WO2015048516A1 - Performance enhanced heat spreader - Google Patents

Performance enhanced heat spreader Download PDF

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Publication number
WO2015048516A1
WO2015048516A1 PCT/US2014/057816 US2014057816W WO2015048516A1 WO 2015048516 A1 WO2015048516 A1 WO 2015048516A1 US 2014057816 W US2014057816 W US 2014057816W WO 2015048516 A1 WO2015048516 A1 WO 2015048516A1
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WO
WIPO (PCT)
Prior art keywords
substrate
metal
coating layer
thermal conductivity
metallic coating
Prior art date
Application number
PCT/US2014/057816
Other languages
French (fr)
Inventor
Richard J. Lemak
Robert J. Moskaitis
Original Assignee
Specialty Minerals (Michigan) Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specialty Minerals (Michigan) Inc. filed Critical Specialty Minerals (Michigan) Inc.
Priority to EP14781425.5A priority Critical patent/EP3052676A1/en
Priority to CA2925816A priority patent/CA2925816A1/en
Priority to KR1020167010987A priority patent/KR20160065141A/en
Priority to JP2016545244A priority patent/JP2016535941A/en
Priority to SG11201601821VA priority patent/SG11201601821VA/en
Priority to CN201480053885.XA priority patent/CN105637124A/en
Publication of WO2015048516A1 publication Critical patent/WO2015048516A1/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/02Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D15/00Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/54Electroplating of non-metallic surfaces
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/08Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
    • F28F21/089Coatings, claddings or bonding layers made from metals or metal alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736Metallic materials
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • C25D3/562Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of iron or nickel or cobalt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to methods of applying a coating to a substrate of pyrolytic graphite and the coated pyrolytic graphite which exhibits an improved thermal conductivity.
  • the coated pyrolytic graphite can be used as a heat spreader for conducting heat from a device.
  • Electronic components are becoming smaller while heat dissipation requirements are becoming greater.
  • heat spreaders are utilized between the electronic component and a heat sink.
  • Heat spreaders can be made of a solid thermally conductive metal.
  • the solid conductive metal has a limited ability to spread heat and has limited thermal conductivity characteristics.
  • Embodiments of the present invention encompass methods of disposing a metallic coating layer comprising a metal over at least a portion of a surface of a pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel- Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nanometers (nm) to 10000 nm in size, the metal being amorphous, or both.
  • Embodiments of the present invention encompass articles comprising a metallic coating layer comprising a metal disposed over at least a portion of a surface of a pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel- Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nm to 10000 nm in size, the metal being amorphous, or both.
  • the pyrolytic graphite substrate is highly oriented pyrolytic graphite, chemical vapor deposition deposited pyrolytic graphite, or a combination thereof.
  • the pyrolytic graphite substrate is PYROID® HT, PYROID® SN, PYROID® CN, or a combination thereof.
  • NanovateTM N2040 coating disposed over the substrate comprises the metallic coating layer.
  • the metallic coating layer comprises a fine grained metal of metal grain size from 2 nm to 5000 nm.
  • the metallic coating comprises a fine grained metal of metal grain size from 5 nm to 1000 nm.
  • the metallic coating comprises a fine grained metal of metal grain size from 10 nm to 500 nm.
  • the metallic coating comprises a fine grained metal of a metal grain size in a range having a minimum size selected from 2 nm, 5 nm, and 10 nm, and having a maximum size selected from 100 nm, 500 nm, 1000 nm, 5000 nm, and 10,000 nm.
  • the coating comprises an alloying addition.
  • the alloying addition is selected from the group consisting of B, C, H, O, P, S, and combinations thereof.
  • the alloying addition is selected from the group consisting of Ag, Au, B, Cr, Mo, P, Pb, Pd, Rh, Ru, Sn, Zn, and combinations thereof.
  • the coating comprises solid particulates where the solid particulates are metals; metal oxides; carbides of B, Cr, Bi, Si, W, or a combination thereof; carbon; glass; polymer materials; M0S 2 ; or any combination thereof.
  • the polymer materials are selected from the group consisting of polytetrafluoroethylene, polyvinyl chloride, polyethylene, polypropylene, acrylonitrile-butadiene-styrene, epoxy resins, and combinations thereof.
  • the coating comprises up to 95% by volume solid particulates.
  • the coating comprises 1 % to 95% by volume solid particulates.
  • the metallic coating layer thickness is 10 ⁇ to 50 mm.
  • the metallic coating layer thickness is 25 ⁇ to 25 mm.
  • the metallic coating layer thickness is 30 ⁇ to 5 mm.
  • one or more intermediate coating layers are applied to the substrate before the metallic coating layer is applied.
  • At least one of the intermediate coating layer(s) comprises a metal, a polymer, or both a metal and a polymer.
  • the intermediate coating layer thickness is less than the metallic coating layer thickness by at least 20%.
  • the metallic coating layer, and the intermediate coating layer(s), if present covers all of the exterior surface of the substrate.
  • the metallic coating layer, and the intermediate coating layer(s), if present covers only a portion of the exterior surface of the substrate.
  • the thermal conductivity of the coated pyrolytic graphite is not less than the uncoated pyrolytic graphite substrate.
  • the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 105% of the thermal conductivity of the uncoated substrate, or of not less than 105% of uncoated substrate and also not more than 250% of the uncoated substrate.
  • the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 1 10% of the thermal conductivity of the uncoated substrate, or of not less than 1 10% of uncoated substrate and also not more than 250% of the uncoated substrate.
  • the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 1 15% of the thermal conductivity of the uncoated substrate, or of not less than 1 15% of uncoated substrate and also not more than 250% of the uncoated substrate.
  • the substrate coated with the metallic coating layer exhibits a flexural strength greater than that of the uncoated substrate.
  • the substrate coated with the metallic coating layer exhibits a flexural strength of about 1 10% of the flexural strength of the uncoated substrate, or of not less than 1 10% of the uncoated substrate and also not more than 2000% of the uncoated substrate.
  • the metallic coating layer has a room temperature coefficient of linear thermal expansion in all directions of less than 25 x 10 "6 K "1 .
  • the metallic coating layer has a room temperature coefficient of linear thermal expansion in all directions in the range between 5.0 x 10 "6 K "1 and 25 x 10 "6 K ⁇ 1 .
  • the substrate is a heat spreader.
  • the heat spreader is any one of those described in U.S. Patent Nos. 8,085,531 , 7,859,848, 7,808,787, and 8,059,408.
  • FIG. 1 shows an example of the structure of a graphite sheet.
  • FIG. 2 shows a manufacturing method of highly oriented pyrolytic graphite.
