WO2015076637A1

WO2015076637A1 - Apparatus, system, and method for manufacturing touch panel

Info

Publication number: WO2015076637A1
Application number: PCT/KR2014/011338
Authority: WO
Inventors: 김영기; 박창균; 김선명; 민경인; 박일흥
Original assignee: 주성엔지니어링(주)
Priority date: 2013-11-25
Filing date: 2014-11-25
Publication date: 2015-05-28
Also published as: TW201530407A; KR20150061065A

Abstract

The present invention relates to an apparatus, system, and method for manufacturing a touch panel and, particularly, relates to the technical matter of providing an apparatus, system, and method for manufacturing a touch panel which form a bridge by using a transparent oxide having conductivity. To this end, the method for manufacturing a touch panel according to the present invention comprises the steps of: forming electrode portions on displaying regions of a substrate; forming a light blocking layer on non-displaying regions of the substrate; forming electrode lines on the light blocking layer; and forming a line bridge connecting the electrode portions with the electrode lines by using a transparent oxide having conductivity.

Description

Touch panel manufacturing apparatus, system and method

The present invention relates to a method for manufacturing a touch panel, and more particularly, to an apparatus, a system, and a method for manufacturing a touch panel attached to a plane of a panel constituting a display device.

Flat panel displays (FPDs) are used in various types of electronic products, including mobile phones, tablet PCs, and notebook computers. The flat panel display device includes a liquid crystal display (LCD), a plasma display device (PDP), an organic light emitting display device (OLED), and more recently, an electrophoretic display. Devices (EPD: ELECTROPHORETIC DISPLAY) are also widely used.

Among flat panel display devices (hereinafter, simply referred to as 'display devices'), liquid crystal display devices are most widely commercialized due to the advantages of mass production technology, ease of driving means, and high quality.

Among the display devices, organic light emitting display devices have attracted attention as next generation display devices because they have a high response speed of 1 ms or less and low power consumption.

Recently, a touch panel that allows a user to directly input information using a finger or a pen has been used as an input device of the display device as described above, replacing a conventional input device such as a mouse or a keyboard.

As a method of configuring the touch panel on a panel displaying an image in a display device, there are an add-on type and an in-cell type.

Among these, the add-on type touch panel refers to a touch panel which is manufactured independently of the panel and then attached to the plane of the panel. In the in-cell type touch panel, elements constituting the touch panel are formed inside the panel.

FIG. 1 is an exemplary view schematically showing a cross section of a conventional add-on type touch panel. In particular, FIG. 1 is an exemplary view schematically showing a light blocking layer formed on a non-display area of the touch panel and a line formed on the light blocking layer.

The add-on type touch panel is attached to the top of the panel displaying the image in the display device as described above.

First, in the display area M of the touch panel, an X-axis electrode sensor pattern (hereinafter, simply referred to as a 'driving electrode') and an Y-axis electrode sensor pattern using indium tin oxide (ITO) (transparent electrode) are used. Hereinafter, simply referred to as a 'receiving electrode'. The ITO forming the touch panel may be formed on a glass substrate or a film (hereinafter, simply referred to as the substrate 11).

In the touch panel, the driving electrode and the receiving electrode are spaced apart using an insulator so that the driving electrode and the receiving electrode are not electrically connected to each other. In this case, the line passing through the top or bottom surface of the insulator is called an electrode bridge. The electrode bridge electrically connects the driving electrode portions separated from each other, or electrically connects the receiving electrode portions separated from each other.

Second, as shown in FIG. 1, a driving electrode line or a receiving electrode line connected to the driving electrode or the receiving electrode is formed in the non-display area N of the touch panel. Hereinafter, a conventional touch panel will be described by taking the case where the line 14 shown in FIG. 1 is a receiving electrode line.

The light blocking layer 12 is formed in the non-display area N to prevent light leakage, and the receiving electrode line 14 is formed on the light blocking layer 12.

In this case, a line for electrically connecting the receiving electrode 13 formed in the display area M and the receiving electrode line 14 formed in the non-display area N may include a receiving line bridge ( It is called 15). In addition, a line for electrically connecting the driving electrode formed in the display area M and the driving electrode line formed in the non-display area N is referred to as a driving line bridge.

A driving electrode bridge for electrically connecting the driving electrode parts of the driving electrode formed in the display area M, and electrically receiving the receiving electrode parts of the receiving electrode formed in the display area M; A receiving electrode bridge to be connected, and a driving line bridge to connect the driving electrode formed in the display area M to the driving electrode line formed in the non-display area N and the display area M. The receiving line bridges 15 connecting the receiving electrode to the receiving electrode line formed in the non-display area N are collectively referred to as a bridge.

Generally, the electrode bridge and the line bridge are simultaneously formed on the substrate 11 through the same process.

The conventional touch panel having the structure as described above has the following problems.

In general, ITO formed on a substrate by a physical vapor deposition (PVD) method has poor step coverage, and the electrode bridge, the driving electrode, and the receiving electrode 13 formed of the ITO. The thickness of is 300nm, the thickness (B) of the light shielding layer 12 is formed to be 20㎛ or more about 70 times thicker than the electrode bridge.

Therefore, in the conventional touch panel manufacturing, when the line bridge 15 is formed by using the ITO, the electrode line 14 formed on the line bridge 15 and the light shielding layer 12. This is not electrically connected well.

