WO2015014823A1 - Système de positionnement multi-axe pour positionner un objet dans un plan x-y ainsi que microscope - Google Patents

Système de positionnement multi-axe pour positionner un objet dans un plan x-y ainsi que microscope Download PDF

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Publication number
WO2015014823A1
WO2015014823A1 PCT/EP2014/066250 EP2014066250W WO2015014823A1 WO 2015014823 A1 WO2015014823 A1 WO 2015014823A1 EP 2014066250 W EP2014066250 W EP 2014066250W WO 2015014823 A1 WO2015014823 A1 WO 2015014823A1
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WO
WIPO (PCT)
Prior art keywords
positioning system
swing arm
axis positioning
axis
actuators
Prior art date
Application number
PCT/EP2014/066250
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German (de)
English (en)
Inventor
Johannes Kindt
Original Assignee
Johannes Kindt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of WO2015014823A1 publication Critical patent/WO2015014823A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages

Definitions

  • Multi-axis positioning system for positioning an object in an x-y plane as well as a microscope
  • the invention initially relates to a mechanical multi-axis positioning system for the precise positioning and guiding of a measuring element or a manipulation element in at least two axes of an x-y plane.
  • the multi-axis positioning system according to the invention can also be referred to as a scanner and is particularly applicable in microscopy devices; For example, in a compact design in
  • Microscope lens format where it allows travels up to several millimeters. Furthermore, the invention relates to a microscope with the multi-axis positioning system according to the invention.
  • Scanners are used in various applications of microscopy, sample measurement, micromanipulation and microfabrication. Particular importance is attached to latching methods in which a measuring or manipulation element interacts sequentially, for example line by line, with an extended sample surface. Examples of such methods are the scanning probe micro ⁇ microscopy (STM, AFM, SNOM, SICM, TERS), the ultrasonic micro ⁇ microscopy, confocal microscopy, Nano Indenter, the Stylus- profilometry, the dip pen lithography and the scanning sample
  • Lithography For these methods, it is generally necessary to have a relative mechanical positioning and guidance between a sample or a workpiece and a measuring or
  • Scanners can be categorized into those that move the sample, into those that move the measuring element, and into hybrids. As a large scope of this
  • Scanning movements on the lens side of the optical microscope or in the beam path of the optical microscope are confocal ⁇ microscopes, including their variants (STED, STORM, FLIM).
  • the mechanical scanning of an element on or in a microscope objective takes place for example by means of fine focusing optical lenses (DE 10 2011 121 928 AI) or by elements for uniaxial deflection of the optical beam path by scanning the objective lens
  • Examples for scanning a measurement or manipulation ⁇ elements in the position of the microscope objective lens are AFMs (z. B. Ultra lens Surface Imaging Systems, SIS, now Bruker Corp.). The integration of non-optical measuring and
  • Manipulation method in the form factor of a standard microscope objective allows the flexible integration of these methods into existing microscope structures, so that the alternating and colocalized use of the non ⁇ optical measurement and manipulation method and the microscope ⁇ optics is possible by a change of objective using the often existing change mechanism.
  • Sample-side scanners move the sample or workpiece. The spectrum of usable samples is thereby limited. Large and heavy samples can not or only slowly be moved. Sensitive samples, such as cell biological specimens, can be detected by the
  • Accelerations are influenced.
  • a simultaneous optical observation of the sample with classical light microscopy micro ⁇ , z. B. in an inverted microscope from below, is not or only partially possible in a moving sample.
  • Known lens scanners have relatively small scan areas.
  • the largest and thus not more standard version of the UltraObj ective AFM manufacturer SIS has a scanning range of 200 ym x 200 ym. This means a significant limitation of the possible applications; to the
  • the object of the present invention is to provide a multi-axis positioning system for positioning an object in an x-y plane, which has larger scan areas, in particular for the
  • Microscopy allows and can be formed in a compact design, for example in the form factor of a standard microscope objective. Furthermore, a microscope with such a positioning system is to be provided.
  • the multi-axis positioning system serves to position an object in an xy plane and is particularly suitable for microscopy.
  • the object is in ⁇ example by a sample, by a measuring element or by formed a manipulation element.
  • the measuring element is before Trains t ⁇ through a measuring head or by a lens formed.
  • the object should be moved in the two axes of the xy plane to enable a scan in this plane.
  • the xy plane is preferably oriented horizontally.
  • Positioning system can also be used for positioning in a third axis, i. H. be formed in a direction perpendicular to the x-y plane z-axis.
  • the multi-axis positioning system initially comprises a swinging arm oriented perpendicular to the x-y plane and pivotable about a pivot point.
  • the swing arm is in particular aligned perpendicular to the x-y plane when it is not pivoted, d. H. if he is in an exit or in a rest position.
