driving mechanism 402 shown in FIG. 4 as viewed from the Z′-axis direction, and is a schematic diagram for explaining the operation of the displacement detection element M1 that detects the position of the optical component 208 of FIG. is there.
  • FIG. 6 is a diagram for explaining the positional relationship between the sensor light beam 304 reflected by the mirror unit 102 and applied to the light receiving element 115 of the displacement detecting element M1, and the light receiving parts 115a and 115b on the light receiving element 115.
  • the support member 108 that supports the holder 107 bends according to the amount of displacement of the holder 107. Therefore, the displacement in the X′-axis direction of the optical component 208 is calculated by the displacement amount of the sensor light beam 304 due to the displacement and inclination of the mirror portion 102 provided on the support member 108 that supports the holder 107.
  • the normal line of the reflecting surface is parallel to the X′-axis at a predetermined position.
  • the sensor light beam 304 emitted from the light emitting element 113 and converged by the lens 114 is reflected by the mirror portion 102 of the support member 108 and irradiated to the light receiving element 115.
  • the mirror unit 102 is displaced and tilted. As a result, as shown in FIG.
  • the sensor light beam 304 initially irradiated to the intermediate position between the two light receiving portions 115 a and 115 b on the light receiving element 115 is + Y ′ as the mirror portion 102 is displaced and inclined. Move to a position displaced by Ds in the direction. From the light receiving part A 115 a and the light receiving part B 115 b of the light receiving element 115, a signal having an intensity corresponding to the amount of the sensor light beam 304 incident thereon is generated.
  • FIG. 7 is a diagram for explaining the displacement amount of the optical component 208 and the displacement signal output from the displacement detection element M1.
  • FIG. 8A is a diagram for explaining the relationship between the displacement of the mirror unit 102 and the position of the sensor light beam 304 on the light receiving element 115.
  • FIG. 8B is a diagram for explaining the relationship between the tilt of the mirror unit 102 and the position of the sensor light beam 304 on the light receiving element 115.
  • the deflection of the mirror unit 102 shown in FIG. 5 is a result of the displacement of the mirror unit 102 shown in FIG. 8A and the inclination of the mirror unit 102 shown in FIG.
  • the sensor light beam position displacement Dd on the light receiving element 115 is increased by the incident angle ⁇ i at which the sensor light beam 304 enters the mirror unit 102. It grows with it.
  • the incident angle ⁇ i is an angle in the ⁇ Z direction formed by the normal to the reflecting surface of the mirror unit 102 and the sensor light beam 304.
  • the sensor beam position displacement Dt of on the light receiving element 115 becomes twice the angle the mirror unit 102 is inclined
  • the displacement is proportional to 2 ⁇ m . Note that the interval between the light receiving element 115 and the mirror unit 102 is w.
  • FIG. 9 is a diagram for explaining the relationship between the length L from the fixing point of the support member 108 to the fixing member 103 to the mirror portion 102 and the sensor light beam displacement amount Ds on the light receiving element 115. Further, the results are obtained under the condition that the sensor light beam 304 is incident on the mirror unit 102 at an incident angle ⁇ i of 45 degrees.
  • the sensor light beam displacement amount Ds is described by separating a component Dd due to displacement of the mirror portion 102 and a component Dt due to tilt.
  • the displacement amount Ds of the sensor beam 304 is normalized by the displacement of Dh of the optical component 208, a length L from a fixed point to the fixed member 103 to the mirror portion 102 of the support member 108 by a length L 0 of the support member normalized, and the ordinate, the displacement amount Dh of the sensor beam displacement Ds / optical components on the light receiving element 115, the horizontal axis is the length L 0 of length L / support member from the fixed point to the mirror unit 102 Represents.
  • the length L 0 of the support member means the length from the fixed point to the connection point between the support member 108 and the holder 107 as shown in FIG.
  • the displacement amount Ds of the sensor beam 304 is mainly caused by the inclination of the mirror unit 102. Therefore, in the region where the inclination of the mirror portion 102 is small near the fixing point to the fixing member 103 and the value on the vertical axis in FIG. 9 is smaller than 1, the displacement Ds of the sensor beam 304 is smaller than the displacement of the optical component 108b. There is.
  • the displacement component Dd of the sensor beam 304 due to the displacement of the mirror unit 102 and the displacement component Dt of the sensor beam 304 due to the tilt of the mirror unit 102 are added. Since the value of the vertical axis of is larger than 1, the displacement amount Ds of the sensor light beam 304 on the light receiving element 115 is larger than the displacement amount Dh of the optical element 208, and the displacement can be measured with high sensitivity.
  • Ds / Dh becomes 1 or more only by the displacement component Dt due to the inclination, and therefore, from the displacement amount Dh of the optical component regardless of the incident angle ⁇ i. Can be detected as the sensor beam displacement amount Ds. That is, if the position of the mirror part 102 is set so that L / L 0 in the optical component driving mechanism 402 according to the present invention is 0.2 or more and 0.8 or less, it is high even for a minute displacement of the optical component. Displacement can be detected with sensitivity.
  • the displacement component Dd of the sensor beam 304 on the light receiving element 115 due to the displacement of the mirror unit 102 is Get smaller.
  • the displacement component Dt of the sensor light beam 304 on the light receiving element 115 due to the displacement of the mirror unit 102 becomes small.
  • the displacement component of the sensor light beam 304 on the light receiving element 115 regardless of the incident angle ⁇ i.
  • the optical component driving mechanism 402 has a configuration in which the interval w between the light receiving element 115 of the displacement detecting element M1 and the mirror unit 102 is at least one third.
  • the optical component driving mechanism 402 has a numerical value corresponding to the vertical axis in FIG. 9, that is, the sensor light beam displacement amount Ds and the optical component displacement amount Dh, in advance when designing the displacement detection element M1.
  • the displacement amount Dh of the optical component can be obtained from the sensor light beam displacement amount Ds.
  • the holder 107 also moves in the Z′-axis direction independently of the displacement in the X′-axis direction. As a result, the support member 108 and the mirror portion 102 are displaced in the Z′-axis direction.
  • FIG. 10A shows the optical component drive mechanism 402 in the ⁇ Z ′ direction in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the ⁇ Z ′ direction. It is the schematic seen in.
  • FIG. 10B shows an optical component driving mechanism 402 in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the ⁇ Z ′ direction. It is the schematic seen in the direction.
  • the displacement detection element M1 operates as an element that can measure only the displacement of the optical component 208 in the X′-axis direction.
