WO2014188669A1 - Current sensor - Google Patents

Current sensor Download PDF

Info

Publication number
WO2014188669A1
WO2014188669A1 PCT/JP2014/002413 JP2014002413W WO2014188669A1 WO 2014188669 A1 WO2014188669 A1 WO 2014188669A1 JP 2014002413 W JP2014002413 W JP 2014002413W WO 2014188669 A1 WO2014188669 A1 WO 2014188669A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic sensor
magnetic
current path
sensor
measured
Prior art date
Application number
PCT/JP2014/002413
Other languages
French (fr)
Japanese (ja)
Inventor
健 末永
Original Assignee
アルプス・グリーンデバイス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルプス・グリーンデバイス株式会社 filed Critical アルプス・グリーンデバイス株式会社
Priority to JP2015518065A priority Critical patent/JP6051459B2/en
Publication of WO2014188669A1 publication Critical patent/WO2014188669A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/207—Constructional details independent of the type of device used

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

[Problem] To provide a current sensor whereby lowered measurement accuracy due to the effects of a magnetic field from a neighboring current path can be minimized. [Solution] The current sensor (101) is characterized by comprising a measured current path (CB1), a neighboring current path (NB) situated parallel to the measured current path (CB1), a first magnetic sensor (11) and a second magnetic sensor (12) for detecting a magnetic field, and a magnetic member (15), wherein the first magnetic sensor (11) and the second magnetic sensor (12) are disposed to either side of a measured-side parallel interval portion (CB1p) of the measured current path (CB1), the direction of current flow through the measured-side parallel interval portion (CB1p) is designated as the X1 direction, a direction traversing the measured current path (CB1) and the measured-side parallel interval portion (CB1p) is designated as the Y direction, and a direction leading toward the first magnetic sensor (11) from the second magnetic sensor (12) is designated the Z1 direction, the X1 direction, the Y direction, and the Z1 direction being respectively orthogonal, a portion of the neighboring current path (NB) curving towards the Z1 direction side, and the magnetic member (15) being furnished to the Z1 direction side from the first magnetic sensor (11).

