WO2014173010A1 - 一种异物检测装置 - Google Patents

一种异物检测装置 Download PDF

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Publication number
WO2014173010A1
WO2014173010A1 PCT/CN2013/078487 CN2013078487W WO2014173010A1 WO 2014173010 A1 WO2014173010 A1 WO 2014173010A1 CN 2013078487 W CN2013078487 W CN 2013078487W WO 2014173010 A1 WO2014173010 A1 WO 2014173010A1
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WO
WIPO (PCT)
Prior art keywords
detection device
foreign object
object detection
light
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/078487
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English (en)
French (fr)
Inventor
陈晖�
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US13/983,602 priority Critical patent/US9880104B2/en
Publication of WO2014173010A1 publication Critical patent/WO2014173010A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4735—Solid samples, e.g. paper, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Definitions

  • the invention belongs to the field of manufacturing technology of liquid crystal flat panel display, and particularly relates to a foreign matter detecting device which can be used for detecting foreign matter on a glass substrate. Background technique
  • Flat-panel displays such as LCD TVs and LCD computers are getting more and more popular.
  • foreign matter such as dust and other particles
  • a proximity exposure machine has a large mask area and is very close to the surface of the glass (for example, about 200 ⁇ m), so if it adheres to the opposite surface of the glass. If the foreign matter on the surface touches the reticle, it may cause damage or even scrap of the reticle.
  • An object of the present invention is to provide a foreign matter detecting device capable of detecting foreign matter on a glass substrate and reliably preventing the photomask from being scratched.
  • a foreign matter detecting device wherein the foreign matter detecting device includes a gantry, a guard column, a light emitter, and a light receiver, wherein the guard column is disposed on the gantry, and A slit having a predetermined height is formed between the guard column and the glass substrate, the light emitter and the light receiver are respectively located on opposite sides of the glass substrate, and the light emitter is used for Light is illuminated into the gap, the light receiver being for receiving light passing through the slit.
  • the predetermined height is from 100 micrometers to 800 micrometers.
  • the predetermined height is 200 ⁇ m.
  • the light emitter is a laser emitter.
  • the optical receiver is a CCD image sensor.
  • the foreign object detecting device further includes a driving portion and a controller, wherein the driving portion is configured to drive the guard column, the light emitter and the light receiver to synchronously move, the control The device is configured to control the driving portion, the light emitter, and the light receiver.
  • the foreign object detecting device further includes a driving part and a controller,
  • the driving part is configured to drive the guard column, the light emitter and the light receiver to synchronously move
  • the controller is configured to control the driving part, the light emitter and the light receiver.
  • the foreign object detecting device further includes a driving portion and a controller, wherein the driving portion is configured to drive the guard column, the light emitter and the light receiver to synchronously move, the control The device is configured to control the driving portion, the light emitter, and the light receiver.
  • the foreign object detecting device further includes a driving portion and a controller, wherein the driving portion is configured to drive the guard column, the light emitter and the light receiver to synchronously move, the control The device is configured to control the driving portion, the light emitter, and the light receiver.
  • the foreign object detecting device further includes a police device, the alarm device being connected to the controller to control the alarm by the controller when the light receiver detects an abnormality The device sounds an alarm.
  • the guard column is connected to the gantry by a plurality of bolts, and the guard column is provided with a plurality of countersunk through holes, and the heads of the plurality of bolts are located at the plurality of bolts.
  • the counterbore through holes are bored, and the threaded portions of the plurality of bolts pass through the plurality of countersunk through holes to be connected to the gantry.
  • the plurality of bolts are sleeved with a compression spring, and two sides of the compression spring are respectively pressed against the bottom surface of the gantry and the top surface of the protection column.
  • the foreign matter detecting device further includes a plurality of vibration detecting elements for detecting vibration of the guard column.
  • the plurality of vibration detecting elements are all electronic digital display meters, and the electronic digital display meter is used for measuring the movement of the top surface of the guard column in the height direction, and The moved data is output to the controller.
