WO2015053483A1 - Combined membrane separation process for concentrating ipa from wastewater containing ipa and treating wastewater - Google Patents

Combined membrane separation process for concentrating ipa from wastewater containing ipa and treating wastewater Download PDF

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WO2015053483A1
WO2015053483A1 PCT/KR2014/008334 KR2014008334W WO2015053483A1 WO 2015053483 A1 WO2015053483 A1 WO 2015053483A1 KR 2014008334 W KR2014008334 W KR 2014008334W WO 2015053483 A1 WO2015053483 A1 WO 2015053483A1
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ipa
separation process
membrane separation
wastewater
permeate
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PCT/KR2014/008334
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French (fr)
Korean (ko)
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하성용
고형철
이충섭
배은석
임채성
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(주)에어레인
주식회사 에너엔비텍
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Priority to JP2016521636A priority Critical patent/JP6235133B2/en
Priority to CN201480055455.1A priority patent/CN105683092B/en
Publication of WO2015053483A1 publication Critical patent/WO2015053483A1/en

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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/02Treatment of water, waste water, or sewage by heating
    • C02F1/04Treatment of water, waste water, or sewage by heating by distillation or evaporation
    • C02F1/08Thin film evaporation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/448Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by pervaporation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58Multistep processes
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/441Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/025Reverse osmosis; Hyperfiltration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/36Pervaporation; Membrane distillation; Liquid permeation
    • B01D61/362Pervaporation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00Nature of the contaminant
    • C02F2101/30Organic compounds
    • C02F2101/34Organic compounds containing oxygen

Definitions

  • the present invention relates to a combined membrane separation process for concentrating IPA and wastewater treatment from IPA-containing wastewater, and more specifically, combining and separating permeation membrane separation and reverse osmosis membrane separation to separate and concentrate IPA from IPA-containing wastewater.
  • the present invention relates to a combined membrane separation process capable of treating wastewater at the same time.
  • IPA isopropyl alcohol
  • the used wastewater generally contains 5 to 15% by weight of IPA.
  • the wastewater generated in this way has a problem in that the total amount of the wastewater is currently treated because the concentration of IPA is very low, so that the concentration of IPA is very low, so it is not economical at the time of separation and concentration using a conventional distillation process.
  • Patent Documents 1 and 2 There have been prior studies on permeation membrane separation process for selectively separating water from a mixture of alcohol / water such as IPA using pervaporation membrane or selectively separating organic compounds from an aqueous solution of organic compounds.
  • Patent Documents 3 and 4 Although the technology for treating wastewater using the reverse osmosis membrane separation process is widely known (Patent Documents 3 and 4), the permeation membrane separation process and the reverse osmosis membrane separation process were performed in separate processes according to their respective uses and characteristics.
  • the present inventors concentrate IPA from permeate membrane separation process of IPA cleaning wastewater of concentration which is not suitable for concentration and recycling or wastewater treatment, and at the same time, it is possible to adjust IPA concentration to wastewater treatment using reverse osmosis membrane separation process.
  • concentration separation process IPA can be selectively separated, concentrated, and recycled from the IPA cleaning wastewater, which has been treated in the whole wastewater, and the low concentration of IPA cleaning wastewater can be recycled in the existing wastewater treatment plant without dilution.
  • the present invention has been accomplished by focusing on the process.
  • Patent Document 1 Publication No. 10-2011-0083077
  • Patent Document 2 Publication No. 10-2000-0067454
  • Patent Document 3 Publication No. 10-2013-0032294
  • Patent Document 4 Publication No. 10-2005-0026294
  • the present invention has been made in view of the above problems, and an object of the present invention is to selectively recycle and recycle IPA from IPA washing waste water by concentrating 30% by weight or more, and at the same time, a low concentration of IPA of 0.5% by weight or less.
  • Washing waste water is to provide a combined membrane separation process combined with a permeation membrane separation process and a reverse osmosis membrane separation process that can be treated as it is in the existing wastewater treatment plant without separate dilution.
  • the present invention for achieving the object as described above I) concentrating the IPA through the permeation membrane separation process from the IPA-containing waste water; And II) treating the wastewater from the IPA-containing wastewater through a reverse osmosis membrane separation process.
  • the pervaporation membrane separation step of step I) comprises the steps of: i) supplying the heated IPA-containing wastewater to the pervaporation membrane module; ii) condensing the IPA penetrating the permeation membrane module into the liquid phase; And iii) transferring the condensed IPA to the permeate tank.
  • the heated IPA-containing wastewater is characterized in that it is maintained at 30 ⁇ 60 °C by the heater.
  • the supply flow rate of the IPA-containing wastewater supplied to the permeation membrane module is characterized in that more than five times the permeate flow rate.
  • the reverse osmosis membrane separation process of step II) includes a) supplying the boosted IPA-containing wastewater to the reverse osmosis membrane module; And b) transferring the wastewater that has passed through the reverse osmosis membrane module to the permeate tank.
  • the boosted IPA-containing wastewater is characterized in that it is maintained at 10 ⁇ 70bar by a high pressure pump.
  • the supply flow rate of the IPA-containing wastewater supplied to the reverse osmosis membrane module is characterized in that more than three times the permeate flow rate.
  • IPA can be selectively separated from IPA cleaning wastewater and concentrated to be recycled by concentrating at least 30% by weight.
  • the wastewater treatment plant can be treated as it is.
  • FIG. 1 is a block diagram illustrating a continuous merge membrane separation process in accordance with the present invention.
  • Figure 2 is a block diagram showing a batch merge membrane separation process according to the present invention.
  • the IPA is concentrated using the permeation membrane separation process according to the present invention, and at the same time, the combined membrane separation process for separating the IPA concentration into an appropriate concentration for wastewater treatment using the reverse osmosis membrane separation process will be described in detail with the accompanying drawings. Let's do it.
  • the present invention comprises the steps of: I) concentrating IPA from the IPA-containing wastewater through a permeation membrane separation process; And II) treating the wastewater from the IPA-containing wastewater through a reverse osmosis membrane separation process.