Description

電流センサCurrent sensor
　本発明は、電流が流れたときに発生する磁界を検出して被測定電流路に流れる電流を測定する電流センサに関し、特に、近隣電流路からの磁界の影響による精度低下を抑制できる電流センサに関する。 The present invention relates to a current sensor that detects a magnetic field generated when a current flows and measures a current flowing in a current path to be measured, and more particularly to a current sensor that can suppress a decrease in accuracy due to the influence of a magnetic field from a neighboring current path. .
　近年、各種機器の制御や監視のために、各種機器に取り付けて各種機器に流れる被測定電流を測定する電流センサが一般に用いられている。この種の電流センサとして、被測定電流路に流れる被測定電流から生じる磁界を感知する、磁気抵抗効果素子やホール素子等の磁電変換素子を用いた磁気センサを備えた電流センサが良く知られている。 In recent years, in order to control and monitor various devices, current sensors that are attached to various devices and measure currents flowing through the various devices are generally used. As this type of current sensor, a current sensor including a magnetic sensor using a magnetoelectric conversion element such as a magnetoresistive effect element or a Hall element that senses a magnetic field generated from a current to be measured flowing in a current path to be measured is well known. Yes.
　上述した電流センサとして、特許文献１（従来例）では、図１４に示すような電流測定装置（電流センサ）９００が提案されている。図１４は、従来例による電流測定装置９００の測定原理を示す図であって、図１４Ａは、電流測定装置９００の構成を示す説明図であり、図１４Ｂは、電流測定装置９００が１つの導体９０４ａに組み込まれた説明図である。 As the above-described current sensor, Patent Document 1 (conventional example) proposes a current measuring device (current sensor) 900 as shown in FIG. FIG. 14 is a diagram illustrating a measurement principle of a current measuring device 900 according to a conventional example, FIG. 14A is an explanatory diagram illustrating a configuration of the current measuring device 900, and FIG. 14B is a diagram illustrating a configuration in which the current measuring device 900 has one conductor. It is explanatory drawing integrated in 904a.
　図１４Ａに示す電流測定装置９００は、電流測定対象である導体９０４ａ（図１４Ｂに示す）に流れる電流によって生じる磁場を検知するホール素子９０２ａ及びホール素子９０２ｂ（以下、一対の磁気センサと総称して呼ぶ）と、この一対の磁気センサ（９０２ａ、９０２ｂ）の検知出力を処理する信号処理集積回路９０３とを含み、これらがプリント基板９０１に実装された構成をしている。そして、ホール素子９０２ａの感磁面９０２ｐ１及びホール素子９０２ｂの感磁面９０２ｐ２（図１４Ａに示すＺ方向に延びる面）が平板状の導体９０４ａの平面（図１４Ａに示すＸＹ方向の面）に対して略垂直になるように、プリント基板９０１に設けられた凹部９１０を導体９０４ａの一端に組み付けている。このため、導体９０４ａを流れる電流（図１４Ｂに示す矢印Ｘａ）による磁場９０５ａは、一対の磁気センサの感磁面（９０２ｐ１及び９０２ｐ２）にほぼ垂直に入り、この感磁面（９０２ｐ１及び９０２ｐ２）に垂直な法線方向（図１４Ａに示すＹ方向）である、ホール素子９０２ａの感磁方向ＪＤ１（図１４Ａに示すＹ１方向）及びホール素子９０２ｂの感磁方向ＪＤ２（図１４Ａに示すＹ２方向）と一致する。これにより、導体９０４ａに流れる電流によって生じる磁場を検知することができ、信号処理集積回路９０３が、一対の磁気センサ（９０２ａ、９０２ｂ）の検知出力を処理して導体９０４ａに流れる電流値を算出するようにしている。 14A includes a Hall element 902a and a Hall element 902b (hereinafter collectively referred to as a pair of magnetic sensors) that detect a magnetic field generated by a current flowing through a conductor 904a (shown in FIG. 14B) that is a current measurement target. And a signal processing integrated circuit 903 that processes the detection output of the pair of magnetic sensors (902a, 902b), and these are mounted on a printed circuit board 901. Then, the magnetic sensitive surface 902p 1 of the Hall element 902a and the magnetic sensitive surface 902p 2 of the Hall element 902b (the surface extending in the Z direction shown in FIG. 14A) are the planes of the flat conductor 904a (the surfaces in the XY direction shown in FIG. 14A). A recess 910 provided in the printed circuit board 901 is assembled to one end of the conductor 904a so as to be substantially perpendicular to the conductor 904a. For this reason, the magnetic field 905a caused by the current flowing through the conductor 904a (arrow Xa shown in FIG. 14B) enters substantially perpendicular to the magnetic sensitive surfaces (902p 1 and 902p 2 ) of the pair of magnetic sensors, and this magnetic sensitive surface (902p 1 and 902p 1 and 902p 2 ) perpendicular to the normal direction (Y direction shown in FIG. 14A), the magnetic sensing direction JD1 of the Hall element 902a (Y1 direction shown in FIG. 14A) and the magnetic sensitive direction JD2 of the Hall element 902b (shown in FIG. 14A). Y2 direction). Thereby, the magnetic field generated by the current flowing through the conductor 904a can be detected, and the signal processing integrated circuit 903 processes the detection outputs of the pair of magnetic sensors (902a, 902b) to calculate the current value flowing through the conductor 904a. I am doing so.
　また、上述のような位置関係に構成されているので、図１４Ｂに示すように、導体９０４ａに隣接する導体（近隣電流路）９０４ｂを流れる電流（図１４Ｂに示す矢印Ｘｂ）による磁場９０５ｂは、感磁面（９０２ｐ１及び９０２ｐ２）に対してほぼ平行となるため、それによるホール起電力は極めて小さくなるとしている。 Further, since the positional relationship is as described above, as shown in FIG. 14B, the magnetic field 905b by the current (arrow Xb shown in FIG. 14B) flowing through the conductor (neighboring current path) 904b adjacent to the conductor 904a is to become substantially parallel to the magnetic sensitive surface (902P 1 and 902P 2), Hall electromotive force caused thereby is an extremely small.
国際公開第２００６／０９０７６９号International Publication No. 2006/090769
　しかしながら、一対の磁気センサ（９０２ａ、９０２ｂ）近傍の磁場９０５ｂを詳細に見ると、必ずしも感磁面（９０２ｐ１及び９０２ｐ２）に対して近傍の磁場９０５ｂが平行となっていない。図１５は、従来例における、一対の磁気センサ（９０２ａ、９０２ｂ）近傍を示した模式図であって、図１５Ａは、図１４Ｂに示す一対の磁気センサ（９０２ａ、９０２ｂ）近傍の磁場９０５ｂを示した拡大平面図であり、図１５Ｂは、従来例の実施例８の構成で一対の磁気センサ（９０２ａ、９０２ｂ）近傍の磁場９０５ａ及び磁場９０５ｂを示した図であり、図１５Ｃは、従来例の実施例９の構成（導体（近隣電流路）９０４ｃが追加されている）で一対の磁気センサ（９０２ａ、９０２ｂ）近傍の磁場９０５ａ、磁場９０５ｂ及び磁場９０５ｃを示した図である。図１５Ａに示すように、一方の磁気センサ（ホール素子９０２ａ）に入る磁場９０５ｂは、感磁面９０２ｐ１に対して斜めに入っており、他方の磁気センサ（ホール素子９０２ｂ）に入る磁場９０５ｂは、感磁面９０２ｐ２に対して逆向きの斜めに入っている。 However, a pair of magnetic sensors (902a, 902b) when viewed in detail the magnetic field 905b in the vicinity of, not in the parallel magnetic field 905b in the vicinity with respect to necessarily sensitive surface (902P 1 and 902P 2). 15 is a schematic diagram showing the vicinity of a pair of magnetic sensors (902a, 902b) in a conventional example, and FIG. 15A shows a magnetic field 905b near the pair of magnetic sensors (902a, 902b) shown in FIG. 14B. FIG. 15B is a diagram showing a magnetic field 905a and a magnetic field 905b in the vicinity of the pair of magnetic sensors (902a, 902b) in the configuration of the eighth embodiment of the conventional example, and FIG. 15C is a diagram of the conventional example. It is the figure which showed the magnetic field 905a, the magnetic field 905b, and the magnetic field 905c near a pair of magnetic sensor (902a, 902b) by the structure (The conductor (neighboring current path) 904c is added) of Example 9. FIG. As shown in FIG. 15A, the magnetic field 905b entering the one magnetic sensor (Hall element 902a) is entered obliquely to the sensitive surface 902P 1, the magnetic field 905b enters the other magnetic sensor (Hall element 902b) , it has entered diagonally in the opposite direction with respect to the magnetic sensing surface 902p 2.
　特に、ホール素子９０２ａでは、ホール素子９０２ａの感磁方向ＪＤ１と磁場９０５ｂのＹ方向成分の向きとが一致した状態となっているとともに、ホール素子９０２ｂでは、ホール素子９０２ｂの感磁方向ＪＤ２と磁場９０５ｂのＹ方向成分の向きとが、ホール素子９０２ａと同様に一致した状態となっている。つまり、隣接の導体９０４ｂによる磁場９０５ｂの影響は、それぞれの磁気センサ（ホール素子９０２ａ及びホール素子９０２ｂ）の感磁方向（ＪＤ１、ＪＤ２）に対して、同じように与えることになる。このため、一対の磁気センサから得られる検出情報を差動処理しても、この隣接の導体（近隣電流路）９０４ｂによる磁場９０５ｂの影響を排除できなかったという課題があった。 In particular, in the Hall element 902a, the magnetic sensing direction JD1 of the Hall element 902a and the direction of the Y direction component of the magnetic field 905b are in agreement with each other, and in the Hall element 902b, the magnetic sensing direction JD2 of the Hall element 902b and the magnetic field are aligned. The direction of the Y direction component of 905b is in the same state as the Hall element 902a. That is, the influence of the magnetic field 905b by the adjacent conductor 904b is similarly applied to the magnetic sensing directions (JD1, JD2) of the respective magnetic sensors (Hall element 902a and Hall element 902b). For this reason, even if the detection information obtained from the pair of magnetic sensors is differentially processed, there is a problem in that the influence of the magnetic field 905b due to the adjacent conductor (neighboring current path) 904b cannot be eliminated.
　また、感磁面（９０２ｐ１及び９０２ｐ２）に対して近傍の磁場９０５ｂ（磁場９０５ｃ）が平行となっていないこの問題を解決するために、図１５Ｂ及び１５Ｃに示すような手段がとられている。しかしながら、自身の磁場９０５ａと近傍の磁場９０５ｂ（磁場９０５ｃ）とに対応して、一対の磁気センサ（ホール素子９０２ａ及びホール素子９０２ｂ）の角度をそれぞれ変更する手段では、手間を要し、実質的に持続可能なことではなかった。 Further, in order to solve this problem in which the magnetic field 905b (magnetic field 905c) in the vicinity is not parallel to the magnetic sensitive surfaces (902p 1 and 902p 2 ), measures as shown in FIGS. 15B and 15C are taken. Yes. However, the means for changing the angle of each of the pair of magnetic sensors (Hall element 902a and Hall element 902b) corresponding to its own magnetic field 905a and the nearby magnetic field 905b (magnetic field 905c) is laborious and substantial. It was not sustainable.
　本発明は、上述した課題を解決するもので、近隣電流路からの磁界の影響による測定精度の低下を抑制できる電流センサを提供することを目的とする。 The present invention solves the above-described problems, and an object thereof is to provide a current sensor that can suppress a decrease in measurement accuracy due to the influence of a magnetic field from a neighboring current path.
　この課題を解決するために、本発明の電流センサは、被測定電流が流れる被測定電流路と、前記被測定電流路と平行に配置された近隣側平行区間部を有する近隣電流路と、被測定電流路に前記被測定電流が流れたときに発生する磁界を検出する第１磁気センサ及び第２磁気センサと、外部磁界の影響を低減するための磁気部材と、を備えた電流センサであって、前記第１磁気センサ及び前記第２磁気センサが、前記近隣側平行区間部と平行に配置された前記被測定電流路の被測定側平行区間部を挟んで配設され、前記第１磁気センサと前記第２磁気センサとで挟まれる位置の前記被測定側平行区間部に流れる電流の方向をＸ１方向とし、前記被測定電流路と前記近隣電流路とを横切る方向をＹ方向とし、前記第２磁気センサから前記第１磁気センサへ向かう方向をＺ１方向とすると、前記Ｘ１方向と前記Ｙ方向と前記Ｚ１方向とはそれぞれ直交し、前記第１磁気センサ及び前記第２磁気センサの近傍において、前記近隣電流路の一部が前記Ｚ１方向側に曲がっており、前記磁気部材が、前記第１磁気センサよりもＺ１方向側に設けられていることを特徴としている。 In order to solve this problem, a current sensor of the present invention includes a measured current path through which a measured current flows, a neighboring current path having a neighboring parallel section disposed in parallel with the measured current path, A current sensor comprising a first magnetic sensor and a second magnetic sensor for detecting a magnetic field generated when the current to be measured flows in a measurement current path, and a magnetic member for reducing the influence of an external magnetic field. The first magnetic sensor and the second magnetic sensor are disposed across a measured parallel segment section of the measured current path disposed in parallel with the neighboring parallel segment section, and the first magnetic sensor The direction of the current flowing in the measured side parallel section at the position sandwiched between the sensor and the second magnetic sensor is the X1 direction, the direction crossing the measured current path and the neighboring current path is the Y direction, From the second magnetic sensor to the first magnet When the direction toward the sensor is the Z1 direction, the X1 direction, the Y direction, and the Z1 direction are orthogonal to each other, and a part of the neighboring current path is in the vicinity of the first magnetic sensor and the second magnetic sensor. The magnetic member is bent toward the Z1 direction, and the magnetic member is provided closer to the Z1 direction than the first magnetic sensor.
　これによれば、本発明の電流センサは、近隣電流路の近隣側平行区間部と被測定電流路の被測定側平行区間部とがＸ１方向に平行に配置され、近隣電流路の一部をＺ１方向側に折り曲げたので、被測定側平行区間部における第１磁気センサ及び第２磁気センサの位置において、近隣電流路を流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサの位置及び第２磁気センサの位置で同じ方向にすることができる。このため、第１磁気センサ１１及び第２磁気センサの感度軸方向がＺ方向と直交するＹ方向なので、第１磁気センサ及び第２磁気センサが受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。このことにより、第１磁気センサ及び第２磁気センサによる差動処理を行い易くすることができる。しかも、磁気部材を第１磁気センサよりもＺ１方向側に設けているので、曲げられた部分の近隣電流路の磁界の影響を強く受ける第１磁気センサに対して、この影響を低減することができる。このため、第１磁気センサ及び第２磁気センサが受ける磁界の強さを同じようにすることができる。これらのことにより、同じ向きで同じ強さの近隣電流路からの磁界は、差動処理で容易に相殺されるため、近隣電流路からの磁界の影響による測定精度の低下を抑制することができる。 According to this, in the current sensor of the present invention, the neighboring parallel section of the neighboring current path and the measured parallel section of the measured current path are arranged in parallel in the X1 direction, and a part of the neighboring current path is arranged. Since the first magnetic sensor is bent in the Z1 direction side, the direction of the Z direction component of the magnetic flux generated by the current flowing in the neighboring current path at the position of the first magnetic sensor and the second magnetic sensor in the parallel section to be measured is determined by the first magnetic sensor. The position and the position of the second magnetic sensor can be in the same direction. For this reason, since the sensitivity axis directions of the first magnetic sensor 11 and the second magnetic sensor are the Y direction orthogonal to the Z direction, the Y direction component of the magnetic flux received by the first magnetic sensor and the second magnetic sensor can be reduced as much as possible. The Y direction component of the magnetic flux can be made uniform. As a result, differential processing by the first magnetic sensor and the second magnetic sensor can be facilitated. In addition, since the magnetic member is provided on the Z1 direction side of the first magnetic sensor, this influence can be reduced with respect to the first magnetic sensor that is strongly influenced by the magnetic field of the neighboring current path in the bent portion. it can. For this reason, the strength of the magnetic field received by the first magnetic sensor and the second magnetic sensor can be made the same. As a result, the magnetic field from the neighboring current path having the same direction and the same strength can be easily canceled by the differential processing, so that a decrease in measurement accuracy due to the influence of the magnetic field from the neighboring current path can be suppressed. .
　また、本発明の電流センサは、被測定電流が流れる被測定電流路と、前記被測定電流路と平行に配置された近隣側平行区間部を有する近隣電流路と、被測定電流路に前記被測定電流が流れたときに発生する磁界を検出する第１磁気センサ及び第２磁気センサと、外部磁界の影響を低減するための磁気部材と、を備えた電流センサであって、前記第１磁気センサ及び前記第２磁気センサが、前記近隣側平行区間部と平行に配置された前記被測定電流路の被測定側平行区間部を挟んで配設され、前記第１磁気センサと前記第２磁気センサとで挟まれる位置の前記被測定側平行区間部に流れる電流の方向をＸ１方向とし、前記被測定電流路と前記近隣電流路とを横切る方向をＹ方向とし、前記第２磁気センサから前記第１磁気センサへ向かう方向をＺ１方向とすると、前記Ｘ１方向と前記Ｙ方向と前記Ｚ１方向とはそれぞれ直交し、前記第１磁気センサ及び前記第２磁気センサの近傍において、前記近隣電流路の一部が前記Ｚ１方向側に曲がっており、前記磁気部材が、前記第１磁気センサよりもＺ１方向側に設けられた第１磁気部材と、前記第２磁気センサよりもＺ１方向側と反対のＺ２方向側に設けられた第２磁気部材と、を有し、前記第２磁気部材が、前記第１磁気部材よりも小さいことを特徴としている。 Further, the current sensor of the present invention includes a current path to be measured through which a current to be measured flows, a neighboring current path having a neighboring parallel section disposed in parallel with the current to be measured, and a current to be measured to the current to be measured. A current sensor comprising a first magnetic sensor and a second magnetic sensor for detecting a magnetic field generated when a measurement current flows, and a magnetic member for reducing the influence of an external magnetic field, wherein the first magnetic A sensor and the second magnetic sensor are disposed across a measured-side parallel section of the measured current path disposed in parallel with the neighboring-side parallel section, and the first magnetic sensor and the second magnetic sensor The direction of the current flowing in the measured side parallel section at the position sandwiched by the sensor is the X1 direction, the direction crossing the measured current path and the neighboring current path is the Y direction, and from the second magnetic sensor Direction toward the first magnetic sensor Assuming the Z1 direction, the X1 direction, the Y direction, and the Z1 direction are orthogonal to each other, and in the vicinity of the first magnetic sensor and the second magnetic sensor, a part of the neighboring current path is on the Z1 direction side. The first magnetic member provided on the Z1 direction side with respect to the first magnetic sensor and the second magnetic sensor provided on the Z2 direction side opposite to the Z1 direction side are bent. 2 magnetic members, wherein the second magnetic member is smaller than the first magnetic member.
