WO2015159998A1 - 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 - Google Patents
퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 Download PDFInfo
- Publication number
- WO2015159998A1 WO2015159998A1 PCT/KR2014/003193 KR2014003193W WO2015159998A1 WO 2015159998 A1 WO2015159998 A1 WO 2015159998A1 KR 2014003193 W KR2014003193 W KR 2014003193W WO 2015159998 A1 WO2015159998 A1 WO 2015159998A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vacuum
- mounting space
- hole
- passage
- release valve
- Prior art date
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
- F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
- F16K11/0716—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides with fluid passages through the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K24/00—Devices, e.g. valves, for venting or aerating enclosures
- F16K24/04—Devices, e.g. valves, for venting or aerating enclosures for venting only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
Definitions
- the present invention relates to a release valve and a vacuum pump apparatus having the valve that can be usefully applied to a vacuum transfer system using high-speed compressed air.
- Common vacuum transfer systems include a vacuum pump, adsorption pads and compressed air supply.
- the pad is connected to the suction port of the vacuum pump, whereby the vacuum pump and the inner space of the pad are in communication with each other.
- the high-speed compressed air passes through the vacuum pump and is discharged to the outside, where the internal air of the pad is attracted into the vacuum pump through the suction port and is discharged together with the compressed air.
- Patent No. 454082, Patent Publication No. 2004-11571, etc. include a vacuum pump device having a digging line formed on its own body;
- Patent Nos. 730323, 865932, and 1157542 include a vacuum system including a vacuum pump and a separate casing structure, and a vacuum system having a break line formed therein;
- the compressed air supplied to the discarding line is simultaneously delivered to the vacuum pump and the pad in the case of the electronic device, and is transferred to the pad through the vacuum pump in the latter system.
- the vacuum of the vacuum pump and the space inside the pad is simultaneously It is destroyed so that the pad and the article can be separated.
- the compressed air supplied for the destruction of the vacuum does not necessarily need to be delivered to the vacuum pump. Rather, it is preferable to selectively or preferentially deliver the compressed air to the pad in terms of energy efficiency, speed of vacuum destruction, and the like.
- the devices of the patent are all configured so that the compressed air is delivered to the pad simultaneously with or via the vacuum pump.
- each element constituting a vacuum system can be freely or universally applied in other systems of the same kind.
- each element is configured to be used only in the specification, use, and combination defined for the implementation of the patent.
- US Pat. No. 6,155,796 discloses a vacuum pump apparatus for breaking a vacuum using a control valve.
- the compressed air supplied for the destruction of the vacuum is configured to be delivered to the pad without going through a vacuum pump. But this device:
- the present invention is proposed to solve the above problems of the prior arts.
- Another object of the present invention is to provide a third object of the present invention.
- the quick-release valve of the present invention is:
- a body having an interior mounting space including a front outlet and a passage formed at one side of the mounting space and communicating with the mounting space through a hole;
- a slide valve having a rear flange portion whose outer circumferential surface contacts the inner wall of the mounting space, and a rear closed cylinder portion extending from the flange portion toward the front discharge port, the slide valve being operable to open and close the vacuum flow path by air pressure;
- a vacuum passage passing through a mounting space and an outlet from a suction port formed at one side of the body;
- a first flow passage starting from an air supply port formed at the other side of the body and connected to the rear surface of the flange portion through the mounting space to provide a slide air pressure to the valve, and a passage when the vacuum flow passage is closed by the slide;
- a discarding passage including a second passage through the hole, the mounting space, and the suction port;
- the valve may be configured so that the flange portion and the cylinder portion move forward together, so that the outlet port is blocked by the cylinder portion as the outer diameter portion of the cylinder portion comes into close contact with the inner jaw of the mounting space, thereby closing the vacuum flow path. .
- the cylinder portion is configured such that an end exhaust port extends from the flange portion toward the front outlet side and communicates with the outer mounting space through the side wall through hole; At this time, the vacuum flow path via the mounting space, the through hole, the discharge port from the suction port formed on one side of the body; The valve is operated to open and close the through hole of the cylinder portion, and opens and closes the vacuum flow path.
