WO2015010783A1 - Objectif modulaire de microscope pour milieu d'immersion - Google Patents

Objectif modulaire de microscope pour milieu d'immersion Download PDF

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Publication number
WO2015010783A1
WO2015010783A1 PCT/EP2014/002007 EP2014002007W WO2015010783A1 WO 2015010783 A1 WO2015010783 A1 WO 2015010783A1 EP 2014002007 W EP2014002007 W EP 2014002007W WO 2015010783 A1 WO2015010783 A1 WO 2015010783A1
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WO
WIPO (PCT)
Prior art keywords
lens
microscope
correction device
tube
correction
Prior art date
Application number
PCT/EP2014/002007
Other languages
German (de)
English (en)
Other versions
WO2015010783A8 (fr
Inventor
Saiedeh SAGHAFI
Original Assignee
Dodt, Hans-Ulrich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dodt, Hans-Ulrich filed Critical Dodt, Hans-Ulrich
Priority to DE112014003369.3T priority Critical patent/DE112014003369A5/de
Publication of WO2015010783A1 publication Critical patent/WO2015010783A1/fr
Publication of WO2015010783A8 publication Critical patent/WO2015010783A8/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration

Definitions

  • the present invention relates to the use of a microscope objective for an immersion medium for which the microscope objective was not originally intended.
  • An object of the present invention is to enable microscopy also with immersion media with refractive indices for which no lenses are available so far.
  • a correction device for a microscope objective which is provided and designed for a first predetermined immersion medium or for use in air, for correcting an image present when used with a second predetermined immersion medium.
  • tion error of the lens comprising a lens, and a tube in which the lens is held, wherein the tube is connectable to the microscope, and wherein the correction means for arrangement immediately downstream lunstower of the lens or in the afocal or parallel beam path of a microscope provided and is trained.
  • the correction device can be designed to correct one or more aberrations resulting from use not intended by the manufacturer of the objective, in particular by use with an immersion medium with an unintentional refractive index.
  • the correction device is designed, in particular, on the basis of the focal lengths, the materials, the thicknesses, the surface curvatures and the arrangement of the lens or several lenses for correcting a spherical and / or chromatic aberration, a barrel and / or pincushion distortion and / or a coma.
  • the correction device may comprise one or more lenses in one or more lens groups, each of which may be directly grasped or otherwise connected to the tube or indirectly connected to the tube.
  • An example of a correction device comprises three lenses which are either achromatic or consist exclusively of fluorite glass or another material with low dispersion.
  • Another example of a correction device comprises only a lens made of fluorite glass or other low dispersion material.
  • the correction device may comprise one or more fluorite glass single or achromatic or lens groups or lenses or lens groups and one or more aspheric lenses.
  • the tube is in particular rigid, but releasably connectable to the microscope, for example by positive engagement, adhesion or material bond.
  • the tube comprises steel, brass, another metal or another rigid material.
  • the use of an existing lens for air or a particular immersion medium along with the corrector may be a cost effective alternative to recalculating and producing a lens suitable for another different refractive index immersion medium.
  • a correction device as described here, has in particular exclusively stationary lenses.
  • the correction device is provided in particular for a predetermined objective and is designed to correct its aberration when using a predetermined clarification medium.
  • the lens can be displaced relative to the tube in order to allow adaptation of the correction effect to the refractive index of an immersion medium used or to a plurality of objectives.
  • Adaptability of the correction effect by a mobility of one or more lenses of the correction device relative to each other and / or relative to the tube may allow the correction device to be used for a plurality of different clarification media having different refractive indices and / or for a plurality of different objectives.
  • a correction device as described here further comprises a positioning ring or another actuating device for manually displacing the displaceable lens.
  • a correction device as described here, is provided and configured in particular for the arrangement between the objective and the microscope tube of a microscope.
  • a correction device comprises in particular a first fastening device for fastening a lens to the correction device and a second fastening device for connecting the correction device with a microscope tube of a microscope.
  • the fastening devices are arranged in particular at opposite or mutually remote ends of the correction device.
  • the fastening devices are each provided in particular for rigid but detachable connection with a microscope tube or with a lens and designed, for example by means of a positive, non-positive or cohesive connection.
  • a correction device as described here, is provided and designed in particular for use with a lens with a focal length of at least 4 mm.
  • the correction device is intended in particular for use with a long-focal-length objective with a focal length in the range of 6 mm to 20 mm or in the range of 8 mm to 20 mm or in the range of 10 mm to 14 mm, which may be provided for example for material microscopy.
