WO2015000905A1 - Sensor with a sealing coating - Google Patents

Sensor with a sealing coating Download PDF

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Publication number
WO2015000905A1
WO2015000905A1 PCT/EP2014/063973 EP2014063973W WO2015000905A1 WO 2015000905 A1 WO2015000905 A1 WO 2015000905A1 EP 2014063973 W EP2014063973 W EP 2014063973W WO 2015000905 A1 WO2015000905 A1 WO 2015000905A1
Authority
WO
WIPO (PCT)
Prior art keywords
inner housing
sensor
coating
leadframe
housing
Prior art date
Application number
PCT/EP2014/063973
Other languages
German (de)
French (fr)
Inventor
Thomas Jauch
Stephan Jonas
Jochen Zachow
Thomas Rudolph
Thomas Fischer
Original Assignee
Continental Teves Ag & Co. Ohg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Continental Teves Ag & Co. Ohg filed Critical Continental Teves Ag & Co. Ohg
Priority to CN201480038078.0A priority Critical patent/CN105358940B/en
Priority to KR1020157036518A priority patent/KR20160026895A/en
Publication of WO2015000905A1 publication Critical patent/WO2015000905A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/16—Making multilayered or multicoloured articles
    • B29C45/1671—Making multilayered or multicoloured articles with an insert
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135—Double encapsulation or coating and encapsulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/16—Making multilayered or multicoloured articles
    • B29C45/1657—Making multilayered or multicoloured articles using means for adhering or bonding the layers or parts to each other
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the invention relates to a sensor according to the preamble of claim 1 and to a method for producing a sensor according to the preamble of claim 10.
  • Speed sensors are known, such as the wheel speed sensor disclosed in document EP 0 889 774 B1, which comprises a leadframe which is equipped with a sensor element and a signal processing circuit.
  • the sensor element and the signal processing circuit are embedded on the leadframe in a first inner plastic housing, which positioning elements for positioning in one
  • Injection molding tool wherein these positioning elements have fins, which connect tightly with an outer plastic housing, in which the first inner plastic housing is embedded.
  • Such an outer housing for example made of thermoplastic, in particular if its housing wall has a relatively low material thickness, can sometimes tend to absorb moisture and to let in the interior. In addition, components of the outer housing can get into the interior, which may interfere with electronic components. Particularly with relatively small dimen ⁇ measurements of the sensor, whereby the distances between conductor tracks of the lead frame and between electrical contacts are relatively small, can be caused to possibly fault currents and leakage currents.
  • the invention is based on the object to propose a sensor and a method for producing a sensor which is relatively reliable or robust and / or relatively inexpensive and / or relatively well sealed against environmental influences or insensitive, and in particular has a relatively high durability of the seal or insensitivity.
  • An inner housing is preferably understood as an inner housing and an outer housing preferably as an outer housing.
  • an inner housing is in particular a housing which houses one, particularly preferably completely, one or more components, particularly preferably electronic components, which are arranged on a leadframe.
  • the outer housing is preferably formed of thermoplastic and / or thermosetting plastic material.
  • a component such as a sensor element or a signal processing circuit
  • an electrical contacting and / or an attachment of the component to the leadframe is preferably understood.
  • an electrically leit ⁇ capable leadframe is meant by a leadframe or a stamped grid made of metal.
  • the coating is preferably designed such that it seals at least the first inner housing.
  • sealing it is expediently understood that an ingress of moisture and / or substances that are detachable from the outer housing and can get inward and / or can diffuse from the outer housing to the inside, for example, in the first inner Housing or other internal housing, through which coating is avoided.
  • the sensor preferably comprises one or two or three or more inner housings, which are in particular jointly at least partially embedded in the outer housing.
  • An at least partially embedding a substantially complete embedding or sheathing is advantageously understood or alternatively preferably embedding, at least a portion, such as an inner casing / an electronic component of the outer casing / from which the electronic component is a ⁇ end of the bed inner housing remains uncovered.
  • the sensor element and / or a Sig ⁇ nal kausscrien, in particular integrated in a common sensor element are arranged on the leadframe and is formed from the first inner housing, made of plastic, in particular from epoxy, are enclosed, wherein at least one leadframe structure protrudes from the first inner housing and / or ends substantially flush with the outer surface of the first inner housing as a stump,
  • the coating is formed so that it surrounds the first inner housing from the outside substantially completely sealingly.
  • the sensor element and the signal processing ⁇ circuit are expediently integrated into a common electronic component, for example in an ASIC. It is expedient for the coating to at least partially surround and / or coat the one or more lead frame structures which protrude from the first inner housing or terminate substantially flush with the outer surface of the first inner housing, so that the coating is formed in this way .
