WO2015085659A1 - 垫料高度测量机自动补正方法及系统 - Google Patents
垫料高度测量机自动补正方法及系统 Download PDFInfo
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- WO2015085659A1 WO2015085659A1 PCT/CN2014/070254 CN2014070254W WO2015085659A1 WO 2015085659 A1 WO2015085659 A1 WO 2015085659A1 CN 2014070254 W CN2014070254 W CN 2014070254W WO 2015085659 A1 WO2015085659 A1 WO 2015085659A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- the present invention relates to a liquid crystal display production technology, and more particularly to a pad height measuring machine automatic correction method and system.
- the litter height measuring machine is an important optical measuring machine for the TFT-LCD process, and is mainly used for measuring the height, line width and overlap of the support between the TFT substrate and the CF substrate.
- the basic principle of the litter height measuring machine is to use white light interference to illuminate the incoming light from one light source into two beams that are routed through different paths, one reflected by the mirror and the other reflected by the object to be measured; the two reflected beams are mutually Interference is generated to measure the height of the object by the difference in interference ripple.
- the light source is an LED lamp, and the attenuation of the LED lamp or the quality problem or the poor stability may cause variations in the brightness of the emitted light. The brightness variation will cause unstable measurement or major abnormality, which will not reflect the true characteristics of the product correctly, or even misjudge the abnormality of the process equipment, resulting in major production anomalies.
- the problem to be solved by the present invention is that the brightness variation of the detection light source of the existing dunnage height measuring machine may cause measurement error, and an automatic correction method and system for the dunnage height measuring machine is provided to overcome the above defects.
- the method for automatically correcting the litter height measuring machine comprises the following steps:
- the pad height measuring machine of the present invention automatically corrects the method.
- the carrier hole has a length of 1.5 cm to 2.5 cm, a width of 1.5 cm to 2.5 cm, and a depth of 0.08 cm to 0.12 cm.
- step S1 the mounting height of the corrected sample piece in the rear of the loading hole is lower than the table top of the machine table.
- step S2 further comprises:
- Adjust the source current of the probe to adjust the image quality acquired by the probe.
- the probe acquires images without speckle and the brightness is maximum, it is judged that the image acquired by the probe is a standard image.
- the method for automatically correcting the litter height measuring machine of the present invention further comprises the following steps:
- the invention also provides an automatic correction system for a litter height measuring machine, comprising a machine for placing a test sample and an outer frame surrounding the outer periphery of the machine, and further comprising parallel guide rails disposed on both sides of the outer frame, the height measurement of the litter
- the machine automatic correction system further includes a slidably mounted detection frame mounted on the guide rail and a plurality of slidable probes mounted on the detection frame, each probe including a detection light source;
- a loading hole is arranged on the machine frame or the outer frame, and a correction sample is installed in the loading hole; the automatic height correction system of the pad height measuring machine further includes a connection with the probe for shooting the correction sample and selecting a standard image standard.
- the image acquisition module is coupled with the probe and the standard image acquisition module for adjusting the current of the probe, thereby adjusting the brightness and gray scale of the image captured by the probe, so that the probe captures a standard image matching module that matches the brightness and grayscale of the image with the standard image.
- the pad height measuring machine automatic correction system of the present invention has a carrier hole length of 1.5 cm to 2.5 cm, a width of 1.5 cm to 2.5 cm, and a depth of 0.08 cm to 0.12 cm.
- the pad height measuring machine automatic correction system of the invention has a mounting height in the loading hole that is lower than the table top of the machine table.
- the pad height measuring machine automatic correction system of the invention adjusts the light source current of the probe by the standard image acquisition module.
- the image of the probe is image-free and the brightness is maximum, the image acquired by the probe is judged to be a standard image.
- the pad height measuring machine automatic correction system of the invention further comprises a correction mode selection component connected with the pad height measuring machine,
- the feed is stopped when the pad height measuring machine is idle; when the correction mode selection component performs timing correction, the correction time is set, and the current pad height is detected when the correction time is reached.