  • words of approximation such as, without limitation, "about,” “substantially,” “essentially,” and “approximately” mean that the word or phrase modified by the term need not be exactly that which is written but may vary from that written description to some extent. The extent to which the description may vary from the literal meaning of what is written, that is the absolute or perfect form, will depend on how great a change can be instituted and have one of ordinary skill in the art recognize the modified version as still having the properties, characteristics and capabilities of the modified word or phrase. In general, but with the preceding discussion in mind, a numerical value herein that is modified by a word of
  • any ranges presented are inclusive of the end-points.
  • a temperature between 10 °C and 30 °C or "a temperature from 10 °C to 30 °C” includes 10 °C and 30 °C, as well as any temperature in between.
  • a material that is described as a layer or a film (e.g., a coating) "disposed over" an indicated substrate refers to, e.g., a coating of the material deposited directly or indirectly over at least a portion of the surface of the substrate.
  • a “layer” or a “coating” of a given material is a region of that material whose thickness is small compared to both its length and width (e.g., the length and width dimensions may both be at least 5, 10, 20, 50, 100 or more times the thickness dimension in some embodiments).
  • Direct depositing means that the coating is applied directly to the surface of the substrate.
  • Indirect depositing means that the coating is applied to an intervening layer that has been deposited directly or indirectly over the substrate.
  • a coating is supported by a surface of the substrate, whether the coating is deposited directly, or indirectly, onto the surface of the substrate.
  • a layer need not be planar, for example, taking on the contours of an underlying substrate. Layers can be discontinuous. A layer may be of non-uniform thickness.
  • coating will be used interchangeably and refer to a layer, film, or coating as described in this paragraph.
  • coating thickness or “layer thickness” refers to the depth in a deposit direction.
  • Embodiments of this invention encompass methods which include applying one or more metallic coating layer(s) including a metal, or including a metal matrix composite, or including both, to a substrate comprising pyrolytic graphite.
  • the microstructure of the metal of the metallic coating layer may be amorphous, fine- grained metal, or a combination thereof.
  • a "fine-grained metal” is metal having an average grain size between 1 and 5,000 nm.
  • MMC metal matrix composite
  • MMC metal matrix composite
  • the metallic coating layers have a room temperature coefficient of linear thermal expansion (CLTE) in all directions of less than 25 x 10 "6 K “1 , for example, in the range between 5.0 x 10 "6 K “1 and 25 x 10 "6 K ⁇ 1 .
  • CLTE room temperature coefficient of linear thermal expansion
  • the coatings comprising the fine grained metals, amorphous metals, or both, and methods of applying them are described in U.S. Patent Application Publication No. 2010/0028714, published February 4, 2010, and U.S. Patent No. 8,394,507, issued on March 12, 2013.
  • Such coatings are available as NanovateTM coatings from Integran Technologies, Inc., Toronto, Canada.
  • the coating is a NanovateTM N2040 coating, a high strength, low coefficient of thermal expansion nanostructured Nickel-Iron coating, from Integran Technologies, Inc., Toronto, Canada.
  • NanovateTM N2040 coating a high strength, low coefficient of thermal expansion nanostructured Nickel-Iron coating, from Integran Technologies, Inc., Toronto, Canada to a substrate of pyrolytic graphite, specifically, PYROID® HT pyrolytic graphite, led to an increase of approximately 10% in the thermal conductivity of the sample.
  • pyrolytic graphite specifically, PYROID® HT pyrolytic graphite
  • the NanovateTM N2040 coating increased the mechanical properties, such as but without limitation, the flexural strength of the sample.
  • MMCs can be produced e.g. in the case of using an electroplating process by suspending particles in a suitable plating bath and incorporating particulate matter into the electrodeposit by inclusion or e.g. in the case of cold spraying by adding non-deformable particulates to the powder feed.
  • Other methods of producing the metallic coating layers include DC or pulse electrodeposition, electroless deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and gas condensation or the like.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • gas condensation or the like Some exemplary methods include those described in the following: U.S. Patent Application Publication No. 2005/0205425 A1 , published on September 22, 2005; U.S. Patent No. 7,387,578, issued on June 17, 2008; and DE 10,288,323.
  • Solid particulate materials that may be used in forming the MCCs include metals (Ag, Al, Cu, In, Mg, Si, Sn, Pt, Ti, V, W, Zn); metal oxides (Ag 2 O, AI 2 O 3 , SiO 2 , SnO 2 , TiO 2 , ZnO); carbides of B, Cr, Bi, Si, W; carbon (carbon nanotubes, diamond, graphite, graphite fibers); glass; polymer materials (polytetrafluoroethylene, polyvinyl chloride, polyethylene, polypropylene, acrylonitrile-butadiene-styrene, and epoxy resins); and self-lubricating materials such as, but without limitation, MoS 2 .
  • the solid particulates may be up to 95% by volume of the coating, preferably, 1 % to 95% by volume, more preferably 5% to 75% by volume, and even more preferably from 10% to 50% by volume.
  • the intermediate coating layer(s) may include, but are not limited to, a metal, a polymer, or both a metal and a polymer. Materials used in intermediate layers are described in U.S. Patent No. 8,394,507, and U.S. Patent Application Publication No. 2010/0028714.
  • the surface of the substrate may be pre-treated by suitably roughening or texturing at least one of the surfaces to be mated to form specific surface
  • anchoring structures or “anchoring sites” as described in U.S. Patent No. 8,394,507.
  • U.S. Patent No. 8,394,507 discusses polymeric or polymer composites as substrates, but carbon substrates are not disclosed.
  • U.S. Patent Application Publication No. 2010/0028714 discloses substrates of "carbon based materials selected from the group of graphite, graphite fibers and carbon nanotubes.”
  • Graphite is made up of layer planes of hexagonal arrays or networks of carbon atoms. These layer planes of hexagonal arranged carbon atoms are substantially flat and are oriented so as to be substantially parallel and equidistant to one another. The substantially flat parallel layers of carbon atoms are referred to as basal planes and are linked or bonded together in groups arranged in crystallites. Conventional or electrolytic graphite has a random order to the crystallites. Highly ordered graphite has a high degree of preferred crystallite orientation. As seen in FIG. 1 , the graphite sheet 2 has hexagonal covalent bonds in a stacked crystal structure, and the graphite layers of each graphite sheet 2 are connected by van der Waals forces.
  • the graphite sheet 2 has a thermal conductivity in the X-Y plane of the graphite sheet 2 of a value greater than in the thickness direction, i.e. the Z direction.
  • Another way of characterizing graphite is as having two principal axes, the "c" axis or direction which is generally identified as the axis or direction perpendicular to the carbon layers and the "a" axes or directions parallel to the carbon layers and transverse to the c axes. This alternative nomenclature is also shown in FIG. 1 .