In detail, when the ITO is sputtered by the PVD method to form the line bridge 15, as shown in FIG. 1, the line bridge 15 is formed by the light blocking layer 12. Since it is formed along the side of, the stable implementation of the line bridge 15 is difficult. Therefore, a disconnection region C may be generated in the line bridge 15 formed along the side surface of the light blocking layer 12.

In particular, due to the step difference between the light shielding layer 12 and the substrate 11, the accuracy of exposure using masking is inferior, and disconnection is likely to occur in the line bridge 15.

In addition, the etching solution and the light blocking layer may react in the etching process of the ITO for forming the line bridge 15, so that the quality of the line bridge 15 may be degraded. In addition, during the high-temperature sputtering process using the ITO, the gas generated on the surface of the light shielding layer may interfere with the formation of the line bridge 15, in this case, to implement the line bridge 15 of even quality It can be difficult to do. In addition, a phenomenon in which the light blocking layer is oxidized may occur during a high temperature sputtering process, and this phenomenon may also reduce the quality of the line bridge 15 formed of the ITO.

Due to the above causes, the defective rate of the conventional touch panel is increasing, and accordingly, the production cost of the touch panel is also increasing.

In particular, since the thickness of the light shielding layer formed on the touch panel applied to the mobile phone using a white bezel is formed to be 60 μm or more, the productivity of the touch panel is only about 20%.

The present invention has been proposed to solve the above problems, and to provide a touch panel manufacturing apparatus, a system and a method for forming a bridge by using a transparent transparent oxide as a technical problem.

According to an aspect of the present invention, there is provided a method of manufacturing a touch panel, the method comprising: forming electrode portions in a display area of a substrate; Forming a light blocking layer on a non-display area of the substrate; Forming an electrode line on the light blocking layer; And forming a line bridge connecting the electrode part and the electrode line by using a conductive transparent oxide.

Touch panel manufacturing apparatus according to the present invention for achieving the above technical problem, the chamber having a reaction space; A substrate supporting a manufacturing substrate including electrode parts formed in the display area, a light blocking layer formed on a non-display area formed outside the display area, and an electrode line formed on the light blocking layer, Support; And a gas injector for injecting a metal raw material and a reactive gas into the fabrication substrate to form a transparent transparent oxide on the fabrication substrate to form a conductive transparent oxide for forming the line bridge connecting the electrode portion and the electrode line. do.

Another touch panel manufacturing apparatus according to the present invention for achieving the above technical problem, the chamber having a reaction space; Electrode portions formed in the display area, a light blocking layer formed on the non-display area formed outside the display area, an electrode line formed on the light blocking layer, and an electrode formed by an organic metal chemical vapor deposition (MOCVD) method A susceptor supporting a manufacturing substrate including a line bridge connecting a part and the electrode line to the inside of the chamber; And a plasma generating unit which ionizes the process gas supplied from the gas supply unit by plasma discharge and injects the ionized process gas onto the manufacturing substrate.

According to an aspect of the present invention, there is provided a touch panel manufacturing system including: electrode portions formed in a display area, a light blocking layer formed in a non-display area formed outside the display area, and formed on the light blocking layer. A first material for injecting a metal raw material and a reactive gas to the manufacturing substrate to form a transparent oxide having a conductivity to be used as a line bridge connecting the electrode portion and the electrode line on the manufacturing substrate including an electrode line. Touch panel manufacturing apparatus; And a second touch panel manufacturing apparatus which ionizes the process gas supplied from the gas supply unit by plasma discharge, and injects the ionized process gas onto the manufacturing substrate discharged from the first touch panel manufacturing apparatus.

According to the present invention, by forming a bridge using a conductive transparent oxide, the step coverage of the bridge can be improved, the manufacturing cost of the touch panel can be reduced.

Further, according to the present invention, by treating the substrate on which the bridge is formed with hydrogen ions, the sheet resistance of the bridge formed of a conductive transparent oxide can be reduced, and the transmittance of the bridge can be improved.

1 is an exemplary view schematically showing a cross section of a conventional add-on type touch panel.

2 is an exemplary view schematically showing a touch panel manufactured using the touch panel manufacturing method according to the present invention.

3 is an exemplary view showing in detail the touch panel shown in FIG.

4 is an exemplary view showing a cross section of the touch panel shown in FIG. 3 in the X-X 'direction.

5a to 5f are exemplary views sequentially illustrating a method of manufacturing a touch panel according to the present invention.

6 is an exemplary view showing a configuration of a touch panel manufacturing system according to the present invention.

7 is an exemplary view showing a first touch panel manufacturing apparatus shown in FIG.

8 is an exemplary view showing a second touch panel manufacturing apparatus shown in FIG.

Hereinafter, with reference to the accompanying drawings will be described in detail an embodiment of the present invention.

The touch panel may be driven by a resistive method or a capacitive method, and the capacitive method may be further classified into a self cap method and a mutual method. The present invention can be used both in the manufacture of a self-cap touch panel and a mutual touch panel, but for the sake of convenience of explanation, the present invention will be described with an example of a mutual touch panel. Here, the mutual touch panel is composed of driving electrodes and receiving electrodes, and whether touch is performed by using sensing signals received from the receiving electrodes by driving pulses sequentially supplied to the driving electrodes. Detect.