- the measuring machine is in an idle state and stops feeding when the dunnage height measuring machine is idle.
- the method and system for automatically adjusting the height measuring machine of the bedding height of the present invention corrects the detecting light source of the litter height measuring machine, so that the brightness of the light source is more stable, thereby ensuring the measurement accuracy and the detection result of the litter height measuring machine.
- the stability of the detection source can be extended by adjusting the current.
- FIG. 1 is a schematic structural view of a conventional litter height measuring machine
- FIG. 2 is a schematic structural view of a dunnage height measuring machine according to a preferred embodiment of the present invention
- FIG. 3 is a flow chart of a method for automatically correcting a dunnage height measuring machine according to a preferred embodiment of the present invention.
- FIG. 1 shows the structure of the existing litter height measuring machine.
- the litter height measuring machine comprises a machine table 120 for receiving the test sample.
- the machine table 120 is provided with a vacuum adsorption device, and the sample to be detected placed on the machine table 120 is fixed by the vacuum adsorption device to avoid subsequent interference.
- the displacement of the detection sample occurs during the light detection process, and the detection result is affected;
- the two sides of the outer frame 110 of the machine table 120 are provided with parallel guide rails 300, and the detection frame 200 slides along the guide rail 300, and the detection frame 200 is further provided with a plurality of slidable
- the probe 400 has a sliding direction perpendicular to the sliding direction of the detecting frame 200 along the guiding rail 300, so that the probe 400 can detect various positions of the surface of the machine 120; each probe 400 is provided with a detecting light source, and the detecting light source is preferably an LED. .
- the inspector places the substrate to be inspected on the machine table 120.
- the machine table 120 carries and fixes the sample to be inspected, and the inspection frame 200 slides along the guide rail 300 to a predetermined position. Then, the interfering probe light, for example, the white light LED is incident on the substrate by the split light, and the light reflected by the substrate is received by the probe 400. After detecting the image received by the analysis probe 400, the substrate can be known. Whether the litter meets the production needs.
- the interfering probe light for example, the white light LED is incident on the substrate by the split light, and the light reflected by the substrate is received by the probe 400. After detecting the image received by the analysis probe 400, the substrate can be known. Whether the litter meets the production needs.
- this detection method relies on the stability of the detection light, once the detection light is unstable, such as a circuit change of the white LED, an aging problem occurs, the result of the interference measurement is inaccurate.
- an embodiment of the present invention as shown in FIG. 2 is provided, and the structure of the existing dunnage height measuring machine is adjacent to the machine table 120 and the machine table. The structure is improved.
- the loading hole 130 is opened on the outside of the machine 120 or the machine 120.
- the position of the loading hole 130 is generally changed according to the number of the probes 400: when the number of the probes 400 on the detecting frame 200 is more than one, the machine is in the machine
- the carrier hole 130 is opened at a center position of 120; when there is only one probe 400 on the inspection frame 200, a carrier hole 130 is formed on the outer side of the machine 120, for example, the outer frame 110.
- the carrier apertures 130 are typically formed as rectangular apertures, for example, having dimensions of 1.5 cm to 2.5 cm in length, 1.5 cm to 2.5 cm in width, and 0.08 cm to 0.12 cm in depth, preferably using 2 cm x 2 cm x 0.1 cm blind holes. Then, the sample is cut into a size matching the carrier hole 130 as a correction sample; when cutting, it is necessary to ensure that the thickness of the correction sample is smaller than the depth of the carrier hole 130, and the correction sample can be ensured after being placed in the carrier hole 130. The sample will not be higher than the table top of the machine 120.
- a standard image for use as a correction standard is obtained by a standard image acquisition module connected to the probe 400: by moving the detection frame 200, the probe 400 is sequentially aligned with the correction sample, and the brightness of each probe 400 is performed.