  • the foreign matter detecting device includes a gantry, a guard column, a light emitter, and a light receiver, and the guard pillar and the glass substrate are formed with a prior a gap of a set height, the light emitter and the light receiver are respectively located on opposite sides of the glass substrate, and the light receiver detects light emitted by the light emitter and passing through the slit, When there is a foreign matter on the glass substrate, a change in light intensity is caused, thereby detecting the presence of foreign matter.
  • the foreign matter detecting device of the present invention is particularly useful for detecting foreign matter on a glass substrate in the process of a thin film transistor, and effectively preventing the photomask from being damaged or even discarded due to foreign matter such as particles.
  • FIG. 1 is a front elevational view of a foreign matter detecting device in accordance with the present invention.
  • Fig. 2 is a side view showing the foreign matter detecting device of Fig. 1.
  • Fig. 3 is a schematic electrical control block diagram of the foreign matter detecting device of Fig. 1.
  • the foreign matter detecting device of the present invention can be used for detecting foreign matter on the glass substrate 100 in a TFT process, and preventing the photomask or the like from being scratched by foreign matter (e.g., particles, dust, particles, etc.) on the glass substrate.
  • foreign matter e.g., particles, dust, particles, etc.
  • the foreign matter detecting device includes a gantry 202, a protect bar 204, a light emitter 300, and a light receiver 400.
  • the guard column 204 is disposed on the gantry 202.
  • a slit 220 having a predetermined height H is formed between the guard column 204 and the glass substrate 100.
  • the predetermined height H is from 100 micrometers to 800 micrometers.
  • the preset height H is equivalent to the height of the particles. In a specific application of the invention, the predetermined height H is about 200 microns.
  • the light emitter 300 and the light receiver 400 are respectively located on opposite sides of the glass substrate 100.
  • the light emitter 300 and the light receiver 400 are oppositely disposed.
  • the light emitter 300 is for illuminating light into the slit 220.
  • the light receiver 400 is configured to receive light passing through the slit 220. Thereby, the presence and size of the foreign matter are judged based on whether or not the irradiated light is blocked and shielded.
  • the light emitter 300 is a laser emitter 300.
  • the optical receiver 400 is a CCD image sensor.
  • the foreign matter detecting device further includes a driving unit 212 and a controller 10.
  • the driving portion 212 is configured to drive the guard column 204, the light emitter 300, and the light receiver 400 to move in synchronism.
  • the guard column 204, the light emitter 300, and the light receiver 400 perform a scanning motion detection operation, and the glass substrate 100 can remain stationary.
  • the scanning direction may be the length direction X or the width direction Y of the glass substrate 100.
  • the controller 10 is configured to control the driving portion 212, the light emitter 300, and the light receiver 400.
  • the foreign matter detecting device further includes an alarm 500.
  • the alarm device 500 is connected to the controller 10 to control the alarm device 500 to emit an alarm signal such as an audible alarm, a color alarm, etc., to notify the operator when the optical receiver 400 detects an abnormality. Handle accordingly.
  • the scanned light beam passes through the foreign matter, the foreign matter shields the light in the slit 220, and the intensity signal of the received light of the light receiver 400 decreases.
  • the specific height of the foreign matter can be calculated by the degree of decrease in the intensity signal of the light of the light receiver 400 (CCD image sensor).
  • foreign matter of different widths can be detected by setting the effective detection width of the photoreceiver 400.
  • the light receiver 400 (CCD image sensor) can divide the received light into a plurality of regions in the height direction Z.
  • the light intensity of the area in each height direction Z is recorded as a scanning signal.
  • the light receiver 400 substantially completely receives the light from the light emitter 300 through the slit 220 during scanning, and the scanning signal remains substantially stable at all times.
  • the photoreceiver 400 receives a transient regional brightness reduction.
  • the alarm device 500 can be controlled by the controller 10 to issue an alarm to notify the operator to perform corresponding processing.
  • the guard column 204 is suspended from the gantry 202 by a plurality of bolts 206.
  • the guard column 204 is provided with a plurality of countersunk through holes 212.
  • the heads of the plurality of bolts 206 are located within the plurality of countersunk through holes 212.