In addition, the touch panel may be used to display an image in various types of display devices such as a liquid crystal display (LCD), an organic light emitting display (OLED), a plasma display display (PDP), and an electrophoretic display (EPD). As a method of configuring the PDU, there are an add-on type, an in-cell type, a hybrid in-cell type, an on-cell type, and the like. The present invention can be applied to all of the various types of touch panel as described above, hereinafter, for convenience of description, a touch panel manufacturing method according to the present invention will be described using an add-on type touch panel as an example. . Here, the add-on type touch panel means a touch panel which is manufactured independently of the panel and then attached to the plane of the panel.

That is, the touch panel 100 manufactured as shown in FIG. 2 manufactured using the touch panel manufacturing method according to the present invention is manufactured as an add-on type by using a mutual method, and detects whether a user touches the touch panel. It performs the function.

The touch panel 100 includes a display area 110 corresponding to an area where an image is displayed on the panel and a non-display area 160 corresponding to an area where no image is displayed on the panel.

In the display area 110, driving electrodes 130 and receiving electrodes 120 capable of sensing a touch are formed, and light output from the panel passes through the display area 110.

The non-display area 160 is an area covered by the case of the display device and is also referred to as a bezel. As described above, no image is displayed in the non-display area 160, and therefore, light must not leak into the non-display area 160. In order to prevent light from leaking out, a light blocking layer is formed in the non-display area 160.

For example, the add-on type touch panel 100 is formed on a transparent glass substrate and then bonded to the panel, so that the light output through the panel can pass. However, since the light output through the panel should not pass through the non-display area 160, the light blocking layer is formed in the non-display area 160 to block the light.

In the display area 110 of the touch panel 100, a plurality of receiving electrodes RX 120 are formed in one direction, for example, the horizontal direction of FIG. 2, and the other direction, for example. 2, a plurality of driving electrodes TXs 130 are formed in the vertical direction of FIG. 2. Hereinafter, for convenience of description, the present invention will be described with an example of a touch panel in which five receiving electrodes 120 and four driving electrodes 130 are formed. However, the number of the receiving electrodes 120 and the driving electrodes 130 may be variously changed according to the size of the touch panel.

In the non-display area 160 of the non-display area 160, for example, the non-display area formed on the left side of the touch panel 100 illustrated in FIG. 2, the five receiving electrodes 120 are provided. Five receiving electrode lines 140 are connected to each other. The four driving electrodes 130 are formed in the non-display area 160b of the non-display area 160, for example, the non-display area formed below the touch panel 100 illustrated in FIG. 2. Four driving electrode lines 150 are formed to be connected to each other, and five receiving electrode lines 140 extend in the second non-display area 160b.

On each of the ends of the five receiving electrode lines 140 and the four driving electrode lines 150 formed in the second non-display area 160b, a flexible touch panel IC 300 is mounted. A pad 170 is formed to be electrically connected to the flexible printed circuit board (FPCB) 200.

For example, when the touch panel 100 is manufactured, the pads 170 formed on the second non-display area 160b and the flexible printed circuit board 200 are electrically connected to each other. The touch panel 100 is bonded to the panel.

The touch driver IC 300 includes a receiver 310 and a driver 320. The driving unit 320 performs a function of sequentially supplying driving pulses to the driving electrodes 130. The receiver 310 performs a function of determining whether a touch is generated in the touch panel 100 using the detection signals induced by the driving pulse and received through the receiving electrodes 120. A detailed configuration of the touch panel 100 will be described with reference to FIG. 3.

The terms described above and terms to be described below are defined as follows.

First, the driving electrodes and the receiving electrodes are collectively referred to as touch electrodes. Accordingly, the touch electrode may be the driving electrode or the receiving electrode.

Second, when it is necessary to distinguish between the receiving electrode and the driving electrode, the receiving electrode and the driving electrode may be defined as a first touch electrode and a second touch electrode. In this case, the first touch electrode may be a receiving electrode, the second touch electrode may be a driving electrode, the first touch electrode may be a driving electrode, and the second touch electrode may be a receiving electrode. . Hereinafter, for convenience of description, the present invention will be described with an example in which the receiving electrode 120 is the first touch electrode and the driving electrode 130 is the second touch electrode.

Third, the receiving electrode line 140 and the driving electrode line 150 are collectively called an electrode line. Accordingly, the electrode line may be the receiving electrode line 140 or the driving electrode line 150.

Fourth, the receiving electrode parts 131 forming the receiving electrode 120 as the first touch electrode are called first electrode parts, and the driving electrode part 131 forming the driving electrode 130 as the second touch electrode. ) Are referred to as second electrode portions, and the driving electrode connection portions 132 are referred to as second connection portions.

Fifth, the bridge means at least one of the line bridge and the electrode bridge, and the line bridge means at least one of the receiving line bridge 140 and the driving line bridge 150. The electrode bridge means at least one of the receiving electrode bridge 121 and the driving electrode bridge.

Sixth, the electrode line means the receiving electrode line or the driving electrode line. When the receiving electrode line 140 is the first electrode line, the driving electrode line 150 becomes the second electrode line.

FIG. 3 is an exemplary view showing the touch panel shown in FIG. 2 in detail, and FIG. 4 is an exemplary view showing a cross section of the touch panel shown in FIG. F shown in FIG. 4 means the F region shown in FIG. 3, and G shown in FIG. 4 means the G region shown in FIG.