- the process of adjusting and adjusting is as follows: starting from the lowest current to adjusting the high current to gradually increase the brightness of the detecting light source on the probe 400, and collecting the image of the real-time corrected sample with the probe 400, gradually increasing the current intensity of the input. Detect the brightness of the light source until the acquired corrected sample image does not appear to be streaked.
- the standard image acquisition module acquires the image measured by each probe 400 currently recorded, analyzes the brightness, gray scale and other parameters of the image through image processing technology, and selects any one as a standard image, and records the brightness of the standard image L0, gray Stage Y0; If there is only one probe, select the image to be taken as a standard image. After selecting the standard image, the image can be directly used when the light source is corrected later.
- the standard image matching module respectively connected to the probe 400 and the standard image acquisition module uses the standard image to perform adjustment of the light source: the probe 400 light source is gradually adjusted from a low current to a high current until the image to be measured and the standard image described above are used. Consistent, that is, the detected image brightness is equal to L0, and the gray level is Y0; and the current current values are recorded, respectively, I1, I2 , I3,... In. Where n is the number of probes 400, and these current values are set to correspond to the current value of the probe light source.
- the standard image acquisition module and the standard image matching module are integrated in a computer connected to the dunnage height measuring machine or related logic circuits, chips, etc. are installed in the dunnage height measuring machine to realize acquisition and matching of standard images.
- the height of the samples can be tested. Since the light source on the probe 400 has been set to an optimum state at this time, the accuracy of the detection result obtained is the highest.
- the current values that are passed to the light source are I1 and I2, respectively. When I3, ... In, the corresponding current value is most suitable for the light source to work, thereby avoiding the damage to the light source caused by the poor current value, thereby prolonging the working life of the light source.
- the pad height measuring machine automatic correction system further comprises a correction mode selection component for automatically correcting the automatic correction system in the manual correction and the timing correction modes.
- a correction mode selection component of the pad height measuring machine automatic correction system is switched to the manual mode, the detecting personnel starts the automatic correction process when the pad height measuring machine is idle, and the pad height measuring machine stops feeding to prevent the product from entering.
- the litter height measuring machine affects the result of automatic correction.
- the correction mode selection component When the correction mode selection component is switched to the timing correction, it is necessary to set the time in advance. When the set time is reached, it is detected whether the current dunnage height measuring machine is working, and if it is still in the working state, the waiting height is waited.
- the measuring machine switches to the idle state. In the idle state, the litter height measuring machine stops feeding, preventing the product from entering the litter height measuring machine, and affecting the result of the automatic correction. For example, after the end of each production cycle, maintenance and overhaul of the machine is required. Before the new production cycle is re-executed, the automatic correction process of the dunnage height measuring machine is performed in advance to eliminate the measurement of the litter height during the maintenance and overhaul of the machine. The influence of the machine's production parameters.
- the correction mode selection component is integrated into a computer that is communicatively coupled to the dunnage height measuring machine.
- the image obtained by the probe 400 is sent to a standard image acquisition module and a standard image matching module for analysis processing.
- the analyzed standard image and its associated brightness and grayscale information are stored in the storage space of the computer, and when waiting for subsequent correction of all the probe light sources, the standard image stored in the storage space is used for contrast correction.
- FIG. 3 is a flow chart of a method for automatically correcting a dunnage height measuring machine according to a preferred embodiment of the present invention.
- a carrier hole is opened in the middle of the machine table of the existing dunnage height measuring machine or on the outer side of the machine table.
- the length of the carrier hole is 1.5 cm to 2.5 cm, the width is 1.5 cm to 2.5 cm, and the depth is 0.08.
- step S2 is performed, and all the probes respectively take the correction sample, and gradually increase the brightness of the light source from the low point during the shooting process until the image collected by the probe does not appear to be streaked.