  • the displacement detection element M2 in the Z′-axis direction of the optical component 208 is detected using the mirror unit 106 whose normal to the reflection surface is in the Z′-axis direction, and the principle is the X′-axis. This is the same as the direction displacement detecting element M1.
  • the irradiation area of the sensor light beam 304 on the light receiving element 115 is reduced. For this reason, the rate of change in the amount of sensor light applied to each of the light receiving portions 115a and 115b of the light receiving element 115 with respect to the displacement of the optical component 208 increases, so that the displacement sensitivity of the optical component 208 is high.
  • this invention is not limited to an above-described Example, Various modifications are included.
  • the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described.
  • a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment.

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Abstract

The purpose of the present invention is to provide an optical component driving device and the like that detect with high sensitivity the displacement of an optical component in order to control with high accuracy the position of the optical component. To achieve this purpose, this representative optical component driving device is provided with the following: an optical component; a holder to which the optical component is attached; a support member that is connected to a fixed member and that displaceably supports the holder with respect to the fixed member; a reflection member that is provided to a portion of the support member and that has a surface which is roughly orthogonal to the displacement direction of the holder; a light emitting element that projects light towards the reflection member; and a light receiving element that receives reflected light reflected by the reflection member.

Description

光学部品駆動装置、および、光記録装置Optical component driving apparatus and optical recording apparatus
　本発明は、光学部品駆動装置および光記録装置に関するものである。 The present invention relates to an optical component driving apparatus and an optical recording apparatus.
　光学部品の位置を検出する方法として、以下の文献では、センサで変位情報を取得する方式が開示されている。 As a method for detecting the position of an optical component, the following document discloses a method for acquiring displacement information with a sensor.
　特許文献１では、光学部品である対物レンズを固定するホルダに棒状の遮光具が固定され、発光素子から受光素子に照射される光の一部を遮光し、受光素子は四つに分割されており、遮光される位置が変わると四つの受光素子の受光量に差が生じ、その受光量差から対物レンズの変位を算出する方式が開示されている。 In Patent Document 1, a rod-shaped light-shielding tool is fixed to a holder that fixes an objective lens that is an optical component, a part of light irradiated from the light-emitting element to the light-receiving element is shielded, and the light-receiving element is divided into four parts. In addition, a method is disclosed in which when the light-shielded position changes, a difference occurs in the amount of light received by the four light receiving elements, and the displacement of the objective lens is calculated from the difference in the amount of received light.
特開平３－１１３８３５号公報Japanese Patent Laid-Open No. 3-113835
　上記特許文献１の技術では、受光素子面積に対して光学部品である対物レンズの変位量が小さい時、様々な雑音強度に対する十分な信号強度（Ｓ/Ｎ）を得ることが困難である。この場合、対物レンズの微小な変位に対するサーボ制御が困難になる可能性があった。 In the technique of Patent Document 1, it is difficult to obtain a sufficient signal intensity (S / N) for various noise intensities when the displacement amount of the objective lens that is an optical component is small with respect to the area of the light receiving element. In this case, servo control for a minute displacement of the objective lens may be difficult.
　本発明の目的は、光学部品の位置を高精度に制御するために、光学部品の変位を高感度に検出する光学部品駆動装置等を提供することを目的とする An object of the present invention is to provide an optical component driving device or the like that detects a displacement of an optical component with high sensitivity in order to control the position of the optical component with high accuracy.
　上記課題を解決するために、代表的な本発明の光学部品駆動装置は、光学部品と、前記光学部品が取付けられたホルダと、固定部材に接続され、当該固定部材に対して前記ホルダを変位可能に支持する支持部材と、前記支持部材の一部に設けられ、前記ホルダの変位方向と略直交する面を有する反射部材と、前記反射部材へ光線を照射する発光素子と、前記反射部材で反射された反射光線を受光する受光素子と、を備える。 In order to solve the above-described problems, a representative optical component driving device according to the present invention is connected to an optical component, a holder to which the optical component is attached, and a fixed member, and the holder is displaced with respect to the fixed member. A supporting member that can be supported; a reflecting member that is provided on a part of the supporting member and has a surface that is substantially orthogonal to the displacement direction of the holder; a light emitting element that irradiates the reflecting member with light; and the reflecting member. A light receiving element that receives the reflected reflected light.
　本発明によれば、光学部品の変位を高感度に検出する光学部品駆動等を提供できる。
ADVANTAGE OF THE INVENTION According to this invention, the optical component drive etc. which detect the displacement of an optical component with high sensitivity can be provided.
光記録装置の構成の一例を示したものである。1 shows an example of the configuration of an optical recording apparatus. 記録媒体に入射する参照光線と、記録領域で回折された再生光線を説明する図である。It is a figure explaining the reference light beam which injects into a recording medium, and the reproduction light beam diffracted by the recording area. 本発明の実施例１に係わる光学部品駆動機構の動作を説明する図である。It is a figure explaining operation | movement of the optical component drive mechanism concerning Example 1 of this invention. 本発明の実施例１に係わる光学部品駆動機構の動作を説明する図である。It is a figure explaining operation | movement of the optical component drive mechanism concerning Example 1 of this invention. 本発明の実施例１に係わる光学部品駆動機構の動作を説明する図である。It is a figure explaining operation | movement of the optical component drive mechanism concerning Example 1 of this invention. 光学部品駆動機構の構造を説明する図である。It is a figure explaining the structure of an optical component drive mechanism. 図４の光学部品の位置情報を検出する変位検出素子の動作を説明するための概略図である。It is the schematic for demonstrating operation | movement of the displacement detection element which detects the positional information on the optical component of FIG. ミラー部で反射し変位検出素子の受光素子に照射されるセンサ光線と、受光素子上の受光部の位置関係を説明する図である。It is a figure explaining the positional relationship of the sensor light beam reflected on a mirror part and irradiated to the light receiving element of a displacement detection element, and the light receiving part on a light receiving element. 光学部品の変位量と変位検出素子から出力される変位信号を説明する図である。It is a figure explaining the displacement signal output from the displacement amount of an optical component, and a displacement detection element. ミラー部の変位と受光素子上でのセンサ光線の位置関係を説明する図である。It is a figure explaining the positional relationship of the displacement of a mirror part, and the sensor beam on a light receiving element. ミラー部の傾斜と受光素子上でのセンサ光線の位置の関係を説明する図である。It is a figure explaining the relationship between the inclination of a mirror part, and the position of the sensor light beam on a light receiving element. 支持部材におけるミラー部の位置と、光学部品がＸ’軸方向に変位した時の受光素子上でのセンサ光線位置を示したグラフである。It is the graph which showed the position of the mirror part in a supporting member, and the sensor beam position on the light receiving element when an optical component displaced to the X'-axis direction. ＋Ｘ’方向に変位しているホルダが、－Ｚ’方向に変位した時のミラー部とセンサ光線との位置関係を説明するために光学部品駆動機構を－Ｚ方向に見た概略図である。FIG. 5 is a schematic view of an optical component driving mechanism viewed in the −Z direction in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the −Z ′ direction. ＋Ｘ’方向に変位しているホルダが、－Ｚ’方向に変位した時のミラー部とセンサ光線との位置関係を説明するために光学部品駆動機構を－Ｘ方向に見た概略図である。FIG. 6 is a schematic view of an optical component driving mechanism viewed in the −X direction in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the −Z ′ direction.