In the display area 110 of the touch panel 100, as shown in the description and FIG. 3, five receiving electrodes 120 and four driving electrodes 130 are formed. The receiving electrode lines 140 are formed in the first non-display area 160a, and the driving electrode lines 150 and the receiving electrode lines 140 are formed in the second non-display area 160b. The pads 170 are formed.

First, the reception electrodes 120 and the driving electrodes 130 formed in the display area 110 are described as follows.

The receiving electrode 120 formed in the horizontal direction of the touch panel 100 and the driving electrode 130 formed in the vertical direction of the touch panel 100 should not be electrically connected to each other.

Therefore, the driving electrode 130 and the receiving electrode 120 are spaced apart from each other by using an insulator. In this case, in the region where the receiving electrode 120 and the driving electrode 130 intersect, the receiving electrode 120 to prevent the receiving electrode 120 and the driving electrode 130 from being electrically connected. Alternatively, an electrode bridge may be formed on one of the driving electrodes 130.

That is, the electrode bridge may be formed on the receiving electrode 120, and such an electrode bridge is called a receiving electrode bridge. In addition, the electrode bridge may be formed on the driving electrode 130, and the electrode bridge is referred to as a driving electrode bridge.

Hereinafter, for convenience of description, the present invention will be described by using a touch panel in which the receiving electrode bridge 122 is formed on the receiving electrode 120 as shown in FIG. 4.

When the receiving electrode bridge 122 is formed on the receiving electrode 120, each of the receiving electrodes 120 may include five receiving electrode parts 121 and four receiving electrode bridges 122. Include. That is, one receiving electrode 120 is formed of five receiving electrode parts 121, and the five receiving electrode parts 121 are electrically connected by four receiving electrode bridges 122. have.

Each of the driving electrodes 130 includes six driving electrode parts 131 and five driving electrode connecting parts 132 electrically connecting the driving electrode parts 131 at the intersection area.

Here, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 are formed on the same layer as illustrated in FIG. 4, and the receiving electrode bridge 122 is disposed on the same layer. ) Are spaced apart from each other with the receiving electrode parts 121, the driving electrode parts 131, the driving electrode connecting parts 132, and the insulating layer 191 interposed therebetween.

The receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 may be formed of indium tin oxide (ITO) (hereinafter, simply referred to as “ITO”). Alternatively, it may be formed of a zinc (Zn) -based oxide such as zinc oxide (ZnO) (hereinafter, simply referred to as 'ZnO').

Here, when the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 are formed of Zno, the receiving electrode parts 121 and the driving electrode part 131 are formed. ) And the driving electrode connectors 132 may be formed by depositing the ZnO using a metal organic chemical vapor deposition (MOCVD) method (hereinafter, simply referred to as a 'MOCVD method'). Can be.

In particular, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 are formed on the ZnO film by injecting hydrogen into the ZnO film deposited by the MOCVD method. (Carbon) is formed through the removal of carbon components to remove the components.

The electrode bridge 122 is formed of ZnO. That is, the electrode bridge 122 is formed through a carbon component removal process of removing oxygen and carbon components formed on the ZnO film by spraying hydrogen on the ZnO film deposited by the MOCVD method.

Second, the receiving electrode lines 140, the driving electrode lines 150, and the pads 170 formed in the first non-display area 160a and the second non-display area 160b are described. Is as follows.

A light shielding layer 161 is applied to the first non-display area 160a and the second non-display area 160b to block light transmission as described above and illustrated in FIG. 4. The thickness of the light blocking layer 161 is approximately 20 μm or more. When the thickness of the receiving electrode parts 121, the driving electrode part 131, and the driving electrode connecting part 132 is about 300 nm, the light blocking layer 161 may be compared with the receiving electrode part 121. It is 70 times thicker.

Receiving electrode lines 140 connected to the receiving electrodes 120 are formed on an upper end of the light blocking layer 161 formed in the first non-display area 160a, and the second non-display The pad 170 connected to the driving electrode line 150 and the driving electrode line 150 connected to the driving electrode 130 is formed at an upper end of the light blocking layer 161 formed in the region 160a. ) Is formed.

Here, the receiving electrode line 140 is electrically connected to the receiving electrode 121 and the receiving line bridge 181 forming the receiving electrode 120 corresponding to the receiving electrode line 140. It is.

For example, a protective film 192 is coated on the receiving electrode line 140 and the receiving electrode part 121, and a protective film corresponding to the receiving electrode line 140 and the receiving electrode part 121. Contact holes are formed at 192. The receiving line bridge 181 is electrically connected to the receiving electrode line 140 and the receiving electrode unit 121 through the contact hole, so that the receiving electrode line 140 and the receiving electrode unit 121 are connected to each other. Can be electrically connected.

The driving electrode line 150 is electrically connected to the driving electrode part 131 forming the driving electrode 130 corresponding to the driving electrode line 150 through the driving line bridge 182. . For example, the passivation layer 192 is coated on top of the driving electrode line 150 and the driving electrode part 131, and corresponds to the driving electrode line 150 and the driving electrode part 131. Contact holes are formed in the passivation layer 192. The driving line bridge 182 is electrically connected to the driving electrode line 150 and the driving electrode part 131 through the contact hole, thereby driving the driving electrode line 150 and the driving electrode part 131. Can be electrically connected.

The pad 170 may be formed at an end of the driving line bridge 182.