  • exit region and / or boundary region of these one or more lead frame structures are sealed to / from the first inner housing with respect to this first inner housing.
  • the senor has at least a first inner
  • first inner housing and the second inner housing are electrically and mechanically connected to each other by at least one intermediate segment of the leadframe and
  • the coating encloses this at least one intermediate segment of the leadframe
  • the coating that surrounds the we ⁇ least one intermediate segment of the lead frame and parts of the first and second inner housing is formed integrally and / or in one piece and is formed sealingly.
  • the part of the housing of the respective inner housing which is directly adjacent to the intermediate segment of the leadframe is preferably coated, or alternatively preferably substantially one fourth or one third or half of the region of the surface of the corresponding inner housing adjacent to the intermediate segment of the leadframe ,
  • the coating is / is preferably produced by means of a plasma coating method and the coating is formed in particular from at least one organosilicate, particularly preferably as a thermosetting lacquer or as a thermosetting coating which is produced or deposited by the plasma coating process.
  • the coating is formed from at least one protective lacquer.
  • the protective lacquer is in particular ⁇ special designed as a lacquer having one or more of the following base materials: acrylic, polyurethane, acrylates, epoxy, silicone-acrylic, modified silicone. It is / is the
  • Protective coating as a coating particularly preferably applied by spraying or dipping is made of a plastic, in particular a thermoplastic or a cast thermoset or a thermosetting potting compound.
  • the sensor is preferably designed as a speed sensor, in particular as a wheel speed sensor, that is, as an alternative, preferably as a speed sensor for the drive motor
  • Motor vehicle and particularly preferably as Kurbelwel ⁇ lensensor or camshaft sensor.
  • the method is expediently designed to produce one or more of the variants of the sensor explained above. It is preferred that after the insertion of the leadframe with at least one electronic component, such as the sensor element and after the subsequent embedding of at least one such electronic component in an inner housing by an injection molding process, one or more parts of the leadframe or as dambar designated lead frames or a Dambars, which protrude after this injection molding process from this inner housing, are separated, for example by punching or free dancing. As a result, at least one stump of the leadframe / dambar is produced, which ends essentially flush with the surface of an inner housing.
  • the invention also relates to the use of the sensor in motor vehicles, in particular as a speed sensor.
  • FIG. 1 and FIG. 2 each show an embodiment of the sensor, which comprises a leadframe 3 on which electronic components (not illustrated in each case) are arranged, which are embedded in a first inner housing 1 and a second inner housing 2. It is for example arranged in accordance with the first inner housing 1, a sensor element and a signal processing circuit ⁇ and embedded in the second inner housing 2, a capacitor as an electronic protection element.
  • the first and second inner housings 1 and 2 are completely sealed by coating 3, wherein the coating 3 also completely or integrally completely covers the non-lead frame except for the ends of the two leadframe legs 7, which are provided for electrical contacting of the sensor are, as far as the leadframe 3 protrudes from the inner housings 1 and 2.
  • First inner housing 1 has substantially flush on its outer surface a stump 5 of the leadframe or a leadframe structure, which is also covered by coating 3.
  • Be ⁇ coating 3 is in contrast to FIG. Configured such that it encloses an intermediate segment of the lead frame 3, and also at least the portions of the first inner housing 1 and the envelopes the second inner housing 2, in which the at least one intermediate segment of the leadframe enters into these housing, said coated area, for example, each substantially equal to a third of the surface of the first inner and second inner housing 1, 2.
  • Blunt 5 of the leadframe is not covered or covered by coating 3 in this embodiment.

Abstract

The invention relates to a sensor comprising at least one first inner housing (1) in which a sensor element is at least partially embedded, said sensor element being arranged a lead frame (3). The at least one first inner housing (1) is embedded at least partially in an outer housing, said sensor being characterized in that the at least first inner housing has an at least partial coating (4).

Description

Sensor mit abdichtender Beschichtung  Sensor with sealing coating
Die Erfindung betrifft einen Sensor gemäß Oberbegriff von Anspruch 1 sowie ein Verfahren zur Herstellung eines Sensors gemäß Oberbegriff von Anspruch 10. The invention relates to a sensor according to the preamble of claim 1 and to a method for producing a sensor according to the preamble of claim 10.