　以下、本発明の実施例について図面を用いて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　本発明の本実施例に係る光記録装置の構成について、図面を参照して説明する。 The configuration of the optical recording apparatus according to this embodiment of the present invention will be described with reference to the drawings.
　図１は、光記録装置４０１の構成を示したものである。 FIG. 1 shows the configuration of the optical recording apparatus 401.
　初めに、記録媒体２１５に情報を記録する手順を説明する。 First, a procedure for recording information on the recording medium 215 will be described.
　光源２０１を出射した光線３００はシャッタ２０２で通過する時間を制限される。光線３００はシャッタ２０２通過後、２分の１波長板２０３でＰ偏光とＳ偏光の割合を制御された後、偏光ビームスプリッタ２０４で信号光線３０１と参照光線３０２とに分離される。信号光線３０１はいくつかの光学素子を透過後、偏光ビームスプリッタ２０５で反射し、空間光変調器２０６に入射する。空間光変調器２０６で情報を付加された信号光線３０１は偏光ビームスプリッタ２０５を透過した後、リレーレンズ２０７内に配置した光学部品２０８で信号光線に含まれる不要な周波数成分等を除去された後、対物レンズ２０９を透過し、記録媒体２１５に集光する。 The time for which the light beam 300 emitted from the light source 201 passes through the shutter 202 is limited. After the light beam 300 passes through the shutter 202, the ratio of P-polarized light and S-polarized light is controlled by the half-wave plate 203, and then is separated into the signal light beam 301 and the reference light beam 302 by the polarization beam splitter 204. The signal light beam 301 passes through several optical elements, is reflected by the polarization beam splitter 205, and enters the spatial light modulator 206. The signal beam 301 to which information is added by the spatial light modulator 206 is transmitted through the polarization beam splitter 205, and then an unnecessary frequency component included in the signal beam is removed by the optical component 208 disposed in the relay lens 207. Then, the light passes through the objective lens 209 and is condensed on the recording medium 215.
　一方、参照光線３０２はいくつかの光学素子を透過後、ガルバノミラー２１１で記録媒体２１５に入射する角度を制御される。 On the other hand, the angle at which the reference beam 302 enters the recording medium 215 is controlled by the galvanometer mirror 211 after passing through some optical elements.
　信号光線３０１と参照光線３０２を記録媒体２１５中で重ね合わせると、記録媒体２１５内には信号光線３０１と参照光線３０２で形成される干渉縞が記録され、これにより情報を記録する。また、記録媒体２１５に入射する参照光線３０２の角度をガルバノミラー２１１で変化させると、入射角度毎に記録ができるため、角度多重記録ができる。 When the signal beam 301 and the reference beam 302 are overlapped in the recording medium 215, interference fringes formed by the signal beam 301 and the reference beam 302 are recorded in the recording medium 215, thereby recording information. Further, when the angle of the reference light beam 302 incident on the recording medium 215 is changed by the galvanometer mirror 211, recording can be performed at each incident angle, so that angle multiplex recording can be performed.
　次に、記録媒体２１５に記録した情報を再生する手順を説明する。 Next, a procedure for reproducing information recorded on the recording medium 215 will be described.
　図２は、記録媒体２１５に入射する参照光線３０２と、記録領域２１９で回折された再生光線３０３を説明する図である。 FIG. 2 is a diagram for explaining the reference light beam 302 incident on the recording medium 215 and the reproduction light beam 303 diffracted by the recording area 219.
　記録媒体２１５に記録した情報を再生する時は、図２に示すように、参照光線３０２のみを記録媒体２１５に照射する。参照光線３０２は記録媒体２１５を透過した後、ガルバノミラー２１２で同一光軸上に反射される。ガルバノミラー２１２で反射された参照光線３０２は再び記録媒体２１５に入射すると、記録媒体２１５に記録された記録領域２１９で回折され、再生光線３０３として対物レンズ２０９に入射する。対物レンズ２０９に入射した再生光線３０３は、図１で示した光学部品２０８の開口部を透過し、偏光ビームスプリッタ２０５で反射された後、受光素子２１８に入射し、記録した情報が再生される。また図２に示すように、記録媒体２１５の記録領域２１９に入射する参照光線３０２の入射角度θを変化させると、記録時の参照光線３０２の入射角度θ1、θ2、・・・θnと一致した入射角度において再生光線３０３の強度が大きくなり、角度多重した情報を個別に再生できる。 
　次に、再生時に外部振動等により記録媒体２１５の位置が変化した時、光記録装置４０１の特性に与える影響について説明する。 When reproducing the information recorded on the recording medium 215, only the reference beam 302 is irradiated to the recording medium 215 as shown in FIG. The reference light beam 302 passes through the recording medium 215 and is reflected on the same optical axis by the galvanometer mirror 212. When the reference light beam 302 reflected by the galvano mirror 212 is incident on the recording medium 215 again, it is diffracted by the recording area 219 recorded on the recording medium 215 and enters the objective lens 209 as a reproduction light beam 303. The reproduction light beam 303 incident on the objective lens 209 passes through the opening of the optical component 208 shown in FIG. 1, is reflected by the polarization beam splitter 205, and then enters the light receiving element 218 to reproduce the recorded information. . Further, as shown in FIG. 2, varying the incident angle theta of the reference beam 302 incident on the recording area 219 of the recording medium 215, the incident angle theta 1 of the recording time of the reference beam 302, theta 2, · · · theta n The intensity of the reconstructed light beam 303 is increased at the incident angle that coincides with the angle information, and the angle multiplexed information can be reproduced individually.
Next, the influence on the characteristics of the optical recording apparatus 401 when the position of the recording medium 215 changes due to external vibration or the like during reproduction will be described.
　図３は、光学部品駆動機構４０２の動作を説明する図である。 FIG. 3 is a diagram for explaining the operation of the optical component driving mechanism 402.
