WO2014124857A3 - Agencement d'alimentation conçu pour fournir de l'énergie électrique à des procédés industriels - Google Patents

Agencement d'alimentation conçu pour fournir de l'énergie électrique à des procédés industriels Download PDF

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Publication number
WO2014124857A3
WO2014124857A3 PCT/EP2014/052282 EP2014052282W WO2014124857A3 WO 2014124857 A3 WO2014124857 A3 WO 2014124857A3 EP 2014052282 W EP2014052282 W EP 2014052282W WO 2014124857 A3 WO2014124857 A3 WO 2014124857A3
Authority
WO
WIPO (PCT)
Prior art keywords
direct
current
power
converter
output
Prior art date
Application number
PCT/EP2014/052282
Other languages
English (en)
Other versions
WO2014124857A2 (fr
Inventor
Pawel Ozimek
Andrzej Klimczak
Krzysztof Ruda
Original Assignee
Trumpf Huettinger Sp. Z O.O.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Huettinger Sp. Z O.O. filed Critical Trumpf Huettinger Sp. Z O.O.
Publication of WO2014124857A2 publication Critical patent/WO2014124857A2/fr
Publication of WO2014124857A3 publication Critical patent/WO2014124857A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32944—Arc detection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/12—Arrangements for reducing harmonics from ac input or output
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
    • H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
    • H02M3/1584—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load with a plurality of power processing stages connected in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dc-Dc Converters (AREA)
  • Direct Current Feeding And Distribution (AREA)
  • Power Conversion In General (AREA)
  • Inverter Devices (AREA)

Abstract

Cette invention concerne un agencement d'alimentation (10, 100) conçu pour fournir de l'énergie électrique à des procédés industriels, comprenant : a) un convertisseur de courant continu (13) présentant une entrée (12) destinée à être connectée à une tension continue et fournissant à sa sortie (18) une tension de circuit intermédiaire; b) un convertisseur (23) qui est connecté à la sortie (18) du convertisseur de courant continu (13) et qui est conçu pour produire une tension alternative ou une tension continue pulsée et pour la fournir en sortie à sa sortie (18); c) la sortie (18) du convertisseur de courant continu étant directement reliée à l'entrée (12) du convertisseur de courant continu (13) au moyen d'un élément non linéaire (40) ou par connexion série comprenant une pluralité d'éléments non linéaires (102, 103).
PCT/EP2014/052282 2013-02-14 2014-02-06 Agencement d'alimentation conçu pour fournir de l'énergie électrique à des procédés industriels WO2014124857A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013202428.2A DE102013202428A1 (de) 2013-02-14 2013-02-14 Leistungsversorgungsanordnung zur Versorgung industrieller Prozesse mit Leistung
DE102013202428.2 2013-02-14

Publications (2)

Publication Number Publication Date
WO2014124857A2 WO2014124857A2 (fr) 2014-08-21
WO2014124857A3 true WO2014124857A3 (fr) 2015-05-07

Family

ID=50070549

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/052282 WO2014124857A2 (fr) 2013-02-14 2014-02-06 Agencement d'alimentation conçu pour fournir de l'énergie électrique à des procédés industriels

Country Status (2)

Country Link
DE (1) DE102013202428A1 (fr)
WO (1) WO2014124857A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11848176B2 (en) 2020-07-31 2023-12-19 Applied Materials, Inc. Plasma processing using pulsed-voltage and radio-frequency power

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Publication number Priority date Publication date Assignee Title
DE102014220094A1 (de) * 2014-10-02 2016-04-07 TRUMPF Hüttinger GmbH + Co. KG Verfahren zum Betrieb eines MF-Leistungsgenerators und MF-Leistungsgenerator
EP3035365A1 (fr) 2014-12-19 2016-06-22 TRUMPF Huettinger Sp. Z o. o. Procédé de détection d'un arc se produisant au cours de l'alimentation électrique d'un traitement au plasma, unité de commande pour une alimentation électrique de plasma et alimentation en plasma
US11476145B2 (en) 2018-11-20 2022-10-18 Applied Materials, Inc. Automatic ESC bias compensation when using pulsed DC bias
WO2020154310A1 (fr) 2019-01-22 2020-07-30 Applied Materials, Inc. Circuit rétroactif destiné à contrôler une forme d'onde de tension pulsée
US11508554B2 (en) 2019-01-24 2022-11-22 Applied Materials, Inc. High voltage filter assembly
US11901157B2 (en) 2020-11-16 2024-02-13 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11798790B2 (en) 2020-11-16 2023-10-24 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11495470B1 (en) 2021-04-16 2022-11-08 Applied Materials, Inc. Method of enhancing etching selectivity using a pulsed plasma
US11791138B2 (en) 2021-05-12 2023-10-17 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11948780B2 (en) 2021-05-12 2024-04-02 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11967483B2 (en) 2021-06-02 2024-04-23 Applied Materials, Inc. Plasma excitation with ion energy control
US11984306B2 (en) 2021-06-09 2024-05-14 Applied Materials, Inc. Plasma chamber and chamber component cleaning methods
US11810760B2 (en) 2021-06-16 2023-11-07 Applied Materials, Inc. Apparatus and method of ion current compensation
US11569066B2 (en) 2021-06-23 2023-01-31 Applied Materials, Inc. Pulsed voltage source for plasma processing applications
US11476090B1 (en) 2021-08-24 2022-10-18 Applied Materials, Inc. Voltage pulse time-domain multiplexing
US12106938B2 (en) 2021-09-14 2024-10-01 Applied Materials, Inc. Distortion current mitigation in a radio frequency plasma processing chamber
US11694876B2 (en) 2021-12-08 2023-07-04 Applied Materials, Inc. Apparatus and method for delivering a plurality of waveform signals during plasma processing
US11972924B2 (en) 2022-06-08 2024-04-30 Applied Materials, Inc. Pulsed voltage source for plasma processing applications

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3737755A (en) * 1972-03-22 1973-06-05 Bell Telephone Labor Inc Regulated dc to dc converter with regulated current source driving a nonregulated inverter
JPH04271283A (ja) * 1991-02-25 1992-09-28 Okuma Mach Works Ltd 高周波電源装置
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19937859C2 (de) * 1999-08-13 2003-06-18 Huettinger Elektronik Gmbh Elektrische Versorgungseinheit für Plasmaanlagen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3737755A (en) * 1972-03-22 1973-06-05 Bell Telephone Labor Inc Regulated dc to dc converter with regulated current source driving a nonregulated inverter
JPH04271283A (ja) * 1991-02-25 1992-09-28 Okuma Mach Works Ltd 高周波電源装置
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11848176B2 (en) 2020-07-31 2023-12-19 Applied Materials, Inc. Plasma processing using pulsed-voltage and radio-frequency power

Also Published As

Publication number Publication date
WO2014124857A2 (fr) 2014-08-21
DE102013202428A1 (de) 2014-08-14

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