- the valve is:
- the flange portion and the cylinder portion move forward together so that the through hole is blocked by the outlet side inner surface and closed;
- a coaxially arranged flange portion is moved forward so that the through hole of the cylinder portion fixed to the outlet port is blocked by the inner surface of the flange portion;
- the valve is:
- a spring disposed coaxially with the outer side of the cylinder portion and having both ends contacting the front inner jaw of the mounting space and the flange portion, respectively;
- a quick release valve a second mounting space formed in front of the body to communicate with a valve exhaust port, and an ejector inserted into and fixed to the second mounting space;
- the ejector is an ejector having a second through hole formed in an outlet opening and a side wall opposite to the inserted air inlet;
- the vacuum passage extends from the valve outlet via the second mounting space, the second through hole, and the discharge port;
- the vacuum flow path is completely blocked by the operation of the slide valve, and at the same time, the discard flow path is formed. Therefore, the compressed air for the destruction of the vacuum can be delivered only to the pad, not connected to the vacuum pump or the surrounding space thereof, and therefore, there is an effect of improving the energy efficiency and the destruction speed.
- the quick release valve of the present invention independently, has the advantage that it can be universally applied to any vacuum system or device.
- the release valve may be organically coupled with the ejector part to constitute the vacuum pump apparatus of the present invention, in which compressed air for the destruction of vacuum is not connected to the ejector or its surrounding space and is only transmitted to the pad. And, therefore, there is an effect that can improve the energy efficiency and the destruction speed.
- the device has the effect of being simple to design and implement.
- FIG. 1 is a cross-sectional view of a quick release valve according to an embodiment of the present invention.
- FIG. 2 is a view for explaining the vacuum generating operation of the valve of FIG.
- Figure 3 is a view for explaining the vacuum breaking action of the valve of Figure 1;
- FIG. 4 is a cross-sectional view of a quick release valve according to another embodiment of the present invention.
- FIG. 5 is a perspective view of a vacuum pump device according to a preferred embodiment of the present invention.
- FIG. 6 is a cross-sectional view taken along the line 'A-A' of FIG.
- FIG. 7 is a cross-sectional view taken along the line 'B-B' of FIG. 5.
- the release valve 10 of the present invention includes a body 11 having an internal mounting space 15, a slide valve 12 installed in the mounting space 15, and the body. And a vacuum flow passage 13 and a waste flow passage 14 formed by using an organic configuration and operation between the 11 and the valve 12.
- the vacuum flow path and the discard flow path 14 refer to flow paths for generating and discarding a vacuum for the exhaust space, respectively.
- the body 11 includes a front outlet 15a and an inner mounting space 15 having a closed rear portion, and is formed parallel to one side of the mounting space 15 and through the hole 26 of the partition wall.
- the passage 16 communicates with the mounting space 15.
- the suction port 20 is formed on one side of the outer wall of the body 11 and the compressed air supply port 21 is formed on the other side, the suction port 20 and the supply port 21 are respectively formed in the body (11) It is connected to the mounting space (15).
- the rear part of the mounting space 15 is provided separately and closed by the finishing material 25 fastened to the body 11, but the rear part design may be variously changed as necessary.
- the valve 12 has a rear flange portion 19 whose outer circumferential surface is in contact with the inner wall of the mounting space 15, and rear closed cylinder portions 17, 34 extending from the flange portion 19 toward the front outlet port 15a. And a slide motion in the forward and backward directions by the air pressure provided on the rear surface of the flange portion 19, and the vacuum flow path 13 is opened and closed in accordance with this motion.
- valve 12 has the flange portion 19 and the cylinder portion 17 move forward, so that the outer diameter portion of the cylinder portion 17 of the inner jaw 22 of the mounting space 15 In close contact with, the outlet 15a may be blocked by the cylinder portion 17 so that the vacuum flow passage 13 may be closed. In this case, however, some problems may occur in the mounting stability of the valve 12.