　これによれば、近隣電流路の近隣側平行区間部と被測定電流路の被測定側平行区間部とがＸ１方向に平行に配置され、近隣電流路の一部をＺ１方向側に折り曲げたので、被測定側平行区間部における第１磁気センサ及び第２磁気センサの位置において、近隣電流路を流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサの位置及び第２磁気センサの位置で同じ方向にすることができる。このため、第１磁気センサ及び第２磁気センサの感度軸方向がＺ方向と直交するＹ方向なので、第１磁気センサ及び第２磁気センサが受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。このことにより、第１磁気センサ及び第２磁気センサによる差動処理を行い易くすることができる。しかも、第１磁気部材を第１磁気センサよりもＺ１方向側に設け、第２磁気センサのＺ２方向側に設けた第２磁気部材が第１磁気部材よりも小さいので、曲げられた部分の近隣電流路の磁界の影響を強く受ける第１磁気センサに対して、この影響をより低減することができるとともに、第１磁気センサに受けるＺ１側からの外部磁界の影響と第２磁気センサに受けるＺ２側からの外部磁界の影響とをバランス良く低減することができる。このため、第１磁気センサ及び第２磁気センサが受ける磁界の強さを同じようにすることができる。これらのことにより、同じ向きで同じ強さの近隣電流路からの磁界は、差動処理で容易に相殺されるため、近隣電流路からの磁界の影響による測定精度の低下を抑制することができる。更に、第１磁気センサ及び第２磁気センサに対して、第１磁気部材及び第２磁気部材をそれぞれ配設したので、第１磁気センサ及び第２磁気センサを磁気シールドすることができ、近隣電流路以外からの外部磁界からの影響も小さくすることができる。 According to this, the neighboring parallel section of the neighboring current path and the measured parallel section of the measured current path are arranged in parallel to the X1 direction, and a part of the neighboring current path is bent to the Z1 direction side. The direction of the Z-direction component of the magnetic flux generated by the current flowing in the neighboring current path at the position of the first magnetic sensor and the second magnetic sensor in the parallel side section to be measured is determined by the position of the first magnetic sensor and the second magnetic sensor. Can be in the same direction in position. For this reason, since the sensitivity axis directions of the first magnetic sensor and the second magnetic sensor are the Y direction orthogonal to the Z direction, the Y direction component of the magnetic flux received by the first magnetic sensor and the second magnetic sensor can be reduced as much as possible, and the magnetic flux Can be made uniform in the Y direction. As a result, differential processing by the first magnetic sensor and the second magnetic sensor can be facilitated. Moreover, since the first magnetic member is provided on the Z1 direction side of the first magnetic sensor and the second magnetic member provided on the Z2 direction side of the second magnetic sensor is smaller than the first magnetic member, the vicinity of the bent portion For the first magnetic sensor that is strongly influenced by the magnetic field of the current path, this effect can be further reduced, and the influence of the external magnetic field from the Z1 side received by the first magnetic sensor and the Z2 received by the second magnetic sensor. The influence of the external magnetic field from the side can be reduced in a balanced manner. For this reason, the strength of the magnetic field received by the first magnetic sensor and the second magnetic sensor can be made the same. As a result, the magnetic field from the neighboring current path having the same direction and the same strength can be easily canceled by the differential processing, so that a decrease in measurement accuracy due to the influence of the magnetic field from the neighboring current path can be suppressed. . Furthermore, since the first magnetic member and the second magnetic member are respectively disposed with respect to the first magnetic sensor and the second magnetic sensor, the first magnetic sensor and the second magnetic sensor can be magnetically shielded, and the adjacent current The influence from the external magnetic field from other than the road can be reduced.
　また、本発明の電流センサは、前記第１磁気センサ及び前記第２磁気センサの近傍において、前記被測定電流路の一部が前記Ｚ１方向側に曲がっていることを特徴としている。 The current sensor of the present invention is characterized in that a part of the measured current path is bent in the Z1 direction side in the vicinity of the first magnetic sensor and the second magnetic sensor.
　これによれば、被測定電流路の一部をＺ１方向側に折り曲げたので、被測定側平行区間部における第１磁気センサ及び第２磁気センサの位置において、被測定電流路の折り曲げた部分に流れる電流が作る磁束のＹ方向成分の向きがＹ方向になる。このため、第１磁気センサの位置及び第２磁気センサの位置で磁束の向きを同じ方向にすることができ、第１磁気センサ及び第２磁気センサの感度軸方向であるＹ方向の磁束のＹ方向成分を同等にすることができる。このことにより、磁束のＹ方向成分を均等にでき、第１磁気センサ及び第２磁気センサの位置において、差動処理をより行い易くすることができる。以上により、同じ向きで同じ強さの被測定電流路の折り曲げた部分からの磁界は、差動処理で容易に相殺されるため、測定精度の低下をより抑制することができる。 According to this, since a part of the current path to be measured is bent in the Z1 direction side, at the position of the first magnetic sensor and the second magnetic sensor in the parallel side section to be measured, the portion of the current path to be measured is bent. The direction of the Y direction component of the magnetic flux generated by the flowing current is the Y direction. For this reason, the direction of magnetic flux can be made the same direction at the position of the first magnetic sensor and the position of the second magnetic sensor, and Y of the magnetic flux in the Y direction that is the sensitivity axis direction of the first magnetic sensor and the second magnetic sensor. Directional components can be made equal. Thereby, the Y-direction component of the magnetic flux can be made uniform, and the differential processing can be made easier at the positions of the first magnetic sensor and the second magnetic sensor. As described above, since the magnetic field from the bent portion of the current path to be measured having the same direction and the same strength is easily canceled by the differential processing, it is possible to further suppress a decrease in measurement accuracy.
　本発明の電流センサは、被測定側平行区間部における第１磁気センサ及び第２磁気センサの位置において、近隣電流路を流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサの位置及び第２磁気センサの位置で同じ方向にすることができる。このため、第１磁気センサ１１及び第２磁気センサの感度軸方向がＺ方向と直交するＹ方向なので、第１磁気センサ及び第２磁気センサが受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。このことにより、第１磁気センサ及び第２磁気センサによる差動処理を行い易くすることができる。しかも、曲げられた部分の近隣電流路の磁界の影響を強く受ける第１磁気センサに対して、磁気部材により、この影響を低減することができる。このため、第１磁気センサ及び第２磁気センサが受ける磁界の強さを同じようにすることができる。これらのことにより、同じ向きで同じ強さの近隣電流路からの磁界は、差動処理で容易に相殺されるため、近隣電流路からの磁界の影響による測定精度の低下を抑制することができる。 In the current sensor of the present invention, the direction of the Z-direction component of the magnetic flux generated by the current flowing in the neighboring current path at the position of the first magnetic sensor and the second magnetic sensor in the parallel section to be measured is determined by the position of the first magnetic sensor. And in the same direction at the position of the second magnetic sensor. For this reason, since the sensitivity axis directions of the first magnetic sensor 11 and the second magnetic sensor are the Y direction orthogonal to the Z direction, the Y direction component of the magnetic flux received by the first magnetic sensor and the second magnetic sensor can be reduced as much as possible. The Y direction component of the magnetic flux can be made uniform. As a result, differential processing by the first magnetic sensor and the second magnetic sensor can be facilitated. Moreover, this influence can be reduced by the magnetic member with respect to the first magnetic sensor that is strongly influenced by the magnetic field of the neighboring current path of the bent portion. For this reason, the strength of the magnetic field received by the first magnetic sensor and the second magnetic sensor can be made the same. As a result, the magnetic field from the neighboring current path having the same direction and the same strength can be easily canceled by the differential processing, so that a decrease in measurement accuracy due to the influence of the magnetic field from the neighboring current path can be suppressed. .
本発明の第１実施形態の電流センサを説明する斜視図である。It is a perspective view explaining the current sensor of a 1st embodiment of the present invention. 本発明の第１実施形態の電流センサを説明する構成図であって、図１に示すＺ１側から見た正面図である。It is a block diagram explaining the current sensor of 1st Embodiment of this invention, Comprising: It is the front view seen from the Z1 side shown in FIG. 本発明の第１実施形態の電流センサを説明する構成図であって、図１に示すＸ１側から見た側面図である。It is a block diagram explaining the current sensor of 1st Embodiment of this invention, Comprising: It is the side view seen from the X1 side shown in FIG. 本発明の第１実施形態の電流センサを説明する図であって、シミュレーションに用いたモデル図である。It is a figure explaining the current sensor of a 1st embodiment of the present invention, and is a model figure used for simulation. 本発明の第１実施形態の電流センサを説明する模式図であって、図５Ａは、第１実施形態のモデルのシミュレーション結果を示した図であり、図５Ｂは、比較例のモデルのシミュレーション結果を示した図である。FIG. 5A is a schematic diagram illustrating the current sensor according to the first embodiment of the present invention, and FIG. 5A is a diagram illustrating a simulation result of the model of the first embodiment, and FIG. 5B is a simulation result of the model of the comparative example. FIG. 本発明の第２実施形態の電流センサを説明する斜視図である。It is a perspective view explaining the current sensor of a 2nd embodiment of the present invention. 本発明の第２実施形態の電流センサを説明する構成図であって、図６に示すＺ１側から見た正面図である。It is a block diagram explaining the current sensor of 2nd Embodiment of this invention, Comprising: It is the front view seen from the Z1 side shown in FIG. 本発明の第２実施形態の電流センサを説明する構成図であって、図６に示すＸ１側から見た側面図である。It is a block diagram explaining the current sensor of 2nd Embodiment of this invention, Comprising: It is the side view seen from the X1 side shown in FIG. 本発明の第３実施形態の電流センサを説明する斜視図である。It is a perspective view explaining the current sensor of a 3rd embodiment of the present invention. 本発明の第３実施形態の電流センサを説明する構成図であって、図１０Ａは、図９に示すＺ１側から見た正面図であり、図１０Ｂは、図９に示すＺ２側から見た背面図である。It is a block diagram explaining the current sensor of 3rd Embodiment of this invention, Comprising: FIG. 10A is the front view seen from the Z1 side shown in FIG. 9, FIG. 10B was seen from the Z2 side shown in FIG. It is a rear view. 本発明の第３実施形態の電流センサを説明する構成図であって、図９に示すＸ１側から見た側面図である。It is a block diagram explaining the current sensor of 3rd Embodiment of this invention, Comprising: It is the side view seen from the X1 side shown in FIG. 本発明の電流センサの変形例を説明する構成図であって、図１２Ａは、第１実施形態の電流センサを変えた変形例１の正面図であり、図１２Ｂは、第１実施形態の電流センサを変えた変形例２の側面図である。It is a block diagram explaining the modification of the current sensor of this invention, Comprising: FIG. 12A is a front view of the modification 1 which changed the current sensor of 1st Embodiment, FIG. 12B is the electric current of 1st Embodiment. It is a side view of the modification 2 which changed the sensor. 本発明の電流センサの変形例を説明する構成図であって、図１３Ａは、第２実施形態を変えた変形例３の斜視図であり、図１３Ｂは、第２実施形態を変えた変形例４の斜視図である。FIG. 13A is a configuration diagram illustrating a modified example of the current sensor of the present invention, FIG. 13A is a perspective view of Modified Example 3 in which the second embodiment is modified, and FIG. 13B is a modified example in which the second embodiment is modified. 4 is a perspective view of FIG. 従来例による電流測定装置の測定原理を示す図であって、図１４Ａは、電流測定装置の構成を示す説明図であり、図１４Ｂは、電流測定装置が１つの導体に組み込まれた説明図である。FIG. 14A is a diagram illustrating a measurement principle of a current measuring device according to a conventional example, FIG. 14A is an explanatory diagram illustrating a configuration of the current measuring device, and FIG. 14B is an explanatory diagram in which the current measuring device is incorporated into one conductor. is there. 従来例における、一対の磁気センサ近傍を示した模式図であって、図１５Ａは、図１４Ｂに示す一対の磁気センサ近傍の磁場を示した拡大平面図であり、図１５Ｂは、従来例の実施例８の構成図であり、図１５Ｃは、従来例の実施例９の構成図である。15A is a schematic diagram showing the vicinity of a pair of magnetic sensors in a conventional example, FIG. 15A is an enlarged plan view showing a magnetic field in the vicinity of the pair of magnetic sensors shown in FIG. 14B, and FIG. It is a block diagram of Example 8, FIG. 15C is a block diagram of Example 9 of a prior art example.
　以下、本発明の実施の形態について図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　［第１実施形態］
　図１は、本発明の第１実施形態の電流センサ１０１を説明する斜視図である。図２は、本発明の第１実施形態の電流センサ１０１を説明する構成図であって、図１に示すＺ１側から見た正面図である。図３は、本発明の第１実施形態の電流センサ１０１を説明する構成図であって、図１に示すＸ１側から見た側面図である。なお、図１ないし図３に示す被測定電流路ＣＢ１及び近隣電流路ＮＢは、その一部をだけを示している。 [First Embodiment]
FIG. 1 is a perspective view illustrating a current sensor 101 according to the first embodiment of the present invention. FIG. 2 is a configuration diagram illustrating the current sensor 101 according to the first embodiment of the present invention, and is a front view seen from the Z1 side shown in FIG. FIG. 3 is a configuration diagram illustrating the current sensor 101 according to the first embodiment of the present invention, and is a side view seen from the X1 side shown in FIG. Note that only part of the measured current path CB1 and the neighboring current path NB shown in FIGS. 1 to 3 is shown.
　本発明の第１実施形態の電流センサ１０１は、図１ないし図３に示すように、被測定電流が流れる被測定電流路ＣＢ１と、被測定電流路ＣＢ１と平行に配置された近隣電流路ＮＢと、磁界を検出する第１磁気センサ１１及び第２磁気センサ１２と、外部磁界の影響を低減するための磁気部材１５と、を備えて構成される。他に、電流センサ１０１には、第１磁気センサ１１を搭載する第１基板１９Ａと、第２磁気センサ１２を搭載する第２基板１９Ｂと、が設けられている。なお、図示はしていないが、被測定電流路ＣＢ１、第１磁気センサ１１及び第２磁気センサ１２、磁気部材１５、第１基板１９Ａ及び第２基板１９Ｂを収容する筐体は、必要に応じて用いられる。 As shown in FIGS. 1 to 3, the current sensor 101 according to the first embodiment of the present invention includes a measured current path CB1 through which a measured current flows and a neighboring current path NB arranged in parallel with the measured current path CB1. A first magnetic sensor 11 and a second magnetic sensor 12 for detecting a magnetic field, and a magnetic member 15 for reducing the influence of an external magnetic field. In addition, the current sensor 101 is provided with a first substrate 19A on which the first magnetic sensor 11 is mounted and a second substrate 19B on which the second magnetic sensor 12 is mounted. Although not shown in the drawing, the housing for accommodating the current path CB1, the first magnetic sensor 11 and the second magnetic sensor 12, the magnetic member 15, the first substrate 19A and the second substrate 19B is provided as necessary. Used.
　被測定電流路ＣＢ１は、銅（Ｃｕ）等の導電性の良い材質を用い、図１及び図３に示すように、被測定電流路ＣＢ１の一部がＬ字状に曲げられて形成されている。また、被測定電流路ＣＢ１には、第１磁気センサ１１と第２磁気センサ１２とで挟まれる位置に、被測定側平行区間部ＣＢ１ｐを有している。 The measured current path CB1 is made of a material having good conductivity such as copper (Cu), and as shown in FIGS. 1 and 3, a part of the measured current path CB1 is bent into an L shape. Yes. Further, the measured current path CB1 has a measured-side parallel section CB1p at a position sandwiched between the first magnetic sensor 11 and the second magnetic sensor 12.
　ここで、被測定側平行区間部ＣＢ１ｐに流れる電流の方向をＸ１方向とすると、図１に示すように、被測定側平行区間部ＣＢ１ｐはＸ方向に延設されており、Ｘ方向と直交するＺ方向には、第１磁気センサ１１と第２磁気センサ１２とが配設され、Ｘ方向及びＺ方向とそれぞれ直交するＹ方向には、近隣電流路ＮＢが配設されている。なお、第２磁気センサ１２から第１磁気センサ１１へ向かう方向をＺ１方向としている。これにより、被測定電流路ＣＢ１の曲げられた方向は、Ｚ１方向側になり、本発明の第１実施形態では、被測定側平行区間部ＣＢ１ｐに対して、直角に曲げられている。 Here, assuming that the direction of the current flowing in the measured side parallel section CB1p is the X1 direction, as shown in FIG. 1, the measured side parallel section CB1p extends in the X direction and is orthogonal to the X direction. A first magnetic sensor 11 and a second magnetic sensor 12 are disposed in the Z direction, and a neighboring current path NB is disposed in the Y direction orthogonal to the X direction and the Z direction. The direction from the second magnetic sensor 12 toward the first magnetic sensor 11 is the Z1 direction. As a result, the bent direction of the measured current path CB1 is the Z1 direction side, and in the first embodiment of the present invention, the measured current path CB1 is bent at a right angle with respect to the measured parallel section CB1p.
　近隣電流路ＮＢは、銅（Ｃｕ）等の導電性の良い材質を用い、図１及び図２に示すように、被測定電流路ＣＢ１と平行に配置され、更に、近隣電流路ＮＢの一部もＺ１方向側に向けてＬ字状に曲げられて形成されている。 The neighboring current path NB is made of a material having good conductivity such as copper (Cu), and is arranged in parallel with the measured current path CB1 as shown in FIGS. 1 and 2, and further, a part of the neighboring current path NB. Is also bent in an L shape toward the Z1 direction.
　また、近隣電流路ＮＢには、被測定側平行区間部ＣＢ１ｐと平行に配置された近隣側平行区間部ＮＢｐを有しており、近隣側平行区間部ＮＢｐに流れる電流の方向もＸ１方向である。また、被測定電流路ＣＢ１と近隣電流路ＮＢとを横切る方向がＹ方向となっている。また、本発明の第１実施形態では、被測定電流路ＣＢ１と同様に、近隣側平行区間部ＮＢｐに対して、直角に曲げられている。なお、図１及び図２の構成図では、被測定電流路ＣＢ１のＹ２側に近隣電流路ＮＢが平行に配設されているが、Ｙ２側に限らず、Ｙ１側でも良いし、Ｙ１側及びＹ２側の両方に近隣電流路ＮＢが平行に配設されていても良い。また、被測定電流路ＣＢ１及び近隣電流路ＮＢの材質に銅（Ｃｕ）を用いたが、これに限定されるものではなく、導電性の良い材質であれば良く、例えばアルミニウム（Ａｌ）等でも良い。 Further, the neighboring current path NB has a neighboring parallel section NBp arranged in parallel with the measured side parallel section CB1p, and the direction of the current flowing through the neighboring parallel section NBp is also the X1 direction. . Further, the direction crossing the measured current path CB1 and the neighboring current path NB is the Y direction. Moreover, in 1st Embodiment of this invention, like the to-be-measured electric current path CB1, it is bent at right angle with respect to the near side parallel section part NBp. In the configuration diagrams of FIGS. 1 and 2, the neighboring current path NB is arranged in parallel on the Y2 side of the measured current path CB1, but the Y1 side may be used instead of the Y2 side, and the Y1 side and Neighboring current paths NB may be arranged in parallel on both sides of Y2. Further, although copper (Cu) is used as the material of the measured current path CB1 and the neighboring current path NB, the material is not limited to this, and any material having good conductivity, such as aluminum (Al), may be used. good.
　第１磁気センサ１１及び第２磁気センサ１２は、被測定電流路ＣＢ１に被測定電流が流れたときに発生する磁界を検出するセンサであって、例えば、巨大磁気抵抗効果を用いた磁気検出素子（ＧＭＲ(Giant　Magneto　Resistive)素子という）がパッケージングされている。また、前述したが、第１磁気センサ１１及び第２磁気センサ１２は、図１及び図３に示すように、近隣側平行区間部ＮＢｐと平行に配置された被測定電流路ＣＢ１の被測定側平行区間部ＣＢ１ｐを挟んで配設されている。更に、第１磁気センサ１１及び第２磁気センサ１２の近傍において、近隣電流路ＮＢの一部がＺ１方向側に曲がる位置になるように、第１磁気センサ１１及び第２磁気センサ１２を配設している。 The first magnetic sensor 11 and the second magnetic sensor 12 are sensors for detecting a magnetic field generated when a current to be measured flows through the current path CB1 to be measured. For example, a magnetic detection element using a giant magnetoresistance effect (GMR (Giant Magneto Resistive) element) is packaged. Further, as described above, the first magnetic sensor 11 and the second magnetic sensor 12 are, as shown in FIGS. 1 and 3, the measured side of the measured current path CB1 arranged in parallel with the neighboring parallel section NBp. Arranged across the parallel section CB1p. Further, in the vicinity of the first magnetic sensor 11 and the second magnetic sensor 12, the first magnetic sensor 11 and the second magnetic sensor 12 are arranged so that a part of the neighboring current path NB is bent to the Z1 direction side. is doing.
