WO2015085537A1 - 一种基于柔性衬底的传感器模块 - Google Patents

一种基于柔性衬底的传感器模块 Download PDF

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Publication number
WO2015085537A1
WO2015085537A1 PCT/CN2013/089207 CN2013089207W WO2015085537A1 WO 2015085537 A1 WO2015085537 A1 WO 2015085537A1 CN 2013089207 W CN2013089207 W CN 2013089207W WO 2015085537 A1 WO2015085537 A1 WO 2015085537A1
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Prior art keywords
sensor
sensor module
flexible substrate
module based
antenna
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English (en)
French (fr)
Inventor
梁圣法
李冬梅
李小静
张�浩
罗庆
周磊
刘明
谢常青
杨洪璋
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/0716—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips at least one of the integrated circuit chips comprising a sensor or an interface to a sensor

Definitions

  • the present invention relates to the field of detection and transmission of sensor signals, and more particularly to a flexible substrate based sensor module for sensor signal detection and transmission.
  • the present invention provides a flexible substrate-based sensor module, which includes a sensor portion and an antenna portion, both of which are made of a flexible insulating material and connected by wires or clamps, wherein the sensor Partially used to sense external sensitive signals, the antenna part is used for transmission and reception of wireless signals, and the combination of the two is implemented in a wireless situation. Detection and transmission of sensitive signals.
  • the flexible insulating material is polyimide (PI), polyethylene terephthalate (PET) or special paper material
  • the special paper material is made of hard paper such as kraft paper. material.
  • the sensor portion is a variety of sensors fabricated on a flexible insulating material substrate.
  • the planar structures of the sensors are different, at least circular, elliptical, square, rectangular or irregular, and can be bent. In a variety of shapes to suit a variety of different test environments.
  • the sensor fabricated on the flexible insulating material substrate is a gas sensor or a humidity sensor.
  • the gas sensor is formed on a flexible insulating material substrate by two electrode strips, and then a gas sensing coating is formed between the two electrode strips.
  • the gas sensing coating formed between the two electrode strips uses a sensitive polymer film of an organic polymer, a metal oxide, or a mixture of an organic polymer and a metal oxide; Methods include drop coating, dip coating, thermal evaporation or printing.
  • the organic high molecular polymer is polypyrrole (PPy) or polyaniline (PANI), and the metal oxide is Mo 3 , Sn 2 , ZnO or Ni.
  • the size of the sensor portion is controlled within a range of 50 ⁇ m ⁇ 50 ⁇ m to lm x lm.
  • the antenna portion can be bent into different shapes according to requirements, and can be finely adjusted under a specific contour to achieve an optimal receiving or transmitting effect.
  • the antenna portion is a horn antenna, a loop antenna or a flexible antenna.
  • the present invention has the following beneficial effects:
  • the flexible substrate-based sensor module realizeds wireless characteristics by using an antenna, and the sensor can be fabricated into a sensor having self-oscillation characteristics, for example, an inductor and a capacitor are simultaneously fabricated in the sensor. Components such as resistors have self-oscillation characteristics, so passive characteristics are realized. Since the antenna and the sensor are based on a substrate having flexible characteristics, it has a bendable and foldable property, thereby implementing passive wireless. A new sensor module that is foldable and highly portable.
  • the flexible substrate-based sensor module provided by the present invention, because the antenna receives signals The time itself converts the received electromagnetic wave into electrical energy, which generates the energy required for the response through self-oscillation on the sensor. If necessary, an electronic device such as an inductor, a capacitor or a resistor can be fabricated on the flexible substrate of the sensor to have an overall The self-oscillation characteristic is fed back to the antenna for transmission, so it can be made into a passive module, which is suitable for special environments that are difficult to supply for a long time.
  • the flexible substrate-based sensor module provided by the present invention is not limited by external leads because it is a wireless module, which facilitates the placement of the module.
