WO2014205891A1 - 紫外光辐射照度自动测量装置 - Google Patents
紫外光辐射照度自动测量装置 Download PDFInfo
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- WO2014205891A1 WO2014205891A1 PCT/CN2013/081174 CN2013081174W WO2014205891A1 WO 2014205891 A1 WO2014205891 A1 WO 2014205891A1 CN 2013081174 W CN2013081174 W CN 2013081174W WO 2014205891 A1 WO2014205891 A1 WO 2014205891A1
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- WO
- WIPO (PCT)
- Prior art keywords
- ultraviolet light
- ultraviolet
- light detecting
- illuminance
- linear motor
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0271—Housings; Attachments or accessories for photometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J1/46—Electric circuits using a capacitor
Definitions
- the ultraviolet ray illuminance measuring device of the conventional ultraviolet curing device mostly places the ultraviolet light detector 11 on the probe carrier 12, and manually moves the detector moving guide 14 and the ultraviolet light detector by means of the push-pull handle 13 . 11 way to change the position of the measuring point, the UV detector!
- the movement mode of 1 is to move on the detector moving rail 14 by means of the push-pull handle 13, and the ultraviolet illuminance measuring point il l, the ultraviolet illuminating illuminance measuring point 112 and the ultraviolet illuminating illuminance measuring point 113 are pre-prepared on the detecting moving guide 14
- the design measurement points are left, so the number of points that can measure the illuminance of the ultraviolet ray is limited, and it cannot cover the entire ultraviolet radiation area.
- the main object of the present invention is to provide an automatic measuring device for ultraviolet radiation illuminance, which can automatically control the ultraviolet light detecting module to measure the illuminance of ultraviolet light at any point in the ultraviolet radiation region, without limiting the number of measuring points, and the measuring point can be It can be arbitrarily selected and covers the entire ultraviolet radiation area.
- the present invention provides an automatic measuring device for ultraviolet radiation illuminance, comprising an ultraviolet light detecting module and a control module, wherein the ultraviolet light detecting module is configured to measure the illuminance of the ultraviolet light; the ultraviolet light illuminance is automatically
- the measuring device further includes a driving module, wherein
- the control module sends a driving signal to the driving module, and presets at least one arbitrary point in the ultraviolet radiation region as a measuring point;
- the driving module is configured to drive the ultraviolet light detecting module to move in the ultraviolet radiation region according to the driving signal, so that the ultraviolet light detecting module measures the illuminance of the ultraviolet light at a predetermined measuring point.
- the driving module includes a feedback unit for using the ultraviolet light detecting module at The position signal in the ultraviolet radiation region is transmitted to the control module;
- the control module is further configured to send a driving control signal to the driving module according to the position signal;
- the driving module is further configured to drive the ultraviolet light detecting module to move to a preset measuring point according to the driving control signal.
- the ultraviolet light detecting module includes an ultraviolet light detecting unit and a photo current processing unit: the ultraviolet light detecting unit is configured to receive ultraviolet light to generate a photocurrent;
- the photocurrent processing unit is configured to amplify and convert the photocurrent signal into a digital voltage signal; and the control module is further configured to calculate the digital voltage signal to obtain ultraviolet radiation illuminance.
- the ultraviolet light detecting unit includes:
- An insulating layer disposed in the inner interlayer of the cavity
- a carrier for carrying the cavity and connecting the drive module.
- the ultraviolet light detecting unit further includes a quartz plate disposed on a top of the cavity.
- the quartz plate has an ultraviolet light transmission rate greater than 90%.
- the ultraviolet light detecting unit further includes:
- An ultraviolet shielding sheet for separating the photosensitive member and ultraviolet light in a non-measuring state.
- the driving module includes a first linear motor, a second linear motor, and a third linear motor, wherein
- the second linear motor and the third linear motor are respectively disposed in parallel with each other on a pair of sides of the ultraviolet light detecting region, the base of the first linear motor and the mover of the second linear motor and the first The three straight movers are connected separately.
- the ultraviolet light detecting unit is connected to the mover of the first linear motor.
- the first linear motor controls the ultraviolet light detecting unit to move in the X-axis direction in the ultraviolet light detecting region, and the X-axis direction is a direction parallel to the longitudinal direction of the first linear motor, and the Y-axis The direction is a direction perpendicular to the X-axis direction described above;
- the second linear motor and the third linear motor control the ultraviolet light detecting unit in ultraviolet Movement in the Y-axis direction in the light detecting area.
- the photocurrent processing unit includes a preamplifier circuit and an analog to digital conversion circuit;
- the ultraviolet light detecting unit is configured to receive an analog photocurrent signal by receiving ultraviolet light;
- the preamplifier circuit is configured to The analog photocurrent signal is amplified and converted into an analog voltage signal;
- the analog-to-digital conversion circuit is configured to convert the analog voltage signal into a digital voltage signal; and the control module is configured to calculate the digital voltage signal to obtain ultraviolet light illuminance data.
- the ultraviolet radiation illuminance automatic measuring device of the present invention can drive the ultraviolet light detecting module to emit ultraviolet radiation according to a driving signal sent by the control module.
- the movement in the region enables the ultraviolet light detecting module to measure the irradiance of the ultraviolet light at any point in the preset ultraviolet radiation region, without limiting the number of measuring points, and the measuring point can be arbitrarily selected and can cover the entire UV radiation area.