  • the pervaporation membrane separation process of step I) comprises the steps of: i) supplying the heated IPA-containing wastewater to the pervaporation membrane module; ii) condensing the IPA penetrating the permeation membrane module into the liquid phase; And iii) transferring the condensed IPA to the permeate tank; as shown in the continuous process block diagram of FIG. 1, first the IPA-containing wastewater (IPA solution) is transferred to the IPA solution tank 100. And the IPA solution of the IPA solution tank is heated by conventional heating means such as the heater 110.
  • the IPA solution is heated by the heater 110 It is preferable to make it hold
  • the IPA solution heated to 30 to 60 ° C. is supplied to the permeation membrane module 150, where the process of sequentially passing the IPA solution supply pump 120, the solution filter 130, and the IPA solution flow meter 140 is accompanied. do.
  • the supply flow rate of the IPA solution supplied to the permeation membrane module 150 is preferably adjusted to 5 times or more of the permeate flow rate. If the IPA solution is supplied to the permeation membrane module 150 at less than 5 times, the IPA concentration of the permeate solution passing through the permeation membrane module 150 is low and separation and concentration are not performed smoothly.
  • the IPA solution supplied to the permeation membrane module 150 has an action mechanism in which IPA is dissolved in the separation membrane, diffuses in the separation membrane, and permeates into the vapor phase.
  • This action mechanism is one end of the permeation membrane module 150 is in contact with the IPA supply solution, the other end is in contact with the vapor pressure of the low permeate, low vapor pressure conditions can be made by applying a vacuum or flowing an inert carrier gas bar
  • a chemical potential which is a driving force of the pervaporation membrane separation process, is generated within the pervaporation membrane to permeate the material through the membrane.
  • the vacuum pump 170 the vacuum is maintained in the permeable part.
  • the vapor phase IPA that has passed through the permeation evaporation membrane module 150 is condensed into a liquid phase in a conventional condenser 160, and the condensed liquid IPA is passed through the permeate solution flow meter 180 to the permeate solution tank 190. Transferred.
  • the IPA solution obtained through this pervaporation membrane separation process can be recycled since it is concentrated to 30% or more.
  • the reverse osmosis membrane separation process is performed at the same time. And b) transferring the wastewater that has passed through the reverse osmosis membrane module to a permeate tank, as shown in the continuous process block diagram of FIG.
  • the IPA solution is boosted by being transferred to the IPA solution high pressure pump 220 via the solution filter 210.
  • the supply pressure in the high-pressure pump 220 is preferably maintained at 10 ⁇ 70bar, when operating below 10bar, the driving force is low, the permeation rate of the reverse osmosis membrane is greatly reduced, if it exceeds 70bar long-term stability of the reverse osmosis membrane Since it falls, the IPA solution is adjusted to maintain a pressure 10 ⁇ 70bar by the high pressure pump 220.
  • the IPA solution boosted to 10 to 70 bar is supplied to the reverse osmosis membrane module 240 through the solution flow meter 230, and the wastewater that has passed through the reverse osmosis membrane module 240 passes through the permeate flowmeter 250 to transmit the permeate tank 260. Is transferred to. Wastewater (permeate) that is permeated through this reverse osmosis membrane separation process can be treated in the wastewater treatment plant as it is without dilution because the IPA concentration is 0.5% or less.
  • the tank 100 is filled with a predetermined amount of IPA-containing wastewater (IPA solution), and the IPA is separated using the pervaporation membrane separation process. And concentrating and simultaneously operating the reverse osmosis membrane separation process to permeate water (wastewater) to be transferred to the permeate tank 260, where the amount of IPA concentrate in the permeation membrane separation process and the permeate amount in the reverse osmosis membrane separation process are checked.
  • the solution tank 100 is continuously replenished, and the capacity of the permeation membrane separation process and the reverse osmosis membrane separation process can be continuously operated according to the amount to be treated continuously (continuous wastewater generation amount).
  • IPA-containing wastewater (IPA solution) is filled in a predetermined amount into the tank 100, and IPA is used by using a pervaporation membrane separation process. After separating and concentrating, the concentration of the original IPA-containing wastewater is lowered below a certain concentration, the solution of IPA solution tank 100 is transferred to another IPA solution tank 200, and the transferred IPA-containing wastewater is reverse osmosis membrane separation. The water is permeated by the process and stored in the permeate tank 260. When water is removed from the IPA solution of the IPA solution tank 200 and the IPA is increased to a certain concentration, the water is transferred to the IPA solution tank 100 and again pervaporated. By repeatedly operating the membrane separation process, all of the IPA-containing wastewater is treated, and the permeate of the permeate tank 260 may be treated in a wastewater treatment plant due to a low concentration of IPA.
  • the IPA-containing wastewater (IPA solution) is filled in a predetermined amount in the tank 100, the IPA is separated and concentrated using a permeation membrane separation process, and at the same time, the reverse osmosis membrane separation process is also operated with water ( Waste water), and then, is transferred to the permeate tank 260, and then continues to operate to replenish the IPA-containing waste water when the level of the IPA solution tank 100 is below a certain amount, and the upper and lower levels of the IPA solution tank 100 Depending on the batch, a semi-batch type membrane separation process is also possible.
  • a silicon-based composite membrane in which an organic polysiloxane such as polydimethylsiloxane (PDMS) is coated on a porous support such as polyetherimide is preferred.
  • the membrane material of the reverse osmosis membrane separation process is preferably a polyamide-based composite membrane in which a polyamide is coated on a porous support such as polysulfone, but is not limited thereto.
  • the IPA concentration of the wastewater containing IPA was fixed at 5.2% by weight, the feed flow rate was set at 80 liter per minute (LPM), and the temperature of the feed solution was changed to 35 ° C, 45 ° C, and 55 ° C, respectively.
  • the membrane separation process was carried out, and Table 1 shows the IPA concentration and the permeate flow rate of the permeate solution according to the temperature of the feed solution by the pervaporation membrane separation process.
  • a continuous combined membrane separation process was performed in the same manner as in Example 1, except that the IPA concentration of the IPA-containing wastewater was fixed at 8.7 wt%, and the IPA of the permeate solution according to the feed solution temperature according to the permeation evaporation membrane separation process is shown in Table 2. Concentration and flux were shown.