  • a correction device as described herein is particularly intended and configured for use with a predetermined objective and for correcting its aberration when used with an immersion medium having a predetermined refractive index.
  • a correcting device as described herein is particularly intended and adapted for use with a predetermined water immersion objective and for correcting one or more aberrations of the water immersion objective when used with an immersion medium having a refractive index different from the refractive index of water.
  • a water immersion objective is a lens designed and constructed for use with water as the immersion medium.
  • One Clearing medium with this refractive index is used, for example, in the method known as CLARITY.
  • the lens (41, 42) is particularly coated on one side.
  • a correction device as described here, is provided and designed in particular for use in optical disc microscopy.
  • a correction system for a microscope objective intended and adapted for a first predetermined immersion medium or for use in air for correcting a aberration of the objective in use with a second predetermined immersion medium comprises a correction device as described herein, and a dipping cap with a transparent window component and a tube in which the edge of the window component is grasped, the correction device and the dipping cap being matched to one another.
  • a correction system for a microscope objective intended and adapted for a first predetermined immersion medium or for use in air for correcting a aberration of the objective in use with a second predetermined immersion medium comprises a correction device as described herein, and a tube.
  • the tube is in particular a microscope tube with a tube lens on an end facing away from an object to be viewed and an image sensor end, wherein the correction means for an arrangement on the side facing away from the tube lens and facing an object to be viewed end of the microscope tube is provided and formed.
  • a dipping cap for a lens of a microscope comprises a transparent window component, a tube in which the edge of the window component is grasped in a liquid-tight manner, and an adjusting device, which has a connection. Shifting of the window component in a direction parallel to the optical axis of a microscope connected to the dive cap allows.
  • the edge of the window component is in particular liquid-tightly held in the tube of the dip cap, so that no liquid can penetrate between the window component and the tube.
  • a sealing ring can be pressed by a screw ring or in some other way between the window component and the edge of the tube of the dipping cap.
  • the sealing ring has a chemically inert material, which is not attacked or chemically modified by the intended clarification medium or the intended clarification media.
  • a use of a sealing ring has, for example, over an equally usable bonding of the window component with the tube of the dip cap the advantage that the window component after damage (for example, by placing on the preparation) can be replaced.
  • the correction device and the dipping cap are matched to one another, in particular with regard to the refractive index, the position, the thickness and possibly the curvature of the window component.
  • the displacement of the window component can be accompanied by a rotation.
  • the adjusting device in particular comprises a thread which couples a rotational movement with a linear displacement of the window component.
  • the displacement of the window component can allow an adaptation of the objective and the correction device to an immersion medium, in particular a correction of an aberration dependent on the refractive index of the immersion medium used.
  • a correction system includes a correction device as described herein and a dipping cap as described herein.
  • the dipping cap further comprises, in particular, an adjusting device which allows a displacement of the window component in a direction parallel to the optical axis of a microscope connected to the dipping cap,
  • the adjusting device comprises a pair of corresponding and interlocking threads, which are not simultaneously provided for fastening the dipping cap to the objective and convert a relative rotational movement into a relative translational movement.
  • a correction system as described here further comprises a marking by means of which a setting position of the adjusting device is characterized by a refractive index or by an immersion medium having a specific refractive index.
  • the tag comprises one or more alphanumeric characters or other symbols or a pointer.
  • the window component in particular comprises fluorite glass.
  • the correction system may include a dip-cap without adjusting means.
  • the dipping cap is in particular - for example by means of a stop - formed so that the window member has a predetermined distance from the lens for which it is intended.
  • a correction system as described herein further includes a further dipping cap that differs from the dipping cap with respect to the intended spacing of the window component from the lens or otherwise, the dipping cap and others
  • Dive cap for use with different immersion media with different predetermined refractive indices are provided and designed.