- Figure 1 is a structural diagram of an ultraviolet ray illuminance measuring device of a conventional ultraviolet curing device
- Fig. 2 is a block diagram showing the structure of an automatic illuminating device for illuminating ultraviolet illuminance according to an embodiment of the present invention
- Figure 4 is a cross-sectional view showing an embodiment of the ultraviolet light detecting unit
- FIG. 5 is a structural diagram of a first linear motor included in an embodiment of a driving module included in the automatic ultraviolet illuminance measuring apparatus according to the embodiment of the present invention
- FIG. 6 is a structural diagram of a second linear motor included in an embodiment of a driving module included in the automatic ultraviolet illuminance measuring apparatus according to the embodiment of the present invention
- FIG. 7 is a schematic diagram showing the connection relationship between the detector carrier, the first linear motor, the second linear motor, the third linear motor, and the ultraviolet light detecting unit included in the automatic ultraviolet illuminance measuring device according to the embodiment of the present invention. ;
- FIG. 8 is a structural block diagram of an embodiment of a photocurrent processing unit included in an automatic ultraviolet illuminance measuring apparatus according to an embodiment of the present invention.
- FIG. 9 is a front view of an automatic ultraviolet illuminance measuring device according to an embodiment of the present invention. A circuit diagram of an embodiment of a large circuit.
- the automatic ultraviolet illuminance measuring device includes an ultraviolet light detecting module 21, a control module 22 and a driving module 23, wherein
- the ultraviolet light detecting module 21 is configured to measure the illuminance of the ultraviolet light
- the control module 22 is configured to send a driving signal to the driving module 23, and preset at least one arbitrary point in the ultraviolet radiation region as a measuring point;
- the driving module 23 is configured to drive the ultraviolet light detecting module 21 to move in the ultraviolet radiation region according to the driving signal, so that the ultraviolet light detecting module 2! measures the ultraviolet radiation at a preset measuring point. Illumination.
- the ultraviolet illuminance automatic measuring device because the driving module 23 is used, the ultraviolet light detecting module 21 can be driven by the ultraviolet light radiation according to the driving signal sent by the control module 22 The intra-area movement, so that the ultraviolet light detecting module 21 can measure the irradiance of the ultraviolet light at any point in the preset ultraviolet radiation region, compared with the existing ultraviolet illuminance measuring device, the present invention
- the ultraviolet radiation illuminance automatic measuring device does not limit the number of measurement points, and the measurement points can be arbitrarily selected and can cover the entire ultraviolet radiation region.
- the ultraviolet illuminance automatic measuring device sets the measurement condition, the number of measurement points and the position of the measurement point through the control module 22, and measures the ultraviolet
- the driving module 23 sequentially measures the illuminance of the ultraviolet ray of each measuring point according to the measurement condition preset by the control module 22, so that the illuminance measurement of the ultraviolet ray of the multi-measurement point can be completed in one time without interruption, and
- the number of measurement points is not limited, and the position of the measurement point can be arbitrarily selected, thereby improving the measurement accuracy and greatly shortening the measurement interval.
- the driving module 23 is further configured to transmit a position signal of the ultraviolet light detecting module in the ultraviolet light radiation region to the control module;
- the control module 22 is further configured to send a driving control signal to the driving module 23 according to the position signal;
- the driving module 23 includes a feedback unit for driving the ultraviolet light detecting module 21 to move to a preset measuring point according to the driving control signal, so that precise positioning of the ultraviolet light illuminance measuring point can be achieved.
- the ultraviolet light detector 11 is connected to an ultraviolet radiation illuminance measuring instrument (not shown), the calibration of the ultraviolet light detector 11, the selection of the ultraviolet light illuminance measuring point, The recording of the illuminance data measured by the ultraviolet irradiance illuminometer is manually performed, the measurement accuracy is not accurate enough, the measurement takes a long time, the measurement efficiency is low, and the productivity is affected.
- the measurement results of different ultraviolet illuminance measurement points are largely deviated. .
- the ultraviolet light detecting module includes an ultraviolet light detecting unit and a light current processing unit:
- the ultraviolet light detecting unit is configured to receive ultraviolet light to generate a photocurrent
- the photocurrent processing unit is configured to amplify and convert the photocurrent signal into a digital voltage signal; the control module is further configured to calculate the digital voltage signal to obtain ultraviolet radiation
- an embodiment of the ultraviolet light detecting unit includes:
- the heat insulation layer 213 is disposed on the inner interlayer of the cavity 211;
- the carrier 214 is configured to carry the cavity 211 and connect the driving module 213 (in FIG. 3, in order to make the structure of the cavity 211 clearly visible, the cavity 211 is drawn on the carrier 214 Upper, the connection relationship between the carrier 214 and the driving module 23 is not shown in FIG. 3 and FIG. 4 .
- the photosensitive member 212 in order to make the ultraviolet light illuminance measurement result unaffected by the outside temperature, the photosensitive member 212 is sealed in the cavity 211, since the cavity 212 is exposed Within the radiation range of the ultraviolet lamp, and the ultraviolet lamp itself also generates heat, so in order to avoid long-term ultraviolet radiation radiation will affect the life and measurement accuracy of the photosensitive member 212 inside the cavity 2 ⁇ , the cavity
- the inner interlayer of the body 2 is provided with a heat insulating layer 213.
- the ultraviolet light detecting unit further includes a quartz plate 215 disposed on the top of the cavity 211;
- the quartz plate 215 is a quartz plate having a high transmittance to ultraviolet light, and the quartz plate 215 is open.
- a first screw 216 and a second screw 217 are fixed to the top of the cavity 212.
- the quartz plate has an ultraviolet transmittance of more than 90%.
- the ultraviolet light detecting unit further includes:
- the ultraviolet shielding sheet 218 (the ultraviolet shielding sheet 218 may be, for example, a shutter made of a louver door, a metal shielding sheet or other ultraviolet shielding material) is closed to prevent ultraviolet light from entering the cavity 212. .