  • Figure la is a schematic view of a crimp capacitor type gas sensor fabricated using two long-line structures
  • Figure lb is a schematic view showing the structure shown in Figure la being spirally curled
  • 2a is a schematic diagram of a two-dimensional pattern of a horn antenna of a planar structure
  • Figure 2b is a schematic view of the horn antenna obtained by integrating the various parts of Figure 2a with a jig;
  • Fig. 3 is a schematic view showing another flexible antenna structure based on a flexible substrate
  • Fig. 4 is a schematic view showing a sensor module constructed by combining the structures shown in Fig. 3 and Fig. 3.
  • the invention provides a flexible substrate-based sensor module, which uses a flexible insulating material such as PI or PET as a substrate, and uses various microelectronic micromachining methods to fabricate a sensor and a wireless transmitting portion thereon. Taken together, a new type of sensor module that is passively wirelessly foldable and highly portable is formed.
  • the flexible substrate-based sensor module comprises a sensor part and an antenna part, both of which are made of a flexible insulating material and connected by wires or clamps, wherein the flexible insulating material can be polyimide (PI) Polyethylene terephthalate (PET) or special paper material, such as a hard paper material such as kraft paper, the sensor part is used to sense external sensitive signals, and the antenna part is used for The transmission and reception of wireless signals, the combination of the two enables the detection and transmission of external sensitive signals in the case of wireless.
  • PI polyimide
  • PET Polyethylene terephthalate
  • special paper material such as a hard paper material such as kraft paper
  • the sensor module uses a parameter such as a capacitance or a resistance as a sensor signal output, that is, a change in a sensor capacitance or a resistance, etc., resulting in a change in the oscillation frequency, which in turn causes a change in the transmission frequency of the antenna.
  • the sensor module is a wireless transmission module with a flexible antenna portion.
  • the sensor part is made of a flexible insulating material, and various special sensors such as a gas sensor, a humidity sensor and the like are fabricated on the substrate.
  • These special sensor plane structures can be varied, and can be circular, elliptical, square, rectangular, irregular, and other shapes, and can be bent into various shapes to adapt to various test environments, such as An environment in a small space.
  • the overall device size is controlled from 50 microns ⁇ 50 microns to lmx lm.
  • the antenna part is also made of a flexible insulating material. The antenna can be bent into different shapes according to requirements, and can be fine-tuned under a specific outline to achieve the best reception or transmission effect.
  • the invention adopts a capacitive gas sensor as an example, and two electrode strips are fabricated on a flexible substrate, and then a gas-sensitive coating is formed between the two electrode strips, and the structure shown in FIG.
  • FIG. Schematic diagram of a crimped capacitor gas sensor fabricated by a long linear structure.
  • the structure shown in Fig. la can be bent into a shape as shown in Fig. 1b, and Fig. 1b is a schematic view in which the structure shown in Fig. la is spirally curled.
  • the gas sensitive coating formed between the electrodes on the flexible substrate may be selected from organic high molecular polymers such as polypyrrole (PPy) or polyaniline (PANI); metal oxides such as Mo 3 , Sn 2 , ZnO, Ni; or a mixture of the two. Selective coating is performed according to the gas being measured. Coating methods include dispensing, dip coating, thermal evaporation, printing, and the like.
  • the capacitive gas sensor can be bent into several different shapes to adapt to the space of the environment to be tested, unlike the conventional sensor. Above the fixed plane or fixed surface, the capacitive gas sensor has the characteristics of stereo sensitivity, which greatly exploits the flexible characteristics of the flexible substrate and can adapt to more test scenarios.
  • the invention adopts a horn antenna and a loop antenna as an example, and uses a flexible material as a base to process some simple strip or circular patterns (and electrode leads, which are not required for wireless transmission) on the substrate, and can be manufactured in a large area. . After that, open several holes in the base where you need to connect (such as where you need to connect when folding or bending). When the device is needed, fold the corresponding holes (hand-folding, if the device is small, you can use auxiliary tools such as tweezers to assist the pair), and fix each side of the pair with the clamp so that They are connected together to form a three-dimensional structure of the device used in a specific practical application. When the device is not in use, the clamp can be removed, the device placed flat, or rolled into a cylindrical shelf to save space. The details are shown in Figure 2a, Figure 2b and Figure 3.