　記録媒体が所定の位置にある時は、図３（ａ）に示すように、記録媒体２１５から回折された再生光線３０３は対物レンズ２０９やリレーレンズ２０７で集光され、その集光点５０１は光学部品２０８の開口部を透過する。しかし、図３（ｂ）に示すように、記録媒体２１５が例えば＋Ｘ’方向に変位すると、記録媒体２１５から回折される再生光線３０３の発生位置は＋Ｘ’方向に変位する。それにより、再生光線３０３が集光される集光点は光学部品２０８上で－Ｘ’方向の集光点５０２に変位する。そのため、再生光線３０３は光学部品２０８の開口部周囲で遮光され、受光素子２１８に到達する光量が減少して再生信号が劣化する。 When the recording medium is at a predetermined position, as shown in FIG. 3A, the reproduction light beam 303 diffracted from the recording medium 215 is condensed by the objective lens 209 and the relay lens 207, and the condensing point 501 is It passes through the opening of the optical component 208. However, as shown in FIG. 3B, when the recording medium 215 is displaced in the + X ′ direction, for example, the position where the reproduction light beam 303 diffracted from the recording medium 215 is displaced in the + X ′ direction. As a result, the condensing point where the reproduction light beam 303 is condensed is displaced to the condensing point 502 in the −X ′ direction on the optical component 208. For this reason, the reproduction light beam 303 is shielded around the opening of the optical component 208, and the amount of light reaching the light receiving element 218 is reduced to deteriorate the reproduction signal.
　そこで、図３（ｃ）に示すように、光学部品駆動機構４０２で光学部品２０８の位置を－Ｘ’方向に変位させ、光学部品２０８の開口部に再生光線３０３を透過させることで、受光素子２１８に到達する再生光線３０３の光量低下を防ぐ。具体的には、光学部品２０８等に設けた図示しない受光素子、または、光学部品駆動機構４０２の背面に設けられた図示しない受光素子によって再生光線３０３の集光位置を監視しており、再生光線３０３の集光位置が変位すると、その変位に追従するように光学部品２０８を変位させる。上記動作により、記録媒体２１５の位置変動による再生信号の劣化を防ぐ。 Therefore, as shown in FIG. 3C, the optical component driving mechanism 402 displaces the position of the optical component 208 in the −X ′ direction, and transmits the reproduction light beam 303 through the opening of the optical component 208, thereby receiving the light receiving element. A reduction in the amount of the reproduction light beam 303 that reaches 218 is prevented. Specifically, the condensing position of the reproduction beam 303 is monitored by a light receiving element (not shown) provided on the optical component 208 or the like or a light receiving element (not shown) provided on the back surface of the optical component driving mechanism 402. When the condensing position 303 is displaced, the optical component 208 is displaced so as to follow the displacement. By the above operation, the reproduction signal is prevented from deteriorating due to the position fluctuation of the recording medium 215.
　なお、記録媒体２１５がＹ’軸方向に変位した時は光学部品２０８を－Ｙ’軸方向に移動させ、記録媒体２１５がＺ’軸方向に変位した時は光学部品２０８をＺ’軸方向に移動させることで再生信号の劣化を防ぐことが可能になる。 When the recording medium 215 is displaced in the Y′-axis direction, the optical component 208 is moved in the −Y′-axis direction. When the recording medium 215 is displaced in the Z′-axis direction, the optical component 208 is moved in the Z′-axis direction. It is possible to prevent the reproduction signal from deteriorating by moving it.
　ここで、上記の制御によって光学部品２０８を記録媒体２１５の変位に対応した最適な位置に移動することができるが、光学部品２０８の位置は記録媒体２１５の再生動作等によってずれてしまう可能性がある。その際、再生光線３０３が発せされていれば、改めて最適な位置へ光学部品２０８を変位させることが可能であるが、再生光線３０３は常に発せられているわけではない。そのため、再生光線３０３によらず光学部品２０８の位置ずれを監視することが必要である。 Here, the optical component 208 can be moved to an optimal position corresponding to the displacement of the recording medium 215 by the above control, but the position of the optical component 208 may be shifted by a reproducing operation of the recording medium 215 or the like. is there. At this time, if the reproduction light beam 303 is emitted, the optical component 208 can be displaced to the optimum position again, but the reproduction light beam 303 is not always emitted. Therefore, it is necessary to monitor the positional deviation of the optical component 208 regardless of the reproduction beam 303.
　以下に、光学部品２０８の位置変位を検出するとともに、光学部品２０８を精密に変位させる光学部品駆動機構４０２の具体的な構成を示す。 Hereinafter, a specific configuration of the optical component driving mechanism 402 that detects the positional displacement of the optical component 208 and precisely displaces the optical component 208 will be described.
　図４は、電磁駆動でＸ’軸方向とＺ’軸方向の二軸方向に光学部品２０８を駆動する光学部品駆動機構４０２の構造を説明する図である。 FIG. 4 is a diagram for explaining the structure of the optical component driving mechanism 402 that drives the optical component 208 in the two axial directions of the X′-axis direction and the Z′-axis direction by electromagnetic driving.
　図４に示す光学部品駆動機構４０２においてホルダ１０７は光学部品２０８とＺ’軸方向駆動用コイル１１１とＸ’軸方向駆動用コイル１１２が搭載され、さらに、ホルダ１０７は支持部材１０８を介して固定部材１０３と連結されている。また、Ｘ’軸方向の変位を検出する変位検出素子Ｍ１、及び、Ｚ’軸方向の変位を検出する変位検出素子Ｍ２は、センサ光線３０４を出射する発光素子１１３と、拡散するセンサ光線３０４を収束するレンズ１１４と、平面上のミラー部１０２で反射したセンサ光線３０４を受光する受光素子１１５とから構成されている。 In the optical component driving mechanism 402 shown in FIG. 4, the holder 107 is mounted with an optical component 208, a Z′-axis direction driving coil 111, and an X′-axis direction driving coil 112, and the holder 107 is fixed via a support member 108. The member 103 is connected. The displacement detection element M1 that detects displacement in the X′-axis direction and the displacement detection element M2 that detects displacement in the Z′-axis direction include a light emitting element 113 that emits a sensor light beam 304 and a sensor light beam 304 that diffuses. The lens 114 includes a converging lens 114 and a light receiving element 115 that receives the sensor light beam 304 reflected by the mirror 102 on the plane.