  • the temperature of the feed solution was fixed at 35 and the feed flow rate was 20 LPM, and the IPA concentrations of the IPA-containing wastewater were changed to 5.2 wt%, 6.2 wt%, 7.3 wt% and 8.5 wt%, respectively.
  • the membrane separation process was performed, and Table 3 shows the IPA concentration and permeate flow rate of the permeate solution (permeate) by the reverse osmosis membrane separation process.
  • IPA can be selectively separated from IPA cleaning wastewater and concentrated to be recycled by concentrating more than 30% by weight. It shows a remarkable effect that can be treated as it is in the wastewater treatment plant.

Abstract

The present invention relates to a combined membrane separation process for concentrating IPA from wastewater containing IPA and treating wastewater, and more specifically, to a combined membrane separation process capable of separating and concentrating IPA from wastewater containing IPA and simultaneously treating wastewater by combining a pervaporation membrane separation process and a reverse osmosis membrane separation process. According to the combined membrane separation process of the present invention, IPA can be selectively separated from IPA washing wastewater and concentrated to 30 wt% or more, thereby recycling the same, and simultaneously, IPA washing wastewater having a low concentration of 0.5 wt% or less can be treated, as is, in a conventional wastewater treatment plant without separate dilution.

Description

IPA 함유 폐수로부터 IPA의 농축 및 폐수처리를 위한 병합 막분리 공정Combined Membrane Separation Process for Concentration and Wastewater Treatment of IPA from IPA-Containing Wastewater
본 발명은 IPA 함유 폐수로부터 IPA의 농축 및 폐수처리를 위한 병합 막분리 공정에 관한 것으로, 보다 상세하게는 투과증발막분리공정과 역삼투막분리공정을 결합하여 IPA 함유 폐수로부터 IPA를 분리 및 농축하고, 동시에 폐수를 처리할 수 있는 병합 막분리 공정에 관한 것이다.The present invention relates to a combined membrane separation process for concentrating IPA and wastewater treatment from IPA-containing wastewater, and more specifically, combining and separating permeation membrane separation and reverse osmosis membrane separation to separate and concentrate IPA from IPA-containing wastewater. The present invention relates to a combined membrane separation process capable of treating wastewater at the same time.
IPA(이소프로필알코올)는 산업현장 특히, 반도체 제조공정, LCD 제조공정 등에서 세정용액으로 많이 사용하며, 그 사용된 세정폐수에는 일반적으로 5~15 중량%의 IPA가 함유되어 있다. 이렇게 발생된 폐수는 유기화합물, 그 중에서도 알코올의 회수라는 측면에서 보면, IPA의 농도가 매우 낮아 통상의 증류공정을 이용하여 분리농축시 경제성이 없으므로 현재는 전량 폐수처리 하는 문제점이 있다.IPA (isopropyl alcohol) is widely used as a cleaning solution in industrial sites, especially in semiconductor manufacturing processes and LCD manufacturing processes, and the used wastewater generally contains 5 to 15% by weight of IPA. The wastewater generated in this way has a problem in that the total amount of the wastewater is currently treated because the concentration of IPA is very low, so that the concentration of IPA is very low, so it is not economical at the time of separation and concentration using a conventional distillation process.
한편으로, 이러한 IPA 세정폐수는 폐수처리라는 측면에서 보면, IPA의 농도가 너무 높아 물로 희석하여 IPA의 농도를 1% 이하로 낮추어 폐수처리를 하는 또 다른 문제점이 상존한다.On the other hand, such an IPA cleaning wastewater in terms of wastewater treatment, there is another problem that the IPA concentration is too high to dilute with water to lower the IPA concentration to less than 1% to treat the wastewater.
IPA와 같은 알코올/물의 혼합용액으로부터 투과증발막을 이용하여 물을 선택적으로 분리하거나 또는 유기화합물 수용액으로부터 유기화합물을 선택적으로 분리하기 위한 투과증발막분리공정에 관한 선행연구들이 있었고(특허문헌 1, 2), 역삼투막분리공정을 이용하여 폐수를 처리하는 기술도 널리 알려져 있지만(특허문헌 3, 4), 투과증발막분리공정과 역삼투막분리공정은 각기 용도 및 특성에 따라 별개의 공정으로 수행되고 있었다.There have been prior studies on permeation membrane separation process for selectively separating water from a mixture of alcohol / water such as IPA using pervaporation membrane or selectively separating organic compounds from an aqueous solution of organic compounds (Patent Documents 1 and 2). Although the technology for treating wastewater using the reverse osmosis membrane separation process is widely known (Patent Documents 3 and 4), the permeation membrane separation process and the reverse osmosis membrane separation process were performed in separate processes according to their respective uses and characteristics.
따라서 본 발명자는, 농축하여 재활용하거나 또는 폐수처리하기에 적합하지 않은 농도의 IPA 세정폐수로부터 투과증발막분리공정을 이용하여 IPA를 농축하고, 동시에 역삼투막분리공정을 이용하여 IPA 농도를 폐수처리에 적정한 농도로 분리하는 공정을 병합하여 적용하면, 전량 폐수처리 하였던 IPA 세정폐수로부터 IPA를 선택적으로 분리 및 농축하여 재활용할 수 있고, 아울러 낮은 농도의 IPA 세정폐수는 별도의 희석 없이 기존의 폐수처리장에서 그대로 처리할 수 있음에 착안하여 본 발명에 이르렀다.Therefore, the present inventors concentrate IPA from permeate membrane separation process of IPA cleaning wastewater of concentration which is not suitable for concentration and recycling or wastewater treatment, and at the same time, it is possible to adjust IPA concentration to wastewater treatment using reverse osmosis membrane separation process. By combining the concentration separation process, IPA can be selectively separated, concentrated, and recycled from the IPA cleaning wastewater, which has been treated in the whole wastewater, and the low concentration of IPA cleaning wastewater can be recycled in the existing wastewater treatment plant without dilution. The present invention has been accomplished by focusing on the process.