  • the direction perpendicular to the x-y plane is formed in particular by the z direction, in which the swing arm is aligned.
  • the swing arm has two rotational degrees of freedom whose axes are aligned parallel to the x-y plane.
  • the swing arm is preferably pivotable by less than 45 °, more preferably by less than 10 °.
  • the swing arm is preferably formed by a tube.
  • the multi-axis positioning system according to the invention further comprises at least two actuators for acting on the
  • Actuators can be pivoted in these directions.
  • the actuators preferably positive or negative forces can be exerted on the swing arm, causing the pivoting of the
  • Swing arm in the two rotational degrees of freedom leads. If more than one of the actuators is provided for each of the rotational degrees of freedom, then these actuators are to be driven so that they together have a rotational force or Apply swivel force to the swing arm.
  • the actuators are preferably by voice coils, by air coils through
  • the actuators are preferably arranged distributed next to the oscillating arm, particularly preferably around the oscillating arm.
  • the swinging arm having the two rotational degrees of freedom and the at least two actuators driving it can be regarded as a first stage of the multi-axis positioning system according to the invention.
  • the multiaxial positioning system furthermore comprises a receiving element movable exclusively in the xy plane for the direct or indirect reception of the object to be positioned.
  • the receiving element is coupled to one end of the swing arm and immovable in the direction of the z-axis.
  • the end of the swing arm forming a lever arm end is spaced from the actuators, the actuators preferably being arranged axially between the end of the swing arm and the pivot point. Consequently, due to the leverage de swing arm that caused by the actuators path leads to a greater path length at the end of the swing ⁇ low, so that at a given space of acting as a scanner positioning system, a larger scanning area can be detected.
  • the pivot point is preferably arranged at the other end of the swing arm.
  • the object to be positioned can be fastened directly to the receiving element or indirectly via a further element on the receiving element.
  • the receiving element forms a central receptacle and can al as a second stage of the multi-axis
  • the multiaxial positioning system has the advantage that the scannable range achievable thereby goes beyond the path lengths achievable with the actuators.
  • the size of actuators scales with their Stell ⁇ range .
  • frictionless actuators such as piezoelectric actuators, piezo stacks, piezo benders, voice coils.
  • the translation factor is
  • the multi-axis positioning system according to the invention preferably further comprises flexures, by which a movement of the receiving element in the x-y plane is defined.
  • the flexures are spring, bending or guide elements.
  • the flexures are preferred by thin-walled
  • the flexures are particularly preferably formed by flat flexures and allow movement of the central receptacle in the x-y plane.
  • the shape of the flexures preferably results from a projection of a curve imagined in the x-y plane into the z plane. This results in flexures with a high x-z and y-z aspect ratio and a resulting high
  • the flexures are assigned to the second stage of the multi-axis positioning system according to the invention.
  • the multi-axis positioning system preferably further comprises a housing, in which at least the receiving element and the flexures are arranged, wherein the flexures are fixed to the housing and clamp the receiving element.
  • the housing preferably also encloses the swing arm and the actuators.
  • the housing also preferably carries the actuators.
  • the multi-axis positioning system preferably comprises a swing arm suspension, which is firmly connected to the housing and carries the swing arm.
  • Schwingarmaufhfitung position sensors are preferably arranged for determining the deflection of the swing arm.
  • the receiving element via a coupling ⁇ element is coupled to the end of the swing arm.
  • the coupling element forms a coupling of the first stage to the second stage of the multi-axis positioning system according to the invention.
  • the coupling element is preferably formed by a further bending element, which connects the end of the swing arm with the central receptacle, namely with the
  • the multiaxial positioning system according to the invention preferably further comprises an actuator, which can be moved exclusively in the z-direction and which is mechanically connected between the actuator
  • Receiving element and the object to be positioned is arranged.
  • the receiving element receives the object to be positioned only indirectly.
  • the actuator which can be moved in the z-direction is fastened directly or indirectly to the receiving element and carries the object to be positioned, for example a measuring head.
  • the object to be positioned is movable in the x-y plane by the actuators acting on the swing arm, while it is with the on
  • Receiving element arranged actuator is also movable in the z-direction.
  • the swing arm is formed by a tube, so that there is a free optical path.
  • the coupling element is preferably tubular in shape to ensure the free optical path.
  • lever arms On the swing arm lateral lever arms are preferably attached, which are mechanically connected to the actuators, so that the actuators act on the swing arm via the lever arms with forces.
  • the lever arms preferably extend in the x-y plane.
  • the lever arms are preferably each one
  • lever arms can be integrally formed with the swing arm.
  • the multi-axis positioning system according to the invention is forthcoming Trains t largely without friction and thus not fundamentally limited in its position ⁇ resolution.