　光学部品２０８を搭載したホルダ１０７は、ヨーク１０９と磁石１１０で挟まれている。コイル１１１と１１２に電流が流れると、それぞれＺ’軸方向とＸ’軸方向に変位する。 The holder 107 on which the optical component 208 is mounted is sandwiched between the yoke 109 and the magnet 110. When current flows through the coils 111 and 112, they are displaced in the Z'-axis direction and the X'-axis direction, respectively.
　本発明では、ホルダ１０７の二軸方向の位置を高精度に検出するために、各軸方向の変位に対してそれぞれ一個の高感度な変位検出素子を設ける。そして、これら変位検出素子Ｍ１、Ｍ２によって光学部品２０８の変位を検出すると、Ｚ’軸方向駆動用コイル１１１、Ｘ’軸方向駆動用コイル１１２に電流を流し、光学部品２０８の変位を打ち消すようホルダ１０７を変位させることで光学部品２０８の位置がずれないよう制御する。 In the present invention, in order to detect the position of the holder 107 in the biaxial direction with high accuracy, one highly sensitive displacement detecting element is provided for each axial displacement. When the displacement detection elements M1 and M2 detect the displacement of the optical component 208, a current is passed through the Z′-axis direction driving coil 111 and the X′-axis direction driving coil 112 to cancel the displacement of the optical component 208. Control is performed so that the position of the optical component 208 is not displaced by displacing the lens 107.
　図５は、図４に示す光学部品駆動機構４０２をＺ’軸方向から見た図であり、図４の光学部品２０８の位置を検出する変位検出素子Ｍ１の動作を説明するための概略図である。 5 is a diagram of the optical component driving mechanism 402 shown in FIG. 4 as viewed from the Z′-axis direction, and is a schematic diagram for explaining the operation of the displacement detection element M1 that detects the position of the optical component 208 of FIG. is there.
　図６はミラー部１０２で反射し、変位検出素子Ｍ１の受光素子１１５に照射されるセンサ光線３０４と、受光素子１１５上の受光部１１５ａ、１１５ｂの位置関係を説明する図である。 FIG. 6 is a diagram for explaining the positional relationship between the sensor light beam 304 reflected by the mirror unit 102 and applied to the light receiving element 115 of the displacement detecting element M1, and the light receiving parts 115a and 115b on the light receiving element 115.
　図５に示すように、光学部品２０８を搭載しているホルダ１０７がＸ’軸方向に変位すると、ホルダ１０７を支える支持部材１０８はホルダ１０７の変位量に応じて撓む。そこで、光学部品２０８のＸ’軸方向の変位を、ホルダ１０７を支える支持部材１０８に設けたミラー部１０２の変位と傾きによるセンサ光線３０４の変位量で算出する。 As shown in FIG. 5, when the holder 107 on which the optical component 208 is mounted is displaced in the X′-axis direction, the support member 108 that supports the holder 107 bends according to the amount of displacement of the holder 107. Therefore, the displacement in the X′-axis direction of the optical component 208 is calculated by the displacement amount of the sensor light beam 304 due to the displacement and inclination of the mirror portion 102 provided on the support member 108 that supports the holder 107.
　以下に変位検出素子Ｍ１でのミラー部１０２の変位と傾きによるセンサ光線３０４の変位量の測定原理を説明する。 Hereinafter, the measurement principle of the amount of displacement of the sensor beam 304 due to the displacement and inclination of the mirror unit 102 in the displacement detection element M1 will be described.
　図５に示すように、Ｘ’軸方向の変位を測定する変位検出素子Ｍ１で測定対象となるミラー部１０２において、反射面の法線は所定の位置でＸ’軸に平行である。発光素子１１３から出射し、レンズ１１４で収束されたセンサ光線３０４は、支持部材１０８のミラー部１０２で反射し、受光素子１１５に照射される。例えば、ホルダ１０７が＋Ｘ’方向にＤｈ変位すると、ミラー部１０２は変位と傾きを起こす。それにより、図６に示すように、初期に受光素子１１５上の２つの受光部１１５ａと受光部１１５ｂの中間位置に照射されているセンサ光線３０４は、ミラー部１０２の変位と傾きに伴い＋Ｙ’方向にＤｓ変位した位置に移動する。受光素子１１５の受光部Ａ１１５ａと受光部Ｂ１１５ｂからは、それぞれに入射したセンサ光線３０４の光量に応じた強度の信号が発生する。 As shown in FIG. 5, in the mirror unit 102 to be measured by the displacement detection element M1 that measures the displacement in the X′-axis direction, the normal line of the reflecting surface is parallel to the X′-axis at a predetermined position. The sensor light beam 304 emitted from the light emitting element 113 and converged by the lens 114 is reflected by the mirror portion 102 of the support member 108 and irradiated to the light receiving element 115. For example, when the holder 107 is displaced by Dh in the + X ′ direction, the mirror unit 102 is displaced and tilted. As a result, as shown in FIG. 6, the sensor light beam 304 initially irradiated to the intermediate position between the two light receiving portions 115 a and 115 b on the light receiving element 115 is + Y ′ as the mirror portion 102 is displaced and inclined. Move to a position displaced by Ds in the direction. From the light receiving part A 115 a and the light receiving part B 115 b of the light receiving element 115, a signal having an intensity corresponding to the amount of the sensor light beam 304 incident thereon is generated.
　図７は、光学部品２０８の変位量と変位検出素子Ｍ１から出力される変位信号を説明する図である。 FIG. 7 is a diagram for explaining the displacement amount of the optical component 208 and the displacement signal output from the displacement detection element M1.
　光学部品２０８の変位に伴う受光部１１５ａ、１１５ｂからの信号を演算回路１１６で差分すると、図７に示すように光学部品２０８の変位量に応じた変位信号が得られる。この変位信号を制御回路２１７で処理し、光学部品駆動機構４０２の光学部品２０８位置を制御する。 When the signals from the light receiving portions 115a and 115b accompanying the displacement of the optical component 208 are differentiated by the arithmetic circuit 116, a displacement signal corresponding to the displacement amount of the optical component 208 is obtained as shown in FIG. This displacement signal is processed by the control circuit 217 to control the position of the optical component 208 of the optical component driving mechanism 402.
　図８（ａ）は、ミラー部１０２の変位と受光素子１１５上でのセンサ光線３０４の位置の関係を説明する図である。図８（ｂ）は、ミラー部１０２の傾斜と受光素子１１５上でのセンサ光線３０４の位置の関係を説明する図である。 FIG. 8A is a diagram for explaining the relationship between the displacement of the mirror unit 102 and the position of the sensor light beam 304 on the light receiving element 115. FIG. 8B is a diagram for explaining the relationship between the tilt of the mirror unit 102 and the position of the sensor light beam 304 on the light receiving element 115.