  • the "c” axis is equivalent to the Z direction, and the two “a” axes are equivalent to the X- Y plane.
  • the term “XY” will be used interchangeably with “a” and “a-a,” and the term “Z” will be used interchangeably with “c.”
  • Graphite materials that exhibit a high degree of orientation include natural graphite and synthetic or pyrolytic graphite.
  • Natural graphite is commercially available in the form of flakes (platelets) or as a powder.
  • Pyrolytic graphite is produced by the pyrolysis of a carbonaceous gas on a suitable substrate at elevated temperature. Briefly, the pyrolytic deposition process may be carried out in a heated furnace and at a suitable pressure, wherein a hydrocarbon gas such as methane, natural gas, acetylene etc. is introduced into the heated furnace and is thermally decomposed at the surface of a substrate of suitable composition such as graphite having any desirable shape. The substrate may be removed or separated from the pyrolytic graphite. The pyrolytic graphite may then be further subjected to thermal annealing at high temperatures to form a highly oriented pyrolytic graphite commonly referred to as HOPG.
  • HOPG highly oriented pyrolytic graphite
  • thermal conductivity is caused by the free electrons and the lattice vibration.
  • the high thermal conductivity (1000-2000 W/m degree K) of diamond is caused by lattice vibration, while the thermal conductivity of the extremely anisotropic HT graphite is equal to or less than diamond due to both free electron and the lattice vibration.
  • PYROID® HT pyrolytic graphite has many useful characteristics, such as the following: density 2.22 g/cc, tensile strength 28900 kPa (XY direction), elastic modulus 50 GPa (XY direction), flexural modulus 33200 MPa (XY direction), coefficient of thermal expansion 0.6 X 10 "6 /degrees Celsius (XY direction), 25 x 10 " 6 /degrees Celsius (Z direction), thermal conductivity 1 ,700 Watts/m degree K (XY direction), 7 Watts/in degree K (Z direction), 5.0 X 10 "4 electric specific resistance Qcm (XY direction), 0.6 Qcm (Z direction), oxidation threshold 650 degrees Celsius (XY direction), and permeability 10 "6 mmHg.
  • thermal conductivity of PYROID® HT pyrolytic graphite in the XY direction compared with other materials thermal conductivity is extremely high, for example about 6 times the values of aluminum nitride (A1 N) and beryllia (BeO), and about 4 times the value of the overall thermal diffusion of the material copper (Cu) in particular.
  • PYROID® HT pyrolytic graphite is produced by the CVD method as shown in FIG. 2.
  • chamber 20 under vacuum by a vacuum pump 21 , hydrocarbon gas supplied from cylinder 22 as raw material gas is decomposed by the gas being heated to more than 2,000 degrees Celsius by heater 23, and while minute carbon nucleus C which deposit and crystallize on substrate 24, stack and deposit in stratified formation, and PYROID® HT pyrolytic graphite is produced.
  • PYROID® HT pyrolytic graphite is available in thicknesses of from 0.25 mm to 20 mm, and can be produce as a board of a variety of sizes as large as 300 mm square shaped structure by controlling stacking and deposit time.
  • PYROID® SN substrate nucleated
  • PYROID® CN continuously nucleated grades of pyrolytic graphite also produced by the CVD process. These have lower thermal conductivity than the PYROID® HT pyrolytic graphite.
  • Embodiments of the invention also encompass the coated pyrolytic graphite articles.
  • a specific use of the coated pyrolytic graphite is in a heat spreader.
  • PYROID® HT pyrolytic graphite is used although other grades of PYROID® graphite, or other grades of pyrolytic graphite may be used.
  • the heat spreader is coated on all exterior surfaces, or substantially all exterior surfaces, with one or more metallic coating layers, and optionally including one or more intermediate layers.
  • the coating encases or encapsulates or essentially encases or encapsulates the heater spreader. Examples of heat spreaders that may be coated include any of those described in U.S. Patent Nos.
  • the coating includes a Nickel-Iron alloy as a fine grained metal, amorphous metal, or combination thereof, optionally including a solid particulate, preferably a solid particulate that is a polymer material.
  • the fine-grained metal if present, is of a grain size of 2 nm to 5000 nm.
  • the metallic layer coating thickness is 10 to 500 ⁇ .
  • the substrate is PYROID® HT pyrolytic graphite, which is used as a heat spreader, coated on all surfaces or essentially all surfaces, with a 25 to 50 ⁇ NanovateTM N2040 coating, a high strength, low coefficient of thermal expansion nanostructured Nickel-Iron coating, from Integran Technologies, Inc., Toronto, Canada, and method of coating PYROID ® HT pyrolytic graphite on all surfaces or essentially all surfaces with a 25 to 50 ⁇ NanovateTM N2040 coating.
  • Example 1 The examples presented in this section are provided by way of illustration of the current invention only and are not intended nor are they to be construed as limiting the scope of this invention in any manner whatsoever.
  • Example 1 The examples presented in this section are provided by way of illustration of the current invention only and are not intended nor are they to be construed as limiting the scope of this invention in any manner whatsoever.
  • the thermal conductivity was measured in the XY orientation, and for the second five samples, the thermal conductivity was measured in the Z direction.
  • the thermal conductivity, ⁇ in W/m-K ranges from 1567 to 1737 in the XY direction.
  • Samples #1 - #3 labeled UA1051 , UA1052, and UA1053 were coated with a NanovateTM Nickel-Iron alloy coating of coating thicknesses of 25 ⁇ , 50 ⁇ , and 50 ⁇ , respectively.
  • Samples #4 and #5 were uncoated.
  • the thermal conductivity of samples #1 and #2 was determined in the XY direction.
  • samples #3 - #5 the thermal conductivity was determined in the Z direction.
  • the ⁇ in W/m-K for each of the two coated samples measured in the XY direction, samples #1 and #2 was higher than any of the 5 uncoated samples measured in Example 1 .
  • the thermal conductivity in the Z direction was higher for coated sample #3 as compared to uncoated samples #4 and #5.
  • the flexure extension in the Z direction of 4 coated PYROID® HT pyrolytic graphite samples of 0.0625 inches in thickness and 0.5625 inches in width and 0.90 inches in length at a temperature of 73 °F and a relative humidity of 50% was determined using the ASTM D790 testing procedure.
  • Sample #1 was coated with a NanovateTM Nickel-Cobalt alloy coating of 25 micron in thickness.
  • Sample #2 was coated with a NanovateTM Nickel-Iron alloy coating of 25 micron in thickness.
  • Sample #3 was coated with a NanovateTM Nickel-Cobalt alloy coating of 50 micron in thickness.