- the valve 12 has a rear flange portion 19 having an outer circumferential surface in contact with an inner wall of the mounting space 15, and an end exhaust port 17a extending from the flange portion 19 toward the front outlet 15a. And a rear closed cylinder part 17 communicating with the mounting space 15 on the outside through the side wall through hole 18.
- the valve 12 slides forward and backward by the air pressure provided on the rear surface of the flange portion 19, and the through hole 18 is opened and closed according to this movement, and thus the vacuum flow path 13 It is configured to open and close.
- the slide structure of the valve 12, the flange portion 19 and the cylinder portion 17 is integrally formed and moves forward together, the through hole 18 is blocked on the inner surface of the outlet port (15a) side It is a structure that is closed.
- the coaxially arranged cross-section 'c'-shaped flange portion 33 is moved forward, the cylinder portion fixed to the outlet (15a) side
- the through hole 18 of 34 may be blocked by the inner surface of the flange portion 33 and closed.
- the release valves 12, 32 are preferably:
- a spring (23) disposed coaxially on the outside of the cylinder portion (17, 34) and having both ends in contact with the front inner jaw (22) and the flange portions (19,33) of the mounting space (15), respectively;
- the release valve 10 of the present invention is provided with a vacuum pump (V) and the suction pad (P) separately. That is, the system configuration, the vacuum pump (V) is connected to the open outlet (15a) of the body 11 mounting space 15, the pad (P) is connected to the inlet (20). As a matter of course, the vacuum pump (V) also has a suction port, the communication between the outlet port 15a of the body 11 and the suction port of the vacuum pump (V) is formed.
- the vacuum flow path 13 serves to discharge the air. That is, the vacuum flow passage 13 is connected to the external vacuum pump V in order from the inlet 20 through the mounting space 15-through-hole 18-exhaust port 17a or discharge port 15a.
- the internal air of (P) is drawn to the vacuum pump (V) along the vacuum flow path 13 and discharged together with the compressed air.
- the waste flow passage 14 serves to destroy the vacuum and negative pressure generated above.
- the discarding flow passage 14 includes two flow paths starting and branching from the supply port 21.
- the first flow passage 14a is connected to the rear surface of the flange portion 19 via the mounting space 15.
- a passage for providing a slide air pressure to the valve 12 is a passage 16-mounting space 15 (outside of the cylinder portion)-suction port when the through hole 18 is closed by the slide It is a flow path connected to the pad P via the 20 in order.
- reference numeral 24 is movably mounted to the body 11, and an end thereof extends or contracts the second flow passage 14b by interfering with the passage 16 or the partition hole 26, so that the second flow passage 14b It is a control to adjust the amount of air passing through the).
- the pressure of the air through the first flow passage 14a pushes the valve 12 forward and slides the cylinder, thus, the cylinder portion of the valve 12 By closing the through hole 18 of 17, the vacuum flow passage 13 through the vacuum pump V is completely blocked, and the second flow passage 14b is established. Then, all of the compressed air is directly supplied to the space inside the pad P, and the object is separated from the pad P while the vacuum and the negative pressure in the pad P are destroyed.
- the release valve (10,30) independent from the vacuum pump (V) is provided for the vacuum generation / destruction control.
- the compressed air for vacuum digging does not flow to the vacuum pump side, all are controlled to be directly supplied only to the suction pad (P) side.
- the application of the vacuum pump, valve, pad, etc. used in the vacuum system is not particularly limited.
- the release valve 10 is combined with the ejector part to constitute one vacuum pump device 40.
- the device 40 of the present invention has a second mounting valve configured to communicate with the above-described release valve 10 and the exhaust port 17a of the valve 12 in front of the body 11. It comprises a space 41, and the ejector 42 is fixed to the second mounting space (41).
- reference numeral 20 denotes a suction port to which the pad P is connected, similarly to reference numeral 20 of FIG. 1.
- the ejector 42 has a cylinder shape in which an inner air inlet 43 inserted into the second mounting space 41, an outlet 44 on the opposite side, and a second through hole 45 of the side wall are formed, and in the series thereof. And a plurality of nozzles assembled. In addition, a so-called check valve may be disposed inside the second through hole 45.