　図５に示したミラー部１０２の撓みは、図８（ａ）に示すミラー部１０２の変位と、図８（ｂ）に示すミラー部１０２の傾斜が重畳したものである。 The deflection of the mirror unit 102 shown in FIG. 5 is a result of the displacement of the mirror unit 102 shown in FIG. 8A and the inclination of the mirror unit 102 shown in FIG.
　ミラー部１０２がＸ’軸方向に変位する図８（ａ）に示す条件において、受光素子１１５上でのセンサ光線位置変位Ｄｄは、センサ光線３０４がミラー部１０２に入射する入射角度θiの増加にともない大きくなる。なお、入射角度θiはミラー部１０２の反射面法線とセンサ光線３０４とのなすθZ方向の角度である。また、ミラー部１０２がθZ方向に－θm傾斜する図８（ｂ）に示す条件において、受光素子１１５上でのセンサ光線位置変位Ｄｔは、ミラー部１０２が傾斜した角度の二倍となる2θmに比例した変位となる。なお、受光素子１１５とミラー部１０２との間隔をｗとする。 Under the conditions shown in FIG. 8A in which the mirror unit 102 is displaced in the X′-axis direction, the sensor light beam position displacement Dd on the light receiving element 115 is increased by the incident angle θ i at which the sensor light beam 304 enters the mirror unit 102. It grows with it. The incident angle θ i is an angle in the θ Z direction formed by the normal to the reflecting surface of the mirror unit 102 and the sensor light beam 304. Further, in the condition shown in FIG. 8 (b) of the mirror unit 102 - [theta] m inclined theta Z-direction, the sensor beam position displacement Dt of on the light receiving element 115 becomes twice the angle the mirror unit 102 is inclined The displacement is proportional to 2θ m . Note that the interval between the light receiving element 115 and the mirror unit 102 is w.
　図９は、支持部材１０８の固定部材１０３への固定点からミラー部１０２までの長さＬと、受光素子１１５上のセンサ光線変位量Ｄｓの関係を説明する図である。また、ミラー部１０２へ４５度の入射角θiでセンサ光線３０４が入射した条件での結果である。センサ光線変位量Ｄｓは、ミラー部１０２の変位による成分Ｄｄと傾斜による成分Ｄｔとを分離して記載している。なお、センサ光線３０４の変位量Ｄｓは光学部品２０８の変位量Ｄｈで規格化し、支持部材１０８の固定部材１０３への固定点からミラー部１０２までの長さＬは支持部材の長さＬ0で規格化し、縦軸は、受光素子１１５上のセンサ光線変位量Ｄｓ／光学部品の変位量Ｄｈで、横軸は、固定点からミラー部１０２までの長さＬ／支持部材の長さＬ0で表している。尚、支持部材の長さＬ0とは、図５に示すように固定点から支持部材１０８とホルダ１０７の接続点までの長さをいう。 FIG. 9 is a diagram for explaining the relationship between the length L from the fixing point of the support member 108 to the fixing member 103 to the mirror portion 102 and the sensor light beam displacement amount Ds on the light receiving element 115. Further, the results are obtained under the condition that the sensor light beam 304 is incident on the mirror unit 102 at an incident angle θ i of 45 degrees. The sensor light beam displacement amount Ds is described by separating a component Dd due to displacement of the mirror portion 102 and a component Dt due to tilt. Incidentally, the displacement amount Ds of the sensor beam 304 is normalized by the displacement of Dh of the optical component 208, a length L from a fixed point to the fixed member 103 to the mirror portion 102 of the support member 108 by a length L 0 of the support member normalized, and the ordinate, the displacement amount Dh of the sensor beam displacement Ds / optical components on the light receiving element 115, the horizontal axis is the length L 0 of length L / support member from the fixed point to the mirror unit 102 Represents. The length L 0 of the support member means the length from the fixed point to the connection point between the support member 108 and the holder 107 as shown in FIG.
　図９に示すように、固定点からミラー部１０２までの長さＬが短い条件では、センサ光線３０４の変位量Ｄｓは主にミラー部１０２の傾斜によって引き起こされる。そのため、固定部材１０３への固定点近傍でミラー部１０２の傾斜が小さく図９の縦軸の値が１より小さい領域では、光学部品１０８ｂの変位量よりセンサ光線３０４の変位量Ｄｓが小さくなる領域がある。一方、固定点からミラー部１０２までの長さＬが長い領域では、ミラー部１０２の変位によるセンサ光線３０４の変位成分Ｄｄとミラー部１０２の傾斜によるセンサ光線３０４の変位成分Ｄｔが加算され図９の縦軸の値が１より大きくなるため、受光素子１１５上のセンサ光線３０４の変位量Ｄｓは光学素子２０８の変位量Ｄｈよりも大きくなり、高感度に変位を測定できる特徴がある。 As shown in FIG. 9, under the condition that the length L from the fixed point to the mirror unit 102 is short, the displacement amount Ds of the sensor beam 304 is mainly caused by the inclination of the mirror unit 102. Therefore, in the region where the inclination of the mirror portion 102 is small near the fixing point to the fixing member 103 and the value on the vertical axis in FIG. 9 is smaller than 1, the displacement Ds of the sensor beam 304 is smaller than the displacement of the optical component 108b. There is. On the other hand, in the region where the length L from the fixed point to the mirror unit 102 is long, the displacement component Dd of the sensor beam 304 due to the displacement of the mirror unit 102 and the displacement component Dt of the sensor beam 304 due to the tilt of the mirror unit 102 are added. Since the value of the vertical axis of is larger than 1, the displacement amount Ds of the sensor light beam 304 on the light receiving element 115 is larger than the displacement amount Dh of the optical element 208, and the displacement can be measured with high sensitivity.
　すなわち、Ｌ／Ｌ0が０．２以上０．８以下の領域では、傾斜による変位成分ＤｔのみでＤｓ／Ｄｈが１以上となるため、入射角度θiに依らず光学部品の変位量Ｄｈよりも大きな変位量をセンサ光線変位量Ｄｓとして検出できる。つまり、本発明に係る光学部品駆動機構４０２におけるＬ／Ｌ0が、０．２以上０．８以下になるようミラー部１０２の位置を設定すれば、光学部品の微量な変位に対しても高感度に変位を検出することができる。 That is, in the region where L / L 0 is 0.2 or more and 0.8 or less, Ds / Dh becomes 1 or more only by the displacement component Dt due to the inclination, and therefore, from the displacement amount Dh of the optical component regardless of the incident angle θ i. Can be detected as the sensor beam displacement amount Ds. That is, if the position of the mirror part 102 is set so that L / L 0 in the optical component driving mechanism 402 according to the present invention is 0.2 or more and 0.8 or less, it is high even for a minute displacement of the optical component. Displacement can be detected with sensitivity.