  • Positioning system also allows a basically flat scan, d. H. a translation in the x-y plane with little parasitic motion in the z-direction, rather than a prior art rotation with fulcrum within the device.
  • the maximum achievable scan rates for the positioning system according to the invention are generally limited by its dynamic properties, in particular its mechanical resonance frequencies in the degrees of freedom of the actuators and also in the parasitic modes.
  • the positioning system according to the invention preferably has high resonance frequencies, which of the
  • the positioning ⁇ system according to the invention can be described for each of its axes as a mass-spring system, the various bending elements, ie the flexures and the coupling element, the spring constant. For a maximum resonance frequency, these are to be maximized so that the force of the actuators is still sufficient to effect the desired travel against the entire spring force. In addition to maximizing the spring force and the
  • the axes of the actuators are part of one
  • Control loop for example, a position controller or a variable size controller.
  • their performance in the system does not follow purely their resonant frequency, but rather the Regulatory criteria of phase margin and gain margin.
  • a damped resonance is easier to control than a nearly undamped resonance.
  • Damping can be integrated into the design of the positioning system.
  • viscoelastic materials are preferably arranged in such intermediate spaces of the positioning system, which have varying dimensions during operation.
  • preferably memory foam in or between the
  • a viscous, non-volatile ferrofluid is preferably arranged in the air gaps of the actuators, in particular of the voice coil actuators.
  • the multi-axis positioning system according to the invention is before Trains t ⁇ for use in an optical beam path of a microscope, the positioning bearing is formed.
  • the multiaxial positioning system according to the invention preferably forms a component of a microscope and is preferably arranged in the optical beam path of the microscope. It forms before Trains t ⁇ a primary or a secondary measurement and / or
  • the multi-axis positioning system according to the invention preferably has the form factor of a microscope objective
  • Sensor and electrophysiological applications including SICM, Tissue Diagnostic Instrument and Stylus Profilometer. It is useful to use the newer scanning probe microscopy techniques for material properties, such as phase imaging, pulsed force mode, peak force tapping, etc., for defect analysis on macroscopic workpieces, or cell mechanics such as cell indentation and adhesion measurement, etc., on cell assemblies to and tissues ⁇ contact.
  • material properties such as phase imaging, pulsed force mode, peak force tapping, etc.
  • cell mechanics such as cell indentation and adhesion measurement, etc.
  • the sensors can not be completely removed, for example, by an optical beam path not far from the sample.
  • ultrasonic measurements such as acoustic microscopy, spatially resolved eddy current measurements, and measurement modes that use the coupling of physical phenomena in the workpiece, such as optoacoustic microscopy.
  • direct lithography techniques such as dip-pen, thermal ablation, im
  • the positioning system according to the invention is preferred as a scanner with several millimeters of travel in the x-direction and in the y-direction, and further preferably with a
  • the invention is not based on the use of the described mechanism in a light microscope, on holding the scanner via a thread on the back, or designs which keep or fall short of the standard dimensions described. Rather, the invention describes a positioning system that broadens the development possibilities of compact scanners in general.
  • the microscope according to the invention is used for microscopy of a sample and comprises the multiaxial invention
  • the microscope according to the invention preferably comprises preferred embodiments of the multi-axis positioning system according to the invention.
  • a beam path of the microscope is preferred by the
  • the beam path forms a central axis of the positioning system, which also forms the central axis of the swing arm.
  • the swing arm and the female member each have a central opening for the passage of the beam path.
  • Fig. 1 a sectional view of a preferred embodiment of a multi-axis according to the invention
  • FIG. 2 is a perspective view of that shown in FIG.
  • FIG. 3 is an overall view of that shown in FIG.
