WO2015085577A1

WO2015085577A1 - System and method for analyzing gas sample using secondary ion mass spectrometer

Info

Publication number: WO2015085577A1
Application number: PCT/CN2013/089380
Authority: WO
Inventors: 唐国强; 赵洪; 李献华; 李秋立; 刘宇
Original assignee: 中国科学院地质与地球物理研究所
Priority date: 2013-12-13
Filing date: 2013-12-13
Publication date: 2015-06-18
Also published as: CN105103265A; CN105103265B

Abstract

Provided are a system and method for analyzing a gas sample by using a secondary ion mass spectrometer. The system comprises: an extraction electrode, a metal plate and a gas lead-in pipe, wherein the extraction electrode and the metal plate are located in a sample chamber of the secondary ion mass spectrometer; a first through hole through which primary ions pass, a second through hole through which secondary ions pass, and a third through hole through which the gas lead-in pipe penetrates are provided on the extraction electrode; after penetrating through the third through hole, the gas lead-in pipe leads the gas sample to the surface of the metal plate, and the gas sample is bombarded by the primary ions to form the secondary ions; and an electric field is formed between the extraction electrode and the metal plate, so that the secondary ions pass through the second through hole to depart from the metal plate and enter the secondary ion mass spectrometer for mass analysis.

Description

Description System and method for analyzing gas samples using secondary ion mass spectrometry

Field of the Invention This invention relates to the field of analytical instrumentation, and more particularly to a system and method for analyzing a gas sample using a secondary ion mass spectrometer. Background technique

Secondary ion mass spectrometers are commonly used for in-situ analysis, surface analysis and in-depth analysis of solid samples, which are widely used in materials science, life sciences, geological sciences and other fields. The analysis process of the secondary ion mass spectrometer is to place the solid sample in a vacuum, bombard the solid sample with a specific kind of primary ion, and the sample is sputtered with secondary ions under the bombardment of a certain energy of one ion, and the secondary ion represents Information on the composition of the sample. Depending on the quality of the sputtered secondary ions, the secondary ions are separated temporally or spatially using an electric or magnetic field to determine the type and amount of secondary ions in order to enable qualitative and quantitative analysis of solid samples. .

The principle of a secondary ion mass spectrometer, which generally uses a magnetic field as a mass analyzer, is shown in Figure 1. The primary ion source 1 produces a primary ion 2 . The primary ion 2 is focused by the electric field generated by the ion optical lenses 3, 5, 6 onto the surface of sample 7 (sample 7 is located in the sample chamber), and sample 7 is bombarded. The primary ion 2 and ion optical lenses 3, 5, 6 are located within the vacuum chamber 4. The primary ion 2 bombards the sample 7, and a part of the sample 7 is ionized to generate secondary ions 9. The secondary ions 9 pass through the ion optical lens 10, 11, 12 , an electrostatic field analyzer 13, an ion optical lens 15, a magnetic field analyzer 16, an ion optical lens 18, and reach the receiver 19. Sample 7 and ion optical lenses 10, 11, 12 are located within vacuum chamber 8. The ion optical lens 15 is located within the vacuum chamber 14. The ion optical lens 18 is located within the vacuum chamber 17. The electrostatic field analyzer 13 and the magnetic field analyzer 16 constitute a double focusing structure for achieving angular focusing and energy focusing while achieving mass separation of the secondary ions 9. The intensity of the magnetic field analyzer 16 determines the type of ions received by the receiver 19. Depending on the signal strength received by the receiver 19, the sample 7 can be qualitatively and quantitatively analyzed.

Traditionally, the secondary ion mass spectrometer only analyzes the solid sample and does not analyze the gas sample, thus causing the secondary ion mass spectrometer to have certain requirements on the morphology of the sample (that is, the gas sample cannot be analyzed), and the use range has certain limitations. If it is possible to analyze a gas sample using a secondary ion mass spectrometer, it is bound to be able to extend two Application areas of secondary ion mass spectrometers. Summary of the invention