Es sind Geschwindigkeitssensoren bekannt, wie beispielsweise der in Druckschrift EP 0 889774 Bl offenbarte Raddrehzahlsensor, der einen Leadframe umfasst, welcher mit einem Sensorelement und einer Signalverarbeitungsschaltung bestückt ist. Das Sensorelement und die Signalverarbeitungsschaltung sind auf dem Leadframe in ein erstes inneres Kunststoffgehäuse eingebettet, welches Positionierelemente zur Positionierung in einem Speed sensors are known, such as the wheel speed sensor disclosed in document EP 0 889 774 B1, which comprises a leadframe which is equipped with a sensor element and a signal processing circuit. The sensor element and the signal processing circuit are embedded on the leadframe in a first inner plastic housing, which positioning elements for positioning in one
Spritzgusswerkzeug aufweist, wobei diese Positionierelemente Schmelzrippen aufweisen, die sich dicht mit einem äußeren Kunststoffgehäuse verbinden, in welches das erste innere Kunststoffgehäuse eingebettet ist. Injection molding tool, wherein these positioning elements have fins, which connect tightly with an outer plastic housing, in which the first inner plastic housing is embedded.
Solch ein äußeres Gehäuse, beispielsweise aus Thermoplast ausgebildet, insbesondere wenn dessen Gehäusewand eine relativ geringe Materialstärke aufweist, kann manchmal dazu neigen Feuchtigkeit aufzunehmen und ins das Innere durchzulassen. Außerdem können Bestandteile des äußeren Gehäuses in das Innere gelangen, die sich möglicherweise störend auf elektronische Bauelemente auswirken. Besonders bei relativ geringen Abmes¬ sungen des Sensors, wobei auch die Abstände zwischen Leiterbahnen des Leadframes und zwischen elektrischen Kontakten relativ klein sind, können so möglicherweise Fehlströme und Kriechströme bedingt werden. Such an outer housing, for example made of thermoplastic, in particular if its housing wall has a relatively low material thickness, can sometimes tend to absorb moisture and to let in the interior. In addition, components of the outer housing can get into the interior, which may interfere with electronic components. Particularly with relatively small dimen ¬ measurements of the sensor, whereby the distances between conductor tracks of the lead frame and between electrical contacts are relatively small, can be caused to possibly fault currents and leakage currents.
Es ist bekannt diese potentiellen Schwierigkeiten durch die Wahl eines relativ hochwertigen Materials des äußeren Gehäuses zu vermeiden, wobei solche Materialien meist relativ teuer sind. Der Erfindung liegt die Aufgabe zu Grunde, einen Sensor sowie ein Verfahren zur Herstellung eines Sensors vorzuschlagen, welcher relativ zuverlässig bzw. robust und/oder relativ kostengünstig und/oder gegen Umwelteinflüsse relativ gut abgedichtet bzw. unempfindlich ist, und dabei insbesondere eine relativ große Dauerhaftigkeit der Abdichtung bzw. Unempfindlichkeit aufweist. It is known to avoid these potential difficulties by choosing a relatively high quality material of the outer housing, such materials are usually relatively expensive. The invention is based on the object to propose a sensor and a method for producing a sensor which is relatively reliable or robust and / or relatively inexpensive and / or relatively well sealed against environmental influences or insensitive, and in particular has a relatively high durability of the seal or insensitivity.
Diese Aufgabe wird erfindungsgemäß gelöst durch den Sensor gemäß Anspruch 1 sowie das Verfahren gemäß Anspruch 10. This object is achieved by the sensor according to claim 1 and the method according to claim 10.
Ein inneres Gehäuse wird bevorzugt als Innengehäuse verstanden und ein äußeres Gehäuse vorzugsweise als Außengehäuse. Ein inneres Gehäuse ist dabei insbesondere ein Gehäuse, welches ein oder mehrere Bauelemente, besonders bevorzugt elektronische Bauelemente, die auf einem Leadframe angeordnet sind, einhaust, besonders bevorzugt vollständig einhaust. An inner housing is preferably understood as an inner housing and an outer housing preferably as an outer housing. In this case, an inner housing is in particular a housing which houses one, particularly preferably completely, one or more components, particularly preferably electronic components, which are arranged on a leadframe.
Das äußere Gehäuse ist bevorzugt aus Thermoplast und/oder Duroplast als Kunststoffmaterial ausgebildet. The outer housing is preferably formed of thermoplastic and / or thermosetting plastic material.
Unter der Formulierung, dass ein Bauelement, wie beispielsweise ein Sensorelement oder eine Signalverarbeitungsschaltung, auf einem Leadframe angeordnet ist, wird bevorzugt eine elektrische Kontaktierung und/oder eine Befestigung des Bauelements mit dem Leadframe verstanden. Under the formulation that a component, such as a sensor element or a signal processing circuit, is arranged on a leadframe, an electrical contacting and / or an attachment of the component to the leadframe is preferably understood.
Vorzugsweise wird unter einem Leadframe ein elektrisch leit¬ fähiger Leiterrahmen verstanden bzw. ein Stanzgitter aus Metall. Preferably an electrically leit ¬ capable leadframe is meant by a leadframe or a stamped grid made of metal.