- the driving module 23 includes a first linear motor, a second linear motor, and a third linear motor, wherein the first linear motor controls the X-axis direction movement of the ultraviolet light detecting unit, and the second straight line
- the motor and the third linear motor control the Y-axis direction movement of the ultraviolet light detecting unit; the first linear motor, the second linear motor and the third linear motor are used instead of manually moving the ultraviolet light detecting unit, and the two-dimensional driving positioning can be performed.
- the ultraviolet light detecting unit can measure the ultraviolet light illuminance at any point of the ultraviolet light radiation region, the number of measurable points is more, and the measuring point positioning is more accurate.
- the first linear motor includes a first base 2211, a first stator 2212, a first mover 2213, a first slide 2214, a first slider 2215, a first guide band 2216, and a first motion.
- the first stator 2212 and the first sliding rail 2214 are respectively fixed to the first base 22U, and the first sliding block 2215 is disposed on the first sliding rail 2214;
- the first guiding strip 2216 is fixed on the first base 2211;
- the first mover seat 2217 is disposed on the first guide band 2216 for fixing the first mover 2213 such that the first mover 2213 can follow the first slider 2215. Moving along the first slide rail 2214;
- the first limit switch 2218 and the second limit switch 2219 are respectively disposed on the first base 2211 and correspond to the two side ends of the first slide rail 2214;
- the first position feedback component 221A is disposed on the first base 2211 for feeding back the position of the first mover 2213 to the control module 22;
- the first bumper 221B and the second bumper 221C are respectively disposed on both end sides of the first sliding rail 2214;
- the first mover 2213 of the first linear motor is coupled to the carrier 213 (not shown in Fig. 5).
- the second linear motor includes a second base 2221, a second slide rail 2222, a third slide rail 2223, a second slider 2224, a third slider 2225, a fourth slider 2226, and a fifth slider.
- the second slider 2224 and the third slider 2225 are respectively disposed on the second slide rail 2222.
- the fourth slider 2226 and the fifth slider 2227 are respectively disposed on the second slide rail 2223.
- the second mover seat 222A is disposed on the second guide band 2229 for fixing the second mover 222B such that the first mover 222B can follow the second slider 2224.
- the third slider 2225, the fourth slider 2226, and the fifth slider 2227 move along the second rail 2222 and the third rail 2223;
- the second limit switch 222D and the fourth limit switch 222E are respectively disposed on the second base 2221 and correspond to the two side ends of the second slide rail 2222;
- the second position feedback component 222C is disposed on the second base 2221 for feeding back the position of the second mover 222B to the control module 22;
- the second bumper 222F and the fourth bumper 222G are respectively disposed on both ends of the second rail 2222;
- the fifth bumper 222H and the sixth bumper 2221 are respectively disposed on both end sides of the third slide rail 2223;
- the mover of the second linear motor and the mover of the third linear motor are respectively connected to the base of the first linear motor.
- the ultraviolet radiation illuminance automatic measuring device of the present invention further includes a detector carrier 20;
- the first mover of the first linear motor 231 is connected to the carrier of the ultraviolet light detecting unit 201, the mover of the second linear motor 232 and the mover of the third linear motor 233 are respectively connected to the first linear motor
- the base of the 231 is connected; the first linear motor 231, the second linear motor 232, and the third linear motor 233 are disposed on the probe carrier 20.
- the position feedback component of the first linear motor, the position feedback component of the second linear motor, and the position feedback component of the third linear motor can accurately position the coordinates of the ultraviolet light detecting unit in the ultraviolet radiation region. In order to facilitate the selection of ultraviolet light illuminance measurement points.
- the ultraviolet illuminance of each ultraviolet illuminance measurement point is required to perform an ultraviolet lamp switching action and a detector moving guide 14 lifting action, which is cured by ultraviolet light.
- the components of the device itself cause some loss.
- the photocurrent processing unit includes a preamplifier circuit 24 and an analog to digital converter circuit 25;
- the ultraviolet light detecting unit 201 is configured to receive a small analog photocurrent signal by receiving ultraviolet light
- the preamplifier circuit 24 is configured to amplify and convert the micro analog optical current signal to simulate the analog to digital conversion circuit 25,
- the control module 22 is configured to calculate and correct the digital voltage signal to obtain ultraviolet radiation illuminance data.
- Figure 9 is a circuit diagram of an embodiment of a preamplifier circuit.
- the preamplifier circuit 24 includes an operational amplifier 0, a first resistor RI, a second resistor R2, a third resistor R3, a fourth resistor R4, a feedback resistor R5, and a second potential of the first potentiometer RVL.
- RV2 a first capacitor Ci, a second capacitor C2, and a third capacitor C3, wherein
- the second resistor R2, the third resistor R3, the second capacitor C2 and the first adjustment potentiometer RVI form a zero adjustment circuit, and the integrated operational amplifier circuit can be offset-zeroed by adjusting the first potentiometer RV1; the first resistor and the first capacitor Ci ffi compensates the bias current of the integrated operational amplifier circuit,
- the two potentiometer RV2 is used to adjust the gain of the integrated operational amplifier circuit;
- the ultraviolet light detecting unit 201 When the ultraviolet light detecting unit 201 receives the ultraviolet light radiation, a small analog current signal is generated, and the small analog current signal generates a differential pressure output voltage signal after the feedback resistor R5 and the second potentiometer RV2, and the resistance value of the electric second position device RV2 is adjusted.
- the output voltage can be adjusted.