<특허문헌><Patent Documents>
특허문헌 1 공개특허공보 제10-2011-0083077호Patent Document 1 Publication No. 10-2011-0083077
특허문헌 2 공개특허공보 제10-2000-0067454호Patent Document 2 Publication No. 10-2000-0067454
특허문헌 3 공개특허공보 제10-2013-0032294호Patent Document 3 Publication No. 10-2013-0032294
특허문헌 4 공개특허공보 제10-2005-0026294호Patent Document 4 Publication No. 10-2005-0026294
본 발명은 상기와 같은 문제점을 감안하여 안출된 것으로, 본 발명의 목적은 IPA 세정폐수로부터 IPA를 선택적으로 분리 및 30 중량% 이상 농축하여 재활용할 수 있고, 동시에 0.5 중량% 이하의 낮은 농도의 IPA 세정폐수는 별도의 희석 없이 기존의 폐수처리장에서 그대로 처리할 수 있는 투과증발막분리공정과 역삼투막분리공정이 결합된 병합 막분리 공정을 제공하고자 하는 것이다.The present invention has been made in view of the above problems, and an object of the present invention is to selectively recycle and recycle IPA from IPA washing waste water by concentrating 30% by weight or more, and at the same time, a low concentration of IPA of 0.5% by weight or less. Washing waste water is to provide a combined membrane separation process combined with a permeation membrane separation process and a reverse osmosis membrane separation process that can be treated as it is in the existing wastewater treatment plant without separate dilution.
상기한 바와 같은 목적을 달성하기 위한 본 발명은 I) IPA 함유 폐수로부터 투과증발막분리공정을 통하여 IPA를 농축하는 단계; 및 II) IPA 함유 폐수로부터 역삼투막분리공정을 통하여 폐수를 처리하는 단계;를 포함하는 병합 막분리 공정을 제공한다.The present invention for achieving the object as described above I) concentrating the IPA through the permeation membrane separation process from the IPA-containing waste water; And II) treating the wastewater from the IPA-containing wastewater through a reverse osmosis membrane separation process.
상기 I) 단계의 투과증발막분리공정은 i) 승온된 IPA 함유 폐수를 투과증발막모듈에 공급하는 단계; ii) 투과증발막모듈을 투과한 IPA를 액체상으로 응축하는 단계; 및 iii) 응축된 IPA를 투과용액 탱크로 이송하는 단계;를 포함하는 것을 특징으로 한다.The pervaporation membrane separation step of step I) comprises the steps of: i) supplying the heated IPA-containing wastewater to the pervaporation membrane module; ii) condensing the IPA penetrating the permeation membrane module into the liquid phase; And iii) transferring the condensed IPA to the permeate tank.
상기 승온된 IPA 함유 폐수는 히터에 의하여 30~60℃로 유지된 것을 특징으로 한다.The heated IPA-containing wastewater is characterized in that it is maintained at 30 ~ 60 ℃ by the heater.
상기 투과증발막모듈에 공급하는 IPA 함유 폐수의 공급유량은 투과유량의 5배 이상인 것을 특징으로 한다.The supply flow rate of the IPA-containing wastewater supplied to the permeation membrane module is characterized in that more than five times the permeate flow rate.
상기 II) 단계의 역삼투막분리공정은 a) 승압된 IPA 함유 폐수를 역삼투막모듈에 공급하는 단계; 및 b) 역삼투막모듈을 투과한 폐수를 투과수 탱크로 이송하는 단계;를 포함하는 것을 특징으로 한다.The reverse osmosis membrane separation process of step II) includes a) supplying the boosted IPA-containing wastewater to the reverse osmosis membrane module; And b) transferring the wastewater that has passed through the reverse osmosis membrane module to the permeate tank.
상기 승압된 IPA 함유 폐수는 고압펌프에 의하여 10~70bar로 유지된 것을 특징으로 한다.The boosted IPA-containing wastewater is characterized in that it is maintained at 10 ~ 70bar by a high pressure pump.
상기 역삼투막모듈에 공급하는 IPA 함유 폐수의 공급유량은 투과유량의 3배 이상인 것을 특징으로 한다.The supply flow rate of the IPA-containing wastewater supplied to the reverse osmosis membrane module is characterized in that more than three times the permeate flow rate.
본 발명의 병합 막분리 공정에 따르면, IPA 세정폐수로부터 IPA를 선택적으로 분리 및 30 중량% 이상 농축하여 재활용할 수 있고, 동시에 0.5 중량% 이하의 낮은 농도의 IPA 세정폐수는 별도의 희석 없이 기존의 폐수처리장에서 그대로 처리할 수 있다.According to the combined membrane separation process of the present invention, IPA can be selectively separated from IPA cleaning wastewater and concentrated to be recycled by concentrating at least 30% by weight. The wastewater treatment plant can be treated as it is.
도 1은 본 발명에 따른 연속식(continuous) 병합 막분리 공정도를 나타낸 블록 다이어그램.1 is a block diagram illustrating a continuous merge membrane separation process in accordance with the present invention.
도 2는 본 발명에 따른 배치식(batch) 병합 막분리 공정도를 나타낸 블록 다이어그램.Figure 2 is a block diagram showing a batch merge membrane separation process according to the present invention.
이하에서는 본 발명에 따른 투과증발막분리공정을 이용하여 IPA를 농축하고, 동시에 역삼투막분리공정을 이용하여 IPA 농도를 폐수처리에 적정한 농도로 분리하는 병합 막분리 공정에 관하여 첨부된 도면과 함께 상세히 설명하기로 한다.Hereinafter, the IPA is concentrated using the permeation membrane separation process according to the present invention, and at the same time, the combined membrane separation process for separating the IPA concentration into an appropriate concentration for wastewater treatment using the reverse osmosis membrane separation process will be described in detail with the accompanying drawings. Let's do it.
본 발명은 I) IPA 함유 폐수로부터 투과증발막분리공정을 통하여 IPA를 농축하는 단계; 및 II) IPA 함유 폐수로부터 역삼투막분리공정을 통하여 폐수를 처리하는 단계;를 포함하는 병합 막분리 공정을 제공한다.The present invention comprises the steps of: I) concentrating IPA from the IPA-containing wastewater through a permeation membrane separation process; And II) treating the wastewater from the IPA-containing wastewater through a reverse osmosis membrane separation process.