Die Beschichtung ist vorzugsweise so ausgebildet, dass sie zumindest das erste innere Gehäuse abdichtet. Unter dem Begriff Abdichten, wird dabei zweckmäßigerweise verstanden, dass ein Eindringen von Feuchtigkeit und/oder von Stoffen, die aus dem äußeren Gehäuse lösbar sind und nach innen gelangen können und/oder aus dem äußeren Gehäuse nach innen diffundieren können, beispielsweise in das erste innere Gehäuse oder ein anderes inneres Gehäuse, durch die Beschichtung vermieden wird. Der Sensor umfasst bevorzugt ein oder zwei oder drei oder mehr innere Gehäuse, welche insbesondere gemeinsam in das äußere Gehäuse zumindest teilweise eingebettet sind. Unter einer zumindest teilweisen Einbettung wird zweckmäßigerweise eine im Wesentlichen vollständige Einbettung bzw. Umhüllung verstanden oder alternativ vorzugsweise eine Einbettung, bei der wenigstens ein Teil, beispielsweise eines inneren Gehäuses/ eines elektronischen Bauelements, von dem äußeren Gehäuse/ von dem das elektronische Bauelement ein¬ bettende innere Gehäuse unbedeckt bleibt. The coating is preferably designed such that it seals at least the first inner housing. The term sealing, it is expediently understood that an ingress of moisture and / or substances that are detachable from the outer housing and can get inward and / or can diffuse from the outer housing to the inside, for example, in the first inner Housing or other internal housing, through which coating is avoided. The sensor preferably comprises one or two or three or more inner housings, which are in particular jointly at least partially embedded in the outer housing. An at least partially embedding a substantially complete embedding or sheathing is advantageously understood or alternatively preferably embedding, at least a portion, such as an inner casing / an electronic component of the outer casing / from which the electronic component is a ¬ end of the bed inner housing remains uncovered.
Es ist bevorzugt, dass das Sensorelement und/oder eine Sig¬ nalverarbeitungsschaltung, insbesondere in einem gemeinsamen Sensorbauteil integriert, auf dem Leadframe angeordnet sind und von dem ersten inneren Gehäuse, aus Kunststoff ausgebildet, insbesondere aus Epoxy, umschlossen sind, wobei zumindest eine Leadframestruktur aus dem ersten inneren Gehäuse hinausragt und/oder im Wesentlichen bündig an der Außenfläche des ersten inneren Gehäuses als Stumpf endet, It is preferable that the sensor element and / or a Sig ¬ nalverarbeitungsschaltung, in particular integrated in a common sensor element are arranged on the leadframe and is formed from the first inner housing, made of plastic, in particular from epoxy, are enclosed, wherein at least one leadframe structure protrudes from the first inner housing and / or ends substantially flush with the outer surface of the first inner housing as a stump,
wobei die Beschichtung so ausgebildet ist, dass sie das erste innere Gehäuse von außen im Wesentlichen vollständig abdichtend umschließt. Das Sensorelement und die Signalverarbeitungs¬ schaltung sind dabei zweckmäßigerweise in ein gemeinsames elektronisches Bauelement integriert, beispielsweise in einen ASIC. Es ist zweckmäßig, dass die Beschichtung die eine oder mehreren Leadframestrukturen, welche aus dem ersten inneren Gehäuse hinausragen oder im Wesentlichen bündig an der Außenfläche des ersten inneren Gehäuses als Stumpf enden, zumindest teilweise umschließt und/oder beschichtet, so dass die Beschichtung so ausgebildet ist, wherein the coating is formed so that it surrounds the first inner housing from the outside substantially completely sealingly. The sensor element and the signal processing ¬ circuit are expediently integrated into a common electronic component, for example in an ASIC. It is expedient for the coating to at least partially surround and / or coat the one or more lead frame structures which protrude from the first inner housing or terminate substantially flush with the outer surface of the first inner housing, so that the coating is formed in this way .
dass der Austrittsbereich und/oder Grenzbereich dieser einen oder dieser mehreren Leadframestrukturen mit/aus dem ersten inneren Gehäuse gegenüber diesem ersten inneren Gehäuse abgedichtet sind. in that the exit region and / or boundary region of these one or more lead frame structures are sealed to / from the first inner housing with respect to this first inner housing.