  • Figure 2a shows a two-dimensional figure of a planar structure of a horn antenna. After the pattern shown in the above figure is used, the non-pattern area is cut off. When the device is not in use, it can be stacked to save space, especially for large-sized antennas. When the device is needed, it can be assembled for data transmission, that is, several parts can be integrated by using the fixture. The structure shown in Figure 2b is obtained. When the device is not required, the clamp can be removed to become the structure shown in Figure 2a.
  • Fig. 3 is another flexible substrate-based flexible antenna structure which is formed on the front and back sides of the substrate, respectively.
  • the two ends of B are bent to form a ring structure, so that the front antenna is circular, and the back antenna is still linear, and then the two ends of the AB are respectively connected with the sensor.
  • the size of the ring can be adjusted as appropriate. When not in use, it can also be laid flat, saving space, especially for large antennas.
  • the wireless sensor module provided by the present invention can be constructed by connecting the sensor portion and the antenna portion together.
  • the present invention is based on the combination of the structure shown in FIG. 1b and FIG. 3, as shown in FIG. In Fig. 4, the left side is a folded capacitive sensor, and the right side is a curved antenna, and the two are connected by a wire A and a wire B.
  • the contacts at the junction of conductor A or conductor B with the capacitive sensor and the antenna are generally referred to as electrodes, which employ metal electrodes or non-metallic electrodes with strong electrical conductivity (such as MWCNTS).
  • the material used for the electrode can be determined according to the actual scene and the positioning of the product.
  • a metal electrode can be used, but the adhesion of the metal electrode to the flexible substrate is relatively weak, and it may be necessary to grow a multilayer electrode or other methods to improve adhesion.