　また、第１磁気センサ１１及び第２磁気センサ１２は、ＧＭＲ素子をシリコン基板上に作製した後、ＧＭＲ素子を切り出してチップを作り、切り出されたＧＭＲ素子のチップと信号の取り出しのためのリード端子（１１ｒ、１２ｒ）とを電気的に接続して、熱硬化性の合成樹脂でパッケージングしている。なお、このＧＭＲ素子が、磁界の変化に応じてＧＭＲ素子における抵抗値が変化する性質を有しているので、第１磁気センサ１１及び第２磁気センサ１２は、この抵抗値の変化から被測定電流路ＣＢ１に流れる電流を算出することにより、被測定電流路ＣＢ１に流れる電流を測定することができる。 In the first magnetic sensor 11 and the second magnetic sensor 12, after the GMR element is fabricated on the silicon substrate, the GMR element is cut out to form a chip, and the chip of the cut out GMR element and the lead for signal extraction are obtained. The terminals (11r, 12r) are electrically connected and packaged with a thermosetting synthetic resin. Since the GMR element has a property that the resistance value of the GMR element changes in accordance with the change of the magnetic field, the first magnetic sensor 11 and the second magnetic sensor 12 are measured from the change of the resistance value. By calculating the current flowing through the current path CB1, the current flowing through the measured current path CB1 can be measured.
　また、第１磁気センサ１１及び第２磁気センサ１２は、リード端子（１１ｒ、１２ｒ）と回路パターン（図示していない）とがはんだ付けされ、図３に示すように、被測定電流路ＣＢ１の被測定側平行区間部ＣＢ１ｐを挟んで対向配設された第１基板１９Ａ及び第２基板１９Ｂに搭載されている。そして、被測定電流路ＣＢ１に第１基板１９Ａ及び第２基板１９Ｂが配設された際に、第１磁気センサ１１の感度軸方向ＫＤ１は、図２に示すように、被測定電流路ＣＢ１の幅方向と平行な方向（図２では、Ｙ２方向）を向いて配設されているとともに、第２磁気センサ１２の感度軸方向ＫＤ２も、図１に示すように、被測定電流路ＣＢ１の幅方向と平行な方向（図１では、Ｙ２方向）を向いて配設されている。 Further, the first magnetic sensor 11 and the second magnetic sensor 12 are soldered to lead terminals (11r, 12r) and a circuit pattern (not shown), and as shown in FIG. It is mounted on the first substrate 19A and the second substrate 19B that are arranged to face each other across the measured side parallel section CB1p. When the first substrate 19A and the second substrate 19B are disposed in the measured current path CB1, as shown in FIG. 2, the sensitivity axis direction KD1 of the first magnetic sensor 11 is the same as that of the measured current path CB1. As shown in FIG. 1, the sensitivity axis direction KD2 of the second magnetic sensor 12 is also arranged in the direction parallel to the width direction (Y2 direction in FIG. 2). It is arranged facing the direction parallel to the direction (Y2 direction in FIG. 1).
　第１基板１９Ａ及び第２基板１９Ｂは、一般に広く知られている片面のプリント配線板を用いており、ガラス入りのエポキシ樹脂のベース基板に、ベース基板上に設けられた銅（Ｃｕ）等の金属箔をパターニングして、回路を構成するための回路パターンを形成している。なお、第１基板１９Ａ及び第２基板１９Ｂにガラス入りのエポキシ樹脂からなるプリント配線板を用いたが、これに限定されるものではなく、例えばセラミック配線板、フレキシブル配線板でも良い。 The first substrate 19A and the second substrate 19B use a generally well-known single-sided printed wiring board, such as copper (Cu) provided on the base substrate on an epoxy resin base substrate containing glass. The metal foil is patterned to form a circuit pattern for configuring a circuit. In addition, although the printed wiring board which consists of an epoxy resin containing glass was used for 19A of 1st substrates and the 2nd board | substrate 19B, it is not limited to this, For example, a ceramic wiring board and a flexible wiring board may be used.
　磁気部材１５は、透磁率の高い珪素鋼を用い、図１ないし図３に示すように、第１磁気センサ１１よりもＺ１方向側に設けられている。そして、Ｚ１側からの外部磁界の影響を低減している。なお、磁気部材１５の材料として珪素鋼を用いたが、磁気シールド効果を有する材質であれば、これに限るものではない。 The magnetic member 15 is made of silicon steel having a high magnetic permeability, and is provided closer to the Z1 direction than the first magnetic sensor 11 as shown in FIGS. And the influence of the external magnetic field from the Z1 side is reduced. In addition, although silicon steel was used as a material of the magnetic member 15, if it is a material which has a magnetic shielding effect, it will not restrict to this.
　ここで、近隣電流路ＮＢに流れる電流から発生する磁界の影響についてシミュレーションを行った。図４は、本発明の第１実施形態の電流センサ１０１を説明する図であって、シミュレーションに用いたモデルＭＤ１の図である。 Here, the effect of the magnetic field generated from the current flowing through the neighboring current path NB was simulated. FIG. 4 is a diagram illustrating the current sensor 101 according to the first embodiment of the present invention, and is a diagram of the model MD1 used for the simulation.
　このシミュレーションに用いたモデルＭＤ１の数値は、図４に示すように、被測定電流路ＣＢ１及び近隣電流路ＮＢ（図示していない）の全体の長さを６０（ｍｍ）、全体の幅Ｗ１を２０（ｍｍ）、被測定側平行区間部ＣＢ１ｐ及び近隣側平行区間部ＮＢｐの厚みＴ１を２（ｍｍ）とし、長さ３０（ｍｍ）のところで直角に曲げられているようにした。また、被測定電流路ＣＢ１と近隣電流路ＮＢとの間の距離を１０（ｍｍ）とした。また、第１磁気センサ１１及び第２磁気センサ１２は、被測定電流路ＣＢ１の直角に曲げられた部分から１３（ｍｍ）離れて幅Ｗ１の中央に対向する位置に配設し、第１磁気センサ１１及び第２磁気センサ１２の中心と被測定電流路ＣＢ１との距離Ｄ１をそれぞれ２（ｍｍ）とし、第１磁気センサ１１の中心と磁気部材１５との距離Ｄ２を５（ｍｍ）とした。また、磁気部材１５のサイズは、被測定電流路ＣＢ１の幅Ｗ１と同じ幅の２０（ｍｍ）とし、長さを１０（ｍｍ）、厚みＴ２を０．３（ｍｍ）とした。そして、第１磁気センサ１１が磁気部材１５の中央になるように、磁気部材１５を配設した。なお、図１ないし図３に示す電流センサ１０１は、このモデルＭＤ１を具現化したものであるが、シミュレーションを行うにあたり、近隣電流路ＮＢをＹ１側に配置した。また、図４に示すモデルＭＤ１の図は、図２に示すＸ１側から見た図となっており、説明を容易にするため、紙面の奥側の被測定電流路ＣＢ１は図示していない。 As shown in FIG. 4, the numerical values of the model MD1 used in this simulation are the total length of the measured current path CB1 and the neighboring current path NB (not shown) being 60 (mm) and the total width W1. The thickness T1 of the measured side parallel section CB1p and the adjacent side parallel section NBp was 2 (mm) and was bent at a right angle at a length of 30 (mm). Further, the distance between the measured current path CB1 and the neighboring current path NB was set to 10 (mm). The first magnetic sensor 11 and the second magnetic sensor 12 are disposed at a position facing the center of the width W1 at a distance of 13 mm from the portion bent at a right angle of the measured current path CB1. The distance D1 between the center of the sensor 11 and the second magnetic sensor 12 and the measured current path CB1 is 2 (mm), respectively, and the distance D2 between the center of the first magnetic sensor 11 and the magnetic member 15 is 5 (mm). . The size of the magnetic member 15 was 20 (mm), the same width as the width W1 of the measured current path CB1, the length was 10 (mm), and the thickness T2 was 0.3 (mm). And the magnetic member 15 was arrange | positioned so that the 1st magnetic sensor 11 might become the center of the magnetic member 15. FIG. Although the current sensor 101 shown in FIGS. 1 to 3 is an embodiment of the model MD1, the neighboring current path NB is arranged on the Y1 side in performing the simulation. Further, the model MD1 shown in FIG. 4 is a view seen from the X1 side shown in FIG. 2, and the measured current path CB1 on the back side of the drawing is not shown for easy explanation.
　また、比較例についてもシミュレーションを行っており、比較例のモデルは、被測定電流路ＣＢ１及び近隣電流路ＮＢのサイズや第１磁気センサ１１及び第２磁気センサ１２の配置距離等を同じとし、磁気部材１５を配設していない。更に、被測定電流路ＣＢ１及び近隣電流路ＮＢは、Ｚ１方向側に曲げられておらず、紙面を貫く方向に延設されている。 In addition, a simulation is performed for the comparative example, and the model of the comparative example is the same in the size of the measured current path CB1 and the neighboring current path NB, the arrangement distance of the first magnetic sensor 11 and the second magnetic sensor 12, and the like. The magnetic member 15 is not provided. Further, the measured current path CB1 and the neighboring current path NB are not bent in the Z1 direction side, but are extended in a direction penetrating the paper surface.
　図５は、本発明の第１実施形態の電流センサを説明する模式図であって、図５Ａは、第１実施形態のモデルＭＤ１のシミュレーション結果ＡＡを示した図であり、図５Ｂは、比較例のモデルのシミュレーション結果ＣＣを示した図である。図５は、近隣電流路ＮＢを流れる電流が作る磁束の流れを示している。 FIG. 5 is a schematic diagram for explaining the current sensor according to the first embodiment of the present invention. FIG. 5A is a diagram showing a simulation result AA of the model MD1 of the first embodiment, and FIG. 5B is a comparison. It is the figure which showed the simulation result CC of the model of an example. FIG. 5 shows the flow of magnetic flux generated by the current flowing through the neighboring current path NB.
　図５Ａのシミュレーション結果に示すように、第１磁気センサ１１及び第２磁気センサ１２の位置において、被測定側平行区間部ＣＢ１ｐにおける近隣電流路ＮＢを流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサ１１の位置及び第２磁気センサ１２の位置で同じ方向にすることができる。このため、第１磁気センサ１１及び第２磁気センサ１２の感度軸方向（ＫＤ１、ＫＤ２）がＺ方向と直交するＹ方向なので、第１磁気センサ１１及び第２磁気センサ１２が受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。 As shown in the simulation result of FIG. 5A, at the positions of the first magnetic sensor 11 and the second magnetic sensor 12, the direction of the Z direction component of the magnetic flux generated by the current flowing through the neighboring current path NB in the measured side parallel section CB1p is determined. The position of the first magnetic sensor 11 and the position of the second magnetic sensor 12 can be set in the same direction. For this reason, since the sensitivity axis directions (KD1, KD2) of the first magnetic sensor 11 and the second magnetic sensor 12 are the Y direction orthogonal to the Z direction, the Y direction of the magnetic flux received by the first magnetic sensor 11 and the second magnetic sensor 12 The component can be made as small as possible, and the Y direction component of the magnetic flux can be made uniform.
　一方、図５Ｂのシミュレーション結果に示すように、被測定側平行区間部ＣＢ１Ｃにおける近隣電流路ＮＢＣを流れる電流が作る磁束のＺ方向成分の向きが、第１磁気センサ１１Ｃの位置及び第２磁気センサ１２Ｃの位置で同じ方向を向いていない。このため、第１磁気センサ１１Ｃ及び第２磁気センサ１２Ｃの感度軸方向（ＫＤ１、ＫＤ２）であるＹ方向がＺ方向と直交するので、第１磁気センサ１１Ｃ及び第２磁気センサ１２Ｃが受ける磁束のＹ方向成分が大きくなり、しかも磁束のＹ方向成分が第１磁気センサ１１Ｃと第２磁気センサ１２Ｃとで、異なった値となっている。これにより、第１磁気センサ１１Ｃ及び第２磁気センサ１２Ｃによる差動処理において、大きな誤差の要因となってしまう。 On the other hand, as shown in the simulation result of FIG. 5B, the direction of the Z-direction component of the magnetic flux generated by the current flowing through the neighboring current path NBC in the measured side parallel section CB1C depends on the position of the first magnetic sensor 11C and the second magnetic sensor. It is not facing the same direction at the position of 12C. For this reason, since the Y direction which is the sensitivity axis direction (KD1, KD2) of the first magnetic sensor 11C and the second magnetic sensor 12C is orthogonal to the Z direction, the magnetic flux received by the first magnetic sensor 11C and the second magnetic sensor 12C The Y direction component is large, and the Y direction component of the magnetic flux is different between the first magnetic sensor 11C and the second magnetic sensor 12C. This causes a large error in the differential processing by the first magnetic sensor 11C and the second magnetic sensor 12C.
　また、図示していない曲げられた部分（紙面の奥側）の近隣電流路ＮＢの磁界の影響を強く受ける第１磁気センサ１１に対して、磁気部材１５により、この影響を低減することができる。 In addition, the magnetic member 15 can reduce this influence on the first magnetic sensor 11 that is strongly influenced by the magnetic field of the neighboring current path NB in a bent portion (back side of the drawing) not shown. .
　また、本発明の第１実施形態の電流センサ１０１では、被測定電流路ＣＢ１の一部をＺ１方向側に折り曲げているので、被測定側平行区間部ＣＢ１ｐにおける第１磁気センサ１１及び第２磁気センサ１２の位置において、被測定電流路ＣＢ１の折り曲げた部分に流れる電流が作る磁束の向きがＹ方向になる。このため、第１磁気センサ１１の位置及び第２磁気センサ１２の位置で磁束の向きを同じ方向にすることができ、第１磁気センサ１１及び第２磁気センサ１２の感度軸方向（ＫＤ１、ＫＤ２）であるＹ方向の磁束のＹ方向成分を同等にすることができる。 Further, in the current sensor 101 according to the first embodiment of the present invention, a part of the current path CB1 to be measured is bent toward the Z1 direction, so the first magnetic sensor 11 and the second magnetic sensor in the measured side parallel section CB1p. At the position of the sensor 12, the direction of the magnetic flux generated by the current flowing in the bent portion of the measured current path CB1 is the Y direction. For this reason, the direction of magnetic flux can be made the same direction in the position of the 1st magnetic sensor 11 and the position of the 2nd magnetic sensor 12, and the sensitivity axis direction (KD1, KD2) of the 1st magnetic sensor 11 and the 2nd magnetic sensor 12 ), The Y direction component of the Y direction magnetic flux can be made equal.
　以上のように構成された本発明の第１実施形態の電流センサ１０１における、効果について、以下に説明する。 The effects of the current sensor 101 according to the first embodiment of the present invention configured as described above will be described below.
　本発明の電流センサ１０１は、近隣電流路ＮＢの近隣側平行区間部ＮＢｐと被測定電流路ＣＢ１の被測定側平行区間部ＣＢ１ｐとがＸ１方向に平行に配置され、近隣電流路ＮＢの一部をＺ１方向側に折り曲げたので、第１磁気センサ１１及び第２磁気センサ１２の位置において、被測定側平行区間部ＣＢ１ｐにおける近隣電流路ＮＢを流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサ１１の位置及び第２磁気センサ１２の位置で同じ方向にすることができる。このため、第１磁気センサ１１及び第２磁気センサ１２の感度軸方向（ＫＤ１、ＫＤ２）がＺ方向と直交するＹ方向なので、第１磁気センサ１１及び第２磁気センサ１２が受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。このことにより、第１磁気センサ１１及び第２磁気センサ１２による差動処理を行い易くすることができる。しかも、磁気部材１５を第１磁気センサ１１よりもＺ１方向側に設けているので、曲げられた部分の近隣電流路ＮＢの磁界の影響を強く受ける第１磁気センサ１１に対して、この影響を低減することができる。このため、第１磁気センサ１１及び第２磁気センサ１２が受ける磁界の強さを同じようにすることができる。これらのことにより、同じ向きで同じ強さの近隣電流路ＮＢからの磁界は、差動処理で容易に相殺されるため、近隣電流路ＮＢからの磁界の影響による測定精度の低下を抑制することができる。 In the current sensor 101 according to the present invention, a neighboring parallel section NBp of the neighboring current path NB and a measured parallel section CB1p of the measured current path CB1 are arranged in parallel to the X1 direction, and a part of the neighboring current path NB. Is bent in the Z1 direction side, so that at the positions of the first magnetic sensor 11 and the second magnetic sensor 12, the direction of the Z direction component of the magnetic flux generated by the current flowing in the adjacent current path NB in the measured side parallel section CB1p is The first magnetic sensor 11 and the second magnetic sensor 12 can be in the same direction. For this reason, since the sensitivity axis directions (KD1, KD2) of the first magnetic sensor 11 and the second magnetic sensor 12 are the Y direction orthogonal to the Z direction, the Y direction of the magnetic flux received by the first magnetic sensor 11 and the second magnetic sensor 12 The component can be made as small as possible, and the Y direction component of the magnetic flux can be made uniform. As a result, differential processing by the first magnetic sensor 11 and the second magnetic sensor 12 can be facilitated. In addition, since the magnetic member 15 is provided on the Z1 direction side of the first magnetic sensor 11, this influence is exerted on the first magnetic sensor 11 that is strongly influenced by the magnetic field of the neighboring current path NB in the bent portion. Can be reduced. For this reason, the strength of the magnetic field received by the first magnetic sensor 11 and the second magnetic sensor 12 can be made the same. As a result, the magnetic field from the neighboring current path NB of the same direction and the same strength can be easily canceled by the differential processing, so that a decrease in measurement accuracy due to the influence of the magnetic field from the neighboring current path NB is suppressed. Can do.
　また、被測定電流路ＣＢ１の一部をＺ１方向側に折り曲げたので、被測定側平行区間部ＣＢ１ｐにおける第１磁気センサ１１及び第２磁気センサ１２の位置において、被測定電流路ＣＢ１の折り曲げた部分に流れる電流が作る磁束のＹ方向成分の向きがＹ方向になる。このため、第１磁気センサ１１の位置及び第２磁気センサ１２の位置で磁束の向きを同じ方向にすることができ、第１磁気センサ１１及び第２磁気センサ１２の感度軸方向（ＫＤ１、ＫＤ２）であるＹ方向の磁束のＹ方向成分を同等にすることができる。このことにより、磁束のＹ方向成分を均等にでき、第１磁気センサ１１及び第２磁気センサ１２の位置において、第１磁気センサ１１及び第２磁気センサ１２による差動処理をより行い易くすることができる。以上により、同じ向きで同じ強さの被測定電流路ＣＢ１の折り曲げた部分からの磁界は、差動処理で容易に相殺されるため、測定精度の低下をより抑制することができる。 In addition, since a part of the measured current path CB1 is bent in the Z1 direction side, the measured current path CB1 is bent at the position of the first magnetic sensor 11 and the second magnetic sensor 12 in the measured side parallel section CB1p. The direction of the Y direction component of the magnetic flux generated by the current flowing through the portion is the Y direction. For this reason, the direction of magnetic flux can be made the same direction in the position of the 1st magnetic sensor 11 and the position of the 2nd magnetic sensor 12, and the sensitivity axis direction (KD1, KD2) of the 1st magnetic sensor 11 and the 2nd magnetic sensor 12 ), The Y direction component of the Y direction magnetic flux can be made equal. Thereby, the Y direction component of the magnetic flux can be made uniform, and the differential processing by the first magnetic sensor 11 and the second magnetic sensor 12 can be more easily performed at the positions of the first magnetic sensor 11 and the second magnetic sensor 12. Can do. As described above, since the magnetic field from the bent portion of the current path CB1 having the same strength in the same direction is easily canceled by the differential processing, it is possible to further suppress a decrease in measurement accuracy.
　［第２実施形態］
　図６は、本発明の第２実施形態の電流センサ１０２を説明する斜視図である。図７は、本発明の第２実施形態の電流センサ１０２を説明する構成図であって、図６に示すＺ１側から見た正面図である。図８は、本発明の第２実施形態の電流センサ１０２を説明する構成図であって、図６に示すＸ１側から見た側面図である。また、第２実施形態の電流センサ１０２は、第１実施形態に対し、被測定電流路ＣＢ２の形状が異なる。なお、第１実施形態と同一構成については、同一符号を付して詳細な説明は省略する。また、図６ないし図８に示す被測定電流路ＣＢ２及び近隣電流路ＮＢは、その一部をだけを示している。 [Second Embodiment]
FIG. 6 is a perspective view illustrating the current sensor 102 according to the second embodiment of the present invention. FIG. 7 is a configuration diagram illustrating the current sensor 102 according to the second embodiment of the present invention, and is a front view seen from the Z1 side shown in FIG. FIG. 8 is a configuration diagram illustrating the current sensor 102 according to the second embodiment of the present invention, and is a side view seen from the X1 side shown in FIG. The current sensor 102 of the second embodiment is different from the first embodiment in the shape of the current path CB2 to be measured. In addition, about the same structure as 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted. Further, the measured current path CB2 and the neighboring current path NB shown in FIGS. 6 to 8 show only a part thereof.