The receiving line bridge 181 and the driving line bridge 182 are collectively referred to as line bridges 181 and 182. That is, in the following description, the line bridge may mean the receiving line bridge 181 or the driving line bridge 182. In this case, when the receiving line bridge 181 is the first line bridge, the driving line bridge may be the second line bridge, or vice versa.

The line bridges 181 and 182 are formed on the same layer as the electrode bridge 122, as shown in FIG. 4.

Accordingly, the line bridges 181 and 182, like the electrode bridges 122, inject hydrogen into a ZnO film deposited by the MOCVD method to form oxygen and carbon components formed in the ZnO film. It is formed through a carbon component removal process to remove the.

In addition, the receiving line bridge 181, the driving line bridge 182, and the electrode bridge 122 are collectively referred to as a bridge. That is, the bridge may be the line bridge or the electrode bridge. In addition, the line bridge may be the receiving line bridge 181 or may be the driving line bridge 182. The electrode bridge may be the receiving electrode bridge or the driving electrode bridge.

Hereinafter, a method of manufacturing the panel 100 will be described in detail with reference to FIGS. 5A to 5F and 6 to 8.

5A to 5F are exemplary views sequentially illustrating a method of manufacturing a touch panel according to the present invention. 6 is an exemplary view showing a configuration of a touch panel manufacturing system according to the present invention. FIG. 7 is an exemplary view illustrating a first touch panel manufacturing apparatus shown in FIG. 6. FIG. 8 is an exemplary view illustrating a second touch panel manufacturing apparatus shown in FIG. 6.

The touch panel manufacturing method described below is described as an example of the touch panel manufacturing method according to the present invention. Therefore, the manufacturing method of the touch panel according to the present invention may be changed in various forms according to the structure of the touch panel.

First, referring to FIG. 5A, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 are formed on the substrate 110.

The receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 have a thickness of about 300 nm.

The substrate 110 may be a transparent glass substrate, a transparent plastic substrate, or a transparent synthetic resin film.

The plastic substrate or the synthetic resin film may be made of any one material of polyimide (PI), polycarbonate (PC), polynorborneen (PNB), polyethyleneterephthalate (PET), polyethylenapthanate (PEN), and polyethersulfone (PES).

The receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 may be formed of ITO.

In this case, the ITO may be formed on the substrate 111 by a physical vapor deposition (PVD) method (hereinafter, simply referred to as a 'PVD method').

The PVD method includes sputtering, e-beam evaporation, thermal evaporation, laser molecular beam deposition (L-MBE) and pulsed laser deposition (PLD). In particular, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 may be formed on the substrate 111 by the sputtering.

In addition, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 may be formed of a conductive transparent oxide, for example, a Zn-based oxide such as ZnO. In this case, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 may be formed by depositing using the MOCVD method.

In particular, the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132 inject hydrogen into a ZnO film deposited by a MOCVD method, thereby forming oxygen formed in the ZnO film. And it may be formed through a carbon component removal process for removing the carbon component (Carbon).

The MOCVD method and the carbon component removal process are described below in detail in the process of forming the

bridges

181, 182, and 122.

Next, referring to FIG. 5B, a light blocking layer 161 is formed in the non-display area 160. The thickness of the light shielding layer 161 is formed to be approximately 20 μm or more. The light blocking layer 161 is formed to be at least 70 times thicker than the thicknesses of the receiving electrode parts 121, the driving electrode parts 131, and the driving electrode connecting parts 132.

Next, referring to FIG. 5C, the receiving electrode lines 140 and the driving electrode lines 150 are formed on the light blocking layer 161.

For example, five receiving electrode lines 140 are formed in the first non-display area 160a. The receiving electrode lines extend in the second non-display area 160b and four driving electrode lines 150 are formed.

The receiving electrode lines 140 and the driving electrode lines 150 are formed on the light blocking layer 161 formed in the non-display area 160, through which light is not transmitted, so that the ITO Or need not be formed of a transparent material such as ZnO. Accordingly, the receiving electrode lines 140 and the driving electrode lines 150 may be formed of various kinds of opaque metal materials having excellent conductivity.

Next, referring to FIG. 5D, the receiving electrode parts 121, the driving electrode parts 131, the driving electrode connecting parts 132, the receiving electrode lines 140, and the driving electrode line 150 are described. The insulating film 191 is applied to the entire surface including the (). The insulating layer 191 may be formed of an insulating material such as PAC or PAS.

A plurality of contact holes are formed in the insulating layer 191 using a mask.

For example, two contact holes are formed at positions corresponding to each of the receiving electrode parts 121 of the insulating film 191, and the receiving electrode lines 140 and the driving electrode line 150 are formed. One contact hole is formed at a position corresponding to each of the ones, and one contact hole is formed at a position corresponding to the driving electrode portions 131 adjacent to the light blocking layer among the driving electrode portions 131. . The contact holes may be formed by a photomask process.

Next, referring to FIG. 5E, the receiving electrode bridge 122, the receiving electrode line 140, and the receiving electrode 121 which connect the two receiving electrode parts 121 spaced apart from each other through the contact holes. ) A receiving line bridge 181 connecting the contact holes through the contact holes and a driving line bridge 182 connecting the driving electrode line 150 and the driving electrode unit 131 through the contact holes. 191).

The receiving electrode bridge 122, the receiving line bridge 181, and the driving line bridge 182 are formed on the insulating layer 191 through two processes.

The first process is performed in the first touch panel manufacturing apparatus 620 as shown in FIGS. 6 and 7.