  • a correcting system for a microscope objective intended and adapted for a first predetermined immersion medium or for use in air, for correcting a aberration of the objective in use with a second predetermined immersion medium and correcting for use with a third predetermined immersion medium present aberration of the lens comprises a first dip cap for the second predetermined te immersion medium and a second dip cap for the third predetermined immersion medium.
  • the correction system may further include one or more other immersion caps for immersion media having one or more other predetermined refractive indices.
  • the immersion caps are in particular designed so that, when intended use, the window component of each dip cap has a different predetermined distance from the lens for which the correction system is provided and designed.
  • the intended use encompasses, in particular, the arrangement of the respective immersion cap which is completely pushed onto the objective for which the correction system is provided and designed, or which has been screwed on or screwed on.
  • the dive cap for example, a mechanical stop, which abuts the intended use on the lens.
  • the immersion caps can have window components with different thicknesses, made of different materials and / or with differently curved surfaces.
  • a microscope includes a correction device as described herein, a dip-cap as described herein, or a correction system as described herein.
  • Figure 1 is a schematic sectional view of a microscope with a
  • Figure 2 is a schematic sectional view of another microscope with a correction device
  • FIG. 1 shows a schematic representation of a section through a microscope 10 with an objective 20 at the lower or upstream end of a microscope tube 50.
  • the sectional plane contains the optical axis of the microscope 10.
  • the microscope 10 has at its upper or downstream end of the microscope tube 50 a tube lens 58 and an image sensor 59. Between the lens 20 and the tube lens 58, the beam path is afocal and parallel, d. H. without the tube lens 58, an image would be generated at infinity.
  • the image sensor is located in the focal plane of the tube lens 58 and produces a sharp image of the lens generated (and at infinity) intermediate image on the image sensor 59th Der
  • Image sensor 59 detects the image generated by the tube lens 58 and generates an image signal representing the acquired image.
  • the microscope 10 is provided and designed in particular for light-disk microscopy (also referred to as light-sheet microscopy), which is used, for example, for the three-dimensional detection of biological samples.
  • the structure 80 to be observed has, for example, a fluorescent dye and is disposed in a clarification medium 70, which is transparent to the fluorescent light of the dye and makes the structure to be examined transparent, for example in dibasic ester (DBE).
  • DBE dibasic ester
  • the surface of the clarification medium 70 has no waves due to lack of excitation, it is shown wavy here in order to make it recognizable as the surface of a liquid.
  • a thin lens 72 is generated in the clarifying medium 70, which illuminates only a thin layer of the structure to be observed 80, so that fluorescence is excited only within this thin layer.
  • the thin lens 72 is shown without hatching, but of course also contains the clarification medium 70th
  • the objective 20 has a plurality of lenses 21, 22, 23 in a tube 24.
  • the tube 24 of the objective 20 has, at its upper end or the downstream of the microscope tube 50 of the microscope 10, a thread 26 which is suitable for fastening the objective 20 by screwing it into a corresponding thread 56 on the observer. Jektiv 20 facing the end of the microscope tube 50 of the microscope 10 is provided.
  • the objective 20 is intended and designed for a very specific application.
  • the lens for use in air or for use with an immersion medium having a predetermined refractive index is provided and formed with a dip cap 30 (also called an immersion cap) or without a dip cap.
  • the lens 20 is optimized. That is, the lens 20, all of its lenses 21, 22, 23, their materials, thicknesses, surface curvatures, arrangement and their pitches are calculated and optimized so that the lens 20 is at the intended use and at a predetermined wavelength or within a given wavelength predetermined wavelength range has minimal aberrations or approximately no aberrations and thus the maximum possible imaging power and resolution.
  • the objective 20 is used differently than intended, for example, with an immersion medium instead of in air, with a different than the intended immersion medium or with a dipping cap instead of without
  • Dive cap it has aberrations. These aberrations include spherical and chromatic aberration, coma, barrel and / or pincushion distortion.
  • the deviation of the refractive index from the predetermined refractive index results in one or more aberrations.
  • a correction device 40 is arranged between the objective 20 and the microscope tube 50 of the microscope 10.
  • the correction device 40 has a plurality of lenses 41, 42 in a tube 44.
  • Each of the lenses 41, 42 may be rigidly or movably disposed in the tube 44.
  • the correction device 40 has only one lens or two or three or more lenses or lens groups, wherein a plurality of lenses can be cemented together.
  • the lenses or lens groups may each be achromatic or apochromatic or formed.
  • One or more lenses may comprise or be made of calcium fluoride or fluorite.
  • Several lenses 41, 42 may form a lens group, for example, be cemented together.
  • the tube 44 of the correction device 40 has, at its end facing the objective 20, a thread 48 corresponding to the thread 26 on the objective 20.