　本発明の第２実施形態の電流センサ１０２は、図６ないし図８に示すように、被測定電流が流れる被測定電流路ＣＢ２と、被測定電流路ＣＢ２と平行に配置された近隣電流路ＮＢと、磁界を検出する第１磁気センサ２１及び第２磁気センサ２２と、外部磁界の影響を低減するための磁気部材２５と、を備えて構成される。他に、電流センサ１０２には、第１磁気センサ１１を搭載する第１基板１９Ａと、第２磁気センサ１２を搭載する第２基板１９Ｂと、が設けられている。なお、図示はしていないが、被測定電流路ＣＢ２、第１磁気センサ２１及び第２磁気センサ２２、磁気部材２５、第１基板１９Ａ及び第２基板１９Ｂを収容する筐体は、必要に応じて用いられる。 As shown in FIGS. 6 to 8, the current sensor 102 according to the second embodiment of the present invention includes a measured current path CB2 through which the measured current flows and a neighboring current path NB arranged in parallel with the measured current path CB2. A first magnetic sensor 21 and a second magnetic sensor 22 for detecting a magnetic field, and a magnetic member 25 for reducing the influence of an external magnetic field. In addition, the current sensor 102 is provided with a first substrate 19A on which the first magnetic sensor 11 is mounted and a second substrate 19B on which the second magnetic sensor 12 is mounted. Although not shown, the housing for accommodating the measured current path CB2, the first magnetic sensor 21 and the second magnetic sensor 22, the magnetic member 25, the first substrate 19A and the second substrate 19B is provided as necessary. Used.
　被測定電流路ＣＢ２は、銅（Ｃｕ）等の導電性の良い材質を用い、図６ないし図８に示すように、Ｘ方向に延設して形成されている。また、被測定電流路ＣＢ２には、第１磁気センサ２１と第２磁気センサ２２とで挟まれる位置に、被測定側平行区間部ＣＢ２ｐを有している。そして、被測定側平行区間部ＣＢ２ｐに流れる電流の向きは、Ｘ２側からＸ１方向に向けた向きになっている。 The current path CB2 to be measured is formed using a material having good conductivity such as copper (Cu) and extending in the X direction as shown in FIGS. Further, the measured current path CB2 has a measured-side parallel section CB2p at a position sandwiched between the first magnetic sensor 21 and the second magnetic sensor 22. And the direction of the electric current which flows into to-be-measured side parallel area part CB2p is the direction which turned to X1 direction from the X2 side.
　近隣電流路ＮＢは、銅（Ｃｕ）等の導電性の良い材質を用い、図６ないし図８に示すように、被測定電流路ＣＢ２と平行に配置され、更に、近隣電流路ＮＢの一部は、Ｚ１方向側に向けてＬ字状に曲げられて形成されている。 The neighboring current path NB is made of a material having good conductivity such as copper (Cu), and is arranged in parallel with the measured current path CB2 as shown in FIGS. 6 to 8, and further, a part of the neighboring current path NB. Is bent in an L shape toward the Z1 direction.
　また、近隣電流路ＮＢには、被測定側平行区間部ＣＢ２ｐと平行に配置された近隣側平行区間部ＮＢｐを有しており、近隣側平行区間部ＮＢｐに流れる電流の方向もＸ１方向である。また、被測定電流路ＣＢ２と近隣電流路ＮＢとを横切る方向がＹ方向となっている。また、本発明の第２実施形態では、近隣側平行区間部ＮＢｐに対して、直角に曲げられている。なお、図６及び図７の構成図では、被測定電流路ＣＢ２のＹ２側に近隣電流路ＮＢが平行に配設されているが、Ｙ２側に限らず、Ｙ１側でも良いし、Ｙ１側及びＹ２側の両方に近隣電流路ＮＢが平行に配設されていても良い。また、被測定電流路ＣＢ２及び近隣電流路ＮＢの材質に銅（Ｃｕ）を用いたが、これに限定されるものではなく、導電性の良い材質であれば良く、例えばアルミニウム（Ａｌ）等でも良い。 Further, the neighboring current path NB has a neighboring parallel section NBp arranged in parallel with the measured side parallel section CB2p, and the direction of the current flowing in the neighboring parallel section NBp is also the X1 direction. . Further, the direction crossing the measured current path CB2 and the neighboring current path NB is the Y direction. Moreover, in 2nd Embodiment of this invention, it is bent at right angle with respect to the neighborhood side parallel area part NBp. 6 and 7, the neighboring current path NB is arranged in parallel on the Y2 side of the current path CB2 to be measured. However, the neighboring current path NB is not limited to the Y2 side, and may be on the Y1 side, Neighboring current paths NB may be arranged in parallel on both sides of Y2. Further, although copper (Cu) is used as the material of the current path CB2 and the neighboring current path NB, the material is not limited to this, and any material having good conductivity may be used. For example, aluminum (Al) or the like may be used. good.
　第１磁気センサ２１及び第２磁気センサ２２は、被測定電流路ＣＢ２に被測定電流が流れたときに発生する磁界を検出するセンサであって、例えば、磁気抵抗効果を用いた磁気検出素子（ＭＲ(Magneto Resistive)素子という）がパッケージングされている。 The first magnetic sensor 21 and the second magnetic sensor 22 are sensors that detect a magnetic field generated when a current to be measured flows through the current path CB2 to be measured. MR (Magneto-Resistive) element) is packaged.
　また、前述したが、第１磁気センサ２１及び第２磁気センサ２２は、図６及び図８に示すように、近隣側平行区間部ＮＢｐと平行に配置された被測定電流路ＣＢ２の被測定側平行区間部ＣＢ２ｐを挟んで配設されている。更に、第１磁気センサ２１及び第２磁気センサ２２の近傍において、近隣電流路ＮＢの一部がＺ１方向側に曲がる位置になるように、第１磁気センサ２１及び第２磁気センサ２２を配設している。第１磁気センサ２１及び第２磁気センサ２２の配設は、第１磁気センサ２１及び第２磁気センサ２２のそれぞれを第１基板１９Ａ及び第２基板１９Ｂに搭載して、この第１基板１９Ａ及び第２基板１９Ｂを被測定電流路ＣＢ２の被測定側平行区間部ＣＢ２ｐに当接させて配置することにより、容易に達成できる。 As described above, the first magnetic sensor 21 and the second magnetic sensor 22 are, as shown in FIGS. 6 and 8, the measured side of the measured current path CB2 arranged in parallel with the neighboring parallel section NBp. Arranged across the parallel section CB2p. Further, in the vicinity of the first magnetic sensor 21 and the second magnetic sensor 22, the first magnetic sensor 21 and the second magnetic sensor 22 are arranged so that a part of the neighboring current path NB is bent to the Z1 direction side. is doing. The first magnetic sensor 21 and the second magnetic sensor 22 are arranged by mounting the first magnetic sensor 21 and the second magnetic sensor 22 on the first substrate 19A and the second substrate 19B, respectively. This can be easily achieved by placing the second substrate 19B in contact with the measured side parallel section CB2p of the measured current path CB2.
　磁気部材２５は、ＡＢＳ（アクリロニトリルブタジエンスチレン）、ＰＰ（ポリプロピレン）等の合成樹脂に扁平状の磁性粉末を分散させて、射出成形等により成形した板状のものを用い、図６ないし図８に示すように、第１磁気センサ２１よりもＺ１方向側に設けられている。そして、Ｚ１側からの外部磁界の影響を低減している。なお、磁気部材２５の材料として合成樹脂に扁平状の磁性粉末を分散させたものを用いたが、磁気シールド効果を有する材質であれば、これに限るものではない。 As the magnetic member 25, a plate-shaped member obtained by dispersing a flat magnetic powder in a synthetic resin such as ABS (acrylonitrile butadiene styrene) or PP (polypropylene) and molded by injection molding or the like is shown in FIGS. As shown, the first magnetic sensor 21 is provided on the Z1 direction side. And the influence of the external magnetic field from the Z1 side is reduced. In addition, although the thing which disperse | distributed flat magnetic powder to the synthetic resin was used as a material of the magnetic member 25, if it is a material which has a magnetic shielding effect, it will not restrict to this.
　以上のように構成された電流センサ１０２は、第１実施形態の電流センサ１０１の図５Ａに示すシミュレーション結果ＡＡと同様に、第１磁気センサ２１及び第２磁気センサ２２の位置において、被測定側平行区間部ＣＢ２ｐにおける近隣電流路ＮＢを流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサ２１の位置及び第２磁気センサ２２の位置で同じ方向にすることができる。このため、第１磁気センサ２１及び第２磁気センサ２２の感度軸方向（ＫＤ１、ＫＤ２）がＺ方向と直交するＹ方向なので、第１磁気センサ２１及び第２磁気センサ２２が受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。 The current sensor 102 configured as described above is similar to the simulation result AA shown in FIG. 5A of the current sensor 101 according to the first embodiment, at the positions of the first magnetic sensor 21 and the second magnetic sensor 22. The direction of the Z-direction component of the magnetic flux generated by the current flowing in the neighboring current path NB in the parallel section CB2p can be set to the same direction at the position of the first magnetic sensor 21 and the position of the second magnetic sensor 22. For this reason, since the sensitivity axis directions (KD1, KD2) of the first magnetic sensor 21 and the second magnetic sensor 22 are the Y direction orthogonal to the Z direction, the Y direction of the magnetic flux received by the first magnetic sensor 21 and the second magnetic sensor 22 The component can be made as small as possible, and the Y direction component of the magnetic flux can be made uniform.
　また、図示していない曲げられた部分（紙面の奥側）の近隣電流路ＮＢの磁界の影響を強く受ける第１磁気センサ２１に対して、磁気部材２５により、この影響を低減することができる。 In addition, the magnetic member 25 can reduce this influence on the first magnetic sensor 21 that is strongly influenced by the magnetic field of the neighboring current path NB in the bent portion (the back side of the drawing) (not shown). .
　以上のように構成された本発明の第２実施形態の電流センサ１０２における、効果について、以下に説明する。 The effects of the current sensor 102 according to the second embodiment of the present invention configured as described above will be described below.
　本発明の電流センサ１０２は、近隣電流路ＮＢの近隣側平行区間部ＮＢｐと被測定電流路ＣＢ２の被測定側平行区間部ＣＢ２ｐとがＸ１方向に平行に配置され、近隣電流路ＮＢの一部をＺ１方向側に折り曲げたので、第１磁気センサ２１及び第２磁気センサ２２の位置において、被測定側平行区間部ＣＢ２ｐにおける近隣電流路ＮＢを流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサ２１の位置及び第２磁気センサ２２の位置で同じ方向にすることができる。このため、第１磁気センサ２１及び第２磁気センサ２２の感度軸方向（ＫＤ１、ＫＤ２）がＺ方向と直交するＹ方向なので、第１磁気センサ２１及び第２磁気センサ２２が受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。このことにより、第１磁気センサ２１及び第２磁気センサ２２による差動処理を行い易くすることができる。しかも、磁気部材２５を第１磁気センサ２１よりもＺ１方向側に設けているので、曲げられた部分の近隣電流路ＮＢの磁界の影響を強く受ける第１磁気センサ２１に対して、この影響を低減することができる。このため、第１磁気センサ２１及び第２磁気センサ２２が受ける磁界の強さを同じようにすることができる。これらのことにより、同じ向きで同じ強さの近隣電流路ＮＢからの磁界は、差動処理で容易に相殺されるため、近隣電流路ＮＢからの磁界の影響による測定精度の低下を抑制することができる。 In the current sensor 102 of the present invention, the neighboring parallel section NBp of the neighboring current path NB and the measured side parallel section CB2p of the measured current path CB2 are arranged in parallel to the X1 direction, and a part of the neighboring current path NB. Is bent in the Z1 direction side, so that the direction of the Z direction component of the magnetic flux generated by the current flowing in the adjacent current path NB in the measured side parallel section CB2p at the position of the first magnetic sensor 21 and the second magnetic sensor 22 is The first magnetic sensor 21 and the second magnetic sensor 22 can be in the same direction. For this reason, since the sensitivity axis directions (KD1, KD2) of the first magnetic sensor 21 and the second magnetic sensor 22 are the Y direction orthogonal to the Z direction, the Y direction of the magnetic flux received by the first magnetic sensor 21 and the second magnetic sensor 22 The component can be made as small as possible, and the Y direction component of the magnetic flux can be made uniform. As a result, differential processing by the first magnetic sensor 21 and the second magnetic sensor 22 can be facilitated. In addition, since the magnetic member 25 is provided on the Z1 direction side of the first magnetic sensor 21, this influence is exerted on the first magnetic sensor 21 that is strongly influenced by the magnetic field of the neighboring current path NB in the bent portion. Can be reduced. For this reason, the strength of the magnetic field received by the first magnetic sensor 21 and the second magnetic sensor 22 can be made the same. As a result, the magnetic field from the neighboring current path NB of the same direction and the same strength can be easily canceled by the differential processing, so that a decrease in measurement accuracy due to the influence of the magnetic field from the neighboring current path NB is suppressed. Can do.
　［第３実施形態］
　図９は、本発明の第３実施形態の電流センサ１０３を説明する斜視図である。図１０は、本発明の第３実施形態の電流センサ１０３を説明する構成図であって、図１０Ａは、図９に示すＺ１側から見た正面図であり、図１０Ｂは、図９に示すＺ２側から見た背面図である。図１１は、本発明の第３実施形態の電流センサ１０３を説明する構成図であって、図９に示すＸ１側から見た側面図である。また、第３実施形態の電流センサ１０３は、第１実施形態に対し、被測定電流路ＣＢ３の形状が異なることと、磁気部材３５の構成が異なる。なお、第１実施形態と同一構成については、同一符号を付して詳細な説明は省略する。また、図９ないし図１１に示す被測定電流路ＣＢ３及び近隣電流路ＮＢは、その一部をだけを示している。 [Third Embodiment]
FIG. 9 is a perspective view illustrating the current sensor 103 according to the third embodiment of the present invention. FIG. 10 is a configuration diagram illustrating the current sensor 103 according to the third embodiment of the present invention, in which FIG. 10A is a front view seen from the Z1 side shown in FIG. 9, and FIG. 10B is shown in FIG. It is the rear view seen from the Z2 side. FIG. 11 is a configuration diagram illustrating the current sensor 103 according to the third embodiment of the present invention, and is a side view seen from the X1 side shown in FIG. Further, the current sensor 103 of the third embodiment differs from the first embodiment in the shape of the current path CB3 to be measured and the configuration of the magnetic member 35. In addition, about the same structure as 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted. Further, only part of the measured current path CB3 and the neighboring current path NB shown in FIGS. 9 to 11 are shown.
　本発明の第３実施形態の電流センサ１０３は、図９ないし図１１に示すように、被測定電流が流れる被測定電流路ＣＢ３と、被測定電流路ＣＢ３と平行に配置された近隣電流路ＮＢと、磁界を検出する第１磁気センサ３１及び第２磁気センサ３２と、外部磁界の影響を低減するための磁気部材３５と、を備えて構成される。他に、電流センサ１０３には、第１磁気センサ３１を搭載する第１基板１９Ａと、第２磁気センサ３２を搭載する第２基板１９Ｂと、が設けられている。なお、図示はしていないが、被測定電流路ＣＢ３、第１磁気センサ３１及び第２磁気センサ３２、磁気部材３５、第１基板１９Ａ及び第２基板１９Ｂを収容する筐体は、必要に応じて用いられる。 As shown in FIGS. 9 to 11, the current sensor 103 according to the third embodiment of the present invention includes a measured current path CB3 through which a measured current flows, and a neighboring current path NB arranged in parallel with the measured current path CB3. And a first magnetic sensor 31 and a second magnetic sensor 32 for detecting a magnetic field, and a magnetic member 35 for reducing the influence of an external magnetic field. In addition, the current sensor 103 is provided with a first substrate 19A on which the first magnetic sensor 31 is mounted and a second substrate 19B on which the second magnetic sensor 32 is mounted. Although not shown, the housing for accommodating the current path CB3 to be measured, the first magnetic sensor 31 and the second magnetic sensor 32, the magnetic member 35, the first substrate 19A and the second substrate 19B is provided as necessary. Used.
　被測定電流路ＣＢ３は、銅（Ｃｕ）等の導電性の良い材質を用い、図９ないし図１１に示すように、Ｘ方向に延設して形成されている。また、被測定電流路ＣＢ３には、第１磁気センサ３１と第２磁気センサ３２とで挟まれる位置に、被測定側平行区間部ＣＢ３ｐを有している。 The current path CB3 to be measured is formed using a material having good conductivity such as copper (Cu) and extending in the X direction as shown in FIGS. Further, the measured current path CB3 has a measured-side parallel section CB3p at a position sandwiched between the first magnetic sensor 31 and the second magnetic sensor 32.
　ここで、被測定側平行区間部ＣＢ３ｐに流れる電流の方向をＸ１方向とすると、図９に示すように、被測定側平行区間部ＣＢ３ｐはＸ方向に延設されており、Ｘ方向と直交するＺ方向に第１磁気センサ３１と第２磁気センサ３２とが配設されるようになる。また、Ｘ方向及びＺ方向とそれぞれ直交するＹ方向には、近隣電流路ＮＢが配設されるようになる。なお、第２磁気センサ３２から第１磁気センサ３１へ向かう方向をＺ１方向としている。 Here, assuming that the direction of the current flowing in the measured side parallel section CB3p is the X1 direction, as shown in FIG. 9, the measured side parallel section CB3p extends in the X direction and is orthogonal to the X direction. The first magnetic sensor 31 and the second magnetic sensor 32 are arranged in the Z direction. In addition, the neighboring current path NB is disposed in the Y direction orthogonal to the X direction and the Z direction, respectively. The direction from the second magnetic sensor 32 toward the first magnetic sensor 31 is the Z1 direction.
　近隣電流路ＮＢは、銅（Ｃｕ）等の導電性の良い材質を用い、図９ないし図１１に示すように、被測定電流路ＣＢ３と平行に配置され、更に、近隣電流路ＮＢの一部は、Ｚ１方向側に向けてＬ字状に曲げられて形成されている。 The neighboring current path NB is made of a material having good conductivity such as copper (Cu), and is arranged in parallel with the measured current path CB3 as shown in FIGS. 9 to 11, and further, a part of the neighboring current path NB. Is bent in an L shape toward the Z1 direction.
　また、近隣電流路ＮＢには、被測定側平行区間部ＣＢ３ｐと平行に配置された近隣側平行区間部ＮＢｐを有しており、近隣側平行区間部ＮＢｐに流れる電流の方向もＸ１方向である。また、被測定電流路ＣＢ３と近隣電流路ＮＢとを横切る方向がＹ方向となっている。また、本発明の第３実施形態では、近隣側平行区間部ＮＢｐに対して、直角に曲げられている。なお、図９及び図１０の構成図では、被測定電流路ＣＢ３のＹ２側に近隣電流路ＮＢが平行に配設されているが、Ｙ２側に限らず、Ｙ１側でも良いし、Ｙ１側及びＹ２側の両方に近隣電流路ＮＢが平行に配設されていても良い。また、被測定電流路ＣＢ３及び近隣電流路ＮＢの材質に銅（Ｃｕ）を用いたが、これに限定されるものではなく、導電性の良い材質であれば良く、例えばアルミニウム（Ａｌ）等でも良い。 Further, the neighboring current path NB has a neighboring side parallel section NBp arranged in parallel with the measured side parallel section CB3p, and the direction of the current flowing through the neighboring parallel section NBp is also the X1 direction. . Further, the direction crossing the measured current path CB3 and the neighboring current path NB is the Y direction. Moreover, in 3rd Embodiment of this invention, it is bent at right angle with respect to the neighborhood side parallel area part NBp. In the configuration diagrams of FIGS. 9 and 10, the neighboring current path NB is arranged in parallel on the Y2 side of the current path CB3 to be measured, but the Y1 side may be used instead of the Y2 side, and the Y1 side and Neighboring current paths NB may be arranged in parallel on both sides of Y2. In addition, although copper (Cu) is used as the material of the current path CB3 and the neighboring current path NB, the material is not limited to this, and any material having good conductivity may be used, such as aluminum (Al). good.