- image processing technology analyze the brightness, gray scale and other parameters of the image obtained by these probes, and arbitrarily select one as the standard image, record the brightness L0 of the standard image, gray scale Y0; if only the litter height measuring machine only has one The probe is selected as the standard image.
- step S3 the calibration is performed using the standard image obtained in the previous step, and all the probes 400 are subjected to current adjustment until the image to be measured is consistent with the above-mentioned standard image, usually by comparing the brightness and gray scale of the image. To determine if the probe has been adjusted to the optimum; and set the current value of the probe source. In particular, when there is only one probe, it is only necessary to record the current value of the light source of a single probe.
- the measurement of the dunnage height measuring machine of the present invention can be manually turned on by the detecting personnel, or the daily measuring can be performed by the dunnage height measuring machine when the instrument is idle.
- the manual detection program is started.
- the detecting personnel starts the automatic correction procedure when the dunnage height measuring machine is idle, and the dunnage height measuring machine stops feeding to prevent the product from entering the dunnage height measurement. Machine, affecting the results of automatic correction. Then proceed to step S1.
- the normal operation of the litter height measuring machine is resumed after all the probes have been automatically corrected.
- the litter height measuring machine can also adopt the method of timing self-starting detection.
- step S0 a program for timing automatic correction is started. Under this program, the operator needs to preset the startup time, and then after reaching the set time point, the dunnage height measuring machine detects whether the current instrument is idle, if the instrument is at this time. While still working, waiting for the litter height measuring machine to enter the idle state, at this time, the litter height measuring machine stops feeding, preventing the product to be detected from entering the litter height measuring machine, affecting the result of automatic correction.
- step S0 the process proceeds to step S1.
- the pad height measuring machine is automatically corrected once before the start of each production cycle.
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Abstract
一种垫料高度测量机自动补正方法，该方法包括：S1、在垫料高度测量机的机台（120）或外框（110）开设载物台（130）,在载物孔（130）中安装补正样片；S2、使用垫料高度测量机的探头（400）对补正样片进行拍摄，并选择标准图像；S3、调节探头（400）电流，使得探头（400）拍摄图像的亮度和灰阶与标准图像匹配。还公开了一种垫料高度测量机自动补正系统，对垫料高度测量机的检测光源进行补正，使得光源的亮度更为稳定，从而保证了垫料高度测量机的测量准确性与检测结果的稳定性；另外通过调节电流可以延长检测光源的使用寿命。
Description
本发明涉及液晶显示器生产技术，更具体地说，涉及一种垫料高度测量机自动补正方法及系统。
在液晶显示器的生产过程中，垫料高度测量机是TFT-LCD制程重要的光学量测机台，主要用于量测TFT基板与CF基板之间支撑物高度、线宽以及重叠情况等。垫料高度测量机的基本原理是利用白光干涉，从一个光源照射进入的光，分成两条经过不同路线的光束，一条经反射镜反射，另一条经要测物体的反射；两条反射光束相互产生干涉，以干涉波纹的差异来测量物体的高度。实际生产中，其光源为LED灯，LED灯的衰减或是品质问题或稳定性差，会导致发出的光亮度变异。亮度变异将会引起量测不稳定或者重大异常，从而无法正确反映产品真实特性，甚至误判制程设备异常，造成重大生产异常。
所以，为了提高量测的稳定性，减少LED亮度变异造成的量测变异，需要建立一个针对LED亮度进行自动补正的方法和系统。
本发明要解决的问题是，针对现有的垫料高度测量机的探测光源的亮度变异会造成量测的误差，提供一种垫料高度测量机自动补正方法和系统，以克服上述的缺陷。
本发明所提供的垫料高度测量机自动补正方法，包括以下的步骤：
S1、在垫料高度测量机的机台或外框开设载物孔，在载物孔中安装补正样片；
S2、使用垫料高度测量机的探头对补正样片进行拍摄，并选择标准图像；
S3、通过调节探头电流以调节探头拍摄图像的亮度和灰阶，使得探头拍摄图像的亮度和灰阶与标准图像匹配。
本发明的垫料高度测量机自动补正方法，步骤S1中，载物孔长度为1.5厘米至2.5厘米，宽度为1.5厘米至2.5厘米，深度为0.08厘米至0.12厘米。
本发明的垫料高度测量机自动补正方法，步骤S1中，补正样片在载物孔后内的安装高度低于机台的台面。
本发明的垫料高度测量机自动补正方法，其中步骤S2中，获取标准图像的步骤还包括：
调节探头的光源电流以调节探头获取的图像画质，当探头获取图像无斑纹且亮度最大时，判断探头获取的图像为标准图像。
本发明的垫料高度测量机自动补正方法，还包括以下步骤：
S0、当进行手动补正的时候，在垫料高度测量机空闲时停止进料；当进行定时补正的时候，设定补正时间，并在达到补正时间时检测当前垫料高度测量机是否处于空闲状态，在垫料高度测量机空闲时停止进料。