A primary object of the present invention is to provide a system for analyzing a gas sample using a secondary ion mass spectrometer. Another object of the present invention is to provide a method of analyzing a gas sample using a secondary ion mass spectrometer. In order to achieve the above object, the present invention provides a system for analyzing a gas sample using a secondary ion mass spectrometer, comprising: an extraction electrode, a metal plate, and a gas introduction conduit; the extraction electrode and the metal plate are located at In the sample chamber of the secondary ion mass spectrometer, the bow [the outlet is provided with a first through hole for passing primary ions, a second through hole for passing secondary ions, and for introducing through the gas a third through hole of the conduit; the gas introduction conduit passes through the third through hole to guide the gas sample to a surface of the metal plate, and the gas sample forms the under the bombardment of the primary ions a secondary ion; an electric field is formed between the outlet of the bow I and the metal plate, so that the secondary ions fly away from the metal plate through the second through hole into the secondary ion mass spectrometer for mass analysis.

In any of the above aspects, preferably, the bow [outer ground potential, the secondary ions are negative ions, and the metal plate is connected to a negative voltage such that the secondary ions are repulsed into the secondary ion mass spectrometry The instrument performs quality analysis.

In any of the above aspects, it is preferred that the gas sample is bowed [guided to a region of the surface of the metal sheet, the primary ion bombarding the region such that the gas sample in the vicinity of the region is ionized to generate the Secondary ions.

In any of the above aspects, it is preferable that the bow [the exit electrode and the metal plate are kept at a certain distance, the sample chamber is in a vacuum state; and the electric field is a uniform electric field.

In any of the above aspects, it is preferable that the distance is 5 mm (i.e., mm), the surface of the metal plate is smooth and flat; and the metal plate does not contain an element contained in the gas sample.

Preferably, in any one of the above aspects, the second through hole on the extraction pole is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed in the second through hole. Both sides of the hole.

Preferably, in any one of the above aspects, the thickness of the extraction pole is about 2 mm (ie, mm), and the material is a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole. The hole has a diameter of about 2 mm (ie, mm); the material of the metal plate includes pure gold or indium or tungsten metal material. Preferably, in any one of the above aspects, the gas introduction conduit further comprises a valve for regulating a flow rate of the gas sample into the sample chamber; the gas introduction conduit is a thin tube made of a metal material, the metal Materials include non-magnetic stainless steel.

Preferably, in any of the above aspects, the gas introduction conduit is grounded, the gas introduction conduit introduces the gas sample from the sample chamber into the sample chamber, the end of the gas introduction conduit and the extraction Extremely flush, the gas introduction conduit has an inner diameter of about 0.5 mm (i.e., mm) and an outer diameter of about 1 mm (i.e., mm;).

In any of the above aspects, it is preferred that the primary ion comprises a cesium ion or a gallium ion; the gas sample is a non-corrosive gas, including oxygen (ie, 02), nitrogen (ie, N2) or carbon dioxide ( That is, C02); the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the secondary ions enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.

The present invention also provides a method for analyzing a gas sample using a secondary ion mass spectrometer comprising using a bow [exit, metal plate and gas introduction conduit; the extraction pole and the metal plate are located in the secondary ion mass spectrometer a sample chamber having a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit, It is characterized by the following steps:

Step 1, passing the gas introduction conduit through the third through hole, and guiding the gas sample to a surface of the metal plate using the gas introduction conduit;

Step 2, using the primary ion pair to bombard the gas sample guided to the surface of the metal plate to form the secondary ion;

Step 3, an electric field is formed between the extraction pole and the metal plate, and the secondary ions are passed through the metal plate through the second through hole to enter the secondary ion mass spectrometer for mass analysis.

Preferably, in any one of the above aspects, step 3 specifically includes: grounding the extraction pole to a ground potential, and connecting the metal plate to a negative voltage such that the secondary ions are repulsed into the secondary ion mass spectrometer for mass Analysis wherein the secondary ion is an anion.

In any of the above aspects, it is preferable that the step 1 comprises: guiding the gas sample to a certain area of the surface of the metal plate; and the step 2 specifically comprises: bombarding the area with the primary ion to make the vicinity of the area The gas sample is ionized to generate the secondary ions. Preferably, in any of the above aspects, before the step 1, the sample chamber is evacuated; in the step 3, the extraction pole and the metal plate are kept at a certain distance, and the electric field is a uniform electric field.