The first touch panel manufacturing apparatus 620 is for forming the

bridges

181, 182, and 122 formed in a fine pattern, and a chemical vapor deposition (CVD) method using a metal organic precursor. (Hereinafter, simply referred to as 'CVD method'). That is, the first touch panel manufacturing apparatus 620 uses the CVD method to deposit conductive transparent oxides, for example, Zn-based oxides such as ZnO to form the bridges. Hereinafter, for convenience of description, the present invention will be described by taking the case where the conductive transparent oxide is zinc oxide (ZnO) as an example. In this case, the electrode parts may also be formed of the zinc oxide.

In order to form the bridges, the first touch panel manufacturing apparatus 620 includes a chamber 621, a substrate support 622, and

gas injectors

626 and 623, as shown in FIG. 7. The gas injection unit includes a gas injection unit 623 and a gas supply unit 626, and the gas supply unit 626 includes a first gas supplier 624 and a second gas supplier 625.

However, the first touch panel manufacturing apparatus 620 may be configured in various forms in addition to the form shown in FIG.

When the above-described process of FIGS. 5A to 5D is performed to form the insulating film 191 on the substrate 111, the substrate 111 may have a first touch panel as illustrated in FIG. 7. It flows into the chamber 621 of the manufacturing apparatus 620 and is placed on the substrate support 622.

Thereafter, the metal raw material (Zn-based metal precursor) and the reaction gas are injected onto the substrate 111 through the gas injection unit 623, and thus the

bridges

181, 182, and 122 are formed.

The second process is performed in the second touch panel manufacturing apparatus 630 as shown in FIG. 8.

The second touch panel manufacturing apparatus 630 is ionized with hydrogen (H ₂ ) by using a plasma chemical vapor deposition (PECVD) method (hereinafter, simply referred to as 'PECDV'). In the first process, the hydrogen ions are injected onto the substrate including the

bridges

122, 181, and 182 formed using the ZnO.

O-H bonding is formed on the surface of the ZnO film by the hydrogen ions, thereby improving sheet resistance of the ZnO film. That is, the oxygen resistance is removed by the carbon component removal process performed by the second touch panel manufacturing apparatus 630, thereby improving the sheet resistance of the ZnO film (bridge).

In addition, while the ZnO film (bridge) is formed through the first touch panel manufacturing apparatus 620, CxHx groups are generated on the surface of the ZnO film. The CxHx group combines with the hydrogen ions to form a substance such as CH ₄ during the carbon component removal process. In this case, since the carbon component may be removed from the ZnO film, the permeability of the

bridges

122, 181, and 182 may be improved. That is, the transmittance of the ZnO film (bridge) may be improved by the carbon component removing process performed by the carbon component removing apparatus 630.

Specifically, by the carbon component removal process, the sheet resistance of the ZnO film (bridge) can be improved, and the permeability of the ZnO film can be improved.

To this end, the substrate 111 on which the

bridges

122, 181, and 182 (ZnO) are formed is introduced into the second touch panel manufacturing apparatus 630.

When the substrate 111 is inserted, the second touch panel manufacturing apparatus 630 ionizes various kinds of gases in which hydrogen (H ₂ ) is mixed and introduces the gas into the substrate 111.

Finally, referring to FIG. 5F, a passivation layer 192 is formed on an entire surface of the substrate 111 including the

bridges

122, 181, and 182. In this case, the passivation layer 192 is formed such that an end of the driving line bridge 182 is exposed to the outside. The portion exposed to the outside without being covered by the passivation layer 192 becomes the pad 170. The flexible printed circuit board (FPCB) 200 on which the touch driver IC 300 is mounted is electrically connected to the pad 170.

By the above processes, the manufacturing process of the touch panel 100 is completed.

The touch panel 100 to which the flexible printed circuit board 200 is connected is attached to the top of the panel by an adhesive such as OCR (Optically Clear Resin) or an adhesive tape such as OCA (Optically Clear Adhesive). As a result, the display device with the touch panel 100 may be manufactured.

Briefly summarized the manufacturing method of the touch panel according to the present invention described above is as follows.

That is, in the method of manufacturing the touch panel according to the present invention, forming the

electrode parts

121 and 131 in the display area 110 of the substrate, and forming the light blocking layer 161 in the

non-display areas

160a and 160b of the substrate. Forming, forming the electrode line (140, 150) on the light shielding layer 161 and using a transparent oxide having a conductive, line bridge connecting the electrode (121, 131) and the electrode line Forming 181, 182.

Here, the conductive transparent oxide may be zinc oxide (ZnO), and in addition, may be various kinds of Zn-based oxide. In addition, the line bridges 181 and 182 may be formed using an organometallic chemical vapor deposition (MOCVD) method.

In addition, the method for manufacturing a touch panel according to the present invention may further include removing a carbon component generated during the formation of the line bridges 181 and 182 by reacting a gas to the surface of the line bridge. The carbon component may be removed by using a plasma chemical vapor deposition (PECVD) method using hydrogen gas.

In addition, in the method of manufacturing a touch panel according to the present invention, the

electrode parts

121 and 131 form the first touch electrode 120 and are electrically separated from each other and the first electrode parts 121 that are electrically separated from each other. And second electrode parts 131 connected to form the second touch electrode 130, and between the first electrode parts 121 through the same process as that of forming the line bridge 122. Electrode bridges 122 that connect electrically may be formed. Here, the

electrode parts

121 and 131 may also be formed using the transparent transparent oxide.