  • Non-metallic electrodes can be better attached to the flexible substrate, but the performance is weaker than the metal electrode.
  • the antenna portion can also be connected to the sensor portion by using a clamp.
  • the function and principle are the same as the wire connection. Simply, the antenna pin portion is aligned with the sensor pin portion and then clamped by the clamp. I won't go into details here.

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Abstract

一种基于柔性衬底的传感器模块，该传感器模块包括传感器部分及天线部分，二者均以柔性绝缘材料为衬底，并通过导线或夹具连接，其中，传感器部分用于感知外部敏感信号，天线部分用于无线信号的传输及接收，二者结合实现在无线情况下对外部敏感信号的检测及传输。所述传感器模块以PI、PET等柔性绝缘材料为衬底，利用各种微电子微加工方法，将传感器及无线发射部分制作于其上并综合在一起，形成了无源无线可折叠且便携性高的组装的新型传感器模块。

Description

一种基于柔性衬底的传感器模块
技术领域 本发明涉及传感器信号的检测与传输技术领域， 尤其是一种用于传 感器信号检测与传输的基于柔性衬底的传感器模块。
背景技术 随着社会的发展和人们生活水平的提高， 在食品安全、 医药卫生等 领域对于轻便、 小型、 可弯曲的传感器检测变的越来越紧迫。 同时随着 物联网的发展， 社会对于无线互联的要求也越来越高， 无线传感器越来 越受到关注。 基于硬性衬底的传感器已经非常成熟， 但是， 其应用场景 受到衬底本身的限制， 无法满足市场要求， 故而， 柔性衬底有很好的发 展潜质。
目前的无线传输模块大部分都是基于硬性衬底一次制作而成， 不能 在成型之后进行参数的微调， 制作可以在成型之后进行参数微调的基于 柔性衬底的无线传输模块，可以实现一种模块多种用途，而且便于携带， 具有重要的意义。
发明内容
(一） 要解决的技术问题
有鉴于此， 本发明的主要目的在于提供的一种基于柔性衬底的传感 器模块， 以实现无源无线可折叠且便携性高的新型传感器模块。
(二） 技术方案
为达到上述目的， 本发明提供了一种基于柔性衬底的传感器模块， 该传感器模块包括传感器部分及天线部分， 二者均以柔性绝缘材料为衬 底，并通过导线或夹具连接，其中，传感器部分用于感知外部敏感信号， 天线部分用于无线信号的传输及接收， 二者结合实现在无线情况下对外 部敏感信号的检测及传输。
上述方案中， 该柔性绝缘材料是聚酰亚胺（PI)、 聚对苯二甲酸乙二 酯 （PET ) 或特殊纸制材料， 该特殊纸制材料例如是牛皮纸之类的较硬 质纸制材料。
上述方案中， 该传感器部分是在柔性绝缘材料衬底之上制作的各种 传感器， 这些传感器的平面结构各异， 至少为圆形、 椭圆形、 正方形、 长方形或不规则图形， 且均能够弯曲成各种形状， 以适应各种不同的测 试环境。
上述方案中， 所述在柔性绝缘材料衬底之上制作的传感器是气体传 感器或湿度传感器。 所述气体传感器是在柔性绝缘材料衬底上制作出两 个电极条， 然后在两个电极条之间制作气敏涂层。 所述在两个电极条之 间制作的气敏涂层，其采用的敏感膜是有机高分子聚合物、金属氧化物、 或有机高分子聚合物与金属氧化物的混合物； 其采用的涂覆方法包括滴 涂、 浸涂、 热蒸发或打印。 所述有机高分子聚合物为聚吡咯 （PPy) 或 聚苯胺 （PANI) , 所述金属氧化物为 Mo3、 Sn2、 ZnO或 Ni。
上述方案中，该传感器部分的尺寸控制在 50微米 χ50微米至 lmx lm 范围内。
上述方案中， 该天线部分能够根据需求弯曲成不同的形状， 且可在 特定外形轮廓下进行微调， 以实现最佳接收或发送的效果。 该天线部分 是喇叭天线、 环形天线或可弯曲天线。
(三） 有益效果
从上述技术方案可以看出， 本发明具有以下有益效果：