Preferably, in any one of the above aspects, the thickness of the extraction pole is about 2 mm (ie, mm), and the material is a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole. The hole has a diameter of about 2 mm (ie, mm); the material of the metal plate includes pure gold or indium or tungsten metal material.

Preferably, in any one of the above aspects, the step 1 further comprises: using a valve included in the gas introduction conduit to adjust a flow rate of the gas sample into the sample chamber; the gas introduction conduit is made of a metal material. Tube, the metal material includes non-magnetic stainless steel.

In any of the above aspects, it is preferred that the gas in the step 1 is introduced into a conduit ground potential, and the gas introduction conduit introduces the gas sample from the outside of the sample chamber into the sample chamber, the end of the gas introduction conduit and The extraction is extremely flush, and the gas introduction conduit has an inner diameter of about 0.5 mm (i.e., mm) and an outer diameter of about 1 mm (i.e., mm).

In any of the above aspects, it is preferred that the primary ion comprises a cesium ion or a gallium ion; the gas sample is a non-corrosive gas, including oxygen (ie, 02), nitrogen (ie, N2) or carbon dioxide ( That is, C02); the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the secondary ions in step 3 enter the electric field of the secondary ion mass spectrometer and/or Magnetic field for mass analysis.

With the technical solution of the present invention, the present invention has the following advantages over the prior art: Since the gas introduction guide is used to guide the gas sample to the surface of the metal plate for ionization, and through the bow [the electric field between the electrode and the metal plate will be The secondary ion beam I is introduced into the secondary ion mass spectrometer for mass analysis, so that the purpose of analyzing the gas sample using the secondary ion mass spectrometer can be realized, and the application field of the conventional secondary ion mass spectrometer is expanded; further, the present invention can use the mass The primary ion bombards the gas sample. Since the larger mass of primary ions (such as helium ions) is highly efficient in ionization of the gas sample, the sensitivity of the gas sample analysis can be improved, and the analysis effect is better. DRAWINGS

In order to more clearly illustrate the technical solutions of the present invention, the drawings used in the description of the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the present invention. For the ordinary technicians, other drawings can be obtained based on these drawings without any creative work.

1 is a schematic structural view of a conventional secondary ion mass spectrometer;

2 is a schematic view showing the structure of a system for analyzing a gas sample using a secondary ion mass spectrometer of the present invention. detailed description

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention, and the embodiments described are only a part of the embodiments of the present invention, not all embodiments, based on the present invention All other embodiments obtained by those skilled in the art without departing from the inventive scope are intended to be within the scope of the invention.

Example 1

As shown in FIG. 2, Embodiment 1 of the present invention provides a system for analyzing a gas sample using a secondary ion mass spectrometer, comprising: an extraction pole 22, a metal plate 23, and a gas introduction conduit 28; the extraction pole 22 and the The metal plate 23 is located in the sample chamber 32 of the secondary ion mass spectrometer, and the extraction electrode is provided with a first through hole 34 for passing the primary ions 24 (the path 21 along the primary ion 24) a second through hole 35 through the secondary ion 27 (the secondary ion 27 along the path 29 of the secondary ion), and a third through hole 36 for passing through the gas introduction conduit; the gas introduction conduit 28 Leading the gas sample to a surface of the metal plate after passing through the third through hole, the gas sample forming the secondary ions under bombardment of the primary ions; the extracting pole and the metal An electric field is formed between the plates to cause the secondary ions to fly away from the metal plate through the second through holes into the secondary ion mass spectrometer for mass analysis.

Since the gas introduction guide is used to guide the gas sample to the surface of the metal plate for ionization, and the secondary ion bow is introduced into the secondary ion mass spectrometer by the electric field between the electrode and the metal plate, it can be used for mass analysis. The purpose of analyzing a gas sample by a secondary ion mass spectrometer extends the field of application of a conventional secondary ion mass spectrometer; in addition, the present invention is capable of bombarding a gas sample with a large mass of primary ions, Larger mass primary ions (such as helium ions) have high ionization efficiency for gas samples, so the sensitivity of gas sample analysis can be improved, and the analysis effect is better.

The extraction pole 22 is grounded at a potential 30, the secondary ion 27 is a negative ion, and the metal plate is connected to a negative voltage 31 such that the secondary ion is repulsed into the secondary ion mass spectrometer for mass analysis.