  • Sample #4 was coated with a NanovateTM Nickel-Iron alloy coating of 50 micron in thickness.
  • the NanovateTM coatings were provided by and applied by Integran Technologies, Inc. The results for the 4 samples are shown in Table 5:

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Abstract

Embodiments of the present invention include methods of disposing a metallic coating layer comprising a metal in an amorphous and/or fine grain microstructure over at least a portion of a surface of a pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel-Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nm to 10000 nm in size. Embodiments of the invention also encompass the coated pyrolytic graphite articles. The coated substrate exhibits a thermal conductivity not less than the uncoated substrate.

Description

PERFORMANCE ENHANCED HEAT SPREADER
BACKGROUND
The present invention relates to methods of applying a coating to a substrate of pyrolytic graphite and the coated pyrolytic graphite which exhibits an improved thermal conductivity. The coated pyrolytic graphite can be used as a heat spreader for conducting heat from a device. Electronic components are becoming smaller while heat dissipation requirements are becoming greater. In order to dissipate heat generated by these electronic components, heat spreaders are utilized between the electronic component and a heat sink. Heat spreaders can be made of a solid thermally conductive metal. The solid conductive metal has a limited ability to spread heat and has limited thermal conductivity characteristics.
INCORPORATION BY REFERENCE
All publications, patents, and patent applications mentioned in this
specification are herein incorporated by reference to the same extent as if each individual publication, patent, or patent application was specifically and individually indicated to be incorporated by reference, and as if each said individual publication, patent, or patent application was fully set forth, including any figures, herein.
SUMMARY
Non-limiting embodiments of the invention are described in the following labeled paragraphs:
[0001 ] Embodiments of the present invention encompass methods of disposing a metallic coating layer comprising a metal over at least a portion of a surface of a pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel- Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nanometers (nm) to 10000 nm in size, the metal being amorphous, or both. [0002] Embodiments of the present invention encompass articles comprising a metallic coating layer comprising a metal disposed over at least a portion of a surface of a pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel- Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nm to 10000 nm in size, the metal being amorphous, or both.
[0003] In embodiments of the present invention, such as, but not limited to, the method described in paragraph [0001 ] or the article described in paragraph
[0002], the pyrolytic graphite substrate is highly oriented pyrolytic graphite, chemical vapor deposition deposited pyrolytic graphite, or a combination thereof.
[0004] In embodiments of the present invention, such as, but not limited to, the method described in paragraph [0001 ] or the article described in paragraph
[0002], the pyrolytic graphite substrate is PYROID® HT, PYROID® SN, PYROID® CN, or a combination thereof.
[0005] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0004], a
Nanovate™ N2040 coating disposed over the substrate comprises the metallic coating layer.
[0006] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0005], the metallic coating layer comprises a fine grained metal of metal grain size from 2 nm to 5000 nm.
[0007] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0006], the metallic coating comprises a fine grained metal of metal grain size from 5 nm to 1000 nm.
[0008] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0007], the metallic coating comprises a fine grained metal of metal grain size from 10 nm to 500 nm.
[0009] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0005], the metallic coating comprises a fine grained metal of a metal grain size in a range having a minimum size selected from 2 nm, 5 nm, and 10 nm, and having a maximum size selected from 100 nm, 500 nm, 1000 nm, 5000 nm, and 10,000 nm. [0010] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0009], the coating comprises an alloying addition.
[001 1 ] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraph [0010], the alloying addition is selected from the group consisting of B, C, H, O, P, S, and combinations thereof.
[0012] In embodiments of the present invention, such as, but not limited to, the methods or articles described in paragraph [0010], the alloying addition is selected from the group consisting of Ag, Au, B, Cr, Mo, P, Pb, Pd, Rh, Ru, Sn, Zn, and combinations thereof.
[0013] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0012], the coating comprises solid particulates where the solid particulates are metals; metal oxides; carbides of B, Cr, Bi, Si, W, or a combination thereof; carbon; glass; polymer materials; M0S2; or any combination thereof.
[0014] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraph [0013], the polymer materials are selected from the group consisting of polytetrafluoroethylene, polyvinyl chloride, polyethylene, polypropylene, acrylonitrile-butadiene-styrene, epoxy resins, and combinations thereof.
[0015] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0014], the coating comprises up to 95% by volume solid particulates.
[0016] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0014], the coating comprises 1 % to 95% by volume solid particulates.
[0017] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0016], the metallic coating layer thickness is 10 μιτι to 50 mm.
[0018] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraph [0017], the metallic coating layer thickness is 25 μιτι to 25 mm. [0019] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraph [0018], the metallic coating layer thickness is 30 μιτι to 5 mm.
[0020] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0019], one or more intermediate coating layers are applied to the substrate before the metallic coating layer is applied.
[0021 ] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0020], at least one of the intermediate coating layer(s) comprises a metal, a polymer, or both a metal and a polymer.
[0022] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0021 ] , the intermediate coating layer thickness is less than the metallic coating layer thickness by at least 20%.
[0023] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0022], the metallic coating layer, and the intermediate coating layer(s), if present, covers all of the exterior surface of the substrate.
[0024] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0022], the metallic coating layer, and the intermediate coating layer(s), if present, covers only a portion of the exterior surface of the substrate.
[0025] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0024], the thermal conductivity of the coated pyrolytic graphite is not less than the uncoated pyrolytic graphite substrate.
[0026] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0025], the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 105% of the thermal conductivity of the uncoated substrate, or of not less than 105% of uncoated substrate and also not more than 250% of the uncoated substrate. [0027] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0026], the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 1 10% of the thermal conductivity of the uncoated substrate, or of not less than 1 10% of uncoated substrate and also not more than 250% of the uncoated substrate.
[0028] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0027], the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 1 15% of the thermal conductivity of the uncoated substrate, or of not less than 1 15% of uncoated substrate and also not more than 250% of the uncoated substrate.
[0029] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0028], the substrate coated with the metallic coating layer exhibits a flexural strength greater than that of the uncoated substrate.
[0030] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0029], the substrate coated with the metallic coating layer exhibits a flexural strength of about 1 10% of the flexural strength of the uncoated substrate, or of not less than 1 10% of the uncoated substrate and also not more than 2000% of the uncoated substrate.
[0031 ] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0030], the metallic coating layer has a room temperature coefficient of linear thermal expansion in all directions of less than 25 x 10"6 K"1.
[0032] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0030], the metallic coating layer has a room temperature coefficient of linear thermal expansion in all directions in the range between 5.0 x 10"6 K"1 and 25 x 10"6 K~1.
[0033] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraphs [0001 ] - [0032], the substrate is a heat spreader.