Hereinafter, a touch panel manufacturing system 600 according to the present invention is described. In the following description, the contents described above are simply described or omitted.

As illustrated in FIG. 6, the touch panel manufacturing system 600 according to the present invention includes the first touch panel manufacturing apparatus 620 and the second touch panel manufacturing apparatus 630.

First, as illustrated in FIG. 7, the first touch panel manufacturing apparatus 620 includes a chamber 621 having a reaction space, electrode portions formed in a display area, and a non-display formed outside the display area. A line supporting the manufacturing substrate 100a including a light blocking layer formed in an area and an electrode line formed on the light blocking layer, and a substrate supporting part 622 disposed in the chamber, and a line connecting the electrode part and the electrode line. And a gas injector 623 for injecting a metal raw material and a reactive gas into the fabrication substrate to form conductive transparent oxide (ZnO) on the fabrication substrate to form a bridge. In this case, the manufacturing substrate 100a refers to a substrate that has been subjected to the processes of FIGS. 5A to 5D.

5A to 5D described above are performed through a sputtering apparatus for depositing the ITO, an apparatus for forming the insulating layer 191, and apparatuses for forming the contact holes in the insulating layer 191. Can be. Since these devices are generally used to manufacture the touch panel 100, detailed description thereof will be omitted.

The gas injection unit includes a gas injection unit 623 and a gas supply unit 626, and the gas supply unit 626 includes a first gas supplier 624 and a second gas supplier 625.

The gas supply unit 626 of the gas injection unit may inject a Zn-based metal precursor with the metal raw material and inject an oxygen-containing gas with the reaction gas. To this end, the first gas supplier 624 may supply the metal raw material to the gas injection unit 623, and the second gas supplier 625 may supply the reaction gas to the gas injection unit 623. Can spray

In addition, the gas injector, together with the line bridge, serves to inject the metal raw material and the reaction gas to the manufacturing substrate to form electrode bridges electrically connecting the second electrode portions. .

That is, the first touch panel manufacturing apparatus 620 performs a function of forming the line bridge on the manufacturing substrate by using an organic metal chemical vapor deposition (MOCVD) method. Accordingly, the first touch panel manufacturing apparatus 620 basically includes components included in the apparatuses for performing the organometallic chemical vapor deposition method.

Second, as illustrated in FIG. 8, the second touch panel manufacturing apparatus 630 includes a chamber 631 having a reaction space, electrode portions formed in the display area, and a non-display formed outside the display area. A manufacturing substrate 100b including a light blocking layer formed in an area, an electrode line formed on the light blocking layer, and a line bridge formed by an organic metal chemical vapor deposition (MOCVD) method to connect the electrode part and the electrode line; And a plasma generator for supporting the susceptor 632 disposed in the chamber and the process gas supplied from the gas supply unit 634 by ionizing the plasma by a plasma discharge, and spraying the ionized process gas onto the manufacturing substrate. 633). The plasma generator 633 is electrically connected to an RF (Radio Frequency) power source 635.

In this case, the manufacturing substrate 100b refers to a substrate that has passed through the first touch panel manufacturing apparatus 620. Therefore, the line bridge 122 is formed on the manufacturing substrate 100b introduced into the second touch panel manufacturing apparatus 620.

The process gas may be hydrogen (H ₂ ) gas. By the second touch panel manufacturing apparatus 630, the ionized process gas is combined with oxygen (O) of a transparent oxide having conductivity to form the line bridge. In this case, by forming the OH bonding on the surface of the ZnO film by the hydrogen ions, the sheet resistance of the ZnO film can be improved.

In addition, the ionized process gas is generated during the line bridge formation process and combined with the carbon component formed on the manufacturing substrate. In this case, while the ZnO film (bridge) is formed through the first touch panel manufacturing apparatus 620, CxHx groups generated on the surface of the ZnO film are combined with the hydrogen ions to form a material such as CH _4. In addition, the carbon component may be removed from the ZnO layer to improve the permeability of the

bridges

122, 181, and 182.

That is, the second touch panel manufacturing apparatus 630 may improve surface resistance and transmittance of the bridge formed of ZnO by treating the substrate by using a plasma chemical vapor deposition (PECVD) method. Accordingly, the second touch panel manufacturing apparatus 630 basically includes components included in devices for performing the plasma chemical vapor deposition method.

The present invention described above is summarized as follows.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of touch panels, in particular, forming

bridges

122, 181, and 182 using ZnO, and performing carbon removal processes on the bridges, thereby providing electrical characteristics (resistance or conductivity) of the bridges. ) And optical properties (transmittance).

According to the present invention, a bridge forming the receiving electrodes and the driving electrodes of the touch panel may be formed using ZnO instead of ITO, and the entirety of the receiving electrodes and the driving electrodes may be formed using the ZnO. Can be. In particular, since the ZnO film (bridge) may be manufactured through the first touch panel manufacturing apparatus 620 using MOCVD, the step coverage of the bridge is improved, thereby improving mass productivity of the touch panel. Can be. In addition, since ZnO which is cheaper than ITO is used, manufacturing cost of a touch panel may be reduced. According to simulation and experiment results, when the bridge, in particular, the line bridges 181 and 182 and the light shielding layer 161, the step coverage (improved step coverage) can be improved to ensure mass productivity of 90% or more. .