The gas sample 26 is bowed to a certain region 25 of the surface of the metal plate, and the primary ions 24 bombard the region to ionize the gas sample 26 near the region to generate the secondary ions 27.

The extraction pole 22 and the metal plate 23 are kept at a certain distance, and the sample chamber is in a vacuum state; the electric field is a uniform electric field.

The distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.

The second through hole on the extraction pole 22 is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed on both sides of the second through hole.

The lead-out pole 22 has a thickness of about 2 mm and is made of a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole have a diameter of about 2 mm; and the material of the metal plate includes pure Gold or indium or tungsten metal materials.

The gas introduction conduit 28 further includes a valve 33 for regulating the flow rate of the gas sample into the sample chamber; the gas introduction conduit is a thin tube made of a metal material including a non-magnetic stainless steel.

Optimized, the gas introduction conduit 28 is grounded (here the gas is introduced into the conduit ground potential so that the gas introduction conduit and the extraction pole are connected to the same ground potential to ensure a uniform electric field between the metal plate and the extraction pole), the gas introduction A conduit introduces the gas sample from the sample chamber into the sample chamber. Optimized, the end of the gas introduction conduit is flush with the outlet pole (eg, the distance between the end of the gas introduction conduit and the metal plate 23 can be made) Consistent with the distance between the extraction pole 22 and the metal plate 23, so that the end of the gas bow I into the conduit is flush with the edge of the bow I, at this time the gas bow [the distance between the end of the inlet conduit and the metal plate is about 5 mm Such a distance can prevent the gas from being randomly diffused into the vacuum due to the excessive distance, and is not easily bombarded into ions, and can also prevent the uniform electric field formed between the metal plate and the extraction electrode from being affected due to the too close distance), This enables the gas introduction duct to be level with the metal plate, so that the gas easily reaches the metal plate, and the extraction pole 22 and the metal plate 2 are secured. Forming a uniform electric field between 3; The gas introduction conduit has an inner diameter of about 0.5 mm and an outer diameter of about 1 mm.

The primary ion 24 includes helium ions or gallium ions; the gas sample 26 is a non-corrosive gas, including oxygen, nitrogen or carbon dioxide; the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or A quadrupole mass spectrometer; the secondary ions 27 enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.

Example 2

Similar to the first embodiment, the present invention places a flat metal plate in the sample chamber, and introduces the gas sample through the gas introduction conduit to the surface of the sample, and uses a single ion bombardment of the metal plate to ionize the gas molecules in the vicinity of the metal plate to form. Negative ions, because the metal plate is negatively charged, the negative ions are repulsed into the secondary ion mass spectrometer for mass analysis.

As shown in Fig. 2, the system of the present invention mainly comprises: an extraction pole 22, a metal plate 23, a gas introduction guide 28, a sample chamber 32, and a valve 33. The extraction pole 22, the metal plate 23 is located in the sample chamber 32. The lead-out pole 22 is made of a metal material, and may be a non-magnetic stainless steel having a thickness of about 2 mm. There are three holes having a diameter of about 2 mm, a path 21 of the primary ion 24, a path 29 of the secondary ion 27, and a gas introduction duct 28 passing through respectively. These three holes. The distance between the lead 22 and the metal plate 23 is about 5 mm. The grounding potential 22 of the extraction pole 22 is connected to the negative voltage of the metal plate 23, and an electric field is formed between the extraction pole 22 and the metal plate 23 so that the secondary ions 27 fly away from the surface of the metal plate 23 through the center hole of the extraction electrode 22.

The metal plate 23 may be made of pure gold or a metal material such as indium or tungsten. Preferably, the metal plate 23 does not contain elements contained in the gas sample 26 to be analyzed, so that the primary ions 24 do not ionize the elements in the metal plate 23, thereby affecting the analysis results. Preferably, the surface of the metal plate 23 is smooth and flat to ensure a uniform electric field between the extraction pole 22 and the metal plate 23.