1、 本发明提供的基于柔性衬底的传感器模块， 由于采用了天线， 所以实现了无线特性， 由于可以将传感器制作成具有自激振荡特性的传 感器， 比如在制作传感器是同时制作出电感、 电容或电阻等元器件， 使 之具有自起振特性， 所以实现了无源特性， 由于天线及传感器基于具有 柔性特性的衬底之上， 使之具有可以弯曲可折叠性质， 进而实现了无源 无线可折叠且便携性高的新型传感器模块。
2、 本发明提供的基于柔性衬底的传感器模块， 因为天线接收信号 时本身会将接收到的电磁波转换成电能， 该电能通过传感器上的自激振 荡产生响应所需要的能量， 必要时可在传感器柔性衬底上制作出电感、 电容或电阻等电子器件使整体具有自起振特性， 再反馈回天线发射出去， 所以可以制作成无源模块， 进而适用于难于长久供电的特殊环境。
3、 本发明提供的基于柔性衬底的传感器模块， 由于是无线模块， 不受外界引线的束缚， 便于模块的安置。
附图说明 为了更进一歩说明本发明的内容， 以下结合附图及实施例子， 对本 发明做详细描述， 其中：
图 la是利用两根长线型结构制作的卷曲电容型气体传感器的示意 图；
图 lb是将图 la所示的结构螺旋卷曲后的示意图；
图 2a是一个平面结构的喇叭天线二维图形的示意图；
图 2b是将图 2a中各个部分利用夹具整合后得到的喇叭天线的示意 图；
图 3是另外一种基于柔性衬底的可弯曲天线结构的示意图； 图 4是将图 lb和图 3所示的结构结合在一起构成的传感器模块的 示意图。
具体实施方式 为使本发明的目的、 技术方案和优点更加清楚明白， 以下结合具体 实施例， 并参照附图， 对本发明进一歩详细说明。
本发明提供的是一种基于柔性衬底的传感器模块， 该传感器模块以 PI、 PET等柔性绝缘材料为衬底， 利用各种微电子微加工方法， 将传感 器及无线发射部分制作于其上并综合在一起， 形成无源无线可折叠且便 携性高的组装的新型传感器模块。 本发明提供的基于柔性衬底的传感器模块， 包括传感器部分及天线 部分， 二者均以柔性绝缘材料为衬底， 并通过导线或夹具连接， 其中柔 性绝缘材料可以是聚酰亚胺（PI)、 聚对苯二甲酸乙二酯 （PET )或特殊 纸制材料等， 该特殊纸制材料例如是牛皮纸之类的较硬质纸制材料， 传 感器部分用于感知外部敏感信号， 天线部分用于无线信号的传输及接收， 二者结合实现在无线情况下对外部敏感信号的检测及传输。
在本发明中， 该传感器模块是以电容或电阻等电的参量为传感信号 输出量， 即传感器电容或电阻等的变化， 导致了震荡频率的变化， 进而 导致天线发射频率的变化。 该传感器模块是以柔性的天线部分为无线传 输模块。 传感器部分以柔性绝缘材料为衬底， 在衬底之上制作各种特殊 的传感器， 例如气体传感器、 湿度传感器等。 这些特殊的传感器平面结 构可以各异， 可以是圆形、 椭圆形、 正方形、 长方形、 不规则图形等各 种形貌， 且均可以弯曲成各种形状， 以适应各种不同的测试环境， 如在 较小空间下的环境。 整个器件的尺寸控制在 50微米 χ50微米到 lmx lm 范围内。 天线部分也是以柔性绝缘材料为衬底， 天线可以根据需求弯曲 成不同的形状， 且可在特定外形轮廓下进行微调， 以达到实现最佳接收 或发送的效果。
1、 传感器部分：
本发明是以电容型气体传感器为例， 在柔性衬底上制作出两个电极 条， 然后在两个电极条之间制作气敏涂层， 可得图 la所示结构， 图 la 是利用两根长线型结构制作的卷曲电容型气体传感器的示意图。 为适应 不同的被测环境， 可将图 la所示的结构弯曲成如图 lb所示的形状， 图 lb是将图 la所示的结构螺旋卷曲后的示意图。
其中， 在柔性衬底上的电极之间制作的气敏涂层， 其采用的敏感膜 可以选择有机高分子聚合物如聚吡咯（PPy)或聚苯胺（PANI) ; 金属氧 化物如 Mo3、 Sn2、 ZnO、 Ni; 或者两者的混合物等。 根据所测气体进行 选择性涂覆。 涂覆方式包括滴涂、 浸涂、 热蒸发、 打印等方法。
相比于传统的平面敏感膜， 由于可以将该电容型气体传感器弯曲成 几种不同的形状以适应被测环境的空间， 不像常规传感器那样制作于固 定平面或固定曲面之上， 所以该电容型气体传感器具有立体敏感的性质， 极大的发挥了柔性衬底可弯曲的特性， 可适应更多的测试场景。
2、 天线部分：
本发明是以喇叭天线和环形天线为例， 利用柔性材料作为基底， 在 基底之上加工出一些简单的条状或者圆形图案 （和电极引线， 对于无线 传输则不需要）， 可以大面积制造。 之后， 将基底的几个需要连接的特 殊位置 （比如需要在折叠或弯曲的时候起到连接作用的位置） 开孔。 在 需要该器件的时候，将各个对应的孔折叠（手工折叠即可，若器件较小， 可以利用辅助工具如镊子等辅助对在一起）， 用夹具将对在一起的每一 条边固定， 使之连接在一起， 形成具体实际应用中用到的器件三维立体 结构。 当不使用该器件时， 可将夹具取下， 将器件平铺放置， 或者卷成 筒状搁置， 以节省空间。 具体如图 2a、 图 2b及图 3所示。