- this ejector 42 structure is not special in the present invention.
- the vacuum passage 13 of the release valve 10 passes through the second mounting space 41-the second through-hole 45-the discharge port 44 in order from the exhaust port 17a. It is configured to extend.
- the vacuum flow passage 13 is installed from the suction port 20 to the mounting space 15-through hole 18.
- the internal air of the pad P is attracted into the vacuum ejector 42 along the extended vacuum passage 13 and is discharged together with the compressed air.
- reference numeral 46 denotes a communication hole connecting the suction port 20 and the mounting space 15.
- the discarding flow passage 14 includes two flow passages 14a and 14b starting and branching from the supply port 21. For the formation and interaction of each branch flow passage 14a and 14b, FIG. As described in detail above, it will be omitted here.
- Reference numeral 24a denotes a control mechanism that enables to control the amount of air passing through the second flow passage 14b, similarly to reference numeral 24 of the release valves 10 and 30.
- the compressed air for vacuum destruction is controlled not to flow into the part of the ejector 42 or the second space 41 around it, but to be directly supplied only to the suction pad P side.
- the device 40 of the present invention includes a vacuum ejector 42 and a release valve 10 while being simply designed and implemented.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
Description
Claims (8)
- 전방 배출구(15a)를 포함하여 형성된 내부 장착공간(15)과, 상기 장착공간(15)의 일측에 형성되고 홀(26)을 통하여 장착공간(15)과 소통하는 통로(16)를 가지는 몸체(11);외주면이 장착공간(15)의 내벽에 접촉하는 후방 플랜지부(19,33), 상기 플랜지부(19,33)로부터 전방 배출구(15a)를 향해 연장된 후방 폐쇄형 실린더부(17,34)를 포함하며, 공기압에 의하여 진공유로(13)를 개폐하도록 작동하는 슬라이드 밸브(12,32);상기 몸체(11)의 일측에 형성된 흡입구(20)로부터 장착공간(15), 배출구(15a)를 경유하는 진공유로(13);상기 몸체의 타측에 형성된 에어 공급구(21)로부터 시작하여, 상기 장착공간(15)을 거쳐 플랜지부(19,33)의 배면으로 연결되어 상기 밸브에 슬라이드 공기압을 제공하는 제1유로(14a)와, 상기 슬라이드에 의해 진공유로(13)가 폐쇄되는 때에 통로(16), 홀(26), 장착공간(15), 흡입구(20)를 경유하는 제2유로(14b)를 포함하는 파기유로(14);를 포함하는 것을 특징으로 하는 퀵-릴리즈 밸브.
- 제1항에 있어서,상기 밸브(12,32)는:상기 플랜지부(19,33)와 실린더부(17,34)가 함께 전방으로 이동하여, 상기 실린더부(17,34)의 외경부가 장착공간(15)의 내턱(22)에 밀접하게 접촉함에 따라 상기 배출구(15a)가 실린더부(17,34)에 의해 막혀, 상기 진공유로(13)가 폐쇄되도록 구성;된 것을 특징으로 하는 퀵-릴리즈 밸브.
- 제1항에 있어서,상기 실린더부(17,34)는, 끝단 배기구(17a)가 상기 플랜지부(19,33)로부터 전방 배출구(15a) 측으로 연장되고, 측벽 통공(18)을 통하여 외측의 장착공간(15)과 소통하도록 설계되며;이때 상기 진공유로(13)는 흡입구(20)로부터 장착공간(15), 통공(18), 배출구(15a)를 경유하며;상기 밸브(12,32)는 실린더부(17,34)의 통공(18)을 개폐하도록 작동하여 상기 진공유로(13)를 개폐하는 것;을 특징으로 하는 퀵-릴리즈 밸브.
- 제3항에 있어서,상기 밸브(12,32)는:상기 플랜지부(19)와 실린더부(17)가 함께 전방으로 이동하여, 상기 통공(18)이 배출구(15a) 측 내면에 막혀 폐쇄되거나;동축적으로 배치된 플랜지부(33)가 전방으로 이동하여, 상기 배출구(15a) 측에 고정된 실린더부(34)의 통공(18)이 플랜지부(19,33)의 내면에 막혀 폐쇄되도록 구성;된 것을 특징으로 하는 퀵-릴리즈 밸브.