  • Fig. 4 a shown in Fig. 1 swing arm with actuators
  • FIG. 5 shows the oscillating arm shown in FIG. 4 with the actuators and the flexures in a deflected state
  • Fig. 6 the flexures shown in Fig. 4 in one
  • Fig. 7 The flexures shown in Fig. 5 in one
  • FIG. 8 shows an alternative embodiment of the positioning system with a metal bellows as a coupling element
  • FIG. 9 shows an alternative embodiment of the positioning system with a wire as a coupling element
  • FIG. 10 shows an alternative embodiment of the positioning system with a ball as a coupling element
  • FIG. 11 shows an alternative embodiment of the positioning system with a tube as a coupling element
  • FIG. 12 shows the tube shown in FIG. 11 in a detailed view
  • FIG. 14 shows an alternative embodiment of the positioning system with wave-shaped flexures
  • FIG. 15 shows an alternative embodiment of the positioning system with bellows as flexures
  • FIG. 16 shows an alternative embodiment of the positioning system with corrugated tubes as flexures
  • Fig. 17 an alternative embodiment of the positioning system with angled spring plates as flexures
  • FIG. 18 shows an alternative embodiment of the positioning system with ball bearings as flexures
  • FIG. FIG. 19 a suspension arm suspension shown in FIG. 1 in a perspective view
  • Fig. 20 the swing arm suspension of an alternative
  • Fig. 21 the swing arm suspension shown in Fig. 19 in a
  • FIG. 22 shows a first electrical connection of strain gauges shown in FIG. 19;
  • FIG. 23 shows a second electrical connection of the strain gauges shown in FIG. 19;
  • Fig. 24 the swing arm suspension of a preferred
  • Fig. 25 the actuators shown in Fig. 1 in one
  • FIG. 26 shows an alternative embodiment of the positioning system with movable coils as actuators
  • FIG. 27 shows an alternative embodiment of the positioning system with laterally acting actuators
  • Fig. 28 an alternative embodiment of the positioning system with laterally acting electromagnetic
  • FIG. 29 shows an alternative embodiment of the positioning system with piezo stacks as actuators
  • Fig. 30 an alternative embodiment of the positioning system with piezo-Bendern as actuators
  • FIG. 31 shows an alternative embodiment of the positioning system with electric motors as actuators
  • FIG. 32 shows an alternative embodiment of the positioning system with piezo tubes as actuators
  • FIG. 33 shows a preferred embodiment of the positioning system with an actuator in the z-direction
  • FIG. 34 shows a modified embodiment of the positioning system with an actuator in the z-direction
  • Fig. 35 an embodiment of the positioning system with a
  • Fig. 36 an embodiment of the positioning system with a
  • FIG. 37 shows a detail of a microscope according to the invention with integrated positioning system and stationary lens
  • Fig. 38 a detail of the microscope according to the invention with
  • FIG. 1 shows a sectional view of a preferred embodiment of a multi-axis positioning system according to the invention.
  • Actuators 01 per axis each with opposite direction of force on lever arms 02 of a swing arm 03.
  • the swing arm 03 can also be referred to as a pendulum.
  • the actuators 01 each have a housing 04 with a core 05 and with a magnetic coil 06.
  • the housings 04 of the actuators 01 are rigidly connected to a housing 07 at rest of the multi-axis positioning system.
  • the multi-axis positioning system comprises a Schwingarmauf ⁇ suspension 08, which can also be referred to as pendulum suspension and a pivot point 09 of the swing arm 03rd Are defined.
  • the swing arm 08 consists of a thin sheet which has been cut out, lasered or etched.
  • the swing arm 08 connects because of their high aspect ratio the swing arm 03 in the contact area against translations in a direction perpendicular to the swing arm 03 xy plane stiff with the housing 07 at rest. However, it allows small rotations around the pivot point 09 under relatively small force , The resulting rotation of the rocker arm 03 about the pivot point 09 moves a coupled at the end of the rocker arm 03 coupling element 11, which is connected to a central recording recording ⁇ element 12.
  • the coupling element 11 is laid out ⁇ so that it is relatively stiff against shear forces in the x-direction and y-direction; opposite a small one
  • the coupling element 11 is formed by a short metal bellows of electrochemically deposited nickel.
  • the metal bellows has the advantage of low rigidity against changes in length and thus helps to decouple the resulting from the pendulum ⁇ movement of the swing arm 03 z-component of the receiving element 12.
  • the four actuators 01 are arranged parallel to the swing arm 03 and at right angles around it. They act on the swing arm 03 in each case via one of the lever arms 02, which is rigidly coupled to the swing arm 03.
  • the lever arms 02 are in their height close to the pivot point 09 of the swing arm 03, in which the swing arm 08 is located.
  • the swing arm 08 has a high lateral rigidity and a lower rigidity against small rotations and is realized from cut sheet metal.
  • the receiving element 12 is further suspended in the resting housing 07 by means of three flexures 13.
  • the flexures 13 formed by XY flexures allow translations of the receiving ⁇ element 12 in the xy plane to be due to their high aspect ratio; however, are stiff to translations in the z-direction as well as to rotations about the x-axis and about the y-axis. Consequently, a movement of the
  • the x-y position of the receiving element 12 is therefore dominated by the position of the coupling element 11 at the end of the rocker arm 03, since this stiff relative to x-y translations (shear forces), while the flexures 13 behave soft in this plane.
  • the z-position of the receiving element 12, however, is dominated by the stiff behavior of the flexures 13, so that it is kept constant with respect to the resting at rest housing 07. This is particularly true when the coupling ⁇ element 11 behaves relatively soft to changes in length, as is the case for the bellows used here.