图 2a所示为一个平面结构的喇叭天线二维图形。利用平面加工工艺 成上图所示图案后， 将非图案区域剪裁掉。 当不使用该器件时， 可以将 其层叠存放节省空间， 尤其对于大尺寸的天线而言； 当需要使用该器件 时， 可以将其组装起来进行数据的传输， 即将几个部分利用夹具整合后 可得到图 2b所示的结构。 当不需要使用该器件时， 可以将夹具拿下， 变成图 2a所示的结构。
图 3为另外一种基于柔性衬底的可弯曲天线结构， 该结构将天线的 两部分分别制作在衬底的正反两面。 其中一面在使用时， 将 、 B两端 弯曲连接以形成一个环形结构， 使得正面天线为圆形， 而反面天线仍然 为直线型，然后将 AB两端分别同传感器相接。环的大小可以适当调节。 当不使用时，也可以将其平放，节省空间，尤其对于大尺寸的天线而言。
3、 传感器部分与天线部分的连接
将传感器部分与天线部分两种结构连接在一起可以构成本发明提 供的无线传感器模块。
本发明是以将图 lb和图 3所示的结构进行结合为例， 详见图 4。 图 4中左侧为折叠的电容传感器， 右侧为弯曲的天线， 二者以导线 A和导 线 B进行连接。 导线 A或导线 B与电容传感器及天线连接处的触点一般被称为电极， 该电极采用金属电极或者具有强导电性的非金属电极 （如 MWCNTS)。 该电极采用的材料可根据实际场景及对产品的定位决定。 如果需要较好 传输特性和较低的阻值的传输线， 可采用金属电极， 但是金属电极在柔 性衬底上的附着能力比较弱， 可能需要生长多层电极或其他方法以提高 附着力。 非金属电极可以更好的附着于柔性衬底之上， 但是性能较金属 电极弱一些。
另外， 也可以采用夹具将天线部分与传感器部分连接， 其功能和原 理与以导线连接是一样的， 简单讲就是通过将天线引脚部分同传感器引 脚部分对准后用夹具夹紧即可， 这里就不再赘述。
以上所述的具体实施例， 对本发明的目的、 技术方案和有益效果进 行了进一歩详细说明， 所应理解的是， 以上所述仅为本发明的具体实施 例而已， 并不用于限制本发明， 凡在本发明的精神和原则之内， 所做的 任何修改、 等同替换、 改进等， 均应包含在本发明的保护范围之内。

Claims

权利要求
1、 一种基于柔性衬底的传感器模块， 其特征在于， 该传感器模块 包括传感器部分及天线部分， 二者均以柔性绝缘材料为衬底， 并通过导 线或夹具连接， 其中， 传感器部分用于感知外部敏感信号， 天线部分用 于无线信号的传输及接收， 二者结合实现在无线情况下对外部敏感信号 的检测及传输。
2、 根据权利要求 1 所述的基于柔性衬底的传感器模块， 其特征在 于，该柔性绝缘材料是聚酰亚胺、聚对苯二甲酸乙二酯或特殊纸制材料。
3、 根据权利要求 1 所述的基于柔性衬底的传感器模块， 其特征在 于， 该传感器部分是在柔性绝缘材料衬底之上制作的各种传感器， 这些 传感器的平面结构各异， 至少为圆形、 椭圆形、 正方形、 长方形或不规 则图形， 且均能够弯曲成各种形状， 以适应各种不同的测试环境。
4、 根据权利要求 3 所述的基于柔性衬底的传感器模块， 其特征在 于， 所述在柔性绝缘材料衬底之上制作的传感器是气体传感器或湿度传 感器。
5、 根据权利要求 4所述的基于柔性衬底的传感器模块， 其特征在 于， 所述气体传感器是在柔性绝缘材料衬底上制作出两个电极条， 然后 在两个电极条之间制作气敏涂层。
6、 根据权利要求 5 所述的基于柔性衬底的传感器模块， 其特征在 于， 所述在两个电极条之间制作的气敏涂层， 其采用的敏感膜是有机高 分子聚合物、金属氧化物、或有机高分子聚合物与金属氧化物的混合物; 其采用的涂覆方法包括滴涂、 浸涂、 热蒸发或打印。
7、 根据权利要求 6所述的基于柔性衬底的传感器模块， 其特征在 于，所述有机高分子聚合物为聚吡咯或聚苯胺，所述金属氧化物为 Mo3、 Sn2、 ZnO或 Ni。
8、 根据权利要求 1 所述的基于柔性衬底的传感器模块， 其特征在 于， 该传感器部分的尺寸控制在 50微米 χ50微米至 lmx lm范围内。
9、 根据权利要求 1 所述的基于柔性衬底的传感器模块， 其特征在 于， 该天线部分能够根据需求弯曲成不同的形状， 且可在特定外形轮廓 下进行微调， 以实现最佳接收或发送的效果。
10、 根据权利要求 9所述的基于柔性衬底的传感器模块， 其特征在 于， 该天线部分是喇叭天线、 环形天线或可弯曲天线。
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