[0034] In embodiments of the present invention, such as, but not limited to, any one of the methods or articles described in paragraph [0033], the heat spreader is any one of those described in U.S. Patent Nos. 8,085,531 , 7,859,848, 7,808,787, and 8,059,408.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 shows an example of the structure of a graphite sheet.
FIG. 2 shows a manufacturing method of highly oriented pyrolytic graphite. DETAILED DESCRIPTION
Use of the singular herein, including the claims, includes the plural and vice versa unless expressly stated to be otherwise. That is, "a," "an" and "the" refer to one or more of whatever the word modifies. For example, "an article" may refer to one articles, two articles, etc. By the same token, words such as, without limitation, "articles" would refer to one article as well as to a plurality of articles unless it is expressly stated or obvious from the context that such is not intended.
As used herein, words of approximation such as, without limitation, "about," "substantially," "essentially," and "approximately" mean that the word or phrase modified by the term need not be exactly that which is written but may vary from that written description to some extent. The extent to which the description may vary from the literal meaning of what is written, that is the absolute or perfect form, will depend on how great a change can be instituted and have one of ordinary skill in the art recognize the modified version as still having the properties, characteristics and capabilities of the modified word or phrase. In general, but with the preceding discussion in mind, a numerical value herein that is modified by a word of
approximation may vary from the stated value by ±15%, unless expressly stated otherwise.
As used herein, any ranges presented are inclusive of the end-points. For example, "a temperature between 10 °C and 30 °C" or "a temperature from 10 °C to 30 °C" includes 10 °C and 30 °C, as well as any temperature in between.
As used herein, a material that is described as a layer or a film (e.g., a coating) "disposed over" an indicated substrate refers to, e.g., a coating of the material deposited directly or indirectly over at least a portion of the surface of the substrate. A "layer" or a "coating" of a given material is a region of that material whose thickness is small compared to both its length and width (e.g., the length and width dimensions may both be at least 5, 10, 20, 50, 100 or more times the thickness dimension in some embodiments). Direct depositing means that the coating is applied directly to the surface of the substrate. Indirect depositing means that the coating is applied to an intervening layer that has been deposited directly or indirectly over the substrate. A coating is supported by a surface of the substrate, whether the coating is deposited directly, or indirectly, onto the surface of the substrate. As used herein a layer need not be planar, for example, taking on the contours of an underlying substrate. Layers can be discontinuous. A layer may be of non-uniform thickness. The terms "coating", "layer", and "coating layer" will be used interchangeably and refer to a layer, film, or coating as described in this paragraph.
As used herein, the term "coating thickness" or "layer thickness" refers to the depth in a deposit direction.
The invention will now be described in detail by reference to the following specification and non-limiting examples. Without further elaboration, it is believed that one skilled in the art can, using the preceding description, utilize the present invention to its fullest extent. The following embodiments are, therefore, to be construed as merely illustrative, and not limitative of the remainder of the disclosure in any way whatsoever.
Embodiments of this invention encompass methods which include applying one or more metallic coating layer(s) including a metal, or including a metal matrix composite, or including both, to a substrate comprising pyrolytic graphite. The microstructure of the metal of the metallic coating layer may be amorphous, fine- grained metal, or a combination thereof. As used herein, a "fine-grained metal" is metal having an average grain size between 1 and 5,000 nm. As used herein, the term "metal matrix composite" (MMC) is defined as particulate matter embedded in a fine-grained and/or amorphous metal matrix (metal having an average grain size between 1 and 5,000 nm). The metallic coating layers have a room temperature coefficient of linear thermal expansion (CLTE) in all directions of less than 25 x 10"6 K"1 , for example, in the range between 5.0 x 10"6 K"1 and 25 x 10"6 K~1. Embodiments of the invention also encompass the coated pyrolytic graphite articles, and
specifically, heat spreaders. The coatings comprising the fine grained metals, amorphous metals, or both, and methods of applying them are described in U.S. Patent Application Publication No. 2010/0028714, published February 4, 2010, and U.S. Patent No. 8,394,507, issued on March 12, 2013. Such coatings are available as Nanovate™ coatings from Integran Technologies, Inc., Toronto, Canada. In a preferred embodiment, the coating is a Nanovate™ N2040 coating, a high strength, low coefficient of thermal expansion nanostructured Nickel-Iron coating, from Integran Technologies, Inc., Toronto, Canada.
The application of the Nanovate™ N2040 coating, a high strength, low coefficient of thermal expansion nanostructured Nickel-Iron coating, from Integran Technologies, Inc., Toronto, Canada to a substrate of pyrolytic graphite, specifically, PYROID® HT pyrolytic graphite, led to an increase of approximately 10% in the thermal conductivity of the sample. In all previous work, coating the pyrolytic graphite led to a decrease in thermal conductivity due to the increased thermal resistance of the coating. In addition, the Nanovate™ N2040 coating increased the mechanical properties, such as but without limitation, the flexural strength of the sample.
MMCs can be produced e.g. in the case of using an electroplating process by suspending particles in a suitable plating bath and incorporating particulate matter into the electrodeposit by inclusion or e.g. in the case of cold spraying by adding non-deformable particulates to the powder feed. Other methods of producing the metallic coating layers include DC or pulse electrodeposition, electroless deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and gas condensation or the like. Some exemplary methods include those described in the following: U.S. Patent Application Publication No. 2005/0205425 A1 , published on September 22, 2005; U.S. Patent No. 7,387,578, issued on June 17, 2008; and DE 10,288,323.
Solid particulate materials that may be used in forming the MCCs include metals (Ag, Al, Cu, In, Mg, Si, Sn, Pt, Ti, V, W, Zn); metal oxides (Ag2O, AI2O3, SiO2, SnO2, TiO2, ZnO); carbides of B, Cr, Bi, Si, W; carbon (carbon nanotubes, diamond, graphite, graphite fibers); glass; polymer materials (polytetrafluoroethylene, polyvinyl chloride, polyethylene, polypropylene, acrylonitrile-butadiene-styrene, and epoxy resins); and self-lubricating materials such as, but without limitation, MoS2. The solid particulates may be up to 95% by volume of the coating, preferably, 1 % to 95% by volume, more preferably 5% to 75% by volume, and even more preferably from 10% to 50% by volume.
Alloying additions may be used in the metallic coating layers and are described in U.S. Patent Application Publication No. 2010/0028714, and U.S. Patent No. 8,394,507, issued on March 12, 2013.
There may be one or more intermediate coating layers between the substrate surface and the metallic coating layer(s). The intermediate coating layer(s) may include, but are not limited to, a metal, a polymer, or both a metal and a polymer. Materials used in intermediate layers are described in U.S. Patent No. 8,394,507, and U.S. Patent Application Publication No. 2010/0028714.