  • the flexures 13 are formed by thin-walled tubes, which is oriented along the z-axis and are arranged uniformly around the on ⁇ pickup element 12 around and are in mechanical communication with the receiving member 12 and with the housing at rest 07th Fig. 2 shows a perspective view of the positioning system shown in Fig. 1.
  • the swing arm 03, the coupling element 11 and the receiving element 12 are hollow and tubular. This results in an open optical beam path.
  • FIG. 3 shows an overall view of that shown in FIG
  • a measuring head 16 is held, which z. B. optical, mechanical, acoustic or electronic components to interact with a sample to be microscoped or a workpiece (not shown), namely in order to make or change this measurements.
  • the measuring head 16 is an electroacoustic element with a small focus area, which is known from acoustic microscopy. For the example of acoustic microscopy, the measuring head
  • the Measuring head 16 At the end of the line one begins to drive the respective voltage ramps backwards, ie to gradually lower the high voltage and to increase the low one. This will be the Measuring head 16 returned to its initial position.
  • the other pair of actuators O1 can be operated in the same way with a rate which is lower by a large factor, resulting in a line-by-line scanning of a rectangle.
  • Another advantage of this preferred embodiment of the invention is its symmetrical structure in both axes. Since both axes have the same structure, there is no preferred direction, ie z. Eg no axis with faster and one with slower mechanical response. For this reason, fast and slow scan axes can also be exchanged, which leads to image rotation in imaging processes. Furthermore, both axes can also be operated with superpositions of x and y signals which are known from vector geometry, as a result of which arbitrary scan or image angles can be realized.
  • the positioning system it is necessary to establish an electrical connection between the measuring head 16 and an external control or measuring device (not shown). Under certain circumstances, it is also necessary or useful to pre-process electrical signals within the housing 07. Examples include a pre-amplifier for measurement signals, a storage of calibration and maintenance data in a non-volatile memory chip in the positioning system or the integration of position feedback using position sensors. The leading out of lines breaks the external rotational symmetry of the positioning system, so that it is preferably oriented in the supporting microscope in order to ensure a meaningful cable routing. At the same time is possibly additional space for electronics, eg. As for the above integration of components for preprocessing necessary. Therefore, the illustrated embodiment of the
  • the standard lens mount 14 is not designed as an integral constituent part of the ⁇ that are available in the rest housing 07, but as a separate part which can be fixed in the housing 07 and rotatable by means of clamping screws (not shown).
  • clamping screws not shown
  • Fig. 4 shows the swing arm 03 shown in Fig. 1 with the actuators 01, the receiving element 12 and the flexures 13 in the undeflected state, d. H. at rest in detail.
  • FIG. 5 shows the oscillating arm 03 shown in FIG. 4 with the actuators 01, the receiving element 12 and the flexures 03 in a deflected state in which it has a rotational angle da and an offset dx.
  • FIG. 6 shows the flexures 13 shown in FIG. 4 with the receiving element 12 in a horizontal section.
  • FIG. 7 shows the flexures 13 shown in FIG.
  • FIG. 8 through Fig. 12 show alternative preferred execution ⁇ shape of the coupling element 11.
  • FIG. 8 shows details of an alternative preferred embodiment of the positioning system according to the invention, in which the coupling element 11 is formed by a metal bellows, which the pendulum motion of the swing arm 03 to its
  • Fulcrum 09 coupled to the receiving element 12.
  • the stiff ness of the coupling element 11 in the form of a bellows is shown in cross-section ⁇ not immediately recognizable. It results from the intrinsic properties ⁇ the profile shown as a rotating body.
  • Fig. 9 shows details of an alternative preferred embodiment of the positioning system according to the invention, in which the coupling element 11 is formed by a wire. This allows easy bending 8 times easier than one
  • FIG. 10 shows details of an alternative preferred
  • the coupling element 11 is formed by a ball 21 in a ball seat 22.
  • the ball 21 may be a polished steel ball as used in ball bearings.
  • the ball seat 22 may be an element made of hard material with a funnel-shaped depression, such as. As a so-called V-Jewel, as it is available from sapphire or ruby for fine ⁇ mechanical mechanisms.
  • Another possibility for the ball seat 22 is a kinematic mount (not shown), which consists of three set in a triangle
  • Balls is composed, which define three contact ⁇ points for the ball 21 together.
  • Fig. 11 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the coupling element 11 is formed by a tube with cuts 23.
  • the notches 23 define a plurality of uniaxial bending points, which interact with each other to form a multi-axis bending point. allow axial bending. Similar elements are as
  • FIG. 12 shows the coupling element 11 formed by a tube shown in FIG. 11 in a detailed view.