The gas introduction duct 28 is a thin tube made of a metal material, and may be a non-magnetic stainless steel. The gas is introduced into the conduit 28 to ground potential. The gas introduction conduit 28 introduces the gas sample 26 from the outside of the sample chamber 32 into the surface of the metal plate 23 in the sample chamber 32. Preferably, the end of the gas introduction conduit 28 is flush with the extraction pole 22, and the gas introduction conduit 28 has an inner diameter of about 0.5 mm and an outer diameter of about 1 mm so as not to affect the uniformity of the electric field between the extraction pole 22 and the metal plate 23. Preferably, the sample chamber 32 is in a vacuum state. Valve 33 regulates the flow of gas sample 26 into sample chamber 12.

The system of the present invention operates as follows: Primary ions 24 reach the surface of the metal plate 23 along the path 21, It is bombarded on the metal plate 23 with a certain amount of energy. Since the gas sample 26 is generally composed of a non-metal element, the primary ions 24 may be cerium ions or gallium ions or the like, which are liable to ionize non-metal elements. The gas sample 26 to be analyzed is transported through a gas introduction conduit 28 to a surface area 25 of the metal sheet 23 (i.e., the bombardment area 25). The flow rate of the gas sample 26 entering the sample chamber 32 can be controlled by adjusting the valve 33 outside the sample chamber 32. Preferably, the gas sample 26 can be any non-corrosive gas (oxygen, nitrogen or carbon dioxide, etc.). At the bombardment region 25, the primary ions 24 bombard the gas sample 26 to ionize it, thereby converting into secondary ions 27. Due to the electric field between the extraction pole 22 and the metal plate 23, the secondary ions 27 fly away from the bombardment region 25 along the path 29 by the electric field, and enter the electric field or the magnetic field to achieve mass separation.

The secondary ion mass spectrometer may be a magnetic mass spectrometer or a time-of-flight mass spectrometer or a quadrupole mass spectrometer. The system of the present invention is capable of qualitative and quantitative analysis of gas samples using a secondary ion mass spectrometer, expanding its field of application. Example 3

Embodiment 2 of the present invention provides a method for analyzing a gas sample using a secondary ion mass spectrometer, comprising: using an extraction pole, a metal plate, and a gas introduction conduit; the extraction electrode and the metal plate are located in the secondary ion mass spectrometer a sample chamber having a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit, including The following steps:

Step 3 specifically includes: placing the extraction pole ground potential 30, connecting the metal plate to a negative voltage such that the secondary ions are repulsed into the secondary ion mass spectrometer for mass analysis, wherein the secondary ions are Negative ions.

Step 1 specifically includes: guiding the gas sample to a certain area of the surface of the metal plate; The step 2 specifically includes bombarding the region with the primary ions such that the gas sample in the vicinity of the region is ionized to generate the secondary ions.

Before the step 1, the sample chamber is further evacuated; in the step 3, the extraction pole and the metal plate are kept at a certain distance, and the electric field is a uniform electric field. The distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.

In the method, the second through hole on the extraction pole is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed on both sides of the second through hole. The lead electrode has a thickness of about 2 mm and is made of a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole have a diameter of about 2 mm; and the material of the metal plate includes pure Gold or indium or tungsten metal materials.

The step 1 further includes using a valve included in the gas introduction conduit to adjust a flow rate of the gas sample into the sample chamber; the gas introduction conduit is a thin tube made of a metal material including a non-magnetic stainless steel.

The gas introduction conduit is connected to a potential in step 1, the gas introduction conduit introducing the gas sample from the sample chamber into the sample chamber, the end of the gas introduction conduit being flush with the extraction pole, the gas The introduction catheter has an inner diameter of about 0.5 mm and an outer diameter of about 1 mm.

In the method, the primary ion comprises a cesium ion or a gallium ion; the gas sample is a non-corrosive gas, including oxygen, nitrogen or carbon dioxide; and the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer Or a quadrupole mass spectrometer; the secondary ions in step 3 enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.

Example 4

Similar to Embodiment 3, the method used in Embodiment 4 of the present invention includes the following steps:

Step 1. Place the metal plate in the sample chamber of the secondary ion mass spectrometer for general analysis of the position of the solid sample, evacuate the sample chamber, and add a negative voltage to the metal plate 31;

Step 2: introducing a gas sample into the sample chamber through a gas introduction conduit; the gas introduction conduit may be made of a metal stainless steel material having an inner diameter of about 0.5 mm and an outer diameter of about 1 mm; and the outlet of the gas introduction conduit is about 5 mm from the surface of the metal plate; Introducing a conduit ground potential;

Step 3. Using a single ion bombardment of the metal plate, the gas sample near the metal plate (for example, gas) Ionized, causing it to become a negative ion (ie, a secondary ion);

Step 4. The negative ions (ie, secondary ions) are sent to the secondary ion mass spectrometer, and the electric field and the magnetic field of the secondary ion mass spectrometer are used for qualitative and quantitative analysis according to the quality.