- the ultraviolet illuminance automatic measuring device further includes a display module and a storage module;
- the display module is configured to display ultraviolet radiation illuminance data
- the storage module is configured to store ultraviolet radiation illuminance data.
- Step 1 Measurement parameter setting, before the measurement, the control module sets the measurement parameters, and the content includes:
- the position of the measuring point can be selected in the two-dimensional coordinates of the display interface or the coordinate value of the measuring point can be directly input through the keyboard;
- Step 2 After confirming that the device under test is in the irradiance measurement mode, click to start measurement: The mover of the first linear motor drives the carrier to move in the X-axis direction, and at the same time, the mover of the second linear motor and the third linear motor The mover drives the base of the first linear motor to perform the same movement in the Y-axis direction, and finally the photosensitive element of the ultraviolet light detecting unit is at the first measuring point position;
- the shutter door is opened, and the photosensitive member starts to receive ultraviolet light irradiation;
- the ultraviolet light detecting unit receives the small photocurrent generated by the ultraviolet light to flow forward to the amplifier circuit, and the minute photocurrent is amplified by the preamplifier circuit to be converted into a voltage signal and input to the analog to digital conversion circuit to convert the input analog voltage signal into a digital voltage. After the signal is calculated and corrected, the illuminance data is output to the display module to display and store the measurement result;
- the shutter door is closed.
- the ultraviolet light detecting unit is no longer subjected to ultraviolet light irradiation, thereby completing one measurement of the first measurement point, and if the same point is required to be measured multiple times, the above steps are repeated;
- the first linear motor, the second linear motor and the third linear motor drive the ultraviolet light detecting unit to move to the second measuring point position, and repeat the above steps to complete the measurement of the second measuring point.
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Abstract
一种紫外光辐射照度自动测量装置,包括紫外光探测模块(21),控制模块(22)和驱动模块(23)。紫外光探测模块用于测量紫外光的辐射照度;控制模块用于向驱动模块发出驱动信号,并预先设定紫外光辐射区域中的至少一任意点为测量点;驱动模块用于根据驱动信号驱动紫外光探测模块在紫外光辐射区域内运动,以使得紫外光探测模块在预先设定的测量点测量紫外光的辐射照度。紫外光辐射照度自动测量装置可以自动控制紫外光探测模块在紫外光辐射区域内的任意点测量紫外光的辐射照度,不对测量点数进行限制,而且测量点可以任意选取,并可覆盖整个紫外光辐射区域。