  • the tube 44 of the correction device 40 has, and at its end facing the microscope tube 50, a thread 49 corresponding to the thread 56 on the microscope tube 50.
  • the tube 44 of the correction device 40 is connected on one side by the threads 48, 26 to the objective 20 and on the other side by the threads 49, 56 to the microscope tube 50.
  • In the intended configuration are (in particular annular) end faces on the tube 44 of the correction device 40 and the lens 20 to each other. Furthermore, (in particular annular) end faces abut each other on the tube 44 of the correction device 40 and on the microscope tube 50.
  • the connection between lens 20, correction device 40 and microscope tube 50 are each rigid, but solvable.
  • the already mentioned dipping cap 30 is arranged on the microscope 10.
  • the dipping cap 30 comprises a window component 31 and a tube 33, in whose lower or the structure 80 to be observed and the end remote from the microscope tube 50, the window component 31 is inserted.
  • the connection between the window component 31 and the tube 33 of the immersion cap is designed to be liquid-tight, so that no clarification medium 70 can penetrate into the immersion cap 30 and reach the objective 20.
  • sealing ring For liquid-tight connection of the window component 31 with the edge of the tube 33 is in particular a not shown in Figure 1 sealing ring intended.
  • This sealing ring has a material which is as chemically inert as possible or, above all, is not chemically modified by the intended clarification medium 70, which is often chemically reactive.
  • the sealing ring can be pressed, for example, by a screw ring, between a radially inwardly projecting lip or a radially inwardly projecting collar on the edge of the tube 33 and the window component in order to develop its sealing effect.
  • the tube 33 of the dipping cap 30 can be connected directly to the correction device 40 directly by a thread, a clamping connection, a latching connection or in another way positively, positively and / or materially, but in particular non-destructively detachable.
  • the dipping cap 30 in the illustrated example further includes a fastening ring 34 which is rigidly but in particular releasably connected to the correction device 40, for example, as indicated in Figure 1 positively in the form of a latching connection.
  • the fastening ring 34 is connected to the tube 33 via a pair of corresponding threads 35. Due to the thread 35, rotation of the tube 33 relative to the attachment ring 34 is accompanied by an axial translational movement.
  • the tube 33 and thus also the window component 31 can be displaced parallel to the optical axis of the microscope 10.
  • the dipping cap 30 can be connected to the objective 20 or to the microscope tube 50 in a departure from the illustration in FIG.
  • the correction device 40 is provided and designed to correct aberrations that result from a use of the objective 20 that is not intended by the manufacturer of the objective 20.
  • the correction effect can be achieved by the correction device 40 alone, in particular if the objective 20 is intended for use with a dip cap whose properties correspond to those of the dip cap 30 used here, or if the objective 20 is intended for use without a dipping cap and deviating 1 is used without the dipping cap 30, for example in the case of a water immersion objective.
  • the correction effect can be generated by the combination of the correction device 40 and the dipping cap 30, wherein both the correction device 40 and the dipping cap 30 contribute to the correction. In this case, the correction device 40 and the dipping cap 30 form a correction system.
  • the correction effect can be set or adjusted to an actual use within a predetermined range by suitable positioning of the window component 31.
  • suitable positioning of the window component 31 For example, by adjusting or positioning the window component 31, an adaptation to the exact refractive index of the clarification medium 70 can take place.
  • a scale 36 and a pointer or other markings may be provided on the tube 33 and on the mounting ring 34 of the dipping cap 30, opposite one another, by means of which one or more predetermined positions for the treatment media 70 are marked with predetermined refractive indices.
  • window component 31 of the dipping cap 30 can be moved relative to the objective as illustrated with reference to FIG. 1, an adaptation of the correction effect to different objectives can also be possible by suitable positioning of the window component 31.
  • FIG. 2 shows a schematic representation of a section through another microscope 10, which in some features, properties and functions may be similar to the variants illustrated with reference to FIG. 1 or those already described.
  • the microscope 10 shown in FIG. 2 differs from the microscope illustrated with reference to FIG. 1, inter alia, in that an eyepiece 60 is provided at the upper or downstream end of the microscope tube 50. Between the lens 20 and the eyepiece 60th the beam path is not quite parallel, but there is a real intermediate image close to the eyepiece 60 before.
  • the tube lens 58 and the image sensor 59 can be replaced by an eyepiece 60, as indicated in FIG.
  • the correction device 40 described below can also be arranged in an afocal and parallel beam path of the microscope 10 in the example illustrated with reference to FIG.
  • the eyepiece 60 indicated in FIG. 2 is replaced by a tube lens and an image sensor, as indicated in FIG.
  • the microscope 10 shown in FIG. 2 differs from that shown in FIG. 1 further in the design and arrangement of the correction device 40.