　なお、図８（ａ）に示すように、ミラー部１０２へのセンサ光線３０４の入射角度θiが小さい場合、ミラー部１０２が変位したことによる受光素子１１５上のセンサ光線３０４の変位成分Ｄｄは小さくなる。また、図８（ｂ）に示すように、受光素子１１５とミラー部１０２との間隔ｗが小さい場合、ミラー部１０２が変位したことによる受光素子１１５上のセンサ光線３０４の変位成分Ｄｔは小さくなる。しかしながら、受光素子１１５とミラー部１０２との間隔をｗが支持部材の長さＬ0の３分の1以上である時、入射角θiに依らず受光素子１１５上のセンサ光線３０４の変位成分Ｄｔは光学素子２０８の変位量Ｄｈよりも大きくなる条件が存在する。そのため本発明に係る光学部品駆動機構４０２は、変位検出素子Ｍ１の受光素子１１５とミラー部１０２との間隔ｗは３分の1以上とする構成であることが望ましい。 As shown in FIG. 8A, when the incident angle θ i of the sensor beam 304 to the mirror unit 102 is small, the displacement component Dd of the sensor beam 304 on the light receiving element 115 due to the displacement of the mirror unit 102 is Get smaller. Further, as shown in FIG. 8B, when the interval w between the light receiving element 115 and the mirror unit 102 is small, the displacement component Dt of the sensor light beam 304 on the light receiving element 115 due to the displacement of the mirror unit 102 becomes small. . However, when the distance between the light receiving element 115 and the mirror portion 102 is not less than one third of the length L 0 of the support member, the displacement component of the sensor light beam 304 on the light receiving element 115 regardless of the incident angle θ i. There is a condition that Dt becomes larger than the displacement amount Dh of the optical element 208. Therefore, it is desirable that the optical component driving mechanism 402 according to the present invention has a configuration in which the interval w between the light receiving element 115 of the displacement detecting element M1 and the mirror unit 102 is at least one third.
　本発明の光学部品駆動機構４０２は、変位検出素子Ｍ１の設計時において、予め図９の縦軸に相当する数値、すなわち、受光素子上でのセンサ光線変位量Ｄｓと光学部品の変位量Ｄｈとの関係を記憶させることで、センサ光線変位量Ｄｓから光学部品の変位量Ｄｈを求めることが可能となる。　なお、ホルダ１０７はＸ’軸方向の変位と独立してＺ’軸方向の変位もする。それにより、支持部材１０８とミラー部１０２はＺ’軸方向に変位する。 The optical component driving mechanism 402 according to the present invention has a numerical value corresponding to the vertical axis in FIG. 9, that is, the sensor light beam displacement amount Ds and the optical component displacement amount Dh, in advance when designing the displacement detection element M1. By storing this relationship, the displacement amount Dh of the optical component can be obtained from the sensor light beam displacement amount Ds. Note that the holder 107 also moves in the Z′-axis direction independently of the displacement in the X′-axis direction. As a result, the support member 108 and the mirror portion 102 are displaced in the Z′-axis direction.
　図１０（ａ）は＋Ｘ’方向に変位しているホルダが、－Ｚ’方向に変位した時のミラー部とセンサ光線との位置関係を説明するために光学部品駆動機構４０２を－Ｚ’方向に見た概略図である。また図１０（ｂ）は、＋Ｘ’方向に変位しているホルダが、－Ｚ’方向に変位した時のミラー部とセンサ光線との位置関係を説明するために光学部品駆動機構４０２を－Ｘ’方向に見た概略図である。 FIG. 10A shows the optical component drive mechanism 402 in the −Z ′ direction in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the −Z ′ direction. It is the schematic seen in. FIG. 10B shows an optical component driving mechanism 402 in order to explain the positional relationship between the mirror portion and the sensor beam when the holder displaced in the + X ′ direction is displaced in the −Z ′ direction. It is the schematic seen in the direction.
　図１０（ａ）と図１０（ｂ）に示すように、ホルダ１０７が＋Ｘ’方向に変位した状態で－Ｚ’軸方向に変位しても、センサ光線３０４が反射されるミラー部１０２のＸ’軸方向の変位やθZ’方向の傾きはほとんど変化しない。そのため変位検出素子Ｍ１は光学部品２０８のＸ’軸方向の変位のみが測定できる素子として動作する。 As shown in FIGS. 10A and 10B, even if the holder 107 is displaced in the + X ′ direction, even if the holder 107 is displaced in the −Z ′ axis direction, the sensor beam 304 is reflected by X. The displacement in the 'axial direction and the inclination in the θ Z' direction hardly change. Therefore, the displacement detection element M1 operates as an element that can measure only the displacement of the optical component 208 in the X′-axis direction.
　なお図４に示すように、光学部品２０８のＺ’軸方向の変位検出素子Ｍ２は、反射面の法線がＺ’軸方向のミラー部１０６を用いて検出しており、原理はＸ’軸方向の変位検出素子Ｍ１と同じである。 As shown in FIG. 4, the displacement detection element M2 in the Z′-axis direction of the optical component 208 is detected using the mirror unit 106 whose normal to the reflection surface is in the Z′-axis direction, and the principle is the X′-axis. This is the same as the direction displacement detecting element M1.
　また、発光素子１１３から出射し拡散するセンサ光線３０４をレンズ１１４で収束させることで、受光素子１１５上でのセンサ光線３０４の照射領域が小さくなる。そのため、光学部品２０８の変位に対する受光素子１１５の各受光部１１５ａ、１１５ｂに照射されるセンサ光線の光量の変化割合は増大するため、光学部品２０８の変位感度が高い特徴がある。 Further, by converging the sensor light beam 304 emitted and diffused from the light emitting element 113 by the lens 114, the irradiation area of the sensor light beam 304 on the light receiving element 115 is reduced. For this reason, the rate of change in the amount of sensor light applied to each of the light receiving portions 115a and 115b of the light receiving element 115 with respect to the displacement of the optical component 208 increases, so that the displacement sensitivity of the optical component 208 is high.