Description
如图 1所示, 传统的紫外线固化设备的紫外线辐射照度测量装置多为将 紫外光探测器 11置于探測器载车 12上,依靠推拉把手 13手动移动探测器移 动导轨 14和紫外光探测器 11的方式改变测量点位置,该紫外光探测器!1的 移动方式为依靠推拉把手 13在探测器移动导轨 14上运动, 紫外光辐射照度 测量点 il l、紫外光辐射照度测量点 112和紫外光辐射照度测量点 113为探测 器移动导轨 14上预留设计的测量点,因此可测量紫外光辐射照度的点数有限, 不能覆盖整个紫外光辐射区域。
本发明的主要目的在于提供一种紫外光辐射照度自动测量装置, 可以自 动控制紫外光探测模块在紫外光辐射区域内的任意点测量紫外光的辐射照度, 不对测量点数进行限制, 而且测量点可以任意选取, 并可覆盖整个紫外光辐 射区域。
为了达到上述目的, 本发明提供了一种紫外光辐射照度自动测量装置, 包括紫外光探测模块和控制模块, 所述紫外光探测模块 ^于测量紫外光的辐 射照度; 所述紫外光辐射照度自动测量装置还包括驱动模块, 其中,
所述控制模块, ^于向所述驱动模块发出驱动信号, 并预先设定紫外光 辐射区域中的至少一任意点为测量点;
所述驱动模块, ^于根据该驱动信号驱动所述紫外光探测模块在紫外光 辐射区域内运动, 以使得所述紫外光探测模块在预先设定的测量点测量紫外 光的辐射照度。
实施时, 所述驱动模块包括反馈单元, 其用于将所述紫外光探测模块在
所述紫外光辐射区域中的位置信号传送至所述控制模块;
所述控制模块, 还用于根据该位置信号, 向所述驱动模块发送驱动控制 信号;
所述驱动模块, 还用于根据该驱动控制信号驱动所述紫外光探測模块运 动至预先设定的测量点。
实施时, 所述紫外光探测模块包括紫外光探测单元和光电流处理单元: 所述紫外光探測单元, 用于接收紫外光照射而产生光电流;
所述光电流处理单元,用于将该光电流信号放大并转换为数字电压信号; 所述控制模块, 还用于对该数字电压信号进行计算而得到紫外光辐射照 度。
实施时, 所述紫外光探测单元包括:
腔体;
光敏元件, 密封于所述腔体内;
隔热层, 设置于所述腔体的内夹层;
载架, 用于承载所述腔体和连接所述驱动模块。
实施时, 所述紫外光探测单元还包括石英片, 设置于所述腔体的顶部。 实施时, 所述石英片的紫外光透过率大于 90%。
实施时, 所述紫外光探测单元还包括:
紫外光遮挡片, 用于在非测量状态时隔开所述光敏元件和紫外光。
实施时, 所述驱动模块包括第一直线电机、 第二直线电机和第三直线电 机, 其中,
所述第二直线电机和第三直线电机相互平行地分别设在紫外光探测区域 的一对边上, 所述第一直线电机的底座与所述第二直线电机的动子和所述第 三直线的动子分别连接,
在所述第一直线电机的动子上连接所述紫外光探测单元。
进一步地, 所述第一直线电机控制所述紫外光探测单元在紫外光探测区 域中的 X轴方向运动,该 X轴方向是与第一直线电机的长度方向平行的方向, 该 Y轴方向是与上述 X轴方向垂直的方向;
所述第二直线电机和所述第三直线电机控制所述紫外光探测单元在紫外
光探测区域中的 Y轴方向运动。
实施时, 所述光电流处理单元包括前置放大电路和模数转换电路; 所述紫外光探測单元, 用于接受紫外光照射而产生模拟光电流信号; 所述前置放大电路, 用于将该模拟光电流信号放大并转换为模拟电压信 号;
所述模数转换电路, 用于将该模拟电压信号转换为数字电压信号; 所述控制模块, 用于对该数字电压信号进行计算而得到紫外光辐射照度 数据。
与现有技术相比, 本发明所述的紫外光辐射照度自动测量装置, 由于采 用了所述驱动模块, 其可以根据所述控制模块发出的驱动信号驱动所述紫外 光探测模块在紫外光辐射区域内运动, 从而使得所述紫外光探测模块可以在 预先设定的紫外光辐射区域内的任意点测量紫外光的辐射照度, 不对测量点 数进行限制, 而且测量点可以任意选取, 并可覆盖整个紫外光辐射区域。
图 i是传统的紫外线固化设备的紫外线辐射照度测量装置的结构图; 图 2是本发明实施例所述的紫外光辐射照度自动测量装置的结构框图; 图 3是所述紫外光探测单元的一实施例的立体图;
图 4是所述紫外光探测单元的一实施例的剖视图;
图 5是本发明实施例所述的紫外光辐射照度自动测量装置包括的驱动模 块的一实施例包括的第一直线电机的结构图;
图 6是本发明实施例所述的紫外光辐射照度自动测量装置包括的驱动模 块的一实施例包括的第二直线电机的结构图;
图 7是本发明实施例所述的紫外光辐射照度自动测量装置包括的探测器 载车、 第一直线电机、 第二直线电机、 第三直线电机和紫外光探测单元之间 的连接关系示意图;
图 8是本发明实施例所述的紫外光辐射照度自动测量装置包括的光电流 处理单元的一实施例的结构框图;
图 9是本发明实施例所述的紫外光辐射照度自动测量装置包括的前置放
大电路的一实施例的电路图。
如图 2所示, 本发明实施例所述的紫外光辐射照度自动测量装置, 包括 紫外光探测模块 21、 控制模块 22和驱动模块 23, 其中,
所述紫外光探测模块 21 , 用于测量紫外光的辐射照度;
所述控制模块 22, 用于向所述驱动模块 23发出驱动信号, 并预先设定 紫外光辐射区域中的至少一任意点为测量点;
所述驱动模块 23, 用于根据该驱动信号驱动所述紫外光探测模块 21 在 紫外光辐射区域内运动, 以使得所述紫外光探测模块 2!在预先设定的测量点 测量紫外光的辐射照度。
本发明第一实施例所述的紫外光辐射照度自动测量装置, 由于采用了所 述驱动模块 23, 其可以根据所述控制模块 22发出的驱动信号驱动所述紫外 光探测模块 21 在紫外光辐射区域内运动, 从而使得所述紫外光探测模块 21 可以在预先设定的紫外光辐射区域内的任意点测量紫外光的辐射照度, 与现 有的紫外光辐射照度测量装置相比, 本发明第一实施例所述的紫外光辐射照 度自动测量装置不对测量点数进行限制, 而且测量点可以任意选取, 并可覆 盖整个紫外光辐射区域。