The surface of the substrate may be pre-treated by suitably roughening or texturing at least one of the surfaces to be mated to form specific surface
morphologies, termed "anchoring structures" or "anchoring sites" as described in U.S. Patent No. 8,394,507.
With respect to the substrates used, U.S. Patent No. 8,394,507 discusses polymeric or polymer composites as substrates, but carbon substrates are not disclosed. U.S. Patent Application Publication No. 2010/0028714 discloses substrates of "carbon based materials selected from the group of graphite, graphite fibers and carbon nanotubes."
Graphite is made up of layer planes of hexagonal arrays or networks of carbon atoms. These layer planes of hexagonal arranged carbon atoms are substantially flat and are oriented so as to be substantially parallel and equidistant to one another. The substantially flat parallel layers of carbon atoms are referred to as basal planes and are linked or bonded together in groups arranged in crystallites. Conventional or electrolytic graphite has a random order to the crystallites. Highly ordered graphite has a high degree of preferred crystallite orientation. As seen in FIG. 1 , the graphite sheet 2 has hexagonal covalent bonds in a stacked crystal structure, and the graphite layers of each graphite sheet 2 are connected by van der Waals forces. The graphite sheet 2 has a thermal conductivity in the X-Y plane of the graphite sheet 2 of a value greater than in the thickness direction, i.e. the Z direction. Another way of characterizing graphite is as having two principal axes, the "c" axis or direction which is generally identified as the axis or direction perpendicular to the carbon layers and the "a" axes or directions parallel to the carbon layers and transverse to the c axes. This alternative nomenclature is also shown in FIG. 1 . The "c" axis is equivalent to the Z direction, and the two "a" axes are equivalent to the X- Y plane. As used herein with reference to the axes of a graphite sheet, the term "XY" will be used interchangeably with "a" and "a-a," and the term "Z" will be used interchangeably with "c."
Graphite materials that exhibit a high degree of orientation include natural graphite and synthetic or pyrolytic graphite. Natural graphite is commercially available in the form of flakes (platelets) or as a powder. Pyrolytic graphite is produced by the pyrolysis of a carbonaceous gas on a suitable substrate at elevated temperature. Briefly, the pyrolytic deposition process may be carried out in a heated furnace and at a suitable pressure, wherein a hydrocarbon gas such as methane, natural gas, acetylene etc. is introduced into the heated furnace and is thermally decomposed at the surface of a substrate of suitable composition such as graphite having any desirable shape. The substrate may be removed or separated from the pyrolytic graphite. The pyrolytic graphite may then be further subjected to thermal annealing at high temperatures to form a highly oriented pyrolytic graphite commonly referred to as HOPG.
For use in heat spreaders, it is preferable to use highly oriented pyrolytic graphite having thermal conductivities more than 1 ,500 W/m degree K and a suitable example for use in particular is brand name PYROID® HT made by MINTEQ
International Inc. in New York, N.Y. Generally, thermal conductivity is caused by the free electrons and the lattice vibration. The high thermal conductivity (1000-2000 W/m degree K) of diamond is caused by lattice vibration, while the thermal conductivity of the extremely anisotropic HT graphite is equal to or less than diamond due to both free electron and the lattice vibration.
However, PYROID® HT pyrolytic graphite has many useful characteristics, such as the following: density 2.22 g/cc, tensile strength 28900 kPa (XY direction), elastic modulus 50 GPa (XY direction), flexural modulus 33200 MPa (XY direction), coefficient of thermal expansion 0.6 X 10"6/degrees Celsius (XY direction), 25 x 10" 6/degrees Celsius (Z direction), thermal conductivity 1 ,700 Watts/m degree K (XY direction), 7 Watts/in degree K (Z direction), 5.0 X 10"4 electric specific resistance Qcm (XY direction), 0.6 Qcm (Z direction), oxidation threshold 650 degrees Celsius (XY direction), and permeability 10"6 mmHg.
The thermal conductivity of PYROID® HT pyrolytic graphite in the XY direction compared with other materials thermal conductivity is extremely high, for example about 6 times the values of aluminum nitride (A1 N) and beryllia (BeO), and about 4 times the value of the overall thermal diffusion of the material copper (Cu) in particular.
PYROID® HT pyrolytic graphite is produced by the CVD method as shown in FIG. 2. In chamber 20 under vacuum by a vacuum pump 21 , hydrocarbon gas supplied from cylinder 22 as raw material gas is decomposed by the gas being heated to more than 2,000 degrees Celsius by heater 23, and while minute carbon nucleus C which deposit and crystallize on substrate 24, stack and deposit in stratified formation, and PYROID® HT pyrolytic graphite is produced. PYROID® HT pyrolytic graphite is available in thicknesses of from 0.25 mm to 20 mm, and can be produce as a board of a variety of sizes as large as 300 mm square shaped structure by controlling stacking and deposit time.
MINTEQ International Inc. in New York, N.Y. also makes PYROID® SN (substrate nucleated) and PYROID® CN (continuously nucleated) grades of pyrolytic graphite also produced by the CVD process. These have lower thermal conductivity than the PYROID® HT pyrolytic graphite.
Embodiments of the invention also encompass the coated pyrolytic graphite articles. A specific use of the coated pyrolytic graphite is in a heat spreader. In preferred embodiments, PYROID® HT pyrolytic graphite is used although other grades of PYROID® graphite, or other grades of pyrolytic graphite may be used. In these embodiments, the heat spreader is coated on all exterior surfaces, or substantially all exterior surfaces, with one or more metallic coating layers, and optionally including one or more intermediate layers. The coating encases or encapsulates or essentially encases or encapsulates the heater spreader. Examples of heat spreaders that may be coated include any of those described in U.S. Patent Nos. 8,085,531 , 7,859,848, 7,808,787, and 8,059,408. In preferred embodiments, the coating includes a Nickel-Iron alloy as a fine grained metal, amorphous metal, or combination thereof, optionally including a solid particulate, preferably a solid particulate that is a polymer material. In preferred embodiments, the fine-grained metal, if present, is of a grain size of 2 nm to 5000 nm. In preferred embodiments, the metallic layer coating thickness is 10 to 500 μιτι.