本发明还提供一种垫料高度测量机自动补正系统，包括用于放置检测样品的机台和围绕在机台外周的外框，还包括平行的设置在外框两侧的导轨，垫料高度测量机自动补正系统还包括可滑动的安装在导轨上的检测架和多个可滑动的安装在检测架上的探头，每个探头包括探测光源；
机台上或者外框开设有载物孔，在载物孔中安装有补正样片；垫料高度测量机自动补正系统还包括与探头连接，用于对补正样片进行拍摄，并选择标准图像的标准图像获取模块；以及与探头及标准图像获取模块连接，用于调节探头的电流，进而调节探头拍摄图像的亮度和灰阶，使得探头拍摄图像亮度和灰阶与标准图像匹配的标准图像匹配模块。
本发明的垫料高度测量机自动补正系统，载物孔长度为1.5厘米至2.5厘米，宽度为1.5厘米至2.5厘米，深度为0.08厘米至0.12厘米。
本发明的垫料高度测量机自动补正系统，补正样片在载物孔内的安装高度低于机台的台面。
本发明的垫料高度测量机自动补正系统，标准图像获取模块调节探头的光源电流，当探头获取图像无斑纹且亮度最大时，判断探头获取的图像为标准图像。
本发明的垫料高度测量机自动补正系统，还包括与垫料高度测量机连接的补正模式选择组件，
当补正模式选择组件进行手动补正的时候，在垫料高度测量机空闲时停止进料；当补正模式选择组件进行定时补正的时候，设定补正时间，并在达到补正时间时检测当前垫料高度测量机是否处于空闲状态，在垫料高度测量机空闲时停止进料。
实施本发明的垫料高度测量机自动补正方法及系统，对垫料高度测量机的检测光源进行补正，使得光源的亮度更为稳定，从而保证了垫料高度测量机的测量准确性与检测结果的稳定性；另外通过调节电流可以延长检测光源的使用寿命。
以下结合附图对本发明进行详细说明，其中：
图1为现有的垫料高度测量机的结构示意图；
图2为本发明一则优选实施例所提供的垫料高度测量机的结构示意图；
图3为本发明一则优选实施例所提供的垫料高度测量机自动补正方法的流程图。
以下结合附图和具体实施方式对本发明进行详细说明。
如图1所示为现有的垫料高度测量机的结构示意图。垫料高度测量机包括一个用于承接检测样品的机台120，通常机台120上设置有真空吸附装置，通过真空吸附装置将放置在机台120上的待检测样品固定，避免在后续的干涉光检测过程中出现检测样品的位移，影响检测结果；机台120的外框110两侧设置有平行的导轨300，检测架200沿导轨300滑动，检测架200上还设置有多个可滑动的探头400，探头400的滑动方向与检测架200沿导轨300滑动方向相垂直，使得探头400能够检测到机台120表面的各个位置；每个探头400上设有探测光源，该探测光源优选为LED。检测的时候，检测人员将待检测的基片放置在机台120上，机台120承载并固定待检测样品，检测架200沿导轨300滑动到预定的位置上。然后由具有干涉性的探测光，例如白光LED经过分光后的两束光线入射到基片上，基片反射的光线由探头400接收，经过检测分析探头400所接收到的图像，就可以知道基片上的垫料是否符合生产需要。
由于这种检测方式依赖探测光的稳定性，一旦探测光出现不稳定，例如白光LED的电路改变，出现老化等问题，干涉测量的结果就会不准确。为了将光源不稳定所带来的测量影响降至最小，提供如图2所示的本发明的一则实施例，在现有的垫料高度测量机的结构上对机台120以及机台附近的结构进行改进。在机台120或者机台120的外侧开设载物孔130，载物孔130的位置一般根据探头400的数量进行改变：当检测架200上的探头400数量多于1个的时候，在机台120的正中位置开设载物孔130；当检测架200上只有1个探头400的时候，则在机台120的外侧，例如外框110上开设载物孔130。
载物孔130通常开设成矩形孔，例如尺寸为长度为1.5厘米至2.5厘米，宽度为1.5厘米至2.5厘米，深度为0.08厘米至0.12厘米，优选使用2cm×2cm×0.1cm的盲孔。然后将样片切割成与载物孔130相匹配的大小，作为补正样片；在切割的时候需要保证补正样片的厚度小于载物孔130的深度，将补正样片放入载物孔130之后能够保证补正样片不会高于机台120的台面。
对于放入到载物孔130的补正样片，需要用粘性材料将其固定在载物孔130内，必须保证其稳定性，补正样片的位置不可出现±2μm以上的变异。以避免后续的校正过程的准确性。