在实际操作时, 在测量紫外光辐射照度之前, 本发明第一实施例所述的 紫外光辐射照度自动测量装置通过控制模块 22将测量条件、测量点数及测量 点位置设定好, 在测量紫外光辐射照度时, 驱动模块 23将根据控制模块 22 预先设定的测量条件依次对各测量点的紫外光辐射照度进行测量, 使得多测 量点紫外光辐射照度测量无需间断, 可一次性完成, 且测量点数不受限制, 测量点位置可以任意选取, 从而可以提高测量精度, 并能很大程度缩短测量 寸间。
在具体实施时, 所述驱动模块 23 , 还用于将所述紫外光探测模块在所述 紫外光辐射区域中的位置信号传送至所述控制模块;
所述控制模块 22, 还用于根据该位置信号, 向所述驱动模块 23发送驱 动控制信号;
所述驱动模块 23, 包括反馈单元, 其用于根据该驱动控制信号驱动所述 紫外光探测模块 21运动至预先设定的测量点,这样可以实现对紫外光辐射照 度測量点的精确定位。
而在现有技术中,如图 1所示紫外光探测器 11与紫外光辐射照度测量仪 (未图示) 连接, 紫外光探测器 11 的校准, 紫外光辐射照度测量点的选取, 所述紫外光辐射照度测量仪测量得到的照度数据的记录等均由人为完成, 測 量精度不够精准, 测量耗时长, 测量效率低, 影响产能, 不同的紫外光辐射 照度测量点的測量结果存在较大偏差。
根据一种具体实施方式, 所述紫外光探测模块包括紫外光探测单元和光 电流处理单元:
所述紫外光探测单元, 用于接受紫外光照射而产生光电流;
所述光电流处理单元,用于将该光电流信号放大并转换为数字电压信号; 所述控制模块, 还用于对该数字电压信号进行 算而得到紫外光辐射照 又
如图 3、 图 4所示, 所述紫外光探测单元的一实施例包括:
腔体 2U ;
光敏元件 212, 密封于所述腔体 21内;
隔热层 213 , 设置于所述腔体 211的内夹层;
载架 214, ^于承载所述腔体 211和连接所述驱动模块 213 (在图 3中, 为了使得腔体 211的结构清晰可见,因此将所述腔体 211绘制于所述载架 214 的上方,所述载架 214和所述驱动模块 23之间的连接关系图 3、图 4中未示)。
在所述紫外光探测单元的该实施例中, 为了使得紫外光辐射照度测量结 果不受外界温度的影响, 所述光敏元件 212被密封在所述腔体 211 内, 由于 该腔体 212是暴露在紫外光灯的辐射范围内的, 且紫外光灯本身也会发热, 因此为了避免长时间的紫外光辐射将会影响所述腔体 2Π 内部的光敏元件 212的寿命和测量精度, 所述腔体 2Π的内夹层设置有隔热层 213。
具体的, 如图 4所示, 所述紫外光探测单元还包括石英片 215, 其设置 于所述腔体 211的顶部;
所述石英片 215为对紫外光具有高透过率的石英片, 所述石英片 215通
过第一螺丝 216和第二螺丝 217固定于所述腔体 212的顶部。
优选的, 所述石英片的紫外光透过率大于 90%
具体的, 如图 3所示, 所述紫外光探测单元还包括:
紫外光遮挡片 218, 用于在非测量状态时隔开所述光敏元件 211 和紫外 光;
非测量状态时, 所述紫外光遮挡片 218 (所述紫外光遮挡片 218例如可 以为百叶门、 金属遮挡片或其它防紫外光材质制成的遮挡片) 关闭, 阻止紫 外光进入腔体 212。
根据一种具体实施方式, 所述驱动模块 23包括第一直线电机、 第二直线 电机和第三直线电机, 其中, 第一直线电机控制紫外光探测单元的 X轴方向 运动, 第二直线电机和第三直线电机控制紫外光探测单元的 Y 轴方向运动; 采用第一直线电机、 第二直线电机和第三直线电机代替人力搬动所述紫外光 探测单元, 并可以二维驱动定位所述紫外光探测单元, 可测量紫外光辐射区 域的任意点的紫外光辐射照度, 可测量的点数更多, 测量点定位更准确。
如图 5所示, 第一直线电机包括第一底座 2211、 第一定子 2212、 第一动 子 2213、第一滑轨 2214、第一滑块 2215、第一导带 2216、第一动子座 2217、 第一极限开关 2218、 第二极限开关 2219、 第一位置反馈部件 221A、 第一防 撞器 221B和第二防撞器 221C, 其中,
所述第一定子 2212和所述第一滑轨 2214分别固定于所述第一底座 22U 所述第一滑块 2215设置于所述第一滑轨 2214上;
所述第一导带 2216固定于所述第一底座 2211上;
所述第一动子座 2217, 设置于所述第一导带 2216上, 用于固定所述第 一动子 2213 , 以使得所述第一动子 2213可以随着所述第一滑块 2215沿着所 述第一滑轨 2214运动;
所述第一极限开关 2218和所述第二极限开关 2219分别设置于所述第一 底座 2211上与所述第一滑轨 2214的两侧端对应处;
所述第一位置反馈部件 221A, 设置于所述第一底座 2211上, 用于向所 述控制模块 22反馈所述第一动子 2213的位置;
所述第一防撞器 221B和所述第二防撞器 221C分别设置于所述第一滑轨 2214的两端侧;
所述第一直线电机的第一动子 2213与所述载架 213连接(图 5中未示)。 如图 6所示, 第二直线电机包括第二底座 2221、 第二滑轨 2222、 第三滑 轨 2223、 第二滑块 2224、 第三滑块 2225、 第四滑块 2226、 第五滑块 2227、 第二定子 2228、 第二导带 2229、 第二动子座 222A、 第二动子 222B、 第二位 置反馈部件 222C、第三极限开关 222D、第四极限开关 222E、第三防撞器 222F、 第四防撞器 222G、 第五防撞器 22211、 第六防撞器 2221和挡板 222J, 其中, 所述第二滑轨 2222、 所述第三滑轨 2223和所述定子 2228分别固定于所 述第二底座 2221上;
所述第二滑块 2224和所述第三滑块 2225分别设置于所述第二滑轨 2222 所述第四滑块 2226和所述第五滑块 2227分别设置于所述第≡滑轨 2223 所述第二动子座 222A, 设置于所述第二导带 2229上, 用于固定所述第 二动子 222B, 以使得所述第一动子 222B可以随着所述第二滑块 2224、 所述 第三滑块 2225、 所述第四滑块 2226和所述第五滑块 2227沿着所述第二滑轨 2222和所述第三滑轨 2223运动;