- 제1항 내지 4항 중 한 항에 있어서,상기 밸브(12,32)는:상기 실린더부(17,34)의 외측에 동축적으로 배치되고, 양단이 장착공간(15)의 전방 내턱(22)과 플랜지부(19,33)에 각각 접촉하는 스프링(23)을 포함하여;상기 플랜지부(19,33)의 배면에 가해진 공기압이 제거되면, 상기 스프링(23) 탄성에 의해 후방으로 이동하여 통공(18)이 개방되도록 구성;된 것을 특징으로 하는 퀵-릴리즈 밸브.
- 제1항 내지 4항 중 한 항에 있어서,상기 퀵 릴리즈 밸브는:상기 몸체(11)에 유동가능하게 장착되고, 단부가 상기 통로(16) 또는 격벽 홀(26)에 간섭하여 제2유로(14b)를 확장 또는 축소시킴으로써, 제2유로(14b)를 통과하는 에어의 양을 조절할 수 있도록 된 조절구;를 더 포함하는 것을 특징으로 하는 퀵-릴리즈 밸브.
- 제1항 내지 제4항 중 한 항의 퀵 릴리즈 밸브(10,30)와, 상기 몸체(11)의 전방에 밸브(12,32) 배기구(17a)와 소통하도록 형성된 제2장착공간(41)과, 상기 제2장착공간(41)에 삽입 고정되는 이젝터(42)를 포함하며;상기 이젝터(42)는 삽입된 내측의 에어 유입구(43)와 반대쪽 토출구(44) 및 측벽의 제2통공(45)이 형성된 이젝터(ejector)이며;상기 진공유로(13)는 배출구(15a)로부터 제2장착공간(41), 제2통공(45), 토출구(44)를 경유하도록 연장되는 것;을 특징으로 하는 진공펌프 장치.
- 제7항에 있어서,상기 밸브(12,32)는:상기 실린더부(17,34)의 외측에 동축적으로 배치되고, 양단이 장착공간(15)의 전방 내턱(22)과 플랜지부(19,33)에 각각 접촉하는 스프링(23)을 포함하여;상기 플랜지부(19,33)의 배면에 가해진 공기압이 제거되면, 상기 스프링(23) 탄성에 의해 후방으로 이동하여 통공(18)이 개방되도록 구성;된 것을 특징으로 하는 진공펌프 장치.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR2014/003193 WO2015159998A1 (ko) | 2014-04-14 | 2014-04-14 | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 |
CN201480030368.0A CN105229305A (zh) | 2014-04-14 | 2014-04-14 | 快放阀及带有快放阀的真空泵装置 |
DE112014006586.2T DE112014006586T5 (de) | 2014-04-14 | 2014-04-14 | Schnellablassventil und Vakuumpumpenvorrichtung, die dasselbe umfasst |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR2014/003193 WO2015159998A1 (ko) | 2014-04-14 | 2014-04-14 | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2015159998A1 true WO2015159998A1 (ko) | 2015-10-22 |
Family
ID=54324199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2014/003193 WO2015159998A1 (ko) | 2014-04-14 | 2014-04-14 | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN105229305A (ko) |
DE (1) | DE112014006586T5 (ko) |
WO (1) | WO2015159998A1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109737213A (zh) * | 2019-02-28 | 2019-05-10 | 星宇电子(宁波)有限公司 | 一种真空发生器用先导式开关装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200342060Y1 (ko) * | 2003-11-21 | 2004-02-14 | (주)케이.씨.텍 | 역류방지밸브를 가지는 반도체용 처리가스 공급장치의진공발생기 |
JP2005133565A (ja) * | 2003-10-28 | 2005-05-26 | Motoyama Eng Works Ltd | 真空排気装置 |
KR20090131919A (ko) * | 2008-06-19 | 2009-12-30 | 김지혁 | 이송 장치 |
KR101034649B1 (ko) * | 2009-03-12 | 2011-05-16 | (주)금성다이아몬드 | 교체가능한 진공노즐 및 체크밸브가 내장된 진공발생기 |
KR101303749B1 (ko) * | 2013-05-29 | 2013-10-08 | (주)브이텍 | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 |
-
2014
- 2014-04-14 CN CN201480030368.0A patent/CN105229305A/zh active Pending