当放置好补正样片之后，通过与探头400连接的标准图像获取模块来得到用于作为补正标准的标准图像：通过移动检测架200，将探头400依次对准补正样片，对各个探头400进行亮度的调节，调节的过程如下：从最低电流开始向高电流调节，以逐渐增大探头400上的探测光源的亮度，并用探头400采集实时的补正样片的图像，通过增大通入的电流强度，逐渐增加探测光源的亮度，直到采集得到的补正样片图像恰好不出现斑纹为止。由标准图像获取模块获取当前记录下的每个探头400测量的图像，通过图像处理技术，分析图像的亮度、灰阶等参数，并选择任意一个作为标准图像，记录这个标准图像的亮度L0、灰阶Y0；若只有一个探头，选其采集的图像做标准图像。当选好标准图像之后，以后进行光源补正时直接利用该图像即可。
与探头400以及标准图像获取模块分别连接的标准图像匹配模块利用这个标准图像进行光源的调整：将探头400光源进行从低电流逐渐到高电流的调节，直至使其测量的图像与上述的标准图像一致，即探测到的图像亮度等于L0，同时灰阶为Y0；并记录当前各电流值，分别为I1、I2
、I3、… In。其中n为探头400个数，将这些电流值设定为对应探头光源的电流值。
特别的，当垫料高度测量机上只设置有1个探头400的时候，只要记录单一的探头400的光源的电流值即可。
一般的，标准图像获取模块和标准图像匹配模块集成在与垫料高度测量机相连接的计算机中或者在垫料高度测量机中安装相关的逻辑电路、芯片等以实现标准图像的获取和匹配。
设定好所有的探头400上的光源电流之后，就可以进行检测样品的垫料高度。由于此时探头400上的光源已经设置成最佳的状态，其获得的检测结果的准确性最高。同时，通入到光源的电流值分别为I1、I2
、I3、… In时，对应的电流值最适合光源工作，从而避免了因电流值不佳造成的对光源的损害，进而延长了光源的工作寿命。
较佳的，该垫料高度测量机自动补正系统还包括一个补正模式选择组件，用于使自动补正系统在手动补正和定时补正两种模式下进行自动补正的程序。当垫料高度测量机自动补正系统的模式选择组件切换到手动模式时，检测人员在垫料高度测量机空闲的时候启动自动补正程序，此时垫料高度测量机停止进料，防止产品进入到垫料高度测量机，影响自动补正的结果。
当补正模式选择组件切换到定时补正时，需要预先设定时间，当到了设定的时间的时候，检测当前的垫料高度测量机是否在工作，若仍处在工作的状态就等待垫料高度测量机切换到空闲状态，在空闲状态下垫料高度测量机停止进料，防止产品进入到垫料高度测量机，影响自动补正的结果。例如，每个生产周期结束后都需要进行机器的维护检修，再重新进行新的生产周期前，预先进行一次垫料高度测量机的自动补正流程，以消除在机器维护检修期间对于垫料高度测量机的生产参数的影响。
一般的，补正模式选择组件集成在计算机内，该计算机与垫料高度测量机通信连接。由探头400获得的图像发送到标准图像获取模块和标准图像匹配模块中进行分析处理。经过分析得到的标准图像及其相关的亮度、灰阶信息保存在计算机的储存空间中，等待后续对所有的探头光源进行补正时，利用保存在储存空间中的标准图像进行对比校正。
如图3为本发明一则优选实施例所提供的垫料高度测量机自动补正方法的流程图。首先在步骤S1，在现有的垫料高度测量机的机台正中或者机台的外侧开设载物孔，载物孔长度为1.5厘米至2.5厘米，宽度为1.5厘米至2.5厘米，深度为0.08厘米至0.12厘米，优选为2cm×2cm×0.1cm的矩形孔；载物孔用于承载补正样片，并且补正样片的厚度需要小于载物孔的深度，使得补正样片放入载物孔之后保持补正样片不会超出机台的平面高度。对于放入到载物孔的补正样片，需要用粘性材料将其固定在载物孔内，必须保证其稳定性，补正样片的位置不可出现±2μm以上的变异。以避免影响后续的校正过程的准确性。
安装好补正样片之后，进行步骤S2，所有的探头分别对补正样片进行拍摄，在拍摄的过程中不断从低开始逐渐提高光源的亮度，直到探头采集的图像恰好不出现斑纹为止。通过图像处理技术，分析这些探头获得的图像的亮度、灰阶等参数，并任意地选择一个作为标准图像，记录标准图像的亮度L0、灰阶Y0；若只有垫料高度测量机仅设有一个探头，选其采集的图像做标准图像。
然后在步骤S3，利用前一步骤中获得的标准图像进行校准，将所有的探头400光源进行电流调节，直至使其测量的图像与上述的标准图像一致，通常是通过比较图像的亮度、灰阶来确定是否已经将探头调节至最佳；并设定为该探头光源的电流值。特别的，当只有1个探头的时候，只要记录单一的探头的光源的电流值即可。