  • FIG. 13 shows details of a preferred embodiment of the positioning system according to the invention, in which the flexures 13 are formed by thin-walled tubes. These can be achieved by trimming with z. As a laser or by wire ⁇ erosion of corresponding tube material or by electrochemical deposition are produced. Suitable wall thicknesses are in the range between 2 micrometers and 30 micrometers.
  • the flexures 13 formed by the tubes are in contact with the receiving element 12 via their outer walls and with the housing 07 at rest, to which they are attached. This fastening can be done by inside the
  • Receiving element 12 or be screwed to the housing 07.
  • Other alternatives are gluing, soldering or
  • Fig. 14 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the flexures 13 are formed by wave-shaped profiles which have no tubular shape. These profiles can be produced by embossing / deep drawing of sheet metal or by electrochemical deposition. They can be glued, soldered, welded, clamped or screwed at their ends directly or by means of another element (not shown).
  • Fig. 15 shows details of an alternative preferred embodiment of the positioning system according to the invention, in which the flexures 13 are formed by rectangular metal bellows with a high xz aspect ratio. The flexures 13 formed by the rectangular- metal bellows are profiled on their top and bottom so that their production robustness is increased and the negative consequences of
  • Fig. 16 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the flexures 13 are formed by thin-walled tubes with shafts 26.
  • the waves 26 extend the linear adjustment range of the flexures 13.
  • an elliptical shape can be selected, which increases the linear adjustment range with the same wide installation space longer profile.
  • Fig. 17 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the flexures 13 are formed by angled spring plates, each representing a profile and represent a reduction to the basic principle.
  • the projection of the profile takes place in the x-y plane, which contains both sections in the x-direction and sections in the y-direction, in the z-direction.
  • Fig. 18 shows details of an alternative preferred
  • Receiving element 12 are formed in the x-z plane.
  • Ball bearings may alternatively be formed by plain bearings.
  • the flexures 13 formed by the ball bearings or plain bearings have a high rigidity in the z-direction.
  • FIG. 19 shows the swing arm suspension 08 shown in FIG. 1 with the swing arm 03 in a perspective view. The swing arm 03 is so by the swing arm 08
  • rocker arm suspension 08 The characteristics of rocker arm suspension 08 are a rigid coupling of rocker arm 03 at fulcrum 09 to translations in the x-y plane and low rigidity against small rotational deflections about fulcrum 09 in the directions tangential to the x-axis and y-axis.
  • the swing arm suspension 08 is between the swing arm 03 and the housing 07 at rest (shown in FIG. 1) and preferably near the lens thread 14
  • the swing arm 08 is by a
  • Lasers by means of a jet or by lithography, made as a shaped thin sheet of high elasticity. It preferably consists of a spring steel or another
  • Spring material for example made of a hardened
  • the swing arm 08 preferably has an opening 28 to the swing arm 03rd
  • the swing arm 08 can with the swing arm 03
  • the shape of the swing arm 08 can be optimized for a certain range of rotation and a certain maximum actuator force so that it is sufficient against the spring forces of all bending elements of the positioning, ie the coupling element 11 and the flexures 13, the desired maximum travel achieve.
  • the oscillating arm suspension 08 has on its surface of the thin sheet metal element strain gauges 29 as position sensors. These strain gauges 29 may be connected as a half or full bridge. The full bridge is electronically and mechanically symmetrical, which is why nonlinearities from various sources are good
  • strain gauges 29 are required per axis, namely one of the strain gauges 29 per arm of the swing arm 08.
  • the two strain gauges 29 can either side by side, or on the Blechober- and -Schseite
  • Fig. 20 shows the swing arm suspension 08 of an alternative preferred embodiment of the positioning system according to the invention.
  • an in-plane curved path 31 is formed between the swing arm 03 (shown in FIG. 19) and suspension points 32 to introduce a minimum lateral softening which results in the swing arm suspension 08 for relatively large deflections of the swing arm 03 not stiffened nonlinear.
  • FIG. 21 shows the oscillating arm suspension 08 shown in FIG. 19 in a detailed view.
  • the extension measurement strip ⁇ are particularly shown 29, which for reasons of space and sensitivity preferably are formed by HalbleiterdehnmessstMake.
  • FIG. 22 shows a first electrical circuit of FIG
  • Deflection in the y-direction is a full bridge of Dehnmess ⁇ strip 29 formed.
  • the determined by the strain gauges 29 position can either be read by a corresponding signal chain or can be used as an actual signal in a control loop.
  • the positioning system is not controlled from the outside by directly specifying the actuator voltage, but by specifying and changing the respective target position on the control loop.
  • FIG. 23 shows a second electrical connection of the strain gauges 29 shown in FIG.
  • Deflection in the x-direction is a full bridge of Dehnmess ⁇ strip 29 formed.