所述第≡极限开关 222D和所述第四极限开关 222E分别设置于所述第二 底座 2221上与所述第二滑轨 2222的两侧端对应处;
所述第二位置反馈部件 222C, 设置于所述第二底座 2221 上, 用于向所 述控制模块 22反馈所述第二动子 222B的位置;
所述第≡防撞器 222F和所述第四防撞器 222G分别设置于所述第二滑轨 2222的两端侧;
所述第五防撞器 222H和所述第六防撞器 2221分别设置于所述第三滑轨 2223的两端侧;
所述第二直线电机的动子和所述第三直线电机的动子分别与所述第一直 线电机的底座连接。
所述第二直流电机的结构和所述第≡直流电机的结构相同。
如图 7所示, 在实际操作时, 本发明所述的紫外光辐射照度自动测量装 置还包括探测器载车 20;
第一直线电机 231的第一动子与紫外光探测单元 201的载架连接, 第二 直线电机 232的动子和所述第三直线电机 233的动子分别与所述第一直线电 机 231 的底座连接; 所述第一直线电机 231、 第二直线电机 232和第三直线 电机 233设置于探测器载车 20上。
所述第一直线电机、 所述第二直线电机和所述第三直线电机在工作时, 当定子通入电流后, 在定子和动子之间的气隙中会产生行波磁场, 在行波磁 场与动子的永磁体的作用下产生驱动力, 从而实现运动部件的直线运动。 通 过所述第一直线电机的位置反馈部件、 所述第二直线电机的位置反馈部件和 所述第三直线电机的位置反馈部件, 可以精确定位紫外光探测单元在紫外光 辐射区域的坐标, 以利于紫外光辐射照度测量点的选取。
而在现有技术中, 如图 i所示, 每测量一紫外光辐射照度测量点的紫外 光辐射照度均需做一次紫外线灯的开关动作和探测器移动导轨 14 的升降动 作, 对紫外光固化设备本身部件造成一定损耗。
根据一种具体实施方式, 如图 8所示, 所述光电流处理单元包括前置放 大电路 24和模数转换电路 25 ;
紫外光探测单元 201,用于接受紫外光照射而产生微小模拟光电流信号; 所述前置放大电路 24, 用于将该微小模拟光电流信号放大并转换为模拟 所述模数转换电路 25, 用于将该模拟电压信号转换为数字电压信号; 所述控制模块 22, 用于对该数字电压信号进行 算和修正而得到紫外光 辐射照度数据。 图 9是前置放大电路的一实施例的电路图。
如图 9所示, 所述前置放大电路 24包括运算放大器0、 第一电阻 RI、 第二电阻 R2、第三电阻 R3、第四电阻 R4、 反馈电阻 R5、第一电位器 RVL 第二电位器 RV2、 第一电容 Ci、 第二电容 C2和第≡电容 C3, 其中,
第二电阻 R2、 第三电阻 R3、 第二电容 C2和第一调节电位器 RVI构成 调零电路, 通过调节第一电位器 RV1可将集成运算放大电路失调调零; 第一电阻 和第一电容 Ci ffi于补偿集成运算放大电路的偏置电流, 第
二电位器 RV2用于调整集成运算放大电路的增益;
当紫外光探测单元 201接收紫外光辐射后产生微小模拟电流信号, 微小 模拟电流信号经反馈电阻 R5和第二电位器 RV2之后产生压差输出电压信号, 通过调节电第二位器 RV2的阻值可以调整输出电压的大小。
在具体实施时, 所述紫外光辐射照度自动测量装置还包括显示模块和存 储模块;
所述显示模块, 用于显示紫外光辐射照度数据;
所述存储模块, 用于存储紫外光辐射照度数据。
本发明所述的紫外光辐射照度自动测量装置测量照度的具体步骤如下: 步骤一: 测量参数设定, 测量前先由控制模块对測量参数迸行设置, 其 内容包括:
测量点数及位置选取, 可在显示界面的二维坐标中选取测量点的位置或 遥过键盘直接输入测量点的坐标值;
在软件界面中选取同一点的重复测量次数;
在软件界面中选择每点的测量时间, 即百叶门打开的时间;
直线电机移动速度设定。
步骤二: 确认被测量设备处于辐射照度测量模式后, 点击开始测量: 第一直线电机的动子带动载架做 X轴方向运动, 同时, 第二直线电机的 动子和第三直线电机的动子带动第一直线电机的底座沿 Y轴方向做同歩运动, 最终使得紫外光探测单元的光敏元件处于第一测量点位置;
待紫外光探测单元初始化校正完成后, 百叶门打开, 光敏元件开始接受 紫外光照射;
紫外光探测单元接受紫外光照射后产生的微小光电流流向前置放大电路, 微小光电流经前置放大电路放大后转化为电压信号输入到模数转换电路将输 入的模拟电压信号转换为数字电压信号后经过计算和修正, 将照度数据输出 于显示模块显示并储存测量结果;
达到设定测量时间后, 百叶门关闭, 此时, 紫外光探测单元不再接受紫 外光照射, 从而完成第一测量点的一次测量, 如需要进行同一点多次测量, 重复以上歩骤;
第一直线电机、 第二直线电机和第三直线电机带动紫外光探测单元移动 到第二测量点位置, 重复以上步骤完成对第二測量点的测量。
以上所述是本发明的优选实施方式, 应当指出, 对于本技术领域的普通 技术人员来说, 在不脱离本发明所述原理的前提下, 还可以作出若干改进和 润饰, 这些改进和润饰也应视为本发明的保护范围。
以上所述仅是本发明的优选实施方式, 应当指出, 对于本技术领域的普 通技术人员来说, 在不脱离本发明原理的前提下, 还可以做出若干改进和润 饰, 这些改进和润饰也应视本发明的保护范围。
Claims
1.一种紫外光辐射照度自动测量装置,包括紫外光探测模块和控制模块, 所述紫外光探测模块用于测量紫外光的辐射照度; 其特征在于, 所述紫外光 辐射照度自动测量装置还包括驱动模块, 其中,
所述控制模块, 用于向所述驱动模块发出驱动信号, 并预先设定紫外光 辐射区域中的至少一任意点为测量点;
所述驱动模块, 用于根据该驱动信号驱动所述紫外光探測模块在紫外光 辐射区域内运动, 以使得所述紫外光探测模块在预先设定的测量点测量紫外 光的辐射照度。
2. 如权利要求 1所述的紫外光辐射照度自动测量装置, 其特征在于, 所述驱动模块包括反馈单元, 其用于将所述紫外光探测模块在所述紫外 光辐射区域中的位置信号传送至所述控制模块;
所述控制模块, 还用于根据该位置信号, 向所述驱动模块发送驱动控制 所述驱动模块, 还用于根据该驱动控制信号驱动所述紫外光探测模块运 动至预先设定的测量点。