　第１磁気センサ３１及び第２磁気センサ３２は、被測定電流路ＣＢ３に被測定電流が流れたときに発生する磁界を検出するセンサであって、例えば、磁気抵抗効果を用いた磁気検出素子（ＡＭＲ(Anisotropic　Magneto　Resistive)素子という）がパッケージングされている。 The first magnetic sensor 31 and the second magnetic sensor 32 are sensors that detect a magnetic field generated when a current to be measured flows through the current path CB3 to be measured. AMR (Anisotropic Magneto Resistive) element) is packaged.
　また、前述したが、第１磁気センサ３１及び第２磁気センサ３２は、図９ないし図１１に示すように、近隣側平行区間部ＮＢｐと平行に配置された被測定電流路ＣＢ３の被測定側平行区間部ＣＢ３ｐを挟んで配設されている。更に、第１磁気センサ３１及び第２磁気センサ３２の近傍において、近隣電流路ＮＢの一部がＺ１方向側に曲がる位置になるように、第１磁気センサ３１及び第２磁気センサ３２を配設している。第１磁気センサ３１及び第２磁気センサ３２の配設は、第１磁気センサ３１及び第２磁気センサ３２のそれぞれを第１基板１９Ａ及び第２基板１９Ｂに搭載して、この第１基板１９Ａ及び第２基板１９Ｂを被測定電流路ＣＢ３の被測定側平行区間部ＣＢ３ｐに当接させて配置することにより、容易に達成できる。 As described above, the first magnetic sensor 31 and the second magnetic sensor 32 are, as shown in FIGS. 9 to 11, the measured side of the measured current path CB3 arranged in parallel with the neighboring parallel section NBp. Arranged across the parallel section CB3p. Further, in the vicinity of the first magnetic sensor 31 and the second magnetic sensor 32, the first magnetic sensor 31 and the second magnetic sensor 32 are arranged so that a part of the neighboring current path NB is bent to the Z1 direction side. is doing. The first magnetic sensor 31 and the second magnetic sensor 32 are disposed by mounting the first magnetic sensor 31 and the second magnetic sensor 32 on the first substrate 19A and the second substrate 19B, respectively. This can be easily achieved by placing the second substrate 19B in contact with the measured side parallel section CB3p of the measured current path CB3.
　磁気部材３５は、図９ないし図１１に示すように、第１磁気部材３５Ａと第２磁気部材３５Ｂとを有して構成され、第１磁気部材３５Ａは、第１磁気センサ３１よりもＺ１方向側に設けられ、第２磁気部材３５Ｂは、第２磁気センサ３２よりもＺ１方向側と反対のＺ２方向側に設けられている。そして、第１磁気部材３５ＡはＺ１側からの外部磁界の影響を低減しており、第２磁気部材３５ＢはＺ２側からの外部磁界の影響を低減している。 As shown in FIGS. 9 to 11, the magnetic member 35 includes a first magnetic member 35 </ b> A and a second magnetic member 35 </ b> B, and the first magnetic member 35 </ b> A is in the Z <b> 1 direction more than the first magnetic sensor 31. The second magnetic member 35B is provided on the Z2 direction side opposite to the Z1 direction side with respect to the second magnetic sensor 32. The first magnetic member 35A reduces the influence of the external magnetic field from the Z1 side, and the second magnetic member 35B reduces the influence of the external magnetic field from the Z2 side.
　また、第２磁気部材３５Ｂの方が、第１磁気部材３５Ａよりも小さく構成されている。これにより、Ｚ１側からの外部磁界の影響をより低減させる構成としている。 Further, the second magnetic member 35B is configured to be smaller than the first magnetic member 35A. Thereby, the influence of the external magnetic field from the Z1 side is further reduced.
　磁気部材３５の作製は、扁平状の磁性粉末を分散させたインクを絶縁基材３５ｋの片面に塗布し、乾燥、硬化させることにより、磁気シールド層３５ｒを形成させて行っている。なお、磁気部材３５の材料として磁気シールド層３５ｒを用いたが、磁気シールド効果を有する材質であれば、これに限るものではない。 The magnetic member 35 is manufactured by applying the ink in which the flat magnetic powder is dispersed to one side of the insulating base 35k, and drying and curing to form the magnetic shield layer 35r. Although the magnetic shield layer 35r is used as the material of the magnetic member 35, the material is not limited to this as long as the material has a magnetic shield effect.
　以上のように構成された電流センサ１０３は、第１実施形態の電流センサ１０１の図５Ａに示すシミュレーション結果ＡＡと同様に、第１磁気センサ３１及び第２磁気センサ３２の位置において、被測定側平行区間部ＣＢ３ｐにおける近隣電流路ＮＢを流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサ３１の位置及び第２磁気センサ３２の位置で同じ方向にすることができる。このため、第１磁気センサ３１及び第２磁気センサ３２の感度軸方向（ＫＤ１、ＫＤ２）がＺ方向と直交するＹ方向なので、第１磁気センサ３１及び第２磁気センサ３２が受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。 The current sensor 103 configured as described above is the same as the simulation result AA shown in FIG. 5A of the current sensor 101 of the first embodiment, at the positions of the first magnetic sensor 31 and the second magnetic sensor 32. The direction of the Z-direction component of the magnetic flux generated by the current flowing through the neighboring current path NB in the parallel section CB3p can be set to the same direction at the position of the first magnetic sensor 31 and the position of the second magnetic sensor 32. For this reason, since the sensitivity axis directions (KD1, KD2) of the first magnetic sensor 31 and the second magnetic sensor 32 are the Y direction orthogonal to the Z direction, the Y direction of the magnetic flux received by the first magnetic sensor 31 and the second magnetic sensor 32 The component can be made as small as possible, and the Y direction component of the magnetic flux can be made uniform.
　また、図示していない曲げられた部分（紙面の奥側）の近隣電流路ＮＢの磁界の影響を強く受ける第１磁気センサ３１に対して、第１磁気部材３５Ａにより、この影響を低減することができる。 In addition, the first magnetic member 35A reduces this influence on the first magnetic sensor 31 that is strongly affected by the magnetic field of the neighboring current path NB in a bent portion (the back side of the drawing) that is not illustrated. Can do.
　以上のように構成された本発明の第３実施形態の電流センサ１０３における、効果について、以下に説明する。 The effects of the current sensor 103 according to the third embodiment of the present invention configured as described above will be described below.
　本発明の電流センサ１０３は、近隣電流路ＮＢの近隣側平行区間部ＮＢｐと被測定電流路ＣＢ３の被測定側平行区間部ＣＢ３ｐとがＸ１方向に平行に配置され、近隣電流路ＮＢの一部をＺ１方向側に折り曲げたので、第１磁気センサ３１及び第２磁気センサ３２の位置において、被測定側平行区間部ＣＢ３ｐにおける近隣電流路ＮＢを流れる電流が作る磁束のＺ方向成分の向きを、第１磁気センサ３１の位置及び第２磁気センサ３２の位置で同じ方向にすることができる。このため、第１磁気センサ３１及び第２磁気センサ３２の感度軸方向（ＫＤ１、ＫＤ２）がＺ方向と直交するＹ方向なので、第１磁気センサ３１及び第２磁気センサ３２が受ける磁束のＹ方向成分を限りなく小さくでき、しかも磁束のＹ方向成分を均等にできる。このことにより、第１磁気センサ３１及び第２磁気センサ３２による差動処理を行い易くすることができる。しかも、第１磁気部材３５Ａを第１磁気センサ３１よりもＺ１方向側に設け、第２磁気センサ３２のＺ２方向側に設けた第２磁気部材３５Ｂが第１磁気部材３５Ａよりも小さいので、曲げられた部分の近隣電流路ＮＢの磁界の影響を強く受ける第１磁気センサ３１に対して、この影響を低減することができるとともに、第１磁気センサ３１に受けるＺ１側からの外部磁界の影響と第２磁気センサ３２に受けるＺ２側からの外部磁界の影響とをバランス良く低減することができる。このため、第１磁気センサ３１及び第２磁気センサ３２が受ける磁界の強さを同じようにすることができる。これらのことにより、同じ向きで同じ強さの近隣電流路ＮＢからの磁界は、差動処理で容易に相殺されるため、近隣電流路ＮＢからの磁界の影響による測定精度の低下を抑制することができる。更に、第１磁気センサ３１及び第２磁気センサ３２に対して、第１磁気部材３５Ａ及び第２磁気部材３５Ｂをそれぞれ配設したので、第１磁気センサ３１及び第２磁気センサ３２を磁気シールドすることができ、近隣電流路ＮＢ以外からの外部磁界からの影響も小さくすることができる。 In the current sensor 103 of the present invention, the neighboring parallel section NBp of the neighboring current path NB and the measured side parallel section CB3p of the measured current path CB3 are arranged in parallel in the X1 direction, and a part of the neighboring current path NB. Is bent in the Z1 direction side, so that at the positions of the first magnetic sensor 31 and the second magnetic sensor 32, the direction of the Z direction component of the magnetic flux generated by the current flowing in the adjacent current path NB in the measured side parallel section CB3p is The first magnetic sensor 31 and the second magnetic sensor 32 can be in the same direction. For this reason, since the sensitivity axis directions (KD1, KD2) of the first magnetic sensor 31 and the second magnetic sensor 32 are the Y direction orthogonal to the Z direction, the Y direction of the magnetic flux received by the first magnetic sensor 31 and the second magnetic sensor 32 The component can be made as small as possible, and the Y direction component of the magnetic flux can be made uniform. As a result, differential processing by the first magnetic sensor 31 and the second magnetic sensor 32 can be facilitated. In addition, the first magnetic member 35A is provided on the Z1 direction side of the first magnetic sensor 31, and the second magnetic member 35B provided on the Z2 direction side of the second magnetic sensor 32 is smaller than the first magnetic member 35A. This effect can be reduced with respect to the first magnetic sensor 31 that is strongly influenced by the magnetic field of the adjacent current path NB in the portion that is provided, and the influence of the external magnetic field from the Z1 side that is received by the first magnetic sensor 31 The influence of the external magnetic field from the Z2 side received by the second magnetic sensor 32 can be reduced in a well-balanced manner. For this reason, the strength of the magnetic field received by the first magnetic sensor 31 and the second magnetic sensor 32 can be made the same. As a result, the magnetic field from the neighboring current path NB of the same direction and the same strength can be easily canceled by the differential processing, so that a decrease in measurement accuracy due to the influence of the magnetic field from the neighboring current path NB is suppressed. Can do. Furthermore, since the first magnetic member 35A and the second magnetic member 35B are provided for the first magnetic sensor 31 and the second magnetic sensor 32, respectively, the first magnetic sensor 31 and the second magnetic sensor 32 are magnetically shielded. The influence from the external magnetic field from other than the neighboring current path NB can be reduced.
　なお、本発明は上記実施形態に限定されるものではなく、例えば次のように変形して実施することができ、これらの実施形態も本発明の技術的範囲に属する。 It should be noted that the present invention is not limited to the above-described embodiment, and can be implemented by being modified as follows, for example, and these embodiments also belong to the technical scope of the present invention.
　図１２は、本発明の電流センサの変形例を説明する構成図であって、図１２Ａは、第１実施形態の電流センサ１０１を変えた変形例１の電流センサＣ１１１の正面図であり、図１２Ｂは、第１実施形態の電流センサ１０１を変えた変形例２の電流センサＣ１２１の側面図である。なお、説明を容易にするため、図１２Ｂに示す磁気部材Ｃ１５と第１基板１９Ｃは、破線で示している。図１３は、本発明の電流センサの変形例を説明する構成図であって、図１３Ａは、第２実施形態の電流センサ１０２を変えた変形例３の電流センサＣ１３２の斜視図であり、図１３Ｂは、第２実施形態の電流センサ１０２を変えた変形例４の電流センサＣ１４２の斜視図である。 FIG. 12 is a configuration diagram illustrating a modification of the current sensor of the present invention, and FIG. 12A is a front view of a current sensor C111 of Modification 1 in which the current sensor 101 of the first embodiment is changed. 12B is a side view of a current sensor C121 of Modification 2 in which the current sensor 101 of the first embodiment is changed. For ease of explanation, the magnetic member C15 and the first substrate 19C shown in FIG. 12B are indicated by broken lines. FIG. 13 is a configuration diagram illustrating a modification of the current sensor according to the present invention, and FIG. 13A is a perspective view of a current sensor C132 of Modification 3 in which the current sensor 102 of the second embodiment is changed. 13B is a perspective view of a current sensor C142 of Modification 4 in which the current sensor 102 of the second embodiment is changed.
　＜変形例１＞
　上記第１実施形態では、近隣電流路ＮＢには、第１磁気センサ１１及び第２磁気センサ１２が配設されておらず、被測定電流路ＣＢ１の方のみに、第１磁気センサ１１及び第２磁気センサ１２を配設した構成にした。しかしながら、図１２Ａに示すように、隣り合う電流路（Ｂ１１、Ｂ１２、Ｂ１３、Ｂ１４、Ｂ１５）にそれぞれ磁気センサ（Ｍ１１、Ｍ１２、Ｍ１３、Ｍ１４、Ｍ１５）を配設する構成にしても良い。なお、図示はしていないが、磁気センサ（Ｍ１１、Ｍ１２、Ｍ１３、Ｍ１４、Ｍ１５）と電流路（Ｂ１１、Ｂ１２、Ｂ１３、Ｂ１４、Ｂ１５）を挟んで対向する位置にも磁気センサ（Ｍ２１、Ｍ２２、Ｍ２３、Ｍ２４、Ｍ２５）が配設されている。 <Modification 1>
In the first embodiment, the first magnetic sensor 11 and the second magnetic sensor 12 are not disposed in the neighboring current path NB, and the first magnetic sensor 11 and the second magnetic sensor 12 are disposed only in the measured current path CB1. Two magnetic sensors 12 are provided. However, as shown in FIG. 12A, the magnetic sensors (M11, M12, M13, M14, M15) may be arranged in adjacent current paths (B11, B12, B13, B14, B15), respectively. Although not shown, the magnetic sensors (M21, M22, M22, M13, M14, M15) are also positioned at positions that oppose each other across the current path (B11, B12, B13, B14, B15). , M23, M24, M25).
　これにより、電流路Ｂ１１を被測定電流路、磁気センサＭ１１を第１磁気センサ、磁気センサＭ２１を第２磁気センサとし、電流路Ｂ１２を近隣電流路と見なすようにする。また、電流路Ｂ１２を被測定電流路、磁気センサＭ１２を第１磁気センサ、磁気センサＭ２２を第２磁気センサとし、電流路Ｂ１１及び電流路Ｂ１３を近隣電流路と見なすようにする。また、電流路Ｂ１３を被測定電流路、磁気センサＭ１３を第１磁気センサ、磁気センサＭ２３を第２磁気センサとし、電流路Ｂ１２及び電流路Ｂ１４を近隣電流路と見なすようにする。以下、電流路Ｂ１４、電流路Ｂ１５についても同様にして見なすようにする。 Thus, the current path B11 is regarded as the current path to be measured, the magnetic sensor M11 is regarded as the first magnetic sensor, the magnetic sensor M21 is regarded as the second magnetic sensor, and the current path B12 is regarded as the neighboring current path. The current path B12 is regarded as a current path to be measured, the magnetic sensor M12 is regarded as a first magnetic sensor, the magnetic sensor M22 is regarded as a second magnetic sensor, and the current path B11 and the current path B13 are regarded as neighboring current paths. The current path B13 is regarded as a current path to be measured, the magnetic sensor M13 is regarded as a first magnetic sensor, the magnetic sensor M23 is regarded as a second magnetic sensor, and the current path B12 and the current path B14 are regarded as neighboring current paths. Hereinafter, the current path B14 and the current path B15 are regarded in the same manner.
　＜変形例２＞
　上記第１実施形態の電流センサ１０１の構成に、第２磁気センサ１２のＺ２側に第２磁気シールドＣ１５Ｂを更に設けた電流センサＣ１２１であっても良い。 <Modification 2>
The configuration of the current sensor 101 of the first embodiment may be a current sensor C121 in which a second magnetic shield C15B is further provided on the Z2 side of the second magnetic sensor 12.
　＜変形例３＞
　上記第２実施形態では、１組の被測定電流路ＣＢ２及び近隣電流路ＮＢで構成したが、これに限らず、図１３Ａに示すように、複数の被測定電流路（ＣＢ２１、ＣＢ２１）と複数の近隣電流路（ＮＢ１、ＮＢ２、ＮＢ３）とを組み合わせた構成でも良い。 <Modification 3>
In the second embodiment, a set of the measured current path CB2 and the neighboring current path NB are configured. However, the present invention is not limited thereto, and as shown in FIG. 13A, a plurality of measured current paths (CB2 1 , CB2 1 ). And a plurality of neighboring current paths (NB 1 , NB 2 , NB 3 ) may be combined.
　＜変形例４＞
　上記第２実施形態では、１組の被測定電流路ＣＢ２ａ及び近隣電流路ＮＢａに１組の第１磁気センサ２１及び第２磁気センサ２２を配設した構成としたが、これに限らず、図１３Ｂに示すように、被測定電流路ＣＢ２ａの一方を曲げて、その近傍の近隣電流路ＮＢａに第１磁気センサ（図示していない）及び第２磁気センサ２２ａを配設した構成にしても良い。その際には、その部分の被測定電流路ＣＢ２ａを近隣電流路と見なすようにし、その部分の近隣電流路ＮＢａを被測定電流路と見なすようにする。 <Modification 4>
In the second embodiment, a set of the first magnetic sensor 21 and the second magnetic sensor 22 is arranged in one set of the current path CB2a and the neighboring current path NBa. However, the present invention is not limited to this. As shown in FIG. 13B, one of the current paths CB2a to be measured may be bent, and a first magnetic sensor (not shown) and a second magnetic sensor 22a may be disposed in the neighboring current path NBa in the vicinity thereof. . In that case, the current path CB2a in that portion is regarded as a neighboring current path, and the neighboring current path NBa in that portion is regarded as a current path to be measured.
　また、この組合せは１組に限らず、図１３Ｂに示すように、複数の被測定電流路（ＣＢ２ａ、ＣＢ２ｂ）、複数の近隣電流路（ＮＢａ、ＮＢｂ、ＮＢｃ）、複数の第１磁気センサ（図示していない）及び第２磁気センサ（２２ａ、２２ｂ、２２ｃ）を組み合わせた構成でも良い。 This combination is not limited to one set, and as shown in FIG. 13B, a plurality of current paths to be measured (CB2a, CB2b), a plurality of neighboring current paths (NBa, NBb, NBc), and a plurality of first magnetic sensors ( A configuration in which the second magnetic sensor (22a, 22b, 22c) and the second magnetic sensor (not shown) are combined may be used.
　＜変形例５＞
　上記実施形態では、第１基板１９Ａ及び第２基板１９Ｂを被測定電流路（ＣＢ１、ＣＢ２、ＣＢ３）に当接させて配置したが、離して配置させても良い。また、第１磁気センサ（１１、２１、３１）及び第２磁気センサ（１２、２２、３２）が被測定電流路（ＣＢ１、ＣＢ２、ＣＢ３）に対向するように配置しても良い。 <Modification 5>
In the above embodiment, the first substrate 19A and the second substrate 19B are arranged in contact with the current path to be measured (CB1, CB2, CB3), but may be arranged separately. Moreover, you may arrange | position so that a 1st magnetic sensor (11, 21, 31) and a 2nd magnetic sensor (12, 22, 32) may oppose to a to-be-measured electric current path (CB1, CB2, CB3).
　＜変形例６＞
　上記実施形態では、第１磁気センサ（１１、２１、３１）及び第２磁気センサ（１２、２２、３２）を熱硬化性の合成樹脂でパッケージングして磁気センサパッケージ（１４、２４、３４）とし、第１基板１９Ａ及び第２基板１９Ｂに実装したが、ＧＭＲ素子、ＭＲ素子及びＡＭＲ素子をそのまま第１基板１９Ａ及び第２基板１９Ｂに実装、所謂ベアチップ実装しても良い。 <Modification 6>
In the said embodiment, a 1st magnetic sensor (11, 21, 31) and a 2nd magnetic sensor (12, 22, 32) are packaged with a thermosetting synthetic resin, and a magnetic sensor package (14, 24, 34). Although mounted on the first substrate 19A and the second substrate 19B, the GMR element, the MR element, and the AMR element may be mounted on the first substrate 19A and the second substrate 19B as they are, that is, so-called bare chip mounting.
　＜変形例７＞
　上記実施形態では、近隣電流路ＮＢ或いは被測定電流路ＣＢ１が直角に曲げて構成されていたが、直角に限るものではない。 <Modification 7>
In the above-described embodiment, the neighboring current path NB or the measured current path CB1 is bent at a right angle, but is not limited to a right angle.
　本発明は上記実施の形態に限定されず、本発明の目的の範囲を逸脱しない限りにおいて適宜変更することが可能である。 The present invention is not limited to the above-described embodiment, and can be changed as appropriate without departing from the scope of the object of the present invention.
　　１１、２１、３１　第１磁気センサ
　　１２、２２、３２、２２ａ、２２ｂ、２２ｃ　第２磁気センサ
　　１５、２５、３５、Ｃ１５　磁気部材
　　３５Ａ　第１磁気部材
　　３５Ｂ、Ｃ１５Ｂ　第２磁気部材
　　ＣＢ１、ＣＢ２、ＣＢ３、ＣＢ２１、ＣＢ２１、ＣＢ２ａ、ＣＢ２ｂ　被測定電流路
　　ＣＢ１ｐ、ＣＢ２ｐ、ＣＢ３ｐ　被測定側平行区間部
　　ＮＢ、ＮＢ１、ＮＢ２、ＮＢ３、ＮＢａ、ＮＢｂ、ＮＢｃ　近隣電流路
　　ＮＢｐ　近隣側平行区間部
　　１０１、１０２、１０３、Ｃ１１１、Ｃ１２１、Ｃ１３２、Ｃ１４２　電流センサ 11, 21, 31 First magnetic sensor 12, 22, 32, 22a, 22b, 22c Second magnetic sensor 15, 25, 35, C15 Magnetic member 35A First magnetic member 35B, C15B Second magnetic member CB1, CB2, CB3 , CB2 1, CB2 1, CB2a , CB2b measured current path CB1p, CB2p, CB3p measured side parallel section portion NB, NB 1, NB 2, NB 3, NBa, NBb, NBc close current paths NBp close side parallel section portion 101, 102, 103, C111, C121, C132, C142 Current sensor