  • Fig. 24 shows the swing arm suspension 08 of a preferred embodiment of the positioning system.
  • This embodiment of swing arm suspension 08 was constructed by computer modeling. Computer modeling allows optimal placement of the strain gauges 29 (shown in FIG.
  • Fig. 25 through Fig. 32 show alternative preferred execution ⁇ shape of the actuators 01.
  • the already shown in Fig. 1 Actuators Ol are preferably formed by voice coil actuators, each having the static coil 06 and the moving core 05.
  • the moving core 05 is with the lever arms
  • the moving core 05 can move up and down without losing the rotational movement of the swing arm
  • the moving core 05 is also guided on the opposite side of the magnetic coil 06 by a flexure (not shown), so that the drive is completely friction-free and the position resolution of the scanner is not limited by friction.
  • the actuator 01 shown in FIG. 1 consisting of the magnet coil 06 and of the ferromagnetic / paramagnetic core 05 can nevertheless have a limiting effect, which is due to the quantized "folding over" of the white areas in the solid state kind
  • the actuator 01 alternatively alternatively comprises a stationary magnetic coil and a moving magnetic coil (not shown).
  • the lever arms 02, the pendulum arm suspension 08 and the wire elements 41 are above the actuators 01 to run the swing arm 03 long, whereby an amplification of the movement is achieved.
  • Fig. 25 shows the actuators 01 shown in Fig. 1 in an alternative preferred arrangement in which the lever arms 02, the pendulum arm 08 and the wire elements 41 are arranged below the actuators 01, whereby a
  • Fig. 26 shows details of an alternative preferred one
  • Embodiment of the positioning system according to the invention in which the actuators O1 are formed of movable air-core coils 43 and static cores 44.
  • This embodiment has the advantage of lower moving mass and consequently higher resonance frequency of the positioning system with it
  • Fig. 27 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the actuators oil act laterally, so that they exert a force on the swing arm 03 without a lever arm.
  • This force is preferably transmitted via a slide bearing, for example via a ball-sapphire bearing 46 or via a bending element (not shown), so that the movement in the other axis is not hindered.
  • Fig. 28 shows details of an alternative preferred one
  • Embodiment of the positioning system according to the invention in which the actuators 01 are formed by electromagnetic actuators and act laterally.
  • the electromagnetic actuators 01 are preferably voice-coil actuators, in which the core 05 or the magnet coil 04 is moved.
  • Fig. 29 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the actuators 01 are formed by piezo stack.
  • Fig. 30 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the actuators 01 are formed by piezo Bender.
  • the actuators 01 are alternatively preferred by Piezo Walker, z. As stick-slip or resonant formed.
  • Fig. 31 shows details of an alternative preferred one
  • Embodiment of the positioning system according to the invention in which the actuators Ol are formed by servomotors, ie by electric motors with linear drive and position control.
  • Fig. 32 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention in which the actuators Ol are formed by piezo tubes with electrodes in the x-direction and in the y-direction.
  • Fig. 33 shows details of a preferred embodiment of the positioning system according to the invention with an actuator 51 in the z-direction.
  • the actuator 51 in the z-direction is preferably formed by a piezo-disk Bender and allows in the embodiment shown approximately 100 ym travel. It can be in the shown in Fig. 1
  • the piezo disk bender 51 is a flat, annular element which, with the periphery held fixed, depends on an applied one
  • the piezo disk bender 51 is held at its periphery by a plurality of piezo disk holders 52, which are alternately connected to the flexures 13 (shown in FIG. 1) with the receiving element 12, for example, with screws (not shown) and respectively an edge of the piezo disk Benders 51 z. B. are connected by adhesive.
  • the contact between the measuring head support 53 and the measuring head 16 is kinematically formed, for. B. by three bearing balls and three radial V-shaped depressions on the opposite side.
  • the actuator 51 is preferably in the z-direction to
  • a voice coil actuator (not shown), which is preferably integrated into the receiving element 12 or in the measuring head 16 and preferably a Biegeelement Adjust (not shown).
  • Fig. 34 shows details of an alternative preferred
  • Embodiment of the positioning system according to the invention which also has like the embodiment shown in Fig. 33, the actuator 51 for the z-direction.
  • FIGS. 35 and 36 show preferred embodiments of the positioning system according to the invention with protective devices. Many interesting applications of the positioning system, particularly when designed in a microscope objective format, involve environmental conditions such as liquids, dust, etc. which could block or destroy elements of the positioning system.
  • Fig. 35 shows details of a preferred embodiment of the positioning system according to the invention with a rubber apron
  • the movable measuring head 16 is sealed without hindering its function with the rubber skirt 56 against the housing 07 at rest.
  • the rubber apron 56 covers the entire lower portion of the positioning system and has a central opening for the measuring head 16.