또한, 상기 I) 단계의 투과증발막분리공정은 i) 승온된 IPA 함유 폐수를 투과증발막모듈에 공급하는 단계; ii) 투과증발막모듈을 투과한 IPA를 액체상으로 응축하는 단계; 및 iii) 응축된 IPA를 투과용액 탱크로 이송하는 단계;를 포함하는바, 도 1의 연속(continuous) 공정 블록 다이어그램에 나타낸 바와 같이, 먼저 IPA함유 폐수(IPA 용액)를 IPA 용액 탱크(100)에 저장하고, 히터(110)와 같은 통상의 가열수단에 의하여 IPA 용액 탱크의 IPA 용액을 승온시킨다. 이 때, IPA 용액의 온도가 30℃미만이면 투과증발막 모듈의 투과량이 너무 작아지고, IPA 용액의 온도가 60℃를 초과하면 에너지 소모가 너무 커지므로, IPA 용액은 히터(110)에 의하여 승온시켜 30~60℃로 유지하는 것이 바람직하다.In addition, the pervaporation membrane separation process of step I) comprises the steps of: i) supplying the heated IPA-containing wastewater to the pervaporation membrane module; ii) condensing the IPA penetrating the permeation membrane module into the liquid phase; And iii) transferring the condensed IPA to the permeate tank; as shown in the continuous process block diagram of FIG. 1, first the IPA-containing wastewater (IPA solution) is transferred to the IPA solution tank 100. And the IPA solution of the IPA solution tank is heated by conventional heating means such as the heater 110. At this time, if the temperature of the IPA solution is less than 30 ℃ the permeation amount of the permeation membrane module is too small, if the temperature of the IPA solution exceeds 60 ℃ energy consumption is too large, the IPA solution is heated by the heater 110 It is preferable to make it hold | maintain at 30-60 degreeC.
이어서 30~60℃로 승온된 IPA 용액은 투과증발막모듈(150)에 공급되는데, 여기서는 IPA 용액 공급펌프(120), 용액필터(130) 및 IPA 용액 유량계(140)를 순차적으로 거치는 과정이 수반된다. 이 때, 투과증발막모듈(150)에 공급하는 IPA 용액의 공급유량은 투과유량의 5배 이상으로 조절하는 것이 바람직하다. 만약 IPA 용액을 투과증발막모듈(150)에 5배 이하로 공급하면 투과증발막모듈(150)을 통과하여 투과하는 투과용액의 IPA 농도가 낮아 분리 및 농축이 원활하게 수행되지 않는다.Subsequently, the IPA solution heated to 30 to 60 ° C. is supplied to the permeation membrane module 150, where the process of sequentially passing the IPA solution supply pump 120, the solution filter 130, and the IPA solution flow meter 140 is accompanied. do. At this time, the supply flow rate of the IPA solution supplied to the permeation membrane module 150 is preferably adjusted to 5 times or more of the permeate flow rate. If the IPA solution is supplied to the permeation membrane module 150 at less than 5 times, the IPA concentration of the permeate solution passing through the permeation membrane module 150 is low and separation and concentration are not performed smoothly.
이렇게 투과증발막모듈(150)에 공급된 IPA 용액은 분리막 내에 IPA가 용해되고, 분리막 내에서 확산되어 증기상으로 투과하는 작용기전을 갖는다. 이러한 작용기전은 투과증발막모듈(150)의 일단이 IPA 공급용액과 접하고 있고, 다른 일단이 낮은 투과물의 증기압과 접하고 있는데, 낮은 증기압 조건은 진공을 걸어 주거나 불활성 담체 가스를 흐르게 하여 만들 수 있는바, 일반적으로 투과증발막 내부에 투과증발막분리공정의 추진력(driving force)인 화학적 포텐셜의 구배가 발생하여 막을 통한 물질의 투과가 이루어지는 것이므로, 본 발명에서는 투과증발막분리공정의 추진력을 유지하기 위하여 진공펌프(170)를 사용함으로써 투과부에 진공이 유지되도록 한다.In this way, the IPA solution supplied to the permeation membrane module 150 has an action mechanism in which IPA is dissolved in the separation membrane, diffuses in the separation membrane, and permeates into the vapor phase. This action mechanism is one end of the permeation membrane module 150 is in contact with the IPA supply solution, the other end is in contact with the vapor pressure of the low permeate, low vapor pressure conditions can be made by applying a vacuum or flowing an inert carrier gas bar In general, in order to maintain the driving force of the pervaporation membrane separation process, a chemical potential, which is a driving force of the pervaporation membrane separation process, is generated within the pervaporation membrane to permeate the material through the membrane. By using the vacuum pump 170, the vacuum is maintained in the permeable part.
다음으로, 투과증발막모듈(150)을 투과한 증기상의 IPA는 통상의 응축기(160)에서 액체상으로 응축되고, 응축된 액상의 IPA는 투과용액 유량계(180)를 거쳐 투과용액 탱크(190)로 이송된다. 이 투과증발막분리공정을 통하여 얻어지는 IPA 용액은 30% 이상으로 농축되므로 재활용할 수 있다.Next, the vapor phase IPA that has passed through the permeation evaporation membrane module 150 is condensed into a liquid phase in a conventional condenser 160, and the condensed liquid IPA is passed through the permeate solution flow meter 180 to the permeate solution tank 190. Transferred. The IPA solution obtained through this pervaporation membrane separation process can be recycled since it is concentrated to 30% or more.