Es ist bevorzugt, dass der Sensor wenigstens ein erstes inneresIt is preferable that the sensor has at least a first inner
Gehäuse und ein zweites inneres Gehäuse aufweist, Housing and a second inner housing,
die insbesondere jeweils mindestens ein auf dem Leadframe angeordnetes elektronisches Bauelement einbetten, wobei das erste innere Gehäuse und das zweite innere Gehäuse durch mindestens ein Zwischensegment des Leadframes miteinander elektrisch und mechanisch verbunden sind und in particular at least one each on the leadframe embedding arranged electronic component, wherein the first inner housing and the second inner housing are electrically and mechanically connected to each other by at least one intermediate segment of the leadframe and
wobei die Beschichtung dieses wenigstens eine Zwischensegments des Leadframes umhüllt und wherein the coating encloses this at least one intermediate segment of the leadframe and
außerdem wenigstens die Bereiche bzw. Übergänge bzw. Über¬ gangsflächen des ersten inneren Gehäuses und des zweiten inneren Gehäuses umhüllt, in denen das wenigstens eine Zwischensegment des Leadframes in diese Gehäuse eintritt und/oder hineinragt und/oder aus diesen hinausragt. also envelops at least the regions or transitions or over ¬ transition surfaces of the first inner housing and the second inner housing, in which the entering at least one intermediate segment of the leadframe in this housing and / or projects and / or protrudes therefrom.
Es ist dabei zweckmäßig, dass die Beschichtung, die das we¬ nigstens eine Zwischensegment des Leadframes umhüllt sowie Teile des ersten und zweiten inneren Gehäuses, zusammenhängend und/oder einstückig ausgebildet ist sowie abdichtend ausgebildet ist. Hierbei ist besonders bevorzugt nur der direkt an das Zwischensegment des Leadframes angrenzende Teil des Gehäuses des jeweiligen inneren Gehäuses beschichtet oder alternativ vor- zugsweise im Wesentlichen ein Viertel oder ein Drittel oder die Hälfte des an das Zwischensegment des Leadframes angrenzende Gebiet der Fläche des entsprechenden inneren Gehäuses. It is expedient that the coating that surrounds the we ¬ least one intermediate segment of the lead frame and parts of the first and second inner housing, is formed integrally and / or in one piece and is formed sealingly. In this case, only the part of the housing of the respective inner housing which is directly adjacent to the intermediate segment of the leadframe is preferably coated, or alternatively preferably substantially one fourth or one third or half of the region of the surface of the corresponding inner housing adjacent to the intermediate segment of the leadframe ,
Die Beschichtung ist/ wird bevorzugt mittels eines Plasmabe- schichtungsverfahrens erzeugt und die Beschichtung ist dabei insbesondere aus mindestens einem Organosilikat ausgebildet, besonders bevorzugt als duroplastischer Lack oder als eine duroplastische Beschichtung ausgebildet, welche durch das Plasmabeschichtungsverfahren erzeugt wird bzw. abgesetzt wird. The coating is / is preferably produced by means of a plasma coating method and the coating is formed in particular from at least one organosilicate, particularly preferably as a thermosetting lacquer or as a thermosetting coating which is produced or deposited by the plasma coating process.
Es ist bevorzugt, dass die Beschichtung aus mindestens einem Schutzlack ausgebildet ist. Der Schutzlack ist dabei insbe¬ sondere als Lack ausgebildet, der eine oder mehrere der folgenden Basismaterialen aufweist: Acryl, Polyurethan, Acrylate, Epoxy, Silikon-Acryl , modifiziertes Silikon. Dabei ist/ wird derIt is preferred that the coating is formed from at least one protective lacquer. The protective lacquer is in particular ¬ special designed as a lacquer having one or more of the following base materials: acrylic, polyurethane, acrylates, epoxy, silicone-acrylic, modified silicone. It is / is the
Schutzlack als Beschichtung besonders bevorzugt durch Sprühen oder Tauchen aufgetragen. Es ist zweckmäßig, dass die Beschichtung aus einem Kunststoff, insbesondere einem Thermoplast oder einem vergossenen Duroplast bzw. einer duroplastischen Vergussmasse, ausgebildet ist. Der Sensor ist bevorzugt als Geschwindigkeitssensor ausgebildet, insbesondere als Raddrehzahlsensor also alternativ vorzugsweise als Geschwindigkeitssensor für den Antriebsmotor eines Protective coating as a coating particularly preferably applied by spraying or dipping. It is expedient that the coating is made of a plastic, in particular a thermoplastic or a cast thermoset or a thermosetting potting compound. The sensor is preferably designed as a speed sensor, in particular as a wheel speed sensor, that is, as an alternative, preferably as a speed sensor for the drive motor
Kraftfahrzeugs und dabei besonders bevorzugt als Kurbelwel¬ lensensor oder Nockenwellensensor. Motor vehicle, and particularly preferably as Kurbelwel ¬ lensensor or camshaft sensor.