In a preferred embodiment, the substrate is PYROID® HT pyrolytic graphite, which is used as a heat spreader, coated on all surfaces or essentially all surfaces, with a 25 to 50 μιτι Nanovate™ N2040 coating, a high strength, low coefficient of thermal expansion nanostructured Nickel-Iron coating, from Integran Technologies, Inc., Toronto, Canada, and method of coating PYROID® HT pyrolytic graphite on all surfaces or essentially all surfaces with a 25 to 50 μιτι Nanovate™ N2040 coating. EXAMPLES
The examples presented in this section are provided by way of illustration of the current invention only and are not intended nor are they to be construed as limiting the scope of this invention in any manner whatsoever. Example 1
Ten samples of PYROID® HT pyrolytic graphite were tested for thermal conductivity using ASTM E1461 Flash Method for Thermal Conductivity
determination. In Table 1 , for the first five samples, the thermal conductivity was measured in the XY orientation, and for the second five samples, the thermal conductivity was measured in the Z direction. As shown in Table 1 , the thermal conductivity, λ in W/m-K, ranges from 1567 to 1737 in the XY direction.
Table 1
ASTM E1461 Flash Method Thermal Conductivity Results
Figure imgf000015_0001
Example 2
Five samples of PYROID® HT pyrolytic graphite were tested for thermal conductivity using ASTM E1461 Flash Method for Thermal Conductivity
determination. Samples #1 - #3 labeled UA1051 , UA1052, and UA1053 were coated with a Nanovate™ Nickel-Iron alloy coating of coating thicknesses of 25 μιτι, 50 μιτι, and 50 μητι, respectively. Samples #4 and #5 were uncoated. The thermal conductivity of samples #1 and #2 was determined in the XY direction. For samples #3 - #5, the thermal conductivity was determined in the Z direction. As shown in Table 2, the λ in W/m-K for each of the two coated samples measured in the XY direction, samples #1 and #2, was higher than any of the 5 uncoated samples measured in Example 1 . In addition, the thermal conductivity in the Z direction was higher for coated sample #3 as compared to uncoated samples #4 and #5.
Table 2
ASTM E1461 Flash Method Thermal Conductivity Results
Thickbulk
ness density specific
Δχ @ P @ temperature heat diffusivity conductivity
25°C 25°C T Cp a λ
Sample (mm) (g/cm3) (°C) (J/g-K) (mm2/s) (W/m-K)
UA1051
(#1 ) 2.859 2.42 25 0.743 1082 1946
UA1052
(#2) 2.895 2.47 25 0.720 982 1746
UA1053
(#3) 2.905 2.42 25 0.742 5.47 9.82
1 1028
(#4) 2.976 2.24 25 0.771 4.40 7.60
12172
(#5) 2.995 2.24 25 0.833 4.32 8.06
Example 3
The flexure extension in the XY direction of 10 uncoated PYROID® HT pyrolytic graphite samples of 0.0625 inches in thickness and 0.5625 inches in width and 0.90 inches in length at a temperature of 73 °F and a relative humidity of 50% was determined using the ASTM D790 testing procedure. The results of 10 samples are shown in Table 3: Table 3
Figure imgf000017_0001
Example 4
The flexure extension in the Z direction of 4 uncoated PYROID® HT pyrolytic graphite samples of 0.0625 inches in thickness and 0.5625 inches in width and 0.90 inches in length at a temperature of 73 °F and a relative humidity of 50% was determined using the ASTM D790 testing procedure. The results of 4 samples are shown in Table 4:
Table 4
Figure imgf000017_0002
Example 5
The flexure extension in the Z direction of 4 coated PYROID® HT pyrolytic graphite samples of 0.0625 inches in thickness and 0.5625 inches in width and 0.90 inches in length at a temperature of 73 °F and a relative humidity of 50% was determined using the ASTM D790 testing procedure. Sample #1 was coated with a Nanovate™ Nickel-Cobalt alloy coating of 25 micron in thickness. Sample #2 was coated with a Nanovate™ Nickel-Iron alloy coating of 25 micron in thickness.
Sample #3 was coated with a Nanovate™ Nickel-Cobalt alloy coating of 50 micron in thickness. Sample #4 was coated with a Nanovate™ Nickel-Iron alloy coating of 50 micron in thickness. The Nanovate™ coatings were provided by and applied by Integran Technologies, Inc. The results for the 4 samples are shown in Table 5:
Table 5
Figure imgf000018_0001
As seen in Table 5, the flexture stress was higher for each four of the samples in Table 5 as compared to the samples shown in Table 4. The yield strain was higher for all samples in Table 5 except sample #1 .
Accordingly, it is understood that the above description of the present invention is susceptible to considerable modifications, changes and adaptations by those skilled in the art, and that such modifications, changes and adaptations are intended to be considered within the scope of the present invention, which is set forth by the appended claims.

Claims

WHAT IS CLAIMED IS: 1 ) A method: disposing a metallic coating layer comprising a metal over at least a portion of a surface of a pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel-Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nm to 10000 nm in size, the metal being amorphous, or both.
2) The method of claim 1 , wherein the pyrolytic graphite is highly oriented pyrolytic graphite, chemical vapor deposition deposited pyrolytic graphite, or a combination thereof.
3) The method of claim 1 , wherein the coating is a Nanovate™ N2040 coating.
4) The method of any one of claims 1 - 3, wherein the metal grain size is from 2 nm to 5000 nm.
5) The method of any one of claims 1 - 3, wherein the coating comprises an alloying addition.
6) The method of claim 5, wherein the alloying addition is selected from the group consisting of B, C, H, O, P, S, and combinations thereof.
7) The method of any one of claims 1 - 3, wherein the coating comprises solid particulate of metals; metal oxides; carbides of B, Cr, Bi, Si, W, or a combination thereof; carbon; glass; polymer materials; M0S2; or any combination thereof.
8) The method of claim 7, wherein the coating comprises up to 95% by volume solid particulates.
9) The method of any one of claims 1 - 3, wherein the metallic layer coating thickness is 10 m to 50 mm. 10) The method of any one of claims 1 - 3, wherein one or more intermediate coating layers are applied before the application of the metallic coating layer.
1 1 ) The method of claim 10, wherein the intermediate coating layer comprises a metal, a polymer, or both a metal and a polymer.
12) The method of claim 10, wherein the intermediate coating layer thickness is less than the metallic coating layer thickness.
13) The method of any one of claims 1 - 3, wherein the metallic coating layer covers all of the exterior surface of the substrate.
14) The method of any one of claims 1 - 3, wherein the metallic coating layer covers only a portion of the exterior surface of the substrate.
15) The method of any one of claims 1 - 3, wherein the substrate coated with the metallic coating layer exhibits a thermal conductivity not less than the uncoated substrate.
16) The method of any one of claims 1 - 3, wherein the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 105% of the thermal conductivity of the uncoated substrate, or of not less than 105% of uncoated substrate and also not more than 250% of the uncoated substrate.
17) The method of any one of claims 1 - 3, wherein the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 1 10% of the thermal conductivity of the uncoated substrate, or of not less than 1 10% of uncoated substrate and also not more than 250% of the uncoated substrate.