Claims (3)

  1. 　被測定電流が流れる被測定電流路と、
    前記被測定電流路と平行に配置された近隣側平行区間部を有する近隣電流路と、
    被測定電流路に前記被測定電流が流れたときに発生する磁界を検出する第１磁気センサ及び第２磁気センサと、
    外部磁界の影響を低減するための磁気部材と、を備えた電流センサであって、
    　前記第１磁気センサ及び前記第２磁気センサは、前記近隣側平行区間部と平行に配置された前記被測定電流路の被測定側平行区間部を挟んで配設され、
    　前記第１磁気センサと前記第２磁気センサとで挟まれる位置の前記被測定側平行区間部に流れる電流の方向をＸ１方向とし、
    前記被測定電流路と前記近隣電流路とを横切る方向をＹ方向とし、
    前記第２磁気センサから前記第１磁気センサへ向かう方向をＺ１方向とすると、
    前記Ｘ１方向と前記Ｙ方向と前記Ｚ１方向とはそれぞれ直交し、
    　前記第１磁気センサ及び前記第２磁気センサの近傍において、前記近隣電流路の一部が前記Ｚ１方向側に曲がっており、
    　前記磁気部材が、前記第１磁気センサよりもＺ１方向側に設けられていることを特徴とする電流センサ。     A measured current path through which the measured current flows; and
    A neighboring current path having a neighboring parallel section disposed in parallel with the measured current path;
    A first magnetic sensor and a second magnetic sensor for detecting a magnetic field generated when the measured current flows through the measured current path;
    A current sensor comprising a magnetic member for reducing the influence of an external magnetic field,
    The first magnetic sensor and the second magnetic sensor are disposed across a measured-side parallel section of the measured current path disposed in parallel with the neighboring-side parallel section,
    The direction of the current flowing through the measured side parallel section at the position sandwiched between the first magnetic sensor and the second magnetic sensor is the X1 direction,
    A direction crossing the measured current path and the neighboring current path is a Y direction,
    When the direction from the second magnetic sensor toward the first magnetic sensor is the Z1 direction,
    The X1 direction, the Y direction, and the Z1 direction are orthogonal to each other,
    In the vicinity of the first magnetic sensor and the second magnetic sensor, a part of the neighboring current path is bent toward the Z1 direction side,
    The current sensor, wherein the magnetic member is provided closer to the Z1 direction than the first magnetic sensor.
  2. 　被測定電流が流れる被測定電流路と、
    前記被測定電流路と平行に配置された近隣側平行区間部を有する近隣電流路と、
    被測定電流路に前記被測定電流が流れたときに発生する磁界を検出する第１磁気センサ及び第２磁気センサと、
    外部磁界の影響を低減するための磁気部材と、を備えた電流センサであって、
    　前記第１磁気センサ及び前記第２磁気センサは、前記近隣側平行区間部と平行に配置された前記被測定電流路の被測定側平行区間部を挟んで配設され、
    　前記第１磁気センサと前記第２磁気センサとで挟まれる位置の前記被測定側平行区間部に流れる電流の方向をＸ１方向とし、
    前記被測定電流路と前記近隣電流路とを横切る方向をＹ方向とし、
    前記第２磁気センサから前記第１磁気センサへ向かう方向をＺ１方向とすると、
    前記Ｘ１方向と前記Ｙ方向と前記Ｚ１方向とはそれぞれ直交し、
    　前記第１磁気センサ及び前記第２磁気センサの近傍において、前記近隣電流路の一部が前記Ｚ１方向側に曲がっており、
    　前記磁気部材は、前記第１磁気センサよりもＺ１方向側に設けられた第１磁気部材と、前記第２磁気センサよりもＺ１方向側と反対のＺ２方向側に設けられた第２磁気部材と、を有し、
    　前記第２磁気部材は、前記第１磁気部材よりも小さいことを特徴とする電流センサ。     A measured current path through which the measured current flows; and
    A neighboring current path having a neighboring parallel section disposed in parallel with the measured current path;
    A first magnetic sensor and a second magnetic sensor for detecting a magnetic field generated when the measured current flows through the measured current path;
    A current sensor comprising a magnetic member for reducing the influence of an external magnetic field,
    The first magnetic sensor and the second magnetic sensor are disposed across a measured-side parallel section of the measured current path disposed in parallel with the neighboring-side parallel section,
    The direction of the current flowing through the measured side parallel section at the position sandwiched between the first magnetic sensor and the second magnetic sensor is the X1 direction,
    A direction crossing the measured current path and the neighboring current path is a Y direction,
    When the direction from the second magnetic sensor toward the first magnetic sensor is the Z1 direction,
    The X1 direction, the Y direction, and the Z1 direction are orthogonal to each other,
    In the vicinity of the first magnetic sensor and the second magnetic sensor, a part of the neighboring current path is bent toward the Z1 direction side,
    The magnetic member includes a first magnetic member provided closer to the Z1 direction than the first magnetic sensor, and a second magnetic member provided closer to the Z2 direction than the second magnetic sensor. Have
    The current sensor, wherein the second magnetic member is smaller than the first magnetic member.
  3. 　前記第１磁気センサ及び前記第２磁気センサの近傍において、前記被測定電流路の一部が前記Ｚ１方向側に曲がっていることを特徴とする請求項１または請求項２に記載の電流センサ。 3. The current sensor according to claim 1, wherein a part of the current path to be measured is bent toward the Z1 direction in the vicinity of the first magnetic sensor and the second magnetic sensor.
PCT/JP2014/002413 2013-05-23 2014-05-02 Current sensor WO2014188669A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015518065A JP6051459B2 (en) 2013-05-23 2014-05-02 Current sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-108801 2013-05-23
JP2013108801 2013-05-23