Das Verfahren ist zweckmäßigerweise zur Herstellung einer oder mehrerer der oben erläuterten Varianten des Sensors ausgestaltet . Es ist bevorzugt, dass nach dem Bestücken des Leadframes mit wenigstens einem elektronischen Bauelement, wie beispielsweise dem Sensorelement und nach dem darauf folgenden Einbetten zumindest eines solchen elektronischen Bauelements in ein inneres Gehäuse durch einen Spritzgussvorgang, ein oder mehrere Teile des Leadframes bzw. des als Dambar bezeichneten Leadframes bzw. eines Dambars, welcher nach diesem Spritzgussvorgang aus diesem inneren Gehäuse herausragen, abgetrennt werden, beispielsweise durch Stanzen bzw. Freistanzen. Dadurch wird zumindest ein Stumpf des Leadframes/ Dambars erzeugt, welcher im Wesentlichen bündig an/mit der Oberfläche eines inneren Gehäuses endet . The method is expediently designed to produce one or more of the variants of the sensor explained above. It is preferred that after the insertion of the leadframe with at least one electronic component, such as the sensor element and after the subsequent embedding of at least one such electronic component in an inner housing by an injection molding process, one or more parts of the leadframe or as dambar designated lead frames or a Dambars, which protrude after this injection molding process from this inner housing, are separated, for example by punching or free dancing. As a result, at least one stump of the leadframe / dambar is produced, which ends essentially flush with the surface of an inner housing.
Die Erfindung bezieht sich außerdem auf die Verwendung des Sensors in Kraftfahrzeugen, insbesondere als Geschwindig- keitssensor. The invention also relates to the use of the sensor in motor vehicles, in particular as a speed sensor.
Weitere bevorzugte Ausführungsformen ergeben sich aus den Unteransprüchen und der nachfolgenden Beschreibung von Ausführungsbeispielen an Hand von Figuren. Further preferred embodiments will become apparent from the subclaims and the following description of exemplary embodiments with reference to figures.
Es zeigen in schematischer Darstellung It show in a schematic representation
Fig. 1 und Fig. 2 jeweils ein Ausführungsbeispiel des Sensors, welcher einen Leadframe 3 umfasst, auf welchem jeweils nicht dargestellt elektronische Bauteile angeordnet sind, die in einem ersten inneren Gehäuse 1 und einem zweiten inneren Gehäuse 2 eingebettet sind. Dabei ist beispielgemäß in erstem inneren Gehäuse 1 ein Sensorelement und eine Signalverarbeitungs¬ schaltung angeordnet und eingebettet und in zweitem inneren Gehäuse 2 ein Kondensator als elektronisches Schutzelement. 1 and FIG. 2 each show an embodiment of the sensor, which comprises a leadframe 3 on which electronic components (not illustrated in each case) are arranged, which are embedded in a first inner housing 1 and a second inner housing 2. It is for example arranged in accordance with the first inner housing 1, a sensor element and a signal processing circuit ¬ and embedded in the second inner housing 2, a capacitor as an electronic protection element.
In Fig. 1 sind erstes und zweites inneres Gehäuse 1 und 2 vollständig durch Beschichtung 3 abgedichtet wobei die Be- schichtung 3 außerdem durchgängig bzw. einstückig den nicht Leadframe vollständig bedeckt bis auf die Enden der zwei Leadframebeine 7, welche zur elektrischen Kontaktierung des Sensors vorgesehen sind, soweit der Leadframe 3 aus den inneren Gehäusen 1 und 2 herausragt. In FIG. 1, the first and second inner housings 1 and 2 are completely sealed by coating 3, wherein the coating 3 also completely or integrally completely covers the non-lead frame except for the ends of the two leadframe legs 7, which are provided for electrical contacting of the sensor are, as far as the leadframe 3 protrudes from the inner housings 1 and 2.
Erstes inneres Gehäuse 1 weist im Wesentlichen bündig an seiner Außenfläche einen Stumpf 5 des Leadframes bzw. einer Lead- framestruktur auf, wobei dieser ebenfalls von Beschichtung 3 bedeckt ist. First inner housing 1 has substantially flush on its outer surface a stump 5 of the leadframe or a leadframe structure, which is also covered by coating 3.
Im Ausführungsbeispiel des Sensors, das anhand der Fig. 2 veranschaulicht ist, ist im Unterschied zu Fig. 1 die Be¬ schichtung 3 so ausgebildet, dass sie ein eine Zwischensegments des Leadframes 3 umhüllt und außerdem wenigstens die Bereiche des ersten inneren Gehäuses 1 und des zweiten inneren Gehäuses 2 umhüllt, in denen das wenigstens eine Zwischensegment des Leadframes in diese Gehäuse eintritt, wobei dieser beschichtete Bereich beispielgemäß jeweils im Wesentlichen ein Drittel der Oberfläche des ersten inneren und zweiten inneren Gehäuses 1, 2 ausmacht . In the exemplary embodiment of the sensor, is illustrated with reference to FIG. 2, 1, Be ¬ coating 3 is in contrast to FIG. Configured such that it encloses an intermediate segment of the lead frame 3, and also at least the portions of the first inner housing 1 and the envelopes the second inner housing 2, in which the at least one intermediate segment of the leadframe enters into these housing, said coated area, for example, each substantially equal to a third of the surface of the first inner and second inner housing 1, 2.