한편, 본 발명의 병합 막분리 공정에서는 역삼투막분리공정을 동시에 수행하는데, 상기 II) 단계의 역삼투막분리공정은 a) 승압된 IPA 함유 폐수를 역삼투막모듈에 공급하는 단계; 및 b) 역삼투막모듈을 투과한 폐수를 투과수 탱크로 이송하는 단계;를 포함하는바, 도 1의 연속(continuous) 공정 블록 다이어그램에 나타낸 바와 같이, 먼저 IPA 용액 탱크(100)로부터 IPA 함유 폐수가 용액필터(210)를 거쳐 IPA 용액 고압펌프(220)로 이송되어 IPA 용액이 승압된다. 이 때, 고압펌프(220)에서의 공급압력은 10~70bar로 유지하는 것이 바람직한데, 10bar 미만으로 운전하게 되면 추진력이 낮아 역삼투막의 투과량이 크게 감소하게 되고, 70bar를 초과하면 역삼투막의 장기 안정성이 떨어지게 되므로, IPA 용액은 고압펌프(220)에 의하여 승압시켜 10~70bar를 유지하도록 조절한다.Meanwhile, in the combined membrane separation process of the present invention, the reverse osmosis membrane separation process is performed at the same time. And b) transferring the wastewater that has passed through the reverse osmosis membrane module to a permeate tank, as shown in the continuous process block diagram of FIG. The IPA solution is boosted by being transferred to the IPA solution high pressure pump 220 via the solution filter 210. At this time, the supply pressure in the high-pressure pump 220 is preferably maintained at 10 ~ 70bar, when operating below 10bar, the driving force is low, the permeation rate of the reverse osmosis membrane is greatly reduced, if it exceeds 70bar long-term stability of the reverse osmosis membrane Since it falls, the IPA solution is adjusted to maintain a pressure 10 ~ 70bar by the high pressure pump 220.
이어서 10~70bar로 승압된 IPA 용액을 용액유량계(230)를 거쳐 역삼투막모듈(240)에 공급하고, 역삼투막모듈(240)을 투과한 폐수는 투과수유량계(250)를 거쳐 투과수 탱크(260)로 이송된다. 이 역삼투막분리공정을 통하여 투과되는 폐수(투과수)는 IPA 농도가 0.5% 이하이므로 별도의 희석 없이 그대로 폐수처리장에서 처리하면 된다.Subsequently, the IPA solution boosted to 10 to 70 bar is supplied to the reverse osmosis membrane module 240 through the solution flow meter 230, and the wastewater that has passed through the reverse osmosis membrane module 240 passes through the permeate flowmeter 250 to transmit the permeate tank 260. Is transferred to. Wastewater (permeate) that is permeated through this reverse osmosis membrane separation process can be treated in the wastewater treatment plant as it is without dilution because the IPA concentration is 0.5% or less.
이상 기술한 바와 같이 도 1에 나타낸 연속(continuous) 병합 막분리 공정을 실제 운전함에 있어서는, IPA 함유 폐수(IPA 용액)를 탱크(100)에 일정량 채우고, 투과증발막분리공정을 이용하여 IPA를 분리 및 농축, 동시에 역삼투막분리공정도 함께 가동하여 물(폐수)을 투과시켜 투과수 탱크(260)로 이송하는데, 이 때 투과증발막분리공정의 IPA 농축액 양과 역삼투막분리공정의 투과수 양을 확인하여 IPA 용액 탱크(100)에 연속적으로 보충하며, 연속적으로 처리할 양(연속적인 폐수발생량)에 따라 투과증발막분리공정과 역삼투막분리공정의 용량을 설계하여 연속 운전할 수 있다.As described above, in actual operation of the continuous combined membrane separation process shown in FIG. 1, the tank 100 is filled with a predetermined amount of IPA-containing wastewater (IPA solution), and the IPA is separated using the pervaporation membrane separation process. And concentrating and simultaneously operating the reverse osmosis membrane separation process to permeate water (wastewater) to be transferred to the permeate tank 260, where the amount of IPA concentrate in the permeation membrane separation process and the permeate amount in the reverse osmosis membrane separation process are checked. The solution tank 100 is continuously replenished, and the capacity of the permeation membrane separation process and the reverse osmosis membrane separation process can be continuously operated according to the amount to be treated continuously (continuous wastewater generation amount).
한편, 또 다른 운전예로 도 2에 나타낸 배치(batch) 타입의 병합 막분리 공정도 가능한바, IPA 함유 폐수(IPA 용액)를 탱크(100)에 일정량 채우고, 투과증발막분리공정을 이용하여 IPA를 분리 및 농축한 후, 원래 IPA 함유 폐수의 농도가 일정 농도 이하로 낮아지면 IPA 용액 탱크(100)의 용액을 또 다른 IPA 용액 탱크(200)로이송하고, 그 이송된 IPA 함유 폐수는 역삼투막분리공정에 의하여 물을 투과시켜 투과수 탱크(260)에 저장하며, IPA 용액 탱크(200)의 IPA 용액에서 물이 제거되어 IPA가 일정 농도로 증가하면 IPA 용액 탱크(100)로 이송되어 다시 투과증발막분리공정을 수행하는 공정을 반복 운전함으로써 IPA 함유 폐수를 모두 처리하게 되며, 투과수 탱크(260)의 투과수는 IPA의 농도가 낮아져 폐수처리장에서 처리될 수 있다.Meanwhile, as another operation example, a batch type membrane separation process shown in FIG. 2 is also possible. IPA-containing wastewater (IPA solution) is filled in a predetermined amount into the tank 100, and IPA is used by using a pervaporation membrane separation process. After separating and concentrating, the concentration of the original IPA-containing wastewater is lowered below a certain concentration, the solution of IPA solution tank 100 is transferred to another IPA solution tank 200, and the transferred IPA-containing wastewater is reverse osmosis membrane separation. The water is permeated by the process and stored in the permeate tank 260. When water is removed from the IPA solution of the IPA solution tank 200 and the IPA is increased to a certain concentration, the water is transferred to the IPA solution tank 100 and again pervaporated. By repeatedly operating the membrane separation process, all of the IPA-containing wastewater is treated, and the permeate of the permeate tank 260 may be treated in a wastewater treatment plant due to a low concentration of IPA.