From the above description of the embodiments, those skilled in the art can clearly understand that the present invention can be implemented by other structures, and the features of the present invention are not limited to the above preferred embodiments. Any changes or modifications that may be readily conceived by those skilled in the art in the field of the invention are intended to be included within the scope of the invention.

Claims

Claim

A system for analyzing a gas sample using a secondary ion mass spectrometer, comprising: an extraction electrode, a metal plate, and a gas introduction conduit; the extraction electrode and the metal plate being located in the secondary ion mass spectrometer a sample chamber having a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit; Passing a gas sample through the third through hole to guide the gas sample to a surface of the metal plate, the gas sample forming the secondary ion under bombardment of the primary ion; the bow An electric field is formed between the pole and the metal plate to cause the secondary ions to fly away from the metal plate through the second through hole into the secondary ion mass spectrometer for mass analysis.

2. The system according to claim 1, wherein: the extraction pole is grounded, the secondary ion is a negative ion, and the metal plate is connected to a negative voltage such that the secondary ion is repulsed into the second Mass spectrometry was performed on a mass spectrometer.

3. The system according to claim 1 or 2, wherein the gas sample is directed to a certain area of the surface of the metal plate, the primary ion bombards the area such that the gas sample ions in the vicinity of the area The secondary ions are generated.

The system according to claim 1 or 2, wherein a distance is maintained between the extraction pole and the metal plate, the sample chamber is in a vacuum state; the electric field is a uniform electric field; The surface of the metal plate is smooth and flat about 5 mm; the metal plate does not contain elements contained in the gas sample.

The system according to claim 1 or 2, wherein the second through hole on the extraction pole is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetric Disposed on both sides of the second through hole; the bow [outer thickness is about 2 mm, and the material is made of a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole The diameter is about 2 mm; the material of the metal plate includes pure gold or indium or tungsten metal material.

6. The system according to claim 1 or 2, wherein the gas introduction conduit further comprises a valve for regulating a flow rate of the gas sample into the sample chamber; the gas introduction conduit is made of a metal material. a thin tube, the metal material comprising a non-magnetic stainless steel; the gas introduction conduit ground potential, the gas introduction conduit introducing the gas sample from the sample chamber into the sample chamber, the end of the gas introduction conduit The extraction is extremely flush, and the gas introduction conduit has an inner diameter of about 0.5 mm and an outer diameter of about 1 mm.

7. The system according to claim 1 or 2, wherein the primary ions comprise helium ions or gallium ions; the gas sample is a non-corrosive gas, including oxygen, nitrogen or carbon dioxide; The secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the secondary ions enter an electric field and/or a magnetic field of the secondary ion mass spectrometer for mass analysis.

8. A method of analyzing a gas sample using a secondary ion mass spectrometer, comprising: using an extraction pole, a metal plate, and a gas introduction conduit; the bow [outlet and the metal plate are located in a sample chamber of the secondary ion mass spectrometer a first through hole for passing ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction duct, wherein the extraction pole is provided, The method includes the following steps: Step 1: passing the gas introduction conduit through the third through hole, and guiding the gas sample to a surface of the metal plate using the gas introduction conduit;

9. The method according to claim 8, wherein the step 3 comprises: grounding the extraction pole to a ground potential, and connecting the metal plate to a negative voltage such that the secondary ion is repulsed into the second Mass spectrometer performs mass analysis, wherein the secondary ion is a negative ion; step 1 specifically includes: directing the gas sample to a certain area of the surface of the metal plate; step 2 specifically includes: bombarding the primary ion using the primary ion The region ionizes the gas sample in the vicinity of the region to generate the secondary ions.

10. The method according to claim 8 or 9, wherein the step 1 further comprises: evacuating the sample chamber; and maintaining a distance between the extraction pole and the metal plate in step 3, The electric field is a uniform electric field; the distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.