  • the threaded portions of the plurality of bolts 206 pass through the plurality of countersunk through holes 212 to be coupled to the gantry 202.
  • the number of bolts 206 and the number of countersunk through holes 212 are four.
  • the present invention is not limited thereto, and the number of the bolts 206 and the number of the countersunk through holes 212 may be more or less.
  • a compression spring 210 is sleeved on the plurality of bolts 206. The two sides of the compression spring 210 are respectively pressed against the bottom surface of the gantry 202 and the top surface of the guard column 204.
  • the foreign matter detecting device further includes a plurality of vibration detecting elements 208 for detecting vibration of the guard column 204.
  • the plurality of vibration detecting elements 208 are fixed to the stage 102.
  • the plurality of vibration detecting elements 208 are all electronic digital display meters.
  • the electronic digital display is used to measure the movement of the top surface of the guard column 204 in the height direction Z.
  • the mobile data is output to the controller 10 via a cable.
  • the controller 10 can calculate the height change or the change rate of the guard column 204 within a predetermined time by using the vibration detecting software, and further determine whether the guard column 204 is blocked by the foreign object, and further determine that the height H is higher than or equal to the preset height H. The presence of foreign bodies.
  • a slit 220 corresponding to the height of the target foreign matter is formed between the guard column 204 and the glass substrate 100 (the preset height H can be adjusted as needed).
  • a laser beam passing through the slit 220 can be used to form a light beam having a height equal to a predetermined height H of several hundred micrometers.
  • the light receiver 400 may have an effective receiving width corresponding to a width of a foreign object. Thereby a change in the light intensity is detected within this width range.
  • the higher foreign matter when the transparency is high and the hard foreign matter is not detected (missing), the higher foreign matter does not enter the slit 220. And the higher foreign matter collides with the guard column 204 to generate vibration. At this time, the vibration of the guard column 204 is detected by the plurality of vibration detecting elements 208, the presence of such foreign matter is detected, and the double insurance function is achieved, and the leakage detection of the foreign matter is further reliably prevented.