Stumpf 5 des Leadframes wird in diesem Ausführungsbeispiel nicht von Beschichtung 3 umhüllt bzw. bedeckt. Blunt 5 of the leadframe is not covered or covered by coating 3 in this embodiment.
In den Ausführungsbeispielen des Sensors, wie anhand der Figuren 1 und 2 dargestellt ist jeweils nicht das äußere Gehäuse ab¬ gebildet. Dieses umschließt dabei aber in nicht dargestellter Weise das erste und zweite innere Gehäuse 1 und 2 vollständig sowie die daraus hinausragenden Teile des Leadframes 3, mit Ausnahme der beiden Enden der zwei Leadframebeine 7. In the embodiments of the sensor, as shown with reference to Figures 1 and 2 is not formed in each case from the outer housing ¬ . This encloses it but not shown Do the first and second inner housing 1 and 2 completely and the protruding parts of the leadframe 3, with the exception of the two ends of the two leadframe legs 7th

Claims

Sensor, umfassend wenigstens ein erstes inneres Gehäuse (1) , in welchem zumindest teilweise ein Sensorelement eingebettet ist, das auf einem Leadframe (3) angeordnet ist, wobei das zumindest erste innere Gehäuse (1) wenigstens teilweise in ein äußeres Gehäuse eingebettet ist, dadurch gekennzeichnet, dass Sensor, comprising at least a first inner housing (1), in which at least partially a sensor element is embedded, which is arranged on a leadframe (3), wherein the at least first inner housing (1) is at least partially embedded in an outer housing, characterized marked that
zumindest das erste innere Gehäuse eine wenigstens teilweise Beschichtung (4) aufweist. at least the first inner housing has an at least partial coating (4).
Sensor nach Anspruch 1, dadurch gekennzeichnet, dass die Beschichtung (4) so ausgebildet ist, dass sie das erste innere Gehäuse (1) abdichtet. Sensor according to claim 1, characterized in that the coating (4) is formed so that it seals the first inner housing (1).
Sensor nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das Sensorelement und/oder eine Signalverarbeitungs¬ schaltung, insbesondere in einem gemeinsamen Sensorbauteil integriert, auf dem Leadframe (3) angeordnet sind und von dem ersten inneren Gehäuse (1), aus Kunststoff ausgebildet, insbesondere aus Epoxy, umschlossen sind, wobei zumindest eine Leadframestruktur aus dem ersten inneren Gehäuse (1) hinausragt und/oder im Wesentlichen bündig an der Außenfläche des ersten inneren Gehäuses als Stumpf endet, wobei die Beschichtung (4) so ausgebildet ist, dass sie das erste innere Gehäuse (1) von außen im Wesentlichen voll¬ ständig abdichtend umschließt. Sensor according to claim 1 or 2, characterized in that the sensor element and / or a signal processing ¬ circuit, in particular integrated in a common sensor component, are arranged on the leadframe (3) and of the first inner housing (1), formed of plastic, in particular of epoxy, wherein at least one lead frame structure protrudes from the first inner housing (1) and / or terminates substantially flush with the outer surface of the first inner housing as a stump, wherein the coating (4) is formed so that it first inner housing (1) from the outside substantially fully ¬ constantly sealingly encloses.
Sensor nach Anspruch 3, dadurch gekennzeichnet, dass die Beschichtung (4) die eine oder mehreren Leadframe- strukturen (3) , welche aus dem ersten inneren Gehäuse hinausragen oder im Wesentlichen bündig an der Außenfläche des ersten inneren Gehäuses (1) als Stumpf (5) enden, zumindest teilweise umschließt und/oder beschichtet, so dass die Beschichtung (4) so ausgebildet ist, Sensor according to claim 3, characterized in that the coating (4) the one or more leadframe structures (3) which protrude from the first inner housing or substantially flush with the outer surface of the first inner housing (1) as a stump (5 ), at least partially enclosing and / or coated so that the coating (4) is designed
dass der Austrittsbereich und/oder Grenzbereich dieser einen oder dieser mehreren Leadframestrukturen mit/aus dem ersten inneren Gehäuse gegenüber diesem ersten inneren Gehäuse (1) abgedichtet sind. the exit area and / or border area of these one or more lead frame structures are sealed to / from the first inner housing with respect to this first inner housing (1).