  • the flexible rubber skirt 56 was ⁇ with its central opening under a
  • Rubber apron 56 is made of a soft elastic
  • Corrugated profile in the manner of a bellows, which allows her to be moved in its center preferably several millimeters from its edge.
  • FIG. 36 shows details of a preferred embodiment of the positioning system according to the invention with a collision contactor.
  • a danger for the positioning system in everyday use is namely a collision, d. H. the approach of the
  • the measuring head 16 is in the receiving element 12 with a circumferential lip 61.
  • the flexible rubber skirt 56 is designed so that it can also follow this movement of the measuring head 16 in the z-direction. Furthermore, the collision protection with the
  • FIGS. 37 and 38 show details of preferred embodiments of a microscope according to the invention, which basically comprises the positioning system according to the invention. Since the beam path through the central axis of the positioning system shown in Fig. 1 is open and the positioning system in
  • Form factor of a standard microscope objective in the lens ⁇ recording a light microscope can be kept, it is in principle possible to include the beam path of the light microscope in measurements. Examples include the mere observation of the interaction of the measuring head 16 with the sample or with the workpiece (not shown), the introduction of light, for example for fluorescence excitation, for
  • At least one focus lens 63 is preferably arranged in a collimated beam path 64, which is statically aligned with the resting housing 03 (shown in FIG Fig. 3) is connected.
  • the measuring head 16 moves in the image field of the optical microscope against the background of a static sample or a static workpiece.
  • At least one lens 66 is preferably fixed in the swing arm 03 (shown in FIG. 1) or in the measuring head 16.
  • the lens 66 moves with the oscillating arm 03 or with the measuring head 16. If, for example, the collimated beam path 64 of the microscope is confocal directly with the working distance of the measuring head 16 to a specimen (not shown) directly on the lens 66 with focal distance fixed in the measuring head 16. arranged, a confocal tracking of the measuring head 16 and the optical microscope is already given. Only the angle of incidence of the beam path 64 on the sample varies with the scanner position of the positioning system.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un système de positionnement multi-axe mécanique pour positionner et guider avec précision un élément de mesure ou un élément de manipulation dans au moins deux axes d'un plan x-y ainsi qu'un microscope pourvu du système de positionnement multi-axe selon l'invention. Le système de positionnement comporte un bras oscillant (03) orienté perpendiculairement au plan x-y et pivotant autour d'un point de rotation (09) et des actionneurs (01) pour exercer des forces sur le bras oscillant (03) dans la direction de l'axe x et dans la direction de l'axe y. Le système de positionnement comporte en outre un élément de réception (12) mobile dans le plan x-y pour recevoir l'objet (16, 66), l'élément de réception (12) étant accouplé à une extrémité du bras oscillant (03).
PCT/EP2014/066250 2013-07-31 2014-07-29 Système de positionnement multi-axe pour positionner un objet dans un plan x-y ainsi que microscope WO2015014823A1 (fr)

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DE102013012941.9 2013-07-31
DE201310012941 DE102013012941A1 (de) 2013-07-31 2013-07-31 Langreichweitiger Mehrachsen-Scanner im Mikroskop-Objektivformat

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JPH06105569A (ja) * 1992-09-24 1994-04-15 Olympus Optical Co Ltd 超音波アクチュエータ
US5880465A (en) 1996-05-31 1999-03-09 Kovex Corporation Scanning confocal microscope with oscillating objective lens
DE10210257A1 (de) * 2002-01-14 2003-08-14 Physik Instr Pi Gmbh & Co Kg Piezoelektrischer Aktor
GB2411288A (en) * 2004-02-20 2005-08-24 Melles Griot Ltd Positioner device
DE102011121928A1 (de) 2011-08-01 2013-02-07 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren und Anordnung zum Betreiben eines dynamischen Nanofokussiersystems

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KR100761059B1 (ko) * 2006-09-29 2007-09-21 파크시스템스 주식회사 오버행 샘플 측정이 가능한 주사 탐침 현미경
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Publication number Priority date Publication date Assignee Title
JPH06105569A (ja) * 1992-09-24 1994-04-15 Olympus Optical Co Ltd 超音波アクチュエータ
US5880465A (en) 1996-05-31 1999-03-09 Kovex Corporation Scanning confocal microscope with oscillating objective lens
DE10210257A1 (de) * 2002-01-14 2003-08-14 Physik Instr Pi Gmbh & Co Kg Piezoelektrischer Aktor
GB2411288A (en) * 2004-02-20 2005-08-24 Melles Griot Ltd Positioner device
DE102011121928A1 (de) 2011-08-01 2013-02-07 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren und Anordnung zum Betreiben eines dynamischen Nanofokussiersystems

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