  • the correction device 40 does not constitute a mechanical connection between the objective 20 and the microscope tube 50 and Microscope tube 50 are rather - especially as provided by the manufacturer or manufacturers - directly connected to each other, for example by corresponding threads 26, 56th
  • the correction device 40 is placed on the objective 20 within the microscope tube 50 and inserted into the tube 24 of the objective 20.
  • the correction device 40 is positively held in a predetermined position.
  • the correction device 40 can be held in a form-fitting, force-fitting or material-locking manner on the objective 20 and / or on the microscope tube independently of the direction of gravity.
  • the correction device 40 comprises an adjusting ring 45, which is connected to the tube 44 by a pair of corresponding threads 46 on the adjusting ring 45 and on the tube 44.
  • the adjusting ring 45 has a larger diameter than the tube 44, so it is like a collar radially outward over and lies on the Microscope tube 50 facing edge of the lens 20. Due to the pair of corresponding threads 46, a rotation of the adjusting ring 45 relative to the tube 44 is accompanied by a translatory relative movement. Therefore, by rotation of the adjusting ring 45 relative to the tube 44, the position of the tube 44 and thus the position of the lenses 41, 42 of the correction device 40 in the direction parallel to the optical axis of the microscope 10 are moved. This allows a change and adjustment of the correction effect of the correction device 40.
  • the correction device 40 may comprise one or more lenses which are directly or indirectly rigidly connected to the adjustment ring 45.
  • rotation of the adjusting ring 45 relative to the tube 44 causes movement of lenses or lens groups relative to one another.
  • On the tube 44 and on the adjusting ring 45 can be arranged opposite one another markings, in particular a scale and a pointer, which facilitate setting a desired correction effect - for example, a clarifying medium 70 with a specific refractive index or for a particular lens 20.
  • one or more lenses 41, 42 can be displaceable relative to the tube 44 of the correction device 40 in order to change the correction effect of the correction device 40.
  • This can be made possible by corresponding threads.
  • the correction device 40 may be designed such that a change in the correction effect is also possible if the correction device is installed in the microscope 10, that is to say the objective 20 and the microscope tube 50 are connected to one another.
  • the example shown in Figure 2 differs from that shown with reference to Figure 1 further characterized in that the tube 33 of the dip cap 30 not with the Korrekturein device 40, but with the lens 20th connected is. Similar to the example shown with reference to FIG. 1, the tube 33 of the dipping cap 30 is connected to the objective 20 by a fastening ring 34, and by rotation of the tube 33 relative to the fastening ring 34, the window component 31 can be displaced parallel to the optical axis of the microscope 10 become.
  • the dipping cap 30 can be connected to the correction device 40 or to the microscope tube 50, both rigidly and displaceably.
  • FIG. 3 shows a schematic axonometric sectional illustration of a correction device 40, which in some features, properties and functions of the correction device is similar to the microscope illustrated with reference to FIG. The following describes features, properties and functions in which the correction device shown in FIG. 3 differs from that of FIG.
  • the sectional plane of FIG. 3 contains the optical axis of the correction device 40
  • the correction device 40 shown in FIG. 3 has a greater length than indicated in the examples illustrated with reference to FIGS. 1 and 2. This length can be greater than its diameter and in particular be several cm.
  • the correction device shown in FIG. 3 has three lenses 41, 42, 43 in two lens groups spaced apart from one another. Two lenses 42, 43 are cemented together.
  • the second lens 42 and the third lens 43 can not be cemented together and, in particular, be spaced from each other or only a single lens can be provided instead of the lens group from the second lens 42 and the third lens 43.
  • more than three lenses or only one lens can be provided.
  • Means for fixing the lenses 41, 42, 43 in the tube 44 and for holding the lenses 41, 42, 43 at the intended positions and at the provided intervals may correspond to those known from conventional optical devices.
  • an automatic Tables centering of the lenses can be achieved when the lenses are used.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un dispositif de correction (40) destiné à un objectif (20) de microscope qui est conçu et réalisé pour un premier milieu d'immersion prédéterminé ou pour une utilisation dans de l'air, le dispositif servant à corriger une erreur de représentation de l'objectif (20) présente lors d'une utilisation avec un second milieu d'immersion prédéterminé. Le dispositif comprend une lentille (41, 42) et un tube (44) dans lequel la lentille (41, 42) est maintenue, le tube (44) pouvant être raccordé à un microscope (10). Le dispositif de correction(40) est prévu et réalisé pour être agencé directement optiquement en aval de l'objectif (20) ou sur le chemin optique afocal ou parallèle d'un microscope (10).
PCT/EP2014/002007 2013-07-22 2014-07-22 Objectif modulaire de microscope pour milieu d'immersion WO2015010783A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112014003369.3T DE112014003369A5 (de) 2013-07-22 2014-07-22 Modulares Mikroskopobjektiv für Immersionsmedium