  • the gap 220 can be used to achieve more precise control of setting the foreign matter height detection.
  • the vibration monitoring can directly detect foreign objects with a specified height through physical detection, compensate for blind spots or missed detection of optical detection, and can effectively prevent the mask from being scratched by large particles of hard foreign matter and completely unable to repair the quartz layer. risks of.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

一种异物检测装置，所述异物检测装置包括台架（202）、保护柱（204）、光发射器（300）及光接收器（400），所述保护柱（204）设置在所述台架（202）上，且所述保护柱（204）与所述玻璃基板（100）之间形成有具有预先设定的高度的缝隙（220），所述光发射器（300）和所述光接收器（400）分别位于所述玻璃基板（100）的相对两侧，且所述光发射器（300）用于朝所述缝隙（220）内照射光，所述光接收器（400）用于接收经过所述缝隙（220）的光，当玻璃基板上有异物时，则会引起光的强度的变化，从而检测出异物的存在。本发明的异物检测装置尤其可用于在薄膜晶体管的制程中检测玻璃基板上的异物，有效防止光罩因微粒等异物产生损伤甚至报废。

Description

一种异物检测装置 技术领域
本发明属于液晶平板显示的制造技术的领域， 尤其涉及一种异物检测装置， 其可用于检测玻璃基板上的异物。 背景技术
液晶电视、 液晶电脑等平板显示器越来越受到大众的欢迎。 在平板显示器的 制造产业中， 异物（例如尘埃等微粒）是影响生产之重要问题。 例如， 在薄膜晶 体管的制程（TFT process ) 中， 接近式曝光机因光罩（Mask ) 面积大， 距离玻璃 反的表面距离非常近 (例如 200微米左右）， 因此如果粘附在玻璃 反的表面上 的异物碰到光罩， 则可能致使光罩产生损伤甚至报废。 发明内容
本发明的目的在于， 提供一种异物检测装置， 其能够检测出玻璃基板上异物， 可靠地防止光罩被刮伤。
本发明通过如下技术方案实现： 一种异物检测装置， 其中， 所述异物检测装 置包括台架、 保护柱、 光发射器及光接收器， 所述保护柱设置在所述台架上， 且 所述保护柱与所述玻璃基板之间形成有具有预先设定的高度的缝隙， 所述光发射 器和所述光接收器分别位于所述玻璃基板的相对两侧， 且所述光发射器用于朝所 述缝隙内照射光， 所述光接收器用于接收经过所述缝隙的光。
作为上述技术方案的进一步改进， 所述预先设定的高度为 100微米至 800微 米。
作为上述技术方案的进一步改进， 所述预先设定的高度为 200微米。
作为上述技术方案的进一步改进， 所述光发射器为激光发射器。
作为上述技术方案的进一步改进， 所述光接收器为 CCD图像传感器。
作为上述技术方案的进一步改进， 所述异物检测装置还包括驱动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器同步运动， 所述 控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
作为上述技术方案的进一步改进， 所述异物检测装置还包括驱动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器同步运动， 所述 控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
作为上述技术方案的进一步改进， 所述异物检测装置还包括驱动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器同步运动， 所述 控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
作为上述技术方案的进一步改进， 所述异物检测装置还包括驱动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器同步运动， 所述 控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