- 2014-04-14 WO PCT/KR2014/003193 patent/WO2015159998A1/ko active Application Filing
- 2014-04-14 DE DE112014006586.2T patent/DE112014006586T5/de not_active Ceased
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005133565A (ja) * | 2003-10-28 | 2005-05-26 | Motoyama Eng Works Ltd | 真空排気装置 |
KR200342060Y1 (ko) * | 2003-11-21 | 2004-02-14 | (주)케이.씨.텍 | 역류방지밸브를 가지는 반도체용 처리가스 공급장치의진공발생기 |
KR20090131919A (ko) * | 2008-06-19 | 2009-12-30 | 김지혁 | 이송 장치 |
KR101034649B1 (ko) * | 2009-03-12 | 2011-05-16 | (주)금성다이아몬드 | 교체가능한 진공노즐 및 체크밸브가 내장된 진공발생기 |
KR101303749B1 (ko) * | 2013-05-29 | 2013-10-08 | (주)브이텍 | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 |
Also Published As
Publication number | Publication date |
---|---|
CN105229305A (zh) | 2016-01-06 |
DE112014006586T5 (de) | 2017-03-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2012121442A1 (ko) | 퀵-릴리즈 진공펌프 | |
WO2012134055A2 (ko) | 진공 그리퍼 장치 | |
WO2013162182A1 (ko) | 인-라인 진공펌프 | |
WO2012070703A1 (ko) | 건설기계용 유량 제어밸브 | |
KR101303749B1 (ko) | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 | |
US4432701A (en) | Vacuum controlling device | |
WO2019078546A1 (ko) | 흡인 및 세척을 위한 외과용 수술기구 | |
JPH03500763A (ja) | 搬送装置用往復移動式吸引装置 | |
KR940006939A (ko) | 성형가능한 유리판을 기계가공하는중에 적소에 고정 및 유지시키기 위한 장치 | |
WO2013081266A1 (ko) | 유체 이송용 커플러 | |
WO2015159998A1 (ko) | 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치 | |
KR100656835B1 (ko) | 픽 앤드 플레이스 스핀들 조립체를 위한 일체화된 공기유동 제어 | |
WO2015163630A1 (ko) | 이젝터 어셈블리 및 진공펌프 | |
WO2012011647A1 (ko) | 에어 커플러 | |
WO2021256683A1 (ko) | 진공 시스템용 에어-밸브 유닛 | |
WO2024122758A1 (ko) | 세로형 진공 그리퍼 장치 | |
WO2018043900A1 (ko) | 진공 펌프 및 그 어레이 | |
KR20160045246A (ko) | 배관 청소로봇 | |
WO2014098284A1 (ko) | 플로팅 기능이 구비된 건설기계 | |
KR100433284B1 (ko) | 진공이송 시스템용 부압 발생/해제 장치 | |
KR102232675B1 (ko) | 로봇-툴링 진공 그리퍼 장치 | |
WO2016108300A1 (ko) | 건설기계용 제어밸브 | |
WO2022097928A1 (ko) | 로봇 암 장치 | |
WO2019074340A1 (ko) | 밸브 조립체 | |
WO2021162468A1 (ko) | 방폭형 유압 비례밸브 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201480030368.0 Country of ref document: CN |
|
WWE | Wipo information: entry into national phase |
Ref document number: IDP00201507380 Country of ref document: ID |
|
WWE | Wipo information: entry into national phase |
Ref document number: 112014006586 Country of ref document: DE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 14889674 Country of ref document: EP Kind code of ref document: A1 |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 14889674 Country of ref document: EP Kind code of ref document: A1 |