3.如权利要求 1或 2所述的紫外光辐射照度自动测量装置,其特征在于, 所述紫外光探测模块包括紫外光探测单元和光电流处理单元:
所述紫外光探测单元, 用于接收紫外光照射而产生光电流;
所述光电流处理单元,用于将该光电流信号放大并转换为数字电压信号; 所述控制模块, 还用于对该数字电压信号进行计算而得到紫外光辐射照 度。
4. 如权利要求 3所述的紫外光辐射照度自动测量装置, 其特征在于, 所 述紫外光探测单元包括:
腔体;
光敏元件, 密封于所述腔体内;
隔热层, 设置于所述腔体的内夹层;
载架, 用于承载所述腔体和连接所述驱动模块。
5. 如权利要求 4所述的紫外光辐射照度自动测量装置, 其特征在于, 所 述紫外光探测单元还包括石英片, 设置于所述腔体的顶部。
6. 如权利要求 5所述的紫外光辐射照度自动测量装置, 其特征在于, 所 述石英片的紫外光透过率大于 90%。
7. 如权利要求 4至 6中任一项所述的紫外光辐射照度自动测量装置, 其 特征在于, 所述紫外光探测单元还包括:
紫外光遮挡片, 用于在非测量状态时隔开所述光敏元件和紫外光。
8. 如权利要求 4至 7中任一项所述的紫外光辐射照度自动测量装置, 其 特征在于,所述驱动模块包括第一直线电机、第二直线电机和第三直线电机, 其中,
所述第二直线电机和第三直线电机相互平行地分别设在紫外光探测区域 的一对边.上, 所述第一直线电机的底座与所述第二直线电机的动子和所述第 三直线的动子分别连接,
在所述第一直线电机的动子上连接所述紫外光探测单元。
9. 如权利要求 8所述的紫外光辐射照度自动测量装置, 其特征在于, 所述第一直线电机控制所述紫外光探测单元在紫外光探测区域中的 X轴 方向运动, 该 X轴方向是与第一直线电机的长度方向平行的方向;
所述第二直线电机和所述第三直线电机控制所述紫外光探测单元在紫外 光探测区域中的 Y轴方向运动, 该 Y轴方向是与上述 X轴方向垂直的方向。
10. 如权利要求 3至 9中任一项所述的紫外光辐射照度自动测量装置, 其特征在于, 所述光电流处理单元包括前置放大电路和模数转换电路;
所述紫外光探测单元, 用于接受紫外光照射而产生模拟光电流信号; 所述前置放大电路, 用于将该模拟光电流信号放大并转换为模拟电压信 所述模数转换电路, 用于将该模拟电压信号转换为数字电压信号; 所述控制模块, ^于对该数字电压信号进行计算而得到紫外光辐射照度 数据。
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| CN112284523A (zh) * | 2020-10-23 | 2021-01-29 | 北京七星华创集成电路装备有限公司 | 照度检测机构 |
| CN112985595A (zh) * | 2021-03-25 | 2021-06-18 | 青岛天仁微纳科技有限责任公司 | 一种用于纳米压印设备的uv灯监测装置及其监测方法 |
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| US20060065817A1 (en) * | 2004-09-24 | 2006-03-30 | Nippon Sheet Glass Company, Limited | Light detection device |
| CN101169337A (zh) * | 2006-10-24 | 2008-04-30 | 缪朝晖 | 发光二极管测量仪 |
| CN101782427A (zh) * | 2010-03-12 | 2010-07-21 | 上海电机学院 | 照度计自动定位系统 |
| CN101915612A (zh) * | 2010-08-05 | 2010-12-15 | 中国兵器工业第二〇五研究所 | 紫外辐射综合测试装置 |
| CN102435307A (zh) * | 2011-11-09 | 2012-05-02 | 深圳市华星光电技术有限公司 | Tft-lcd制程中多层uv烘烤炉的uv照度的检测方法及用于实施该方法的取片组合装置 |
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| WO2009094584A1 (en) * | 2008-01-25 | 2009-07-30 | The Regents Of The University Of California | Devices useful for vacuum ultraviolet beam characterization |
| CN102147287A (zh) * | 2010-12-29 | 2011-08-10 | 常州亿晶光电科技有限公司 | 双面扫描式辐照度测试架 |
| CN102402134A (zh) * | 2011-11-12 | 2012-04-04 | 哈尔滨工业大学 | 光刻机工件台陀螺定轴式稳定装置 |
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| US20060065817A1 (en) * | 2004-09-24 | 2006-03-30 | Nippon Sheet Glass Company, Limited | Light detection device |
| CN101169337A (zh) * | 2006-10-24 | 2008-04-30 | 缪朝晖 | 发光二极管测量仪 |
| CN101782427A (zh) * | 2010-03-12 | 2010-07-21 | 上海电机学院 | 照度计自动定位系统 |
| CN101915612A (zh) * | 2010-08-05 | 2010-12-15 | 中国兵器工业第二〇五研究所 | 紫外辐射综合测试装置 |
| CN102435307A (zh) * | 2011-11-09 | 2012-05-02 | 深圳市华星光电技术有限公司 | Tft-lcd制程中多层uv烘烤炉的uv照度的检测方法及用于实施该方法的取片组合装置 |
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