作为上述技术方案的进一步改进， 所述异物检测装置还包括警 ·艮器， 所述警 报器与所述控制器连接以在所述光接收器检测出异常时通过所述控制器控制所述 警报器发出警报。
作为上述技术方案的进一步改进， 所述保护柱通过多个螺栓连接在所述台架 上， 所述保护柱上设有多个沉头通孔， 所述多个螺栓的头部位于所述多个沉头通 孔内 , 且所述多个螺栓的螺纹部穿出所述多个沉头通孔连接在所述台架上。
作为上述技术方案的进一步改进， 所述多个螺栓上均套设有压缩弹簧， 所述 压缩弹簧的两侧分别 4氏压在所述台架的底面和所述保护柱的顶面上。
作为上述技术方案的进一步改进， 所述异物检测装置还包括多个振动检测元 件， 所述多个振动检测元件用于检测保护柱的振动。
作为上述技术方案的进一步改进， 所述多个振动检测元件均为电子数显千分 计， 所述电子数显千分计用于测量所述保护柱的顶面在高度方向上的移动， 并将 该移动的数据输出给所述控制器。
本发明的有益效果是： 根据本发明的异物检测装置， 所述异物检测装置包括 台架、 保护柱、 光发射器及光接收器， 所述保护柱与所述玻璃基板之间形成有具 有预先设定的高度的缝隙， 所述光发射器和所述光接收器分别位于所述玻璃基板 的相对两侧， 所述光接收器检测由所述光发射器发出且经过所述缝隙的光， 当玻 璃基板上有异物时， 则会引起光强度的变化， 从而检测出异物的存在。 本发明的 异物检测装置尤其可用于在薄膜晶体管的制程中检测玻璃基板上的异物， 有效防 止光罩因微粒等异物产生损伤甚至报废。
附图说明 图 1是根据本发明的异物检测装置的正面示意图。
图 2是图 1的异物检测装置的侧面示意图。
图 3是图 1的异物检测装置的示意性电气控制框图。
具体实施方式
以下结合附图对本发明的具体实施方式进行进一步的说明。
本发明的异物检测装置可用于在薄膜晶体管的制程（TFT process ) 中检测玻 璃基板 100上的异物， 防止光罩等被玻璃基板上的异物（例如微粒、 粉尘、 颗粒 等）刮伤。
如图 1和图 2所示，所述异物检测装置包括台架（gantry ) 202、保护柱（protect bar ) 204、光发射器 300及光接收器 400。所述保护柱 204设置在所述台架 202上。 且所述保护柱 204与所述玻璃基板 100之间形成有具有预先设定的高度 H的缝隙 220。 所述预先设定的高度 H为 100微米至 800微米。 预先设定的高度 H与微粒 的高度相当。 在本发明的一个具体应用例中， 预先设定的高度 H为约 200微米。
如图 1所示， 所述光发射器 300和所述光接收器 400分别位于所述玻璃基板 100的相对两侧。 所述光发射器 300和所述光接收器 400相对配置。且所述光发射 器 300用于朝所述缝隙 220内照射光。 相应地， 所述光接收器 400用于接收经过 所述缝隙 220的光。 由此， 根据照射的光是否被遮蔽以及遮蔽的程度， 判断出异 物的存在及大小。 本例中， 所述光发射器 300为激光发射器 300。 而且， 所述光接 收器 400为 CCD图像传感器。
本例中， 如图 3所示， 所述异物检测装置还包括驱动部 212及控制器 10。 所 述驱动部 212用于驱动所述保护柱 204、所述光发射器 300及所述光接收器 400同 步运动。 在进行异物检测时， 所述保护柱 204、 所述光发射器 300及所述光接收器 400进行扫描方式的检测运动， 玻璃基板 100可保持静止。扫描方向可以为玻璃基 板 100的长度方向 X或宽度方向 Y。 所述控制器 10用于控制所述驱动部 212、 所 述光发射器 300及所述光接收器 400。
此外， 所述异物检测装置还包括警报器 500。 所述警报器 500与所述控制器 10连接，以便在所述光接收器 400检测出异常时通过所述控制器 10控制所述警报 器 500发出声音警报、 颜色警报等警报信号， 通知操作人员进行相应处理。 当扫描的光束经过异物时， 异物会对缝隙 220内的光进行遮蔽， 光接收器 400 的接收的光的强度信号降低。 而且， 可利用光接收器 400 ( CCD图像传感器） 的 光的强度信号降低的程度来计算出异物的具体高度。 而且， 并可通过设定光接收 器 400的有效检出宽度， 检出不同宽度的异物。
具体而言， 光接收器 400 ( CCD图像传感器）可在高度方向 Z上将接收的光 分为若干个区域。 每个高度方向 Z上的区域的光强均记录为扫描信号。 当没有异 物存在时， 扫描过程中光接收器 400基本上完整地接收到光发射器 300发出的经 过缝隙 220的光， 且扫描信号基本上始终保持稳定。 而当扫描过程中缝隙 220内 出现异物时， 光接收器 400会接收到瞬时的区域性的亮度降低。 此时， 可通过控 制器 10控制所述警报器 500发出警报， 通知操作人员进行相应处理。
如图 1和图 2所示， 所述保护柱 204通过多个螺栓 206悬置在所述台架 202 上。 其中， 所述保护柱 204上设有多个沉头通孔 212。 所述多个螺栓 206的头部位 于所述多个沉头通孔 212内。 而且， 所述多个螺栓 206的螺纹部穿出所述多个沉 头通孔 212连接在所述台架 202上。 图中， 螺栓 206的数量和沉头通孔 212的数 量均为 4个。 然而， 本发明不限于此， 螺栓 206的数量和沉头通孔 212的数量可 以为更多或更少。 此外， 所述多个螺栓 206上均套设有压缩弹簧 210。 所述压缩弹 簧 210的两侧分别 4氏压在所述台架 202的底面和所述保护柱 204的顶面上。