In addition, according to the present invention, by performing a carbon removal process for the ZnO film, the sheet resistance of the bridge can be reduced, the transmittance can be improved. As the sheet resistance is reduced, battery consumption may be reduced when driving the display device on which the touch panel is mounted. Simulation and experimental results show that the sheet resistance of the ZnO is reduced by 40-50% by the carbon removal process.

In addition, in the conventional touch panel manufacturing method using ITO, when a defect occurs, re-work process is impossible, but when the ZnO film is used as in the present invention, the re-work process can be easily performed, Can be improved.

In addition, in the above description, the process of improving the characteristics of the ZnO film is performed by the carbon removing process of injecting hydrogen ions into the ZnO film, but annealing the substrate on which the ZnO film is formed at a high temperature. In addition, the properties of the ZnO film may be improved.

Those skilled in the art to which the present invention pertains will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential features. Therefore, it is to be understood that the embodiments described above are exemplary in all respects and not restrictive. The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention. do.

Claims

Forming electrode portions in the display area of the substrate;

Forming a light blocking layer on a non-display area of the substrate;

Forming an electrode line on the light blocking layer; And

Using a transparent oxide having conductivity, forming a line bridge connecting the electrode part and the electrode line.
The method of claim 1,

The conductive transparent oxide is zinc oxide (ZnO) touch panel manufacturing method, characterized in that.
The method of claim 1,

Forming the line bridge,

And forming the line bridge by using an organometallic chemical vapor deposition (MOCVD) method.
The method of claim 1,

And reacting a gas to a surface of the line bridge to remove the carbon component generated during the formation of the line bridge.
The method of claim 4, wherein

Removing the carbon component,

A touch panel manufacturing method using a plasma chemical vapor deposition (PECVD) method using hydrogen gas.
The method of claim 1,

The electrode parts may include first electrode parts that form a first touch electrode and are electrically separated from each other, and second electrode parts that are electrically connected to each other to form a second touch electrode.

The forming of the line bridges may include forming electrode bridges electrically connecting the first electrode portions through the same process as forming the line bridges.
The method of claim 1,

The electrode parts are formed using the transparent conductive oxide, the method of manufacturing a touch panel.
A chamber having a reaction space;

A substrate supporting a manufacturing substrate including electrode parts formed in the display area, a light blocking layer formed on a non-display area formed outside the display area, and an electrode line formed on the light blocking layer, Support;

And a gas injector for injecting a metal raw material and a reactive gas into the fabrication substrate to form a transparent transparent oxide on the fabrication substrate to form a conductive transparent oxide for forming the line bridge connecting the electrode portion and the electrode line. Touch panel manufacturing apparatus.
The method of claim 8,

And the gas injector injects a Zn-based metal precursor into the metal raw material and injects an oxygen-containing gas into the reaction gas.
The method of claim 8,

The electrode parts may include first electrode parts electrically connected to each other to form a first touch electrode and second electrode parts that are electrically separated from each other to form a second touch electrode.

The gas injector, together with the line bridge, injects the metal raw material and the reactive gas onto the manufacturing substrate to form electrode bridges electrically connecting the second electrode portions. Manufacturing device.
The method of claim 8,

The conductive transparent oxide is a touch panel manufacturing device, characterized in that zinc oxide (ZnO).
The method of claim 8,

And the gas injector forms the line bridge using an organometallic chemical vapor deposition (MOCVD) method.
A chamber having a reaction space;

Electrode portions formed in the display area, a light blocking layer formed on the non-display area formed outside the display area, an electrode line formed on the light blocking layer, and an electrode formed by an organic metal chemical vapor deposition (MOCVD) method A susceptor supporting a manufacturing substrate including a line bridge connecting a part and the electrode line to the inside of the chamber; And

And a plasma generating unit which ionizes the process gas supplied from the gas supply unit by plasma discharge, and injects the ionized process gas onto the manufacturing substrate.
The method of claim 13,

The line bridge is a touch panel manufacturing apparatus, characterized in that formed of zinc oxide (ZnO).
The method of claim 13,

And the ionized process gas is combined with oxygen (O) of a transparent oxide having conductivity to form the line bridge.
The method of claim 13,

The ionized process gas, the touch panel manufacturing apparatus, characterized in that coupled to the carbon component formed in the line bridge forming process formed on the manufacturing substrate.
The method of claim 13,

The process gas is a hydrogen (H 2 ) gas, characterized in that the touch panel manufacturing apparatus.
The method of claim 13,

The process gas is a touch panel manufacturing apparatus, characterized in that for reacting with the manufacturing substrate by a plasma chemical vapor deposition (PECVD) method.
The electrode part and the electrode line may be formed on a manufacturing substrate including electrode parts formed in the display area, light blocking layers formed in the non-display area formed outside the display area, and electrode lines formed on the light blocking layer. A first touch panel manufacturing apparatus for injecting a metal raw material and a reactant gas onto the manufacturing substrate to form a transparent oxide having conductivity to be used as a line bridge to connect to the manufacturing substrate; And

Manufacturing a touch panel comprising a second touch panel manufacturing apparatus for ionizing the process gas supplied from the gas supply unit by plasma discharge to inject the ionized process gas on the manufacturing substrate discharged from the first touch panel manufacturing apparatus system.
The method of claim 19,

And the oxide is zinc oxide (ZnO), and the process gas is hydrogen (H) 2 gas.