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013012182.5A DE102013012182A1 (de) 2013-07-22 2013-07-22 Modulares Mikroskopobjektiv für Immersionsmedium
DE102013012182.5 2013-07-22

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WO2015010783A1 true WO2015010783A1 (fr) 2015-01-29
WO2015010783A8 WO2015010783A8 (fr) 2015-08-06

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Cited By (6)

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CN109407474A (zh) * 2018-12-26 2019-03-01 长春长光智欧科技有限公司 一种带保护玻璃的浸没头
US10379312B2 (en) 2017-06-02 2019-08-13 Bruker Optik Gmbh Self-centering lens arrangement for a transmitting, refractive optical unit
CN111051956A (zh) * 2017-08-21 2020-04-21 卡尔蔡司显微镜有限责任公司 浸渍显微镜检查
CN111240003A (zh) * 2020-03-26 2020-06-05 苏州睿仟科技有限公司 一种高数值孔径水浸/油浸物镜系统及显微镜扫描系统
GB2595365A (en) * 2016-05-03 2021-11-24 Darcy Tech Limited Downhole apparatus
US11474335B2 (en) * 2017-08-21 2022-10-18 Carl Zeiss Microscopy Gmbh Microscope objective and microscope having such an objective

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EP1431826A2 (fr) * 2002-12-09 2004-06-23 Carl Zeiss SMT AG Objectif de projection, en particulier pour la microlithographie, et méthode de réglage d'un objectif de projection
DE102006021161A1 (de) * 2005-05-25 2006-11-30 Carl Zeiss Smt Ag Projektionsobjektiv insbesondere für die Mirkolithographie
DE102006046675A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Mikrolithopraphische Projektionsbelichtungsanlage
EP2535754A1 (fr) * 2011-06-14 2012-12-19 Leica Microsystems CMS GmbH Microscope à balayage et procédé de représentation optique microscopique d'un objet

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Publication number Priority date Publication date Assignee Title
DE2655041A1 (de) * 1976-12-04 1978-06-08 Zeiss Carl Fa Immersionsobjektiv
EP1431826A2 (fr) * 2002-12-09 2004-06-23 Carl Zeiss SMT AG Objectif de projection, en particulier pour la microlithographie, et méthode de réglage d'un objectif de projection
DE102006021161A1 (de) * 2005-05-25 2006-11-30 Carl Zeiss Smt Ag Projektionsobjektiv insbesondere für die Mirkolithographie
DE102006046675A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Mikrolithopraphische Projektionsbelichtungsanlage
EP2535754A1 (fr) * 2011-06-14 2012-12-19 Leica Microsystems CMS GmbH Microscope à balayage et procédé de représentation optique microscopique d'un objet

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2595365A (en) * 2016-05-03 2021-11-24 Darcy Tech Limited Downhole apparatus
GB2595365B (en) * 2016-05-03 2022-03-09 Darcy Tech Limited Downhole apparatus
US10379312B2 (en) 2017-06-02 2019-08-13 Bruker Optik Gmbh Self-centering lens arrangement for a transmitting, refractive optical unit
CN111051956A (zh) * 2017-08-21 2020-04-21 卡尔蔡司显微镜有限责任公司 浸渍显微镜检查
CN111051956B (zh) * 2017-08-21 2022-06-28 卡尔蔡司显微镜有限责任公司 浸渍显微镜检查
US11474335B2 (en) * 2017-08-21 2022-10-18 Carl Zeiss Microscopy Gmbh Microscope objective and microscope having such an objective
US11543643B2 (en) * 2017-08-21 2023-01-03 Carl Zeiss Microscopy Gmbh Immersion microscopy
CN109407474A (zh) * 2018-12-26 2019-03-01 长春长光智欧科技有限公司 一种带保护玻璃的浸没头
CN111240003A (zh) * 2020-03-26 2020-06-05 苏州睿仟科技有限公司 一种高数值孔径水浸/油浸物镜系统及显微镜扫描系统

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