Sensor nach mindestens einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass Sensor according to at least one of claims 1 to 4, characterized in that
der Sensor wenigstens ein erstes inneres Gehäuse (1) und ein zweites inneres Gehäuse (2) aufweist, the sensor has at least a first inner housing (1) and a second inner housing (2),
die insbesondere jeweils mindestens ein auf dem Leadframe (3) angeordnetes elektronisches Bauelement einbetten, in particular each embed at least one on the leadframe (3) arranged electronic component,
wobei das erste innere Gehäuse und das zweite innere Gehäuse durch mindestens ein Zwischensegment des Leadframes mit¬ einander elektrisch und mechanisch verbunden sind und wobei die Beschichtung (4) dieses wenigstens eine Zwi¬ schensegments des Leadframes (3) umhüllt und wherein the first inner housing and the second inner housing are connected by at least an intermediate segment of the leadframe with ¬ each other electrically and mechanically, and wherein the coating (4) of said wrapped at least one interim ¬ rule segments of the leadframe (3) and
außerdem wenigstens die Bereiche des ersten inneren Gehäuses (1) und des zweiten inneren Gehäuses (2) umhüllt, in denen das wenigstens eine Zwischensegment des Leadframes (3) in diese Gehäuse eintritt und/oder hineinragt und/oder aus diesen hinausragt. In addition, at least the regions of the first inner housing (1) and of the second inner housing (2) are enveloped, in which the at least one intermediate segment of the leadframe (3) enters and / or protrudes into these housings and / or protrudes therefrom.
Sensor nach Anspruch 5, dadurch gekennzeichnet, dass die  Sensor according to claim 5, characterized in that the
Beschichtung (4), die das wenigstens eine Zwischensegment des Leadframes (3) umhüllt sowie Teile des ersten und zweiten inneren Gehäuses, zusammenhängend und/oder einstückig ausgebildet ist sowie abdichtend ausgebildet ist.  Coating (4), which surrounds the at least one intermediate segment of the leadframe (3) and parts of the first and second inner housing, is formed integrally and / or in one piece and is designed to be sealing.
Sensor nach mindestens einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass Sensor according to at least one of claims 1 to 6, characterized in that
die Beschichtung (4) mittels eines Plasmabeschichtungs- verfahrens erzeugt ist und die Beschichtung dabei insbe¬ sondere aus mindestens einem Organosilikat ausgebildet ist. Sensor nach mindestens einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass the coating (4) by means of a plasma coating method is produced, and the coating thereby in particular ¬ sondere is formed from at least one organosilicate. Sensor according to at least one of claims 1 to 6, characterized in that
die Beschichtung (4) aus mindestens einem Schutzlack ausgebildet ist. the coating (4) is formed from at least one protective lacquer.
Sensor nach mindestens einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass Sensor according to at least one of claims 1 to 8, characterized in that
der Sensor als Geschwindigkeitssensor ausgebildet ist, insbesondere als Raddrehzahlsensor. the sensor is designed as a speed sensor, in particular as a wheel speed sensor.
Verfahren zur Herstellung eines Sensors, insbesondere eines Sensors gemäß mindestens einem der Ansprüche 1 bis 9, umfassend die Schritte Method for producing a sensor, in particular a sensor according to at least one of claims 1 to 9, comprising the steps
- Bestücken eines Leadframes (3) mit zumindest einem Sensorelement,  - equipping a leadframe (3) with at least one sensor element,
- Einbetten des Sensorelements in ein erstes inneres Gehäuse (1), insbesondere aus Epoxy, mittels eines Spritzguss¬ verfahrens, - embedding of the sensor element in a first inner casing (1), in particular from epoxy, by an injection molding method ¬,
- Einbetten des ersten inneren Gehäuses (1), zumindest teilweise, in ein äußeres Gehäuse, insbesondere aus  - Embedding of the first inner housing (1), at least partially, in an outer housing, in particular from
Thermoplast und/oder Duroplast ausgebildet, mittels eines Spritzgussverfahrens, dadurch gekennzeichnet, dass nach dem Einbetten des Sensorelements in das erste innere Gehäuse (1) und vor dem zumindest teilweisen Einbetten des ersten inneren Gehäuses (1) in das äußere Gehäuse, das erste innere Gehäuse zumindest teilweise beschichtet (4) wird . Thermoplastic and / or thermoset formed by means of an injection molding method, characterized in that after embedding the sensor element in the first inner housing (1) and before at least partially embedding the first inner housing (1) in the outer housing, the first inner housing at least partially coated (4).
PCT/EP2014/063973 2013-07-01 2014-07-01 Sensor with a sealing coating WO2015000905A1 (en)

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