较佳的，本发明的垫料高度测量机的测量可以通过检测人员手动开启补正流程，也可以由垫料高度测量机在仪器空闲的时候进行日常的自主检测。在步骤S0启动手动检测程序，在手动检测的情况下，检测人员在垫料高度测量机空闲的时候启动自动补正程序，此时垫料高度测量机停止进料，防止产品进入到垫料高度测量机，影响自动补正的结果。然后再进入步骤S1。当完成所有的探头的自动补正后才恢复垫料高度测量机的正常工作。
另外，垫料高度测量机也可以采用定时自启动检测的方式。在步骤S0启动定时自动补正的程序，在这个程序下需要由操作人员预先设定好启动时间，然后到达设定的时间点之后，垫料高度测量机检测当前的仪器是否空闲，若此时仪器仍在工作中，则等待垫料高度测量机进入空闲状态，此时垫料高度测量机停止进料，防止待检测的产品进入到垫料高度测量机，影响自动补正的结果。完成步骤S0后再进入步骤S1。一般的，设定在每个生产周期开始前，对垫料高度测量机进行一次自动补正。
以上仅为本发明具体实施方式，不能以此来限定本发明的范围，本技术领域内的一般技术人员根据本创作所作的均等变化，以及本领域内技术人员熟知的改变，都应仍属本发明涵盖的范围。
Claims (10)
- 一种垫料高度测量机自动补正方法，包括以下的步骤：S1、在垫料高度测量机的机台或外框上开设载物孔，在载物孔中安装补正样片；S2、使用垫料高度测量机的探头对补正样片进行拍摄，获取标准图像；S3、通过调节探头电流以调节探头拍摄图像的亮度和灰阶，使得探头拍摄图像的亮度和灰阶与标准图像匹配。
- 根据权利要求1所述的垫料高度测量机自动补正方法，其中，所述步骤S1中，载物孔长度为1.5厘米至2.5厘米，宽度为1.5厘米至2.5厘米，深度为0.08厘米至0.12厘米。
- 根据权利要求1所述的垫料高度测量机自动补正方法，其中，所述步骤S1中，所述补正样片在所述载物孔内的安装高度低于所述机台的台面。
- 根据权利要求1所述的垫料高度测量机自动补正方法，其中，所述S2中，获取标准图像的步骤包括：调节探头的光源电流以调节探头获取的图像画质，当探头获取图像无斑纹且亮度最大时，判断探头获取的图像为标准图像。
- 根据权利要求1所述的垫料高度测量机自动补正方法，其中，还包括以下步骤：S0、当进行手动补正的时候，在垫料高度测量机空闲时停止进料；当进行定时补正的时候，设定补正时间，并在达到补正时间时检测当前垫料高度测量机是否处于空闲状态，在垫料高度测量机空闲时停止进料。
- 一种垫料高度测量机自动补正系统，包括用于放置检测样品的机台（120）和围绕在所述机台外周的外框（110），还包括平行的设置在所述外框（110）两侧的导轨（300），所述垫料高度测量机自动补正系统还包括可滑动的安装在所述导轨上的检测架（200）和多个可滑动的安装在所述检测架（200）上的探头（400），每个所述探头（400）包括探测光源；其中，所述机台（120）上或者所述外框（110）上开设有载物孔（130），在所述载物孔（130）中安装有补正样片；所述垫料高度测量机自动补正系统还包括与所述探头（400）连接，用于对所述补正样片进行拍摄，获取标准图像的标准图像获取模块；以及与所述探头（400）及标准图像获取模块连接，用于调节所述探头（400）的电流，进而调节探头拍摄图像的亮度和灰阶，使得探头拍摄图像的亮度和灰阶与标准图像匹配的标准图像匹配模块。
- 根据权利要求6所述的垫料高度测量机自动补正系统，其中，所述载物孔（130）长度为1.5厘米至2.5厘米，宽度为1.5厘米至2.5厘米，深度为0.08厘米至0.12厘米。
- 根据权利要求6所述的垫料高度测量机自动补正系统，其中，所述补正样片在所述载物孔（130）内的安装高度低于所述机台的台面。
- 根据权利要求6所述的垫料高度测量机自动补正系统，其中，所述标准图像获取模块包括电流调节组件，用于调节探头的光源电流以调节探头获取的图像画质，当探头获取图像无斑纹且亮度最大时，所述标准图像获取模块判断探头获取的图像为标准图像。
- 根据权利要求6所述的垫料高度测量机自动补正系统，其中，还包括与垫料高度测量机连接、用于选择手动补正模式或定时补正模式的补正模式选择组件；当补正模式选择组件进行手动补正的时候，在垫料高度测量机空闲时停止进料；当补正模式选择组件进行定时补正的时候，设定补正时间，并在达到补正时间时检测当前垫料高度测量机是否处于空闲状态，在垫料高度测量机空闲时停止进料。
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