아울러, 첨부된 도면에 도시하지는 않았지만, IPA 함유 폐수(IPA 용액)를 탱크(100)에 일정량 채우고, 투과증발막분리공정을 이용하여 IPA를 분리 및 농축, 동시에 역삼투막분리공정도 함께 가동하여 물(폐수)을 투과시켜 투과수 탱크(260)로 이송한 후, 계속 운전하여 IPA 용액 탱크(100)의 레벨이 일정량 이하가 되면 IPA 함유 폐수를 보충하고, IPA 용액 탱크(100)의 상한 및 하한 레벨에 따라 배치(batch)식으로 운전하는 반-배치(semi-batch) 타입의 병합 막분리 공정도 가능하다.In addition, although not shown in the accompanying drawings, the IPA-containing wastewater (IPA solution) is filled in a predetermined amount in the tank 100, the IPA is separated and concentrated using a permeation membrane separation process, and at the same time, the reverse osmosis membrane separation process is also operated with water ( Waste water), and then, is transferred to the permeate tank 260, and then continues to operate to replenish the IPA-containing waste water when the level of the IPA solution tank 100 is below a certain amount, and the upper and lower levels of the IPA solution tank 100 Depending on the batch, a semi-batch type membrane separation process is also possible.
한편, 본 발명의 병합 막분리 공정에 포함되는 투과증발막분리공정의 막 소재로서는 폴리에테르이미드 등의 다공성 지지체에 폴리디메틸실록산(PDMS)과 같은 유기폴리실록산이 코팅된 실리콘계 복합막이 바람직하나, 이에 제한되는 것은 아니며, 역삼투막분리공정의 막 소재로서는 폴리술폰 등의 다공성 지지체에 폴리아미드가 코팅된 폴리아미드계 복합막이 바람직하지만, 역시 이에 제한되는 것은 아니다.On the other hand, as the membrane material of the permeation evaporation membrane separation process included in the combined membrane separation process of the present invention, a silicon-based composite membrane in which an organic polysiloxane such as polydimethylsiloxane (PDMS) is coated on a porous support such as polyetherimide is preferred. The membrane material of the reverse osmosis membrane separation process is preferably a polyamide-based composite membrane in which a polyamide is coated on a porous support such as polysulfone, but is not limited thereto.
이하 구체적인 실시예를 상세히 설명한다.Hereinafter, specific embodiments will be described in detail.
(실시예 1)(Example 1)
IPA 함유 폐수의 IPA 농도를 5.2 중량%, 공급유량을 80 LPM(liter per minute)로 고정하고, 공급용액의 온도를 각각 35℃, 45℃ 및 55℃로 변화시켜 도 1에 나타낸 바와 같은 연속 병합 막분리 공정을 수행하였고, 표 1에 투과증발막분리공정에 의한 공급용액의 온도에 따른 투과용액의 IPA 농도와 투과유량을 나타내었다.The IPA concentration of the wastewater containing IPA was fixed at 5.2% by weight, the feed flow rate was set at 80 liter per minute (LPM), and the temperature of the feed solution was changed to 35 ° C, 45 ° C, and 55 ° C, respectively. The membrane separation process was carried out, and Table 1 shows the IPA concentration and the permeate flow rate of the permeate solution according to the temperature of the feed solution by the pervaporation membrane separation process.
표 1
공급용액온도 (oC) 투과용액 농도 (중량 %) 투과유량 (g/m2hr)
35 45.6 510
45 41.5 752
55 38.4 1009
Table 1
Supply solution temperature ( o C) Permeate solution concentration (% by weight) Permeate Flow Rate (g / m 2 hr)
35 45.6 510
45 41.5 752
55 38.4 1009
(실시예 2)(Example 2)
IPA 함유 폐수의 IPA 농도를 8.7 중량%로 고정한 것 이외에는 실시예 1과 동일한 방법으로 연속 병합 막분리 공정을 수행하였고, 표 2에 투과증발막분리공정에 의한 공급용액의 온도에 따른 투과용액의 IPA 농도와 투과유량을 나타내었다.A continuous combined membrane separation process was performed in the same manner as in Example 1, except that the IPA concentration of the IPA-containing wastewater was fixed at 8.7 wt%, and the IPA of the permeate solution according to the feed solution temperature according to the permeation evaporation membrane separation process is shown in Table 2. Concentration and flux were shown.
표 2
공급용액온도 (oC) 투과용액 농도 (중량 %) 투과유량 (g/m2hr)
35 53.2 630
45 48.8 895
55 43.5 1180
TABLE 2
Supply solution temperature ( o C) Permeate solution concentration (% by weight) Permeate Flow Rate (g / m 2 hr)
35 53.2 630
45 48.8 895
55 43.5 1180
(실시예 3)(Example 3)
공급용액의 온도를 35, 공급유량을 20 LPM으로 고정하고, IPA 함유 폐수의 IPA 농도를 각각 5.2 중량%, 6.2 중량%, 7.3 중량% 및 8.5 중량%로 변화시켜 도 1에 나타낸 바와 같은 연속 병합 막분리 공정을 수행하였고, 표 3에 역삼투막분리공정에 의한 투과용액(투과수)의 IPA 농도 및 투과유량을 나타내었다.The temperature of the feed solution was fixed at 35 and the feed flow rate was 20 LPM, and the IPA concentrations of the IPA-containing wastewater were changed to 5.2 wt%, 6.2 wt%, 7.3 wt% and 8.5 wt%, respectively. The membrane separation process was performed, and Table 3 shows the IPA concentration and permeate flow rate of the permeate solution (permeate) by the reverse osmosis membrane separation process.
표 3
공급용액 농도(중량 %) 투과용액(투과수) IPA 농도(중량 %) 투과유량(LPM)
5.2 0.31 1.20
6.2 0.35 1.12
7.3 0.41 0.98
8.5 0.50 0.89
TABLE 3
Feed solution concentration (% by weight) Permeate (Permeate) IPA Concentration (% by weight) Permeate Flow Rate (LPM)
5.2 0.31 1.20
6.2 0.35 1.12
7.3 0.41 0.98
8.5 0.50 0.89
표 1 및 2에서 보는 바와 같이, 본 발명의 병합 막분리 공정의 실시예 1, 2에 따른 투과증발막분리공정에 의하면, 공급용액의 온도가 동일한 경우, IPA 함유 폐수의 IPA가 농도가 더 높을수록 투과용액의 IPA 농도와 투과유량이 더 증가함을 알 수 있고, 또한 어느 경우에서나 투과용액의 IPA 농도가 모두 38% 이상을 나타내어 투과용액을 재활용할 수 있음을 확인하였다.As shown in Tables 1 and 2, according to the pervaporation membrane separation process according to Examples 1 and 2 of the combined membrane separation process of the present invention, when the temperature of the feed solution is the same, the IPA concentration of the IPA-containing wastewater may be higher. It can be seen that the IPA concentration and the permeate flow rate of the permeate solution increased more, and in all cases, the permeate solution was recycled because the IPA concentration of the permeate solution was higher than 38%.