Publications (1)

Publication Number Publication Date
WO2014188669A1 true WO2014188669A1 (en) 2014-11-27

Family

ID=51933240

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/002413 WO2014188669A1 (en) 2013-05-23 2014-05-02 Current sensor

Country Status (2)

Country Link
JP (1) JP6051459B2 (en)
WO (1) WO2014188669A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019100923A (en) * 2017-12-05 2019-06-24 日立金属株式会社 Current sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03242559A (en) * 1990-02-19 1991-10-29 Furukawa Electric Co Ltd:The Method for measuring current by photo-magnetic field sensor
WO2003107018A1 (en) * 2002-06-18 2003-12-24 旭化成株式会社 Current measuring method and current measuring device
JP2005321206A (en) * 2004-05-06 2005-11-17 Mitsubishi Electric Corp Current detection device
JP2006112968A (en) * 2004-10-15 2006-04-27 Toyota Motor Corp Current detecting device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03242559A (en) * 1990-02-19 1991-10-29 Furukawa Electric Co Ltd:The Method for measuring current by photo-magnetic field sensor
WO2003107018A1 (en) * 2002-06-18 2003-12-24 旭化成株式会社 Current measuring method and current measuring device
JP2005321206A (en) * 2004-05-06 2005-11-17 Mitsubishi Electric Corp Current detection device
JP2006112968A (en) * 2004-10-15 2006-04-27 Toyota Motor Corp Current detecting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019100923A (en) * 2017-12-05 2019-06-24 日立金属株式会社 Current sensor
JP7003609B2 (en) 2017-12-05 2022-01-20 日立金属株式会社 Current sensor

Also Published As

Publication number Publication date
JPWO2014188669A1 (en) 2017-02-23
JP6051459B2 (en) 2016-12-27

Similar Documents

Publication Publication Date Title
JP5879595B2 (en) Current sensor
US9453890B2 (en) Magnetic sensor and magnetic detecting method of the same
JP5482736B2 (en) Current sensor
CN107533089B (en) Current sensor
US9964601B2 (en) Magnetic sensor
JP6427588B2 (en) Magnetic sensor
JP6690433B2 (en) Current sensor
JP6597370B2 (en) Magnetic sensor
JP2014134458A (en) Current sensor
JP6007381B2 (en) Method for determining position of magnetoelectric transducer of current sensor
JP2015036636A (en) Current sensor
CN109655767B (en) Integrated magnetic structure
JP5799882B2 (en) Magnetic sensor device
JP5849914B2 (en) Current sensor
JP6051459B2 (en) Current sensor
JP2014055791A (en) Current sensor
JP6185298B2 (en) Magnetic sensor
JP5678285B2 (en) Current sensor
JP5504483B2 (en) Current sensor
JP6671986B2 (en) Current sensor and method of manufacturing the same
JP2013142604A (en) Current sensor
JP2014098634A (en) Current sensor
JP5432082B2 (en) Semiconductor device with current detector
JP6076860B2 (en) Current detector
US11899047B1 (en) Magnetic field shaping for magnetic field current sensor

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14801455

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2015518065

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14801455

Country of ref document: EP

Kind code of ref document: A1