　なお、本発明は上記した実施例に限定されるものではなく、様々な変形例が含まれる。例えば、上記した実施例は本発明を分かりやすく説明するために詳細に説明したものであり、必ずしも説明した全ての構成を備えるものに限定されるものではない。また、ある実施例の構成の一部を他の実施例の構成に置き換えることが可能であり、また、ある実施例の構成に他の実施例の構成を加えることも可能である。また、各実施例の構成の一部について、他の構成の追加・削除・置換をすることが可能である。
In addition, this invention is not limited to an above-described Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.
１０２　ミラー部
１０３　固定部材
１０６　ミラー部
１０７　ホルダ
１０８　支持部材
１０９　ヨーク
１１０　磁石
１１１　コイル
１１２　コイル
１１３　発光素子
１１４　レンズ
１１５　受光素子
１１５ａ　受光部
１１５ｂ　受光部
１１６　演算回路
１１７　受光素子
２０１　光源
２０２　シャッタ
２０３　２分の１波長板
２０４　偏光ビームスプリッタ
２０５　偏光ビームスプリッタ
２０６　空間光変調器
２０７　リレーレンズ
２０８　光学部品２０９　対物レンズ
２１１　ガルバノミラー
２１２　ガルバノミラー
２１５　記録媒体
２１７　制御回路
２１８　受光素子
２１９　記録領域
２２１　受光素子
３００　光線
３０１　信号光線
３０２　参照光線
３０３　再生光線
３０４　センサ用光線
４０１　光記録装置
４０２　光学部品駆動機構
５０１－５０２　集光点位置
Ｍ１、Ｍ２　変位検出素子 102 mirror part 103 fixing member 106 mirror part 107 holder 108 support member 109 yoke 110 magnet 111 coil 112 coil 113 light emitting element 114 lens 115 light receiving element 115a light receiving part 115b light receiving part 116 arithmetic circuit 117 light receiving element 201 light source 202 shutter 203 2 minutes 1-wave plate 204 Polarizing beam splitter 205 Polarizing beam splitter 206 Spatial light modulator 207 Relay lens 208 Optical component 209 Objective lens 211 Galvano mirror 212 Galvano mirror 215 Recording medium 217 Control circuit 218 Light receiving element 219 Recording area 221 Light receiving element 300 Light beam 301 Signal Light beam 302 Reference light beam 303 Reproducing light beam 304 Light beam for sensor 401 Optical recording device 402 Optical component driving mechanism 501-502 Condensing point position M1, M2 Displacement detecting element

Claims (6)

  1. 光学部品と、前記光学部品が取付けられたホルダと、固定部材に接続され、当該固定部材に対して前記ホルダを変位可能に支持する支持部材と、前記支持部材の一部に設けられ、前記ホルダの変位方向と略直交する面を有する反射部材と、前記反射部材へ光線を照射する発光素子と、前記反射部材で反射された反射光線を受光する受光素子と、を備える光学部品駆動装置。 An optical component; a holder to which the optical component is attached; a support member that is connected to the fixing member and supports the holder so as to be displaceable with respect to the fixing member; An optical component driving device comprising: a reflecting member having a surface substantially orthogonal to the direction of displacement of the light; a light emitting element that irradiates the reflecting member with a light beam; and a light receiving element that receives the reflected light beam reflected by the reflecting member.
  2. 　請求項１に記載の光学部品駆動装置おいて、
    　前記反射部材と前記受光素子との前記変位方向の間隔は前記支持部材の長さの３分の１以上であることを特徴とする光学部品駆動装置。     In the optical component drive device according to claim 1,
    The optical component driving apparatus according to claim 1, wherein a distance between the reflecting member and the light receiving element in the displacement direction is one third or more of a length of the support member.
  3. 　請求項１に記載の光学部品駆動装置おいて、
    　前記支持部材と前記固定部材との接続点である固定点から前記反射部材までの長さは、前記支持部材と前記ホルダとの接続点から前記固定点までの長さの０．２倍以上０．８倍以下であることを特徴とする光学部品駆動装置。     In the optical component drive device according to claim 1,
    The length from the fixing point, which is the connection point between the support member and the fixing member, to the reflecting member is not less than 0.2 times the length from the connection point between the support member and the holder to the fixing point. An optical component driving device characterized by being 8 times or less.
  4. 　請求項１に記載の光学部品駆動装置おいて、
    　前記受光素子は、前記反射光線の受光位置の変位を検出可能な受光部を備え、
    　前記受光素子が検出した前記反射光線の変位を打ち消すように前記ホルダを変位させる制御部をさらに備えることを特徴とする光学部品駆動装置。     In the optical component drive device according to claim 1,
    The light receiving element includes a light receiving unit capable of detecting a displacement of a light receiving position of the reflected light beam,
    An optical component driving apparatus, further comprising: a controller that displaces the holder so as to cancel the displacement of the reflected light beam detected by the light receiving element.
  5. 　請求項１に記載の光学部品駆動装置において、
    　前記反射部材は前記支持部材上に少なくとも２つ設けられ、一方の前記反射部材の反射面と他方の前記反射部材の反射面とは略直交することを特徴とする光学部品駆動装置。     In the optical component drive device according to claim 1,
    At least two of the reflection members are provided on the support member, and the reflection surface of one of the reflection members and the reflection surface of the other reflection member are substantially orthogonal to each other.
  6. 　請求項１に記載の光学部品駆動装置を備え、
    　記録媒体から回折された再生光線を前記光学部品を介して、レンズへ入光させることを特徴とする光記録装置。     An optical component driving device according to claim 1,
    An optical recording apparatus, wherein a reproducing light beam diffracted from a recording medium is incident on a lens through the optical component.
PCT/JP2014/061352 2014-04-23 2014-04-23 Optical component driving device and optical recording device WO2015162709A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6240630A (en) * 1985-08-16 1987-02-21 Olympus Optical Co Ltd Optical pickup
JPH01260639A (en) * 1988-04-11 1989-10-17 Nec Corp Lens actuator
JPH043342A (en) * 1990-04-20 1992-01-08 Victor Co Of Japan Ltd Actuator inspection device
JP2001209965A (en) * 2000-01-25 2001-08-03 Olympus Optical Co Ltd Optical recording/reproducing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6240630A (en) * 1985-08-16 1987-02-21 Olympus Optical Co Ltd Optical pickup
JPH01260639A (en) * 1988-04-11 1989-10-17 Nec Corp Lens actuator
JPH043342A (en) * 1990-04-20 1992-01-08 Victor Co Of Japan Ltd Actuator inspection device
JP2001209965A (en) * 2000-01-25 2001-08-03 Olympus Optical Co Ltd Optical recording/reproducing device

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