아울러 표 3에서 보는 바와 같이, 본 발명의 병합 막분리 공정의 실시예 3에 따른 역삼투막분리공정에 의하면, IPA 함유 폐수의 IPA 농도(공급용액의 농도)가 5.2 중량%에서 8.5 중량%로 증가하면 투과용액(투과수)의 IPA 농도가 다소 증가하고 투과유량은 감소하지만, 어느 경우에서나 투과용액(투과수)의 IPA 농도가 0.5 중량% 미만이므로, 투과용액(투과수)을 그대로 폐수처리장으로 이송하여 폐수처리 할 수 있음을 확인하였다.In addition, as shown in Table 3, according to the reverse osmosis membrane separation process according to Example 3 of the combined membrane separation process of the present invention, when the IPA concentration (concentration of the feed solution) of the IPA-containing wastewater increases from 5.2% by weight to 8.5% by weight The permeate solution (permeate) slightly increases the permeate flow rate and the permeate flow rate decreases, but in all cases the permeate solution (permeate) is less than 0.5% by weight, so the permeate (permeate) is transferred to the wastewater treatment plant as it is. It was confirmed that it can be treated with wastewater.
따라서 본 발명의 병합 막분리 공정에 따르면, IPA 세정폐수로부터 IPA를 선택적으로 분리 및 30 중량% 이상 농축하여 재활용할 수 있고, 동시에 0.5 중량% 이하의 낮은 농도의 IPA 세정폐수는 별도의 희석 없이 기존의 폐수처리장에서 그대로 처리할 수 있는 현저한 효과를 나타낸다.Therefore, according to the combined membrane separation process of the present invention, IPA can be selectively separated from IPA cleaning wastewater and concentrated to be recycled by concentrating more than 30% by weight. It shows a remarkable effect that can be treated as it is in the wastewater treatment plant.

Claims (9)

  1. I) IPA 함유 폐수로부터 투과증발막분리공정을 통하여 IPA를 농축하는 단계; 및I) concentrating the IPA from the IPA containing wastewater through the permeation membrane separation process; And
    II) IPA 함유 폐수로부터 역삼투막분리공정을 통하여 폐수를 처리하는 단계;를 포함하는 병합 막분리 공정.II) treating the wastewater from the IPA-containing wastewater through a reverse osmosis membrane separation process.
  2. 제1항에 있어서, 상기 I) 단계의 투과증발막분리공정은 i) 승온된 IPA 함유 폐수를 투과증발막모듈에 공급하는 단계; According to claim 1, wherein the permeation membrane separation process of step I) comprises the steps of: i) supplying the heated IPA-containing wastewater to the permeation membrane module;
    ii) 투과증발막모듈을 투과한 IPA를 액체상으로 응축하는 단계; 및ii) condensing the IPA penetrating the permeation membrane module into the liquid phase; And
    iii) 응축된 IPA를 투과용액 탱크로 이송하는 단계;를 포함하는 것을 특징으로 하는 병합 막분리 공정.iii) transferring the condensed IPA to the permeate tank.
  3. 제2항에 있어서, 상기 승온된 IPA 함유 폐수는 히터에 의하여 30~60℃로 유지된 것을 특징으로 하는 병합 막분리 공정.The combined membrane separation process according to claim 2, wherein the heated IPA-containing wastewater is maintained at 30 to 60 ° C by a heater.
  4. 제2항에 있어서, 상기 투과증발막모듈에 공급하는 IPA 함유 폐수의 공급유량은 투과유량의 5배 이상인 것을 특징으로 하는 병합 막분리 공정.The combined membrane separation process according to claim 2, wherein the supply flow rate of the IPA-containing wastewater supplied to the pervaporation membrane module is at least five times the permeate flow rate.
  5. 제1항에 있어서, 상기 II) 단계의 역삼투막분리공정은 a) 승압된 IPA 함유 폐수를 역삼투막모듈에 공급하는 단계; 및According to claim 1, wherein the reverse osmosis membrane separation step of step II) a) supplying the boosted IPA-containing wastewater to the reverse osmosis membrane module; And
    b) 역삼투막모듈을 투과한 폐수를 투과수 탱크로 이송하는 단계;를 포함하는 것을 특징으로 하는 병합 막분리 공정.b) transferring the wastewater that has passed through the reverse osmosis membrane module to a permeate tank.
  6. 제5항에 있어서, 상기 승압된 IPA 함유 폐수는 고압펌프에 의하여 10~70bar로 유지된 것을 특징으로 하는 병합 막분리 공정.The combined membrane separation process according to claim 5, wherein the boosted IPA-containing wastewater is maintained at 10 to 70 bar by a high pressure pump.
  7. 제5항에 있어서, 상기 역삼투막모듈에 공급하는 IPA 함유 폐수의 공급유량은 투과유량의 3배 이상인 것을 특징으로 하는 병합 막분리 공정.6. The combined membrane separation process according to claim 5, wherein the supply flow rate of the IPA-containing wastewater supplied to the reverse osmosis membrane module is three times or more than the permeate flow rate.
  8. 제1항 또는 제2항에 있어서, 상기 투과증발막분리공정의 막 소재는 실리콘계 복합막인 것을 특징으로 하는 병합 막분리 공정.The combined membrane separation process according to claim 1 or 2, wherein the membrane material of the pervaporation membrane separation process is a silicon-based composite membrane.
  9. 제1항 또는 제5항에 있어서, 상기 역삼투막분리공정의 막 소재는 폴리아미드계 복합막인 것을 특징으로 하는 병합 막분리 공정.The combined membrane separation process according to claim 1 or 5, wherein the membrane material of the reverse osmosis membrane separation process is a polyamide-based composite membrane.
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