18) The method of any one of claims 1 - 3, wherein the substrate coated with the metallic coating layer exhibits a thermal conductivity of about 1 15% of the thermal conductivity of the uncoated substrate, or of not less than 1 15% of uncoated substrate and also not more than 250% of the uncoated substrate. 19) The method of any one of claims 1 - 3, wherein the metallic coating layer has a room temperature coefficient of linear thermal expansion in all directions of less than 25 x 10"6 K"1.
20) An article comprising:
a substrate of pyrolytic graphite;
a metallic coating layer comprising a metal deposited over at least a portion of a surface of the pyrolytic graphite substrate, the metal comprising Nickel, Iron, a Nickel-Iron Alloy, or any combination thereof, and the grains of the metal being of 1 nm to 10000 nm in size, the metal being amorphous, or both.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021167939A1 (en) * 2020-02-18 2021-08-26 Lam Research Corporation High temperature substrate support with heat spreader

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10444515B2 (en) 2015-01-20 2019-10-15 Microsoft Technology Licensing, Llc Convective optical mount structure
US9791704B2 (en) * 2015-01-20 2017-10-17 Microsoft Technology Licensing, Llc Bonded multi-layer graphite heat pipe
US10028418B2 (en) 2015-01-20 2018-07-17 Microsoft Technology Licensing, Llc Metal encased graphite layer heat pipe
US10108017B2 (en) 2015-01-20 2018-10-23 Microsoft Technology Licensing, Llc Carbon nanoparticle infused optical mount
US9674986B2 (en) * 2015-08-03 2017-06-06 Apple Inc. Parallel heat spreader
US10584927B2 (en) * 2015-12-30 2020-03-10 General Electric Company Tube thermal coupling assembly
CN106328614A (en) * 2016-09-28 2017-01-11 厦门恒坤新材料科技股份有限公司 Graphite sheet and metal layer composed thermally conductive sheet and its composing method
GB201706783D0 (en) * 2017-04-28 2017-06-14 Cambridge Entpr Ltd Composite layers, methods for their manufacture and uses thereof
WO2019060503A2 (en) * 2017-09-20 2019-03-28 eChemion, Inc. Manufacturing enhanced graphite metallic bipolar plate materials
GB2569306A (en) * 2017-12-12 2019-06-19 Rolls Royce Plc Thermal management device
JP7032348B2 (en) 2019-03-26 2022-03-08 矢崎総業株式会社 Metal-plated carbon material and its manufacturing method
CN111690963B (en) * 2020-06-24 2022-10-04 上海理工大学 Method for preparing copper/graphite/copper laminated composite material with high thermal conductivity
US11882673B1 (en) * 2020-11-25 2024-01-23 Advanced Cooling Technologies, Inc. Heat spreader having conduction enhancement with EMI shielding
TWI768966B (en) * 2021-06-15 2022-06-21 許國誠 Graphite based composite laminated heat dissipation structure and manufacturing method thereof

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547692A (en) * 1968-10-17 1970-12-15 Engelhard Min & Chem Metal coating carbon substrates
DE10228323A1 (en) 2002-06-25 2004-01-29 Integran Technologies Inc., Toronto Patching process for degraded portion of metallic workpiece e.g. pipe and conduit, involves electroplating reinforcing metallic patch to cover degraded portion
US20050205425A1 (en) 2002-06-25 2005-09-22 Integran Technologies Process for electroplating metallic and metall matrix composite foils, coatings and microcomponents
US7387578B2 (en) 2004-12-17 2008-06-17 Integran Technologies Inc. Strong, lightweight article containing a fine-grained metallic layer
US20100028714A1 (en) 2004-12-17 2010-02-04 Integran Technologies, Inc. Fine-Grained Metallic Coatings Having the Coefficient of Thermal Expansion Matched to the One of the Substrate
US7808787B2 (en) 2007-09-07 2010-10-05 Specialty Minerals (Michigan) Inc. Heat spreader and method of making the same
US20100326645A1 (en) * 2004-01-21 2010-12-30 Wei Fan Thermal pyrolytic graphite laminates with vias
US8059408B2 (en) 2007-09-07 2011-11-15 Specialty Minerals (Michigan) Inc. Layered heat spreader and method of making the same
US8085531B2 (en) 2009-07-14 2011-12-27 Specialty Minerals (Michigan) Inc. Anisotropic thermal conduction element and manufacturing method
US8394507B2 (en) 2009-06-02 2013-03-12 Integran Technologies, Inc. Metal-clad polymer article
WO2013058754A1 (en) * 2011-10-20 2013-04-25 Crucible Intellectual Property Llc Bulk amorphous alloy heat sink

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547692A (en) * 1968-10-17 1970-12-15 Engelhard Min & Chem Metal coating carbon substrates
DE10228323A1 (en) 2002-06-25 2004-01-29 Integran Technologies Inc., Toronto Patching process for degraded portion of metallic workpiece e.g. pipe and conduit, involves electroplating reinforcing metallic patch to cover degraded portion
US20050205425A1 (en) 2002-06-25 2005-09-22 Integran Technologies Process for electroplating metallic and metall matrix composite foils, coatings and microcomponents
US20100326645A1 (en) * 2004-01-21 2010-12-30 Wei Fan Thermal pyrolytic graphite laminates with vias
US7387578B2 (en) 2004-12-17 2008-06-17 Integran Technologies Inc. Strong, lightweight article containing a fine-grained metallic layer
US20100028714A1 (en) 2004-12-17 2010-02-04 Integran Technologies, Inc. Fine-Grained Metallic Coatings Having the Coefficient of Thermal Expansion Matched to the One of the Substrate
US7808787B2 (en) 2007-09-07 2010-10-05 Specialty Minerals (Michigan) Inc. Heat spreader and method of making the same
US7859848B1 (en) 2007-09-07 2010-12-28 Specialty Minerals (Michigan) Inc. Heat spreader and method of making the same
US8059408B2 (en) 2007-09-07 2011-11-15 Specialty Minerals (Michigan) Inc. Layered heat spreader and method of making the same
US8394507B2 (en) 2009-06-02 2013-03-12 Integran Technologies, Inc. Metal-clad polymer article
US8085531B2 (en) 2009-07-14 2011-12-27 Specialty Minerals (Michigan) Inc. Anisotropic thermal conduction element and manufacturing method
WO2013058754A1 (en) * 2011-10-20 2013-04-25 Crucible Intellectual Property Llc Bulk amorphous alloy heat sink

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3052676A1

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021167939A1 (en) * 2020-02-18 2021-08-26 Lam Research Corporation High temperature substrate support with heat spreader

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