本发明的异物检测装置中， 所述异物检测装置还包括多个振动检测元件 208, 所述多个振动检测元件 208用于检测保护柱 204的振动。 所述多个振动检测元件 208固定在所述台架 102上。 本例中， 所述多个振动检测元件 208均为电子数显千 分计。 所述电子数显千分计用于测量所述保护柱 204的顶面在高度方向 Z上的移 动。 并将该移动数据经电缆输出给所述控制器 10。控制器 10可以通过振动检测软 件， 计算出保护柱 204在规定时间内的高度变化量或变化率， 进而判断保护柱 204 是否被异物阻挡， 进而判断出高于或等于预先设定的高度 H的异物的存在。
本发明的异物检测装置， 利用保护柱 204与玻璃基板 100之间形成与目标异 物高度相当的缝隙 220 (预先设定的高度 H可根据需要设定调整）。 由此， 可利用 穿过缝隙 220的激光束， 形成高度与预先设定的高度 H相等的数百微米的光束。 当玻璃基板 100上有异物时， 则会引起光接收器 400的光接收强度的变化， 从而 检测出异物的存在。 另夕卜， 光接收器 400可具有宽度与异物相当的有效接收宽度， 由此在该宽度范围内检测光强的变化。
根据本发明的异物检测装置， 当透明度较高且坚硬异物未被检出 （漏检）时， 该较高的异物不会进入缝隙 220。且该较高的异物与保护柱 204碰撞产生振动。 此 时， 通过多个振动检测元件 208检测保护柱 204的振动， 检测出该类异物的存在， 达到双重保险的作用， 进一步可靠地防止异物的漏检。
根据本发明的异物检测装置， 利用缝隙 220可以达到更精确的控制设定异物 高度检出。 此外， 振动的监控能通过物理侦测对具有规定高度的异物进行直接侦 测， 补偿光学检出的盲点或漏检， 且可有效防止光罩被大颗粒坚硬异物刮伤石英 层而彻底无法修复的风险。
以上具体实施方式对本发明进行了详细的说明， 但这些并非构成对本发明的 限制。 本发明的保护范围并不以上述实施方式为限， 但凡本领域普通技术人员根 据本发明所揭示内容所作的等效修饰或变化， 皆应纳入权利要求书中记载的保护 范围内。

Claims

权 利 要 求 书
1、 一种异物检测装置， 其中， 所述异物检测装置包括台架、 保护柱、 光发射 器及光接收器， 所述保护柱设置在所述台架上， 且所述保护柱与所述玻璃基板之 间形成有具有预先设定的高度的缝隙， 所述光发射器和所述光接收器分別位于所 述玻璃基板的相对两侧， 且所述光发射器用于朝所述缝隙内照射光， 所述光接收 器用于接收经过所述缝隙的光。
2、 根据权利要求 1所述的异物检测装置， 其中， 所述预先设定的高度为 100 孩 至 800 i米。
3、 根据权利要求 1所述的异物检测装置， 其中， 所述预先设定的高度为 200
»。
4、根据权利要求 1所述的异物检测装置，其中， 所述光发射器为激光发射器。
5、 根据权利要求 1所述的异物检测装置， 其中， 所述光接收器为 CCD图像 传感器。
6、 根据权利要求 1所述的异物检测装置， 其中， 所述异物检测装置还包括驱 动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器 同步运动， 所述控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
7、 根据权利要求 2所述的异物检测装置， 其中， 所述异物检测装置还包括驱 动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器 同步运动， 所述控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
8、 根据权利要求 3所述的异物检测装置， 其中， 所述异物检测装置还包括驱 动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器 同步运动， 所述控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
9、 根据权利要求 4所述的异物检测装置， 其中， 所述异物检测装置还包括驱 动部及控制器， 所述驱动部用于驱动所述保护柱、 所述光发射器及所述光接收器 同步运动， 所述控制器用于控制所述驱动部、 所述光发射器及所述光接收器。
10、 根据权利要求 6所述的异物检测装置， 其中， 所述异物检测装置还包括 警报器， 所述警报器与所述控制器连接以在所述光接收器检测出异常时通过所述 控制器控制所述警报器发出警报。
11、 根据权利要求 10所述的异物检测装置， 其中， 所述保护柱通过多个螺栓 连接在所述台架上， 所述保护柱上设有多个沉头通孔， 所述多个螺栓的头部位于 所述多个沉头通孔内 , 且所述多个螺栓的螺纹部穿出所述多个沉头通孔连接在所 述台架上。
12、 根据权利要求 11所述的异物检测装置， 其中， 所述多个螺栓上均套设有 压缩弹簧， 所述压缩弹簧的两侧分别 4氏压在所述台架的底面和所述保护柱的顶面 上。
13、 根据权利要求 12所述的异物检测装置， 其中， 所述异物检测装置还包括 多个振动检测元件， 所述多个振动检测元件用于检测保护柱的振动。
14、 根据权利要求 13所述的异物检测装置， 其中， 所述多个振动检测元件均 为电子数显千分计， 所述电子数显千分计用于测量所述保护柱的顶面在高度方向 上的移动， 并将该移动的数据输出给所述控制器。
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